JP2006210172A - Structure of brazing and airtight terminal - Google Patents

Structure of brazing and airtight terminal Download PDF

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JP2006210172A
JP2006210172A JP2005021180A JP2005021180A JP2006210172A JP 2006210172 A JP2006210172 A JP 2006210172A JP 2005021180 A JP2005021180 A JP 2005021180A JP 2005021180 A JP2005021180 A JP 2005021180A JP 2006210172 A JP2006210172 A JP 2006210172A
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brazing
cylindrical body
metal
metal plate
inner peripheral
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JP4423211B2 (en
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Kazuyuki Takayama
和之 高山
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Kyocera Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a structure of brazing in which an excessive wet-spreading of brazing material more than needed on the main face of a metal plate can be prevented, and which can be joined efficiently. <P>SOLUTION: In the structure of brazing, a penetrating hole 7a consisting of a large diameter part 7a-1 and a small diameter part 7a-2 is installed between the upper and lower main faces of the metal plate 7, in which a protrusion part 3 of a cylindrical member or a rod shaped member 1 that is inserted through the penetrating hole 7a is locked to a step difference part 7b between the large diameter part 7a-1 and the small diameter part7a-2 and is brazed on the inner peripheral face of the large diameter part 7a-1, while a step difference face groove part 7c is formed in the step difference part 7b, and the inner peripheral face groove part 7d is formed in the inner peripheral face of the small diameter part 7a-2. The brazing material 8 is blocked by the step difference part 7b, the step difference face groove part 7c, and the inner peripheral face groove part 7d, and becomes hard to flow out to the lower side main face of the metal plate 7. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、金属板とその貫通孔内にロウ付けされる筒状または棒状部材とのロウ付け構造に関するとともに、このロウ付け構造が用いられた半導体製造装置，電子機器，半導体装置等の電気装置に使用される気密端子に関する。   The present invention relates to a brazing structure of a metal plate and a cylindrical or rod-like member brazed in a through hole thereof, and an electrical apparatus such as a semiconductor manufacturing apparatus, an electronic apparatus, or a semiconductor device using the brazing structure. Relates to airtight terminals used in

従来、半導体製造装置等の内部雰囲気を外部雰囲気と遮断させて使用する電気装置には、装置内外で電気信号を導通させるために気密端子が取着されている。このような気密端子においては、気密端子を構成する部材間での絶縁を保ちつつ部材同士を気密に接合することが要求される。   Conventionally, an airtight terminal is attached to an electric device that uses an internal atmosphere of a semiconductor manufacturing apparatus or the like while being cut off from an external atmosphere in order to conduct an electric signal inside and outside the device. In such an airtight terminal, it is required to join the members in an airtight manner while maintaining insulation between the members constituting the airtight terminal.

このような気密端子の一例を図３に示す。図３は従来の気密端子の一例を示す断面図である。11はセラミック筒状体、12は金属線材、13はスリーブ、17はフランジであり、主にこれらにより気密端子が構成される。   An example of such an airtight terminal is shown in FIG. FIG. 3 is a cross-sectional view showing an example of a conventional hermetic terminal. 11 is a ceramic cylindrical body, 12 is a metal wire, 13 is a sleeve, and 17 is a flange, which mainly constitute an airtight terminal.

図３の気密端子は、セラミック筒状体11中に両端を上下に突出させた状態で金属線材12を挿通させ、セラミック筒状体11から突出した金属線材12の一端側に環状の固定金具15を取り付け、固定金具15と金属線材12との間および固定金具15とセラミック筒状体11の外表面との間をロウ付け接合し、かつセラミック筒状体11の外周面を筒状のスリーブ13の内周面にロウ付け接合し、スリーブ13の外周面をフランジ17の貫通孔17ａの内周面にロウ付け接合または溶接することによって構成されている。   The hermetic terminal of FIG. 3 has a metal wire 12 inserted in a state where both ends protrude upward and downward in a ceramic cylindrical body 11, and an annular fixing metal 15 is attached to one end of the metal wire 12 protruding from the ceramic cylindrical body 11. Are attached by brazing between the fixing bracket 15 and the metal wire 12 and between the fixing bracket 15 and the outer surface of the ceramic cylindrical body 11, and the outer peripheral surface of the ceramic cylindrical body 11 is connected to the cylindrical sleeve 13. The outer peripheral surface of the sleeve 13 is brazed and welded to the inner peripheral surface of the through hole 17a of the flange 17 or welded.

セラミック筒状体11はアルミナ（Ａｌ２Ｏ３）質セラミックス等のセラミックスから成り断面の形状が円形や四角形，六角形等の種々の形状とされた部材であり、セラミック筒状体11をスリーブ13にロウ付けするには、例えばセラミック筒状体11の外周面にタングステン（Ｗ）やモリブデン（Ｍｏ），マンガン（Ｍｎ）等から成る側部メタライズ層16を被着させておくとともに銀（Ａｇ）ロウ等のロウ材によってロウ付けする方法が採用される。また側部メタライズ層16にニッケル（Ｎｉ）めっきを施し、このＮｉめっきが施された側部メタライズ層16とスリーブ13とをロウ付けするという方法も採用される。この方法により、セラミック筒状体11とスリーブ13との接合をより強固なものとすることができる。 The ceramic cylindrical body 11 is a member made of ceramics such as alumina (Al 2 O 3 ) ceramics and having various cross-sectional shapes such as a circle, a square, a hexagon, and the like. For brazing, for example, a side metallized layer 16 made of tungsten (W), molybdenum (Mo), manganese (Mn), or the like is deposited on the outer peripheral surface of the ceramic cylindrical body 11 and silver (Ag). A method of brazing with a brazing material such as brazing is employed. Further, a method of applying nickel (Ni) plating to the side metallized layer 16 and brazing the side metallized layer 16 and the sleeve 13 to which this Ni plating has been applied is also employed. By this method, the ceramic cylindrical body 11 and the sleeve 13 can be more firmly joined.

セラミック筒状体11の貫通孔11ａ内に金属線材12を挿通させ固定するには、セラミック筒状体11の例えば上端面にＷ，Ｍｏ，Ｍｎ等から成る上部メタライズ層14を被着形成しておき、この上部メタライズ層14に、金属線材12をセラミック筒状体11に取り付けるための環状の固定金具15を当接し、固定金具15と金属線材12との間および固定金具15とセラミック筒状体11の上部メタライズ層14との間をＡｇロウ等のロウ材を介してロウ付け接合する。   In order to insert and fix the metal wire 12 in the through hole 11a of the ceramic cylindrical body 11, an upper metallized layer 14 made of W, Mo, Mn or the like is deposited on the upper end surface of the ceramic cylindrical body 11, for example. Further, an annular fixing metal 15 for attaching the metal wire 12 to the ceramic cylindrical body 11 is brought into contact with the upper metallized layer 14, and between the fixing metal 15 and the metal wire 12, and between the fixing metal 15 and the ceramic cylindrical body. The upper metallized layer 14 is joined by brazing with a brazing material such as Ag brazing.

金属線材12は鉄（Ｆｅ）−Ｎｉ−コバルト（Ｃｏ）合金等の金属から成る円柱状であり、セラミック筒状体11の貫通孔11ａ内に挿通されて一端側で固定金具15にロウ付けされ、電気装置内外を電気的に接続するための端子として作用する。   The metal wire 12 has a cylindrical shape made of a metal such as iron (Fe) -Ni-cobalt (Co) alloy, and is inserted into the through hole 11a of the ceramic cylindrical body 11 and brazed to the fixing metal 15 at one end side. It acts as a terminal for electrically connecting the inside and outside of the electric device.

