JP2005207992A - Temperature-measuring device, its control method, and temperature-measuring system - Google Patents

Temperature-measuring device, its control method, and temperature-measuring system Download PDF

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JP2005207992A
JP2005207992A JP2004017059A JP2004017059A JP2005207992A JP 2005207992 A JP2005207992 A JP 2005207992A JP 2004017059 A JP2004017059 A JP 2004017059A JP 2004017059 A JP2004017059 A JP 2004017059A JP 2005207992 A JP2005207992 A JP 2005207992A
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temperature
distance
oscillation
oscillation circuit
inductive element
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Takeshi Abe
健 安部
Yasuhiko Shinosawa
康彦 篠澤
Tomohide Machida
智英 町田
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Tokyo Gas Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To measure correct temperature, even if the range from measured objects to a guidance element (coil) is varied. <P>SOLUTION: In thermometric technique which measures remotely the temperature of measured objects by utilizing eddy current, a coil 10b is placed at a far position obtained, by adding an offset range L, to the range in between the coil 10a and a metal foil 13 of the measured object. A correction range Δd is calculated from oscillating frequency f1, by measuring of oscillating frequency f1 of a resonant circuit with the coil 10b. Then, the temperature T of measured object (metal foil 13) is determined from the oscillating frequency f2 and calculated correction range Δd, by measuring of oscillating frequency f2 of a resonant circuit with the coil 10a. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、温度測定装置およびその制御方法並びに温度測定システムに関し、特に被測定体の温度を非接触で測定する温度測定技術に適用して有効なものである。   The present invention relates to a temperature measurement device, a control method therefor, and a temperature measurement system, and is particularly effective when applied to a temperature measurement technique for measuring the temperature of an object to be measured in a non-contact manner.

被測定体の温度を非接触で測定する方法として、被測定体からの赤外線放射を利用する測定法が知られている。しかし、被測定体と赤外線センサとの間に赤外線を遮断する部材が介在する場合にはこの方法を採用することができない。たとえば、床暖房システムの竣工検査を行う際に床内の配管に正常に温水が送り出されているか否かを迅速に検査したい要請があるが、このような場合に配管からの赤外線放射を計測して検査することは配管上に床板が存在するために短時間での計測は困難であった。   As a method for measuring the temperature of the measurement object in a non-contact manner, a measurement method using infrared radiation from the measurement object is known. However, this method cannot be adopted when a member for blocking infrared light is interposed between the measured object and the infrared sensor. For example, when a completion inspection of a floor heating system is performed, there is a request to quickly inspect whether hot water is normally delivered to piping in the floor. In such a case, infrared radiation from the piping is measured. It was difficult to measure in a short time because there was a floorboard on the pipe.

このため、本発明者らは、赤外線放射を用いることなく非接触で床暖房システムの床内配管の温度を測定できる技術を開発した。この技術による温度測定方法は以下の通りである。すなわち、床内の配管上に金属製のフィルムを配置し、配管からの熱伝導によって金属製フィルムを加熱する。この金属製フィルムの温度をフィルム内に発生する渦電流を用いて計測する。渦電流は床上に配置したコイルに交流電流を流すことよって発生させ、発生した渦電流による磁界を同一または別のコイルによって検知する。金属フィルムの温度によって電気抵抗が変化し、電気抵抗の変化が渦電流値の変化を生じるので、渦電流による磁界を測定することによって金属フィルムおよびこれに接触する配管の温度を検知することができる。なお、このような本発明者らの開発した技術については本出願と同一の出願人による特許出願の公報（特許文献１）に記載されている。
特開２０００−１９３５３１号公報 For this reason, the present inventors have developed a technique that can measure the temperature of the piping in the floor of the floor heating system in a non-contact manner without using infrared radiation. The temperature measurement method by this technique is as follows. That is, a metal film is disposed on a pipe in the floor, and the metal film is heated by heat conduction from the pipe. The temperature of this metal film is measured using eddy current generated in the film. The eddy current is generated by passing an alternating current through a coil arranged on the floor, and the magnetic field due to the generated eddy current is detected by the same or another coil. The electrical resistance changes depending on the temperature of the metal film, and the change in electrical resistance causes a change in the eddy current value. Therefore, the temperature of the metal film and the pipe in contact with the metal film can be detected by measuring the magnetic field due to the eddy current. . The technology developed by the present inventors is described in a patent application publication (Patent Document 1) by the same applicant as the present application.
JP 2000-193531 A

