JP2007039106A - Thin small sheet chip holder using elastic material - Google Patents

Thin small sheet chip holder using elastic material Download PDF

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Publication number
JP2007039106A
JP2007039106A JP2005227069A JP2005227069A JP2007039106A JP 2007039106 A JP2007039106 A JP 2007039106A JP 2005227069 A JP2005227069 A JP 2005227069A JP 2005227069 A JP2005227069 A JP 2005227069A JP 2007039106 A JP2007039106 A JP 2007039106A
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thin plate
sheet
piece holder
shaped
small piece
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JP2005227069A
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Japanese (ja)
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Masanao Munekane
正直 宗兼
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Hitachi High Tech Science Corp
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SII NanoTechnology Inc
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Priority to JP2005227069A priority Critical patent/JP2007039106A/en
Priority to US11/488,265 priority patent/US20070029266A1/en
Publication of JP2007039106A publication Critical patent/JP2007039106A/en
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small chip sheet holder capable of stably holding only a part of the small chip sheet in freely detachable manner or carrying it by reducing the breakage due to the contact with an adhesive, distortion or breakage generated in being attached/detached. <P>SOLUTION: A sheet shape member 11 having elasticity is provided with an insection 12 capable of inserting and holding a part of the small chip sheet 13 in freely detachable manner. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、主に微小範囲の観察並びに加工の対象となる薄板状小片を保持並びに運搬するための薄板状小片ホルダに関するものである。   The present invention mainly relates to a thin plate-shaped piece holder for holding and transporting a thin plate-shaped piece to be observed and processed in a minute range.

近年、集積回路等の微細化並びに複雑化が進み、複雑な形状の微小試料の観察や加工が不可欠となっている。これらの試料は非常に繊細であり、保持運搬などの取り扱いも困難となっている。   In recent years, integrated circuits and the like have been miniaturized and complicated, and observation and processing of minute samples with complicated shapes have become indispensable. These samples are very delicate, and handling such as holding and transporting is difficult.

そこで従来、試料の保持台並びに運搬用シートなどとして粘着性を有する素材が使用されている（特許文献１、２および非特許文献１参照）。これにより試料を衝撃から保護し、且つ取り扱いを容易にすることが可能となっている。具体的には、粘着性のあるシートの上面に試料を密着させることにより、保持や運搬を行うことが可能となるものである。したがって、僅かな振動により試料が移動する事が無いため、試料の破損を防ぐことができ、試料押さえも不要となる。   Therefore, conventionally, a material having adhesiveness has been used as a sample holder and a transport sheet (see Patent Documents 1 and 2 and Non-Patent Document 1). As a result, the sample can be protected from impact and can be easily handled. Specifically, the sample can be held and transported by bringing the sample into close contact with the upper surface of the adhesive sheet. Therefore, since the sample does not move due to slight vibration, the sample can be prevented from being damaged, and the sample presser is not required.

しかしながら、従来の粘着性を有する材料が使用された保持運搬シートによる保持運搬の方法では、試料が非常に脆い場合や薄い場合、試料をシートから剥離する際に歪曲や破損が生じてしまい、さらに破損により生じた破片が他の試料を損傷するという問題があった。また、微小範囲の観察に頻繁に用いられるＴＥＭ試料が設置されるＴＥＭ用メッシュなど、薄板状試料の両面や端面に観察並びに加工の対象部位がある場合には、観察又は加工部位とシートを構成する粘着剤との接触が避けられず、接触が即対象範囲の破損となるため、この方法による保持運搬ができなかった。
特開２００４−３９９２８ 公開特許広報 特開２００５−１１６９２０ 公開特許広報 ＧＥＬ−ＰＡＫ、“ＧＥＬ−Ｔｒａｙｓ（Ｃａｒｒｉｅｒ Ｔｒａｙｓ）”、[ｏｎｌｉｎｅ]、[平成１７年７月５日検索]、インターネット＜ＵＲＬ：ｈｔｔｐ：／／ｗｗｗ．ｇｅｌｐａｋ．ｃｏｍ／ｐｒｏｄｕｃｔｓ／ｇｅｌ＿ｔｒａｙ．ｈｔｍｌ＞ However, in the conventional method of holding and transporting using a holding and transporting sheet using an adhesive material, if the sample is very brittle or thin, distortion or breakage may occur when the sample is peeled from the sheet. There was a problem that debris caused by breakage damaged other samples. In addition, if there are parts to be observed and processed on both sides and end faces of a thin plate sample such as a TEM mesh where a TEM sample frequently used for observation of a minute range is installed, the observation or processing part and sheet are configured. Since the contact with the pressure sensitive adhesive is unavoidable and the contact immediately breaks the target range, it was not possible to hold and transport by this method.
Japanese Patent Application Laid-Open Publication No. 2004-39928 JP-A-2005-116920 Public Patent Information GEL-PAK, “GEL-Trays (Carrier Trays)”, [online], [July 5, 2005 search], Internet <URL: http: // www. gelpak. com / products / gel_tray. html>

