JP2007127280A - Hydrostatic gas bearing linear guide device - Google Patents

Hydrostatic gas bearing linear guide device Download PDF

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JP2007127280A
JP2007127280A JP2007001101A JP2007001101A JP2007127280A JP 2007127280 A JP2007127280 A JP 2007127280A JP 2007001101 A JP2007001101 A JP 2007001101A JP 2007001101 A JP2007001101 A JP 2007001101A JP 2007127280 A JP2007127280 A JP 2007127280A
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base
suction
linear guide
guide device
gas bearing
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JP4591449B2 (en
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Toshinori Sato
俊徳 佐藤
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NSK Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a hydrostatic gas bearing linear guide device capable of reducing the occurrence of a bimetal phenomenon even if a temperature is largely changed, and keeping stable accuracy in straightness. <P>SOLUTION: This hydrostatic gas bearing linear guide device comprises a table 3 as a movable body movable on a base 1 in the guide direction, air bearings 6, 7 and 8 for supporting and guiding the table 3 by gas, and a suction force transferring portion 10 for transferring suction forces to the air bearings 6, 7 and 8. The base 1 is composed of ceramic or stone, the suction force transferring portion 10 comprises a suction rail 10a, and a coefficient of the thermal expansion of the suction rail 10a is approximately the same as that of the base 1. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、高精度な加工装置及び測定装置、半導体製造や検査装置などにおいて、試料、工具、検出器などを高い位置決め精度をもって移動させることが可能な静圧気体軸受直線案内装置に関する。   The present invention relates to a static pressure gas bearing linear guide device capable of moving a sample, a tool, a detector and the like with high positioning accuracy in a high-precision processing apparatus and measurement apparatus, semiconductor manufacturing or inspection apparatus, and the like.

従来の静圧気体軸受直線案内装置には、案内方向に延びるガイドレールと、このガイドレールの上側に跨がるように配置され且つ前記案内方向に移動可能な可動体と、この可動体を気体によって支持・案内する空気軸受部と、可動体を基台に対して吸引する吸引力付与部と、を備えて構成されたものがある。   In a conventional static pressure gas bearing linear guide device, a guide rail extending in the guide direction, a movable body arranged to straddle the upper side of the guide rail and movable in the guide direction, and the movable body as a gas There is an air bearing portion that is supported and guided by the above and a suction force applying portion that sucks the movable body against the base.

このような静圧気体軸受直線案内装置としては、例えば、図３に示すように、上面に水平な基準面５０ａを備えて案内方向に延びる基台５０を有している。この基台５０は、一般的にセラミックスや石などによって構成されている。基台５０の上面の幅方向（案内方向に直交する水平方向）中心から若干偏位した位置には、ガイドレール５１が突設されている。このガイドレール５１は、基準面５０ａに沿って案内方向に延びている。この基台５０の基準面５０ａの上方に、所定間隔をあけて可動体であるテーブル５５の下面が、基準面５０ａに対して平行に対向配置されている。   As such a static pressure gas bearing linear guide device, for example, as shown in FIG. 3, it has a base 50 provided with a horizontal reference surface 50a on the upper surface and extending in the guide direction. The base 50 is generally made of ceramics or stone. A guide rail 51 protrudes at a position slightly deviated from the center of the upper surface of the base 50 in the width direction (horizontal direction orthogonal to the guide direction). The guide rail 51 extends in the guide direction along the reference surface 50a. Above the reference surface 50a of the base 50, the lower surface of the table 55, which is a movable body, is disposed in parallel with the reference surface 50a at a predetermined interval.

