JP2006242799A - Method for correcting measurement error, and device for measuring characteristics of electronic component - Google Patents

Method for correcting measurement error, and device for measuring characteristics of electronic component Download PDF

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JP2006242799A
JP2006242799A JP2005060169A JP2005060169A JP2006242799A JP 2006242799 A JP2006242799 A JP 2006242799A JP 2005060169 A JP2005060169 A JP 2005060169A JP 2005060169 A JP2005060169 A JP 2005060169A JP 2006242799 A JP2006242799 A JP 2006242799A
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jig
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state mounted
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Kunihiro Watanabe
訓大 渡辺
Takeshi Kamiya
岳 神谷
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for correcting measurement error, and device for measuring electronic component capable of improving the precision of correction. <P>SOLUTION: The sample for acquiring relative correction data is measured by the test tool 26 and the reference tool 16, and the first equation for calculating the estimated value of the measurement value by the reference tool 16 from the measurement value of the test tool 26 is obtained. For every frequency, the sample for residual error correction data acquisition is measured with the test tool 26 and the reference tool 16, then the second equation for calculating error included in the estimation value of the measurement value measured by the reference tool 16 calculated by the first equation is obtained. An optional electronic component is measured by the test tool 26, from the measured value by the test tool 26, the estimated value measured by the reference tool 16 is calculated by using the first equation, the estimated value is corrected by using the second equation. The second equation is a polynomial equation or a rational equation. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、測定誤差の補正方法及び電子部品特性測定装置に関し、詳しくは、電子部品の電気特性を、試験治具に実装した状態で測定した結果から、その電子部品を基準治具に実装して測定したならば得られるであろう電気特性の推定値を算出する、測定誤差の補正方法及び電子部品特性測定装置に関する。   The present invention relates to a measurement error correction method and an electronic component characteristic measuring apparatus, and more specifically, the electronic component is mounted on a reference jig based on the result of measuring the electrical characteristics of the electronic component mounted on a test jig. The present invention relates to a method for correcting a measurement error and an electronic component characteristic measuring apparatus that calculate an estimated value of an electric characteristic that would be obtained if measured in this manner.

従来、表面実装型電子部品などの同軸コネクタを有しない電子部品は、同軸コネクタを有する治具に実装し、治具と測定装置の間を同軸ケーブルを介して接続して、電気特性が測定されることがある。このような測定においては、個々の治具の特性のばらつきや、個々の同軸ケーブル及び測定装置の特性のばらつきが、測定誤差の原因となる。   Conventionally, electronic components that do not have a coaxial connector, such as surface mount electronic components, are mounted on a jig having a coaxial connector, and the electrical characteristics are measured by connecting the jig and the measuring device via a coaxial cable. Sometimes. In such measurement, variations in characteristics of individual jigs and variations in characteristics of individual coaxial cables and measurement devices cause measurement errors.

同軸ケーブル及び測定装置については、基準特性を有する標準器を同軸ケーブルを介して測定装置に接続して測定することにより、標準器を接続した同軸ケーブル先端よりも測定装置側の誤差を同定することができる。   For coaxial cables and measuring devices, identify the error on the measuring device side from the end of the coaxial cable connected to the standard device by measuring a standard device with reference characteristics connected to the measuring device via the coaxial cable. Can do.

しかし、治具については、電子部品を実装する部分の接続端子と同軸ケーブルに接続するための同軸コネクタとの間の電気特性の誤差を精度よく同定することができない。また、治具間の特性が一致するように調整することは容易ではない。特に広い帯域幅で、治具間の特性が一致するように治具を調整することは、極めて困難である。   However, with respect to the jig, it is not possible to accurately identify an error in electrical characteristics between the connection terminal of the part on which the electronic component is mounted and the coaxial connector for connecting to the coaxial cable. Moreover, it is not easy to adjust so that the characteristics between jigs match. In particular, it is extremely difficult to adjust the jig so that the characteristics between the jigs coincide with each other with a wide bandwidth.

そこで、標準試料を複数の治具に実装して測定し、治具間における測定値のばらつきから、ある治具（以下、「基準治具」という。）と他の治具（以下、「試験治具」という。）との間の相対的な誤差を補正する数式を予め導出しておき、任意の電子部品の電気特性について、試験治具に実装した状態で測定した測定値（以下、「試験治具測定値」ともいう。）から、この数式を用いて、その電子部品を基準治具に実装して測定した測定値（以下、「基準治具測定値」ともいう。）の推定値を算出する、いわゆる相対補正法が提案されている。   Therefore, a standard sample is mounted on a plurality of jigs and measured, and due to variations in measured values between jigs, a certain jig (hereinafter referred to as “reference jig”) and another jig (hereinafter referred to as “test”). A mathematical expression that corrects a relative error between the electronic component and the electrical characteristic of an arbitrary electronic component is measured in a state of being mounted on a test jig (hereinafter referred to as “the jig”). (Also referred to as “test jig measurement value”)), the estimated value of the measurement value (hereinafter also referred to as “reference jig measurement value”) measured by mounting the electronic component on the reference jig using this mathematical formula. A so-called relative correction method has been proposed for calculating the above.

例えば、基準治具はユーザに対して電気特性を保証するために用い、試験治具は電子部品の製造工程における良品選別のための測定に用いる。具体的には、各ポートについて、試験治具誤差を除去する散乱行列と基準治具誤差の散乱行列を合成した散乱行列（これを、「相対補正アダプタ」という。）をそれぞれ導出する。その相対補正アダプタを、試験治具測定値の散乱行列に対し合成することで、基準治具測定値の推定値を算出する。相対補正アダプタは、各ポートについて、それぞれ少なくとも３つの標準試料を、基準治具と試験治具の両方で測定し、その測定結果から計算できる（例えば、非特許文献１、２参照）。
ＧＡＫＵ ＫＡＭＩＴＡＮＩ（Ｍｕｒａｔａ ｍａｎｕｆａｃｔｕｒｉｎｇ Ｃｏ．，Ｌｔｄ．） "Ａ ＭＥＴＨＯＤ ＴＯ ＣＯＲＲＥＣＴ ＤＩＦＦＥＲＥＮＣＥ ＯＦ ＩＮ−ＦＩＸＴＵＲＥ ＭＥＡＳＵＲＥＭＥＮＴＳ ＡＭＯＮＧ ＦＩＸＴＵＲＥＳ ＯＮ ＲＦ ＤＥＶＩＣＥＳ" ＡＰＭＣ Ｖｏｌ．２， ｐ１０９４−１０９７， ２００３ Ｊ．Ｐ．ＤＵＮＳＭＯＲＥ， Ｌ．ＢＥＴＴＳ （Ａｇｉｌｅｎｔ Ｔｅｃｈｎｏｌｏｇｉｅｓ） "ＮＥＷ ＭＥＴＨＯＤＳ ＦＯＲ ＣＯＲＲＥＬＡＴＩＮＧ ＦＩＸＴＵＲＥＤ ＭＥＡＳＵＲＥＭＥＮＴＳ" ＡＰＭＣ Ｖｏｌ．１， ｐ５６８−５７１， ２００３ For example, the reference jig is used for assuring electric characteristics to the user, and the test jig is used for measurement for selecting a good product in the manufacturing process of the electronic component. Specifically, for each port, a scattering matrix (this is referred to as a “relative correction adapter”) obtained by synthesizing the scattering matrix for removing the test jig error and the scattering matrix for the reference jig error is derived. By synthesizing the relative correction adapter with the scattering matrix of the test jig measurement value, an estimated value of the reference jig measurement value is calculated. The relative correction adapter can measure at least three standard samples for each port using both the reference jig and the test jig, and can calculate from the measurement results (see, for example, Non-Patent Documents 1 and 2).
GAKU KAMANTINI (Murata manufacturing Co., Ltd.) "A METHOD TO COLLECT DIFFERENCE OF IN-FIXURE MEASUREMENTS AMONG FIXTURE ON RF DEVICES". 2, p1094-1097, 2003 J. et al. P. Dunsmore, L.M. BETTS (Agilent Technologies) "NEW METHODS FOR CORRELATING FIXTURE MEASUREMENTS" APMC Vol. 1, p568-571, 2003

相対補正アダプタは、線形回路網モデルを用い、伝達関数は周波数によって変化せず一定であることを前提として導出されている。そのため、高周波電気特性測定系における線形的な治具間差異要因は補正できる。   The relative correction adapter uses a linear network model and is derived on the assumption that the transfer function does not change with frequency and is constant. Therefore, linear differences between jigs in the high-frequency electrical characteristic measurement system can be corrected.

しかし、例えば測定時に試料に加えられた荷重によって試料の電気特性が変化したり、治具のポート間において無視し得ない大きさの漏洩が発生したりするといった非線形的な治具間差異要因までは、補正アダプタでは補正できない。そのため、試験治具に実装した状態での測定値から相対補正アダプタを適用して算出した基準治具に実装した状態での測定値の推定値には、測定周波数によって大きさが変動する誤差（以下、「残留誤差」という。）が残存する。特に、構造の大きく異なる治具間について補正を行う場合には、残留誤差が拡大する。   However, even non-linear jig difference factors such as the electrical characteristics of the specimen changing due to the load applied to the specimen at the time of measurement or leakage of a magnitude that cannot be ignored between the jig ports. Cannot be corrected with the correction adapter. For this reason, the estimated value of the measured value in the state mounted on the reference jig calculated by applying the relative correction adapter from the measured value in the state mounted in the test jig has an error that varies in size depending on the measurement frequency ( Hereinafter, it is referred to as “residual error”). In particular, when correction is performed between jigs having greatly different structures, the residual error increases.

電子部品の製造工程において、相対補正アダプタを適用して電子部品の良品選別を行った場合、残留誤差は製品の歩留まりを低下させる要因となる。そのため、補正精度の向上が望まれる。   In the electronic component manufacturing process, when a non-defective product is selected by applying a relative correction adapter, the residual error becomes a factor of reducing the product yield. Therefore, improvement of correction accuracy is desired.

本発明は、上記実情に鑑み、補正精度を向上することができる、測定誤差の補正方法及び電子部品特性測定装置を提供しようとするものである。   In view of the above circumstances, the present invention is intended to provide a measurement error correction method and an electronic component characteristic measurement apparatus capable of improving the correction accuracy.

本発明は、上記課題を解決するために、以下のように構成した測定誤差の補正方法を提供する。   In order to solve the above problems, the present invention provides a measurement error correction method configured as follows.

測定誤差の補正方法は、第１ないし第６のステップを備える。前記第１のステップにおいて、試験治具に実装した状態と基準治具に実装した状態とで、相対補正データ取得用試料をそれぞれ測定する。前記第２のステップにおいて、前記第１のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を求める。前記第３のステップにおいて、周波数ごとに、前記試験治具に実装した状態と前記基準治具に実装した状態とで、残留誤差補正データ取得用試料をそれぞれ測定する。前記第４のステップにおいて、前記第３のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を求める。前記第５のステップにおいて、任意の電子部品について、前記試験治具に実装した状態で測定する。前記第６のステップにおいて、前記第５のステップでの測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する。前記第２の数式は多項式である。   The measurement error correction method includes first to sixth steps. In the first step, the relative correction data acquisition sample is measured in a state of being mounted on the test jig and a state of being mounted on the reference jig. In the second step, based on the measurement result in the first step, an estimated value of the measurement value in the state mounted on the reference jig is calculated from the measurement value in the state mounted on the test jig. A first mathematical formula for is obtained. In the third step, the residual error correction data acquisition sample is measured for each frequency in a state of being mounted on the test jig and a state of being mounted on the reference jig. In the fourth step, based on the measurement result in the third step, the state mounted on the reference jig calculated using the first formula from the measured value in the state mounted on the test jig A second mathematical formula for calculating an error included in the estimated value of the measured value is obtained. In the fifth step, an arbitrary electronic component is measured in a state mounted on the test jig. In the sixth step, based on the measurement result in the fifth step, the electronic component is measured on the reference jig using the first mathematical expression from the measured value in a state of being mounted on the test jig. An estimated value of the measured value in the mounted state is calculated, and the estimated value is corrected using the second mathematical expression. The second formula is a polynomial.

上記方法において、第３のステップでは、第２の数式（多項式）の次数に応じた最低個数（次数＋１個）以上の残留誤差補正データ取得用試料を、試験治具に実装した状態と基準治具に実装した状態とでそれぞれ測定し、第４ステップでは、第３ステップでの測定結果から、多項式の係数を決定する。第２の数式が多項式であれば、第４のステップは、計算機を用いて計算処理を簡単に行うことができる。   In the above method, in the third step, the reference error and the state in which the residual error correction data acquisition samples of the minimum number (order + 1) or more according to the order of the second mathematical expression (polynomial) are mounted on the test jig are used. In the fourth step, the coefficient of the polynomial is determined from the measurement result in the third step. If the second mathematical expression is a polynomial, the fourth step can easily perform a calculation process using a computer.

