JP2007013661A - Stage apparatus, and camera-shake correcting apparatus utilizing the same - Google Patents

Stage apparatus, and camera-shake correcting apparatus utilizing the same Download PDF

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JP2007013661A
JP2007013661A JP2005192552A JP2005192552A JP2007013661A JP 2007013661 A JP2007013661 A JP 2007013661A JP 2005192552 A JP2005192552 A JP 2005192552A JP 2005192552 A JP2005192552 A JP 2005192552A JP 2007013661 A JP2007013661 A JP 2007013661A
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yoke
stage
weight
rotating body
support substrate
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Shuzo Seo
修三 瀬尾
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Pentax Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To suppress a power consumption when a driving force having occurred in a driving coil is transmitted to a stage member by using a principle of a lever, and to shift the stage member smoothly without making a size of a driving device large. <P>SOLUTION: An X direction driving coil CX which generates a diving force shifting an X yoke YXA in an X direction upon reception of a magnetic force of an X magnetic circuit is fixed to a fixed support board. An intermediate portion is supported on the fixed support board so as to be able to rotate around an X pivot axis 121. A link member 119 whose one end is connected to the X yoke so as to be able to rotate around a rotation axis 126, and whose other end is connected to a stage member 101 so as to be freely rotate is provided. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、特定の部材を互いに直交する２方向に直線移動させるステージ装置、及びこのステージ装置を利用したカメラの手振れ補正装置に関する。   The present invention relates to a stage apparatus that linearly moves a specific member in two directions orthogonal to each other, and a camera shake correction apparatus for a camera using the stage apparatus.

固定支持基板に対してステージ部材を一平面内において互いに直交するＸ方向とＹ方向に直線移動させるステージ装置は従来より知られている（例えば特許文献１）。
この種のステージ装置は一般的に、固定支持基板にＸ方向駆動用ヨーク（磁石を有する）とＹ方向駆動用ヨーク（磁石を有する）を固定し、ステージ部材にＸ方向駆動用コイルとＹ方向駆動用コイルを固定し、Ｘ方向駆動用コイルとＹ方向駆動用コイルを、Ｘ方向駆動用ヨークとＹ方向駆動用ヨークの内部にそれぞれ位置させている。そして、Ｘ方向駆動用コイルとＹ方向駆動用コイルに電流を流すと、Ｘ方向駆動用ヨーク（及び磁石）とＹ方向駆動用ヨーク（及び磁石）で発生した磁力により、Ｘ方向駆動用コイルとＹ方向駆動用コイルが、それぞれＸ方向とＹ方向の駆動力を生じる。そして、このＸ方向とＹ方向の駆動力によって、ステージ部材が固定支持基板に対してＸ方向とＹ方向に相対移動する。 2. Description of the Related Art A stage device that linearly moves a stage member with respect to a fixed support substrate in an X direction and a Y direction that are orthogonal to each other in one plane has been conventionally known (for example, Patent Document 1).
In general, this type of stage apparatus fixes an X-direction drive yoke (having a magnet) and a Y-direction drive yoke (having a magnet) to a fixed support substrate, and an X-direction drive coil and a Y-direction to a stage member. The driving coil is fixed, and the X direction driving coil and the Y direction driving coil are positioned inside the X direction driving yoke and the Y direction driving yoke, respectively. When a current is passed through the X-direction drive coil and the Y-direction drive coil, the X-direction drive coil and the Y-direction drive yoke (and magnet) are caused by the magnetic force generated in the X-direction drive yoke (and magnet) and the Y-direction drive coil. Y direction driving coils generate driving forces in the X direction and the Y direction, respectively. The stage member moves relative to the fixed support substrate in the X and Y directions by the driving force in the X and Y directions.

ところで本出願人は、新規なステージ装置として、Ｘ方向駆動用コイルとＹ方向駆動用コイルをそれぞれＸ用コイル形成板とＹ用コイル形成板に形成し、Ｘ用コイル形成板とステージ部材との間に、Ｘ用コイル形成板の移動量を拡大または縮小してステージ部材に伝達するＸ方向移動量調整伝達手段を設け、さらに、Ｙ用コイル形成板とステージ部材との間に、Ｙ用コイル形成板の移動量を拡大または縮小してステージ部材に伝達するＹ方向移動量調整伝達手段を設けた発明を完成した（特願２００５−１７９６２６号）。   By the way, as a new stage device, the present applicant forms an X direction driving coil and a Y direction driving coil on an X coil forming plate and a Y coil forming plate, respectively. There is provided an X direction movement amount adjustment transmission means for enlarging or reducing the movement amount of the X coil forming plate between the Y coil forming plate and the stage member. An invention has been completed in which Y-direction movement amount adjustment and transmission means for transmitting to the stage member by enlarging or reducing the movement amount of the forming plate is provided (Japanese Patent Application No. 2005-179626).

Ｘ方向移動量調整伝達手段は、中間部が固定支持基板に、Ｘ方向及びＹ方向に対して直交するＺ方向のＸ用枢着軸回りに回転可能として支持され、かつ、一端が上記Ｘ方向移動部材に、Ｚ方向の回転軸回りに回転可能として接続され、さらに、他端がステージ部材にＹ方向に相対移動自在、かつＺ方向の回転軸回りに回転自在として接続されたＹ方向リンク部材を備えている。
一方、Ｙ方向移動量調整伝達手段は、中間部が固定支持基板に、Ｘ方向及びＹ方向に対して直交するＺ方向のＹ用枢着軸回りに回転可能として支持され、かつ、一端がＹ方向移動部材にＺ方向の回転軸回りに回転可能として接続され、さらに、他端がステージ部材にＸ方向に相対移動自在、かつＺ方向の回転軸回りに回転自在として接続されたＸ方向リンク部材を備えている。 The X-direction movement amount adjusting and transmitting means is supported on the fixed support substrate so as to be rotatable around the X-axis pivot shaft in the Z direction orthogonal to the X direction and the Y direction, and one end is in the X direction. A Y-direction link member connected to the moving member so as to be rotatable about the rotation axis in the Z direction, and further connected to the stage member so as to be relatively movable in the Y direction and rotatable about the rotation axis in the Z direction. It has.
On the other hand, the Y-direction movement amount adjusting and transmitting means is supported on the fixed support substrate so as to be rotatable about the Y pivoting axis in the Z direction orthogonal to the X direction and the Y direction, and one end is Y An X-direction link member connected to the direction moving member so as to be rotatable about the rotation axis in the Z direction, and further connected to the stage member so as to be relatively movable in the X direction and rotatable about the rotation axis in the Z direction. It has.

このステージ装置では、Ｘ方向駆動用コイルに電流が流れると、Ｙ方向リンク部材がＸ用枢着軸回りに回転し、ステージ部材がＸ方向に移動する。さらに、Ｙ方向駆動用コイルに電流が流れると、Ｘ方向リンク部材がＹ用枢着軸回りに回転し、ステージ部材がＹ方向に移動する。
特開平１０−２６８３７３号公報 In this stage apparatus, when a current flows through the X-direction drive coil, the Y-direction link member rotates around the X pivot shaft and the stage member moves in the X direction. Further, when a current flows through the Y-direction drive coil, the X-direction link member rotates around the Y pivot shaft, and the stage member moves in the Y direction.
JP 10-268373 A

このように上記ステージ装置では、Ｙ方向リンク部材及びＸ方向リンク部材が「てこ」として機能することにより、ステージ部材をＸ方向及びＹ方向に移動させている。
ところが、一般的に駆動用コイル及びコイル形成板の合計質量は、ステージ部材の質量より小さいため、Ｙ方向リンク部材及びＸ方向リンク部材を「てこ」として利用する上記ステージ装置では、駆動用コイルに大きな駆動力を発生させないと、ステージ部材がスムーズに移動しなくなる。 Thus, in the stage apparatus, the Y-direction link member and the X-direction link member function as “lever”, thereby moving the stage member in the X direction and the Y direction.
However, since the total mass of the drive coil and the coil forming plate is generally smaller than the mass of the stage member, in the stage apparatus that uses the Y-direction link member and the X-direction link member as a lever, Unless a large driving force is generated, the stage member will not move smoothly.

駆動用コイルに大きな駆動力を発生させるためには、駆動用コイルに大きな電流を流すか、駆動コイル及びヨーク（及び磁石）を大型化させる必要がある。
しかし、駆動用コイルに大きな電流を流せば消費電力が増大してしまう。
一方、駆動コイル及びヨーク（及び磁石）を大型化すると、ステージ装置全体が大型化してしまう。さらに、ステージ装置をカメラの手振れ補正装置として利用する場合には、カメラボディが大型化してしまう。 In order to generate a large driving force in the driving coil, it is necessary to apply a large current to the driving coil or to enlarge the driving coil and the yoke (and magnet).
However, if a large current is passed through the driving coil, the power consumption increases.
On the other hand, when the drive coil and the yoke (and magnet) are increased in size, the entire stage device is increased in size. Furthermore, when the stage device is used as a camera shake correction device, the camera body becomes large.

本発明の目的は、駆動用コイルで発生した駆動力を「てこ」の原理を利用してステージ部材に伝達する場合に、消費電力を抑え、かつ、駆動装置を大型化させることなく、ステージ部材を円滑に移動させることが可能なステージ装置及びこのステージ装置を利用したカメラの手振れ補正装置を提供することにある。   The object of the present invention is to reduce the power consumption when the driving force generated by the driving coil is transmitted to the stage member by utilizing the principle of “lever”, and without increasing the size of the driving device, the stage member It is an object of the present invention to provide a stage device capable of smoothly moving the camera and a camera shake correction device for a camera using the stage device.

本発明のステージ装置は、固定支持基板と、該固定支持基板上に、特定のＸ方向及びＸ方向に直交するＹ方向に直線移動自在として支持されたステージ部材と、磁性体からなり上記固定支持基板に対してＸ方向にのみ移動可能なＸ用ヨークと、該Ｘ用ヨークと一体をなし、該Ｘ用ヨークとの間にＸ用磁気回路を形成するＸ用磁石と、上記固定支持基板に固定され、上記Ｘ用磁気回路の磁力を受けたとき上記Ｘ用ヨークをＸ方向に移動させる駆動力を発生するＸ方向駆動用コイルと、上記固定支持基板上に、Ｘ方向及びＹ方向に対して直交するＺ方向のＸ用枢着軸回りに回転可能に支持されたリンク部材と、を備え、上記リンク部材の一端部が上記Ｘ用ヨークにＺ方向の回転軸回りに回転可能として接続され、他端部が上記ステージ部材にＺ方向の回転軸回りに回転自在として接続されていることを特徴としている。   The stage apparatus of the present invention comprises a fixed support substrate, a stage member supported on the fixed support substrate so as to be linearly movable in a specific X direction and a Y direction perpendicular to the X direction, and a magnetic material. An X yoke that is movable only in the X direction with respect to the substrate; an X magnet that forms an X magnetic circuit between the X yoke and the X yoke; and the fixed support substrate. An X-direction driving coil that generates a driving force that moves the X-yoke in the X-direction when it is fixed and receives the magnetic force of the X-magnetic circuit, and the X-direction and Y-direction on the fixed support substrate. A link member rotatably supported about the X-axis pivoting axis in the Z direction orthogonal to each other, and one end of the link member is connected to the X yoke so as to be rotatable about the Z-axis rotation axis. , The other end is Z direction on the stage member It is characterized in that the connected as rotatable around the rotation axis.

上記リンク部材の他端部が、上記ステージ部材にＹ方向に相対移動自在として接続するのが好ましい。   The other end of the link member is preferably connected to the stage member so as to be relatively movable in the Y direction.

上記Ｘ用枢着軸より上記Ｘ用ヨーク側に位置しかつＸ用枢着軸を中心に回転するＸ用ヨーク側回転体の自重によるＸ用枢着軸回りの回転モーメントと、Ｘ用枢着軸よりステージ部材側に位置しかつＸ用枢着軸を中心に回転するステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントの一方が他方の６０％〜１００％となるように、上記Ｘ用ヨークとＸ用磁石の質量を設定すれば、両者に大きな差がある場合に比べて実質的な効果が得られる。   Rotational moment about the X pivoting axis due to the weight of the X yoke side rotating body that is located on the X yoke pivot side and rotates around the X pivot pivot axis from the X pivot pivot axis, and the X pivot pivot One of the rotational moments around the pivoting shaft for X due to the weight of the stage member-side rotating body that is positioned on the stage member side from the shaft and rotates about the pivoting shaft for X is 60% to 100% of the other. If the masses of the X yoke and the X magnet are set, a substantial effect can be obtained as compared with the case where there is a large difference between the two.

さらに、上記Ｘ用ヨーク側回転体の自重によるＸ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントとが一致するように、上記Ｘ用ヨークとＸ用磁石の質量を設定するのが好ましい。
本明細書でいう一致、即ち「１００％」とは正確に１００％の場合のみを意味するのではなく、１００％を僅かに超えた値または１００％を僅かに下回る値までも含む概念である。即ち、「１００％」の技術的意義は、駆動装置の可動部分側の回転モーメントとステージ部材側の回転モーメントをほぼ一致させることにより、駆動装置に要求される駆動力を最小限に止める点にあるので、このような作用効果を奏することが可能な場合は１００％から僅かにずれていても、特許請求の範囲に記載した「１００％」の概念に含まれる。 Further, the rotational moment around the X pivoting axis due to the weight of the X yoke side rotating body and the rotational moment around the X pivoting axis due to the weight of the stage member side rotating body coincide with each other. It is preferable to set the mass of the yoke for X and the magnet for X.
As used herein, the term “100%” does not mean exactly 100% but includes a value slightly exceeding 100% or slightly less than 100%. . That is, the technical significance of “100%” is that the driving force required for the driving device is minimized by making the rotational moment on the movable part side of the driving device substantially coincide with the rotational moment on the stage member side. Therefore, when it is possible to achieve such an effect, even if it is slightly deviated from 100%, it is included in the concept of “100%” described in the claims.

さらに、磁性体からなり上記固定支持基板に対してＹ方向にのみ移動可能なＹ用ヨークと、該Ｙ用ヨークと一体をなし、該Ｙ用ヨークとの間にＹ用磁気回路を形成するＹ用磁石と、上記固定支持基板に固定され、上記Ｙ用磁気回路の磁力を受けると、上記Ｙ用ヨークをＹ方向に移動させる駆動力を発生するＹ方向駆動用コイルと、上記固定支持基板上に、上記Ｚ方向のＹ用枢着軸回りに回転可能として支持されたＸ方向リンク部材と、を備え、このＸ方向リンク部材の一端が上記Ｙ用ヨークにＺ方向の回転軸回りに回転可能として接続され、他端がステージ部材にＸ方向に相対移動自在かつＺ方向の回転軸回りに回転自在とするのが好ましい。   Further, a Y yoke made of a magnetic material and movable only in the Y direction with respect to the fixed support substrate, and a Y magnetic circuit formed integrally with the Y yoke, are formed between the Y yoke and Y yoke. A Y-direction driving coil that generates a driving force that moves the Y-yoke in the Y-direction upon receiving the magnetic force of the Y-magnetic circuit, and the magnet for fixing to the fixed-supporting substrate; And an X-direction link member supported so as to be rotatable around the Y-axis pivot shaft in the Z direction, and one end of the X-direction link member can be rotated around the Z-direction rotation axis in the Y yoke. It is preferable that the other end be relatively movable in the X direction and rotatable about the rotation axis in the Z direction.

この場合に、上記Ｙ用枢着軸より上記Ｙ用ヨーク側に位置しかつＹ用枢着軸を中心に回転するＹ用ヨーク側回転体の自重によるＹ用枢着軸回りの回転モーメントと、Ｙ用枢着軸よりステージ部材側に位置しかつＹ用枢着軸を中心に回転するステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントの一方が他方の６０％〜１００％となるように、上記Ｙ用ヨークとＹ用磁石の質量を設定すれば、実質的な効果が得られる。   In this case, a rotational moment around the Y pivoting shaft due to the weight of the Y yoke rotating body positioned on the Y yoke side from the Y pivoting shaft and rotating around the Y pivoting shaft; One of the rotational moments around the Y pivoting shaft due to the weight of the stage member side rotating body that is positioned on the stage member side from the Y pivoting shaft and rotates around the Y pivoting shaft is 60% to 100% of the other. Thus, if the masses of the Y yoke and the Y magnet are set, a substantial effect can be obtained.

上記Ｙ用ヨーク側回転体の自重によるＹ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントとが一致するように、上記Ｙ用ヨークとＹ用磁石の質量を設定すれば、より大きな効果が得られる。   The Y yoke so that the rotational moment around the Y pivoting axis due to the weight of the Y yoke rotating body coincides with the rotational moment around the Y pivoting axis due to the weight of the stage member side rotating body. If the mass of the magnet for Y is set, a greater effect can be obtained.

別の態様によれば本発明は、固定支持基板と、該固定支持基板上に、特定のＸ方向及びＸ方向に直交するＹ方向に直線移動自在として支持されたステージ部材と、上記固定支持基板に対してＸ方向にのみ移動可能なＸ方向移動部材と、上記固定支持基板上に、Ｘ方向及びＹ方向に対して直交するＺ方向のＸ側枢着軸回りに回転可能として支持されたリンク部材と、上記固定支持基板と上記Ｘ方向移動部材の一方に固定された、磁性体からなるＸ用ヨークと、該該Ｘ用ヨークと一体をなし、該Ｘ用ヨークとの間にＸ用磁気回路を形成するＸ用磁石と、上記固定支持基板と上記Ｘ方向移動部材の他方に固定された、上記Ｘ用磁気回路の磁力を受けると、上記Ｘ方向移動部材をＸ方向に移動させる駆動力を発生するＸ方向駆動用コイルと、を備え、上記リンク部材の一端が上記Ｘ方向移動部材にＺ方向の回転軸回りに回転可能として接続され、他端がステージ部材にＺ方向の回転軸回りに回転自在として接続され、上記Ｘ用枢着軸より上記Ｘ方向移動部材側に位置し、かつ、Ｘ用枢着軸を中心に回転するＸ方向移動部材側回転体の自重によるＸ用枢着軸回りの回転モーメントと、Ｘ用枢着軸よりステージ部材側に位置し、かつ、Ｘ用枢着軸を中心に回転するステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントとの差が小さくなるように、Ｘ方向移動部材側回転体と上記ステージ部材側回転体の一方にＸ用錘を固定したことを特徴としている。   According to another aspect, the present invention provides a fixed support substrate, a stage member supported on the fixed support substrate so as to be linearly movable in a specific X direction and a Y direction orthogonal to the X direction, and the fixed support substrate. An X-direction moving member that can move only in the X-direction, and a link that is supported on the fixed support substrate so as to be rotatable about the X-side pivot shaft in the Z-direction orthogonal to the X-direction and the Y-direction. A member, an X yoke made of a magnetic material fixed to one of the fixed support substrate and the X-direction moving member, and the X yoke, and the X yoke between the X yoke and the X yoke. A driving force that moves the X-direction moving member in the X direction when receiving the magnetic force of the X magnetic circuit that is fixed to the other of the X magnet forming the circuit, the fixed support substrate, and the X-direction moving member. An X-direction drive coil for generating One end of the link member is connected to the X-direction moving member so as to be rotatable about the Z-direction rotation axis, and the other end is connected to the stage member so as to be rotatable about the Z-direction rotation axis. From the rotational moment around the pivoting shaft for X due to the own weight of the rotating body on the X-direction moving member which is located on the X-direction moving member side and rotates around the pivoting shaft for X, and the pivoting shaft for X The X-direction moving member side is positioned so that the difference from the rotational moment around the X pivoting axis due to the weight of the stage member side rotating body that is located on the stage member side and rotates around the X pivoting axis is reduced. An X weight is fixed to one of the rotating body and the stage member side rotating body.

上記リンク部材の他端部を、上記ステージ部材にＹ方向に相対移動自在として接続するのが好ましい。   The other end of the link member is preferably connected to the stage member so as to be relatively movable in the Y direction.

この態様でも、上記Ｘ方向移動部材側回転体の自重によるＸ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントの一方が他方の６０％〜１００％となるように、上記Ｘ用錘の質量を設定するのが好ましく、さらに両者を一致させるのがなお好ましい。   Also in this aspect, one of the rotational moment around the X pivoting axis due to the weight of the X-direction moving member side rotating body and the rotational moment around the X pivoting axis due to the weight of the stage member side rotating body is the other 60. It is preferable to set the mass of the X weight so as to be in the range of 100% to 100%, and it is more preferable to match the two.