テーブル５５の下面には、ガイドレール５１を両側から挟むように、ガイドレール５１の各側面に所定間隔をあけて対向する対向面を持った対向部５６及び５７がそれぞれ形成されている。この対向部５６及び５７のガイドレール５１の側面に対向する面には、水平方向を支持する水平方向空気軸受部５３がそれぞれ配置されている。また、対向部５６の下面には、上下方向を支持する上下方向空気軸受部５４が配置されている。また、テーブル５５の下面であって、対向部５６と幅方向で対象な位置には、対向部５８が形成されている。この対向部５８の下面には、前記と同様に上下方向を支持する上下方向空気軸受部５４が配置されている。これらの対向部５６〜５８は、案内方向に所定間隔をあけて複数個設けられている。   On the lower surface of the table 55, opposing portions 56 and 57 having opposing surfaces facing each other at a predetermined interval are formed on each side surface of the guide rail 51 so as to sandwich the guide rail 51 from both sides. Horizontal air bearing portions 53 that support the horizontal direction are arranged on the surfaces of the facing portions 56 and 57 that face the side surfaces of the guide rail 51. In addition, a vertical air bearing portion 54 that supports the vertical direction is disposed on the lower surface of the facing portion 56. In addition, a facing portion 58 is formed on the lower surface of the table 55 at a target position in the width direction with respect to the facing portion 56. On the lower surface of the facing portion 58, a vertical air bearing portion 54 that supports the vertical direction is disposed in the same manner as described above. A plurality of these facing portions 56 to 58 are provided at predetermined intervals in the guide direction.

さらに、上下方向空気軸受部５４の幅方向外側には、吸引力発生部５９が各々設けられている。この吸引力発生部５９は、基台５０の基準面５０ａに設けられてガイドレール５１と平行に延びる、例えば強磁性体からなる吸引レール５９ａと、テーブル５５の下面に支持されて吸引レール５９ａの上面と所定間隔をあけて対向した磁石５９ｂと、から構成されている。この吸引力発生部５９は、その吸引力を大きくするために、吸引レール５９ａを透磁率の高い、例えば純鉄や鉄系の磁性材料で形成している。なお、符号６０は、テーブル５５の移動を行う公知の駆動装置である。   Further, suction force generating portions 59 are provided on the outer sides in the width direction of the vertical air bearing portion 54. The suction force generator 59 is provided on the reference surface 50a of the base 50 and extends in parallel with the guide rail 51. The suction rail 59a is made of, for example, a ferromagnetic material, and is supported by the lower surface of the table 55. And a magnet 59b facing the upper surface at a predetermined interval. In order to increase the attractive force, the attractive force generating portion 59 is formed of the attractive rail 59a with a high magnetic permeability, for example, pure iron or an iron-based magnetic material. Reference numeral 60 denotes a known drive device that moves the table 55.

しかしながら、前記従来の静圧気体軸受直線案内装置は、基台がセラミックスや石などから構成され、吸引レールが純鉄や鉄系の磁性材料で構成されているため、両者の熱膨張係数が異なることになる。ここで、純鉄の熱膨張係数は、９〜１０×１０-6／℃であり、セラミックス（アルミナ）の熱膨張係数は、４〜８×１０-6／℃、石の熱膨張係数は、６〜９×１０-6／℃である。このため、使用時の温度変化によって、熱膨張係数の違う材料間で寸法にずれが生じる、いわゆる「バイメタル現象」が起こり、真直度精度が悪化する虞がある。 However, in the conventional static pressure gas bearing linear guide device, since the base is made of ceramics or stone, and the suction rail is made of pure iron or iron-based magnetic material, the thermal expansion coefficients of both are different. It will be. Here, the thermal expansion coefficient of pure iron is 9 to 10 × 10 −6 / ° C., the thermal expansion coefficient of ceramic (alumina) is 4 to 8 × 10 −6 / ° C., and the thermal expansion coefficient of stone is 6-9 × 10 −6 / ° C. For this reason, a change in temperature during use may cause a so-called “bimetal phenomenon” in which dimensional deviation occurs between materials having different thermal expansion coefficients, which may deteriorate the straightness accuracy.

