JP2007152171A - Method and apparatus for purification of exhaust gas - Google Patents

Method and apparatus for purification of exhaust gas Download PDF

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JP2007152171A
JP2007152171A JP2005347815A JP2005347815A JP2007152171A JP 2007152171 A JP2007152171 A JP 2007152171A JP 2005347815 A JP2005347815 A JP 2005347815A JP 2005347815 A JP2005347815 A JP 2005347815A JP 2007152171 A JP2007152171 A JP 2007152171A
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treatment
exhaust gas
liquid
aldehydes
scrubber
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JP4566896B2 (en
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Shuichi Sako
修一 佐古
Junji Miyoshi
淳司 三好
Kazuhiro Morita
一弘 森田
Hiroshi Akutagawa
宏 芥川
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for purification of exhaust gas containing acids and aldehydes which substantially reduce equipment and running costs, eliminate working risks and allow saving of energy and/or space. <P>SOLUTION: The apparatus has the first scrubber 2 which brings exhaust gas into gas-liquid contact with treating water circulated with a circulation pump 7 and the second scrubber 3 which brings the exhaust gas treated by the first scrubber 2 into gas-liquid contact with treating liquid circulated with circulation pumps 15a and 15b. Exhaust gas is brought into gas-liquid contact with treating water in the first scrubber 2 to generate acidic mist consisting of acids and water, and the exhaust gas containing the generated acidic mist is brought into gas-liquid contact with the treating liquid containing a treating agent for aldehydes in the second scrubber 3 to make aldehydes harmless. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、半導体製造工程等から排出される酸類とアルデヒド類を含有する混合排ガスを浄化処理する排ガス浄化処理方法及び装置に関するものである。   The present invention relates to an exhaust gas purification method and apparatus for purifying mixed exhaust gas containing acids and aldehydes discharged from a semiconductor manufacturing process or the like.

従来、硫酸等の酸類とアルデヒド類を含有する混合排ガスを湿式で浄化処理する薬液洗浄方式においては、亜硫酸ソーダ水を用いた洗浄浄化技術が用いられてきた。この亜硫酸ソーダ水を用いた洗浄浄化技術の具体構成例を図２を参照して説明すると、気液接触させる薬液洗浄装置（以下、スクラバーと称する）を複数段に設けるとともに、それぞれにおいて、酸性薬液と、アルデヒド類を吸収浄化する処理薬液としての亜硫酸ソーダ液を供給し、かつ各スクラバーにＰＨ計や導電率計を設けて各段のスクラバー内の洗浄水の濃度を制御するように構成されていた。すなわち、アルデヒド類を亜硫酸ソーダにて吸着除去するためには、亜硫酸ソーダを酸側にしなければ吸着できないので、酸性薬液と処理薬液である亜硫酸ソーダ液をスクラバーに供給するように構成されていた。   2. Description of the Related Art Conventionally, cleaning and purification techniques using sodium sulfite water have been used in a chemical cleaning method in which mixed exhaust gas containing acids such as sulfuric acid and aldehydes is purified by a wet process. A specific configuration example of the cleaning and purifying technique using this sodium sulfite water will be described with reference to FIG. 2. A chemical cleaning apparatus (hereinafter referred to as a scrubber) that makes gas-liquid contact is provided in a plurality of stages. And a sodium sulfite solution as a treatment chemical solution for absorbing and purifying aldehydes, and each scrubber is provided with a PH meter and a conductivity meter to control the concentration of cleaning water in each stage scrubber. It was. That is, in order to adsorb and remove aldehydes with sodium sulfite, it cannot be adsorbed unless sodium sulfite is placed on the acid side, so that an acidic chemical solution and a sodium sulfite solution as a treatment chemical solution are supplied to the scrubber.

