JP2005217184A - Device and method for wet cleaning - Google Patents
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Abstract
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本発明は、洗浄用薬液を使用して被洗浄物の表面に付着した微粒子、汚染物質などを除去洗浄した後、被洗浄物を清浄（リンス）する湿式洗浄装置および湿式洗浄方法に関する。 The present invention relates to a wet cleaning apparatus and a wet cleaning method for cleaning (rinsing) an object to be cleaned after removing and cleaning fine particles and contaminants attached to the surface of the object to be cleaned using a cleaning chemical.
従来、洗浄用薬液を使用した湿式洗浄装置は、広い分野において使用されてきた。例えば、ＬＣＤ（Ｌｉｑｕｉｄ Ｃｒｙｓｔａｌ Ｄｉｓｐｌａｙ）、有機ＥＬ（Ｅｌｅｃｔｒｏｌｕｍｉｎｅｓｃｅｎｃｅ）、ＰＤＰ（Ｐｌａｓｍａ Ｄｉｓｐｌａｙ Ｐａｎｅｌ）などの各種表示装置の製造や、ＩＣ（Ｉｎｔｅｇｒａｔｅｄ Ｃｉｒｃｕｉｔ）、ＬＳＩ（Ｌａｒｇｅ−Ｓｃａｌｅ Ｉｎｔｅｇｒａｔｅｄ ｃｉｒｃｕｉｔ）などの半導体装置の製造において、基板、パネル、ウェーハなどの被洗浄物を洗浄するために用いられていた。 Conventionally, wet cleaning apparatuses using cleaning chemicals have been used in a wide range of fields. For example, manufacturing various display devices such as LCD (Liquid Crystal Display), organic EL (Electroluminescence), PDP (Plasma Display Panel), IC (Integrated Circuit Semiconductor), LSI (Large-Scale Integrated Semiconductor), etc. In order to clean an object to be cleaned such as a substrate, a panel or a wafer.
湿式洗浄装置の基本的な構成は、洗浄用薬液を満たした薬液槽と純水を満たした純水槽等のリンス槽を準備して、搬送手段によって被洗浄物を各槽に順次浸漬させていく構成であった。被洗浄物は、搬送手段によってまず薬液槽の上方まで移動され、次に下方に移動されて薬液槽に浸漬され、所定時間経過した後に上方に移動されて槽から取り出され、更に次の槽の上方まで移動され浸漬が繰り替えされる。 The basic structure of the wet cleaning device is to prepare a rinsing tank such as a chemical tank filled with a cleaning chemical and a pure water tank filled with pure water, and sequentially immerse the object to be cleaned in each tank by the conveying means. It was a configuration. The object to be cleaned is first moved to the upper part of the chemical tank by the conveying means, then moved downward and immersed in the chemical tank, moved upward after a predetermined time, and taken out from the tank. It is moved up and immersion is repeated.
従来の湿式洗浄装置において、薬液槽は基板を充分に洗浄するため複数槽設けられ、純水槽は基板に付着した洗浄用薬液を充分に除去するため複数槽設けられていた。 In the conventional wet cleaning apparatus, a plurality of chemical baths are provided to sufficiently clean the substrate, and a plurality of pure water baths are provided to sufficiently remove the cleaning chemical attached to the substrate.
また、従来の湿式洗浄装置では、処理能力を増やし生産性を高めるために、複数の被洗浄物を同時に各槽に浸漬するバッチ方式が採用されていた。バッチ方式の洗浄装置においては、複数の被洗浄物を収容したキャリアを搬送し、各槽に浸漬するために、キャリアを保持するバスケットと称される搬送手段としての容器が設けられていた。 Moreover, in the conventional wet cleaning apparatus, in order to increase the processing capacity and increase the productivity, a batch method in which a plurality of objects to be cleaned are simultaneously immersed in each tank has been adopted. In a batch-type cleaning apparatus, a container as a transport means called a basket for holding a carrier is provided in order to transport a carrier containing a plurality of objects to be cleaned and immerse it in each tank.
しかしながら、従来の湿式洗浄装置では、被洗浄物を薬液槽に浸漬した後に、上方に移動して薬液槽から取り出し、次の槽の上方まで移動する間に、被洗浄物に付着した洗浄用薬液が滴下するので薬液槽からの洗浄用薬液の持ち出し量が多かった。 However, in the conventional wet cleaning apparatus, after the object to be cleaned is immersed in the chemical tank, it is moved upward, taken out from the chemical tank, and moved to the upper part of the next tank, and the cleaning chemical liquid adhered to the object to be cleaned The amount of cleaning chemicals taken out from the chemical tank was large.
更に、被洗浄物に付着した洗浄用薬液は純水槽中にも持ち込まれるので、その分の洗浄用薬液も無駄になっていた。 Further, since the cleaning chemical solution adhering to the object to be cleaned is brought into the pure water tank, the cleaning chemical solution corresponding to that amount is wasted.
