JP2005249746A - Vibrator, and apparatus for measuring physical quantity - Google Patents

Vibrator, and apparatus for measuring physical quantity Download PDF

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JP2005249746A
JP2005249746A JP2004064644A JP2004064644A JP2005249746A JP 2005249746 A JP2005249746 A JP 2005249746A JP 2004064644 A JP2004064644 A JP 2004064644A JP 2004064644 A JP2004064644 A JP 2004064644A JP 2005249746 A JP2005249746 A JP 2005249746A
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detection
vibrator
vibration
pieces
piece
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Takayuki Kikuchi
菊池　　尊行
Tomoyoshi Oi
知義 多井
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NGK Insulators Ltd
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NGK Insulators Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To reduce the detection impedance of a vibrator and to further improve detection sensitivity thereof. <P>SOLUTION: The vibrator 11A which uses measurement of physical quantities corresponding to a predetermined detection axis Z, is provided. The vibrator 11A comprises predetermined driving vibrating pieces 4A, 4B, 4C, 4D, four pieces or more detecting vibrating pieces 6C, 6D, 6E, 6F which vibrate corresponding to the detection axis Z, and a coupling part 2 interposed between the driving vibration pieces 4A, 4B, 4C, 4D and detecting vibration pieces 6C, 6D, 6E, 6F. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

特許文献１には、平面状振動子に対する垂直軸の周りの回転角速度を検出する振動型ジャイロスコープが開示されている。
特開平１１−２８１３２７号公報 Patent Document 1 discloses a vibrating gyroscope that detects a rotational angular velocity around a vertical axis with respect to a planar vibrator.
JP-A-11-281327

このタイプの振動子の一例について、図１を参照しつつ述べる。振動子１ＡはＸ−Ｙ平面内に形成されている。振動子１Ａの連結部２は長方形をしている。連結部２の周縁部から一対の支持部３Ａ、３Ｂが突出しており、各支持部３Ａ、３Ｂの先端側から屈曲振動片４Ａ、４Ｂ、４Ｃ、４Ｄが突出し、支持部３Ａ、３Ｂに直交する方向に延びている。また、連結部２から一対の検出振動片６Ａ、６Ｂが延びている。   An example of this type of vibrator will be described with reference to FIG. The vibrator 1A is formed in the XY plane. The connecting portion 2 of the vibrator 1A has a rectangular shape. A pair of support portions 3A, 3B protrude from the peripheral edge portion of the connecting portion 2, and bending vibration pieces 4A, 4B, 4C, 4D protrude from the distal end sides of the support portions 3A, 3B, and are orthogonal to the support portions 3A, 3B. Extending in the direction. A pair of detection vibrating pieces 6 </ b> A and 6 </ b> B extend from the connecting portion 2.

各検出振動片４Ａ、４Ｂ、４Ｃ、４Ｄには、それぞれ、一対の溝９が形成されており、溝９内には駆動電極１０が形成されている。各屈曲振動片４Ａ〜４Ｄの横断面は略Ｈ字形状である。各屈曲振動片４Ａ〜４Ｄの先端には幅広部５が設けられている。また、各検出振動片６Ａ、６Ｂには、それぞれ、一対の溝１２が形成されており、溝１２内には検出電極１３が形成されている。各検出振動片６Ａ、６Ｂの横断面は略Ｈ字形状である。各検出振動片６Ａ、６Ｂの先端には幅広部７が設けられている。   A pair of grooves 9 is formed in each of the detection vibrating pieces 4A, 4B, 4C, and 4D, and a drive electrode 10 is formed in the groove 9. Each of the bending vibration pieces 4A to 4D has a substantially H-shaped cross section. A wide portion 5 is provided at the tip of each bending vibration piece 4A to 4D. Each detection vibrating piece 6 </ b> A, 6 </ b> B has a pair of grooves 12, and a detection electrode 13 is formed in the groove 12. Each detection vibrating piece 6A, 6B has a substantially H-shaped cross section. A wide portion 7 is provided at the tip of each detection vibrating piece 6A, 6B.

しかし、この振動子による検出感度を一層向上させるためには、検出インピーダンスの低減が重要であるが、検出インピーダンスを低減する手法は限られている。   However, in order to further improve the detection sensitivity of the vibrator, it is important to reduce the detection impedance, but the methods for reducing the detection impedance are limited.

本発明の課題は、振動子の検出インピーダンスを低減し、検出感度を一層向上させることである。   An object of the present invention is to reduce the detection impedance of the vibrator and further improve the detection sensitivity.

本発明は、所定の検出軸に対応する物理量を測定するのに用いる振動子であって、駆動振動片、検出軸に対応して振動する四個以上の検出振動片および駆動振動片と検出振動片との間に介在する連結部を備えていることを特徴とする。   The present invention is a vibrator used for measuring a physical quantity corresponding to a predetermined detection axis, and includes a drive vibration piece, four or more detection vibration pieces that vibrate corresponding to the detection axis, a drive vibration piece, and a detection vibration. It has the connection part interposed between pieces, It is characterized by the above-mentioned.