本発明は上記状況に鑑み、粘着剤との接触による破損、着脱時に生じる歪曲や破損を軽減して、着脱自在に薄板状小片の一部のみを安定的に保持あるいは運搬可能な薄板状小片ホルダを提供することを目的とする。   In view of the above situation, the present invention reduces the damage caused by contact with the adhesive and the distortion and breakage that occur at the time of attachment / detachment, and the thin plate-like piece holder that can stably hold or transport only a part of the thin plate-like piece in a removable manner. The purpose is to provide.

本発明の第１の態様は、弾性を有するシート状部材に薄板状小片の一部を着脱自在に挿入して保持できる切り込みを設けたことを特徴とする薄板状小片ホルダにある。   According to a first aspect of the present invention, there is provided a thin plate-shaped piece holder characterized in that an incision capable of detachably inserting a part of the thin plate-shaped piece is provided in a sheet-like member having elasticity.

第１の態様で、シートが粘着性を有する場合は、薄板状小片は一部のみが保持され、保持される一部分を除いて薄板状小片は粘着剤に接触しないため、粘着剤の付着による薄板状小片の破損を防ぐことができる。また、薄板状小片の取り出しの際、シート状部材から従来の様に引き剥がすのではなく、引き抜く様に取り出すことが可能であるため、薄板状小片の折損や歪曲を防ぐことができる。   In the first aspect, when the sheet has adhesiveness, only a part of the thin plate-like piece is held, and the thin plate-like piece does not come into contact with the adhesive except for the held part. The breakage of the small piece can be prevented. Further, when taking out the thin plate-like small piece, it is possible to prevent the thin plate-like small piece from being broken or distorted because it is possible to take out the sheet-like piece without pulling it off from the sheet-like member in the conventional manner.

本発明の第２の態様は、第１の態様において、シート状部材がエラストマーからなることを特徴とする薄板状小片ホルダにある。   According to a second aspect of the present invention, in the first aspect, there is provided a thin plate-shaped piece holder characterized in that the sheet-like member is made of an elastomer.

第２の態様では、弾性体に形成される切れ込みを利用することにより薄板状小片を効果的に保持することができる。   In the second aspect, the thin plate-like piece can be effectively held by utilizing the cut formed in the elastic body.

本発明の第３の態様は、第２の態様において、シート状部材が熱可塑性エラストマーまたはゴムであることを特徴とする薄板状小片ホルダにある。   According to a third aspect of the present invention, there is provided the thin plate-shaped piece holder according to the second aspect, wherein the sheet-like member is a thermoplastic elastomer or rubber.

第３の態様では、熱可塑性エラストマーまたはゴムにより薄板状小片を効果的に保持することができる。   In the third aspect, the thin plate-like piece can be effectively held by the thermoplastic elastomer or rubber.

本発明の第４の態様は、第１の態様において、シート状部材がハイドロゲルであることを特徴とする薄板状小片ホルダにある。   According to a fourth aspect of the present invention, there is provided the thin plate-shaped small piece holder according to the first aspect, wherein the sheet-like member is a hydrogel.

第４の態様では、ハイドロゲルにより薄板状小片を効果的に保持することができる。   In the fourth aspect, the thin plate-like piece can be effectively held by the hydrogel.

本発明の第５の態様は、第１〜第４のいずれかの態様において、シート状部材が常温時１０-4ＭＰａ〜２ＭＰａの弾性を有することを特徴とする薄板状小片ホルダにある。 According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the sheet-like member is a thin plate-shaped piece holder characterized by having elasticity of 10 −4 MPa to 2 MPa at room temperature.

第５の態様では、最適な弾力で薄板状小片を保持することができる。   In the fifth aspect, the thin plate-like piece can be held with an optimal elasticity.

本発明の第６の態様は、第１〜第５のいずれかの態様において、切り込みが複数設けられていることを特徴とする薄板状小片ホルダにある。   According to a sixth aspect of the present invention, there is provided a thin plate-shaped piece holder characterized in that a plurality of cuts are provided in any one of the first to fifth aspects.

