JP2006243044A - Multifunctional material having mirror finished surface - Google Patents
Multifunctional material having mirror finished surface Download PDFInfo
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- JP2006243044A JP2006243044A JP2005054930A JP2005054930A JP2006243044A JP 2006243044 A JP2006243044 A JP 2006243044A JP 2005054930 A JP2005054930 A JP 2005054930A JP 2005054930 A JP2005054930 A JP 2005054930A JP 2006243044 A JP2006243044 A JP 2006243044A
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- 239000007777 multifunctional material Substances 0.000 title claims abstract description 73
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 204
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 203
- 239000010410 layer Substances 0.000 claims abstract description 159
- 229910001069 Ti alloy Inorganic materials 0.000 claims abstract description 90
- 239000002344 surface layer Substances 0.000 claims abstract description 58
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 57
- 239000010936 titanium Substances 0.000 claims abstract description 55
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 55
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- 239000000758 substrate Substances 0.000 claims description 58
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- 239000011162 core material Substances 0.000 claims description 19
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- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical group [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 150000003609 titanium compounds Chemical class 0.000 description 4
- RBTBFTRPCNLSDE-UHFFFAOYSA-N 3,7-bis(dimethylamino)phenothiazin-5-ium Chemical compound C1=CC(N(C)C)=CC2=[S+]C3=CC(N(C)C)=CC=C3N=C21 RBTBFTRPCNLSDE-UHFFFAOYSA-N 0.000 description 3
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- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 2
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 240000007049 Juglans regia Species 0.000 description 1
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- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical class O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
第１の発明は、表面層の少なくとも一部に炭素ドープされた酸化チタン又はチタン合金酸化物からなる層を有し、該炭素がＴｉ−Ｃ結合の状態でドープされ、表面層に研磨による鏡面加工が施されてなる鏡面を有する多機能材に関し、より詳しくは、炭素がＴｉ−Ｃ結合の状態でドープされており、耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に優れ且つ可視光応答型光触媒として機能する層を有し、さらに表面層に鏡面加工が施されレーザなどの高強度光の反射効果に優れた鏡面を有する多機能材に関する。
また、第２の発明は、鏡面を有する多機能材に関し、より詳しくは、表面層の少なくとも一部に酸化チタン又はチタン合金酸化物からなる多数の突起部を有しているので揮発性有機化合物（ＶＯＣ）も容易に吸着でき、表面積が大きく且つ炭素ドープされているので光触媒としての活性が高く且つ可視光応答型光触媒として機能し、また硬度も高く、耐剥離性、耐摩耗性、耐薬品性、耐熱性に優れ、さらに表面層に鏡面加工が施されているのでレーザなどの高強度光の反射効果にも優れた鏡面を有する多機能材に関する。
1st invention has the layer which consists of a titanium oxide or titanium alloy oxide by which carbon doping was carried out in at least one part of the surface layer, this carbon was doped in the state of a Ti-C bond, and the mirror surface by grinding | polishing to a surface layer Regarding the multifunctional material having a mirror surface that has been processed, more specifically, carbon is doped in a Ti-C bond state, and durability (high hardness, scratch resistance, abrasion resistance, chemical resistance) The present invention relates to a multifunctional material having a layer that is excellent in heat resistance and that functions as a visible light responsive photocatalyst, and that has a mirror surface that is mirror-finished on the surface layer and that has an excellent reflection effect of high-intensity light such as laser.
In addition, the second invention relates to a multifunctional material having a mirror surface, and more specifically, since at least a part of the surface layer has a large number of protrusions made of titanium oxide or titanium alloy oxide, the volatile organic compound (VOC) can also be adsorbed easily, has a large surface area and is carbon-doped, so it has high activity as a photocatalyst and functions as a visible light responsive photocatalyst, and also has high hardness, peeling resistance, abrasion resistance, chemical resistance The present invention relates to a multifunctional material having a mirror surface that is excellent in properties and heat resistance, and has a mirror surface excellent in the reflection effect of high-intensity light such as a laser because the surface layer is mirror-finished.
従来より、光触媒機能を呈する物質として二酸化チタンＴｉＯ２（本明細書、請求の範囲においては、単に、酸化チタンという）が知られている。チタン金属上に酸化チタン膜を形成する方法として、１９７０年代より、チタン金属上に陽極酸化によって酸化チタン膜を形成する方法、酸素を供給した電気炉中でチタン金属板上に熱的に酸化チタン膜を形成する方法、チタン板を都市ガスの１１００〜１４００℃の火炎中で加熱してチタン金属上に酸化チタン膜を形成する方法等が知られている（非特許文献１参照）。 Conventionally, titanium dioxide TiO 2 (simply referred to as titanium oxide in the present specification and claims) is known as a substance exhibiting a photocatalytic function. As a method of forming a titanium oxide film on titanium metal, since the 1970s, a method of forming a titanium oxide film on titanium metal by anodic oxidation, thermal titanium oxide on a titanium metal plate in an electric furnace supplied with oxygen A method of forming a film, a method of forming a titanium oxide film on titanium metal by heating a titanium plate in a flame of city gas at 1100 to 1400 ° C. are known (see Non-Patent Document 1).
このような光触媒機能により消臭、抗菌、防曇や防汚の効果が得られる光触媒製品を製造する場合、一般的には、酸化チタンゾルをスプレーコーティング、スピンコーティング、ディッピング等により基体上に付与して成膜している（例えば、特許文献１〜３参照）が、そのように成膜された皮膜は剥離や摩耗が生じやすいので、長期に亘っての使用が困難であった。なお、スパッタリング法によって光触媒皮膜を成膜する方法も知られている（例えば、特許文献４〜５参照）。 When producing photocatalyst products that can provide deodorant, antibacterial, anti-fogging and antifouling effects by such photocatalytic function, titanium oxide sol is generally applied to the substrate by spray coating, spin coating, dipping, etc. (For example, refer to Patent Documents 1 to 3). However, since the film formed in this manner is easily peeled off or worn, it has been difficult to use for a long time. In addition, the method of forming a photocatalyst film | membrane by sputtering method is also known (for example, refer patent documents 4-5).
また、酸化チタンを光触媒として機能させるためには波長が４００ｎｍ以下の紫外線が必要であるが、種々の元素をドープして可視光により機能する酸化チタン光触媒の研究が数多く実施されている。例えば、Ｆ、Ｎ、Ｃ、Ｓ、Ｐ、Ｎｉ等をそれぞれドープした酸化チタンを比較して、窒素ドープ酸化チタンが可視光応答型光触媒として優れているという報告がある（非特許文献２参照）。 Further, in order to make titanium oxide function as a photocatalyst, ultraviolet rays having a wavelength of 400 nm or less are necessary. However, many studies of titanium oxide photocatalysts that function by visible light by doping various elements have been conducted. For example, comparing titanium oxides doped with F, N, C, S, P, Ni, etc., there is a report that nitrogen-doped titanium oxide is superior as a visible light responsive photocatalyst (see Non-Patent Document 2). .
また、このように他元素をドープした酸化チタン光触媒としては、酸化チタンの酸素サイトを窒素等の原子で置換してなるチタン化合物、酸化チタンの結晶の格子間に窒素等の原子をドーピングしてなるチタン化合物、或いは酸化チタン結晶の多結晶集合体の粒界に窒素等の原子を配してなるチタン化合物からなる光触媒が提案されている（例えば、特許文献６〜９等参照）。しかしながら、そのような光触媒は耐摩耗性等の耐久性の点については必ずしも満足できるものではない。更に、例えば、天然ガス及び酸素の流量を調整することによって燃焼炎の温度が８５０℃付近に維持された天然ガス燃焼炎をチタン金属に当てることにより化学修飾酸化チタンであるｎ−ＴｉＯ２-xＣxが得られ、これが５３５ｎｍ以下の光を吸収する旨の報告がある（非特許文献３参照）。 In addition, titanium oxide photocatalysts doped with other elements in this way include titanium compounds in which the oxygen sites of titanium oxide are replaced with atoms such as nitrogen, and atoms such as nitrogen are doped between the lattices of titanium oxide crystals. There has been proposed a photocatalyst comprising a titanium compound or a titanium compound in which atoms such as nitrogen are arranged at grain boundaries of a polycrystalline aggregate of titanium oxide crystals (see, for example, Patent Documents 6 to 9). However, such a photocatalyst is not always satisfactory in terms of durability such as wear resistance. Further, for example, n-TiO 2 -xCx, which is a chemically modified titanium oxide, is obtained by applying a natural gas combustion flame in which the temperature of the combustion flame is maintained at around 850 ° C. by adjusting the flow rates of natural gas and oxygen to titanium metal. There is a report that this absorbs light of 535 nm or less (see Non-Patent Document 3).
更に、ＣＶＤ法又はＰＶＤ法などの各種製法により作製した結晶核を無機金属化合物又は有機金属化合物から成るゾル溶液中に入れるか、又は該結晶核にゾル溶液を塗布し、固化させ、熱処理して酸化チタン結晶を該結晶核より成長させることにより、その結晶核より成長させた酸化チタン結晶の結晶形状が柱状結晶を成すことで高活性な光触媒機能が得られることが知られている（例えば、特許文献１０〜１２参照）。しかしながら、その場合には単に基体上に置かれた種結晶から柱状結晶が成長するだけであるので、形成された柱状結晶は基体への付着強度が充分ではなく、それでそのようにして作製された光触媒は耐摩耗性等の耐久性の点については必ずしも満足できるものではない。
ここで従来の酸化チタン系光触媒は、紫外線応答型のもの及び可視光応答型のものの何れも耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に問題があり、実用化の面でのネックとなっていた。 Here, conventional titanium oxide photocatalysts have problems in durability (high hardness, scratch resistance, abrasion resistance, chemical resistance, heat resistance), both of which are UV responsive and visible light responsive. It became a bottleneck in terms of practical use.
そこで第１の発明は、表面層として耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に優れ且つ可視光応答型光触媒として機能する炭素ドープ酸化チタン層を有し、さらにレーザなどの高温である高強度光の反射に適した鏡面を有する多機能材を提供することを目的としている。 Therefore, the first invention has a carbon-doped titanium oxide layer that is excellent in durability (high hardness, scratch resistance, abrasion resistance, chemical resistance, heat resistance) as a surface layer and functions as a visible light responsive photocatalyst. In addition, another object is to provide a multifunctional material having a mirror surface suitable for reflection of high-intensity light having a high temperature such as a laser.
また、第２の発明は、ＶＯＣも容易に吸着でき、表面積が大きく且つ炭素ドープされているので光触媒としての活性が高く且つ可視光応答型光触媒として機能し、耐剥離性、耐摩耗性、耐薬品性、耐熱性に優れ、高強度光の反射に適した鏡面を有する多機能材を提供することを目的としている。 In addition, the second invention can easily adsorb VOC, has a large surface area and is carbon-doped, and therefore has high activity as a photocatalyst and functions as a visible light responsive photocatalyst. The object is to provide a multifunctional material having a mirror surface that is excellent in chemical properties and heat resistance and suitable for reflection of high-intensity light.
本発明者は上記の目的を達成するために鋭意検討した結果、表面層がチタン、チタン合金、チタン合金酸化物又は酸化チタンからなる基体の表面を、炭化水素を主成分とするガスの燃焼炎を用いて高温で加熱処理し、さらに表面層に研磨を施すことにより、炭素がＴｉ−Ｃ結合の状態でドープされており、耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に優れ且つ可視光応答型光触媒として機能する炭素ドープ酸化チタンを表面層として有し、レーザなどの高温である高強度光の反射に適した部材（鏡面を有する多機能材）が得られることを見出し、本発明を完成させるに至った。 As a result of diligent investigations to achieve the above object, the present inventor has found that the surface of the substrate whose surface layer is made of titanium, titanium alloy, titanium alloy oxide or titanium oxide has a gas combustion flame mainly composed of hydrocarbons. The carbon is doped in a Ti-C bond state by heat treatment at a high temperature using, and further polishing the surface layer, and durability (high hardness, scratch resistance, abrasion resistance, chemical resistance) Member with a carbon-doped titanium oxide that functions as a visible light responsive photocatalyst as a surface layer and is suitable for reflection of high-intensity light at high temperatures such as a laser (multifunctional material having a mirror surface) Has been found, and the present invention has been completed.
即ち、本発明の第１の鏡面を有する多機能材は、少なくとも表面層が炭素ドープ酸化チタン層からなり、該炭素がＴｉ−Ｃ結合の状態でドープされており、表面層に研磨による鏡面加工が施されてなり、耐久性に優れ且つ可視光応答型光触媒として機能し、さらに高強度光の反射効果に適した多機能材（第１の鏡面を有する多機能材）であることを特徴とする。
ことを特徴とする。
That is, the multifunctional material having the first mirror surface of the present invention has at least a surface layer composed of a carbon-doped titanium oxide layer, the carbon is doped in a Ti-C bond state, and the surface layer is mirror-finished by polishing. Is a multifunctional material (multifunctional material having a first mirror surface) that is excellent in durability, functions as a visible light responsive photocatalyst, and is suitable for the reflection effect of high-intensity light. To do.
It is characterized by that.
