JP2007141510A - X-ray generator - Google Patents

X-ray generator Download PDF

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JP2007141510A
JP2007141510A JP2005330103A JP2005330103A JP2007141510A JP 2007141510 A JP2007141510 A JP 2007141510A JP 2005330103 A JP2005330103 A JP 2005330103A JP 2005330103 A JP2005330103 A JP 2005330103A JP 2007141510 A JP2007141510 A JP 2007141510A
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insulating oil
water
ray
ray generator
ray tube
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JP4638808B2 (en
JP2007141510A5 (en
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Keiichiro Yamamoto
敬一郎 山本
Yuji Kakizaki
裕司 柿崎
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JOBU KK
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Abstract

<P>PROBLEM TO BE SOLVED: To prevent the occurrence of discharge resulting from mixing moisture into insulation oil 2 of an X-ray generator. <P>SOLUTION: In the X-ray generator comprising a metal enclosure 3 mainly containing an X-ray tube 1 and the insulation oil 2, a water absorbent 20 received in a water permeable bag 21 is provided in the insulation oil 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、Ｘ線発生装置に関し、詳しくは食料品や医薬品などの被検査物中の異物を検出する非破壊検査に用いられるＸ線発生装置に関するものである。   The present invention relates to an X-ray generation device, and more particularly to an X-ray generation device used for nondestructive inspection for detecting foreign matter in an object to be inspected, such as food and medicine.

食料品や医薬品などの製造ラインにおいては、製品中の異物の有無について連続的な全品検査が実施されており、その手段としてＸ線を用いた非破壊の検査が行われている。この検査は、Ｘ線発生装置から放射されたＸ線を被検査物に照射して、その透過量を画像処理することにより異物を検出するものである。   In a production line for foodstuffs and pharmaceuticals, continuous inspection of all products is performed for the presence or absence of foreign substances in the product, and non-destructive inspection using X-rays is performed as the means. In this inspection, X-rays radiated from the X-ray generator are irradiated onto an object to be inspected, and foreign matter is detected by image processing the amount of transmission.

検査に用いられるＸ線発生装置の構造を図４に示す。図４は、Ｘ線発生装置の側面からの断面図である。   The structure of an X-ray generator used for inspection is shown in FIG. FIG. 4 is a cross-sectional view from the side of the X-ray generator.

Ｘ線発生装置は、Ｘ線管球１と絶縁油２を収納する上面に開口部を有する金属製の封入容器３から主に構成され、伝熱器４と放熱器５が当該開口部を閉止するように取り付けられている。   The X-ray generator is mainly composed of a metal enclosure 3 having an opening on the upper surface for storing the X-ray tube 1 and the insulating oil 2, and the heat transfer device 4 and the radiator 5 close the opening. It is attached to do.

Ｘ線管球１は、真空ガラス内に封入されたアノード６とカソード７間に図示しない高電圧発生装置により高電圧を印加して、カソード７からの熱電子をアノード６に衝突させることにより、Ｘ線放射口８からＸ線９を放射するものである。このＸ線管球１には、Ｘ線発生装置を小型化するために、通常は小型で高性能のカソード接地型のものが用いられている。   The X-ray tube 1 applies a high voltage by a high voltage generator (not shown) between the anode 6 and the cathode 7 sealed in the vacuum glass, and collides thermal electrons from the cathode 7 with the anode 6. X-rays 9 are emitted from the X-ray emission port 8. In order to reduce the size of the X-ray generator, the X-ray tube 1 is usually a small and high performance cathode grounding type.

なお、Ｘ線放射口８以外からのＸ線の漏洩を防止するために、Ｘ線管球１の表面はＸ線放射口８を除いて円筒形状の鉛製遮へいカバー１０により覆われている。   In order to prevent leakage of X-rays from other than the X-ray emission port 8, the surface of the X-ray tube 1 is covered with a cylindrical lead shielding cover 10 except for the X-ray emission port 8.

絶縁油２は、封入容器３に充填されており、Ｘ線９の放射に伴い発熱するＸ線管球１を冷却するとともに、Ｘ線管球１のアノード６とカソード７、及び接地された封入容器３との間を絶縁する役目を有している。   The insulating oil 2 is filled in the enclosure 3 and cools the X-ray tube 1 that generates heat with the radiation of the X-rays 9, and the anode 6 and the cathode 7 of the X-ray tube 1 and the grounded enclosure It serves to insulate the container 3.

