JP2006025576A - Two-dimensional type piezoelectric vibration detection and suppression device - Google Patents

Two-dimensional type piezoelectric vibration detection and suppression device Download PDF

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JP2006025576A
JP2006025576A JP2004203717A JP2004203717A JP2006025576A JP 2006025576 A JP2006025576 A JP 2006025576A JP 2004203717 A JP2004203717 A JP 2004203717A JP 2004203717 A JP2004203717 A JP 2004203717A JP 2006025576 A JP2006025576 A JP 2006025576A
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piezoelectric
dimensional
vibration detection
band
suppression device
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Akira Matsumoto
亮 松本
Makoto Funahashi
眞 舟橋
Hiroshi Fujito
宏 藤戸
Katsunobu Mitsune
勝信 三根
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Toyota Motor Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a two-dimensional type piezoelectric vibration detection and suppression device capable of accommodating one point of the vibration of an object in a two-dimensional form, in view of the fact that the vibration of a body or the transmission of an automobile is largely in a multidimensional form. <P>SOLUTION: This two-dimensional type piezoelectric vibration detection and suppression device includes first and second band-shaped piezoelectric bodies arranged so as to be mounted on the surface of the object of which the vibration should be detected or controlled. The first and the second band-shaped piezoelectric bodies are overlapped crossing each other in the center thereof in the longitudinal direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、圧電素子により物体の振動を検出し或は抑制する圧電式振動検出／抑制装置に係る。   The present invention relates to a piezoelectric vibration detection / suppression device that detects or suppresses vibration of an object by a piezoelectric element.

圧電材の板やブロックが伸縮力をかけられるとその対向面間に電位差を生じ、また逆にその対向面間に電位差をかけられると伸縮しようとすることを利用して、圧電素子を自動車の車体やトランスミッション等の振動が問題となる物体の表面に取り付け、これに一対の電極を付加して該物体の振動を電気的に検出し、或いは該物体の振動を電気的に抑制することが種々考えられてきたが、更に圧電材をファイバ状に形成し、圧電性ファイバにより人体等の柔らかな対象物や凹凸のある物体の動きを圧電式に検出し或は逆にこれらの対象物に対し圧電式に作用するアクチュエータを構成することが、下記の特許文献１に記載されている。また下記の特許文献２には、圧電性ファイバとして有用ないくつかの材料が提案されている。
特開２００２-２０３９９６号公報 特開２００３-３２８２６６号公報 When a piezoelectric plate or block is subjected to expansion / contraction force, a potential difference is generated between the opposing surfaces, and conversely, when a potential difference is applied between the opposing surfaces, the piezoelectric element is made to expand and contract. It is attached to the surface of an object in which vibration such as a vehicle body or a transmission is a problem, and a pair of electrodes is added to this to electrically detect the vibration of the object, or to electrically suppress the vibration of the object. Although it has been considered, the piezoelectric material is further formed into a fiber shape, and the movement of a soft object such as a human body or an uneven object is detected piezoelectrically by the piezoelectric fiber, or vice versa. The construction of an actuator acting in a piezoelectric manner is described in Patent Document 1 below. In Patent Document 2 below, several materials useful as piezoelectric fibers are proposed.
JP 2002-203996 A JP 2003-328266 A

上記の特許文献１には、人体等の柔らかな対象物や凹凸のある物体に関して圧電式の変位検出や加力を行うべく、圧電性ファイバを縦横に織り合わせて織布状の圧電式変位センサやアクチュエータを構成することが記載されている。圧電性ファイバを織布状に織り合わせれば、確かに柔軟な対象物や凹凸のある物体に適用されるに適した圧電式変位センサやアクチュエータが得られるが、そのような圧電式変位センサやアクチュエータは、柔軟のあまり対象物の振動を捉えることはできず、また対象物に対し振動的に力を付与することはできない。   In the above-mentioned Patent Document 1, in order to detect and apply a piezoelectric displacement to a soft object such as a human body or an uneven object, a woven cloth-like piezoelectric displacement sensor is formed by weaving piezoelectric fibers vertically and horizontally. And constituting an actuator. Weaving piezoelectric fibers into a woven fabric will surely provide piezoelectric displacement sensors and actuators suitable for application to flexible objects and uneven objects, but such piezoelectric displacement sensors and actuators can be obtained. Is not so flexible that it cannot capture the vibration of the object and cannot apply vibrational force to the object.