しかしながら、前記特許文献１の技術による温度測定では、被測定体である金属製フィルムとコイルとの間の距離が変化してしまうと、正確な温度測定ができない問題がある。すなわち、前記特許文献１の技術では、金属製フィルムの温度変化（渦電流の変化）をコイルのインダクタンスの変化として検知するが、コイルのインダクタンスは、金属製フィルムの温度（渦電流）だけでなく金属製フィルムからコイルまでの距離によっても影響を受ける。距離を一定に維持した場合にはインダクタンスの変化は温度の変化として観測することができるが、距離が変化した場合にはインダクタンスはもはや温度によってのみ変化したとは見なせなくなる。つまり、前記特許文献１の技術では、被測定体とコイルとの距離を既知の一定値に維持する必要がある。   However, in the temperature measurement by the technique of Patent Document 1, there is a problem that accurate temperature measurement cannot be performed if the distance between the metal film as the object to be measured and the coil changes. That is, in the technique of Patent Document 1, a change in temperature of the metal film (change in eddy current) is detected as a change in inductance of the coil. The inductance of the coil is not only the temperature of the metal film (eddy current). It is also affected by the distance from the metal film to the coil. When the distance is kept constant, the change in inductance can be observed as a change in temperature. However, when the distance changes, the inductance can no longer be considered to change only with temperature. That is, in the technique of Patent Document 1, it is necessary to maintain the distance between the measured object and the coil at a known constant value.

本発明の目的は、被測定体内の渦電流を利用して被測定体の温度を非接触で測定する温度計測手法において、被測定体から誘導素子（コイル）までの距離が変化した場合であっても正確な温度測定を実現する温度計測の技術を提供することにある。   An object of the present invention is when the distance from the measured object to the inductive element (coil) is changed in a temperature measurement method in which the temperature of the measured object is measured in a non-contact manner using eddy current in the measured object. However, it is to provide a temperature measurement technique that realizes accurate temperature measurement.

本明細書で開示する発明は、以下の通りである。すなわち、本発明の温度測定装置は、導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置であって、第１誘導素子を含み、その発振周波数が前記被測定体の温度および前記被測定体から前記第１誘導素子までの距離に依存して変化する第１発振回路と、第２誘導素子を含み、その発振周波数が前記被測定体から前記第２誘導素子までの距離に依存して変化し、かつ、その発振周波数への前記被測定体の温度依存性が前記第１発振回路における発振周波数への前記被測定体の温度依存性よりも小さい第２発振回路と、前記第１発振回路および第２発振回路の各発振周波数を測定する周波数測定手段と、補正用データを記憶する記憶手段と、前記第２発振回路の発振周波数と前記補正用データとから前記第１誘導素子と前記被測定体との間の推定距離を算出し、前記第１発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出する演算処理手段と、を有する。   The invention disclosed in this specification is as follows. That is, the temperature measuring apparatus of the present invention is a temperature measuring apparatus that measures the temperature of a conductive or semiconductive measured object in a non-contact manner, includes a first induction element, and the oscillation frequency of the measured object is the measured object. And a second inductive element that varies depending on the temperature and the distance from the measured body to the first inductive element, the oscillation frequency from the measured object to the second inductive element A second oscillation circuit that varies depending on the distance of the first oscillation circuit, and whose temperature dependency of the device under test to the oscillation frequency is smaller than the temperature dependency of the device under test to the oscillation frequency of the first oscillation circuit The frequency measurement means for measuring each oscillation frequency of the first oscillation circuit and the second oscillation circuit, the storage means for storing correction data, the oscillation frequency of the second oscillation circuit, and the correction data. The first inductive element and the Calculating an estimated distance between the measuring body, having an arithmetic processing means for calculating the temperature of the object to be measured from said estimated distances and the oscillation frequency of the first oscillation circuit.

このような温度測定装置によれば、第２発振回路の発振周波数によって被測定体までの距離を推定できる。すなわち、第２発振回路の発振周波数は第１発振回路に比較して温度依存性が小さいので、つまり距離依存性が支配的になるので、第２発振回路の発振周波数から被測定体までの距離を推定できる。第２発振回路の第２誘導素子と第１発振回路の第１誘導素子との位置関係が予め定められたものであるなら、第２発振回路の発振周波数によって推定した距離から第１発振回路の第１誘導素子と被測定体の間の距離を補正し、第１発振回路の発振周波数から正確な被測定体の温度を知ることができる。ここで、第２発振回路の発振周波数への被測定体の温度依存性は第１発振回路における温度依存性より小さいことが要件となるが、理想的には第２発振回路における温度依存性が無いことが好ましい。しかしながら現実には第２発振回路における発振周波数への温度依存性を全く無くすることはできないので、実用的には、第２発振回路の温度依存性が、距離依存性（第２発振回路の第２誘導素子と被測定体までの距離が第２発振回路の発振周波数に及ぼす影響）に対して実質的に無視できるレベルであればよい。   According to such a temperature measuring device, the distance to the measurement object can be estimated from the oscillation frequency of the second oscillation circuit. That is, since the oscillation frequency of the second oscillation circuit is less temperature dependent than the first oscillation circuit, that is, the distance dependency is dominant, the distance from the oscillation frequency of the second oscillation circuit to the object to be measured. Can be estimated. If the positional relationship between the second inductive element of the second oscillating circuit and the first inductive element of the first oscillating circuit is predetermined, the distance of the first oscillating circuit from the distance estimated by the oscillation frequency of the second oscillating circuit is determined. The distance between the first inductive element and the measured object can be corrected, and the accurate temperature of the measured object can be known from the oscillation frequency of the first oscillation circuit. Here, the temperature dependency of the object to be measured on the oscillation frequency of the second oscillation circuit is required to be smaller than the temperature dependency of the first oscillation circuit. Ideally, the temperature dependency of the second oscillation circuit is Preferably no. However, in reality, the temperature dependence on the oscillation frequency in the second oscillation circuit cannot be eliminated at all. Therefore, in practice, the temperature dependence of the second oscillation circuit is the distance dependence (the second dependence of the second oscillation circuit). It is sufficient that the distance between the 2-inductive element and the measured object is substantially negligible with respect to the influence on the oscillation frequency of the second oscillation circuit.

