JP2005238632A5 - - Google Patents
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- JP2005238632A5 JP2005238632A5 JP2004051507A JP2004051507A JP2005238632A5 JP 2005238632 A5 JP2005238632 A5 JP 2005238632A5 JP 2004051507 A JP2004051507 A JP 2004051507A JP 2004051507 A JP2004051507 A JP 2004051507A JP 2005238632 A5 JP2005238632 A5 JP 2005238632A5
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- JP
- Japan
- Prior art keywords
- light sources
- light
- group
- exposure
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000002159 abnormal effect Effects 0.000 claims 3
- 230000005856 abnormality Effects 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 230000000295 complement effect Effects 0.000 claims 1
Claims (2)
前記露光ヘッドの光ビームの各出射部を走査方向に所定の間隔を有するように配列し、前記異常検出手段が前記複数の光源のうち何れかに発光異常を検出した場合、
前記複数の光源を、前記発光異常光源を含む第1グループと、正常な光源を含む第2グループとに分け、
前記第1グループの正常な光源と、第2グループの光源のうち前記発光異常光源を補完可能な光源のみを駆動し、露光を行うように構成したことを特徴とする露光装置。 In the exposure apparatus having an abnormality detection means for performing exposure on the recording medium by scanning an exposure head that irradiates light from a plurality of light sources driven separately, and detecting a light emission state of the plurality of light sources,
When the light emitting portions of the light beam of the exposure head are arranged so as to have a predetermined interval in the scanning direction, and the abnormality detection unit detects a light emission abnormality in any of the plurality of light sources,
Dividing the plurality of light sources into a first group including the abnormal emission light source and a second group including a normal light source;
An exposure apparatus configured to perform exposure by driving only light sources capable of complementing the abnormal light source among the first group of normal light sources and the second group of light sources.
前記複数の光源の総数が奇数の場合は、どちらかのグループの光源の数を1つ少ない数とし、かつ、上記グループの間で補完可能な光源の対応付けを行い、前記第1グループの正常な光源と、前記発光異常光源を補完可能な第2グループの光源のみを駆動し、露光するように構成したことを特徴とする請求項1に記載の露光装置。 When the total number of the plurality of light sources is an even number, the number of light sources of the first group and the second group is the same number,
When the total number of the plurality of light sources is an odd number, the number of light sources in one of the groups is reduced by one, and complementary light sources are associated between the groups so that the normality of the first group 2. The exposure apparatus according to claim 1, wherein only a light source and a second group of light sources capable of complementing the abnormal light emission light source are driven to perform exposure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004051507A JP2005238632A (en) | 2004-02-26 | 2004-02-26 | Optical lithography system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004051507A JP2005238632A (en) | 2004-02-26 | 2004-02-26 | Optical lithography system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005238632A JP2005238632A (en) | 2005-09-08 |
JP2005238632A5 true JP2005238632A5 (en) | 2007-04-12 |
Family
ID=35020888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004051507A Withdrawn JP2005238632A (en) | 2004-02-26 | 2004-02-26 | Optical lithography system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2005238632A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4460587B2 (en) | 2007-04-20 | 2010-05-12 | 大日本スクリーン製造株式会社 | Exposure equipment |
JP4523075B2 (en) * | 2010-01-18 | 2010-08-11 | 大日本スクリーン製造株式会社 | Exposure equipment |
JP4505047B2 (en) * | 2010-01-18 | 2010-07-14 | 大日本スクリーン製造株式会社 | Exposure equipment |
-
2004
- 2004-02-26 JP JP2004051507A patent/JP2005238632A/en not_active Withdrawn
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