バッチ方式の湿式洗浄装置にあっては、複数の被洗浄物を浸漬するため、被洗浄物に付着して消費される洗浄用薬液の量が多くなり、更にキャリアおよびそれを保持する容器にも洗浄用薬液が付着するので、薬液槽からの洗浄用薬液の持ち出し量が増加してしまっていた。 In a batch-type wet cleaning apparatus, since a plurality of objects to be cleaned are immersed, the amount of cleaning chemicals attached to the objects to be cleaned increases and the carrier and the container for holding the same are also used. Since the cleaning chemical solution adheres, the amount of cleaning chemical solution taken out from the chemical bath has increased.
しかも、被洗浄物に付着して洗浄用薬液が純水槽に持ち込まれるため、純水槽における洗浄用薬液の除去効果が低減し、結果として純水槽の数を増やして対応していたのである。 In addition, since the cleaning chemical solution is attached to the object to be cleaned and brought into the pure water tank, the effect of removing the cleaning chemical liquid in the pure water tank is reduced, and as a result, the number of pure water tanks is increased.
本発明は前述した点に鑑みてなされたもので、洗浄用薬液の持ち出し量を減らし、処理能力を向上させた湿式洗浄装置および湿式洗浄方法を提供することを目的とするものである。 The present invention has been made in view of the above points, and an object of the present invention is to provide a wet cleaning apparatus and a wet cleaning method in which the amount of cleaning chemical solution taken is reduced and the processing capacity is improved.
前記目的を達成するため本発明の湿式洗浄装置は、被洗浄物を洗浄用薬液に浸漬させて洗浄する薬液槽と、前記洗浄された被洗浄物を前記薬液槽から上方に取り出す搬送手段と、前記薬液槽から取り出された被洗浄物を清浄するリンス槽とを備えた湿式洗浄装置において、前記薬液槽には、前記洗浄された被洗浄物に向けて気体を吹き出す噴出口が設けられ、前記被洗浄物に付着した洗浄用薬液を前記気体により滴下させるように構成したことを特徴とする。 In order to achieve the above object, the wet cleaning apparatus of the present invention comprises a chemical bath for immersing and cleaning an object to be cleaned in a cleaning chemical solution, and a transport means for taking out the cleaned object to be cleaned upward from the chemical bath. In the wet cleaning apparatus provided with a rinse tank for cleaning the object to be cleaned taken out from the chemical liquid tank, the chemical liquid tank is provided with a spout for blowing gas toward the cleaned target object, The cleaning chemical solution attached to the object to be cleaned is configured to be dropped by the gas.
更に、本発明の湿式洗浄装置は、前記薬液槽が、その上周縁に当該薬液槽内に向かって下向きに傾斜した滴下薬液回収部を有することが好ましい。 Furthermore, in the wet cleaning apparatus of the present invention, it is preferable that the chemical tank has a dripping chemical recovery part that is inclined downward toward the inside of the chemical tank at an upper peripheral edge thereof.
更に、本発明の湿式洗浄装置は、前記噴出口が、前記気体の吹き出し方向を変えることができる駆動手段を有することが好ましい。 Furthermore, in the wet cleaning apparatus of the present invention, it is preferable that the jet outlet has a driving unit that can change a blowing direction of the gas.
更に、本発明の湿式洗浄装置は、前記リンス槽が、純水槽であることが好ましい。 Furthermore, in the wet cleaning apparatus of the present invention, the rinse tank is preferably a pure water tank.
更に、本発明の湿式洗浄装置は、前記搬送手段が、前記被洗浄物を保持し、前記被洗浄物と共に前記洗浄用薬液に浸漬される容器を有し、前記容器の底面には、前記滴下薬液を通過させる隙間が設けられている請求項１乃至４のいずれか１項に記載の湿式洗浄装置。 Furthermore, the wet cleaning apparatus of the present invention has a container in which the transport means holds the object to be cleaned and is immersed in the cleaning chemical together with the object to be cleaned, and the dripping is provided on the bottom surface of the container. The wet cleaning apparatus according to any one of claims 1 to 4, wherein a gap through which the chemical liquid is passed is provided.
更に、本発明の湿式洗浄装置は、前記被洗浄物を複数個同時に洗浄するバッチ方式であることが好ましい。 Furthermore, it is preferable that the wet cleaning apparatus of the present invention is a batch system in which a plurality of the objects to be cleaned are simultaneously cleaned.
また、本発明の湿式洗浄方法は、被洗浄物を洗浄用薬液に浸漬させて洗浄する洗浄工程、前記洗浄工程の被洗浄物を上方に取り出す取り出し工程及び前記取り出し工程の被洗浄物を清浄するリンス工程を含む湿式洗浄方法において、前記取り出し工程の被洗浄物に向けて気体を吹き付けることにより、前記取り出し工程の被洗浄物に付着した洗浄用薬液を滴下させることを特徴とする。 Further, the wet cleaning method of the present invention includes a cleaning step of immersing an object to be cleaned in a cleaning chemical solution, an extraction process for taking out the object to be cleaned in the cleaning process upward, and an object to be cleaned in the extraction process. In the wet cleaning method including the rinsing step, the cleaning chemical solution attached to the object to be cleaned in the extraction step is dropped by blowing a gas toward the object to be cleaned in the extraction step.
