JP2007000961A - 半導体複合装置およびその製造方法 - Google Patents
半導体複合装置およびその製造方法 Download PDFInfo
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- JP2007000961A JP2007000961A JP2005183181A JP2005183181A JP2007000961A JP 2007000961 A JP2007000961 A JP 2007000961A JP 2005183181 A JP2005183181 A JP 2005183181A JP 2005183181 A JP2005183181 A JP 2005183181A JP 2007000961 A JP2007000961 A JP 2007000961A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 178
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 60
- 150000001875 compounds Chemical class 0.000 title abstract description 4
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 239000002131 composite material Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 43
- 230000001681 protective effect Effects 0.000 claims description 25
- 239000010410 layer Substances 0.000 description 61
- 239000011229 interlayer Substances 0.000 description 52
- 230000009467 reduction Effects 0.000 description 24
- 230000008901 benefit Effects 0.000 description 18
- 239000003990 capacitor Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000013461 design Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00238—Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Micromachines (AREA)
- Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Abstract
【解決手段】基板11に形成された半導体素子21と、前記半導体素子21を被覆するもので前記基板11上に形成された絶縁膜41と、前記絶縁膜41上に形成されたマイクロ電気機械装置31と、前記半導体素子21と前記マイクロ電気機械装置31とに接続する配線層50とを備えた半導体複合装置1により、上記課題を解決する。
【選択図】図1
Description
Claims (9)
- 基板に形成された半導体素子と、
前記半導体素子を被覆するもので前記基板上に形成された絶縁膜と、
前記絶縁膜上に形成されたマイクロ電気機械装置と、
前記半導体素子と前記マイクロ電気機械装置とに接続する配線層と
を備えたことを特徴とする半導体複合装置。 - 前記マイクロ電気機械装置は露出されている
ことを特徴とする請求項1記載の半導体複合装置。 - 前記配線層は配線層間の絶縁膜とこの絶縁膜に形成された配線とを備え、
前記マイクロ電気機械装置上に形成された前記配線層間の絶縁膜が除去されている
ことを特徴とする請求項1記載の半導体複合装置。 - 前記配線層は配線層間の絶縁膜とこの絶縁膜に形成された配線とを備え、
前記マイクロ電気機械装置上に前記配線層間の絶縁膜が形成されている
ことを特徴とする請求項1記載の半導体複合装置。 - 基板に形成された半導体素子と、
前記基板上に形成されたマイクロ電気機械装置と、
前記半導体素子と前記マイクロ電気機械装置とに接続する配線層と
を備え、
前記マイクロ電気機械装置は空間層を介して保護膜に包含され、
前記半導体電子回路と前記マイクロ電気機械装置とは絶縁膜に被覆されている
ことを特徴とする半導体複合装置。 - 基板に半導体素子を形成する工程と、
前記基板上に前記半導体素子を被覆する絶縁膜を形成する工程と、
前記絶縁膜上にマイクロ電気機械装置を形成する工程と、
前記半導体素子と前記マイクロ電気機械装置とに接続する配線層を形成する工程と
を備えたことを特徴とする半導体複合装置の製造方法。 - 前記配線層を形成する工程は、
配線層間の絶縁膜を形成する工程と、
前記配線層間の絶縁膜に配線を形成する工程とを備え、
前記マイクロ電気機械装置上に形成された前記配線層間の絶縁膜を除去する工程
を有することを特徴とする請求項6記載の半導体複合装置の製造方法。 - 前記マイクロ電気機械装置を形成する工程は、
前記マイクロ電気機械装置の空間となる領域に犠牲膜を形成して前記マイクロ電気機械装置の構成部品を形成する工程と、
犠牲膜を介して保護膜を形成する工程と、
前記各犠牲膜を除去する工程とからなり、
前記保護膜上に前記配線層を形成する絶縁膜を形成する
ことを特徴とする請求項6記載の半導体複合装置の製造方法。 - 基板に半導体素子を形成する工程と、
前記基板にマイクロ電気機械装置を形成する工程と、
前記半導体素子を被覆するもので前記基板上に絶縁膜を形成する工程と、
前記絶縁膜上に前記半導体素子と前記マイクロ電気機械装置とに接続する配線層を形成する工程と
を備えたことを特徴とする半導体複合装置の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005183181A JP2007000961A (ja) | 2005-06-23 | 2005-06-23 | 半導体複合装置およびその製造方法 |
TW095121419A TW200704582A (en) | 2005-06-23 | 2006-06-15 | Semiconductor composite device and method of manufacturing the same |
US11/425,077 US7566956B2 (en) | 2005-06-23 | 2006-06-19 | Semiconductor composite device and method of manufacturing the same |
KR1020060056276A KR20060134845A (ko) | 2005-06-23 | 2006-06-22 | 반도체 복합 장치 및 그 제조 방법 |
CNA2009100050616A CN101477983A (zh) | 2005-06-23 | 2006-06-23 | 半导体复合装置及其制造方法 |
CN200610093250XA CN1884038B (zh) | 2005-06-23 | 2006-06-23 | 半导体复合装置及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005183181A JP2007000961A (ja) | 2005-06-23 | 2005-06-23 | 半導体複合装置およびその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007000961A true JP2007000961A (ja) | 2007-01-11 |
Family
ID=37566341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005183181A Pending JP2007000961A (ja) | 2005-06-23 | 2005-06-23 | 半導体複合装置およびその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7566956B2 (ja) |
JP (1) | JP2007000961A (ja) |
KR (1) | KR20060134845A (ja) |
CN (2) | CN1884038B (ja) |