一方、自動車その他の機械或は電気装置の分野に於けるこれまでの圧電式振動検出／抑制装置は、圧電機能が電位差との関係に於いて一方向性を有するものであったことから、専ら一次元的な動きに関する装置として取り扱われてきた。しかし、自動車の車体やトランスミッション等の振動は多分に多次元的であり、これらの対象物の振動に対しより的確に対処するには、問題となる一点に於ける振動を多次元的に捉えることが望まれる。   On the other hand, the conventional piezoelectric vibration detection / suppression devices in the field of automobiles and other machines or electrical devices are exclusively because the piezoelectric function has a unidirectional relationship with the potential difference. It has been treated as a device for one-dimensional movement. However, the vibrations of automobile bodies, transmissions, etc. are quite multidimensional, and in order to deal with the vibrations of these objects more accurately, the vibrations at one point in question are captured multidimensionally. Is desired.

本発明は、上記の観点に立ち、対象物の振動に対し一点に於いて一先ず２次元的に対処することのできる２次元型圧電式振動検出／抑制装置を提供することを課題としている。   An object of the present invention is to provide a two-dimensional piezoelectric vibration detection / suppression device that can deal with the vibration of an object two-dimensionally at a single point with respect to the vibration of an object.

上記の課題を解決するものとして、本発明は、振動が検出されまたは抑制されるべき物体の表面に取り付けられるよう配列された第一および第二の帯状圧電体を備え、前記第一および第二の群の帯状圧電体はそれらの長手方向中央部にて互いに交差して重ね合わされていることを特徴とする２次元型圧電式振動検出／抑制装置を提案するものである。   In order to solve the above-mentioned problems, the present invention includes first and second band-shaped piezoelectric bodies arranged so as to be attached to the surface of an object whose vibration is to be detected or suppressed. This group proposes a two-dimensional piezoelectric vibration detecting / suppressing device characterized in that the belt-like piezoelectric bodies of the group are crossed and overlapped with each other at their longitudinal central portions.

前記第一の帯状圧電体は前記物体の表面に沿って一層に配列された複数の圧電材ファイバと電極とを含んでいてよい。前記第二の帯状圧電体はその長手方向両端部にて前記物体の表面に沿って一層に配列された複数の圧電材ファイバと電極とを含んでいてよい。   The first band-shaped piezoelectric body may include a plurality of piezoelectric material fibers and electrodes arranged in a single layer along the surface of the object. The second band-shaped piezoelectric body may include a plurality of piezoelectric material fibers and electrodes arranged in a single layer along the surface of the object at both longitudinal ends thereof.

前記圧電材ファイバに対する前記電極の片方は前記圧電材ファイバの導電性芯線であってよい。また、前記圧電材ファイバに対する前記電極の片方は前記圧電材ファイバの導電性外皮であってよい。或はまた、前記圧電材ファイバに対する前記電極の片方は前記圧電材ファイバの外面に押し当てられた導電性板体であってもよい。   One of the electrodes with respect to the piezoelectric material fiber may be a conductive core wire of the piezoelectric material fiber. Further, one of the electrodes with respect to the piezoelectric material fiber may be a conductive sheath of the piezoelectric material fiber. Alternatively, one of the electrodes with respect to the piezoelectric material fiber may be a conductive plate pressed against the outer surface of the piezoelectric material fiber.

或はまた、前記第一の帯状圧電体は前記物体の表面に沿って配置された圧電材帯板と電極とを含んでいてよい。また、前記第二の帯状圧電体はその長手方向両端部にて前記物体の表面に沿って配置された圧電材帯板と電極とを含んでいてよい。   Alternatively, the first band-shaped piezoelectric body may include a piezoelectric material band plate and an electrode disposed along the surface of the object. The second band-shaped piezoelectric body may include a piezoelectric material band plate and electrodes arranged along the surface of the object at both ends in the longitudinal direction.

上記いずれの場合にも、前記の交差は直交であってよい。   In any of the above cases, the intersection may be orthogonal.

上記の如く、振動が検出されまたは抑制されるべき物体の表面に取り付けられるよう配列された第一および第二の帯状圧電体が設けられ、前記第一および第二の帯状圧電体がそれらの長手方向中央部にて互いに交差して重ね合わされていれば、第一および第二の帯状圧電体が交差して重ね合わされている箇所を一点として、第一の帯状圧電体により該一点に於ける或る所望の第一の方向に於ける物体表面の伸縮を検出し或は抑制し、同時に第二の帯状圧電体により該一点に於ける或る所望の第二の方向に於ける物体表面の伸縮を検出し或は抑制し、これらを合わせて一点に於ける物体表面の伸縮を２次元的に捉えた検出或は抑制を行うことができる。この場合、第一および第二の帯状圧電体はそれぞれ第一および第二の方向に於ける物体表面の伸縮に緩衝的弛みを生ずることなく対応できるので、物体表面の伸縮が急速に繰り返される振動であるときにもそれに対応でき、２次元型圧電式振動検出／抑制装置として作動することができる。   As described above, there are provided first and second strip piezoelectric elements arranged to be attached to the surface of an object whose vibration is to be detected or suppressed, and the first and second strip piezoelectric bodies are arranged in their longitudinal direction. If the first and second belt-like piezoelectric bodies intersect and overlap each other at the central portion in the direction, the point where the first and second belt-like piezoelectric bodies intersect and overlap is taken as one point. Detecting or suppressing the expansion and contraction of the object surface in the desired first direction, and at the same time the expansion and contraction of the object surface in the desired second direction at the one point by the second band-shaped piezoelectric body Can be detected or suppressed, and these can be combined to detect or suppress the expansion and contraction of the object surface at one point in two dimensions. In this case, the first and second band-shaped piezoelectric bodies can cope with the expansion and contraction of the object surface in the first and second directions, respectively, without causing buffering slack. Therefore, the two-dimensional piezoelectric vibration detecting / suppressing device can be operated.