さらに、本発明者は上記の目的を達成するために鋭意検討した結果、少なくとも表面層がチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる基体の表面に不飽和炭化水素、特にアセチレンの燃焼炎を直接当てて特定の条件下で加熱処理するか、又は該基体の表面を特定の条件下で不飽和炭化水素、特にアセチレンの燃焼排ガス雰囲気中で加熱処理することによって、該表面層内部に酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が形成されること、該微細柱が林立している層を該表面層に沿う方向で切断させて該基体上の少なくとも一部に該酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出している部材と、薄膜上に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している部材とが得られること、即ち、この両者とも表面の少なくとも一部に酸化チタン又はチタン合金酸化物からなる多数の突起部を有していること、この両者とも有用な多機能材であること、また該酸化チタン又はチタン合金酸化物からなる突起部である微細柱、連続した狭幅突起部が炭素ドープされていることにより、光触媒活性が高く、可視光応答型光触媒として機能し、更にＶＯＣも容易に吸着でき、硬度も高く、耐剥離性、耐摩耗性、耐薬品性、耐熱性に優れた多機能材が得られること、そして、当該多機能材の表面層に研磨を施すことによりレーザなどの高強度光の反射効果が得られることを見出し、本発明を完成した。 Furthermore, as a result of intensive investigations to achieve the above object, the present inventor has found that at least the surface layer burns unsaturated hydrocarbons, particularly acetylene, on the surface of the substrate made of titanium, titanium oxide, titanium alloy or titanium alloy oxide. Heat treatment is performed under specific conditions by direct application of a flame, or the surface of the substrate is heat-treated in a combustion exhaust gas atmosphere of unsaturated hydrocarbons, particularly acetylene, under specific conditions. A layer in which fine columns made of titanium oxide or a titanium alloy oxide are formed is formed, and the layer in which the fine columns are formed is cut in a direction along the surface layer to at least part of the substrate. A member in which a layer in which fine columns made of titanium oxide or a titanium alloy oxide are exposed is exposed, and a plurality of continuous narrow protrusions made of titanium oxide or a titanium alloy oxide on a thin film And a member having exposed fine columns standing on the protrusions, that is, both of which have a large number of protrusions made of titanium oxide or titanium alloy oxide on at least a part of the surface. Both of these are useful multifunctional materials, and the fine pillars that are protrusions made of the titanium oxide or titanium alloy oxide, and the continuous narrow protrusions are carbon-doped, A multifunctional material with high photocatalytic activity, functioning as a visible light responsive photocatalyst, easily adsorbing VOC, high hardness, exfoliation resistance, abrasion resistance, chemical resistance, and heat resistance. And it discovered that the reflective effect of high intensity lights, such as a laser, was acquired by grind | polishing the surface layer of the said multifunctional material, and completed this invention.
即ち、本発明の第２の鏡面を有する多機能材は、表面の少なくとも一部に酸化チタン又はチタン合金酸化物からなる多数の突起部を有しており、例えば、表面の少なくとも一部に酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出しているか又は薄膜上に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出しており、該突起部、例えば該微細柱、該狭幅突起部が炭素ドープされ、さらに表面層に研磨による鏡面加工が施されてなる多機能材（第２の多機能材）であることを特徴とする。 That is, the multifunctional material having the second mirror surface of the present invention has a large number of protrusions made of titanium oxide or titanium alloy oxide on at least a part of the surface. For example, at least a part of the surface is oxidized. A layer in which fine columns made of titanium or titanium alloy oxide are forested is exposed, or a large number of continuous narrow projections made of titanium oxide or titanium alloy oxide on a thin film, and forested on the projections. A multi-functional material (second multi-layer material) in which the protrusions, for example, the fine pillars and the narrow protrusions are carbon-doped, and the surface layer is mirror-finished by polishing. Functional material).
本発明の第１の鏡面を有する多機能材は、耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に優れ且つ可視光応答型光触媒として機能するので、可視光応答型光触媒として使用できるだけでなく、従来硬質クロムめっきが利用されていた種々の技術分野にも有意に利用できる。また、基材の電位を低下させて孔食や全面腐食、並びに応力腐食割れ等の防止等を目的とする製品への応用が期待できる。さらに、紫外線のみならずγ線等の放射線に応答する放射線応答型触媒として使用すれば、他の成膜手法と比較して容易に成膜でき、かつ耐久性を向上させることもできる。また、表面層に研磨による鏡面加工が施されているので、レーザなどの反射効果を得ることができる。なおこの多機能材は耐熱性が高いため高温である高強度光の反射板に用いるのに特に適している。 The multifunctional material having the first mirror surface of the present invention has excellent durability (high hardness, scratch resistance, abrasion resistance, chemical resistance, heat resistance) and functions as a visible light responsive photocatalyst. Not only can it be used as a photoresponsive photocatalyst, it can also be used significantly in various technical fields where hard chrome plating has been used. In addition, it can be expected to be applied to products aimed at reducing the potential of the base material to prevent pitting corrosion, overall corrosion, stress corrosion cracking, and the like. Furthermore, if it is used as a radiation-responsive catalyst that responds to radiation such as γ rays as well as ultraviolet rays, film formation can be facilitated and durability can be improved as compared with other film formation methods. Further, since the surface layer is mirror-finished by polishing, a reflection effect such as a laser can be obtained. This multi-functional material is particularly suitable for use in a high-intensity light reflector having a high temperature because of its high heat resistance.
本発明の第２の鏡面を有する多機能材は、光触媒活性が高く、可視光応答型光触媒として機能し、更にＶＯＣも容易に吸着でき、硬度も高く、耐剥離性、耐摩耗性、耐薬品性、耐熱性に優れ、さらにレーザなどの高強度光の反射効果を得ることもできる。 The multifunctional material having the second mirror surface of the present invention has high photocatalytic activity, functions as a visible light responsive photocatalyst, can easily adsorb VOC, has high hardness, peel resistance, abrasion resistance, chemical resistance In addition, it is possible to obtain a reflection effect of high intensity light such as a laser.
なお本発明の鏡面を有する多機能材は、その耐久性により海水中や薬品中で利用した場合にも腐食することがほとんどなく、また、有機質分解作用により海中で使用される場合にも海洋生物の付着が低減される。
さらに本発明の鏡面を有する多機能材は、湿度が高い場所で利用されても、光親水性による防曇効果が発現し、曇りにくいといった効果もある。
The multi-functional material having a mirror surface of the present invention hardly corrodes even when used in seawater or chemicals due to its durability, and also when used in the sea due to organic decomposition, Adhesion is reduced.
Furthermore, even if the multifunctional material having a mirror surface of the present invention is used in a place with high humidity, the antifogging effect due to the photohydrophilic property is exhibited and there is an effect that it is difficult to fog.
なお、耐久性を重視するなら第１の多機能材を用いるのが好ましく、光触媒活性の高さを重視するなら第２の多機能材を用いるのが好ましい。 Note that the first multifunctional material is preferably used if importance is attached to the durability, and the second multifunctional material is preferably used if importance is attached to the high photocatalytic activity.
以下、本発明を実施するための最良の一形態について説明する。 Hereinafter, the best mode for carrying out the present invention will be described.
本発明の第１の鏡面を有する多機能材は、少なくとも表面層がチタン、チタン合金、チタン合金酸化物又は酸化チタンからなる基体の表面を、例えば、炭化水素を主成分とするガスの燃焼炎を用いて高温で加熱処理することにより製造することができるが、この少なくとも表面層がチタン、チタン合金、チタン合金酸化物又は酸化チタンからなる基体は、その基体の全体がチタン、チタン合金、チタン合金酸化物又は酸化チタンの何れかで構成されていても、或いは表面部形成層と心材とで構成されていてそれらの材質が異なっていてもよい。また、その基体の形状については、高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性等の耐久性が望まれる最終商品形状（平板状や立体状）や、表面に可視光応答型光触媒機能を有することが望まれる最終商品形状であってもよい。 The multifunctional material having the first mirror surface of the present invention has a surface of a base body having at least a surface layer made of titanium, a titanium alloy, a titanium alloy oxide, or titanium oxide, for example, a gas combustion flame mainly containing hydrocarbons. Can be produced by heat treatment at a high temperature, but the substrate whose at least surface layer is made of titanium, titanium alloy, titanium alloy oxide or titanium oxide is made of titanium, titanium alloy, titanium. It may be composed of either alloy oxide or titanium oxide, or may be composed of a surface portion forming layer and a core material, and the materials thereof may be different. In addition, regarding the shape of the substrate, the final product shape (flat or three-dimensional) where durability such as high hardness, scratch resistance, abrasion resistance, chemical resistance, and heat resistance is desired, or visible light on the surface It may be the final product shape desired to have a responsive photocatalytic function.
少なくとも表面層がチタン、チタン合金、チタン合金酸化物又は酸化チタンからなる基体が表面部形成層と心材とで構成されていてそれらの材質が異なっている場合には、その表面部形成層の厚さは形成される炭素ドープ酸化チタン層の厚さと同一であっても（即ち、表面部形成層全体が炭素ドープ酸化チタン層となる）、厚くてもよい（即ち、表面部形成層の厚さ方向の一部が炭素ドープ酸化チタン層となり、一部がそのまま残る）。また、その心材の材質は第１の発明の製造方法における加熱処理の際に燃焼したり、溶融したり、変形したりするものでなければ、特に制限されることはない。例えば、心材として鉄、鉄合金、非鉄合金、セラミックス、その他の陶磁器、高温耐熱性ガラス等を用いることができる。このような薄膜状の表面層と心材とで構成されている基体としては、例えば、心材の表面にチタン、チタン合金、チタン合金酸化物又は酸化チタンからなる皮膜をスパッタリング、蒸着、溶射等の方法で形成したもの、あるいは、市販の酸化チタンゾルをスプレーコーティング、スピンコーティングやディッピングにより心材の表面上に付与して皮膜を形成したもの等を挙げることができる。 If at least the surface layer is made of titanium, titanium alloy, titanium alloy oxide or titanium oxide and the surface portion forming layer and the core material are different from each other, the thickness of the surface portion forming layer The thickness may be the same as the thickness of the carbon-doped titanium oxide layer to be formed (that is, the entire surface portion forming layer becomes a carbon-doped titanium oxide layer) or may be thick (that is, the thickness of the surface portion forming layer). Part of the direction becomes a carbon-doped titanium oxide layer, and part remains as it is). The material of the core is not particularly limited as long as it does not burn, melt, or deform during the heat treatment in the manufacturing method of the first invention. For example, iron, iron alloy, non-ferrous alloy, ceramics, other ceramics, high temperature heat resistant glass, etc. can be used as the core material. Examples of the substrate composed of such a thin film-like surface layer and a core material include, for example, a method of sputtering, vapor deposition, thermal spraying, etc., on a surface of the core material made of titanium, titanium alloy, titanium alloy oxide, or titanium oxide. Or a film formed by applying a commercially available titanium oxide sol on the surface of the core material by spray coating, spin coating or dipping.
また、第１の鏡面を有する多機能材は、炭素ドープされた酸化チタン又はチタン合金酸化物からなる層と中間層と心材とで構成されており、該中間層がチタン、チタン合金、チタン合金酸化物又は酸化チタンであり、該心材がチタン、チタン合金及び酸化チタン以外の材質で構成されていてもよい。 The multifunctional material having the first mirror surface is composed of a layer made of carbon-doped titanium oxide or titanium alloy oxide, an intermediate layer, and a core material, and the intermediate layer is made of titanium, titanium alloy, titanium alloy. It is an oxide or titanium oxide, and the core material may be made of a material other than titanium, a titanium alloy, and titanium oxide.
上記のチタン合金として公知の種々のチタン合金を用いることができ、特に制限されることはない。例えば、Ｔｉ−６Ａｌ−４Ｖ、Ｔｉ−６Ａｌ−６Ｖ−２Ｓｎ、Ｔｉ−６Ａｌ−２Ｓｎ−４Ｚｒ−６Ｍｏ、Ｔｉ−１０Ｖ−２Ｆｅ−３Ａｌ、Ｔｉ−７Ａｌ−４Ｍｏ、Ｔｉ−５Ａｌ−２.５Ｓｎ、Ｔｉ−６Ａｌ−５Ｚｒ−０.５Ｍｏ−０.２Ｓｉ、Ｔｉ−５.５Ａｌ−３.５Ｓｎ−３Ｚｒ−０.３Ｍｏ−１Ｎｂ−０.３Ｓｉ、Ｔｉ−８Ａｌ−１Ｍｏ−１Ｖ、Ｔｉ−６Ａｌ−２Ｓｎ−４Ｚｒ−２Ｍｏ、Ｔｉ−５Ａｌ−２Ｓｎ−２Ｚｒ−４Ｍｏ−４Ｃｒ、Ｔｉ−１１.５Ｍｏ−６Ｚｒ−４.５Ｓｎ、Ｔｉ−１５Ｖ−３Ｃｒ−３Ａｌ−３Ｓｎ、Ｔｉ−１５Ｍｏ−５Ｚｒ−３Ａｌ、Ｔｉ−１５Ｍｏ−５Ｚｒ、Ｔｉ−１３Ｖ−１１Ｃｒ−３Ａｌ等を用いることができる。 Various known titanium alloys can be used as the titanium alloy, and are not particularly limited. For example, Ti-6Al-4V, Ti-6Al-6V-2Sn, Ti-6Al-2Sn-4Zr-6Mo, Ti-10V-2Fe-3Al, Ti-7Al-4Mo, Ti-5Al-2.5Sn, Ti- 6Al-5Zr-0.5Mo-0.2Si, Ti-5.5Al-3.5Sn-3Zr-0.3Mo-1Nb-0.3Si, Ti-8Al-1Mo-1V, Ti-6Al-2Sn-4Zr- 2Mo, Ti-5Al-2Sn-2Zr-4Mo-4Cr, Ti-11.5Mo-6Zr-4.5Sn, Ti-15V-3Cr-3Al-3Sn, Ti-15Mo-5Zr-3Al, Ti-15Mo-5Zr, Ti-13V-11Cr-3Al or the like can be used.
第１の鏡面を有する多機能材の製造においては、炭化水素、特にアセチレンを主成分とするガスの燃焼炎を用いることができ、特に還元炎を利用することが望ましい。第１の鏡面を有する多機能材の製造においてはこの炭化水素を主成分とするガスとは炭化水素を少なくとも５０容量％含有するガスを意味し、例えば、アセチレンを少なくとも５０容量％含有し、適宜、空気、水素、酸素等を混合したガスを意味する。この鏡面を有する多機能材の製造においては、炭化水素を主成分とするガスがアセチレンを５０容量％以上含有することが好ましく、炭化水素がアセチレン１００％であることが最も好ましい。不飽和炭化水素、特に三重結合を有するアセチレンを用いた場合には、その燃焼の過程で、特に還元炎部分で、不飽和結合部分が分解して中間的なラジカル物質が形成され、このラジカル物質は活性が強いので炭素ドープが生じ易いと考えられる。 In the production of the multifunctional material having the first mirror surface, a gas combustion flame mainly composed of hydrocarbons, particularly acetylene, can be used, and it is particularly desirable to use a reducing flame. In the production of the multifunctional material having the first mirror surface, the hydrocarbon-based gas means a gas containing at least 50% by volume of hydrocarbon, for example, containing at least 50% by volume of acetylene. It means a gas mixed with air, hydrogen, oxygen and the like. In the production of the multifunctional material having this mirror surface, the gas containing hydrocarbon as a main component preferably contains 50% by volume or more of acetylene, and the hydrocarbon is most preferably 100% of acetylene. When unsaturated hydrocarbons, especially acetylene having a triple bond, are used, in the process of combustion, especially in the reducing flame part, the unsaturated bond part decomposes to form an intermediate radical substance. It is considered that carbon doping is likely to occur because of its high activity.