さらに、上記固定支持基板に対してＹ方向にのみ移動可能なＹ方向移動部材と、上記固定支持基板と上記Ｙ方向移動部材の一方に固定された、磁性体からなるＹ用ヨークと、該Ｙ用ヨークと一体をなし、該Ｙ用ヨークとの間にＹ用磁気回路を形成するＹ用磁石と、上記固定支持基板と上記Ｙ方向移動部材の他方に固定された、上記Ｙ用磁気回路の磁力を受けると、上記Ｙ方向移動部材をＹ方向に移動させる駆動力を発生するＹ方向駆動用コイルと、上記固定支持基板上に、上記Ｚ方向のＹ側枢着軸回りに回転可能として支持されたＸ方向リンク部材と、を備え、このＸ方向リンク部材の一端が上記Ｙ方向移動部材にＺ方向の回転軸回りに回転可能として接続され、他端がステージ部材に、Ｘ方向に相対移動自在かつＺ方向の回転軸回りに回転自在として接続され、上記Ｙ用枢着軸より上記Ｙ方向移動部材側に位置しかつＹ用枢着軸を中心に回転するＹ方向移動部材側回転体の自重によるＹ用枢着軸回りの回転モーメントと、Ｙ用枢着軸よりステージ部材側に位置しかつＹ用枢着軸を中心に回転するステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントとの差が小さくなるように、上記Ｙ方向移動部材側回転体とステージ部材側回転体の一方にＹ用錘を固定するが好ましい。   A Y-direction moving member that can move only in the Y direction relative to the fixed support substrate; a Y yoke made of a magnetic material fixed to one of the fixed support substrate and the Y-direction movement member; A Y magnet that forms a Y magnetic circuit with the Y yoke, and the Y magnetic circuit fixed to the other of the fixed support substrate and the Y-direction moving member. When receiving a magnetic force, a Y-direction driving coil that generates a driving force for moving the Y-direction moving member in the Y direction, and a support on the fixed support substrate so as to be rotatable around the Y-side pivot shaft in the Z direction. An X-direction link member, and one end of the X-direction link member is connected to the Y-direction moving member so as to be rotatable about a rotation axis in the Z direction, and the other end is relatively moved to the stage member in the X direction. Free and rotate around the rotation axis in the Z direction Rotation around the Y pivot axis by the weight of the Y direction movable member side rotating body that is connected to the Y pivot shaft and is located on the Y direction movable member side and rotates around the Y pivot shaft. The difference between the moment and the rotational moment around the Y pivoting axis due to the weight of the stage member side rotating body that is positioned on the stage member side from the Y pivoting axis and rotates around the Y pivoting axis is reduced. Further, it is preferable that a Y weight is fixed to one of the Y-direction moving member side rotating body and the stage member side rotating body.

さらに上記Ｙ用錘の質量を、上記Ｙ方向移動部材側回転体の自重によるＹ用枢着軸回りの回転モーメントが、上記ステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントの６０％〜１００％となるように設定するのが好ましい。さらに両者を一致させれば、なお好ましい。   Further, the mass of the Y weight is determined so that the rotational moment around the Y pivoting axis due to the weight of the Y-direction moving member-side rotating body is equal to the rotational moment around the Y pivoting axis due to the weight of the stage member-side rotating body. It is preferable to set it to be 60% to 100%. Furthermore, it is still more preferable if both are matched.

上記ステージ装置を利用した手振れ補正装置を実現可能である。
具体的には、上記ステージ装置を内蔵するカメラと、上記ステージ部材と一体となって移動する、前面に結像面を有する撮像素子と、上記カメラの振動を検出する振動検出センサと、該振動検出センサが検出した振動情報に基づいて、上記Ｘ方向駆動用コイル及び上記Ｙ方向駆動用コイルに、手振れを補正するように電流を流す制御手段と、を備えることにより実現できる。 A camera shake correction device using the stage device can be realized.
Specifically, a camera incorporating the stage device, an image sensor having an imaging surface on the front surface that moves integrally with the stage member, a vibration detection sensor that detects vibration of the camera, and the vibration Based on the vibration information detected by the detection sensor, the X direction driving coil and the Y direction driving coil can be realized by including a control unit that supplies current so as to correct camera shake.

また、上記ステージ装置を内蔵するカメラと、上記ステージ部材と一体となって移動する、手振れを補正するための補正レンズと、上記カメラの振動を検出する振動検出センサと、該振動検出センサが検出した振動情報に基づいて、上記Ｘ方向駆動用コイル及び上記Ｙ方向駆動用コイルに、手振れを補正するように電流を流す制御手段と、を備えることによっても実現できる。   In addition, a camera incorporating the stage device, a correction lens for correcting camera shake that moves integrally with the stage member, a vibration detection sensor that detects vibration of the camera, and the vibration detection sensor detect This can also be realized by providing the X-direction driving coil and the Y-direction driving coil with a control means for supplying a current so as to correct camera shake based on the vibration information.

駆動用コイルで発生した駆動力をてこの原理を利用してステージ部材に伝達する場合に、一般的に駆動用コイルより質量が大きいヨーク及び磁石を、特定の枢着軸を挟んでステージ部材と相対する回転体の一部とすることにより、この枢着軸回りの該回転体の回転モーメントを、ステージ部材側の回転モーメントに近づけることが可能である。その結果、消費電力を抑え、かつ、駆動装置を大型化させることなく、ステージ部材を円滑に移動させることが可能になる。
同様に、駆動用コイルを特定の枢着軸を挟んでステージ部材と相対する回転体の一部とする場合に、駆動用コイル側に錘を固着して、この枢着軸回りの該回転体の回転モーメントを、ステージ部材側の回転モーメントに近づけることによっても、消費電力を抑え、かつ、駆動装置を大型化させることなく、ステージ部材を円滑に移動させることが可能になる。 When the driving force generated by the driving coil is transmitted to the stage member using this principle, generally the yoke and magnet having a mass larger than that of the driving coil are connected to the stage member with a specific pivot shaft interposed therebetween. By using a part of the opposing rotating body, it is possible to make the rotational moment of the rotating body around the pivot shaft closer to the rotational moment on the stage member side. As a result, it is possible to smoothly move the stage member without reducing power consumption and without increasing the size of the driving device.
Similarly, when the driving coil is a part of a rotating body facing the stage member with a specific pivot shaft interposed therebetween, a weight is fixed to the driving coil side, and the rotating body around the pivot shaft is fixed. By making the rotational moment close to the rotational moment on the stage member side, the stage member can be moved smoothly without reducing power consumption and increasing the size of the drive device.

以下、図１〜図１２に基づいて、本発明の第１の実施形態について説明する。以下の各実施形態中における「Ｘ方向」とは、デジタルカメラ１０の左右方向であり、「Ｙ方向」とはデジタルカメラ１０の上下方向であり、「Ｚ方向」とは光軸Ｏと平行な方向（Ｘ方向及びＹ方向に直交する方向）である。
図１に示すように、デジタルカメラ（カメラ）１０内には、複数のレンズＬ１、Ｌ２、Ｌ３からなる光学系が配設されており、レンズＬ３の後方にはＣＣＤ（撮像素子）１１が配設されている。上記カメラ光学系の光軸Ｏに対して直交するＣＣＤ１１の撮像面１２の位置は、該カメラ光学系の結像位置と一致しており、ＣＣＤ１１はデジタルカメラ１０に内蔵された手振れ補正装置１００に固定されている。 Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. In the following embodiments, the “X direction” is the horizontal direction of the digital camera 10, the “Y direction” is the vertical direction of the digital camera 10, and the “Z direction” is parallel to the optical axis O. Direction (direction orthogonal to the X direction and the Y direction).
As shown in FIG. 1, an optical system including a plurality of lenses L1, L2, and L3 is disposed in a digital camera (camera) 10, and a CCD (imaging device) 11 is disposed behind the lens L3. It is installed. The position of the imaging surface 12 of the CCD 11 orthogonal to the optical axis O of the camera optical system coincides with the imaging position of the camera optical system, and the CCD 11 is attached to the camera shake correction device 100 built in the digital camera 10. It is fixed.

手振れ補正装置１００は、図２〜図１１に示すように、以下のような構造となっている。
図２に示すように、後方から視たときに方形をなし、方形の収容孔２１が穿設された平板状の固定支持基板２０は、図示を省略した固定手段によりデジタルカメラ１０のボディ内に固定されている。固定支持基板２０は、光軸Ｏに対して直交し、かつ、光軸Ｏが収容孔２１の中心に位置している。 As shown in FIGS. 2 to 11, the camera shake correction apparatus 100 has the following structure.
As shown in FIG. 2, a flat fixed support substrate 20 having a square shape when viewed from the rear and having a rectangular accommodation hole 21 is formed in the body of the digital camera 10 by fixing means (not shown). It is fixed. The fixed support substrate 20 is orthogonal to the optical axis O, and the optical axis O is located at the center of the accommodation hole 21.

固定支持基板２０の後面の収容孔２１の下側には、正面視方形の凹部２２が凹設されている。固定支持基板２０の後面には、この凹部２２をＹ方向に跨ぐ態様で長方形のＸ用コイル形成板２４が固定されている。図２に示すように、Ｘ用コイル形成板２４のＸ方向長は凹部２２のＸ方向長より短く、Ｘ用コイル形成板２４のＹ方向長は凹部２２のＹ方向長より長い。さらに、Ｘ用コイル形成板２４の前面中央部には磁束を利用してＸ方向の位置変化を検出するＸ方向ホール素子３８が固着されている。
このＸ用コイル形成板２４には後述する制御手段に電気的に接続されたＸ方向駆動用コイルＣＸが、プリントによりＸ方向及びＹ方向と平行な平面コイルとして形成されている。図８に示すように、Ｘ方向駆動用コイルＣＸは、各辺が直線状をなす渦巻き状をなしており、右辺ＣＸ１と、左辺ＣＸ２と、上辺ＣＸ３と、下辺ＣＸ４とからなっている。図８では便宜上、Ｘ方向駆動用コイルＣＸを電気線を数回巻いたものとして図示しているが、実際は数十回巻かれている。 A recessed portion 22 having a square shape in front view is formed below the accommodation hole 21 on the rear surface of the fixed support substrate 20. A rectangular X coil forming plate 24 is fixed to the rear surface of the fixed support substrate 20 so as to straddle the recess 22 in the Y direction. As shown in FIG. 2, the X direction length of the X coil forming plate 24 is shorter than the X direction length of the recess 22, and the Y direction length of the X coil forming plate 24 is longer than the Y direction length of the recess 22. Further, an X-direction Hall element 38 that detects a change in position in the X direction using a magnetic flux is fixed to the center of the front surface of the X coil forming plate 24.
On this X coil forming plate 24, an X direction driving coil CX electrically connected to a control means described later is formed as a planar coil parallel to the X direction and the Y direction by printing. As shown in FIG. 8, the X-direction driving coil CX has a spiral shape in which each side forms a straight line, and includes a right side CX1, a left side CX2, an upper side CX3, and a lower side CX4. In FIG. 8, for convenience, the X-direction driving coil CX is illustrated as being wound several times with an electric wire, but is actually wound several tens of times.

また、固定支持基板２０の後面の収容孔２１の右側には、正面視方形の凹部２５が凹設されている。固定支持基板２０の後面には、この凹部２５をＸ方向に跨ぐ態様で長方形のＹ用コイル形成板２６が固定されている。図２に示すように、Ｙ用コイル形成板２６のＸ方向長は凹部２５のＸ方向長より長く、Ｙ用コイル形成板２６のＹ方向長は凹部２５のＹ方向長より短い。さらに、Ｙ用コイル形成板２６の前面中央部には磁束を利用してＹ方向の位置変化を検出するＹ方向ホール素子３９が固着されている。
このＹ用コイル形成板２６には後述する制御手段に電気的に接続されたＹ方向駆動用コイルＣＹが、プリントによりＸ方向及びＹ方向と平行な平面コイルとして形成されている。図９に示すように、Ｙ方向駆動用コイルＣＹは、各辺が直線状をなす渦巻き状をなしており、右辺ＣＹ１と、左辺ＣＹ２と、上辺ＣＹ３と、下辺ＣＹ４とからなっている。図９では便宜上、Ｙ方向駆動用コイルＣＹを電気線を数回巻いたものとして図示しているが、実際は数十回巻かれている。 Further, a concave portion 25 having a square shape in front view is provided on the right side of the accommodation hole 21 on the rear surface of the fixed support substrate 20. A rectangular Y coil forming plate 26 is fixed to the rear surface of the fixed support substrate 20 so as to straddle the recess 25 in the X direction. As shown in FIG. 2, the X direction length of the Y coil forming plate 26 is longer than the X direction length of the recess 25, and the Y direction length of the Y coil forming plate 26 is shorter than the Y direction length of the recess 25. Further, a Y-direction Hall element 39 that detects a change in position in the Y direction using a magnetic flux is fixed to the center of the front surface of the Y coil forming plate 26.
On this Y coil forming plate 26, a Y-direction driving coil CY electrically connected to a control means described later is formed as a planar coil parallel to the X direction and the Y direction by printing. As shown in FIG. 9, the Y-direction driving coil CY has a spiral shape in which each side forms a straight line, and includes a right side CY1, a left side CY2, an upper side CY3, and a lower side CY4. In FIG. 9, for convenience, the Y-direction driving coil CY is illustrated as having an electric wire wound several times, but is actually wound several tens of times.

収容孔２１の内部には、収容孔２１より小寸で、かつその後面が開口している中空箱状のＣＣＤ保持部材（ステージ部材）１０１が位置している。図４に示すように、ＣＣＤ保持部材１０１の前面には正面視方形の採光孔４１が穿設されている。ＣＣＤ保持部材１０１の内部にはローパスフィルタ４２とＣＣＤ１１が正面視方形環状の押さえ部材４３は挟んだ状態で収納されており、正面から視るとＣＣＤ１１の撮像面１２は採光孔４１と前後方向に対向する。図２及び図４に示すように、ＣＣＤ保持部材１０１の後面にはカバー板３３が固着されており、ＣＣＤ保持部材１０１からＣＣＤ１１、ローパスフィルタ４２、及び押さえ部材４３が後方に抜け落ちるのを防止している。   A hollow box-shaped CCD holding member (stage member) 101 having a smaller size than the accommodation hole 21 and having an open rear surface is located inside the accommodation hole 21. As shown in FIG. 4, a daylighting hole 41 that is square in front view is formed in the front surface of the CCD holding member 101. The low-pass filter 42 and the CCD 11 are accommodated inside the CCD holding member 101 in a state where the holding member 43 having a rectangular shape when viewed from the front is sandwiched, and when viewed from the front, the imaging surface 12 of the CCD 11 extends in the front-rear direction with the daylighting hole 41. opposite. As shown in FIGS. 2 and 4, a cover plate 33 is fixed to the rear surface of the CCD holding member 101 to prevent the CCD 11, the low-pass filter 42, and the pressing member 43 from falling backward from the CCD holding member 101. ing.

ＣＣＤ保持部材１０１の後面にはＸ方向を向くＸ方向スライド溝１０２とＸ方向スライド溝１０３が、上下一対として凹設されている。図２、図５、及び図７に示すように、Ｘ方向スライド溝１０２とＸ方向スライド溝１０３は同形状の直線溝であり、断面形状は共に方形である。Ｘ方向スライド溝１０２とＸ方向スライド溝１０３には、そのＹ方向寸法がＸ方向スライド溝１０２及びＸ方向スライド溝１０３と等しく、Ｘ方向寸法及びＺ方向寸法がＸ方向スライド溝１０２及びＸ方向スライド溝１０３より短い、互いに同形状のＸ方向スライダ１０４とＸ方向スライダ１０５が、それぞれＸ方向にのみ摺動可能として嵌合している。Ｘ方向スライダ１０４とＸ方向スライダ１０５は図示を省略した付勢手段によって常に前方に付勢されており、Ｘ方向スライダ１０４とＸ方向スライダ１０５の上下両面と前面は常にＸ方向スライド溝１０２とＸ方向スライド溝１０３の内面にそれぞれ接触している。さらに、Ｘ方向スライダ１０４の後面にはＸ方向を向くＸ方向リンク部材１０６の左端部が、Ｚ方向を向く連結ピン１０７によって枢着されており、Ｘ方向リンク部材１０６はＸ方向スライダ１０４に対して連結ピン１０７回りに回転可能である。固定支持基板２０の後面に突設された軸受け１６にはＺ方向を向く連結ピン（Ｙ用枢着軸）１０８が固定されており、Ｘ方向リンク部材１０６の中間部が連結ピン１０８に枢着されている。よって、Ｘ方向リンク部材１０６は固定支持基板２０に対して連結ピン１０８を中心に回転可能である。   On the rear surface of the CCD holding member 101, an X-direction slide groove 102 and an X-direction slide groove 103 facing in the X direction are recessed as a pair. As shown in FIGS. 2, 5, and 7, the X-direction slide groove 102 and the X-direction slide groove 103 are linear grooves having the same shape, and the cross-sectional shapes are both square. The X-direction slide groove 102 and the X-direction slide groove 103 have the same Y-direction dimension as the X-direction slide groove 102 and the X-direction slide groove 103, and the X-direction dimension and the Z-direction dimension are the X-direction slide groove 102 and the X-direction slide. An X-direction slider 104 and an X-direction slider 105, which are shorter than the groove 103 and have the same shape, are fitted so as to be slidable only in the X direction. The X-direction slider 104 and the X-direction slider 105 are always urged forward by urging means (not shown), and the upper and lower surfaces and the front surface of the X-direction slider 104 and X-direction slider 105 are always X-direction slide grooves 102 and X. Each of the directional slide grooves 103 is in contact with the inner surface. Further, the left end portion of the X-direction link member 106 facing the X direction is pivotally attached to the rear surface of the X-direction slider 104 by a connecting pin 107 facing the Z direction. Thus, it can be rotated around the connecting pin 107. A connecting pin (Y pivoting shaft) 108 facing in the Z direction is fixed to the bearing 16 projecting from the rear surface of the fixed support substrate 20, and an intermediate portion of the X-direction link member 106 pivots to the coupling pin 108. Has been. Therefore, the X-direction link member 106 can rotate around the connection pin 108 with respect to the fixed support substrate 20.

一方、Ｘ方向スライダ１０５の後面にはＸ方向リンク部材１０６と同形状のＸ方向を向くＸ方向リンク部材１０９の左端部が、Ｚ方向を向く連結ピン１１０によって枢着されている。Ｘ方向リンク部材１０９はＸ方向スライダ１０５に対して連結ピン１１０回りに回転可能である。固定支持基板２０の後面には、そのＸ方向位置が軸受け１６と一致する軸受け１７が突設されている。この軸受け１７には、Ｚ方向を向く連結ピン（Ｙ用枢着軸）１１１が固定されており、Ｘ方向リンク部材１０９の中間部は連結ピン１１１に枢着されている。即ち、Ｘ方向リンク部材１０９は固定支持基板２０に対して連結ピン１１１を中心に回転可能である。   On the other hand, the left end portion of the X-direction link member 109 facing the X direction having the same shape as the X-direction link member 106 is pivotally attached to the rear surface of the X-direction slider 105 by a connecting pin 110 facing the Z direction. The X-direction link member 109 can rotate around the connecting pin 110 with respect to the X-direction slider 105. On the rear surface of the fixed support substrate 20, a bearing 17 whose X direction position coincides with the bearing 16 is projected. A connecting pin (Y pivot attachment shaft) 111 facing in the Z direction is fixed to the bearing 17, and an intermediate portion of the X-direction link member 109 is pivotally attached to the connection pin 111. That is, the X-direction link member 109 can rotate around the connection pin 111 with respect to the fixed support substrate 20.

Ｘ方向リンク部材１０６とＸ方向リンク部材１０９の右端部の間には、金属（軟鉄）等の磁性体からなるＹ用ヨークＹＹＡが位置している。Ｙ用ヨークＹＹＡの固定支持基板２０と平行な後板部ＹＹＡ１から上方に延出する突片ＹＹＡ２は、Ｚ方向を向く連結ピン１１２によってＸ方向リンク部材１０６の前面の右端部に枢着されており、Ｙ用ヨークＹＹＡとＸ方向リンク部材１０６は連結ピン１１２を中心に相対回転可能である。さらに、Ｙ用ヨークＹＹＡの後板部ＹＹＡ１から下方に延出する突片ＹＹＡ３は、Ｘ方向リンク部材１０９の前面の右端部に、Ｚ方向を向く連結ピン１１４によって枢着されており、Ｙ用ヨークＹＹＡとＸ方向リンク部材１０９は連結ピン１１４回りに相対回転可能である。   A Y yoke YYA made of a magnetic material such as metal (soft iron) is located between the right end portions of the X-direction link member 106 and the X-direction link member 109. The projecting piece YYA2 extending upward from the rear plate YYA1 parallel to the fixed support substrate 20 of the Y yoke YYA is pivotally attached to the right end portion of the front surface of the X-direction link member 106 by the connecting pin 112 facing the Z direction. The Y yoke YYA and the X-direction link member 106 are relatively rotatable around the connecting pin 112. Further, the projecting piece YYA3 extending downward from the rear plate portion YYA1 of the Y yoke YYA is pivotally attached to the right end portion of the front surface of the X direction link member 109 by a connecting pin 114 facing the Z direction. The yoke YYA and the X-direction link member 109 are relatively rotatable around the connecting pin 114.

