JP2005238632A5

JP2005238632A5 -

Info

Publication number: JP2005238632A5
Application number: JP2004051507A
Authority: JP
Filing date: 2004-02-26
Publication date: 2007-04-12

Claims

それぞれ別個に駆動される複数の光源からの光を照射する露光ヘッドを走査することにより記録媒体に露光を行うとともに、前記複数の光源の発光状態を検出する異常検出手段を有する露光装置において、
前記露光ヘッドの光ビームの各出射部を走査方向に所定の間隔を有するように配列し、前記異常検出手段が前記複数の光源のうち何れかに発光異常を検出した場合、
前記複数の光源を、前記発光異常光源を含む第１グループと、正常な光源を含む第２グループとに分け、
前記第１グループの正常な光源と、第２グループの光源のうち前記発光異常光源を補完可能な光源のみを駆動し、露光を行うように構成したことを特徴とする露光装置。 In the exposure apparatus having an abnormality detection means for performing exposure on the recording medium by scanning an exposure head that irradiates light from a plurality of light sources driven separately, and detecting a light emission state of the plurality of light sources,
When the light emitting portions of the light beam of the exposure head are arranged so as to have a predetermined interval in the scanning direction, and the abnormality detection unit detects a light emission abnormality in any of the plurality of light sources,
Dividing the plurality of light sources into a first group including the abnormal emission light source and a second group including a normal light source;
An exposure apparatus configured to perform exposure by driving only light sources capable of complementing the abnormal light source among the first group of normal light sources and the second group of light sources.

前記複数の光源の総数が偶数の場合は、前記第１グループ及び前記第２グループの光源の数を同数とし、
前記複数の光源の総数が奇数の場合は、どちらかのグループの光源の数を１つ少ない数とし、かつ、上記グループの間で補完可能な光源の対応付けを行い、前記第１グループの正常な光源と、前記発光異常光源を補完可能な第２グループの光源のみを駆動し、露光するように構成したことを特徴とする請求項１に記載の露光装置。 When the total number of the plurality of light sources is an even number, the number of light sources of the first group and the second group is the same number,
When the total number of the plurality of light sources is an odd number, the number of light sources in one of the groups is reduced by one, and complementary light sources are associated between the groups so that the normality of the first group 2. The exposure apparatus according to claim 1, wherein only a light source and a second group of light sources capable of complementing the abnormal light emission light source are driven to perform exposure.