また、本発明は、前記振動子、振動子に駆動振動を励振する駆動手段、および検出振動を検出する検出手段を備えていることを特徴とする、物理量測定装置に係るものである。   In addition, the present invention relates to a physical quantity measuring apparatus including the vibrator, a driving unit that excites a driving vibration in the vibrator, and a detecting unit that detects a detection vibration.

本発明者は、例えば図１０、図１１に示すように、検出振動片の個数を４個以上に増加させることによって、検出振動片の個数が２個、３個の場合に比べて、検出感度が著しく向上することを見いだした。検出振動片の個数が３個の場合にも検出感度は若干は向上するが、その増加量は少なく、検出振動片の個数が四個の場合には飛躍的な検出振動の増加が見られた。この理由は明らかではないが、検出振動片の個数が３個の場合には振動状態の幾何学的対称性が低下し、検出モードのＱ値が低下するために、検出インピーダンスがあまり低くならず、検出感度の増加量が少ないものと思われる。   For example, as shown in FIGS. 10 and 11, the inventor increases the number of detection vibrating pieces to 4 or more, thereby detecting sensitivity as compared with the case where the number of detection vibrating pieces is two or three. Has been found to improve significantly. When the number of detection vibrating pieces is three, the detection sensitivity is slightly improved, but the increase is small, and when the number of detection vibrating pieces is four, the detection vibration is dramatically increased. . The reason for this is not clear, but when the number of detection vibrating pieces is 3, the geometrical symmetry of the vibration state decreases and the Q value of the detection mode decreases, so the detection impedance does not become too low. It seems that the increase in detection sensitivity is small.

好適な実施形態においては、検出振動片の個数を偶数とし、これによって検出振動の幾何学的対称性が高まり、検出インピーダンスが一層低下する。   In a preferred embodiment, the number of the detection vibration pieces is an even number, thereby increasing the geometric symmetry of the detection vibration and further reducing the detection impedance.

検出振動片の個数の上限は特にないが、製造し易さなどの観点からは、検出振動片の個数は１０個以下であることが好ましい。   Although there is no upper limit on the number of detection vibrating pieces, the number of detection vibrating pieces is preferably 10 or less from the viewpoint of ease of manufacture.

振動子の材質は特に限定するものでないが、水晶、ＬｉＮｂＯ3、ＬｉＴａＯ3、ニオブ酸リチウム−タンタル酸リチウム固溶体（Ｌｉ（Ｎｂ，Ｔａ）Ｏ3）単結晶、ホウ酸リチウム単結晶、ランガサイト単結晶等からなる圧電単結晶を使用することが好ましい。 The material of the vibrator is not particularly limited. Crystal, LiNbO 3 , LiTaO 3 , lithium niobate-lithium tantalate solid solution (Li (Nb, Ta) O 3 ) single crystal, lithium borate single crystal, langasite single crystal It is preferable to use a piezoelectric single crystal made of a crystal or the like.

本発明の振動子を圧電性材料によって形成した場合には、この振動子に駆動電極および検出電極を設ける。圧電性材料としては、圧電単結晶の他に、ＰＺＴ等の圧電セラミックスがある。また、本発明の振動子を、エリンバー等の恒弾性金属によって形成することもできる。この場合には、振動子の所定箇所に圧電体を取り付ける必要がある。   When the vibrator of the present invention is formed of a piezoelectric material, the vibrator is provided with a drive electrode and a detection electrode. Examples of the piezoelectric material include piezoelectric ceramics such as PZT in addition to the piezoelectric single crystal. Further, the vibrator of the present invention can be formed of a constant elastic metal such as Elinvar. In this case, it is necessary to attach a piezoelectric body to a predetermined portion of the vibrator.

本発明において測定されるべき物理量は、特に限定はされない。振動子に駆動振動を励振し、駆動振動中の振動子に対する物理量の影響によって振動子の振動状態に変化が生じたときに、この振動状態の変化から検出回路を通して検出可能な物理量を対象とする。こうした物理量としては、振動子に印加される加速度、角速度、角加速度が特に好ましい。また、測定装置としては慣性センサーが好ましい。   The physical quantity to be measured in the present invention is not particularly limited. When the vibration state of the vibrator is changed due to the influence of the physical quantity on the vibrator during driving vibration, the physical quantity that can be detected through the detection circuit from the change in the vibration state is targeted. . As such physical quantities, acceleration, angular velocity, and angular acceleration applied to the vibrator are particularly preferable. Further, an inertial sensor is preferable as the measuring device.