上記第２ステップにおいて、第１の数式は各測定周波数毎に定義される。しかし、試験治具に実装した状態での測定値から第１の数式を用いて算出した基準治具に実装した状態での測定値の推定値には、各測定周波数毎に大きさが異なる誤差（すなわち、残留誤差）を含むことがある。このような残留誤差は、第２の数式を用いて補正することができる。   In the second step, the first mathematical formula is defined for each measurement frequency. However, the estimated value of the measured value when mounted on the reference jig calculated using the first formula from the measured value when mounted on the test jig has an error that differs in size for each measurement frequency. (Ie, residual error). Such a residual error can be corrected using the second mathematical formula.

また、本発明は、上記課題を解決するために、以下のように構成した測定誤差の補正方法を提供する。   In order to solve the above-mentioned problems, the present invention provides a measurement error correction method configured as follows.

測定誤差の補正方法は、第１ないし第６のステップを備える。前記第１のステップにおいて、試験治具に実装した状態と基準治具に実装した状態とで、相対補正データ取得用試料をそれぞれ測定する。前記第２のステップにおいて、前記第１のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を求める。前記第３のステップにおいて、周波数ごとに、前記試験治具に実装した状態と前記基準治具に実装した状態とで、残留誤差補正データ取得用試料をそれぞれ測定する。前記第４のステップにおいて、前記第３のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を求める。前記第５のステップにおいて、任意の電子部品について、前記試験治具に実装した状態で測定する。前記第６のステップにおいて、前記第５のステップでの測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する。前記第２の数式は有理式である。   The measurement error correction method includes first to sixth steps. In the first step, the relative correction data acquisition sample is measured in a state of being mounted on the test jig and a state of being mounted on the reference jig. In the second step, based on the measurement result in the first step, an estimated value of the measurement value in the state mounted on the reference jig is calculated from the measurement value in the state mounted on the test jig. A first mathematical formula for is obtained. In the third step, the residual error correction data acquisition sample is measured for each frequency in a state of being mounted on the test jig and a state of being mounted on the reference jig. In the fourth step, based on the measurement result in the third step, the state mounted on the reference jig calculated using the first formula from the measured value in the state mounted on the test jig A second mathematical formula for calculating an error included in the estimated value of the measured value is obtained. In the fifth step, an arbitrary electronic component is measured in a state mounted on the test jig. In the sixth step, based on the measurement result in the fifth step, the electronic component is measured on the reference jig using the first mathematical expression from the measured value in a state of being mounted on the test jig. An estimated value of the measured value in the mounted state is calculated, and the estimated value is corrected using the second mathematical expression. The second mathematical expression is a rational expression.

上記方法において、第３のステップでは、第２の数式（有理式）の次数に応じた最低個数以上の残留誤差補正データ取得用試料を、試験治具に実装した状態と基準治具に実装した状態とでそれぞれ測定し、第４ステップでは、第３ステップでの測定値から有理式の係数を決定する。第２の数式が有理式であれば、第４のステップは計算機を用いて計算処理を簡単に行うことができる。   In the above method, in the third step, a minimum number of residual error correction data acquisition samples corresponding to the order of the second mathematical expression (rational expression) are mounted on the test jig and the reference jig. In the fourth step, the coefficient of the rational expression is determined from the measurement value in the third step. If the second mathematical expression is a rational expression, the fourth step can easily perform a calculation process using a computer.

上記第２ステップにおいて、第１の数式は各測定周波数毎に定義される。しかし、試験治具に実装した状態での測定値から第１の数式を用いて算出した基準治具に実装した状態での測定値の推定値には、各測定周波数毎に大きさが異なる誤差（すなわち、残留誤差）を含むことがある。このような残留誤差は、第２の数式を用いて補正することができる。   In the second step, the first mathematical formula is defined for each measurement frequency. However, the estimated value of the measured value when mounted on the reference jig calculated using the first formula from the measured value when mounted on the test jig has an error that differs in size for each measurement frequency. (Ie, residual error). Such a residual error can be corrected using the second mathematical formula.

好ましくは、上記各方法において、上記第２の数式が１次式である。   Preferably, in each of the above methods, the second mathematical formula is a linear formula.

ここで、多項式が１次式であるとは、指数が１のパラメータにかけあわせる係数が０以外であり、指数が２以上のパラメータにかけあわせる項がない場合をいう。有理式が１次式であるとは、有理式を多項式の商で表したとき、分母が１次の多項式となり、分子が０次又は１次の多項式となる場合である。   Here, the polynomial expression is a linear expression when the coefficient to be applied to a parameter having an exponent of 1 is other than 0 and there is no term to apply to a parameter having an exponent of 2 or more. The rational expression is a linear expression when the rational expression is represented by a polynomial quotient when the denominator is a first-order polynomial and the numerator is a 0th-order or first-order polynomial.

残留誤差の補正精度は、第２の数式が１次式であれば、実用上十分である。残留誤差補正データ取得用試料の個数が少なくてすむため、第３ステップでの残留誤差補正データ取得用試料の測定時間を短縮することができる。残留誤差補正データ取得用試料の個数が少なくなれば、残留誤差補正データ取得用試料を管理する負担も軽減される。   The correction accuracy of the residual error is practically sufficient if the second mathematical expression is a linear expression. Since the number of residual error correction data acquisition samples can be reduced, the measurement time of the residual error correction data acquisition sample in the third step can be shortened. If the number of residual error correction data acquisition samples is reduced, the burden of managing the residual error correction data acquisition samples is reduced.

また、本発明は、上記課題を解決するために、以下のように構成した電子部品特性測定装置を提供する。   Moreover, in order to solve the said subject, this invention provides the electronic component characteristic measuring apparatus comprised as follows.

電子部品測定装置は、電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出するタイプのものである。電子部品特性測定装置は、記憶手段と、第１の数式決定手段と、第２の数式決定手段と、電気特性推定手段とを備える。前記記憶手段は、前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果とを格納する。前記第１の数式決定手段は、前記記憶手段に格納された前記第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を決定する。前記第２の数式決定手段は、前記記憶手段に格納された前記第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を決定する。前記電気特性推定手段は、任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する。前記第２の数式は多項式である。   The electronic component measuring apparatus determines the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the electronic component mounted on a reference jig. This is a type for calculating an estimated value. The electronic component characteristic measuring apparatus includes storage means, first mathematical expression determining means, second mathematical expression determining means, and electrical characteristic estimating means. The storage means obtains residual error correction data in a state where it is mounted on the reference jig for each of the first measurement results obtained by measuring the relative correction data acquisition sample in the state where the storage means is mounted on the reference jig. The second measurement result obtained by measuring the sample for use is stored. The first mathematical formula determining means is based on the first measurement result stored in the storage means and the measurement result obtained by measuring the relative correction data acquisition sample in a state of being mounted on the test jig, A first mathematical formula for calculating an estimated value of a measured value in a state of being mounted on the reference jig is determined from a measured value in a state of being mounted on the test jig. The second mathematical formula determining means measures the residual error correction data acquisition sample in a state of being mounted on the test jig for each of the second measurement result and frequency stored in the storage means. Based on the result, an error included in the estimated value of the measured value when mounted on the reference jig is calculated from the measured value when mounted on the test jig using the first mathematical formula. A second mathematical formula for is determined. The electrical characteristic estimation means is configured to calculate the first electronic component based on a measurement result measured in a state where the electronic component is mounted on the test jig, based on a measurement result of the electronic component mounted on the test jig. Is used to calculate an estimated value of the measured value when mounted on the reference jig, and the estimated value is corrected using the second mathematical expression. The second formula is a polynomial.

上記構成において、第２の数式決定手段は、第２の数式（多項式）の次数に応じた最低個数（次数＋１個）以上の残留誤差補正データ取得用試料を、試験治具に実装した状態と基準治具に実装した状態とでそれぞれ測定した測定結果から、多項式の係数を決定する。第２の数式が多項式であれば、第２の数式決定手段は、計算処理を簡単に行うことができる。   In the above configuration, the second formula determining means has a state in which the residual error correction data acquisition samples of the minimum number (order + 1) according to the order of the second formula (polynomial) are mounted on the test jig. The coefficient of the polynomial is determined from the measurement results measured respectively with the state mounted on the reference jig. If the second mathematical expression is a polynomial, the second mathematical expression determination means can easily perform the calculation process.

上記構成において、第１の数式は各測定周波数毎に定義される。しかし、試験治具に実装した状態での測定値から第１の数式を用いて算出した基準治具に実装した状態での測定値の推定値には、各測定周波数毎に大きさが異なる誤差（すなわち、残留誤差）を含むことがある。このような残留誤差は、第２の数式を用いて補正することができる。   In the above configuration, the first mathematical expression is defined for each measurement frequency. However, the estimated value of the measured value when mounted on the reference jig calculated using the first formula from the measured value when mounted on the test jig has an error that differs in size for each measurement frequency. (Ie, residual error). Such a residual error can be corrected using the second mathematical formula.

また、本発明は、上記課題を解決するために、以下のように構成した電子部品特性測定装置を提供する。   Moreover, in order to solve the said subject, this invention provides the electronic component characteristic measuring apparatus comprised as follows.

電子部品特性測定装置は、電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出するタイプのものである。電子部品特性測定装置は、記憶手段と、第１の数式決定手段と、第２の数式決定手段と、電気特性推定手段とを備える。前記記憶手段は、前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果とを格納する。前記第１の数式決定手段は、前記記憶手段に格納された前記第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を決定する。前記第２の数式決定手段は、前記記憶手段に格納された前記第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を決定する。前記電気特性推定手段は、任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する。前記第２の数式は有理式である。   The electronic component characteristic measuring apparatus is an electrical characteristic of the electronic component that would be obtained if the electronic component was measured in a state where the electronic component was mounted on a reference jig, based on the measurement result in a state where the electronic component was mounted on the test jig. This is a type for calculating the estimated value of. The electronic component characteristic measuring apparatus includes storage means, first mathematical expression determining means, second mathematical expression determining means, and electrical characteristic estimating means. The storage means obtains residual error correction data in a state where it is mounted on the reference jig for each of the first measurement results obtained by measuring the relative correction data acquisition sample in the state where the storage means is mounted on the reference jig. The second measurement result obtained by measuring the sample for use is stored. The first mathematical formula determining means is based on the first measurement result stored in the storage means and the measurement result obtained by measuring the relative correction data acquisition sample in a state of being mounted on the test jig, A first mathematical formula for calculating an estimated value of a measured value in a state of being mounted on the reference jig is determined from a measured value in a state of being mounted on the test jig. The second mathematical formula determining means measures the residual error correction data acquisition sample in a state of being mounted on the test jig for each of the second measurement result and frequency stored in the storage means. Based on the result, an error included in the estimated value of the measured value when mounted on the reference jig is calculated from the measured value when mounted on the test jig using the first mathematical formula. A second mathematical formula for is determined. The electrical characteristic estimation means is configured to calculate the first electronic component based on a measurement result measured in a state where the electronic component is mounted on the test jig, based on a measurement result of the electronic component mounted on the test jig. Is used to calculate an estimated value of the measured value when mounted on the reference jig, and the estimated value is corrected using the second mathematical expression. The second mathematical expression is a rational expression.

上記構成において、第２の数式決定手段は、第２の数式（有理式）の次数に応じた最低個数以上の残留誤差補正データ取得用試料を、試験治具に実装した状態と基準治具に実装した状態とでそれぞれ測定した測定結果から、有理式の係数を決定する。第２の数式が有理式であれば、第２の数式決定手段は、計算処理を簡単に行うことができる。   In the above-described configuration, the second mathematical formula determining means has the minimum number of residual error correction data acquisition samples corresponding to the order of the second mathematical formula (rational formula) mounted on the test jig and the reference jig. The coefficient of the rational formula is determined from the measurement results measured in the mounted state. If the second mathematical expression is a rational expression, the second mathematical expression determination means can easily perform the calculation process.

上記構成において、第１の数式は各測定周波数毎に定義される。しかし、試験治具に実装した状態での測定値から第１の数式を用いて算出した基準治具に実装した状態での測定値の推定値には、各測定周波数毎に大きさが異なる誤差（すなわち、残留誤差）を含むことがある。このような残留誤差は、第２の数式を用いて補正することができる。   In the above configuration, the first mathematical expression is defined for each measurement frequency. However, the estimated value of the measured value when mounted on the reference jig calculated using the first formula from the measured value when mounted on the test jig has an error that differs in size for each measurement frequency. (Ie, residual error). Such a residual error can be corrected using the second mathematical formula.

好ましくは、上記各構成において、上記第２の数式が１次式である。   Preferably, in each of the above configurations, the second mathematical formula is a linear formula.

