JP2006179687A - Tray for sheet transfer and transfer system - Google Patents

Tray for sheet transfer and transfer system Download PDF

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JP2006179687A
JP2006179687A JP2004371557A JP2004371557A JP2006179687A JP 2006179687 A JP2006179687 A JP 2006179687A JP 2004371557 A JP2004371557 A JP 2004371557A JP 2004371557 A JP2004371557 A JP 2004371557A JP 2006179687 A JP2006179687 A JP 2006179687A
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tray
plate
stacked
workpiece
trays
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Ryosuke Tawara
良祐 田原
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Murata Machinery Ltd
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Murata Machinery Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a tray for sheet transfer which can be transferred or placed in a state of being stacked compact when it is vacant not being mounted with a plate-like work, and to provide a transfer system wherein the trays for sheet transfer can be stacked in a different manner when they are mounted with plate-like works and when they are vacant, and they can be stacked compact when they are vacant. <P>SOLUTION: The tray 1 to be mounted with a plate-like work is formed with two kinds of bearing portions 3 and 4 having a different height as bearers to place another tray on at the time of stacking another tray on the tray 1. The transfer system using the tray 1 for sheet transfer transfers the trays 1 by stacking them on the higher bearing portions 3 when the trays 1 are mounted with the plate-like works while stacking them on the lower bearing portions 3 when the trays 1 are not mounted with the plate-like works. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、液晶ディスプレイに用いられるガラス基板等の板状ワークを載置して搬送する枚葉搬送用トレイおよびこのトレイを使用した搬送システムに関する。   The present invention relates to a single-wafer carrying tray for carrying a plate-like workpiece such as a glass substrate used for a liquid crystal display and carrying it, and a carrying system using this tray.

従来、液晶ディスプレイ等に用いられるガラス基板は、この基板の両端を載せる腕部を上下に多数有するボックス状のカセットを用い、多数枚同時に搬送するようにしていた（例えば特許文献１）。
しかし、最近は、液晶ディスプレイの大型化に伴い、ガラス基板の縦横寸法の大きなもの、例えば２２００×２６００×０．７（単位mm）程度のガラス基板が製造されており、このような大きなガラス基板の場合、多数枚同時に搬送するカセットでは、大重量となって搬送が困難になってきている。また、カセットの腕部でガラス基板の両端を支持するだけでは、ガラス基板に撓みが生じ、搬送上で支障を来すことがある。 Conventionally, a glass substrate used for a liquid crystal display or the like has a box-shaped cassette having a large number of upper and lower arms on which both ends of the substrate are mounted, and is configured to convey a large number of sheets simultaneously (for example, Patent Document 1).
However, recently, along with the increase in the size of liquid crystal displays, glass substrates with large vertical and horizontal dimensions, for example, glass substrates of about 2200 × 2600 × 0.7 (unit mm) have been manufactured. In this case, a cassette that transports a large number of sheets simultaneously becomes heavy and difficult to transport. Further, if the both ends of the glass substrate are only supported by the arm portions of the cassette, the glass substrate may be bent, which may hinder transportation.

そのため、ガラス基板を１枚ずつ載せる枚葉搬送用トレイが採用されつつある。枚葉搬送用トレイは、ガラス基板を載せた状態で積み重ね可能なものであり、複数枚積み重ねた状態で、スタッカークレーン等による搬送が行われる。
各種の処理装置や検査装置へは、段積み状態の枚葉搬送用トレイから１枚ずつトレイを取り出し、トレイごと搬送するか、またはトレイからガラス基板だけを取り出して処理装置等へ搬送する。空になったトレイは、別に載置しておく。
特開２００２−３７３９３４号公報 Therefore, a single-wafer carrying tray on which glass substrates are placed one by one is being adopted. The single wafer transfer tray can be stacked with a glass substrate placed thereon, and is transported by a stacker crane or the like in a stacked state.
To various processing apparatuses and inspection apparatuses, the trays are taken out one by one from the stacked sheet-feeding trays, and the trays are transported together, or only the glass substrate is taken out from the tray and transported to the processing apparatus or the like. Place the empty tray separately.
JP 2002-373934 A

しかし、上記枚葉搬送用トレイでは、板状ワークが載せられていない空の場合でも、板状ワークが載置可能な形態で積み重ねられるため、積み重ね高さが無駄に高くなる。搬送装置による荷姿の搬送高さの制限や、置き場所の高さの制限、安定した積み重ね高さが可能な高さの制限などから、積み重ね高さが高くなると、一群の空の枚葉搬送用トレイを、一度で搬送できなかったり、複数の場所に分けて置くことが必要となる。   However, in the above-described single-wafer carrying tray, even when the plate-like workpiece is not loaded, the stack height is unnecessarily high because the plate-like workpiece is stacked in a form that can be placed. A group of empty single wafers when the stacking height is increased due to restrictions such as the height of the loading state of the package by the transport device, the height of the place where it can be placed, and the height that allows stable stacking height. The trays cannot be transported at one time, or it is necessary to divide the trays in multiple places.

