JP2007146993A - Liquefied gas container heating/cooling device and gas supply device - Google Patents

Liquefied gas container heating/cooling device and gas supply device Download PDF

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JP2007146993A
JP2007146993A JP2005343573A JP2005343573A JP2007146993A JP 2007146993 A JP2007146993 A JP 2007146993A JP 2005343573 A JP2005343573 A JP 2005343573A JP 2005343573 A JP2005343573 A JP 2005343573A JP 2007146993 A JP2007146993 A JP 2007146993A
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liquefied gas
gas container
heating
pipe bundle
cooling device
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JP4908832B2 (en
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Makoto Sakane
誠 坂根
Takashi Yoshida
吉田  隆
Kimiaki Yonetani
公昭 米谷
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Taiyo Nippon Sanso Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a versatile heating/cooling device having high heat exchanging efficiency between a liquefied gas container mounted thereon and itself, the liquefied gas container being easy to replace, and to provide a gas supply device capable of bulk supplying liquefied gas over a long period. <P>SOLUTION: The liquefied gas container heating/cooling device 10 for heating/cooling the liquefied gas container 30 filled with liquefied gas comprises bunched flexible pipes 14 consisting of a plurality of pipes 20 in which heat exchange medium distributes and which are aligned with each other in the longitudinal direction and connected to each other in the cross direction, a frame 12 for suspending the bunched pipes 14, and a spring 24 for connecting the bunched pipes 14 to the frame 12. The gas supply device 50 comprises the liquefied gas container 30 placed on the bunched pipes 14. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、液化ガスを充填した液化ガス容器を熱媒または冷媒により加熱または冷却する装置、およびこれに液化ガス容器を載置したガス供給装置に関する。   The present invention relates to a device for heating or cooling a liquefied gas container filled with a liquefied gas with a heating medium or a refrigerant, and a gas supply device in which a liquefied gas container is placed.

アンモニアや塩化水素などに代表されるガスは、半導体製造におけるプロセスガスや、電子デバイスの原料ガスとして、これらの製造装置(以下、ガス使用装置という。)にて広く使用されている。上記ガスをガス使用装置に供給する場合、汎用の47L容量のガスボンベをガス使用装置1台ごとに用意して個々に供給作業を行うことがもっとも一般的である。しかし近年、ひとつの工場におけるガス使用装置の設置台数の増加に伴い、大型のガス容器から配管を通じて多数のガス使用装置にそれぞれガスを供給するバルク供給の需要が高まっている。   Gases typified by ammonia and hydrogen chloride are widely used in these manufacturing apparatuses (hereinafter referred to as gas using apparatuses) as process gases in semiconductor manufacturing and raw material gases for electronic devices. When supplying the gas to the gas using device, it is most common to prepare a general-purpose 47 L capacity gas cylinder for each gas using device and perform the supplying operation individually. However, in recent years, with an increase in the number of gas use devices installed in one factory, there is an increasing demand for bulk supply for supplying gas from a large gas container to a large number of gas use devices through piping.

アンモニアや塩化水素などのガスは、数MPaG〜十数MPaGの高圧にて液化された状態でガス容器に充填されている。かかる高圧ガスを充填されたガス容器(液化ガス容器)からガスを抜き出してこれをガス使用装置に効率的に供給するには、液化ガス容器の出口では一般に0.5MPaG程度の気相圧力が必要となる。   Gases such as ammonia and hydrogen chloride are filled in the gas container in a liquefied state at a high pressure of several MPaG to several tens of MPaG. In order to extract gas from a gas container (liquefied gas container) filled with such a high-pressure gas and efficiently supply it to the gas using device, a gas phase pressure of about 0.5 MPaG is generally required at the outlet of the liquefied gas container. It becomes.

液化ガス容器に充填されたガスを気相にて取り出す場合、容器内部の高い充填圧力を開放するだけで液化ガスを気化させることができる。したがって、液化ガス容器の出口に設けられる減圧弁の二次側(下流側)圧力を例えば0.5MPaGに設定すれば、かかる圧力に調整された気相ガスを取り出すことができる。
しかし、液化ガスは気化する際に周囲から気化潜熱を奪うため、気相によるバルク供給を連続して行うと、液化ガスの温度は次第に低下しその飽和蒸気圧が降下する。そして飽和蒸気圧が所望の出口圧力(例えば上記の0.5MPaG)を下回ると気相ガスは減圧弁を通過することができず、ガス使用装置へのガス供給は停止してしまう。
When the gas filled in the liquefied gas container is taken out in the gas phase, the liquefied gas can be vaporized only by releasing the high filling pressure inside the container. Therefore, if the secondary side (downstream side) pressure of the pressure reducing valve provided at the outlet of the liquefied gas container is set to 0.5 MPaG, for example, the gas phase gas adjusted to such pressure can be taken out.
However, since the liquefied gas takes vaporization latent heat from the surroundings when vaporized, if the bulk supply by the gas phase is continuously performed, the temperature of the liquefied gas gradually decreases and the saturated vapor pressure decreases. When the saturated vapor pressure falls below a desired outlet pressure (for example, the above 0.5 MPaG), the gas phase gas cannot pass through the pressure reducing valve, and the gas supply to the gas using device is stopped.

このため、強制的な加温手段を用いない自然気化方式にてガス使用装置に気相ガスをバルク供給する場合、常温を初期状態とする液化ガスが、その温度を降下させ、飽和蒸気圧が所望の出口圧力と等しくなる温度(ガス供給可能温度)に至るまでの時間は短く、かかる短時間しかバルク供給を行うことができないことが問題となる。また液化ガスの温度低下によりひとたびバルク供給が停止してしまうと、常温雰囲気により液化ガスがガス供給可能温度以上に温度回復するまでこれを再開できないという問題もある。さらに、冬季などに外気温がガス供給可能温度を下回ると、そもそも所望の出口圧力によるバルク供給ができないこととなる。   For this reason, when gas phase gas is supplied in bulk to a gas using device by a natural vaporization method that does not use forced heating means, the liquefied gas whose normal temperature is the initial state lowers its temperature and the saturated vapor pressure is reduced. The time required to reach a temperature (gas supply possible temperature) equal to the desired outlet pressure is short, and there is a problem that bulk supply can be performed only for such a short time. Further, once the bulk supply is stopped due to the temperature drop of the liquefied gas, there is a problem that the liquefied gas cannot be resumed until the temperature of the liquefied gas is recovered to a temperature higher than the gas supply possible temperature by the normal temperature atmosphere. Furthermore, if the outside air temperature falls below the temperature at which gas can be supplied, such as in winter, bulk supply with a desired outlet pressure cannot be performed in the first place.

また、液化ガス容器から液相ガスを抜き出して、これを蒸発器にて気化させてガス使用装置に供給する方式のバルク供給も一般におこなわれているが、この場合も液化ガス容器内の液化ガスを加熱しながら供給を行うことが好ましい。これは、充填された液化ガスの残量の減少に追随するように液化ガス容器内で液化ガスを速やかに気化させ、該容器内の気相圧力を所定以上に維持しないと、該容器内が負圧となって液相ガスのスムーズな流出が阻害されるためである。
以上より、液化ガス容器からガスをバルク供給する場合は、取り出すガスが気相であるか液相であるかを問わず、該容器内部の液化ガスの飽和蒸気圧を維持すべく所定温度に保温または加温する必要がある。
In addition, in general, bulk supply is performed by extracting liquid phase gas from the liquefied gas container, evaporating it with an evaporator, and supplying it to the gas using device. In this case, the liquefied gas in the liquefied gas container is also used. It is preferable to supply while heating. This is because the liquefied gas is rapidly vaporized in the liquefied gas container so as to follow the decrease in the remaining amount of the liquefied gas, and if the gas phase pressure in the container is not maintained above a predetermined value, This is because the negative pressure prevents the smooth outflow of the liquid phase gas.
From the above, when gas is supplied in bulk from a liquefied gas container, regardless of whether the gas to be extracted is in the gas phase or in the liquid phase, the temperature is kept at a predetermined temperature in order to maintain the saturated vapor pressure of the liquefied gas inside the container. Or it needs to be heated.

また一方、液化ガスが加熱をうけて所定以上の温度に上昇してしまう虞のある場合は、これを効率よく冷却することが望まれる。例えば、気相ガスを高圧下で液化して液化ガス容器に充填する場合は断熱圧縮と凝集熱の発生により液化ガスは加熱される。また、外気温の高い夏季にバルク供給を行う場合も、安全のため所定の温度まで液化ガスを冷却することが求められる。   On the other hand, when there is a possibility that the liquefied gas is heated and rises to a predetermined temperature or more, it is desired to cool it efficiently. For example, when gas phase gas is liquefied under high pressure and filled into a liquefied gas container, the liquefied gas is heated by adiabatic compression and generation of cohesive heat. In addition, when bulk supply is performed in summer when the outside air temperature is high, it is required to cool the liquefied gas to a predetermined temperature for safety.

これらの課題に対処するため、従来は、例えば温水または温風が循環する配管やリボン状ヒータなどの加温器を液化ガス容器の外面に接触させて、該容器内部の液化ガスを加温する方法や、温水槽に液化ガス容器を浸漬させてこれを加温する加熱方法、またはこれらを冷水や冷風により行う冷却方法が用いられてきた。   Conventionally, in order to cope with these problems, for example, a heater such as a pipe through which hot water or hot air circulates or a ribbon heater is brought into contact with the outer surface of the liquefied gas container to heat the liquefied gas inside the container. There have been used a method, a heating method in which a liquefied gas container is immersed in a hot water tank and heating it, or a cooling method in which these are performed with cold water or cold air.