このような構造のＸ線発生装置においては、その製造工程において絶縁油２が空気中にさらされたり、使用時において封入容器３の気密不良などにより空気が内部へ侵入したり、封入容器３や図示しない高電圧発生装置の構成部品から水分が析出することにより、絶縁油２に微量の水分が混入して絶縁破壊電圧が低下してしまうという問題があった。   In the X-ray generator having such a structure, the insulating oil 2 is exposed to the air in the manufacturing process, the air enters the inside due to poor airtightness of the enclosure 3 during use, There is a problem that a minute amount of moisture is mixed into the insulating oil 2 and the dielectric breakdown voltage is lowered due to the precipitation of moisture from the components of the high voltage generator (not shown).

絶縁油２の絶縁破壊電圧が低下すると、封入容器３の内部で放電が発生することにより放射されるＸ線９の線量が低下するので、画像処理において被検査物中の異物として誤って検出されてしまうため、非破壊検査の精度が低下して製造ラインの生産効率を低下させる原因となる。   When the dielectric breakdown voltage of the insulating oil 2 decreases, the dose of X-rays 9 emitted by the occurrence of discharge inside the enclosure 3 decreases, so that it is erroneously detected as a foreign object in the inspection object in image processing. Therefore, the accuracy of the nondestructive inspection is lowered, which causes the production efficiency of the production line to be lowered.

そのため現状では、Ｘ線発生装置の製造工程において、絶縁油２の注入後、連続運転によるエージングと絶縁油２の新品交換とを繰り返し行うことにより、絶縁油２へ混入する水分量をできるだけ下げる方法が取られている。   Therefore, at present, in the manufacturing process of the X-ray generator, after injecting the insulating oil 2, a method of reducing the amount of water mixed in the insulating oil 2 as much as possible by repeatedly performing aging by continuous operation and new replacement of the insulating oil 2 Has been taken.

また、カソード接地型のＸ線管球１におけるアノード６の対地電位差に比べて、アノード６とカソード７の対地電圧差が低いため放電が発生しにくいという理由から、中性点接地型のＸ線管球１を採用することも行われている。   Further, since the ground voltage difference between the anode 6 and the cathode 7 is lower than the ground potential difference between the anode 6 and the cathode grounded X-ray tube 1, the neutral point grounded X-ray is not generated. A tube 1 is also employed.

しかし、上記の方法では、Ｘ線発生装置の製造工程数が増加するとともに、絶縁油の使用量が増えるために製造コストが高くなるという問題があった。   However, the above method has a problem that the number of manufacturing steps of the X-ray generator increases and the amount of insulating oil used increases, resulting in an increase in manufacturing cost.

また、中性点接地型のＸ線管球は、カソード接地型に比べて高圧電圧の印加方式が複雑になるため高品位のＸ線を得ることが困難であるという問題もあった。   In addition, the neutral point grounded X-ray tube has a problem in that it is difficult to obtain high-quality X-rays because the method of applying a high voltage is more complicated than the grounded cathode type.

更には、Ｘ線発生装置の使用時における絶縁油への水分の混入には対応できないため、放電が発生して初期の非破壊検査の精度を維持することができないという問題もあった。   Furthermore, since it is not possible to cope with the mixing of moisture into the insulating oil when the X-ray generator is used, there has been a problem that the accuracy of the initial nondestructive inspection cannot be maintained due to the occurrence of discharge.

本発明は、このような問題点に鑑みてなされたものであり、放電の発生を防止することができ、かつ低コストで製造することができる精度の高いＸ線発生装置の提供を目的とするものである。   The present invention has been made in view of such problems, and an object of the present invention is to provide a highly accurate X-ray generator that can prevent the occurrence of discharge and can be manufactured at low cost. Is.