Ｙ用ヨークＹＹＡの後板部ＹＹＡ１の前面の上下両端からは連結部ＹＹＡ４が前方に向かって延出しており、上下の連結部ＹＹＡ４の前面どうしは後板部ＹＹＡ１と平行な前板部ＹＹＡ５によって連結されている。図４に示すように、上下の連結部ＹＹＡ４と前板部ＹＹＡ５は凹部２５内に位置しており、さらに後板部ＹＹＡ１と連結部ＹＹＡ４と前板部ＹＹＡ５の間にＹ用コイル形成板２６が位置している。上側の連結部ＹＹＡ４の上面と下側の連結部ＹＹＡ４の下面の間隔より凹部２５のＹ方向長が長いので、Ｙ用ヨークＹＹＡは凹部２５内でＹ方向に相対移動可能である。さらに、上側の連結部ＹＹＡ４の下面と下側の連結部ＹＹＡ４の上面の間隔がＹ用コイル形成板２６のＹ方向長より長いので、Ｙ用ヨークＹＹＡはＹ用コイル形成板２６に対してＹ方向に相対移動可能である。
さらに、後板部ＹＹＡ１の前面には、そのＮ極とＳ極がＹ方向に並ぶＹ用磁石ＭＹが固着されている。Ｙ用磁石ＭＹの磁束を後板部ＹＹＡ１、連結部ＹＹＡ４、及び前板部ＹＹＡ５が通すことにより互いに対向するＹ用ヨークＹＹＡの前板部ＹＹＡ５とＹ用磁石ＭＹとの間にはＹ用磁気回路が形成されている。Ｙ用磁石ＭＹのＮ極とＹ方向駆動用コイルＣＹの上辺ＣＹ３は常にＺ方向の重合関係を維持し、Ｙ用磁石ＭＹのＳ極とＹ方向駆動用コイルＣＹの下辺ＣＹ４は常にＺ方向の重合関係を維持する。上記Ｙ方向ホール素子３９は、Ｙ用磁石ＭＹと前板部ＹＹＡ５の間の磁束を利用してＹ用ヨークＹＹＡのＹ方向の位置変化を検出する。
また、Ｙ用ヨークＹＹＡとＹ用磁石ＭＹの結合体の質量は、Ｙ用コイル形成板２６とＹ方向駆動用コイルＣＹの合計質量より大きい。 The connecting portion YYA4 extends forward from the upper and lower ends of the front surface of the rear plate portion YYA1 of the Y yoke YYA, and the front surfaces of the upper and lower connecting portions YYA4 are separated by a front plate portion YYA5 parallel to the rear plate portion YYA1. It is connected. As shown in FIG. 4, the upper and lower connecting portions YYA4 and the front plate portion YYA5 are positioned in the recess 25, and the Y coil forming plate 26 is further interposed between the rear plate portion YYA1, the connecting portion YYA4, and the front plate portion YYA5. Is located. Since the Y direction length of the concave portion 25 is longer than the distance between the upper surface of the upper connecting portion YYA4 and the lower surface of the lower connecting portion YYA4, the Y yoke YYA can be relatively moved in the Y direction within the concave portion 25. Further, since the distance between the lower surface of the upper connecting portion YYA4 and the upper surface of the lower connecting portion YYA4 is longer than the length in the Y direction of the Y coil forming plate 26, the Y yoke YYA is Y with respect to the Y coil forming plate 26. Relative movement is possible in the direction.
Further, a Y magnet MY in which the N and S poles are arranged in the Y direction is fixed to the front surface of the rear plate YYA1. Magnetic flux for the Y magnet MY passes between the front plate portion YYA5 of the Y yoke YYA and the Y magnet MY, which are opposed to each other by passing the magnetic flux of the Y magnet MY through the rear plate portion YYA1, the connecting portion YYA4, and the front plate portion YYA5. A circuit is formed. The N pole of the Y magnet MY and the upper side CY3 of the Y-direction driving coil CY always maintain the overlapping relationship in the Z direction, and the S pole of the Y magnet MY and the lower side CY4 of the Y-direction driving coil CY are always in the Z direction. Maintain polymerization relationship. The Y-direction hall element 39 detects a change in the position of the Y yoke YYA in the Y direction using a magnetic flux between the Y magnet MY and the front plate portion YYA5.
Further, the mass of the combined body of the Y yoke YYA and the Y magnet MY is larger than the total mass of the Y coil forming plate 26 and the Y direction driving coil CY.

図２及び図７に示すように、連結ピン１０８から連結ピン１１２までの直線距離（Ｘ方向距離）より連結ピン１０８から連結ピン１０７までの直線距離（Ｘ方向距離）が長くなるように、連結ピン１０８の位置は設定されている。同様に、連結ピン１１１から連結ピン１１４までの直線距離（Ｘ方向距離）より連結ピン１１１から連結ピン１１０までの直線距離（Ｘ方向距離）が長くなるように、連結ピン１１１の位置が設定されている。
そして、これらＸ方向スライド溝１０２、Ｘ方向スライド溝１０３、Ｘ方向スライダ１０４、Ｘ方向スライダ１０５、Ｘ方向リンク部材１０６、連結ピン１０７、連結ピン１０８、Ｘ方向リンク部材１０９、連結ピン１１０、連結ピン１１１、連結ピン１１２、Ｙ用ヨークＹＹＡ、連結ピン１１４はＹ方向移動量調整伝達手段の構成要素である。 As shown in FIGS. 2 and 7, the linear distance from the connecting pin 108 to the connecting pin 107 (X direction distance) is longer than the linear distance from the connecting pin 108 to the connecting pin 112 (X direction distance). The position of the pin 108 is set. Similarly, the position of the connecting pin 111 is set so that the linear distance (X direction distance) from the connecting pin 111 to the connecting pin 110 is longer than the linear distance (X direction distance) from the connecting pin 111 to the connecting pin 114. ing.
And these X direction slide groove 102, X direction slide groove 103, X direction slider 104, X direction slider 105, X direction link member 106, connecting pin 107, connecting pin 108, X direction link member 109, connecting pin 110, connecting The pin 111, the connecting pin 112, the Y yoke YYA, and the connecting pin 114 are components of the Y-direction movement amount adjustment transmission means.

ＣＣＤ保持部材１０１の後面の左端部にはＹ方向を向くＹ方向スライド溝１１７が凹設されている。図２及び図７に示すようにＹ方向スライド溝１１７は断面が方形の直線溝である。Ｙ方向スライド溝１１７には、そのＸ方向寸法がＹ方向スライド溝１１７と等しく、Ｙ方向寸法及びＺ方向寸法がＹ方向スライド溝１１７より短いＹ方向スライダ１１８が、Ｙ方向にのみ摺動可能として嵌合している。Ｙ方向スライダ１１８は図示を省略した付勢手段によって常に前方に付勢されており、Ｙ方向スライダ１１８の左右両面と前面は常にＹ方向スライド溝１１７の内面にそれぞれ接触している。さらに、Ｙ方向スライダ１１８の後面にはＹ方向を向くＹ方向リンク部材（リンク部材）１１９の上端部が、Ｚ方向を向く連結ピン（回転軸）１２０によって枢着されており、Ｙ方向リンク部材１１９はＹ方向スライダ１１８に対して連結ピン１２０回りに回転可能となっている。固定支持基板２０の後面には軸受け１８が突設されており、Ｙ方向リンク部材１１９の中間部は、この軸受け１８に支持されたＺ方向を向く連結ピン（Ｘ用枢着軸）１２１に枢着されている。Ｙ方向リンク部材１１９は固定支持基板２０に対して連結ピン１２１を中心に回転可能である。固定支持基板２０の後面のＹ方向リンク部材１１９の右側には軸受け１９が突設されている。この軸受け１９のＹ方向位置は軸受け１８と同一である。軸受け１９には、Ｚ方向を向く連結ピン１２３が支持されており、この連結ピン１２３に、Ｙ方向リンク部材１１９と平行なＹ方向リンク部材１２２の上端部が（連結ピン１２３回りに）回転可能に枢着されている。   A Y-direction slide groove 117 facing the Y direction is formed in the left end portion on the rear surface of the CCD holding member 101. As shown in FIGS. 2 and 7, the Y-direction slide groove 117 is a linear groove having a square cross section. The Y-direction slide groove 117 is configured such that the Y-direction slider 118 whose X-direction dimension is equal to the Y-direction slide groove 117 and whose Y-direction dimension and Z-direction dimension are shorter than the Y-direction slide groove 117 can slide only in the Y direction. It is mated. The Y-direction slider 118 is always urged forward by urging means (not shown), and both the left and right surfaces and the front surface of the Y-direction slider 118 are always in contact with the inner surface of the Y-direction slide groove 117. Further, an upper end portion of a Y-direction link member (link member) 119 facing the Y direction is pivotally attached to the rear surface of the Y-direction slider 118 by a connecting pin (rotating shaft) 120 facing the Z direction. 119 can rotate around the connecting pin 120 with respect to the Y-direction slider 118. A bearing 18 protrudes from the rear surface of the fixed support substrate 20, and an intermediate portion of the Y-direction link member 119 is pivoted to a connecting pin (X pivoting shaft) 121 facing the Z direction supported by the bearing 18. It is worn. The Y-direction link member 119 can rotate about the connection pin 121 with respect to the fixed support substrate 20. A bearing 19 projects from the right side of the Y-direction link member 119 on the rear surface of the fixed support substrate 20. The position of the bearing 19 in the Y direction is the same as that of the bearing 18. A connecting pin 123 facing the Z direction is supported on the bearing 19, and the upper end portion of the Y-direction link member 122 parallel to the Y-direction link member 119 can be rotated (around the connecting pin 123). It is pivotally attached to.

Ｙ方向リンク部材１１９とＹ方向リンク部材１２２の下端部の間には、金属（軟鉄）等の磁性体からなるＸ用ヨークＹＸＡの固定支持基板２０と平行な後板部ＹＸＡ１が位置している。後板部ＹＸＡ１から右側に延出する突片ＹＸＡ２は、Ｙ方向リンク部材１２２の前面の下端部に、Ｚ方向を向く連結ピン１２４によって枢着されており、Ｘ用ヨークＹＸＡとＹ方向リンク部材１２２は連結ピン１２４を中心に相対回転可能である。さらに、Ｘ用ヨークＹＸＡの後板部ＹＸＡ１から左側に延出する突片ＹＸＡ３は、Ｙ方向リンク部材１１９の前面の下端部にＺ方向を向く連結ピン（回転軸）１２６によって枢着されており、Ｘ用ヨークＹＸＡとＹ方向リンク部材１１９は連結ピン１２６回りに相対回転可能である。   Between the lower end portions of the Y-direction link member 119 and the Y-direction link member 122, the rear plate portion YXA1 parallel to the fixed support substrate 20 of the X yoke YXA made of a magnetic material such as metal (soft iron) is located. . The projecting piece YXA2 extending rightward from the rear plate portion YXA1 is pivotally attached to the lower end portion of the front surface of the Y-direction link member 122 by a connecting pin 124 facing the Z direction, and the X-yoke YXA and the Y-direction link member 122 is relatively rotatable around the connecting pin 124. Further, the projecting piece YXA3 extending leftward from the rear plate YXA1 of the X yoke YXA is pivotally attached to the lower end portion of the front surface of the Y-direction link member 119 by a connecting pin (rotating shaft) 126 facing the Z direction. The X yoke YXA and the Y-direction link member 119 are relatively rotatable around the connecting pin 126.

Ｘ用ヨークＹＸＡの後板部ＹＸＡ１の前面の左右両端からは連結部ＹＸＡ４が前方に向かって延出しており、左右の連結部ＹＸＡ４の前面どうしは後板部ＹＸＡ１と平行な前板部ＹＸＡ５によって連結されている。図３に示すように、左右の連結部ＹＸＡ４と前板部ＹＸＡ５は凹部２２内に位置しており、さらに後板部ＹＸＡ１と連結部ＹＸＡ４と前板部ＹＸＡ５の間にＸ用コイル形成板２４が位置している。右側の連結部ＹＸＡ４の右側面と左側の連結部ＹＸＡ４の左側面の間隔より凹部２２のＸ方向長が長いので、Ｘ用ヨークＹＸＡは凹部２２内でＸ方向に相対移動可能である。さらに、右側の連結部ＹＸＡ４の左側面と左側の連結部ＹＸＡ４の右側面の間隔よりＸ用コイル形成板２４のＸ方向長が短いので、Ｘ用ヨークＹＸＡはＸ用コイル形成板２４に対してＸ方向に相対移動可能である。
さらに、後板部ＹＸＡ１の前面には、そのＮ極とＳ極がＸ方向に並ぶＸ用磁石ＭＸが固着されている。Ｘ用磁石ＭＸの磁束を後板部ＹＸＡ１、連結部ＹＸＡ４、及び前板部ＹＸＡ５が通すことにより互いに対向するＸ用ヨークＹＸＡの前板部ＹＸＡ５とＸ用磁石ＭＸの間にはＸ用磁気回路が形成されている。図８に示すようにＸ用磁石ＭＸのＮ極とＸ方向駆動用コイルＣＸの右辺ＣＸ１は常にＺ方向の重合関係を維持し、Ｘ用磁石ＭＸのＳ極とＸ方向駆動用コイルＣＸの左辺ＣＸ２は常にＺ方向の重合関係を維持する。また、上記Ｘ方向ホール素子３８は、Ｘ用磁石ＭＸと前板部ＹＸＡ５との間の磁束を利用してＸ用ヨークＹＸＡのＸ方向の位置変化を検出する。
また、Ｘ用ヨークＹＸＡとＸ用磁石ＭＸの結合体の質量は、Ｘ用コイル形成板２４とＸ方向駆動用コイルＣＸの合計質量より大きい。 A connecting portion YXA4 extends forward from the left and right ends of the front surface of the rear plate portion YXA1 of the X yoke YXA. It is connected. As shown in FIG. 3, the left and right connecting portions YXA4 and the front plate portion YXA5 are located in the recess 22, and the X coil forming plate 24 is further interposed between the rear plate portion YXA1, the connecting portion YXA4, and the front plate portion YXA5. Is located. Since the X-direction length of the concave portion 22 is longer than the distance between the right side surface of the right connecting portion YXA4 and the left side surface of the left connecting portion YXA4, the X yoke YXA is relatively movable in the X direction within the concave portion 22. Further, since the X-direction length of the X coil forming plate 24 is shorter than the distance between the left side surface of the right connecting portion YXA4 and the right side surface of the left connecting portion YXA4, the X yoke YXA is in relation to the X coil forming plate 24. Relative movement is possible in the X direction.
Further, an X magnet MX in which the N pole and the S pole are arranged in the X direction is fixed to the front surface of the rear plate portion YXA1. A magnetic circuit for X is provided between the front plate portion YXA5 of the X yoke YXA and the X magnet MX which are opposed to each other by passing the magnetic flux of the X magnet MX through the rear plate portion YXA1, the connecting portion YXA4, and the front plate portion YXA5. Is formed. As shown in FIG. 8, the N pole of the X magnet MX and the right side CX1 of the X direction driving coil CX always maintain a superposition relationship in the Z direction, and the S pole of the X magnet MX and the left side of the X direction driving coil CX. CX2 always maintains a polymerization relationship in the Z direction. The X-direction hall element 38 detects a change in the position of the X yoke YXA in the X direction by using a magnetic flux between the X magnet MX and the front plate portion YXA5.
The mass of the combined body of the X yoke YXA and the X magnet MX is larger than the total mass of the X coil forming plate 24 and the X direction driving coil CX.

図２及び図７に示すように、連結ピン１２１から連結ピン１２６までの直線距離（Ｙ方向距離。連結ピン１２３から連結ピン１２４までの距離と同じ）より連結ピン１２１から連結ピン１２０までの直線距離（Ｙ方向距離）が長くなるように、連結ピン１２１（軸受け１８と軸受け１９）のＹ方向位置を設定している。
そして、これらＹ方向スライド溝１１７、Ｙ方向スライダ１１８、Ｙ方向リンク部材１１９、連結ピン１２０、連結ピン１２１、Ｙ方向リンク部材１２２、連結ピン１２３、連結ピン１２４、連結ピン１２６、及びＸ用ヨークＹＸＡはＸ方向移動量調整伝達手段の構成要素である。 2 and 7, the straight line from the connecting pin 121 to the connecting pin 120 from the straight distance from the connecting pin 121 to the connecting pin 126 (Y-direction distance; the same as the distance from the connecting pin 123 to the connecting pin 124). The Y-direction position of the connecting pin 121 (bearing 18 and bearing 19) is set so that the distance (Y-direction distance) becomes long.
The Y-direction slide groove 117, the Y-direction slider 118, the Y-direction link member 119, the connection pin 120, the connection pin 121, the Y-direction link member 122, the connection pin 123, the connection pin 124, the connection pin 126, and the X yoke. YXA is a component of the X-direction movement amount adjustment transmission means.

次に、デジタルカメラ１０の手振れ補正動作について説明する。
まずは、Ｙ方向の手振れ補正動作について、図１２の制御回路ブロック図を用いながら説明する。
デジタルカメラ１０による撮影時に手振れ補正スイッチＳＷ（図１参照）をＯＮにすると、デジタルカメラ１０にＹ方向の手振れが生じなければ手振れ補正装置１００は動作しないが、Ｙ方向の手振れが生じるとデジタルカメラ１０に内蔵されたＹ方向角速度センサ（振動検出センサ）９１の出力を積分回路９３が積分し、光軸ＯのＹ方向の角度振れ量に変換する。そして、積分回路９３の出力（デジタルカメラ１０のＹ方向の振動量）とＹ方向ホール素子３９の出力（Ｙ用ヨークＹＹＡのデジタルカメラ１０に対するＹ方向の移動量）にＹ用ヨークＹＹＡのＹ方向の移動量とＣＣＤ保持部材１０１（ＣＣＤ１１）のＹ方向の移動量の比を掛けた値とが誤差増幅器９５で比較され、出力差に応じた電圧が誤差増幅器９５によってＹ方向駆動用コイルＣＹに印加される。 Next, the camera shake correction operation of the digital camera 10 will be described.
First, the camera shake correction operation in the Y direction will be described with reference to the control circuit block diagram of FIG.
When the camera shake correction switch SW (see FIG. 1) is turned on during shooting by the digital camera 10, the camera shake correction apparatus 100 does not operate unless camera shake in the Y direction occurs in the digital camera 10. However, if camera shake in the Y direction occurs, the digital camera The integrating circuit 93 integrates the output of the Y-direction angular velocity sensor (vibration detection sensor) 91 built in the optical axis O and converts it into an angular shake amount of the optical axis O in the Y direction. The output of the integrating circuit 93 (the amount of vibration in the Y direction of the digital camera 10) and the output of the Y direction hall element 39 (the amount of movement of the Y yoke YYA in the Y direction with respect to the digital camera 10) are the Y direction of the Y yoke YYA. Is multiplied by the ratio of the amount of movement of the CCD holding member 101 (CCD 11) in the Y direction by the error amplifier 95, and a voltage corresponding to the output difference is applied to the Y direction driving coil CY by the error amplifier 95. Applied.

例えば、デジタルカメラ１０にＹ方向下向きの手振れが生じると、Ｙ方向駆動用コイルＣＹに図９に矢線で示す方向の電流が流れる。すると、上辺ＣＹ３と下辺ＣＹ４にはＹ方向上向きの直線的な力ＦＹ１が生じ、ＦＹ１の反力（駆動力）がＹ用ヨークＹＹＡに下向きに掛かる（この際、右辺ＣＹ１と左辺ＣＹ２にも力が生じるが、これらの力は互いに打ち消し合うので、Ｙ用ヨークＹＹＡには力を及ぼさない）。Ｙ用ヨークＹＹＡがＦＹ１の反力を受けると、ＦＹ１の反力（駆動力）がＹ用ヨークＹＹＡからＸ方向リンク部材１０６とＸ方向リンク部材１０９に伝わり、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９が平行関係を維持しながら連結ピン１０８と連結ピン１１１を中心に図２の時計方向に回転する。すると、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９がＸ方向スライダ１０４とＸ方向スライダ１０５に対して相対回転し、Ｘ方向スライド溝１０２とＸ方向スライド溝１０３はＸ方向を向いた状態を維持する。さらに、Ｘ方向スライダ１０４とＸ方向スライダ１０５からＸ方向スライド溝１０２とＸ方向スライド溝１０３に上向きの力が掛かるので、ＣＣＤ保持部材１０１及びＣＣＤ１１）が固定支持基板２０に対して上向きに相対移動し、上記Ｙ方向下向きの手振れが補正される。さらに、ＣＣＤ保持部材１０１の上方移動に伴い、Ｙ方向スライド溝１１７がＹ方向スライダ１１８に対して上向きに相対移動する。   For example, when a downward camera shake in the Y direction occurs in the digital camera 10, a current in the direction indicated by the arrow in FIG. 9 flows through the Y direction driving coil CY. Then, a linear force FY1 upward in the Y direction is generated at the upper side CY3 and the lower side CY4, and the reaction force (driving force) of FY1 is applied downward to the Y yoke YYA (at this time, the force is also applied to the right side CY1 and the left side CY2). However, since these forces cancel each other, they do not exert a force on the Y yoke YYA). When Y yoke YYA receives the reaction force of FY1, the reaction force (driving force) of FY1 is transmitted from Y yoke YYA to X direction link member 106 and X direction link member 109, and X direction link member 106 and X direction link The member 109 rotates around the connecting pin 108 and the connecting pin 111 in the clockwise direction in FIG. 2 while maintaining the parallel relationship. Then, the X-direction link member 106 and the X-direction link member 109 rotate relative to the X-direction slider 104 and the X-direction slider 105, and the X-direction slide groove 102 and the X-direction slide groove 103 are maintained in the X direction. To do. Furthermore, since an upward force is applied from the X direction slider 104 and the X direction slider 105 to the X direction slide groove 102 and the X direction slide groove 103, the CCD holding member 101 and the CCD 11) move relative to the fixed support substrate 20 upward. Then, the downward camera shake in the Y direction is corrected. Further, as the CCD holding member 101 moves upward, the Y-direction slide groove 117 moves upward relative to the Y-direction slider 118.