例えば下記特許文献1には、液体ボンベ(液化ガス容器)の外周面を覆う温水ジャケットの発明が記載されている。また下記非特許文献1には、温水(冷水)を循環させるためのプレス溝を設けた金属プレートを半割り円筒状に成形し、載置された液化ガス容器を加温(冷却)することのできる熱交換器の発明が記載されている。   For example, Patent Document 1 below describes an invention of a hot water jacket that covers the outer peripheral surface of a liquid cylinder (liquefied gas container). Non-Patent Document 1 below describes that a metal plate provided with a press groove for circulating hot water (cold water) is formed into a half-cylindrical shape, and the placed liquefied gas container is heated (cooled). An invention of a heat exchanger that can be described is described.

特開平8−228594号公報JP-A-8-228594 Tranter PHE Inc.、”PLATECOIL”、[online]、[平成17年11月29日検索]、インターネット<URL: http://us.tranterphe.com/phe/platecoil/platecoil.htm>Transter PHE Inc. "PLATECOIL", [online], [searched on November 29, 2005], Internet <URL: http://us.tranterphe.com/phe/platecoil/platecoil.htm>

しかし、上記特許文献1に記載の温水ジャケットは、液体ボンベへの着脱に多くの作業工数を要する。また通常、液体ボンベの表面には微小な凹凸が多数存在するところ、温水ジャケットの係止用部材による拘束力のみでは液体ボンベと温水ジャケットとを十分に密着させることが困難であるため、両者の間に介在する空気層によって伝熱効率が低下し、温水による加熱効率が不十分であるという問題がある。一方、上記非特許文献1に記載の熱交換器は、半割り円筒状の金属プレートに液化ガス容器を載置するだけで熱交換作業を行うことができ、液化ガス容器の着脱作業が容易であるという利点がある。   However, the hot water jacket described in Patent Document 1 requires a large number of work steps for attaching to and detaching from the liquid cylinder. Usually, there are many minute irregularities on the surface of the liquid cylinder, and it is difficult to sufficiently adhere the liquid cylinder and the hot water jacket only by the restraining force of the hot water jacket locking member. There is a problem that the heat transfer efficiency is lowered by the air layer interposed therebetween, and the heating efficiency by the hot water is insufficient. On the other hand, the heat exchanger described in Non-Patent Document 1 can perform the heat exchange operation simply by placing the liquefied gas container on the half-divided cylindrical metal plate, and can easily attach and detach the liquefied gas container. There is an advantage of being.

しかし、かかる熱交換器は、液化ガス容器を載置する金属プレートの半割り円筒形状が固定的であるため、仮に常温における金属プレートのカーブ(曲率)と液化ガス容器の外周面の形状とを精度よく一致させて成形したとしても、外気温の変化や液化ガスの冷却などが生じた場合は、両者がそれぞれ独自の熱膨張率にて熱変形をして曲率を変化させるため、互いの接触性を維持することが困難であるという問題がある。
また、同一の規格の液化ガス容器であっても製造者ごとにその外形の曲率は微妙に相違するものであるところ、いずれかの製品に適合する金属プレートが他の製品と適合するとは限らず、上記熱交換器は汎用性に劣る。さらに、同一仕様の液化ガス容器であっても製造誤差により曲率や凹凸の形状は必ず所定のばらつきを伴うため、上記の熱交換器では、常に一定の熱交換効率が得られるとは限らない。よって、複数の液化ガス容器を交換しながら連続的にバルク供給する場合、いずれかの液化ガス容器については所定の加熱効率が得られないという問題も生じ得る。
However, in such a heat exchanger, the half-cylindrical shape of the metal plate on which the liquefied gas container is placed is fixed, so that the curve (curvature) of the metal plate at normal temperature and the shape of the outer peripheral surface of the liquefied gas container are Even if they are molded with the same precision, if the outside air temperature changes or the liquefied gas cools, both of them will undergo thermal deformation with their own thermal expansion coefficient and change the curvature. There is a problem that it is difficult to maintain the sex.
Also, even in the case of liquefied gas containers of the same standard, the curvature of the outer shape is slightly different for each manufacturer, so a metal plate that suits one product may not necessarily fit another product. The heat exchanger is inferior in versatility. Furthermore, even in the case of liquefied gas containers of the same specification, the curvature and the shape of the unevenness are always accompanied by a predetermined variation due to manufacturing errors. Therefore, in the above heat exchanger, a constant heat exchange efficiency is not always obtained. Therefore, when continuously supplying a bulk while replacing a plurality of liquefied gas containers, there may be a problem that a predetermined heating efficiency cannot be obtained for any of the liquefied gas containers.

かかる問題を解決するため、従来は熱交換用の金属プレートと液化ガス容器の外周面とを伝熱セメントによって貼り付け、両者の接触性を向上させる試みもなされていたが、かかる方式によれば液化ガス容器の脱着の際に伝熱セメントの除去または再塗布が必要であり、かかる作業に相当のコストと工程数を要するという新たな問題が生じていた。   In order to solve such a problem, conventionally, an attempt has been made to attach the heat exchange metal plate and the outer peripheral surface of the liquefied gas container with heat transfer cement to improve the contact between them. When the liquefied gas container is detached, it is necessary to remove or re-apply the heat transfer cement, and a new problem has arisen that such work requires a considerable cost and the number of steps.

なお、液化ガス容器の外周面に電気ヒータを直接接触させてこれを加熱することは、近年わが国においては高圧ガス保安法により認められていない。また、液化ガス容器を温水槽に浸漬する従来方法については、供給すべき温水の量が膨大であって多くのエネルギーコストを要するほか、一般に金属製である液化ガス容器を腐食させる虞があるという問題を有している。   In recent years, it has not been recognized in Japan by the High Pressure Gas Safety Law that an electric heater is brought into direct contact with the outer peripheral surface of a liquefied gas container to heat it. In addition, the conventional method of immersing the liquefied gas container in the hot water tank requires an enormous amount of hot water to be supplied and requires a lot of energy costs, and there is a possibility that the liquefied gas container that is generally made of metal may be corroded. Have a problem.

以上を踏まえ本発明においては、搭載される液化ガス容器との間の熱交換効率が高く、汎用性があり、かつ液化ガス容器の交換が容易な加熱冷却装置、および長時間にわたる液化ガスのバルク供給を可能とするガス供給装置を提供することを目的とする。   Based on the above, in the present invention, a heating / cooling device having high heat exchange efficiency with a mounted liquefied gas container, versatility, and easy replacement of the liquefied gas container, and bulk of liquefied gas over a long period of time It aims at providing the gas supply apparatus which enables supply.

本発明にかかる加熱冷却装置は、
(1)液化ガスが充填された液化ガス容器を加熱または冷却する加熱冷却装置であって、内部を熱交換媒体が流通する複数本の配管が幅方向に連結された可撓性の配管束と、該配管束を吊下する架台と、を有することを特徴とする液化ガス容器の加熱冷却装置;
(2)液化ガスが充填された液化ガス容器を加熱または冷却する加熱冷却装置であって、内部を熱交換媒体が流通する複数本の配管がその長手方向を横切る方向に設けられた可撓性を有する結束帯にそれぞれ接合されて液化ガス容器の載置面が形成された配管束と、該配管束を吊下する架台と、を有することを特徴とする液化ガス容器の加熱冷却装置;
(3)配管束と架台とが弾性体により連結されていることを特徴とする上記(1)または(2)に記載の加熱冷却装置;
(4)配管の横断面形状が楕円形、長円形、または弓形であることを特徴とする上記(1)から(3)のいずれかに記載の加熱冷却装置;
(5)配管束には、液化ガス容器の載置面に熱伝導性フィラーが設けられていることを特徴とする上記(1)から(4)のいずれかに記載の加熱冷却装置;
を要旨とする。
The heating and cooling device according to the present invention is:
(1) A heating and cooling device for heating or cooling a liquefied gas container filled with a liquefied gas, and a flexible pipe bundle in which a plurality of pipes through which a heat exchange medium flows are connected in the width direction A heating and cooling device for a liquefied gas container, comprising: a gantry for suspending the pipe bundle;
(2) A heating / cooling device for heating or cooling a liquefied gas container filled with liquefied gas, wherein a plurality of pipes through which a heat exchange medium flows are provided in a direction crossing the longitudinal direction. An apparatus for heating and cooling a liquefied gas container, comprising: a bundle of pipes each of which is bonded to a binding band having a mounting surface of the liquefied gas container; and a mount for hanging the bundle of pipes;
(3) The heating / cooling device according to (1) or (2) above, wherein the pipe bundle and the mount are connected by an elastic body;
(4) The heating / cooling device according to any one of (1) to (3) above, wherein the cross-sectional shape of the pipe is an ellipse, an oval, or an arcuate shape;
(5) The heating and cooling device according to any one of (1) to (4) above, wherein the pipe bundle is provided with a heat conductive filler on a mounting surface of the liquefied gas container;
Is the gist.

また、本発明にかかるガス供給装置は、
(6)上記(1)から(5)のいずれかに記載の加熱冷却装置の配管束に、液化ガスが充填された液化ガス容器を載置してなるガス供給装置;
(7)上記(1)から(5)のいずれかに記載の加熱冷却装置の配管に、0℃乃至40℃の水を供給する熱交換媒体供給手段を備えるガス供給装置;
(8)配管束を液化ガス容器に押圧する押圧手段を備えることを特徴とする上記(6)に記載のガス供給装置;
を要旨とする。
Moreover, the gas supply device according to the present invention includes:
(6) A gas supply device in which a liquefied gas container filled with a liquefied gas is placed on a pipe bundle of the heating and cooling device according to any one of (1) to (5) above;
(7) A gas supply device comprising heat exchange medium supply means for supplying water at 0 ° C. to 40 ° C. to the piping of the heating / cooling device according to any one of (1) to (5) above;
(8) The gas supply device according to (6), further including a pressing unit that presses the pipe bundle against the liquefied gas container;
Is the gist.