第１の鏡面を有する多機能材の製造において、加熱処理する基体の表面層がチタン又はチタン合金である場合には、該チタン又はチタン合金を酸化する酸素が必要であり、その分だけ空気又は酸素を含んでいる必要がある。 In the production of the multifunctional material having the first mirror surface, when the surface layer of the substrate to be heat-treated is titanium or a titanium alloy, oxygen that oxidizes the titanium or titanium alloy is necessary, and air or It needs to contain oxygen.
第１の鏡面を有する多機能材の製造においては、表面層がチタン、チタン合金、チタン合金酸化物又は酸化チタンからなる基体の表面を、炭化水素を主成分とするガスの燃焼炎を用いて高温で加熱処理するが、この場合に、基体の表面に炭化水素を主成分とするガスの燃焼炎を直接当てて高温で加熱処理しても、そのような基体の表面を炭化水素を主成分とするガスの燃焼ガス雰囲気中で高温で加熱処理してもよく、この加熱処理は例えば炉内で実施することができる。燃焼炎を直接当てて高温で加熱処理する場合には、上記のような燃料ガスを炉内で燃焼させ、その燃焼炎を該基体の表面に当てればよい。燃焼ガス雰囲気中で高温で加熱処理する場合には、上記のような燃料ガスを炉内で燃焼させ、その高温の燃焼ガス雰囲気を利用する。 In the manufacture of the multifunctional material having the first mirror surface, the surface of the substrate whose surface layer is made of titanium, titanium alloy, titanium alloy oxide, or titanium oxide is used using a gas combustion flame mainly composed of hydrocarbons. Heat treatment is performed at a high temperature. In this case, even if a gas combustion flame containing hydrocarbon as a main component is directly applied to the surface of the substrate and heat treatment is performed at a high temperature, the surface of such a substrate is mainly composed of hydrocarbon. The heat treatment may be carried out at a high temperature in a combustion gas atmosphere of the gas, and this heat treatment can be carried out in a furnace, for example. When heat treatment is performed at a high temperature by directly applying a combustion flame, the above-described fuel gas may be burned in a furnace and the combustion flame may be applied to the surface of the substrate. When heat treatment is performed in a combustion gas atmosphere at a high temperature, the above fuel gas is burned in a furnace and the high-temperature combustion gas atmosphere is used.
加熱処理については、基体の表面温度が９００〜１５００℃、好ましくは１０００〜１２００℃となり、基体の表面層として炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層が形成されるように加熱処理する必要がある。基体の表面温度が９００℃未満で終わる加熱処理の場合には、得られる炭素ドープ酸化チタン層を有する基体の耐久性は不十分となり、且つ可視光下での光触媒活性も不十分となる。一方、基体の表面温度が１５００℃を超える加熱処理の場合には、加熱処理後の冷却時にその基体表面部から極薄膜の剥離が生じ、第１の発明で目的としている耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）の効果が得られない。又、基体の表面温度が９００〜１５００℃の範囲内となる加熱処理の場合であっても、加熱処理時間が長くなると、加熱処理後の冷却時にその基体表面部から極薄膜の剥離が生じ、第１の発明で目的としている耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）の効果が得られないので、加熱処理後の冷却時にその基体表面部に剥離をもたらさない程度の時間であることが必要である。即ち、その加熱処理時間は該表面層を炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層とするのに十分な時間であるが加熱後の冷却時にその基体表面部からの極薄膜の剥離をもたらすことのない時間である必要がある。この加熱処理時間は加熱温度と相関関係にあるが、約４００秒以下であることが好ましい。 Regarding the heat treatment, the surface temperature of the substrate is 900 to 1500 ° C., preferably 1000 to 1200 ° C., and a carbon-doped titanium oxide layer doped with carbon in a Ti—C bond state is formed as the surface layer of the substrate. It is necessary to heat-treat. In the case of the heat treatment in which the surface temperature of the substrate ends below 900 ° C., the durability of the substrate having the carbon-doped titanium oxide layer obtained is insufficient and the photocatalytic activity under visible light is also insufficient. On the other hand, in the case of heat treatment in which the surface temperature of the substrate exceeds 1500 ° C., the ultrathin film peels off from the surface of the substrate during cooling after the heat treatment, and the durability (high hardness, (Scratch resistance, abrasion resistance, chemical resistance, heat resistance) effect cannot be obtained. Moreover, even in the case of the heat treatment in which the surface temperature of the substrate is in the range of 900 to 1500 ° C., if the heat treatment time becomes long, the ultrathin film is peeled off from the surface of the substrate during cooling after the heat treatment, Since the effect of durability (high hardness, scratch resistance, abrasion resistance, chemical resistance, heat resistance), which is the object of the first invention, cannot be obtained, it peels off on the surface of the substrate during cooling after heat treatment. It is necessary to have a time that does not bring about That is, the heat treatment time is sufficient to make the surface layer a carbon-doped titanium oxide layer doped with carbon in a Ti-C bond state. It must be a time that does not result in peeling of the thin film. This heat treatment time is correlated with the heating temperature, but is preferably about 400 seconds or less.
第１の鏡面を有する多機能材の製造においては、加熱温度及び加熱処理時間を調整することにより炭素を０.３〜１５ａｔ％、好ましくは１〜１０ａｔ％含有する炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層を比較的容易に得ることができる。炭素のドープ量が少ない場合には炭素ドープ酸化チタン層は透明であり、炭素のドープ量が増えるに従って炭素ドープ酸化チタン層は半透明、不透明となる。従って、透明な板状心材の上に透明な炭素ドープ酸化チタン層を形成することにより耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に優れ且つ可視光応答型光触媒として機能する透明板を得ることができ、また、表面に有色模様を有する板上に透明な炭素ドープ酸化チタン層を形成することにより耐久性（高硬度、耐スクラッチ性、耐磨耗性、耐薬品性、耐熱性）に優れ且つ可視光応答型光触媒として機能する化粧板を得ることができる。 In the production of the multifunctional material having the first mirror surface, the carbon containing 0.3 to 15 at%, preferably 1 to 10 at% of carbon is in a Ti-C bond state by adjusting the heating temperature and the heat treatment time. A carbon-doped titanium oxide layer doped with can be obtained relatively easily. When the carbon doping amount is small, the carbon-doped titanium oxide layer is transparent, and as the carbon doping amount increases, the carbon-doped titanium oxide layer becomes translucent and opaque. Therefore, by forming a transparent carbon-doped titanium oxide layer on a transparent plate-shaped core material, it has excellent durability (high hardness, scratch resistance, abrasion resistance, chemical resistance, heat resistance) and visible light response A transparent plate that functions as a mold photocatalyst can be obtained, and durability (high hardness, scratch resistance, abrasion resistance) can be obtained by forming a transparent carbon-doped titanium oxide layer on a plate having a colored pattern on the surface. , A decorative plate that is excellent in chemical resistance and heat resistance) and functions as a visible light responsive photocatalyst.
炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層を有する鏡面を有する多機能材においては、炭素ドープ酸化チタン層の厚さは１０ｎｍ以上であることが好ましく、高硬度、耐スクラッチ性、耐摩耗性を達成するためには５０ｎｍ以上であることが一層好ましい。炭素ドープ酸化チタン層の厚さが１０ｎｍ未満である場合には、得られる炭素ドープ酸化チタン層を有する鏡面を有する多機能材の耐久性は不十分となる傾向がある。炭素ドープ酸化チタン層の厚さの上限については、コストと達成される効果とを考慮する必要があるが、特に制限されるものではない。 In the multifunctional material having a mirror surface having a carbon-doped titanium oxide layer doped with carbon in a Ti-C bond state, the thickness of the carbon-doped titanium oxide layer is preferably 10 nm or more, and has high hardness and scratch resistance. In order to achieve the properties and wear resistance, the thickness is more preferably 50 nm or more. When the thickness of the carbon-doped titanium oxide layer is less than 10 nm, the durability of the multifunctional material having a mirror surface having the obtained carbon-doped titanium oxide layer tends to be insufficient. The upper limit of the thickness of the carbon-doped titanium oxide layer is not particularly limited, although it is necessary to consider the cost and the effect achieved.
第１の鏡面を有する多機能材の炭素ドープ酸化チタン層は、前記した非特許文献３に記載されているような化学修飾酸化チタンや、従来から提案されている種々の原子又はアニオンＸをドープしてなるチタン化合物Ｔｉ−Ｏ−Ｘを含有する酸化チタンとは異なり、炭素を比較的多量に含有し、ドープされた炭素がＴｉ−Ｃ結合の状態で含まれている。この結果として、耐スクラッチ性、耐磨耗性等の機械的強度が向上し、ビッカース硬度が著しく増大すると考えられる。また、耐熱性も向上する。 The carbon-doped titanium oxide layer of the multifunctional material having the first mirror surface is doped with chemically modified titanium oxide as described in Non-Patent Document 3 described above and various atoms or anions X that have been proposed conventionally. Unlike titanium oxide containing the titanium compound Ti—O—X, the carbon is contained in a relatively large amount, and doped carbon is contained in a Ti—C bond state. As a result, it is considered that mechanical strength such as scratch resistance and abrasion resistance is improved and Vickers hardness is remarkably increased. Moreover, heat resistance is also improved.
第１の鏡面を有する多機能材の炭素ドープ酸化チタン層は、３００以上、好ましくは５００以上、さらに好ましくは７００以上、最も好ましくは１０００以上のビッカース硬度を有している。１０００以上のビッカース硬度は硬質クロムめっきの硬度よりも固いものである。従って、第１の鏡面を有する多機能材は、従来硬質クロムめっきが利用されていた種々の技術分野に有意に利用できる。 The carbon-doped titanium oxide layer of the multifunctional material having the first mirror surface has a Vickers hardness of 300 or more, preferably 500 or more, more preferably 700 or more, and most preferably 1000 or more. A Vickers hardness of 1000 or more is harder than that of hard chrome plating. Therefore, the multifunctional material having the first mirror surface can be significantly used in various technical fields in which hard chrome plating has been conventionally used.
第１の鏡面を有する多機能材の炭素ドープ酸化チタン層は、紫外線は勿論、４００ｎｍ以上の波長の可視光にも応答し、光触媒として有効に作用するものである。従って、第１の鏡面を有する多機能材は可視光応答型光触媒として使用することができ、室外は勿論、室内でも光触媒機能を発現する。また、第１の鏡面を有する多機能材の炭素ドープ酸化チタン層は接触角３°以下の超親水性を示す。 The multifunctional carbon-doped titanium oxide layer having the first mirror surface effectively responds to visible light having a wavelength of 400 nm or more as well as ultraviolet rays, and functions effectively as a photocatalyst. Therefore, the multifunctional material having the first mirror surface can be used as a visible light responsive photocatalyst and exhibits a photocatalytic function not only outdoors but also indoors. In addition, the carbon-doped titanium oxide layer of the multifunctional material having the first mirror surface exhibits super hydrophilicity with a contact angle of 3 ° or less.
更に、第１の鏡面を有する多機能材の炭素ドープ酸化チタン層は耐薬品性にも優れており、１Ｍ硫酸及び１Ｍ水酸化ナトリウムのそれぞれの水溶液に一週間浸漬した後、皮膜硬度、耐摩耗性及び光電流密度を測定し、処理前の測定値と比較したところ、有為な変化はみられなかった。因みに、市販の酸化チタン皮膜については、一般的にはバインダーはその種類によって酸又はアルカリに溶解するので膜が剥離してしまい、耐酸性、耐アルカリ性がほとんどない。 Furthermore, the carbon-doped titanium oxide layer of the multifunctional material having the first mirror surface has excellent chemical resistance, and after being immersed in an aqueous solution of 1M sulfuric acid and 1M sodium hydroxide for one week, the film hardness and abrasion resistance When the property and the photocurrent density were measured and compared with the measured values before the treatment, no significant change was observed. Incidentally, with respect to commercially available titanium oxide films, generally, the binder dissolves in acid or alkali depending on the kind thereof, so that the film peels off, and there is almost no acid resistance and alkali resistance.
更に、本発明の第１の鏡面を有する多機能材の炭素ドープ酸化チタン層は、γ線等の放射線にも応答する触媒としても使用できる。すなわち、本発明者らは、酸化チタン等の溶射膜が放射線に応答して原子炉構造部材の応力腐食割れやスケール付着等を抑制することを先に発明しているが、本発明の第１の鏡面を有する多機能材の炭素ドープ酸化チタン層も同様にこのような放射線応答型触媒として使用した場合に、基材の電位を低下させて孔食や全面腐食、並びに応力腐食割れを抑制でき、また酸化力によりスケールや汚れ等を分解することができるという効果を奏する。他の放射線触媒の成膜法と比較して簡便であり、かつ耐薬品性及び耐摩耗性等の耐久性の観点からも優れている。 Further, the multifunctional carbon-doped titanium oxide layer having the first mirror surface of the present invention can be used as a catalyst that also responds to radiation such as γ rays. That is, the present inventors have invented that a sprayed film such as titanium oxide suppresses stress corrosion cracking, scale adhesion, and the like of a nuclear reactor structural member in response to radiation. Similarly, the multi-functional carbon-doped titanium oxide layer with a mirror surface can also reduce pitting corrosion, overall corrosion, and stress corrosion cracking by lowering the substrate potential when used as such a radiation-responsive catalyst. In addition, the effect of being able to decompose scale, dirt and the like by the oxidizing power is achieved. It is simpler than other radiocatalyst film-forming methods, and is excellent from the viewpoint of durability such as chemical resistance and wear resistance.