スリーブ13は、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成る、その内径をセラミック筒状体11の外径に合わせ、その外形をフランジ17の貫通孔17ａの内径に合わせた外径の円形や四角形，六角形等の種々の形状とした筒状の部材であり、その内周面の一部が側部メタライズ層16にＡｇロウ等のロウ材を介して気密にロウ付けされている。   The sleeve 13 is made of a metal such as an Fe—Ni—Co alloy, and the outer diameter is a circular or rectangular shape whose inner diameter is matched with the outer diameter of the ceramic cylindrical body 11 and whose outer diameter is matched with the inner diameter of the through hole 17a of the flange 17. A cylindrical member having various shapes such as hexagons, and a part of the inner peripheral surface thereof is airtightly brazed to the side metallized layer 16 via a brazing material such as Ag brazing.

このスリーブ13は、セラミック筒状体11によって絶縁された金属線材12をフランジ17の貫通孔17ａ内に固定するための固定部材として機能するとともに、セラミック筒状体11にフランジ17との熱膨張差による応力が直接作用したり、フランジ17に加わる外力がセラミック筒状体11に直接作用したりするのを防止する応力緩衝部材として機能し、フランジ17の貫通孔17ａにロウ付けや溶接等によって気密に接合される。   The sleeve 13 functions as a fixing member for fixing the metal wire 12 insulated by the ceramic cylindrical body 11 in the through hole 17a of the flange 17, and the thermal expansion difference between the ceramic cylindrical body 11 and the flange 17 is increased. Functions as a stress buffering member that prevents direct stress on the flange 17 and external force applied to the flange 17 from acting directly on the ceramic cylindrical body 11, and is airtight by brazing or welding to the through-hole 17a of the flange 17. To be joined.

環状の固定金具15は、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成るリング状の部材であり、その中心孔の内径を金属線材12の外径に合わせて、リングの直径がセラミック筒状体11の上端面に合うように絞り込まれた部材である。そして、その内側には金属線材12がその一端側を突出させて挿通され、Ａｇロウ等のロウ材を介してロウ付けされている。   The annular fixing member 15 is a ring-shaped member made of a metal such as an Fe-Ni-Co alloy, and the diameter of the ring is adjusted to the ceramic cylindrical body 11 by matching the inner diameter of the center hole with the outer diameter of the metal wire 12. It is the member narrowed down so that it may fit in the upper end surface. Then, a metal wire 12 is inserted into the inner side thereof with its one end protruding, and is brazed via a brazing material such as Ag brazing.

この固定金具15は、セラミック筒状体11に金属線材12を気密に嵌挿固定するとともに、セラミック筒状体11に金属線材12を取り付ける際等にセラミック筒状体11と金属線材12との間に両者の熱膨張係数の差に起因して発生する応力を吸収緩和する作用をなす。   The fixing metal fitting 15 is used for airtightly inserting and fixing the metal wire 12 to the ceramic cylindrical body 11, and between the ceramic cylindrical body 11 and the metal wire 12 when attaching the metal wire 12 to the ceramic cylindrical body 11. It absorbs and relaxes the stress generated due to the difference in thermal expansion coefficient between the two.

フランジ17はＳＵＳ等から成る平板状で電気装置への取付用部材として機能するものであり、例えばフランジ17の一主面を電気装置の取付孔を塞ぐように取り付け、フランジ17の外周部を溶接することによって、気密端子を電気装置に気密かつ強固に取り付けることが可能となる（下記の特許文献１参照）。   The flange 17 is a flat plate made of SUS or the like and functions as a member for mounting on an electric device. For example, one main surface of the flange 17 is mounted so as to close the mounting hole of the electric device, and the outer peripheral portion of the flange 17 is welded. By doing so, it becomes possible to attach the airtight terminal to the electric device in an airtight and firm manner (see Patent Document 1 below).

このような気密端子は、金属線材12がセラミック筒状体11に支持される構造となるので、金属線材12とフランジ17との沿面距離を大きくとることができ、金属線材12に高電圧の電気信号を導通させることが可能なものとなる。
特開平11−162540号公報 Such an airtight terminal has a structure in which the metal wire 12 is supported by the ceramic cylindrical body 11, so that a creeping distance between the metal wire 12 and the flange 17 can be increased, and a high-voltage electric wire is applied to the metal wire 12. It becomes possible to conduct a signal.
Japanese Patent Laid-Open No. 11-162540

しかしながら、図３に示した上記従来の気密端子において、スリーブ13をフランジ17の貫通孔17ａにロウ付けや溶接等によって接合固定する際、ロウ材や溶融した金属がフランジ17の表面に濡れ広がってしまい、フランジ17を平坦な電気装置の表面に気密に取り付けることができなくなるという問題点や、溶接時にセラミック筒状体11がクラック等によって破損し、気密端子として機能できなくなってしまうという問題点が発生していた。   However, in the conventional hermetic terminal shown in FIG. 3, when the sleeve 13 is joined and fixed to the through hole 17a of the flange 17 by brazing, welding, or the like, the brazing material or the molten metal wets and spreads on the surface of the flange 17. Therefore, there is a problem that the flange 17 cannot be airtightly attached to the surface of a flat electric device, or that the ceramic cylindrical body 11 is damaged by a crack during welding and cannot function as an airtight terminal. It has occurred.

即ち、スリーブ13をフランジ17にロウ付けによって接合する場合、スリーブ13をロウ付けするためのロウ材が、フランジ17の上下両主面に流れ出るとともに濡れ広がって、例えば、フランジ17の一主面を電気装置の取付孔を塞ぐように取り付け、フランジ17の外周部を溶接しようとしても、フランジ17の一主面が濡れ広がったロウ材によって取付孔の周囲の部材に密着されず、フランジ17の一主面で電気装置の取付孔を気密に塞ぐのが困難となり、その結果、フランジ17を電気装置に気密に取り付けることができなくなっていた。   That is, when the sleeve 13 is joined to the flange 17 by brazing, the brazing material for brazing the sleeve 13 flows out onto the upper and lower main surfaces of the flange 17 and spreads wet. Even if it is installed so as to close the mounting hole of the electric device and the outer peripheral portion of the flange 17 is welded, the main surface of the flange 17 is not closely attached to the members around the mounting hole by the brazing material spreading wet, and the flange 17 It was difficult to airtightly seal the mounting hole of the electric device on the main surface, and as a result, the flange 17 could not be airtightly attached to the electric device.

また、ロウ付けによって接合する場合、スリーブ13を所定の位置に固定するためのロウ付け用治具が必要であり、接合の作業において、ロウ付け用治具を準備するための手間が掛かるという問題点もあった。   Further, when joining by brazing, a brazing jig for fixing the sleeve 13 in a predetermined position is necessary, and it takes time to prepare the brazing jig in the joining work. There was also a point.

スリーブ13をフランジ17に溶接接合する場合は、スリーブ13とフランジ17の溶接部周辺のみに熱が加えられるため、スリーブ13とフランジ17だけが熱膨張することとなる。そのため、セラミック筒状体11のスリーブ13との接合部において溶接時の熱応力が大きく作用し易く、セラミック筒状体11がクラック等によって破損し易くなっていた。その結果、必要とされる気密信頼性を満足することができず、気密端子として機能できなくなってしまっていた。   When the sleeve 13 is welded to the flange 17, heat is applied only to the vicinity of the welded portion between the sleeve 13 and the flange 17, so that only the sleeve 13 and the flange 17 are thermally expanded. Therefore, the thermal stress during welding is likely to act greatly at the joint between the ceramic cylindrical body 11 and the sleeve 13, and the ceramic cylindrical body 11 is easily damaged by cracks or the like. As a result, the required airtight reliability cannot be satisfied, and it cannot function as an airtight terminal.