好適な実施形態においては、振動子が所定面に沿って延びており、駆動振動片および検出振動片が所定面内で屈曲振動する。図２、図３、図５の振動子はこの実施形態に係るものである。   In a preferred embodiment, the vibrator extends along a predetermined plane, and the drive vibrating piece and the detection vibrating piece flexurally vibrate within the predetermined plane. 2, 3, and 5 are according to this embodiment.

図２の振動子１１ＡはＸ−Ｙ平面内に形成されている。振動子１１Ａの連結部２は長方形をしている。連結部２の周縁部から一対の支持部３Ａ、３Ｂが突出しており、各支持部３Ａ、３Ｂの先端側から屈曲振動片４Ａ、４Ｂ、４Ｃ、４Ｄが突出し、支持部３Ａ、３Ｂに直交する方向に延びている。また、連結部２から２対の検出用の屈曲振動片６Ｃ、６Ｄ、６Ｅ、６Ｆが延びている。   The vibrator 11A in FIG. 2 is formed in the XY plane. The connecting portion 2 of the vibrator 11A has a rectangular shape. A pair of support portions 3A, 3B protrude from the peripheral edge portion of the connecting portion 2, and bending vibration pieces 4A, 4B, 4C, 4D protrude from the distal end sides of the support portions 3A, 3B, and are orthogonal to the support portions 3A, 3B. Extending in the direction. Further, two pairs of bending vibration pieces for detection 6C, 6D, 6E, and 6F extend from the connecting portion 2.

各屈曲振動片４Ａ、４Ｂ、４Ｃ、４Ｄには、それぞれ、一対の溝９が形成されており、溝９内には駆動電極１０が形成されている。各屈曲振動片４Ａ〜４Ｄの横断面は略Ｈ字形状である。各屈曲振動片４Ａ〜４Ｄの先端には幅広部５が設けられている。また、各検出振動片６Ｃ、６Ｄ、６Ｅ、６Ｆには、それぞれ、一対の溝１２が形成されており、溝１２内には検出電極１３が形成されている。各検出振動片６Ｃ〜６Ｆの横断面は略Ｈ字形状である。各検出振動片６Ｃ〜６Ｆの先端には幅広部７が設けられている。   Each bending vibration piece 4A, 4B, 4C, 4D is formed with a pair of grooves 9, and a drive electrode 10 is formed in the groove 9. Each of the bending vibration pieces 4A to 4D has a substantially H-shaped cross section. A wide portion 5 is provided at the tip of each bending vibration piece 4A to 4D. Each detection vibrating piece 6C, 6D, 6E, 6F has a pair of grooves 12, and a detection electrode 13 is formed in the groove 12. The cross sections of the detection vibrating pieces 6C to 6F are substantially H-shaped. A wide portion 7 is provided at the tip of each of the detection vibrating pieces 6C to 6F.

各駆動振動片４Ａ〜４Ｄに、矢印Ａのように、Ｘ軸方向の屈曲振動を励振する。この状態で、振動子１１ＡをωのようにＺ軸の周りに回転させると、各支持部３Ａ、３Ｂが、各支持部の連結部２への付け根を中心として、矢印Ｂのように屈曲振動する。すると、各支持部３Ａ、３Ｂの屈曲振動に反応して、各検出振動片６Ｃ、６Ｄ、６Ｅ、６Ｆが、矢印Ｃのように、連結部２への付け根を中心として屈曲振動する。この屈曲振動Ｃによって、検出振動片６Ｃ〜６Ｆに惹起される電気信号を出力し、適宜差動をとる。   As shown by an arrow A, bending vibration in the X-axis direction is excited in each of the drive vibration pieces 4A to 4D. In this state, when the vibrator 11A is rotated around the Z-axis like ω, the support portions 3A and 3B are bent and oscillated as indicated by an arrow B around the root of the support portion to the connecting portion 2 as shown in FIG. To do. Then, in response to the bending vibrations of the support portions 3A and 3B, the detection vibrating pieces 6C, 6D, 6E, and 6F bend and vibrate around the root to the connecting portion 2 as indicated by an arrow C. By this bending vibration C, an electrical signal induced in the detection vibrating pieces 6C to 6F is output, and a differential is appropriately taken.

図３の振動子１１Ｂは、図２の振動子１１Ａと類似のものであるので、同じ構成部分には同じ符号を付け、その説明を省略する。振動子１１Ｂにおいては、連結部２から３対の検出振動片６Ａ、６Ｂ、６Ｃ、６Ｄ、６Ｅ、６Ｆが突出している。各屈曲振動片６Ａ〜６Ｆには、それぞれ、一対の溝１２が形成されており、溝１２内には検出電極１３が形成されている。各屈曲振動片６Ａ〜６Ｆの横断面は略Ｈ字形状であり、各屈曲振動片６Ａ〜６Ｆの先端には幅広部７が設けられている。   The vibrator 11B in FIG. 3 is similar to the vibrator 11A in FIG. 2, and thus the same components are denoted by the same reference numerals and description thereof is omitted. In the vibrator 11B, three pairs of detection vibrating pieces 6A, 6B, 6C, 6D, 6E, and 6F protrude from the connecting portion 2. A pair of grooves 12 is formed in each of the bending vibration pieces 6 </ b> A to 6 </ b> F, and a detection electrode 13 is formed in the groove 12. Each of the bending vibration pieces 6A to 6F has a substantially H-shaped cross section, and a wide portion 7 is provided at the tip of each of the bending vibration pieces 6A to 6F.

