JP2007076836A - Gas levitation conveyance device and inspection method - Google Patents

Gas levitation conveyance device and inspection method Download PDF

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JP2007076836A
JP2007076836A JP2005268112A JP2005268112A JP2007076836A JP 2007076836 A JP2007076836 A JP 2007076836A JP 2005268112 A JP2005268112 A JP 2005268112A JP 2005268112 A JP2005268112 A JP 2005268112A JP 2007076836 A JP2007076836 A JP 2007076836A
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levitation
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Kensuke Suzuki
健介 鈴木
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Shinko Electric Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas levitation conveyance device and an inspection method for specifying a contact section of a conveyance body with a conveyance surface easily. <P>SOLUTION: This air levitation conveyance device 1 for jetting air toward the conveyance body to levitate it from the conveyance surface 15 is provided with a flat plate substrate 2 for detection conveyed by levitating from the conveyance surface 15 by jetting air and a detection means 4 for detecting contact of the flat plate substrate 2 for detection with the conveyance surface 15. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、例えば、半導体基板や液晶基板などの薄板を非接触状態で搬送する気体浮上搬送装置及び検査方法に関するものである。   The present invention relates to a gas levitation transfer apparatus and an inspection method for transferring a thin plate such as a semiconductor substrate or a liquid crystal substrate in a non-contact state, for example.

液晶ガラス基板や半導体基板などの薄い平板基板である搬送体の下面にエアを噴射して搬送体を浮上させながら搬送するエア浮上搬送装置としてさまざまなものが提案されている（例えば、特許文献１、２参照）。
このようなエア浮上搬送装置では、搬送面と接触させずに搬送体の安定した搬送を行うために、実際に搬送した後の搬送体に傷などが発生しているか否かを確認し、この傷などの有無を基にエアの噴射量などの調整を行っている。特に近年は液晶ガラス基板など平板基板が大型化しており、安定した搬送を行うためにエアの噴射量などの調整やメンテナンスがより重要となっている。
特開２００４−２４４１８６号公報 特開２００４−３４５７４４号公報 Various devices have been proposed as an air levitation transport device that transports air while jetting air onto the lower surface of a transport body that is a thin flat substrate such as a liquid crystal glass substrate or a semiconductor substrate (for example, Patent Document 1). 2).
In such an air levitation transport device, in order to perform stable transport of the transport body without making contact with the transport surface, it is confirmed whether or not the transport body after the actual transport has been damaged. The air injection amount is adjusted based on the presence or absence of scratches. In particular, in recent years, a flat plate substrate such as a liquid crystal glass substrate has been increased in size, and adjustment and maintenance of an air injection amount and the like are more important in order to perform stable conveyance.
JP 2004-244186 A JP 2004-345744 A

しかしながら、上記従来のエア浮上搬送装置には、以下の課題が残されている。すなわち、上記従来のエア浮上搬送装置では、搬送後の搬送体に形成された傷などを基に調整しているので、搬送面における平板基板との接触箇所を特定することが困難である。そのため、調整やメンテナンスに多大な労力が必要となる。   However, the following problems remain in the conventional air levitation transport device. That is, in the conventional air levitation transfer device, adjustment is made based on scratches formed on the transfer body after transfer, and therefore it is difficult to specify the contact point with the flat plate substrate on the transfer surface. Therefore, a great deal of labor is required for adjustment and maintenance.

本発明は、前述の課題に鑑みてなされたもので、搬送体と搬送面との接触箇所を特定することが容易な気体浮上搬送装置及び検査方法を提供することを目的とする。   The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a gas levitation transfer apparatus and an inspection method in which it is easy to specify a contact portion between a transfer body and a transfer surface.

本発明は、前記課題を解決するために以下の構成を採用した。すなわち、本発明の気体浮上搬送装置は、搬送体に向けて気体を噴射して該搬送体を搬送面から浮上させる気体浮上搬送装置において、前記気体の噴射により前記搬送面から浮上する検出用搬送体と、該検出用搬送体と前記搬送面との接触を検出する検出手段とを備えることを特徴とする。   The present invention employs the following configuration in order to solve the above problems. That is, the gas levitation conveyance device of the present invention is a gas levitation conveyance device that injects gas toward the conveyance body and levitates the conveyance body from the conveyance surface. And a detection means for detecting contact between the detection transport body and the transport surface.