例えば、一群の空の枚葉搬送用トレイを搬送するについて、積み重ね高さが少し低ければ、１回の搬送で済むような場合は、端数のトレイの搬送だけで１回の搬送回数が増え、搬送の効率が悪くなる。また、一群の空の枚葉搬送用トレイを積み重ねて置くについて、積み重ね高さが少し低ければ、１か所の置き場所で済む場合であっても、端数となる１〜２枚の枚葉搬送用トレイを置くだけのために、１か所の置き場所を占有することが必要な場合が生じる。そのため占有床面積が大きくなる。複数の場所に分けて置く場合は、その場所間での枚葉搬送用トレイの移動の手間が増え、搬送のタクトが長くなるという課題も生じる。   For example, when transporting a group of empty single-sheet transport trays, if the stacking height is a little low, if only one transport is required, the number of transports per transport increases by transporting only a fraction of the trays. The efficiency of conveyance deteriorates. Also, when stacking a group of empty sheet feeding trays, if the stacking height is a little low, even if only one place is sufficient, one or two sheets are transported. In some cases, it is necessary to occupy one place only for placing a tray. Therefore, the occupied floor area increases. When the paper is placed in a plurality of places, there is a problem that the trouble of moving the single-sheet transport tray between the places increases and the transport tact time becomes longer.

この発明の目的は、板状ワークが載せられていない空の状態では、コンパクトに積み重ねて搬送や載置が行える枚葉搬送用トレイを提供することである。
この発明の他の目的は、枚葉搬送用トレイを、板状ワークが載せられている場合と空の場合とで異なる態様に積み重ねることができて、空の場合にコンパクトに積み重ねることができる搬送システムを提供することである。 An object of the present invention is to provide a single-wafer transfer tray that can be stacked and transported and placed compactly in an empty state where no plate-like workpiece is placed.
Another object of the present invention is to carry a single-wafer carrying tray that can be stacked in a different manner depending on whether a plate-like workpiece is placed or empty, and can be stacked compactly when empty. Is to provide a system.

この発明の枚葉搬送用トレイは、板状ワークを載せるトレイであって、互いに積み重ねる上方のトレイを載せる受け部として、高さの異なる２種類の受け部を有するものとしている。２種類の受け部は、いずれも上方のトレイを水平に載せることが可能なものとされる。
この構成によると、板状ワークを載せるときは、高い方の受け部の上にトレイを積み重ねることにより、上下のトレイ間に板状ワークの載置空間の高さが確保できる。板状ワークが載せられていない空のトレイを積み重ねるときは、板状ワークの載置空間は不要であり、低い方の受け部の上にトレイを重ねることにより、積み重ね高さが低くなり、コンパクトにトレイを積み重ねて搬送できる。 The single-wafer carrying tray according to the present invention is a tray on which a plate-like workpiece is placed, and has two kinds of receiving portions having different heights as receiving portions on which upper trays to be stacked are placed. Each of the two types of receiving portions is capable of placing the upper tray horizontally.
According to this configuration, when a plate-shaped workpiece is placed, the height of the mounting space for the plate-shaped workpiece can be secured between the upper and lower trays by stacking the tray on the higher receiving portion. When stacking empty trays that are not loaded with plate-shaped workpieces, the mounting space for the plate-shaped workpieces is unnecessary, and stacking height is lowered by stacking the trays on the lower receiving part, making it compact. The trays can be stacked and transported.

この発明の搬送システムは、この発明の枚葉搬送用トレイを使用する搬送システムであって、板状ワークが載置されているトレイは高い方の受け部に積み重ね、板状ワークが載置されていないトレイは低い方の受け部に積み重ねて搬送するようにしたものである。
この構成によると、枚葉搬送用トレイを、板状ワークが載せられている場合と空の場合とで異なる態様に積み重ねることができて、空の場合にコンパクトに積み重ねて搬送できる。また、板状ワークが載せられている場合は、板状ワークの載置空間が上下のトレイ間に確保されるように積み重ねることができる。 The transport system according to the present invention is a transport system using the single-wafer transport tray according to the present invention, wherein the tray on which the plate-like workpiece is placed is stacked on the higher receiving portion, and the plate-like workpiece is placed on the tray. The trays that are not stacked are stacked in the lower receiving section and transported.
According to this configuration, the sheet transport trays can be stacked in different modes depending on whether the plate-like workpiece is placed or empty, and can be transported in a compact manner when empty. Moreover, when the plate-shaped workpiece is placed, the plate-shaped workpiece can be stacked so that a placement space for the plate-shaped workpiece is secured between the upper and lower trays.

この発明の搬送システムにおいて、上に重ねるトレイを水平方向にずらすことにより低い方の受け部に積み重ねる手段を設けても良い。
水平方向にずらすことで積み重ね態様を変更するものとした場合、空のトレイを、板状ワークの載せられたトレイとは別にコンパクトに積み重ねる作業が容易になる。また、搬送システムの構成についても、水平方向にずらす手段があれば良いため、簡易な構成のもので済む。 In the transport system of the present invention, means for stacking on the lower receiving portion may be provided by shifting the tray to be stacked in the horizontal direction.
When the stacking mode is changed by shifting in the horizontal direction, it becomes easy to stack empty trays in a compact manner separately from the tray on which the plate-like workpieces are placed. Further, the configuration of the transport system may be simple because it only needs to have a means for shifting in the horizontal direction.

この発明の搬送システムにおいて、上に重ねるトレイを１８０度水平回転させることにより、低い方の受け部に積み重ねる手段を設けても良い。この構成の場合も、空のトレイをコンパクトに積み重ねる作業が容易になる。   In the transport system of the present invention, means for stacking on the lower receiving portion may be provided by horizontally rotating the tray to be stacked 180 degrees. Also in this configuration, it becomes easy to stack empty trays in a compact manner.

