JP2006118878A - Vacuum mass measuring device - Google Patents

Vacuum mass measuring device Download PDF

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JP2006118878A
JP2006118878A JP2004304402A JP2004304402A JP2006118878A JP 2006118878 A JP2006118878 A JP 2006118878A JP 2004304402 A JP2004304402 A JP 2004304402A JP 2004304402 A JP2004304402 A JP 2004304402A JP 2006118878 A JP2006118878 A JP 2006118878A
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weighing
vacuum
mass measuring
electronic balance
measurement
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JP4729655B2 (en
JP2006118878A5 (en
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Tetsuya Abe
哲也 阿部
Kozo Terunuma
孝造 照沼
Tomio Kotake
富雄 小竹
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Japan Atomic Energy Agency
Shinko Denshi Co Ltd
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Japan Atomic Energy Research Institute
Shinko Denshi Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To compensate the fluctuation of performance of a weighing means by making calibration of the weighing means possible while weighing process. <P>SOLUTION: After the lid 3 of the vacuum vessel 1 is opened, and the sample vessel 2 storing the measuring object M is mounted on the weighing dish 18, the vacuum vessel 1 is evacuated then the measurement is started. The weight of the object M is detected by the electronic balance 10 and its numeric value is displayed on the control display part 11. The electronic balance 10 must be calibrated frequently during the weighing process because of its inevitable influence of temperature of the measuring object M of high temperature. For the calibration the measurement is temporary stopped, and by remotely moving the cam 22 by the motor 21 the cylinder part 14 is raised by moving the lever 20 for supporting the weighing dish 18 by the flange 15 of the upper end of the cylinder part 14. By the elevation of the weighing dish 18, the weight transition rod 17 is separated into upper part 17a and lower part 17b in that condition the zero point adjustment can be performed. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、真空状態において質量測定を行い、秤量過程で校正を行い得る真空質量測定装置に関するものである。   The present invention relates to a vacuum mass measuring apparatus capable of performing mass measurement in a vacuum state and performing calibration in a weighing process.

環境の悪い条件で、微小な荷重変化などを精度良く測定することは極めて難しい。   It is extremely difficult to accurately measure minute load changes under adverse environmental conditions.

例えば、真空中において高温の溶融金属から放出されるガス量を時間単位で電子天びんを用いて質量変化として測定をしなければならない場合がある。しかし、電子天びんに対する熱影響等によりその特性が変化し、精度の良い測定が困難な場合が多い。   For example, the amount of gas released from a hot molten metal in a vacuum may have to be measured as a change in mass using an electronic balance in time units. However, the characteristics of the electronic balance change due to thermal effects, etc., and it is often difficult to measure with high accuracy.

また、そのために頻繁な校正が必要となるが、真空中での校正操作を必要とし、なかなか困難である。   In addition, frequent calibration is required for this purpose, but calibration is required in a vacuum, which is difficult.

本発明の目的は、上述の問題点を解消し、秤量過程中に秤量手段の校正を可能とし、秤量手段の特性変化を補償することができる真空質量測定装置を提供することにある。   An object of the present invention is to provide a vacuum mass measuring apparatus that eliminates the above-mentioned problems, enables calibration of the weighing means during the weighing process, and can compensate for changes in the characteristics of the weighing means.

上記目的を達成するための本発明に係る真空質量測定装置は、真空容器中に秤量手段を設け、該秤量手段は前記真空容器中に配置した計量皿を荷重伝達棒を介して支持し、秤量過程において遠隔的に前記計量皿を前記秤量手段から分離する手段を設けたことを特徴とすることにある。   In order to achieve the above object, a vacuum mass measuring apparatus according to the present invention is provided with weighing means in a vacuum vessel, and the weighing means supports a weighing pan placed in the vacuum vessel via a load transmission rod, In the process, means for remotely separating the weighing pan from the weighing means is provided.

本発明に係る真空質量測定装置によれば、秤量の過程で秤量手段を任意に校正できるので秤量手段の精度を維持できる。   According to the vacuum mass measuring apparatus of the present invention, the weighing means can be arbitrarily calibrated during the weighing process, so that the accuracy of the weighing means can be maintained.