各駆動振動片４Ａ〜４Ｄに、矢印Ａのように、Ｘ軸方向の屈曲振動を励振する。この状態で、振動子１１ＡをωのようにＺ軸の周りに回転させると、各支持部３Ａ、３Ｂが、各支持部の連結部２への付け根を中心として、矢印Ｂのように屈曲振動する。すると、各支持部３Ａ、３Ｂの屈曲振動に反応して、各検出振動片６Ａ〜６Ｆが、矢印Ｃのように、連結部２への付け根を中心として屈曲振動する。この屈曲振動Ｃによって、検出振動片６Ａ〜６Ｆに惹起される電気信号を出力し、適宜差動をとる。   As shown by an arrow A, bending vibration in the X-axis direction is excited in each of the drive vibration pieces 4A to 4D. In this state, when the vibrator 11A is rotated around the Z-axis like ω, the support portions 3A and 3B are bent and oscillated as indicated by an arrow B around the root of the support portion to the connecting portion 2 as shown in FIG. To do. Then, in response to the bending vibrations of the support portions 3A and 3B, the detection vibrating pieces 6A to 6F vibrate and vibrate around the root to the connecting portion 2 as indicated by an arrow C. By this bending vibration C, an electrical signal induced in the detection vibrating pieces 6A to 6F is output, and a differential is appropriately taken.

図４の振動子１Ｂは本発明外のものである。振動子１Ｂにおいては、連結部２から３個の検出振動片６Ａ、６Ｄ、６Ｅが突出している。連結部２から見て＋Ｙ側に一個の検出振動片６Ａが突出しており、−Ｙ側に二個の検出振動片６Ｄ、６Ｅが突出している。   The vibrator 1B of FIG. 4 is outside the present invention. In the vibrator 1B, three detection vibrating pieces 6A, 6D, and 6E protrude from the connecting portion 2. One detection vibrating piece 6A protrudes on the + Y side when viewed from the connecting portion 2, and two detection vibration pieces 6D and 6E protrude on the -Y side.

図５には、例えば水晶のように、Ｘ−Ｙ平面内に３つのａ軸を有する圧電性単結晶によって振動子を形成した場合の振動子例を示す。振動子１１Ｃは、図２の振動子１１Ａと類似のものであるので、同じ構成部分には同じ符号を付け、その説明を省略する。振動子１１Ｃにおいては、連結部２から３対の検出振動片６Ａ、６Ｂ、６Ｇ、６Ｈ、６Ｊ、６Ｋが突出している。検出振動片６Ａ、６ＢはＹ軸方向に向かって延びており、かつａ軸方向に向かって延びている。検出振動片６Ｇ、６Ｈ、６Ｊ、６Ｋは、それぞれＹ軸からそれぞれ６０°だけ傾斜した方向に向かって延びており、従ってａ軸の方向に向かって延びている。   FIG. 5 shows an example of a vibrator when the vibrator is formed of a piezoelectric single crystal having three a axes in the XY plane, for example, quartz. Since the vibrator 11C is similar to the vibrator 11A of FIG. 2, the same reference numerals are given to the same components, and the description thereof is omitted. In the vibrator 11C, three pairs of detection vibrating pieces 6A, 6B, 6G, 6H, 6J, and 6K protrude from the connecting portion 2. The detection vibrating pieces 6A and 6B extend in the Y-axis direction and extend in the a-axis direction. The detection vibrating pieces 6G, 6H, 6J, and 6K each extend in a direction inclined by 60 ° from the Y axis, and thus extend in the direction of the a axis.

各屈曲振動片６Ａ〜６Ｋには、それぞれ、一対の溝１２が形成されており、溝１２内には検出電極１３が形成されている。各屈曲振動片６Ａ〜６Ｋの横断面は略Ｈ字形状であり、各屈曲振動片６Ａ〜６Ｋの先端には幅広部７が設けられている。   A pair of grooves 12 is formed in each of the bending vibration pieces 6A to 6K, and a detection electrode 13 is formed in the groove 12. Each of the bending vibration pieces 6A to 6K has a substantially H-shaped cross section, and a wide portion 7 is provided at the tip of each of the bending vibration pieces 6A to 6K.