この発明の枚葉搬送用トレイは、板状ワークを載せるトレイであって、互いに積み重ねる上方のトレイを載せる受け部として、高さの異なる２種類の受け部を有するものとしたため、板状ワークが載せられていない空の状態では、コンパクトに積み重ねて搬送したり、載置しておくことができる。
この発明の搬送システムは、この発明の枚葉搬送用トレイを使用する搬送システムであって、板状ワークが載置されているトレイは高い方の受け部に積み重ね、板状ワークが載置されていないトレイは低い方の受け部に積み重ねて搬送するようにしため、枚葉搬送用トレイを、板状ワークが載せられている場合と空の場合とで異なる態様に積み重ねることができ、空の場合にコンパクトに積み重ねて搬送することができる。
上に重ねるトレイを水平方向にずらすことにより低い方の受け部に積み重ねる手段を設けた場合は、簡易な構成で、空の場合に容易にコンパクトに積み重ねることができる。
上に重ねるトレイを１８０度水平回転させることにより、低い方の受け部に積み重ねる手段を設けた場合も、簡易な構成で、空の場合に容易にコンパクトに積み重ねることができる。 The single-wafer carrying tray of the present invention is a tray on which a plate-shaped workpiece is placed, and has two types of receiving portions having different heights as receiving portions on which the upper trays stacked on each other are placed. In an empty state where it is not placed, it can be compactly stacked and transported or placed.
The transport system according to the present invention is a transport system using the single-wafer transport tray according to the present invention, wherein the tray on which the plate-like workpiece is placed is stacked on the higher receiving portion, and the plate-like workpiece is placed on the tray. The trays that are not stacked are stacked and transported in the lower receiving part, so that the single-sheet transport tray can be stacked in a different manner depending on whether the plate-shaped workpiece is placed or empty. In some cases, it can be transported in a compact stack.
In the case where means for stacking on the lower receiving portion is provided by shifting the tray to be stacked in the horizontal direction, the stack can be easily and compactly stacked with a simple configuration.
By horizontally rotating the tray to be stacked 180 degrees, even when a means for stacking on the lower receiving portion is provided, the tray can be easily and compactly stacked with a simple configuration.

この発明の一実施形態を図１ないし図６と共に説明する。図１および図２に斜視図で示すように、この実施形態の枚葉搬送用トレイ１は、液晶ディスプレイのガラス基板等の板状ワークを載せた状態で積み重ね可能なトレイであって、方形板状の底板部２と、この底板部２の互いに対向する平行な２辺の各縁部に沿い等間隔に設けられた複数のトレイ受け部３と、前記底板部２の上面に設けられた複数のワーク受け部４とを有する。ワーク受け部４は、空の場合に上方のトレイを受ける受け部を兼用するものであり、トレイ受け部３よりも低くされている。   An embodiment of the present invention will be described with reference to FIGS. As shown in perspective views in FIGS. 1 and 2, the single-wafer carrying tray 1 of this embodiment is a tray that can be stacked in a state where a plate-like work such as a glass substrate of a liquid crystal display is placed thereon, Shaped bottom plate portion 2, a plurality of tray receiving portions 3 provided at equal intervals along two opposite edges of the bottom plate portion 2, and a plurality of tray receiving portions 3 provided on the upper surface of the bottom plate portion 2. And a workpiece receiving portion 4. The work receiving unit 4 also serves as a receiving unit that receives the upper tray when empty, and is lower than the tray receiving unit 3.

トレイ受け部３は、板状ワークＷの載置状態で互いに積み重ねる上方のトレイを載せる受け部となるものであって、水平断面が方形状の角柱からなり、互いに隣接するトレイ受け部３，３間には１つのトレイ受け部３の幅寸法よりやや広い所定の隙間Ｌが設けられている。各トレイ受け部３の上端には、図１のように円柱状の係合突部５が突設されると共に、下端には図２のように円形の係合凹部６が設けられている。上に載せられるトレイ１におけるトレイ受け部３の係合凹部６に、下のトレイ１における対応するトレイ受け部３の係合突部５が係脱自在に嵌合することで、安定良くトレイ１を積み重ねることが可能とされている。   The tray receiving portion 3 is a receiving portion on which upper trays stacked on each other in a state where the plate-like workpiece W is placed, and is composed of rectangular pillars having a horizontal cross section, which are adjacent to each other. A predetermined gap L slightly wider than the width dimension of one tray receiving portion 3 is provided between them. As shown in FIG. 1, a cylindrical engagement protrusion 5 is provided at the upper end of each tray receiving portion 3, and a circular engagement recess 6 is provided at the lower end as shown in FIG. The engaging projections 5 of the corresponding tray receiving part 3 in the lower tray 1 are detachably fitted into the engaging recesses 6 of the tray receiving part 3 in the tray 1 placed on the upper side, so that the tray 1 can be stably and stably attached. It is possible to stack.