更に、本発明の湿式洗浄方法は、前記滴下させた洗浄用薬液を回収し、該回収された洗浄用薬液を前記洗浄工程に戻すことが好ましい。 Furthermore, in the wet cleaning method of the present invention, it is preferable to recover the dropped cleaning chemical solution and return the recovered cleaning chemical solution to the cleaning step.
更に、本発明の湿式洗浄方法は、前記気体の吹き付け方向を変えながら、前記取り出し工程の被洗浄物に向けて気体を吹き付けることが好ましい。 Furthermore, in the wet cleaning method of the present invention, it is preferable that the gas is sprayed toward the object to be cleaned in the extraction step while changing the gas spray direction.
更に、本発明の湿式洗浄方法は、前記リンス工程において、純水を用いて清浄することが好ましい。 Further, the wet cleaning method of the present invention is preferably cleaned using pure water in the rinsing step.
本発明の湿式洗浄装置は、薬液槽の上方に取り出された被洗浄物に向けて気体を吹き出す噴出口を設けているため、薬液槽の上方において、薬液槽から取り出された被洗浄物に向けて気体を吹き付け、被洗浄物に付着した洗浄用薬液を元の薬液槽に強制的に滴下させることができる。そして、滴下した洗浄用薬液は、薬液槽に戻り、再び洗浄用薬液として使用することができるので、洗浄用薬液の持ち出し量を低減することができる。 Since the wet cleaning apparatus of the present invention is provided with a spout for blowing gas toward the object to be cleaned taken out above the chemical tank, the wet cleaning apparatus is directed to the object to be cleaned taken out from the chemical tank above the chemical tank. The cleaning chemical liquid adhered to the object to be cleaned can be forcibly dripped into the original chemical tank. And since the dripping chemical | medical solution returns to a chemical | medical solution tank and can be used again as a chemical | medical solution for washing | cleaning, the taking-out amount of the chemical | medical solution for washing | cleaning can be reduced.
更に、本発明の湿式洗浄装置において、薬液槽が、その上周縁に当該薬液槽内に向かって下向きに傾斜した滴下薬液回収部を有する場合は、噴出口から吹き付けた気体によって滴下した洗浄用薬液を効率的に元の薬液槽に回収することができる。 Furthermore, in the wet cleaning apparatus of the present invention, when the chemical tank has a dropping chemical recovery part inclined downward toward the inside of the chemical tank at the upper periphery, the cleaning chemical dropped by the gas blown from the jet outlet Can be efficiently recovered in the original chemical tank.
更に、本発明の湿式洗浄装置において、噴出口が気体の吹き出し方向を変えることができる駆動手段を有する場合は、駆動手段によって気体の吹き出し方向を変えることで、様々な角度から被洗浄物に対して気体を吹き付けることができ、被洗浄物に付着した洗浄用薬液をより多く薬液槽内に滴下させることができる。 Furthermore, in the wet cleaning apparatus of the present invention, when the jet outlet has a driving means capable of changing the gas blowing direction, the gas blowing direction can be changed by the driving means so that the object to be cleaned can be seen from various angles. Thus, it is possible to spray a gas, and more cleaning chemical liquid adhered to the object to be cleaned can be dropped into the chemical tank.
更に、本発明の湿式洗浄装置において、リンス槽として純水槽を配置している場合、純水槽に持ち込まれる洗浄用薬液の量を減らすことができ、純水槽における被洗浄物に付着した洗浄用薬液の除去効果が向上し、純水槽の数を減らすこと又は純水槽での処理時間を短くすることができ、処理能力を向上させることができる。加えて、洗浄用薬液の種類によっては、廃棄のために純水槽中に混入した洗浄用薬液を分離して回収する必要があるが、純水槽に持ち込まれる洗浄用薬液の量が減ったことにより、純水槽の廃液から洗浄用薬液を分離するためのフィルタの寿命を延ばすことができる。 Furthermore, in the wet cleaning apparatus of the present invention, when a pure water tank is disposed as a rinsing tank, the amount of cleaning chemical liquid brought into the pure water tank can be reduced, and the cleaning chemical liquid adhered to the object to be cleaned in the pure water tank The removal effect can be improved, the number of pure water tanks can be reduced, or the processing time in the pure water tanks can be shortened, and the processing capacity can be improved. In addition, depending on the type of cleaning chemical, it may be necessary to separate and collect the cleaning chemical mixed in the pure water tank for disposal, but the amount of cleaning chemical brought into the pure water tank has decreased. The life of the filter for separating the cleaning chemical from the waste water of the pure water tank can be extended.