本発明にかかる加熱冷却装置は、可撓性のある配管束を載置面として有するため、これに載置される液化ガス容器の外形形状にあわせて載置面が柔軟に形状を変化させ、該容器との高い接触性を得ることができる。このため配管束の内部を流通する熱交換媒体と液化ガス容器との熱交換効率がきわめて高いものとなる。   Since the heating and cooling device according to the present invention has a flexible pipe bundle as a mounting surface, the mounting surface flexibly changes the shape according to the outer shape of the liquefied gas container mounted on the mounting surface, High contact with the container can be obtained. For this reason, the heat exchange efficiency between the heat exchange medium flowing in the pipe bundle and the liquefied gas container is extremely high.

また、かかる載置面の柔軟性により、載置される液化ガス容器の曲率や外形寸法が個々に相違した場合もこれを吸収することができるため、高い汎用性が得られる。また同様の理由により、バルク供給中に配管束または液化ガス容器が熱変形した場合も、高い接触性を維持することができる。さらに、配管束と液化ガス容器とのかかる良好な接触性ゆえ、伝熱セメントによる両者の貼り付けが不要となり、また搭載面に液化ガス容器を載置するだけで加熱または冷却作業を開始することが可能であることから、液化ガス容器の交換作業が容易であるという利点がある。   Further, due to the flexibility of the mounting surface, even when the curvature and outer dimensions of the liquefied gas container to be mounted can be absorbed individually, high versatility can be obtained. For the same reason, even when a pipe bundle or a liquefied gas container is thermally deformed during bulk supply, high contactability can be maintained. In addition, because of the good contact between the pipe bundle and the liquefied gas container, it is not necessary to attach both of them with heat transfer cement, and heating or cooling work can be started simply by placing the liquefied gas container on the mounting surface. Therefore, there is an advantage that the replacement operation of the liquefied gas container is easy.

また、本発明にかかる加熱冷却装置の配管束に液化ガス容器を載置してなるガス供給装置によれば、液化ガスを所定の温度および飽和蒸気圧に維持可能であるため、長時間にわたる液化ガスの連続的なバルク供給が可能となる。また液化ガス容器を配管束に載置するだけでその搭載作業が完了することから、該容器の交換に要する作業コストを低減することができる。さらに、配管の内部にのみ熱交換媒体を流通させる本発明はエネルギーコストに優れている。   In addition, according to the gas supply apparatus in which the liquefied gas container is placed on the bundle of pipes of the heating and cooling apparatus according to the present invention, the liquefied gas can be maintained at a predetermined temperature and saturated vapor pressure. A continuous bulk supply of gas is possible. Moreover, since the mounting operation is completed simply by placing the liquefied gas container on the pipe bundle, the operation cost required to replace the container can be reduced. Furthermore, this invention which distribute | circulates a heat exchange medium only inside the piping is excellent in energy cost.

以下、本発明を実施するための最良の形態について図面を用いて具体的に説明する。図1は、本発明にかかる加熱冷却装置の三面図であり、同図(a)は平面図、(b)は正面図、(c)は側面図である。10は加熱冷却装置、12は架台、14は配管束、16は吊下部、20は配管、22は結束帯、24はバネである。また、26aは熱交換媒体を加熱冷却装置10に導入する熱交換媒体供給口、26bは熱交換媒体を加熱冷却装置10から排出する熱交換媒体排出口、28は配管束14を液化ガス容器30に締め付けるためのバンドである。   Hereinafter, the best mode for carrying out the present invention will be specifically described with reference to the drawings. 1A and 1B are three views of a heating and cooling apparatus according to the present invention, in which FIG. 1A is a plan view, FIG. 1B is a front view, and FIG. 1C is a side view. 10 is a heating / cooling device, 12 is a pedestal, 14 is a pipe bundle, 16 is a suspended portion, 20 is a pipe, 22 is a binding band, and 24 is a spring. 26a is a heat exchange medium supply port for introducing the heat exchange medium into the heating and cooling device 10, 26b is a heat exchange medium discharge port for discharging the heat exchange medium from the heating and cooling device 10, and 28 is the liquefied gas container 30 for the pipe bundle 14. It is a band for tightening.

本実施の形態にかかる加熱冷却装置10は、配管20の内部を流通する熱交換媒体と、搭載される液化ガス容器との間で熱交換を行うものである。   The heating / cooling device 10 according to the present embodiment performs heat exchange between a heat exchange medium that circulates inside the pipe 20 and a liquefied gas container that is mounted.

熱交換媒体には、温風、熱風、冷風などの気相媒体、または温水、熱水、熱油、冷水、不凍液などの液相媒体をいずれも用いることができる。熱交換媒体は、熱交換媒体供給口26aから配管20に供給され、液化ガス容器との間で熱交換が行われた熱交換媒体は、熱交換媒体排出口26bより加熱冷却装置10の外部に排出される。   As the heat exchange medium, a gas phase medium such as hot air, hot air, or cold air, or a liquid phase medium such as hot water, hot water, hot oil, cold water, or antifreeze can be used. The heat exchange medium is supplied to the pipe 20 from the heat exchange medium supply port 26a, and the heat exchange medium subjected to heat exchange with the liquefied gas container is provided outside the heating / cooling device 10 through the heat exchange medium discharge port 26b. Discharged.

加熱冷却装置10により加熱または冷却される液化ガス容器30は、円形断面をもつ横置き型のものが好適であるが、矩形をはじめとする多角形や、楕円形または長円形を断面とするものでもよい。また、縦置き型の液化ガス容器を加熱または冷却する場合については後述する。
液化ガス容器30の材料は、熱伝導性、強度、耐圧性に優れる金属が好ましく、特にステンレス鋼(SUS)やマンガン鋼がよい。また充填される液化ガスは、アンモニア、塩化水素、塩素、亜酸化窒素など、常温常圧では気体であって、高圧の液化ガス容器30の内部では液体として存在するものであれば特に限定されない。
The liquefied gas container 30 to be heated or cooled by the heating / cooling device 10 is preferably a horizontal type having a circular cross section, but has a polygonal shape including a rectangle, an elliptical shape or an oval shape as a cross section. But you can. The case of heating or cooling the vertically placed liquefied gas container will be described later.
The material of the liquefied gas container 30 is preferably a metal having excellent thermal conductivity, strength, and pressure resistance, and stainless steel (SUS) or manganese steel is particularly preferable. The liquefied gas to be filled is not particularly limited as long as it is a gas such as ammonia, hydrogen chloride, chlorine, nitrous oxide, etc., and is present as a liquid inside the high-pressure liquefied gas container 30.

本発明にかかる加熱冷却装置10は、熱交換媒体を内部に流通させる配管20が、その幅方向に複数本連結されて、液化ガス容器30の載置面が形成された可撓性の配管束14を有することを特徴とするものである。
配管束14において、熱交換媒体を配管20に流通させる態様としては例えば以下の二つの方式を採り得る。
(1)熱交換媒体供給口26aより加熱冷却装置10に導入された熱交換媒体を、並列に設けられた複数本の配管20にそれぞれ分配して供給し、液化ガス容器30との間で熱交換に供した後、再び統合して、熱交換媒体排出口26bより加熱冷却装置10の外部に排出する方式。すなわちかかる方式の場合、図1(a)に示す加熱冷却装置10においては、各配管の内部を熱交換媒体が流通する向きはいずれも同一となる。
(2)隣り合う配管20の端部同士をフレキシブルなチューブで互いに連結して熱交換媒体の流路を一本の直列とし、該直列の流路の入口に、熱交換媒体供給口26aより加熱冷却装置10に導入された熱交換媒体を供給する方式。この場合、該直列の流路の出口と熱交換媒体排出口26bとを連結して、熱交換に供された熱交換媒体を排出することとなる。すなわちかかる方式の場合、図1(a)に示す加熱冷却装置10においては、各配管の内部を熱交換媒体が流通する向きは一本ごとに互い違いとなり、供給された熱交換媒体はすべての配管を通過する。なお、かかる方式においては、互いに端部同士を連結された配管20の剛性により配管束14の可撓性が阻害されないよう、該端部同士の連結は上記のようにフレキシブルなチューブにより行うことが好ましい。
なお、上記(1)および(2)の方式を組み合わせた態様にて配管束14内部の流路を形成してもよい。
The heating / cooling device 10 according to the present invention includes a flexible pipe bundle in which a plurality of pipes 20 through which a heat exchange medium is circulated are connected in the width direction to form a mounting surface for the liquefied gas container 30. 14.
In the pipe bundle 14, for example, the following two systems can be adopted as a mode for circulating the heat exchange medium through the pipe 20.
(1) The heat exchange medium introduced into the heating / cooling device 10 from the heat exchange medium supply port 26 a is distributed and supplied to a plurality of pipes 20 provided in parallel, and heat is exchanged with the liquefied gas container 30. A method in which after being used for replacement, it is integrated again and discharged to the outside of the heating / cooling device 10 through the heat exchange medium discharge port 26b. That is, in the case of such a system, in the heating / cooling device 10 shown in FIG. 1A, the direction in which the heat exchange medium flows in each pipe is the same.
(2) The ends of the adjacent pipes 20 are connected to each other by a flexible tube so that the flow path of the heat exchange medium is connected in series, and the inlet of the serial flow path is heated from the heat exchange medium supply port 26a. A method of supplying a heat exchange medium introduced into the cooling device 10. In this case, the outlet of the serial channel and the heat exchange medium discharge port 26b are connected to discharge the heat exchange medium subjected to heat exchange. That is, in the case of such a system, in the heating and cooling device 10 shown in FIG. 1A, the direction in which the heat exchange medium circulates in each pipe is alternated, and the supplied heat exchange medium is all pipes. Pass through. In such a method, the ends are connected to each other by the flexible tube so that the flexibility of the pipe bundle 14 is not hindered by the rigidity of the pipe 20 having the ends connected to each other. preferable.
In addition, you may form the flow path inside the pipe bundle 14 in the aspect which combined the method of said (1) and (2).