底板部２の上面に設けられた複数のワーク受け部４は、図３のように底板部２の上面から浮き上がらせた状態で板状ワークＷを支持するものである。これらワーク受け部４は、板状ワークＷを撓み無く全面にわたって均等に支持するために、均等に分散して配置されている。すなわち、ワーク受け部４は、トレイ受け部３の並び方向に延びる突条とされ、この並び方向に間隔を開けて複数配置され、かつ上記並び方向と直交する方向にも間隔を明けて複数配置されている。隣合うワーク受け部４の間の隙間は、板状ワークＷを枚葉搬送用トレイ１に対して搬入搬出するフォーク等の手段が進入する隙間となる。
ワーク受け部４の高さは、底板部２の上面からトレイ受け部３の上端までの高さより低く、支持される板状ワークＷが、ワーク受け部４の上端よりも低くなるように設定されている。 The plurality of workpiece receiving portions 4 provided on the upper surface of the bottom plate portion 2 supports the plate-like workpiece W in a state of being lifted from the upper surface of the bottom plate portion 2 as shown in FIG. These workpiece receiving portions 4 are arranged in an evenly distributed manner in order to support the plate-like workpiece W evenly over the entire surface without bending. That is, the workpiece receiving part 4 is a ridge extending in the arrangement direction of the tray receiving part 3, and a plurality of work receiving parts 4 are arranged at intervals in the arrangement direction, and a plurality of arrangements are also provided at intervals in the direction orthogonal to the arrangement direction. Has been. The gap between the adjacent workpiece receiving portions 4 is a gap into which a means such as a fork for carrying the plate-like workpiece W into and out of the single-wafer carrying tray 1 enters.
The height of the workpiece receiving portion 4 is set to be lower than the height from the upper surface of the bottom plate portion 2 to the upper end of the tray receiving portion 3 so that the supported plate-like workpiece W is lower than the upper end of the workpiece receiving portion 4. ing.

図４（Ａ），（Ｂ）は、板状ワークＷを載せた枚葉搬送用トレイ１の積み重ね状態を示す斜視図および正面図である。上記したように、上に載せられるトレイ１におけるトレイ受け部３の下端の係合凹部６に、下のトレイ１における対応するトレイ受け部３の係合突部５を係脱自在に嵌合させることで、下のトレイ１のトレイ受け部３の上に、上のトレイ１のトレイ受け部３が重なって多重にトレイ１が積み重ねられる。また、板状ワークＷを支持するワーク受け部３の高さは、トレイ受け部３の上端よりも低く設定されているので、各トレイ１に載せられた板状ワークＷは上のトレイ１に接触することはない。   4A and 4B are a perspective view and a front view showing the stacked state of the single-wafer carrying tray 1 on which the plate-like workpiece W is placed. As described above, the engaging protrusions 5 of the corresponding tray receiving part 3 in the lower tray 1 are detachably fitted into the engaging recesses 6 at the lower end of the tray receiving part 3 in the tray 1 placed on the upper side. As a result, the tray receiver 3 of the upper tray 1 overlaps the tray receiver 3 of the lower tray 1 and the trays 1 are stacked in multiple layers. Further, since the height of the workpiece receiving portion 3 that supports the plate-like workpiece W is set lower than the upper end of the tray receiving portion 3, the plate-like workpiece W placed on each tray 1 is placed on the upper tray 1. There is no contact.

図５（Ａ），（Ｂ）は、板状ワークＷが載せられていない空の枚葉搬送用トレイ１の積み重ね状態を示す斜視図および正面図である。この場合には、最下段のトレイ１の上に次のトレイ１を重ねるときに、上のトレイ１をトレイ受け部３の幅寸法分だけ水平方向（トレイ受け部３の並び方向）にずらす。これにより、上のトレイ１は、そのトレイ受け部３が下のトレイ１の隣接するトレイ受け部３，３の間に挟まれた状態で、下のトレイ１のワーク受け部４の上に支持される。すなわち、下のトレイ１のワーク受け部４は、上のトレイ１の受け部となって上のトレイ１を直接支持する。   FIGS. 5A and 5B are a perspective view and a front view showing a stacked state of empty sheet transport trays 1 on which plate-like workpieces W are not placed. In this case, when the next tray 1 is stacked on the lowermost tray 1, the upper tray 1 is shifted in the horizontal direction (alignment direction of the tray receiver 3) by the width dimension of the tray receiver 3. Thereby, the upper tray 1 is supported on the work receiving portion 4 of the lower tray 1 with the tray receiving portion 3 being sandwiched between the adjacent tray receiving portions 3 and 3 of the lower tray 1. Is done. That is, the work receiving portion 4 of the lower tray 1 becomes a receiving portion of the upper tray 1 and directly supports the upper tray 1.

以後は、先ず最下段のトレイ１に対して図４の積み重ね方で次のトレイ１を重ね、次に水平にずらしたトレイ１に対して図４の積み重ね方でさらに次のトレイ１を重ねるという手順で、複数のトレイ１が積み重ねられる。これにより、図４の積み重ね方によるトレイ１の積み重ね部と、この積み重ね部よりも若干高い位置で、この積み重ね部からトレイ受け部３の略１つ分水平方向にずらされた位置に図４の積み重ね方によるトレイ１の積み重ね部とが複合した状態に、複数のトレイ１が積み重ねられる。   Thereafter, the next tray 1 is first stacked on the lowermost tray 1 in the stacking manner of FIG. 4, and then the next tray 1 is further stacked on the horizontally shifted tray 1 in the stacking manner of FIG. In the procedure, a plurality of trays 1 are stacked. As a result, the stacking portion of the tray 1 according to the stacking method of FIG. 4 and a position slightly higher than the stacking portion at a position shifted in the horizontal direction from the stacking portion by approximately one tray receiving portion 3 in FIG. A plurality of trays 1 are stacked in a state where the stacked portions of the trays 1 are stacked.