また、本発明の気体浮上搬送装置の検査方法は、搬送体に向けて気体を噴射して該搬送体を搬送面から浮上させる気体浮上搬送装置の検査方法において、
検出用搬送体を前記気体の噴射により前記搬送面から浮上させながら搬送し、前記検出用搬送体と前記搬送面との接触を検出することで前記搬送面と前記検出用搬送体との接触箇所を判別することを特徴とする。 Further, the inspection method of the gas levitation transport apparatus of the present invention is a method of inspecting a gas levitation transport apparatus in which gas is jetted toward the transport body to float the transport body from the transport surface.
The detection conveyance body is conveyed while being levitated from the conveyance surface by jetting the gas, and the contact portion between the conveyance surface and the detection conveyance body is detected by detecting contact between the detection conveyance body and the conveyance surface. It is characterized by distinguishing.

この発明では、搬送面上に検出用搬送体を浮上させながら搬送し、検出用搬送体と搬送面とが接触したときに、検出手段が両者の接触を検出する。これにより、搬送面における検出用搬送体の接触箇所を特定することができる。したがって、気体の噴射量などの調整をより的確に行うことができる。以上より、気体浮上搬送装置の調整やメンテナンスが容易となり、調整やメンテナンスのための労力の削減が図れる。   In the present invention, when the detection transport body is transported while floating on the transport surface, and the detection transport body and the transport surface come into contact with each other, the detection means detects the contact between the two. Thereby, the contact location of the conveyance body for a detection in a conveyance surface can be specified. Therefore, the adjustment of the gas injection amount and the like can be performed more accurately. As described above, the adjustment and maintenance of the gas levitation transfer device are facilitated, and the labor for adjustment and maintenance can be reduced.

また、本発明の気体浮上搬送装置は、前記検出用搬送体の下面及び前記搬送面が導電性を有しており、前記検出手段が、前記検出用搬送体の下面と前記搬送面の表面との間に電圧を印加する電圧印加手段と、前記検出用搬送体と前記搬送面との接触時に前記検出用搬送体と前記搬送面との間に流れる電流を検出する検出器とを備えることが好ましい。
この発明では、検出用搬送体と搬送面とが接触して短絡すると、両者の間に電流が流れる。したがって、この電流を検出器で検出することで、搬送面と検出用搬送体との接触を検出し、搬送面における検出用搬送体の接触箇所を特定できる。 In the gas levitation transport apparatus according to the present invention, the lower surface and the transport surface of the detection transport body have conductivity, and the detection means includes a lower surface of the detection transport body and a surface of the transport surface. And a detector for detecting a current flowing between the detection carrier and the conveyance surface when the detection carrier and the conveyance surface are in contact with each other. preferable.
In the present invention, when the detection carrier and the conveyance surface come into contact with each other and are short-circuited, a current flows between them. Therefore, by detecting this current with the detector, contact between the transport surface and the detection transport body can be detected, and the contact location of the detection transport body on the transport surface can be specified.

また、本発明の気体浮上搬送装置は、前記検出用搬送体が、前記搬送体とほぼ同一の材料、形状を有する基材と、該基材の下面に設けられた導電性被膜とによって構成されていることが好ましい。
この発明では、検出用搬送体が実際に搬送する搬送体とほぼ同一の材料、形状を有する基材の下面に導電性被膜を設けた構成となっており、搬送体の構成と近似した構成となっている。したがって、検出用搬送体の搬送を搬送体の搬送に近い状態で行うことができ、より的確な調整やメンテナンスを行うことができる。 In the gas levitation transport apparatus according to the present invention, the detection transport body includes a base material having substantially the same material and shape as the transport body, and a conductive film provided on the lower surface of the base material. It is preferable.
In this invention, the detection transport body has a configuration in which a conductive film is provided on the lower surface of a base material having substantially the same material and shape as the transport body that actually transports, and a configuration that approximates the configuration of the transport body. It has become. Accordingly, the detection transport body can be transported in a state close to the transport of the transport body, and more accurate adjustment and maintenance can be performed.