特に、近時においては、気密端子は小型化傾向にあり、セラミック筒状体11やスリーブ13等が小型化してきており、セラミック筒状体11の機械的強度が低下するとともに、スリーブ13の長さが短くなってセラミック筒状体11との接合部に溶接時の熱応力が作用するとクラックを生じ易くなってきている。そのため、スリーブ13をフランジ17に溶接接合する場合、セラミック筒状体11のクラック等の破損による気密信頼性低下の問題が顕著になってきた。   In particular, recently, hermetic terminals have been reduced in size, and the ceramic cylindrical body 11 and the sleeve 13 have been reduced in size, and the mechanical strength of the ceramic cylindrical body 11 has decreased and the length of the sleeve 13 has increased. When the thermal stress at the time of welding acts on the joint portion with the ceramic cylindrical body 11 becomes short, cracks are likely to occur. For this reason, when the sleeve 13 is welded to the flange 17, the problem of deterioration in hermetic reliability due to damage such as cracks in the ceramic cylindrical body 11 has become prominent.

従って、本発明は上記問題点に鑑み完成されたものであり、その目的は、ロウ材が必要以上に濡れ広がるのを防止可能で効率よく接合可能なロウ付け構造を提供するとともに、高い気密信頼性を有し効率よく製造可能な気密端子を提供することにある。   Accordingly, the present invention has been completed in view of the above problems, and an object of the present invention is to provide a brazing structure that can prevent the brazing material from spreading more than necessary and can be joined efficiently, and has high airtight reliability. It is an object of the present invention to provide an airtight terminal that has good performance and can be manufactured efficiently.

本発明のロウ付け構造は、金属板の上下主面間に大径部および小径部から成る貫通孔が設けられ、該貫通孔に挿通される筒状部材または棒状部材の突出部が前記大径部と前記小径部との間の段差部に係止されるとともに前記大径部の内周面にロウ付けされて成り、前記段差部に段差面溝部が形成され、前記小径部の内周面に内周面溝部が形成されていることを特徴とする。   In the brazing structure of the present invention, a through-hole consisting of a large-diameter portion and a small-diameter portion is provided between the upper and lower main surfaces of the metal plate, and the protruding portion of the cylindrical member or rod-shaped member inserted through the through-hole is the large-diameter portion. And is brazed to the inner peripheral surface of the large diameter portion, and a step surface groove is formed in the step portion, and the inner peripheral surface of the small diameter portion An inner peripheral surface groove is formed on the inner surface.

また、本発明のロウ付け構造は、上記構成において好ましくは、前記筒状部材が、金属線材が両端面間に挿通されたセラミック筒状体であり、前記突出部が、前記セラミック筒状体の外周面にロウ付けされた筒状の金属スリーブであることを特徴とする。   In the brazing structure of the present invention, preferably, in the above configuration, the cylindrical member is a ceramic cylindrical body in which a metal wire is inserted between both end faces, and the protruding portion is formed of the ceramic cylindrical body. It is a cylindrical metal sleeve brazed to the outer peripheral surface.

また、本発明の気密端子は、上記本発明のロウ付け構造を用いて、前記金属板と前記筒状部材または棒状部材とをロウ付けして成ることを特徴とする。   The hermetic terminal of the present invention is characterized in that the metal plate and the cylindrical member or rod-shaped member are brazed using the brazing structure of the present invention.

本発明のロウ付け構造は、金属板の上下主面間に大径部および小径部から成る貫通孔が設けられ、貫通孔に挿通される筒状部材または棒状部材の突出部が大径部と小径部との間の段差部に係止されるとともに、大径部の内周面にロウ付けされて成り、段差部に段差面溝部が形成され、小径部の内周面に内周面溝部が形成されていることから、突出部を大径部の内周面にロウ付けするためのロウ材が、段差部，段差面溝部，内周面溝部に遮られて、金属板の下側主面に流れ出にくくなり、金属板の下側主面にロウ材が濡れ広がるのを防止することができる。   In the brazing structure of the present invention, a through-hole composed of a large-diameter portion and a small-diameter portion is provided between the upper and lower main surfaces of the metal plate, and a protruding portion of a cylindrical member or a rod-like member inserted into the through-hole is connected to the large-diameter portion. It is locked to the step portion between the small diameter portion and brazed to the inner peripheral surface of the large diameter portion. A step surface groove portion is formed in the step portion, and the inner peripheral surface groove portion is formed on the inner peripheral surface of the small diameter portion. Therefore, the brazing material for brazing the protruding portion to the inner peripheral surface of the large diameter portion is blocked by the step portion, the step surface groove portion, and the inner peripheral surface groove portion, and the lower main plate of the metal plate It becomes difficult to flow out to the surface, and it is possible to prevent the brazing material from spreading on the lower main surface of the metal plate.

その結果、金属板の下側主面を、例えば、電気装置の取付孔を塞ぐように当接させ、金属板の外周部を溶接固定すれば、金属板の外周部が良好な状態で溶けて、金属板の下側主面で電気装置の取付孔を気密に塞いで取り付けることが可能となる。   As a result, if the lower main surface of the metal plate is brought into contact with, for example, the mounting hole of the electric device and the outer peripheral portion of the metal plate is fixed by welding, the outer peripheral portion of the metal plate is melted in a good state. It becomes possible to attach the mounting hole of the electric device by airtightly sealing the lower main surface of the metal plate.

また、突出部の下端が段差部で係止されるので、従来のように突出部が貫通孔内の所定位置になるようにロウ付け用治具で筒状部材または棒状部材を所定位置に固定する必要が無くなり、突出部の接合の作業を作業効率に優れたものとすることが可能となる。   In addition, since the lower end of the protruding portion is locked by the stepped portion, the cylindrical member or the rod-shaped member is fixed at a predetermined position with a brazing jig so that the protruding portion is positioned at a predetermined position in the through hole as in the past. Therefore, it is possible to make the work of joining the protrusions excellent in work efficiency.

以上により、ロウ材が必要以上に濡れ広がるのを防止可能で効率よく接合可能なロウ付け構造を提供することができる。   As described above, it is possible to provide a brazing structure that can prevent the brazing material from spreading more than necessary and can be joined efficiently.

また、本発明のロウ付け構造は、上記構成において好ましくは、筒状部材が、金属線材が両端面間に挿通されたセラミック筒状体であり、突出部が、セラミック筒状体の外周面にロウ付けされた筒状の金属スリーブであることから、気密端子が小型化し、セラミック筒状体等が小型化して、セラミック筒状体の機械的強度が低下しても、スリーブと金属板とがロウ付け接合によって接合されることから、溶接接合される場合のようにセラミック筒状体へクラック等の破損が生ずることがなく、気密信頼性が低下するのを防止できる。   In the brazing structure of the present invention, preferably, in the above configuration, the cylindrical member is a ceramic cylindrical body in which a metal wire is inserted between both end faces, and the projecting portion is formed on the outer peripheral surface of the ceramic cylindrical body. Even though the cylindrical metal sleeve is brazed, the airtight terminal is downsized, the ceramic cylindrical body is downsized, and the mechanical strength of the ceramic cylindrical body is reduced. Since the joining is performed by brazing joining, the ceramic cylindrical body is not damaged such as a crack as in the case of welding joining, and it is possible to prevent the airtight reliability from being lowered.