本発明を図示の実施例に基づいて詳細に説明する。
図１は構成図であり、真空容器１の上部には試料容器２に入れた被計量物Ｍを出し入れするための開閉可能な蓋部３が設けられており、真空容器１には内部にガスを注入し或いはガスを吸引するためのボンベ或いは吸引ポンプに接続された配管４、５が配設され、配管の途中には開閉弁６、７が設けられている。 The present invention will be described in detail based on the illustrated embodiments.
FIG. 1 is a block diagram, and an openable and closable lid 3 is provided at the top of the vacuum vessel 1 for taking in and out an object M put in a sample vessel 2. Pipes 4 and 5 connected to cylinders or suction pumps for injecting gas or sucking gas are provided, and on-off valves 6 and 7 are provided in the middle of the pipes.

真空容器１の下部には、断熱材を取り付けた熱遮蔽箱８が配置され、この熱遮蔽箱８内の中間には仕切板９が水平に設けられ、この仕切板９の下方の空間内は密閉されており、この空間内に精密電子天びん１０が配置されている。この電子天びん１０の出力は、真空容器１の外部に配置された制御表示部１１に電線１２を介して接続されている。   A heat shielding box 8 fitted with a heat insulating material is arranged at the lower part of the vacuum vessel 1, and a partition plate 9 is provided horizontally in the middle of the heat shielding box 8. The precision electronic balance 10 is arranged in this space. The output of the electronic balance 10 is connected to a control display unit 11 disposed outside the vacuum vessel 1 via an electric wire 12.

熱遮蔽箱８の上部には円形の開口１３が設けられ、この開口１３に円筒状の筒部１４が上下に摺動自在に挿通されている。筒部１４の上端にはフランジ１５が設けられ、筒部１４はこのフランジ１５を介して開口１３の上縁に吊り下げられている。   A circular opening 13 is provided in the upper part of the heat shielding box 8, and a cylindrical tube portion 14 is inserted into the opening 13 so as to be slidable up and down. A flange 15 is provided at the upper end of the cylindrical portion 14, and the cylindrical portion 14 is suspended from the upper edge of the opening 13 via the flange 15.

一方、電子天びん１０の上部から上方に向けて、非磁性体から成る荷重伝達棒１７が設けられており、この荷重伝達棒１７は、仕切板９に設けた孔部１６及び筒部１４に接触することなく挿通されており、荷重伝達棒１７の上端には計量皿１８が取り付けられている。   On the other hand, a load transmission rod 17 made of a non-magnetic material is provided upward from the top of the electronic balance 10, and this load transmission rod 17 contacts the hole 16 and the cylinder portion 14 provided in the partition plate 9. The weighing pan 18 is attached to the upper end of the load transmission rod 17.

荷重伝達棒１７は中間部において、突き当て構造により上部１７ａと下部１７ｂに分離可能とされている。また、筒部１４の一部には、支点１９を中心に回動自在のレバー２０の一端が取り付けられ、レバー２０の他端にはモータ２１により駆動されるカム２２が取り付けられている。なお、支点１９、モータ２１は熱遮蔽箱８内の図示しないフレームに固定され、制御表示部１１による指令により作動するようにされている。   The load transmission rod 17 is separable into an upper portion 17a and a lower portion 17b by an abutting structure at an intermediate portion. One end of a lever 20 that is rotatable about a fulcrum 19 is attached to a part of the cylindrical portion 14, and a cam 22 that is driven by a motor 21 is attached to the other end of the lever 20. The fulcrum 19 and the motor 21 are fixed to a frame (not shown) in the heat shielding box 8 and are operated by a command from the control display unit 11.