更に、本発明の湿式洗浄装置において、搬送手段が被洗浄物を保持し、被洗浄物と共に薬液槽に浸漬する容器を有する場合は、薬液槽の洗浄用薬液が、被洗浄物だけではなく容器にも付着するため、多量の洗浄用薬液が持ち出される状態となるが、これに対して噴出口から気体を吹き付け、被洗浄物および容器に付着した洗浄用薬液を当該薬液槽に滴下させるので、多量の洗浄用薬液が持ち出されることを防止でき好ましい。加えて、容器の底面に隙間を設けることにより、噴出口から吹き付ける気体によって被洗浄物および容器に付着した洗浄用薬液が滴下しやすくなるので好ましい。 Furthermore, in the wet cleaning apparatus of the present invention, when the transport means holds the object to be cleaned and has a container that is immersed in the chemical tank together with the object to be cleaned, the cleaning chemical in the chemical tank is not only the object to be cleaned. Since a large amount of cleaning chemical solution is brought out, the gas is blown from the jet port against this, and the cleaning chemical solution attached to the object to be cleaned and the container is dropped into the chemical solution tank. It is preferable because a large amount of cleaning chemicals can be prevented from being taken out. In addition, it is preferable to provide a gap on the bottom surface of the container because the cleaning target liquid and the cleaning chemical solution attached to the container are easily dropped by the gas blown from the ejection port.
更に、本発明の湿式洗浄装置において、被洗浄物を複数個同時に洗浄するバッチ方式である場合は、薬液槽の洗浄用薬液が、複数個の被洗浄物に付着するため、多量の洗浄用薬液が消費されうる状態となるが、これに対して噴出口から気体を吹き付け、複数個の被洗浄物に付着した洗浄用薬液を強制的に元の薬液槽に滴下させるので、多量の洗浄用薬液が消費されることを防止でき好ましい。 Furthermore, in the wet cleaning apparatus of the present invention, in the case of a batch system in which a plurality of objects to be cleaned are simultaneously cleaned, a large amount of cleaning chemicals are attached to the plurality of objects to be cleaned because the cleaning chemicals in the chemical tank adhere to the plurality of objects to be cleaned. However, a large amount of cleaning chemicals can be consumed by blowing a gas from the jet outlet and forcing the cleaning chemicals adhering to a plurality of objects to be dropped into the original chemical tank. Can be prevented from being consumed.
また、本発明の湿式洗浄方法においては、被洗浄物を薬液槽の上方に取り出し、被洗浄物に向けて噴出口から気体を吹き付け、被洗浄物に付着した洗浄用薬液を強制的に元の薬液槽に滴下させるため、滴下した洗浄用薬液は、薬液槽に戻り、再び洗浄用薬液として使用することができるので、洗浄用薬液の消費を低減することができる。 Further, in the wet cleaning method of the present invention, the object to be cleaned is taken out above the chemical tank, gas is blown from the jet toward the object to be cleaned, and the cleaning chemical attached to the object to be cleaned is forcibly restored to the original. Since the dropped cleaning chemical solution is returned to the chemical solution tank and can be used again as the cleaning chemical solution, the consumption of the cleaning chemical solution can be reduced.
更に、本発明の湿式洗浄方法において、噴出口が、駆動手段によって気体の吹き出し方向を変えながら、被洗浄物に向けて気体を吹き付けることで、様々な角度から被洗浄物に対して気体を吹き付けることができ、被洗浄物に付着した洗浄用薬液をより多く滴下させることができる。 Furthermore, in the wet cleaning method of the present invention, the jet outlet blows gas toward the object to be cleaned from various angles by blowing the gas toward the object to be cleaned while changing the gas blowing direction by the driving means. It is possible to drop more chemical solution for cleaning adhering to the object to be cleaned.
更に、本発明の湿式洗浄方法において、洗浄用薬液を強制的に滴下させた被洗浄物を続けて純水槽に浸漬することで、純水槽に持ち込まれる洗浄用薬液の量を減らすことができ、純水槽における被洗浄物に付着した洗浄用薬液の除去効果が向上し、純水槽の数を減らすこと又は純水槽での処理時間を短くすることができ、処理能力を向上させることができる。加えて、洗浄用薬液の種類によっては、廃棄のために純水槽中に混入した洗浄用薬液を分離して回収する必要があるが、純水槽に持ち込まれる洗浄用薬液の量が減ったことにより、純水槽の廃液から洗浄用薬液を分離するためのフィルタの寿命を延ばすことができる。 Furthermore, in the wet cleaning method of the present invention, the amount of cleaning chemical solution brought into the pure water tank can be reduced by continuously immersing the object to be cleaned in which the cleaning chemical liquid is dripped in the pure water tank, The effect of removing the chemical solution for cleaning attached to the object to be cleaned in the pure water tank can be improved, the number of pure water tanks can be reduced, or the processing time in the pure water tank can be shortened, and the processing capacity can be improved. In addition, depending on the type of cleaning chemical, it may be necessary to separate and collect the cleaning chemical mixed in the pure water tank for disposal, but the amount of cleaning chemical brought into the pure water tank has decreased. The life of the filter for separating the cleaning chemical from the waste water of the pure water tank can be extended.
以下、本発明の実施形態を図１乃至図３を参照して説明する。図１は、本発明の湿式洗浄装置１の全体の構成を示す概略図である。 Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 is a schematic diagram showing the overall configuration of a wet cleaning apparatus 1 of the present invention.