また、本発明の気密端子は、本発明のロウ付け構造を用いて、金属板と筒状部材または棒状部材とをロウ付けして成ることから、接合構造に、上記本発明のロウ付け構造を用いた、ロウ材が必要以上に濡れ広がるのを防止可能で効率よく接合可能な気密信頼性の高い気密端子を提供することができる。   Further, since the hermetic terminal of the present invention is formed by brazing a metal plate and a cylindrical member or a rod-shaped member using the brazing structure of the present invention, the brazing structure of the present invention is added to the joining structure. It is possible to provide a hermetic terminal with high hermetic reliability that can prevent the brazing material used from spreading more than necessary and can be joined efficiently.

本発明のロウ付け構造および気密端子について以下に詳細に説明する。図１は本発明の気密端子の実施の形態の一例を示す断面図であり、図２（ａ）は図１の気密端子におけるロウ付け構造の要部拡大断面図である。また、図２（ｂ）は本発明のロウ付け構造の実施の形態の他の例を示す要部拡大断面図、図２（ｃ）（ｄ）はそれぞれ本発明の気密端子の実施の形態のさらに他の例を示し、段差面溝部および内周面溝部の要部拡大断面図である。   The brazing structure and hermetic terminal of the present invention will be described in detail below. FIG. 1 is a cross-sectional view showing an example of an embodiment of an airtight terminal of the present invention, and FIG. 2A is an enlarged cross-sectional view of a main part of a brazing structure in the airtight terminal of FIG. 2 (b) is an enlarged cross-sectional view of a main part showing another example of the embodiment of the brazing structure of the present invention, and FIGS. 2 (c) and 2 (d) respectively show the embodiment of the hermetic terminal of the present invention. It is a principal part expanded sectional view of a level difference surface groove part and an internal peripheral surface groove part which shows another example.

同図において、１は筒状部材または棒状部材、２は金属線材、３は突出部（スリーブ）、７は金属板であり、主にこれらにより気密端子が構成される。   In the figure, 1 is a cylindrical member or rod-shaped member, 2 is a metal wire, 3 is a protrusion (sleeve), 7 is a metal plate, and these mainly constitute an airtight terminal.

本発明のロウ付け構造は、金属板７の上下主面間に上方の大径部７ａ−１および下方の小径部７ａ−２から成る貫通孔７ａが設けられ、貫通孔７ａに挿通される筒状部材または棒状部材１の外周側面に突出する突出部３の下端が大径部７ａ−１と小径部７ａ−２との間の段差部７ｂに係止されるとともに大径部７ａ−１の内周面にロウ付けされて成り、段差部７ｂの、突出部３の係止部と小径部７ａ−２の上端との間の段差部７ｂに段差面溝部７ｃが形成され、小径部７ａ−２の内周面には内周面溝部７ｄが形成されているものである。   In the brazing structure of the present invention, a through-hole 7a including an upper large-diameter portion 7a-1 and a lower small-diameter portion 7a-2 is provided between the upper and lower main surfaces of the metal plate 7, and the cylinder inserted through the through-hole 7a. The lower end of the protruding portion 3 protruding from the outer peripheral side surface of the rod-shaped member or rod-shaped member 1 is locked to the stepped portion 7b between the large diameter portion 7a-1 and the small diameter portion 7a-2 and the large diameter portion 7a-1 A stepped surface groove portion 7c is formed in the stepped portion 7b between the engaging portion of the protruding portion 3 and the upper end of the small diameter portion 7a-2, and is formed by brazing on the inner peripheral surface. An inner peripheral surface groove portion 7d is formed on the inner peripheral surface 2 of FIG.

また、本発明のロウ付け構造は、筒状部材１が、金属線材２が両端面間に挿通されたセラミック筒状体１であり、突出部が、セラミック筒状体１の外周面にロウ付けされた筒状の金属スリーブ３であってもよい。   In the brazing structure of the present invention, the tubular member 1 is the ceramic tubular body 1 in which the metal wire 2 is inserted between both end faces, and the protruding portion is brazed to the outer peripheral surface of the ceramic tubular body 1. A cylindrical metal sleeve 3 may be used.

また、本発明の気密端子は、上記ロウ付け構造を用いて、金属板７と筒状部材または棒状部材１とをロウ付けして成るもので、金属板の下側主面で半導体製造装置，電子機器，半導体装置等の電気装置の気密容器部分を構成する壁部に開けられた取付孔を塞ぐようにして取り付け、金属板の外周部を壁部に溶接固定することによって、電気装置の取付孔を気密に塞いで取り付けられるものである。   The hermetic terminal according to the present invention is formed by brazing the metal plate 7 and the cylindrical member or the rod-shaped member 1 using the brazing structure described above. Installation of the electrical device by closing the mounting hole opened in the wall part that constitutes the airtight container part of the electrical device such as electronic equipment, semiconductor device, etc., and welding and fixing the outer peripheral part of the metal plate to the wall part It can be attached by airtightly closing the hole.

図１において、筒状部材または棒状部材１は、筒状部材１の両端面に金属線材２が挿通された構成を示したが、筒状部材１と金属線材２とが一体の金属から成る棒状部材１とし、この棒状部材１の外周側面に、例えばセラミックスから成る筒状の絶縁部材をロウ付けした突出部３を形成した構成であってもよい。この場合、筒状のセラミックスから成る絶縁部材の内周面および外周面の少なくとも一部にはロウ付けのためのメタライズ層が形成される。   In FIG. 1, the cylindrical member or rod-shaped member 1 has a configuration in which the metal wire 2 is inserted through both end faces of the cylindrical member 1. However, the cylindrical member 1 and the metal wire 2 are formed of a single metal. The member 1 may be configured such that a protruding portion 3 formed by brazing a cylindrical insulating member made of ceramic, for example, is formed on the outer peripheral side surface of the rod-shaped member 1. In this case, a metallized layer for brazing is formed on at least a part of the inner and outer peripheral surfaces of the insulating member made of cylindrical ceramics.

好ましくは、図１に示されるように、セラミックス等の筒状部材１の両端面に金属線材２が挿通された構成がよく、これにより、小径部７ａ−２の内周面と金属線材２との間に絶縁性部材が配置されることから、金属線材２に、より高電圧の電気信号を導通させることができる。以下、筒状部材１にセラミック筒状体１を用いた場合を例に説明する。   Preferably, as shown in FIG. 1, the metal wire 2 is inserted into both end faces of the cylindrical member 1 such as ceramics, whereby the inner peripheral surface of the small diameter portion 7a-2 and the metal wire 2 Since the insulating member is disposed between the two, a higher voltage electric signal can be conducted to the metal wire 2. Hereinafter, the case where the ceramic cylindrical body 1 is used for the cylindrical member 1 is demonstrated to an example.

本発明のロウ付け構造において、セラミック筒状体１はＡｌ２Ｏ３質セラミックス等のセラミックスから成る断面の形状が円形や四角形，六角形等の種々の形状とされた筒状の部材である。セラミック筒状体１を金属から成るスリーブ３にロウ付けするには、例えばセラミック筒状体１の外周面にＷやＭｏ，Ｍｎ等から成る側部メタライズ層６を被着させておくとともにＡｇロウ等のロウ材によってロウ付けする方法が採用される。また側部メタライズ層６にＮｉめっきを施し、このＮｉめっきが施された側部メタライズ層６とスリーブ３とをロウ付けするという方法も採用される。この方法により、セラミック筒状体１とスリーブ３との接合をより強固なものとすることができる。 In the brazing structure of the present invention, the ceramic cylindrical body 1 is a cylindrical member whose cross-sectional shape made of ceramics such as Al 2 O 3 ceramics has various shapes such as a circle, a square, and a hexagon. In order to braze the ceramic cylindrical body 1 to the sleeve 3 made of metal, for example, the side metallized layer 6 made of W, Mo, Mn or the like is attached to the outer peripheral surface of the ceramic cylindrical body 1 and Ag brazing is performed. A method of brazing with a brazing material such as is used. Further, a method of applying Ni plating to the side metallized layer 6 and brazing the side metallized layer 6 to which the Ni plating has been applied and the sleeve 3 is also employed. By this method, the ceramic cylindrical body 1 and the sleeve 3 can be more firmly joined.