これにより、板状ワークＷが載せられていない空の状態での枚葉搬送用トレイ１をコンパクトに積み重ねることができる。また、下のトレイ１に次のトレイ１を重ねるときに、トレイ１を水平方向にずらすだけで良いので、空のトレイ１をコンパクトに積み重ねる作業を容易に行うことができる。   As a result, the single-wafer carrying tray 1 in an empty state where the plate-like workpiece W is not placed can be stacked in a compact manner. Further, when stacking the next tray 1 on the lower tray 1, it is only necessary to shift the tray 1 in the horizontal direction. Therefore, it is possible to easily stack the empty trays 1 in a compact manner.

図６は、上記枚葉搬送用トレイ１を用いた搬送システムの概略構成を示す。この搬送システム７は、板状ワークＷを載せたトレイ１を積載するワーク載置台８と、空のトレイ１を積載するトレイ載置台９の並び方向に延びて、これら載置台８，９の上方に架設されたレール１０を備え、ガントリ式のものとされている。この搬送システム７は、レール１０に沿って走行する走行台１１を有し、走行台１１には昇降可能な昇降ロッド１２が設けられている。昇降ロッド１２の下端に、トレイ１を水平姿勢で把持するトレイ把持部１３が設けられている。ワーク載置台８およびトレイ載置台９は、いずれも固定の台であっても良く、またトレイ１を積載して搬送する可動の搬送台であっても良い。   FIG. 6 shows a schematic configuration of a transport system using the single-wafer transport tray 1. The transfer system 7 extends in the direction in which the workpiece mounting table 8 on which the tray 1 on which the plate-shaped workpieces W are loaded is loaded and the tray mounting table 9 on which the empty tray 1 is loaded, and above the loading tables 8 and 9. It is provided with a rail 10 installed on the gantry type. The transport system 7 includes a traveling platform 11 that travels along a rail 10, and the traveling platform 11 is provided with a lifting rod 12 that can be moved up and down. A tray gripping portion 13 that grips the tray 1 in a horizontal posture is provided at the lower end of the lifting rod 12. Each of the workpiece mounting table 8 and the tray mounting table 9 may be a fixed table, or may be a movable transfer table on which the tray 1 is loaded and transferred.

この搬送システム７は、走行台１１の走行、昇降ロッド１２の昇降、およびトレイ把持部１３の把持動作を制御手段１４で制御することにより、以下のように動作する。
先ず、板状ワークＷを載せたトレイ１が用意される図示しないローディング位置から、トレイ把持部１３でトレイ１を持ち上げてワーク載置台８の上まで搬送し、このトレイ１をワーク載置台８の上に載せる。この搬送動作を繰り返すことにより、ワーク載置台８の上に図４の積み重ね方でトレイ１を積み重ねる。
次に、ワーク載置台８から上段のトレイ１をトレイ把持部１３で持ち上げ、図示しないワーク処理工程部まで搬送する。この工程部で、トレイ１から板状ワークＷが取り出され、トレイ１は空となる。 The transport system 7 operates as follows by controlling the traveling of the carriage 11, the lifting / lowering of the lifting / lowering rod 12, and the gripping operation of the tray gripping unit 13 by the control means 14.
First, from a loading position (not shown) where the tray 1 on which the plate-like workpiece W is placed is prepared, the tray 1 is lifted by the tray gripping unit 13 and conveyed onto the workpiece mounting table 8. Put it on top. By repeating this transporting operation, the trays 1 are stacked on the workpiece mounting table 8 in the stacking manner shown in FIG.
Next, the upper tray 1 is lifted by the tray gripping unit 13 from the workpiece mounting table 8 and conveyed to a workpiece processing step unit (not shown). In this process section, the plate-like workpiece W is taken out from the tray 1, and the tray 1 becomes empty.

次に、搬送システム７は、空となったトレイ１をトレイ把持部１３で持ち上げてトレイ載置台９の上まで搬送し、空のトレイ１をトレイ載置台９の上に載せる。この搬送動作を繰り返すことにより、トレイ載置台９の上に図５の積み重ね方で空のトレイ１をコンパクトに積み重ねる。これにより、トレイ載置台９は、空のトレイ１をコンパクトに積載した状態で搬送することができる。   Next, the transport system 7 lifts the empty tray 1 with the tray gripping unit 13 and transports it onto the tray mounting table 9, and places the empty tray 1 on the tray mounting table 9. By repeating this transporting operation, the empty trays 1 are stacked in a compact manner on the tray mounting table 9 by the stacking method shown in FIG. As a result, the tray mounting table 9 can carry the empty tray 1 in a compactly stacked state.