上記の目的を達成するため、本発明は、Ｘ線管球と、前記Ｘ線管球が浸漬する絶縁油と、前記Ｘ線管球と前記絶縁油とを収納する封入容器とからなるＸ線発生装置であって、前記絶縁油中に吸水剤を備えることを特徴とするＸ線発生装置である。   In order to achieve the above object, the present invention provides an X-ray comprising an X-ray tube, an insulating oil in which the X-ray tube is immersed, and an enclosure that contains the X-ray tube and the insulating oil. A generator, wherein the insulating oil includes a water-absorbing agent.

このような構成により、絶縁油に混入する水分を吸水剤により選択的に吸収して、絶縁油の絶縁破壊電圧の低下を防止して放電の発生を防ぐことができる。   With such a configuration, moisture mixed in the insulating oil can be selectively absorbed by the water-absorbing agent to prevent a decrease in the dielectric breakdown voltage of the insulating oil and prevent the occurrence of discharge.

なお、この吸水剤については、活性炭、ゼオライト、モレキュラーシーブス、シリカゲル及び活性アルミナ、またはそれらを組み合わせたものでよいが、特に温度条件及び吸着能力などの点からモレキュラーシーブスを用いることが望ましい。   The water-absorbing agent may be activated carbon, zeolite, molecular sieves, silica gel and activated alumina, or a combination thereof. In particular, it is desirable to use molecular sieves in view of temperature conditions and adsorption capacity.

実際の使用に際しては、水分を選択的に吸収する大きさの吸着孔を有するモレキュラーシーブスを透水性の袋体に収納して用いるのがよい。   In actual use, it is preferable to use molecular sieves having adsorption holes of a size that selectively absorbs moisture in a water-permeable bag.

本発明においては、Ｘ線発生装置において絶縁油中にモレキュラーシーブス等の吸水剤を備える構成としたため、吸水剤により絶縁油に混入した水分を吸着して絶縁破壊電圧の低下を防止して放電の発生を防ぐことができる。   In the present invention, since the X-ray generator is configured to include a water absorbent such as molecular sieves in the insulating oil, the water absorbed in the insulating oil is adsorbed by the water absorbent to prevent the breakdown voltage from being lowered. Occurrence can be prevented.

これにより、Ｘ線発生装置の製造工程を簡略化することができ、絶縁油の使用量を減らすこともできるため、製造コストを低減することができる。   Thereby, since the manufacturing process of an X-ray generator can be simplified and the usage-amount of insulating oil can also be reduced, manufacturing cost can be reduced.

この吸水剤を袋体等に収納して用いることにより、製造時及び製品の寿命終了後における取り扱いが容易となる。   By storing and using this water-absorbing agent in a bag or the like, handling at the time of manufacture and after the end of the product life is facilitated.

また、Ｘ線発生装置の製造時において絶縁油に混入した水分とともに、使用時において絶縁油に混入する水分も吸着することができるため、非破壊検査の精度を維持することができ、製造ラインの生産効率を高めることができる。   In addition, the moisture mixed in the insulating oil at the time of manufacture of the X-ray generator and the water mixed in the insulating oil at the time of use can be adsorbed, so that the accuracy of the non-destructive inspection can be maintained. Production efficiency can be increased.

更に、Ｘ線発生装置の使用期間中にわたって絶縁油の絶縁破壊電圧の低下を防止することができるため、封入する絶縁油の量を少なくすることができ、Ｘ線発生装置の小型化を図ることが可能となる。   Furthermore, since the dielectric breakdown voltage of the insulating oil can be prevented from being lowered during the period of use of the X-ray generator, the amount of insulating oil to be sealed can be reduced, and the X-ray generator can be miniaturized. Is possible.

本発明に実施の形態について、図面を参照して説明する。
本発明に係る第１の実施形態を図１に示す。図１は、第１の実施形態に係るＸ線発生装置の構造を示した断面図である。なお、図４と同じ部分には同一の符号を付している。 Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a first embodiment according to the present invention. FIG. 1 is a cross-sectional view showing the structure of the X-ray generator according to the first embodiment. In addition, the same code | symbol is attached | subjected to the same part as FIG.

第１の実施形態に係るＸ線発生装置は、図４に示す従来のＸ線発生装置の封入容器３内に吸水剤２０を備えたものである。従って、同一の部分についての説明は省略する。   The X-ray generator according to the first embodiment includes a water-absorbing agent 20 in the enclosure 3 of the conventional X-ray generator shown in FIG. Therefore, the description about the same part is abbreviate | omitted.

