JP2007018775A - Organic electroluminescence display and its manufacturing method - Google Patents

Organic electroluminescence display and its manufacturing method Download PDF

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JP2007018775A
JP2007018775A JP2005196678A JP2005196678A JP2007018775A JP 2007018775 A JP2007018775 A JP 2007018775A JP 2005196678 A JP2005196678 A JP 2005196678A JP 2005196678 A JP2005196678 A JP 2005196678A JP 2007018775 A JP2007018775 A JP 2007018775A
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pixel electrode
display device
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electroluminescence display
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Kenji Mitsui
健二 三井
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Japan Display Central Inc
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Toshiba Matsushita Display Technology Co Ltd
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<P>PROBLEM TO BE SOLVED: To provide an organic EL display excellent in brightness uniformity within one pixel, and to provide its manufacturing method. <P>SOLUTION: The organic EL display has a plurality of pixels placed on a substrate 1, where the respective pixels have a laminate composed of an organic material layer 5 and an upper electrode 6 including a pixel electrode and a light emitting layer, and the pixel electrode and the organic material layer 5 are divided into plurality in the pixel. The end faces of divided pixel electrodes 3 into which the pixel electrode is divided are coated with the organic material layer 5. A solution is applied to the respective divided pixel electrodes 3 selectively by dropping the solution containing an organic material with an inkjet method, to form the organic material layers 5. In another way, the solution is dropped onto each divided pixel electrode group composed of the plurality of the divided pixel electrodes 3 with the inkjet method, and then the dropped solutions are split to respective divided pixel electrodes 3, so that the solution is applied selectively. An underlying layer 2 with repellency is formed under the divide pixel electrodes 3. Before dropping the solution, the repellency of the surface of the underlying layer 2 is increased between divided pixel electrodes 3. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、基板上に複数配置された画素の各々において画素電極と少なくとも発光層を含む有機材料層と上部電極とがこの順に積層されてなる有機エレクトロルミネッセンス表示装置及びその製造方法に関する。   The present invention relates to an organic electroluminescence display device in which a pixel electrode, an organic material layer including at least a light emitting layer, and an upper electrode are stacked in this order in each of a plurality of pixels arranged on a substrate, and a method for manufacturing the same.

有機エレクトロルミネッセンス（以下、ＥＬと称する。）素子は、自発光型素子であるため視野角が広く、バックライトが不要で薄型化及び消費電力の節減が容易であり、しかも応答速度が速い等の利点を持つことから、液晶表示装置に替わる次世代表示装置として注目を集めている。有機ＥＬ素子は、発光層の材料により高分子型と低分子型とに大きく分けることができ、このうち高分子型の有機ＥＬ素子は、大面積化が容易であることから高精細、大画面の表示装置に適するものである。高分子型の有機ＥＬ素子の発光層は、高分子有機材料と溶剤を含む溶液を基板に塗布することにより形成され、例えばインクジェット法により形成されることが多い。   An organic electroluminescence (hereinafter referred to as EL) element is a self-luminous element, has a wide viewing angle, does not require a backlight, is easy to reduce thickness and power consumption, and has a high response speed. Because of its advantages, it has attracted attention as a next-generation display device that replaces liquid crystal display devices. Organic EL elements can be broadly classified into high-molecular and low-molecular types depending on the material of the light-emitting layer. Among them, high-definition, large screens are used for high-molecular-type organic EL elements because they can be easily increased in area. It is suitable for the display device. The light emitting layer of a polymer organic EL element is formed by applying a solution containing a polymer organic material and a solvent to a substrate, and is often formed by, for example, an ink jet method.

例えば特許文献１には、特定の有機化合物と感光性樹脂とを含む溶液を塗布し、乾燥して感光性樹脂層を形成し、感光性樹脂層を露光、現像処理した後、ポストベークして前記有機化合物層で表面が覆われた格子状のバンクを形成し、格子状のバンクで区画された複数の陽極上にインク状正孔輸送材料及びインク状発光材料をインクジェットにより供給する有機エレクトロルミネッセンス素子の製造方法が開示されている。
特開２００３−０８６３７２号公報 For example, in Patent Document 1, a solution containing a specific organic compound and a photosensitive resin is applied, dried to form a photosensitive resin layer, the photosensitive resin layer is exposed and developed, and then post-baked. Organic electroluminescence in which a lattice-like bank whose surface is covered with the organic compound layer is formed, and an ink-like hole transport material and an ink-like light-emitting material are supplied by inkjet onto a plurality of anodes partitioned by the lattice-like bank An element manufacturing method is disclosed.
JP 2003-086372 A

ところで、インクジェット法で発光層を含む有機材料層を形成する場合、例えば図１０（ａ），（ｂ）に示すように、予め基板１０１上に格子状の画素分離用バンク１０２と画素分離用バンク１０２の開口部に露出した画素電極１０３とを形成しておき、この画素電極１０３上にノズルから高分子有機材料と溶剤を含む溶液を滴下する。滴下直後の溶液１０４は、端部に比べて中央部が盛り上がった形状とされているが、溶液１０４を乾燥させて溶剤を除去することにより徐々に平坦化し、その結果有機材料層が形成されることになる。有機ＥＬ素子を用いた表示装置においては、均一な表示を達成する観点から、画素分離用バンク１０２で区画される画素内における有機材料層の膜厚を均一に形成することが要求される。   By the way, when an organic material layer including a light emitting layer is formed by an inkjet method, for example, as shown in FIGS. 10A and 10B, a lattice-like pixel separation bank 102 and a pixel separation bank are previously formed on a substrate 101. A pixel electrode 103 exposed at the opening of the pixel 102 is formed, and a solution containing a polymer organic material and a solvent is dropped onto the pixel electrode 103 from a nozzle. The solution 104 immediately after dropping is shaped so that the center portion is raised compared to the end portion, but is gradually flattened by drying the solution 104 and removing the solvent, resulting in the formation of an organic material layer. It will be. In a display device using an organic EL element, it is required to uniformly form the film thickness of the organic material layer in the pixels partitioned by the pixel separation bank 102 from the viewpoint of achieving uniform display.