さらに、静圧気体軸受直線案内装置の保管温度や輸送時の温度が大きく変化した場合（例えば、夏季３０℃以上、冬季１０℃以下など）は、使用の際に常温に戻っても、ボルトの結合部などが位置ずれを起こして元の精度に戻らないという虞もある。   Furthermore, when the storage temperature of the static pressure gas bearing linear guide device or the temperature during transportation has changed significantly (for example, 30 ° C or higher in summer, 10 ° C or lower in winter, etc.) There is also a risk that the connecting portion or the like will be displaced and will not return to the original accuracy.

本発明は、このような従来の問題点を解決することを課題とするものであり、大きな温度変化が生じてもバイメタル現象が起こることを低減し、安定した真直度精度を保つことが可能な静圧気体軸受直線案内装置を提供することを目的とする。   An object of the present invention is to solve such a conventional problem, and it is possible to reduce the occurrence of a bimetal phenomenon even when a large temperature change occurs and to maintain stable straightness accuracy. An object is to provide a static pressure gas bearing linear guide device.

この目的を達成するため、本発明は、基台上を案内方向に移動可能な可動体と、当該可動体を気体によって支持・案内する空気軸受部と、当該可動体を当該基台に対して吸引する吸引力付与部と、を備えた静圧気体軸受直線案内装置であって、前記基台はセラミックスまたは石から構成され、前記吸引力付与部は前記基台に固定される吸引レール部を備え、当該吸引レール部の熱膨張係数は、前記基台の熱膨張係数とほぼ同じである静圧気体軸受直線案内装置を提供するものである。   In order to achieve this object, the present invention provides a movable body that can move in the guiding direction on a base, an air bearing that supports and guides the movable body with gas, and the movable body with respect to the base. A static pressure gas bearing linear guide device including a suction force application unit for suction, wherein the base is made of ceramics or stone, and the suction force application unit includes a suction rail portion fixed to the base. And a static pressure gas bearing linear guide device in which the thermal expansion coefficient of the suction rail portion is substantially the same as the thermal expansion coefficient of the base.

この構成を備えた静圧気体軸受直線案内装置は、基台と吸引レールの熱膨張係数がほぼ同じであるため、大きな温度変化が生じても、両者の間に寸法変化が生じることがなく、いわゆる「バイメタル現象」が起こることを低減することができる。このため、安定した真直度精度を保つことができる。   In the static pressure gas bearing linear guide device having this configuration, since the thermal expansion coefficients of the base and the suction rail are almost the same, even if a large temperature change occurs, there is no dimensional change between the two, The so-called “bimetal phenomenon” can be reduced. For this reason, stable straightness accuracy can be maintained.

また、基台をセラミックスまたは石から構成したため、錆びることがなく、さらに、金属より熱膨張係数が小さいため、変形することが少なく、寸法精度が向上する。   In addition, since the base is made of ceramics or stone, it does not rust, and since it has a smaller coefficient of thermal expansion than metal, it is less likely to be deformed and dimensional accuracy is improved.

以上説明したように、本発明に係る静圧気体軸受直線案内装置は、基台と吸引レールの熱膨張係数がほぼ同じであるため、大きな温度変化が生じても、両者の間に寸法変化が生じることがなく、バイメタル現象が起こることを低減することができる。この結果、安定した真直度精度を維持することが可能である。   As described above, the static pressure gas bearing linear guide device according to the present invention has substantially the same thermal expansion coefficient between the base and the suction rail, so even if a large temperature change occurs, there is a dimensional change between the two. It does not occur and the occurrence of the bimetal phenomenon can be reduced. As a result, it is possible to maintain stable straightness accuracy.

次に、本発明の実施の形態に係る静圧気体軸受直線案内装置について図面を参照して説明する。   Next, a static pressure gas bearing linear guide device according to an embodiment of the present invention will be described with reference to the drawings.