吸水剤２０は、透水性の袋体２１の内部に収納されて、絶縁油２に浸漬した状態で遮へいカバー１０に跨るように載置されている。   The water-absorbing agent 20 is housed inside the water-permeable bag 21 and is placed so as to straddle the shielding cover 10 while being immersed in the insulating oil 2.

この吸水剤２０は、水分の吸着能力が大きい物質、例えば、活性炭、ゼオライト、モレキュラーシーブス、シリカゲル、活性アルミナなどを用いることができる。特に、Ｘ線発生装置の使用時における絶縁油２の温度（約２０〜１００℃）、その絶縁油２に混入している水分量（約５〜６０ ｐｐｍ）、及び電気的絶縁などの諸条件を考慮すると、当該温度範囲で高い吸着能力を有する絶縁体であるモレキュラーシーブスであることが好ましい。なお、モレキュラーシーブスが水分を選択的に吸着するためには、有効孔径が約０．３ ｎｍ、具体的には商品種別が３Ａのモレキュラーシーブスを使用するのがよい。   As the water-absorbing agent 20, a substance having a large moisture adsorption ability, such as activated carbon, zeolite, molecular sieves, silica gel, activated alumina, or the like can be used. In particular, the temperature of the insulating oil 2 when using the X-ray generator (about 20 to 100 ° C.), the amount of moisture mixed in the insulating oil 2 (about 5 to 60 ppm), and various conditions such as electrical insulation In view of the above, it is preferable that the molecular sieve is an insulator having a high adsorption ability in the temperature range. In order for the molecular sieves to selectively adsorb moisture, it is preferable to use molecular sieves having an effective pore diameter of about 0.3 nm, specifically a product type of 3A.

また、吸水剤２０の形状は、ビーズ状、ペレット状又は粉末状などのいずれの形状でもよいが、表面積を大きく取れることからペレット状とすることが好ましい。また、吸水剤２０を収納する袋体２１は、例えばポリエチレン製の不織布などでつくることができる。   The shape of the water-absorbing agent 20 may be any shape such as a bead shape, a pellet shape, or a powder shape, but is preferably a pellet shape because a large surface area can be obtained. Moreover, the bag body 21 which accommodates the water absorbing agent 20 can be made from a nonwoven fabric made of polyethylene, for example.

なお、吸水剤を収納するのは袋体２１に限られるものではなく、例えば透水性のセラミックスからなる箱体でもかまわない。   Note that the water absorbing agent is not limited to the bag body 21 and may be a box made of water-permeable ceramics, for example.

この袋体２１に収納された吸水剤２０を載置する場所は、封入容器３内で発生する絶縁油２の循環的な対流がかかる場所、例えば図１のような遮へいカバー１０上などがよい。   The place where the water-absorbing agent 20 accommodated in the bag body 21 is placed is preferably a place where the circulating convection of the insulating oil 2 generated in the enclosure 3 is applied, for example, on the shielding cover 10 as shown in FIG. .

以上のような構成を有する第１の実施形態に係るＸ線発生装置の作用を以下に説明する。   The operation of the X-ray generator according to the first embodiment having the above configuration will be described below.

Ｘ線管球１のアノード６とカソード７の間に高電圧発生装置（図示せず）により高電圧が印加されると、Ｘ線管球１からＸ線９が放射される。そして、このＸ線９の放射に伴いＸ線管球１に発生する熱による温度差と、封入容器３内に発生する強い電界によるクーロン力とにより、絶縁油２には対流現象が発生する。この対流現象により、Ｘ線管球１に発生した熱は絶縁油２から吸熱器４へ伝えられ放熱器５を介して外部へ放熱される。   When a high voltage is applied between the anode 6 and the cathode 7 of the X-ray tube 1 by a high voltage generator (not shown), X-rays 9 are emitted from the X-ray tube 1. A convection phenomenon occurs in the insulating oil 2 due to a temperature difference due to heat generated in the X-ray tube 1 due to the radiation of the X-ray 9 and a Coulomb force due to a strong electric field generated in the enclosure 3. Due to this convection phenomenon, heat generated in the X-ray tube 1 is transmitted from the insulating oil 2 to the heat absorber 4 and is radiated to the outside through the heat radiator 5.

