JP2006237161A5 - - Google Patents
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- JP2006237161A5 JP2006237161A5 JP2005047734A JP2005047734A JP2006237161A5 JP 2006237161 A5 JP2006237161 A5 JP 2006237161A5 JP 2005047734 A JP2005047734 A JP 2005047734A JP 2005047734 A JP2005047734 A JP 2005047734A JP 2006237161 A5 JP2006237161 A5 JP 2006237161A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005047734A JP4582450B2 (ja) | 2005-02-23 | 2005-02-23 | 真空成膜装置の搬送機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005047734A JP4582450B2 (ja) | 2005-02-23 | 2005-02-23 | 真空成膜装置の搬送機構 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006237161A JP2006237161A (ja) | 2006-09-07 |
| JP2006237161A5 true JP2006237161A5 (lt) | 2008-03-06 |
| JP4582450B2 JP4582450B2 (ja) | 2010-11-17 |
Family
ID=37044502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005047734A Active JP4582450B2 (ja) | 2005-02-23 | 2005-02-23 | 真空成膜装置の搬送機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4582450B2 (lt) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1870487B1 (de) * | 2006-06-22 | 2009-07-29 | Applied Materials GmbH & Co. KG | Vakuumbeschichtungsanlage |
| JP5081516B2 (ja) | 2007-07-12 | 2012-11-28 | 株式会社ジャパンディスプレイイースト | 蒸着方法および蒸着装置 |
| KR101055862B1 (ko) * | 2009-03-23 | 2011-08-09 | 주식회사 테라세미콘 | 인라인 열처리 장치 |
| DE102010031245B4 (de) | 2010-07-12 | 2013-04-11 | Von Ardenne Anlagentechnik Gmbh | Substratbehandlungsanlage |
| DE102010031252A1 (de) | 2010-07-12 | 2012-01-12 | Von Ardenne Anlagentechnik Gmbh | Substratbehandlungseinrichtung |
| DE102011116136B4 (de) * | 2011-10-15 | 2021-05-12 | Onejoon Gmbh | Anlage zur Behandlung von Werkstücken |
| DE102014017451A1 (de) * | 2014-11-26 | 2016-06-02 | Eisenmann Se | Anlage zum Behandeln eines Guts |
| TWI613314B (zh) * | 2015-03-31 | 2018-02-01 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | 成膜裝置及成膜裝置的分隔壁構造體 |
| JP6909196B2 (ja) * | 2018-10-10 | 2021-07-28 | 株式会社ヒラノＫ＆Ｅ | 成膜装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59200863A (ja) * | 1983-04-27 | 1984-11-14 | Hitachi Ltd | 回転導入駆動装置 |
| JPS6127484U (ja) * | 1984-07-21 | 1986-02-19 | 金則 西村 | 無段変速装置 |
| JP2836234B2 (ja) * | 1990-10-19 | 1998-12-14 | 石川島播磨重工業株式会社 | 非接触型トルク伝達装置 |
| US5158279A (en) * | 1991-09-30 | 1992-10-27 | Xerox Corporation | Magnetic clutch with adjustable slip torque |
| JP3909888B2 (ja) * | 1996-04-17 | 2007-04-25 | キヤノンアネルバ株式会社 | トレイ搬送式インライン成膜装置 |
| JP2003301857A (ja) * | 2002-04-10 | 2003-10-24 | Canon Inc | 画像形成装置 |
| JP4158096B2 (ja) * | 2003-02-14 | 2008-10-01 | 富士フイルム株式会社 | スリッタ装置及び該スリッタ装置を使用した磁気記録媒体の製造方法 |
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2005
- 2005-02-23 JP JP2005047734A patent/JP4582450B2/ja active Active
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