湿式洗浄装置１は、搬入部３、処理部５および搬出部７を有している。搬入部３は、被洗浄物９を装置内に搬入する場所である。被洗浄物９として複数枚の基板を用いる場合は、基板を収容するキャリアごと装置に搬入され、洗浄されることになる。 The wet cleaning apparatus 1 includes a carry-in unit 3, a processing unit 5, and a carry-out unit 7. The carry-in unit 3 is a place where the article 9 to be cleaned is carried into the apparatus. When a plurality of substrates are used as the object 9 to be cleaned, the carrier that accommodates the substrates is loaded into the apparatus and cleaned.
処理部５には、洗浄用薬液、純水等が満たされた槽１１〜１６が配置されており、また、被洗浄物９を搬送するための搬送手段１７（搬入部３からの搬入および搬出部７への搬出も行う）が設けられている。処理部５の槽１１〜１６としては、搬入部３側から、洗浄用薬液が満たされた薬液槽１１、１２が２槽、その後、リンス槽として純水が満たされた純水槽１３〜１６が４槽設けられている。本発明で用いられる洗浄用薬液としては特に制限されるものはなく、従来から使用されている洗浄液等を使用することができる。また、リンス槽には、純水だけではなく、その他の洗浄用薬液を清浄するリンス液を使用することができる。なお、最後のリンス槽（図１においては純水槽１６）は、被洗浄物９を乾燥しやすくするため、温めてもよい。 The processing unit 5 is provided with tanks 11 to 16 filled with cleaning chemicals, pure water, and the like, and has a transport means 17 (transporting and unloading from the transporting unit 3) for transporting the object 9 to be cleaned. (Also carrying out to the unit 7) is provided. As the tanks 11 to 16 of the processing unit 5, there are two chemical tanks 11 and 12 filled with cleaning chemicals from the carry-in unit 3 side, and then pure water tanks 13 to 16 filled with pure water as rinse tanks. Four tanks are provided. The cleaning chemical used in the present invention is not particularly limited, and a conventionally used cleaning liquid or the like can be used. Moreover, the rinse tank which cleans not only pure water but another chemical | medical agent for washing | cleaning can be used for a rinse tank. Note that the last rinsing tank (pure water tank 16 in FIG. 1) may be warmed to facilitate drying the article 9 to be cleaned.
また、各槽１１〜１６に隣接して超音波発生機を設け、被洗浄物９を洗浄中に超音波を加えて洗浄効果を高める構成としてもよい。 Moreover, it is good also as a structure which provides an ultrasonic generator adjacent to each tank 11-16, and adds a ultrasonic wave during washing | cleaning of the to-be-cleaned object 9, and raises the cleaning effect.
搬出部７は、被洗浄物９を装置から搬出する場所である。搬出部７から被洗浄物９を取り出す前に、被洗浄物９を乾燥させるオーブンを設けてもよい。 The unloading part 7 is a place where the article 9 to be cleaned is unloaded from the apparatus. Before the object to be cleaned 9 is taken out from the carry-out unit 7, an oven for drying the object to be cleaned 9 may be provided.
搬送手段１７は、図１の矢印で示すルートで、搬入部３において搬入された被洗浄物９を搬送し、各槽１１〜１６に浸漬する。搬送手段１７は、被洗浄物９を搬送するために、被洗浄物９を保持する容器を有していてもよい。 The conveyance means 17 conveys the to-be-cleaned object 9 carried in in the carrying-in part 3 by the route | root shown by the arrow of FIG. 1, and is immersed in each tank 11-16. The transport means 17 may have a container for holding the object to be cleaned 9 in order to transport the object 9 to be cleaned.
図２は、図１のＡで囲った一点鎖線の部分をより詳細に図示したものであり、図３は、その変形例である。図２および図３においては、複数枚の基板３１等の被洗浄物９およびそれらを収納したキャリア３３を搬送して洗浄するバッチ方式を採用しており、更に搬送手段１７は、基板３１およびキャリア３３を搬送および浸漬するために、それらを保持する容器３５を有している。図２および図３において、基板３１、キャリア３３および容器３５の搬送経路は矢印で示しており、薬液槽１２の上方、純水槽１３の上方に搬送した時の基板３１、キャリア３３および容器３５を点線で示している。 FIG. 2 illustrates in more detail the portion of the dashed-dotted line surrounded by A in FIG. 1, and FIG. 3 is a modification thereof. 2 and 3, a batch method is adopted in which the object to be cleaned 9 such as a plurality of substrates 31 and the carrier 33 storing them are transported and cleaned. Further, the transport means 17 includes the substrate 31 and the carrier. In order to convey and immerse 33, it has a container 35 for holding them. 2 and 3, the transport path of the substrate 31, the carrier 33, and the container 35 is indicated by arrows, and the substrate 31, the carrier 33, and the container 35 when transported above the chemical solution tank 12 and above the pure water tank 13 are shown. Shown with dotted lines.