前記第一の帯状圧電体が物体の表面に沿って一層に配列された圧電材ファイバと電極とを含んでいれば、物体の表面が３次元的に湾曲していても、該第一の帯状圧電体をなす圧電材ファイバは、いずれも物体表面に直に沿って延在するので、その伸縮は物体表面の伸縮に高度に正確に対応し、第一の帯状圧電体をなす圧電材ファイバの延在方向に於ける物体表面の伸縮を高精度に検出しまたは物体表面に高精度にて伸縮力を及ぼすことかできる。またそのような圧電材ファイバを第一の帯状圧電体として複数個用いることにより、第一の圧電材ファイバ群の延在方向に於ける物体表面の伸縮の検出値または物体表面に付与する伸縮力の大きさを、ファイバ数に応じて高めることができる。   If the first band-shaped piezoelectric body includes piezoelectric material fibers and electrodes arranged in a single layer along the surface of the object, the first band-shaped piezoelectric element can be used even if the surface of the object is curved three-dimensionally. Since all of the piezoelectric material fibers forming the piezoelectric body extend directly along the surface of the object, the expansion and contraction thereof corresponds to the expansion and contraction of the surface of the object with high accuracy, and the piezoelectric material fiber forming the first band-shaped piezoelectric body. It is possible to detect the expansion / contraction of the object surface in the extending direction with high accuracy or to apply the expansion / contraction force to the object surface with high accuracy. Further, by using a plurality of such piezoelectric material fibers as the first band-shaped piezoelectric body, the detection value of the expansion and contraction of the object surface in the extending direction of the first piezoelectric material fiber group or the stretching force applied to the object surface Can be increased according to the number of fibers.

前記第二の帯状圧電体がその長手方向両端部にて前記物体の表面に沿って一層に配列された圧電材ファイバと電極とを含んでいれば、物体の表面が３次元的に湾曲していても、また第二の帯状圧電体が長手方向中央部にて第一の帯状圧電体上に重ね合わされていても、第二の帯状圧電体をなす圧電材ファイバは、いずれもその長手方向両端部にては、物体表面に直に沿って延在するので、その両端部間の伸縮は物体表面の伸縮に高度に正確に対応し、第二の圧電材ファイバ群の延在方向に於ける物体表面の伸縮を高精度に検出しまたは物体表面に高精度にて伸縮力を及ぼすことかできる。また、この場合にも、そのような圧電材ファイバを第二の帯状圧電体として複数個用いることにより、第二の圧電材ファイバ群の延在方向に於ける物体表面の伸縮の検出値または物体表面に付与する伸縮力の大きさをファイバ数に応じて高めることができる。   If the second band-shaped piezoelectric body includes piezoelectric material fibers and electrodes arranged in one layer along the surface of the object at both longitudinal ends thereof, the surface of the object is curved in a three-dimensional manner. Even if the second band-shaped piezoelectric body is superposed on the first band-shaped piezoelectric body at the longitudinal center portion, the piezoelectric material fibers constituting the second band-shaped piezoelectric body are both ends in the longitudinal direction. Since the portion extends directly along the object surface, the expansion / contraction between both ends corresponds to the expansion / contraction of the object surface with high accuracy and in the extending direction of the second piezoelectric fiber group. It is possible to detect the expansion / contraction of the object surface with high accuracy or to apply the expansion / contraction force to the object surface with high accuracy. Also in this case, by using a plurality of such piezoelectric material fibers as the second band-shaped piezoelectric body, the detected value of the expansion or contraction of the object surface in the extending direction of the second piezoelectric material fiber group or the object The magnitude of the stretching force applied to the surface can be increased according to the number of fibers.