第６の態様では、複数の切り込みに、より多数の薄板状小片を保持することができる。   In the sixth aspect, a larger number of thin plate-like pieces can be held in the plurality of cuts.

本発明の第７の態様は、第１〜第６のいずれかの態様において、切り込みがシート状部材上面から上面に直交する方向に設けられていることを特徴とする薄板状小片ホルダにある。   According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the thin plate-shaped piece holder is characterized in that the cut is provided in a direction orthogonal to the upper surface from the upper surface of the sheet-like member.

第７の態様では、シート状部材の上面から当該上面に直交する方向に形成された切り込みに、薄板状小片をほぼ垂直に保持することが可能であり、平面方向の収容スペースを抑制でき、多数の薄板状小片を保持することが可能である。   In the seventh aspect, it is possible to hold the thin plate-like piece almost vertically in the notch formed in the direction perpendicular to the upper surface from the upper surface of the sheet-like member, and the storage space in the planar direction can be suppressed, and a large number It is possible to hold a thin plate-like piece.

本発明の第８の態様は、第１〜第６のいずれかの態様において、切り込みがシート状部材上面に対し傾斜する方向に設けられていることを特徴とする薄板状小片ホルダにある。   According to an eighth aspect of the present invention, in any one of the first to sixth aspects, the thin plate-shaped piece holder is characterized in that the cut is provided in a direction inclined with respect to the upper surface of the sheet-like member.

第９の態様では、シート状部材の上面から当該上面に対し傾斜する方向に形成された切り込みに薄板状小片を保持することが可能で、高さ方向の収容スペースを最小限にして平面方向の収容スペースを抑制できる。   In the ninth aspect, it is possible to hold the thin plate-like piece in a notch formed in a direction inclined with respect to the upper surface from the upper surface of the sheet-like member, and minimize the accommodation space in the height direction in the planar direction. Storage space can be reduced.

本発明の第９の態様は、第１〜第８のいずれかの態様において、シート状部材が開閉自在なカバーを有する容器に納められていることを特徴とする薄板状小片ホルダにある。   According to a ninth aspect of the present invention, in any one of the first to eighth aspects, the sheet-like member is stored in a container having a cover that can be freely opened and closed.

第９の態様では、薄板状小片を塵などの堆積物や液体などの飛散から保護し、また薄板状小片ホルダーの運搬を容易にすることができる。また、シート状部材がハイドロゲルのような含水化合物からなる場合は、水分の蒸発を軽減することができる。   In the ninth aspect, it is possible to protect the thin plate-like pieces from the deposits such as dust and the scattering of the liquid, and to facilitate the carrying of the thin plate-like piece holders. Moreover, when a sheet-like member consists of a hydrous compound like hydrogel, evaporation of a water | moisture content can be reduced.

本発明の第１０の態様は、第１〜第９のいずれかの態様において、薄板状小片がＭＥＭＳ構造物またはＴＥＭ用メッシュまたは顕微鏡用カンチレバーであることを特徴とする薄板状小片ホルダにある。   According to a tenth aspect of the present invention, there is provided the thin plate-shaped piece holder according to any one of the first to ninth aspects, wherein the thin plate-shaped piece is a MEMS structure, a TEM mesh, or a microscope cantilever.

第１０の態様では、シート状部材によりＭＥＭＳ構造物またはＴＥＭ用メッシュまたは顕微鏡用カンチレバーの設置、運搬、取り外しを折損や歪曲無く行うことができる。   In the tenth aspect, installation, transportation, and removal of the MEMS structure, the TEM mesh, or the microscope cantilever can be performed without breakage or distortion by the sheet-like member.

本発明の薄板状小片ホルダーは、粘着剤との接触による破損、着脱時に生じる歪曲や破損を軽減して、着脱自在に薄板状小片の一部のみを安定的に保持あるいは運搬することが可能となり、これまでの粘着保持台では困難であったＭＥＭＳ基板などの三次元微小構造物やＴＥＭ用メッシュや顕微鏡用カンチレバーの保持や運搬を容易に行うことが可能になる。   The thin plate-shaped small piece holder of the present invention reduces damage caused by contact with an adhesive, distortion and breakage that occurs during attachment and detachment, and can stably hold or transport only a part of the thin plate-shaped small piece in a detachable manner. Thus, it becomes possible to easily hold and transport a three-dimensional microstructure such as a MEMS substrate, a TEM mesh, or a cantilever for a microscope, which has been difficult with conventional adhesive holders.

本発明の実施の形態を図面に基づき詳細に説明する。   Embodiments of the present invention will be described in detail with reference to the drawings.