図２および図３において、薬液槽１１には洗浄用薬液２１が、薬液槽１２には洗浄用薬液２２が、純水槽１３には純水２３がそれぞれ満たされており、薬液槽１１および薬液槽１２の上方には噴出口３７が設けられている。 2 and 3, the chemical tank 11 is filled with a cleaning chemical liquid 21, the chemical liquid tank 12 is filled with a cleaning chemical liquid 22, and the pure water tank 13 is filled with pure water 23. 12 is provided with a spout 37.
噴出口３７は、薬液槽１１、１２の上方において、薬液槽１１、１２から取り出された被洗浄物に向けて気体を吹き付け、被洗浄物に付着した洗浄用薬液を強制的に滴下させるものである。図２および図３においては、被洗浄物である基板３１およびキャリア３３と共に容器３５も薬液槽１１，１２に浸漬させているので、噴出口３７は、被洗浄物である基板３１およびキャリア３３並びに容器３５に対して気体を吹き付け、被洗浄物および容器３５に付着した洗浄用薬液を滴下させる。 The spout 37 blows gas toward the objects to be cleaned taken out from the chemical tanks 11 and 12 above the chemical tanks 11 and 12 and forcibly drops the cleaning chemical attached to the objects to be cleaned. is there. 2 and 3, since the container 35 is immersed in the chemical tanks 11 and 12 together with the substrate 31 and the carrier 33 that are the objects to be cleaned, the ejection port 37 is provided with the substrate 31 and the carrier 33 and the objects to be cleaned. A gas is sprayed onto the container 35 to drop the cleaning target and the cleaning chemical attached to the container 35.
噴出口３７は、例えば、図２に示すようにノズル状のものでもよいし、図３に示すように開口であってもよい。なお、図３においては、噴出口３７の開口内部に風向調節板３７ａ、３７ｂを設けて、吹き出す気体の向きを調節できるようになっている。噴出口３７の配置としては、図２および図３のように、処理部５の天井に設けてもよいし、側面に設けてもよい。 The nozzle 37 may be, for example, a nozzle as shown in FIG. 2 or may be an opening as shown in FIG. In FIG. 3, wind direction adjusting plates 37 a and 37 b are provided inside the opening of the ejection port 37 so that the direction of the gas to be blown out can be adjusted. As for the arrangement of the spout 37, it may be provided on the ceiling of the processing unit 5 as shown in FIGS.
なお、噴出口３７から気体を吹き出すために、図示しない送風機が設けられている。噴出口３７から吹き出す気体は、特に制限されるものではないが、コスト的に乾燥空気が好ましく、更に高性能フィルタを通過させた乾燥清浄空気がより好ましい。 In addition, in order to blow out gas from the jet nozzle 37, the air blower which is not shown in figure is provided. The gas blown out from the ejection port 37 is not particularly limited, but is preferably dry air in terms of cost, and more preferably dry clean air that has been passed through a high-performance filter.
滴下した洗浄用薬液は、薬液槽１１、１２に戻り、再び洗浄用薬液２１、２２として使用することができるので、本発明の湿式洗浄装置１は、洗浄用薬液２１，２２の消費を低減することができる。 Since the dropped cleaning chemical solution returns to the chemical solution tanks 11 and 12 and can be used again as the cleaning chemical solutions 21 and 22, the wet cleaning apparatus 1 of the present invention reduces the consumption of the cleaning chemical solutions 21 and 22. be able to.
更に、後段に配置された純水槽１３〜１６に持ち込まれる洗浄用薬液の量を減らすことができ、純水槽における被洗浄物に付着した洗浄用薬液の除去効果が向上し、純水槽の数を減らすこと又は純水槽での処理時間を短くすることができ、処理能力を向上させることができる。 Furthermore, the amount of cleaning chemicals brought into the pure water tanks 13 to 16 disposed in the subsequent stage can be reduced, the effect of removing the cleaning chemical liquid adhering to the object to be cleaned in the pure water tanks is improved, and the number of pure water tanks is reduced. Reduction or processing time in the pure water tank can be shortened, and processing capacity can be improved.
加えて、洗浄用薬液の種類によっては、廃棄のために純水槽中に混入した洗浄用薬液を分離して回収する必要があるが、純水槽に持ち込まれる洗浄用薬液の量が減ったことにより、純水槽の廃液から洗浄用薬液を分離するためのフィルタの寿命を延ばすことができる。 In addition, depending on the type of cleaning chemical, it may be necessary to separate and collect the cleaning chemical mixed in the pure water tank for disposal, but the amount of cleaning chemical brought into the pure water tank has decreased. The life of the filter for separating the cleaning chemical from the waste water of the pure water tank can be extended.