一方、デジタルカメラ１０にＹ方向上向きの手振れが生じると、Ｙ方向駆動用コイルＣＹには図９の矢線とは逆向きに電流を流れる。すると、上辺ＣＹ３と下辺ＣＹ４にはＹ方向下向きの直線的な力ＦＹ２が生じ、この反力がＹ用ヨークＹＹＡに上向きに掛かる（この際、右辺ＣＹ１と左辺ＣＹ２にも力が生じるが、これらの力は互いに打ち消し合うので、Ｙ用ヨークＹＹＡには力を及ぼさない）。Ｙ用ヨークＹＹＡがＦＹ２の反力（駆動力）を受けると、この反力がＹ用ヨークＹＹＡからＸ方向リンク部材１０６とＸ方向リンク部材１０９に伝わり、図１０に示すように、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９が連結ピン１０８と連結ピン１１１を中心に図２の反時計方向に回転する。すると、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９がＸ方向スライダ１０４とＸ方向スライダ１０５に対して相対回転し、Ｘ方向スライド溝１０２とＸ方向スライド溝１０３はＸ方向を向いた状態を維持する。さらに、Ｘ方向スライダ１０４とＸ方向スライダ１０５からＸ方向スライド溝１０２とＸ方向スライド溝１０３に下向きの力が掛かるので、ＣＣＤ保持部材１０１及びＣＣＤ１１が固定支持基板２０に対して下向きに相対移動し、上記Ｙ方向上向きの手振れが補正される。さらに、ＣＣＤ保持部材１０１の下方移動に伴い、Ｙ方向スライド溝１１７（ＣＣＤ保持部材１０１）がＹ方向スライダ１１８（及び固定支持基板２０）に対して下向きに相対移動する。   On the other hand, when an upward camera shake in the Y direction occurs in the digital camera 10, a current flows in the Y direction driving coil CY in the direction opposite to the arrow in FIG. Then, a linear force FY2 downward in the Y direction is generated on the upper side CY3 and the lower side CY4, and this reaction force is applied upward on the Y yoke YYA (at this time, a force is also generated on the right side CY1 and the left side CY2). Since these forces cancel each other, they do not exert any force on the Y yoke YYA). When Y yoke YYA receives the reaction force (drive force) of FY2, this reaction force is transmitted from Y yoke YYA to X direction link member 106 and X direction link member 109, and as shown in FIG. The member 106 and the X-direction link member 109 rotate in the counterclockwise direction in FIG. 2 around the connecting pin 108 and the connecting pin 111. Then, the X-direction link member 106 and the X-direction link member 109 rotate relative to the X-direction slider 104 and the X-direction slider 105, and the X-direction slide groove 102 and the X-direction slide groove 103 are maintained in the X direction. To do. Further, since a downward force is applied from the X-direction slider 104 and the X-direction slider 105 to the X-direction slide groove 102 and the X-direction slide groove 103, the CCD holding member 101 and the CCD 11 move relative to the fixed support substrate 20 downward. The upward camera shake in the Y direction is corrected. Further, as the CCD holding member 101 moves downward, the Y-direction slide groove 117 (CCD holding member 101) moves relative to the Y-direction slider 118 (and the fixed support substrate 20) downward.

このようにＹ用ヨークＹＹＡのＹ方向への直線移動に起因してＣＣＤ保持部材１０１（ＣＣＤ１１）がＹ方向に直線移動するとき、Ｙ用ヨークＹＹＡの移動量とＣＣＤ保持部材１０１（ＣＣＤ１１）の移動量の比は、連結ピン１０８（連結ピン１１１）から連結ピン１１２（連結ピン１１４）までの直線距離と、連結ピン１０８（連結ピン１１１）から連結ピン１０７（連結ピン１１０）までの直線距離の比と同じであり、Ｙ用ヨークＹＹＡよりＣＣＤ保持部材１０１（ＣＣＤ１１）が大きく動く。
なお、Ｙ方向駆動用コイルＣＹへの給電を停止すると、その瞬間にＹ方向の動力が失われＹ用ヨークＹＹＡは移動を停止する。また、Ｙ方向駆動用コイルＣＹに流れる電流の大きさと生じる力は比例するので、Ｙ方向駆動用コイルＣＹへ給電する電流を大きくすれば、Ｙ用ヨークＹＹＡに掛かる力は大きくなり、電流を小さくすればＹ用ヨークＹＹＡに掛かる力は小さくなる。 As described above, when the CCD holding member 101 (CCD 11) linearly moves in the Y direction due to the linear movement of the Y yoke YYA in the Y direction, the movement amount of the Y yoke YYA and the CCD holding member 101 (CCD 11). The ratio of the moving amount is that the linear distance from the connecting pin 108 (the connecting pin 111) to the connecting pin 112 (the connecting pin 114) and the linear distance from the connecting pin 108 (the connecting pin 111) to the connecting pin 107 (the connecting pin 110). The CCD holding member 101 (CCD 11) moves more greatly than the Y yoke YYA.
When power supply to the Y-direction driving coil CY is stopped, the power in the Y-direction is lost at that moment, and the Y-yoke YYA stops moving. Further, since the magnitude of the current flowing through the Y-direction drive coil CY is proportional to the force generated, if the current supplied to the Y-direction drive coil CY is increased, the force applied to the Y-yoke YYA increases and the current decreases. Then, the force applied to the Y yoke YYA is reduced.

このように、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９がそれぞれ連結ピン１０８と枢着ピン１１１を支点とする「てこ」のように機能することにより、Ｙ用ヨークＹＹＡの移動力がＣＣＤ保持部材１０１に伝達される。
そして本実施形態では、連結ピン１０８よりＹ用ヨークＹＹＡ側の部分、及び枢着ピン１１１よりＹ用ヨークＹＹＡ側の部分からなるＹ用ヨーク側回転体の、連結ピン１０８と枢着ピン１１１を中心とするＹ用ヨーク側回転体の自重による回転モーメントが、ＣＣＤ保持部材１０１、ＣＣＤ保持部材１０１と一体化された部品（ＣＣＤ１１、ローパスフィルタ４２等）、Ｘ方向スライダ１０４、Ｘ方向スライダ１０５、枢着ピン１０７、連結ピン１１０、Ｘ方向リンク部材１０６の連結ピン１０８より枢着ピン１０７側の部分、及びＸ方向リンク部材１０９の枢着ピン１１１より連結ピン１１０側の部分（これらがステージ部材側回転体）の、連結ピン１０８と枢着ピン１１１を中心とするステージ部材側回転体の自重による回転モーメントに近づくようにするために、Ｙ用コイル形成板２６とＹ方向駆動用コイルＣＹの合計質量より質量が大きいＹ用ヨークＹＹＡとＹ用磁石ＭＹの結合体を、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９に枢着している。その結果、Ｙ用ヨーク側回転体の自重による回転モーメントとステージ部材側回転体の自重による回転モーメントが一致しているので、Ｙ用ヨークＹＹＡに掛かる力を大きくするために、Ｙ方向駆動用コイルＣＹに大きな電流を流したり、Ｙ方向駆動用コイルＣＹやＹ用ヨークＹＹＡ（Ｙ用磁石ＭＹ）を大型化しなくても、ＣＣＤ保持部材１０１をＹ方向に円滑に移動させることが可能である。 In this way, the X-direction link member 106 and the X-direction link member 109 function like a “lever” with the connecting pin 108 and the pivot pin 111 as fulcrums, respectively, so that the moving force of the Y yoke YYA is held by the CCD. It is transmitted to the member 101.
In the present embodiment, the connecting pin 108 and the pivot pin 111 of the Y yoke-side rotating body composed of the Y yoke YYA side portion from the coupling pin 108 and the Y yoke YYA side portion from the pivot pin 111 are arranged. The rotation moment due to the weight of the Y-side rotator at the center is the CCD holding member 101, components integrated with the CCD holding member 101 (CCD 11, low-pass filter 42, etc.), X-direction slider 104, X-direction slider 105, The pivot pin 107, the coupling pin 110, the portion of the X-direction link member 106 closer to the pivot pin 107 than the coupling pin 108, and the portion of the X-direction link member 109 closer to the coupling pin 110 than the pivot pin 111 (these are the stage members) Rotational moment due to the weight of the stage member side rotating body centering on the connecting pin 108 and the pivot pin 111. In order to approach the Y-coil forming plate 26 and the Y-direction drive coil CY, the combined body of the Y-yoke YYA and the Y-magnet MY is larger than the total mass of the X-direction link member 106 and the X-direction link. It is pivotally attached to the member 109. As a result, the rotational moment due to the weight of the Y yoke side rotating body and the rotational moment due to the weight of the stage member side rotating body coincide with each other. Therefore, in order to increase the force applied to the Y yoke YYA, the Y direction drive coil The CCD holding member 101 can be smoothly moved in the Y direction without applying a large current to CY or increasing the size of the Y-direction driving coil CY and Y yoke YYA (Y magnet MY).

次に、Ｘ方向の手振れ補正動作について、図１２の制御回路ブロック図を用いながら説明する。
デジタルカメラ１０の手振れ補正スイッチＳＷをＯＮにした状態でＸ方向の手振れが生じると、デジタルカメラ１０に内蔵されたＸ方向角速度センサ（振動検出センサ）９０の出力を積分回路（制御手段）９２が積分し、光軸ＯのＸ方向の角度振れ量に変換する。そして、積分回路９２の出力（デジタルカメラ１０のＸ方向の振動量）とＸ方向ホール素子３８の出力（Ｘ用ヨークＹＸＡのデジタルカメラ１０に対するＸ方向の移動量）にＸ用ヨークＹＸＡのＸ方向の移動量とＣＣＤ保持部材１０１（ＣＣＤ１１）のＸ方向の移動量の比を掛けた値とが誤差増幅器（制御手段）９４で比較され、出力差に応じた電圧が誤差増幅器９４によってＸ方向駆動用コイルＣＸに印加される。 Next, the camera shake correction operation in the X direction will be described with reference to the control circuit block diagram of FIG.
When camera shake in the X direction occurs with the camera shake correction switch SW of the digital camera 10 turned on, an integration circuit (control means) 92 outputs the output of the X direction angular velocity sensor (vibration detection sensor) 90 built in the digital camera 10. Integrate and convert to an angular shake amount in the X direction of the optical axis O. The output of the integrating circuit 92 (the amount of vibration in the X direction of the digital camera 10) and the output of the X direction hall element 38 (the amount of movement of the X yoke YXA in the X direction with respect to the digital camera 10) are the X direction of the X yoke YXA. A value obtained by multiplying the amount of movement of the CCD holding member 101 (CCD 11) by the ratio of the amount of movement in the X direction is compared by an error amplifier (control means) 94, and a voltage corresponding to the output difference is driven by the error amplifier 94 in the X direction. Applied to the coil CX.

例えば、デジタルカメラ１０にＸ方向左向きの手振れが生じると、Ｘ方向駆動用コイルＣＸに図８に矢線で示す方向の電流が流れる。すると、右辺ＣＸ１と左辺ＣＸ２にはＸ方向右向きの直線的な力ＦＸ１が生じ、ＦＸ１の反力（駆動力）がＸ用ヨークＹＸＡに左向きに掛かる（この際、上辺ＣＸ３と下辺ＣＸ４にも力が生じるが、これらの力は互いに打ち消し合うので、Ｘ用ヨークＹＸＡには力を及ぼさない）。Ｘ用ヨークＹＸＡがＦＸ２の反力を受けると、Ｘ用ヨークＹＸＡからＹ方向リンク部材１１９とＹ方向リンク部材１２２に伝わり、Ｙ方向リンク部材１１９とＹ方向リンク部材１２２が平行関係を維持しながら連結ピン１２１と連結ピン１２３を中心に図２の時計方向に回転する。すると、Ｙ方向リンク部材１１９がＹ方向スライダ１１８に対して相対回転し、Ｙ方向スライド溝１１７はＹ方向を向いた状態を維持する。さらに、Ｙ方向スライダ１１８からＹ方向スライド溝１１７に右方向の移動力が加わるので、ＣＣＤ保持部材１０１及びＸ方向スライド溝１０２が固定支持基板２０に対して右向きに相対移動し、上記手振れが補正される。さらに、ＣＣＤ保持部材１０１の右方向への移動に伴って、Ｘ方向スライド溝１０２とＸ方向スライド溝１０３がＸ方向スライダ１０４とＸ方向スライダ１０５に対して右方向に相対移動する。   For example, when camera shake in the left direction in the X direction occurs in the digital camera 10, a current in the direction indicated by the arrow in FIG. 8 flows through the X direction driving coil CX. Then, a linear force FX1 rightward in the X direction is generated on the right side CX1 and the left side CX2, and the reaction force (driving force) of FX1 is applied to the X yoke YXA leftward (at this time, the force is also applied to the upper side CX3 and the lower side CX4). However, since these forces cancel each other, no force is exerted on the X yoke YXA). When the X yoke YXA receives the reaction force of FX2, it is transmitted from the X yoke YXA to the Y-direction link member 119 and the Y-direction link member 122, and the Y-direction link member 119 and the Y-direction link member 122 are maintained in a parallel relationship. 2 rotates about the connecting pin 121 and the connecting pin 123 in the clockwise direction in FIG. Then, the Y-direction link member 119 rotates relative to the Y-direction slider 118, and the Y-direction slide groove 117 maintains the state facing the Y direction. Further, since a rightward moving force is applied from the Y-direction slider 118 to the Y-direction slide groove 117, the CCD holding member 101 and the X-direction slide groove 102 move relative to the right with respect to the fixed support substrate 20, and the camera shake is corrected. Is done. Further, as the CCD holding member 101 moves to the right, the X direction slide groove 102 and the X direction slide groove 103 move relative to the X direction slider 104 and the X direction slider 105 in the right direction.

一方、デジタルカメラ１０にＸ方向右向きの手振れが生じると、Ｘ方向駆動用コイルＣＸには図８の矢線とは逆向きの電流が流れる。すると、右辺ＣＸ１と左辺ＣＸ２にはＸ方向左向きの直線的な力ＦＸ２が生じ、この反力がＸ用ヨークＹＸＡに右向きに掛かる（この際、上辺ＣＸ３と下辺ＣＸ４にも力が生じるが、これらの力は互いに打ち消し合うのでＸ用ヨークＹＸＡには力を及ぼさない）。Ｘ用ヨークＹＸＡがＦＸ２の反力（駆動力）を受けると、この反力がＸ用ヨークＹＸＡからＹ方向リンク部材１１９とＹ方向リンク部材１２２に伝わり、図１１に示すように、Ｙ方向リンク部材１１９とＹ方向リンク部材１２２が連結ピン１２１と連結ピン１２３を中心に図２の反時計方向に回転する。すると、Ｙ方向リンク部材１１９がＹ方向スライダ１１８に対して相対回転し、Ｙ方向スライド溝１１７とＹ方向スライダ１１８はＹ方向を向いた状態を維持する。さらに、Ｙ方向スライダ１１８からＹ方向スライド溝１１７に左方向の移動力が加わるので、ＣＣＤ保持部材１０１及びＸ方向スライド溝１０２が固定支持基板２０に対して左向きに相対移動し、上記手振れが補正される。さらに、ＣＣＤ保持部材１０１の左方向への移動に伴って、Ｘ方向スライド溝１０２とＸ方向スライド溝１０３がＸ方向スライダ１０４とＸ方向スライダ１０５に対して左方向に相対移動する。   On the other hand, when camera shake in the right direction in the X direction occurs in the digital camera 10, a current in the direction opposite to the arrow in FIG. 8 flows through the X direction driving coil CX. Then, a linear force FX2 leftward in the X direction is generated on the right side CX1 and the left side CX2, and this reaction force is applied to the X yoke YXA to the right (at this time, a force is also generated on the upper side CX3 and the lower side CX4. Since these forces cancel each other, they do not exert any force on the Y yoke for X). When the X yoke YXA receives the reaction force (driving force) of FX2, this reaction force is transmitted from the X yoke YXA to the Y direction link member 119 and the Y direction link member 122, and as shown in FIG. The member 119 and the Y-direction link member 122 rotate in the counterclockwise direction in FIG. 2 around the connection pin 121 and the connection pin 123. Then, the Y-direction link member 119 rotates relative to the Y-direction slider 118, and the Y-direction slide groove 117 and the Y-direction slider 118 are maintained in the Y direction. Further, since a leftward moving force is applied from the Y-direction slider 118 to the Y-direction slide groove 117, the CCD holding member 101 and the X-direction slide groove 102 move relative to the left with respect to the fixed support substrate 20, and the above-described camera shake is corrected. Is done. Further, as the CCD holding member 101 moves in the left direction, the X direction slide groove 102 and the X direction slide groove 103 move relative to the X direction slider 104 and the X direction slider 105 in the left direction.

Ｘ用ヨークＹＸＡのＸ方向への直線移動に起因してＣＣＤ保持部材１０１（ＣＣＤ１１）がＸ方向に直線移動するとき、Ｘ用ヨークＹＸＡの移動量とＣＣＤ保持部材１０１（ＣＣＤ１１）の移動量の比は、連結ピン１２１から連結ピン１２６までの直線距離と、連結ピン１２１から連結ピン１２０までの直線距離の比と同じであり、Ｘ用ヨークＹＸＡよりＣＣＤ保持部材１０１（ＣＣＤ１１）が大きく動く。
なお、Ｘ方向駆動用コイルＣＸへの給電を停止すると、その瞬間にＸ方向の動力が失われＸ用ヨークＹＸＡは移動を停止する。また、Ｘ方向駆動用コイルＣＸに流れる電流の大きさと生じる力は比例するので、Ｘ方向駆動用コイルＣＸへ給電する電流を大きくすれば、Ｘ用ヨークＹＸＡに掛かる力は大きくなり、電流を小さくすればＸ用ヨークＹＸＡに掛かる力は小さくなる。 When the CCD holding member 101 (CCD 11) linearly moves in the X direction due to the linear movement of the X yoke YXA in the X direction, the movement amount of the X yoke YXA and the movement amount of the CCD holding member 101 (CCD 11) are The ratio is the same as the ratio of the linear distance from the connecting pin 121 to the connecting pin 126 and the linear distance from the connecting pin 121 to the connecting pin 120, and the CCD holding member 101 (CCD 11) moves more greatly than the X yoke YXA.
When power supply to the X direction driving coil CX is stopped, power in the X direction is lost at that moment, and the X yoke YXA stops moving. In addition, since the magnitude of the current flowing through the X direction driving coil CX is proportional to the generated force, if the current supplied to the X direction driving coil CX is increased, the force applied to the X yoke YXA is increased, and the current is reduced. Then, the force applied to the X yoke YXA is reduced.

このように、Ｙ方向リンク部材１１９が連結ピン１２１を支点とする「てこ」のように機能することにより、Ｘ用ヨークＹＸＡの移動力がＣＣＤ保持部材１０１に伝達される。
そして本実施形態では、連結ピン１２１よりＸ用ヨークＹＸＡ側の部分であるＸ用ヨーク側回転体の自重による連結ピン１２１を中心とする回転モーメントが、ＣＣＤ保持部材１０１、ＣＣＤ保持部材１０１と一体化された部品（ＣＣＤ１１、ローパスフィルタ４２等）、Ｙ方向スライダ１１８、連結ピン１２０、及びＹ方向リンク部材１１９の連結ピン１２１より連結ピン１２０側の部分（これらがステージ部材側回転体）の連結ピン１２１を中心とするステージ部材側回転体の自重による回転モーメントに近づくようにするために、Ｘ用コイル形成板２４とＸ方向駆動用コイルＣＸの合計質量より質量が大きいＸ用ヨークＹＸＡとＸ用磁石ＭＸの結合体をＹ方向リンク部材１１９に枢着している。その結果、Ｘ用ヨーク側回転体の自重による回転モーメントとステージ部材側回転体の自重による回転モーメントが一致しているので、Ｘ用ヨークＹＸＡに掛かる力を大きくするために、Ｘ方向駆動用コイルＣＸに大きな電流を流したり、Ｘ方向駆動用コイルＣＸやＸ用ヨークＹＸＡ（Ｘ用磁石ＭＸ）を大型化しなくても、ＣＣＤ保持部材１０１をＸ方向に円滑に移動させることが可能である。
なお、ＣＣＤ１１のＸ方向とＹ方向への直線移動中、ＣＣＤ１１の撮像面１２は常に光軸Ｏと直交する。 In this way, the Y-direction link member 119 functions like a “lever” with the connecting pin 121 as a fulcrum, so that the moving force of the X yoke YXA is transmitted to the CCD holding member 101.
In this embodiment, the rotational moment about the connecting pin 121 due to the weight of the X-yoke side rotating body, which is the portion on the X yoke YXA side from the connecting pin 121, is integrated with the CCD holding member 101 and the CCD holding member 101. The connected parts (the CCD 11, the low-pass filter 42, etc.), the Y-direction slider 118, the connecting pin 120, and the connecting pin 120 side portion of the connecting pin 121 of the Y-direction link member 119 (these are the stage member side rotating bodies) In order to approach the rotational moment due to the weight of the stage member side rotating body centered on the pin 121, the X yokes YXA and X have masses larger than the total mass of the X coil forming plate 24 and the X direction driving coil CX. The combined body of the magnets MX is pivotally attached to the Y-direction link member 119. As a result, since the rotational moment due to the weight of the X-yoke side rotor matches the rotational moment due to the weight of the stage member-side rotor, the X-direction drive coil is used to increase the force applied to the X yoke YXA. The CCD holding member 101 can be smoothly moved in the X direction without applying a large current to the CX or increasing the size of the X direction driving coil CX or the X yoke YXA (X magnet MX).
During the linear movement of the CCD 11 in the X and Y directions, the imaging surface 12 of the CCD 11 is always orthogonal to the optical axis O.