前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする手法として以下の手法を例示できる。第１の手法は、前記第２誘導素子と前記被測定体との距離を、前記第１誘導素子と前記被測定体との距離に比較して大きくする手法である。   The following technique can be exemplified as a technique for making the temperature dependence of the device under test to the oscillation frequency in the second oscillation circuit smaller than the temperature dependence of the device under test to the oscillation frequency in the first oscillation circuit. The first method is a method of increasing the distance between the second inductive element and the measured object as compared with the distance between the first inductive element and the measured object.

本発明に先立ち、本発明者らは、以下のような実験検討を行った。すなわち、誘導素子を被測定体の近傍に配置し、誘導素子と被測定体との間の距離および被測定体の温度によって、誘導素子のインダクタンス（全インダクタンス）がどのように変化するかを検討した。この結果、距離を以下の３つの領域に分けて考えることが可能であることを見出した。つまり、インダクタンスが距離と温度の両方の影響を受ける第１の距離領域、インダクタンスが距離の影響を受けるが温度の影響を無視できる第１の距離領域より遠い第２の距離領域、インダクタンスが距離にも温度にも影響を受けない第２の距離領域より遠い第３の距離領域である。第１および第２の距離領域では、誘導素子からの磁界によって被測定体内に渦電流を発生する。この渦電流は一種のインダクタンスを形成するから、渦電流（インダクタンス）に起因する磁界は誘導素子に相互インダクタンスを発生させる。この相互インダクタンス成分が誘導素子の全インダクタンスに変化を生じさせているものと考察できる。一方、第３の距離領域ではもはや渦電流との相互インダクタンスは形成されず（もしくは誘導素子からの磁界によって渦電流が形成されるほど近い距離にはなく）、誘導素子のインダクタンスは自己インダクタンスのみとなって被測定体の影響を受けないものと考えることができる。   Prior to the present invention, the present inventors conducted the following experimental study. In other words, an inductive element is placed in the vicinity of the measured object, and how the inductance (total inductance) of the inductive element changes depending on the distance between the inductive element and the measured object and the temperature of the measured object did. As a result, it was found that the distance can be divided into the following three areas. That is, the first distance region where the inductance is affected by both the distance and the temperature, the second distance region farther than the first distance region where the inductance is affected by the distance but the influence of the temperature can be ignored, and the inductance is the distance And a third distance area farther than the second distance area that is not affected by temperature. In the first and second distance regions, an eddy current is generated in the body to be measured by the magnetic field from the induction element. Since this eddy current forms a kind of inductance, the magnetic field caused by the eddy current (inductance) generates mutual inductance in the induction element. It can be considered that this mutual inductance component causes a change in the total inductance of the induction element. On the other hand, in the third distance region, mutual inductance with eddy current is no longer formed (or not so close that eddy current is formed by the magnetic field from the inductive element), and the inductance of the inductive element is only self-inductance. Therefore, it can be considered that it is not affected by the measured object.