本発明の第１の鏡面を有する多機能材の製造においては、上述した加熱処理が施されたあと、多機能材の表面を鏡面化するための研磨処理が施される。鏡面化は、多機能材の表面を平滑化する場合には例えば電解研磨やバフ研磨などの研磨方法による。「電解研磨」は、正極とされた多機能材の表面層と対極との間に、電解液を介して直流電流を流すことで、多機能材の表面を平滑化する研磨方法である。電解研磨によって多機能材の表面が平滑化されると、その表面が光沢のある鏡面状となる。すなわち、多機能材の表面は鏡面加工が施された状態となり、鏡面を有する多機能材の表面に入射したレーザ光などの光が反射されるようになる。このように、電解研磨処理による鏡面加工が施されることによって、レーザなどの高強度光の反射効果を得ることができる。 In the production of the multifunctional material having the first mirror surface of the present invention, after the heat treatment described above is performed, a polishing process for mirroring the surface of the multifunctional material is performed. The mirror surface is formed by a polishing method such as electrolytic polishing or buffing when the surface of the multifunctional material is smoothed. “Electrolytic polishing” is a polishing method in which the surface of a multifunctional material is smoothed by passing a direct current through the electrolytic solution between the surface layer and the counter electrode of the multifunctional material used as the positive electrode. When the surface of the multifunctional material is smoothed by electropolishing, the surface becomes a glossy mirror surface. That is, the surface of the multifunctional material is mirror-finished, and light such as laser light incident on the surface of the multifunctional material having a mirror surface is reflected. As described above, the mirror surface processing by the electrolytic polishing process is performed, so that a reflection effect of high-intensity light such as a laser can be obtained.
なお、研磨処理が施された鏡面を有する多機能材においては、研磨処理が施される前の状態にて得られていた上述した各種効果がほぼそのまま維持されている。 In the multifunctional material having a mirror surface that has been subjected to the polishing treatment, the above-described various effects obtained in the state prior to the polishing treatment are maintained as they are.
因みに本発明の鏡面を有する多機能材は波長の短い可視光や紫外線を吸収するため、これを鏡として利用するときには問題が生じる場合がある。しなしながらその場合には、上記加熱処理で望ましいとされている還元炎を中性炎に近づける方法か、成膜後に酸素や一酸化炭素ガスなどの酸化力の高いガス雰囲気中で酸化させる方法の一方または両方の方法により、カーボンドープ量を減少させ、これにより吸収波長帯をルチルの４１０ｎｍまで短波長化ができる。 Incidentally, since the multifunctional material having a mirror surface of the present invention absorbs visible light or ultraviolet light having a short wavelength, there may be a problem when this is used as a mirror. However, in that case, a method of bringing the reducing flame, which is desirable in the heat treatment, close to a neutral flame, or a method of oxidizing in a gas atmosphere having high oxidizing power such as oxygen or carbon monoxide gas after film formation By one or both of the methods, the amount of carbon dope can be reduced, whereby the absorption wavelength band can be shortened to 410 nm of rutile.
本発明の第２の鏡面を有する多機能材は、少なくとも表面層がチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる基体の表面を例えば不飽和炭化水素、特にアセチレンの燃焼炎で加熱処理して、該表面層内部に酸化チタン又はチタン合金酸化物からなる微細柱が林立している層を形成させ、次いで、例えば熱応力、剪断応力、引張力を与えて、該微細柱が林立している層を該表面層に沿う方向で切断させて該基体上の少なくとも一部に、普通には該基体上の大部分に該酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出している部材と、薄膜上に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している部材とを得ることにより製造できる。 In the multifunctional material having the second mirror surface of the present invention, at least the surface of the substrate whose surface layer is made of titanium, titanium oxide, titanium alloy or titanium alloy oxide is heat-treated with a combustion flame of, for example, an unsaturated hydrocarbon, particularly acetylene. Then, a layer in which fine columns made of titanium oxide or titanium alloy oxide are erected is formed inside the surface layer, and then, for example, thermal stress, shearing stress, and tensile force are applied, so that the fine columns are erected. The layer is cut in a direction along the surface layer, and fine columns made of the titanium oxide or titanium alloy oxide are forested on at least a part of the substrate, usually on the majority of the substrate. A member in which the layer is exposed and a member in which a large number of continuous narrow protrusions made of titanium oxide or titanium alloy oxide on the thin film and fine columns standing on the protrusions are exposed Can be manufactured.
この少なくとも表面層がチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる基体は、その基体の全体がチタン、酸化チタン、チタン合金又はチタン合金酸化物の何れかで構成されていてもよく、或いはチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる表面部形成層とその他の材質からなる心材とで構成されていてもよい。また、その基体の形状については、光触媒活性及び／又は超親水性が望まれる如何なる最終商品形状（平板状や立体状）であってもよい。 The substrate whose at least surface layer is made of titanium, titanium oxide, titanium alloy or titanium alloy oxide, the entire substrate may be composed of titanium, titanium oxide, titanium alloy or titanium alloy oxide, Or you may be comprised by the core part which consists of a surface part formation layer which consists of titanium, a titanium oxide, a titanium alloy, or a titanium alloy oxide, and another material. Further, the shape of the substrate may be any final product shape (flat plate shape or three-dimensional shape) where photocatalytic activity and / or super hydrophilicity is desired.
少なくとも表面層がチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる基体が、チタン、酸化チタン、チタン合金又はチタン合金酸化物からなる表面部形成層とその他の材質からなる心材とで構成されている場合には、その表面部形成層の厚さ（量）は形成される酸化チタン又はチタン合金酸化物からなる微細柱が林立している層の量に匹敵する厚さであっても（即ち、表面部形成層全体が酸化チタン又はチタン合金酸化物からなる微細柱が林立している層となる）、それより厚くてもよい（即ち、表面部形成層の厚さ方向の一部が酸化チタン又はチタン合金酸化物からなる微細柱が林立している層となり、残部が変化しないでそのまま残る）。また、その心材の材質は第２の鏡面を有する多機能材の製造における加熱処理の際に燃焼したり、溶融したり、変形したりするものでなければ、特に制限されることはない。例えば、心材として鉄、鉄合金、非鉄合金、ガラス、セラミックス、その他の陶磁器を用いることができる。このような薄膜状の表面層と心材とで構成されている基体としては、第１の発明で記載されたものと、同様のものを使用することができる。この表面層の厚さについては好ましくは０．５μｍ以上、より好ましくは４μｍ以上である。 At least the surface layer is made of titanium, titanium oxide, a titanium alloy or a titanium alloy oxide, and the substrate is composed of a surface portion forming layer made of titanium, titanium oxide, a titanium alloy or a titanium alloy oxide and a core material made of other materials. The thickness (amount) of the surface portion forming layer is equal to the amount of the layer in which fine columns made of titanium oxide or titanium alloy oxide are formed ( That is, the entire surface portion forming layer is a layer in which fine columns made of titanium oxide or titanium alloy oxide are erected), or may be thicker (that is, a part of the surface portion forming layer in the thickness direction is A fine column made of titanium oxide or titanium alloy oxide becomes a forested layer, and the rest remains unchanged.) Further, the material of the core material is not particularly limited as long as it does not burn, melt or deform during the heat treatment in the production of the multifunctional material having the second mirror surface. For example, iron, iron alloy, non-ferrous alloy, glass, ceramics, and other ceramics can be used as the core material. As the substrate composed of such a thin film-like surface layer and a core material, those similar to those described in the first invention can be used. The thickness of this surface layer is preferably 0.5 μm or more, more preferably 4 μm or more.
チタン合金としては、公知の種々のチタン合金を用いることができ、特に制限されることはなく、第１の鏡面を有する多機能材と同様のものが用いられる。 Various known titanium alloys can be used as the titanium alloy, and there is no particular limitation, and the same multi-functional material having the first mirror surface is used.
第２の鏡面を有する多機能材の製造においては、例えば、不飽和炭化水素、特にアセチレンを主成分とするガスの燃焼炎を用い、特に還元炎を利用することが望ましい。第２の鏡面を有する多機能材の製造においては不飽和炭化水素を少なくとも５０容量％含有するガス、例えば、アセチレンを少なくとも５０容量％含有し、適宜、空気、水素、酸素等を混合したガスを用いることが好ましい。第２の鏡面を有する多機能材の製造においては、燃料成分がアセチレン１００％であることが最も好ましい。不飽和炭化水素、特に三重結合を有するアセチレンを用いた場合には、その燃焼の過程で、特に還元炎部分で、不飽和結合部分が分解して中間的なラジカル物質が形成され、このラジカル物質は活性が強いので炭素ドープが生じ易く、ドープされた炭素がＴｉ−Ｃ結合の状態で含まれる。このように微細柱に炭素ドープが生じると微細柱の硬度が高くなり、結果として鏡面を有する多機能材の硬度、耐磨耗性等の機械的強度が向上し、耐熱性も向上する。 In the production of the multifunctional material having the second mirror surface, for example, it is desirable to use a combustion flame of a gas mainly containing an unsaturated hydrocarbon, particularly acetylene, and particularly to use a reducing flame. In the production of the multifunctional material having the second mirror surface, a gas containing at least 50% by volume of unsaturated hydrocarbon, for example, a gas containing at least 50% by volume of acetylene and appropriately mixed with air, hydrogen, oxygen, etc. It is preferable to use it. In the production of the multifunctional material having the second mirror surface, the fuel component is most preferably 100% acetylene. When unsaturated hydrocarbons, especially acetylene having a triple bond, are used, in the process of combustion, especially in the reducing flame part, the unsaturated bond part decomposes to form an intermediate radical substance. Has a strong activity, and carbon doping is likely to occur, and doped carbon is contained in a Ti-C bond state. Thus, when carbon dope arises in a fine pillar, the hardness of a fine pillar will become high, and as a result, mechanical strength, such as hardness of a multifunctional material which has a mirror surface, and abrasion resistance will improve, and heat resistance will also improve.
第２の鏡面を有する多機能材の製造においては、表面層がチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる基体の表面に燃焼炎を直接当てて加熱処理するか、又は該基体の表面を燃焼排ガス雰囲気中で加熱処理するのであるが、この加熱処理は例えばガスバーナーにより、或いは炉内で実施することができる。燃焼炎を直接当てて高温で加熱処理する場合には、ガスバーナーにより、その燃焼炎を該基体の表面に当てればよい。燃焼排ガス雰囲気中で高温で加熱処理する場合には、上記のような燃料ガスを炉内で燃焼させ、その高温の燃焼排ガスを含む雰囲気を利用すればよい。 In the production of the multifunctional material having the second mirror surface, the surface layer is subjected to heat treatment by directly applying a combustion flame to the surface of the substrate made of titanium, titanium oxide, titanium alloy or titanium alloy oxide, or The surface is heat-treated in a combustion exhaust gas atmosphere, and this heat-treatment can be performed by, for example, a gas burner or in a furnace. When the combustion flame is directly applied and heat treatment is performed at a high temperature, the combustion flame may be applied to the surface of the substrate by a gas burner. When heat treatment is performed in a combustion exhaust gas atmosphere at a high temperature, the above fuel gas may be burned in a furnace and an atmosphere containing the high-temperature combustion exhaust gas may be used.
加熱処理については、少なくとも表面層がチタン、酸化チタン、チタン合金又はチタン合金酸化物からなる該表面層内部に酸化チタン又はチタン合金酸化物からなる微細柱が林立している層を形成させ、次いで、例えば熱応力、剪断応力、引張力を与えて、該微細柱が林立している層を該表面層に沿う方向で切断させて該基体上の少なくとも一部に該酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出している部材と、薄膜上に該酸化チタン又はチタン合金酸化物からなる多数の連続した幅狭突起部及び該突起部上に林立している微細柱が露出している部材とを得ることが可能なように、加熱温度、加熱処理時間を調整する必要がある。この加熱処理は６００℃以上の温度で実施することが好ましい。 For the heat treatment, at least the surface layer is made of titanium, titanium oxide, a titanium alloy or a titanium alloy oxide, and a layer in which fine columns made of titanium oxide or a titanium alloy oxide stand is formed inside the surface layer. For example, applying a thermal stress, a shear stress, or a tensile force to cut the layer in which the fine pillars are erected in a direction along the surface layer, so that at least a part of the titanium oxide or titanium alloy oxide is formed on the substrate. A member in which the layer in which the fine columns are made of is exposed, a large number of continuous narrow protrusions made of the titanium oxide or titanium alloy oxide on the thin film, and the fines that are made on the protrusions It is necessary to adjust the heating temperature and the heat treatment time so that a member with exposed columns can be obtained. This heat treatment is preferably performed at a temperature of 600 ° C. or higher.
このような条件下で加熱処理することにより、微細柱が林立している層の高さが１〜２０μｍ程度であり、その上の薄膜の厚さが０.１〜１０μｍ程度であり、微細柱の平均太さが０．２〜３μｍ程度である中間体が形成される。その後に、例えば熱応力、剪断応力、引張力を与えて、該微細柱が林立している層を該表面層に沿う方向で切断させることにより、該基体上の少なくとも一部に該酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出している部材（即ち、基体上の微細柱が林立している層の上に存在していた薄膜の全部又は大部分が剥離するが、微細柱が林立している層の上に存在していた薄膜の一部が剥離しないで残ることがある）と、薄膜上に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している部材とを得る。 By performing the heat treatment under such conditions, the height of the layer in which the fine pillars are erected is about 1 to 20 μm, and the thickness of the thin film thereon is about 0.1 to 10 μm. Intermediates having an average thickness of about 0.2 to 3 μm are formed. Thereafter, for example, by applying a thermal stress, a shear stress, or a tensile force to cut the layer in which the fine pillars are erected in a direction along the surface layer, at least a part of the titanium oxide or the substrate is formed on the substrate. A member in which a layer with fine columns made of titanium alloy oxide is exposed (that is, all or most of the thin film existing on the layer with fine columns on the substrate is peeled off) However, a part of the thin film existing on the layer where the fine pillars are erected may remain without being peeled) and a large number of continuous narrow widths made of titanium oxide or titanium alloy oxide on the thin film A protrusion and a member in which a fine pillar standing on the protrusion is exposed are obtained.