TW (1) | TW200704582A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100794143B1 (ko) * | 2006-12-21 | 2008-01-11 | 주식회사 에스엘케이 | 컴퓨터용 키보드 및 마우스 보관구조 |
KR100796704B1 (ko) * | 2001-06-06 | 2008-01-21 | 가부시키가이샤 브리지스톤 | 방음 유닛 장착 구조 |
KR100800386B1 (ko) * | 2007-12-20 | 2008-02-01 | 주식회사 정인기술단 | 가변 차선용 도로 분리대 |
KR100830327B1 (ko) * | 2007-10-22 | 2008-05-16 | 김도영 | 약병뚜껑 |
KR100848920B1 (ko) * | 2008-01-24 | 2008-07-29 | 이제균 | 좌변기와 결합된 의자 |
JP2022023896A (ja) * | 2010-08-06 | 2022-02-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4337870B2 (ja) * | 2006-12-15 | 2009-09-30 | セイコーエプソン株式会社 | Memsレゾネータ及びmemsレゾネータの製造方法 |
US7876547B2 (en) * | 2007-05-30 | 2011-01-25 | International Business Machines Corporation | Vertical parallel plate capacitor structures |
US20090102016A1 (en) * | 2007-10-22 | 2009-04-23 | International Business Machines Corporation | Design structure incorporating vertical parallel plate capacitor structures |
TWI501380B (zh) * | 2010-01-29 | 2015-09-21 | Nat Chip Implementation Ct Nat Applied Res Lab | 多基板晶片模組堆疊之三維系統晶片結構 |
US8946832B2 (en) * | 2010-02-05 | 2015-02-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Filter using a waveguide structure |
US20120193781A1 (en) * | 2011-01-27 | 2012-08-02 | Rf Micro Devices, Inc. | Customized rf mems capacitor array using redistribution layer |
JP2014053529A (ja) * | 2012-09-10 | 2014-03-20 | Toshiba Corp | 電子装置 |
CN113066869B (zh) * | 2021-03-16 | 2021-12-10 | 扬州国宇电子有限公司 | 一种快恢复二极管芯片及其制备方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000090801A (ja) * | 1998-09-09 | 2000-03-31 | Denso Corp | モノリシックマイクロ波集積回路及びその製造方法 |
JP2005125484A (ja) * | 2003-09-29 | 2005-05-19 | Matsushita Electric Ind Co Ltd | 微小電気機械システムおよびその製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US5326726A (en) * | 1990-08-17 | 1994-07-05 | Analog Devices, Inc. | Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure |
JPH09162462A (ja) | 1995-12-13 | 1997-06-20 | Fujitsu Ltd | マイクロマシン及び電子回路をもつ半導体装置の製造方法 |
US20040152276A1 (en) | 2003-01-14 | 2004-08-05 | Naoki Nishimura | Device, and substrate on which circuit and antenna are formed |
JP4434592B2 (ja) | 2003-01-14 | 2010-03-17 | キヤノン株式会社 | デバイス |
-
2005
- 2005-06-23 JP JP2005183181A patent/JP2007000961A/ja active Pending
-
2006
- 2006-06-15 TW TW095121419A patent/TW200704582A/zh not_active IP Right Cessation
- 2006-06-19 US US11/425,077 patent/US7566956B2/en not_active Expired - Fee Related
- 2006-06-22 KR KR1020060056276A patent/KR20060134845A/ko not_active Application Discontinuation
- 2006-06-23 CN CN200610093250XA patent/CN1884038B/zh not_active Expired - Fee Related
- 2006-06-23 CN CNA2009100050616A patent/CN101477983A/zh active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000090801A (ja) * | 1998-09-09 | 2000-03-31 | Denso Corp | モノリシックマイクロ波集積回路及びその製造方法 |
JP2005125484A (ja) * | 2003-09-29 | 2005-05-19 | Matsushita Electric Ind Co Ltd | 微小電気機械システムおよびその製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100796704B1 (ko) * | 2001-06-06 | 2008-01-21 | 가부시키가이샤 브리지스톤 | 방음 유닛 장착 구조 |
KR100794143B1 (ko) * | 2006-12-21 | 2008-01-11 | 주식회사 에스엘케이 | 컴퓨터용 키보드 및 마우스 보관구조 |
KR100830327B1 (ko) * | 2007-10-22 | 2008-05-16 | 김도영 | 약병뚜껑 |
KR100800386B1 (ko) * | 2007-12-20 | 2008-02-01 | 주식회사 정인기술단 | 가변 차선용 도로 분리대 |
KR100848920B1 (ko) * | 2008-01-24 | 2008-07-29 | 이제균 | 좌변기와 결합된 의자 |
JP2022023896A (ja) * | 2010-08-06 | 2022-02-08 | 株式会社半導体エネルギー研究所 | 半導体装置 |
JP7146046B2 (ja) | 2010-08-06 | 2022-10-03 | 株式会社半導体エネルギー研究所 | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
CN1884038A (zh) | 2006-12-27 |
CN1884038B (zh) | 2011-08-03 |
US20060289955A1 (en) | 2006-12-28 |
TWI304393B (ja) | 2008-12-21 |
TW200704582A (en) | 2007-02-01 |
US7566956B2 (en) | 2009-07-28 |
KR20060134845A (ko) | 2006-12-28 |
CN101477983A (zh) | 2009-07-08 |
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