しかしながら、実際には画素内での有機材料層の膜厚均一性を確保することは困難である。例えば、溶液１０４を１回滴下しただけでは溶液１０４の量が不足し、図１１に示すように、画素電極１０３全体へ溶液１０４が広がらず、塗布が不十分となることがある。この問題は、対角３２インチ型のハイビジョンテレビのような大画面表示装置に形成される有機ＥＬ素子のように、画素分離用バンク１０２で囲まれる画素電極１０３の寸法が２００μｍ×４００μｍ程度とされる場合、顕著となる傾向にある。そこで、塗布対象となる領域、すなわち画素電極１０３につき溶液の滴下を複数回行うことが考えられるが、この場合、有機材料層に膜厚むらが生じてしまう。その結果、画素内で輝度むらを生じ、表示領域の全域で均一な画像表示を行うことができなくなるおそれがある。また、例えばノズル径を大きくすること等により１回に滴下される溶液の量を増やすことも考えられるが、この場合、滴下される溶液の量のばらつきが大きくなり、有機材料層の膜厚を制御することができなくなるおそれがある。   However, in practice, it is difficult to ensure the film thickness uniformity of the organic material layer in the pixel. For example, if the solution 104 is dropped once, the amount of the solution 104 is insufficient, and as shown in FIG. 11, the solution 104 does not spread over the entire pixel electrode 103, and application may be insufficient. The problem is that the size of the pixel electrode 103 surrounded by the pixel separation bank 102 is about 200 μm × 400 μm, like an organic EL element formed in a large screen display device such as a 32-inch diagonal high-definition television. Tend to be prominent. Therefore, it is conceivable that the solution is dropped a plurality of times on the region to be applied, that is, the pixel electrode 103, but in this case, the organic material layer has uneven thickness. As a result, luminance unevenness occurs in the pixels, and there is a possibility that uniform image display cannot be performed over the entire display area. In addition, it is conceivable to increase the amount of the solution dropped at one time, for example, by increasing the nozzle diameter, etc., but in this case, the variation in the amount of the dropped solution increases, and the film thickness of the organic material layer is increased. There is a risk of being unable to control.

そこで本発明はこのような従来の実情に鑑みて提案されたものであり、１画素内での輝度均一性に優れた有機エレクトロルミネッセンス表示装置及びその製造方法を提供することを目的とする。   Therefore, the present invention has been proposed in view of such a conventional situation, and an object thereof is to provide an organic electroluminescence display device excellent in luminance uniformity within one pixel and a manufacturing method thereof.

前述の目的を達成するために、本発明に係る有機エレクトロルミネッセンス表示装置は、基板上に複数の画素が配置され、各画素が画素電極と少なくとも発光層を含む有機材料層と上部電極との積層体を有する有機エレクトロルミネッセンス表示装置であって、前記画素内で前記画素電極及び前記有機材料層が複数に分割されていることを特徴とする。   In order to achieve the above-described object, an organic electroluminescence display device according to the present invention includes a plurality of pixels arranged on a substrate, and each pixel is formed by stacking a pixel electrode, an organic material layer including at least a light emitting layer, and an upper electrode. An organic electroluminescence display device having a body, wherein the pixel electrode and the organic material layer are divided into a plurality of parts in the pixel.

また、本発明に係る有機エレクトロルミネッセンス表示装置の製造方法は、基板上に複数の画素を配置し、各画素が画素電極と少なくとも発光層を含む有機材料層と上部電極との積層体を有する有機エレクトロルミネッセンス表示装置の製造方法であって、前記画素内で前記画素電極を複数に分割形成した後、形成された分割画素電極の各々に対し有機材料を含む溶液を選択的に塗布し、前記有機材料層を形成することを特徴とする。   The organic electroluminescence display device manufacturing method according to the present invention includes an organic electroluminescent display device in which a plurality of pixels are arranged on a substrate, and each pixel has a laminate of a pixel electrode, an organic material layer including at least a light emitting layer, and an upper electrode. A method of manufacturing an electroluminescence display device, wherein after the pixel electrode is divided into a plurality of parts in the pixel, a solution containing an organic material is selectively applied to each of the formed divided pixel electrodes, and the organic A material layer is formed.

画素内の画素電極を複数の分割画素電極として分割形成し、塗布対象となる領域を細分化することで、比較的少量の溶液で各領域の充分な塗布が可能となり、有機材料層の膜厚制御が容易となる。分割画素電極の各々に形成される有機材料層の膜厚制御が容易となるので、画素内全体で膜厚の均一性に優れた有機材料層が形成される。   By dividing the pixel electrode in the pixel into a plurality of divided pixel electrodes and subdividing the area to be coated, each area can be sufficiently coated with a relatively small amount of solution, and the film thickness of the organic material layer Control becomes easy. Since it becomes easy to control the film thickness of the organic material layer formed on each of the divided pixel electrodes, an organic material layer having excellent film thickness uniformity is formed throughout the pixel.

本発明によれば、各画素内における輝度むらの発生が抑制され、有機エレクトロルミネッセンス表示装置の表示領域の全域にわたって均一な表示を実現することが可能である。   According to the present invention, occurrence of luminance unevenness in each pixel is suppressed, and uniform display can be realized over the entire display area of the organic electroluminescence display device.