図２において、各段のスクラバー３１、３２内に排ガス又はその中間処理ガスを順次導入して洗浄液と気液接触させることで排ガスを浄化するように構成している。各段のスクラバー３１、３２は、その洗浄液をそれぞれ所定の濃度に調整するため、各スクラバー３１、３２内に給水系統３３にて給水するとともに、希硫酸や濃硫酸などの酸性薬液と亜硫酸ソーダ液からなる処理薬液をそれぞれのタンク３４、３５から各々の供給ポンプ３６〜３９にて供給している。また、洗浄液を排ガスに気液接触させるため、循環ポンプ４０、４１にて循環させ、かつ水位計４３、４４にて一定水位に保って一部の過剰となった洗浄液をブロー排水管４２からブロー排水している。さらに、導電率計４５、４６やＰＨ計４７、４８で濃度を検出し、各段のスクラバー３１、３２内の洗浄液をそれぞれ所定の濃度に調整するように供給ポンプ３６〜３９を制御している。   In FIG. 2, the exhaust gas or its intermediate process gas is sequentially introduced into the scrubbers 31 and 32 at each stage, and the exhaust gas is purified by bringing it into gas-liquid contact with the cleaning liquid. The scrubbers 31 and 32 at each stage supply water in the scrubbers 31 and 32 by a water supply system 33 in order to adjust the cleaning liquid to a predetermined concentration, as well as acidic chemical solutions such as dilute sulfuric acid and concentrated sulfuric acid, and sodium sulfite solution. The processing chemical solution consisting of is supplied from the tanks 34 and 35 by the supply pumps 36 to 39. In addition, in order to bring the cleaning liquid into contact with the exhaust gas, it is circulated by the circulation pumps 40 and 41 and kept at a constant water level by the water level gauges 43 and 44, and a part of the excess cleaning liquid is blown from the blow drain pipe 42. Draining. Further, the concentration is detected by the conductivity meters 45 and 46 and the PH meters 47 and 48, and the supply pumps 36 to 39 are controlled so that the cleaning liquid in the scrubbers 31 and 32 at each stage is adjusted to a predetermined concentration. .

また、例えば、人造黒鉛製品の製造工程等から発生する排ガスから、それに含まれるタールミスト、ＳＯx などの酸性物質、及びアルデヒド類や芳香族物質等の炭化水素を除去する、湿式方式による排ガス処理方法として、排ガスをアルカリ溶液に気液接触させる第１の処理工程と、第１の処理工程で処理された排ガスを酸化剤含有アルカリ溶液に気液接触させる第２の処理工程と、第２の処理工程で処理された排ガスを水に気液接触させる第３の処理工程を備え、第１の処理工程でタールミストの大部分、酸性物質の大部分、沸点の高い炭化水素を除去し、第２の処理工程で第１の処理工程で除去されなかった、特に小粒径のタールミスト及び酸性物質、沸点の低い炭化水素を除去し、第３の処理工程で第２の処理工程で排ガス中に飛散した酸化剤含有アルカリ溶液の液滴を除去する方法が知られている（例えば、特許文献１参照。）。
特開昭５５−９７２２６号公報 Further, for example, a wet type exhaust gas treatment method that removes acidic substances such as tar mist and SOx, and hydrocarbons such as aldehydes and aromatic substances, from exhaust gas generated from the manufacturing process of artificial graphite products, etc. As a first processing step for bringing the exhaust gas into gas-liquid contact with the alkaline solution, a second processing step for bringing the exhaust gas treated in the first processing step into gas-liquid contact with the oxidant-containing alkaline solution, and a second processing A third treatment step of bringing the exhaust gas treated in the step into gas-liquid contact with water, removing most of the tar mist, most of the acidic substances, and high-boiling hydrocarbons in the first treatment step; In particular, the small-size tar mist, acidic substances, and hydrocarbons having a low boiling point that were not removed in the first treatment step are removed, and in the third treatment step, in the exhaust gas in the second treatment step. Scattered Method of removing droplets of the oxidizing agent-containing alkaline solution is known (e.g., see Patent Document 1.).
JP-A-55-97226

ところで、図２に示すような構成では、酸性薬液（希硫酸など）とアルカリ性の亜硫酸ソーダ液の両方を供給するようにしたスクラバーが複数段必要であるため、排ガス浄化処理装置を設置する時の設備コストと運営管理に対するランニングコストの双方において、高額の費用がかかるという問題がある。   By the way, in the configuration shown in FIG. 2, a plurality of scrubbers that supply both an acidic chemical solution (such as dilute sulfuric acid) and an alkaline sodium sulfite solution are required. There is a problem that both the equipment cost and the running cost for operation management are expensive.

また、酸性薬液は、処理薬液である亜硫酸ソーダ液によるアルデヒド類の吸収効果を安定して得るため、洗浄液を酸性側にＰＨ調整するために用いているものであるが、酸性薬液を取り扱うため、運営管理において取扱作業者への危険性があるという問題がある。   In addition, the acidic chemical solution is used to adjust the pH of the cleaning solution to the acidic side in order to stably obtain the effect of absorbing aldehydes by the sodium sulfite solution that is the treatment chemical solution, but to handle the acidic chemical solution, There is a problem that there is a danger to handling workers in the operation management.