＜第１実施形態＞
図１〜図４は本発明の第１実施形態にかかわり、図１（ａ）および図２は薄板状小片ホルダ要部の斜視図、図１（ｂ）は本実施形態において薄板状小片の１例として示されるＴＥＭ用メッシュの微小試料固定部分の拡大図、図３（ａ）および図３（ｂ）は薄板状小片ホルダー全体の上面図、図４（ａ）および図４（ｂ）はシート状部材の断面図である。 <First Embodiment>
1 to 4 relate to the first embodiment of the present invention, FIG. 1 (a) and FIG. 2 are perspective views of the main part of the thin plate-shaped piece holder, and FIG. FIG. 3A and FIG. 3B are top views of the entire thin plate-shaped piece holder, and FIG. 4A and FIG. 4B are sheets. It is sectional drawing of a member.

図１（ａ）及び図３に示すように、本実施形態の薄板状小片ホルダー１０は、シート状部材１１に切り込み１２が設けられ、切り込み１２に薄板状小片１３の一端が保持されるものである。図１（ａ）には薄板状小片１３の例として微小試料１を固定したＴＥＭ用メッシュ２が示され、図１（ｂ）に微小試料１の固定部分の拡大図が示される。図２に薄板状小片１３の例として顕微鏡用カンチレバー３が示される。   As shown in FIG. 1A and FIG. 3, the thin plate-like piece holder 10 of the present embodiment has a sheet-like member 11 provided with a cut 12, and the cut 12 holds one end of the thin plate-like piece 13. is there. FIG. 1A shows a TEM mesh 2 to which a micro sample 1 is fixed as an example of a thin plate-like piece 13, and FIG. 1B shows an enlarged view of a fixing portion of the micro sample 1. FIG. 2 shows a microscope cantilever 3 as an example of the thin plate-shaped piece 13.

シート状部材１１は弾性を有する材料からなる。尚、厚みは自由に設定され、均一で無くて良い。シート状部材１１の材料の例としてはゴム、熱可塑性エラストマー、ハイドロゲルなどが挙げられる。中でも熱可塑性エラストマーは、熱により容易に成形が可能であり、別の用途への再利用も可能であることから、有用な素材である。   The sheet-like member 11 is made of a material having elasticity. The thickness is set freely and does not have to be uniform. Examples of the material of the sheet-like member 11 include rubber, thermoplastic elastomer, hydrogel and the like. Among these, a thermoplastic elastomer is a useful material because it can be easily molded by heat and can be reused for other purposes.

シート状部材１１に切り込み１２が設けられ、切り込み１２には薄板状小片１３が挿入保持される。これにより、粘着剤との接触による破損や着脱時に生じる歪曲や破損を軽減して着脱自在に且つ容易に薄板状小片１３が挿入保持される。   A notch 12 is provided in the sheet-like member 11, and a thin plate-like piece 13 is inserted and held in the notch 12. As a result, the thin plate-like piece 13 is inserted and held in a detachable manner by reducing damage caused by contact with the pressure-sensitive adhesive and distortion and breakage that occur during attachment and detachment.

切り込み１２によって薄板状小片１３を効果的に保持・着脱するために、シート状部材１１の弾力は常温時において１０-4ＭＰａ〜２ＭＰａが適当である。 In order to effectively hold and detach the thin plate-like pieces 13 by the notches 12, the elasticity of the sheet-like member 11 is suitably 10 −4 MPa to 2 MPa at room temperature.

切り込み１２は図１（ａ）及び図２のようにシート状部材１１の底まで到達してシート状部材１１が分断されるような状態に設けられていても良く、また、シート状部材１１に対し浅い深さに設けられていても良い。切り込み１２がシート状部材１１を分断している場合には、薄板状小片を保持できるよう、分断されたシート状部材が互いに密着していることが必要である。その場合、シート状部材１１をシート保持基板４に貼り付けるか、あるいは図５に示すようにシート状部材１１を包み込む形状のベース２０（２４）内にシート状部材１０を作成したり、設置することが分断しないためには有効である。   The notch 12 may be provided in a state in which the sheet-like member 11 is divided by reaching the bottom of the sheet-like member 11 as shown in FIGS. However, it may be provided at a shallow depth. When the notch 12 divides the sheet-like member 11, the divided sheet-like members need to be in close contact with each other so that the thin plate-like pieces can be held. In that case, the sheet-like member 11 is affixed to the sheet holding substrate 4, or the sheet-like member 10 is created or installed in a base 20 (24) that encloses the sheet-like member 11 as shown in FIG. 5. It is effective to keep things from being divided.