また図２に示すように、孔部１６の周囲には円環状に磁力発生部２３が設けられ、その内側の空間部は孔部１６とほぼ連通されている。磁力発生部２３においては、磁性体２４により円環状の永久磁石２５が覆われており、更に永久磁石２５が内面に露出しないように環状の非磁性体２６が内面に取り付けられている。そして、非磁性体２６内の空間部には磁性流体２７が充填されており、磁性流体２７は永久磁石２５と磁性体２４により形成される磁気回路における磁束による磁気作用により、空間部内に吸着保持されている。   As shown in FIG. 2, an annular magnetic force generator 23 is provided around the hole 16, and the inner space of the hole 16 is substantially in communication with the hole 16. In the magnetic force generator 23, an annular permanent magnet 25 is covered with a magnetic body 24, and an annular non-magnetic body 26 is attached to the inner surface so that the permanent magnet 25 is not exposed on the inner surface. The space in the non-magnetic material 26 is filled with a magnetic fluid 27, and the magnetic fluid 27 is attracted and held in the space by the magnetic action of the magnetic flux in the magnetic circuit formed by the permanent magnet 25 and the magnetic material 24. Has been.

荷重伝達棒１７は磁性流体２７の中を非磁性体２６に接触することなく貫通しており、荷重伝達棒１７の径は例えば５〜１０ｍｍとされ、非磁性体２６の内径との間隔は０．５ｍｍ程度とされている。このように、上下に仕切板９によって分離された熱遮蔽箱８内の環境雰囲気は、仕切板９に孔部１６があっても、磁性流体２７により気密に隔絶されることになる。   The load transmission rod 17 penetrates through the magnetic fluid 27 without contacting the non-magnetic body 26. The diameter of the load transmission rod 17 is, for example, 5 to 10 mm, and the distance from the inner diameter of the non-magnetic body 26 is 0. About 5 mm. As described above, the environmental atmosphere in the heat shielding box 8 separated by the partition plate 9 from above and below is hermetically isolated by the magnetic fluid 27 even if the hole 16 is provided in the partition plate 9.

測定中においては、筒部１４はフランジ１５により熱遮蔽箱８の開口１３に吊り下げられ、計量皿１８は荷重伝達棒１７に支持されている。計量皿１８上に例えば熱絶縁用セラミック２７を介して、耐熱性の試料容器２に入れた高温の溶融金属から成る被計量物Ｍを載置することにより、電子天びん１０により真空中の被計量物Ｍから放出されるガス量を秤量によって測定できる。   During the measurement, the cylindrical portion 14 is suspended from the opening 13 of the heat shielding box 8 by the flange 15, and the weighing pan 18 is supported by the load transmission rod 17. A weighing object M made of high-temperature molten metal placed in a heat-resistant sample container 2 is placed on the weighing pan 18 by way of, for example, a thermal insulating ceramic 27, so that the weighing is performed in a vacuum by the electronic balance 10. The amount of gas released from the object M can be measured by weighing.

即ち、開閉弁６、７を操作して真空容器１内のガスを排出してから測定を始めると、被計量物Ｍの重量は電子天びん１０により検出され、制御表示部１１にその数値が表示される。   That is, when the measurement is started after the on-off valves 6 and 7 are operated and the gas in the vacuum container 1 is discharged, the weight of the object M is detected by the electronic balance 10 and the numerical value is displayed on the control display unit 11. Is done.

このとき、真空中に被計量物Ｍからガスが放出されるので、被計量物Ｍの秤量値は徐々に減少してゆき、放出されるガスの重量を測定することができる。しかし、この測定において電子天びん１０の精度、感度は特に高度に要求され、電子天びん１０は熱遮蔽箱８内に収納されているとはいえ、真空容器１内の高温の被計量物Ｍによる温度影響による測定値の特性変化は避けられない。そのために、秤量過程においても電子天びん１０の校正、つまり零点調整を頻繁に行う必要がある。   At this time, since the gas is released from the object to be weighed in the vacuum, the measured value of the object to be weighed M gradually decreases, and the weight of the released gas can be measured. However, in this measurement, the accuracy and sensitivity of the electronic balance 10 are required to be particularly high. Although the electronic balance 10 is housed in the heat shielding box 8, the temperature due to the high-temperature weighing object M in the vacuum vessel 1 is measured. Changes in the characteristics of measured values due to effects are inevitable. Therefore, it is necessary to frequently calibrate the electronic balance 10, that is, to adjust the zero point even in the weighing process.