第１の距離領域ではインダクタンスは距離と温度の両方の影響を受けるが、第２の距離領域では温度の影響をあまり受けず距離にのみ影響される（距離のパラメータが支配的）。この理由については明らかでない。理由を明らかにするための物理モデルを各種考えることは可能であるが、この知見を本願発明に利用する場合には重要ではない。本発明者らは、このような実験検討によって得られた知見、つまり、第１の距離領域では誘導素子のインダクタンスが被測定体からの距離および被測定体の温度の２つのパラメータで決定され、第２の距離領域（第１の距離領域より遠い領域）では誘導素子のインダクタンスは主に距離のパラメータによって決定されるという知見を利用して本発明に至った。すなわち、第１発振回路の第１誘導素子を第１の距離領域に置き、第２発振回路の第２誘導素子を第２の距離領域に置けば、第２発振回路の発振周波数（第２誘導素子のインダクタンスの変化に応じて変化する）から被測定体までの距離を算出でき、算出した距離と第１発振回路の発振周波数（第１誘導素子のインダクタンスの変化に応じて変化する）とから被測定体の温度を算出できる。これにより、被測定体までの距離が変化した場合であっても、正確な温度測定を行うことが可能になる。   In the first distance region, the inductance is affected by both the distance and the temperature, but in the second distance region, the inductance is not affected by the temperature so much and is influenced only by the distance (the distance parameter is dominant). The reason for this is not clear. Although various physical models for clarifying the reason can be considered, it is not important when this knowledge is used in the present invention. The inventors have obtained the knowledge obtained by such an experimental study, that is, in the first distance region, the inductance of the inductive element is determined by two parameters, the distance from the measured object and the temperature of the measured object, In the second distance region (region far from the first distance region), the present invention has been made by utilizing the knowledge that the inductance of the inductive element is mainly determined by the distance parameter. That is, if the first inductive element of the first oscillation circuit is placed in the first distance region and the second inductive element of the second oscillation circuit is placed in the second distance region, the oscillation frequency of the second oscillation circuit (second induction From the calculated distance and the oscillation frequency of the first oscillation circuit (which changes according to the change in inductance of the first inductive element). The temperature of the measured object can be calculated. Thus, accurate temperature measurement can be performed even when the distance to the measurement object changes.

前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする第２の手法は、前記第２発振回路の発振周波数を前記第１発振回路の発振周波数より低くすることである。第２発振回路の発振周波数を第１発振回路のそれより小さくしても、前記距離の場合と同様に、インダクタンスへの温度の影響を無視できる周波数領域を発見できる。第２発振回路をこのような周波数領域で発振させ、一方、第１発振回路を温度および距離の両方がインダクタンスのパラメータとなる周波数領域で発振させると、前記距離の場合と同様に被測定体までの距離が変化した場合であっても、正確な温度測定を行うことが可能になる。   The second method of reducing the temperature dependency of the device under test to the oscillation frequency in the second oscillation circuit to be smaller than the temperature dependency of the device under test to the oscillation frequency in the first oscillation circuit is the second method. The oscillation frequency of the oscillation circuit is set lower than the oscillation frequency of the first oscillation circuit. Even if the oscillation frequency of the second oscillation circuit is made smaller than that of the first oscillation circuit, a frequency region in which the influence of temperature on the inductance can be ignored can be found as in the case of the distance. When the second oscillation circuit is oscillated in such a frequency region, while the first oscillation circuit is oscillated in a frequency region where both the temperature and the distance are parameters of the inductance, up to the object to be measured as in the case of the distance. Even when the distance changes, accurate temperature measurement can be performed.

前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする第３の手法は、前記第１誘導素子および第２誘導素子をコイルで構成し、前記第２誘導素子の巻き数を前記第１誘導素子の巻き数より小さくすることである。この場合も、インダクタンスへの温度の影響を無視できる巻き数を発見できる。第２発振回路の第２誘導素子（コイル）の巻き数を温度の影響を受けない巻き数とし、第１発振回路の第１誘導素子（コイル）の巻き数を温度および距離の両方がインダクタンスのパラメータとなる巻き数とすることにより、前記距離の場合と同様に被測定体までの距離が変化した場合であっても、正確な温度測定を行うことが可能になる。   A third method for reducing the temperature dependence of the device under test to the oscillation frequency in the second oscillation circuit to be smaller than the temperature dependence of the device under test to the oscillation frequency in the first oscillation circuit is the first induction. The element and the second inductive element are constituted by coils, and the number of turns of the second inductive element is made smaller than the number of turns of the first inductive element. In this case as well, the number of turns that can ignore the influence of temperature on the inductance can be found. The number of turns of the second inductive element (coil) of the second oscillation circuit is set to the number of turns that is not affected by temperature, and the number of turns of the first inductive element (coil) of the first oscillation circuit is set so that both the temperature and the distance are inductances. By setting the number of turns as a parameter, it is possible to perform accurate temperature measurement even when the distance to the object to be measured is changed as in the case of the distance.