熱応力を与えて微細柱が林立している層を表面層に沿う方向で切断させる場合には、例えば、基体の表面及び裏面の何れか一方を冷却するか、又は加熱することにより基体の表面と裏面との間に温度差を設ける。この冷却方法として例えば上記の熱い中間体の表面又は裏面の何れかを冷却用物体、例えばステンレスブロックと接触させるか、冷気（常温の空気）を上記の熱い中間体の表面又は裏面の何れかに吹き付ける。上記の熱い中間体を放冷しても熱応力が生じるが、その程度は低い。 In the case of cutting a layer in which fine columns are erected by applying thermal stress in a direction along the surface layer, for example, either the surface or the back surface of the substrate is cooled or heated to heat the surface of the substrate. A temperature difference is provided between the back surface and the back surface. As this cooling method, for example, either the surface or the back surface of the hot intermediate is brought into contact with a cooling object, such as a stainless steel block, or cold air (room temperature air) is applied to either the surface or the back surface of the hot intermediate. Spray. Even if the hot intermediate is allowed to cool, thermal stress is generated, but the degree is low.
剪断応力を与えて微細柱が林立している層を表面層に沿う方向で切断させる場合には、例えば、上記の中間体の表面及び裏面に摩擦力により相対的に逆方向の力を与える。また、引張力を与えて微細柱が林立している層を表面層に沿う方向で切断させる場合には、例えば、真空吸着盤等を用いて上記の中間体の表面及び裏面をそれらの面の垂直方向で逆方向に引張る。なお、基体上の少なくとも一部に該酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出している部材のみを利用する場合には、上記の中間体の薄膜上に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している部材に相当する部分を研磨、スパッタリング等によって除去することもできる。 When shearing stress is applied and the layer in which the fine pillars are erected is cut in a direction along the surface layer, for example, a relatively reverse force is applied to the front and back surfaces of the intermediate by frictional force. In addition, when a layer in which fine columns are erected is cut in a direction along the surface layer by applying a tensile force, for example, the surface and the back surface of the above intermediate body are removed from those surfaces using a vacuum suction disk or the like. Pull in the opposite direction in the vertical direction. When using only a member in which a layer in which fine columns made of titanium oxide or titanium alloy oxide are forested is exposed on at least a part of the substrate, oxidation is performed on the intermediate thin film. A portion corresponding to a member in which a large number of continuous narrow protrusions made of titanium or a titanium alloy oxide and fine columns standing on the protrusions are exposed can be removed by polishing, sputtering, or the like.
上記のようにして得られた基体上の少なくとも一部に酸化チタン又はチタン合金酸化物からなる微細柱が林立している層が露出している部材においては、微細柱が林立している層を表面層に沿う方向で切断させた微細柱の高さ位置によって微細柱が林立している層の高さが変化するが、微細柱が林立している層の高さは一般的には１〜２０μｍ程度であり、微細柱の平均太さが０.５〜３μｍ程度である。この部材はＶＯＣを容易に吸着でき、表面積が大きいので光触媒としての活性が高く、更には皮膜硬度も高く、耐剥離性、耐摩耗性、耐薬品性、耐熱性にも優れた鏡面を有する多機能材である。 In a member in which a layer with fine columns made of titanium oxide or titanium alloy oxide is exposed on at least a part of the substrate obtained as described above, the layer with fine columns is set Although the height of the layer in which the fine column stands is changed depending on the height position of the fine column cut in the direction along the surface layer, the height of the layer in which the fine column stands is generally 1 to The average thickness of the fine columns is about 0.5 to 3 μm. This member can easily adsorb VOCs, has a large surface area, has high activity as a photocatalyst, and also has high film hardness, and has a mirror surface with excellent peel resistance, wear resistance, chemical resistance, and heat resistance. It is a functional material.
一方、上記のようにして得られた薄膜上に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している部材は小片状となり、各小片上の突起部の高さは２〜１２μｍ程度であり、該微細柱の高さは微細柱が林立している層を表面層に沿う方向で切断させた微細柱の高さ位置によって変化するが、微細柱が林立している層の高さは一般的には１〜５μｍ程度であり、微細柱の平均太さが０．２〜０．５μｍ程度である。しかし、微細柱が林立している層を表面層に沿う方向で切断させる条件によっては微細柱がほとんど存在しないで多数の連続した幅狭突起部が露出している場合もある。この部材もＶＯＣを吸着でき、表面積が大きいので光触媒としての活性が高い。また、この部材はそのまま用いることも粉砕して用いることもでき、その粉砕物もＶＯＣを容易に吸着でき、表面積が大きいので光触媒としての活性が高い。 On the other hand, on the thin film obtained as described above, a large number of continuous narrow protrusions made of titanium oxide or titanium alloy oxide and members with exposed fine columns standing on the protrusions are small. The height of the protrusion on each small piece is about 2 to 12 μm, and the height of the fine column is the height of the fine column obtained by cutting the layer in which the fine column stands in the direction along the surface layer. Although the height varies depending on the position, the height of the layer in which the fine pillars stand is generally about 1 to 5 μm, and the average thickness of the fine pillars is about 0.2 to 0.5 μm. However, depending on the conditions for cutting the layer in which the fine columns are erected in the direction along the surface layer, there are cases where a large number of continuous narrow protrusions are exposed without the presence of the fine columns. This member can also adsorb VOCs and has a large surface area, so it has high activity as a photocatalyst. Further, this member can be used as it is or after being pulverized, and the pulverized product can easily adsorb VOC and has a large surface area, so it has high activity as a photocatalyst.
第２の鏡面を有する多機能材においては、酸化チタン又はチタン合金酸化物からなる微細柱、多数の連続した狭幅突起部及び該突起部上に林立している微細柱が炭素ドープされているので、紫外線は勿論、４００ｎｍ以上の波長の可視光にも応答し、光触媒として特に有効に作用し、可視光応答型光触媒として使用することができ、室外は勿論、室内でも光触媒機能を発現する。 In the multifunctional material having the second mirror surface, fine columns made of titanium oxide or titanium alloy oxide, a large number of continuous narrow projections, and fine columns standing on the projections are carbon-doped. Therefore, it responds not only to ultraviolet rays but also visible light having a wavelength of 400 nm or more, works particularly effectively as a photocatalyst, and can be used as a visible light responsive photocatalyst, and exhibits a photocatalytic function not only outdoors but also indoors.
第２の鏡面を有する多機能材を構成する酸化チタン又はチタン合金酸化物からなる微細柱が林立している層の各々の微細柱の形状については、図１０及び図１３の顕微鏡写真から判断されるように、角柱状、円柱状、角錐状、円錐状、逆角錐状若しくは逆円錐状等で、基板の表面とは直角方向又は傾斜した方向に真っ直ぐ伸びているもの、湾曲又は屈曲しながら伸びているもの、枝状に分岐して伸びているもの、それらの複合体状のもの等がある。また、その全体形状としては、霜柱状、起毛カーペット状、珊瑚状、列柱状、積木で組み立てられた柱状等の種々の表現で示すことができる。また、それらの微細柱の太さ、高さ、その付け根（底面）の大きさ等は加熱条件等により変化する。 The shape of each fine column of the layer in which fine columns made of titanium oxide or titanium alloy oxide constituting the multifunctional material having the second mirror surface are erected is determined from the micrographs of FIGS. 10 and 13. As shown in the figure, a prismatic shape, a cylindrical shape, a pyramid shape, a conical shape, an inverted pyramid shape, an inverted conical shape, etc., which extends straightly in a direction perpendicular to or inclined from the surface of the substrate, extends while being bent or bent. , Branched and extended, and composites thereof. Moreover, as the whole shape, it can show by various expressions, such as a frost column shape, a raising carpet shape, a basket shape, a row column shape, and the column shape assembled with blocks. In addition, the thickness and height of the fine columns, the size of the base (bottom surface), and the like vary depending on heating conditions and the like.
薄膜状に酸化チタン又はチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している部材は、図１２の顕微鏡写真から判断されるように、その多数の連続した幅狭突起部はクルミの殻の外側の外見、軽石の外見をしていると見ることができ、また各々の連続した狭幅突起部は湯じわやちぢみ状の模様が屈曲していると見ることができる。また、該突起部上に林立している微細柱の形状は上記した基体上の微細柱が林立している層の各々の微細柱の形状と同様であるが、微細柱と薄膜との接合部で切断されるものが多いので、該突起部上に林立している微細柱の密度は上記の基体上の微細柱が林立している層の微細柱の密度よりも一般的に小さくなる。 A member in which a large number of continuous narrow protrusions made of titanium oxide or a titanium alloy oxide in a thin film form and fine columns standing on the protrusions are exposed is judged from the micrograph in FIG. In addition, it can be seen that the many continuous narrow protrusions look like the outside of the walnut shell and the appearance of pumice. It can be seen that the pattern is bent. In addition, the shape of the fine column standing on the protrusion is the same as the shape of each fine column in the layer where the fine column on the base is standing, but the junction between the fine column and the thin film Therefore, the density of the fine columns standing on the protrusion is generally smaller than the density of the fine columns in the layer where the fine columns on the base are standing.
以下に、実施例及び比較例に基づいて本発明をさらに詳細に説明する。 Hereinafter, the present invention will be described in more detail based on examples and comparative examples.
［実施例１〜３］
アセチレンの燃焼炎を用い、厚さ０.３ｍｍのチタン板をその表面温度が約１１００℃となるように加熱処理することにより、表面層として炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層を有するチタン板を形成した。１１００℃での加熱処理時間をそれぞれ５秒（実施例１）、３秒（実施例２）、１秒（実施例３）に調整することにより炭素ドープ量及び炭素ドープ酸化チタン層の厚さが異なる炭素ドープ酸化チタン層を有するチタン板を形成した。
[Examples 1 to 3]
Carbon dope in which carbon is doped in a Ti—C bond state as a surface layer by heat-treating a titanium plate having a thickness of 0.3 mm using an acetylene combustion flame so that its surface temperature is about 1100 ° C. A titanium plate having a titanium oxide layer was formed. By adjusting the heat treatment time at 1100 ° C. to 5 seconds (Example 1), 3 seconds (Example 2), and 1 second (Example 3), respectively, the amount of carbon doping and the thickness of the carbon-doped titanium oxide layer were reduced. Titanium plates with different carbon doped titanium oxide layers were formed.
この実施例１〜３で形成された炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層について蛍光Ｘ線分析装置で炭素含有量を求めた。その炭素含有量に基づいてＴｉＯ2-xＣxの分子構造を仮定すると、実施例１については炭素含有量８ａｔ％、ＴｉＯ1. 76Ｃ0.24、実施例２については炭素含有量約３.３ａｔ％、ＴｉＯ1.90Ｃ0.10、実施例３については炭素含有量１.７ａｔ％、ＴｉＯ1.95Ｃ0.05であった。また、実施例１〜３で形成された炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層は、水滴との接触角が２°程度の超親水性であった。 The carbon content was calculated | required with the fluorescent-X-ray-analysis apparatus about the carbon dope titanium oxide layer with which the carbon formed in this Example 1-3 was doped in the state of Ti-C bond. Assuming a molecular structure of TiO 2-x C x based on the carbon content, carbon content 8at% for Example 1, TiO 1. 76 C 0.24, carbon content of about 3.3At% for Examples 2, TiO 1.90 C 0.10 and Example 3 had a carbon content of 1.7 at% and TiO 1.95 C 0.05 . In addition, the carbon-doped titanium oxide layer in which the carbon formed in Examples 1 to 3 was doped in a Ti—C bond state was superhydrophilic with a contact angle of about 2 ° with water droplets.
［比較例１］
市販されている酸化チタンゾル（石原産業製ＳＴＳ−０１）を厚さ０.３ｍｍのチタン板にスピンコートした後、加熱して密着性を高めた酸化チタン皮膜を有するチタン板を形成した。
[Comparative Example 1]
A commercially available titanium oxide sol (STS-01 manufactured by Ishihara Sangyo Co., Ltd.) was spin-coated on a titanium plate having a thickness of 0.3 mm, and then a titanium plate having a titanium oxide film whose adhesion was improved by heating was formed.
［比較例２］
ＳＵＳ板上に酸化チタンがスプレーコートされている市販品を比較例２の酸化チタン皮膜を有する基体とした。
[Comparative Example 2]
A commercially available product in which titanium oxide was spray-coated on a SUS plate was used as the substrate having the titanium oxide film of Comparative Example 2.
試験例１（ビッカース硬度）
実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層及び比較例１の酸化チタン皮膜について、ナノハードネステスター（ＮＨＴ）（スイスのＣＳＭ Ｉｎｓｔｒｕｍｅｎｔｓ製）により、圧子：ベルコビッチタイプ、試験荷重：２ｍＮ、負荷除荷速度：４ｍＮ／ｍｉｎの条件下で皮膜硬度を測定したところ、実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層はビッカース硬度が１３４０と高い値であった。一方、比較例１の酸化チタン皮膜のビッカース硬度は１６０であった。
Test Example 1 (Vickers hardness)
The carbon-doped titanium oxide layer doped with the carbon of Example 1 in a Ti—C bond state and the titanium oxide film of Comparative Example 1 were subjected to indenter: Belkovic using a nanohard nesting tester (NHT) (manufactured by CSM Instruments, Switzerland). When the film hardness was measured under the conditions of type, test load: 2 mN, load unloading speed: 4 mN / min, the carbon-doped titanium oxide layer doped with carbon in the state of Ti-C bond in Example 1 had a Vickers hardness. Was a high value of 1340. On the other hand, the Vickers hardness of the titanium oxide film of Comparative Example 1 was 160.
これらの結果を図１に示す。なお、参考のため、硬質クロムメッキ層及びニッケルメッキ層のビッカース硬度の文献値（友野、「実用めっきマニュアル」、６章、オーム社（１９７１）から引用）を併せて示す。実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層は、ニッケルメッキ層や硬質クロムメッキ層よりも高硬度であることは明らかである。 These results are shown in FIG. For reference, the literature values of Vickers hardness of hard chrome plating layer and nickel plating layer (Tomono, “Practical Plating Manual”, Chapter 6, Ohmsha (1971)) are also shown. It is obvious that the carbon-doped titanium oxide layer in which the carbon of Example 1 is doped in a Ti—C bond state has higher hardness than the nickel plating layer and the hard chromium plating layer.