セラミック筒状体１の両端面間に形成された貫通孔１ａ内に、金属線材２を挿通させ固定するには、例えば、セラミック筒状体１の例えば上端面にＷ，Ｍｏ，Ｍｎ等から成る上部メタライズ層４を被着形成しておき、この上部メタライズ層４に、金属線材２をセラミック筒状体１に取り付けるための環状の固定金具５を、固定金具５と金属線材２との間および固定金具５とセラミック筒状体１の上部メタライズ層４との間をＡｇロウ等のロウ材を介してロウ付け接合すればよい。   In order to insert and fix the metal wire 2 in the through hole 1a formed between the both end surfaces of the ceramic cylindrical body 1, for example, the upper end surface of the ceramic cylindrical body 1 is made of W, Mo, Mn, or the like. An upper metallized layer 4 is formed on the upper metallized layer 4, and an annular fixing metal 5 for attaching the metal wire 2 to the ceramic cylindrical body 1 is provided between the fixing metal 5 and the metal wire 2. What is necessary is just to braze and join between the fixing metal 5 and the upper metallized layer 4 of the ceramic cylindrical body 1 via a brazing material such as Ag brazing.

固定金具５を用いることによって、セラミック筒状体１に金属線材２を気密に嵌挿固定できるとともに、セラミック筒状体１に金属線材２を取り付ける際等に、金属線材２は固定金具５にのみ固定され、セラミック筒状体１には接合されていないため、セラミック筒状体１と金属線材２との間に両者の熱膨張係数の差に起因して発生する応力を吸収緩和できるという利点があるが、セラミック筒状体１と金属線材２との固定方法は、特にこの方法に限定されるものではなく、例えば、上部メタライズ層４と金属線材２とを直接ロウ材を介してロウ付けしてもよい。   By using the fixing metal 5, the metal wire 2 can be hermetically inserted and fixed to the ceramic cylindrical body 1, and when attaching the metal wire 2 to the ceramic cylindrical body 1, the metal wire 2 is attached only to the fixing metal 5. Since it is fixed and not joined to the ceramic cylindrical body 1, there is an advantage that the stress generated due to the difference in thermal expansion coefficient between the ceramic cylindrical body 1 and the metal wire 2 can be absorbed and relaxed. However, the method of fixing the ceramic cylindrical body 1 and the metal wire 2 is not particularly limited to this method. For example, the upper metallized layer 4 and the metal wire 2 are brazed directly via a brazing material. May be.

セラミック筒状体１は、例えばＡｌ２Ｏ３質セラミックス等から成る絶縁性のものであり、電気装置との電気的絶縁を保って金属線材２を保持する作用をなし、例えばＡｌ２Ｏ３質セラミックスから成る場合、酸化珪素（ＳｉＯ２）、酸化マグネシウム（ＭｇＯ）および酸化カルシウム（ＣａＯ）等のＡｌ２Ｏ３質セラミック原料粉末にポリビニルアルコール等のバインダを添加混合するとともに、これを所定形状のプレス型内に充填し、所定の圧力でプレスすることによりプレス成形体を得、しかる後、このプレス成形体を約1600℃の温度で焼成することによって製作される。なお、セラミック筒状体１の上面に固定金具５をロウ付けするための上部メタライズ層４を、および外周面にセラミック筒状体１にスリーブ３をロウ付けするための側部メタライズ層６を形成するために、プレス成形体の所定の位置にＷやＭｏ，Ｍｎ等の高融点金属を主成分とする金属ペーストを印刷塗布した状態で焼成する。 The ceramic cylindrical body 1 is an insulating material made of, for example, Al 2 O 3 ceramics, and has an action of holding the metal wire 2 while maintaining electrical insulation with an electric device, for example, Al 2 O 3 material. In the case of ceramics, a binder such as polyvinyl alcohol is added to and mixed with Al 2 O 3 based ceramic raw material powder such as silicon oxide (SiO 2 ), magnesium oxide (MgO) and calcium oxide (CaO), and this is formed into a predetermined shape. It is manufactured by filling a press mold and pressing it at a predetermined pressure to obtain a press-molded body, and then firing the press-molded body at a temperature of about 1600 ° C. An upper metallized layer 4 for brazing the fixing metal fitting 5 to the upper surface of the ceramic cylindrical body 1 and a side metallized layer 6 for brazing the sleeve 3 to the ceramic cylindrical body 1 are formed on the outer peripheral surface. In order to achieve this, firing is performed in a state where a metal paste mainly composed of a refractory metal such as W, Mo, or Mn is printed and applied at a predetermined position of the press-formed body.

または、Ａｌ２Ｏ３，ＳｉＯ２，ＭｇＯ，ＣａＯ等の原料粉末に適当な有機バインダ，溶剤等を添加混合してスラリーと成す。このスラリーをドクターブレード法やカレンダーロール法によってセラミックグリーンシートと成し、所要の大きさに切断する。次に、複数のセラミックグリーンシートにおいて貫通孔１ａ等を形成するために適当な打ち抜き加工を施す。そして、これらのセラミックグリーンシートにＷ等の金属粉末を主成分とする金属ペーストを印刷塗布して上部メタライズ層４，側部メタライズ層６等の導体層となる印刷パターンを形成し、次いでこれらの印刷パターンを形成したセラミックグリーンシートを積層し、約1600℃の温度で焼成することによって製作される。 Alternatively, an appropriate organic binder, solvent, etc. are added to and mixed with raw material powders such as Al 2 O 3 , SiO 2 , MgO, CaO to form a slurry. This slurry is formed into a ceramic green sheet by a doctor blade method or a calender roll method, and cut into a required size. Next, an appropriate punching process is performed to form the through holes 1a and the like in the plurality of ceramic green sheets. Then, a metal paste mainly composed of a metal powder such as W is printed on these ceramic green sheets to form a printed pattern to be a conductor layer such as the upper metallized layer 4 and the side metallized layer 6. It is manufactured by laminating ceramic green sheets with a printed pattern and firing them at a temperature of about 1600 ° C.

金属線材２はＦｅ−Ｎｉ−Ｃｏ合金，Ｆｅ−Ｎｉ合金，銅（Ｃｕ），鉄（Ｆｅ）等の金属から成る棒状であり、セラミック筒状体１の貫通孔１ａ内に両端がセラミック筒状体１の両端面から突出するように挿通されてロウ付け等により固定され、電気装置内外を電気的に接続するための端子として機能する。   The metal wire 2 has a rod shape made of a metal such as Fe—Ni—Co alloy, Fe—Ni alloy, copper (Cu), iron (Fe), etc., and both ends of the ceramic wire 1 in the through hole 1a are ceramic tubes. It is inserted so as to protrude from both end faces of the body 1 and fixed by brazing or the like, and functions as a terminal for electrically connecting the inside and outside of the electric device.