以下、本発明を適用した有機エレクトロルミネッセンス表示装置及びその製造方法について、図面を参照しながら詳細に説明する。   Hereinafter, an organic electroluminescence display device to which the present invention is applied and a manufacturing method thereof will be described in detail with reference to the drawings.

先ず、本発明を適用した有機エレクトロルミネッセンス（ＥＬ）表示装置の第１の実施形態について説明する。有機ＥＬ表示装置は、基板上に複数の画素が例えばマトリクス状に配置され、各画素が画素電極と少なくとも発光層を含む有機材料層と上部電極との積層体を有するものである。   First, a first embodiment of an organic electroluminescence (EL) display device to which the present invention is applied will be described. In an organic EL display device, a plurality of pixels are arranged on a substrate, for example, in a matrix, and each pixel has a stacked body of a pixel electrode, an organic material layer including at least a light emitting layer, and an upper electrode.

本実施形態の有機ＥＬ表示装置では、図１に示すように、例えばガラス基板等に薄膜トランジスタや駆動回路等（図示は省略する。）が予め作製された基板１上に下地層２を介して画素分離用バンク４が例えば格子状に形成され、有機ＥＬ表示装置の画素を区画している。画素分離用バンク４で囲まれる領域（画素）の各々には、ＩＴＯ等からなる画素電極（陽極）、発光層を含む有機材料層及び陰極の積層体が形成されている。本実施形態では、各画素内において画素電極は３分割され、３つの分割画素電極３から構成される。また、各分割画素電極３上に少なくとも発光層を含む分割有機材料層５が形成され、さらに分割画素電極３上に、上部電極としてアルミニウム等の金属や合金等からなる陰極６が各画素共通に形成されている。   In the organic EL display device of the present embodiment, as shown in FIG. 1, for example, a pixel is provided on a substrate 1 on which a thin film transistor, a drive circuit, and the like (not shown) are formed in advance on a glass substrate or the like via a base layer 2. The separation banks 4 are formed in a lattice shape, for example, and partitions the pixels of the organic EL display device. In each of the regions (pixels) surrounded by the pixel separation bank 4, a stacked body of a pixel electrode (anode) made of ITO or the like, an organic material layer including a light emitting layer, and a cathode is formed. In the present embodiment, the pixel electrode is divided into three in each pixel, and is composed of three divided pixel electrodes 3. A divided organic material layer 5 including at least a light emitting layer is formed on each divided pixel electrode 3, and a cathode 6 made of a metal such as aluminum or an alloy as an upper electrode is shared on each divided pixel electrode 3. Is formed.

分割画素電極３の間の領域には、下地層２の表面が露出している。露出した下地層２の表面は、分割画素電極３の表面より高い撥液性を有するものである。ここで撥液性とは、分割有機材料層５を形成するための有機材料と有機溶剤とを含む溶液に対する撥液性のことをいう。下地層２は、例えばアクリル系の感光性樹脂等を基板１の略全面に塗布し、露光処理、現像処理等の処理を経て形成される。   In the region between the divided pixel electrodes 3, the surface of the base layer 2 is exposed. The exposed surface of the base layer 2 has higher liquid repellency than the surface of the divided pixel electrode 3. Here, the liquid repellency means liquid repellency with respect to a solution containing an organic material and an organic solvent for forming the divided organic material layer 5. The underlayer 2 is formed, for example, by applying an acrylic photosensitive resin or the like over substantially the entire surface of the substrate 1 and performing processing such as exposure processing and development processing.

分割有機材料層５は少なくとも発光層を含んでいればよく、図１に示すような単層構造でもよいし、多層構造でもよい。分割有機材料層５が多層構造の場合、発光層の他に、正孔注入層、正孔輸送層、電子輸送層、電子注入層等を含むことができる。   The divided organic material layer 5 only needs to include at least a light emitting layer, and may have a single layer structure as shown in FIG. 1 or a multilayer structure. When the divided organic material layer 5 has a multilayer structure, a hole injection layer, a hole transport layer, an electron transport layer, an electron injection layer, and the like can be included in addition to the light emitting layer.

分割有機材料層５は、分割画素電極３の端面を被覆するように形成される。通常、陰極６は各画素共通、すなわち各分割画素電極３に共通に形成されるため、分割画素電極３上に分割有機材料層５を単純に積層しただけでは、分割画素電極３の露出した端面と陰極６とが接触し、短絡を引き起こすおそれがある。そこで、分割画素電極３の端面を分割有機材料層５で被覆することにより、分割画素電極３と陰極６との接触を防止し、短絡を防止することができる。   The divided organic material layer 5 is formed so as to cover the end face of the divided pixel electrode 3. Usually, the cathode 6 is formed in common for each pixel, that is, commonly for each divided pixel electrode 3, so that the exposed end face of the divided pixel electrode 3 can be obtained by simply laminating the divided organic material layer 5 on the divided pixel electrode 3. May come into contact with the cathode 6 to cause a short circuit. Therefore, by covering the end face of the divided pixel electrode 3 with the divided organic material layer 5, contact between the divided pixel electrode 3 and the cathode 6 can be prevented, and a short circuit can be prevented.