ここで、多項式が１次式であるとは、指数が１のパラメータにかけあわせる係数が０以外であり、指数が２以上のパラメータにかけあわせる項がない場合をいう。有理式が１次式であるとは、有理式を多項式の商で表したとき、分母が１次の多項式となり、分子が０次又は１次の多項式となる場合である。   Here, the polynomial expression is a linear expression when the coefficient to be applied to a parameter having an exponent of 1 is other than 0 and there is no term to apply to a parameter having an exponent of 2 or more. The rational expression is a linear expression when the rational expression is represented by a polynomial quotient when the denominator is a first-order polynomial and the numerator is a 0th-order or first-order polynomial.

残留誤差の補正精度は、第２の数式が１次式であれば、実用上十分である。残留誤差補正データ取得用試料の個数が少なくてすむため、残留誤差補正データ取得用試料の測定時間を短縮することができる。残留誤差補正データ取得用試料の個数が少なくなれば、残留誤差補正データ取得用試料を管理する負担も軽減される。   The correction accuracy of the residual error is practically sufficient if the second mathematical expression is a linear expression. Since the number of residual error correction data acquisition samples can be reduced, the measurement time of the residual error correction data acquisition samples can be shortened. If the number of residual error correction data acquisition samples is reduced, the burden of managing the residual error correction data acquisition samples is reduced.

また、本発明は、上記課題を解決するために、以下のように構成した電子部品特性測定装置を提供する。   Moreover, in order to solve the said subject, this invention provides the electronic component characteristic measuring apparatus comprised as follows.

電子部品測定装置は、電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出するタイプのものである。電子部品特性測定装置は、記憶手段と、電気特性推定手段とを備える。前記記憶手段は、ａ）前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式と、ｂ）周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式とを記憶する。前記電気特性推定手段は、任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する。前記第２の数式は多項式である。   The electronic component measuring apparatus determines the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the electronic component mounted on a reference jig. This is a type for calculating an estimated value. The electronic component characteristic measurement apparatus includes a storage unit and an electric characteristic estimation unit. The storage means includes: a) a first measurement result obtained by measuring a relative correction data acquisition sample in a state mounted on the reference jig; and a relative correction data acquisition sample mounted on the test jig. A first mathematical formula for calculating an estimated value of a measurement value in a state of being mounted on the reference jig from a measurement value in a state of being mounted on the test jig, determined based on a measurement result of measuring B) Second measurement result obtained by measuring the residual error correction data acquisition sample in the state mounted on the reference jig for each frequency, and the residual in the state mounted on the test jig for each frequency. In a state of being mounted on the reference jig calculated using the first formula from a measured value in a state of being mounted on the test jig, determined based on a measurement result obtained by measuring the error correction data acquisition sample. Calculate the error included in the estimated value of To the second memory and a formula for. The electrical characteristic estimation means is configured to calculate the first electronic component based on a measurement result measured in a state where the electronic component is mounted on the test jig, based on a measurement result of the electronic component mounted on the test jig. Is used to calculate an estimated value of the measured value when mounted on the reference jig, and the estimated value is corrected using the second mathematical expression. The second formula is a polynomial.

上記構成において、第２の数式（多項式）の次数に応じた最低個数（次数＋１個）以上の残留誤差補正データ取得用試料を、試験治具に実装した状態と基準治具に実装した状態とでそれぞれ測定した測定結果から、多項式の係数が決定される。   In the above configuration, a state in which the residual error correction data acquisition samples of the minimum number (order + 1) or more corresponding to the order of the second mathematical expression (polynomial) are mounted on the test jig and the reference jig The coefficients of the polynomial are determined from the measurement results measured in step (b).

上記構成において、第１の数式は各測定周波数毎に定義される。しかし、試験治具に実装した状態での測定値から第１の数式を用いて算出した基準治具に実装した状態での測定値の推定値には、各測定周波数毎に大きさが異なる誤差（すなわち、残留誤差）を含むことがある。このような残留誤差は、第２の数式を用いて補正することができる。   In the above configuration, the first mathematical expression is defined for each measurement frequency. However, the estimated value of the measured value when mounted on the reference jig calculated using the first formula from the measured value when mounted on the test jig has an error that differs in size for each measurement frequency. (Ie, residual error). Such a residual error can be corrected using the second mathematical formula.

また、本発明は、上記課題を解決するために、以下のように構成した電子部品特性測定装置を提供する。   Moreover, in order to solve the said subject, this invention provides the electronic component characteristic measuring apparatus comprised as follows.

電子部品特性測定装置は、電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出するタイプのものである。電子部品特性測定装置は、記憶手段と、電気特性推定手段とを備える。前記記憶手段は、ａ）前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するために第１の数式と、ｂ）周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式とを記憶する。前記電気特性推定手段は、任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する。前記第２の数式は有理式である。   The electronic component characteristic measuring apparatus is an electrical characteristic of the electronic component that would be obtained if the electronic component was measured in a state where the electronic component was mounted on a reference jig, based on the measurement result in a state where the electronic component was mounted on the test jig. This is a type for calculating the estimated value of. The electronic component characteristic measurement apparatus includes a storage unit and an electric characteristic estimation unit. The storage means includes: a) a first measurement result obtained by measuring a relative correction data acquisition sample in a state mounted on the reference jig; and a relative correction data acquisition sample mounted on the test jig. In order to calculate the estimated value of the measured value in the state mounted on the reference jig from the measured value in the state mounted on the test jig, determined based on the measurement result of B) Second measurement result obtained by measuring the residual error correction data acquisition sample in the state mounted on the reference jig for each frequency, and the residual in the state mounted on the test jig for each frequency. In a state of being mounted on the reference jig calculated using the first formula from a measured value in a state of being mounted on the test jig, determined based on a measurement result obtained by measuring the error correction data acquisition sample. Calculate the error included in the estimated value of To the second memory and a formula for. The electrical characteristic estimation means is configured to calculate the first electronic component based on a measurement result measured in a state where the electronic component is mounted on the test jig, based on a measurement result of the electronic component mounted on the test jig. Is used to calculate an estimated value of the measured value when mounted on the reference jig, and the estimated value is corrected using the second mathematical expression. The second mathematical expression is a rational expression.

上記構成において、第２の数式（有理式）の次数に応じた最低個数以上の残留誤差補正データ取得用試料を、試験治具に実装した状態と基準治具に実装した状態とでそれぞれ測定した測定結果から、有理式の係数が決定される。   In the above configuration, the minimum number of residual error correction data acquisition samples corresponding to the order of the second mathematical expression (rational expression) were measured in a state where they were mounted on a test jig and a state where they were mounted on a reference jig. The coefficient of the rational formula is determined from the measurement result.

上記構成において、第１の数式は各測定周波数毎に定義される。しかし、試験治具に実装した状態での測定値から第１の数式を用いて算出した基準治具に実装した状態での測定値の推定値には、各測定周波数毎に大きさが異なる誤差（すなわち、残留誤差）を含むことがある。このような残留誤差は、第２の数式を用いて補正することができる。   In the above configuration, the first mathematical expression is defined for each measurement frequency. However, the estimated value of the measured value when mounted on the reference jig calculated using the first formula from the measured value when mounted on the test jig has an error that differs in size for each measurement frequency. (Ie, residual error). Such a residual error can be corrected using the second mathematical formula.

好ましくは、上記各構成において、上記第２の数式が１次式である。   Preferably, in each of the above configurations, the second mathematical formula is a linear formula.

ここで、多項式が１次式であるとは、指数が１のパラメータにかけあわせる係数が０以外であり、指数が２以上のパラメータにかけあわせる項がない場合をいう。有理式が１次式であるとは、有理式を多項式の商で表したとき、分母が１次の多項式となり、分子が０次又は１次の多項式となる場合である。   Here, the polynomial expression is a linear expression when the coefficient to be applied to a parameter having an exponent of 1 is other than 0 and there is no term to apply to a parameter having an exponent of 2 or more. The rational expression is a linear expression when the rational expression is represented by a polynomial quotient when the denominator is a first-order polynomial and the numerator is a 0th-order or first-order polynomial.

残留誤差の補正精度は、第２の数式が１次式であれば、実用上十分である。残留誤差補正データ取得用試料の個数が少なくてすむため、残留誤差補正データ取得用試料の測定時間を短縮することができる。残留誤差補正データ取得用試料の個数が少なくなれば、残留誤差補正データ取得用試料を管理する負担も軽減される。   The correction accuracy of the residual error is practically sufficient if the second mathematical expression is a linear expression. Since the number of residual error correction data acquisition samples can be reduced, the measurement time of the residual error correction data acquisition samples can be shortened. If the number of residual error correction data acquisition samples is reduced, the burden of managing the residual error correction data acquisition samples is reduced.

本発明の測定誤差の補正方法及び電子部品特性測定装置は、補正精度を向上することができる。   The measurement error correction method and the electronic component characteristic measurement apparatus according to the present invention can improve the correction accuracy.

以下、本発明の実施の形態について、図１〜図８を参照しながら説明する。   Hereinafter, embodiments of the present invention will be described with reference to FIGS.

図５（ａ）及び（ｂ）に示すように、電子部品は、異なる測定系１０，２０で測定する。いずれの測定系１０，２０においても、治具１６，２６の実装部１８，２８に電子部品を実装した状態で、測定装置１２，２２を用いて電気特性の測定を行う。測定時には、治具１６，２６に設けられた同軸コネクタ１７ａ，１７ｂ，１７ｃ；２７ａ，２７ｂ，２７ｃに、測定装置１２，２２に接続された同軸ケーブル１３ａ，１３ｂ，１３ｃ；２３ａ，２３ｂ，２３ｃの先端に設けられた同軸コネクタ１４ａ，１４ｂ，１４ｃ；２４ａ，２４ｂ，２４ｃを接続する。   As shown in FIGS. 5A and 5B, the electronic component is measured by different measurement systems 10 and 20. In any of the measurement systems 10 and 20, electrical characteristics are measured using the measuring devices 12 and 22 in a state where electronic parts are mounted on the mounting portions 18 and 28 of the jigs 16 and 26. At the time of measurement, the coaxial connectors 17a, 17b, 17c; 27a, 27b, 27c provided on the jigs 16, 26 are connected to the coaxial cables 13a, 13b, 13c; 23a, 23b, 23c connected to the measuring devices 12, 22. Coaxial connectors 14a, 14b, 14c provided at the tips; 24a, 24b, 24c are connected.

図示していないが、治具１６，２６の実装部１８，２８には、電子部品の各端子にそれぞれ圧接する接続端子が設けられ、その接続端子が同軸コネクタ１７ａ，１７ｂ，１７ｃ；２７ａ，２７ｂ，２７ｃにそれぞれ電気的に接続されている。   Although not shown, the mounting portions 18 and 28 of the jigs 16 and 26 are provided with connection terminals that are in pressure contact with the respective terminals of the electronic components, and the connection terminals are coaxial connectors 17a, 17b, and 17c; 27a and 27b. , 27c are electrically connected to each other.

測定装置１２，２２は、予め、同軸コネクタ１４ａ，１４ｂ，１４ｃ；２４ａ，２４ｂ，２４ｃに、既知の電気特性を有する標準器（例えば、同軸形状の電子部品）を接続してキャリブレーションを行う。したがって、測定装置１２、２２が同一であってもよい。   The measuring devices 12 and 22 perform calibration by connecting a standard device (for example, a coaxial electronic component) having known electrical characteristics to the coaxial connectors 14a, 14b, and 14c; 24a, 24b, and 24c in advance. Therefore, the measuring devices 12 and 22 may be the same.

測定装置１２，２２には、例えばベクトル・ネットワーク・アナライザ（ＶＮＡ）を用いる。ＶＮＡは、複数のポートを有し高周波で用いられる電子部品の電気特性を単に測定するだけでなく、測定した生データを任意に設定したプログラムにより演算して出力する機能も備え、演算に用いるデータやプログラムを適宜に入力することができる。   As the measuring devices 12 and 22, for example, a vector network analyzer (VNA) is used. VNA not only simply measures the electrical characteristics of electronic components that have multiple ports and is used at high frequencies, but also has a function to calculate and output the measured raw data using an arbitrarily set program. And programs can be entered as appropriate.

一方の測定系１０の治具１６（以下、「基準治具１６」と言う。）は、例えばユーザに対して電気特性を保証するために用いる。他方の測定系２０の治具２６（以下、「試験治具２６」と言う。）は、例えば電子部品の製造工程における良品選別のための測定に用いる。   The jig 16 of one measurement system 10 (hereinafter referred to as “reference jig 16”) is used, for example, to guarantee electric characteristics to the user. The jig 26 of the other measurement system 20 (hereinafter referred to as “test jig 26”) is used for measurement for selecting non-defective products in the manufacturing process of electronic parts, for example.