試験例２（耐スクラッチ性）
実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層及び比較例１の酸化チタン皮膜について、マイクロスクラッチテスター（ＭＳＴ）（スイスのＣＳＭ Ｉｎｓｔｒｕｍｅｎｔｓ製）により、圧子：ロックウェル（ダイヤモンド）、先端半径２００μｍ、初期荷重：０Ｎ、最終荷重：３０Ｎ、負荷速度：５０Ｎ／ｍｉｎ、スクラッチ長：６ｍｍ、ステージ速度：１０．５ｍｍ／ｍｉｎの条件下で耐スクラッチ性試験を実施した。スクラッチ痕内に小さな膜の剥離が起こる「剥離開始」荷重及びスクラッチ痕全体に膜の剥離が起こる「全面剥離」荷重を求めた。その結果は第１表に示す通りであった。
For the carbon-doped titanium oxide layer doped with the carbon of Example 1 in a Ti—C bond state and the titanium oxide film of Comparative Example 1, a microscratch tester (MST) (manufactured by CSM Instruments, Switzerland) was used as an indenter: Rockwell. The scratch resistance test was performed under the conditions of (diamond), tip radius 200 μm, initial load: 0 N, final load: 30 N, load speed: 50 N / min, scratch length: 6 mm, stage speed: 10.5 mm / min. A “peeling start” load at which a small film peels off within the scratch mark and an “overall peel” load at which the film peels across the scratch mark were determined. The results were as shown in Table 1.
この表からも明らかなように、実施例Ａの炭素ドープ酸化チタン層が比較例１の酸化チタン皮膜よりも耐スクラッチ性に優れていることが分かる。 As is apparent from this table, it can be seen that the carbon-doped titanium oxide layer of Example A is superior to the titanium oxide film of Comparative Example 1 in scratch resistance.
試験例３（耐摩耗性）
実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層及び比較例１の酸化チタン皮膜について、高温トライボメーター（ＨＴ−ＴＲＭ）（スイスのＣＳＭ Ｉｎｓｔｒｕｍｅｎｔｓ製）により、試験温度：室温及び４７０℃、ボール：直径１２．４ｍｍのＳｉＣ球、荷重：１Ｎ、摺動速度：２０ｍｍ／ｓｅｃ、回転半径：１ｍｍ、試験回転数：１０００回転の条件下で摩耗試験を実施した。
Test Example 3 (Abrasion resistance)
The carbon-doped titanium oxide layer doped with the carbon of Example 1 in a Ti—C bond state and the titanium oxide film of Comparative Example 1 were tested at a test temperature using a high-temperature tribometer (HT-TRM) (manufactured by CSM Instruments, Switzerland). A wear test was performed under the conditions of: room temperature and 470 ° C., ball: SiC sphere having a diameter of 12.4 mm, load: 1 N, sliding speed: 20 mm / sec, rotation radius: 1 mm, test rotation speed: 1000 rotations.
この結果、比較例１の酸化チタン皮膜については、室温及び４７０℃の両方について剥離が発生したが、実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層については、室温及び４７０℃の両方の条件下で有意なトレース摩耗は検出されなかった。 As a result, for the titanium oxide film of Comparative Example 1, peeling occurred at both room temperature and 470 ° C., but for the carbon-doped titanium oxide layer in which the carbon of Example 1 was doped in a Ti—C bond state, No significant trace wear was detected under both room temperature and 470 ° C conditions.
試験例４（耐薬品性）
実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層を有するチタン板を１Ｍ硫酸水溶液及び１Ｍ水酸化ナトリウム水溶液にそれぞれ室温で１週間浸漬した後、上記の皮膜硬度、耐摩耗性、及び後記する光電流密度を測定したところ、浸漬の前後で、結果に有意な差は認められなかった。即ち、実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層は高い耐薬品性を有することが認められた。
Test Example 4 (Chemical resistance)
After immersing the titanium plate having the carbon-doped titanium oxide layer doped with the carbon of Example 1 in a Ti—C bond state in a 1M sulfuric acid aqueous solution and a 1M sodium hydroxide aqueous solution for 1 week at room temperature, When the wear resistance and the photocurrent density described below were measured, no significant difference was observed in the results before and after immersion. That is, it was confirmed that the carbon-doped titanium oxide layer in which the carbon of Example 1 was doped in a Ti—C bond state had high chemical resistance.
試験例５（炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層の構造）
実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層について、Ｘ線光電子分光分析装置（ＸＰＳ）で、加速電圧：１０ｋＶ、ターゲット：Ａｌとし、２７００秒間Ａｒイオンスパッタリングを行い、分析を開始した。このスパッタ速度がＳｉＯ2膜相当の０．６４Å／ｓとすると、深度は約１７３ｎｍとなる。そのＸＰＳ分析の結果を図２に示す。結合エネルギーが２８４．６ｅＶである時に最も高いピークが現れる。これはＣｌｓ分析に一般的に見られるＣ−Ｈ(Ｃ)結合であると判断される。次に高いピークが結合エネルギー２８１．７ｅＶである時に見られる。Ｔｉ−Ｃ結合の結合エネルギーが２８１．６ｅＶであるので、実施例１の炭素ドープ酸化チタン層中ではＣがＴｉ−Ｃ結合としてドープされていると判断される。なお、炭素ドープ酸化チタン層の深さ方向の異なる位置の１１点でＸＰＳ分析を行った結果、全ての点で２８１．６ｅＶ近傍に同様なピークが現れた。
Test Example 5 (Structure of carbon-doped titanium oxide layer doped with carbon in a Ti-C bond state)
For the carbon-doped titanium oxide layer in which the carbon of Example 1 was doped in a Ti—C bond state, the acceleration voltage was 10 kV, the target was Al, and Ar ion sputtering was performed for 2700 seconds using an X-ray photoelectron spectrometer (XPS). Done and started the analysis. If this sputtering rate is 0.64 Å / s corresponding to the SiO 2 film, the depth is about 173 nm. The result of the XPS analysis is shown in FIG. The highest peak appears when the binding energy is 284.6 eV. This is judged to be a C—H (C) bond commonly found in Cls analysis. The next highest peak is seen when the binding energy is 281.7 eV. Since the bond energy of the Ti—C bond is 281.6 eV, it is determined that C is doped as a Ti—C bond in the carbon-doped titanium oxide layer of Example 1. As a result of XPS analysis at 11 points at different positions in the depth direction of the carbon-doped titanium oxide layer, similar peaks appeared in the vicinity of 281.6 eV at all points.
また、炭素ドープ酸化チタン層と基体との境界でもＴｉ−Ｃ結合が確認された。従って、炭素ドープ酸化チタン層中のＴｉ−Ｃ結合により硬度が高くなっており、また、炭素ドープ酸化チタン層と基体との境界でのＴｉ−Ｃ結合により皮膜剥離強度が著しく大きくなっていることが予想される。 Ti-C bonds were also confirmed at the boundary between the carbon-doped titanium oxide layer and the substrate. Accordingly, the hardness is increased due to the Ti—C bond in the carbon-doped titanium oxide layer, and the film peeling strength is significantly increased due to the Ti—C bond at the boundary between the carbon-doped titanium oxide layer and the substrate. Is expected.
試験例６（波長応答性）
実施例１〜３の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層及び比較例１、２の酸化チタン皮膜の波長応答性をＯｒｉｅｌ社のモノクロメーターを用いて測定した。具体的には、それぞれの層、皮膜に対し、０.０５Ｍ硫酸ナトリウム水溶液中で対極との間に電圧を０.３Ｖ印加し、光電流密度を測定した。
Test Example 6 (wavelength response)
The wavelength responsiveness of the carbon-doped titanium oxide layer in which the carbons of Examples 1 to 3 were doped in a Ti—C bond state and the titanium oxide films of Comparative Examples 1 and 2 were measured using an Oriel monochromator. Specifically, a voltage of 0.3 V was applied to each layer and film between the counter electrode in a 0.05 M aqueous sodium sulfate solution, and the photocurrent density was measured.
その結果を図３に示す。図３には、得られた光電流密度ｊpを照射波長に対して示してある。実施例１〜３の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層の波長吸収端は、４９０ｎｍに及んでおり、炭素ドープ量の増大に伴って光電流密度が増大することが認められた。なお、ここには示していないが、炭素ドープ量が１０ａｔ％を越えると電流密度が減少する傾向になり、さらに１５ａｔ％を越えるとその傾向は顕著になることがわかった。よって、炭素ドープ量が１〜１０ａｔ％程度に最適値があることが認められた。一方、比較例１、２の酸化チタン皮膜では、光電流密度が著しく小さく、且つ波長吸収端も４１０ｎｍ程度であることが認められた。 The result is shown in FIG. FIG. 3 shows the obtained photocurrent density jp with respect to the irradiation wavelength. The wavelength absorption edge of the carbon-doped titanium oxide layer in which the carbons of Examples 1 to 3 are doped in a Ti—C bond state extends to 490 nm, and the photocurrent density increases as the carbon doping amount increases. Was recognized. Although not shown here, it has been found that when the carbon doping amount exceeds 10 at%, the current density tends to decrease, and when the carbon doping amount exceeds 15 at%, the tendency becomes remarkable. Therefore, it was recognized that the carbon doping amount has an optimum value of about 1 to 10 at%. On the other hand, in the titanium oxide films of Comparative Examples 1 and 2, it was confirmed that the photocurrent density was extremely small and the wavelength absorption edge was about 410 nm.
試験例７（光エネルギー変換効率）
実施例１〜３の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層及び比較例１、２の酸化チタン皮膜について、式
η＝ｊp（Ｅws−Ｅapp）／Ｉ
で定義される光エネルギー変換効率ηを求めた。ここで、Ｅwsは水の理論分解電圧（＝１.２３Ｖ）、Ｅappは印加電圧（＝０.３Ｖ）、Ｉは照射光強度である。この結果を図４に示す。図４は光エネルギー変換効率ηを照射光波長に対して示してある。
Test example 7 (light energy conversion efficiency)
For the carbon-doped titanium oxide layer in which the carbons of Examples 1 to 3 are doped in a Ti—C bond state and the titanium oxide films of Comparative Examples 1 and 2, the formula η = jp (Ews−Eapp) / I
The light energy conversion efficiency η defined by Here, Ews is the theoretical decomposition voltage of water (= 1.23 V), Eapp is the applied voltage (= 0.3 V), and I is the irradiation light intensity. The result is shown in FIG. FIG. 4 shows the light energy conversion efficiency η with respect to the irradiation light wavelength.
図４から明らかなように、実施例１〜３の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層の光エネルギー変換効率は著しく高く、波長４５０ｎｍ付近での変換効率が比較例１、２の酸化チタン皮膜の紫外線領域（２００〜３８０ｎｍ）での変換効率より優れていることが認められた。また、実施例１の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層の水分解効率は、波長３７０ｎｍで約８％であり、３５０ｎｍ以下では１０％を越える効率が得られることがわかった。 As is clear from FIG. 4, the carbon-doped titanium oxide layer in which the carbons of Examples 1 to 3 are doped in a Ti—C bond state has extremely high light energy conversion efficiency, and the conversion efficiency in the vicinity of a wavelength of 450 nm is a comparative example. It was recognized that the conversion efficiency in the ultraviolet region (200 to 380 nm) of the 1 and 2 titanium oxide films was superior. Further, the water decomposition efficiency of the carbon-doped titanium oxide layer in which the carbon of Example 1 is doped in a Ti—C bond state is about 8% at a wavelength of 370 nm, and an efficiency exceeding 10% can be obtained at 350 nm or less. I understood.
試験例８（消臭試験）
実施例１及び２の炭素がＴｉ−Ｃ結合の状態でドープされた炭素ドープ酸化チタン層及び比較例１の酸化チタン皮膜について、消臭試験を実施した。具体的には、消臭試験に一般的に用いられるアセトアルデヒドを炭素ドープ酸化チタン層を有する基体と共に１０００ｍｌのガラス容器に封入し、初期の吸着による濃度減少の影響が無視できるようになってから、ＵＶカットフィルタ付き蛍光灯にて可視光を照射し、所定の照射時間毎にアセトアルデヒド濃度をガスクロマトグラフィーで測定した。なお、各皮膜の表面積は８.０ｃｍ２とした。
Test Example 8 (Deodorization test)
A deodorizing test was performed on the carbon-doped titanium oxide layer in which the carbons of Examples 1 and 2 were doped in a Ti-C bond state and the titanium oxide film of Comparative Example 1. Specifically, after acetaldehyde generally used in deodorization tests is enclosed in a 1000 ml glass container together with a substrate having a carbon-doped titanium oxide layer, the influence of concentration reduction due to initial adsorption can be ignored. Visible light was irradiated with a fluorescent lamp with a UV cut filter, and the acetaldehyde concentration was measured by gas chromatography at every predetermined irradiation time. The surface area of each film was 8.0 cm 2 .
この結果を図５に示す。図５には、アセトアルデヒド濃度を可視光照射後の経過時間に対して示してある。実施例１及び２の炭素ドープ酸化チタン層のアセトアルデヒド分解速度は、比較例１の酸化チタン皮膜のアセトアルデヒド分解速度の約２倍以上の高い値となっており、また、炭素ドープ量が多く、光エネルギー変換効率の高い実施例１の炭素ドープ酸化チタン層の方が、実施例２の炭素ドープ酸化チタン層と比較して分解速度が高いことがわかった。 The result is shown in FIG. FIG. 5 shows the acetaldehyde concentration with respect to the elapsed time after irradiation with visible light. The acetaldehyde decomposition rate of the carbon-doped titanium oxide layers of Examples 1 and 2 is higher than the acetaldehyde decomposition rate of the titanium oxide film of Comparative Example 1, and the carbon doping amount is large. It was found that the carbon-doped titanium oxide layer of Example 1 having a higher energy conversion efficiency has a higher decomposition rate than the carbon-doped titanium oxide layer of Example 2.