なお、特許文献１に記載された排ガス処理方法は、処理対象の排ガスが異なるとともに、アルカリ溶液と酸化剤含有アルカリ溶液と水を用いて順次処理する方法が記載されているだけで、上記問題の解消を示唆するものではない。   Note that the exhaust gas treatment method described in Patent Document 1 is different from the exhaust gas to be treated, and only describes a method of sequentially treating using an alkali solution, an oxidant-containing alkali solution, and water. It does not suggest a resolution.

本発明は、上記従来の問題に鑑み、設備コスト及びランニングコストを大幅に低減できるとともに作業リスクが無くなり、また省エネルギー・省スペースを図ることができる排ガス浄化処理方法及び装置を提供することを目的とする。   An object of the present invention is to provide an exhaust gas purification processing method and apparatus that can significantly reduce facility costs and running costs, eliminate work risks, and save energy and space. To do.

本発明の排ガス浄化処理方法は、酸類とアルデヒド類を含有する排ガスを浄化処理する排ガス浄化処理方法であって、排ガスを処理水に気液接触させて酸類と水で酸性ミストを生成する第１の処理工程と、第１の処理工程で生成された酸性ミストを含む排ガスをアルデヒド類の処理薬液を含む処理液に気液接触させてアルデヒド類を無害化処理する第２の処理工程とを備えたものである。   The exhaust gas purification treatment method of the present invention is an exhaust gas purification treatment method for purifying exhaust gas containing acids and aldehydes, wherein the exhaust gas is brought into gas-liquid contact with treated water to generate an acid mist with the acids and water. And a second treatment step of detoxifying the aldehydes by bringing the exhaust gas containing the acidic mist generated in the first treatment step into gas-liquid contact with the treatment liquid containing a treatment chemical solution of aldehydes. It is a thing.

この構成によれば、排ガス中のＨＣｌに代表される酸類が第１の処理工程で処理水に気液接触して水に溶け込むことで浄化されるとともに酸性ミストが生成され、この酸性ミストを含む排ガスを第２の処理工程に導入してアルデヒド類の処理薬液を含む処理液に気液接触させることで、処理液が酸性ミストにより酸性側にＰＨ調整されるので、処理液によるアルデヒド類の吸収効果を安定して得ることができる。かくして、従来のように酸性薬液を供給する必要がないため、設備コストとランニングコストの双方の低減を図ることができ、また酸性薬液を取り扱う必要がないので、取扱作業者の危険性も無くなり、また一部設備が不要となるため、省エネルギー・省スペースを図ることができる。   According to this configuration, the acid represented by HCl in the exhaust gas is purified by gas-liquid contact with the treated water and dissolved in water in the first treatment step, and the acid mist is generated and contained. Since the exhaust gas is introduced into the second treatment step and brought into gas-liquid contact with the treatment liquid containing the treatment chemical solution for aldehydes, the pH of the treatment liquid is adjusted to the acidic side by the acid mist, so that the aldehydes are absorbed by the treatment liquid. The effect can be obtained stably. Thus, since it is not necessary to supply the acidic chemical solution as in the conventional case, both the equipment cost and the running cost can be reduced, and since there is no need to handle the acidic chemical solution, there is no risk of handling workers, In addition, energy saving and space saving can be achieved because some facilities are unnecessary.

また、第２の処理工程で処理液の電導率を計測し、所要の電導率となるように処理薬液の供給量を制御することで、処理液中の処理薬液の濃度を所定値に保つことができ、アルデヒド類を確実に吸収して除去することができる。   In addition, by measuring the conductivity of the treatment liquid in the second treatment step and controlling the supply amount of the treatment chemical liquid so that the required conductivity is obtained, the concentration of the treatment chemical liquid in the treatment liquid is maintained at a predetermined value. And aldehydes can be reliably absorbed and removed.

また、第２の処理工程で処理液のＰＨ値を計測し、所要のＰＨ値となるように第１の処理工程の処理水を第２の処理工程の処理液に供給することで、第２の処理工程に導入される酸性ミストが少ない場合にも、酸性の処理水が供給されることで処理液の酸性を確保してはアルデヒド類の吸収効果を確保することができる。   Further, the PH value of the treatment liquid is measured in the second treatment process, and the second treatment process is supplied with the treatment water of the first treatment process so that the required PH value is obtained. Even when there is little acidic mist introduced into the treatment step, it is possible to secure the acidity of the treatment liquid by supplying acidic treatment water to ensure the effect of absorbing aldehydes.