また、本発明の気体浮上搬送装置は、前記導電性被膜が、前記基材の下面に導電性材料を吹き付けることで形成されていることが好ましい。
この発明では、基材の下面に導電性材料を吹き付けることで、薄膜の導電性被膜を形成できる。 In the gas levitation transport apparatus according to the present invention, it is preferable that the conductive coating is formed by spraying a conductive material on the lower surface of the base material.
In this invention, a thin conductive film can be formed by spraying a conductive material on the lower surface of the substrate.

また、本発明の気体浮上搬送装置は、前記導電性被膜が、前記基材の下面にメッキ処理を施すことで形成されていることが好ましい。
この発明では、基材の下面に対してメッキ処理を施すことで、薄膜の導電性被膜を形成できる。 In the gas levitation transport apparatus according to the present invention, it is preferable that the conductive coating is formed by performing plating on the lower surface of the base material.
In this invention, a thin conductive film can be formed by plating the lower surface of the substrate.

また、本発明の気体浮上搬送装置は、前記導電性被膜が、前記基材の下面に分割して形成されていることが好ましい。
この発明では、導電性被膜を分割して形成することで、検出用搬送体における搬送面との接触箇所を特定することができる。したがって、調整やメンテナンスをより確実かつ容易に行うことができる。 Moreover, it is preferable that the said electrically conductive film is divided | segmented and formed in the lower surface of the said base material.
In this invention, the contact part with the conveyance surface in the conveyance body for a detection can be specified by dividing | segmenting and forming a conductive film. Therefore, adjustment and maintenance can be performed more reliably and easily.

本発明の気体浮上搬送装置及び検査方法によれば、搬送面における検出用搬送体の接触箇所を特定することができるので、気体浮上搬送装置の調整やメンテナンスが容易となり、労力の削減が図られる。   According to the gas levitation transport apparatus and the inspection method of the present invention, the contact location of the detection transport body on the transport surface can be specified. Therefore, adjustment and maintenance of the gas levitation transport apparatus are facilitated, and labor can be reduced. .

以下、本発明にかかる気体浮上搬送装置の一実施形態を、図面を参照しながら説明する。
本実施形態におけるエア浮上搬送装置（気体浮上搬送装置）１は、例えば、液晶ガラス基板や半導体基板などの薄板状の平板基板（搬送体、図示略）の下面にエアを噴き当てて非接触でこの平板基板を搬送する搬送装置である。
このエア浮上搬送装置１は、図１及び図２に示すように、検出用平板基板（検出用搬送体）２と、搬送体または検出用平板基板２の下面にエアを噴射する複数のエア浮上ユニット３と、検出用平板基板２とエア浮上ユニット３との接触を検出する検出手段４と、浮上した検出用平板基板２または平板基板を搬送方向に沿って送り出す送出機構５と、エア浮上ユニット３に加圧エアを供給する加圧エア供給機構６とを備えている。 Hereinafter, an embodiment of a gas levitation transport device according to the present invention will be described with reference to the drawings.
The air levitation conveyance device (gas levitation conveyance device) 1 in the present embodiment is non-contact by spraying air onto the lower surface of a thin plate-like flat substrate (conveyance body, not shown) such as a liquid crystal glass substrate or a semiconductor substrate. It is a conveying apparatus which conveys this flat substrate.
As shown in FIGS. 1 and 2, the air levitation transport apparatus 1 includes a detection flat substrate (detection transport body) 2 and a plurality of air levitation jets that inject air onto the lower surface of the transport body or the detection flat substrate 2. A detection unit 4 for detecting contact between the unit 3, the detection flat substrate 2 and the air levitation unit 3, a sending out mechanism 5 for sending out the floating detection flat substrate 2 or the flat substrate along the conveying direction, and an air levitation unit 3 is provided with a pressurized air supply mechanism 6 for supplying pressurized air.