噴出口３７には、噴出口３７の気体の吹き出し方向を変えることができる駆動手段３９を設けてもよい。図２においては、駆動手段３９によって、噴出口３７を左右に首振り運動させて、気体の吹き出し方向を変える構成となっている。図３においては、図示しない駆動手段によって、風向調節板３７ａ、３７ｂを動かして、気体の吹き出し方向を変える構成となっており、薬液槽１１の上方の風向調節板３７ａは紙面左向きに、薬液槽１２の上方の風向調節板３７ｂは紙面右向きに気体が吹き出すようになっている。駆動手段３９としては、モータ等を用いて適宜構成される。 The ejection port 37 may be provided with a driving unit 39 that can change the direction of the gas blown from the ejection port 37. In FIG. 2, the ejection means 37 is swung left and right by the driving means 39 to change the gas blowing direction. In FIG. 3, the air direction adjusting plates 37a and 37b are moved by a driving means (not shown) to change the gas blowing direction, and the air direction adjusting plate 37a above the chemical solution tank 11 is directed to the left side of the paper. The air direction adjusting plate 37b above 12 is designed to blow out gas in the right direction on the paper surface. The drive means 39 is appropriately configured using a motor or the like.
駆動手段３９によって、噴出口３７の吹き出し方向を変えることで、様々な角度から被洗浄物および容器３５に対して気体を吹き付けることができ、被洗浄物および容器３５に付着した洗浄用薬液をより多く滴下させることができる。 By changing the blowing direction of the ejection port 37 by the driving means 39, gas can be sprayed from the various angles to the object to be cleaned and the container 35, and the cleaning chemical solution adhering to the object to be cleaned and the container 35 can be further removed. Many can be dripped.
更に、噴出口３７を複数個（図２においては２個）設け、様々な角度から被洗浄物および容器３５全体に対して気体を吹き付けるように配置して、付着した洗浄用薬液をより多く滴下させるようにすることが好ましい。 Further, a plurality of jet nozzles 37 (two in FIG. 2) are provided and arranged so that gas is blown against the object to be cleaned and the entire container 35 from various angles, and a larger amount of the attached cleaning chemical solution is dripped. It is preferable to do so.
なお、図２および図３においては、薬液槽１１の上方および薬液槽１２の上方の両方に噴出口３７を設置したが、装置コストを低減し、気体吹き付けによる処理時間を低減するために、いずれか一方だけであっても、洗浄用薬液の消費を低減することができる。特に、いずれか一方に噴出口３７を設ける場合は、純水槽１３の直前の薬液槽１２に設けることが好ましい。こうすれば、薬液槽１２で被洗浄物に付着した洗浄用薬液２２を回収することができ、更に純水槽１３に持ち込まれる洗浄用薬液の量も減らせるので、純水槽における洗浄用薬液の除去効果も向上させることができるのである。 In FIGS. 2 and 3, the spout 37 is installed both above the chemical tank 11 and above the chemical tank 12, but in order to reduce the apparatus cost and the processing time by gas blowing, Even if only one of them is used, consumption of the cleaning chemical can be reduced. In particular, when the jet port 37 is provided in either one, it is preferable to provide the chemical solution tank 12 immediately before the pure water tank 13. In this way, the cleaning chemical liquid 22 attached to the object to be cleaned can be collected in the chemical liquid tank 12, and the amount of the cleaning chemical liquid brought into the pure water tank 13 can be reduced, so that the cleaning chemical liquid in the pure water tank is removed. The effect can also be improved.
また、薬液槽１１および薬液槽１２は、その上周縁に当該薬液槽内に向かって下向きに傾斜した滴下薬液回収部４１，４３、４５を有していてもよい。図２に示すように、滴下薬液回収部４１は、薬液槽１１の搬入部側に設けられ、薬液槽１１内に向かって下向きに傾斜している。また、滴下薬液回収部４３は、薬液槽１１と薬液槽１２との間に設けられ、薬液槽１１内に向かって下向きに傾斜している。更に、滴下薬液回収部４５は、薬液槽１２と純水槽１３との間に設けられており、薬液槽１２内に向かって下向きに傾斜している。 Moreover, the chemical | medical solution tank 11 and the chemical | medical solution tank 12 may have the dripping chemical | medical solution collection | recovery parts 41,43,45 which inclined downward toward the said chemical | medical solution tank in the upper periphery. As shown in FIG. 2, the dropped chemical solution recovery unit 41 is provided on the carry-in portion side of the chemical solution tank 11 and is inclined downward toward the inside of the chemical solution tank 11. The dripping chemical solution recovery unit 43 is provided between the chemical solution tank 11 and the chemical solution tank 12 and is inclined downward toward the inside of the chemical solution tank 11. Further, the dropped chemical solution recovery unit 45 is provided between the chemical solution tank 12 and the pure water tank 13 and is inclined downward toward the inside of the chemical solution tank 12.
なお、滴下薬液回収部４３は、図３に示すように、山形とし、薬液槽１１内に向かって下向きに傾斜した箇所４３ａと薬液槽１２内に向かって下向きに傾斜した箇所４３ｂの両方を備えた形状であってもよい。また、図示しない薬液槽１１、１２の紙面垂直方向における前後にも滴下薬液回収部を設けることは有効である。 As shown in FIG. 3, the dropped chemical solution recovery unit 43 has a mountain shape and includes both a portion 43 a inclined downward toward the inside of the chemical solution tank 11 and a location 43 b inclined downward toward the inside of the chemical solution tank 12. The shape may be different. In addition, it is effective to provide a dripping chemical recovery unit also before and after the chemical tanks 11 and 12 (not shown) in the direction perpendicular to the paper surface.