なお、分割画素電極３と陰極６との電気的接触を防止する構成としては、分割画素電極間に例えば画素分離用バンク等を別途形成する構成も考えられる。しかしながら、分割画素電極間に画素分離用バンクを形成すると、非発光領域の拡大や分割有機材料層の膜厚平坦性の悪化等の不都合を引き起こすおそれがある。これに対し、分割有機材料層５が分割画素電極３の端面を被覆する構成は、分割有機材料層５が分割画素電極３と陰極６との電気的接触を防止する機能を兼ねるので、画素分離用バンク等を別途形成する構成に比較して、発光に寄与する有効面積を広く確保できる点、及び分割有機材料層５の膜厚平坦化の点で有利である。   In addition, as a configuration for preventing electrical contact between the divided pixel electrode 3 and the cathode 6, a configuration in which, for example, a pixel separation bank or the like is separately formed between the divided pixel electrodes is also conceivable. However, if a pixel separation bank is formed between the divided pixel electrodes, there is a possibility that inconveniences such as enlargement of the non-light emitting region and deterioration of film thickness flatness of the divided organic material layer may occur. On the other hand, the configuration in which the divided organic material layer 5 covers the end face of the divided pixel electrode 3 also functions as the divided organic material layer 5 prevents electrical contact between the divided pixel electrode 3 and the cathode 6. Compared with a configuration in which a bank or the like is separately formed, it is advantageous in that a wide effective area contributing to light emission can be ensured and the thickness of the divided organic material layer 5 can be flattened.

分割画素電極３の端面は、分割画素電極３の端面が基板面に対し垂直に立ち上がっていてもよいが、基板１の主面に対し傾斜したテーパー形状とされることが好ましい。分割画素電極３の端面がテーパー形状とされることで、分割有機材料層５による分割画素電極３の被覆性が良好となり、分割画素電極３と陰極６との短絡防止効果を高めることができる。   The end surface of the divided pixel electrode 3 may have a tapered shape inclined with respect to the main surface of the substrate 1, although the end surface of the divided pixel electrode 3 may rise perpendicular to the substrate surface. Since the end face of the divided pixel electrode 3 is tapered, the coverage of the divided pixel electrode 3 by the divided organic material layer 5 is improved, and the effect of preventing a short circuit between the divided pixel electrode 3 and the cathode 6 can be enhanced.

また、分割画素電極３の端面の被覆性を高める観点では、分割画素電極３を例えば膜厚２０ｎｍ〜５０ｎｍの薄膜に形成することも有効である。分割画素電極３を薄膜とすることで、分割有機材料層５による分割画素電極３の端面の被覆性が良好となり、分割画素電極３と陰極６との短絡防止効果を高めることができる。   From the viewpoint of improving the coverage of the end face of the divided pixel electrode 3, it is also effective to form the divided pixel electrode 3 in a thin film having a thickness of 20 nm to 50 nm, for example. By forming the divided pixel electrode 3 as a thin film, the coverage of the end face of the divided pixel electrode 3 by the divided organic material layer 5 is improved, and the effect of preventing a short circuit between the divided pixel electrode 3 and the cathode 6 can be enhanced.

以下、図１に示す構成の有機ＥＬ表示装置の製造方法について説明する。
先ず、図２（ａ）に示すような構造を得る。下地層２は、基板１上にアクリル系の感光性樹脂（例えばＪＳＲ社製、ＰＣ４０５）等を塗布し、露光処理、現像処理等を行うことにより得ることができる。 Hereinafter, a method for manufacturing the organic EL display device having the configuration shown in FIG. 1 will be described.
First, a structure as shown in FIG. The underlayer 2 can be obtained by applying an acrylic photosensitive resin (for example, PC405 manufactured by JSR Corporation) on the substrate 1 and performing exposure processing, development processing, and the like.

次に、下地層２上に分割画素電極３を形成する。通常、画素電極は、下地層２上に例えばＩＴＯ膜を形成した後、例えばフォトリソグラフィ法でパターニングすることにより形成される。ここで、従来の有機ＥＬ表示装置では画素分離用バンク４で区画される画素内に画素電極を一様に形成するが、本発明の有機ＥＬ表示装置では、各画素内で画素電極を分割し、各画素内に複数の分割画素電極３を形成する。分割画素電極３の間には、下地層２の表面を露出させる。   Next, the divided pixel electrode 3 is formed on the base layer 2. Usually, the pixel electrode is formed by, for example, forming an ITO film on the underlayer 2 and then patterning it by, for example, a photolithography method. Here, in the conventional organic EL display device, the pixel electrodes are uniformly formed in the pixels partitioned by the pixel separation bank 4, but in the organic EL display device of the present invention, the pixel electrodes are divided in each pixel. A plurality of divided pixel electrodes 3 are formed in each pixel. Between the divided pixel electrodes 3, the surface of the base layer 2 is exposed.

分割画素電極３を形成した後、複数の分割画素電極３から構成される画素電極の周縁部を被覆するように、例えば格子状の画素分離用バンク４を形成する。なお、図２（ｂ）では、画素分離用バンク４の開口部（２００μｍ×４００μｍ）内に３つの分割画素電極３（２００μｍ×１１０μｍ）を形成した状態を示している。   After the divided pixel electrode 3 is formed, for example, a grid-like pixel separation bank 4 is formed so as to cover the peripheral edge of the pixel electrode constituted by a plurality of divided pixel electrodes 3. FIG. 2B shows a state in which three divided pixel electrodes 3 (200 μm × 110 μm) are formed in the opening (200 μm × 400 μm) of the pixel separation bank 4.

次に、分割画素電極３の間に露出する下地層２の表面の撥液性を高める。下地層２の表面の撥液性は、例えば画素分離用バンク４を形成した後、ＣＦ４を含むガスを用いてドライエッチングを行うことにより高めることができる。 Next, the liquid repellency of the surface of the foundation layer 2 exposed between the divided pixel electrodes 3 is enhanced. The liquid repellency of the surface of the underlayer 2 can be improved, for example, by performing dry etching using a gas containing CF 4 after the pixel separation bank 4 is formed.