切り込みはカッターで物理的にカットしたり、ビーム等でカットしてもよい。また、弾性素材のエッジ面を隣合わせて形成しても構わない。シート保持基板４や図５に示すベース２０（２４）がシート状部材１１に比べて非常に硬い場合、物理的に切込みを作成する場合にシート状部材１１だけを完全に切ることが出来るので、シート状部材１１の厚みを設定することで、任意の切れ込み深さ量にすることが出来る。また、シート状部材１１の厚みが必要な切れ込み深さ量を十分満たしている場合、シート保持基板４やベース２０（２４）まで達することなく必要以上の切れ込み深さを形成することができ、かつシート状部材１１は分断しない。   The incision may be physically cut with a cutter or may be cut with a beam or the like. Further, the edge surfaces of the elastic material may be formed adjacent to each other. If the sheet holding substrate 4 and the base 20 (24) shown in FIG. 5 are very hard compared to the sheet-like member 11, only the sheet-like member 11 can be completely cut when making a cut physically. By setting the thickness of the sheet-like member 11, an arbitrary depth of cut can be obtained. In addition, when the thickness of the sheet-like member 11 sufficiently satisfies the necessary depth of cut, an excessive depth of cut can be formed without reaching the sheet holding substrate 4 or the base 20 (24), and The sheet-like member 11 is not divided.

薄板状小片１３の例としては、ＴＥＭ用メッシュ２及び顕微鏡用カンチレバー３のほか、ＭＥＭＳ構造物なども挙げられ、平面状の粘着剤への水平面方向載置が困難なサンプルや部品なども容易に挿入保持される。   Examples of the thin plate-like small piece 13 include a TEM mesh 2 and a microscope cantilever 3 as well as a MEMS structure. Samples and parts that are difficult to be placed in a horizontal plane on a flat adhesive can be easily obtained. Insertion is retained.

図３（ａ）には薄板状小片ホルダにおける切り込みの配置の一例が示され、切り込み１２が断線状に一列（図中左右方向）につき三箇所、さらに各々平行な切り込み１２が三段（図中上下方向）、計９箇所設けられている。各切り込みに対し薄板状小片１３が１個挿入保持され、計９個の薄板状小片１３が挿入保持されている。切り込み１２の個数や配置は自由に設定することが可能であり、さらに一つの切り込み１２に対し複数個の薄板状小片１３が挿入保持されても良い。また、図３（ａ）では一直線上に複数の切り込み１２が断線状に設けられ、各列各段において切り込み１２が同様に整然と配置されているが、切り込み１２は列や段を成している必要は無く、ランダムに設けられていても良い。したがって、薄板状小片の個数や形状や種類に合わせて切り込みの配置を自由に設定することができる。   FIG. 3 (a) shows an example of the arrangement of the cuts in the thin plate-shaped small piece holder. The cuts 12 are disconnected in three rows per line (in the horizontal direction in the figure), and each of the parallel cuts 12 has three stages (in the figure). A total of nine places are provided. One thin plate-like piece 13 is inserted and held for each cut, and a total of nine thin plate-like pieces 13 are inserted and held. The number and arrangement of the cuts 12 can be freely set, and a plurality of thin plate-like pieces 13 may be inserted and held in one cut 12. Further, in FIG. 3A, a plurality of cuts 12 are provided in a straight line on the straight line, and the cuts 12 are arranged orderly in each row, but the cuts 12 form a row or a row. It is not necessary and may be provided at random. Therefore, the arrangement of the cuts can be freely set according to the number, shape and type of the thin plate-like pieces.

図１（ａ）及び図１（ｂ）においてＴＥＭ用メッシュ２上の微小試料１は、ＴＥＭ用メッシュに設けられた二つの切り欠き２ａの間の上端に固定される。微小試料１の固定には、接着剤固定やカーボン薄膜固定などが用いられる。本発明の薄板状小片ホルダ１０では、ＴＥＭ用メッシュ２の端部に関して、微小試料１が固定された箇所をシート状部材１１から遠くなるよう切り込み１２に挿入して保持する。また、図２において顕微鏡用カンチレバーも同様に先端の鋭利な部分が重要であり、本発明の薄板状小片ホルダ１０は、鋭利な先端と逆側の端部を保持することが可能である。したがって、微小試料１や顕微鏡用カンチレバー３の鋭利な先端部とシート状部材１１との接触が避けられ、また破損等を防止することができる。   1A and 1B, the micro sample 1 on the TEM mesh 2 is fixed to the upper end between two notches 2a provided on the TEM mesh. For fixing the micro sample 1, adhesive fixing, carbon thin film fixing, or the like is used. In the thin plate-shaped small piece holder 10 of the present invention, the portion where the micro sample 1 is fixed is inserted into the notch 12 and held so as to be far from the sheet-like member 11 with respect to the end of the TEM mesh 2. Further, in FIG. 2, the sharp portion of the tip is also important in the microscope cantilever, and the thin plate-shaped small piece holder 10 of the present invention can hold the end opposite to the sharp tip. Therefore, contact between the sharp tip of the micro sample 1 or the microscope cantilever 3 and the sheet-like member 11 can be avoided, and damage or the like can be prevented.