滴下薬液回収部４１、４３、４５は、薬液槽内に向かって下向きに傾斜しているため、噴出口３７から吹き出した気体によって滴下した洗浄用薬液を効率的に元の薬液槽に回収することができる。 Since the dropped chemical solution recovery units 41, 43, 45 are inclined downward toward the inside of the chemical solution tank, the cleaning chemical solution dropped by the gas blown out from the ejection port 37 can be efficiently recovered in the original chemical solution tank. Can do.
被洗浄物を保持する容器３５は、噴出口３７からの気体によって付着した洗浄用薬液が滴下しやすいように、底面には、洗浄用薬液滴下用の隙間が設けられていることが好ましい。特に、洗浄用薬液が滴下しやすいように、円柱状の部材で底面および側面が構成されていることが好ましい。 The container 35 for holding the object to be cleaned is preferably provided with a clearance for cleaning chemical liquid droplets on the bottom surface so that the chemical liquid for cleaning attached by the gas from the ejection port 37 can be easily dropped. In particular, it is preferable that the bottom surface and the side surface are formed of a cylindrical member so that the cleaning chemical can be easily dropped.
このような構成の湿式洗浄装置１において、被洗浄物９は、搬入部３から薬液槽１１の上方まで搬送され、薬液槽１１の洗浄用薬液２１中に浸漬され、所定時間経過した後に薬液槽１１の上方に取り出され、噴出口３７から被洗浄物９に向けて気体が吹き付けられ、被洗浄物９に付着した薬液２１を強制的に滴下させられ、次の薬液槽１２へ搬送される。次の薬液槽１２においても、被洗浄物９は、薬液槽１２の洗浄用薬液２２中に浸漬され、所定時間経過した後に薬液槽１２の上方に取り出され、噴出口３７から被洗浄物９に向けて気体が吹き付けられ、被洗浄物９に付着した洗浄用薬液２２を強制的に滴下させられ、次の純水槽１３へ搬送されるのである。 In the wet cleaning apparatus 1 having such a configuration, the object to be cleaned 9 is transported from the carry-in unit 3 to above the chemical solution tank 11 and immersed in the chemical solution 21 for cleaning in the chemical solution tank 11, and after a predetermined time has elapsed, the chemical solution tank. 11, gas is blown toward the object to be cleaned 9 from the ejection port 37, the chemical liquid 21 adhering to the object to be cleaned 9 is forcibly dropped and conveyed to the next chemical liquid tank 12. Also in the next chemical tank 12, the object to be cleaned 9 is immersed in the cleaning chemical liquid 22 in the chemical tank 12, and is taken out above the chemical tank 12 after a predetermined time has passed. The gas is sprayed toward the object 9 and the cleaning chemical liquid 22 adhering to the object to be cleaned 9 is forcibly dropped and conveyed to the next pure water tank 13.
噴出口３７は、被洗浄物９に向けて気体を吹き出す際に、駆動手段３９によって気体の吹き出し方向を変えながら、被洗浄物９に向けて気体を吹き付けることにより、被洗浄物９全体の洗浄用薬液を滴下できるので好ましい。 When the jet port 37 blows out the gas toward the object 9 to be cleaned, it blows the gas toward the object 9 to be cleaned while changing the blowing direction of the gas by the driving means 39, thereby cleaning the entire object 9 to be cleaned. It is preferable because the medicinal solution can be dropped.
なお、本発明は、前記実施の形態に限定されるものではなく、必要に応じて種々の変更をすることができる。 In addition, this invention is not limited to the said embodiment, A various change can be made as needed.
１ 湿式洗浄装置
９ 被処理物
１１、１２ 薬液槽
１３〜１６ 純水槽
１７ 搬送手段
３５ 容器
３７ 噴出口
３９ 駆動手段
４１、４３、４５ 滴下薬液回収部
DESCRIPTION OF SYMBOLS 1 Wet washing apparatus 9 To-be-processed object 11, 12 Chemical solution tank 13-16 Pure water tank 17 Conveyance means 35 Container 37 Spout 39 Drive means 41, 43, 45 Dropping chemical solution collection | recovery part
Claims (9)
The wet cleaning method according to claim 6, wherein in the rinsing step, cleaning is performed using pure water.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004021979A JP2005217184A (en) | 2004-01-29 | 2004-01-29 | Device and method for wet cleaning |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004021979A JP2005217184A (en) | 2004-01-29 | 2004-01-29 | Device and method for wet cleaning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2005217184A true JP2005217184A (en) | 2005-08-11 |
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| JP2004021979A Pending JP2005217184A (en) | 2004-01-29 | 2004-01-29 | Device and method for wet cleaning |
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| JP (1) | JP2005217184A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102049043B1 (en) * | 2019-08-16 | 2019-11-26 | (주)선우하이테크 | Substrate surface treating apparatus |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102049043B1 (en) * | 2019-08-16 | 2019-11-26 | (주)선우하이테크 | Substrate surface treating apparatus |
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