次に、分割画素電極３に対し分割有機材料層５の構成材料と有機溶剤とを含む溶液を選択的に塗布し、有機材料層として分割有機材料層５を形成する。溶液の選択的塗布法としては、印刷法、インクジェット法等が挙げられるが、本実施形態では、図３に示すように、分割画素電極３の各々に対し溶液７をインクジェット法で例えば１滴ずつ滴下することにより、選択的塗布を実現している。このとき、分割画素電極３から溶液７がはみ出すことがあるが、分割画素電極３間に露出した下地層２の表面は高い撥液性を有するので、分割画素電極３からはみ出した溶液７は下地層２によってはじかれて分割画素電極３上及びその周辺部に速やかに移動することとなる。その後、溶液７から溶剤を例えば乾燥により除去することによって、図４に示すように、分割画素電極３の上面及び端面を被覆するように分割有機材料層５が形成される。乾燥は、例えばＮ２雰囲気中、温度１５０℃で１時間処理すればよい。 Next, a solution containing the constituent material of the divided organic material layer 5 and an organic solvent is selectively applied to the divided pixel electrode 3 to form the divided organic material layer 5 as an organic material layer. Examples of the selective application method of the solution include a printing method and an ink jet method. In this embodiment, as shown in FIG. 3, for example, one drop of the solution 7 is applied to each of the divided pixel electrodes 3 by the ink jet method. Selective application is realized by dripping. At this time, the solution 7 may protrude from the divided pixel electrode 3, but the surface of the base layer 2 exposed between the divided pixel electrodes 3 has high liquid repellency. It is repelled by the formation 2 and quickly moves onto and around the divided pixel electrode 3. Thereafter, by removing the solvent from the solution 7 by, for example, drying, the divided organic material layer 5 is formed so as to cover the upper surface and the end surface of the divided pixel electrode 3 as shown in FIG. The drying may be performed, for example, in an N 2 atmosphere at a temperature of 150 ° C. for 1 hour.

次に、例えば表示領域の略全面に金属又は合金等を成膜し、各画素に共通の陰極６を形成することにより、図１に示す構成の有機ＥＬ表示装置が得られる。   Next, for example, a metal, an alloy, or the like is formed on substantially the entire surface of the display region, and the cathode 6 common to each pixel is formed, whereby the organic EL display device having the configuration shown in FIG. 1 is obtained.

以上のような有機ＥＬ表示装置の製造方法によれば、画素電極を分割形成することで、塗布対象となる領域（分割画素電極３）１つあたりの面積を狭くしている。塗布対象となる領域を狭くすることで、比較的少量の溶液で各領域（分割画素電極３）の塗布が充分可能となるので、例えば溶液の１回の滴下量の増加や塗布対象となる領域への複数回の滴下等、膜厚むらを発生させる要因を排除でき、膜厚制御が容易となる。したがって、膜厚均一性に優れた分割有機材料層５を形成することができる。また、画素内の分割有機材料層５間での膜厚のばらつきも抑制される。その結果、画素内での輝度均一性を高めることができ、さらには表示領域の全域にわたって均一な表示を実現することができる。   According to the method for manufacturing an organic EL display device as described above, the area per one region (divided pixel electrode 3) to be coated is reduced by dividing the pixel electrode. By narrowing the region to be applied, each region (divided pixel electrode 3) can be sufficiently applied with a relatively small amount of solution. For example, the amount of the solution dropped once or the region to be applied Factors that cause film thickness unevenness such as multiple drops on the film can be eliminated, and film thickness control becomes easy. Therefore, the divided organic material layer 5 having excellent film thickness uniformity can be formed. In addition, variation in film thickness between the divided organic material layers 5 in the pixel is also suppressed. As a result, the luminance uniformity within the pixel can be improved, and further, uniform display can be realized over the entire display area.

また、各分割画素電極３を撥液性表面を有する下地層２で分割することにより、滴下した溶液７を各分割画素電極３上及びその周辺部へ速やかに分離させ、分割画素電極３を有機材料層５により確実に被覆することができる。   Further, each divided pixel electrode 3 is divided by the base layer 2 having a liquid-repellent surface, so that the dropped solution 7 can be quickly separated on each divided pixel electrode 3 and its peripheral portion, and the divided pixel electrode 3 is made organic. The material layer 5 can be reliably coated.

さらに、各分割画素電極３を撥液性表面を有する下地層２で分割することにより、分割画素電極３間の距離を最小のものとすることができ、各画素内における不要な非発光領域の面積を最小限に抑えることが可能となる。   Further, by dividing each divided pixel electrode 3 with the base layer 2 having a liquid repellent surface, the distance between the divided pixel electrodes 3 can be minimized, and an unnecessary non-light emitting region in each pixel can be reduced. The area can be minimized.

ここで、膜厚むらのない分割有機材料層５を安定して形成する観点から、インクジェット法により１回に滴下する溶液７の液量を１５０ｐｌ以下とすることが好ましく、また、分割画素電極３上に滴下した直後の溶液７の径を２００μｍ以下とすることが好ましいことが実験により確認されている。溶液７の液量が１５０ｐｌを上回ったり、又は滴下直後の溶液７の径が２００μｍを上回るように、溶液７を吐出するためのノズル径を大きくすると、溶液７の液量のばらつきが大となり、分割有機材料層５の膜厚を制御できなくなるおそれがある。   Here, from the viewpoint of stably forming the divided organic material layer 5 with no film thickness unevenness, it is preferable that the amount of the solution 7 dripped at a time by the ink jet method is 150 pl or less, and the divided pixel electrode 3 It has been confirmed by experiments that the diameter of the solution 7 immediately after dropping onto the top is preferably 200 μm or less. When the nozzle diameter for discharging the solution 7 is increased so that the liquid amount of the solution 7 exceeds 150 pl or the diameter of the solution 7 immediately after dropping exceeds 200 μm, the variation in the liquid amount of the solution 7 increases. There is a possibility that the thickness of the divided organic material layer 5 cannot be controlled.