各駆動振動片４Ａ〜４Ｄに、矢印Ａのように、Ｘ軸方向の屈曲振動を励振する。この状態で、振動子１１ＡをωのようにＺ軸の周りに回転させると、各支持部３Ａ、３Ｂが、各支持部の連結部２への付け根を中心として、矢印Ｂのように屈曲振動する。すると、各支持部３Ａ、３Ｂの屈曲振動に反応して、各検出振動片６Ａ、６Ｂが、矢印Ｃのように、連結部２への付け根を中心としてＸ軸方向に向かって屈曲振動する。この屈曲振動Ｃによって検出振動片６Ａ、６Ｂに惹起される電気信号を出力し、適宜差動をとる。また、これと同時に、各検出振動片６Ｇ〜６Ｋが、矢印Ｄのように、連結部２への付け根を中心として矢印Ｄのように屈曲振動する。この屈曲振動Ｄによって検出振動片６Ｇ〜６Ｋに惹起される電気信号を出力し、適宜差動をとる。   As shown by an arrow A, bending vibration in the X-axis direction is excited in each of the drive vibration pieces 4A to 4D. In this state, when the vibrator 11A is rotated around the Z-axis like ω, the support portions 3A and 3B are bent and oscillated as indicated by an arrow B around the root of the support portion to the connecting portion 2 as shown in FIG. To do. Then, in response to the bending vibrations of the support portions 3A and 3B, the detection vibrating pieces 6A and 6B bend and vibrate in the X-axis direction around the root to the connecting portion 2 as indicated by an arrow C. Electric signals that are caused by the bending vibration C to be generated in the detection vibrating pieces 6A and 6B are output, and a differential is appropriately obtained. At the same time, the detection vibrating pieces 6G to 6K bend and vibrate as indicated by an arrow D around the root to the connecting portion 2 as indicated by an arrow D. Electric signals that are caused by the bending vibration D to be generated in the detection vibrating pieces 6G to 6K are output, and a differential is appropriately obtained.

また、好適な実施形態においては、振動子が所定面に沿って延びており、駆動振動片が所定面内で屈曲振動し、検出振動片が所定面とは略垂直な方向に屈曲振動する。   In a preferred embodiment, the vibrator extends along a predetermined plane, the drive vibrating piece bends and vibrates in the predetermined plane, and the detection vibrating piece bends and vibrates in a direction substantially perpendicular to the predetermined plane.

図６は、本発明外の振動子１Ｃを概略的に示す斜視図である。連結部２から上方へと向かって一対の駆動振動片１５Ａ、１５Ｂが延びており、各駆動振動片の先端に幅広部５が設けられている。また各検出振動片１５Ａ、１５Ｂの各対向面にそれぞれ溝９が形成されており、この結果各駆動振動片の横断面形状はＨ字状になっている。各溝９の内壁面には駆動電極１０が設けられている。   FIG. 6 is a perspective view schematically showing a vibrator 1C outside the present invention. A pair of drive vibration pieces 15A and 15B extend upward from the connecting portion 2, and a wide portion 5 is provided at the tip of each drive vibration piece. Further, a groove 9 is formed on each facing surface of each detection vibrating piece 15A, 15B, and as a result, the cross-sectional shape of each driving vibration piece is H-shaped. A drive electrode 10 is provided on the inner wall surface of each groove 9.

連結部２の下側には、一対の検出振動片１６Ａ、１６Ｂが突出している。そして各検出振動片１６Ａ、１６Ｂの先端にそれぞれ幅広部７が設けられている。各駆動振動片１５Ａ、１５Ｂに矢印Ａのように、Ｘ軸方向に向かって連結部２への付け根を中心として屈曲振動を励振する。この状態で振動子１ＣをＹ軸の周りにωのように回転させると、各検出振動片１６Ａ、１６Ｂに、矢印ＥのようにＺ軸方向の屈曲振動が励振される。この屈曲振動Ｅによって検出振動片１６Ａ、１６Ｂに惹起される電気信号を出力し、差動をとる。   A pair of detection vibrating pieces 16 </ b> A and 16 </ b> B protrudes below the connecting portion 2. And the wide part 7 is each provided in the front-end | tip of each detection vibration piece 16A, 16B. As shown by an arrow A in each driving vibration piece 15A, 15B, bending vibration is excited about the root to the connecting portion 2 in the X-axis direction. In this state, when the vibrator 1C is rotated around the Y axis as ω, bending vibrations in the Z-axis direction are excited in the respective detection vibrating pieces 16A and 16B as indicated by arrows E. An electric signal induced in the detection vibrating pieces 16A and 16B by the bending vibration E is output to obtain a differential.

