JP2006514782A - プログラマブル半導体デバイス - Google Patents
プログラマブル半導体デバイス Download PDFInfo
- Publication number
- JP2006514782A JP2006514782A JP2004571666A JP2004571666A JP2006514782A JP 2006514782 A JP2006514782 A JP 2006514782A JP 2004571666 A JP2004571666 A JP 2004571666A JP 2004571666 A JP2004571666 A JP 2004571666A JP 2006514782 A JP2006514782 A JP 2006514782A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- programmable device
- resistance
- semiconductor material
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 56
- 239000000463 material Substances 0.000 claims abstract description 36
- 239000007769 metal material Substances 0.000 claims abstract description 25
- 239000012212 insulator Substances 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 230000004044 response Effects 0.000 claims abstract description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 30
- 229920005591 polysilicon Polymers 0.000 claims description 30
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 29
- 229910021332 silicide Inorganic materials 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 229910019001 CoSi Inorganic materials 0.000 claims description 3
- 229910005881 NiSi 2 Inorganic materials 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims description 2
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 20
- 238000002955 isolation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910021342 tungsten silicide Inorganic materials 0.000 description 4
- 238000001953 recrystallisation Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012854 evaluation process Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】 プログラマブル・デバイスは、基板(10)と、基板上の絶縁体(13)と、絶縁体上の細長い半導体材料であって、第1および第2の端部、ならびに上面Sを有し、第1の端部(12a)が第2の端部(12b)よりも実質的に広い、半導体材料と、上面上に配置された金属材料であって、半導体材料を介しておよび金属材料を介して流れることができる電流Iに応答して、上面に沿って物理的に移動可能な金属材料と、
を含む。
Description
CG=ポリシリコンに対する電気的コンタクト、
M0=金属ゼロ(第1の金属からパッドの接続)、
ノッチ(任意)=ポリシリコン・パッドのノッチ。
Claims (24)
- プログラマブル・デバイスであって、
基板(10)と、
前記基板上の絶縁体(13)と、
前記絶縁体上の細長い半導体材料(12)であって、第1および第2の端部、ならびに上面Sを有し、前記第1の端部(12a)が前記第2の端部(12b)よりも実質的に広い、半導体材料と、
前記上面上の金属材料であって、前記半導体材料を介しておよび前記金属材料を介して流れることができる電流Iに応答して、前記上面に沿って物理的に移動可能な金属材料と、
を含む、プログラマブル・デバイス。 - 前記細長い半導体材料に接続されたエネルギ源であって、前記細長い半導体材料を介しておよび前記金属材料を介して電流を流し、更に、前記上面に沿って前記金属材料を移動させるエネルギ源を更に含む、請求項1に記載のプログラマブル・デバイス。
- 前記細長い半導体材料がドーピングされたポリシリコンを含む、請求項1に記載のプログラマブル・デバイス。
- 前記金属材料が金属シリサイドを含む、請求項1に記載のプログラマブル・デバイス。
- 前記金属材料が、WSi2、NiSi2、およびCoSi2から成る群から選択された金属シリサイドである、請求項1に記載のプログラマブル・デバイス。
- 前記第1の端部が複数の一体化している三角形の部分を含む、請求項1に記載のプログラマブル・デバイス。
- 前記第2の端部が横長の部分を含む、請求項1に記載のプログラマブル・デバイス。
- 前記金属材料が、前記細長い半導体材料の前記上面全体に配置されている、請求項1に記載のプログラマブル・デバイス。
- 前記金属材料が半導体合金である、請求項1に記載のプログラマブル・デバイス。
- 前記細長い半導体材料がN+ポリシリコンであり、前記金属材料がWSi2である、請求項1に記載のプログラマブル・デバイス。
- 前記細長い半導体材料が、前記第1の端部を前記第2の端部に接続する中央部を含む、請求項1に記載のプログラマブル・デバイス。
- 前記中央部が、約1ミクロン未満のほぼ均一な最大幅を有する、請求項11に記載のプログラマブル・デバイス。
- 前記中央部が約2ミクロン未満の長さを有する、請求項11に記載のプログラマブル・デバイス。
- 前記中央部および前記第2の端部がT字型の部材を形成する、請求項11に記載のプログラマブル・デバイス。
- デバイスをプログラミングする方法であって、
ドーピングした半導体ライン上に配置した半導体合金を有するデバイスを通して、前記半導体合金の一部が前記デバイスの第1の端部から前記デバイスの第2の端部に近い位置まで移動するような時間期間、ある電圧で電流を流すステップを含む、方法。 - 前記電流を流すステップが前記半導体合金を加熱する、請求項15に記載の方法。
- 前記電流を流すステップが、前記ドーピングした半導体ラインを溶解し開回路を生成するために充分な位置まで、前記半導体合金のある量を移動させることを更に含む、請求項15に記載の方法。
- 前記時間期間が約150μSから約350μSまでの範囲内の時間期間であり、前記電流が約5mAである、請求項15に記載の方法。
- 前記電流を流すステップが、前記半導体合金を約2160℃の温度まで加熱する、請求項16に記載の方法。
- 前記電圧が4.7ボルトであり、前記電流が5mAであり、前記時間期間が250μSである、請求項15に記載の方法。
- プログラミングした半導体デバイスを製造する方法であって、
熱絶縁体(13)を有する半導体基板(10)を設けるステップと、