基準治具１６に実装して測定系１０で測定したときの電子部品の電気特性の測定値（以下、「基準治具測定値」という。)と、試験治具２６に実装して測定系２０で測定したときの電子部品の電気特性の測定値（以下、「試験治具測定値」という。）とは、それぞれ測定誤差を含む。同軸コネクタ１４ａ，１４ｂ，１４ｃ；２４ａ，２４ｂ，２４ｃから測定装置１２，２２側は、標準器を接続して予めキャリブレーションを行っているので、治具１６，２６の測定誤差を相対補正法によって補正することができる。   A measurement value of an electrical property of an electronic component when mounted on the reference jig 16 and measured by the measurement system 10 (hereinafter referred to as “reference jig measurement value”) and a measurement system 20 mounted on the test jig 26. The measured values of the electrical characteristics of the electronic components when measured in (hereinafter referred to as “test jig measured values”) each include a measurement error. Since the measurement devices 12 and 22 side from the coaxial connectors 14a, 14b, and 14c; 24a, 24b, and 24c are preliminarily calibrated by connecting a standard device, the measurement errors of the jigs 16 and 26 are detected by a relative correction method. It can be corrected.

すなわち、予め、治具１６，２６間の相対的な測定誤差を補正する相対補正アダプタ（第１の数式)を導出しておく。そして、任意の電子部品について、試験治具２６に実装し、測定装置２２を用いて測定した試験治具測定値から、予め導出した補正アダプタ（第１の数式)を用いて、その電子部品を基準治具１６に実装して測定したならば得られるであろう基準治具測定値の推定値を算出する。   That is, a relative correction adapter (first equation) for correcting a relative measurement error between the jigs 16 and 26 is derived in advance. Then, an arbitrary electronic component is mounted on the test jig 26 and the electronic component is mounted using a correction adapter (first equation) derived in advance from the test jig measurement value measured using the measuring device 22. An estimated value of the reference jig measurement value that would be obtained if mounted and measured on the reference jig 16 is calculated.

〔相対補正法〕
ここで、電子部品を試験治具２６に実装して測定した試験治具測定値から、相対補正アダプタを用いて、基準治具１６に実装して測定した基準治具測定値の推定値を算出する相対補正法の基本原理について、説明する。以下では、簡単のため、２ポート間の電気特性について２端子対回路を例に説明するが、ｎ端子対回路（ｎは、１、又は３以上の整数）に対しても拡張することができる。 [Relative correction method]
Here, an estimated value of the reference jig measurement value measured by mounting on the reference jig 16 using the relative correction adapter is calculated from the test jig measurement value measured by mounting the electronic component on the test jig 26. The basic principle of the relative correction method will be described. In the following, for simplicity, the electrical characteristics between two ports will be described by taking a two-terminal pair circuit as an example, but it can be extended to an n-terminal pair circuit (n is 1 or an integer of 3 or more). .

図６（ａ）は、２ポートの電子部品（以下、「試料ＤＵＴ」と言う。）を実装した基準治具１６の２端子対回路を示す。試料ＤＵＴの特性を散乱行列（ＳＤＵＴ）で表している。基準治具１６における同軸コネクタと試料ＤＵＴのポートとの間の誤差特性を散乱行列（ＥＤ１），（ＥＤ２）で表している。回路の両側の端子において、基準治具に試料ＤＵＴを実装した基準状態での測定値Ｓ１１Ｄ，Ｓ２１Ｄが得られる。 FIG. 6A shows a two-terminal pair circuit of the reference jig 16 on which a two-port electronic component (hereinafter referred to as “sample DUT”) is mounted. The characteristics of the sample DUT are represented by a scattering matrix (S DUT ). The error characteristics between the coaxial connector in the reference jig 16 and the port of the sample DUT are represented by scattering matrices (E D1 ) and (E D2 ). At the terminals on both sides of the circuit, measurement values S 11D and S 21D in the reference state in which the sample DUT is mounted on the reference jig are obtained.

図６（ｂ）は、試料ＤＵＴを実装した試験治具２６の２端子対回路を示す。試料ＤＵＴの特性を散乱行列（ＳＤＵＴ）で表している。試験治具２６における同軸コネクタと試料ＤＵＴのポートとの間の誤差特性を散乱行列（ＥＴ１），（ＥＴ２）で表している。回路の両側の端子において、試験治具に試料ＤＵＴを実装した基準状態での測定値Ｓ１１Ｔ，Ｓ２１Ｔが得られる。 FIG. 6B shows a two-terminal pair circuit of the test jig 26 on which the sample DUT is mounted. The characteristics of the sample DUT are represented by a scattering matrix (S DUT ). Error characteristics between the coaxial connector in the test jig 26 and the port of the sample DUT are represented by scattering matrices (E T1 ) and (E T2 ). At the terminals on both sides of the circuit, measured values S 11T and S 21T in a reference state in which the sample DUT is mounted on the test jig are obtained.

図６（ｃ）は、図６（ｂ）の回路の両側に、誤差特性（ＥＴ１），（ＥＴ２）を中和するアダプタ（ＥＴ１）−１，（ＥＴ２）−１を接続した状態を示す。このアダプタ（ＥＴ１）−１，（ＥＴ２）−１は、理論上は、誤差特性の散乱行列（ＥＴ１），（ＥＴ２）を伝送行列に変換し、その逆行列を求め、再度散乱行列に変換することにより得られる。誤差特性（ＥＴ１），（ＥＴ２）とアダプタ（ＥＴ１）−１，（ＥＴ２）−１との間の境界部分３０，３２において、試験治具２６に試料ＤＵＴを実装して測定した試験治具測定値Ｓ１１Ｔ，Ｓ２１Ｔが得られる。図６（ｃ）の回路は、試験治具２６の誤差が除去され、回路の両側の端子において、試料ＤＵＴそのものの測定値Ｓ１１ＤＵＴ，Ｓ２１ＤＵＴが得られる。 In FIG. 6C, adapters (E T1 ) −1 and (E T2 ) −1 that neutralize the error characteristics (E T1 ) and (E T2 ) are connected to both sides of the circuit of FIG. Indicates the state. The adapters (E T1 ) −1 and (E T2 ) −1 theoretically convert the scattering matrix (E T1 ) and (E T2 ) of the error characteristics into a transmission matrix, obtain the inverse matrix, and then scatter again. It is obtained by converting to a matrix. Measurement was performed by mounting the sample DUT on the test jig 26 at the boundary portions 30 and 32 between the error characteristics (E T1 ) and (E T2 ) and the adapters (E T1 ) −1 and (E T2 ) −1 . Test jig measurement values S 11T and S 21T are obtained. In the circuit of FIG. 6C, the error of the test jig 26 is removed, and the measured values S 11 DUT and S 21 DUT of the sample DUT itself are obtained at the terminals on both sides of the circuit.

図６（ｃ）の回路は試料ＤＵＴのみと等価であるので、図６（ａ）と同様に、両側に、基準治具１６の誤差特性の散乱行列（ＥＤ１），（ＥＤ２）を接続すると、図７（ａ）のようになる。 Since the circuit of FIG. 6C is equivalent only to the sample DUT, as in FIG. 6A, the scattering matrices (E D1 ) and (E D2 ) of the error characteristics of the reference jig 16 are connected to both sides. Then, it becomes as shown in FIG.

図７（ａ）において符号３４で示した（ＥＤ１），（ＥＴ１）−１を合成した散乱行列を（ＣＡ１）とし、符号３６で示した（ＥＴ２）−１，（ＥＤ２）を合成した散乱行列を（ＣＡ２）とすると、図７（ｂ）のようになる。これらの散乱行列（ＣＡ１），（ＣＡ２）は、いわゆる「相対補正アダプタ」であり、試験治具測定値Ｓ１１Ｔ，Ｓ２１Ｔと基準治具測定値Ｓ１１Ｄ，Ｓ２１Ｄとを関係付ける。したがって、相対補正アダプタ（ＣＡ１），（ＣＡ２）が決まれば、任意の電子部品を試験治具に実装した状態での測定値Ｓ１１Ｔ，Ｓ２１Ｔから、相対補正アダプタ（ＣＡ１），（ＣＡ２）を用いて、基準治具測定値Ｓ１１Ｄ，Ｓ２１Ｄを算出（推定）することができる。 In FIG. 7A, a scattering matrix obtained by combining (E D1 ) and (E T1 ) −1 indicated by reference numeral 34 is (CA1), and (E T2 ) −1 and (E D2 ) indicated by reference numeral 36 are If the combined scattering matrix is (CA2), the result is as shown in FIG. These scattering matrices (CA1) and (CA2) are so-called “relative correction adapters”, and relate the test jig measurement values S 11T and S 21T to the reference jig measurement values S 11D and S 21D . Therefore, if the relative correction adapters (CA1) and (CA2) are determined, the relative correction adapters (CA1) and (CA2) are obtained from the measured values S 11T and S 21T in a state where an arbitrary electronic component is mounted on the test jig. The reference jig measurement values S 11D and S 21D can be calculated (estimated).

各相対補正アダプタ（ＣＡ１），（ＣＡ２）は、それぞれ、４つの係数ｃ００，ｃ０１，ｃ１０，ｃ１１；ｃ２２，ｃ２３，ｃ３２，ｃ３３を含むが、相反定理により、ｃ０１＝ｃ１０、ｃ２３＝ｃ３２となる。したがって、従来は、各ポートについて、特性の異なった３種類の１ポート標準試料(補正データ取得用試料)を基準治具１６と基準治具２６とに実装して測定し、各係数ｃ００，ｃ０１，ｃ１０，ｃ１１；ｃ２２，ｃ２３，ｃ３２，ｃ３３を決定していた。 Each of the relative correction adapters (CA1) and (CA2) includes four coefficients c 00 , c 01 , c 10 , c 11 ; c 22 , c 23 , c 32 , and c 33 , but according to the reciprocity theorem, c 01 = c 10 and c 23 = c 32 . Therefore, conventionally, for each port, three types of one-port standard samples (correction data acquisition samples) having different characteristics are mounted on the reference jig 16 and the reference jig 26 and measured, and each coefficient c 00 , c 01, c 10, c 11 ; a c 22, c 23, c 32 , c 33 it has been determined.

〔残留誤差の補正〕
上述したように、試験治具に実装した状態で電子部品の特性（試験治具測定値）を測定し、その測定結果に相対補正アダプタを適用して、基準治具に実装した状態での特性（基準治具測定値）を推定することができる。しかし、実際には、試料の電気特性測定時に試料に加えられる荷重によって生じる試料の電気特性変化や無視し得ない大きさの治具のポート間漏洩といった非線形的な治具間差異要因のため、相対補正アダプタを用いただけでは、試験治具測定値を基準治具測定値に完全に補正することができず、残留誤差（基準治具測定値の推定値と実測値と誤差）が残る。そこで、残留誤差補正式（第２の数式）を用いて補正精度の向上を図る。 [Residual error correction]
As described above, the characteristics (measurement value of the test jig) of the electronic component are measured while mounted on the test jig, and the relative correction adapter is applied to the measurement result, and the characteristics when mounted on the reference jig (Reference jig measurement value) can be estimated. However, in actuality, due to non-linear differences between jigs such as changes in the specimen's electrical characteristics caused by the load applied to the specimen during measurement of the specimen's electrical characteristics and leakage between ports of jigs that cannot be ignored, If only the relative correction adapter is used, the test jig measurement value cannot be completely corrected to the reference jig measurement value, and residual errors (estimated reference jig measurement value, actual measurement value, and error) remain. Therefore, the correction accuracy is improved by using the residual error correction formula (second formula).

次に、残留誤差補正式を用いて補正精度を向上する場合の手順の概要について、説明する。   Next, an outline of a procedure for improving the correction accuracy using the residual error correction formula will be described.

まず、例えば少なくとも３個の補正データ取得用試料を、基準治具と試験治具の双方で測定し、その測定結果より、試験治具で測定した試験治具測定値から基準治具で測定したならば得られるであろう基準治具測定値の推定値を導出するための相対補正アダプタ（第１の数式）を算出する。   First, for example, at least three correction data acquisition samples were measured with both the reference jig and the test jig, and from the measurement results, the measurement values measured with the test jig were measured with the reference jig. Then, a relative correction adapter (first equation) for deriving an estimated value of the reference jig measurement value that would be obtained is calculated.

次に、測定対象と類似した特性を持つ任意の試料（以下、「残留誤差補正データ取得用試料」という。）を、基準治具と試験治具の双方で測定する。そして、試験治具で測定した試験治具測定値から、相対補正アダプタを用い、基準治具で測定したならば得られるであろう基準治具測定値（推定値）を算出し、実際に基準治具で測定したときの測定値（実測値）との差、すなわち残留誤差を求める。周波数ごとに、測定と残留誤差の算出を行い、周波数をパラメータとして残留誤差の近似関数、すなわち残留誤差補正式（第２の数式）を求める。   Next, an arbitrary sample having characteristics similar to the measurement target (hereinafter referred to as “residual error correction data acquisition sample”) is measured using both the reference jig and the test jig. Then, from the test jig measurement value measured with the test jig, a reference jig measurement value (estimated value) that would be obtained if the measurement was performed with the reference jig using a relative correction adapter was calculated. A difference from a measured value (actually measured value) when measured with a jig, that is, a residual error is obtained. For each frequency, measurement and calculation of the residual error are performed, and an approximate function of the residual error, that is, a residual error correction formula (second formula) is obtained using the frequency as a parameter.