図７は、本発明に係る振動子１１Ｄを概略的に示す斜視図である。連結部２から上方へと向かって一対の駆動振動片１５Ａ、１５Ｂが延びており、各駆動振動片の先端に幅広部５が設けられている。また各検出振動片１５Ａ、１５Ｂの各対向面にそれぞれ溝９が形成されており、この結果各駆動振動片の横断面形状はＨ字状になっている。各溝９の内壁面には駆動電極１０が設けられている。   FIG. 7 is a perspective view schematically showing a vibrator 11D according to the present invention. A pair of drive vibration pieces 15A and 15B extend upward from the connecting portion 2, and a wide portion 5 is provided at the tip of each drive vibration piece. Further, a groove 9 is formed on each facing surface of each detection vibrating piece 15A, 15B, and as a result, the cross-sectional shape of each driving vibration piece is H-shaped. A drive electrode 10 is provided on the inner wall surface of each groove 9.

連結部２の下側には、２対の検出振動片１６Ａ、１６Ｂ、１６Ｃ、１６Ｄが突出している。そして各検出振動片１６Ａ〜１６Ｄの先端にそれぞれ幅広部７が設けられている。各駆動振動片１５Ａ、１５Ｂに矢印Ａのように、Ｘ軸方向に向かって連結部２への付け根を中心として屈曲振動を励振する。この状態で振動子１ＣをＹ軸の周りにωのように回転させると、各検出振動片１６Ａ〜１６Ｄに、矢印ＥのようにＺ軸方向の屈曲振動が励振される。この屈曲振動Ｅによって検出振動片１６Ａ、１６Ｂに惹起される電気信号を出力し、差動をとる。これと同時に、この屈曲振動Ｅによって検出振動片１６Ｃ、１６Ｄに惹起される電気信号を出力し、差動をとる。   Two pairs of detection vibrating pieces 16A, 16B, 16C, and 16D protrude below the connecting portion 2. And the wide part 7 is provided in the front-end | tip of each detection vibration piece 16A-16D, respectively. As shown by an arrow A in each driving vibration piece 15A, 15B, bending vibration is excited about the root to the connecting portion 2 in the X-axis direction. In this state, when the vibrator 1C is rotated around the Y axis as ω, bending vibrations in the Z-axis direction are excited in the respective detection vibrating pieces 16A to 16D as indicated by arrows E. An electric signal induced in the detection vibrating pieces 16A and 16B by the bending vibration E is output to obtain a differential. At the same time, an electric signal caused by the bending vibration E is generated in the detection vibrating pieces 16C and 16D, and a differential is obtained.

図８は、図２〜図７に例示した横断面がＨ字形状の駆動振動片における駆動電極の構成例を示す一部断面図である。振動片は、一対の基部２０と、基部２０を連結する中央連結部２３とを備えており、これらによって一対の細長い溝９が形成されている。溝９内には駆動電極１０が形成されており、また基部２０の表面にも電極１０が形成されている。交流電源２５から各駆動電極１０に交流電圧を印加し、各屈曲振動片に交流電圧を印加し、矢印Ａ方向に駆動振動を励振する。   FIG. 8 is a partial cross-sectional view illustrating a configuration example of the drive electrode in the drive vibration piece whose cross section illustrated in FIGS. 2 to 7 is H-shaped. The resonator element includes a pair of base portions 20 and a central connection portion 23 that connects the base portions 20, and a pair of elongated grooves 9 are formed by these. A drive electrode 10 is formed in the groove 9, and the electrode 10 is also formed on the surface of the base 20. An AC voltage is applied from the AC power supply 25 to each drive electrode 10, an AC voltage is applied to each bending vibration piece, and drive vibration is excited in the direction of arrow A.

図８は、図６、図７に例示した横断面が十字形状の検出振動片における検出電極の構成例を示す一部断面図である。検出振動片１６Ａ、１６Ｂ、１６Ｃ、１６Ｄにおいては、検出振動片の各表面２８から一対の細長い突起２７が突出しており、全体として十字形状の断面を有している。この屈曲振動に基づく電圧を検出電極２９および検出部３０において検出する。   FIG. 8 is a partial cross-sectional view illustrating a configuration example of the detection electrode in the detection vibrating piece having a cross-shaped cross section illustrated in FIGS. 6 and 7. In the detection vibration pieces 16A, 16B, 16C, and 16D, a pair of elongated protrusions 27 protrude from each surface 28 of the detection vibration piece and have a cross-shaped cross section as a whole. The detection electrode 29 and the detection unit 30 detect a voltage based on this bending vibration.

図１、図２、図４、図５に示す各振動子を製造し、回転角速度検出時の感度および検出インピーダンスを測定した。   Each vibrator shown in FIG. 1, FIG. 2, FIG. 4, and FIG. 5 was manufactured, and the sensitivity and the detection impedance at the time of detecting the rotational angular velocity were measured.