なお、前記説明では、被測定体との間の距離、印加される交流電流（電圧）の周波数、あるいは巻き数が異なる誘導素子（誘導素子を含む発振回路）を２つ用意する構成の発明を説明したが、誘導素子と被測定体との間の距離あるいは印加される周波数を変化させる手段を備えれば、誘導素子（発振回路）は１つでも良い。すなわち、本発明の温度測定装置は、導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置であって、誘導素子を含む発振回路と、前記発振回路の発振周波数を測定する周波数測定手段と、前記被測定体と前記誘導素子との間の距離を第１距離もしくは前記第１距離より長い第２距離に切替える手段と、補正用データを記憶する記憶手段と、前記被測定体と前記誘導素子との間の距離が前記第２距離にあるときの前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出し、前記被測定体と前記誘導素子との間の距離が前記第１距離にあるときの前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出する演算処理手段と、を有するものとすることができる。あるいは、本発明の温度測定装置は、導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置であって、誘導素子を含む発振回路と、前記発振回路の発振周波数を測定する周波数測定手段と、前記発振回路の発振周波数を第１周波数域もしくは前記第１周波数域より低い第２周波数域に切替える手段と、補正用データを記憶する記憶手段と、前記発振回路の発振周波数が前記第２周波数域にあるときの前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出し、前記発振回路の発振周波数が前記第１周波数域にあるときの前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出する演算処理手段と、を有するものとすることができる。誘導素子（発振回路）が１つであっても、距離を変化させ、あるいは、周波数を変化させ、その前後での発振周波数から被測定体までの距離を算出し、さらに算出した距離を用いて正確な温度を計算できる。   In the above description, the invention has a configuration in which two inductive elements (oscillation circuits including inductive elements) having different distances from the measured object, the frequency of the applied alternating current (voltage), or the number of turns are prepared. As described above, if a means for changing the distance between the inductive element and the measured object or the applied frequency is provided, the number of inductive elements (oscillation circuits) may be one. That is, the temperature measurement device of the present invention is a temperature measurement device that measures the temperature of a conductive or semiconductive object to be measured in a non-contact manner, and includes an oscillation circuit including an induction element and an oscillation frequency of the oscillation circuit. Frequency measuring means for measuring; means for switching a distance between the measured object and the inductive element to a first distance or a second distance longer than the first distance; storage means for storing correction data; The estimated distance between the inductive element and the measured object is calculated from the oscillation frequency of the oscillation circuit and the correction data when the distance between the measured object and the inductive element is at the second distance. Arithmetic processing means for calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance when the distance between the measured object and the inductive element is the first distance; To have That. Alternatively, the temperature measurement device of the present invention is a temperature measurement device that measures the temperature of a conductive or semiconductive object to be measured in a non-contact manner, and includes an oscillation circuit including an induction element and an oscillation frequency of the oscillation circuit. Frequency measuring means for measuring, means for switching the oscillation frequency of the oscillation circuit to a first frequency range or a second frequency range lower than the first frequency range, storage means for storing correction data, and oscillation of the oscillation circuit An estimated distance between the inductive element and the device under test is calculated from the oscillation frequency of the oscillation circuit when the frequency is in the second frequency range and the correction data, and the oscillation frequency of the oscillation circuit is An arithmetic processing unit that calculates the temperature of the measurement object from the oscillation frequency of the oscillation circuit and the estimated distance when in the first frequency range may be included. Even if there is only one induction element (oscillation circuit), change the distance or change the frequency, calculate the distance from the oscillation frequency before and after that to the measured object, and use the calculated distance Accurate temperature can be calculated.

また、前記した温度測定装置と熱容量の小さい金属箔とを用いて、気体、液体または固体等の渦電流を生成しない対象物の温度測定を行う温度測定システムを構成できる。さらに、前記温度測定装置の発明は、その制御方法として把握することも可能である。すなわち、２つの誘導素子（発振回路）で温度測定装置が構成される場合の制御方法は、前記第２発振回路の発振周波数と補正用データとから前記第２誘導素子と前記被測定体との間の距離を算出するステップと、前記第２誘導素子と前記被測定体との間の距離から前記第１誘導素子と前記被測定体との間の推定距離を算出するステップと、前記第１発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出するステップと、を有する。あるいは、１つの誘導素子（発振回路）と被測定体までの距離を変化させる手段で温度測定装置が構成される場合の制御方法では、前記被測定体と前記誘導素子との間の距離を前記第２距離にし、前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出するステップと、前記被測定体と前記誘導素子との間の距離を、前記第２距離から前記第１距離に切替えるステップと、前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出するステップと、を有する。あるいは、１つの誘導素子（発振回路）と発振周波数域を変化させる手段で温度測定装置が構成される場合の制御方法では、前記発振回路の発振周波数を前記第２周波数域にし、前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出するステップと、前記発振回路の発振周波数を、前記第２周波数域から前記第１周波数域に切替えるステップと、前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出するステップと、を有する。これら制御方法によって、被測定体までの距離が変化した場合でも正確な温度の測定が可能になる。   Moreover, the temperature measurement system which measures the temperature of the object which does not produce | generate eddy currents, such as gas, a liquid, or a solid, can be comprised using an above described temperature measuring apparatus and metal foil with small heat capacity. Furthermore, the invention of the temperature measuring device can be grasped as its control method. That is, the control method in the case where the temperature measuring device is configured by two inductive elements (oscillator circuits) is based on the second inductive element and the measured object from the oscillation frequency of the second oscillator circuit and correction data. Calculating a distance between the first inductive element and the measured object from a distance between the second inductive element and the measured object, and the first Calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance. Alternatively, in the control method in the case where the temperature measuring device is configured by means for changing the distance between one inductive element (oscillation circuit) and the measured object, the distance between the measured object and the inductive element is set to Calculating an estimated distance between the inductive element and the measured object from the oscillation frequency of the oscillation circuit and the correction data, and between the measured object and the inductive element. And switching the distance from the second distance to the first distance, and calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance. Alternatively, in the control method in the case where the temperature measuring device is configured by one inductive element (oscillation circuit) and means for changing the oscillation frequency range, the oscillation frequency of the oscillation circuit is set to the second frequency range, Calculating an estimated distance between the inductive element and the device under test from an oscillation frequency and the correction data; and switching the oscillation frequency of the oscillation circuit from the second frequency range to the first frequency range. And a step of calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance. These control methods enable accurate temperature measurement even when the distance to the object to be measured changes.