図７ないし図１０は他の実施形態を示す。図７に斜視図で示すように、この実施形態の枚葉搬送用トレイ１Ａは、方形板状の底板部２２と、この底板部２２の互いに対向する平行な２辺の縁部に設けられた各一対のトレイ受け部２３とを有する。底板部２２は、板状ワークＷを載せる載置部となり、かつ板状ワークＷが空のときに上方のトレイ１Ａを載せる受け部を兼ねる。
トレイ受け部２３は、板状ワークＷが載せられている場合に、互いに積み重ねる上方のトレイ１Ａを載せる受け部となるものであって、水平断面が方形状の角柱からなる。各トレイ受け部２３には、上端に円柱状の係合突部２５が突設されると共に、下端に円形の係合凹部６が設けられている。トレイ受け部２３の上端は、底板部２２の上面に対して、板状ワークＷの板厚分よりも高く設定されている。 7 to 10 show another embodiment. As shown in a perspective view in FIG. 7, the single-wafer carrying tray 1 </ b> A of this embodiment is provided on a rectangular plate-like bottom plate portion 22 and edges of the two opposite parallel sides of the bottom plate portion 22. And a pair of tray receivers 23. The bottom plate portion 22 serves as a placement portion on which the plate-like workpiece W is placed, and also serves as a receiving portion on which the upper tray 1A is placed when the plate-like workpiece W is empty.
The tray receiving portion 23 is a receiving portion on which the upper tray 1A stacked on top of each other when the plate-like workpiece W is placed, and is formed of a rectangular column with a horizontal section. Each tray receiving portion 23 is provided with a cylindrical engagement protrusion 25 at the upper end and a circular engagement recess 6 at the lower end. The upper end of the tray receiving portion 23 is set higher than the plate thickness of the plate-like workpiece W with respect to the upper surface of the bottom plate portion 22.

底板部２２の一辺縁部の一対のトレイ受け部２３は、底板部２２の一辺縁部の両角部からトレイ受け部２３の１つ分だけ内側に偏って設けられる。これに対して、底板部２２の他辺縁部の一対のトレイ受け部２３は、底板部２２の他辺縁部の両角部に設けられ、それらトレイ受け部２３に隣接する底板部２２の内側の幅寸法Ｌ１は、底板部２２の前記一辺縁部の両トレイ受け部２３の間の幅Ｌ２よりも若干狭く設定されている。   The pair of tray receiving portions 23 at one edge portion of the bottom plate portion 22 is provided so as to be biased inward by one of the tray receiving portions 23 from both corner portions of the one edge portion of the bottom plate portion 22. On the other hand, the pair of tray receiving parts 23 on the other edge of the bottom plate part 22 are provided at both corners of the other edge of the bottom plate part 22, and the inner side of the bottom plate part 22 adjacent to the tray receiving part 23. The width dimension L <b> 1 is set to be slightly narrower than the width L <b> 2 between the tray receiving portions 23 on the one side edge portion of the bottom plate portion 22.

図８は、板状ワークＷを載せたときの前記枚葉搬送用トレイ１Ａの積み重ね状態を示す斜視図である。この実施形態でも、上に載せられるトレイ１Ａにおけるトレイ受け部２３の下端の係合凹部６に、下のトレイ１Ａにおける対応するトレイ受け部２３の係合突部５を係脱自在に嵌合させることで、下のトレイ１Ａのトレイ受け部２３の上に、上のトレイ１Ａのトレイ受け部３が重なって多重にトレイ１Ａが積み重ねられる。また、板状ワークＷを支持する底板部２２の上面は、トレイ受け部２３の上端よりも、板状ワークＷの板厚分以上に低いので、各トレイ１Ａに載せられた板状ワークＷは上のトレイ１Ａに接触することはない。   FIG. 8 is a perspective view showing a stacked state of the single-wafer carrying tray 1A when the plate-like workpiece W is placed. Also in this embodiment, the engaging protrusion 5 of the corresponding tray receiving portion 23 in the lower tray 1A is detachably fitted into the engaging recess 6 at the lower end of the tray receiving portion 23 in the tray 1A placed on the upper side. As a result, the tray receiver 3 of the upper tray 1A overlaps the tray receiver 23 of the lower tray 1A, and the trays 1A are stacked in multiple layers. Further, since the upper surface of the bottom plate portion 22 that supports the plate-like workpiece W is lower than the upper end of the tray receiving portion 23 by the plate thickness of the plate-like workpiece W, the plate-like workpiece W placed on each tray 1A is There is no contact with the upper tray 1A.

図９は、板状ワークＷが載せられていない空の枚葉搬送用トレイ１Ａの積み重ね状態を示す斜視図である。この場合には、下のトレイ１Ａの上に次のトレイ１Ａを重ねるとき、上のトレイ１Ａを１８０度水平回転させる。これにより、上のトレイ１Ａにおける一辺の一対のトレイ受け部２３は下のトレイ１Ａの一対のトレイ受け部２３の内側に配置され、また上のトレイ１Ａにおける他の一辺の一対のトレイ受け部２３は下のトレイ１Ａの一対のトレイ受け部２３の外側に配置されることになり、下のトレイ１Ａの底板部２２に上のトレイ１Ａの底板部２２が重なって多重にトレイ１Ａが積み重ねられる。以後、同様に下のトレイ１Ａに対して上のトレイ１Ａを１８０度水平回転させることで、複数のトレイ１Ａが積み重ねられる。これにより、トレイ１Ａの１段当たりの重ね高さは底板部２２の厚み分となり、板状ワークＷが載せられていない空の状態での枚葉搬送用トレイ１Ａをコンパクトに積み重ねることができる。また、下のトレイ１Ａに次のトレイ１Ａを重ねるとき、トレイ１Ａを１８０度水平回転させるだけで良いので、空のトレイ１Ａをコンパクトに積み重ねる作業を容易に行うことができる。   FIG. 9 is a perspective view showing a stacked state of empty single-wafer carrying trays 1A on which plate-like workpieces W are not placed. In this case, when the next tray 1A is stacked on the lower tray 1A, the upper tray 1A is horizontally rotated by 180 degrees. Accordingly, the pair of tray receiving portions 23 on one side of the upper tray 1A is disposed inside the pair of tray receiving portions 23 of the lower tray 1A, and the pair of tray receiving portions 23 on the other side of the upper tray 1A. Is disposed outside the pair of tray receiving portions 23 of the lower tray 1A, and the bottom plate portion 22 of the upper tray 1A overlaps the bottom plate portion 22 of the lower tray 1A, and the trays 1A are stacked in multiple layers. Thereafter, similarly, the upper tray 1A is horizontally rotated 180 degrees with respect to the lower tray 1A, whereby a plurality of trays 1A are stacked. Thereby, the stacking height per tray of the tray 1A is equal to the thickness of the bottom plate portion 22, and the single-wafer carrying tray 1A in an empty state on which the plate-like workpiece W is not placed can be stacked in a compact manner. In addition, when the next tray 1A is stacked on the lower tray 1A, it is only necessary to horizontally rotate the tray 1A by 180 degrees, so that it is possible to easily stack the empty trays 1A in a compact manner.