この金属線材２は、好ましくはその熱膨張係数がセラミック筒状体１の熱膨張係数と近似した材質とするのがよく、この構成によって、金属線材２とセラミック筒状体１とがロウ付けされる際の両者の熱膨張差を最小限に抑えることができ、金属線材２をセラミック筒状体１に気密性高く強固に接合することができるようになる。さらに、金属線材２を構成する金属として硬度がビッカース硬度でＨｖ＝200以上のものであると、比較的固く容易に曲がりにくいことから電気装置の外部雰囲気側の金属線材２にコネクターソケット等を嵌合する際等に金属線材２に曲がりを発生させにくいので好ましい。従って、セラミック筒状体１がＡｌ２Ｏ３質セラミックスから成る場合、金属線材２としては、熱膨張係数がＡｌ２Ｏ３質セラミックスと近似するとともに硬度の高いＦｅ−Ｎｉ−Ｃｏ合金から成るのがよい。 The metal wire 2 is preferably made of a material whose thermal expansion coefficient approximates that of the ceramic cylindrical body 1, and with this configuration, the metal wire 2 and the ceramic cylindrical body 1 are brazed. The difference in thermal expansion between the two can be minimized, and the metal wire 2 can be firmly joined to the ceramic cylindrical body 1 with high airtightness. Furthermore, if the metal constituting the metal wire 2 has a Vickers hardness of Hv = 200 or higher, a connector socket or the like is fitted to the metal wire 2 on the external atmosphere side of the electrical device because it is relatively hard and difficult to bend. This is preferable because it is difficult for the metal wire 2 to be bent when mating. Accordingly, when the ceramic cylindrical body 1 is made of Al 2 O 3 ceramics, the metal wire 2 is made of an Fe—Ni—Co alloy having a thermal expansion coefficient close to that of Al 2 O 3 ceramics and high hardness. Is good.

また、金属線材２は、その表面にＮｉから成るめっき金属層を１〜10μｍの厚みに被着させておくと金属線材２が酸化腐食することを有効に防止することができる。従って、金属線材２の表面にはＮｉから成るめっき金属層を１〜10μｍの厚みに被着させておくことが好ましい。   The metal wire 2 can effectively prevent the metal wire 2 from being oxidatively corroded by depositing a plated metal layer made of Ni on the surface thereof to a thickness of 1 to 10 μm. Therefore, it is preferable to deposit a plated metal layer made of Ni to a thickness of 1 to 10 μm on the surface of the metal wire 2.

スリーブ３は、Ｆｅ−Ｎｉ−Ｃｏ合金，Ｆｅ−Ｎｉ合金等の金属から成る、その内径をセラミック筒状体１の外径に合わせ、その外径を金属板７の貫通孔７ａの内周面に合わせた円形や四角形，六角形等の種々の形状とした筒状の部材であり、好ましくは、内径をセラミック筒状体１の外径に合わせた小径の筒状部と、その外径を金属板７の貫通孔７ａの内周面に合わせた大径の筒状部とが隣り合うように組合せ、大径の筒状部と小径の筒状部とがリング状部材で接続された図１のような形状や、大径の筒状部の内側に小径の筒状部を組合せ、それらの一端側がリング状部材で接続された、断面Ｕ字状の金属を筒状に形成したような形状の筒状とされる。このような形状とすることにより、ロウ付けされた大径の筒状部と小径の筒状部との間の弾力性で金属板７とセラミック筒状体１との間の熱膨張差を緩和することができる。   The sleeve 3 is made of a metal such as Fe—Ni—Co alloy or Fe—Ni alloy, and the inner diameter thereof is matched with the outer diameter of the ceramic cylindrical body 1, and the outer diameter thereof is the inner peripheral surface of the through hole 7 a of the metal plate 7. A cylindrical member having various shapes such as a circle, a quadrangle, a hexagon, and the like, and preferably a small-diameter cylindrical portion whose inner diameter is matched to the outer diameter of the ceramic cylindrical body 1 and its outer diameter. The figure which combined so that the large diameter cylindrical part matched with the internal peripheral surface of the through-hole 7a of the metal plate 7 might be adjacent, and connected the large diameter cylindrical part and the small diameter cylindrical part with the ring-shaped member. A shape like 1 or a small-diameter cylindrical portion is combined inside a large-diameter cylindrical portion, and one end side thereof is connected by a ring-shaped member, and a metal having a U-shaped cross section is formed in a cylindrical shape The shape is a cylindrical shape. By adopting such a shape, the difference in thermal expansion between the metal plate 7 and the ceramic cylindrical body 1 is mitigated by the elasticity between the brazed large diameter cylindrical portion and the small diameter cylindrical portion. can do.

そして、小径の筒状部の内周面の少なくとも一部が側部メタライズ層６にＡｇロウ等のロウ材を介して気密にロウ付けされ、大径の筒状部の外周面の少なくとも一部が貫通孔７ａの大径部７ａ−１の内周面にロウ付けされて金属板７とセラミック筒状体１との間を気密に封止する。このスリーブ３はプレス加工や絞り加工等の従来周知の金属加工法によって所定の形状に製作される。   At least a part of the inner peripheral surface of the small-diameter cylindrical part is airtightly brazed to the side metallized layer 6 via a brazing material such as Ag brazing, and at least a part of the outer peripheral surface of the large-diameter cylindrical part. Is brazed to the inner peripheral surface of the large-diameter portion 7a-1 of the through hole 7a to hermetically seal between the metal plate 7 and the ceramic cylindrical body 1. The sleeve 3 is manufactured in a predetermined shape by a conventionally known metal processing method such as press working or drawing.

このスリーブ３は、セラミック筒状体１によって絶縁された金属線材２を金属板７の貫通孔７ａに固定するための固定部材として機能するとともに、セラミック筒状体１に金属板７との熱膨張差による応力が直接作用したり、金属板７に加わる外力がセラミック筒状体１に直接作用したりするのを防止する応力緩衝部材として機能する。   The sleeve 3 functions as a fixing member for fixing the metal wire 2 insulated by the ceramic cylindrical body 1 to the through hole 7 a of the metal plate 7, and thermal expansion between the ceramic cylindrical body 1 and the metal plate 7. It functions as a stress buffering member that prevents the stress due to the difference from acting directly or the external force applied to the metal plate 7 from acting directly on the ceramic cylindrical body 1.

環状の固定金具５は、Ｆｅ−Ｎｉ−Ｃｏ合金等の金属から成り、その内径を金属線材２の外径に合わせて、その外径がセラミック筒状体１の上端面に合わせて形成されたリング状の部材であり、例えば、図１のスリーブ３と同形状に絞り込まれたリング状の部材である。そして、その内側には金属線材２がその一端側を突出させて挿通され、Ａｇロウ等のロウ材を介してロウ付けされている。この固定金具５はプレス加工や絞り加工等の従来周知の金属加工法によって所定の形状で製作される。   The annular fixing metal fitting 5 is made of a metal such as an Fe—Ni—Co alloy, and is formed so that its inner diameter matches the outer diameter of the metal wire 2 and the outer diameter matches the upper end surface of the ceramic cylindrical body 1. A ring-shaped member, for example, a ring-shaped member narrowed down to the same shape as the sleeve 3 of FIG. And the metal wire 2 is inserted in the inner side by making the one end side protrude, and is brazed via a brazing material such as Ag brazing. The fixing metal 5 is manufactured in a predetermined shape by a conventionally known metal working method such as press working or drawing.

この固定金具５は、セラミック筒状体１に金属線材２を気密に嵌挿固定するとともに、セラミック筒状体１に金属線材２を取り付ける際等にセラミック筒状体１と金属線材２との間に両者の熱膨張係数の差に起因して発生する応力を吸収緩和する作用をなす。これにより、セラミック筒状体１の貫通孔１ａ内に銅や銀等の電気伝導性のよい金属線材２を用いることも可能となる。   The fixing metal 5 is adapted to insert and fix the metal wire 2 on the ceramic cylindrical body 1 in an airtight manner, and between the ceramic cylindrical body 1 and the metal wire 2 when attaching the metal wire 2 to the ceramic cylindrical body 1. It absorbs and relaxes the stress generated due to the difference in thermal expansion coefficient between the two. Thereby, it is also possible to use a metal wire 2 having good electrical conductivity such as copper or silver in the through hole 1a of the ceramic cylindrical body 1.