本願発明によれば、被測定体内の渦電流を利用して被測定体の温度を非接触で測定する温度計測手法において、被測定体から誘導素子（コイル）までの距離が変化した場合であっても正確な温度測定を実現する温度計測の技術を提供できる。   According to the present invention, in the temperature measurement method in which the temperature of the measurement object is measured in a non-contact manner using the eddy current in the measurement object, the distance from the measurement object to the induction element (coil) changes. However, it is possible to provide temperature measurement technology that realizes accurate temperature measurement.

以下、本発明を実施するための最良の形態を、図面に基づいて詳細に説明する。具体的な実施形態の説明に先立ち、本発明の基礎となる本発明者らが行った実験について説明する。図１（ａ）は、本発明者らが行った実験の系を示す概略図である。   Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings. Prior to the description of a specific embodiment, an experiment conducted by the present inventors as the basis of the present invention will be described. FIG. 1A is a schematic diagram showing a system of an experiment conducted by the present inventors.

図１（ａ）に示すように、コイル１を準備し、このコイル１をオシレータ２に接続する。そして、たとえば温水を通す配管３上に導電性の被測定体４を配置し、被測定体４に対向するようコイル１を配置する。コイル１と被測定体４との間の距離はｄ［ｍｍ］とする。   As shown in FIG. 1A, a coil 1 is prepared, and this coil 1 is connected to an oscillator 2. Then, for example, a conductive measurement object 4 is arranged on a pipe 3 through which hot water passes, and the coil 1 is arranged so as to face the measurement object 4. The distance between the coil 1 and the measured object 4 is d [mm].

コイル１は、たとえば円筒状の固体材料に絶縁被覆の導電性ワイヤを巻きつけたソレノイドコイルである。コイルの形状、巻き数、磁心の材料等、発生する磁界の強さおよび分布に影響を与えるコイルのパラメータに特別な制限はない。しかし、コイル１が発生する磁界によって被測定体４に適切な渦電流を発生させる程度の磁界の分布および強さを生じるよう、適切にコイル１のパラメータを選択する必要がある。   The coil 1 is, for example, a solenoid coil in which a conductive wire with an insulating coating is wound around a cylindrical solid material. There are no particular restrictions on the coil parameters that affect the strength and distribution of the generated magnetic field, such as the shape of the coil, the number of turns, and the material of the magnetic core. However, it is necessary to appropriately select the parameters of the coil 1 so that the magnetic field generated by the coil 1 generates a magnetic field distribution and intensity that can generate an appropriate eddy current in the DUT 4.

オシレータ２の内部にはコンデンサ（必要に応じて抵抗も）を含み、このコンデンサ（および抵抗）とコイル１とで共振回路を構成する。オシレータ２は、共振回路の共振周波数で発振し、その発振周波数をｆ［Ｈｚ］として出力する。発振周波数ｆは、オシレータ２内のコンデンサ（および抵抗）の値を固定とすることによりコイル１のインダクタンスの変化を反映して変動する。   The oscillator 2 includes a capacitor (and a resistor if necessary), and the capacitor (and the resistor) and the coil 1 constitute a resonance circuit. The oscillator 2 oscillates at the resonance frequency of the resonance circuit, and outputs the oscillation frequency as f [Hz]. The oscillation frequency f changes to reflect the change in the inductance of the coil 1 by fixing the value of the capacitor (and resistance) in the oscillator 2.