このとき、封入容器３内で対流する絶縁油２は、袋体２１内を流れて吸水剤２０と接触することにより混入している水分が吸水剤２０に吸着される。   At this time, the insulating oil 2 that convects in the sealed container 3 flows through the bag body 21 and comes into contact with the water-absorbing agent 20, so that the mixed moisture is adsorbed by the water-absorbing agent 20.

このようにして、Ｘ線発生装置の使用期間中にわたって絶縁油２の絶縁破壊電圧の低下を防止することができる。   In this way, it is possible to prevent the dielectric breakdown voltage of the insulating oil 2 from being lowered over the period of use of the X-ray generator.

また、吸水剤２０を袋体２１に収納しているため、Ｘ線発生装置の製造時及び寿命終了後における吸水剤２０の取り扱いが容易となる。   Moreover, since the water absorbing agent 20 is accommodated in the bag body 21, the water absorbing agent 20 can be easily handled at the time of manufacture of the X-ray generator and after the end of its life.

寿命終了後に回収された吸収剤２０については、例えばモレキュラーシーブスの場合には減圧環境下で一定時間加熱処理することにより、吸着した水分を放出させて再利用することができるため、Ｘ線発生装置に製造コストの更なる低減を図ることができる。   For the absorbent 20 collected after the end of its life, for example, in the case of molecular sieves, the adsorbed moisture can be released and reused by heat treatment in a reduced pressure environment for a certain period of time. In addition, the manufacturing cost can be further reduced.

本発明に係る第２の実施形態を図２に示す。図２は、第２の実施形態に係るＸ線発生装置の構造を示した断面図である。   A second embodiment according to the present invention is shown in FIG. FIG. 2 is a cross-sectional view showing the structure of the X-ray generator according to the second embodiment.

第２の実施形態は、フィルム状又は薄板上の吸水剤２０を封入容器３の内面に取り付けるものである。吸水剤２０の取り付け方法は、接着剤等によるものでも、ネジ等による機械的なものでもよい。また、取り付け場所は、封入容器３内で発生する絶縁油２の循環的な対流がかかる場所、例えば図２のように封入容器３の内側面の上部などがよい。   In the second embodiment, a water absorbent 20 on a film or thin plate is attached to the inner surface of the enclosure 3. The water absorbing agent 20 may be attached by an adhesive or a mechanical method using screws or the like. The mounting location is preferably a location where the circulating convection of the insulating oil 2 generated in the enclosure 3 is applied, for example, the upper part of the inner surface of the enclosure 3 as shown in FIG.

なお、吸水剤２０をそのまま取り付けるのではなく、微粉末状にして溶剤に混ぜたものを封入容器３の内面等に付着又は塗布する方法でもよい。   Instead of attaching the water absorbing agent 20 as it is, a method of adhering or applying a fine powdered form mixed with a solvent to the inner surface of the enclosure 3 or the like may be used.

本発明に係る第３の実施形態を図３に示す。図３は、第３の実施形態に係るＸ線発生装置の構造を示した断面図である。   A third embodiment according to the present invention is shown in FIG. FIG. 3 is a sectional view showing the structure of the X-ray generator according to the third embodiment.

第３の実施形態は、吸水剤２０を袋体２１等に収納しないで、絶縁油２中にそのまま分散させるものである。   In the third embodiment, the water absorbing agent 20 is not stored in the bag body 21 or the like, but is dispersed as it is in the insulating oil 2.

吸水剤２０の形状は、ビーズ状、ペレット状又は粉末状などのいずれでもよいが、取り扱いの容易さの点から、ビーズ状又はペレット状であることが望ましい。   The shape of the water-absorbing agent 20 may be any of a bead shape, a pellet shape, a powder shape, and the like, but is preferably a bead shape or a pellet shape from the viewpoint of easy handling.

本実施形態では、袋体２１等が不要となる点で製造コストの低減を図ることができ、また吸水剤２０と絶縁油２の接触面積を最大限に取ることが可能となるため、絶縁破壊電圧の低下を更に防止することができる。   In the present embodiment, the manufacturing cost can be reduced in that the bag body 21 and the like are not necessary, and the contact area between the water-absorbing agent 20 and the insulating oil 2 can be maximized. The voltage drop can be further prevented.