図１は、本実施の形態に係る静圧気体軸受直線案内装置の正面図、図２は、図１のII−II線に沿った断面図である。図１及び図２に示すように、本実施の形態に係る静圧気体軸受直線案内装置は、上面に水平な基準面１ａを備え且つ案内方向に延びる基台１と、基台１の上面に案内方向に沿って設けられたガイド部材２と、ガイド部材２に案内されて移動する可動体の構成要素であるテーブル３と、テーブル３を支持・案内する空気軸受部６、７及び８と、空気軸受部６、７及び８に対して吸引力を与える吸引力付与部１０と、を備えて構成されている。   FIG. 1 is a front view of a static pressure gas bearing linear guide device according to the present embodiment, and FIG. 2 is a cross-sectional view taken along line II-II in FIG. As shown in FIGS. 1 and 2, the static pressure gas bearing linear guide device according to the present embodiment includes a base 1 having a horizontal reference surface 1 a on the upper surface and extending in the guide direction, and an upper surface of the base 1. A guide member 2 provided along the guide direction; a table 3 that is a component of a movable body that is guided and moved by the guide member 2; and air bearing portions 6, 7, and 8 that support and guide the table 3, And a suction force applying unit 10 that applies a suction force to the air bearing units 6, 7, and 8.

基台１は、アルミナセラミックスから構成されており、その熱膨張係数は、４．７×１０-6／℃である。基台１の基準面１ａの幅方向（案内方向に直交する水平方向）の中央部から一方の端部（図１では左側）に若干偏位した位置には、ガイド部材２が設けられている。また、基台１の幅方向両側には、後に詳述する吸引力付与部１０の吸引レール１０ａが固定され、案内方向に沿って延びている。 The base 1 is made of alumina ceramics, and its thermal expansion coefficient is 4.7 × 10 −6 / ° C. A guide member 2 is provided at a position slightly deviated from the center portion in the width direction (horizontal direction orthogonal to the guide direction) of the reference surface 1a of the base 1 to one end portion (left side in FIG. 1). . Further, suction rails 10a of a suction force applying unit 10 described in detail later are fixed to both sides in the width direction of the base 1, and extend along the guide direction.

ガイド部材２は、断面長方形を備えたレール部材からなり、基準面１ａの案内方向に沿って配置されている。このガイド部材２は、底面（基準面１ａ側）と、左右側面の計３面が真直、平面で、平行、直角精度が良好に設定されており、基台１と同様に、アルミナセラミックスから構成されている。また、このガイド部材２は、幅が狭く構成されているため、ナローガイド状態となる。このため、水平方向空気軸受６ａ及び７ａの距離が狭くなり、モーメント剛性の強いものとなる。   The guide member 2 is formed of a rail member having a rectangular cross section, and is disposed along the guide direction of the reference surface 1a. This guide member 2 has a bottom surface (reference surface 1a side) and a total of three surfaces, straight and flat, parallel and perpendicular to each other, and is made of alumina ceramics in the same manner as the base 1. Has been. Moreover, since this guide member 2 is comprised narrowly, it will be in a narrow guide state. For this reason, the distance between the horizontal air bearings 6a and 7a becomes narrow, and the moment rigidity becomes strong.

テーブル３は、基台１の基準面１ａの上方に所定間隔をあけた状態で配置されている。テーブル３の下面には、ガイド部材２と所定の間隔をあけて且つガイド部材２を両側から挟むように、一対の空気軸受部６及び７が対向配置されている。この空気軸受部６及び７は、図２に示すように、案内方向に互いに間隔をあけて各々２個所設置されている。この空気軸受部６及び７の、ガイド部材２の側面に対向する面には、水平方向を支持する水平方向空気軸受６ａ及び７ａがそれぞれ配置されている。   The table 3 is arranged above the reference surface 1a of the base 1 with a predetermined interval. On the lower surface of the table 3, a pair of air bearing portions 6 and 7 are arranged to face each other with a predetermined distance from the guide member 2 and sandwiching the guide member 2 from both sides. As shown in FIG. 2, the air bearing portions 6 and 7 are installed at two locations at intervals in the guide direction. Horizontal air bearings 6a and 7a that support the horizontal direction are disposed on the surfaces of the air bearing portions 6 and 7 that face the side surfaces of the guide member 2, respectively.