配管３には一定温度の温水を通す。これにより配管３に接触する被測定体４の温度を一定に保つことができる。被測定体４は、導電性または半導電性の材料で構成されている限り特に制限はない。ただし、温度計測の対象が配管３の温度であるならば、できるだけ速やかに配管３の温度に等しくなること、あるいは、配管３の温度への影響を少なくすること等の要求から、被測定体４は、熱容量の小さいものであることが好ましい。たとえばアルミニウム等の金属箔が好ましい。   Hot water having a constant temperature is passed through the pipe 3. Thereby, the temperature of the to-be-measured body 4 which contacts the piping 3 can be kept constant. The measured object 4 is not particularly limited as long as it is made of a conductive or semiconductive material. However, if the temperature measurement target is the temperature of the pipe 3, the object to be measured 4 becomes equal to the temperature of the pipe 3 as quickly as possible, or the influence on the temperature of the pipe 3 is reduced. Preferably has a small heat capacity. For example, a metal foil such as aluminum is preferable.

上記のようなコイル１と被測定体４との配置においてオシレータ２を発振させると、コイル１に流れる交流電流によって交流磁界が生成され、この交流磁界によって被測定体４に渦電流が発生する。この渦電流は、コイル内を流れる電流と等価であるから渦電流による磁界が発生する。渦電流による磁界はコイル１に相互インダクタンスを発生させる。ここで、コイル１に流れる電流を一定にしたとしても、コイル１と被測定体４の位置関係が変化すると、被測定体４に発生する渦電流が変化する。よってコイル１の相互インダクタンスが変化し、発振周波数ｆの変化として観測される。さらに、コイル１と被測定体４の位置関係を固定したとしても、被測定体４の温度が変化すれば、渦電流の値が変化し、やはりコイル１の相互インダクタンスが変化して発振周波数ｆの変化として観測される。このように被測定体４の温度が変化すれば発振周波数が変化するのであるから、その変化の関係を予め調べておけば、発振周波数の変化から被測定体４の温度を検知することができる。これが本発明の温度測定の基本原理である。   When the oscillator 2 is oscillated in the arrangement of the coil 1 and the measured object 4 as described above, an alternating magnetic field is generated by the alternating current flowing through the coil 1, and an eddy current is generated in the measured object 4 by the alternating magnetic field. Since this eddy current is equivalent to the current flowing in the coil, a magnetic field due to the eddy current is generated. The magnetic field caused by the eddy current generates mutual inductance in the coil 1. Here, even if the current flowing through the coil 1 is made constant, the eddy current generated in the measured object 4 changes when the positional relationship between the coil 1 and the measured object 4 changes. Therefore, the mutual inductance of the coil 1 changes and is observed as a change in the oscillation frequency f. Furthermore, even if the positional relationship between the coil 1 and the measured object 4 is fixed, if the temperature of the measured object 4 changes, the value of the eddy current changes, and the mutual inductance of the coil 1 also changes, and the oscillation frequency f It is observed as a change. Since the oscillation frequency changes when the temperature of the measurement object 4 changes in this way, the temperature of the measurement object 4 can be detected from the change of the oscillation frequency if the relationship of the change is examined in advance. . This is the basic principle of temperature measurement of the present invention.

ところで、前記基本原理の説明から明らかに、発振周波数は被測定体４の温度にのみ依存するのではなく、コイル１と被測定体４との位置関係にも依存する。このため、正確な温度測定のためには、事前にコイル１と被測定体４との位置関係が明らかになっている必要がある。そこで、本発明者らは、図１（ａ）に示した系での発振周波数ｆに対するコイル１と被測定体４との距離ｄの依存性について実験を行った。   By the way, clearly from the description of the basic principle, the oscillation frequency does not depend only on the temperature of the measured object 4 but also depends on the positional relationship between the coil 1 and the measured object 4. For this reason, for accurate temperature measurement, the positional relationship between the coil 1 and the measured object 4 needs to be clarified in advance. Therefore, the inventors conducted an experiment on the dependence of the distance d between the coil 1 and the measured object 4 on the oscillation frequency f in the system shown in FIG.

図１（ｂ）は、実験の結果を示すグラフである。図１（ｂ）において、縦軸は発振周波数ｆを、横軸は距離ｄを示す。点線で示したラインは、被測定体４の温度を６０℃にしたときの発振周波数ｆの距離依存性を、実線で示したラインは、被測定体４の温度を３０℃にしたときの発振周波数ｆの距離依存性を示す。図から明らかに、距離ｄが大きくなるほど発振周波数ｆは低下する。また、被測定体４の温度が高いほど発振周波数ｆが大きくなる。しかしながら、距離ｄが１３ｍｍ以下の温度依存領域においては温度の上昇に伴って発振周波数ｆは顕著に大きくなる（温度依存性がある）一方で、距離ｄが１３ｍｍより大きい温度非依存領域では、被測定体４の温度を変えても発振周波数ｆはほとんど変化しない（温度依存性が低いあるいは無い）。   FIG.1 (b) is a graph which shows the result of experiment. In FIG. 1B, the vertical axis represents the oscillation frequency f, and the horizontal axis represents the distance d. The dotted line indicates the distance dependence of the oscillation frequency f when the temperature of the measured object 4 is 60 ° C., and the solid line indicates the oscillation when the measured temperature of the measured object 4 is 30 ° C. The distance dependence of the frequency f is shown. Obviously, the oscillation frequency f decreases as the distance d increases. The oscillation frequency f increases as the temperature of the device under test 4 increases. However, in the temperature dependent region where the distance d is 13 mm or less, the oscillation frequency f increases remarkably as the temperature rises (there is temperature dependence), while in the temperature independent region where the distance d is greater than 13 mm, Even if the temperature of the measuring body 4 is changed, the oscillation frequency f hardly changes (low or no temperature dependency).