また、分割画素電極３の最長辺を２００μｍ以下とすることで、分割有機材料層５の膜厚均一性をより高めることができる。なお、分割画素電極３の最長辺とは、画素分離用バンク４の開口部内に露出している分割画素電極３のうち最も長い辺のことであり、画素分離用バンク４によって被覆されている箇所を含まない。   Moreover, the film thickness uniformity of the division | segmentation organic material layer 5 can be improved more because the longest side of the division | segmentation pixel electrode 3 shall be 200 micrometers or less. The longest side of the divided pixel electrode 3 is the longest side of the divided pixel electrode 3 exposed in the opening of the pixel separating bank 4 and is covered by the pixel separating bank 4. Not included.

以下、第２の実施形態の有機ＥＬ表示装置及びその製造方法について、図５〜図９を用いて説明する。なお、以下の各図において同じ部材については同じ符号を付し、重複する説明は省略する。   Hereinafter, the organic EL display device of the second embodiment and the manufacturing method thereof will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected about the same member in each following figure, and the overlapping description is abbreviate | omitted.

図５に示すように、第２の実施形態の有機ＥＬ表示装置の画素電極は、第１の実施形態に比べてさらに微細に分割されている。具体的には、後述するように、画素電極が１２の分割画素電極３により構成されている。   As shown in FIG. 5, the pixel electrode of the organic EL display device according to the second embodiment is further finely divided as compared with the first embodiment. Specifically, as will be described later, the pixel electrode is composed of twelve divided pixel electrodes 3.

以下、図５に示す構成の有機ＥＬ表示装置の製造方法について説明する。
先ず、図６（ａ）に示すような構造を得る。第２の実施形態の有機ＥＬ表示装置を得るためには、第１の実施形態と同様に、基板１上に下地層２、分割画素電極３及び画素分離用バンク４を形成する。このとき、画素分離用バンク４の開口部（２００μｍ×４００μｍ）内に、画素電極として、２列×６行からなる１２の分割画素電極３を形成する。各分割画素電極３は、８０μｍ×５０μｍの長方形状を呈している。 Hereinafter, a method for manufacturing the organic EL display device having the configuration shown in FIG. 5 will be described.
First, a structure as shown in FIG. In order to obtain the organic EL display device of the second embodiment, the base layer 2, the divided pixel electrode 3, and the pixel separation bank 4 are formed on the substrate 1 as in the first embodiment. At this time, 12 divided pixel electrodes 3 having 2 columns × 6 rows are formed as pixel electrodes in the opening (200 μm × 400 μm) of the pixel separation bank 4. Each divided pixel electrode 3 has a rectangular shape of 80 μm × 50 μm.

次に、分割画素電極３の間に露出する下地層２の表面の撥液性を高めた後、分割画素電極３に対し分割有機材料層５の構成材料と有機溶剤とを含む溶液７を選択的に塗布し、有機材料層として分割有機材料層５を形成する。   Next, after improving the liquid repellency of the surface of the underlying layer 2 exposed between the divided pixel electrodes 3, a solution 7 containing a constituent material of the divided organic material layer 5 and an organic solvent is selected for the divided pixel electrode 3. The divided organic material layer 5 is formed as an organic material layer.

本実施形態では、分割画素電極群の各々に対して溶液７をインクジェット法で滴下した後、滴下された溶液７を各分割画素電極３に対応して分離させることで、各分割画素電極３に対する溶液７の選択的塗布を実現している。具体的には、先ず、図７に示すように、複数の分割画素電極３からなる分割画素電極群の各々に対し、溶液７をインクジェット法で例えば１滴ずつ滴下する。分割画素電極群を構成する分割画素電極３の数は特に制限されないが、図７においては、隣接する４つの分割画素電極３を１つの分割画素電極群としている。また、図７においては、滴下直後の溶液７が分割画素電極群全体（４つの分割画素電極３）を被覆するように、各分割画素電極群の略中心付近に溶液７を滴下している。   In the present embodiment, after the solution 7 is dropped on each of the divided pixel electrode groups by the ink jet method, the dropped solution 7 is separated corresponding to each divided pixel electrode 3, so that each divided pixel electrode 3 is separated. The selective application of the solution 7 is realized. Specifically, first, as shown in FIG. 7, for example, one drop of the solution 7 is dropped on each of the divided pixel electrode groups including the divided pixel electrodes 3 by an inkjet method. The number of the divided pixel electrodes 3 constituting the divided pixel electrode group is not particularly limited, but in FIG. 7, four adjacent divided pixel electrodes 3 are set as one divided pixel electrode group. In FIG. 7, the solution 7 is dropped in the vicinity of the approximate center of each divided pixel electrode group so that the solution 7 immediately after dropping covers the entire divided pixel electrode group (four divided pixel electrodes 3).

次に、溶液７から溶剤を例えば乾燥によって除去する。溶剤の蒸発に伴って溶液７の体積は徐々に減少するが、このとき、複数の分割画素電極３を被覆していた溶液７は、撥液性を示す下地層２の表面ではじかれることにより、図８に示すように分割画素電極３に対応して例えば略均等に分離し、各分割画素電極３上及びその周辺部に集中するようになる。最終的に、図９に示すように分割画素電極３の上面及び端面に分割有機材料層５が形成される。以上のようにして、分割画素電極３に対する溶液７の選択的塗布が実現される。その後、陰極６を形成する。   Next, the solvent is removed from the solution 7 by, for example, drying. The volume of the solution 7 gradually decreases as the solvent evaporates. At this time, the solution 7 covering the plurality of divided pixel electrodes 3 is repelled on the surface of the base layer 2 exhibiting liquid repellency. As shown in FIG. 8, for example, the divided pixel electrodes 3 are substantially evenly separated and concentrated on each divided pixel electrode 3 and its peripheral portion. Finally, as shown in FIG. 9, the divided organic material layer 5 is formed on the upper surface and the end surface of the divided pixel electrode 3. As described above, selective application of the solution 7 to the divided pixel electrode 3 is realized. Thereafter, the cathode 6 is formed.