前記電極の片方が前記圧電材ファイバの導電性芯線とされれば、複数の圧電材ファイバと共に帯状圧電体を構成する電極の片方を各圧電材ファイバ内に予め組み込んでおくことができ、第一および第二の帯状圧電体により２次元型圧電式振動検出／抑制装置を組み上げる作業が簡単になる。前記電極の片方が前記圧電材ファイバの導電性外皮とされる場合も同様の効果が得られる。特に、前記電極の片方が前記圧電材ファイバの導電性芯線とされ、更に前記電極のもう片方が前記圧電材ファイバの導電性外皮とされれば、上記の効果は倍加される。しかし、また、前記第一または第二の帯状圧電体が物体の表面に沿って一層に配列された複数の圧電材ファイバとされていれば、前記電極の片方が前記圧電材ファイバの外面の押し当てられる導電性板体とされても、各圧電材ファイバに対し的確に電極を配設することができる。   If one of the electrodes is a conductive core wire of the piezoelectric material fiber, one of the electrodes constituting a band-shaped piezoelectric body together with a plurality of piezoelectric material fibers can be incorporated in each piezoelectric material fiber in advance. And the work of assembling the two-dimensional piezoelectric vibration detection / suppression device is simplified by the second band-shaped piezoelectric body. The same effect can be obtained when one of the electrodes is a conductive sheath of the piezoelectric fiber. In particular, if one of the electrodes is a conductive core wire of the piezoelectric material fiber and the other side of the electrode is a conductive sheath of the piezoelectric material fiber, the above effect is doubled. However, if the first or second band-shaped piezoelectric body is a plurality of piezoelectric material fibers arranged in a single layer along the surface of the object, one of the electrodes is pushed by the outer surface of the piezoelectric material fiber. Even if the conductive plate is applied, an electrode can be accurately disposed for each piezoelectric material fiber.

更にまた、物体の表面が平面であるかまたは円筒面の如く２次元的に湾曲している場合には、前記第一の帯状圧電体が前記物体の表面に沿って配置された圧電材帯板と電極とを含む構造とされても、帯状圧電体を物体表面に密着して設置することができ、複数のファイバの組合せに代えて一枚の圧電材帯板によってより簡単に第一の帯状圧電体を構成することができる。同様に物体の表面が平面であるかまたは円筒面の如く２次元的に湾曲している場合には、前記第二の帯状圧電体についても、その長手方向両端部にて物体の表面に沿って配置され圧電材帯板と電極とを含む構造とされることにより、第二の帯状圧電体をより簡単に構成することができる。   Furthermore, in the case where the surface of the object is a flat surface or is curved two-dimensionally like a cylindrical surface, the piezoelectric material band plate in which the first band-shaped piezoelectric body is disposed along the surface of the object Even if it has a structure including an electrode, the band-shaped piezoelectric body can be installed in close contact with the object surface, and the first band-shaped can be more easily obtained by using a single piezoelectric material band plate instead of a combination of a plurality of fibers. A piezoelectric body can be constituted. Similarly, when the surface of the object is flat or curved two-dimensionally like a cylindrical surface, the second band-shaped piezoelectric body also extends along the surface of the object at both ends in the longitudinal direction. By being arranged and including a piezoelectric material strip and an electrode, the second strip-shaped piezoelectric body can be configured more easily.

前記第一および第二の群の圧電性ファイバの長手方向中央部に於ける互いの交差が直交であれば、物体表面の２次元的伸縮を２つの次元のデータにより最大限の精度にて処理することができ、またそれを２次元直交座標系に関する公知の合成或は分解演算手法を用いて行うことができる。   If the intersections in the longitudinal center of the first and second groups of piezoelectric fibers are orthogonal, the two-dimensional expansion and contraction of the object surface is processed with maximum accuracy from the two-dimensional data. It can also be done using known synthesis or decomposition techniques for two-dimensional orthogonal coordinate systems.

添付の図１は、本発明による２次元型圧電式振動検出／抑制装置を一つの実施の形態について示す幾分解図的斜視図である。図に於いて、１００は第一の帯状圧電体であり、２００は第二の帯状圧電体である。図示の例では、第一および第二の帯状圧電体はいずれもそれぞれ１０本の圧電材ファイバ１０−１，１０−２， ．．． １０−１０および２０−１，２０−２， ．．． ２０−１０よりなっている。これらの圧電材ファイバには、その芯の部分に片方の電極をなす導電性の芯線１２−１，１２−２， ．．． １２−１０および２２−１，２２−２， ．．． ２２−１０が設けられており、またその表面にはもう片方の電極をなす導電性の外皮１４−１，１４−２， ．．． １４−１０および２４−１，２４−２， ．．． ２４−１０が設けられている。   FIG. 1 is an exploded perspective view showing a two-dimensional piezoelectric vibration detection / suppression device according to the present invention in one embodiment. In the figure, 100 is a first band-shaped piezoelectric body, and 200 is a second band-shaped piezoelectric body. In the illustrated example, each of the first and second strip-shaped piezoelectric bodies has ten piezoelectric material fibers 10-1, 10-2,. . . 10-10 and 20-1, 20-2,. . . It consists of 20-10. These piezoelectric fibers include conductive core wires 12-1, 12-2,... That form one electrode at the core portion. . . 12-10 and 22-1, 22-2,. . . 22-10 is provided on the surface thereof, and conductive skins 14-1, 14-2,. . . 14-10 and 24-1, 24-2,. . . 24-10 is provided.