試験例９（防汚試験）
実施例１の炭素ドープ酸化チタン層及び比較例１の酸化チタン皮膜について、防汚試験を実施した。各皮膜を（財）電力中央研究所内の喫煙室内に設置し、１４５日後の表面の汚れを観察した。なお、この喫煙室内には太陽光の直接の入射はない。
Test example 9 (antifouling test)
An antifouling test was carried out on the carbon-doped titanium oxide layer of Example 1 and the titanium oxide film of Comparative Example 1. Each coating was placed in a smoking room in the Central Research Institute of Electric Power Co., Ltd., and surface contamination after 145 days was observed. There is no direct incidence of sunlight in the smoking room.
この結果を示す写真を図６に示す。比較例１の酸化チタン皮膜の表面には脂が付着し、薄い黄色を呈していたが、実施例１の炭素ドープ酸化チタン層の表面は特に変化がみられず、清浄に保たれており、防汚効果が十分に発揮されたことが認められた。 A photograph showing the results is shown in FIG. Fat was attached to the surface of the titanium oxide film of Comparative Example 1 and had a pale yellow color, but the surface of the carbon-doped titanium oxide layer of Example 1 was not particularly changed and was kept clean. It was confirmed that the antifouling effect was sufficiently exhibited.
［実施例４〜７］
実施例１〜３と同様にアセチレンの燃焼炎を用い、厚さ０.３ｍｍのチタン板を、第２表に示す表面温度で第２表に示す時間の間加熱処理することにより、表面層として炭素ドープ酸化チタン層を有するチタン板を形成した。
[Examples 4 to 7]
By using an acetylene combustion flame in the same manner as in Examples 1 to 3, a titanium plate having a thickness of 0.3 mm was heated at the surface temperature shown in Table 2 for the time shown in Table 2, thereby forming a surface layer. A titanium plate having a carbon-doped titanium oxide layer was formed.
［比較例３］
天然ガスの燃焼炎を用い、厚さ０.３ｍｍのチタン板を、第２表に示す表面温度で第２表に示す時間の間加熱処理した。
[Comparative Example 3]
Using a natural gas combustion flame, a 0.3 mm thick titanium plate was heat-treated at the surface temperature shown in Table 2 for the time shown in Table 2.
試験例１０
実施例４〜７の炭素ドープ酸化チタン層及び比較例３の皮膜について、上記の試験例１と同様にしてビッカース硬度（ＨＶ）を測定した。それらの結果を第２表に示す。また、実施例４〜１１で形成された炭素ドープ酸化チタン層は、水滴との接触角が２°程度の超親水性であった。
The Vickers hardness (HV) of the carbon-doped titanium oxide layers of Examples 4 to 7 and the film of Comparative Example 3 was measured in the same manner as in Test Example 1 above. The results are shown in Table 2. Moreover, the carbon dope titanium oxide layer formed in Examples 4-11 was super hydrophilicity whose contact angle with a water droplet was about 2 degrees.
第２表に示すデータから明らかなように、天然ガスの燃焼ガスで表面温度が８５０℃になるように加熱処理した場合にはビッカース硬度１６０の皮膜しか得られなかったが、表面温度が１０００℃以上になるようにアセチレンの燃焼ガスを用いて加熱処理した実施例４〜７の場合にはビッカース硬度１２００の炭素ドープ酸化チタン層が得られた。 As is apparent from the data shown in Table 2, when the heat treatment was performed with the combustion gas of natural gas so that the surface temperature became 850 ° C., only a film having a Vickers hardness of 160 was obtained, but the surface temperature was 1000 ° C. In Examples 4 to 7 where heat treatment was performed using acetylene combustion gas as described above, a carbon-doped titanium oxide layer having a Vickers hardness of 1200 was obtained.
試験例１１
実施例４〜７の炭素ドープ酸化チタン層及び比較例１及び３の酸化チタン皮膜について、試験例６と同様に、０.０５Ｍ硫酸ナトリウム水溶液中で対極との間に電圧を０.３Ｖ印加し、３００ｎｍ〜５２０ｎｍの光を照射して光電流密度を測定した。その結果を図７に示す。図７には、得られた光電流密度ｊpを電位ＥＣＰ（Ｖ ｖｓ． ＳＳＥ）に対して示してある。
Test Example 11
For the carbon-doped titanium oxide layers of Examples 4 to 7 and the titanium oxide films of Comparative Examples 1 and 3, as in Test Example 6, a voltage of 0.3 V was applied between the counter electrode in a 0.05 M sodium sulfate aqueous solution. The photocurrent density was measured by irradiating with light of 300 nm to 520 nm. The result is shown in FIG. FIG. 7 shows the obtained photocurrent density jp with respect to the potential ECP (V vs. SSE).
アセチレンの燃焼ガスを用いて表面温度が１０００〜１２００℃になるように加熱処理して得た実施例４〜６の炭素ドープ酸化チタン層は、相対的に光電流密度が大きく優れていることがわかった。一方、表面温度が８５０℃になるように加熱処理して得た比較例３の酸化チタン及び表面温度が１５００℃になるように加熱処理して得た実施例７の炭素ドープ酸化チタン層は光電流密度が相対的に小さいことがわかった。 The carbon-doped titanium oxide layers of Examples 4 to 6 obtained by heat treatment using an acetylene combustion gas so that the surface temperature becomes 1000 to 1200 ° C. have relatively high photocurrent density and are excellent. all right. On the other hand, the titanium oxide of Comparative Example 3 obtained by heat treatment so that the surface temperature becomes 850 ° C. and the carbon-doped titanium oxide layer of Example 7 obtained by heat treatment so that the surface temperature becomes 1500 ° C. It was found that the current density was relatively small.
［実施例８］
アセチレンの燃焼炎を用い、厚さ０.３ｍｍのＴｉ−６Ａｌ−４Ｖ合金板をその表面温度が約１１００℃となるように加熱処理することにより、表面層が炭素ドープ酸化チタンを含有するチタン合金からなる合金板を形成した。１１００℃での加熱処理時間を６０秒とした。このようにして形成された炭素ドープ酸化チタンを含有する層は水滴との接触角が２°程度の超親水性であり、また実施例４で得られた炭素ドープ酸化チタン層と同様な光触媒活性を示した。
[Example 8]
A titanium alloy whose surface layer contains carbon-doped titanium oxide by heat treatment of a Ti-6Al-4V alloy plate having a thickness of 0.3 mm using an acetylene combustion flame so that its surface temperature is about 1100 ° C. An alloy plate made of The heat treatment time at 1100 ° C. was 60 seconds. The layer containing carbon-doped titanium oxide thus formed is superhydrophilic with a contact angle with water droplets of about 2 °, and has the same photocatalytic activity as that of the carbon-doped titanium oxide layer obtained in Example 4. showed that.
［実施例９］
厚さ０.３ｍｍのステンレス鋼板（ＳＵＳ３１６）の表面にスパッタリングによって膜厚が約５００ｎｍのチタン薄膜を形成した。アセチレンの燃焼炎を用い、その表面温度が約９００℃となるように加熱処理することにより、表面層として炭素ドープ酸化チタン層を有するステンレス鋼板を形成した。９００℃での加熱処理時間を１５秒とした。このようにして形成された炭素ドープ酸化チタン層は水滴との接触角が２°程度の超親水性であり、また、実施例４で得られた炭素ドープ酸化チタン層と同様な光触媒活性を示した。
[Example 9]
A titanium thin film having a thickness of about 500 nm was formed on the surface of a stainless steel plate (SUS316) having a thickness of 0.3 mm by sputtering. A stainless steel sheet having a carbon-doped titanium oxide layer as a surface layer was formed by heat treatment using an acetylene combustion flame so that the surface temperature was about 900 ° C. The heat treatment time at 900 ° C. was 15 seconds. The carbon-doped titanium oxide layer thus formed is superhydrophilic with a contact angle with water droplets of about 2 °, and exhibits the same photocatalytic activity as the carbon-doped titanium oxide layer obtained in Example 4. It was.
［実施例１０］
粒径２０μｍの酸化チタン粉末をアセチレンの燃焼炎中に供給し、燃焼炎中に所定時間滞留させてその表面温度が約１０００℃となるように加熱処理することにより、表面層として炭素ドープ酸化チタン層を有するチタン粉末を形成した。１０００℃での加熱処理時間を４秒とした。このようにして形成された炭素ドープ酸化チタン層を有するチタン粉末、実施例４で得られた炭素ドープ酸化チタン層と同様な光触媒活性を示した。
[Example 10]
A titanium oxide powder having a particle size of 20 μm is supplied into an acetylene combustion flame, and is retained in the combustion flame for a predetermined time, and heat-treated so that the surface temperature is about 1000 ° C. A titanium powder having a layer was formed. The heat treatment time at 1000 ° C. was 4 seconds. The titanium powder having the carbon-doped titanium oxide layer formed as described above showed the same photocatalytic activity as that of the carbon-doped titanium oxide layer obtained in Example 4.
［実施例１１〜１２］
厚さ１ｍｍのガラス板（パイレックス（登録商標））の表面にスパッタリングによって膜厚が約１００ｎｍのチタン薄膜を形成した。アセチレンの燃焼炎を用い、その表面温度が１１００℃（実施例１１）、又は１５００℃（実施例１２）となるように加熱処理することにより、表面層として炭素ドープ酸化チタン層を有するガラス板を形成した。１１００℃、又は１５００℃での加熱処理時間を１０秒とした。このようにして形成された炭素ドープ酸化チタン層は表面温度が１１００℃の場合には図８（ａ）に写真で示すように透明であったが、表面温度が１５００℃の場合には図９に示すように海に浮かぶ多数の小島状の起伏が表面に生じており、図８（ｂ）に示すように半透明となった。
[Examples 11 to 12]
A titanium thin film having a thickness of about 100 nm was formed by sputtering on the surface of a 1 mm thick glass plate (Pyrex (registered trademark)). A glass plate having a carbon-doped titanium oxide layer as a surface layer is obtained by heat treatment using an acetylene combustion flame so that the surface temperature is 1100 ° C. (Example 11) or 1500 ° C. (Example 12). Formed. The heat treatment time at 1100 ° C. or 1500 ° C. was 10 seconds. The carbon-doped titanium oxide layer thus formed was transparent as shown in the photograph in FIG. 8A when the surface temperature was 1100 ° C., but when the surface temperature was 1500 ° C., FIG. As shown in FIG. 8, many small island-like undulations floating in the sea are generated on the surface, and it became translucent as shown in FIG.
［実施例１３〜１６］
厚さ０.３ｍｍのチタン板の表面を、アセチレンの燃焼炎により、第３表に示す表面層温度で第３表に示す時間加熱処理した。その後その燃焼炎を当てた表面を厚さ３０ｍｍのステンレスブロックの平らな面と接触させて冷却すると、チタン板表面の大部分に白色の酸化チタンからなる微細柱が林立している層が露出している部材と、薄膜上に白色の酸化チタンからなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している小片部材とに分離した。即ち、加熱処理で表面層内部に形成された酸化チタンからなる微細柱が林立している層がその後の冷却で該微細柱が林立している層が該表面層に沿う方向で切断された。このようにして実施例１３〜１６を得た。
[Examples 13 to 16]
The surface of the titanium plate having a thickness of 0.3 mm was subjected to heat treatment with an acetylene combustion flame at the surface layer temperature shown in Table 3 for the time shown in Table 3. After that, when the surface to which the flame is applied is brought into contact with a flat surface of a stainless steel block having a thickness of 30 mm and cooled, a layer in which fine columns made of white titanium oxide stand on the most part of the titanium plate surface is exposed. And a small piece member in which a large number of continuous narrow protrusions made of white titanium oxide on the thin film and fine columns standing on the protrusions are exposed. That is, the layer in which the fine columns made of titanium oxide formed in the surface layer by heat treatment are erected is cut in the direction along the surface layer by the subsequent cooling. In this way, Examples 13 to 16 were obtained.
図１０は、実施例１３で得られた部材の顕微鏡写真であり、チタン板表面１上に白色の酸化チタンからなる微細柱が林立している層２が露出しており、薄膜上に白色の酸化チタンからなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している小片部材３がその層２上の一部に残っているの状態を示している。なお、実施例１３〜１６の製造法ではチタン板表面１は露出しないが、図１０の顕微鏡写真は微細柱が林立している層２の一部を除去した状態を示している。図１１は薄膜上に白色の酸化チタンからなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している小片部材３の薄膜側表面の状態を示す顕微鏡写真であり、図１２は薄膜上に白色の酸化チタンからなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している小片部材３の多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している側の表面の状態示す顕微鏡写真であり、図１３は白色の酸化チタンからなる微細柱が林立している層２の状態を示す顕微鏡写真である。 FIG. 10 is a photomicrograph of the member obtained in Example 13, in which a layer 2 in which fine columns made of white titanium oxide are forested is exposed on the titanium plate surface 1, and a white color is formed on the thin film. A state is shown in which a small piece member 3 in which a large number of continuous narrow protrusion portions made of titanium oxide and fine columns standing on the protrusion portions are exposed remains on a part of the layer 2. . In addition, in the manufacturing method of Examples 13-16, although the titanium plate surface 1 is not exposed, the micrograph of FIG. 10 has shown the state which removed a part of layer 2 in which the fine pillar stands. FIG. 11 is a photomicrograph showing the state of the surface on the thin film side of the small piece member 3 in which a large number of continuous narrow protrusions made of white titanium oxide and thin columns standing on the protrusions are exposed on the thin film. FIG. 12 shows a number of continuous narrow widths of small piece members 3 in which a large number of continuous narrow-width projections made of white titanium oxide are exposed on a thin film and fine columns standing on the projections are exposed. FIG. 13 is a photomicrograph showing the state of the protrusion and the surface on the side where the fine pillar standing on the protrusion is exposed, and FIG. 13 is the state of the layer 2 where the fine pillar made of white titanium oxide is standing FIG.