また、本発明の排ガス浄化処理装置は、酸類とアルデヒド類を含有する排ガスを浄化処理する排ガス浄化処理装置であって、排ガスを循環ポンプにて循環される処理水に気液接触させる第１の処理部と、第１の処理部で処理されて酸性ミストを含む排ガスをアルデヒド類の処理薬液を含むとともに循環ポンプにて循環される処理液に気液接触させる第２の処理部とを備えたものであり、上記排ガス浄化処理方法を実施してその効果を奏することができる。   Moreover, the exhaust gas purification treatment apparatus of the present invention is an exhaust gas purification treatment apparatus for purifying exhaust gas containing acids and aldehydes, wherein the exhaust gas is in gas-liquid contact with treated water circulated by a circulation pump. A processing unit, and a second processing unit that causes the exhaust gas that has been processed in the first processing unit and includes acid mist to contact the processing liquid that contains the processing chemical solution of aldehydes and that is circulated by a circulation pump, are provided. Therefore, the above-described exhaust gas purification treatment method can be carried out to achieve its effect.

また、第２の処理部に、その処理液の導電率を計測する導電率計と、導電率計による計測値に応じて処理薬液を供給する手段とを備えると、処理液中の処理薬液の濃度を所定値に保つことができ、アルデヒド類を確実に吸収して除去することができる。   Further, when the second processing unit is provided with a conductivity meter for measuring the conductivity of the processing liquid and means for supplying the processing chemical liquid according to the measurement value by the conductivity meter, the processing chemical liquid in the processing liquid The concentration can be maintained at a predetermined value, and aldehydes can be reliably absorbed and removed.

また、第２の処理部の処理液のＰＨ値を計測するＰＨ計と、ＰＨ計による計測値に応じて第１の処理部の処理水を第２の処理部に供給する手段とを備えると、酸性の処理水が供給されることで処理液の酸性を確保してはアルデヒド類の吸収効果を確保することができる。   In addition, a PH meter that measures the PH value of the treatment liquid of the second treatment unit, and a unit that supplies treated water of the first treatment unit to the second treatment unit according to the measurement value of the PH meter are provided. By supplying acidic treated water, it is possible to ensure the acidity of the treatment liquid and ensure the absorption effect of aldehydes.

本発明の排ガス浄化処理方法及び装置によれば、排ガス中の酸類が処理水に気液接触して水に溶け込むことで浄化されるとともに酸性ミストが生成され、この酸性ミストを含む排ガスをアルデヒド類の処理薬液を含む処理液に気液接触させることで、処理液が酸性ミストにより酸性側にＰＨ調整されて処理液によるアルデヒド類の吸収効果を安定して得ることができ、かくして酸性薬液を供給する必要がなく、設備コストとランニングコストの双方の低減を図ることができ、また酸性薬液を取り扱う必要がないので、取扱作業者の危険性も無くなり、また一部設備が不要となるため、省エネルギー・省スペースを図ることができる。   According to the exhaust gas purification treatment method and apparatus of the present invention, the acids in the exhaust gas are purified by gas-liquid contact with the treated water and dissolved in the water, and the acid mist is generated, and the exhaust gas containing the acid mist is converted into aldehydes. By making gas-liquid contact with the treatment liquid containing the treatment chemical solution, the pH of the treatment liquid is adjusted to the acidic side by the acidic mist, so that the effect of absorbing aldehydes by the treatment liquid can be stably obtained, thus supplying the acidic chemical liquid It is possible to reduce both equipment costs and running costs, and there is no need to handle acidic chemicals, so there is no danger of handling workers and some equipment is unnecessary, saving energy.・ Space saving can be achieved.

以下、本発明の排ガス浄化処理装置の一実施形態について図１を参照して説明する。   Hereinafter, an embodiment of the exhaust gas purification apparatus of the present invention will be described with reference to FIG.