検出用平板基板２は、エア浮上搬送装置１で搬送される平板基板である半導体基板や液晶基板と同一の形状、材料により形成された基材１１と、この基材１１の下面に形成された導電性被膜１２とによって構成されている。
導電性被膜１２は、基材１１の下面に分割して形成されており、例えば金などの導電性材料を吹き付けることによって形成されている。ここで、導電性被膜１２として金を用いることにより、導電性の低下を小さくすることができる。 The detection flat substrate 2 is formed on the base 11 formed of the same shape and material as the semiconductor substrate and the liquid crystal substrate, which are flat substrates transported by the air levitation transport device 1, and the lower surface of the base 11. The conductive coating 12 is used.
The conductive coating 12 is formed on the lower surface of the substrate 11 and is formed by spraying a conductive material such as gold. Here, by using gold as the conductive film 12, the decrease in conductivity can be reduced.

エア浮上ユニット３は、搬送経路に沿って複数連設されており、上面が平板基板または検出用平板基板２を搬送するための搬送面１５となっている。また、エア浮上ユニット３の上面には、平板基板または検出用平板基板２を浮上させるエアを噴射するエア噴射部１６が複数形成されている。さらに、エア浮上ユニット３の内部には、加圧エア供給機構６から加圧エアが送り込まれる供給流路１７が形成されている。そして、エア浮上ユニット３からエアを噴射することで、平板基板または検出用平板基板２が搬送面１５から隙間１８を介して浮上する。
また、搬送面１５には、検出用平板基板２と同様に、導電性被膜１９が形成されている。なお、エア浮上ユニット３における導電性被膜１９は、搬送方向に沿って隣接する他のエア浮上ユニット３における導電性被膜１９と互いに導通状態が確保されている。 A plurality of air levitation units 3 are continuously provided along the conveyance path, and the upper surface is a conveyance surface 15 for conveying the flat substrate or the detection flat substrate 2. In addition, a plurality of air injection portions 16 that inject air for floating the flat plate substrate or the detection flat plate substrate 2 are formed on the upper surface of the air floating unit 3. Further, a supply flow path 17 through which pressurized air is sent from the pressurized air supply mechanism 6 is formed inside the air levitation unit 3. Then, by ejecting air from the air levitation unit 3, the flat plate substrate or the detection flat plate substrate 2 floats from the transport surface 15 through the gap 18.
In addition, a conductive film 19 is formed on the transport surface 15, similarly to the detection flat substrate 2. Note that the conductive coating 19 in the air levitation unit 3 is electrically connected to the conductive coating 19 in another air levitation unit 3 adjacent in the transport direction.

エア噴射部１６は、搬送面１５に複数形成された凹部２１と、凹部２１の底面と供給流路１７とを連通する連通孔２２とによって構成されている。そして、エア噴射部１６は、各連通孔２２に供給流路１７から送り出されたエアを、凹部２１の開口端２３から噴射する。   The air injection unit 16 includes a plurality of recesses 21 formed on the transport surface 15 and a communication hole 22 that communicates the bottom surface of the recess 21 and the supply flow path 17. Then, the air injection unit 16 injects the air sent from the supply flow path 17 into each communication hole 22 from the opening end 23 of the recess 21.