前記絶縁体上に、上面Sと、第1の抵抗と、2つの端部とを有する細長い半導体材料(12)を配置するステップと、
前記上面上に、前記半導体材料の前記第1の抵抗よりも大幅に小さい第2の抵抗を有する金属材料(40)を配置するステップと、
前記半導体材料(12)および前記金属材料(40)を通して、前記金属材料の一部が前記半導体材料の一端(12a)から他端(12b)まで移動し、前記半導体材料を溶解して開回路(90)を形成するような時間期間、電流を流すステップと、
を含む、方法。 - 前記第1の抵抗が前記第2の抵抗の約10倍である、請求項21に記載の方法。
- 前記第1の抵抗が、約100オーム/スクエアから約200オーム/スクエアの範囲のほぼ均一な抵抗であり、前記第2の抵抗が、約15オーム/スクエアあら約30オーム/スクエアの範囲のほぼ均一な抵抗である、請求項21に記載の方法。
- 前記細長い半導体材料および前記金属材料の組み合わせた抵抗が、約17オーム/スクエアから約25オーム/スクエアの範囲のほぼ均一な抵抗である、請求項21に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US46256803P | 2003-04-11 | 2003-04-11 | |
PCT/US2003/013392 WO2004100271A1 (en) | 2003-04-11 | 2003-04-30 | Programmable semiconductor device |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006514782A true JP2006514782A (ja) | 2006-05-11 |
JP2006514782A5 JP2006514782A5 (ja) | 2006-06-22 |
JP4594740B2 JP4594740B2 (ja) | 2010-12-08 |
Family
ID=33434928
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004571666A Expired - Fee Related JP4594740B2 (ja) | 2003-04-11 | 2003-04-30 | プログラマブル半導体デバイス |
Country Status (8)
Country | Link |
---|---|
US (4) | US7872897B2 (ja) |
EP (1) | EP1618609A4 (ja) |
JP (1) | JP4594740B2 (ja) |
KR (1) | KR100694644B1 (ja) |
CN (1) | CN1720621A (ja) |
AU (1) | AU2003304110A1 (ja) |
TW (1) | TWI303479B (ja) |
WO (1) | WO2004100271A1 (ja) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7242072B2 (en) | 2004-11-23 | 2007-07-10 | International Business Machines Corporation | Electrically programmable fuse for silicon-on-insulator (SOI) technology |
US7254078B1 (en) | 2006-02-22 | 2007-08-07 | International Business Machines Corporation | System and method for increasing reliability of electrical fuse programming |
US7723820B2 (en) | 2006-12-28 | 2010-05-25 | International Business Machines Corporation | Transistor based antifuse with integrated heating element |
US7851885B2 (en) | 2007-03-07 | 2010-12-14 | International Business Machines Corporation | Methods and systems involving electrically programmable fuses |
US7732893B2 (en) | 2007-03-07 | 2010-06-08 | International Business Machines Corporation | Electrical fuse structure for higher post-programming resistance |
US7714326B2 (en) | 2007-03-07 | 2010-05-11 | International Business Machines Corporation | Electrical antifuse with integrated sensor |
US7674691B2 (en) | 2007-03-07 | 2010-03-09 | International Business Machines Corporation | Method of manufacturing an electrical antifuse |
US20080258255A1 (en) * | 2007-04-23 | 2008-10-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Electromigration Aggravated Electrical Fuse Structure |
US8566759B2 (en) * | 2007-08-24 | 2013-10-22 | International Business Machines Corporation | Structure for on chip shielding structure for integrated circuits or devices on a substrate |
US8589832B2 (en) * | 2007-08-24 | 2013-11-19 | International Business Machines Corporation | On chip shielding structure for integrated circuits or devices on a substrate and method of shielding |
US8615205B2 (en) * | 2007-12-18 | 2013-12-24 | Qualcomm Incorporated | I-Q mismatch calibration and method |
JP2009206490A (ja) * | 2008-01-30 | 2009-09-10 | Elpida Memory Inc | 半導体装置及びその製造方法 |
US8970272B2 (en) | 2008-05-15 | 2015-03-03 | Qualcomm Incorporated | High-speed low-power latches |
US8712357B2 (en) * | 2008-11-13 | 2014-04-29 | Qualcomm Incorporated | LO generation with deskewed input oscillator signal |