図１において、本実施形態の排ガス浄化処理装置１は、排ガス中の酸類を処理水に気液接触させて酸性ミストを生成する酸系処理用の第１のスクラバー２と、酸性ミストを含む排ガスを、アルデヒド類の処理薬液を含む処理液に気液接触させてアルデヒド類を処理液に吸収させて無害化処理する第２のスクラバー３にて構成されている。第２のスクラバー３は、２段構成で、１段目処理を行う上段スクラバー部４ａと、２段目処理を行う下段スクラバー部４ｂとを備え、上段のスクラバー部４ａで処理された排ガスを下段のスクラバー部４ｂでさらに処理した後大気開放するように構成されている。上段と下段のスクラバー部４ａ、４ｂは基本的に同一構成である。   In FIG. 1, an exhaust gas purification treatment apparatus 1 of the present embodiment includes an acid-based first scrubber 2 that generates acid mist by bringing an acid in exhaust gas into gas-liquid contact with treated water, and an exhaust gas containing acid mist. Is made in gas-liquid contact with a treatment liquid containing a treatment chemical solution for aldehydes, and the aldehydes are absorbed into the treatment liquid to be detoxified. The second scrubber 3 has a two-stage configuration, and includes an upper scrubber section 4a that performs the first stage processing and a lower scrubber section 4b that performs the second stage processing, and the exhaust gas processed by the upper scrubber section 4a is disposed at the lower stage. The scrubber 4b is further processed to release the atmosphere. The upper and lower scrubber portions 4a and 4b have basically the same configuration.

第１のスクラバー２は、排ガスダクト５から導入された酸類とアルデヒド類を含有する排ガスを、給水系統６から給水されるとともに循環ポンプ７にて循環される処理水に気液接触させるように構成されている。また、水位計８とＰＨ計９が設けられ、水位とＰＨ値を所定範囲に保つように、給水系統６から適宜給水し、ブロー排水管１０から循環処理水の一部を排出するように構成されている。   The first scrubber 2 is configured so that the exhaust gas containing acids and aldehydes introduced from the exhaust gas duct 5 is brought into gas-liquid contact with the treated water supplied from the water supply system 6 and circulated by the circulation pump 7. Has been. In addition, a water level meter 8 and a PH meter 9 are provided, and water is appropriately supplied from the water supply system 6 so as to keep the water level and PH value within a predetermined range, and a part of the circulating treated water is discharged from the blow drain pipe 10. Has been.

第１のスクラバー２から排出された排ガスは、接続ダクト１１を通して第２のスクラバー３の上段スクラバー部４ａに供給される。上段スクラバー部４ａは、給水系統６から供給される水に、亜硫酸ソーダ液からなる薬液を収容した薬液タンク１２から供給ポンプ１３ａにて薬液供給管１４ａを通して供給された薬液を所定濃度となるように添加して成る処理液を収容しており、この処理液を循環ポンプ１５ａにて循環させ、導入された排ガスに気液接触させるように構成されている。   The exhaust gas discharged from the first scrubber 2 is supplied to the upper scrubber portion 4 a of the second scrubber 3 through the connection duct 11. The upper scrubber unit 4a adjusts the chemical supplied from the chemical liquid tank 12 containing the chemical liquid made of sodium sulfite liquid to the water supplied from the water supply system 6 through the chemical liquid supply pipe 14a by the supply pump 13a. The treatment liquid added is accommodated, and this treatment liquid is circulated by the circulation pump 15a so as to be brought into gas-liquid contact with the introduced exhaust gas.

上段スクラバー部４ａで処理液に気液接触して浄化処理された排ガスは、第２のスクラバー３内の連通路１６を通して下段スクラバー部４ｂに供給される。下段スクラバー部４ｂは、上段スクラバー部４ａと同様に給水系統６から供給される水に、亜硫酸ソーダ液からなる薬液を収容した薬液タンク１２から供給ポンプ１３ｂにて薬液供給管１４ｂを通して供給された薬液を所定濃度になるように添加して成る処理液を収容しており、この処理液を循環ポンプ１５ｂにて循環させて、導入された排ガスに気液接触させるように構成されている。下段スクラバー部４ｂで処理液に気液接触してさらに浄化処理された浄化排ガスは、排出ダクト１７を通して大気中に放出される。   The exhaust gas purified by gas-liquid contact with the processing liquid in the upper scrubber portion 4 a is supplied to the lower scrubber portion 4 b through the communication passage 16 in the second scrubber 3. The lower scrubber unit 4b is similar to the upper scrubber unit 4a. The chemical solution supplied from the chemical tank 12 containing the chemical solution consisting of sodium sulfite liquid to the water supplied from the water supply system 6 through the chemical supply pipe 14b by the supply pump 13b. Is stored in a predetermined concentration, and the processing liquid is circulated by a circulation pump 15b so that the introduced exhaust gas is brought into gas-liquid contact. Purified exhaust gas that has been further purified by contact with the treatment liquid in the lower scrubber portion 4 b is discharged into the atmosphere through the discharge duct 17.