図示の例では、第一の帯状圧電体の圧電材ファイバは、全てその全長にわたって物体３０の表面に沿って一層に配列されている。また、図示の例では、第二の帯状圧電体の圧電材ファイバは、それらの長手方向中央部にて接合層４０を介して第一の群の圧電性ファイバの長手方向中央部の上に交差して重ね合わされ、それらの長手方向両端部にて物体３０の表面に沿って一層に配列されている。図示の例では、第一と第二の圧電性ファイバ群の長手方向中央部に於ける交差は直交である。これらの圧電材ファイバの物体表面上に着座している部分は、図には示されていないが、適当な接着材により物体表面に固定されている。尚、第一の群の圧電材ファイバ１０−１，１０−２， ．．． １０−１０および第二の群の圧電材ファイバ２０−１，２０−２， ．．． ２０−１０は、それぞれ横方向に隣り合ったものどうしが予め適当な接着材により接合され、それぞれ帯状の部材とされていてよく、また第一および第二の圧電材ファイバは長手方向中央部の重なり部にて接合層４０を挟んで予め適当な接着材により互いに接合されていてよい。また、接合層４０そのものが接着材により形成されていてもよい。   In the illustrated example, the piezoelectric material fibers of the first band-shaped piezoelectric body are all arranged in a single layer along the surface of the object 30 over the entire length thereof. Further, in the illustrated example, the piezoelectric material fibers of the second band-shaped piezoelectric body intersect with the longitudinal center portion of the first group of piezoelectric fibers through the bonding layer 40 at the longitudinal center portion thereof. And are arranged in one layer along the surface of the object 30 at both longitudinal ends thereof. In the illustrated example, the intersections in the longitudinal center of the first and second piezoelectric fiber groups are orthogonal. The portion of the piezoelectric fiber seated on the object surface is not shown in the figure, but is fixed to the object surface with a suitable adhesive. The first group of piezoelectric fibers 10-1, 10-2,. . . 10-10 and the second group of piezoelectric fibers 20-1, 20-2,. . . In the case of 20-10, the adjacent ones in the lateral direction may be bonded in advance with an appropriate adhesive material, and each may be a band-shaped member, and the first and second piezoelectric fibers are in the center in the longitudinal direction. The overlapping portions may be bonded to each other with an appropriate adhesive in advance with the bonding layer 40 interposed therebetween. Further, the bonding layer 40 itself may be formed of an adhesive material.

また、図には示されていないが、当然のことながら、かかる２次元型圧電式振動検出／抑制装置の使用に当っては、第一の圧電材ファイバの導電性芯線１２−１，１２−２， ．．． １２−１０、第二の圧電材ファイバの導電性芯線２２−１，２２−２， ．．． ２２−１０、第一の圧電材ファイバの導電性外皮１４−１，１４−２， ．．． １４−１０、第二の圧電材ファイバの導電性外皮２４−１，２４−２， ．．． ２４−１０のそれぞれに対し適当な電極が設置される。   Further, although not shown in the figure, as a matter of course, in using the two-dimensional piezoelectric vibration detecting / suppressing device, the conductive core wires 12-1, 12- of the first piezoelectric material fiber are used. 2,. . . 12-10, conductive core wires 22-1, 22-2,. . . 22-10, conductive outer sheaths 14-1, 14-2,. . . 14-10, conductive outer sheaths 24-1, 24-2,. . . Appropriate electrodes are installed for each of 24-10.