そして、測定対象の試料について、試験治具に実装した状態で測定し、その試験治具測定値に相対補正アダプタを適用して、基準治具で測定したならば得られるであろう基準治具測定値（推定値）を算出し、これに対して、残留誤差の近似関数（残留誤差補正式）を用いて算出した残留誤差の予測値をオフセットとして加える。   Then, measure the sample to be measured while mounted on the test jig, apply the relative correction adapter to the measured value of the test jig, and measure with the reference jig. A measured value (estimated value) is calculated, and a predicted value of residual error calculated using an approximate function of residual error (residual error correction formula) is added as an offset.

次に、残留誤差補正式（第２の数式）には多項式又は有理式を用いることができることを説明する。   Next, it will be described that a polynomial or a rational expression can be used for the residual error correction expression (second expression).

〔多項式による補正〕
周波数ｆにおいて、次式を想定する。

Figure 2006242799
ここで、Ｓｄは図５に示したような、電気部品の電気特性を測定する測定系において、補正アダプタ法の適用対象試料を基準治具に実装した状態で測定したときの測定値（以下、「基準治具測定値」という。）、Ｓｔは同じく補正アダプタ法の適用対象試料を試験治具に実装した状態で測定したときの測定値（以下、「試験治具測定値」という。）、ｇ（）は補正アダプタ法による変換関数、εは残留誤差であり、それぞれ複素数である。 [Correction by polynomial]
The following equation is assumed at the frequency f.
Figure 2006242799
 Here, Sd is a measured value (hereinafter referred to as “measured value”) when measured in a measurement system for measuring the electrical characteristics of an electrical component as shown in FIG. , “Reference jig measurement value”), St is a measurement value when the sample to be applied with the correction adapter method is mounted on the test jig (hereinafter referred to as “test jig measurement value”). ) And g () are conversion functions according to the correction adapter method, and ε is a residual error, each of which is a complex number.

（１）式を複素数ｚの関数と考えると、任意の測定値ａの周辺ではテイラーの公式より以下が成り立つ。

Figure 2006242799
ここで、Ａ，Ｂ，Ｃ，Ｄは、定数である。 Considering the equation (1) as a function of the complex number z, the following holds according to Taylor's formula around an arbitrary measured value a.
Figure 2006242799
 Here, A, B, C, and D are constants.

ｚを狭い範囲で考えると、（２）式は少ない次数の項までで近似できる。近似に必要な次数を設定し、（次数＋１）個の残留誤差補正データ取得用試料の測定を行い、測定値と誤差の連立方程式を解くことにより、εを求めることができる。   When z is considered in a narrow range, equation (2) can be approximated to terms of a small order. Ε can be obtained by setting the order necessary for the approximation, measuring (+1) residual error correction data acquisition samples, and solving the simultaneous equations of the measurement value and the error.

具体例として、（２）式が１次式の場合には、次の（３）のような形で表すことができる。

Figure 2006242799
As a specific example, when the expression (2) is a linear expression, it can be expressed in the following form (3).
Figure 2006242799

（３）式を（１）式に代入すれば、すなわち、補正アダプタを適用して求めた基準治具測定値の推定値ｇ（Ｓｔ）について、Ｓｔの関数として求めたεを加算すれば、試験治具測定値Ｓｔから基準治具測定値Ｓｄを推定することができる。   Substituting equation (3) into equation (1), that is, adding ε obtained as a function of St to the estimated value g (St) of the reference jig measurement value obtained by applying the correction adapter, The reference jig measurement value Sd can be estimated from the test jig measurement value St.

残留誤差補正式、すなわち、残留誤差補正データ取得用試料を用いて定数Ａ，Ｂを求めた（３）式を、その他の試料の残留誤差の補正に用いることにより、残留誤差を低減することができる。すなわち、補正アダプタを適用して求めた基準治具測定値の推定値ｇ（Ｓｔ）に、残留誤差補正データ取得用試料の測定から求めた残留誤差の予測式である残留誤差補正式を用いて算出した残留誤差の予測値を加算する補正を行う。これにより、試料測定時における補正アダプタ法の残留誤差を低減することができる。   The residual error can be reduced by using the residual error correction formula, that is, the formula (3) obtained by obtaining the constants A and B using the residual error correction data acquisition sample for correcting the residual error of other samples. it can. That is, the residual error correction formula that is a prediction formula of the residual error obtained from the measurement of the residual error correction data acquisition sample is used for the estimated value g (St) of the reference jig measurement value obtained by applying the correction adapter. Correction is performed to add the predicted value of the calculated residual error. Thereby, the residual error of the correction adapter method at the time of sample measurement can be reduced.

次に、このような残留誤差補正方法の妥当性について検証する。   Next, the validity of such a residual error correction method is verified.

伝達系における代表的な誤差要因としては、ポート間の漏洩（Ｌｅａｋａｇｅ）が挙げられる。漏洩はシグナルフローダイヤグラムにおいてモデル化はされているものの、正確には表現できないため、現実の測定においては十分に小さい（換言すれば、寄与しない）ことを前提としている。測定系が全て同軸系で完結していれば、このような扱いでも間題を生じないが、現実に高周波デバイスを運用する環境は表面実装などであるため、漏洩が常に十分に小さいとは言えないのが現状である。   A typical error factor in the transmission system is leakage between ports. Although the leakage is modeled in the signal flow diagram, it cannot be expressed accurately, so it is assumed that it is sufficiently small (in other words, does not contribute) in actual measurement. If all measurement systems are complete with a coaxial system, there will be no problem even with this type of treatment, but since the environment in which high-frequency devices are actually operated is surface mounting, the leakage is always small enough. There is no current situation.

図１に、漏洩が存在する場合のシグナルフローダイヤグラムを示す。式を簡潔に表現するため、入力側の治具の挿入損失は出力側の治具の挿入損失と一体にして扱う。図１における試料（ＤＵＴ）の伝達係数Ｓ２１ＤＵＴと、漏洩が重畳されて測定される伝達係数Ｓ２１Ｍの関係は、次の（４）式で表せる。なお、（４）式では、４個以上の変数の積から構成される項を省略している。

Figure 2006242799
FIG. 1 shows a signal flow diagram when there is a leak. In order to express the formula concisely, the insertion loss of the jig on the input side is handled integrally with the insertion loss of the jig on the output side. A transmission coefficient S 21DUT sample (DUT) in FIG. 1, the relationship of the transmission coefficient S 21M leakage is measured are superimposed can be expressed by the following equation (4). In equation (4), a term composed of products of four or more variables is omitted.
Figure 2006242799

（４）式において、本来の伝達係数は、Ｅ２１ＦＳ２１ＤＵＴ＝Ｓ２１ｄと表せるので、漏洩によって発生する誤差の補正式は、次の（５）式のように表せる。

Figure 2006242799
In equation (4), the original transmission coefficient can be expressed as E 21F S 21DUT = S 21d, and therefore, the correction equation for the error caused by leakage can be expressed as the following equation (5).
Figure 2006242799

（５）式は次の（６）式のように表せる。

Figure 2006242799
ここで（１）式より、Ｓ２１ｄ−ｇ（Ｓ２１ｔ）＝εと表せるので、（６）式は次の（７）式のように変形できる。
Figure 2006242799
 Equation (5) can be expressed as the following equation (6).
Figure 2006242799
 Here, since it can be expressed as S 21d −g (S 21t ) = ε from the expression (1), the expression (6) can be transformed into the following expression (7).
Figure 2006242799

ここで−ＥＸＦ／（１−ＥＸＦ）をＡ、ＥＸＦ／（１−ＥＸＦ）をＢと見なすと、（７）式は（５）式を（３）式の形式で表現したものと言える。したがって、主に漏洩によって発生する伝達係数における補正アダプタ法残留誤差の補正には、多項式による補正が有効なことが分かる。 Assuming that -E XF / (1-E XF ) is A and E XF / (1-E XF ) is B, Eq. (7) expresses Eq. (5) in the form of Eq. (3). It can be said. Therefore, it can be seen that the correction by the polynomial is effective for correcting the correction adapter method residual error mainly in the transfer coefficient caused by leakage.

なお、上述した補正式は、テイラー展開に基づく誤差の近似による一般的な補正式であるため、反射係数の補正の場合においても有効なことは明らかである。   Note that the above-described correction formula is a general correction formula based on an error approximation based on Taylor expansion, so it is clear that the correction formula is also effective in correcting the reflection coefficient.

〔有理式による補正〕
補正アダプタ法は高周波電気特性測定系における線形的な治具間差異要因を補正できるが、何らかの要因により反射系において誤差要因が残留した場合、補正アダプタ法により推定された値であるｇ（Ｓｔ）がその残留した誤差によって受ける影響は、３つのパラメータで表現され、本来推定するべき値であるＳｄとは、図２に示すような関係を有する。 [Correction by rational formula]
Although correction adapter method can correct the linear jig differences factor in the high-frequency electrical properties measurement system, if the residual error factors in a reflection system for some reason, it is estimated values by the correction adapter method g (S t ) Is expressed by three parameters, and has a relationship as shown in FIG. 2 with S d which is a value to be originally estimated.

すなわち、本来の反射係数Ｓｄと、残留した誤差要因が重畳されて測定された反射係数ｇ（Ｓｔ）との間の関係は、次の（８）式で表せる。

Figure 2006242799
That is, the original reflection coefficient S d, the relationship between the residual error factors superimposed with the measured reflection coefficient g (S t) is expressed by the following equation (8).
Figure 2006242799

したがって、誤差要因を補正する関係式は（８）式を整理することで得られ、次の（９）式のように表される。ここで、Ａ，Ｂ，Ｃは定数であり、以下に説明するようにしてこれらを求めることで、補正を行なうことができる。

Figure 2006242799
Therefore, the relational expression for correcting the error factor is obtained by rearranging the expression (8), and is expressed as the following expression (9). Here, A, B, and C are constants, and correction can be performed by obtaining them as described below.
Figure 2006242799

（９）式を解くのに必要な数量（３個＝未知の定数）の残留誤差補正データ取得用試料について測定を行い、連立方程式を解いて上記の未知の定数Ａ，Ｂ，Ｃを導出し、補正アダプタ法適用済みの試験治具測定値Ｓｔと、基準治具測定値Ｓｄとの間の補正式を導出する。 (9) Measure the number of residual error correction data acquisition samples (3 = unknown constant) necessary to solve the equation, and solve the simultaneous equations to derive the above unknown constants A, B, and C. derives the correction adapter method already applied test fixture measurement values S t, the correction formula between the reference fixture measurement value S d.

上記方法によりＡ，Ｂ，Ｃを決定した（９）式を、その他試料の補正アダプタ法適用結果に適用することにより、試料測定時における補正アダプタ法残留誤差を低減することができる。   By applying the equation (9) in which A, B, and C are determined by the above method to other sample correction adapter method application results, the correction adapter method residual error at the time of sample measurement can be reduced.

導出過程から明らかなように、有理式を用いた補正は、反射係数（反射波）において発生する誤差要因の補正に適しているが、伝達係数（伝達波）の補正においても有効である。すなわち、伝達係数の測定経路は反射係数のそれを含んでいるため、反射系において発生した誤差要因は伝達系においても寄与を生じ得るためである。   As apparent from the derivation process, the correction using the rational expression is suitable for correcting the error factor generated in the reflection coefficient (reflected wave), but is also effective in correcting the transfer coefficient (transmitted wave). That is, since the measurement path of the transmission coefficient includes that of the reflection coefficient, an error factor generated in the reflection system can also contribute to the transmission system.

〔電子部品特性測定装置〕
次に、測定装置１２，２２の構成について、図８のブロック図を参照しながら説明する。 [Electronic component characteristic measuring device]
Next, the configuration of the measuring devices 12 and 22 will be described with reference to the block diagram of FIG.

測定装置１２，２２は、表示部５２と、操作部５４と、測定部５６と、制御部５８と、記憶部６０と、演算部６２と、インターフェース部６４とを備える。   The measurement devices 12 and 22 include a display unit 52, an operation unit 54, a measurement unit 56, a control unit 58, a storage unit 60, a calculation unit 62, and an interface unit 64.