検出手段４は、検出用平板基板２の導電性被膜１２と各エア浮上ユニット３の搬送面１５上に形成された導電性被膜１９との間に電圧を印加する電圧印加手段３１と、導電性被膜１２と導電性被膜１９との通電を検出する検出器３２とを備えている。
電圧印加手段３１は、検出用平板基板２に分割形成された導電性被膜１２のそれぞれと、各エア浮上ユニット３の搬送面１５上に形成されて互いが搬送経路に沿って電気的に直列に接続されている導電性被膜１９のそれぞれとの間に電圧を印加する。
また、検出器３２は、例えば電流計によって構成されており、検出用平板基板２に分割形成された導電性被膜１２と、各エア浮上ユニット３の搬送面１５上に形成された導電性被膜１９とが接触したときに流れる電流を検出する。 The detection means 4 includes a voltage application means 31 for applying a voltage between the conductive film 12 of the flat plate substrate 2 for detection and the conductive film 19 formed on the transport surface 15 of each air levitation unit 3, The detector 32 which detects electricity supply with the film 12 and the electroconductive film 19 is provided.
The voltage applying means 31 is formed on each of the conductive coatings 12 formed on the flat plate substrate 2 for detection and on the transport surface 15 of each air levitation unit 3 and is electrically connected in series along the transport path. A voltage is applied between each of the connected conductive films 19.
The detector 32 is constituted by, for example, an ammeter, and the conductive coating 12 formed separately on the flat plate substrate 2 for detection and the conductive coating 19 formed on the transport surface 15 of each air levitation unit 3. Detects the current that flows when touching.

このように構成されたエア浮上搬送装置１において、調整やメンテナンスを行う方法について説明する。
まず、通常の平板基板を搬送する場合と同様に、加圧エア供給機構６から加圧エアを供給し、供給流路１７を介してエア浮上ユニット３の各連通孔２２に向けてエアを送り出す。そして、各連通孔２２に送り出されたエアを、開口端２３から噴射する。
また、電圧印加手段３１が、検出用平板基板２に分割して形成された導電性被膜１２のそれぞれと各エア浮上ユニット３における搬送面１５の導電性被膜１９との間に電圧を印加する。 A method for performing adjustment and maintenance in the air levitation transport apparatus 1 configured as described above will be described.
First, as in the case of transporting a normal flat plate substrate, pressurized air is supplied from the pressurized air supply mechanism 6, and the air is sent out to the communication holes 22 of the air levitation unit 3 through the supply flow path 17. . Then, the air sent out to each communication hole 22 is jetted from the opening end 23.
Further, the voltage application means 31 applies a voltage between each of the conductive coatings 12 formed by being divided on the flat plate substrate 2 for detection and the conductive coating 19 on the transport surface 15 in each air levitation unit 3.

開口端２３からのエアの噴射方向に検出用平板基板２が存在している場合には、エアが開口端２３から検出用平板基板２の下面に噴き当たるようにして搬送面１５と検出用平板基板２との間の隙間１８に流入する。このようにして、検出用平板基板２を搬送面１５に対して非接触状態で浮上させる。その後、送出機構５によって検出用平板基板２を搬送方向に沿って搬送する。   When the detection flat plate substrate 2 is present in the direction in which the air is ejected from the opening end 23, the conveying surface 15 and the detection flat plate are arranged so that the air blows from the opening end 23 to the lower surface of the detection flat plate substrate 2. It flows into the gap 18 between the substrate 2. In this way, the detection flat substrate 2 is floated in a non-contact state with respect to the transport surface 15. Thereafter, the sending flat plate 2 is transported along the transport direction by the delivery mechanism 5.