上段スクラバー部４ａ及び下段スクラバー部４ｂには、第１のスクラバー２の処理水の一部を処理水供給管１８ａ、１８ｂを通して電動弁１９ａ、１９ｂを介して供給できるように構成されている。また、水位計２０ａ、２０ｂと、導電率計２１ａ、２１ｂと、ＰＨ計２２ａ、２２ｂがそれぞれ設けられている。そして、各スクラバー部４ａ、４ｂの水位が水位計２０ａ、２０ｂにて検出され、所定の水位を保つように過剰となった処理液の一部がブロー排水管２３を通して外部に排出される。また、処理液の導電率が導電率計２１ａ、２１ｂにて検出され、その検出値に基づいて供給ポンプ１３ａ、１３ｂが作動制御されて処理液中の薬液濃度が所定濃度に保たれる。また、処理液のＰＨ値がＰＨ計２２ａ、２２ｂにて検出され、その検出値に基づいて電動弁１９ａ、１９ｂが開閉制御され、処理液が所定の酸性に保たれる。   A part of the treated water of the first scrubber 2 can be supplied to the upper scrubber part 4a and the lower scrubber part 4b through the treated water supply pipes 18a and 18b through the motor operated valves 19a and 19b. Water level meters 20a and 20b, conductivity meters 21a and 21b, and PH meters 22a and 22b are provided, respectively. And the water level of each scrubber part 4a, 4b is detected by the water level gauges 20a, 20b, and a part of the processing liquid which has become excessive so as to maintain a predetermined water level is discharged to the outside through the blow drain pipe 23. Further, the conductivity of the processing liquid is detected by the conductivity meters 21a and 21b, and the supply pumps 13a and 13b are controlled based on the detected values, so that the chemical concentration in the processing liquid is maintained at a predetermined concentration. Further, the PH value of the processing liquid is detected by the PH meters 22a and 22b, and the motor operated valves 19a and 19b are controlled to open and close based on the detected values, so that the processing liquid is kept at a predetermined acidity.

薬液タンク１２は、固形の亜硫酸ソーダを薬剤計量供給装置２４にて計量供給し、給水系統６からそれに対応した所定量の水を供給することで、所定濃度の薬液を調製して収容するように構成されている。   The chemical liquid tank 12 measures and supplies solid sodium sulfite with the chemical metering supply device 24 and supplies a predetermined amount of water corresponding thereto from the water supply system 6 so as to prepare and store a chemical liquid with a predetermined concentration. It is configured.

以上の構成の排ガス浄化処理装置１によれば、半導体製造工程等から排出された酸類とアルデヒド類を含有する排ガス中の酸類が、第１のスクラバー２で処理水に気液接触して水に溶け込むことで浄化されるとともに、酸性ミストが生成される。次いで、この酸性ミストを含む排ガスが接続ダクト１１を通して第２のスクラバー３の上段スクラバー部４ａと下段のスクラバー部４ｂに順次導入され、アルデヒド類を吸収する亜硫酸ソーダ液を含む処理液に気液接触される。その際、処理液が酸性ミストにより酸性側にＰＨ調整されるので、処理液によるアルデヒド類の吸収効果が安定して得られ、排ガスの酸類とアルデヒド類が浄化され、浄化された排ガスが排出ダクト１７から大気中に放出される。   According to the exhaust gas purification treatment apparatus 1 having the above configuration, the acids in the exhaust gas containing acids and aldehydes discharged from the semiconductor manufacturing process and the like are brought into gas-liquid contact with the treated water in the first scrubber 2 and become water. While being purified by melting, acidic mist is generated. Next, the exhaust gas containing the acidic mist is sequentially introduced into the upper scrubber portion 4a and the lower scrubber portion 4b of the second scrubber 3 through the connection duct 11, and is in gas-liquid contact with the treatment liquid containing sodium sulfite liquid that absorbs aldehydes. Is done. At that time, since the pH of the treatment liquid is adjusted to the acidic side by the acid mist, the effect of absorbing the aldehydes by the treatment liquid is stably obtained, the acids and aldehydes of the exhaust gas are purified, and the purified exhaust gas is discharged into the exhaust duct. 17 is released into the atmosphere.

かくして、従来のように酸性薬液を供給することなく、酸類とアルデヒド類を含有する排ガスを浄化することができ、酸性薬液供給装置を設ける必要がないため、設備コストとランニングコストの双方の低減を図ることができ、また酸性薬液を取り扱う必要がないので、取扱作業者の危険性も無くなり、また一部設備が不要となるため、省エネルギー・省スペースを図ることができる。   Thus, the exhaust gas containing acids and aldehydes can be purified without supplying an acidic chemical solution as in the prior art, and there is no need to provide an acidic chemical solution supply device, so that both the equipment cost and running cost can be reduced. In addition, since it is not necessary to handle acidic chemicals, there is no danger for handling workers, and some facilities are not required, so that energy saving and space saving can be achieved.