図１０は、上記枚葉搬送用トレイ１Ａを用いた搬送システムの概略構成を示す。この搬送システム１７も、図６に示した搬送システム７の場合と同様に、板状ワークＷを載せたトレイ１Ａを積載するワーク載置台８と、空のトレイ１Ａを積載するトレイ載置台９の並び方向に延びて、これら載置台の上方に架設されるレール１０に沿って走行する走行台１１を有するガントリ式のものである。走行台１１には昇降可能な昇降ロッド１２が設けられ、昇降ロッド１２の下端にはトレイ１Ａを水平姿勢で把持するトレイ把持部１３が設けられている。図６の搬送システム７と異なる点は、トレイ把持部１３を１８０度旋回可能としたことである。   FIG. 10 shows a schematic configuration of a transport system using the single-wafer transport tray 1A. As in the case of the transfer system 7 shown in FIG. 6, the transfer system 17 also includes a work table 8 on which the tray 1A on which the plate-like workpieces W are loaded and a tray table 9 on which the empty tray 1A is loaded. It is a gantry type that has a traveling table 11 that extends in the alignment direction and travels along a rail 10 that is installed above the mounting table. The traveling platform 11 is provided with an elevating rod 12 that can be raised and lowered, and a tray gripping portion 13 that holds the tray 1A in a horizontal posture is provided at the lower end of the lifting rod 12. The difference from the transport system 7 in FIG. 6 is that the tray gripping portion 13 can be turned 180 degrees.

前記走行台１１の走行、昇降ロッド１２の昇降、およびトレイ把持部１３の把持動作を制御手段１４Ａで制御することにより、搬送システム１７は以下のように動作する。
先ず、板状ワークＷを載せたトレイ１Ａが用意される図示しないローディング位置から、トレイ把持部１３でトレイ１Ａを持ち上げてワーク載置台８の上まで搬送し、このトレイ１Ａをワーク載置台８の上に載せる。この搬送動作を繰り返すことにより、ワーク載置台８の上に図８の積み重ね方でトレイ１Ａを積み重ねる。
次に、ワーク載置台８から上段のトレイ１Ａをトレイ把持部１３で持ち上げ、図示しないワーク処理工程部まで搬送する。この工程部で、トレイ１Ａから板状ワークＷが取り出され、トレイ１Ａは空となる。 The transport system 17 operates as follows by controlling the travel of the platform 11, the lifting / lowering of the lifting / lowering rod 12, and the gripping operation of the tray gripping portion 13 by the control means 14 </ b> A.
First, from a loading position (not shown) where a tray 1A on which a plate-like workpiece W is placed is prepared, the tray 1A is lifted by the tray gripping unit 13 and conveyed onto the workpiece mounting table 8, and this tray 1A is transferred to the workpiece mounting table 8. Put it on top. By repeating this transporting operation, the trays 1A are stacked on the workpiece mounting table 8 in the stacking manner shown in FIG.
Next, the upper tray 1 </ b> A is lifted from the workpiece mounting table 8 by the tray gripping unit 13 and is transported to a workpiece processing step unit (not shown). In this process section, the plate-like workpiece W is taken out from the tray 1A, and the tray 1A becomes empty.

次に、搬送システム１７は、空となったトレイ１Ａをトレイ把持部１３で持ち上げてトレイ載置台９の上まで搬送し、空のトレイ１Ａをトレイ載置台９の上に載せる。このトレイ１Ａの上に次の空のトレイ１Ａを重ねるときには、トレイ把持部１３を旋回させてトレイ１Ａを１８０度水平回転させる。この搬送動作を繰り返すことにより、トレイ載置台９の上に図９の積み重ね方で空のトレイ１Ａをコンパクトに積み重ねる。これにより、トレイ載置台９は、空のトレイ１Ａをコンパクトに積載した状態で搬送することができる。   Next, the transport system 17 lifts the empty tray 1 </ b> A with the tray gripping unit 13 and transports it onto the tray mounting table 9, and places the empty tray 1 </ b> A on the tray mounting table 9. When the next empty tray 1A is stacked on the tray 1A, the tray gripping portion 13 is rotated to horizontally rotate the tray 1A by 180 degrees. By repeating this transport operation, empty trays 1A are stacked in a compact manner on the tray mounting table 9 by the stacking method shown in FIG. As a result, the tray mounting table 9 can carry the empty tray 1A in a compactly stacked state.