図２は本発明による２次元型圧電式振動検出／抑制装置の他の一つの実施の形態を示す図１と同様の幾分解図的斜視図である。図２において、図１に示した部分に対応する部分には図１におけると同じ符号が付されている。この実施の形態においては、物体３０は導電性表面を呈する導電材であり、第一および第二の圧電材ファイバには導電性外皮は設けられておらず、第一および第二の圧電材ファイバ１０−１，１０−２， ．．． １０−１０および２０−１，２０−２， ．．． ２０−１０に於ける導電性芯線１２−１，１２−２， ．．． １２−１０および２２−１，２２−２， ．．． ２２−１０に対向する他方の電極は、物体３０と圧電材ファイバの外面の押し当てられた導電性板体５０および６０により与えられている。この場合、圧電材ファイバ１０−１，１０−２， ．．． １０−１０の圧電材層の一方の半分は物体３０と導電性芯線１２−１，１２−２， ．．． １２−１０との間で一つの圧電材層として作用し、また他方の半分は導電性芯線１２−１，１２−２， ．．． １２−１０と導電性板体５０の間で他の一つの圧電材層として作用する。同様に、圧電材ファイバ２０−１，２０−２， ．．． ２０−１０の圧電材層の一方の半分は物体３０と導電性芯線２２−１，２２−２， ．．． ２２−１０との間で一つの圧電材層として作用し、また他方の半分は導電性芯線２２−１，２２−２， ．．． ２２−１０と導電性板体６０の間で他の一つの圧電材層として作用する。また、図には示されていないが、かかる２次元型圧電式振動検出／抑制装置の使用に当っては、物体３０が一つの電極とされると共に、導電性芯線１２−１，１２−２， ．．． １２−１０および２２−１，２２−２， ．．． ２２−１０、導電性板体５０および６０のそれぞれに対し適当な電極が設置される。   FIG. 2 is an exploded perspective view similar to FIG. 1 showing another embodiment of the two-dimensional piezoelectric vibration detection / suppression device according to the present invention. 2, parts corresponding to those shown in FIG. 1 are denoted by the same reference numerals as those in FIG. In this embodiment, the object 30 is a conductive material having a conductive surface, and the first and second piezoelectric material fibers are not provided with a conductive outer sheath, and the first and second piezoelectric material fibers are not provided. 10-1, 10-2,. . . 10-10 and 20-1, 20-2,. . . 20-10, conductive core wires 12-1, 12-2,. . . 12-10 and 22-1, 22-2,. . . The other electrode facing 22-10 is provided by conductive plates 50 and 60 pressed against the object 30 and the outer surface of the piezoelectric fiber. In this case, the piezoelectric material fibers 10-1, 10-2,. . . One half of the piezoelectric material layer 10-10 is composed of the object 30 and the conductive core wires 12-1, 12-2,. . . 12-10 acts as one piezoelectric material layer, and the other half is the conductive core wires 12-1, 12-2,. . . It acts as another piezoelectric material layer between 12-10 and the conductive plate 50. Similarly, the piezoelectric material fibers 20-1, 20-2,. . . One half of the piezoelectric material layer 20-10 is composed of the object 30 and the conductive core wires 22-1, 22-2,. . . 22-10 acts as one piezoelectric material layer, and the other half is made of conductive core wires 22-1, 22-2,. . . It acts as another piezoelectric material layer between 22-10 and the conductive plate 60. Although not shown in the figure, in using such a two-dimensional piezoelectric vibration detection / suppression device, the object 30 is used as one electrode and the conductive core wires 12-1 and 12-2. ,. . . 12-10 and 22-1, 22-2,. . . Appropriate electrodes are provided for 22-10 and conductive plates 50 and 60, respectively.

図３は本発明による２次元型圧電式振動検出／抑制装置の更に他の一つの実施の形態を示す図１または図２と同様の幾分解図的斜視図である。図３においても、図１または図２に示した部分に対応する部分には図１または図２におけると同じ符号が付されている。この実施の形態においては、物体３０は導電性表面を呈する導電材であり、第一および第二の圧電材ファイバ１０−１，１０−２， ．．． １０−１０および２０−１，２０−２， ．．． ２０−１０には、いずれも導電性芯線は設けられておらず、第一の圧電材ファイバ１０−１，１０−２， ．．． １０−１０は物体３０と導電性板体５０の間で圧電材層として作用し、第二の圧電材ファイバ２０−１，２０−２， ．．． ２０−１０は物体３０と導電性板体６０の間で圧電材層として作用するようになっている。この場合にも、図には示されていないが、かかる２次元型圧電式振動検出／抑制装置の使用に当っては、物体３０が一つの電極とされると共に、導電性板体５０および６０のそれぞれに対し適当な電極が設置される。   FIG. 3 is an exploded perspective view similar to FIG. 1 or 2 showing still another embodiment of the two-dimensional piezoelectric vibration detection / suppression device according to the present invention. Also in FIG. 3, the same reference numerals as those in FIG. 1 or FIG. 2 are given to the portions corresponding to the portions shown in FIG. In this embodiment, the object 30 is a conductive material having a conductive surface, and the first and second piezoelectric material fibers 10-1, 10-2,. . . 10-10 and 20-1, 20-2,. . . 20-10 is not provided with a conductive core wire, and the first piezoelectric fibers 10-1, 10-2,. . . 10-10 acts as a piezoelectric material layer between the object 30 and the conductive plate 50, and the second piezoelectric material fibers 20-1, 20-2,. . . 20-10 acts as a piezoelectric material layer between the object 30 and the conductive plate 60. Also in this case, although not shown in the drawing, in using such a two-dimensional piezoelectric vibration detection / suppression device, the object 30 is used as one electrode, and the conductive plates 50 and 60 are used. Appropriate electrodes are installed for each of these.