以上説明した本実施形態は上述した作用効果を奏するだけでなく、Ｘ用コイル形成板２４及びＸ方向駆動用コイルＣＸの合計質量より質量が大きいＸ用ヨークＹＸＡ及びＸ用磁石ＭＸをＹ方向リンク部材１１９とＹ方向リンク部材１２２に接続し、かつ、Ｙ用コイル形成板２６及びＹ方向駆動用コイルＣＹの合計質量より質量が大きいＹ用ヨークＹＹＡ及びＹ用磁石ＭＹをＸ方向リンク部材１０６とＸ方向リンク部材１０９に接続しているので、Ｘ用ヨークＹＸＡ及びＹ用ヨークＹＹＡに錘を付ける必要がないというメリットがある。   The above-described embodiment not only has the above-described effects, but also the X-yoke YXA and the X-magnet MX whose mass is larger than the total mass of the X-coil forming plate 24 and the X-direction driving coil CX are connected to the Y-direction link. The Y yoke YYA and the Y magnet MY, which are connected to the member 119 and the Y direction link member 122 and have a mass larger than the total mass of the Y coil forming plate 26 and the Y direction drive coil CY, are connected to the X direction link member 106. Since it is connected to the X-direction link member 109, there is an advantage that it is not necessary to attach weights to the X yoke YXA and the Y yoke YYA.

上記実施形態ではＹ用ヨーク側回転体（及びＸ用ヨーク側回転体）の自重による回転モーメントと、ステージ部材側回転体の自重による回転モーメントとを一致させたが、１００％を僅かに超える場合や、１００％を僅かに下回る場合においても、１００％の場合と実質的に同質の効果が得られる。
また、一方の回転モーメントに対して他方の回転モーメントが９０％以上かつ１００％未満であっても高い効果が得られる。
なお、上記実施形態に比べると効果は低減するが、一方の回転モーメントに対して他方の回転モーメントが６０％以上かつ９０％未満となるように、Ｙ用ヨークＹＹＡ、Ｙ用磁石ＭＹ、Ｘ用ヨークＹＸＡ及びＸ用磁石ＭＸの質量を設定しても、Ｙ方向駆動用コイルＣＹやＸ方向駆動用コイルＣＸに大きな電流を流したり、Ｙ方向駆動用コイルＣＹ、Ｙ用ヨークＹＹＡ（Ｙ用磁石ＭＹ）、Ｘ方向駆動用コイルＣＸ、及びＸ用ヨークＹＸＡ（Ｘ用磁石ＭＸ）を大型化しなくても、ＣＣＤ保持部材１０１をＸ方向とＹ方向に円滑に移動させることが可能である。 In the above embodiment, the rotational moment due to the weight of the Y yoke-side rotator (and the X yoke-side rotator) is matched with the rotational moment due to the weight of the stage member-side rotator. Even when it is slightly less than 100%, substantially the same effect as in the case of 100% can be obtained.
Further, even if the other rotational moment is 90% or more and less than 100% with respect to one rotational moment, a high effect can be obtained.
Although the effect is reduced as compared with the above-described embodiment, the Y yoke YYA, the Y magnets MY, and X are used so that the other rotational moment is 60% or more and less than 90% with respect to one rotational moment. Even if the masses of the yoke YXA and the X magnet MX are set, a large current flows through the Y direction driving coil CY and the X direction driving coil CX, or the Y direction driving coil CY and the Y yoke YYA (Y magnet) MY), the X direction driving coil CX, and the X yoke YXA (X magnet MX) can be moved smoothly in the X and Y directions without increasing the size.

さらに、Ｙ用ヨークＹＹＡとＸ用ヨークＹＸＡの移動量よりＣＣＤ保持部材１０１（ＣＣＤ１１）の移動量を大きくしながら、Ｙ用ヨークＹＹＡとＸ用ヨークＹＸＡの駆動力をＣＣＤ保持部材１０１に伝達しているので、駆動手段であるＸ用ヨークＹＸＡ、Ｘ用磁石ＭＸ、Ｙ用ヨークＹＹＡ、Ｙ用磁石ＭＹ、Ｘ方向駆動用コイルＣＸ、Ｙ方向駆動用コイルＣＹを従来に比して小型化できる。   Further, the driving force of the Y yoke YYA and the X yoke YXA is transmitted to the CCD holding member 101 while the movement amount of the CCD holding member 101 (CCD 11) is larger than the movement amount of the Y yoke YYA and the X yoke YXA. Therefore, the X yoke YXA, the X magnet MX, the Y yoke YYA, the Y magnet MY, the X direction driving coil CX, and the Y direction driving coil CY, which are driving means, can be reduced in size compared to the conventional one. .

また、Ｘ方向駆動用コイルＣＸとＹ方向駆動用コイルＣＹが、Ｘ方向及びＹ方向と平行な平面状なので、Ｘ方向駆動用コイルＣＸ、Ｙ方向駆動用コイルＣＹの巻き数を多くして大きな動力を得ようとすると、Ｘ方向駆動用コイルＣＸとＹ方向駆動用コイルＣＹはＸ方向とＹ方向に延びる。しかし、Ｘ方向駆動用コイルＣとＹ方向駆動用コイルＣＹの巻き数を多くしても、Ｘ方向駆動用コイルＣＸとＹ方向駆動用コイルＣＹが光軸Ｏ方向には大きくならず、Ｘ用ヨークＹＸＡ、Ｙ用ヨークＹＹＡも光軸Ｏ方向に大型化しないので、デジタルカメラ１０が光軸Ｏ方向に大型化することはない。   In addition, since the X-direction driving coil CX and the Y-direction driving coil CY have a planar shape parallel to the X-direction and the Y-direction, the number of turns of the X-direction driving coil CX and the Y-direction driving coil CY is increased. In order to obtain power, the X direction driving coil CX and the Y direction driving coil CY extend in the X direction and the Y direction. However, even if the number of turns of the X direction driving coil C and the Y direction driving coil CY is increased, the X direction driving coil CX and the Y direction driving coil CY do not increase in the optical axis O direction. Since the yoke YXA and the Y yoke YYA do not increase in size in the optical axis O direction, the digital camera 10 does not increase in size in the optical axis O direction.

次に、本発明の第２の実施形態について、図１３〜図１５を参照しながら説明する。本実施形態の手振れ補正装置３００の基本構造は第１の実施形態の手振れ補正装置１００と同じなので、以下の説明では、第１の実施形態と同じ部材には同じ符合を付すに止めて、その詳細な説明は省略する。   Next, a second embodiment of the present invention will be described with reference to FIGS. Since the basic structure of the camera shake correction apparatus 300 of the present embodiment is the same as that of the camera shake correction apparatus 100 of the first embodiment, in the following description, the same members as those of the first embodiment are designated by the same reference numerals, and Detailed description is omitted.

本実施形態の手振れ補正装置３００では、固定支持基板２０の収容孔３０１が第１の実施形態の収容孔２１より小寸であり、この収容孔３０１に移動可能に嵌合するＣＣＤ保持部材（ステージ部材）３０２も第１の実施形態のＣＣＤ保持部材１０１に比べて小寸である。ＣＣＤ保持部材３０２の後部には背面視（正面視）においてＣＣＤ保持部材３０２より大寸である方形の溝形成部材（ステージ部材）３０３が一体的に設けられている。そして、溝形成部材３０３の前面には、第１の実施形態のＸ方向スライド溝１０２とＸ方向スライド溝１０３とＹ方向スライド溝１１７にそれぞれ対応するＸ方向スライド溝３０５とＸ方向スライド溝３０６とＹ方向スライド溝３０７がそれぞれ凹設されている。図１３に示すように、Ｘ方向スライド溝３０５とＸ方向スライド溝３０６はＸ方向を向く直線状の溝であり、Ｙ方向スライド溝３０７はＹ方向を向く直線状の溝である。Ｘ方向リンク部材１０６とＸ方向リンク部材１０９は溝形成部材３０３の前方に位置しており、Ｘ方向リンク部材１０６とＸ方向リンク部材１０９の後面には、連結ピン１０７と連結ピン１１０によってＸ方向スライダ１０４とＸ方向スライダ１０５が回転可能に枢着されている。Ｘ方向スライダ１０４とＸ方向スライダ１０５は、前方からＸ方向スライド溝３０５とＸ方向スライド溝３０６にそれぞれ嵌合しており、Ｘ方向スライダ１０４とＸ方向スライダ１０５はＸ方向スライド溝３０５とＸ方向スライド溝３０６に対してＸ方向にのみ摺動可能である。さらに、Ｘ方向スライダ１０４とＸ方向スライダ１０５は図示を省略した付勢手段によって常に後方に付勢されており、Ｘ方向スライダ１０４とＸ方向スライダ１０５の上下両面と後面は常にＸ方向スライド溝３０５とＸ方向スライド溝３０６の内面にそれぞれ接触している。さらに、固定支持基板２０の後面に突設された軸受け１６と軸受け１７（いずれも図示略）の位置が、第１の実施形態とは異なっている。即ち、軸受け１６に支持された連結ピン１０８（軸受け１７に支持された連結ピン１１１）から連結ピン１０７（連結ピン１１０）までのＸ方向直線距離より、連結ピン１０８（連結ピン１１１）から連結ピン１１２（連結ピン１１４）までのＸ方向直線距離の方が長くなるように、連結ピン１０８と連結ピン１１１のＸ方向位置（軸受け１６と軸受け１７の突設位置）が決定されている。連結ピン１０８と連結ピン１１１のＸ方向位置は一致しており、かつ、連結ピン１０７と連結ピン１１０のＸ方向位置、及び連結ピン１１２と連結ピン１１４のＸ方向位置は常に一致する。
そして、これらＸ方向スライド溝３０５、Ｘ方向スライド溝３０６、Ｘ方向スライダ１０４、Ｘ方向スライダ１０５、Ｘ方向リンク部材１０６、連結ピン１０７、連結ピン１０８、Ｘ方向リンク部材１０９、連結ピン１１０、連結ピン１１１、連結ピン１１２、連結ピン１１４、Ｙ用ヨークＹＹＡがＹ方向移動量調整伝達手段の構成要素である。 In the camera shake correction apparatus 300 of this embodiment, the accommodation hole 301 of the fixed support substrate 20 is smaller than the accommodation hole 21 of the first embodiment, and a CCD holding member (stage) that is movably fitted in this accommodation hole 301. The member 302 is also smaller than the CCD holding member 101 of the first embodiment. A square groove forming member (stage member) 303 that is larger than the CCD holding member 302 in the rear view (front view) is integrally provided at the rear portion of the CCD holding member 302. On the front surface of the groove forming member 303, an X-direction slide groove 305 and an X-direction slide groove 306 respectively corresponding to the X-direction slide groove 102, the X-direction slide groove 103, and the Y-direction slide groove 117 of the first embodiment. Each Y-direction slide groove 307 is recessed. As shown in FIG. 13, the X-direction slide groove 305 and the X-direction slide groove 306 are linear grooves facing the X direction, and the Y-direction slide groove 307 is a linear groove facing the Y direction. The X-direction link member 106 and the X-direction link member 109 are positioned in front of the groove forming member 303, and the X-direction link member 106 and the X-direction link member 109 are placed on the rear surface by the connecting pin 107 and the connecting pin 110 in the X direction. A slider 104 and an X-direction slider 105 are pivotally attached. The X-direction slider 104 and the X-direction slider 105 are respectively fitted in the X-direction slide groove 305 and the X-direction slide groove 306 from the front, and the X-direction slider 104 and the X-direction slider 105 are in contact with the X-direction slide groove 305 and the X-direction. It can slide only in the X direction with respect to the slide groove 306. Further, the X-direction slider 104 and the X-direction slider 105 are always urged rearward by urging means (not shown), and the upper and lower surfaces and the rear surface of the X-direction slider 104 and the X-direction slider 105 are always X-direction slide grooves 305. And the inner surface of the X-direction slide groove 306, respectively. Furthermore, the positions of a bearing 16 and a bearing 17 (both not shown) protruding from the rear surface of the fixed support substrate 20 are different from those of the first embodiment. That is, the connecting pin 108 (the connecting pin 111) to the connecting pin is determined by the X-direction linear distance from the connecting pin 108 (the connecting pin 111 supported by the bearing 17) supported by the bearing 16 to the connecting pin 107 (the connecting pin 110). The X-direction positions of the connection pin 108 and the connection pin 111 (projection positions of the bearing 16 and the bearing 17) are determined so that the X-direction linear distance to 112 (the connection pin 114) is longer. The X direction positions of the connecting pin 108 and the connecting pin 111 are consistent, and the X direction positions of the connecting pin 107 and the connecting pin 110 and the X direction positions of the connecting pin 112 and the connecting pin 114 are always consistent.
And these X direction slide groove 305, X direction slide groove 306, X direction slider 104, X direction slider 105, X direction link member 106, connection pin 107, connection pin 108, X direction link member 109, connection pin 110, connection The pin 111, the connecting pin 112, the connecting pin 114, and the Y yoke YYA are components of the Y-direction movement amount adjustment transmission means.

Ｙ方向リンク部材１１９とＹ方向リンク部材１２２は溝形成部材３０３の前方に位置しており、Ｙ方向リンク部材１１９の後面に連結ピン１２０によってＹ方向スライダ１１８が、連結ピン１２０回りに回転可能として枢着されている。Ｙ方向スライダ１１８は、前方からＹ方向スライド溝３０７に嵌合しており、Ｙ方向スライダ１１８はＹ方向スライド溝３０７に対してＹ方向にのみ摺動可能である。さらに、Ｙ方向スライダ１１８は図示を省略した付勢手段によって常に後方に付勢されており、Ｙ方向スライダ１１８の左右両面と後面は常にＹ方向スライド溝３０７の内面にそれぞれ接触している。さらに、Ｙ方向リンク部材１１９の回転中心である連結ピン１２１（連結ピン１２１を支持する軸受け１８）と、Ｙ方向リンク部材１２２の回転中心である連結ピン１２３（連結ピン１２３を支持する軸受け１９）のＹ方向位置が第１の実施形態とは異なっている。即ち、連結ピン１２０から連結ピン１２１までのＹ方向直線距離より、連結ピン１２６から連結ピン１２１までのＹ方向直線距離の方が長くなるように連結ピン１２１の位置（軸受け１８の突設位置）が設定されている。連結ピン１２１と連結ピン１２３のＹ方向位置（軸受け１８と軸受け１９のＹ方向位置）は一致しており、連結ピン１２４と連結ピン１２６のＹ方向位置は常に一致する。
そして、これらＹ方向スライド溝３０７、Ｙ方向スライダ１１８、Ｙ方向リンク部材１１９、連結ピン１２０、連結ピン１２１、Ｙ方向リンク部材１２２、連結ピン１２３、連結ピン１２４、連結ピン１２６、Ｘ用ヨークＹＸＡがＸ方向移動量調整伝達手段の構成要素である。 The Y-direction link member 119 and the Y-direction link member 122 are positioned in front of the groove forming member 303, and the Y-direction slider 118 is rotatable around the connection pin 120 by the connection pin 120 on the rear surface of the Y-direction link member 119. It is pivotally attached. The Y-direction slider 118 is fitted in the Y-direction slide groove 307 from the front, and the Y-direction slider 118 can slide only in the Y direction with respect to the Y-direction slide groove 307. Further, the Y-direction slider 118 is always urged rearward by urging means (not shown), and the left and right surfaces and the rear surface of the Y-direction slider 118 are always in contact with the inner surface of the Y-direction slide groove 307, respectively. Further, the connecting pin 121 (bearing 18 that supports the connecting pin 121) that is the rotation center of the Y-direction link member 119 and the connecting pin 123 (bearing 19 that supports the connecting pin 123) that is the rotation center of the Y-direction link member 122. The Y-direction position is different from that of the first embodiment. That is, the position of the connecting pin 121 (the protruding position of the bearing 18) so that the Y-direction linear distance from the connecting pin 126 to the connecting pin 121 is longer than the Y-directional linear distance from the connecting pin 120 to the connecting pin 121. Is set. The connecting pin 121 and the connecting pin 123 have the same Y-direction position (the Y-direction position of the bearing 18 and the bearing 19), and the connecting pin 124 and the connecting pin 126 always have the same Y-direction position.
And these Y direction slide groove 307, Y direction slider 118, Y direction link member 119, connecting pin 120, connecting pin 121, Y direction link member 122, connecting pin 123, connecting pin 124, connecting pin 126, X yoke YXA Is a component of the X-direction movement amount adjustment transmission means.

溝形成部材３０３とＣＣＤ保持部材３０２には、これらに跨る収納用凹部３０９が設けられている。収納用凹部３０９の後面は開口しており、収納用凹部３０９の内部には、第１の実施形態と同様に、ローパスフィルタ４２と押さえ部材４３とＣＣＤ１１が収納されている。収納用凹部３０９の前端は、ＣＣＤ保持部材３０２の前面において開口する採光孔（図示略）と連通している。この採光孔はローパスフィルタ４２より小寸であり、ローパスフィルタ４２がＣＣＤ保持部材３０２の前方に抜け出さないようにしてある。この採光孔とローパスフィルタ４２を通った光は、ＣＣＤ１１の撮像面１２に到達する。さらに、収納用凹部３０９の後面開口部は、溝形成部材３０３の後面に取り付けられたカバー部材３１４（図１３では破断して示している）によって覆われている。
本実施形態においてもＹ用ヨーク側回転体（及びＸ用ヨーク側回転体）の自重による回転モーメントと、ステージ部材側回転体の自重による回転モーメントとが一致するように、Ｙ用ヨークＹＹＡ、Ｙ用磁石ＭＹ、Ｘ用ヨークＹＸＡ及びＸ用磁石ＭＸの質量を設定してある。 The groove forming member 303 and the CCD holding member 302 are provided with a storage recess 309 extending over them. The rear surface of the storage recess 309 is open, and the low pass filter 42, the pressing member 43, and the CCD 11 are stored in the storage recess 309, as in the first embodiment. The front end of the housing recess 309 communicates with a daylighting hole (not shown) that opens at the front surface of the CCD holding member 302. This daylighting hole is smaller than the low-pass filter 42 so that the low-pass filter 42 does not escape to the front of the CCD holding member 302. The light passing through the daylighting hole and the low-pass filter 42 reaches the imaging surface 12 of the CCD 11. Further, the rear opening of the storage recess 309 is covered with a cover member 314 (shown broken in FIG. 13) attached to the rear surface of the groove forming member 303.
Also in the present embodiment, the Y yokes YYA, Y are set so that the rotational moment due to the weight of the Y yoke-side rotating body (and the X yoke-side rotating body) matches the rotational moment due to the weight of the stage member-side rotating body. The masses of the magnet MY, the X yoke YXA, and the X magnet MX are set.

このような構成の手振れ補正装置３００は第１の実施形態の手振れ補正装置１００とほぼ同様の動作をするが、Ｘ方向駆動用コイルＣＸに電流を流してＸ用ヨークＹＸＡをＸ方向に直線移動させた際、Ｘ用ヨークＹＸＡの移動量よりＣＣＤ保持部材３０２と溝形成部材３０３（ＣＣＤ１１）のＸ方向への移動量が小さくなる点が第１の実施形態とは異なる。同様に、Ｙ方向駆動用コイルＣＹに電流を流してＹ用ヨークＹＹＡをＹ方向に直線移動させた際、Ｘ用ヨークＹＸＡの移動量よりＣＣＤ保持部材３０２と溝形成部材３０３（ＣＣＤ１１）のＹ方向への移動量が小さくなる点が第１の実施形態とは異なる。
このようにＸ用ヨークＹＸＡとＹ用ヨークＹＹＡの移動量よりＣＣＤ保持部材３０２と溝形成部材３０３（ＣＣＤ１１）の移動量を小さくしてあるので、ＣＣＤ保持部材３０２と溝形成部材３０３（ＣＣＤ１１）をより細かに精度よく移動させることが可能であり、より正確な手振れ補正動作を実現できる。 The camera shake correction apparatus 300 having such a configuration operates in substantially the same manner as the camera shake correction apparatus 100 of the first embodiment, but a current is passed through the X-direction drive coil CX to linearly move the X yoke YXA in the X direction. In this case, the amount of movement of the CCD holding member 302 and the groove forming member 303 (CCD 11) in the X direction is smaller than the amount of movement of the X yoke YXA, which is different from the first embodiment. Similarly, when a current is passed through the Y-direction drive coil CY and the Y yoke YYA is linearly moved in the Y direction, the Y of the CCD holding member 302 and the groove forming member 303 (CCD 11) is determined by the amount of movement of the X yoke YXA. The difference from the first embodiment is that the amount of movement in the direction is small.
Thus, since the movement amount of the CCD holding member 302 and the groove forming member 303 (CCD11) is smaller than the movement amount of the X yoke YXA and the Y yoke YYA, the CCD holding member 302 and the groove forming member 303 (CCD11). Can be moved more precisely and accurately, and a more accurate camera shake correction operation can be realized.