この発明の一実施形態にかかる枚葉搬送用トレイを上側から見た斜視図である。It is the perspective view which looked at the tray for single wafer conveyance concerning one Embodiment of this invention from the upper side. 同トレイを下側から見た斜視図である。It is the perspective view which looked at the tray from the lower side. 同トレイに板状ワークを載せた状態を示す斜視図である。It is a perspective view which shows the state which mounted the plate-shaped workpiece on the tray. （Ａ）は板状ワークを載せたときのトレイの積み重ね状態を示す斜視図、（Ｂ）は同積み重ね状態の正面図である。(A) is a perspective view which shows the stacking state of a tray when a plate-shaped workpiece | work is mounted, (B) is a front view of the same stacking state. （Ａ）は空のトレイの積み重ね状態を示す斜視図、（Ｂ）は同積み重ね状態の正面図である。(A) is a perspective view which shows the stacking state of an empty tray, (B) is a front view of the stacking state. 同トレイを用いた搬送システムの概略図である。It is the schematic of the conveyance system using the tray. この発明の他の実施形態にかかる枚葉搬送用トレイの斜視図である。It is a perspective view of the single-wafer conveyance tray concerning other embodiment of this invention. 同トレイに板状ワークを載せたときのトレイの積み重ね状態を示す斜視図である。It is a perspective view which shows the stacking state of a tray when a plate-shaped workpiece is mounted on the tray. 同トレイが空のときのトレイの積み重ね状態を示す斜視図である。It is a perspective view which shows the stacking state of the tray when the tray is empty. 同トレイを用いた搬送システムの概略図である。It is the schematic of the conveyance system using the tray.

符号の説明Explanation of symbols

１，１Ａ…枚葉搬送用トレイ
２…底板部
３…トレイ受け部
４…ワーク受け部
７，１７…搬送システム
８…ワーク載置台
９…トレイ載置台
１０…レール
１１…走行台 １２…昇降ロッド
１３…トレイ把持部
１４，１４Ａ…制御手段
２２…底板部（受け部）
２３…トレイ受け部 DESCRIPTION OF SYMBOLS 1,1A ... Sheet | seat conveyance tray 2 ... Bottom plate part 3 ... Tray receiving part 4 ... Work receiving part 7, 17 ... Transfer system 8 ... Work mounting base 9 ... Tray mounting base 10 ... Rail 11 ... Traveling base 12 ... Lifting rod 13 ... Tray gripping portion 14, 14A ... control means 22 ... bottom plate portion (receiving portion)
23 ... Tray receiving part

Claims (4)

板状ワークを載せるトレイであって、互いに積み重ねる上方のトレイを載せる受け部として、高さの異なる２種類の受け部を有する枚葉搬送用トレイ。   A single-wafer carrying tray having two kinds of receiving portions having different heights as receiving portions on which a plate-like workpiece is placed and on which an upper tray is stacked. 請求項１記載の枚葉搬送用トレイを使用する搬送システムであって、板状ワークが載置されているトレイは高い方の受け部に積み重ね、板状ワークが載置されていないトレイは低い方の受け部に積み重ねて搬送するようにした枚葉搬送用トレイ搬送システム。   It is a conveyance system which uses the tray for sheet | seat conveyance of Claim 1, Comprising: The tray in which the plate-shaped workpiece is mounted is piled up in a higher receiving part, The tray in which the plate-shaped workpiece is not mounted is low. A single-wafer transport tray transport system that is stacked and transported to the receiving section. 上に重ねるトレイを水平方向にずらすことにより低い方の受け部に積み重ねる手段を設けた請求項２記載の枚葉搬送用トレイ搬送システム。   3. The single wafer transfer tray transfer system according to claim 2, further comprising means for stacking the upper stack on the lower receiving portion by shifting the tray in the horizontal direction. 上に重ねるトレイを１８０度水平回転させることにより、低い方の受け部に積み重ねる手段を設けた請求項２記載の枚葉搬送用トレイ搬送システム。   3. The single wafer transfer tray transfer system according to claim 2, further comprising means for horizontally stacking the upper stack on the lower receiving portion by rotating the tray horizontally by 180 degrees.
JP2004371557A 2004-12-22 2004-12-22 Tray for sheet transfer and transfer system Pending JP2006179687A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065776A2 (en) * 2009-11-27 2011-06-03 주성엔지니어링(주) Tray and substrate processing apparatus using same and method for manufacturing tray
KR20120053155A (en) * 2010-11-17 2012-05-25 주성엔지니어링(주) Tray, substrate processing apparatus using the same, and manufacturing method of tray

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065776A2 (en) * 2009-11-27 2011-06-03 주성엔지니어링(주) Tray and substrate processing apparatus using same and method for manufacturing tray
WO2011065776A3 (en) * 2009-11-27 2011-11-03 주성엔지니어링(주) Tray and substrate processing apparatus using same and method for manufacturing tray
TWI563589B (en) * 2009-11-27 2016-12-21 Jusung Eng Co Ltd Tray, substrate processing apparatus using the same, and manufacturing method of tray
KR20120053155A (en) * 2010-11-17 2012-05-25 주성엔지니어링(주) Tray, substrate processing apparatus using the same, and manufacturing method of tray
KR101691066B1 (en) 2010-11-17 2016-12-29 주성엔지니어링(주) Tray, substrate processing apparatus using the same, and manufacturing method of tray

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