秤量過程における校正は、一時的に測定を中止して、荷重を零とし零点を調整する。即ち、図３に示すように、制御表示部１１を介して遠隔的にモータ２１によりカム２２を回動することによって、レバー２０を動かし筒部１４を上昇させ、筒部１４の上端のフランジ１５により計量皿１８を上昇させて支持する。この計量皿１８の上昇により、荷重伝達棒１７は中間部において上部１７ａと下部１７ｂに分離され、電子天びん１０には計量皿１８を含めた上方の荷重が伝達されないので、その状態で制御表示部１１によって零点調整による校正を行うことが可能となる。   In the calibration in the weighing process, the measurement is temporarily stopped, the load is set to zero, and the zero point is adjusted. That is, as shown in FIG. 3, the cam 22 is rotated by the motor 21 remotely via the control display unit 11, thereby moving the lever 20 and raising the cylinder part 14, and the flange 15 at the upper end of the cylinder part 14. Thus, the weighing pan 18 is raised and supported. As the weighing pan 18 rises, the load transmission rod 17 is separated into an upper portion 17a and a lower portion 17b at the intermediate portion, and the upper load including the weighing pan 18 is not transmitted to the electronic balance 10, so that the control display portion is in that state. 11 enables calibration by zero point adjustment.

この校正は秤量過程において頻繁に行うことができるので、たとえ測定中に温度変化などによる零点が変動しても、この零点変動を補償し正確な測定が可能となる。   Since this calibration can be frequently performed in the weighing process, even if the zero point fluctuates due to a temperature change or the like during the measurement, the zero point fluctuation is compensated and accurate measurement can be performed.

また、仕切板９の孔部１６を気密に閉塞するための磁性流体２７を用いることにより、電子天びん１０と被計量物Ｍとの環境条件を分離した状態で測定を行うことができる。特に、電子天びん１０を配置した空間部は真空引きがなされないので、その分だけ真空容器１内を排気する時間や、ガスを充填した場合のガス量が少なくて済む。   Further, by using the magnetic fluid 27 for hermetically closing the hole 16 of the partition plate 9, the measurement can be performed in a state where the environmental conditions of the electronic balance 10 and the object to be weighed M are separated. In particular, since the space where the electronic balance 10 is arranged is not evacuated, the time required for evacuating the vacuum container 1 and the amount of gas when filled with gas can be reduced.

なお、荷重伝達棒１７は非磁性体であるので、荷重伝達棒１７自体が磁力の影響を受けることはない。しかし厳密には、磁性流体２７が荷重伝達棒１７に及ぼす表面張力は測定精度に影響を与えることになる。しかし、測定すべき荷重の分解能よりも十分に小さな値の表面張力になるように、磁性流体２７の保持条件を設定すれば必要な精度を確保することができる。   Since the load transmission rod 17 is a non-magnetic material, the load transmission rod 17 itself is not affected by the magnetic force. However, strictly speaking, the surface tension exerted by the magnetic fluid 27 on the load transmitting rod 17 affects the measurement accuracy. However, if the holding conditions for the magnetic fluid 27 are set so that the surface tension is sufficiently smaller than the resolution of the load to be measured, the required accuracy can be ensured.

実施例の構成図である。It is a block diagram of an Example. 磁性流体による気密手段の構成図である。It is a block diagram of the airtight means by a magnetic fluid. 校正時の説明図である。It is explanatory drawing at the time of calibration.

符号の説明Explanation of symbols

１ 真空容器
８ 熱遮蔽箱
９ 仕切板
１０ 電子天びん
１１ 制御表示部
１３ 開口
１４ 筒部
１５ フランジ
１６ 孔部
１７ 荷重伝達棒
１８ 計量皿
１９ 支点
２０ レバー
２１ モータ
２２ カム
２７ 磁性流体 DESCRIPTION OF SYMBOLS 1 Vacuum container 8 Heat shielding box 9 Partition plate 10 Electronic balance 11 Control display part 13 Opening 14 Cylinder part 15 Flange 16 Hole part 17 Load transmission rod 18 Weighing pan 19 Supporting point 20 Lever 21 Motor 22 Cam 27 Magnetic fluid

Claims (5)