以上のように、複数の分割画素電極３からなる分割画素電極群の各々に対し溶液７をインクジェット法で滴下した後、各分割画素電極３に対応して分離させることにより選択的に塗布した場合も、膜厚均一性に優れた分割有機材料層５を形成することができる。このため、画素分離用バンク４の開口部内、すなわち画素内での輝度均一性を高めることができ、表示領域の全体にわたって均一な表示を実現することができる。   As described above, when the solution 7 is dropped on each of the divided pixel electrode groups composed of a plurality of divided pixel electrodes 3 by the ink jet method and then selectively applied by separating the solution 7 corresponding to each divided pixel electrode 3 In addition, the divided organic material layer 5 having excellent film thickness uniformity can be formed. For this reason, the luminance uniformity within the opening of the pixel separation bank 4, that is, within the pixel can be improved, and uniform display can be realized over the entire display region.

本発明を適用した有機ＥＬ表示装置の一例を示す概略断面図である。It is a schematic sectional drawing which shows an example of the organic electroluminescent display apparatus to which this invention is applied. 図１に示す有機ＥＬ表示装置の製造方法を説明するための図であり、図２（ａ）は分割画素電極形成工程を示す概略断面図、図２（ｂ）は分割画素電極形成工程を示す平面図である。FIGS. 2A and 2B are diagrams for explaining a method of manufacturing the organic EL display device shown in FIG. 1, in which FIG. 2A is a schematic cross-sectional view showing a divided pixel electrode forming step, and FIG. 2B is a divided pixel electrode forming step. It is a top view. 図１に示す有機ＥＬ表示装置の製造方法を説明するための図であり、溶液滴下工程を示す概略断面図である。It is a figure for demonstrating the manufacturing method of the organic electroluminescence display shown in FIG. 1, and is a schematic sectional drawing which shows a solution dripping process. 図１に示す有機ＥＬ表示装置の製造方法を説明するための図であり、有機材料層形成工程を示す概略断面図である。It is a figure for demonstrating the manufacturing method of the organic electroluminescence display shown in FIG. 1, and is a schematic sectional drawing which shows an organic material layer formation process. 本発明を適用した有機ＥＬ表示装置の他の例を示す概略断面図である。It is a schematic sectional drawing which shows the other example of the organic electroluminescence display to which this invention is applied. 図５に示す有機ＥＬ表示装置の製造方法を説明するための図であり、図６（ａ）は分割画素電極形成工程を示す概略断面図、図６（ｂ）は分割画素電極形成工程を示す平面図である。6A and 6B are diagrams for explaining a method of manufacturing the organic EL display device shown in FIG. 5, in which FIG. 6A is a schematic cross-sectional view showing a divided pixel electrode forming step, and FIG. 6B is a divided pixel electrode forming step. It is a top view. 図５に示す有機ＥＬ表示装置の製造方法を説明するための図であり、溶液滴下工程を示す概略断面図である。It is a figure for demonstrating the manufacturing method of the organic electroluminescence display shown in FIG. 5, and is a schematic sectional drawing which shows a solution dripping process. 図５に示す有機ＥＬ表示装置の製造方法を説明するための図であり、乾燥工程を示す概略断面図である。It is a figure for demonstrating the manufacturing method of the organic electroluminescence display shown in FIG. 5, and is a schematic sectional drawing which shows a drying process. 図５に示す有機ＥＬ表示装置の製造方法を説明するための図であり、有機材料層形成工程を示す概略断面図である。It is a figure for demonstrating the manufacturing method of the organic electroluminescence display shown in FIG. 5, and is a schematic sectional drawing which shows an organic material layer formation process. 従来の有機ＥＬ表示装置の製造方法を説明するための図であり、図１０（ａ）は概略断面図、図１０（ｂ）は平面図である。It is a figure for demonstrating the manufacturing method of the conventional organic EL display apparatus, Fig.10 (a) is a schematic sectional drawing, FIG.10 (b) is a top view. 従来の有機ＥＬ表示装置の製造方法を説明するための平面図である。It is a top view for demonstrating the manufacturing method of the conventional organic EL display apparatus.

符号の説明Explanation of symbols

１ 基板、２ 下地層、３ 分割画素電極、４ 画素分離用バンク、５ 分割有機材料層、６ 陰極、７ 溶液   1 substrate, 2 ground layer, 3 divided pixel electrode, 4 pixel separation bank, 5 divided organic material layer, 6 cathode, 7 solution

Claims (12)