表示部５２は、表示パネル等を含み、測定装置１２，２２の動作状況や操作指示などを表示する。操作部５４は、ボタンやスイッチなどを含み、オペレータからの電子部品測定装置１２，２２に対する操作を受け付ける。測定部５６は、同軸ケーブル１３ａ〜１３ｃ；２３ａ〜２３ｃ及び治具１６，２６を介して電子部品の端子に接続され、電子部品の端子を適宜に選択して信号を入力し出力信号を測定する。制御部５８は、測定装置１２，２２全体の制御を統括する。記憶部６０には、制御部５８や演算部６２を動作させるためのプログラム、測定部５６からの測定データ、演算部６２の演算結果データなどが格納される。演算部６２は、測定部５６からのデータや記憶部６０に格納されたデータを用い、所定のプログラムに従って演算を行う。インターフェース部６４は、外部機器とデータを送受信するためのインターフェースであり、記憶部６０に格納するためのデータやプログラムや、演算部６２からの演算結果データなどを受け付け、入出力を行う。   The display unit 52 includes a display panel and the like, and displays the operation status and operation instructions of the measuring devices 12 and 22. The operation unit 54 includes buttons, switches, and the like, and accepts operations on the electronic component measuring apparatuses 12 and 22 from the operator. The measuring unit 56 is connected to the terminals of the electronic components via the coaxial cables 13a to 13c; 23a to 23c and the jigs 16 and 26, and appropriately selects the terminals of the electronic components and inputs a signal to measure an output signal. . The control unit 58 controls the overall control of the measuring devices 12 and 22. The storage unit 60 stores a program for operating the control unit 58 and the calculation unit 62, measurement data from the measurement unit 56, calculation result data of the calculation unit 62, and the like. The calculation unit 62 uses the data from the measurement unit 56 and the data stored in the storage unit 60 to perform calculation according to a predetermined program. The interface unit 64 is an interface for transmitting and receiving data to and from an external device. The interface unit 64 receives data and programs to be stored in the storage unit 60, calculation result data from the calculation unit 62, and performs input / output.

測定装置１２，２２は、記憶部６０に格納されたプログラムに従って動作する。測定装置１２，２２は、校正モードと測定モードを含む複数の動作モードで動作させることができる。   The measuring devices 12 and 22 operate according to a program stored in the storage unit 60. The measuring devices 12 and 22 can be operated in a plurality of operation modes including a calibration mode and a measurement mode.

校正モードでは、基準治具１６と試験治具２６との間の相対的な測定誤差を補正するためのデータを取得し、電気特性を推定するための第１及び第２の数式を決定する。すなわち、測定部５６は、基準治具１６や試験治具２６に、標準試料、相対補正データ取得用試料又は残留誤差補正データ取得用試料が実装された状態で、順次、電気特性の測定を行う。このとき、例えば表示部５２に測定対象の試料の種別が表示される。オペレータは、表示された測定対象の準備が完了すると、操作部５４を操作する。この操作を操作部５４が受け付けると、測定部５６は測定を開始し、測定データは記憶部６０に格納される。   In the calibration mode, data for correcting a relative measurement error between the reference jig 16 and the test jig 26 is acquired, and first and second mathematical formulas for estimating electrical characteristics are determined. That is, the measurement unit 56 sequentially measures the electrical characteristics in a state where the standard sample, the relative correction data acquisition sample, or the residual error correction data acquisition sample is mounted on the reference jig 16 or the test jig 26. . At this time, for example, the type of the sample to be measured is displayed on the display unit 52. When the preparation of the displayed measurement target is completed, the operator operates the operation unit 54. When the operation unit 54 accepts this operation, the measurement unit 56 starts measurement, and the measurement data is stored in the storage unit 60.

演算部６２は、記憶部６０に格納された測定データを、適宜なタイミングで読み出して、補正アダプタ（ＣＡ１），（ＣＡ２）などについて演算し、電気特性を推定するための第１の数式を決定する。また、演算部６２は、記憶部６０に格納された残留誤差補正データ取得用試料を測定したデータを読み出し、残留誤差補正データ取得用試料について、測定部５６で測定した基準治具測定値（実測値）と、測定部５６で測定した試験治具測定値に第１の数式を用いて算出した基準治具測定値（測定値）とから、第２の数式を決定する。   The calculation unit 62 reads the measurement data stored in the storage unit 60 at an appropriate timing, calculates the correction adapters (CA1), (CA2), etc., and determines the first formula for estimating the electrical characteristics. To do. In addition, the calculation unit 62 reads out data obtained by measuring the residual error correction data acquisition sample stored in the storage unit 60, and the reference jig measurement value (actual measurement) measured by the measurement unit 56 for the residual error correction data acquisition sample. Value) and the reference jig measurement value (measurement value) calculated by using the first mathematical expression for the test jig measurement value measured by the measurement unit 56, the second mathematical expression is determined.

測定モードでは、試験治具２６を用いた試験状態の測定データから、基準治具１６を用いた基準状態での電気特性を推定する。すなわち、測定部５６は、試験治具２６に任意の電子部品が実装された状態で測定を行う。演算部６２は、測定部５６からの測定データから、その電子部品の電気特性の推定値を算出する。このとき、演算部６２は、校正モードで決定された第１及び第２の数式を記憶部６０から読み出し、それらの数式を用いて、電子部品の電気特性の推定値を算出する。算出された推定値は、表示部５２に表示されたり、インターフェース部６４から外部機器に出力されたりする。   In the measurement mode, the electrical characteristics in the reference state using the reference jig 16 are estimated from the measurement data in the test state using the test jig 26. That is, the measurement unit 56 performs measurement in a state where an arbitrary electronic component is mounted on the test jig 26. The calculation unit 62 calculates an estimated value of the electrical characteristics of the electronic component from the measurement data from the measurement unit 56. At this time, the calculation unit 62 reads out the first and second mathematical formulas determined in the calibration mode from the storage unit 60, and calculates an estimated value of the electrical characteristics of the electronic component using those mathematical formulas. The calculated estimated value is displayed on the display unit 52 or output from the interface unit 64 to an external device.

なお、標準試料、相対補正データ取得用試料、残留誤差補正データ取得用試料を基準治具１６に実装して測定したデータは、試験治具２６を含む測定系２０の測定装置２２の記憶部６０に記憶しておくようにしてもよい。この場合、校正モードにおいて、標準試料、相対補正データ取得用試料、残留誤差補正データ取得用試料を試験治具２６に実装したときの測定値は測定装置２２を用いて測定し、基準治具１６に実装したときの測定値については、記憶部６０に記憶されているデータを用いる。個々の測定装置２２で標準試料、相対補正データ取得用試料、残留誤差補正データ取得用試料を基準治具１６に実装して測定する必要がないので、測定装置２２の台数を容易に増やすことができる。   The data measured by mounting the standard sample, the relative correction data acquisition sample, and the residual error correction data acquisition sample on the reference jig 16 is the storage unit 60 of the measurement device 22 of the measurement system 20 including the test jig 26. You may make it memorize in. In this case, in the calibration mode, the measurement value when the standard sample, the relative correction data acquisition sample, and the residual error correction data acquisition sample are mounted on the test jig 26 is measured using the measurement device 22, and the reference jig 16 is measured. Data stored in the storage unit 60 is used for measurement values when mounted on the storage unit 60. Since it is not necessary to mount and measure the standard sample, the relative correction data acquisition sample, and the residual error correction data acquisition sample on the reference jig 16 with each measurement device 22, the number of measurement devices 22 can be easily increased. it can.

さらには、基準治具１６や試験治具２６を別の測定装置に接続して、相対補正データ取得用試料や残留誤差補正データ取得用試料を測定して相対補正アダプタ（第１の数式）や残留誤差補正式（第２の数式）を求め、そのようにして求めた相対補正アダプタ（第１の数式）や残留誤差補正式（第２の数式）のデータを、試験治具２６を含む測定系２０の測定装置２２の記憶部６０に記憶しておくようにしてもよい。この場合、試験治具２６を含む測定系２０で、相対補正データ取得用試料や残留誤差補正データ取得用試料を試験治具２６に実装して測定する作業を省略することができる。   Further, the reference jig 16 and the test jig 26 are connected to another measuring device, and the relative correction data acquisition sample and the residual error correction data acquisition sample are measured to obtain a relative correction adapter (first equation), The residual error correction formula (second formula) is obtained, and the data of the relative correction adapter (first formula) and the residual error correction formula (second formula) thus obtained are measured including the test jig 26. You may make it memorize | store in the memory | storage part 60 of the measuring apparatus 22 of the type | system | group 20. FIG. In this case, the measurement system 20 including the test jig 26 can omit the work of mounting and measuring the relative correction data acquisition sample and the residual error correction data acquisition sample on the test jig 26.

実施例１として、表面弾性表面フィルタの反射波及び伝達波の治具間差異補正について説明する。   As Example 1, correction of differences between jigs of reflected waves and transmitted waves of a surface elastic surface filter will be described.

試料には表面弾性波フィルタ、基準治具には検査基板、試験治具にはプローブ治具を用いる。   A surface acoustic wave filter is used as a sample, an inspection substrate is used as a reference jig, and a probe jig is used as a test jig.

まず、基準治具とする検査基板において、補正データ取得用試料３個の基準治具測定値を測定する。   First, on the inspection substrate used as the reference jig, the measurement values of the reference jig for the three correction data acquisition samples are measured.

補正データ取得用試料は、各ポートにおいて開放、短絡、終端を実現した試料であり、各ポート間は２５ｄＢ以上のアイソレーションを持つ。また、補正データ取得用試料の外形は、試料と同様に治具に実装して測定できるような形状とされている。   The correction data acquisition sample is a sample that realizes open, short circuit, and termination at each port, and each port has an isolation of 25 dB or more. Further, the outer shape of the correction data acquisition sample is shaped so that it can be mounted on a jig and measured in the same manner as the sample.

続いて、試験治具とするプローブ治具において、補正データ取得用試料３個の試験治具測定値を取得する。   Subsequently, in the probe jig used as the test jig, the test jig measurement values of the three correction data acquisition samples are acquired.

取得した補正データ取得用試料の基準治具測定値及び試験治具測定値から、前述した相対補正法により、試料の試験治具測定値から基準治具測定値を推定する補正式（補正アダプタ）を導出する。   Correction formula (correction adapter) that estimates the reference jig measurement value from the test jig measurement value of the sample by the relative correction method described above from the reference jig measurement value and test jig measurement value of the acquired correction data acquisition sample Is derived.

試料とは同一品種の、平均的な特性を持つ表面弾性波フィルタ２個を任意に選択し、それらの基準治具測定値を取得する。この２個の表面弾性波フィルタが、先に述べた残留誤差補正データ取得用試料である。この表面弾性波フィルタ２個（残留誤差補正データ取得用試料）については、上記補正アダプタを適用した状態での試験治具測定値の推定値も算出する。   Two surface acoustic wave filters of the same type as the sample and having average characteristics are arbitrarily selected, and their reference jig measurement values are acquired. These two surface acoustic wave filters are the residual error correction data acquisition samples described above. For the two surface acoustic wave filters (residual error correction data acquisition sample), an estimated value of the test jig measurement value in a state where the correction adapter is applied is also calculated.

残留誤差補正データ取得用試料の測定により得られた表面弾性波フィルタの基準治具測定値及び上記補正アダプタを適用した状態での試験治具測定値から、前述した補正アダプタ法残留誤差補正式の（３）式における未知数を決定する。   From the reference jig measurement value of the surface acoustic wave filter obtained by measuring the residual error correction data acquisition sample and the test jig measurement value in the state where the correction adapter is applied, the above-mentioned correction adapter method residual error correction formula (3) Determine the unknown in the equation.

１個目の表面弾性波フィルタの基準治具測定値をＳｄ１、２個目の表面弾性波フィルタの基準治具測定値をＳｄ２、１個目の表面弾性フィルタの補正アダプタを適用した状態での試験治具測定値をＳｃ１、２個月の表面弾性波フィルタの補正アダプタを適用した状態での試験治具測定値をＳｃ２とする。Ｓｄ１、Ｓｄ２、Ｓｃ１、及びＳｃ２は、いずれもＳパラメータである。 The reference jig measurement value of the first surface acoustic wave filter is S d1 , the reference jig measurement value of the second surface acoustic wave filter is S d2 , and the correction adapter of the first surface acoustic wave filter is applied The measured value of the test jig at S c1 is S c1 , and the measured value of the test jig in a state where the correction adapter of the two-month surface acoustic wave filter is applied is S c2 . S d1 , S d2 , S c1 , and S c2 are all S parameters.

これらを（３）式に代入すると、以下の２式が得られる。

Figure 2006242799
これらは、Ａ及びＢについての連立方程式であるので、これを解くことにより、（３）式における未知数Ａ及びＢを導出できる。 Substituting these into equation (3) yields the following two equations.
Figure 2006242799
 Since these are simultaneous equations for A and B, the unknowns A and B in equation (3) can be derived by solving them.

続いて、測定対象試料の、補正アダプタ法を適用した状態での試験治具測定値を取得する。この試料の試験治具測定値を（３）式に代入して（（３）式におけるＡ、Ｂの値は、上で導出した値を用いる。）、補正アダプタ法を適用した試験治具測定値における残留誤差を予測し、試料の補正アダプタ法を適用した状態での試験治具測定値の推定値に加算する。   Subsequently, a test jig measurement value of the measurement target sample in a state where the correction adapter method is applied is acquired. By substituting the test jig measurement value of this sample into the expression (3) (the values A and B in the expression (3) use the values derived above), and the test jig measurement using the correction adapter method is applied. The residual error in the value is predicted and added to the estimated value of the test jig measurement value in the state where the sample correction adapter method is applied.

