JP2005268814A5 - - Google Patents
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- JP2005268814A5 JP2005268814A5 JP2005119658A JP2005119658A JP2005268814A5 JP 2005268814 A5 JP2005268814 A5 JP 2005268814A5 JP 2005119658 A JP2005119658 A JP 2005119658A JP 2005119658 A JP2005119658 A JP 2005119658A JP 2005268814 A5 JP2005268814 A5 JP 2005268814A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor region
- imaging device
- solid
- conductivity type
- state imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Claims (6)
隣接する前記フォトダイオード間に、トレンチ内に絶縁膜を形成した素子分離領域が形成されており、前記素子分離領域の側壁に第１導電型の第３の半導体領域が形成され、前記素子分離領域の下部に第１導電型の第４の半導体領域が形成されていることを特徴とする固体撮像装置。 A photodiode formed by a first semiconductor region of a first conductivity type and a second semiconductor region of a second conductivity type opposite to the first conductivity type, and the second semiconductor region is a source or drain region A solid-state imaging device having a plurality of pixels including a second conductivity type transistor functioning as :
An element isolation region in which an insulating film is formed in a trench is formed between the adjacent photodiodes, a first conductivity type third semiconductor region is formed on a side wall of the element isolation region, and the element isolation region A solid-state imaging device, wherein a fourth semiconductor region of the first conductivity type is formed in a lower part of the first imaging device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005119658A JP2005268814A (en) | 2002-06-27 | 2005-04-18 | Solid state imaging device and camera system using the same |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002187682 | 2002-06-27 | ||
| JP2002302912 | 2002-10-17 | ||
| JP2005119658A JP2005268814A (en) | 2002-06-27 | 2005-04-18 | Solid state imaging device and camera system using the same |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003159403A Division JP3840203B2 (en) | 2002-06-27 | 2003-06-04 | Solid-state imaging device and camera system using the solid-state imaging device |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005273717A Division JP4435063B2 (en) | 2002-06-27 | 2005-09-21 | Solid-state imaging device and camera system using the solid-state imaging device |
| JP2010057729A Division JP5241759B2 (en) | 2002-06-27 | 2010-03-15 | Solid-state imaging device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005268814A JP2005268814A (en) | 2005-09-29 |
| JP2005268814A5 true JP2005268814A5 (en) | 2005-11-10 |
Family
ID=35092950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005119658A Pending JP2005268814A (en) | 2002-06-27 | 2005-04-18 | Solid state imaging device and camera system using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005268814A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100708772B1 (en) * | 2005-10-07 | 2007-04-17 | 주식회사 뮤타스 | Image photographing device including diaphragm |
| JP2010199154A (en) * | 2009-02-23 | 2010-09-09 | Canon Inc | Solid-state imaging element |
| JP5539104B2 (en) * | 2009-09-24 | 2014-07-02 | キヤノン株式会社 | Photoelectric conversion device and imaging system using the same |
| JP5620087B2 (en) | 2009-11-30 | 2014-11-05 | 浜松ホトニクス株式会社 | Distance sensor and distance image sensor |
| JP5558859B2 (en) * | 2010-02-18 | 2014-07-23 | キヤノン株式会社 | Solid-state imaging device and method for manufacturing solid-state imaging device |
| JP5616170B2 (en) * | 2010-09-06 | 2014-10-29 | 浜松ホトニクス株式会社 | Distance sensor and distance image sensor |
| JP5632423B2 (en) * | 2012-05-29 | 2014-11-26 | 浜松ホトニクス株式会社 | Distance sensor and distance image sensor |
| JP2012185174A (en) * | 2012-05-29 | 2012-09-27 | Hamamatsu Photonics Kk | Distance sensor and distance image sensor |
-
2005
- 2005-04-18 JP JP2005119658A patent/JP2005268814A/en active Pending
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