JP2005259707A5 - - Google Patents

Claims (1)

試料を載置する試料台と；
微小試料を固定し、イオンビーム及び電子ビームの微小試料への照射角度を変更する照射角度変更手段と；
試料台、及び照射角度変更手段が配置された試料室と；
試料台に載置された試料、及び照射角度変更手段に固定された微小試料にイオンビームを照射できる集束イオンビーム光学系と；
照射角度変更手段に固定された微小試料に電子ビームを照射できる電子ビーム光学系と；
を備え、
照射角度変更手段に固定された微小試料にイオンビームを照射し、観察断面を形成し、
電子ビームに対して観察断面が略垂直の角度となるよう、照射角度変更手段により電子ビームの微小試料への照射角度を変更し、
照射角度変更手段に固定された微小試料に電子ビームを照射し、観察断面を測定するように構成された微小試料加工観察装置。
A sample stage on which the sample is placed;
Irradiation angle changing means for fixing the minute sample and changing the irradiation angle of the ion beam and electron beam to the minute sample;
A sample stage and a sample chamber in which an irradiation angle changing means is arranged;
A focused ion beam optical system capable of irradiating a sample placed on a sample stage and a micro sample fixed to the irradiation angle changing means;
An electron beam optical system capable of irradiating a minute sample fixed to the irradiation angle changing means with an electron beam;
With
Irradiate an ion beam to a micro sample fixed to the irradiation angle changing means to form an observation cross section,
Change the irradiation angle of the electron beam to the minute sample by the irradiation angle changing means so that the observation cross section becomes an angle substantially perpendicular to the electron beam,
A micro sample processing and observation apparatus configured to irradiate a micro sample fixed to the irradiation angle changing means with an electron beam and measure an observation cross section.