配管束14を構成する複数本の配管20は、互いに同一形状、同一径、同一長さ、同一材料からなるものに限らず、これらのいずれか一以上が相違していてもよい。配管20の材料は、例えばSUSやアルミ合金などの金属材料とすることが、熱伝導性、強度、加工性などの観点から好適である。配管20の好適な断面形状については後述する。   The plurality of pipes 20 constituting the pipe bundle 14 are not limited to those having the same shape, the same diameter, the same length, and the same material, and any one or more of these may be different. The material of the pipe 20 is preferably a metal material such as SUS or aluminum alloy from the viewpoint of thermal conductivity, strength, workability, and the like. A suitable cross-sectional shape of the pipe 20 will be described later.

複数本の配管20を幅方向に連結して、可撓性のある面状の配管束14を得る方法として、図1に示す本実施の形態では、長手方向を揃えた複数本の配管20を、互いに平行に設けた三本のフレキシブルな結束帯22にそれぞれ連結して一体化する態様を例示する。
結束帯22により幅方向に連結された配管束14は、結束帯22の両端が架台12の相対向する吊下部16に固定されることにより全体として凹状に吊り下げられる。この状態において、配管束14は上下方向への可撓性を有している。吊下部16は三本の結束帯22の両端をそれぞれ保持するため、架台12の長手方向に沿って片側に三箇所ずつ設けられている。
なお、加熱冷却装置10の長手方向および幅方向については図中の矢印にて示す。
As a method of connecting a plurality of pipes 20 in the width direction to obtain a flexible planar pipe bundle 14, in the present embodiment shown in FIG. A mode in which they are connected and integrated with three flexible binding bands 22 provided in parallel with each other will be exemplified.
The pipe bundle 14 connected in the width direction by the binding band 22 is suspended in a concave shape as a whole by fixing both ends of the binding band 22 to the opposite hanging portions 16 of the gantry 12. In this state, the pipe bundle 14 has flexibility in the vertical direction. The suspension portion 16 is provided at three locations on one side along the longitudinal direction of the gantry 12 in order to hold both ends of the three binding bands 22.
In addition, about the longitudinal direction and the width direction of the heating-cooling apparatus 10, it shows with the arrow in a figure.

結束帯22は、液化ガスが充填された液化ガス容器30を配管束14に載置した場合に、かかる重量によって容易に曲げ変形を生じ、隣り合う配管20同士が連結されている角度を変えることができる。結束帯22の具体的な材料、寸法、ヤング率などは載置される液化ガス容器30の規格や液化ガスの充填量などによって適宜選択しうるが、SUSなどの金属材料や炭素繊維強化プラスチックなどの樹脂材料からなる薄板が好適に用いられる。結束帯22は薄手の一枚板ゆえ曲げ剛性が低く、曲げ方向に所定の可撓性を有する。このため、複数本の配管を、その長手方向を横切る方向に設けた結束帯22にそれぞれ接合して配管束14を得た場合、配管20自体の剛性は高いものの、配管束14は、その幅方向に沿って曲げる方向に良好な可撓性をもつことができる。特に、配管20を互いに所定の間隔をもって平行に並べ、これらの長手方向と直交して設けられた結束帯22にそれぞれ接合することで、可撓性の配管束14を好適に得ることができる。なお、結束帯22は、載置される液化ガス容器30の重量を保持する必要があることから、その引張方向には十分な強度を有している。したがって、所定の断面積をもち、かつ可撓性を得るために断面二次モーメントが小さい形状として、結束帯22は薄板状が好ましい。   When the liquefied gas container 30 filled with the liquefied gas is placed on the pipe bundle 14, the binding band 22 easily bends and deforms due to the weight, and changes the angle at which the adjacent pipes 20 are connected to each other. Can do. The specific material, dimensions, Young's modulus, and the like of the binding band 22 can be appropriately selected depending on the standard of the liquefied gas container 30 to be placed, the filling amount of the liquefied gas, and the like, but metal materials such as SUS, carbon fiber reinforced plastic, etc. A thin plate made of the above resin material is preferably used. Since the binding band 22 is a thin single plate, it has low bending rigidity and has a predetermined flexibility in the bending direction. For this reason, when the pipe bundle 14 is obtained by joining a plurality of pipes to the binding band 22 provided in a direction crossing the longitudinal direction, the pipe 20 itself has high rigidity but the width of the pipe bundle 14 is It can have good flexibility in the direction of bending along the direction. In particular, the flexible pipe bundle 14 can be suitably obtained by arranging the pipes 20 parallel to each other at a predetermined interval and joining the pipes 20 to the binding bands 22 provided perpendicular to the longitudinal direction. In addition, since the binding band 22 needs to hold | maintain the weight of the liquefied gas container 30 mounted, it has sufficient intensity | strength in the tension | pulling direction. Therefore, the binding band 22 is preferably a thin plate having a predetermined cross-sectional area and a shape having a small cross-sectional second moment in order to obtain flexibility.

ただし、このほか、
1)紐状の部材により配管同士を緊縛する方式;
2)樹脂等の可撓性材料からなるプレートの内部に配管を埋設する方式;
3)配管同士の角度を柔軟に変えられるヒンジ機構により連結する方式;
4)金属フレキシブルパイプや樹脂パイプなどの可撓性の配管を用い、配管束の長手方向に沿って曲げる方向に、または長手方向と幅方向の両方向に、可撓性をもたせる方式;
など、複数本の配管を、互いに配管の幅方向に連結して可撓性のある配管束を得る方法は、図1に示す本実施の形態に限られない。また配管同士は長手方向が略同一方向に揃えて連結されることが好ましいが必ずしもこれに限られず、いずれかの配管と交叉するものがあってもよい。
However,
1) A method of tightly binding pipes with a string-like member;
2) A system in which piping is embedded inside a plate made of a flexible material such as resin;
3) A method of connecting by a hinge mechanism that can flexibly change the angle between pipes;
4) A system that uses flexible piping such as a metal flexible pipe or a resin pipe and has flexibility in the direction of bending along the longitudinal direction of the pipe bundle, or in both the longitudinal direction and the width direction;
A method of obtaining a flexible pipe bundle by connecting a plurality of pipes to each other in the width direction of the pipe is not limited to the present embodiment shown in FIG. The pipes are preferably connected with their longitudinal directions aligned in substantially the same direction, but the present invention is not necessarily limited to this, and there may be pipes that cross any of the pipes.

なお、液化ガス容器30と配管束14のフィット性を向上するため、配管束14を締め付ける押圧手段として、バンド28を加熱冷却装置10の長手方向の両端に設けてもよい。   In order to improve the fit between the liquefied gas container 30 and the pipe bundle 14, bands 28 may be provided at both ends in the longitudinal direction of the heating / cooling device 10 as pressing means for fastening the pipe bundle 14.

次に、本発明にかかる配管束14の機能および効果について図2に示す断面模式図を用いて説明する。同図(a)は液化ガス容器30を載置する前の配管束14の状態を表す鉛直断面図であり、同図(b)は液化ガス容器30を載置した状態の配管束14を表す鉛直断面図である。なお、結束帯22は図示を省略している。
配管束14は、幅方向に複数本の配管20が互いに連結され、可撓性のある巻き簾状の面を形成している。配管束14の上面が液化ガス容器30の載置面32となる。配管束14は、図2に示す鉛直上下方向(配管束14の幅方向に沿って曲げる方向)の曲げ剛性が低く、隣り合う配管20同士は連結角度を所定の範囲内で変えることができる。
Next, functions and effects of the pipe bundle 14 according to the present invention will be described with reference to a schematic cross-sectional view shown in FIG. 2A is a vertical sectional view showing the state of the pipe bundle 14 before the liquefied gas container 30 is placed, and FIG. 2B shows the pipe bundle 14 with the liquefied gas container 30 placed thereon. It is a vertical sectional view. The binding band 22 is not shown.
In the pipe bundle 14, a plurality of pipes 20 are connected to each other in the width direction to form a flexible curled surface. The upper surface of the pipe bundle 14 serves as a mounting surface 32 for the liquefied gas container 30. The pipe bundle 14 has low bending rigidity in the vertical vertical direction shown in FIG. 2 (the direction of bending along the width direction of the pipe bundle 14), and adjacent pipes 20 can change the connection angle within a predetermined range.

配管束14は、その幅方向の両端をバネ24を介して架台12の吊下部16にて保持されている。バネ24に両側を引っ張られて架台12に吊り下げられた配管束14は、幅方向の両端から中心部に向かって曲面状に垂下する形状となり、また該中心部は宙に浮いている。   The pipe bundle 14 is held by the hanging portion 16 of the gantry 12 via springs 24 at both ends in the width direction. The pipe bundle 14 pulled on both sides by the spring 24 and suspended from the gantry 12 has a shape that hangs in a curved shape from both ends in the width direction toward the center, and the center is suspended in the air.

