JP2006275764A5 - - Google Patents

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Publication number
JP2006275764A5
JP2006275764A5 JP2005095285A JP2005095285A JP2006275764A5 JP 2006275764 A5 JP2006275764 A5 JP 2006275764A5 JP 2005095285 A JP2005095285 A JP 2005095285A JP 2005095285 A JP2005095285 A JP 2005095285A JP 2006275764 A5 JP2006275764 A5 JP 2006275764A5
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JP
Japan
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JP2005095285A
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Japanese (ja)
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JP4613661B2 (en
JP2006275764A (en
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Publication of JP2006275764A5 publication Critical patent/JP2006275764A5/ja
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JP2005095285A 2005-03-29 2005-03-29 Manufacturing method of 3-axis magnetic sensor Expired - Fee Related JP4613661B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005095285A JP4613661B2 (en) 2005-03-29 2005-03-29 Manufacturing method of 3-axis magnetic sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005095285A JP4613661B2 (en) 2005-03-29 2005-03-29 Manufacturing method of 3-axis magnetic sensor

Publications (3)

Publication Number Publication Date
JP2006275764A JP2006275764A (en) 2006-10-12
JP2006275764A5 true JP2006275764A5 (en) 2008-05-15
JP4613661B2 JP4613661B2 (en) 2011-01-19

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JP2005095285A Expired - Fee Related JP4613661B2 (en) 2005-03-29 2005-03-29 Manufacturing method of 3-axis magnetic sensor

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents

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JP4940965B2 (en) * 2007-01-29 2012-05-30 株式会社デンソー Rotation sensor and rotation sensor device
WO2008123144A1 (en) * 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation Magnetic sensor and its sensitivity measuring method
US7564237B2 (en) * 2007-10-23 2009-07-21 Honeywell International Inc. Integrated 3-axis field sensor and fabrication methods
US8559139B2 (en) * 2007-12-14 2013-10-15 Intel Mobile Communications GmbH Sensor module and method for manufacturing a sensor module
JP5143714B2 (en) * 2008-12-18 2013-02-13 株式会社東海理化電機製作所 Position sensor element and position detection device
JP5083281B2 (en) * 2009-07-28 2012-11-28 株式会社デンソー Rotation sensor and rotation sensor device
FR2955942B1 (en) * 2010-01-29 2013-01-04 Centre Nat Rech Scient INTEGRATED MAGNETOMETER AND METHOD FOR MANUFACTURING THE SAME
JP5464198B2 (en) 2011-11-24 2014-04-09 Tdk株式会社 Three-dimensional magnetic field sensor and manufacturing method thereof
JP2013127390A (en) * 2011-12-19 2013-06-27 Nsk Ltd Rotary machine having physical quantity measurement function
TW201327956A (en) * 2011-12-28 2013-07-01 Ind Tech Res Inst Magnetic sensor
JP6043076B2 (en) * 2012-03-23 2016-12-14 エスアイアイ・セミコンダクタ株式会社 Hall sensor
US9817078B2 (en) * 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US10725100B2 (en) 2013-03-15 2020-07-28 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an externally accessible coil
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
US10012518B2 (en) 2016-06-08 2018-07-03 Allegro Microsystems, Llc Magnetic field sensor for sensing a proximity of an object
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10324141B2 (en) 2017-05-26 2019-06-18 Allegro Microsystems, Llc Packages for coil actuated position sensors
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US10310028B2 (en) 2017-05-26 2019-06-04 Allegro Microsystems, Llc Coil actuated pressure sensor
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
US11061084B2 (en) 2019-03-07 2021-07-13 Allegro Microsystems, Llc Coil actuated pressure sensor and deflectable substrate
US10955306B2 (en) 2019-04-22 2021-03-23 Allegro Microsystems, Llc Coil actuated pressure sensor and deformable substrate
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor

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JPS6311672Y2 (en) * 1980-12-22 1988-04-05
JPH0650341B2 (en) * 1985-07-23 1994-06-29 株式会社島津製作所 Sensor structure of magnetic detector
JPS63150384U (en) * 1987-03-24 1988-10-04
JPH07263771A (en) * 1994-03-22 1995-10-13 Honda Motor Co Ltd Hole sensor integrated circuit
FR2750769B1 (en) * 1996-07-05 1998-11-13 Thomson Csf THIN FILM MAGNETIC FIELD SENSOR
JP4034039B2 (en) * 2000-10-16 2008-01-16 電通企工株式会社 mobile phone
JP4016857B2 (en) * 2002-10-18 2007-12-05 ヤマハ株式会社 Magnetic sensor and manufacturing method thereof
JP2004151056A (en) * 2002-11-01 2004-05-27 Hitachi Metals Ltd Weak magnetic field generation device and inspection method for magnetic field sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents

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