US8718574B2 (en) * | 2008-11-25 | 2014-05-06 | Qualcomm Incorporated | Duty cycle adjustment for a local oscillator signal |
US8847638B2 (en) | 2009-07-02 | 2014-09-30 | Qualcomm Incorporated | High speed divide-by-two circuit |
US8791740B2 (en) | 2009-07-16 | 2014-07-29 | Qualcomm Incorporated | Systems and methods for reducing average current consumption in a local oscillator path |
DE102010045073B4 (de) * | 2009-10-30 | 2021-04-22 | Taiwan Semiconductor Mfg. Co., Ltd. | Elektrische Sicherungsstruktur |
US9741658B2 (en) | 2009-10-30 | 2017-08-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Electrical fuse structure and method of formation |
US8686536B2 (en) | 2009-10-30 | 2014-04-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Electrical fuse structure and method of formation |
KR20120050338A (ko) * | 2010-11-10 | 2012-05-18 | 삼성전자주식회사 | 접합 항복을 이용한 전기적 퓨즈 및 이를 구비하는 반도체 집적회로 |
US8854098B2 (en) | 2011-01-21 | 2014-10-07 | Qualcomm Incorporated | System for I-Q phase mismatch detection and correction |
US9154077B2 (en) | 2012-04-12 | 2015-10-06 | Qualcomm Incorporated | Compact high frequency divider |
WO2014011150A1 (en) * | 2012-07-10 | 2014-01-16 | Empire Technology Development Llc | Social network limited offer distribution |
US20140164087A1 (en) * | 2012-12-06 | 2014-06-12 | Capital One Financial Corporation | Systems and methods for social media influence based rewards |
US9059170B2 (en) | 2013-02-06 | 2015-06-16 | International Business Machines Corporation | Electronic fuse having a damaged region |
US20140278871A1 (en) * | 2013-03-15 | 2014-09-18 | Philip John MacGregor | Providing incentives to a user of a social networking system based on an action of the user |
US9646929B2 (en) | 2013-06-13 | 2017-05-09 | GlobalFoundries, Inc. | Making an efuse |
US9773632B2 (en) | 2015-09-08 | 2017-09-26 | Micron Technology, Inc. | Fuse element assemblies |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0613465A (ja) * | 1992-06-25 | 1994-01-21 | Seiko Epson Corp | 半導体装置 |
JPH0745790A (ja) * | 1993-08-02 | 1995-02-14 | Nec Corp | 半導体集積回路装置およびその製造方法 |
JPH10340663A (ja) * | 1997-03-07 | 1998-12-22 | St Microelectron Sa | 擬似ヒューズおよび擬似ヒューズを用いた回路 |
JPH11195711A (ja) * | 1997-10-27 | 1999-07-21 | Seiko Epson Corp | 半導体装置およびその製造方法 |
JP2000091438A (ja) * | 1998-08-26 | 2000-03-31 | Siemens Ag | 半導体デバイスとその製造方法 |
JP2002057217A (ja) * | 2000-05-30 | 2002-02-22 | Internatl Business Mach Corp <Ibm> | ヒューズ・リンクの局所劣化による強化型ヒューズ |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4309224A (en) * | 1978-10-06 | 1982-01-05 | Tokyo Shibaura Denki Kabushiki Kaisha | Method for manufacturing a semiconductor device |
US4229502A (en) * | 1979-08-10 | 1980-10-21 | Rca Corporation | Low-resistivity polycrystalline silicon film |
JP2728412B2 (ja) | 1987-12-25 | 1998-03-18 | 株式会社日立製作所 | 半導体装置 |
US5015604A (en) * | 1989-08-18 | 1991-05-14 | North American Philips Corp., Signetics Division | Fabrication method using oxidation to control size of fusible link |
US5334880A (en) * | 1991-04-30 | 1994-08-02 | International Business Machines Corporation | Low voltage programmable storage element |
US5412593A (en) * | 1994-01-12 | 1995-05-02 | Texas Instruments Incorporated | Fuse and antifuse reprogrammable link for integrated circuits |
US5903041A (en) * | 1994-06-21 | 1999-05-11 | Aptix Corporation | Integrated two-terminal fuse-antifuse and fuse and integrated two-terminal fuse-antifuse structures incorporating an air gap |