図2(a)に示す初期状態において、配管束14は、液化ガス容器30をセットしやすいよう、幅方向の中央が液化ガス容器30の外周面よりも大きな曲率半径にて凹状に撓み、広く口を開けて遊架されている。   In the initial state shown in FIG. 2A, the pipe bundle 14 is bent in a concave shape with a larger radius of curvature than the outer peripheral surface of the liquefied gas container 30 so that the liquefied gas container 30 can be easily set. It is open with an open mouth.

かかる状態から図中矢印の向きに液化ガス容器30を降下させてこれを配管束14に載置した状態を同図(b)に示す。内部に液化ガスが充填された液化ガス容器30の自重(下向きの矢印Gで示す)は、容器の規格によっては2[t]程度もの大きさとなる。配管束14は、その幅方向に沿って載置面32が面外に曲がる方向の可撓性を有しているため、液化ガス容器30の自重により強く下方に引っ張られることで、巻き簾やハンモックのごとく、液化ガス容器30に巻き付き、これを包み込むように変形する。具体的には、配管20同士の連結角度が、液化ガス容器30の外周面の接線角度にあわせて配管束14は撓み、載置面32と液化ガス容器30とが良好にフィットする。これにより、初期状態(同図(a))で上方に大きく開口していた配管束14は、その口が液化ガス容器30の径に応じて絞りこまれるように変形する。なお、液化ガス容器30が配管束14に載置された同図(b)の状態において、配管束14から液化ガス容器30には図中矢印Nで示す垂直抗力が生じ、これにより液化ガス容器30の自重(矢印G)を相殺している。配管束14と液化ガス容器30との良好なフィット性により、垂直抗力は配管束14の中央に位置する配管のみに集中せず、液化ガス容器30の外周方向に沿って分散している。   FIG. 2B shows a state in which the liquefied gas container 30 is lowered from this state in the direction of the arrow in the figure and placed on the pipe bundle 14. The own weight (indicated by the downward arrow G) of the liquefied gas container 30 filled with liquefied gas is as large as 2 [t] depending on the container specifications. Since the pipe bundle 14 has flexibility in a direction in which the mounting surface 32 bends out of the plane along the width direction thereof, the pipe bundle 14 is strongly pulled by the own weight of the liquefied gas container 30, thereby Like a hammock, it wraps around the liquefied gas container 30 and deforms so as to wrap it. Specifically, the pipe bundle 14 bends in accordance with the connection angle between the pipes 20 in accordance with the tangential angle of the outer peripheral surface of the liquefied gas container 30, and the mounting surface 32 and the liquefied gas container 30 fit well. As a result, the pipe bundle 14 that is largely open upward in the initial state (FIG. 2A) is deformed so that the mouth is squeezed according to the diameter of the liquefied gas container 30. When the liquefied gas container 30 is placed on the pipe bundle 14, the vertical bundle force indicated by the arrow N in the figure is generated from the pipe bundle 14 to the liquefied gas container 30, thereby causing the liquefied gas container. The self weight of 30 (arrow G) is offset. Due to the good fit between the pipe bundle 14 and the liquefied gas container 30, the vertical drag is not concentrated only on the pipe located at the center of the pipe bundle 14, but is distributed along the outer peripheral direction of the liquefied gas container 30.

また、配管束14の幅方向の両端にはバネ24が設けられている。バネ24に代表される弾性体を介して配管束14を架台12の吊下部16から吊り下げることにより、液化ガス容器30を載置した場合に該弾性体が伸張し、配管束14と液化ガス容器30とのフィット性を向上することができる。これは以下の理由による。   In addition, springs 24 are provided at both ends in the width direction of the pipe bundle 14. When the liquefied gas container 30 is placed by suspending the pipe bundle 14 from the suspending portion 16 of the gantry 12 through an elastic body represented by the spring 24, the elastic body expands and the pipe bundle 14 and the liquefied gas are expanded. The fit with the container 30 can be improved. This is due to the following reason.

すなわち、仮に配管束14を吊下部16に剛結合したとすると、配管束14の幅方向の両端に位置する配管20の角度および位置が固定されるため、液化ガス容器30の外周面形状に沿う配管束14の変形は抑制される。これに対し、本実施の形態にかかる配管束14のように端部に弾性体を介在させることで、図中矢印Kにて示すように、該端部に位置する配管20の角度および位置が変動可能となる。これにより配管束14の全体が回転および移動し、液化ガス容器30の外周面に沿って引き込まれるとともにこれにフィットする変形が柔軟に行われる。
つまり、配管束14を吊下部16に剛結合する場合は、液化ガス容器30の外周面とフィットしようとする配管束14の変形は、配管束14自身の可撓性によって行われるのに対し、配管束14を弾性体を介して吊下部16に連結する本実施の形態の場合は、配管束14の回転および移動、並びにそれ自身の可撓性による変形が可能であるため、液化ガス容器30の外周面に対するフィット性がさらに向上する。
That is, assuming that the pipe bundle 14 is rigidly coupled to the hanging portion 16, the angle and position of the pipe 20 located at both ends in the width direction of the pipe bundle 14 are fixed, so that the shape of the outer peripheral surface of the liquefied gas container 30 is met. The deformation of the pipe bundle 14 is suppressed. On the other hand, as shown by the arrow K in the figure, the angle and position of the pipe 20 located at the end can be changed by interposing an elastic body at the end as in the pipe bundle 14 according to the present embodiment. Can be changed. As a result, the entire pipe bundle 14 rotates and moves, and the pipe bundle 14 is drawn along the outer peripheral surface of the liquefied gas container 30 and flexibly deformed to fit therewith.
That is, when the pipe bundle 14 is rigidly coupled to the hanging portion 16, the deformation of the pipe bundle 14 trying to fit the outer peripheral surface of the liquefied gas container 30 is performed by the flexibility of the pipe bundle 14 itself. In the case of the present embodiment in which the pipe bundle 14 is connected to the suspension portion 16 via an elastic body, the liquefied gas container 30 can be deformed by rotation and movement of the pipe bundle 14 and its own flexibility. The fitting property with respect to the outer peripheral surface is further improved.

なお、弾性体を配管束14の幅方向の両端側に設けることで、幅方向の左右のバランスを良好にとることができるが、いずれか一方にのみ弾性体を設けることもできる。また、弾性体が弾性変形する方向については、図2に示すごとく架台12の上下方向および幅方向にいずれも変形可能とする方式のほか、そのいずれか一方のみを可能としてもよい。
架台12の上下方向に変形可能な弾性体に配管束14の端部を回転自在に連結する場合、配管束14が液化ガス容器30の外周面に沿って撓む変形を促進し、また液化ガス容器30を配管束14に載置する瞬間の衝撃荷重を吸収可能となる。
また、架台12の幅方向に変形可能な弾性体を設ければ、液化ガス容器30によって配管束14が下方に押し込まれた場合、該弾性体の柔軟性が配管束14の可撓性に付加されて、配管束14を液化ガス容器30の外周面に巻き付けて変形させることがより好適に行われる。
In addition, although an elastic body can be provided in the width direction of the pipe bundle 14 at both ends in the width direction, the left and right balance in the width direction can be satisfactorily achieved, but the elastic body can also be provided in only one of them. Further, as to the direction in which the elastic body is elastically deformed, as shown in FIG. 2, in addition to a system that can deform both in the vertical direction and the width direction of the gantry 12, only one of them may be possible.
When the end of the pipe bundle 14 is rotatably connected to an elastic body that can be deformed in the vertical direction of the gantry 12, the pipe bundle 14 promotes deformation of bending along the outer peripheral surface of the liquefied gas container 30, and liquefied gas. The impact load at the moment when the container 30 is placed on the pipe bundle 14 can be absorbed.
If an elastic body that can be deformed in the width direction of the gantry 12 is provided, the flexibility of the elastic body is added to the flexibility of the pipe bundle 14 when the pipe bundle 14 is pushed downward by the liquefied gas container 30. Thus, it is more preferable that the pipe bundle 14 is wound around the outer peripheral surface of the liquefied gas container 30 to be deformed.

また、液化ガス容器30を加熱冷却装置10から取り外す場合は、液化ガス容器30を上方に引き上げればよい。液化ガス容器30による荷重の負荷が除去されると、巻き簾状にこれに巻き付いていた配管束14は、バネ24により両端を引っ張られ、すみやかに幅方向に口を開けた初期状態(図2(a))に戻る。このため、配管束14と液化ガス容器30とが干渉することなく該容器30の取り外し作業を容易に行うことができる。   Moreover, what is necessary is just to pull up the liquefied gas container 30 upward, when removing the liquefied gas container 30 from the heating-cooling apparatus 10. FIG. When the load of the load by the liquefied gas container 30 is removed, the pipe bundle 14 wound around in a curled shape is pulled at both ends by springs 24 and immediately opened in the width direction (FIG. 2). Return to (a)). For this reason, the pipe 30 and the liquefied gas container 30 can be easily detached without interfering with each other.