［実施例１７］
厚さ０.３ｍｍのＴｉ−６Ａｌ−４Ｖ合金板の表面を、アセチレンの燃焼炎により、第３表に示す表面層温度で第３表に示す時間加熱処理した。その後その燃焼炎を当てた表面を厚さ３０ｍｍのステンレスブロックの平らな面と接触させて冷却すると、チタン合金板表面の大部分にチタン合金酸化物からなる微細柱が林立している層が露出している部材と、薄膜上にチタン合金酸化物からなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している小片部材とに分離した。
[Example 17]
The surface of a Ti-6Al-4V alloy plate having a thickness of 0.3 mm was heat-treated with an acetylene combustion flame at the surface layer temperature shown in Table 3 for the time shown in Table 3. After that, when the surface to which the flame is applied is brought into contact with a flat surface of a stainless steel block having a thickness of 30 mm and cooled, a layer in which fine columns made of titanium alloy oxide stand on most of the surface of the titanium alloy plate is exposed. And a small piece member in which a number of continuous narrow protrusions made of titanium alloy oxide on the thin film and fine columns standing on the protrusions are exposed.
［実施例１８］
厚さ０.３ｍｍのステンレス鋼板（ＳＵＳ３１６）の表面に電子ビーム蒸着によって膜厚が約３μｍのチタン薄膜を形成した。その薄膜表面を、アセチレンの燃焼炎により、第３表に示す表面層温度で第３表に示す時間加熱処理した。その後その燃焼炎を当てた表面を厚さ３０ｍｍのステンレスブロックの平らな面と接触させて冷却すると、ステンレス鋼板表面の大部分に白色の酸化チタンからなる微細柱が林立している層が露出している部材と、薄膜上に白色の酸化チタンからなる多数の連続した狭幅突起部及び該突起部上に林立している微細柱が露出している小片部材とに分離した。
[Example 18]
A titanium thin film having a thickness of about 3 μm was formed on the surface of a stainless steel plate (SUS316) having a thickness of 0.3 mm by electron beam evaporation. The surface of the thin film was heat-treated with an acetylene combustion flame at the surface layer temperature shown in Table 3 for the time shown in Table 3. After that, when the surface to which the combustion flame is applied is brought into contact with the flat surface of a 30 mm thick stainless steel block and cooled, a layer in which fine columns made of white titanium oxide are forested is exposed on most of the stainless steel plate surface. And a small piece member in which a large number of continuous narrow protrusions made of white titanium oxide on the thin film and fine columns standing on the protrusions are exposed.
［比較例４］
市販されている酸化チタンゾル（石原産業製ＳＴＳ−０１）を厚さ０.３ｍｍのチタン板にスピンコートした後、加熱して密着性を高めた酸化チタン皮膜を有するチタン板を形成した。
[Comparative Example 4]
A commercially available titanium oxide sol (STS-01 manufactured by Ishihara Sangyo Co., Ltd.) was spin-coated on a titanium plate having a thickness of 0.3 mm, and then a titanium plate having a titanium oxide film whose adhesion was improved by heating was formed.
試験例１２（引っかき硬度試験：鉛筆法）
実施例１３〜１８で得られた基板表面に微細柱が林立している層が露出している部材の微細柱側表面について、ＪＩＳ Ｋ ５６００−５−４（１９９９）に基づき、三菱鉛筆株式会社製ユニ１Ｈ〜９Ｈ鉛筆を用いて鉛筆引っかき硬度試験を実施した。その結果は第３表に示す通りであった。即ち、全ての試験片について９Ｈの鉛筆を用いた場合にも損傷は認められなかった。
Test Example 12 (Scratch hardness test: pencil method)
Mitsubishi Pencil Co., Ltd., based on JIS K 5600-5-4 (1999), on the surface of the fine column side of the member in which the layer in which the fine column is grown is exposed on the substrate surface obtained in Examples 13 to 18 A pencil scratch hardness test was carried out using Uni 1H-9H pencils. The results were as shown in Table 3. That is, no damage was observed when a 9H pencil was used for all the test pieces.
試験例１３（耐薬品性試験）
実施例１３〜１８で得られた基板表面に微細柱が林立している層が露出している部材を１Ｍ硫酸水溶液及び１Ｍ水酸化ナトリウム水溶液にそれぞれ室温で１週間浸漬し、水洗し、乾燥させた後、上記の引っかき硬度試験：鉛筆法を実施した。その結果は第３表に示す通りであった。即ち、全ての試験片について９Ｈの鉛筆を用いた場合にも損傷は認められず、高い耐薬品性を有することが認められた。
Test Example 13 (Chemical resistance test)
The members having exposed layers with fine pillars exposed on the substrate surfaces obtained in Examples 13 to 18 were immersed in 1M sulfuric acid aqueous solution and 1M sodium hydroxide aqueous solution for 1 week at room temperature, washed with water and dried. Then, the above scratch hardness test: the pencil method was carried out. The results were as shown in Table 3. That is, even when a 9H pencil was used for all the test pieces, no damage was observed, and it was confirmed that the test pieces had high chemical resistance.
試験例１４（耐熱性試験）
実施例１３〜１８で得られた基板表面に微細柱が林立している層が露出している部材を管状炉内に入れ、大気雰囲気下で室温から１時間かけて５００℃まで昇温させ、５００℃の恒温で２時間保持し、更に１時間かけて室温まで静置冷却した後、上記の引っかき硬度試験：鉛筆法を実施した。その結果は第３表に示す通りであった。即ち、全ての試験片について９Ｈの鉛筆を用いた場合にも損傷は認められず、高い耐熱性を有することが認められた。
A member in which a layer in which fine columns are erected is exposed on the surface of the substrate obtained in Examples 13 to 18 is placed in a tubular furnace, and the temperature is raised from room temperature to 500 ° C. in an air atmosphere over 1 hour. After holding at a constant temperature of 500 ° C. for 2 hours and further allowing to cool to room temperature over 1 hour, the above-described scratch hardness test: pencil method was performed. The results were as shown in Table 3. That is, no damage was observed even when a 9H pencil was used for all the test pieces, and it was confirmed that the specimen had high heat resistance.
試験例１５（防汚試験）
試料として、実施例１６で得られた基板表面に微細柱が林立している層が露出している表面積８ｃｍ２の部材及び比較例４で得られた酸化チタン皮膜を有する表面積８ｃｍ２のチタン板を用いて防汚試験を実施した。具体的には、それらの試料をそれぞれ、約１０μｍｏｌ／Ｌの濃度に調整したメチレンブルー水溶液８０ｍＬ中に浸漬し、初期の吸着による濃度減少の影響が無視できるようになってから、松下電器産業株式会社製のＵＶカットフィルター付き蛍光灯により可視光を照射し、所定の照射時間毎に波長６６０ｎｍにおけるメチレンブルー水溶液の吸光度をＨＡＣＨ社製水質検査装置ＤＲ／２４００で測定した。その結果は図１４に示す通りであった。
Test Example 15 (Anti-fouling test)
As a sample, a titanium plate surface area 8 cm 2 having a titanium oxide film obtained in member and Comparative Example 4 of surface area 8 cm 2 of the layer minute columns the resulting substrate surface in Example 16 is bristled is exposed An antifouling test was conducted using Specifically, each of these samples was immersed in 80 mL of an aqueous methylene blue solution adjusted to a concentration of about 10 μmol / L, and the influence of the decrease in concentration due to initial adsorption became negligible. Matsushita Electric Industrial Co., Ltd. Visible light was irradiated with a fluorescent lamp with a UV cut filter manufactured, and the absorbance of the aqueous methylene blue solution at a wavelength of 660 nm was measured with a water quality inspection apparatus DR / 2400 manufactured by HACH at every predetermined irradiation time. The result was as shown in FIG.
図１４から、実施例１６で得られた基板表面に微細柱が林立している層が露出している部材は、比較例４で得られた酸化チタン皮膜を有するチタン板に比較して、メチレンブルーの分解速度が速く、防汚効果が高いことが分かる。 From FIG. 14, the member in which the layer with the fine pillars exposed on the surface of the substrate obtained in Example 16 is exposed to methylene blue as compared with the titanium plate having the titanium oxide film obtained in Comparative Example 4. It can be seen that the decomposition speed of is high and the antifouling effect is high.
試験例１６（結晶構造と結合状態）
実施例１５で得られた基板表面に微細柱が林立している層が露出している部材の微細柱から得た試料についてＸ線解析（ＸＲＤ）を行った結果、ルチル型の結晶構造を有することが判明した。
Test Example 16 (Crystal structure and bonding state)
As a result of performing X-ray analysis (XRD) on the sample obtained from the fine column of the member in which the layer with the fine column grown on the substrate surface obtained in Example 15 is exposed, it has a rutile crystal structure. It has been found.
また、実施例１５で得られた基板表面に微細柱が林立している層が露出している部材の微細柱部分について、Ｘ線光電子分光分析装置（ＸＰＳ）で、加速電圧：１０ｋＶ、ターゲット：Ａｌとし、２７００秒間Ａｒイオンスパッタリングを行い、分析を開始した。このスパッタ速度がＳｉＯ2膜相当の０．６４Å／ｓとすると、深度は約１７３ｎｍとなる。そのＸＰＳ分析の結果は図１５に示す通りであった。結合エネルギーが２８４．６ｅＶである時に最も高いピークが現れる。これはＣｌｓ分析に一般的に見られるＣ−Ｈ(Ｃ)結合であると判断される。次に高いピークが結合エネルギー２８１．６ｅＶである時に見られる。Ｔｉ−Ｃ結合の結合エネルギーが２８１．６ｅＶであるので、実施例１５の微細柱中ではＣがＴｉ−Ｃ結合としてドープされていると判断される。なお、微細柱の高さ位置の異なる位置の１４点でＸＰＳ分析を行った結果、全ての点で２８１．６ｅＶ近傍に同様なピークが現れた。 Further, with respect to the fine column portion of the member in which the layer with the fine columns grown on the surface of the substrate obtained in Example 15 is exposed, an X-ray photoelectron spectrometer (XPS) is used to accelerate voltage: 10 kV, target: Al was used for Ar sputtering for 2700 seconds, and analysis was started. If this sputtering rate is 0.64 Å / s corresponding to the SiO 2 film, the depth is about 173 nm. The result of the XPS analysis was as shown in FIG. The highest peak appears when the binding energy is 284.6 eV. This is judged to be a C—H (C) bond commonly found in Cls analysis. The next highest peak is seen when the binding energy is 281.6 eV. Since the bond energy of the Ti—C bond is 281.6 eV, it is determined that C is doped as a Ti—C bond in the fine column of Example 15. As a result of XPS analysis at 14 points at different heights of the fine columns, similar peaks appeared in the vicinity of 281.6 eV at all points.
［実施例１９］
試験片として直径３２ｍｍ、厚さ０.３ｍｍの円板を用い、その表面を表面温度が約１１５０℃に維持されるようにアセチレンの燃焼炎により加熱した。第一の試験片については加熱時間１２０秒の時点で加熱を止めて放冷した。第二の試験片については１８０秒の時点で加熱を止めて放冷した。第三の試験片については４８０秒間加熱し、直ちにその燃焼炎を当てた表面を厚さ３０ｍｍのステンレスブロックの平らな面と接触させて冷却した。この冷却によりチタン板表面から薄膜が剥離し、その下から白色の酸化チタンからなる微細柱が林立している層が露出している部材が得られた。これらの３枚の試験片について、セイコーインスツルメンツ社製ＦＩＢ−ＳＥＭ装置ＳＭＩ８４００ＳＥを用いて試験片表面に３μｍ×１２μｍで深さ１０μｍの穴を掘り、その側面及び底面をキーエンス社製ＳＥＭ装置ＶＥ７８００により観察を行った。１２０秒後の試験片のＳＥＭ写真は図１６であり、１８０秒後の試験片のＳＥＭ写真は図１７であり、４８０秒後の試験片のＳＥＭ写真は図１８である。１８０秒後の図１７では皮膜下部に微細柱構造の兆候が現れ始めており、更に火炎処理を続けることで微細柱長く伸びて本発明で目的とするような微細柱構造が形成されると考えられる。
[Example 19]
A disc having a diameter of 32 mm and a thickness of 0.3 mm was used as a test piece, and the surface thereof was heated by an acetylene combustion flame so that the surface temperature was maintained at about 1150 ° C. About the 1st test piece, the heating was stopped at the time of the heating time of 120 seconds, and it stood to cool. About the 2nd test piece, the heating was stopped at the time of 180 second and it stood to cool. The third test piece was heated for 480 seconds, and immediately the surface to which the flame was applied was brought into contact with the flat surface of a 30 mm thick stainless steel block and cooled. By this cooling, a thin film was peeled off from the surface of the titanium plate, and a member in which a layer in which fine columns made of white titanium oxide were erected was exposed. Using these three test pieces, a 3 μm × 12 μm 10 μm deep hole was dug on the surface of the test piece using a Seiko Instruments FIB-SEM device SMI8400SE, and the side and bottom surfaces were observed with a Keyence SEM device VE7800. Went. The SEM photograph of the test piece after 120 seconds is FIG. 16, the SEM photograph of the test piece after 180 seconds is FIG. 17, and the SEM photograph of the test piece after 480 seconds is FIG. In FIG. 17 after 180 seconds, signs of a fine column structure begin to appear in the lower part of the coating, and it is considered that by continuing the flame treatment, the fine column is elongated and a fine column structure as intended in the present invention is formed. .
１ 基体の表面
２ 微細柱
３ 薄膜
1 Surface of substrate 2 Fine column 3 Thin film
Claims (10)
The surface layer of carbon-doped titanium oxide or titanium alloy oxide is bonded to the underlying titanium, titanium alloy, titanium alloy oxide or titanium oxide via a Ti-C bond. A multifunctional material having a mirror surface according to any one of claims 1 to 10.
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| JP2010148448A (en) * | 2008-12-25 | 2010-07-08 | Globeride Inc | Sporting goods and method for manufacturing sporting goods |
| JP2010154782A (en) * | 2008-12-26 | 2010-07-15 | Globeride Inc | Line guide, and method for producing line guide |
| JP2010154783A (en) * | 2008-12-26 | 2010-07-15 | Globeride Inc | Line guide, and method for producing guide ring |
| WO2020045293A1 (en) * | 2018-08-31 | 2020-03-05 | 日本軽金属株式会社 | Optical member and method for producing same |
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| JP7259858B2 (en) | 2018-08-31 | 2023-04-18 | 日本軽金属株式会社 | Optical member and manufacturing method thereof |
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