金属板７はステンレス鋼（ＳＵＳ），Ｆｅ，Ｃｕ等から成る平板状で電気装置への取付用部材として機能するものであり、例えば金属板７の一主面を電気装置の取付孔を塞ぐように取り付け、金属板７の外周部を溶接することによって、気密端子を電気装置に気密かつ強固に取り付けることが可能となる。   The metal plate 7 is a flat plate made of stainless steel (SUS), Fe, Cu or the like and functions as a member for mounting on the electric device. For example, one main surface of the metal plate 7 is closed with a mounting hole of the electric device. It is possible to attach the airtight terminal to the electric device in an airtight and firm manner by welding to the outer peripheral portion of the metal plate 7.

金属板７において貫通孔７ａの下側には貫通孔７ａの内周面が突出するようにして小径部７ａ−２が形成されており、大径部７ａ−１との間の段差部７ｂの外周部にスリーブ３の下端が係止され、段差部７ｂのスリーブ３との係止部よりも内周側に段差面溝部７ｃが形成され、かつ小径部７ａ−２の内周面には内周面溝部７ｄが形成されている。   In the metal plate 7, a small diameter portion 7 a-2 is formed on the lower side of the through hole 7 a so that the inner peripheral surface of the through hole 7 a protrudes, and the step portion 7 b between the large diameter portion 7 a-1 is formed. A lower end of the sleeve 3 is locked to the outer peripheral portion, a step surface groove portion 7c is formed on the inner peripheral side of the locking portion of the step portion 7b with the sleeve 3, and an inner peripheral surface of the small diameter portion 7a-2 is formed on the inner peripheral surface. A circumferential groove 7d is formed.

この構成により、スリーブ３をロウ付けするためのロウ材８が、段差部７ｂ，段差面溝部７ｃ，内周面溝部７ｄで金属板７の下側主面側に流れるのを阻止することができ、金属板７の下側主面にロウ材８が濡れ広がるのを防止することができる。   With this configuration, the brazing material 8 for brazing the sleeve 3 can be prevented from flowing to the lower main surface side of the metal plate 7 at the step portion 7b, the step surface groove portion 7c, and the inner peripheral surface groove portion 7d. Further, it is possible to prevent the brazing material 8 from spreading on the lower main surface of the metal plate 7.

その結果、金属板７の下側主面はロウ材８の濡れ広がりがないことから、例えば、金属板７の下側主面を電気装置の取付孔を塞ぐように取り付け、金属板７の外周部を溶接固定すれば、金属板７の外周部が良好な状態で溶けて、金属板７で電気装置の取付孔を気密に塞いで取り付けることが可能となる。   As a result, since the lower main surface of the metal plate 7 does not wet and spread the brazing material 8, for example, the lower main surface of the metal plate 7 is attached so as to close the mounting hole of the electric device. If the portion is fixed by welding, the outer peripheral portion of the metal plate 7 is melted in a good state, and the attachment hole of the electric device can be hermetically closed by the metal plate 7 and attached.

また、スリーブ３の下端が段差部７ｂの外周部で係止されるので、スリーブ３を従来のようにロウ付け用治具で所定位置に固定する必要が無くなり、スリーブ３の接合作業を作業効率に優れたものとすることが可能となる。   Further, since the lower end of the sleeve 3 is locked by the outer peripheral portion of the stepped portion 7b, it is not necessary to fix the sleeve 3 at a predetermined position with a brazing jig as in the prior art, and the joining operation of the sleeve 3 is made efficient. It becomes possible to make it excellent.

以上により、ロウ材８が必要以上に濡れ広がるのを防止可能で効率よく接合可能なロウ付け構造となる。   As described above, a brazing structure that can prevent the brazing material 8 from spreading more than necessary and can be joined efficiently is obtained.

また、スリーブ３と金属板７とがロウ付け接合によって接合されることから、気密端子が小型化し、セラミック筒状体１等が小型化して、セラミック筒状体１の機械的強度が低下しても、溶接接合される場合のようにセラミック筒状体１へクラック等の破損が生ずるということがなく、気密信頼性が低下するのを防止できる。   Further, since the sleeve 3 and the metal plate 7 are joined by brazing, the hermetic terminal is downsized, the ceramic cylindrical body 1 and the like are downsized, and the mechanical strength of the ceramic cylindrical body 1 is reduced. However, there is no occurrence of breakage such as cracks in the ceramic cylindrical body 1 as in the case of welding, and it is possible to prevent the airtight reliability from being lowered.

ここで、段差面溝部７ｃおよび内周面溝部７ｄの断面形状は、四角形状，Ｖ字状，半円形状等種々の形状とし得るが、好ましくは、断面形状は四角形状とするのがよく、溝の底面の角部にロウ材を溜まり易くし、ロウ材８が溝から外に流れ出るのを有効に防止することができる。   Here, the cross-sectional shape of the stepped surface groove portion 7c and the inner peripheral surface groove portion 7d can be various shapes such as a square shape, a V-shape, a semicircular shape, etc., but preferably the cross-sectional shape is a square shape, It is possible to easily collect the brazing material at the corner of the bottom surface of the groove, and to effectively prevent the brazing material 8 from flowing out of the groove.

小型の気密端子である場合、大径部７ａ−１に対する小径部７ａ−２の貫通孔７ａ内側への突出寸法および高さは１ｍｍ〜３ｍｍ程度で、また段差面溝部７ｃおよび内周面溝部７ｄの幅および深さ寸法は0.5ｍｍ〜１ｍｍ程度であればよく、金属板７の下側主面にロウ材８が流れるのを確実に防止することができる。   In the case of a small airtight terminal, the projection size and height of the small diameter portion 7a-2 to the inside of the through hole 7a with respect to the large diameter portion 7a-1 are about 1 mm to 3 mm, and the step surface groove portion 7c and the inner peripheral surface groove portion 7d The width and depth dimensions of the metal plate may be about 0.5 mm to 1 mm, and the brazing material 8 can be reliably prevented from flowing on the lower main surface of the metal plate 7.

また、好ましくは、図２（ｂ）に示すように、金属板７の貫通孔７ａの上面側の大径部７ａ−１の開口部には面取り部７ｅが形成されているのがよく、この構成により、スリーブ３を金属板７に接合させるためのロウ材８を面取り部７ｅの内面に溜めることができ、スリーブ３と金属板７との間に形成されるロウ材８のメニスカスを良好なものとして、スリーブ３を金属板７に、より強固に接合できるとともに、ロウ材８が面取り部７ｅから流れ出難くなり金属板７の上面においてもロウ材８の濡れ広がりを防止することができる。なお、面取り部７ｅの断面形状は図２（ｂ）に示すような三角形状，四角形状等の矩形状の他、円弧状等の曲面状であってもよく、種々の形状とし得る。   Preferably, as shown in FIG. 2 (b), a chamfered portion 7e is formed in the opening of the large diameter portion 7a-1 on the upper surface side of the through hole 7a of the metal plate 7. According to the configuration, the brazing material 8 for joining the sleeve 3 to the metal plate 7 can be accumulated on the inner surface of the chamfered portion 7e, and the meniscus of the brazing material 8 formed between the sleeve 3 and the metal plate 7 can be improved. As a matter of course, the sleeve 3 can be more firmly joined to the metal plate 7, and the brazing material 8 can hardly flow out of the chamfered portion 7 e and the wetting and spreading of the brazing material 8 can be prevented on the upper surface of the metal plate 7. The cross-sectional shape of the chamfered portion 7e may be a curved shape such as an arc shape in addition to a rectangular shape such as a triangular shape or a quadrangular shape as shown in FIG.