本発明の第１の実施形態に係るＸ線発生装置の構造を示す断面図である。It is sectional drawing which shows the structure of the X-ray generator which concerns on the 1st Embodiment of this invention. 本発明の第２の実施形態に係るＸ線発生装置の構造を示す断面図である。It is sectional drawing which shows the structure of the X-ray generator which concerns on the 2nd Embodiment of this invention. 本発明の第３の実施形態に係るＸ線発生装置の構造を示す断面図である。It is sectional drawing which shows the structure of the X-ray generator which concerns on the 3rd Embodiment of this invention. 従来のＸ線発生装置の構造を示す断面図である。It is sectional drawing which shows the structure of the conventional X-ray generator.

符号の説明Explanation of symbols

１ Ｘ線管球 ２ 絶縁油 ３ 封入容器
４ 吸熱器 ５ 放熱器 ６ アノード
７ カソード ８ Ｘ線放出口９ Ｘ線
１０ 遮へいカバー ２０ 吸水剤 ２１ 袋体


DESCRIPTION OF SYMBOLS 1 X-ray tube 2 Insulating oil 3 Enclosed container 4 Heat absorber 5 Radiator 6 Anode 7 Cathode 8 X-ray emission port 9 X-ray 10 Shielding cover 20 Water absorbing agent 21 Bag body


Claims (4)

Ｘ線管球と、
前記Ｘ線管球が浸漬する絶縁油と、
前記Ｘ線管球と前記絶縁油とを収納する封入容器とからなるＸ線発生装置であって、
前記絶縁油中に吸水剤を備えることを特徴とするＸ線発生装置。 An X-ray tube;
Insulating oil in which the X-ray tube is immersed;
An X-ray generator comprising an X-ray tube and an enclosure containing the insulating oil,
An X-ray generator comprising a water absorbing agent in the insulating oil. 前記吸水剤は、活性炭、ゼオライト、モレキュラーシーブス、シリカゲル及び活性アルミナの少なくとも１つからなることを特徴とする請求項１に記載のＸ線発生装置。 The X-ray generator according to claim 1, wherein the water-absorbing agent comprises at least one of activated carbon, zeolite, molecular sieves, silica gel, and activated alumina. 前記吸収剤は、吸水性のモレキュラーシーブスを透水性の袋体に収納してなることを特徴とする請求項１に記載のＸ線発生装置。 The X-ray generator according to claim 1, wherein the absorbent contains water-absorbing molecular sieves in a water-permeable bag. Ｘ線管球と、
前記Ｘ線管球が浸漬する絶縁油と、
前記Ｘ線管球と前記絶縁油とを収納し上部に開口部を有する封入容器と、
前記開口部を閉止する伝熱器と、
前記伝熱器上に設置された放熱器と、からなるＸ線発生装置において、
前記封入容器内に吸水性のモレキュラーシーブスを収納した透水性の袋体を備えることを特徴とするＸ線発生装置。 An X-ray tube;
Insulating oil in which the X-ray tube is immersed;
An enclosure containing the X-ray tube and the insulating oil and having an opening at the top;
A heat exchanger that closes the opening;
In an X-ray generator comprising a heat radiator installed on the heat exchanger,
An X-ray generation apparatus comprising a water-permeable bag body containing water-absorbing molecular sieves in the enclosure.
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Cited By (11)

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JP2010080254A (en) * 2008-09-26 2010-04-08 Jobu:Kk X-ray generator and x-ray inspection device
WO2012011404A1 (en) * 2010-07-21 2012-01-26 株式会社ジョブ X-ray generation device
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US9711322B2 (en) 2014-12-03 2017-07-18 Toshiba Electron Tubes & Devices Co., Ltd. X-ray tube device
JP6190563B1 (en) * 2016-11-17 2017-08-30 キヤノンアネルバ株式会社 X-ray generator and X-ray imaging system
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WO2018092174A1 (en) * 2016-11-17 2018-05-24 キヤノンアネルバ株式会社 X-ray generator and radiography system
US10631390B2 (en) 2016-11-17 2020-04-21 Canon Anelva Corporation X-ray generating device and X-ray photography system

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