ここで、エア噴射部１６からのエアの噴射量が少ない場合やエア浮上ユニット３の配置間隔が大きすぎる場合などにより、検出用平板基板２がエア浮上ユニット３の搬送面１５と接触することがある。
図２に示すように、検出用平板基板２が搬送面１５に接触すると、検出用平板基板２の下面に形成された導電性被膜１２と搬送面１５上に形成された導電性被膜１９とが通電状態となり、導電性被膜１２と導電性被膜１９との間で電流が流れる。これにより、図２に示す破線Ｌのような経路に沿って電流が流れ、検出器３２がこの通電状態を検出する。これにより、搬送面１５における検出用平板基板２との接触箇所が特定される。また、導電性被膜１２が基材１１の下面に分割して形成されているので、検出器３２は、導電性被膜１２のいずれと導電性被膜１９とが接触して電流が流れたか検出する。これにより、検出用平板基板２における搬送面１５との接触箇所を特定する。
この検出結果を基に、エアの噴射量やエア浮上ユニット３の配置間隔などが適切になるように調整する。その後、調整したエア浮上搬送装置１により平板基板の搬送を行う。 Here, the detection flat substrate 2 may come into contact with the conveyance surface 15 of the air levitation unit 3 when the amount of air injected from the air injection unit 16 is small or the arrangement interval of the air levitation units 3 is too large. is there.
As shown in FIG. 2, when the detection flat substrate 2 comes into contact with the transport surface 15, the conductive film 12 formed on the lower surface of the detection flat substrate 2 and the conductive film 19 formed on the transport surface 15 are formed. An energized state is established, and a current flows between the conductive coating 12 and the conductive coating 19. Thereby, a current flows along a path such as a broken line L shown in FIG. 2, and the detector 32 detects this energized state. Thereby, the contact location with the flat plate 2 for a detection in the conveyance surface 15 is specified. In addition, since the conductive coating 12 is divided and formed on the lower surface of the substrate 11, the detector 32 detects which of the conductive coating 12 and the conductive coating 19 are in contact with each other and a current flows. Thereby, the contact location with the conveyance surface 15 in the flat plate substrate 2 for detection is specified.
Based on the detection result, adjustment is made so that the air injection amount, the arrangement interval of the air levitation unit 3 and the like are appropriate. Thereafter, the flat substrate is transported by the adjusted air levitation transport device 1.

このように構成されたエア浮上搬送装置１及び検査方法によれば、検出用平板基板２が搬送面１５と接触したときに検出用平板基板２と搬送面１５との間に流れる電流を検出器３２で検出するので、搬送面１５における検出用平板基板２と搬送面１５との接触箇所を特定できる。これにより、エアの噴射量などの調整をより的確に行うことができる。したがって、エアの噴射量やエア浮上ユニット３の配置間隔のようなエア浮上搬送装置１の調整やメンテナンスが容易となり、労力の削減が図れる。
また、導電性被膜１２を分割して形成することで、検出用平板基板２に置ける搬送面１５との接触箇所を特定することができる。
そして、検出用平板基板２として平板基板と同一の基材１１を用いることで、検出用平板基板２の搬送を平板基板の搬送に近い状態で行うことができ、より的確な調整やメンテナンスを行うことができる。 According to the air levitation transport apparatus 1 and the inspection method configured as described above, a current flowing between the detection flat substrate 2 and the transport surface 15 when the detection flat substrate 2 contacts the transport surface 15 is detected by the detector. Since the detection is performed at 32, the contact point between the detection flat plate substrate 2 and the transport surface 15 on the transport surface 15 can be specified. Thereby, adjustment of the injection quantity of air, etc. can be performed more accurately. Therefore, adjustment and maintenance of the air levitation transport apparatus 1 such as the air injection amount and the arrangement interval of the air levitation unit 3 are facilitated, and labor can be reduced.
Further, by forming the conductive coating 12 in a divided manner, it is possible to specify a contact location with the transport surface 15 that can be placed on the detection flat substrate 2.
By using the same base material 11 as the flat plate substrate as the detection flat plate substrate 2, the detection flat plate substrate 2 can be transported in a state close to the transport of the flat plate substrate, and more accurate adjustment and maintenance are performed. be able to.