これら基準治具測定値及び上記補正アダプタを適用した状態での試験治具測定値、及び補正アダプタ法残留誤差補正式の係数導出及び該補正アダプタ法残留誤差補正式による残留誤差の予測、補正アダプタ法を適用した状態での試料の試験治具測定値への加算は、測定している全Ｓパラメータについて行う。   These reference jig measurement values, test jig measurement values with the above correction adapter applied, coefficient derivation of correction adapter method residual error correction formula, prediction of residual error by correction adapter method residual error correction formula, correction adapter The addition of the sample to the test jig measurement value in a state where the method is applied is performed for all the S parameters being measured.

なお、残留誤差補正データ取得用試料の選別方法として、平均的な特性を持つ試料から任意に（無作為に）選択する場合を説明したが、母集団とする試料の特性分布を評価し、母集団の分散をより効果的に表現し得る試料を選別して残留誤差補正データ取得用試料とすれば、より高い補正精度を得られることは明らかである。   As a method for selecting a sample for acquiring residual error correction data, the case of selecting arbitrarily (randomly) from samples having average characteristics has been explained. It is clear that higher correction accuracy can be obtained if a sample that can more effectively express the variance of the population is selected and used as a residual error correction data acquisition sample.

また、補正アダプタ法残留誤差補正式の次数として１次式を選択する場合を説明したが、補正アダプタ法残留誤差が小さければ１次式である必要はなく、０次式でも十分な補正精度を得られる。したがって、残留誤差が小さい場合には、次数の低い補正式を運用することによって、測定が必要な残留誤差補正データ取得用試料の個数を減らし、残留誤差補正に伴う段取りを簡略化する一方、残留誤差が比較的大きい、もしくは残留誤差の特性が測定周波数に対して比較的複雑であれば１次式以上の補正式を適用して補正精度を確保するといった運用法の使い分けも可能である。   Further, the case where the linear expression is selected as the order of the correction adapter method residual error correction expression has been described. However, if the correction adapter method residual error is small, it is not necessary to be a linear expression. can get. Therefore, when the residual error is small, a low-order correction formula is used to reduce the number of samples for acquiring residual error correction data that need to be measured, simplifying the setup for residual error correction, If the error is relatively large, or if the residual error characteristic is relatively complex with respect to the measurement frequency, it is possible to selectively use operation methods such as applying a correction equation of a linear equation or higher to ensure the correction accuracy.

図３に、試料（表面弾性波フィルタ）の基準治具測定値（Ｄｅｆｉｎｉｔｉｏｎ）、試験治具測定値（Ｔｅｓｔ）、補正アダプタ法を適用した状態での試験治具測定値（Ｃｏｒｒｅｃｔｅｄ＿Ａ）、補正アダプタ法を適用した上で本補正アダプタ法残留誤差補正法を適用した試料の試験治具測定値（Ｃｏｒｒｅｃｔｅｄ＿Ｂ）を、それぞれ示す。図３（ａ）は反射波、図３（ｂ）は伝達波について、それぞれ示す。   FIG. 3 shows a reference jig measured value (Definition), a test jig measured value (Test) of a sample (surface acoustic wave filter), a test jig measured value (corrected_A) in a state where the correction adapter method is applied, and a correction adapter. A test jig measurement value (corrected_B) of a sample to which the correction adapter method residual error correction method is applied after applying the method is shown. FIG. 3A shows the reflected wave, and FIG. 3B shows the transmitted wave.

反射波及び伝達波のいずれにおいても、治具間差異補正誤差（すなわち、基準治具測定値の推定値と実測値との差異）は、補正アダプタ法に本補正アダプタ法残留誤差補正法を併用した場合の方が、補正アダプタ法のみを適用した場合に比べて小さい。   For both reflected and transmitted waves, the difference correction error between jigs (that is, the difference between the estimated value of the reference jig measurement value and the actual measurement value) is combined with the correction adapter method residual error correction method. This is smaller than when only the correction adapter method is applied.

したがって、本補正アダプタ法残留誤差補正法が、反射波もしくは伝達波に関わらず、補正アダプタ法残留誤差の補正に有効であり、結果として治具間差異補正の補正精度向上に有効であることが分かる。   Therefore, this correction adapter method residual error correction method is effective in correcting the correction adapter method residual error regardless of the reflected wave or transmitted wave, and as a result, it is effective in improving the correction accuracy of the inter-jig difference correction. I understand.

実施例２では、残留誤差の補正式に有理式を用いる。   In the second embodiment, a rational expression is used as a residual error correction expression.

試料には表面弾性波フィルタ、基準治具には検査基板、試験治具にはプローブ治具をそれぞれ用いる。   A surface acoustic wave filter is used as a sample, an inspection substrate is used as a reference jig, and a probe jig is used as a test jig.

まず、基準治具とする検査基板において、補正データ取得用試料３個の基準治具測定値を測定する。   First, on the inspection substrate used as the reference jig, the measurement values of the reference jig for the three correction data acquisition samples are measured.

補正データ取得用試料は、各ポートにおいて開放、短絡、終端を実現した試料であり、各ポート間は２５ｄＢ以上のアイソレーションを持つ。また、補正データ取得用試料の外形は、試料と同様に治具に実装して測定できるような形状とされている。   The correction data acquisition sample is a sample that realizes open, short circuit, and termination at each port, and each port has an isolation of 25 dB or more. Further, the outer shape of the correction data acquisition sample is shaped so that it can be mounted on a jig and measured in the same manner as the sample.

続いて、試験治具とするプローブ治具において、補正データ取得用試料３個の試験治具測定値を取得する。   Subsequently, in the probe jig used as the test jig, the test jig measurement values of the three correction data acquisition samples are acquired.

上で取得した補正データ取得用試料の基準治具測定値及び試験治具測定値から、前述した相対補正法により、試料の試験治具測定値から基準治具測定値を推定する補正式（補正アダプタ）を導出する。   Correction formula (correction) for estimating the reference jig measurement value from the test jig measurement value of the sample from the reference jig measurement value and the test jig measurement value of the correction data acquisition sample acquired above by the above-described relative correction method. Adapter).

試料とは同一品種の、平均的な特性を持つ表面弾性波フィルタ３個を任意に選択し、それらの基準治具測定値を取得する。この３個の表面弾性波フィルタが、先に述べた残留誤差補正データ取得用試料である。この表面弾性波フィルタ３個（残留誤差補正データ取得用試料）については、上記補正アダプタを適用した状態での試験治具測定値の推定値も算出する。   Three surface acoustic wave filters of the same type as the sample and having average characteristics are arbitrarily selected, and their reference jig measurement values are acquired. These three surface acoustic wave filters are the residual error correction data acquisition samples described above. For the three surface acoustic wave filters (residual error correction data acquisition sample), an estimated value of the test jig measurement value in a state where the correction adapter is applied is also calculated.

残留誤差補正データ取得用試料の測定により得られた表面弾性波フィルタの基準治具測定値及び上記補正アダプタを適用した状態での試験治具測定値から、前述した補正アダプタ法残留誤差補正式の（９）式における未知数を決定する。   From the reference jig measurement value of the surface acoustic wave filter obtained by measuring the residual error correction data acquisition sample and the test jig measurement value in the state where the correction adapter is applied, the above-mentioned correction adapter method residual error correction formula Determine the unknown in equation (9).

１個目の表面弾性波フィルタの基準治具測定値をＳｄ１、２個目の表面弾性波フィルタの基準治具測定値をＳｄ２、３個目の表面弾性波フィルタの基準治具測定値をＳｄ３、１個目の表面弾性フィルタの補正アダプタを適用した状態での試験治具測定値をＳｃ１、２個目の表面弾性波フィルタの補正アダプタを適用した状態での試験治具測定値をＳｃ２、３個目の表面弾性波フィルタの補正アダプタを適用した状態での試験治具測定値をＳｃ３とする。Ｓｄ１、Ｓｄ２、Ｓｄ３、Ｓｃ１、Ｓｃ２、及びＳｃ３は、いずれもＳパラメータである。 The reference jig measurement value of the first surface acoustic wave filter is S d1 , the reference jig measurement value of the second surface acoustic wave filter is S d2 , and the reference jig measurement value of the third surface acoustic wave filter is S d3 , test jig measurement value with the first surface elastic filter correction adapter applied S c1 , test jig measurement value with the second surface elastic wave filter correction adapter applied The value is S c2 , and the test jig measurement value in a state where the third surface acoustic wave filter correction adapter is applied is S c3 . S d1 , S d2 , S d3 , S c1 , S c2 , and S c3 are all S parameters.

これらを（９）式に代入すると、以下の３式が得られる。

Figure 2006242799
Substituting these into equation (9) gives the following three equations.
Figure 2006242799

これらはＡ、Ｂ及びＣについての連立方程式であるので、この３式を解くことによって（１１）式における未知数Ａ、Ｂ及びＣを全て導出できる。   Since these are simultaneous equations for A, B, and C, all of the unknowns A, B, and C in equation (11) can be derived by solving these three equations.

続いて試料の、補正アダプタ法を適用した状態での試験治具測定値を取得する。この試料の試験治具測定値を（９）式に代入して（（９）式における定数Ａ，Ｂ及びＣの値は、上で導出した値を用いる。）、補正アダプタ法を適用した試験治具測定値における残留誤差を予測し、試料の補正アダプタ法を適用した状態での試験治具測定値に加算する。   Subsequently, a test jig measurement value of the sample in a state where the correction adapter method is applied is obtained. The test jig measurement value of this sample is substituted into the equation (9) (the values of the constants A, B and C in the equation (9) are the values derived above), and the test using the correction adapter method is applied. The residual error in the jig measurement value is predicted and added to the test jig measurement value in a state where the sample correction adapter method is applied.

これら基準治具測定値や試験治具測定値の測定、補正アダプタを適用した基準治具測定値の推定値の算出、残留誤差補正式の係数導出、残留誤差補正式を用いた残留誤差の予測、基準治具測定値の残留誤差分の補正は、測定している全Ｓパラメータについて行う。   Measurement of these reference jig measurement values and test jig measurement values, calculation of estimated reference jig measurement values using a correction adapter, derivation of coefficients for residual error correction formulas, prediction of residual errors using residual error correction formulas The residual error correction of the reference jig measurement value is performed for all the S parameters being measured.

図４に、試料（表面弾性波フイルタ）の基準治具測定値（Ｄｅｆｉｎｉｔｉｏｎ）、試験治具測定値（Ｔｅｓｔ）、補正アダプタ法を適用した状態での試験治具測定値（Ｃｏｒｒｅｃｔｉｎ＿Ａ）、補正アダプタ法を適用した上で本補正アダプタ法残留誤差補正法を適用した試料の試験治具測定値（Ｃｏｒｒｅｃｔｉｏｎ＿Ｂ）を示す。図４（ａ）は反射波、図４（ｂ）は伝達波について、それぞれ示す。   FIG. 4 shows a reference jig measurement value (Definition), a test jig measurement value (Test) of a sample (surface acoustic wave filter), a test jig measurement value (Correctin_A) in a state where the correction adapter method is applied, and a correction adapter. A test jig measurement value (Collection_B) of a sample to which the correction adapter method residual error correction method is applied after applying the method is shown. FIG. 4A shows a reflected wave, and FIG. 4B shows a transmitted wave.

反射波及び弾性波のいずれにおいても、治具間差異補正誤差（すなわち、基準治具測定値の実測値と推定値との差異）は、補正アダプタを用いた相対補正法に、残留誤差補正式を用いて残留誤差分の補正を併用した場合の方が、補正アダプタを用いた相対補正法のみを適用した場合に比べて小さい。   For both reflected waves and elastic waves, the difference correction error between jigs (that is, the difference between the actual measurement value and the estimated value of the reference jig measurement value) is the residual error correction formula in the relative correction method using the correction adapter. When the residual error correction is used together, the relative error correction method using the correction adapter alone is smaller.

したがって、補正アダプタを用いた相対補正法に、残留誤差補正式を用いて残留誤差分の補正を併用することには、反射波もしくは伝達波に関わらず、残留誤差の補正に有効であり、結果として治具間差異補正の補正精度向上に有効であることが分かる。   Therefore, using the residual error correction formula together with the relative correction method using the correction adapter is effective for correcting the residual error regardless of the reflected wave or the transmitted wave. It can be seen that this is effective for improving the accuracy of correction of differences between jigs.

以上に説明したように、本発明の測定誤差の補正方法及び電子部品特性測定装置は、相対補正法における残留誤差を補正することにより、補正精度を向上することができる。   As described above, the measurement error correction method and the electronic component characteristic measurement apparatus of the present invention can improve the correction accuracy by correcting the residual error in the relative correction method.

なお、本発明は、上記実施形態や実施例に限定されるものではなく、種々の変形を加えて実施することができる。   In addition, this invention is not limited to the said embodiment and Example, A various deformation | transformation can be added and implemented.