US6337507B1 (en) * | 1995-09-29 | 2002-01-08 | Intel Corporation | Silicide agglomeration fuse device with notches to enhance programmability |
DE19638666C1 (de) * | 1996-01-08 | 1997-11-20 | Siemens Ag | Schmelzsicherung mit einer Schutzschicht in einer integrierten Halbleiterschaltung sowie zugehöriges Herstellungsverfahren |
US5761115A (en) * | 1996-05-30 | 1998-06-02 | Axon Technologies Corporation | Programmable metallization cell structure and method of making same |
US5976943A (en) * | 1996-12-27 | 1999-11-02 | Vlsi Technology, Inc. | Method for bi-layer programmable resistor |
EP1044452B1 (en) * | 1997-12-04 | 2003-03-19 | Axon Technologies Corporation | Programmable sub-surface aggregating metallization structure and method of making same |
US6433404B1 (en) * | 2000-02-07 | 2002-08-13 | Infineon Technologies Ag | Electrical fuses for semiconductor devices |
US6642601B2 (en) * | 2000-12-18 | 2003-11-04 | Texas Instruments Incorporated | Low current substantially silicide fuse for integrated circuits |
US20030025177A1 (en) | 2001-08-03 | 2003-02-06 | Chandrasekharan Kothandaraman | Optically and electrically programmable silicided polysilicon fuse device |
GB2382220A (en) * | 2001-11-20 | 2003-05-21 | Zarlink Semiconductor Ltd | Polysilicon diode antifuse |
US7005727B2 (en) * | 2001-12-28 | 2006-02-28 | Intel Corporation | Low cost programmable CPU package/substrate |
US6624499B2 (en) * | 2002-02-28 | 2003-09-23 | Infineon Technologies Ag | System for programming fuse structure by electromigration of silicide enhanced by creating temperature gradient |
US6617914B1 (en) * | 2002-03-05 | 2003-09-09 | Infineon Technologies Ag | Electrical antifuse with external capacitance |
US6661330B1 (en) * | 2002-07-23 | 2003-12-09 | Texas Instruments Incorporated | Electrical fuse for semiconductor integrated circuits |
US6944054B2 (en) * | 2003-03-28 | 2005-09-13 | Nantero, Inc. | NRAM bit selectable two-device nanotube array |
US7180102B2 (en) * | 2003-09-30 | 2007-02-20 | Agere Systems Inc. | Method and apparatus for using cobalt silicided polycrystalline silicon for a one time programmable non-volatile semiconductor memory |
US6933591B1 (en) * | 2003-10-16 | 2005-08-23 | Altera Corporation | Electrically-programmable integrated circuit fuses and sensing circuits |
US7485944B2 (en) * | 2004-10-21 | 2009-02-03 | International Business Machines Corporation | Programmable electronic fuse |
US7323761B2 (en) * | 2004-11-12 | 2008-01-29 | International Business Machines Corporation | Antifuse structure having an integrated heating element |
US7242072B2 (en) * | 2004-11-23 | 2007-07-10 | International Business Machines Corporation | Electrically programmable fuse for silicon-on-insulator (SOI) technology |
US7417300B2 (en) * | 2006-03-09 | 2008-08-26 | International Business Machines Corporation | Electrically programmable fuse structures with narrowed width regions configured to enhance current crowding and methods of fabrication thereof |
-
2003
- 2003-04-30 CN CNA03825784XA patent/CN1720621A/zh active Pending
- 2003-04-30 AU AU2003304110A patent/AU2003304110A1/en not_active Abandoned
- 2003-04-30 US US10/552,971 patent/US7872897B2/en not_active Expired - Fee Related
- 2003-04-30 JP JP2004571666A patent/JP4594740B2/ja not_active Expired - Fee Related
- 2003-04-30 KR KR1020057017006A patent/KR100694644B1/ko not_active IP Right Cessation
- 2003-04-30 WO PCT/US2003/013392 patent/WO2004100271A1/en active Application Filing