図３（ｂ）には薄板状小片ホルダにおける切り込みの配置の別の一例が示される。切り込み１５は連続した直線状に設けられ、一列につき薄板状小片１３が３個挿入保持され、同様の列が計３段（図中上下方向）設けられ、計９個の薄板状小片１３が挿入保持されている。切り込み１５は一直線状に連続しているため、切り込み１５上において薄板状小片１３が自由な位置に自由な個数設置される。   FIG. 3B shows another example of the arrangement of the cuts in the thin plate-shaped piece holder. The notches 15 are provided in a continuous straight line, and three thin plate-like pieces 13 are inserted and held in one row, and a similar row is provided in a total of three stages (vertical direction in the figure), and a total of nine thin plate-like pieces 13 are inserted. Is retained. Since the cuts 15 are continuous in a straight line, a small number of thin plate-like pieces 13 are placed on the cuts 15 at free positions.

図３（ａ）及び図３（ｂ）の通り、切り込みは断線状に設けられていても良く、直線状に設けられていても良い。厚いサンプル設置の際には設置周辺のシート状部材の変形が生じる。切れ込みを断線状に設けると、シート状部材の変形による隣の切れ込みへの形状変化を少なくすることができる。また、直線状に作成する場合は切れ込み作成が容易である。   As shown in FIGS. 3A and 3B, the cuts may be provided in a broken line or in a straight line. When a thick sample is installed, the sheet-like member around the installation is deformed. When the cuts are provided in a broken line shape, the shape change to the adjacent cuts due to the deformation of the sheet-like member can be reduced. Further, when creating a straight line, it is easy to create a cut.

図１〜図３には、切り込み１２（１５）がシート状部材１１の上面から当該上面に直交する方向に設けられている場合を例示した。この切り込み１２（１５）は、図４に示すようにシート状部材１１の上面から当該上面に対し傾斜する方向に設けられていても良い。   1 to 3 exemplify a case where the cuts 12 (15) are provided from the upper surface of the sheet-like member 11 in a direction orthogonal to the upper surface. The cuts 12 (15) may be provided in a direction inclined from the upper surface of the sheet-like member 11 to the upper surface as shown in FIG.

図４（ａ）及び図４（ｂ）はシート状部材１１の断面図である。図４（ａ）では切り込み１２がシート状部材１１の上面から当該上面に直交する方向に設けられ、図４（ｂ）では切り込み１２（１５）がシート状部材１１の上面から当該上面に対し傾斜する方向に設けられている。図４（ａ）のように切り込み１２（１５）をシート状部材１１の上面から当該上面に直交する方向に設けることにより平面方向の収容スペースを抑制でき、多数の薄板状小片１３を保持できる。図４（ｂ）のように切り込み１２（１５）をシート状部材１１の上面から当該上面に傾斜する方向に設けることにより高さ方向の収容スペースを抑制できる。切り込みは、薄板状小片１３を保持するのに適する角度に設けることで、複雑な形状のものや両面に観察加工対象の存在するサンプル及び部品などを容易に保持・運搬することが可能となる。   4A and 4B are cross-sectional views of the sheet-like member 11. In FIG. 4A, the notch 12 is provided from the upper surface of the sheet-like member 11 in a direction perpendicular to the upper surface, and in FIG. 4B, the notch 12 (15) is inclined from the upper surface of the sheet-like member 11 with respect to the upper surface. It is provided in the direction to do. As shown in FIG. 4A, by providing the notches 12 (15) from the upper surface of the sheet-like member 11 in a direction orthogonal to the upper surface, the accommodation space in the planar direction can be suppressed, and a large number of thin plate-like pieces 13 can be held. By providing the notches 12 (15) in the direction inclined from the upper surface of the sheet-like member 11 to the upper surface as shown in FIG. 4B, the accommodation space in the height direction can be suppressed. By providing the cut at an angle suitable for holding the thin plate-like piece 13, it is possible to easily hold and transport a sample having a complicated shape, a sample and a part having an observation processing object on both sides, and the like.