また、第２のスクラバー３で処理液の導電率を導電率計２１ａ、２１ｂで計測し、その計測値に応じて供給ポンプ１３ａ、１３ｂを制御し、処理液が所要の電導率となるようにしているので、処理液中の亜硫酸ソーダの濃度を所定値に保つことができ、アルデヒド類を確実に吸収して除去することができる。   Further, the conductivity of the processing liquid is measured by the second scrubber 3 with the conductivity meters 21a and 21b, and the supply pumps 13a and 13b are controlled according to the measured values so that the processing liquid has the required conductivity. Therefore, the concentration of sodium sulfite in the treatment liquid can be maintained at a predetermined value, and aldehydes can be reliably absorbed and removed.

また、第２のスクラバー３で処理液のＰＨ値をＰＨ計２２ａ、２２ｂで計測し、その計測値に応じて処理水供給管１８ａ、１８ｂの電動弁１９ａ、１９ｂを開閉制御し、第１のスクラバー２の酸性の処理水を第２のスクラバー３の処理液に供給するようにしているので、第２のスクラバー３に導入される酸性ミストが少ない場合でも、処理液を所要のＰＨ値とすることができ、処理液の酸性を確保してはアルデヒド類の吸収効果を確保することができる。   Further, the PH value of the treatment liquid is measured by the second scrubber 3 with the PH meters 22a and 22b, and the motor-operated valves 19a and 19b of the treated water supply pipes 18a and 18b are controlled to open and close according to the measured values. Since the acidic treated water of the scrubber 2 is supplied to the treatment liquid of the second scrubber 3, the treatment liquid has a required PH value even when there is little acidic mist introduced into the second scrubber 3. It is possible to secure the acidity of the treatment liquid and to secure the absorption effect of aldehydes.

本発明の排ガス浄化処理方法及び装置によれば、排ガス中の酸類が処理水に気液接触して酸性ミストが生成され、この酸性ミストを含む排ガスをアルデヒド類の処理薬液を含む処理液に気液接触させることで、処理液によるアルデヒド類の吸収効果を安定して得ることができ、かくして酸性薬液を供給せずに低コストにて排ガスを浄化処理することができるので、半導体製造工程等から排出される酸類とアルデヒド類を含有する混合排ガスの浄化処理に有効に利用することができる。   According to the exhaust gas purification treatment method and apparatus of the present invention, acids in the exhaust gas come into gas-liquid contact with the treated water to generate acidic mist, and the exhaust gas containing the acidic mist is gasified into the treatment liquid containing the treatment chemical solution of aldehydes. By contacting the liquid, the absorption effect of aldehydes by the treatment liquid can be stably obtained, and thus the exhaust gas can be purified at a low cost without supplying an acidic chemical solution. It can be effectively used for purification treatment of mixed exhaust gas containing discharged acids and aldehydes.

本発明の一実施形態の排ガス浄化処理装置の構成図1 is a configuration diagram of an exhaust gas purification processing apparatus according to an embodiment of the present invention. 従来例の排ガス浄化処理装置の構成図Configuration diagram of conventional exhaust gas purification treatment device

符号の説明Explanation of symbols

１ 排ガス浄化処理装置
２ 第１のスクラバー（第１の処理部）
３ 第２のスクラバー（第２の処理部）
７ 循環ポンプ
１２ 薬液タンク
１３ａ、１３ｂ 供給ポンプ
１４ａ、１４ｂ 薬液供給管
１５ａ、１５ｂ 循環ポンプ
１８ａ、１８ｂ 処理水供給管
１９ａ、１９ｂ 電動弁
２１ａ、２１ｂ 導電率計
２２ａ、２２ｂ ＰＨ計 DESCRIPTION OF SYMBOLS 1 Exhaust gas purification processing apparatus 2 1st scrubber (1st process part)
3 Second scrubber (second processing unit)
7 Circulation pump 12 Chemical liquid tank 13a, 13b Supply pump 14a, 14b Chemical liquid supply pipe 15a, 15b Circulation pump 18a, 18b Treated water supply pipe 19a, 19b Electric valve 21a, 21b Conductivity meter 22a, 22b PH meter

Claims (6)