具体的には、厚さ０．１ｍｍの水晶のＺ板のウエハーに、スパッタ法によって、所定位置に、厚さ１００オングストロームのクロム膜と、厚さ１５００オングストロームの金膜とを形成した。ウエハーの両面にレジストをコーティングした。
このウエハーを、ヨウ素とヨウ化カリウムとの水溶液に浸漬し、余分な金膜をエッチングによって除去し、更に硝酸セリウムアンモニウムと過塩素酸との水溶液にウエハーを浸漬し、余分なクロム膜をエッチングして除去した。温度８０℃の重フッ化アンモニウムに２０時間ウエハーを浸漬し、ウエハーをエッチングし、振動子の外形を形成した。メタルマスクを使用して、厚さ１００オングストロームのクロム膜上に厚さ２０００オングストロームの金膜を電極膜として形成した。振動子の寸法は、縦２．０ｍｍ、横２．０ｍｍ、厚さ０．１ｍｍであり、重量は約０．３ｍｇであった。 Specifically, a chromium film having a thickness of 100 angstroms and a gold film having a thickness of 1500 angstroms were formed at predetermined positions on a quartz Z-plate wafer having a thickness of 0.1 mm by sputtering. Resist was coated on both sides of the wafer.
This wafer is immersed in an aqueous solution of iodine and potassium iodide, and the excess gold film is removed by etching. Further, the wafer is immersed in an aqueous solution of cerium ammonium nitrate and perchloric acid, and the excess chromium film is etched. Removed. The wafer was immersed in ammonium bifluoride at a temperature of 80 ° C. for 20 hours, and the wafer was etched to form the outer shape of the vibrator. Using a metal mask, a gold film having a thickness of 2000 angstroms was formed as an electrode film on a chromium film having a thickness of 100 angstroms. The dimensions of the vibrator were 2.0 mm in length, 2.0 mm in width, 0.1 mm in thickness, and the weight was about 0.3 mg.

各振動子をパッケージに実装した。基板はアルミナセラミックスによって形成し、接点パッドは金によって形成し、枠体はＳＵＳによって形成した。ボンディングワイヤは、銅膜線を金によってメッキすることで製造した。銅膜線の厚さを0.014ｍｍとし、幅を0.0５ｍｍとした。銅膜線の本数は6本である。振動子の連結部をボンディングワイヤに対して超音波ボンディングによって接合し、基板上に固定した。   Each vibrator was mounted on a package. The substrate was formed of alumina ceramic, the contact pad was formed of gold, and the frame was formed of SUS. The bonding wire was manufactured by plating a copper film wire with gold. The thickness of the copper film wire was 0.014 mm and the width was 0.05 mm. The number of copper film wires is six. The connecting portion of the vibrator was bonded to the bonding wire by ultrasonic bonding and fixed on the substrate.

得られた振動型ジャイロスコープを恒温恒湿試験槽に入れた。そして、約４５ｋＨｚの駆動振動を電圧０．５ボルトで励振し、検出感度を測定した。また、印加電圧０．５ボルトにおいて検出インピーダンスをインピーダンスアナライザで測定した。   The obtained vibrating gyroscope was placed in a constant temperature and humidity test tank. Then, a driving vibration of about 45 kHz was excited with a voltage of 0.5 volts, and the detection sensitivity was measured. The detected impedance was measured with an impedance analyzer at an applied voltage of 0.5 volts.

この結果を図１０、図１１に示す。ただし、図１０、図１１において、「検出アーム本数」と各振動子とは以下の対応関係にある。
「検出アーム本数」が２ 図１の振動子１Ａ
「検出アーム本数」が３ 図４の振動子１Ｂ
「検出アーム本数」が４ 図２の振動子１１Ａ
「検出アーム本数」が６ 図５の振動子１１Ｃ The results are shown in FIGS. However, in FIG. 10 and FIG. 11, the “number of detection arms” and each transducer have the following correspondence relationship.
"Number of detection arms" is 2. Vibrator 1A in FIG.
“Number of detection arms” is 3. Vibrator 1B in FIG.
“Number of detection arms” is 4. Vibrator 11A in FIG.
“Number of detection arms” is 6. Vibrator 11C in FIG.

この結果から分かるように、本発明によれば、振動子の検出インピーダンスを低減し、検出感度を一層向上させることができる。   As can be seen from this result, according to the present invention, the detection impedance of the vibrator can be reduced and the detection sensitivity can be further improved.