このように本実施形態では、連結ピン１０８（連結ピン１１１）から連結ピン１０７（連結ピン１１０）までの距離より連結ピン１０８（連結ピン１１１）から連結ピン１１２（連結ピン１１４）までの距離を長く設定しているので、第１の実施形態に比べてＹ用ヨークＹＹＡ及びＹ用磁石ＭＹの合計質量を小さくすることが可能である。即ち、連結ピン１０８（連結ピン１１１）から連結ピン１０７（連結ピン１１０）までの距離と連結ピン１０８（連結ピン１１１）から連結ピン１１２（連結ピン１１４）までの距離の比が変わると、Ｙ用ヨークＹＹＡ及びＹ用磁石ＭＹの合計質量が変化する。同様に、第１の実施形態に比べてＸ用ヨークＹＸＡ及びＸ用磁石ＭＸの合計質量を小さくすることが可能である。
なお、一方の回転モーメントに対して他方の回転モーメントが９０％以上かつ１００％未満とする場合の効果や、６０％以上かつ９０％未満とする場合の効果は第１の実施形態と同様である。 As described above, in this embodiment, the distance from the connection pin 108 (connection pin 111) to the connection pin 112 (connection pin 114) is greater than the distance from the connection pin 108 (connection pin 111) to the connection pin 107 (connection pin 110). Since the length is set longer, the total mass of the Y yoke YYA and the Y magnet MY can be reduced as compared with the first embodiment. That is, if the ratio of the distance from the connecting pin 108 (the connecting pin 111) to the connecting pin 107 (the connecting pin 110) and the distance from the connecting pin 108 (the connecting pin 111) to the connecting pin 112 (the connecting pin 114) changes, The total mass of the yoke YYA and the Y magnet MY changes. Similarly, the total mass of the X yoke YXA and the X magnet MX can be reduced as compared with the first embodiment.
The effect when the other rotation moment is 90% or more and less than 100% with respect to one rotation moment, or the effect when the other rotation moment is 60% or more and less than 90% is the same as in the first embodiment. .

次に、本発明の第３の実施形態について、図１６〜図２２を参照しながら説明する。なお、第１の実施形態と同じ部材には、同じ符合を付すに止めて、その詳細な説明は省略する。
本実施形態の手振れ補正装置４００の特徴は、Ｙ方向駆動用コイルＣＹをＸ方向リンク部材１０６及びＸ方向リンク部材１０９によって移動させられる部材に設けて、Ｙ用ヨークＹＹＢを固定支持基板２０側に設けた点、並びにＸ方向駆動用コイルＣＸをＹ方向リンク部材１１９及びＹ方向リンク部材１２２によって移動させられる部材に設けて、Ｘ用ヨークＹＸＢを固定支持基板２０側に設けた点にある。以下、これらの点を中心に説明する。 Next, a third embodiment of the present invention will be described with reference to FIGS. The same members as those in the first embodiment are given the same reference numerals, and detailed descriptions thereof are omitted.
The camera shake correction apparatus 400 according to the present embodiment is characterized in that the Y-direction drive coil CY is provided on a member that can be moved by the X-direction link member 106 and the X-direction link member 109, and the Y yoke YYB is disposed on the fixed support substrate 20 side. The X-direction drive coil CX is provided on a member that can be moved by the Y-direction link member 119 and the Y-direction link member 122, and the X yoke YXB is provided on the fixed support substrate 20 side. Hereinafter, these points will be mainly described.

Ｘ方向リンク部材１０６及びＸ方向リンク部材１０９の前面の右端部の間には、非作動状態においてＹ方向を向くＹ方向リンク部材１１３の上下両端部が、連結ピン１１２と連結ピン１１４によって枢着されている。Ｘ方向リンク部材１０６とＹ方向リンク部材１１３は連結ピン１１２回りに相対回転可能であり、Ｘ方向リンク部材１０９とＹ方向リンク部材１１３は連結ピン１１４回りに相対回転可能である。
Ｙ方向リンク部材１１３の後面中央部には、横長方形のＹ用コイル形成板４０１が固着されている。Ｙ用コイル形成板４０１の前面には第１の実施形態と同様のＹ方向駆動用コイルＣＹがプリントにより平面コイルとして形成されている。さらに、Ｙ用コイル形成板４０１の後面には、正面形状がＹ用コイル形成板４０１と同一のＹ用錘板（Ｙ用錘）４０３が固着されている。このＹ用錘板４０３は非磁性体からなるものである。 Between the right end portions of the front surfaces of the X-direction link member 106 and the X-direction link member 109, the upper and lower end portions of the Y-direction link member 113 facing the Y direction in the non-actuated state are pivotally attached by the connecting pin 112 and the connecting pin 114. Has been. The X-direction link member 106 and the Y-direction link member 113 can be relatively rotated around the connection pin 112, and the X-direction link member 109 and the Y-direction link member 113 can be relatively rotated around the connection pin 114.
A horizontal rectangular Y coil forming plate 401 is fixed to the center of the rear surface of the Y-direction link member 113. On the front surface of the Y coil forming plate 401, a Y-direction driving coil CY similar to that of the first embodiment is formed as a planar coil by printing. Further, a Y weight plate (Y weight) 403 having the same front shape as that of the Y coil forming plate 401 is fixed to the rear surface of the Y coil forming plate 401. The Y weight plate 403 is made of a non-magnetic material.

Ｙ方向リンク部材１１９及びＹ方向リンク部材１２２の前面の下端部の間には、非作動状態においてＸ方向を向くＸ方向リンク部材１２５の左右両端部が、連結ピン１２６と連結ピン１２４によって枢着されている。Ｙ方向リンク部材１１９とＸ方向リンク部材１２５は連結ピン１２６回りに相対回転可能であり、Ｙ方向リンク部材１２２とＸ方向リンク部材１２５は連結ピン１２４回りに相対回転可能である。
Ｘ方向リンク部材１２５の後面中央部には、上下方向に長い長方形状のＸ用コイル形成板（Ｘ方向移動部材）４０５が固着されている。Ｘ用コイル形成板４０５の前面には第１の実施形態と同様のＸ方向駆動用コイルＣＸがプリントにより平面コイルとして形成されている。さらに、Ｘ用コイル形成板４０５の後面には、正面形状がＸ用コイル形成板４０５と同一のＸ用錘板４０７が固着されている。このＸ用錘板４０７は非磁性体からなるものである。 Between the lower ends of the front surfaces of the Y-direction link member 119 and the Y-direction link member 122, the left and right end portions of the X-direction link member 125 facing the X direction in the non-actuated state are pivotally attached by the connection pin 126 and the connection pin 124. Has been. The Y-direction link member 119 and the X-direction link member 125 can be relatively rotated around the connection pin 126, and the Y-direction link member 122 and the X-direction link member 125 can be relatively rotated around the connection pin 124.
A rectangular X coil forming plate (X direction moving member) 405 that is long in the vertical direction is fixed to the center of the rear surface of the X direction link member 125. On the front surface of the X coil forming plate 405, an X direction driving coil CX similar to that of the first embodiment is formed as a planar coil by printing. Further, an X weight plate 407 having the same front shape as the X coil forming plate 405 is fixed to the rear surface of the X coil forming plate 405. The X weight plate 407 is made of a non-magnetic material.

本実施形態の固定支持基板２０には凹部２２と凹部２５は凹設されておらず、これらと対応する位置に、共に金属（軟鉄）等の磁性体からなり、かつ共に断面形状がコ字形をなすＹ用ヨークＹＹＢとＸ用ヨークＹＸＢが固着されている。
Ｙ用ヨークＹＹＢは、固定支持基板２０に固着された前板部ＹＹＢ１と、前板部ＹＹＢ１と平行な後板部ＹＹＢ２を具備する。前板部ＹＹＢ１の後面には、Ｎ極とＳ極がＹ方向に並ぶＹ用磁石ＭＹが固着されている。Ｙ用コイル形成板（Ｙ方向移動部材）４０１及びＹ用錘板４０３（Ｙ用錘）は、前板部ＹＹＢ１と後板部ＹＹＢ２の間に位置している。さらに、Ｙ用磁石ＭＹのＮ極とＹ方向駆動用コイルＣＹの上辺ＣＹ３は常にＺ方向の重合関係を維持し、Ｙ用磁石ＭＹのＳ極とＹ方向駆動用コイルＣＹの下辺ＣＹ４は常にＺ方向の重合関係を維持する。
Ｘ用ヨークＹＸＢは、固定支持基板２０に固着された前板部ＹＸＢ１と、前板部ＹＸＢ１と平行な後板部ＹＸＢ２を具備する。前板部ＹＸＢ１の後面には、Ｎ極とＳ極がＸ方向に並ぶＸ用磁石ＭＸが固着されている。Ｘ用コイル形成板（Ｘ方向移動部材）４０５及びＸ用錘板（Ｘ用錘）４０７は、前板部ＹＸＢ１と後板部ＹＸＢ２の間に位置している。さらに、Ｘ用磁石ＭＸのＮ極とＸ方向駆動用コイルＣＸの右辺ＣＸ１は常にＺ方向の重合関係を維持し、Ｘ用磁石ＭＸのＳ極とＸ方向駆動用コイルＣＸの左辺ＣＸ２は常にＺ方向の重合関係を維持する。 The fixed support substrate 20 of the present embodiment is not provided with the concave portion 22 and the concave portion 25, both of which are made of a magnetic material such as metal (soft iron) and have a U-shaped cross section. The Y yoke YYB and the X yoke YXB are fixed.
The Y yoke YYB includes a front plate portion YYB1 fixed to the fixed support substrate 20, and a rear plate portion YYB2 parallel to the front plate portion YYB1. On the rear surface of the front plate portion YYB1, a Y magnet MY in which an N pole and an S pole are arranged in the Y direction is fixed. The Y coil forming plate (Y-direction moving member) 401 and the Y weight plate 403 (Y weight) are located between the front plate portion YYB1 and the rear plate portion YYB2. Further, the N pole of the Y magnet MY and the upper side CY3 of the Y direction driving coil CY always maintain the overlapping relationship in the Z direction, and the S pole of the Y magnet MY and the lower side CY4 of the Y direction driving coil CY are always Z. Maintain directional polymerization relationship.
The X yoke YXB includes a front plate portion YXB1 fixed to the fixed support substrate 20, and a rear plate portion YXB2 parallel to the front plate portion YXB1. An X magnet MX in which N and S poles are arranged in the X direction is fixed to the rear surface of the front plate portion YXB1. The X coil forming plate (X direction moving member) 405 and the X weight plate (X weight) 407 are positioned between the front plate portion YXB1 and the rear plate portion YXB2. Further, the N pole of the X magnet MX and the right side CX1 of the X direction driving coil CX always maintain a superposition relationship in the Z direction, and the S pole of the X magnet MX and the left side CX2 of the X direction driving coil CX are always Z. Maintain directional polymerization relationship.

ＣＣＤ保持部材１０１の後面には、図１９に示すカバー板４４の方形部３５が固定されている。図１６〜図１８に示すように、カバー板４４の舌片３６の先端部はＹ用ヨークＹＹＢ内に位置しており、図１６に示すように、カバー板４４の舌片３７の先端部はＸ用ヨークＹＸＢ内に位置している。さらに、舌片３６の先端部の前面には、Ｙ用磁石ＭＹとＹ用ヨークＹＹＢの後板部ＹＹＢ２の間の磁束を利用してカバー板４４（ＣＣＤ１１）のＹ方向の位置変化を検出するＹ方向ホール素子３９が固着されている。一方、舌片３７の先端部の前面には、Ｘ用磁石ＭＸとＸ用ヨークＹＸＢの後板部ＹＸＢ２の間の磁束を利用してカバー板４４（ＣＣＤ１１）のＸ方向の位置変化を検出するＸ方向ホール素子３８が固着されている。   A square portion 35 of the cover plate 44 shown in FIG. 19 is fixed to the rear surface of the CCD holding member 101. 16-18, the tip of the tongue piece 36 of the cover plate 44 is located in the Y yoke YYB. As shown in FIG. 16, the tip of the tongue piece 37 of the cover plate 44 is It is located in the X yoke YXB. Further, a change in the position of the cover plate 44 (CCD 11) in the Y direction is detected on the front surface of the tip of the tongue piece 36 by using a magnetic flux between the Y magnet MY and the rear plate YYB2 of the Y yoke YYB. The Y-direction hall element 39 is fixed. On the other hand, a change in position of the cover plate 44 (CCD 11) in the X direction is detected on the front surface of the tip of the tongue piece 37 by using the magnetic flux between the X magnet MX and the rear plate YXB2 of the X yoke YXB. An X-direction Hall element 38 is fixed.

次に、手振れ補正装置４００の手振れ補正動作について説明する。
本実施形態の動作も図１２の制御回路ブロック図に従って行われる。ただし本実施形態では、Ｘ方向ホール素子３８がＣＣＤ保持部材１０１及びＣＣＤ１１のＸ方向の位置変化量を検出しているので、積分回路９２の出力（デジタルカメラ１０のＸ方向の振動量）とＸ方向ホール素子３８の出力（ＣＣＤ１１のデジタルカメラ１０に対するＸ方向の移動量）が誤差増幅器９４で直接比較される（ＣＣＤ１１とＸ用ヨークＹＸＢの移動量比の乗算は行わない）。同様に、Ｙ方向ホール素子３９がＣＣＤ保持部材１０１及びＣＣＤ１１のＹ方向の位置変化量を検出しているので、積分回路（制御手段）９３の出力（デジタルカメラ１０のＹ方向の振動量）とＹ方向ホール素子３９の出力（ＣＣＤ１１のデジタルカメラ１０に対するＹ方向の移動量）が誤差増幅器（制御手段）９５で直接比較される（ＣＣＤ１１とＹ用ヨークＹＹＢの移動量比の乗算は行わない）。 Next, the camera shake correction operation of the camera shake correction apparatus 400 will be described.
The operation of this embodiment is also performed according to the control circuit block diagram of FIG. However, in the present embodiment, since the X-direction Hall element 38 detects the amount of change in position of the CCD holding member 101 and the CCD 11 in the X direction, the output of the integrating circuit 92 (the amount of vibration in the X direction of the digital camera 10) and the X The output of the direction hall element 38 (the amount of movement of the CCD 11 in the X direction with respect to the digital camera 10) is directly compared by the error amplifier 94 (the multiplication of the movement amount ratio of the CCD 11 and the X yoke YXB is not performed). Similarly, since the Y-direction hall element 39 detects the amount of change in position of the CCD holding member 101 and the CCD 11 in the Y direction, the output of the integrating circuit (control means) 93 (the vibration amount of the digital camera 10 in the Y direction) and The output of the Y-direction hall element 39 (the amount of movement of the CCD 11 in the Y direction relative to the digital camera 10) is directly compared by the error amplifier (control means) 95 (the multiplication of the movement amount ratio of the CCD 11 and Y yoke YYB is not performed). .

仮にＹ方向の手振れがデジタルカメラ１０に生じると、Ｙ方向駆動用コイルＣＹに電流が流れ、Ｙ方向駆動用コイルＣＹに生じたＹ方向の駆動力によりＹ用コイル形成板４０１及びＹ用錘板４０３がＹ方向に移動する（図２１参照）。そして、この移動力が第１の実施形態と同様にＸ方向リンク部材１０６、Ｘ方向リンク部材１０９、Ｘ方向スライダ１０４、及びＸ方向スライダ１０５を介してＣＣＤ保持部材１０１に伝わり、ＣＣＤ保持部材１０１及びＣＣＤ１１がＹ方向に移動し、Ｙ方向の手振れが補正される。
一方、Ｘ方向の手振れがデジタルカメラ１０に生じると、Ｘ方向駆動用コイルＣＸに電流が流れ、Ｘ方向駆動用コイルＣＸに生じたＸ方向の駆動力によりＸ用コイル形成板４０５及びＸ用錘板４０７がＸ方向に移動する（図２２参照）。そして、この移動力が第１の実施形態と同様にＹ方向スライダ１１８とＹ方向リンク部材１１９を介してＣＣＤ保持部材１０１に伝わり、ＣＣＤ保持部材１０１及びＣＣＤ１１がＸ方向に移動し、Ｘ方向の手振れが補正される。 If camera shake in the Y direction occurs in the digital camera 10, a current flows through the Y direction driving coil CY, and the Y coil forming plate 401 and the Y weight plate are driven by the Y direction driving force generated in the Y direction driving coil CY. 403 moves in the Y direction (see FIG. 21). This moving force is transmitted to the CCD holding member 101 via the X-direction link member 106, the X-direction link member 109, the X-direction slider 104, and the X-direction slider 105 in the same manner as in the first embodiment. Then, the CCD 11 moves in the Y direction, and the camera shake in the Y direction is corrected.
On the other hand, when camera shake in the X direction occurs in the digital camera 10, current flows through the X direction driving coil CX, and the X coil forming plate 405 and the X weight are generated by the X direction driving force generated in the X direction driving coil CX. The plate 407 moves in the X direction (see FIG. 22). This moving force is transmitted to the CCD holding member 101 via the Y-direction slider 118 and the Y-direction link member 119 as in the first embodiment, and the CCD holding member 101 and the CCD 11 move in the X direction. Camera shake is corrected.

本実施形態では、Ｙ用コイル形成板４０１、Ｙ用錘板４０３、Ｙ方向駆動用コイルＣＹ、連結ピン１１２、Ｙ方向リンク部材１１３、連結ピン１１４、Ｘ方向リンク部材１０６の連結ピン１０８よりＹ方向リンク部材１１３側の部分、及びＸ方向リンク部材１０９の枢着ピン１１１よりＹ方向リンク部材１１３側の部分（これらがＹ方向移動部材側回転体）の連結ピン１０８と枢着ピン１１１を中心とするＹ方向移動部材側回転体の自重による回転モーメントと、ＣＣＤ保持部材１０１、ＣＣＤ保持部材１０１と一体化された部品（ＣＣＤ１１、ローパスフィルタ４２等）、Ｘ方向スライダ１０４、Ｘ方向スライダ１０５、枢着ピン１０７、連結ピン１１０、Ｘ方向リンク部材１０６の連結ピン１０８より枢着ピン１０７側の部分、及びＸ方向リンク部材１０９の枢着ピン１１１より連結ピン１１０側の部分（ステージ部材側回転体）の連結ピン１０８と枢着ピン１１１を中心とするステージ部材側回転体の自重による回転モーメントとが一致するように、Ｙ用錘板４０３の質量が設定されている。即ち、Ｙ用錘板４０３が無ければＹ方向移動部材側回転体の自重による回転モーメントはステージ部材側回転体の自重による回転モーメントより小さいが、Ｙ用錘板４０３を設けることにより、Ｙ方向移動部材側回転体の自重による回転モーメントとステージ部材側回転体の自重による回転モーメントを一致させている。従って、Ｙ用コイル形成板４０１及びＹ用錘板４０３に掛かる力を大きくするために、Ｙ方向駆動用コイルＣＹに大きな電流を流したり、Ｙ方向駆動用コイルＣＹやＹ用ヨークＹＹＢ（Ｙ用磁石ＭＹ）を大型化しなくても、ＣＣＤ保持部材１０１をＹ方向に円滑に移動させることが可能である。   In the present embodiment, the Y coil forming plate 401, the Y weight plate 403, the Y direction driving coil CY, the connecting pin 112, the Y direction link member 113, the connecting pin 114, and the connecting pin 108 of the X direction link member 106 are Y. The direction link member 113 side portion and the link pin 108 and the pivot pin 111 on the Y direction link member 113 side from the pivot pin 111 of the X direction link member 109 (these are the Y direction moving member side rotating bodies) are centered. Rotating moment due to the weight of the Y-direction moving member-side rotating body and the CCD holding member 101, components integrated with the CCD holding member 101 (CCD 11, low-pass filter 42, etc.), X-direction slider 104, X-direction slider 105, The pivot pin 107, the coupling pin 110, the portion of the X-direction link member 106 closer to the pivot pin 107 than the coupling pin 108, and the X direction The connecting pin 108 of the link member 109 on the side of the connecting pin 110 (the rotating member on the stage member side) with respect to the connecting pin 110 and the rotational moment due to the weight of the rotating member on the stage member side centered on the pivoting pin 111 are matched. In addition, the mass of the Y weight plate 403 is set. That is, if the Y weight plate 403 is not provided, the rotational moment due to the weight of the Y-direction moving member-side rotating body is smaller than the rotational moment due to the weight of the stage member-side rotating body. The rotational moment due to the weight of the member-side rotating body is matched with the rotational moment due to the weight of the stage-member-side rotating body. Therefore, in order to increase the force applied to the Y coil forming plate 401 and the Y weight plate 403, a large current is passed through the Y direction driving coil CY or the Y direction driving coil CY or the Y yoke YYB (Y The CCD holding member 101 can be smoothly moved in the Y direction without increasing the size of the magnet MY).