図2に示すように、本実施の形態にかかる加熱冷却装置10は、配管束14と液化ガス容器30とが時計の3時から9時位置に相当する約180度の周回角度にわたって接触可能である。一般に液化ガスは液化ガス容器30の内容積の85%程度まで充填されることがあり、この場合の液化ガスの液面高さは、配管束14が接触して熱交換を行う領域を越えることとなる。しかし、液化ガスの充填量が多い場合は、それに比例して液化ガスの熱容量も大きいため、例えば液化ガスのバルク供給によって気化潜熱が奪われて液化ガスが冷却されるとしてもその温度変化は緩慢である。よってかかる場合、液化ガス容器30を下方からのみ加熱冷却装置10にて加熱すれば液化ガス全体の温度を維持することが可能であり、液化ガスの飽和蒸気圧が所定以下となることを防ぐことができる。また逆に、高い外気温によって液化ガスが過熱される虞がある場合も同様であり、液化ガスの充填量が十分である場合は、液化ガス容器30の下方からのみの冷却によってこれを防ぐことができる。   As shown in FIG. 2, the heating and cooling device 10 according to the present embodiment allows the pipe bundle 14 and the liquefied gas container 30 to contact each other over a rotation angle of about 180 degrees corresponding to the 3 o'clock to 9 o'clock position. is there. Generally, the liquefied gas may be filled up to about 85% of the internal volume of the liquefied gas container 30. In this case, the liquid level of the liquefied gas exceeds the region where the pipe bundle 14 contacts and performs heat exchange. It becomes. However, when the amount of liquefied gas is large, the heat capacity of the liquefied gas is proportionally larger.For example, even if the liquefied gas is cooled by the bulk supply of liquefied gas, the temperature change is slow. It is. Therefore, in such a case, the temperature of the entire liquefied gas can be maintained by heating the liquefied gas container 30 only from below with the heating / cooling device 10, and the saturated vapor pressure of the liquefied gas can be prevented from becoming below a predetermined value. Can do. On the contrary, the same applies to the case where the liquefied gas may be overheated by a high outside air temperature. When the amount of liquefied gas is sufficient, this can be prevented by cooling only from below the liquefied gas container 30. Can do.

一方、液化ガスの充填量が減少した場合は、その熱容量が小さくなって温度変動が急激となるため、かかる温度変動に追随して加熱冷却装置10により加熱または冷却を迅速に行う必要がある。一般に充填量が10〜30%程度となったときが、バルク供給がもっともクリティカルとなる。しかしこの場合も、液化ガスの充填量が少ないことから、その液面の高さは液化ガス容器30の中央よりも下方となり、図1および図2に示す配管束14によって液化ガスの全領域は十分にカバーされている。
なお、充填された液化ガスの量が減少すると、配管束14に載置された液化ガス容器30は、全重量が減少するためバネ24に引き上げられて徐々に浮き上がり、配管束14が液化ガス容器30をカバーする領域は狭くなっていく。しかし、一般に液化ガス容器30の容器重量は液化ガスの充填量と同程度であるため、仮に液化ガスが空になったとしても液化ガス容器30は十分に配管束14に沈み込んでいるため、上記クリティカルな状態において配管束14と液化ガス容器30との接触幅が不十分となって熱交換効率が低下する事態は発生しない。
なお、本発明にかかる加熱冷却装置10による熱交換効率をさらに向上するため、液化ガス容器30の上半分を加熱または冷却してもよい。かかる手段の具体例については後述する。
On the other hand, when the filling amount of the liquefied gas is reduced, the heat capacity becomes small and the temperature fluctuation becomes abrupt. Therefore, it is necessary to quickly perform heating or cooling by the heating and cooling device 10 following the temperature fluctuation. Generally, when the filling amount becomes about 10 to 30%, the bulk supply becomes the most critical. However, also in this case, since the amount of liquefied gas filling is small, the height of the liquid level is lower than the center of the liquefied gas container 30, and the entire area of the liquefied gas is obtained by the pipe bundle 14 shown in FIGS. It is fully covered.
When the amount of the filled liquefied gas is decreased, the liquefied gas container 30 placed on the pipe bundle 14 is pulled up by the spring 24 because the total weight is reduced, so that the pipe bundle 14 is gradually lifted. The area covering 30 becomes narrower. However, since the container weight of the liquefied gas container 30 is generally the same as the filling amount of the liquefied gas, even if the liquefied gas is empty, the liquefied gas container 30 is sufficiently submerged in the pipe bundle 14, In the critical state, the contact width between the pipe bundle 14 and the liquefied gas container 30 is not sufficient, so that the heat exchange efficiency does not decrease.
In addition, in order to further improve the heat exchange efficiency by the heating / cooling device 10 according to the present invention, the upper half of the liquefied gas container 30 may be heated or cooled. Specific examples of such means will be described later.

図3は、一部切欠図にて示す加熱冷却装置10に、液化ガス容器30を載置してなるガス供給装置50の概念図である。本発明にかかるガス供給装置50は、可撓性の配管束およびそれを吊下する架台を有する加熱冷却装置10と、液化ガス容器30とを有するものである。またガス供給装置50は、液化ガスの導出ライン、熱交換媒体の供給手段、およびその制御装置を備えてもよい。   FIG. 3 is a conceptual diagram of a gas supply device 50 in which a liquefied gas container 30 is placed on the heating / cooling device 10 shown in a partially cutaway view. The gas supply apparatus 50 according to the present invention includes a heating / cooling apparatus 10 having a flexible pipe bundle and a gantry for suspending the flexible pipe bundle, and a liquefied gas container 30. Further, the gas supply device 50 may include a liquefied gas lead-out line, a heat exchange medium supply means, and a control device therefor.

架台12の内部には、結束帯22を介して複数本の配管20が幅方向に連結された配管束14が、架台12の長手方向に沿って片側に3箇所ずつ設けられた吊下部16により吊下されて半割円筒状を形成している。配管束14の上には、横倒しにされた液化ガス容器30が載置され、上部を保温カバー34により被覆されている。保温カバー34は、液化ガス容器30からの熱の出入りを遮断し、保温または保冷効率を高めるための被覆部材である。   Inside the gantry 12, a pipe bundle 14, in which a plurality of pipes 20 are connected in the width direction via a tie band 22, is provided by a suspension 16 provided at three locations on one side along the longitudinal direction of the gantry 12. It is suspended and forms a half cylinder. A liquefied gas container 30 laid sideways is placed on the pipe bundle 14, and the upper part is covered with a heat insulating cover 34. The heat insulating cover 34 is a covering member that blocks heat from entering and exiting the liquefied gas container 30 and increases the heat retaining or cooling efficiency.

液化ガス容器30からは、気相ガス導出ライン80および液相ガス導出ライン82がそれぞれ延び、同一または異なるガス使用装置(図示せず)に液化ガスを供給する。気相ガス導出ライン80には減圧弁84が、液相ガス導出ライン82には定流量弁86がそれぞれ設けられ、液化ガスを所定の圧力や流量に制御可能である。   From the liquefied gas container 30, a gas phase gas outlet line 80 and a liquid phase gas outlet line 82 extend, respectively, and supply the liquefied gas to the same or different gas use devices (not shown). The gas-phase gas lead-out line 80 is provided with a pressure reducing valve 84, and the liquid-phase gas lead-out line 82 is provided with a constant flow valve 86 so that the liquefied gas can be controlled to a predetermined pressure and flow rate.

ガス供給装置50には、バンド28が架台12の長手方向の両端に設けられており、配管束14を液化ガス容器30に締め付けて両者の接触性を高めている。バンド28は、吊下部16と干渉しない限りその本数および締め付け位置は同図に示す態様に限られるものではなく、例えば3本以上を用いてもよく、またに保温カバー34を押圧してもよい。また保温カバー34を所定のテンションをかけて液化ガス容器30の周囲に張着する方式とすることで、バンド28の機能を併せ持たせることも可能である。   In the gas supply device 50, bands 28 are provided at both ends in the longitudinal direction of the gantry 12, and the pipe bundle 14 is fastened to the liquefied gas container 30 to enhance the contact between them. As long as the band 28 does not interfere with the suspended portion 16, the number and tightening position of the band 28 are not limited to the embodiment shown in the figure. For example, three or more bands 28 may be used and the heat retaining cover 34 may be pressed. . Further, the function of the band 28 can be provided by adopting a method in which the heat retaining cover 34 is applied around the liquefied gas container 30 with a predetermined tension.

配管20に供給される熱交換媒体、および熱交換媒体供給手段の例として、図3ではヒータ64により加温された温水62と、これを循環供給する温水タンク60を示している。温水タンク60に蓄えられた温水62は、ポンプ66により駆動され、媒体循環用配管68を通じて架台12の熱交換媒体供給口26a(図1参照)に導入される。熱交換に供された温水62は、熱交換媒体排出口26b(図1参照)より媒体循環用配管68に排出され、温水タンク60へと戻される。温水タンク60ではヒータ64にて所定の温度に加熱され、再び熱交換媒体として配管20に供給される。温水62の温度や、配管20に供給される温水の速度は、制御盤70により制御されている。かかる循環方式とすることで、熱交換媒体の温度をきめ細かく制御可能であるとともに、循環される温水62の量を少なくすることができ、エネルギーコストを低減することができる。   As an example of the heat exchange medium and heat exchange medium supply means supplied to the pipe 20, FIG. 3 shows a hot water 62 heated by a heater 64 and a hot water tank 60 that circulates and supplies this. The hot water 62 stored in the hot water tank 60 is driven by a pump 66 and introduced into the heat exchange medium supply port 26a (see FIG. 1) of the gantry 12 through the medium circulation pipe 68. The hot water 62 subjected to the heat exchange is discharged to the medium circulation pipe 68 from the heat exchange medium discharge port 26b (see FIG. 1) and returned to the hot water tank 60. The hot water tank 60 is heated to a predetermined temperature by a heater 64 and is supplied again to the pipe 20 as a heat exchange medium. The temperature of the hot water 62 and the speed of the hot water supplied to the pipe 20 are controlled by the control panel 70. By adopting such a circulation method, the temperature of the heat exchange medium can be finely controlled, and the amount of the hot water 62 to be circulated can be reduced, and the energy cost can be reduced.