酸類とアルデヒド類を含有する排ガスを浄化処理する排ガス浄化処理方法であって、排ガスを処理水に気液接触させて酸類と水で酸性ミストを生成する第１の処理工程と、第１の処理工程で生成された酸性ミストを含む排ガスをアルデヒド類の処理薬液を含む処理液に気液接触させてアルデヒド類を無害化処理する第２の処理工程とを備えたことを特徴とする排ガス浄化処理方法。   An exhaust gas purification treatment method for purifying exhaust gas containing acids and aldehydes, wherein the exhaust gas is brought into gas-liquid contact with treated water to produce an acid mist with the acids and water, and the first treatment And a second treatment step of detoxifying the aldehydes by bringing the exhaust gas containing the acidic mist generated in the process into gas-liquid contact with a treatment solution containing a treatment chemical solution for aldehydes. Method. 第２の処理工程で処理液の電導率を計測し、所要の電導率となるように処理薬液の供給量を制御することを特徴とする請求項１記載の排ガス浄化処理方法。   The exhaust gas purification treatment method according to claim 1, wherein the conductivity of the treatment liquid is measured in the second treatment step, and the supply amount of the treatment chemical liquid is controlled so as to obtain a required conductivity. 第２の処理工程で処理液のＰＨ値を計測し、所要のＰＨ値となるように第１の処理工程の処理水を第２の処理工程の処理液に供給することを特徴とする請求項１又は２記載の排ガス浄化処理方法。   The PH value of the treatment liquid is measured in the second treatment process, and the treated water of the first treatment process is supplied to the treatment liquid of the second treatment process so as to obtain a required PH value. The exhaust gas purification treatment method according to 1 or 2. 酸類とアルデヒド類を含有する排ガスを浄化処理する排ガス浄化処理装置であって、排ガスを循環ポンプにて循環される処理水に気液接触させる第１の処理部と、第１の処理部で処理されて酸性ミストを含む排ガスをアルデヒド類の処理薬液を含むとともに循環ポンプにて循環される処理液に気液接触させる第２の処理部とを備えたことを特徴とする排ガス浄化処理装置。   An exhaust gas purification apparatus for purifying exhaust gas containing acids and aldehydes, wherein the exhaust gas is in gas-liquid contact with treated water circulated by a circulation pump, and treated by the first treatment unit And an exhaust gas purification treatment apparatus comprising: a second treatment unit that brings the exhaust gas containing acidic mist into gas-liquid contact with a treatment liquid containing a treatment chemical solution of aldehydes and circulated by a circulation pump. 第２の処理部に、その処理液の導電率を計測する導電率計と、導電率計による計測値に応じて処理薬液を供給する手段とを備えたことを特徴とする請求項４記載の排ガス浄化処理装置。   5. The second processing unit according to claim 4, further comprising: a conductivity meter for measuring the conductivity of the processing solution; and means for supplying a processing chemical according to a measurement value by the conductivity meter. Exhaust gas purification equipment. 第２の処理部の処理液のＰＨ値を計測するＰＨ計と、ＰＨ計による計測値に応じて第１の処理部の処理水を第２の処理部に供給する手段とを備えたことを特徴とする請求項４又は５記載の排ガス浄化処理装置。
A PH meter that measures the PH value of the treatment liquid of the second treatment unit, and a unit that supplies treated water of the first treatment unit to the second treatment unit according to the measurement value of the PH meter. The exhaust gas purification treatment apparatus according to claim 4 or 5, characterized in that
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014036942A (en) * 2012-08-20 2014-02-27 Mitsubishi Heavy Ind Ltd Co2 recovery device and method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5597226A (en) * 1979-01-17 1980-07-24 Kurabo Ind Ltd Method and apparatus for treating exhaust gas
JPH11197448A (en) * 1997-11-12 1999-07-27 Hokutan Kasei Kogyo Kk Deodorizing chemical and deodorizing method for aldehides-containing gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5597226A (en) * 1979-01-17 1980-07-24 Kurabo Ind Ltd Method and apparatus for treating exhaust gas
JPH11197448A (en) * 1997-11-12 1999-07-27 Hokutan Kasei Kogyo Kk Deodorizing chemical and deodorizing method for aldehides-containing gas

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014036942A (en) * 2012-08-20 2014-02-27 Mitsubishi Heavy Ind Ltd Co2 recovery device and method
US9789437B2 (en) 2012-08-20 2017-10-17 Mitsubishi Heavy Industries, Ltd. CO2 recovery device and CO2 recovery method

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