基板上に複数の画素が配置され、各画素が画素電極と少なくとも発光層を含む有機材料層と上部電極との積層体を有する有機エレクトロルミネッセンス表示装置であって、
前記画素内で前記画素電極及び前記有機材料層が複数に分割されていることを特徴とする有機エレクトロルミネッセンス表示装置。 A plurality of pixels are arranged on a substrate, and each pixel is an organic electroluminescence display device having a laminate of a pixel electrode, an organic material layer including at least a light emitting layer, and an upper electrode,
The organic electroluminescence display device, wherein the pixel electrode and the organic material layer are divided into a plurality of parts in the pixel. 前記画素電極を分割した分割画素電極下に撥液性表面を有する下地層が形成されていることを特徴とする請求項１記載の有機エレクトロルミネッセンス表示装置。   2. The organic electroluminescence display device according to claim 1, wherein a base layer having a liquid repellent surface is formed under the divided pixel electrode obtained by dividing the pixel electrode. 前記画素電極を分割した分割画素電極の最長辺が２００μｍ以下であることを特徴とする請求項１又は２記載の有機エレクトロルミネッセンス表示装置。   3. The organic electroluminescence display device according to claim 1, wherein the longest side of the divided pixel electrode obtained by dividing the pixel electrode is 200 μm or less. 前記画素電極を分割した分割画素電極の端面が前記有機材料層によって被覆されていることを特徴とする請求項１〜３のいずれか１項記載の有機エレクトロルミネッセンス表示装置。   The organic electroluminescence display device according to claim 1, wherein an end face of the divided pixel electrode obtained by dividing the pixel electrode is covered with the organic material layer. 基板上に複数の画素を配置し、各画素が画素電極と少なくとも発光層を含む有機材料層と上部電極との積層体を有する有機エレクトロルミネッセンス表示装置の製造方法であって、
前記画素内で前記画素電極を複数に分割形成した後、形成された分割画素電極の各々に対し有機材料を含む溶液を選択的に塗布し、前記有機材料層を形成することを特徴とする有機エレクトロルミネッセンス表示装置の製造方法。 A method for manufacturing an organic electroluminescence display device, wherein a plurality of pixels are arranged on a substrate, and each pixel has a laminate of a pixel electrode, an organic material layer including at least a light emitting layer, and an upper electrode,
The pixel electrode is divided into a plurality of parts in the pixel, and a solution containing an organic material is selectively applied to each of the formed divided pixel electrodes to form the organic material layer. A method for manufacturing an electroluminescence display device. 前記分割画素電極下に撥液性表面を有する下地層を形成することを特徴とする請求項５記載の有機エレクトロルミネッセンス表示装置の製造方法。   6. The method of manufacturing an organic electroluminescence display device according to claim 5, wherein a base layer having a liquid repellent surface is formed under the divided pixel electrode. 前記溶液を選択的に塗布する前に、前記分割画素電極間に露出する前記下地層表面の撥液性を高めておくことを特徴とする請求項６記載の有機エレクトロルミネッセンス表示装置の製造方法。   7. The method of manufacturing an organic electroluminescence display device according to claim 6, wherein the liquid repellency of the surface of the base layer exposed between the divided pixel electrodes is increased before the solution is selectively applied. 前記分割画素電極の最長辺を２００μｍ以下とすることを特徴とする請求項５〜７のいずれか１項記載の有機エレクトロルミネッセンス表示装置の製造方法。   8. The method of manufacturing an organic electroluminescence display device according to claim 5, wherein the longest side of the divided pixel electrode is 200 [mu] m or less. 前記分割画素電極の各々に対し前記溶液をインクジェット法で滴下することにより、前記溶液を選択的に塗布することを特徴とする請求項５〜８のいずれか１項記載の有機エレクトロルミネッセンス表示装置の製造方法。   9. The organic electroluminescence display device according to claim 5, wherein the solution is selectively applied to each of the divided pixel electrodes by dropping the solution by an inkjet method. Production method. 複数の前記分割画素電極からなる分割画素電極群の各々に対し前記溶液をインクジェット法で滴下した後、滴下された前記溶液を各分割画素電極に対応して分離させることにより、前記溶液を選択的に塗布することを特徴とする請求項５〜８のいずれか１項記載の有機エレクトロルミネッセンス表示装置の製造方法。   The solution is selectively dropped by dropping the solution onto each of the divided pixel electrode groups composed of the plurality of divided pixel electrodes by an inkjet method, and then separating the dropped solution corresponding to each divided pixel electrode. The method for producing an organic electroluminescence display device according to claim 5, wherein the organic electroluminescence display device is applied to the organic electroluminescence display device. 滴下直後の前記溶液の径を２００μｍ以下とすることを特徴とする請求項９又は１０記載の有機エレクトロルミネッセンス表示装置の製造方法。   The method of manufacturing an organic electroluminescence display device according to claim 9 or 10, wherein a diameter of the solution immediately after dropping is set to 200 µm or less. １回に滴下する前記溶液の液量を１５０ｐｌ以下とすることを特徴とする請求項９〜１１のいずれか１項記載の有機エレクトロルミネッセンス表示装置の製造方法。   The method for producing an organic electroluminescence display device according to any one of claims 9 to 11, wherein the amount of the solution dripped at one time is set to 150 pl or less.
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Cited By (4)

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Publication number Priority date Publication date Assignee Title
KR101731274B1 (en) 2009-11-27 2017-04-28 코닌클리케 필립스 엔.브이. Organic electroluminescent devices
US10269874B2 (en) 2013-01-17 2019-04-23 Kateeva, Inc. High resolution organic light-emitting diode devices, displays, and related methods
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Cited By (9)

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Publication number Priority date Publication date Assignee Title
KR101731274B1 (en) 2009-11-27 2017-04-28 코닌클리케 필립스 엔.브이. Organic electroluminescent devices
US10269874B2 (en) 2013-01-17 2019-04-23 Kateeva, Inc. High resolution organic light-emitting diode devices, displays, and related methods
TWI661549B (en) * 2013-01-17 2019-06-01 美商凱特伊夫公司 Organic light-emissive displays
CN110120469A (en) * 2013-01-17 2019-08-13 科迪华公司 High-resolution organic light emitting diode device
US10522601B2 (en) 2013-01-17 2019-12-31 Kateeva, Inc. High resolution organic light-emitting diode devices, displays, and related method
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