なお、温水62の温度は0℃乃至40℃とすることが好適である。特に35℃乃至40℃の水を用いることが、アンモニアなどの液化ガスをバルク供給する場合の熱媒として好適である。また0℃乃至20℃の水を用いることが、液化ガスを冷却する場合の冷媒として好適である。   The temperature of the hot water 62 is preferably 0 ° C. to 40 ° C. In particular, water at 35 ° C. to 40 ° C. is suitable as a heat medium when supplying a liquefied gas such as ammonia in bulk. In addition, use of water at 0 ° C. to 20 ° C. is suitable as a refrigerant for cooling the liquefied gas.

本発明にかかるガス供給装置50によれば、配管束14と液化ガス容器30との良好な接触性により、高い熱交換効率を得ることができる。このため、ガス使用装置へのバルク供給中に気化潜熱を奪われて徐々に冷却される液化ガスの温度補償が迅速かつ効率的に行われ、長時間にわたるバルク供給が実現される。   According to the gas supply device 50 of the present invention, high heat exchange efficiency can be obtained due to good contact between the pipe bundle 14 and the liquefied gas container 30. For this reason, temperature compensation of the liquefied gas, which is gradually cooled by being deprived of vaporization latent heat during the bulk supply to the gas using apparatus, is performed quickly and efficiently, and the bulk supply over a long time is realized.

本発明にかかる加熱冷却装置10およびガス供給装置50を実施するためのその他の形態について以下説明する。   Other modes for carrying out the heating / cooling device 10 and the gas supply device 50 according to the present invention will be described below.

熱交換媒体を内部に流通する配管20を、その幅方向に切断した断面(横断面)の形状は、一般的な円形のほか、矩形またはその他の形状とすることができる。   The shape of the cross section (transverse cross section) obtained by cutting the pipe 20 that circulates the heat exchange medium in the width direction may be a general circle, a rectangle, or other shapes.

図4は、配管20の好適な横断面形状の例であり、同図(a)は円形、(b)は楕円形、(c)は長円形、(d)は弓形である。円形の場合、配管の入手性や、加熱冷却装置10内における這い回しに優れる。楕円形および長円形は、円形に比べて液化ガス容器30との接触性がよく、円形断面の場合に比べ、より少ない本数の配管によって同等の熱交換効率が得られる。弓形の場合、凹面側を液化ガス容器30の載置面32とすることで、該容器に対する高い接触性と熱交換効率が得られる。凹面の曲率は、載置される液化ガス容器30の外周面の曲率にあわせるとよい。   FIG. 4 is an example of a suitable cross-sectional shape of the pipe 20, wherein FIG. 4A is a circle, FIG. 4B is an ellipse, FIG. 4C is an oval, and FIG. In the case of a circle, it is excellent in the availability of piping and scooping in the heating / cooling device 10. The oval shape and the oval shape have better contact with the liquefied gas container 30 than the circular shape, and the same heat exchange efficiency can be obtained with a smaller number of pipes than the circular cross section. In the case of an arcuate shape, by setting the concave surface side as the mounting surface 32 of the liquefied gas container 30, high contactability with the container and heat exchange efficiency can be obtained. The curvature of the concave surface may be matched with the curvature of the outer peripheral surface of the liquefied gas container 30 to be placed.

図5は、配管束14を幅方向に切断した横断面の部分拡大図である。金属の薄板からなる結束帯22の上面に弓形断面をもつ配管20が、所定の間隔をもって横並びに接合されている。また配管束14の上面には、ゲル状の熱伝導性フィラー36が設けられている。
熱伝導性フィラー36は、配管束14に載置された液化ガス容器30の自重によって押し潰されて変形し、配管20との微小な隙間を埋めることができる。
これにより、本発明にかかる可撓性の配管束14と液化ガス容器30との良好な接触性がさらに高められ、熱交換媒体による熱交換効率を向上させることができる。
熱伝導性フィラー36には高熱電導性のゲル状物質であれば広く用いることができ、例えばシリコーンゴムやフッ素ゴムなどのゴム材料や、金属等の熱伝導物質を含有した樹脂材料などをシート状に成形して用いることができる。また、熱媒として一般的に用いられる40℃程度の温水の熱で溶融しないことが好ましい。
また、熱伝導性フィラー36として上記ゴム材料を用いるなどして、これを着脱自在とすることで、従来のように伝熱セメントにて熱交換器と液化ガス容器とを固着する方式とは異なり、液化ガス容器30の容易な交換作業性を損なうことなく、本発明にかかる加熱冷却装置10の高い熱交換性能を享受することができる。
FIG. 5 is a partial enlarged view of a cross section obtained by cutting the pipe bundle 14 in the width direction. A pipe 20 having an arcuate cross section is joined side by side with a predetermined interval on the upper surface of a binding band 22 made of a thin metal plate. A gel-like thermally conductive filler 36 is provided on the upper surface of the pipe bundle 14.
The thermally conductive filler 36 can be crushed and deformed by its own weight of the liquefied gas container 30 placed on the pipe bundle 14 to fill a minute gap with the pipe 20.
Thereby, the favorable contact property of the flexible pipe bundle 14 concerning this invention and the liquefied gas container 30 is further improved, and the heat exchange efficiency by a heat exchange medium can be improved.
The thermally conductive filler 36 can be widely used as long as it is a gel material having high thermal conductivity. For example, a rubber material such as silicone rubber or fluororubber, or a resin material containing a heat conductive material such as metal is used in a sheet form. It can be used after being molded. Moreover, it is preferable not to melt | dissolve with the heat of about 40 degreeC warm water generally used as a heat medium.
Also, by using the rubber material as the heat conductive filler 36 and making it detachable, it is different from the conventional method of fixing the heat exchanger and the liquefied gas container with heat transfer cement. The high heat exchange performance of the heating and cooling device 10 according to the present invention can be enjoyed without impairing the easy replacement workability of the liquefied gas container 30.

配管束14と架台12とを結合する弾性体は、図2に例示した直線バネのほか、捩りバネ、板バネなども用いることができる。また、弾性体は、図2に模式的に示すように配管束14と吊下部16との間に設けられる態様のほか、配管束14の内部に設けることもできる。すなわち、可撓性の結束帯22に長手方向の揃う配管20を幅方向に並べて接合してなる配管束14において、結束帯22の全体を引張剛性の低い樹脂材料から形成することで、配管20同士の連結角度が変えられる面外方向の曲げ剛性と、配管20同士の間隔を伸ばすことのできる面内方向の引張剛性をいずれも低いものとすることができ、いずれも配管束14を液化ガス容器30の外周面に好適にフィットさせる効果が得られる。
また結束帯22において、隣り合う配管20同士の間に、ストライプ状に引張剛性の低い箇所を設けることでも、配管20同士の間隔や連結角度を変化させることができ、同様の効果が得られる。
In addition to the linear spring illustrated in FIG. 2, a torsion spring, a leaf spring, or the like can be used as the elastic body that couples the pipe bundle 14 and the gantry 12. Further, the elastic body can be provided inside the pipe bundle 14 in addition to the aspect provided between the pipe bundle 14 and the suspended portion 16 as schematically shown in FIG. That is, in the pipe bundle 14 in which the pipes 20 aligned in the longitudinal direction are joined to the flexible binding band 22 in the width direction, the entire binding band 22 is formed from a resin material having a low tensile rigidity. Both the bending rigidity in the out-of-plane direction in which the connection angle between the pipes can be changed and the tensile rigidity in the in-plane direction that can extend the interval between the pipes 20 can be made low. The effect of fitting to the outer peripheral surface of the container 30 is obtained.
In addition, in the binding band 22, by providing a portion having a low tensile rigidity in a stripe shape between the adjacent pipes 20, the interval and the connection angle between the pipes 20 can be changed, and the same effect can be obtained.

また本発明においては、弾性体の弾性率を調整自在とすることも好適である。これにより、配管束14に載置される液化ガス容器30の規格や充填される液化ガスの質量に応じて好適な弾性率を選択可能となる。例えば大型の液化ガス容器30を載置する場合は、弾性体の引張変形量が大きくなりすぎぬよう弾性率を所定の大きさとし、小型の液化ガス容器30を載置する場合は、配管束14の柔軟な変形を促進するために弾性率を小さくすると良い。
さらに、弾性体の弾性率を液化ガスのバルク供給の最中に動的に調整可能としてもよい。この場合、液化ガスの充填量の減少に伴って漸減する載置重量(図2の矢印G参照)をロードセル等にて測定し、配管束14と液化ガス容器30とのフィット性が常に最適となるよう弾性率を制御することが可能となる。
In the present invention, it is also preferable that the elastic modulus of the elastic body is adjustable. Thereby, a suitable elastic modulus can be selected according to the standard of the liquefied gas container 30 placed on the pipe bundle 14 and the mass of the liquefied gas to be filled. For example, when the large liquefied gas container 30 is placed, the elastic modulus is set to a predetermined value so that the tensile deformation amount of the elastic body does not become too large, and when the small liquefied gas container 30 is placed, the pipe bundle 14 In order to promote flexible deformation, it is preferable to reduce the elastic modulus.
Further, the elastic modulus of the elastic body may be dynamically adjustable during the bulk supply of the liquefied gas. In this case, the mounting weight (see arrow G in FIG. 2) that gradually decreases as the filling amount of the liquefied gas decreases is measured with a load cell or the like, and the fitting property between the pipe bundle 14 and the liquefied gas container 30 is always optimal. The elastic modulus can be controlled to be

また本発明においては、配管束14を吊下する吊下部16の位置を鉛直上下方向または架台12の幅方向に移動可能としてもよい。例えば径の大きな液化ガス容器30を配管束14に載置する場合は、架台12の幅方向に対向する吊下部16同士の間隔を大きくし、かつ吊下部16の位置を高くし、逆に径の小さな液化ガス容器30を載置する場合は吊下部16同士の間隔を小さくし、かつ吊下部16の位置を低くすることで、加熱冷却装置10が液化ガス容器30の複数の規格に対応可能となり、その汎用性が向上する。   In the present invention, the position of the suspending portion 16 that suspends the pipe bundle 14 may be movable in the vertical vertical direction or the width direction of the gantry 12. For example, when the liquefied gas container 30 having a large diameter is placed on the pipe bundle 14, the interval between the suspending portions 16 facing each other in the width direction of the gantry 12 is increased, and the position of the suspending portion 16 is increased. When a small liquefied gas container 30 is placed, the heating / cooling device 10 can cope with a plurality of standards of the liquefied gas container 30 by reducing the interval between the suspended portions 16 and lowering the position of the suspended portion 16. Thus, the versatility is improved.