漏洩を含むシグナルフローダイヤグラムである。It is a signal flow diagram including leakage. 反射系におけるシグナルフローダイヤグラムである。It is a signal flow diagram in a reflection system. 補正結果を示すグラフである。（実施例１）It is a graph which shows a correction result. Example 1 補正結果を示すグラフである。（実施例２）It is a graph which shows a correction result. (Example 2) 測定系の構成図である。It is a block diagram of a measurement system. 誤差補正の基本原理を示す２端子対回路図である。It is a 2 terminal pair circuit diagram which shows the basic principle of error correction. 誤差補正の基本原理を示す２端子対回路図である。It is a 2 terminal pair circuit diagram which shows the basic principle of error correction. 測定装置のブロック図である。（実施例）It is a block diagram of a measuring device. (Example)

符号の説明Explanation of symbols

１２ 測定装置（電子部品特性測定装置）
１６ 基準治具
２６ 試験治具
５２ 表示部
５４ 操作部
５６ 測定部
５８ 制御部
６０ 記憶部（記憶手段）
６２ 演算部（第１の数式決定手段、第２の数式決定手段、電気特性推定手段）
６４ インターフェース部 12 Measuring device (Electronic component characteristic measuring device)
16 Reference Jig 26 Test Jig 52 Display Unit 54 Operation Unit 56 Measurement Unit 58 Control Unit 60 Storage Unit (Storage Unit)
62 Arithmetic unit (first mathematical formula determining means, second mathematical formula determining means, electrical characteristic estimating means)
64 Interface part

Claims (9)

試験治具に実装した状態と基準治具に実装した状態とで、相対補正データ取得用試料をそれぞれ測定する、第１のステップと、
前記第１のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を求める、第２のステップと、
周波数ごとに、前記試験治具に実装した状態と前記基準治具に実装した状態とで、残留誤差補正データ取得用試料をそれぞれ測定する、第３のステップと、
前記第３のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を求める、第４のステップと、
任意の電子部品について、前記試験治具に実装した状態で測定する、第５のステップと、
前記第５のステップでの測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する、第６のステップとを含み、
前記第２の数式は多項式であることを特徴とする、測定誤差の補正方法。 A first step of measuring a sample for obtaining relative correction data in a state mounted on a test jig and a state mounted on a reference jig;
Based on the measurement result in the first step, the first mathematical formula for calculating the estimated value of the measured value in the state mounted on the reference jig from the measured value in the state mounted on the test jig. Seeking a second step;
A third step of measuring a residual error correction data acquisition sample for each frequency in a state mounted on the test jig and a state mounted on the reference jig;
Based on the measurement result in the third step, the estimated value of the measured value in the state mounted on the reference jig calculated using the first formula from the measured value in the state mounted on the test jig A fourth step of obtaining a second mathematical formula for calculating an error included in
For any electronic component, a fifth step of measuring in a state mounted on the test jig,
Based on the measurement result in the fifth step, the measured value in the state where the electronic component is mounted on the reference jig using the first mathematical formula from the measured value in the state mounted on the test jig. And a sixth step of correcting the estimated value using the second mathematical formula,
The method for correcting a measurement error, wherein the second mathematical expression is a polynomial. 試験治具に実装した状態と基準治具に実装した状態とで、相対補正データ取得用試料をそれぞれ測定する、第１のステップと、
前記第１のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を求める、第２のステップと、
周波数ごとに、前記試験治具に実装した状態と前記基準治具に実装した状態とで、残留誤差補正データ取得用試料をそれぞれ測定する、第３のステップと、
前記第３のステップでの測定結果に基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を求める、第４のステップと、
任意の電子部品について、前記試験治具に実装した状態で測定する、第５のステップと、
前記第５のステップでの測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する、第６のステップとを含み、
前記第２の数式は有理式であることを特徴とする、測定誤差の補正方法。 A first step of measuring a sample for obtaining relative correction data in a state mounted on a test jig and a state mounted on a reference jig;
Based on the measurement result in the first step, the first mathematical formula for calculating the estimated value of the measured value in the state mounted on the reference jig from the measured value in the state mounted on the test jig. Seeking a second step;
A third step of measuring a residual error correction data acquisition sample for each frequency in a state mounted on the test jig and a state mounted on the reference jig;
Based on the measurement result in the third step, the estimated value of the measured value in the state mounted on the reference jig calculated using the first formula from the measured value in the state mounted on the test jig A fourth step of obtaining a second mathematical formula for calculating an error included in
For any electronic component, a fifth step of measuring in a state mounted on the test jig,
Based on the measurement result in the fifth step, the measured value in the state where the electronic component is mounted on the reference jig using the first mathematical formula from the measured value in the state mounted on the test jig. And a sixth step of correcting the estimated value using the second mathematical formula,
The method for correcting a measurement error, wherein the second mathematical expression is a rational expression. 上記第２の数式が１次式であることを特徴とする、請求項１又は２に記載の測定誤差の補正方法。   3. The measurement error correction method according to claim 1, wherein the second mathematical expression is a linear expression. 電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出する、電子部品特性測定装置であって、
前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果とを格納する、記憶手段と、
前記記憶手段に格納された前記第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を決定する、第１の数式決定手段と、
前記記憶手段に格納された前記第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を決定する、第２の数式決定手段と、
任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する、電気特性推定手段とを備え、
前記第２の数式は多項式であることを特徴とする、電子部品特性測定装置。 From the result of measurement with the electronic component mounted on the test jig, calculate an estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the reference jig mounted. An electronic component characteristic measuring device,
The first measurement result of measuring the relative correction data acquisition sample in the state mounted on the reference jig and the residual error correction data acquisition sample in the state mounted on the reference jig for each frequency were measured. Storage means for storing a second measurement result;
Based on the first measurement result stored in the storage means and the measurement result obtained by measuring the relative correction data acquisition sample in the state mounted on the test jig, in the state mounted on the test jig. First mathematical formula determining means for determining a first mathematical formula for calculating an estimated value of the measured value in a state of being mounted on the reference jig from the measured value;
Based on the second measurement result stored in the storage means and the measurement result obtained by measuring the residual error correction data acquisition sample in the state mounted on the test jig for each frequency, the test jig A second mathematical formula for calculating an error included in the estimated value of the measured value in the state mounted on the reference jig calculated using the first mathematical formula from the measured value in the state mounted on is determined. , Second formula determining means,
For any electronic component, based on the measurement result measured in the state mounted on the test jig, the reference value is calculated using the first mathematical formula from the measured value in the state mounted on the test jig for the electronic component. An electrical characteristic estimation means for calculating an estimated value of a measured value in a state mounted on a jig and correcting the estimated value using the second mathematical formula;
The electronic component characteristic measuring apparatus according to claim 2, wherein the second mathematical expression is a polynomial. 電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出する、電子部品特性測定装置であって、
前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果とを格納する、記憶手段と、
前記記憶手段に格納された前記第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式を決定する、第１の数式決定手段と、
前記記憶手段に格納された前記第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式を決定する、第２の数式決定手段と、
任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する、電気特性推定手段とを備え、
前記第２の数式は有理式であることを特徴とする、電子部品特性測定装置。 From the result of measurement with the electronic component mounted on the test jig, calculate an estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the reference jig mounted. An electronic component characteristic measuring device,
The residual error correction data acquisition sample was measured with the first measurement result obtained by measuring the relative correction data acquisition sample mounted on the reference jig and the frequency mounted on the reference jig for each frequency. Storage means for storing a second measurement result;
Based on the first measurement result stored in the storage means and the measurement result obtained by measuring the relative correction data acquisition sample in the state mounted on the test jig, in the state mounted on the test jig. First mathematical formula determining means for determining a first mathematical formula for calculating an estimated value of the measured value in a state of being mounted on the reference jig from the measured value;
Based on the second measurement result stored in the storage means and the measurement result obtained by measuring the residual error correction data acquisition sample in the state mounted on the test jig for each frequency, the test jig A second mathematical formula for calculating an error included in the estimated value of the measured value in the state mounted on the reference jig calculated using the first mathematical formula from the measured value in the state mounted on is determined. , Second formula determining means,
For any electronic component, based on the measurement result measured in the state mounted on the test jig, the reference value is calculated using the first mathematical formula from the measured value in the state mounted on the test jig for the electronic component. An electrical characteristic estimation means for calculating an estimated value of a measured value in a state mounted on a jig and correcting the estimated value using the second mathematical formula;
The electronic component characteristic measuring apparatus according to claim 2, wherein the second mathematical expression is a rational expression. 上記第２の数式が１次式であることを特徴とする、請求項４又は５に記載の電子部品特性測定装置。   6. The electronic component characteristic measuring apparatus according to claim 4, wherein the second mathematical expression is a linear expression. 電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出する、電子部品特性測定装置であって、
前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式と、周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式とを記憶する、記憶手段と、
任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する、電気特性推定手段とを備え、
前記第２の数式は多項式であることを特徴とする、電子部品特性測定装置。 From the result of measurement with the electronic component mounted on the test jig, calculate an estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the reference jig mounted. An electronic component characteristic measuring device,
A first measurement result obtained by measuring the relative correction data acquisition sample in the state mounted on the reference jig, and a measurement result obtained by measuring the relative correction data acquisition sample in the state mounted on the test jig. A first mathematical formula for calculating an estimated value of a measured value in a state mounted on the reference jig from a measured value in a state mounted on the test jig determined based on the reference The residual error correction data acquisition sample was measured with the second measurement result obtained by measuring the residual error correction data acquisition sample in the state mounted on the jig, and the frequency mounted on the test jig for each frequency. Included in the estimated value of the measured value in the state mounted on the reference jig calculated using the first mathematical formula from the measured value in the state mounted on the test jig determined based on the measurement result A second mathematical formula for calculating the error and Stores, and storage means,
For any electronic component, based on the measurement result measured in the state mounted on the test jig, the reference value is calculated using the first mathematical formula from the measured value in the state mounted on the test jig for the electronic component. An electrical characteristic estimation means for calculating an estimated value of a measured value in a state mounted on a jig and correcting the estimated value using the second mathematical formula;
The electronic component characteristic measuring apparatus according to claim 2, wherein the second mathematical expression is a polynomial. 電子部品を試験治具に実装した状態で測定した結果から、当該電子部品を基準治具に実装した状態で測定したならば得られるであろう前記電子部品の電気特性の推定値を算出する、電子部品特性測定装置であって、
前記基準治具に実装した状態で、相対補正データ取得用試料を測定した第１の測定結果と、前記試験治具に実装した状態で、前記相対補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記基準治具に実装した状態での測定値の推定値を算出するための第１の数式と、周波数ごとに、前記基準治具に実装した状態で、残留誤差補正データ取得用試料を測定した第２の測定結果と、周波数ごとに、前記試験治具に実装した状態で、前記残留誤差補正データ取得用試料を測定した測定結果とに基づき決定された、前記試験治具に実装した状態での測定値から前記第１の数式を用いて算出した前記基準治具に実装した状態での測定値の推定値に含まれる誤差を算出するための第２の数式とを記憶する、記憶手段と、
任意の電子部品について、前記試験治具に実装した状態で測定した測定結果に基づき、当該電子部品について、前記試験治具に実装した状態での測定値から前記第１の数式を用いて前記基準治具に実装した状態での測定値の推定値を算出し、該推定値を前記第２の数式を用いて補正する、電気特性推定手段とを備え、
前記第２の数式は有理式であることを特徴とする、電子部品特性測定装置。 From the result of measurement with the electronic component mounted on the test jig, calculate an estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the reference jig mounted. An electronic component characteristic measuring device,
A first measurement result obtained by measuring the relative correction data acquisition sample in the state mounted on the reference jig, and a measurement result obtained by measuring the relative correction data acquisition sample in the state mounted on the test jig. A first mathematical formula for calculating an estimated value of a measured value in a state mounted on the reference jig from a measured value in a state mounted on the test jig determined based on the reference The residual error correction data acquisition sample was measured with the second measurement result obtained by measuring the residual error correction data acquisition sample in the state mounted on the jig, and the frequency mounted on the test jig for each frequency. Included in the estimated value of the measured value in the state mounted on the reference jig calculated using the first mathematical formula from the measured value in the state mounted on the test jig determined based on the measurement result A second mathematical formula for calculating the error and Stores, and storage means,
For any electronic component, based on the measurement result measured in the state mounted on the test jig, the reference value is calculated using the first mathematical formula from the measured value in the state mounted on the test jig for the electronic component. Calculating an estimated value of a measured value in a state of being mounted on a jig, and correcting the estimated value by using the second mathematical formula,
The electronic component characteristic measuring apparatus according to claim 2, wherein the second mathematical expression is a rational expression. 上記第２の数式が１次式であることを特徴とする、請求項７又は８に記載の電子部品特性測定装置。   9. The electronic component characteristic measuring apparatus according to claim 7, wherein the second mathematical expression is a linear expression.
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