＜第２実施形態＞
図５は本発明の第２実施形態に係る薄板状小片ホルダの断面図である。 Second Embodiment
FIG. 5 is a sectional view of a thin plate-shaped small piece holder according to the second embodiment of the present invention.

本発明における第２実施形態は図３（ａ）および図３（ｂ）のホルダ１０（１４）（切り込み１２（１５）がシート状部材１１の上面から当該上面に傾斜する方向に設けられているもの）を容器２２（２３）に収容した例である。   In the second embodiment of the present invention, the holder 10 (14) (the notch 12 (15) of FIGS. 3A and 3B is provided in a direction inclined from the upper surface of the sheet-like member 11 to the upper surface. This is an example in which a container 22 is accommodated in the container 22 (23).

図５（ａ）においては、容器２２のベース２０はシート状部材１１を収容し、ベース２０の開口がカバー２１によって覆われ、カバー２１はベース２０の開口縁に嵌合され、ベース２０とカバー２１は一体状となる。   In FIG. 5A, the base 20 of the container 22 accommodates the sheet-like member 11, the opening of the base 20 is covered with the cover 21, and the cover 21 is fitted to the opening edge of the base 20. 21 is integrated.

図５（ｂ）においては、容器２３のベース２４はシート状部材１１を収容し、ベース２４の開口がカバー２５によって覆われている。ベース２４とカバー２５は端部同士が接合部材２６で接合され、カバー２５はベース２４と一体状のまま開閉自在となる。接合部材２６にはヒンジなどが使用される。   In FIG. 5B, the base 24 of the container 23 accommodates the sheet-like member 11, and the opening of the base 24 is covered with a cover 25. The ends of the base 24 and the cover 25 are joined by a joining member 26, and the cover 25 can be opened and closed while being integrated with the base 24. A hinge or the like is used for the joining member 26.

図５におけるベース及びカバーの材料としては、透明の樹脂や遮光性の樹脂などが好ましい。透明の樹脂は、カバーが閉じている状態でも内部の確認が可能であり、遮光性の樹脂は、薄板状小片１３が光の照射を受ける事が好ましくない場合などに適当である。   As a material for the base and cover in FIG. 5, a transparent resin, a light-shielding resin, or the like is preferable. The transparent resin allows the inside to be confirmed even when the cover is closed, and the light-shielding resin is suitable when the thin plate-like piece 13 is not preferred to be irradiated with light.

本実施形態の薄板状小片ホルダ１６（１７）は、カバー２１（２５）により全体が覆われ、カバー２１（２５）がベース２０（２４）と嵌合あるいは接合されていることから、薄板状小片を塵などの堆積物や液体などの飛散から保護し、また薄板状小片ホルダ１６（１７）の運搬を容易にすることができる。また、シート状部材１１が含水化合物からなる場合は、水分の蒸発を軽減することができる。   The thin plate-shaped small piece holder 16 (17) of the present embodiment is entirely covered by the cover 21 (25), and the cover 21 (25) is fitted or joined to the base 20 (24). Can be protected from scattering of deposits such as dust and liquid, and the thin plate-shaped small piece holder 16 (17) can be easily transported. Moreover, when the sheet-like member 11 consists of a hydrous compound, evaporation of a water | moisture content can be reduced.

本実施形態においても、シート状部材１１に設けられる切り込みの角度や配置、挿入保持される薄板状小片の種類や数は自由に設定して良い。   Also in this embodiment, the angle and arrangement of the cuts provided in the sheet-like member 11 and the type and number of thin plate-like pieces inserted and held may be freely set.

本発明は、主に微小範囲の観察並びに加工の対象となる薄板状小片を保持並びに運搬するための薄板状小片ホルダに関する産業分野で利用することができる。   INDUSTRIAL APPLICABILITY The present invention can be used in the industrial field mainly related to a thin plate-shaped piece holder for holding and transporting a thin plate-shaped piece to be observed and processed in a minute range.