水平方向空気軸受６ａ及び７ａは、ガイド部材２に対向する面に、ガイド部材２に水平に空気を吹き出す空気穴が形成されている。この空気穴からガイド部材２に対し空気を吹き出すことで、テーブル３は、ガイド部材２に対し水平方向に支持される。このように、水平方向空気軸受６及び７は、ガイド部材２を挟み込むようにガイド部材２の両側に対向して配置されているため、ガイド部材２に対して偏った力がかからない。このため、ガイド部材２の変形を低減することができる。   In the horizontal air bearings 6 a and 7 a, air holes for blowing air horizontally to the guide member 2 are formed on the surface facing the guide member 2. The table 3 is supported in the horizontal direction with respect to the guide member 2 by blowing air from the air holes to the guide member 2. Thus, since the horizontal air bearings 6 and 7 are arranged opposite to both sides of the guide member 2 so as to sandwich the guide member 2, no biased force is applied to the guide member 2. For this reason, deformation of the guide member 2 can be reduced.

また、空気軸受部６の下面には、上下方向を支持する上下方向空気軸受６ｂが配置されている。   In addition, a vertical air bearing 6 b that supports the vertical direction is disposed on the lower surface of the air bearing portion 6.

また、テーブル３の下面であって、２つの空気軸受部６と幅方向で対象な位置には、空気軸受部８が形成されている。この空気軸受部８の下面には、前記と同様に上下方向を支持する上下方向空気軸受８ｂが各々配置されている。   In addition, an air bearing portion 8 is formed on the lower surface of the table 3 at a target position in the width direction with the two air bearing portions 6. On the lower surface of the air bearing portion 8, vertical air bearings 8 b that support the vertical direction are disposed in the same manner as described above.

各上下方向空気軸受６ｂ及び８ｂには、その下面に基準面１ａに向けて空気を吹き出す空気穴が形成されている。この空気穴から基準面１ａに空気を吹き出すことで、テーブル３は、基準面１ａ対して上下方向に支持される。また、空気穴から吹き出される空気の圧力は、各上下方向空気軸受６ｂ及び８ｂに対しそれぞれ独立に設定することができるようになっている。このため、例えばテーブル３の変形によって、上下方向空気軸受６ｂ及び８ｂと、基準面１ａとの間の隙間が変化しても、前記空気の給気圧力を調整することで微調整ができるようになっている。なお、水平方向空気軸受６ａ及び７ａ、上下方向空気軸受６ｂ及び８ｂの各空気軸受に、空気を供給する装置、及び経路は図示しないが、任意に設定されている。   Each of the vertical air bearings 6b and 8b has an air hole formed on the lower surface thereof for blowing air toward the reference surface 1a. By blowing air from the air holes to the reference surface 1a, the table 3 is supported in the vertical direction with respect to the reference surface 1a. Moreover, the pressure of the air blown out from the air hole can be set independently for each of the vertical air bearings 6b and 8b. For this reason, even if the clearance between the vertical air bearings 6b and 8b and the reference surface 1a changes due to, for example, deformation of the table 3, fine adjustment can be performed by adjusting the air supply pressure. It has become. In addition, although not shown in figure, the apparatus and path | route which supply air to each air bearing of the horizontal direction air bearings 6a and 7a and the vertical direction air bearings 6b and 8b are set arbitrarily.