図４は本発明による２次元型圧電式振動検出／抑制装置の更に他の一つの実施の形態を示す図１または図２と同様の幾分解図的斜視図である。図４においても、図１〜図３に示した部分に対応する部分には図１〜図３におけると同じ符号が付されている。この実施の形態においては、物体３０は導電性表面を呈する導電材であり、また前記第一および第二の帯状圧電体１００および２００は、圧電材帯板７０および８０を圧電材層とし、物体３０と導電性板体５０または６０を両電極とするよう構成されている。この場合にも、図には示されていないが、かかる２次元型圧電式振動検出／抑制装置の使用に当っては、物体３０が一つの電極とされると共に、導電性板体５０および６０のそれぞれに対し適当な電極が設置される。   FIG. 4 is an exploded perspective view similar to FIG. 1 or 2 showing still another embodiment of the two-dimensional piezoelectric vibration detection / suppression device according to the present invention. Also in FIG. 4, the same reference numerals as in FIGS. 1 to 3 are given to portions corresponding to the portions shown in FIGS. 1 to 3. In this embodiment, the object 30 is a conductive material having a conductive surface, and the first and second band-shaped piezoelectric bodies 100 and 200 are formed by using the piezoelectric material band plates 70 and 80 as piezoelectric material layers. 30 and the conductive plate 50 or 60 are configured as both electrodes. Also in this case, although not shown in the drawing, in using such a two-dimensional piezoelectric vibration detection / suppression device, the object 30 is used as one electrode, and the conductive plates 50 and 60 are used. Appropriate electrodes are installed for each of these.

以上に於いては本発明をいくつかの実施の形態について詳細に説明したが、これらの実施の形態について本発明の範囲内にて種々の変更が可能であることは当業者にとって明らかであろう。   While the present invention has been described in detail with respect to several embodiments thereof, it will be apparent to those skilled in the art that various modifications can be made to these embodiments within the scope of the present invention. .

本発明による２次元型圧電式振動検出／抑制装置を一つの実施の形態について示す幾分解図的斜視図。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an exploded perspective view showing a two-dimensional piezoelectric vibration detecting / suppressing device according to an embodiment of the present invention. 本発明による２次元型圧電式振動検出／抑制装置を他の一つの実施の形態について示す幾分解図的斜視図。The disassembled perspective view showing another embodiment of the two-dimensional piezoelectric vibration detection / suppression device according to the present invention. 本発明による２次元型圧電式振動検出／抑制装置を更に他の一つの実施の形態について示す幾分解図的斜視図。FIG. 6 is an exploded perspective view showing a two-dimensional piezoelectric vibration detection / suppression device according to another embodiment of the present invention. 本発明による２次元型圧電式振動検出／抑制装置を更に他の一つの実施の形態について示す幾分解図的斜視図。FIG. 6 is an exploded perspective view showing a two-dimensional piezoelectric vibration detection / suppression device according to another embodiment of the present invention.

符号の説明Explanation of symbols

１００，２００…第一および第二の帯状圧電体、１０−１〜１０−１０…第一の帯状圧電体の圧電材ファイバ、１２−１〜１２−１０…第一の帯状圧電体の導電性芯線、１４−１〜１４−１０…第一の帯状圧電体の導電性外皮、２０−１〜２０−１０…第二の帯状圧電体の圧電材ファイバ、２２−１〜２２−１０…第二の帯状圧電体の導電性芯線、２４−１〜２４−１０…第二の帯状圧電体の導電性外皮、３０…物体、４０…接合層、５０，６０…導電性板体、７０，８０…圧電材帯板   100, 200: first and second band-shaped piezoelectric bodies, 10-1 to 10-10: piezoelectric material fibers of the first band-shaped piezoelectric bodies, 12-1 to 12-10: conductivity of the first band-shaped piezoelectric bodies Core wires, 14-1 to 14-10 ... conductive outer skin of the first belt-like piezoelectric body, 20-1 to 20-10 ... piezoelectric material fiber of the second belt-like piezoelectric body, 22-1 to 22-10 ... second Conductive core wire of the band-shaped piezoelectric body, 24-1 to 24-10 ... conductive skin of the second band-shaped piezoelectric body, 30 ... object, 40 ... bonding layer, 50, 60 ... conductive plate body, 70, 80 ... Piezoelectric strip

Claims (9)