また、好ましくは、図２（ｃ）（ｄ）に示すように、段差面溝部７ｃおよび内周面溝部７ｄの断面形状は溝の底面に凸形の突出部が形成された形状や凹形の溝部が形成された形状であるのがよく、この構成により、溝の底面にさらにロウ材を溜まり易くし、ロウ材が溝から外に流れ出るのを極めて有効に防止することができるようになる。   Further, preferably, as shown in FIGS. 2C and 2D, the cross-sectional shape of the stepped surface groove portion 7c and the inner peripheral surface groove portion 7d is a shape in which a convex protrusion is formed on the bottom surface of the groove or a concave shape. The groove is preferably formed in a shape, and this configuration makes it easier to collect the brazing material on the bottom surface of the groove, and can prevent the brazing material from flowing out of the groove extremely effectively.

なお、本発明は上記実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは何等差し支えない。上記実施の形態においては、本発明のロウ付け構造について気密端子を例にとって説明したが、本発明のロウ付け構造は気密端子以外にも適用可能である。例えば、外周部にスリーブ３の付いたサファイア窓を金属板７に取り付けるロウ付け部等に適用しても構わない。また、図１では金属板７にはスリーブ３が１個だけしか取り付けられていない形態を示したが、１枚の金属板７に複数個の貫通孔７ａが設けられ、それぞれの貫通孔７ａにスリーブ３が取り付けられている形態であってもよく、何等問題ない。   Note that the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention. In the above embodiment, the brazing structure of the present invention has been described by taking the hermetic terminal as an example, but the brazing structure of the present invention can be applied to other than the hermetic terminal. For example, you may apply to the brazing part etc. which attach the sapphire window with the sleeve 3 to the outer peripheral part to the metal plate 7. Further, FIG. 1 shows a form in which only one sleeve 3 is attached to the metal plate 7, but a plurality of through holes 7a are provided in one metal plate 7, and each through hole 7a has a plurality of through holes 7a. There may be a form in which the sleeve 3 is attached, and there is no problem.

本発明のロウ付け構造を用いた気密端子の実施の形態の一例を示す断面図である。It is sectional drawing which shows an example of embodiment of the airtight terminal using the brazing structure of this invention. （ａ）は図１の気密端子におけるロウ付け構造の要部拡大断面図、（ｂ）は本発明のロウ付け構造の実施の形態の他の例を示す要部拡大断面図、（ｃ）（ｄ）はそれぞれ本発明のロウ付け構造の実施の形態の他の例を示し段差面溝部および内周面溝部の要部拡大断面図である。(A) is a principal part expanded sectional view of the brazing structure in the airtight terminal of FIG. 1, (b) is a principal part expanded sectional view which shows the other example of embodiment of the brazing structure of this invention, (c) ( d) Another example of the embodiment of the brazing structure of the present invention, which is an enlarged cross-sectional view of the main parts of the step surface groove portion and the inner peripheral surface groove portion. 従来の気密端子の例を示す断面図である。It is sectional drawing which shows the example of the conventional airtight terminal.

符号の説明Explanation of symbols

１：筒状部材（セラミック筒状体）
２：金属線材
３：突出部（スリーブ）
４：上部メタライズ層
５：固定金具
６：側部メタライズ層
７：金属板
７ａ：貫通孔
７ａ−１：大径部
７ａ−２：小径部
７ｂ：段差部
７ｃ：段差面溝部
７ｄ：内周面溝部
８：ロウ材 1: Cylindrical member (ceramic cylindrical body)
2: Metal wire 3: Projection (sleeve)
4: Upper metallized layer 5: Fixing metal fitting 6: Side metallized layer 7: Metal plate 7a: Through hole 7a-1: Large diameter part 7a-2: Small diameter part 7b: Step part 7c: Step surface groove part 7d: Inner peripheral surface Groove 8: brazing material

Claims (3)

金属板の上下主面間に大径部および小径部から成る貫通孔が設けられ、該貫通孔に挿通される筒状部材または棒状部材の突出部が前記大径部と前記小径部との間の段差部に係止されるとともに前記大径部の内周面にロウ付けされて成り、前記段差部に段差面溝部が形成され、前記小径部の内周面に内周面溝部が形成されていることを特徴とするロウ付け構造。 A through-hole consisting of a large-diameter portion and a small-diameter portion is provided between the upper and lower main surfaces of the metal plate, and the protruding portion of the cylindrical member or rod-like member inserted through the through-hole is between the large-diameter portion and the small-diameter portion. And is brazed to the inner peripheral surface of the large-diameter portion, a step surface groove portion is formed in the step portion, and an inner peripheral groove portion is formed on the inner peripheral surface of the small diameter portion. A brazing structure characterized by that. 前記筒状部材が、金属線材が両端面間に挿通されたセラミック筒状体であり、前記突出部が、前記セラミック筒状体の外周面にロウ付けされた筒状の金属スリーブであることを特徴とする請求項１に記載のロウ付け構造。 The cylindrical member is a ceramic cylindrical body in which a metal wire is inserted between both end faces, and the protruding portion is a cylindrical metal sleeve brazed to the outer peripheral surface of the ceramic cylindrical body. The brazing structure according to claim 1, wherein: 請求項１または請求項２に記載のロウ付け構造を用いて、前記金属板と前記筒状部材または棒状部材とをロウ付けして成ることを特徴とする気密端子。 An airtight terminal comprising the brazing structure according to claim 1 or 2 and brazing the metal plate and the cylindrical member or rod-shaped member.
JP2005021180A 2005-01-28 2005-01-28 Brazing structure and airtight terminal Expired - Fee Related JP4423211B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110026640A (en) * 2019-05-15 2019-07-19 江阴市赛英电子股份有限公司 A kind of thin electrode ceramic soldering shell with the silver-colored structure of resistance
JP2019221136A (en) * 2019-08-07 2019-12-26 日立Ｇｅニュークリア・エナジー株式会社 Electrical wiring penetration part structure
WO2021015189A1 (en) * 2019-07-25 2021-01-28 京セラ株式会社 Hermetic terminal
JP2022088126A (en) * 2020-12-02 2022-06-14 株式会社鷺宮製作所 Valve device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110026640A (en) * 2019-05-15 2019-07-19 江阴市赛英电子股份有限公司 A kind of thin electrode ceramic soldering shell with the silver-colored structure of resistance
WO2021015189A1 (en) * 2019-07-25 2021-01-28 京セラ株式会社 Hermetic terminal
JPWO2021015189A1 (en) * 2019-07-25 2021-01-28
CN114175407A (en) * 2019-07-25 2022-03-11 京瓷株式会社 Airtight terminal
JP7257515B2 (en) 2019-07-25 2023-04-13 京セラ株式会社 airtight terminal
EP4007074A4 (en) * 2019-07-25 2023-07-26 Kyocera Corporation Hermetic terminal
US12046864B2 (en) 2019-07-25 2024-07-23 Kyocera Corporation Hermetic terminal
JP2019221136A (en) * 2019-08-07 2019-12-26 日立Ｇｅニュークリア・エナジー株式会社 Electrical wiring penetration part structure
JP2022088126A (en) * 2020-12-02 2022-06-14 株式会社鷺宮製作所 Valve device
JP7425715B2 (en) 2020-12-02 2024-01-31 株式会社鷺宮製作所 valve device

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