さらに、テーブル３の幅方向最端部（空気軸受部６及び８の幅方向外側）には、吸引力付与部１０の構成要素である永久磁石１０ｂがスペーサ１０ｃを介して吸引レール１０ａと所定の間隔をあけて各々設けられている。なお、この永久磁石１０ｂ及びスペーサ１０ｃは、吸引レール１０ａと共に吸引力付与部１０を構成する。このスペーサ１０ｃは、吸引レール１０ａと永久磁石１０ｂとの間隙の調整、つまり永久磁石１０ｂの高さ位置を調整し易くするために設けられている。この吸引力付与部１０により、テーブル３は基台１に対して吸引される。   Further, at the extreme end in the width direction of the table 3 (outside in the width direction of the air bearing portions 6 and 8), a permanent magnet 10b, which is a component of the attraction force applying portion 10, is connected to the attraction rail 10a via a spacer 10c. Each is provided at intervals. In addition, this permanent magnet 10b and the spacer 10c comprise the attractive force provision part 10 with the attractive rail 10a. The spacer 10c is provided to facilitate the adjustment of the gap between the attraction rail 10a and the permanent magnet 10b, that is, the height position of the permanent magnet 10b. The table 3 is sucked against the base 1 by the suction force applying unit 10.

なお、吸引力付与部１０を空気軸受部６及び８（上下方向空気軸受６ｂ及び８ｂ）に隣接したことで、テーブル３の吸引と浮上のせん断応力が、テーブル３に作用しないようにしている。   Note that the suction force application unit 10 is adjacent to the air bearing units 6 and 8 (vertical air bearings 6 b and 8 b), so that suction and levitation shear stress of the table 3 do not act on the table 3.

また、吸引レール１０ａは、基台１と同様の熱膨張係数を備えた低熱膨張材料、例えば、低熱膨張鋳物（熱膨張係数：４〜５×１０-6／℃）を用いて構成した。このため、温度変化によって、熱膨張係数の違う材料間で寸法にずれが生じる、いわゆる「バイメタル現象」が起こることがなく、安定した真直度精度を得ることができる。 Moreover, the suction rail 10a was comprised using the low thermal expansion material provided with the thermal expansion coefficient similar to the base 1, for example, a low thermal expansion casting (thermal expansion coefficient: 4-5 * 10 < -6 > / degreeC). For this reason, there is no occurrence of a so-called “bimetal phenomenon” in which dimensional deviation occurs between materials having different thermal expansion coefficients due to temperature changes, and stable straightness accuracy can be obtained.

なお、この静圧気体軸受直線案内装置には、特に図示しないが、テーブル３の移動を行う公知の駆動装置が設けられている。   The static pressure gas bearing linear guide device is provided with a known drive device that moves the table 3, although not particularly shown.

この静圧気体軸受直線案内装置が作動する際は、上下方向空気軸受６ｂ及び８ｂの空気穴から空気を基準面１ａに向けて吹き出し、これによってテーブル３は、基準面１ａに対して上下方向に浮上支持されて水平となる。また、水平方向空気軸受６ａ及び７ｂの空気穴から空気をガイド部材２に向けて吹き出し、これによってテーブル３は、幅方向の位置決めがなされている。そして、テーブル３は、駆動装置１１によって駆動されて、案内方向に移動される。この時、吸引力付与部１０と、上下方向空気軸受部６ｂ及び８ｂとが、近接して設けられているため、吸引力付与部１０による吸引力と、上下方向空気軸受部６ｂ及び８ｂによる浮上力によるせん断応力が、ほとんどテーブル３に作用せず、吸引力と浮上力とが釣り合った状態でテーブル３の良好な移動が行える。   When this static pressure gas bearing linear guide device is operated, air is blown out from the air holes of the vertical air bearings 6b and 8b toward the reference surface 1a, whereby the table 3 is moved vertically with respect to the reference surface 1a. It is supported by levitation and becomes horizontal. Further, air is blown out toward the guide member 2 from the air holes of the horizontal air bearings 6a and 7b, whereby the table 3 is positioned in the width direction. The table 3 is driven by the driving device 11 and moved in the guide direction. At this time, since the suction force applying part 10 and the vertical air bearing parts 6b and 8b are provided close to each other, the suction force by the suction force applying part 10 and the levitation by the vertical air bearing parts 6b and 8b. The shear stress due to the force hardly acts on the table 3, and the table 3 can be moved favorably in a state where the suction force and the floating force are balanced.