振動が検出されまたは抑制されるべき物体の表面に取り付けられるよう配列された第一および第二の帯状圧電体を備え、前記第一および第二の群の帯状圧電体はそれらの長手方向中央部にて互いに交差して重ね合わされていることを特徴とする２次元型圧電式振動検出／抑制装置。   First and second strips of piezoelectric elements arranged to be attached to the surface of an object whose vibrations are to be detected or suppressed, said first and second groups of strips of piezoelectric elements having their longitudinal central portions A two-dimensional piezoelectric vibration detecting / suppressing device, wherein the two-dimensional piezoelectric vibration detecting / suppressing devices are overlapped with each other. 前記第一の帯状圧電体は前記物体の表面に沿って一層に配列された複数の圧電材ファイバと電極とを含んでいることを特徴とする請求項１に記載の２次元型圧電式振動検出／抑制装置。   2. The two-dimensional piezoelectric vibration detection according to claim 1, wherein the first strip-shaped piezoelectric body includes a plurality of piezoelectric material fibers and electrodes arranged in a single layer along the surface of the object. / Suppressor. 前記第二の帯状圧電体はその長手方向両端部にて前記物体の表面に沿って一層に配列された複数の圧電材ファイバと電極とを含んでいることを特徴とする請求項１または２に記載の２次元型圧電式振動検出／抑制装置。   The said 2nd strip | belt-shaped piezoelectric material contains the several piezoelectric material fiber and electrode which were arranged in one layer along the surface of the said object in the longitudinal direction both ends, The Claim 1 or 2 characterized by the above-mentioned. The two-dimensional piezoelectric vibration detection / suppression device described. 前記電極の片方は前記圧電材ファイバの導電性芯線であることを特徴とする請求項２または３のいずれかに記載の２次元型圧電式振動検出／抑制装置。   4. The two-dimensional piezoelectric vibration detection / suppression device according to claim 2, wherein one of the electrodes is a conductive core wire of the piezoelectric material fiber. 前記電極の片方は前記圧電材ファイバの導電性外皮であることを特徴とする請求項２〜４のいずれかに記載の２次元型圧電式振動検出／抑制装置。   5. The two-dimensional piezoelectric vibration detecting / suppressing device according to claim 2, wherein one of the electrodes is a conductive sheath of the piezoelectric material fiber. 前記電極の片方は前記圧電材ファイバの外面に押し当てられた導電性板体であることを特徴とする請求項２〜５のいずれかに記載の２次元型圧電式振動検出／抑制装置。   6. The two-dimensional piezoelectric vibration detection / suppression device according to claim 2, wherein one of the electrodes is a conductive plate pressed against an outer surface of the piezoelectric fiber. 前記第一の帯状圧電体は前記物体の表面に沿って配置された圧電材帯板と電極とを含んでいることを特徴とする請求項１に記載の２次元型圧電式振動検出／抑制装置。   2. The two-dimensional piezoelectric vibration detection / suppression device according to claim 1, wherein the first band-shaped piezoelectric body includes a piezoelectric material band plate and an electrode disposed along the surface of the object. . 前記第二の帯状圧電体はその長手方向両端部にて前記物体の表面に沿って配置され圧電材帯板と電極とを含んでいることを特徴とする請求項１または７に記載の２次元型圧電式振動検出／抑制装置。   8. The two-dimensional structure according to claim 1, wherein the second band-shaped piezoelectric body is disposed along the surface of the object at both longitudinal ends thereof, and includes a piezoelectric material band plate and an electrode. Type piezoelectric vibration detection / suppression device. 前記の交差は直交であることを特徴とする請求項１〜８のいずれかに記載の２次元型圧電式振動検出／抑制装置。
9. The two-dimensional piezoelectric vibration detection / suppression device according to claim 1, wherein the intersection is orthogonal.
JP2004203717A 2004-07-09 2004-07-09 Two-dimensional type piezoelectric vibration detection and suppression device Withdrawn JP2006025576A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105092896A (en) * 2015-08-03 2015-11-25 中国科学院合肥物质科学研究院 Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope
CN108028311A (en) * 2015-10-06 2018-05-11 三井化学株式会社 Strip tabular piezoelectrics and its manufacture method, layered product and its manufacture method, fabric, clothing and Biont information acquisition device
CN112242797A (en) * 2020-10-09 2021-01-19 中国科学院合肥物质科学研究院 Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105092896A (en) * 2015-08-03 2015-11-25 中国科学院合肥物质科学研究院 Single-scanning-tube-driven multidimensional piezoelectric motor and searchable scanning probe microscope
CN105092896B (en) * 2015-08-03 2018-06-29 中国科学院合肥物质科学研究院 The multidimensional piezo-electric motor and can search for scanning probe microscopy that single sweep pipe drives
CN108028311A (en) * 2015-10-06 2018-05-11 三井化学株式会社 Strip tabular piezoelectrics and its manufacture method, layered product and its manufacture method, fabric, clothing and Biont information acquisition device
CN112242797A (en) * 2020-10-09 2021-01-19 中国科学院合肥物质科学研究院 Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope
CN112242797B (en) * 2020-10-09 2021-08-27 中国科学院合肥物质科学研究院 Double-folding cross multi-dimensional piezoelectric motor, control method thereof and scanning probe microscope

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