同様に、Ｘ用コイル形成板４０５、Ｘ用錘板４０７、Ｙ方向リンク部材１２２、連結ピン１２４、Ｘ方向リンク部材１２５、連結ピン１２６、及びＹ方向リンク部材１１９の連結ピン１２１よりＸ方向リンク部材１２５側の部分（これらがＸ方向移動部材側回転体）の連結ピン１２１を中心とするＸ方向移動部材側回転体の自重による回転モーメントと、ＣＣＤ保持部材１０１、ＣＣＤ保持部材１０１と一体化された部品（ＣＣＤ１１、ローパスフィルタ４２等）、Ｙ方向スライダ１１８、連結ピン１２０、及びＹ方向リンク部材１１９の連結ピン１２１より連結ピン１２０側の部分（これらがステージ部材側回転体）の連結ピン１２１を中心とするステージ部材側回転体の自重による回転モーメントとが一致するように、Ｘ用錘板４０７の質量が設定されている。即ち、Ｘ用錘板４０７が無ければＸ方向移動部材側回転体の自重による回転モーメントはステージ部材側回転体の自重による回転モーメントより小さいが、Ｘ用錘板４０７を設けることにより、Ｙ方向移動部材側回転体の自重による回転モーメントとステージ部材側回転体の自重による回転モーメントを一致させている。従って、Ｘ用コイル形成板４０５に掛かる力を大きくするために、Ｘ方向駆動用コイルＣＸに大きな電流を流したり、Ｘ方向駆動用コイルＣＸやＸ用ヨークＹＸＢ（Ｘ用磁石ＭＸ）を大型化しなくても、ＣＣＤ保持部材１０１をＸ方向に円滑に移動させることが可能である。   Similarly, the X coil link plate 405, the X weight plate 407, the Y direction link member 122, the connecting pin 124, the X direction link member 125, the connecting pin 126, and the connecting pin 121 of the Y direction link member 119 are linked to the X direction link. The rotation moment due to the weight of the X-direction moving member-side rotating body around the connecting pin 121 in the part on the member 125 side (these are the X-direction moving member-side rotating body) and the CCD holding member 101 and the CCD holding member 101 are integrated. Connecting pin (CCD 11, low-pass filter 42, etc.), Y-direction slider 118, connecting pin 120, and connecting pin 120 side portion of connecting pin 121 of Y-direction link member 119 (these are stage member side rotating bodies) 121 of the weight plate for X so that the rotational moment by the dead weight of the stage member side rotating body centering on 121 coincides. The amount has been set. In other words, if the X weight plate 407 is not provided, the rotational moment due to the weight of the X-direction moving member-side rotating body is smaller than the rotational moment due to the weight of the stage member-side rotating body. The rotational moment due to the weight of the member-side rotating body is matched with the rotational moment due to the weight of the stage-member-side rotating body. Therefore, in order to increase the force applied to the X coil forming plate 405, a large current is passed through the X direction driving coil CX, or the X direction driving coil CX and the X yoke YXB (X magnet MX) are enlarged. Even without this, the CCD holding member 101 can be smoothly moved in the X direction.

なお、Ｙ用錘板４０３及びＸ用錘板４０７を用いることによっても、一方の回転モーメントと他方の回転モーメントが完全に釣り合わず、僅かにずれていても、完全に釣り合ってる場合と実質的に同質の効果が得られる。
さらに、Ｙ用錘板４０３及びＸ用錘板４０７を用いた結果、一方の回転モーメントが他方の回転モーメントの９０％以上かつ１００％未満とする場合の効果や、６０％以上かつ９０％未満とする場合の効果は第１の実施形態と同様である。 It should be noted that even if the Y weight plate 403 and the X weight plate 407 are used, even if one rotational moment and the other rotational moment are not completely balanced, and slightly shifted, they are substantially balanced. A homogeneous effect can be obtained.
Further, as a result of using the Y weight plate 403 and the X weight plate 407, the effect when one rotation moment is 90% or more and less than 100% of the other rotation moment, or 60% or more and less than 90%. The effect of doing this is the same as in the first embodiment.

最後に、本発明の第４の実施形態について、図２３を参照しながら説明する。なお、第２の実施形態と同じ部材には、同じ符合を付すに止めて、その詳細な説明は省略する。
本実施形態の手振れ補正装置５００の基本構成は第２の実施形態と同様であるが以下の点が異なる。即ち、第３の実施形態と同様に、Ｙ方向駆動用コイルＣＹをＸ方向リンク部材１０６及びＸ方向リンク部材１０９によって移動させられるＹ用コイル形成板４０１に設けて、Ｙ用ヨークＹＹＢを固定支持基板２０側に設けた点、並びにＸ方向駆動用コイルＣＸをＹ方向リンク部材１１９及びＹ方向リンク部材１２２によって移動させられるＸ用コイル形成板４０５に設けて、Ｘ用ヨークＹＸＢを固定支持基板２０側に設けた点、溝形成部材３０３に舌片３６と舌片３７に対応する舌片３１２と舌片３１３を突設し、その先端部前面にＹ方向ホール素子３９とＸ方向ホール素子３８を固着した点が異なる。
手振れ補正装置５００の動作は第３の実施形態と同様である。
そして、本実施形態でも各回転中心（連結ピン１０８、枢着ピン１１１、連結ピン１２１）の両側の回転モーメント同士の関係が第３の実施形態と同じとなるように、Ｙ用錘板４０３及びＸ用錘板４０７の質量を設定してある。
この実施形態では、Ｙ用ヨークＹＹＢ及びＹ用磁石ＭＹの合計質量と、Ｘ用ヨークＹＸＢ及びＸ用磁石ＭＸの合計質量を第３の実施形態に比べて小さくすることが可能である。 Finally, a fourth embodiment of the present invention will be described with reference to FIG. The same members as those in the second embodiment are given the same reference numerals, and detailed descriptions thereof are omitted.
The basic configuration of the camera shake correction apparatus 500 of the present embodiment is the same as that of the second embodiment, except for the following points. That is, as in the third embodiment, the Y-direction driving coil CY is provided on the Y-coil forming plate 401 that is moved by the X-direction link member 106 and the X-direction link member 109, and the Y yoke YYB is fixedly supported. The point provided on the substrate 20 side, and the X direction driving coil CX are provided on the X coil forming plate 405 moved by the Y direction link member 119 and the Y direction link member 122, and the X yoke YXB is fixed to the fixed support substrate 20. The tongue piece 312 and the tongue piece 313 corresponding to the tongue piece 36 and the tongue piece 37 are projected from the groove forming member 303, and the Y-direction Hall element 39 and the X-direction Hall element 38 are provided on the front surface of the tip portion. It is different in the point of fixation.
The operation of the camera shake correction apparatus 500 is the same as that of the third embodiment.
Also in this embodiment, the Y weight plate 403 and the Y weight plate 403 are set so that the rotational moments on both sides of each rotation center (the connecting pin 108, the pivot pin 111, and the connecting pin 121) are the same as those in the third embodiment. The mass of the X weight plate 407 is set.
In this embodiment, the total mass of the Y yoke YYB and the Y magnet MY and the total mass of the X yoke YXB and the X magnet MX can be made smaller than in the third embodiment.

第３及び第４の実施形態においてＹ用コイル形成板４０１以外のＹ方向移動部材側回転体の構成要素にＹ用錘板４０３を固定したり、Ｘ用コイル形成板４０５以外のＸ方向移動部材側回転体の構成要素にＸ用錘板４０７を固定して、回転モーメントを調整できるのは言うまでもない。
第３及び第４の実施形態では、Ｙ用錘板４０３及びＸ用錘板４０７が無い場合は、Ｘ方向移動部材側回転体の自重による回転モーメント及びＹ方向移動部材側回転体の自重による回転モーメントがステージ部材側回転体の自重による回転モーメントより小さいので、Ｘ方向移動部材側回転体にＸ用錘板４０７を設け、Ｙ方向移動部材側回転体にＹ用錘板４０３を設けた。しかし、ステージ部材側回転体の自重による回転モーメントの方がＸ方向移動部材側回転体の自重による回転モーメント及びＹ方向移動部材側回転体の自重による回転モーメントより小さい場合は、ステージ部材側回転体に錘板（錘）を設けて回転モーメントを調整できるのは言うまでもない。
さらに、第１及び第２の実施形態において、Ｙ用ヨーク側回転体の自重による回転モーメント及びＸ用ヨーク側回転体の自重による回転モーメントがステージ部材側回転体の自重による回転モーメントより小さい場合は、Ｘ用ヨーク側回転体にＸ用錘板４０７を設け、Ｙ用ヨーク側回転体にＹ用錘板４０３を設けて回転モーメントを調整してもよい。また、Ｙ用ヨーク側回転体の自重による回転モーメント及びＸ用ヨーク側回転体の自重による回転モーメントよりステージ部材側回転体の自重による回転モーメントが小さい場合は、ステージ部材側回転体に錘板（錘）を設けて回転モーメントを調整してもよい。 In the third and fourth embodiments, the Y weight plate 403 is fixed to the constituent elements of the Y direction moving member side rotating body other than the Y coil forming plate 401, or the X direction moving member other than the X coil forming plate 405 is used. Needless to say, the rotational moment can be adjusted by fixing the X weight plate 407 to the component of the side rotating body.
In the third and fourth embodiments, when the Y weight plate 403 and the X weight plate 407 are not provided, the rotation moment due to the own weight of the X direction moving member side rotating body and the rotation due to the own weight of the Y direction moving member side rotating body. Since the moment is smaller than the rotational moment due to the weight of the stage member side rotating body, the X weight plate 407 is provided on the X direction moving member side rotating body, and the Y weight plate 403 is provided on the Y direction moving member side rotating body. However, if the rotational moment due to the weight of the stage member side rotating body is smaller than the rotational moment due to the weight of the X direction moving member side rotating body and the rotating moment due to the weight of the Y direction moving member side rotating body, the stage member side rotating body Needless to say, the rotation moment can be adjusted by providing a weight plate (weight).
Furthermore, in the first and second embodiments, when the rotational moment due to the weight of the Y yoke-side rotator and the rotational moment due to the weight of the X yoke-side rotator are smaller than the rotational moment due to the weight of the stage member-side rotator. The X moment plate 407 may be provided on the X yoke side rotating body, and the Y weight plate 403 may be provided on the Y yoke side rotating body to adjust the rotational moment. When the rotational moment due to the weight of the stage member side rotating body is smaller than the rotational moment due to the weight of the Y side rotating body for the Y and the rotating moment due to the own weight of the Y side rotating body for the X, the weight plate ( A rotation weight may be adjusted by providing a weight.

以上、上記各実施形態に基づいて本発明を説明したが、本発明はこれら各実施形態に限定されるものではなく、様々な変形を施して実施可能である。
例えば、上記両実施形態では、ＣＣＤ保持部材１０１やＣＣＤ保持部材３０２にＣＣＤ１１を固定しているが、例えば図２４に示すように、ＣＣＤ１１を固定支持基板２０の後方に配設し、ＣＣＤ保持部材１０１（ＣＣＤ保持部材３０２と溝形成部材３０３）に円形の取付孔１０１ａを穿設して、この取付孔１０１ａに補正レンズＣＬを嵌合固定し、この補正レンズＣＬをレンズＬ１とレンズＬ２の間（またはレンズＬ２とレンズＬ３の間）に配置させて実施してもよい。このような構造として補正レンズＣＬをＸ方向とＹ方向に直進移動させても、手振れ補正を行うことが可能である。さらに、このような補正レンズＣＬを用いた手振れ補正装置は、ＣＣＤ１１を省略することにより、銀塩カメラにも適用可能となる。
また、ＣＣＤ以外の撮像素子、例えばＣＭＯＳイメージセンサを利用することは勿論可能である。
さらに、各実施形態ではＸ方向及びＹ方向の位置変化検出センサとしてホール素子を利用したが、ホール素子以外のセンサ、例えばＭＲセンサやＭＩセンサを利用することも可能である。 As mentioned above, although this invention was demonstrated based on said each embodiment, this invention is not limited to these each embodiment, It can implement by giving various deformation | transformation.
For example, in both the above embodiments, the CCD 11 is fixed to the CCD holding member 101 and the CCD holding member 302. For example, as shown in FIG. 24, the CCD 11 is disposed behind the fixed support substrate 20, and the CCD holding member. 101 (CCD holding member 302 and groove forming member 303) is provided with a circular mounting hole 101a, and a correction lens CL is fitted and fixed in this mounting hole 101a. The correction lens CL is fixed between lens L1 and lens L2. (Or between the lens L2 and the lens L3). With this structure, it is possible to perform camera shake correction even when the correction lens CL is moved straight in the X direction and the Y direction. Furthermore, a camera shake correction apparatus using such a correction lens CL can be applied to a silver salt camera by omitting the CCD 11.
It is of course possible to use an image sensor other than a CCD, for example, a CMOS image sensor.
Further, in each embodiment, the Hall element is used as the position change detection sensor in the X direction and the Y direction. However, a sensor other than the Hall element, for example, an MR sensor or an MI sensor may be used.

以上は、本発明のステージ装置を手振れ補正装置１００、手振れ補正装置３００、手振れ補正装置４００、手振れ補正装置５００に利用した実施形態であるが、本発明のステージ装置の用途は手振れ補正装置１００、手振れ補正装置３００、手振れ補正装置４００、手振れ補正装置５００に限定されず、ＣＣＤ保持部材１０１等のＸ方向とＹ方向に移動可能な部材をＸ方向とＹ方向に直線的に移動させる様々な装置に利用可能である。   The above is an embodiment in which the stage apparatus of the present invention is used for the camera shake correction apparatus 100, the camera shake correction apparatus 300, the camera shake correction apparatus 400, and the camera shake correction apparatus 500. The application of the stage apparatus of the present invention is the camera shake correction apparatus 100, The present invention is not limited to the camera shake correction apparatus 300, the camera shake correction apparatus 400, and the camera shake correction apparatus 500, but various apparatuses that linearly move members that can move in the X direction and the Y direction, such as the CCD holding member 101, in the X direction and the Y direction. Is available.

本発明の第１の実施形態である手振れ補正装置を内蔵したデジタルカメラの縦断側面図である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a vertical side view of a digital camera including a camera shake correction device according to a first embodiment of the present invention. 手振れ補正装置の非作動状態を、カバー板の一部を破断して示す背面図である。It is a rear view which fractures | ruptures a part of cover plate and shows the non-operation state of a camera shake correction apparatus. 図２のIII−III矢線に沿う断面図である。It is sectional drawing which follows the III-III arrow line of FIG. 図２のIV−IV矢線に沿う断面図である。It is sectional drawing which follows the IV-IV arrow line of FIG. 図２のＶ−Ｖ矢線に沿う断面図である。It is sectional drawing which follows the VV arrow line of FIG. 図２のVI−VI矢線に沿う断面図である。It is sectional drawing which follows the VI-VI arrow line of FIG. 手振れ補正装置の分解斜視図である。It is a disassembled perspective view of a camera-shake correction apparatus. Ｘ方向駆動装置の主要部を模式的に示す拡大図である。It is an enlarged view which shows typically the principal part of a X direction drive device. Ｙ方向駆動装置の主要部を模式的に示す拡大図である。It is an enlarged view which shows typically the principal part of a Y direction drive device. Ｙ方向上方への手振れが生じたときの手振れ補正装置を、カバー板の一部を破断して示す背面図である。It is a rear view which shows a camera shake correction apparatus when a camera shake upward in the Y direction occurs, with a part of a cover plate cut away. Ｘ方向右側への手振れが生じたときの手振れ補正装置を、カバー板の一部を破断して示す背面図である。It is a rear view which shows a camera shake correction device when a camera shake to the right in the X direction occurs, with a part of a cover plate cut away. 制御回路ブロック図である。It is a control circuit block diagram. 本発明の第２の実施形態である手振れ補正装置の非作動状態を、カバー板の一部を破断して示す背面図である。It is a rear view which shows the non-operation state of the camera-shake correction apparatus which is the 2nd Embodiment of this invention, fracture | ruptures a part of cover plate. 図１３のXIV−XIV矢線に沿う断面図である。It is sectional drawing which follows the XIV-XIV arrow line of FIG. 図１３のXV−XV矢線に沿う断面図である。It is sectional drawing which follows the XV-XV arrow line of FIG. 本発明の第３の実施形態である手振れ補正装置の非作動状態を、カバー板の一部を破断して示す背面図である。It is a rear view which fractures | ruptures a part of cover plate and shows the non-operation state of the camera-shake correction apparatus which is the 3rd Embodiment of this invention. 図１６のXVII−XVII矢線に沿う断面図である。It is sectional drawing which follows the XVII-XVII arrow line of FIG. 図１６のXVIII−XVIII矢線に沿う断面図である。It is sectional drawing which follows the XVIII-XVIII arrow line of FIG. カバー部材の正面図である。It is a front view of a cover member. 手振れ補正装置の分解斜視図である。It is a disassembled perspective view of a camera-shake correction apparatus. Ｙ方向上方への手振れが生じたときの手振れ補正装置を、カバー板の一部を破断して示す背面図である。It is a rear view which shows a camera shake correction apparatus when a camera shake upward in the Y direction occurs, with a part of a cover plate cut away. Ｘ方向右側への手振れが生じたときの手振れ補正装置を、カバー板の一部を破断して示す背面図である。It is a rear view which shows a camera shake correction device when a camera shake to the right in the X direction occurs, with a part of a cover plate cut away. 本発明の第４の実施形態である手振れ補正装置の非作動状態を、カバー板の一部を破断して示す背面図である。It is a rear view which fractures | ruptures a part of cover plate and shows the non-operation state of the camera-shake correction apparatus which is the 4th Embodiment of this invention. 補正レンズを用いた変形例を模式的に示す側面図である。It is a side view which shows typically the modification using a correction lens.

符号の説明Explanation of symbols

１０ デジタルカメラ（カメラ）
１１ ＣＣＤ（撮像素子）
１２ 撮像面
１６ １７ １８ １９ 軸受け
２０ 固定支持基板
２１ 収容孔
２２ 凹部
２４ Ｘ用コイル形成板
２５ 凹部
２６ Ｙ用コイル形成板
３３ カバー板
３８ Ｘ方向ホール素子
３９ Ｙ方向ホール素子
４１ 採光孔
４２ ローパルフィルタ
４３ 押さえ部材
４４ カバー板
９０ Ｘ方向角速度センサ（振動検出センサ）
９１ Ｙ方向角速度センサ（振動検出センサ）
９２ ９３ 積分回路（制御手段）
９４ ９５ 誤差増幅器（制御手段）
１００ 手振れ補正装置
１０１ ＣＣＤ保持部材（ステージ部材）
１０２ １０３ Ｘ方向スライド溝
１０４ １０５ Ｘ方向スライダ
１０６ Ｘ方向リンク部材
１０７ 枢着ピン
１０８ 連結ピン（Ｙ用枢着軸）
１０９ Ｘ方向リンク部材
１１０ １１２ 連結ピン
１１１ 枢着ピン（Ｙ用枢着軸）
１１３ Ｙ方向リンク部材
１１４ 連結ピン
１１７ Ｙ方向スライド溝
１１８ Ｙ方向スライダ
１１９ Ｙ方向リンク部材（リンク部材）
１２０ 連結ピン（回転軸）
１２１ 連結ピン（Ｘ用枢着軸）
１２２ Ｙ方向リンク部材
１２３ １２４ 連結ピン
１２５ Ｘ方向リンク部材
１２６ 連結ピン（回転軸）
３００ 手振れ補正装置
３０１ 収容孔
３０２ ＣＣＤ保持部材（ステージ部材）
３０３ 溝形成部材（ステージ部材）
３０５ ３０６ Ｘ方向スライド溝
３０７ Ｙ方向スライド溝
３０９ 収納用凹部
３１２ ３１３ 舌片
３１４ カバー部材
４００ 手振れ補正装置
４０１ Ｙ用コイル形成板（Ｙ方向移動部材）
４０３ Ｙ用錘板（Ｙ用錘）
４０５ Ｘ用コイル形成板（Ｘ方向移動部材）
４０７ Ｘ用錘板（Ｘ用錘）
５００ 手振れ補正装置
ＣＬ 補正レンズ
ＣＸ Ｘ方向駆動用コイル
ＣＹ Ｙ方向駆動用コイル
ＭＸ Ｘ用磁石
ＭＹ Ｙ用磁石
Ｏ 光軸
Ｘ Ｘ方向（左右方向）
Ｙ Ｙ方向（上下方向）
Ｚ Ｚ方向（前後方向）
ＹＸＡ Ｘ用ヨーク
ＹＸＡ１ 後板部
ＹＸＡ２ 突片
ＹＸＡ３ 突片
ＹＸＡ４ 連結部
ＹＸＡ５ 前板部
ＹＸＢ Ｘ用ヨーク
ＹＸＢ１ 前板部
ＹＸＢ２ 後板部
ＹＹＡ Ｙ用ヨーク
ＹＹＡ１ 後板部
ＹＹＡ２ 突片
ＹＹＡ３ 突片
ＹＹＡ４ 連結部
ＹＹＡ５ 前板部
ＹＹＢ Ｙ用ヨーク
ＹＹＢ１ 前板部
ＹＹＢ２ 後板部 10 Digital camera (camera)
11 CCD (imaging device)
12 Imaging surface 16 17 18 19 Bearing 20 Fixed support substrate 21 Accommodating hole 22 Recess 24 X coil forming plate 25 Recess 26 Y coil forming plate 33 Cover plate 38 X direction hall element 39 Y direction hall element 41 Daylighting hole 42 Low Pal Filter 43 Holding member 44 Cover plate 90 X-direction angular velocity sensor (vibration detection sensor)
91 Y-direction angular velocity sensor (vibration detection sensor)
92 93 Integration circuit (control means)
94 95 Error amplifier (control means)
100 Camera shake correction device 101 CCD holding member (stage member)
102 103 X direction slide groove 104 105 X direction slider 106 X direction link member 107 Pivoting pin 108 Connecting pin (Pivoting shaft for Y)
109 X direction link member 110 112 Connecting pin 111 Pivoting pin (Pivoting shaft for Y)
113 Y-direction link member 114 Connecting pin 117 Y-direction slide groove 118 Y-direction slider 119 Y-direction link member (link member)
120 Connecting pin (Rotating shaft)
121 Connecting pin (Pivoting shaft for X)
122 Y-direction link member 123 124 Connection pin 125 X-direction link member 126 Connection pin (rotary shaft)
300 Camera shake correction device 301 Housing hole 302 CCD holding member (stage member)
303 Groove forming member (stage member)
305 306 X-direction slide groove 307 Y-direction slide groove 309 Storage recess 312 313 Tongue piece 314 Cover member 400 Shake correction device 401 Y coil forming plate (Y-direction moving member)
403 Y weight plate (Y weight)
405 Coil forming plate for X (X direction moving member)
407 Weight plate for X (weight for X)
500 Camera shake correction device CL Correction lens CX X direction driving coil CY Y direction driving coil MX X magnet MY Y magnet O Optical axis X X direction (left and right direction)
Y Y direction (vertical direction)
Z Z direction (front-rear direction)
YXA X Yoke YXA1 Rear plate YXA2 Projection YXA3 Projection YXA4 Connection YXA5 Front plate YXB X Yoke YXB1 Front plate YXB2 Rear plate YYA Y YY1 Rear plate YYA2 Projection YYA4 Projection YYA4 YYA5 Front plate YYB Y yoke YYB1 Front plate YYB2 Rear plate