また本発明にかかる加熱冷却装置10おいては、保温カバー34(図3参照)に替えて、またはこれと併用して、載置される液化ガス容器30の上方を被覆する上部配管束38を設けてもよい。   Further, in the heating and cooling apparatus 10 according to the present invention, the upper pipe bundle 38 that covers the upper portion of the liquefied gas container 30 to be placed is used instead of or in combination with the heat insulating cover 34 (see FIG. 3). It may be provided.

図6は、上部配管束38の具体例を示す模式図である。吊下部16に両端を保持された配管束14には、液化ガス容器30が載置されている。配管束14には、図示しないヒンジ機構を介して一対の上部配管束38が回動自在に連結している。上部配管束38は、内部を温水などの熱交換媒体が流通可能な配管を幅方向に複数本連結してなる曲面状の熱交換用部材である。上部配管束38の曲面形状は、液化ガス容器30の上部の外周形状に適合する曲率としてある。
同図に示すように、液化ガス容器30を搭載する際は、一対の上部配管束38は上方を開口している。液化ガス容器30がこれを通過して配管束14に載置されると、上記ヒンジ機構を中心として上部配管束38は図中の矢印に示す方向に回動し、液化ガス容器30の上部を被覆する。これにより、液化ガス容器30の下部を配管束14、上部を上部配管束38にて加熱または冷却することとなり、加熱冷却装置10の熱交換効率が向上する。
FIG. 6 is a schematic diagram showing a specific example of the upper pipe bundle 38. A liquefied gas container 30 is placed on the pipe bundle 14 whose both ends are held by the hanging portion 16. A pair of upper pipe bundles 38 are rotatably connected to the pipe bundle 14 via a hinge mechanism (not shown). The upper pipe bundle 38 is a curved heat exchange member formed by connecting a plurality of pipes in the width direction through which a heat exchange medium such as hot water can flow. The curved shape of the upper pipe bundle 38 is a curvature that matches the outer peripheral shape of the upper part of the liquefied gas container 30.
As shown in the figure, when the liquefied gas container 30 is mounted, the pair of upper pipe bundles 38 open upward. When the liquefied gas container 30 passes through and is placed on the pipe bundle 14, the upper pipe bundle 38 rotates around the hinge mechanism in the direction indicated by the arrow in the drawing, and the upper part of the liquefied gas container 30 is moved. Cover. As a result, the lower part of the liquefied gas container 30 is heated or cooled by the pipe bundle 14 and the upper part by the upper pipe bundle 38, and the heat exchange efficiency of the heating and cooling device 10 is improved.

本発明にかかる加熱冷却装置10やガス供給装置50は、縦置き型の液化ガス容器に適用することも可能である。この場合、巻き簾状に形成した配管束14を側方から液化ガス容器に巻き付け、バンド28などで固縛することで熱交換をおこなうことが可能となる。   The heating / cooling device 10 and the gas supply device 50 according to the present invention can also be applied to a vertically placed liquefied gas container. In this case, it is possible to exchange heat by winding the pipe bundle 14 formed in a curled shape around the liquefied gas container from the side and securing it with a band 28 or the like.

本発明にかかる加熱冷却装置の三面図であり、(a)平面図、(b)正面図、(c)側面図である。It is a three-plane figure of the heating-cooling apparatus concerning this invention, (a) Top view, (b) Front view, (c) Side view. 配管束の断面模式図であり、(a)液化ガス容器を載置する前の配管束、(b)液化ガス容器を載置した状態の配管束をそれぞれ表す。It is a cross-sectional schematic diagram of a pipe bundle, and represents (a) a pipe bundle before placing the liquefied gas container and (b) a pipe bundle in a state where the liquefied gas container is placed. 本発明にかかるガス供給装置の概念図である。It is a conceptual diagram of the gas supply apparatus concerning this invention. (a)〜(d)配管の好適な横断面形状を示す断面図である。(A)-(d) It is sectional drawing which shows the suitable cross-sectional shape of piping. 配管束の横断面の部分拡大図である。It is the elements on larger scale of the cross section of a pipe bundle. 上部配管束の具体例を示す模式図である。It is a schematic diagram which shows the specific example of an upper piping bundle.

符号の説明Explanation of symbols

加熱冷却装置 10
架台 12
配管束 14
吊下部 16
配管 20
結束帯 22
バネ 24
バンド 28
液化ガス容器 30
載置面 32
保温カバー 34
熱伝導性フィラー 36
上部配管束 38
ガス供給装置 50
温水タンク 60
媒体循環用配管 68
気相ガス導出ライン 80
液相ガス導出ライン 82
Heating and cooling device 10
Mount 12
Pipe bundle 14
Suspended lower part 16
Piping 20
Cable tie 22
Spring 24
Band 28
Liquefied gas container 30
Mounting surface 32
Thermal insulation cover 34
Thermally conductive filler 36
Upper pipe bundle 38
Gas supply device 50
Hot water tank 60
Piping for medium circulation 68
Gas phase gas outlet line 80
Liquid phase gas outlet line 82

Claims (8)

液化ガスが充填された液化ガス容器を加熱または冷却する加熱冷却装置であって、内部を熱交換媒体が流通する複数本の配管が幅方向に連結された可撓性の配管束と、該配管束を吊下する架台と、を有することを特徴とする液化ガス容器の加熱冷却装置。   A heating and cooling device for heating or cooling a liquefied gas container filled with a liquefied gas, a flexible pipe bundle in which a plurality of pipes through which a heat exchange medium flows are connected in the width direction, and the pipes A heating and cooling device for a liquefied gas container, comprising: a gantry for suspending a bundle. 液化ガスが充填された液化ガス容器を加熱または冷却する加熱冷却装置であって、内部を熱交換媒体が流通する複数本の配管がその長手方向を横切る方向に設けられた可撓性を有する結束帯にそれぞれ接合されて液化ガス容器の載置面が形成された配管束と、該配管束を吊下する架台と、を有することを特徴とする液化ガス容器の加熱冷却装置。   A heating and cooling device for heating or cooling a liquefied gas container filled with a liquefied gas, wherein a plurality of pipes through which a heat exchange medium circulates are provided in a direction crossing the longitudinal direction thereof and having a flexibility An apparatus for heating and cooling a liquefied gas container, comprising: a pipe bundle in which a mounting surface of the liquefied gas container is formed, each of which is joined to a band; and a mount for suspending the pipe bundle. 配管束と架台とが弾性体により連結されていることを特徴とする請求項1または2に記載の加熱冷却装置。   The heating and cooling device according to claim 1 or 2, wherein the pipe bundle and the mount are connected by an elastic body. 配管の横断面形状が楕円形、長円形、または弓形であることを特徴とする請求項1から3のいずれかに記載の加熱冷却装置。   The heating / cooling device according to any one of claims 1 to 3, wherein the cross-sectional shape of the pipe is elliptical, oval, or arcuate. 配管束には、液化ガス容器の載置面に熱伝導性フィラーが設けられていることを特徴とする請求項1から4のいずれかに記載の加熱冷却装置。   The heating and cooling device according to any one of claims 1 to 4, wherein the pipe bundle is provided with a heat conductive filler on a mounting surface of the liquefied gas container. 請求項1から5のいずれかに記載の加熱冷却装置の配管束に、液化ガスが充填された液化ガス容器を載置してなるガス供給装置。   A gas supply device comprising a liquefied gas container filled with a liquefied gas placed on a pipe bundle of the heating and cooling device according to claim 1. 請求項1から5のいずれかに記載の加熱冷却装置の配管に、0℃乃至40℃の水を供給する熱交換媒体供給手段を備えるガス供給装置。   A gas supply device comprising heat exchange medium supply means for supplying water at 0 ° C to 40 ° C to the piping of the heating and cooling device according to any one of claims 1 to 5. 配管束を液化ガス容器に押圧する押圧手段を備えることを特徴とする請求項6に記載のガス供給装置。   The gas supply apparatus according to claim 6, further comprising a pressing unit that presses the pipe bundle against the liquefied gas container.
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KR101062401B1 (en) * 2008-12-03 2011-09-05 더블유아이씨 주식회사 Gas cylinder filling and processing equipment for semiconductors
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CN106523909A (en) * 2016-12-01 2017-03-22 浙江海洋大学 Rolling and pressure exceeding preventing LNG storage tank
CN106704813A (en) * 2016-12-01 2017-05-24 浙江海洋大学 LNG (Liquefied Natural Gas) tank car storage tank for preventing liquid from being stolen and monitoring method of LNG tank car storage tank

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