本発明の第１実施形態に係る薄板状小片ホルダの斜視図及び薄板状小片の１例であるＴＥＭ用メッシュの微小試料固定部分である。1 is a perspective view of a thin plate-like piece holder according to a first embodiment of the present invention and a micro sample fixing portion of a TEM mesh that is an example of the thin plate-like piece. 本発明の第１実施形態に係る薄板状小片ホルダの斜視図及び薄板状小片の１例である顕微鏡用カンチレバーの微小試料固定部分である。It is the perspective view of the thin plate-shaped small piece holder which concerns on 1st Embodiment of this invention, and the micro sample fixed part of the cantilever for microscopes which is an example of a thin plate-shaped small piece. 本発明の第１実施形態に係る薄板状小片ホルダの上面図である。It is a top view of the thin plate-shaped small piece holder which concerns on 1st Embodiment of this invention. 本発明の第２実施形態に係る薄板状小片ホルダの断面図である。It is sectional drawing of the thin plate-shaped small piece holder which concerns on 2nd Embodiment of this invention. 本発明の第２実施形態に係る薄板状小片ホルダの断面図である。It is sectional drawing of the thin plate-shaped small piece holder which concerns on 2nd Embodiment of this invention.

符号の説明Explanation of symbols

１ 微小試料
２ ＴＥＭ用メッシュ
２ａ 切り欠き
３ 顕微鏡用カンチレバー
４ シート保持基板
１０、１４ 薄板状小片ホルダ
１１ シート状部材
１２、１５ 切り込み
１３ 薄板状小片
１６、１７ 薄板状小片ホルダ
２０、２４ ベース
２１、２５ カバー
２２、２３ 容器
２６ 接合部材 DESCRIPTION OF SYMBOLS 1 Micro sample 2 TEM mesh 2a Notch 3 Microscope cantilever 4 Sheet holding substrate 10, 14 Thin plate-shaped small piece holder 11 Sheet-shaped member 12, 15 Cut 13 Thin plate-shaped small piece 16, 17 Thin plate-shaped small piece holder 20, 24 Base 21, 25 Cover 22, 23 Container 26 Joining member

Claims (10)

弾性を有するシート状部材に薄板状小片の一部を着脱自在に挿入して保持できる切り込みを設けたことを特徴とする薄板状小片ホルダ。   A thin plate-shaped small piece holder provided with an incision capable of detachably inserting and holding a part of a thin plate small piece in an elastic sheet-shaped member. 請求項１において、シート状部材がエラストマーからなることを特徴とする薄板状小片ホルダ。   2. The thin plate-shaped small piece holder according to claim 1, wherein the sheet-like member is made of an elastomer. 請求項２において、エラストマーが熱可塑性エラストマーまたはゴムであることを特徴とする薄板状小片ホルダ。   3. The thin plate-shaped small piece holder according to claim 2, wherein the elastomer is a thermoplastic elastomer or rubber. 請求項１において、シート状部材がハイドロゲルからなることを特徴とする薄板状小片ホルダ。   The thin plate-shaped small piece holder according to claim 1, wherein the sheet-like member is made of hydrogel. 請求項１〜４のいずれかにおいて、シート状部材が常温時１０-4ＭＰａ〜２ＭＰａの弾性を有することを特徴とする薄板状小片ホルダ。 The thin plate-shaped small piece holder according to claim 1, wherein the sheet-like member has elasticity of 10 −4 MPa to 2 MPa at normal temperature. 請求項１〜５のいずれかにおいて、切り込みが複数設けられていることを特徴とする薄板状小片ホルダ。   6. The thin plate-shaped small piece holder according to claim 1, wherein a plurality of cuts are provided. 請求項１〜６のいずれかにおいて、切り込みがシート状部材の上面から当該上面に直交する方向に設けられていることを特徴とする薄板状小片ホルダ。   7. The thin plate-shaped small piece holder according to claim 1, wherein the cut is provided in a direction perpendicular to the upper surface from the upper surface of the sheet-like member. 請求項１〜６のいずれかにおいて、切り込みがシート状部材の上面から当該上面に対し傾斜する方向に設けられていることを特徴とする薄板状小片ホルダ。   7. The thin plate-shaped small piece holder according to claim 1, wherein the cut is provided in a direction inclined with respect to the upper surface from the upper surface of the sheet-like member. 請求項１〜８のいずれかにおいて、シート状部材が開閉自在なカバーを有する容器に納められていることを特徴とする薄板状小片ホルダ。   9. The thin plate-shaped piece holder according to claim 1, wherein the sheet-like member is housed in a container having a cover that can be freely opened and closed. 請求項１〜９において、薄板状小片がＭＥＭＳ構造物またはＴＥＭ用メッシュまたは顕微鏡用カンチレバーであることを特徴とする薄板状小片ホルダ。   The thin plate-shaped piece holder according to claim 1, wherein the thin plate-shaped piece is a MEMS structure, a TEM mesh, or a microscope cantilever.
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JP2005091697A (en) * 2003-09-17 2005-04-07 Hitachi Maxell Ltd Packing container for optical fiber and packing method therefor

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