- 2003-04-30 EP EP03816906A patent/EP1618609A4/en not_active Withdrawn
-
2004
- 2004-04-07 TW TW093109629A patent/TWI303479B/zh active
-
2007
- 2007-06-26 US US11/768,208 patent/US20070298526A1/en not_active Abandoned
-
2010
- 2010-10-25 US US12/911,379 patent/US8184465B2/en not_active Expired - Lifetime
-
2012
- 2012-03-22 US US13/427,162 patent/US8724365B2/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0613465A (ja) * | 1992-06-25 | 1994-01-21 | Seiko Epson Corp | 半導体装置 |
JPH0745790A (ja) * | 1993-08-02 | 1995-02-14 | Nec Corp | 半導体集積回路装置およびその製造方法 |
JPH10340663A (ja) * | 1997-03-07 | 1998-12-22 | St Microelectron Sa | 擬似ヒューズおよび擬似ヒューズを用いた回路 |
JPH11195711A (ja) * | 1997-10-27 | 1999-07-21 | Seiko Epson Corp | 半導体装置およびその製造方法 |
JP2000091438A (ja) * | 1998-08-26 | 2000-03-31 | Siemens Ag | 半導体デバイスとその製造方法 |
JP2002057217A (ja) * | 2000-05-30 | 2002-02-22 | Internatl Business Mach Corp <Ibm> | ヒューズ・リンクの局所劣化による強化型ヒューズ |
Also Published As
Publication number | Publication date |
---|---|
US20070242548A1 (en) | 2007-10-18 |
CN1720621A (zh) | 2006-01-11 |
WO2004100271A1 (en) | 2004-11-18 |
EP1618609A1 (en) | 2006-01-25 |
KR100694644B1 (ko) | 2007-03-13 |
AU2003304110A1 (en) | 2004-11-26 |
US8184465B2 (en) | 2012-05-22 |
TW200534466A (en) | 2005-10-16 |
US7872897B2 (en) | 2011-01-18 |
US20110032025A1 (en) | 2011-02-10 |
TWI303479B (en) | 2008-11-21 |
US20120178239A1 (en) | 2012-07-12 |
JP4594740B2 (ja) | 2010-12-08 |
US20070298526A1 (en) | 2007-12-27 |
EP1618609A4 (en) | 2009-10-28 |
US8724365B2 (en) | 2014-05-13 |
KR20050112099A (ko) | 2005-11-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4594740B2 (ja) | プログラマブル半導体デバイス | |
US8004059B2 (en) | eFuse containing SiGe stack | |
KR101006123B1 (ko) | 절연체-상-실리콘(soi) 기술을 위한 전기적으로프로그램가능한 퓨즈 | |
US7960809B2 (en) | eFuse with partial SiGe layer and design structure therefor | |
EP1479106B1 (en) | Fuse structure programming by electromigration of silicide enhanced by creating temperature gradient | |
US7531388B2 (en) | Electrically programmable fuse structures with narrowed width regions configured to enhance current crowding and methods of fabricating thereof | |
TWI311808B (en) | Fuse and method for disconnecting the fuse | |
US7382036B2 (en) | Doped single crystal silicon silicided eFuse | |
US20090179302A1 (en) | Programmable electronic fuse | |
JPH06260558A (ja) | プログラミング可能なアンチヒューズ要素 | |
US20080014737A1 (en) | Electrically programmable pi-shaped fuse structures and methods of fabrication thereof | |
US7745855B2 (en) | Single crystal fuse on air in bulk silicon | |
US7425472B2 (en) | Semiconductor fuses and semiconductor devices containing the same | |
KR100871697B1 (ko) | 열발산 구조를 포함하는 전기 퓨즈 | |
EP4369397A1 (en) | Electronic fuses with an airgap under the fuse link | |
US20070190751A1 (en) | Semiconductor fuses and methods for fabricating and programming the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060420 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060420 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080327 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100511 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100805 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100914 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100917 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130924 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |