JP2005227300A - Oxygen sensor and manufacturing method for sensor element - Google Patents
Oxygen sensor and manufacturing method for sensor element Download PDFInfo
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Abstract
Description
本発明は、酸素濃度を検出するセンサ素子を備える酸素センサ及びセンサ素子の製造方法に関する。 The present invention relates to an oxygen sensor including a sensor element that detects an oxygen concentration and a method for manufacturing the sensor element.
センサ素子を備える酸素センサを空燃比センサ等として、排気ガスに晒した場合、電極は鉛、リン、ケイ素等の被毒物質により被毒し、経時的に劣化して十分な起電力が得られなくなる。この電極の耐久性の低下という問題に対処するセンサが特公平６−９０１７６号公報、特開平９−１１３４８０号公報等に開示されている。しかし、排ガスに含まれる被毒物質の影響を最も受け易い低温域において、電極の被毒が十分に防止されるセンサは未だ得られていなかった。 When an oxygen sensor equipped with a sensor element is exposed to exhaust gas as an air-fuel ratio sensor, etc., the electrode is poisoned by poisonous substances such as lead, phosphorus, silicon, etc., and deteriorates over time, and sufficient electromotive force is obtained. Disappear. Japanese Patent Publication No. 6-90176, Japanese Patent Application Laid-Open No. 9-113480, and the like disclose sensors that deal with the problem of a decrease in electrode durability. However, a sensor that can sufficiently prevent electrode poisoning has not yet been obtained in a low temperature range that is most susceptible to the effects of poisoning substances contained in exhaust gas.
本発明は、上記の問題点を解決するものであり、比較的低温の排気ガスに接触した場合にも、被毒物質による電極の被毒が防止され、耐久性に優れるセンサ素子を備える酸素センサ及びセンサ素子の製造方法を提供することを目的とする。 The present invention solves the above-described problems, and an oxygen sensor including a sensor element that is superior in durability and prevents poisoning of an electrode due to a poisoning substance even when contacted with a relatively low temperature exhaust gas. And it aims at providing the manufacturing method of a sensor element.
本発明の酸素センサは、検知電極、該検知電極の表面に形成される電極保護層及び該電極保護層の表面に形成される被毒防止層を有するセンサ素子を備える酸素センサにおいて、該被毒防止層が粒径の大きなセラミック粉末（以下粗粒粉末とも言う）の周囲を小さなセラミック粉末（以下微粒粉末とも言う）が覆ってなる複合粉末からなり、該複合粉末同士の間隙に微粒粉末が充填されていない空孔が分散して存在する様に構成したものである。 The oxygen sensor of the present invention is an oxygen sensor comprising a sensor element having a detection electrode, an electrode protective layer formed on the surface of the detection electrode, and a poisoning prevention layer formed on the surface of the electrode protective layer. The prevention layer is composed of a composite powder in which a ceramic powder with a large particle diameter (hereinafter also referred to as a coarse powder) is covered with a small ceramic powder (hereinafter also referred to as a fine powder), and the gap between the composite powders is filled with the fine powder. The structure is such that vacancies that are not formed are dispersed.
本発明によれば、特定の粒子径を有する微細なセラミック粉末と比較的粒子径が大きく粒度分布の狭いセラミック粉末とを含有する被毒防止層とすることにより、排気ガスに含まれる鉛等の被毒物質と、特に低温において接触した場合であっても、被毒が効率的に防止され、且つこの被毒防止層が電極保護層から剥離し難く、応答性の変化の少ない優れた性能の酸素センサを得ることができる。また、比表面積の異なるセラミック粉末を含む被毒防止層形成用ペーストを用いることにより、請求項１乃至１３に記載の酸素センサを容易に製造することができる。 According to the present invention, by using a poisoning prevention layer containing a fine ceramic powder having a specific particle size and a ceramic powder having a relatively large particle size and a narrow particle size distribution, such as lead contained in exhaust gas Even when contacted with poisonous substances, especially at low temperatures, poisoning is efficiently prevented, and this poisoning prevention layer is difficult to peel off from the electrode protective layer, and has excellent performance with little change in responsiveness. An oxygen sensor can be obtained. Moreover, the oxygen sensor of Claim 1 thru | or 13 can be easily manufactured by using the paste for poisoning prevention layer forming containing the ceramic powder from which a specific surface area differs.
上記の様に被毒防止層を形成することで、被毒物質は微粒粉末によってトラップされ、酸素センサの電極に到達しないので、被毒による酸素センサの性能劣化を防止する事が出来る。一方で微粒粉末は粗粒粉末に担持されているので、微粒粉末だけで構成された被毒防止層の様に高温での連続使用により被毒防止層が焼き締まり、センサ素子表面から剥離するという問題を防ぐ事が出来る。更に、微粒粉末は粗粒粉末の表面を覆う様に担持されているが、粗粒粉末間には適度に粗粒粉末程度の大きさの空孔が形成されており、微粒粉末は粗粒粉末間の間隙を完全に充填してはいないので、被毒物質が堆積しても被毒防止層が目詰まりを起こす事が無く、センサの応答性の低下を防止する事が出来る。
上記の様な被毒防止層を構成するセラミック粉末の一次粒子の粒度分布は、少なくとも二つのピークを有し、最も粒径が小さい側のピークが１０μｍ以下にあり、最も粒径が大きい側のピークは０．１μｍ以上であると、被毒に対する防止効果が高く望ましい被毒防止層である。
ここで、最も粒径が小さい側のピークは１μｍ以下であることが好ましく、０．０５μｍ以下、特に０．０１μｍ以下にすることもできる。また、最も粒径が大きい側のピークは１μｍ以上、特に１０μｍ以上であることが好ましい。
By forming the poisoning prevention layer as described above, the poisoning substance is trapped by the fine powder and does not reach the electrode of the oxygen sensor, so that the performance deterioration of the oxygen sensor due to poisoning can be prevented. On the other hand, since the fine powder is supported on the coarse powder, the poison prevention layer is burnt down by continuous use at a high temperature like the poison prevention layer composed only of the fine powder, and peels off from the sensor element surface. You can prevent problems. Furthermore, although the fine powder is supported so as to cover the surface of the coarse powder, pores of a size roughly equivalent to the coarse powder are formed between the coarse powder, and the fine powder is a coarse powder. Since the gap between them is not completely filled, the poisoning prevention layer will not be clogged even if the poisoning substance is deposited, and the sensor response can be prevented from being lowered.
The particle size distribution of the primary particles of the ceramic powder constituting the poisoning prevention layer as described above has at least two peaks, the peak on the side having the smallest particle size is 10 μm or less, and the particle on the side having the largest particle size. When the peak is 0.1 μm or more, it is a desirable poisoning prevention layer having a high prevention effect against poisoning.
Here, the peak on the side having the smallest particle diameter is preferably 1 μm or less, and may be 0.05 μm or less, and particularly 0.01 μm or less. The peak on the side with the largest particle size is preferably 1 μm or more, particularly preferably 10 μm or more.
なお、被毒防止層の下地である電極保護層が溶射によって形成されていると、粗粒の食いつきが良く望ましい。
上記「被毒防止層」に含有される上記「セラミック粉末」としては、チタニア、アルミナ、シリカ、及びスピネル、ムライト等のアルミニウム原子を含む複合酸化物などの、高温の排気ガス中で化学的に安定である酸化物粉末から選択することが好ましい。但し、化学的に安定であれば酸化物以外の粉末を使用することもできる。この場合、組成の異なる２種類以上のセラミック粉末を混合してもよい。そして、一方の組成のセラミック粉末を微粒粉末とし、他方の組成のセラミック粉末を粗粒粉末とすると、粉末の選択において自由度が広がり、望ましい粒度分布の粉末を用意することが容易となるし、被毒防止効果の高いセラミック粉末を微粒粉末として用い、高温耐久性の高いセラミック粉末を粗粒粉末として用いる事もできるので都合が良い。
In addition, when the electrode protective layer which is the foundation | substrate of a poisoning prevention layer is formed by thermal spraying, the biting of a coarse grain is good and desirable.
The “ceramic powder” contained in the “poisoning prevention layer” is chemically used in high-temperature exhaust gases such as titania, alumina, silica, and composite oxides containing aluminum atoms such as spinel and mullite. It is preferred to select from oxide powders that are stable. However, powders other than oxides can be used as long as they are chemically stable. In this case, two or more kinds of ceramic powders having different compositions may be mixed. Then, if the ceramic powder of one composition is a fine powder and the ceramic powder of the other composition is a coarse powder, the degree of freedom in powder selection is widened, and it becomes easy to prepare a powder with a desired particle size distribution, A ceramic powder having a high poisoning prevention effect can be used as a fine powder, and a ceramic powder having a high temperature durability can be used as a coarse powder.
組成の異なる２種類以上のセラミック粉末としては、１μｍ以下に粒度分布のピークを有するチタニア粉末と、１０μｍ以上に粒度分布のピークを有するチタニア以外のセラミック粉末とが含有されることが好ましい。
チタニアは被毒物質を吸着する能力に優れていると考えられる。特にアナターゼ型のチタニアは粒径の小さな粉末が得られ易く、被毒防止効果が高い。
チタニア以外のセラミック粉末としては、特に、スピネル、ムライト等のアルミニウム原子を含む複合酸化物のように熱収縮しにくいセラミック粉末が好ましい。
また、チタニア粉末は０．００３〜０．５μｍにピークを有し、チタニア以外のセラミック粉末は１５〜５０μｍにピークを有する様に組み合わされると、適度に被毒防止層に空隙が形成されて特に好ましい。このような粉末を含有すれば、被毒物質は十分に吸着され、且つ被毒防止層が熱収縮により電極保護層から剥離することがなく、且つ応答性の低下の少ないより優れた耐久性を有する被毒防止層とすることができる。
The two or more types of ceramic powders having different compositions preferably contain titania powder having a particle size distribution peak at 1 μm or less and ceramic powders other than titania having a particle size distribution peak at 10 μm or more.
Titania is considered to have excellent ability to adsorb poisonous substances. In particular, anatase-type titania is easy to obtain a powder having a small particle size and has a high poisoning prevention effect.
The ceramic powder other than titania is particularly preferably a ceramic powder that hardly undergoes thermal shrinkage, such as a composite oxide containing aluminum atoms such as spinel and mullite.
Moreover, when the titania powder has a peak at 0.003 to 0.5 μm and the ceramic powder other than titania is combined so as to have a peak at 15 to 50 μm, voids are appropriately formed in the poisoning prevention layer. preferable. When such a powder is contained, the poisoning substance is sufficiently adsorbed, and the poisoning prevention layer is not peeled off from the electrode protective layer due to heat shrinkage, and has a superior durability with little decrease in responsiveness. It can be set as the poisoning prevention layer which has.
即ち１μｍ以下好ましくは０．００３〜０．５μｍに粒度分布のピークを有する粒子径の小さい粉末と、１０μｍ以上好ましくは１５〜５０μｍに粒径分布のピークを有する粒子径の大きい粉末とを使用した場合、被毒防止層は、図１（ａ）及び（ｂ）のように、粒子径の大きい粉末の粒子表面に粒子径の小さい粉末の粒子が多数付着した複合粒子からなる粉末が適度に粗粒粉末程度の大きさの空孔を形成した状態で被毒防止層を形作るので、通気性は十分に維持され、且つ被毒物質は確実に吸着され、非常に耐久性の高い被毒防止層とすることができる。 That is, a powder having a small particle size having a particle size distribution peak of 1 μm or less, preferably 0.003 to 0.5 μm, and a powder having a large particle size having a particle size distribution peak of 10 μm or more, preferably 15 to 50 μm were used. In this case, as shown in FIGS. 1 (a) and 1 (b), the poisoning prevention layer has a moderately coarse powder composed of composite particles in which a large number of small particles are attached to the surface of the large particles. Since the poisoning prevention layer is formed in a state where pores as large as granular powder are formed, the air permeability is sufficiently maintained, and the poisoning substance is securely adsorbed, and the poisoning prevention layer is extremely durable. It can be.
なお、粗粒粉末と微粒粉末としては、同組成であって結晶相の異なる粉末を選択する事も出来る。特に微粒粉末としてアナターゼ型チタニア粉末を用い、粗粒粉末としてルチル型チタニア粉末を用いることが好ましい。これらの粉末はいずれもチタニア粉末であるが結晶相を異にするものであり、粒度分布の狭い粒子径を有する微粒粉末或いは粗粒粉末として提供されているので、通気性の良い被毒防止層を形成するのに適している。アナターゼ型チタニア粉末の粒子径は粒度分布のピークが０．５μｍ以下である事が望ましく、０．００３〜０．５μｍの範囲に有ることが被毒防止効果の点で更に好ましい。ルチル型チタニア粉末の粒子径は粒度分布のピークが１μｍ以上である事が望ましく、３〜８μｍの範囲に有ることが被毒防止効果の点で更に好ましい。このように０．００３〜０．５μｍ程度の粒子径が極めて小さいアナターゼ型チタニア粉末をこれに比べて粒子径が大きいルチル型チタニアとを組み合わせることにより、被毒物質を捕捉する作用に優れる被毒防止層とする事が出来る。また、同じ組成のセラミック粉末を用いることで複合粒子の形成が容易となり、被毒防止効果の高い被毒防止層を形成出来る。 As the coarse powder and fine powder, powders having the same composition and different crystal phases can be selected. In particular, it is preferable to use anatase-type titania powder as the fine powder and rutile-type titania powder as the coarse powder. These powders are titania powders, but have different crystal phases, and are provided as fine powders or coarse powders having a narrow particle size distribution, so that the poisoning prevention layer has good air permeability. Suitable for forming. The particle diameter of the anatase type titania powder is preferably such that the peak of the particle size distribution is 0.5 μm or less, and more preferably in the range of 0.003 to 0.5 μm from the viewpoint of the poisoning prevention effect. The particle size of the rutile-type titania powder is preferably 1 μm or more in the peak of the particle size distribution, and more preferably in the range of 3 to 8 μm from the viewpoint of the poisoning prevention effect. In this way, the anatase titania powder having an extremely small particle size of about 0.003 to 0.5 μm is combined with the rutile type titania having a larger particle size compared to this, thereby being excellent in the action of trapping poisonous substances. It can be a prevention layer. Further, by using ceramic powder having the same composition, formation of composite particles is facilitated, and a poisoning prevention layer having a high poisoning prevention effect can be formed.
製品の被毒防止層の粒度分布を評価する場合には、一つには粒子径は電子顕微鏡の視野において、又はこれを撮影した写真から読み取ることができる。電子顕微鏡の視野から粒子径を読み取る場合は、目視で確認できる１次粒子の各々について、その外接円径を測定して粒子径とする。上記の粒子径の測定を多数（１０００個程度）の１次粒子について行い、粒度分布を算出する。組成の異なる酸化物粉末を用いた場合には、各組成の酸化物粉末について、粒子径を測定し、粒度分布を測定することもできるが、本発明の趣旨から考えて、微粒粉末と粗粒粉末を混合した状態で粒子径を測定する場合は、組成の異なるセラミック粉末毎に粒度分布を測定しなくても、被毒防止層からランダムにサンプリングした粒子径を用いて粒度分布を測定すればよい。その結果として最も粒子径が小さい側のピークが１μｍ以下にあり、最も粒子径が大きい側のピークが０．１μｍ以上にあればよい。 When assessing the particle size distribution of the product poisoning prevention layer, the particle size can be read, for example, in the field of view of an electron microscope or from a photograph taken. When reading the particle diameter from the field of view of an electron microscope, the circumscribed circle diameter of each primary particle that can be visually confirmed is measured to obtain the particle diameter. The particle size is measured for a large number (about 1000) of primary particles, and the particle size distribution is calculated. When oxide powders having different compositions are used, the particle diameter can be measured and the particle size distribution can be measured for the oxide powders of each composition, but in view of the gist of the present invention, fine powder and coarse particles When measuring the particle size with the powder mixed, the particle size distribution can be measured using the particle size randomly sampled from the poisoning prevention layer, without measuring the particle size distribution for each ceramic powder of different composition. Good. As a result, the peak on the side with the smallest particle diameter should be 1 μm or less, and the peak on the side with the largest particle diameter should be 0.1 μm or more.
一方、微粒粉末の粒度分布は、一般的な走査型電子顕微鏡等では測定が難しいこともあり、その場合は、高解像度の電子顕微鏡を用いることで、上記と同様に測定できるが、粉末の粒度分布を測定するＸ線小角散乱法を用いてＳｃｈｅｌｌｅｒの式より算出することもできる。
粒度分布は、他にもレーザ光回折法や遠心沈降法など、一般的に利用されている方法でも測定できる。但し、同じ試料に対して、細かい領域から粗い領域まで同じ測定法で粒度分布を測定することは難しいことが多い。その場合は、細かい領域と粗い領域の粒度分布を別の測定法で測定してそれぞれの粒度分布から上記被毒防止層の粒度分布を同定してもよい。
On the other hand, the particle size distribution of the fine powder may be difficult to measure with a general scanning electron microscope or the like, and in this case, it can be measured in the same manner as described above by using a high-resolution electron microscope. It can also be calculated from the Scheller equation using the X-ray small angle scattering method for measuring the distribution.
The particle size distribution can be measured by other commonly used methods such as laser beam diffraction and centrifugal sedimentation. However, it is often difficult to measure the particle size distribution with the same measurement method from the fine region to the rough region for the same sample. In that case, the particle size distribution of the fine region and the rough region may be measured by different measurement methods, and the particle size distribution of the poisoning prevention layer may be identified from each particle size distribution.
本発明の酸素センサのセンサ素子を製造する方法としては、１種類以上の第１セラミック粉末と、一次粒子の粒度分布のピークが該第１セラミック粉末の一次粒子の粒度分布のピークよりも粒径の大きい側にあり、粒径の小さな側の１０％の粒子の最大粒径（以下１０％粒径又はｄ１０と言う）と粒径の小さな側の９０％の粒子の最大粒径（以下９０％粒径又はｄ９０と言う）の差が、粒度分布のピーク値の粒径の２倍以下である粒度分布を有する１種類以上の第２セラミック粉末と、有機バインダと溶剤を混練して被毒防止層形成用ペーストを調製し、該被毒防止層形成用ペーストを酸素センサ素子の電極保護層の表面に塗布して塗膜とし、その後、該塗膜を加熱し、乾燥させ、上記被毒防止層を形成するという方法を用いる事が出来る。この製造方法によれば、被毒防止層中における粗粒粉末となる第２のセラミック粉末として、粒度分布のピーク近傍に粒径の揃った粉末を用いるので、被毒防止層中に粗粒粉末程度の大きさの空孔が分散して存在するような被毒防止層を形成することが容易に達成できる。なお、被毒防止層形成用ペーストには適宜無機バインダを混入させることで、微粒粉末が粗粒粉末の表面に密着するので、良好な被毒防止層を形成する事が出来る。また、微粒粉末となる第１セラミック粉末及び粗粒粉末となる第２セラミック粉末は耐熱性の高い酸化物である事が望ましい。
特に第１セラミック粉末として比表面積が２〜５００ｍ２／ｇであるチタニア粉末等を用い、第２セラミック粉末として比表面積が０．１〜１００ｍ２／ｇであるアルミニウム原子を含む複合酸化物の粉末等を用いる事が出来る。更に第１セラミック粉末として比表面積が２〜５００ｍ２／ｇのアナターゼ型チタニア粉末、及び第２セラミック粉末として比表面積が０．１〜１０ｍ２／ｇのルチル型チタニア粉末を使用し、同様にして被毒防止層を形成することもできる。
As a method for producing the sensor element of the oxygen sensor of the present invention, the particle size distribution peak of one or more types of first ceramic powder and primary particles is larger than the particle size distribution peak of primary particles of the first ceramic powder. The maximum particle size of 10% particles on the small particle size side (hereinafter referred to as 10% particle size or d10) and the maximum particle size of 90% particles on the small particle size side (hereinafter 90%) To prevent poisoning, one or more second ceramic powders having a particle size distribution whose particle size or d90) is less than twice the particle size of the peak value of the particle size distribution, an organic binder and a solvent are kneaded. A layer forming paste is prepared, and the poisoning prevention layer forming paste is applied to the surface of the electrode protection layer of the oxygen sensor element to form a coating film, and then the coating film is heated and dried to prevent the poisoning. A method of forming a layer can be used. According to this manufacturing method, since the powder having a uniform particle size near the peak of the particle size distribution is used as the second ceramic powder that becomes the coarse powder in the poisoning prevention layer, the coarse powder in the poisoning prevention layer. It is possible to easily achieve a poisoning prevention layer in which pores of a certain size are present in a dispersed manner. In addition, since an inorganic binder is appropriately mixed in the poisoning prevention layer forming paste, the fine powder adheres to the surface of the coarse powder, so that a good poisoning prevention layer can be formed. Moreover, it is desirable that the first ceramic powder to be fine powder and the second ceramic powder to be coarse powder are oxides having high heat resistance.
In particular a specific surface area using a titania powder or the like is 2~500m 2 / g as a first ceramic powder, powder of composite oxide specific surface area as the second ceramic powder comprises aluminum atoms is 0.1 to 100 m 2 / g Etc. can be used. Furthermore, anatase type titania powder having a specific surface area of 2 to 500 m 2 / g is used as the first ceramic powder, and a rutile type titania powder having a specific surface area of 0.1 to 10 m 2 / g is used as the second ceramic powder. A poisoning prevention layer can also be formed.
第１セラミック粉末の比表面積は２〜５００ｍ２／ｇであり、特に５〜３００ｍ２／ｇであることが好ましい。この比表面積が２ｍ２／ｇ未満であると、被毒物質の物理的な捕捉及び反応がともに低下し、５００ｍ２／ｇを越える場合は、粉末が凝集し易くなり、また、被毒物質との反応活性が高くなりすぎ、得られる酸素センサが高温環境下で徐々に応答性が変化するため好ましくない。一方、第２セラミック粉末の比表面積は０．１〜１００ｍ２／ｇであり、特に０．３〜１０ｍ２／ｇであることが好ましい。この比表面積が０．１ｍ２／ｇ未満であると、平滑な表面を有する均質な被毒防止層を形成することができず、１００ｍ２／ｇを越える場合は、被毒防止層の凝集を十分に抑えることができない。また、第２セラミック粉末の比表面積が上記範囲であると粗粒粉末の間隙に空孔が分散して形成されるので、通気性が良好な被毒防止層とすることが出来る。
尚、比表面積はＢＥＴ法によって測定することができる。また、粉末の比表面積が特に大きい場合は、ユアサアイオニクス社製の全自動表面積測定装置、型式「マルチソーブ１２」を用いて測定することができる。
The specific surface area of the first ceramic powder is 2 to 500 m 2 / g, and particularly preferably 5 to 300 m 2 / g. When the specific surface area is less than 2 m 2 / g, physical capture and reaction of the poisonous substance are both reduced, and when the specific surface area exceeds 500 m 2 / g, the powder tends to aggregate, This is not preferable because the reaction activity of the oxygen sensor becomes too high, and the obtained oxygen sensor gradually changes its responsiveness in a high temperature environment. On the other hand, the specific surface area of the second ceramic powder is 0.1 to 100 m 2 / g, it is preferable in particular 0.3~10m 2 / g. If the specific surface area is less than 0.1 m 2 / g, a homogeneous poisoning prevention layer having a smooth surface cannot be formed. If it exceeds 100 m 2 / g, the poisoning prevention layer is agglomerated. It cannot be suppressed sufficiently. In addition, when the specific surface area of the second ceramic powder is within the above range, pores are dispersed in the gaps of the coarse powder, so that a poisoning prevention layer having good air permeability can be obtained.
The specific surface area can be measured by the BET method. In addition, when the specific surface area of the powder is particularly large, it can be measured using a fully automatic surface area measuring device manufactured by Yuasa Ionics, model “Multisorb 12”.
第１セラミック粉末と第２セラミック粉末とは、被毒防止層形成用ペーストを１００質量部（以下、単に「部」という。）とした場合に、それぞれ１５部以上であることが好ましい。いずれか一方、特に第１セラミック粉末が１５部未満であると、被毒物質を十分に捕捉することができない。また、第２セラミック粉末が１５部未満であると被毒防止層中の粗粒粉末間に適度に空孔が形成されず、通気性が維持できない。被毒防止層中に適度な空孔を形成する為にはそれぞれ２０〜５０部含まれていることがより好ましい。尚、セラミック粉末には本発明の主要な構成要件である各々の粉末以外の他のセラミック粉末を混合することもできるが、セラミック粉末全体の粒度分布が本発明の主旨から外れるようなセラミック粉末の混合は望ましくない。 The first ceramic powder and the second ceramic powder are each preferably 15 parts or more when the poisoning prevention layer forming paste is 100 parts by mass (hereinafter simply referred to as “parts”). On the other hand, particularly when the first ceramic powder is less than 15 parts, the poisoning substance cannot be sufficiently captured. If the second ceramic powder is less than 15 parts, pores are not appropriately formed between the coarse particles in the poisoning prevention layer, and the air permeability cannot be maintained. In order to form appropriate pores in the poisoning prevention layer, it is more preferable to contain 20 to 50 parts each. The ceramic powder may be mixed with other ceramic powders other than the respective powders, which are the main constituents of the present invention. However, the ceramic powder has a particle size distribution that deviates from the gist of the present invention. Mixing is undesirable.
また、第１セラミック粉末と第２セラミック粉末との混合量比は特に限定されないが、いずれか一方を１００部とした場合に、他方を４０〜２５０部、特に８０〜１３０部とすることが好ましく、等量程度とすることもできる。これらの粉末の量比に大きな差がなければ、被毒物質を捕捉する作用に優れ、空孔が適度に分散して存在する被毒防止層をより効率的に形成することができる。 Further, the mixing ratio of the first ceramic powder and the second ceramic powder is not particularly limited, but when one of them is 100 parts, the other is preferably 40 to 250 parts, particularly 80 to 130 parts. , Or about the same amount. If there is no significant difference in the amount ratio of these powders, it is excellent in the action of trapping poisonous substances, and a poisoning prevention layer in which pores are appropriately dispersed can be formed more efficiently.
上記「被毒防止層形成用ペースト」は、セラミック粉末、有機バインダ及びメタノール、キシレン等の溶剤、更に適宜無機バインダなどを混合することにより得られる。電極保護層の表面に形成される塗膜は１００〜１５０℃で５〜２０分程度乾燥することにより、十分に固化して硬くなり、乾燥の後、センサ素子を保護管ソケットに取り付ける等した後、３００〜７００℃、特に４００〜６００℃程度に調温されたａｓｓｙ炉等によって還元雰囲気下、２０〜６０分程度加熱し、所定の被毒防止作用及び厚さ等を有する被毒防止層を有するセンサ素子とすることができる。 The “poisoning prevention layer forming paste” can be obtained by mixing ceramic powder, an organic binder, a solvent such as methanol and xylene, and an inorganic binder as appropriate. The coating film formed on the surface of the electrode protective layer is sufficiently solidified and hardened by drying at 100 to 150 ° C. for about 5 to 20 minutes. After drying, after attaching the sensor element to the protective tube socket, etc. 300 to 700 ° C., in particular, heated in a reducing atmosphere by an assy furnace adjusted to about 400 to 600 ° C. for about 20 to 60 minutes to form a poisoning prevention layer having a predetermined poisoning prevention action and thickness, etc. It can be set as the sensor element which has.
被毒防止層の厚さは５０〜３００μｍ、特に１５０〜２５０μｍ程度とすることが好ましい。この厚さが過小であると、被毒物質を十分に捕捉することができないことがある。一方、２５０μｍを超える場合は、得られる酸素センサの応答性が低下し、更には被毒防止層が電極保護層から剥離し易くなる傾向にあり好ましくない。 The thickness of the poisoning prevention layer is preferably about 50 to 300 μm, particularly about 150 to 250 μm. If this thickness is too small, the poisoned substance may not be sufficiently captured. On the other hand, when it exceeds 250 μm, the responsiveness of the obtained oxygen sensor is lowered, and further, the poisoning prevention layer tends to be easily peeled off from the electrode protective layer, which is not preferable.
以下、実施例により本発明を具体的に説明する。
（１）酸素センサの製造
純度９９％以上のジルコニアに純度９９．９％のイットリアを５モル％添加し、湿式混合した後、１３００℃で２時間仮焼した。これに水を添加し、ボールミルを使用して粒子の８０％が２．５μｍ以下の粒子径になるまで湿式粉砕し、その後、水溶性バインダを添加し、スプレードライヤ法によって平均粒子径７０μｍの球状の粉末とした。
Hereinafter, the present invention will be described specifically by way of examples.
(1) Production of
この粉末を用い、ラバープレス法によって所定の有底円筒状の成形体を得、これを乾燥し、砥石にて研削し、その形状を整えた。次いで、成形体の外表面に、上記粉末に水溶性バインダ及び水を添加して調製したスラリーを付着させ、乾燥させた。その後、１５００℃で２時間保持して焼成し、固体電解質基体を作製した。次いで、この基体の外表側に、排気ガス等の被検出ガスに晒される厚さ１〜２μｍの白金電極を無電解メッキ法によって形成し、検知電極とした。その後、基体の内表側に、大気に晒される厚さ１〜２μｍの白金電極を無電解メッキ法により設け、基準電極とした。次いで、大気雰囲気下、１２００℃で１時間熱処理し、検出電極の緻密性を向上させた。その後、プラズマ溶射法によって、検知電極の表面にスピネル（ＭｇＡｌ2Ｏ４）の粉末を塗着させ、電極保護層を形成した。 Using this powder, a predetermined bottomed cylindrical shaped body was obtained by a rubber press method, dried, ground with a grindstone, and its shape was adjusted. Next, a slurry prepared by adding a water-soluble binder and water to the powder was attached to the outer surface of the molded body and dried. Thereafter, it was held at 1500 ° C. for 2 hours and fired to produce a solid electrolyte substrate. Next, a platinum electrode having a thickness of 1 to 2 [mu] m exposed to a gas to be detected such as exhaust gas was formed on the outer surface side of the substrate by an electroless plating method to form a detection electrode. After that, a platinum electrode having a thickness of 1 to 2 μm exposed to the atmosphere was provided on the inner surface side of the substrate by an electroless plating method, and used as a reference electrode. Subsequently, heat treatment was performed at 1200 ° C. for 1 hour in an air atmosphere to improve the density of the detection electrode. Thereafter, spinel (MgAl 2 O 4 ) powder was applied to the surface of the detection electrode by plasma spraying to form an electrode protective layer.
次いで、表１乃至２に記載の種類及び量比の、粉末（１）と粉末（２）、並びに所定量の溶媒とアルミナゾルを、ナイロン玉石を使用し、ポットミルにより混合し、スラリーを調製した。尚、スラリーを１００質量％とした場合に、実験例１〜９では、粉末（１）と（２）の合計量を７０質量％、有機バインダを含むメタノールを２３質量％、アルミナゾルを７質量％とし、実験例１０〜１５では、粉末（１）と（２）の合計量を５０質量％、水を４０質量％、アルミナゾルを１０質量％とし、実験例１６〜３３では、粉末（１）と（２）の合計量を５６質量％、水を３５質量％、アルミナゾルを９質量％とした。その後、電極保護層が形成された基体をスラリー中に浸漬し、電極保護層の表面に塗膜を形成し、１２０℃で乾燥して厚さ５０〜３００μｍ（望ましくは１５０〜２５０μｍ）の被毒防止層を形成し、センサ素子を作製した。次いで、このセンサ素子を保護管ソケットに組み付ける等した後、５００℃で加熱して酸素センサを得た。 Next, powder (1) and powder (2), and a predetermined amount of solvent and alumina sol having the types and ratios shown in Tables 1 and 2 were mixed by a pot mill using nylon cobblestone to prepare a slurry. When the slurry was 100% by mass, in Experimental Examples 1 to 9, the total amount of powders (1) and (2) was 70% by mass, methanol containing an organic binder was 23% by mass, and alumina sol was 7% by mass. In Experimental Examples 10 to 15, the total amount of the powders (1) and (2) is 50 mass%, water is 40 mass%, and the alumina sol is 10 mass%. In Experimental Examples 16 to 33, the powder (1) and The total amount of (2) was 56 mass%, water was 35 mass%, and alumina sol was 9 mass%. Thereafter, the substrate on which the electrode protective layer is formed is immersed in the slurry, a coating film is formed on the surface of the electrode protective layer, and dried at 120 ° C. to be poisoned with a thickness of 50 to 300 μm (preferably 150 to 250 μm). A prevention layer was formed to produce a sensor element. Next, the sensor element was assembled to a protective tube socket and then heated at 500 ° C. to obtain an oxygen sensor.
（２）酸素センサの性能評価
（ａ）被毒防止層の外観
（１）において得られた酸素センサの被毒防止層の外観を目視で観察した。
評価基準は、○；亀裂等は観察されない、△；一部に亀裂が発生するものがある、×；全数に亀裂が発生する、である。
（ｂ）耐被毒性（耐久性）
１８００ｃｃのエンジンを使用し、耐久パターンはライフサイクルパターンによった。燃料としては、１リットル当たり０．４ｇの鉛を含む有鉛ガソリンを使用した。検出性能を安定化するために酸素センサを加熱するためのヒータの印加電圧は１４Ｖとした。センサ取付け位置は、エンジンにより近く５００〜８００℃の高温の排気ガスが通過する位置と、エンジンから離れ３５０〜７００℃の低温の排気ガスが通過する位置とした。このようにして１００時間の耐久試験を行った後、各酸素センサの鉛耐久性の性能評価を、図６の模式図に示す装置を用いたバーナー測定法により行った。
評価基準は、○；応答性はほとんど劣化しない、△；応答性の劣化はあるが、空燃費制御では規制値を外れることはない、×；応答性の劣化が大で、空燃費制御すると規制値を外れる、である。
(2) Performance evaluation of oxygen sensor (a) Appearance of poisoning prevention layer The appearance of the poisoning prevention layer of the oxygen sensor obtained in (1) was visually observed.
Evaluation criteria are: O; no crack or the like is observed; Δ: Some cracks are generated; x: All cracks are generated.
(B) Resistance to poisoning (durability)
A 1800 cc engine was used, and the endurance pattern was a life cycle pattern. As the fuel, leaded gasoline containing 0.4 g of lead per liter was used. In order to stabilize the detection performance, the applied voltage of the heater for heating the oxygen sensor was 14V. The sensor mounting position was set to a position nearer to the engine through which high-temperature exhaust gas of 500 to 800 ° C. passes, and a position away from the engine to pass low-temperature exhaust gas at 350 to 700 ° C. Thus, after performing the durability test for 100 hours, the lead durability performance evaluation of each oxygen sensor was performed by the burner measuring method using the apparatus shown in the schematic diagram of FIG.
Evaluation criteria: ○: Almost no response degradation, Δ: There is degradation in response, but air fuel efficiency control does not deviate from the regulation value, ×: The response degradation is large, and air fuel efficiency control is restricted It is out of value.
表１の結果によれば、微粒粉末となる粉末（１）及び粗粒粉末となる粉末（２）が請求項１４記載の発明の好ましい範囲に入っている実験例３〜８、及び実験例１１〜１４では、被毒防止層の表面は亀裂等は殆ど観察されず、且つ高温耐久性、低温耐久性ともに優れていた。更に、被毒防止層の内部には粗粒粉末程度の大きさの空孔が散在しているのが観察された。また、粉末（１）、（２）のピーク値がいずれも０．１μｍ未満である実験例１では、スラリーの粘度が高すぎ、被毒防止層となる塗膜の形成ができなかった。更に、粉末（１）が含まれていない実験例３では耐久性が大きく劣化し、粉末（２）が含まれていない９及び１５では全数に亀裂が発生し、実用に供し得ないものであった。また、粉末（１）の量比が低い実験例３及び１１では、外観は良好であるものの、粗粒粉末の表面を十分に微粒粉末が覆っていない状態で被毒防止層が形成されており、耐久性が劣化する傾向にある。なお、粉末（１）の量比が高い実験例８では、一部製品に被毒防止層の表面に亀裂が観察された。但し、亀裂の無い物に関しては耐久後も良好な性能を示した。 According to the results of Table 1, Experimental Examples 3 to 8 and Experimental Example 11 in which the powder (1) to be a fine powder and the powder (2) to be a coarse powder are within the preferable range of the invention of claim 14. In -14, almost no cracks or the like were observed on the surface of the poisoning prevention layer, and both high temperature durability and low temperature durability were excellent. Furthermore, it was observed that pores as large as coarse powder were scattered inside the poisoning prevention layer. In Experimental Example 1 in which the peak values of powders (1) and (2) were both less than 0.1 μm, the viscosity of the slurry was too high, and a coating film serving as a poisoning prevention layer could not be formed. Furthermore, in Experimental Example 3 in which the powder (1) was not included, the durability was greatly deteriorated, and in the cases 9 and 15 in which the powder (2) was not included, cracks occurred in the total number, which was not practically usable. It was. Moreover, in Experimental Examples 3 and 11 in which the amount ratio of the powder (1) is low, although the appearance is good, the poisoning prevention layer is formed in a state where the surface of the coarse powder is not sufficiently covered with the fine powder. , Durability tends to deteriorate. In Experimental Example 8 where the amount ratio of the powder (1) was high, cracks were observed on the surface of the poisoning prevention layer in some products. However, the thing without a crack showed the favorable performance after durability.
表２の結果によれば、微粒粉末である粉末（１）の粒度分布のピーク値が表１の場合に比べて大きいものの、本発明の好ましい範囲に入っている実験例１８〜２２、及び実験例２５〜２９では、被毒防止層の表面に亀裂等はまったく観察されないセンサ素子が製造できた。そして、粉末（１）と粉末（２）の量比が望ましい範囲に有る実験例２０〜２２及び２７〜２９では耐被毒性にも優れていた。また、粉末（１）、（２）のピーク値がいずれも１０μｍを越える実験例１６では、粒子が大きすぎ、耐久性が大きく劣化した。更に、粉末（１）が含まれていない実験例１７及び２４でも耐久性が大きく劣化し、粉末（２）が含まれていない２３及び３０では全数に亀裂が発生し、実用に供し得ないものであった。また、粉末（１）の量比が低い実験例１８及び１９では、外観は良好であるものの、粗粒粉末の表面を十分に微粒粉末が覆っていない状態で被毒防止層が形成されており、耐久性が劣化する傾向にあった。
更に、粉末（２）の粒度分布が、本発明の望ましい範囲から外れて比較的広い粒度分布を持つ実験例３１〜３２では、被毒防止層中に適度に空孔が形成されないので、製造時に亀裂は生じないものの、耐被毒性は悪く、被毒物質によってセンサの応答性が変化する傾向が見られた。
According to the result of Table 2, although the peak value of the particle size distribution of powder (1) which is a fine powder is large compared with the case of Table 1, Experimental Examples 18-22 which are in the preferable range of this invention, and experiment In Examples 25 to 29, a sensor element in which no crack or the like was observed on the surface of the poisoning prevention layer could be manufactured. And in Experimental Examples 20-22 and 27-29 in which the quantitative ratio of the powder (1) and the powder (2) is in a desirable range, the poisoning resistance was also excellent. Further, in Experimental Example 16 where the peak values of the powders (1) and (2) both exceeded 10 μm, the particles were too large and the durability was greatly deteriorated. Furthermore, the experimental examples 17 and 24 which do not contain the powder (1) are also greatly deteriorated in durability, and in the case of 23 and 30 which do not contain the powder (2), cracks occur in all of them and cannot be put to practical use. Met. Further, in Experimental Examples 18 and 19 where the amount ratio of the powder (1) is low, although the appearance is good, the poisoning prevention layer is formed in a state where the surface of the coarse powder is not sufficiently covered with the fine powder. The durability tended to deteriorate.
Furthermore, in Experimental Examples 31 to 32, in which the particle size distribution of the powder (2) deviates from the desired range of the present invention and the comparatively wide particle size distribution, pores are not appropriately formed in the poisoning prevention layer. Although cracking did not occur, the poisoning resistance was poor, and the response of the sensor tended to change depending on the poisoning substance.
実施例１
原料として、比表面積１０ｍ２／ｇ、粒度分布のピークが０．２μｍにあるアナターゼ型チタニア粉末を２０ｇ、比表面積０．５ｍ２／ｇ、粒度分布のピークが３４μｍにあるスピネル粉末を２０ｇ、水を２８ｇ及びアルミナゾルを３ｇ使用し、ナイロン玉石を用いてポットミルにより２時間攪拌し、混合して、ペーストを調製した。その後、このペースト中に、（１）において作製された電極保護層を有するセンサ素子を浸漬し、約１００ｍｇのペーストを電極保護層の表面に塗着させ、１２０℃で１０分乾燥して厚さ１５０〜２５０μｍの被毒防止層を形成し、センサ素子を作製した。次いで、保護管ソケットに組み付ける等した後、５００℃で３０分加熱し、酸素センサを得た。
Example 1
As raw materials, 20 g of anatase-type titania powder having a specific surface area of 10 m 2 / g and a particle size distribution peak of 0.2 μm, 20 g of spinel powder having a specific surface area of 0.5 m 2 / g and a particle size distribution peak of 34 μm, water 28 g and 3 g of alumina sol were used, and a nylon cobblestone was used to stir for 2 hours with a pot mill and mixed to prepare a paste. Thereafter, the sensor element having the electrode protective layer prepared in (1) is immersed in this paste, about 100 mg of paste is applied to the surface of the electrode protective layer, and dried at 120 ° C. for 10 minutes to obtain a thickness. A poisoning prevention layer of 150 to 250 μm was formed to produce a sensor element. Then, after assembling to a protective tube socket, etc., it was heated at 500 ° C. for 30 minutes to obtain an oxygen sensor.
このようにして形成された被毒防止層の表面は平滑であり、亀裂等もまったく観察されなかった。そして、粗粒粉末の表面を十分に微粒粉末が覆っている状態で被毒防止層が形成されており更に、被毒防止層の内部には粗粒粉末程度の大きさの空孔が分散して存在しているのが観察された。また、（２）、（ｂ）と同様にして評価した結果、高温耐久性、低温耐久性ともに非常に優れていることが確認された。更に、この被毒防止層を有するセンサ素子が組み込まれた酸素センサ（実施品）、又は微粒粉末を含まない酸化物粉末（表２の実験例１７）を用いて被毒防止層を形成したセンサ素子が組み込まれた酸素センサ（比較品）を、所定量のケイ素を添加した燃料から生成する排気ガスに長時間晒した後、これらのセンサをエンジンに取り付け応答性を評価した。その結果、比較品では経時とともに応答性が相当に低下するのに対し、実施品では応答の遅れが少ないことが分かった。また、被毒防止層のＸ線粉末回折パターンによればアナターゼ型チタニア、スピネル及びアルミナの結晶相が認められた。 The surface of the poisoning prevention layer thus formed was smooth and no cracks were observed. Further, the poisoning prevention layer is formed in a state where the surface of the coarse powder is sufficiently covered with the fine powder, and furthermore, pores as large as the coarse powder are dispersed inside the poisoning prevention layer. It was observed to exist. In addition, as a result of evaluation in the same manner as in (2) and (b), it was confirmed that both high temperature durability and low temperature durability were excellent. Furthermore, an oxygen sensor (practical product) in which a sensor element having this poisoning prevention layer is incorporated, or a sensor in which a poisoning prevention layer is formed using an oxide powder not containing fine particles (Experimental Example 17 in Table 2). An oxygen sensor (comparative product) in which the element was incorporated was exposed to exhaust gas generated from a fuel to which a predetermined amount of silicon was added for a long time, and then these sensors were attached to an engine to evaluate responsiveness. As a result, it was found that the responsiveness of the comparative product significantly decreased with time, while the delayed response of the implemented product was small. Further, according to the X-ray powder diffraction pattern of the poisoning prevention layer, crystal phases of anatase titania, spinel and alumina were observed.
実施例２
原料として、比表面積５００ｍ２／ｇ、粒度分布のピークが０．００７μｍにあるアナターゼ型チタニア粉末を２２．５ｇ、比表面積０．７ｍ２／ｇ、粒度分布のピークが７μｍにあるルチル型チタニア粉末を２２．５ｇ、メタノールを３５ｍｌ及びアルミナゾルを２．８ｇ使用した他は、実施例１と同様にしてペーストを調製した後、このペースト中に、（１）において作製された電極保護層を有するセンサ素子を浸漬し、約１００ｍｇのペーストを電極保護層の表面に塗着させ、１２０℃で１０分乾燥して厚さ１５０〜２５０μｍの被毒防止層を形成し、センサ素子を作製した。次いで、保護管ソケットに組み付ける等した後、５００℃で３０分加熱し、酸素センサを得た。
Example 2
As raw materials, 22.5 g of anatase titania powder having a specific surface area of 500 m 2 / g and a particle size distribution peak of 0.007 μm, a rutile type titania powder having a specific surface area of 0.7 m 2 / g and a particle size distribution peak of 7 μm 22.5 g, 35 ml of methanol and 2.8 g of alumina sol were used, and after preparing a paste in the same manner as in Example 1, a sensor having the electrode protective layer produced in (1) was prepared in this paste. The element was immersed, about 100 mg of paste was applied to the surface of the electrode protective layer, and dried at 120 ° C. for 10 minutes to form a poisoning prevention layer having a thickness of 150 to 250 μm, thereby producing a sensor element. Then, after assembling to a protective tube socket, etc., it was heated at 500 ° C. for 30 minutes to obtain an oxygen sensor.
このようにして形成された被毒防止層の表面は平滑であり、亀裂等もまったく観察されなかった。そして、粗粒粉末の表面を十分に微粒粉末が覆っている状態で被毒防止層が形成されており更に、被毒防止層の内部には粗粒粉末程度の大きさの空孔が分散して存在しているのが観察された。また、（２）、（ｂ）と同様にして評価した結果、一部に熱収縮による亀裂の発生がみられるものの、実用に供し得る耐久性を有していることが確認された。更に、この被毒防止層を有するセンサ素子が組み込まれた酸素センサ（実施品）、又は微粒粉末を含まないチタニア粉末（表１の実験例２）を用いて被毒防止層を形成したセンサ素子が組み込まれた酸素センサ（比較品）を、所定量のケイ素を添加した燃料から生成する排気ガスに長時間晒した後、これらのセンサをエンジンに取り付け応答性を評価した。その結果、図２に示すように、比較品では経時とともに応答性が相当に劣化するのに対し、実施品では応答の遅れが少ないことが分かった。また、被毒防止層のＸ線粉末回折パターンによればアナターゼ型チタニア、ルチル型チタニア及びアルミナの結晶相が認められた。 The surface of the poisoning prevention layer thus formed was smooth and no cracks were observed. Further, the poisoning prevention layer is formed in a state where the surface of the coarse powder is sufficiently covered with the fine powder, and furthermore, pores as large as the coarse powder are dispersed inside the poisoning prevention layer. It was observed to exist. Moreover, as a result of evaluating in the same manner as in (2) and (b), it was confirmed that although some cracks were observed due to thermal shrinkage, they had durability that could be put to practical use. Further, an oxygen sensor (practical product) in which the sensor element having this poisoning prevention layer is incorporated, or a sensor element in which a poisoning prevention layer is formed using titania powder not containing fine powder (Experimental Example 2 in Table 1). After the oxygen sensors (comparative products) incorporating NO were exposed to the exhaust gas generated from the fuel added with a predetermined amount of silicon for a long time, these sensors were attached to the engine and the responsiveness was evaluated. As a result, as shown in FIG. 2, it was found that the response of the comparative product deteriorates with time, whereas the response of the implemented product is small. Further, according to the X-ray powder diffraction pattern of the poisoning prevention layer, anatase type titania, rutile type titania and alumina crystal phases were observed.
図３は、実施例１及び２のセンサ素子の電極保護層を形成した後の外観を示す。また、図４は、被毒防止層を形成した後の外観を示す。更に、図５は、電極、電極保護層及び被毒防止層が形成された部位の断面を示す。この図５のように、センサ素子は、固体電解質基体１、並びにその外表面に順次形成された検知電極２、電極保護層４及び被毒防止層５と、内表面に形成された基準電極３とにより構成されている。更に、固体電解質体の形状としては、筒型の他にも板型の積層タイプのセンサであっても本発明は適用できる。
FIG. 3 shows an appearance after the electrode protective layer of the sensor elements of Examples 1 and 2 is formed. FIG. 4 shows the appearance after the poisoning prevention layer is formed. Furthermore, FIG. 5 shows the cross section of the site | part in which the electrode, the electrode protective layer, and the poisoning prevention layer were formed. As shown in FIG. 5, the sensor element includes a solid electrolyte substrate 1, a
尚、本発明においては、上記の具体的な実施例に示すものに限られず、目的、用途に応じて本発明の範囲内で種々変更した実施例とすることができる。即ち、チタニア等のセラミック粉末の比表面積、被毒防止層の厚さ及び気孔率等は適宜調整することができる。また、検知電極及び基準電極は、必ずしも固体電解質基体の底部周面の全面に形成する必要はなく、帯状等であってもよい。更に、被毒防止層の表面に、更に電極保護層と同様の組成の保護層を形成することもできる。 In addition, in this invention, it can restrict to what is shown to said specific Example, It can be set as the Example variously changed within the range of this invention according to the objective and the use. That is, the specific surface area of the ceramic powder such as titania, the thickness of the poisoning prevention layer, the porosity, and the like can be appropriately adjusted. In addition, the detection electrode and the reference electrode are not necessarily formed on the entire surface of the bottom peripheral surface of the solid electrolyte substrate, and may be in a strip shape or the like. Furthermore, a protective layer having the same composition as the electrode protective layer can be formed on the surface of the poisoning prevention layer.
１；固体電解質基体、２；検知電極、３；基準電極、４；電極保護層、５；被毒防止層。 DESCRIPTION OF SYMBOLS 1; Solid electrolyte substrate, 2; Detection electrode, 3; Reference electrode, 4; Electrode protective layer, 5;
Claims (4)
該被毒防止層は、チタニア粉末とチタニア以外のセラミック粉末とからなり、該チタニア粉末の一次粒子の粒度分布が１μｍ以下にピークを有し、該チタニア以外のセラミック粉末の一次粒子の粒度分布が１０μｍ以上にピークを有する酸素センサ。 In an oxygen sensor comprising a solid electrolyte substrate, a detection electrode formed on the surface thereof, an electrode protective layer formed on the surface of the detection electrode, and a sensor element having a poisoning prevention layer formed on the surface of the electrode protective layer ,
The poisoning prevention layer is composed of titania powder and ceramic powder other than titania, the primary particle size distribution of the titania powder has a peak at 1 μm or less, and the primary particle size distribution of the ceramic powder other than titania is An oxygen sensor having a peak at 10 μm or more.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007304050A (en) * | 2006-05-15 | 2007-11-22 | Ngk Spark Plug Co Ltd | Evaluation method of gas sensor, and evaluation apparatus of the gas sensor |
| DE102016119379A1 (en) | 2015-10-13 | 2017-04-13 | Denso Corporation | Sensor control device which is adapted for a gas sensor which detects a poisoning environment |
| WO2019130630A1 (en) * | 2017-12-27 | 2019-07-04 | 日本特殊陶業株式会社 | Sensor element and gas sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2007304050A (en) * | 2006-05-15 | 2007-11-22 | Ngk Spark Plug Co Ltd | Evaluation method of gas sensor, and evaluation apparatus of the gas sensor |
| JP4520427B2 (en) * | 2006-05-15 | 2010-08-04 | 日本特殊陶業株式会社 | Gas sensor evaluation method and gas sensor evaluation apparatus |
| DE102016119379A1 (en) | 2015-10-13 | 2017-04-13 | Denso Corporation | Sensor control device which is adapted for a gas sensor which detects a poisoning environment |
| WO2019130630A1 (en) * | 2017-12-27 | 2019-07-04 | 日本特殊陶業株式会社 | Sensor element and gas sensor |
| JP2019117135A (en) * | 2017-12-27 | 2019-07-18 | 日本特殊陶業株式会社 | Sensor element and gas sensor |
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