真空容器中に秤量手段を設け、該秤量手段は前記真空容器中に配置した計量皿を荷重伝達棒を介して支持し、秤量過程において遠隔的に前記計量皿を前記秤量手段から分離する手段を設けたことを特徴とする真空質量測定装置。   Weighing means is provided in the vacuum container, the weighing means supports a weighing dish arranged in the vacuum container via a load transmission rod, and means for remotely separating the weighing dish from the weighing means in the weighing process. A vacuum mass measuring device provided. 前記計量皿を前記秤量手段から分離した状態において、前記秤量手段を校正するようにした請求項１に記載の真空質量測定装置。   2. The vacuum mass measuring apparatus according to claim 1, wherein the weighing means is calibrated in a state where the weighing pan is separated from the weighing means. 前記分離手段は前記荷重伝達棒を２つの部材から構成し、両部材を上下に分離するようにした請求項２に記載の真空質量測定装置。   The vacuum mass measuring apparatus according to claim 2, wherein the separating means comprises the load transmission rod made of two members, and both members are separated vertically. 前記荷重伝達棒の前記計量皿を固定した上部を、機械的手段により持ち上げ前記秤量手段から分離するようにした請求項３に記載の真空質量測定装置。   4. The vacuum mass measuring apparatus according to claim 3, wherein an upper portion of the load transmitting rod to which the weighing pan is fixed is lifted by a mechanical means and separated from the weighing means. 前記秤量手段を配置した空間部は、前記計量皿を配置した空間部とは磁性流体により気密に隔絶した請求項１に記載の真空質量測定装置。   The vacuum mass measuring device according to claim 1, wherein the space portion in which the weighing means is arranged is hermetically isolated from the space portion in which the weighing pan is arranged by a magnetic fluid.
JP2004304402A 2004-10-19 2004-10-19 Vacuum mass measuring device Active JP4729655B2 (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008196919A (en) * 2007-02-09 2008-08-28 Japan Atomic Energy Agency Apparatus for measuring weight of molten metal
KR101575059B1 (en) 2014-08-13 2015-12-08 대모 엔지니어링 주식회사 Spring and compressed gas type breaker
KR20170037827A (en) * 2015-09-28 2017-04-05 가부시끼가이샤 다쓰노 Collection device for a gas filling apparatus
JP2018096847A (en) * 2016-12-13 2018-06-21 株式会社堀場エステック Rate calculation system and method for calculating flow rate
JP2020008309A (en) * 2018-07-03 2020-01-16 レンゴー株式会社 Moisture content continuous measuring method and moisture content continuous measuring device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636323U (en) * 1986-06-25 1988-01-16
JPH0333622A (en) * 1989-06-30 1991-02-13 Japan Tobacco Inc Calibration mechanism of electronic weighing apparatus
JPH04295726A (en) * 1991-03-25 1992-10-20 Shimadzu Corp Electronic balance
JP2004028856A (en) * 2002-06-27 2004-01-29 Japan Atom Energy Res Inst Device for measuring and testing load

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS636323U (en) * 1986-06-25 1988-01-16
JPH0333622A (en) * 1989-06-30 1991-02-13 Japan Tobacco Inc Calibration mechanism of electronic weighing apparatus
JPH04295726A (en) * 1991-03-25 1992-10-20 Shimadzu Corp Electronic balance
JP2004028856A (en) * 2002-06-27 2004-01-29 Japan Atom Energy Res Inst Device for measuring and testing load

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008196919A (en) * 2007-02-09 2008-08-28 Japan Atomic Energy Agency Apparatus for measuring weight of molten metal
KR101575059B1 (en) 2014-08-13 2015-12-08 대모 엔지니어링 주식회사 Spring and compressed gas type breaker
KR20170037827A (en) * 2015-09-28 2017-04-05 가부시끼가이샤 다쓰노 Collection device for a gas filling apparatus
KR101881777B1 (en) * 2015-09-28 2018-07-26 가부시끼가이샤 다쓰노 Collection device for a gas filling apparatus
JP2018096847A (en) * 2016-12-13 2018-06-21 株式会社堀場エステック Rate calculation system and method for calculating flow rate
JP2020008309A (en) * 2018-07-03 2020-01-16 レンゴー株式会社 Moisture content continuous measuring method and moisture content continuous measuring device

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