なお、本発明は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
例えば、上記実施形態では、噴射する気体としてエアを用いたが、他の気体であってもよい。
また、搬送体として薄板状の平板基板を用いているが、平板基板に限らず、可撓性のないものであってもよい。
また、導電性被膜１２が基材１１の下面への吹き付けによって形成されているが、メッキを用いて形成してもよい。このようにしても、吹き付けと同様に薄膜の導電性被膜１２を形成することができる。さらに、導電性被膜１２を他の方法を用いて形成してもよい。
また、導電性被膜１２、１９を形成する導電性材料として金を用いているが、他の導電性材料を用いてもよい。
また、導電性被膜１２が基材１１の下面に分割して形成されているが、分割せずに下面全体に形成する構成としてもよい。さらに、導電性被膜１９を、導電性被膜１２と同様に搬送面１５上に分割して形成してもよい。
また、検出用平板基板２として平板基板と同一の基材１１を用いているが、平板基板の搬送に近い状態で搬送を行うことができるものであれば、導電性を有する他の材料によって構成されてもよい。
また、搬送面１５に導電性被膜１９を形成しているが、搬送面１５が導電性を有する構成となっていれば、導電性被膜１９を形成しない構成としてもよい。
また、検出手段４は、検出用平板基板２と搬送面１５との接触を通電によって検出しているが、検出用平板基板２と搬送面１５との接触を検出できれば他の手段によって検出してもよい。 In addition, this invention is not limited to the said embodiment, A various change can be added in the range which does not deviate from the meaning of this invention.
For example, in the above embodiment, air is used as the gas to be injected, but other gases may be used.
Moreover, although the thin plate-shaped flat board | substrate is used as a conveyance body, not only a flat board but an inflexible thing may be used.
Moreover, although the conductive film 12 is formed by spraying on the lower surface of the base material 11, it may be formed using plating. Even if it does in this way, the thin conductive film 12 can be formed similarly to spraying. Furthermore, you may form the conductive film 12 using another method.
Further, although gold is used as a conductive material for forming the conductive films 12 and 19, other conductive materials may be used.
Moreover, although the electroconductive film 12 is divided | segmented and formed in the lower surface of the base material 11, it is good also as a structure formed in the whole lower surface, without dividing | segmenting. Further, the conductive coating 19 may be formed on the conveying surface 15 in the same manner as the conductive coating 12.
Moreover, although the same base material 11 as the flat plate substrate is used as the flat plate substrate 2 for detection, if it can carry in the state close | similar to conveyance of a flat plate substrate, it is comprised with the other material which has electroconductivity. May be.
In addition, although the conductive coating 19 is formed on the transport surface 15, the conductive coating 19 may not be formed as long as the transport surface 15 has a conductive configuration.
Further, the detection means 4 detects contact between the detection flat substrate 2 and the transport surface 15 by energization. However, if the contact between the detection flat substrate 2 and the transport surface 15 can be detected, it is detected by other means. Also good.

本発明の一実施形態におけるエア浮上搬送装置を示す説明図である。It is explanatory drawing which shows the air levitation conveyance apparatus in one Embodiment of this invention. 図１において、検出用平板基板と搬送面との接触状態を示す説明図である。In FIG. 1, it is explanatory drawing which shows the contact state of the flat substrate for a detection, and a conveyance surface.

符号の説明Explanation of symbols

１ エア浮上搬送装置（気体浮上搬送装置）
２ 検出用平板基板（検出用搬送体）
４ 検出手段
１１ 基材
１２ 導電性被膜
１５ 搬送面
３１ 電圧印加手段
３２ 検出器 1 Air levitation transport device (gas levitation transport device)
2 Detection flat substrate (detection carrier)
4 Detection means 11 Base material 12 Conductive coating 15 Transport surface 31 Voltage application means 32 Detector

Claims (7)