この移動に際して、テーブル３は、その上下方向の支持が各々の上下方向空気軸受６ｂ及び８ｂによって独立して制御されるため、基準面１ａに対して常に水平方向に安定して維持される。また、このテーブル３は、水平方向空気軸受６ａ及び７ａによって、ガイド部材２に対して偏った力がかからないため、スムーズな移動が行われる。   During this movement, the support of the table 3 in the vertical direction is controlled independently by the vertical air bearings 6b and 8b, so that the table 3 is always stably maintained in the horizontal direction with respect to the reference plane 1a. Further, since the table 3 is not subjected to a biased force with respect to the guide member 2 by the horizontal air bearings 6a and 7a, the table 3 is smoothly moved.

なお、本実施の形態では、基台１を熱膨張係数が、４．７×１０-6／℃であるアルミナセラミックスで構成した場合いついて説明したが、これに限らず、基台１は、石や他のセラミックスから構成することができる。この場合、例えば、熱膨張係数が６〜９×１０-6／℃程度の石を使用できる。また、セラミックスとしては、例えば、アルミナ（Ａｌ2Ｏ3）セラミックス（熱膨張係数：４〜８×１０-6／℃）、ムライト（３Ａｌ2Ｏ3・２ＳｉＯ2）セラミックス（熱膨張係数：５×１０-6／℃）、窒化珪素（Ｓｉ3Ｎ4）セラミックス（熱膨張係数：３〜４×１０-6／℃）等が挙げられる。 In the present embodiment, the case where the base 1 is made of alumina ceramics having a thermal expansion coefficient of 4.7 × 10 −6 / ° C. has been described, but the base 1 is not limited to this. It can be composed of stone or other ceramics. In this case, for example, stones having a thermal expansion coefficient of about 6 to 9 × 10 −6 / ° C. can be used. Examples of ceramics include alumina (Al 2 O 3 ) ceramics (thermal expansion coefficient: 4 to 8 × 10 −6 / ° C.), mullite (3Al 2 O 3 .2SiO 2 ) ceramics (thermal expansion coefficient: 5 ×). 10 −6 / ° C.), silicon nitride (Si 3 N 4 ) ceramics (thermal expansion coefficient: 3 to 4 × 10 −6 / ° C.), and the like.

この場合には、吸引レール１０ａも、吸引レール１０ａとしての機能を損なわず、且つ基台１の構成材料の熱膨張係数とほぼ同じ熱膨張係数を備えた材料から構成することが必要である。   In this case, the suction rail 10a also needs to be made of a material that does not impair the function as the suction rail 10a and that has a thermal expansion coefficient substantially the same as the thermal expansion coefficient of the constituent material of the base 1.

また、本実施の形態では、磁気吸引力を与える手段として、永久磁石を使用した場合について説明したが、これに限らず、電磁石や真空吸引などその他の非接触手段を使用することもできる。   In the present embodiment, the case where a permanent magnet is used as the means for applying the magnetic attraction force has been described. However, the present invention is not limited to this, and other non-contact means such as an electromagnet or vacuum suction can be used.

さらにまた、本実施の形態では、一対の水平方向空気軸受を２個（合計４個）所配置した場合について説明したが、これに限らず、一対の水平方向空気軸受の設置数及び設置箇所は、テーブルのサイズや、ストロークの長さなどに応じて任意に決定することができる。   Furthermore, in the present embodiment, the case where two pairs of horizontal air bearings (a total of four) are arranged has been described. However, the present invention is not limited to this, and the number of installed horizontal air bearings and the installation locations are as follows. It can be arbitrarily determined according to the size of the table, the length of the stroke, and the like.