Claims (16)

固定支持基板と、
該固定支持基板上に、特定のＸ方向及びＸ方向に直交するＹ方向に直線移動自在として支持されたステージ部材と、
磁性体からなり上記固定支持基板に対してＸ方向にのみ移動可能なＸ用ヨークと、
該Ｘ用ヨークと一体をなし、該Ｘ用ヨークとの間にＸ用磁気回路を形成するＸ用磁石と、
上記固定支持基板に固定され、上記Ｘ用磁気回路の磁力を受けたとき上記Ｘ用ヨークをＸ方向に移動させる駆動力を発生するＸ方向駆動用コイルと、
上記固定支持基板上に、Ｘ方向及びＹ方向に対して直交するＺ方向のＸ用枢着軸回りに回転可能に支持されたリンク部材と、
を備え、
上記リンク部材の一端部が上記Ｘ用ヨークにＺ方向の回転軸回りに回転可能として接続され、他端部が上記ステージ部材にＺ方向の回転軸回りに回転自在として接続されていることを特徴とするステージ装置。 A fixed support substrate;
A stage member supported on the fixed support substrate so as to be linearly movable in a specific X direction and a Y direction orthogonal to the X direction;
A yoke for X made of a magnetic material and movable only in the X direction with respect to the fixed support substrate;
An X magnet that is integrated with the X yoke and forms an X magnetic circuit with the X yoke;
An X direction driving coil that is fixed to the fixed support substrate and generates a driving force for moving the X yoke in the X direction when receiving the magnetic force of the X magnetic circuit;
On the fixed support substrate, a link member supported so as to be rotatable around an X pivot axis in the Z direction orthogonal to the X direction and the Y direction;
With
One end of the link member is connected to the X yoke so as to be rotatable about a rotation axis in the Z direction, and the other end is connected to the stage member so as to be rotatable about a rotation axis in the Z direction. A stage device. 請求項１記載のステージ装置において、上記リンク部材の他端部が、上記ステージ部材にＹ方向に相対移動自在として接続されているステージ装置。 2. The stage apparatus according to claim 1, wherein the other end of the link member is connected to the stage member so as to be relatively movable in the Y direction. 請求項１または２記載のステージ装置において、上記Ｘ用枢着軸より上記Ｘ用ヨーク側に位置しかつＸ用枢着軸を中心に回転するＸ用ヨーク側回転体の自重によるＸ用枢着軸回りの回転モーメントと、Ｘ用枢着軸よりステージ部材側に位置しかつＸ用枢着軸を中心に回転するステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントの一方が他方の６０％〜１００％となるように、上記Ｘ用ヨークとＸ用磁石の質量を設定したステージ装置。 3. The stage apparatus according to claim 1 or 2, wherein the X-axis pivotally mounted by the dead weight of the X-yoke side rotating body that is positioned on the X-yoke side from the X-axis pivoted axis and rotates about the X-axis pivoted axis. One of the rotational moment around the axis and the rotational moment around the X pivot axis due to the weight of the stage member-side rotating body that is positioned on the stage member side relative to the X pivot axis and rotates around the X pivot axis. A stage apparatus in which the mass of the X yoke and the X magnet is set so that the other 60% to 100%. 請求項３記載のステージ装置において、
上記Ｘ用ヨーク側回転体の自重によるＸ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントとが一致するように、上記Ｘ用ヨークとＸ用磁石の質量を設定したステージ装置。 The stage apparatus according to claim 3, wherein
The X yoke is rotated so that the rotational moment around the X pivoting axis due to the weight of the X yoke rotating body coincides with the rotational moment around the X pivoting axis due to the weight of the stage member side rotating body. And a stage device that sets the mass of the magnet for X. 請求項２から４のいずれか１項記載のステージ装置において、
磁性体からなり上記固定支持基板に対してＹ方向にのみ移動可能なＹ用ヨークと、
該Ｙ用ヨークと一体をなし、該Ｙ用ヨークとの間にＹ用磁気回路を形成するＹ用磁石と、
上記固定支持基板に固定され、上記Ｙ用磁気回路の磁力を受けると、上記Ｙ用ヨークをＹ方向に移動させる駆動力を発生するＹ方向駆動用コイルと、
上記固定支持基板上に、上記Ｚ方向のＹ用枢着軸回りに回転可能として支持されたＸ方向リンク部材と、
を備え、
このＸ方向リンク部材の一端が上記Ｙ用ヨークにＺ方向の回転軸回りに回転可能として接続され、他端がステージ部材にＸ方向に相対移動自在かつＺ方向の回転軸回りに回転自在として接続されたステージ装置。 The stage apparatus according to any one of claims 2 to 4,
Y yoke made of a magnetic material and movable only in the Y direction with respect to the fixed support substrate;
A Y magnet which is integrated with the Y yoke and forms a Y magnetic circuit with the Y yoke;
A Y-direction driving coil that generates a driving force to move the Y yoke in the Y direction when fixed to the fixed support substrate and receives the magnetic force of the Y magnetic circuit;
An X-direction link member supported on the fixed support substrate so as to be rotatable about a Y pivot axis in the Z direction;
With
One end of the X-direction link member is connected to the Y yoke so as to be rotatable about the Z-direction rotation axis, and the other end is connected to the stage member so as to be relatively movable in the X direction and rotatable about the Z-direction rotation axis. Stage device. 請求項５記載のステージ装置において、
上記Ｙ用枢着軸より上記Ｙ用ヨーク側に位置しかつＹ用枢着軸を中心に回転するＹ用ヨーク側回転体の自重によるＹ用枢着軸回りの回転モーメントと、Ｙ用枢着軸よりステージ部材側に位置しかつＹ用枢着軸を中心に回転するステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントの一方が他方の６０％〜１００％となるように、上記Ｙ用ヨークとＹ用磁石の質量を設定したステージ装置。 The stage apparatus according to claim 5, wherein
Rotation moment about the Y pivoting shaft due to the weight of the Y yoke side rotating body which is located on the Y yoke pivot side and rotates around the Y pivot pivot shaft from the Y pivot pivot shaft, and the Y pivot joint One of the rotational moments around the Y pivoting shaft due to the weight of the stage member rotating body that is positioned on the stage member side from the shaft and rotates around the Y pivoting shaft is 60% to 100% of the other. A stage device in which masses of the Y yoke and the Y magnet are set. 請求項６記載のステージ装置において、
上記Ｙ用ヨーク側回転体の自重によるＹ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントとが一致するように、上記Ｙ用ヨークとＹ用磁石の質量を設定したステージ装置。 The stage apparatus according to claim 6, wherein
The Y yoke so that the rotational moment around the Y pivoting axis due to the weight of the Y yoke rotating body coincides with the rotational moment around the Y pivoting axis due to the weight of the stage member side rotating body. And a stage device that sets the mass of the Y magnet. 固定支持基板と、
該固定支持基板上に、特定のＸ方向及びＸ方向に直交するＹ方向に直線移動自在として支持されたステージ部材と、
上記固定支持基板に対してＸ方向にのみ移動可能なＸ方向移動部材と、
上記固定支持基板上に、Ｘ方向及びＹ方向に対して直交するＺ方向のＸ側枢着軸回りに回転可能として支持されたリンク部材と、
上記固定支持基板と上記Ｘ方向移動部材の一方に固定された、磁性体からなるＸ用ヨークと、
該Ｘ用ヨークと一体をなし、該Ｘ用ヨークとの間にＸ用磁気回路を形成するＸ用磁石と、
上記固定支持基板と上記Ｘ方向移動部材の他方に固定された、上記Ｘ用磁気回路の磁力を受けると、上記Ｘ方向移動部材をＸ方向に移動させる駆動力を発生するＸ方向駆動用コイルと、を備え、
上記リンク部材の一端が上記Ｘ方向移動部材にＺ方向の回転軸回りに回転可能として接続され、他端がステージ部材にＺ方向の回転軸回りに回転自在として接続され、
上記Ｘ用枢着軸より上記Ｘ方向移動部材側に位置し、かつ、Ｘ用枢着軸を中心に回転するＸ方向移動部材側回転体の自重によるＸ用枢着軸回りの回転モーメントと、Ｘ用枢着軸よりステージ部材側に位置し、かつ、Ｘ用枢着軸を中心に回転するステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントとの差が小さくなるように、Ｘ方向移動部材側回転体と上記ステージ部材側回転体の一方にＸ用錘を固定したことを特徴とするステージ装置。 A fixed support substrate;
A stage member supported on the fixed support substrate so as to be linearly movable in a specific X direction and a Y direction orthogonal to the X direction;
An X-direction moving member that can move only in the X direction relative to the fixed support substrate;
A link member supported on the fixed support substrate so as to be rotatable around the X-side pivot shaft in the Z direction orthogonal to the X direction and the Y direction;
A yoke for X made of a magnetic material fixed to one of the fixed support substrate and the X-direction moving member;
An X magnet that is integrated with the X yoke and forms an X magnetic circuit with the X yoke;
An X-direction driving coil that generates a driving force for moving the X-direction moving member in the X direction upon receiving the magnetic force of the X magnetic circuit fixed to the other of the fixed support substrate and the X-direction moving member; With
One end of the link member is connected to the X-direction moving member so as to be rotatable around a rotation axis in the Z direction, and the other end is connected to the stage member so as to be rotatable around a rotation axis in the Z direction.
A rotational moment around the X pivoting shaft due to the weight of the X-direction moving member-side rotating body that is positioned on the X-direction pivoting member side with respect to the X pivoting shaft and rotates about the X pivoting shaft; The difference from the rotational moment around the X pivoting axis due to the dead weight of the stage member side rotating body that is positioned on the stage member side from the X pivoting axis and rotates around the X pivoting axis is reduced. An X weight is fixed to one of the X direction moving member side rotating body and the stage member side rotating body. 請求項８記載のステージ装置において、上記リンク部材の他端部が、上記ステージ部材にＹ方向に相対移動自在として接続されているステージ装置。 9. The stage apparatus according to claim 8, wherein the other end portion of the link member is connected to the stage member so as to be relatively movable in the Y direction. 請求項８または９記載のステージ装置において、
上記Ｘ方向移動部材側回転体の自重によるＸ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントの一方が他方の６０％〜１００％となるように、上記Ｘ用錘の質量を設定したステージ装置。 The stage apparatus according to claim 8 or 9,
One of the rotational moment about the pivoting axis for X due to the weight of the X-direction moving member side rotating body and the rotational moment about the pivoting axis for X due to the weight of the stage member side rotating body is 60% to 100% of the other. A stage device in which the mass of the X weight is set so that 請求項１０記載のステージ装置において、
上記Ｘ方向移動部材側回転体の自重によるＸ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＸ用枢着軸回りの回転モーメントとが一致するように、上記Ｘ用錘の質量を設定したステージ装置。 The stage apparatus according to claim 10, wherein
The rotation moment about the X pivoting axis due to the weight of the X-direction moving member side rotating body and the rotation moment about the pivoting axis for X due to the weight of the stage member side rotating body coincide with each other. A stage device that sets the mass of the weight. 請求項８から１１のいずれか１項記載のステージ装置において、
上記固定支持基板に対してＹ方向にのみ移動可能なＹ方向移動部材と、
上記固定支持基板と上記Ｙ方向移動部材の一方に固定された、磁性体からなるＹ用ヨークと、
該Ｙ用ヨークと一体をなし、該Ｙ用ヨークとの間にＹ用磁気回路を形成するＹ用磁石と、
上記固定支持基板と上記Ｙ方向移動部材の他方に固定された、上記Ｙ用磁気回路の磁力を受けると、上記Ｙ方向移動部材をＹ方向に移動させる駆動力を発生するＹ方向駆動用コイルと、
上記固定支持基板上に、上記Ｚ方向のＹ側枢着軸回りに回転可能として支持されたＸ方向リンク部材と、
を備え、
このＸ方向リンク部材の一端が上記Ｙ方向移動部材にＺ方向の回転軸回りに回転可能として接続され、他端がステージ部材に、Ｘ方向に相対移動自在かつＺ方向の回転軸回りに回転自在として接続され、
上記Ｙ用枢着軸より上記Ｙ方向移動部材側に位置しかつＹ用枢着軸を中心に回転するＹ方向移動部材側回転体の自重によるＹ用枢着軸回りの回転モーメントと、Ｙ用枢着軸よりステージ部材側に位置しかつＹ用枢着軸を中心に回転するステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントとの差が小さくなるように、上記Ｙ方向移動部材側回転体とステージ部材側回転体の一方にＹ用錘を固定したステージ装置。 The stage apparatus according to any one of claims 8 to 11,
A Y-direction moving member that is movable only in the Y direction with respect to the fixed support substrate;
A Y yoke made of a magnetic material fixed to one of the fixed support substrate and the Y-direction moving member;
A Y magnet which is integrated with the Y yoke and forms a Y magnetic circuit with the Y yoke;
A Y-direction driving coil that generates a driving force to move the Y-direction moving member in the Y direction upon receiving the magnetic force of the Y magnetic circuit fixed to the other of the fixed support substrate and the Y-direction moving member; ,
An X-direction link member supported on the fixed support substrate so as to be rotatable around the Y-side pivot axis in the Z direction;
With
One end of the X-direction link member is connected to the Y-direction moving member so as to be rotatable around the rotation axis in the Z direction, and the other end is relatively movable in the X direction and rotatable around the rotation axis in the Z direction. Connected as
A rotational moment about the Y pivoting shaft due to the weight of the Y-direction moving member-side rotating body that is located on the Y-direction movable member side and rotates around the Y pivoting shaft with respect to the Y pivoting shaft; The Y direction so that the difference from the rotational moment around the Y pivoting axis due to the weight of the stage member side rotating body that is located on the stage member side from the pivoting axis and rotates around the Y pivoting axis is reduced. A stage apparatus in which a weight for Y is fixed to one of the moving member side rotating body and the stage member side rotating body. 請求項１２記載のステージ装置において、
上記Ｙ用錘の質量を、上記Ｙ方向移動部材側回転体の自重によるＹ用枢着軸回りの回転モーメントが、上記ステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントの６０％〜１００％となるように設定したステージ装置。 The stage apparatus according to claim 12, wherein
The mass of the Y weight is determined based on the fact that the rotational moment around the Y pivoting axis due to the weight of the Y-direction moving member side rotating body is 60% of the rotational moment around the Y pivoting axis due to the weight of the stage member side rotating body. Stage device set to be between 100% and 100%. 請求項１３記載のステージ装置において、
上記Ｙ方向移動部材側回転体の自重によるＹ用枢着軸回りの回転モーメントと、上記ステージ部材側回転体の自重によるＹ用枢着軸回りの回転モーメントとが一致するように、上記Ｙ用錘の質量を設定したステージ装置。 The stage apparatus according to claim 13, wherein
The rotation moment about the Y pivoting axis due to the weight of the Y-direction moving member side rotating body and the rotation moment about the Y pivoting axis due to the weight of the stage member side rotating body coincide with each other. A stage device that sets the mass of the weight. 請求項５から７、及び１２から１４のいずれか１項記載のステージ装置を利用したカメラの手振れ補正装置であって、
上記ステージ装置を内蔵するカメラと、
上記ステージ部材と一体となって移動する、前面に結像面を有する撮像素子と、
上記カメラの振動を検出する振動検出センサと、
該振動検出センサが検出した振動情報に基づいて、上記Ｘ方向駆動用コイル及び上記Ｙ方向駆動用コイルに、手振れを補正するように電流を流す制御手段と、
を備えるカメラの手振れ補正装置。 A camera shake correction device using a stage device according to any one of claims 5 to 7 and 12 to 14,
A camera incorporating the stage device;
An image sensor having an imaging surface on the front surface that moves integrally with the stage member;
A vibration detection sensor for detecting the vibration of the camera;
Control means for causing a current to flow through the X direction driving coil and the Y direction driving coil based on vibration information detected by the vibration detection sensor so as to correct camera shake;
A camera shake correction device comprising: 請求項５から７、及び１２から１４のいずれか１項記載のステージ装置を利用したカメラの手振れ補正装置であって、
上記ステージ装置を内蔵するカメラと、
上記ステージ部材と一体となって移動する、手振れを補正するための補正レンズと、
上記カメラの振動を検出する振動検出センサと、
該振動検出センサが検出した振動情報に基づいて、上記Ｘ方向駆動用コイル及び上記Ｙ方向駆動用コイルに、手振れを補正するように電流を流す制御手段と、
を備えるカメラの手振れ補正装置。 A camera shake correction device using a stage device according to any one of claims 5 to 7 and 12 to 14,
A camera incorporating the stage device;
A correction lens that moves together with the stage member to correct camera shake;
A vibration detection sensor for detecting the vibration of the camera;
Control means for causing a current to flow through the X direction driving coil and the Y direction driving coil based on vibration information detected by the vibration detection sensor so as to correct camera shake;
A camera shake correction device comprising:
JP2005192552A 2005-06-30 2005-06-30 Stage apparatus, and camera-shake correcting apparatus utilizing the same Pending JP2007013661A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008197550A (en) * 2007-02-15 2008-08-28 Casio Comput Co Ltd Camera-shake correcting apparatus and linear actuator
JP2008268896A (en) * 2007-04-18 2008-11-06 Ctx Opto Electronics Corp Image stabilization apparatus for stabilizing image sensor
JP2012018368A (en) * 2010-07-07 2012-01-26 Ability Ente Rprise Co Ltd Camera shake prevention device
CN104977783A (en) * 2014-04-11 2015-10-14 三星电机株式会社 Camera module
US9848126B2 (en) 2014-04-11 2017-12-19 Samsung Electro-Mechanics Co., Ltd. Camera module
US9921458B2 (en) 2014-05-30 2018-03-20 Samsung Electro-Mechanics Co., Ltd. Camera module

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008197550A (en) * 2007-02-15 2008-08-28 Casio Comput Co Ltd Camera-shake correcting apparatus and linear actuator
JP2008268896A (en) * 2007-04-18 2008-11-06 Ctx Opto Electronics Corp Image stabilization apparatus for stabilizing image sensor
JP4657312B2 (en) * 2007-04-18 2011-03-23 中強光電股▲ふん▼有限公司 Image stabilizer for stabilizing the image sensor
JP2012018368A (en) * 2010-07-07 2012-01-26 Ability Ente Rprise Co Ltd Camera shake prevention device
CN104977783A (en) * 2014-04-11 2015-10-14 三星电机株式会社 Camera module
US9848126B2 (en) 2014-04-11 2017-12-19 Samsung Electro-Mechanics Co., Ltd. Camera module
US10444530B2 (en) 2014-04-11 2019-10-15 Samsung Electro-Mechanics Co., Ltd. Camera module
US11209663B2 (en) 2014-04-11 2021-12-28 Samsung Electro-Mechanics Co., Ltd. Camera module
US11947132B2 (en) 2014-04-11 2024-04-02 Samsung Electro-Mechanics Co., Ltd. Camera module
US9921458B2 (en) 2014-05-30 2018-03-20 Samsung Electro-Mechanics Co., Ltd. Camera module

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