搬送体に向けて気体を噴射して該搬送体を搬送面から浮上させる気体浮上搬送装置において、
前記気体の噴射により前記搬送面から浮上する検出用搬送体と、該検出用搬送体と前記搬送面との接触を検出する検出手段とを備えることを特徴とする気体浮上搬送装置。 In the gas levitation transport device that jets gas toward the transport body and levitates the transport body from the transport surface,
A gas levitation transport apparatus comprising: a detection transport body that floats from the transport surface by the gas injection; and a detection unit that detects contact between the detection transport body and the transport surface. 前記検出用搬送体の下面及び前記搬送面が導電性を有しており、
前記検出手段が、前記検出用搬送体の下面と前記搬送面の表面との間に電圧を印加する電圧印加手段と、前記検出用搬送体と前記搬送面との接触時に前記検出用搬送体と前記搬送面との間に流れる電流を検出する検出器とを備えることを特徴とする請求項１に記載の気体浮上搬送装置。 The lower surface of the detection transport body and the transport surface have conductivity,
The detection means applies a voltage between the lower surface of the detection transport body and the surface of the transport surface; and the detection transport body when contacting the detection transport body and the transport surface; The gas levitation transfer device according to claim 1, further comprising a detector that detects a current flowing between the transfer surface and the transfer surface. 前記検出用搬送体が、前記搬送体とほぼ同一の材料、形状を有する基材と、該基材の下面に設けられた導電性被膜とによって構成されていることを特徴とする請求項２に記載の気体浮上搬送装置。   The detection transport body is constituted by a base material having substantially the same material and shape as the transport body, and a conductive film provided on the lower surface of the base material. The gas levitation conveyance apparatus described. 前記導電性被膜が、前記基材の下面に導電性材料を吹き付けることで形成されていることを特徴とする請求項３に記載の気体浮上搬送装置。   The gas levitation transport apparatus according to claim 3, wherein the conductive coating is formed by spraying a conductive material on a lower surface of the base material. 前記導電性被膜が、前記基材の下面にメッキ処理を施すことで形成されていることを特徴とする請求項３に記載の気体浮上搬送装置。   The gas levitation transport apparatus according to claim 3, wherein the conductive coating is formed by plating the lower surface of the base material. 前記導電性被膜が、前記基材の下面に分割して形成されていることを特徴とする請求項３から５のいずれか１項に記載の気体浮上搬送装置。   The gas levitation transport apparatus according to any one of claims 3 to 5, wherein the conductive film is divided and formed on a lower surface of the base material. 搬送体に向けて気体を噴射して該搬送体を搬送面から浮上させる気体浮上搬送装置の検査方法において、
検出用搬送体を前記気体の噴射により前記搬送面から浮上させながら搬送し、前記検出用搬送体と前記搬送面との接触を検出することで前記搬送面と前記検出用搬送体との接触箇所を判別することを特徴とする気体浮上搬送装置の検査方法。
In the inspection method of the gas levitation transport device, which injects gas toward the transport body and levitates the transport body from the transport surface,
The detection conveyance body is conveyed while being levitated from the conveyance surface by jetting the gas, and the contact portion between the conveyance surface and the detection conveyance body is detected by detecting contact between the detection conveyance body and the conveyance surface. A method for inspecting a gas levitation transport apparatus, characterized in that
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147232A (en) * 2008-12-18 2010-07-01 Ihi Corp Method of detecting conveying surface contact condition of thin plate
JP2010157612A (en) * 2008-12-26 2010-07-15 Ihi Corp Flotation conveyance device and flotation conveyance method
KR101088793B1 (en) 2009-10-22 2011-12-01 오토코리아 주식회사 Transferring device using aero-levitation style
CN108382858A (en) * 2018-03-22 2018-08-10 昆山国显光电有限公司 A kind of method and apparatus of reforming of glass substrate
JP2019522114A (en) * 2016-06-27 2019-08-08 エーエスエム・ネックス・インコーポレイテッド Workpiece loader for wet machining system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147232A (en) * 2008-12-18 2010-07-01 Ihi Corp Method of detecting conveying surface contact condition of thin plate
JP2010157612A (en) * 2008-12-26 2010-07-15 Ihi Corp Flotation conveyance device and flotation conveyance method
KR101088793B1 (en) 2009-10-22 2011-12-01 오토코리아 주식회사 Transferring device using aero-levitation style
JP2019522114A (en) * 2016-06-27 2019-08-08 エーエスエム・ネックス・インコーポレイテッド Workpiece loader for wet machining system
JP7001625B2 (en) 2016-06-27 2022-01-19 エーエスエム・ネックス・インコーポレイテッド Workpiece loader for wet machining systems
CN108382858A (en) * 2018-03-22 2018-08-10 昆山国显光电有限公司 A kind of method and apparatus of reforming of glass substrate
CN108382858B (en) * 2018-03-22 2019-12-10 昆山国显光电有限公司 Method and device for correcting glass substrate

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