そしてまた、本実施の形態では、上下方向空気軸受をテーブルの幅方向両側に各々２個づつ、合計４個設置した場合について説明したが、これに限らず、上下方向空気軸受の設置数及び設置箇所は、テーブルのサイズや、ストロークの長さなどに応じて任意に決定することができる。   Further, in the present embodiment, a case has been described where two vertical air bearings are installed on each side of the table in the width direction, for a total of four. However, the present invention is not limited to this, and the number and installation of the vertical air bearings The location can be arbitrarily determined according to the size of the table, the length of the stroke, and the like.

本発明の本実施の形態に係る静圧気体軸受直線案内装置の正面図である。It is a front view of the static pressure gas bearing linear guide device concerning this embodiment of the present invention. 図１のII−II線に沿った断面図である。It is sectional drawing along the II-II line of FIG. 従来の静圧気体軸受直線案内装置の正面図である。It is a front view of the conventional static pressure gas bearing linear guide apparatus.

符号の説明Explanation of symbols

１ 基台
１ａ 基準面
２ ガイド部材
３ テーブル
６、７、８ 空気軸受部
６ａ、７ａ 水平方向空気軸受
６ｂ、８ｂ 上下方向空気軸受
１０ 吸引力付与部
１０ａ 吸引レール
１０ｂ 永久磁石
１０ｃ スペーサ DESCRIPTION OF SYMBOLS 1 Base 1a Reference surface 2 Guide member 3 Table 6, 7, 8 Air bearing part 6a, 7a Horizontal direction air bearing 6b, 8b Vertical direction air bearing 10 Suction force provision part 10a Suction rail 10b Permanent magnet 10c Spacer

Claims (1)

基台上を案内方向に移動可能な可動体と、当該可動体を気体によって支持・案内する空気軸受部と、当該可動体を当該基台に対して吸引する吸引力付与部と、を備えた静圧気体軸受直線案内装置であって、前記基台はセラミックスまたは石から構成され、前記吸引力付与部は前記基台に固定される吸引レール部を備え、当該吸引レール部の熱膨張係数は、前記基台の熱膨張係数とほぼ同じである静圧気体軸受直線案内装置。   A movable body that can move in the guiding direction on the base, an air bearing portion that supports and guides the movable body with gas, and a suction force applying section that sucks the movable body against the base. It is a static pressure gas bearing linear guide device, wherein the base is made of ceramics or stone, the suction force applying part includes a suction rail part fixed to the base, and the coefficient of thermal expansion of the suction rail part is A static pressure gas bearing linear guide device having substantially the same thermal expansion coefficient as the base.
JP2007001101A 2007-01-09 2007-01-09 Static pressure gas bearing linear guide device Expired - Fee Related JP4591449B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109760418A (en) * 2017-11-10 2019-05-17 松下知识产权经营株式会社 Carry platform and the ink discharge device using the carrying platform

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62170405A (en) * 1986-01-24 1987-07-27 Nhk Spring Co Ltd Production of composite material consisting of metal and ceramics
JPH05263108A (en) * 1992-03-17 1993-10-12 Ngk Insulators Ltd Composite of ceramic and metal
JPH07285044A (en) * 1994-04-19 1995-10-31 Nippon Telegr & Teleph Corp <Ntt> Static pressure floating stage

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62170405A (en) * 1986-01-24 1987-07-27 Nhk Spring Co Ltd Production of composite material consisting of metal and ceramics
JPH05263108A (en) * 1992-03-17 1993-10-12 Ngk Insulators Ltd Composite of ceramic and metal
JPH07285044A (en) * 1994-04-19 1995-10-31 Nippon Telegr & Teleph Corp <Ntt> Static pressure floating stage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109760418A (en) * 2017-11-10 2019-05-17 松下知识产权经营株式会社 Carry platform and the ink discharge device using the carrying platform
CN109760418B (en) * 2017-11-10 2020-12-11 松下知识产权经营株式会社 Conveyance stage and inkjet device using the same

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