参考例の振動子１Ａを概略的に示す斜視図である。It is a perspective view showing roughly vibrator 1A of a reference example. 本発明例の振動子１１Ａを概略的に示す斜視図である。It is a perspective view showing roughly vibrator 11A of the example of the present invention. 本発明例の振動子１１Ｂを概略的に示す斜視図である。It is a perspective view which shows roughly the vibrator | oscillator 11B of the example of this invention. 参考例の振動子１Ｂを概略的に示す斜視図である。It is a perspective view showing roughly vibrator 1B of a reference example. 本発明例の振動子１１Ｃを概略的に示す斜視図である。It is a perspective view which shows roughly the vibrator | oscillator 11C of the example of this invention. 参考例の振動子１Ｃを概略的に示す斜視図である。It is a perspective view showing roughly vibrator 1C of a reference example. 本発明例の振動子１１Ｄを概略的に示す斜視図である。It is a perspective view showing roughly vibrator 11D of the example of the present invention. 横断面が略Ｈ字形状の駆動振動片における駆動電極の構成例を示す部分断面図である。It is a fragmentary sectional view which shows the structural example of the drive electrode in the drive vibration piece with a substantially H-shaped cross section. 横断面が略十字形状の検出振動片における検出電極の構成例を示す部分断面図である。It is a fragmentary sectional view which shows the example of a structure of the detection electrode in the detection vibration piece whose cross section is substantially cross shape. 振動子における検出振動片の個数と検出感度との関係を示すグラフである。It is a graph which shows the relationship between the number of the detection vibration pieces in a vibrator | oscillator, and detection sensitivity. 振動子における検出振動片の個数と検出インピーダンスとの関係を示すグラフである。It is a graph which shows the relationship between the number of the detection vibration pieces in a vibrator | oscillator, and detection impedance.

符号の説明Explanation of symbols

２ 連結部 ３Ａ、３Ｂ 支持部 ４Ａ、４Ｂ、４Ｃ、４Ｄ、１５Ａ、１５Ｂ 駆動振動片 ５、７ 幅広部 ６Ａ、６Ｂ、６Ｃ、６Ｄ、６Ｅ、６Ｆ、６Ｇ、６Ｈ、６Ｊ、６Ｋ 所定面内で屈曲振動する検出振動片 １１Ａ、１１Ｂ、１１Ｃ、１１Ｄ 振動子 １６Ａ、１６Ｂ、１６Ｃ、１６Ｄ 所定面と略垂直な方向に屈曲振動する検出振動片 Ａ 所定面内の駆動振動 Ｃ 所定面内の検出振動 Ｅ 所定面に略垂直な方向の検出振動 Ｙ 所定面に平行な検出軸 Ｚ 所定面に略垂直な検出軸 Ｘ−Ｙ 所定面 ω 回転   2 Connection part 3A, 3B Support part 4A, 4B, 4C, 4D, 15A, 15B Drive vibration piece 5, 7 Wide part 6A, 6B, 6C, 6D, 6E, 6F, 6G, 6H, 6J, 6K Within a predetermined plane Detecting vibration piece 11A, 11B, 11C, 11D vibrator 16A, 16B, 16C, 16D Detection vibration piece bending and vibrating in a direction substantially perpendicular to a predetermined plane A Drive vibration in a predetermined plane C Detection vibration in a predetermined plane E Detection vibration in a direction substantially perpendicular to the predetermined surface Y Detection axis parallel to the predetermined surface Z Detection axis substantially perpendicular to the predetermined surface XY Predetermined surface ω rotation

Claims (6)

所定の検出軸に対応する物理量を測定するのに用いる振動子であって、
駆動振動片、前記検出軸に対応して振動する四個以上の検出振動片および前記駆動振動片と前記検出振動片との間に介在する連結部を備えていることを特徴とする、振動子。 A vibrator used to measure a physical quantity corresponding to a predetermined detection axis,
A vibrator comprising: a drive vibration piece; four or more detection vibration pieces that vibrate corresponding to the detection shaft; and a connecting portion interposed between the drive vibration piece and the detection vibration piece. . 前記振動子が所定面に沿って延びていることを特徴とする、請求項１記載の振動子。   The vibrator according to claim 1, wherein the vibrator extends along a predetermined plane. 前記駆動振動片および前記検出振動片が前記所定面内で屈曲振動することを特徴とする、請求項２記載の振動子。   The vibrator according to claim 2, wherein the driving vibration piece and the detection vibration piece vibrate in the predetermined plane. 前記駆動振動片が前記所定面内で屈曲振動し、前記検出振動片が前記所定面とは略垂直な方向に屈曲振動することを特徴とする、請求項２記載の振動子。   The vibrator according to claim 2, wherein the driving vibration piece bends and vibrates in the predetermined plane, and the detection vibration piece bends and vibrates in a direction substantially perpendicular to the predetermined surface. 前記検出振動片の個数が偶数であることを特徴とする、請求項１〜４のいずれか一つの請求項に記載の振動子。   The vibrator according to claim 1, wherein the number of the detection vibrating pieces is an even number. 請求項１〜５のいずれか一つの請求項に記載の振動子、前記振動子に前記駆動振動を励振する駆動手段、および前記検出振動を検出する検出手段を備えていることを特徴とする、物理量測定装置。   The vibrator according to any one of claims 1 to 5, the drive means for exciting the drive vibration to the vibrator, and the detection means for detecting the detection vibration, Physical quantity measuring device.
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