JP2006189788A5 - - Google Patents
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- JP2006189788A5 JP2006189788A5 JP2005276496A JP2005276496A JP2006189788A5 JP 2006189788 A5 JP2006189788 A5 JP 2006189788A5 JP 2005276496 A JP2005276496 A JP 2005276496A JP 2005276496 A JP2005276496 A JP 2005276496A JP 2006189788 A5 JP2006189788 A5 JP 2006189788A5
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Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005276496A JP4618075B2 (ja) | 2004-09-29 | 2005-09-22 | ネガ型感光性樹脂組成物及びパターン形成方法 |
PCT/JP2006/312357 WO2007034604A1 (ja) | 2005-09-22 | 2006-06-20 | ネガ型感光性樹脂組成物、パターン形成方法及び電子部品 |
US12/067,911 US8871422B2 (en) | 2005-09-22 | 2006-06-20 | Negative-type photosensitive resin composition, pattern forming method and electronic parts |
TW095122118A TWI407255B (zh) | 2005-09-22 | 2006-06-20 | 負片型感光性樹脂組成物、圖案形成方法以及電子零件 |
KR1020087009228A KR100981830B1 (ko) | 2005-09-22 | 2006-06-20 | 네거티브형 감광성 수지 조성물, 패턴 형성방법 및전자부품 |
US13/006,300 US8758977B2 (en) | 2005-09-22 | 2011-01-13 | Negative-type photosensitive resin composition, pattern forming method and electronic parts |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004283962 | 2004-09-29 | ||
JP2004354071 | 2004-12-07 | ||
JP2005276496A JP4618075B2 (ja) | 2004-09-29 | 2005-09-22 | ネガ型感光性樹脂組成物及びパターン形成方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006189788A JP2006189788A (ja) | 2006-07-20 |
JP2006189788A5 true JP2006189788A5 (es) | 2009-03-05 |
JP4618075B2 JP4618075B2 (ja) | 2011-01-26 |
Family
ID=36797016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005276496A Active JP4618075B2 (ja) | 2004-09-29 | 2005-09-22 | ネガ型感光性樹脂組成物及びパターン形成方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4618075B2 (es) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5099979B2 (ja) * | 2005-04-27 | 2012-12-19 | 日立化成デュポンマイクロシステムズ株式会社 | ネガ型感光性樹脂組成物、パターンの製造方法及び電子部品 |
KR100981830B1 (ko) | 2005-09-22 | 2010-09-13 | 히다치 가세이듀퐁 마이쿠로시스데무즈 가부시키가이샤 | 네거티브형 감광성 수지 조성물, 패턴 형성방법 및전자부품 |
US20100159217A1 (en) * | 2006-06-20 | 2010-06-24 | Hitachi Chemical Dupont Microsystems, Ltd | Negative-type photosensitive resin composition, method for forming patterns, and electronic parts |
JP5076390B2 (ja) * | 2006-07-31 | 2012-11-21 | 日立化成デュポンマイクロシステムズ株式会社 | ネガ型感光性樹脂組成物、パターン硬化膜の製造方法および電子部品 |
US8298747B2 (en) | 2007-03-12 | 2012-10-30 | Hitachi Chemical Dupont Microsystems, Ltd. | Photosensitive resin composition, process for producing patterned hardened film with use thereof and electronic part |
JP5142918B2 (ja) * | 2008-09-26 | 2013-02-13 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
JP5290686B2 (ja) * | 2008-09-26 | 2013-09-18 | 旭化成イーマテリアルズ株式会社 | 感光性樹脂組成物 |
JP5571990B2 (ja) * | 2009-06-04 | 2014-08-13 | 旭化成イーマテリアルズ株式会社 | ネガ型感光性樹脂組成物、硬化レリーフパターン形成・製造方法、並びに半導体装置 |
JP5771361B2 (ja) * | 2010-04-22 | 2015-08-26 | 富士フイルム株式会社 | パターン形成方法、化学増幅型レジスト組成物、及び、レジスト膜 |
US9159547B2 (en) * | 2013-09-17 | 2015-10-13 | Deca Technologies Inc. | Two step method of rapid curing a semiconductor polymer layer |
US10204803B2 (en) | 2013-09-17 | 2019-02-12 | Deca Technologies Inc. | Two step method of rapid curing a semiconductor polymer layer |
US9519221B2 (en) * | 2014-01-13 | 2016-12-13 | Applied Materials, Inc. | Method for microwave processing of photosensitive polyimides |
CN106462057B (zh) | 2014-02-19 | 2020-04-21 | 日立化成杜邦微***股份有限公司 | 树脂组合物、由其形成的固化膜和图案固化膜、以及它们的制造方法 |
US10777633B2 (en) * | 2017-09-29 | 2020-09-15 | Sharp Kabushiki Kaisha | Display device, display device manufacturing method, and display device manufacturing apparatus |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3966590B2 (ja) * | 1997-11-20 | 2007-08-29 | 旭化成エレクトロニクス株式会社 | 感光性組成物 |
JP2001033964A (ja) * | 1999-07-15 | 2001-02-09 | Hitachi Chem Co Ltd | ネガ型感光性樹脂組成物、パターンの製造法及び電子部品 |
JP4288796B2 (ja) * | 1999-10-29 | 2009-07-01 | 日立化成デュポンマイクロシステムズ株式会社 | ネガ型感光性樹脂組成物、パターンの製造法及び電子部品 |
JP2002169286A (ja) * | 2000-11-30 | 2002-06-14 | Hitachi Chemical Dupont Microsystems Ltd | 感光性重合体組成物、パターンの製造法及び電子部品 |
JP4211225B2 (ja) * | 2001-02-27 | 2009-01-21 | 日本ゼオン株式会社 | 感放射線性樹脂組成物 |
JP2003121998A (ja) * | 2001-10-11 | 2003-04-23 | Hitachi Chemical Dupont Microsystems Ltd | 感光性重合体組成物及びパターン製造法及び電子部品 |
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2005
- 2005-09-22 JP JP2005276496A patent/JP4618075B2/ja active Active
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