すなわち、本発明者らは、コイル１と被測定体４との距離ｄの範囲によって、オシレータ２の発振周波数ｆが被測定体の温度Ｔと距離ｄの両方に依存する温度依存領域と、発振周波数ｆが距離ｄにのみ依存する（あるいは温度Ｔの依存性が無視できる）温度非依存領域の二つの領域に分けることができる事実を発見した。前記実験の場合、距離ｄがほぼ１３ｍｍを境にして、それより小さい領域が温度依存領域、大きい領域が温度非依存領域になる。   That is, the inventors of the present invention have a temperature dependent region in which the oscillation frequency f of the oscillator 2 depends on both the temperature T and the distance d of the measured object, and the oscillation depending on the range of the distance d between the coil 1 and the measured object 4. It has been discovered that the frequency f can be divided into two regions that are temperature-independent regions that depend only on the distance d (or the dependence of the temperature T is negligible). In the case of the experiment, when the distance d is approximately 13 mm, a region smaller than the distance d is a temperature-dependent region and a larger region is a temperature-independent region.

このような実験事実を利用して、距離ｄが不確定な場合にも正確な温度測定が可能になる。すなわち、まず最初に、コイル１を温度非依存領域に置き、第１回目の発振周波数ｆ１の測定を行う。この第１回目の発振周波数ｆ１の測定では、コイル１を温度非依存領域に置いているので、測定した発振周波数ｆ１は距離ｄにのみ依存する（温度Ｔに依存するとしてもその依存性は無視できる）。よって、予め発振周波数ｆの距離依存性を測定しておけば、測定した発振周波数ｆ１からコイル１と被測定体４との距離ｄ１が確定できる。前記実験の場合、距離ｄ１は例えば１６．５ｍｍとすることができる。次に、コイル１を予め決めた距離ｄｏｓだけ被測定体４に近づけ、あるいは予め定めた距離ｄｏｓだけ被測定体４に近く配置した別のコイルを用意し、この近づけたコイル１あるいは別に用意したコイルを含む発振回路の発振周波数ｆ２を測定する。距離ｄｏｓは、近づけたコイル１あるいは別に用意したコイルが温度依存領域に入るように設定する。前記実験の場合、距離ｄｏｓは、たとえば９．５ｍｍとすることができる。第２回目の測定では、コイルが温度依存領域にあるため、発振周波数ｆ２は、被測定体４の温度Ｔに依存するだけでなく被測定体４までの距離ｄ２にも依存する。ここで距離ｄ２は、第１回目の測定からｄ１−ｄｏｓであることは判明しているので、予め測定しておいた発振周波数ｆの温度依存性および距離依存性を用いて測定した発振周波数ｆ２および距離ｄ１−ｄｏｓから温度Ｔを確定できる。   Using such experimental facts, accurate temperature measurement is possible even when the distance d is indefinite. That is, first, the coil 1 is placed in a temperature-independent region, and the first oscillation frequency f1 is measured. In the first measurement of the oscillation frequency f1, since the coil 1 is placed in the temperature-independent region, the measured oscillation frequency f1 depends only on the distance d (the dependence is ignored even if it depends on the temperature T). it can). Therefore, if the distance dependency of the oscillation frequency f is measured in advance, the distance d1 between the coil 1 and the measured object 4 can be determined from the measured oscillation frequency f1. In the case of the experiment, the distance d1 can be set to 16.5 mm, for example. Next, the coil 1 is brought close to the measured object 4 by a predetermined distance dos, or another coil arranged close to the measured object 4 by a predetermined distance dos is prepared. The oscillation frequency f2 of the oscillation circuit including the coil is measured. The distance dos is set so that the close coil 1 or a separately prepared coil enters the temperature dependent region. In the case of the experiment, the distance dos can be set to 9.5 mm, for example. In the second measurement, since the coil is in the temperature dependent region, the oscillation frequency f2 depends not only on the temperature T of the measured object 4 but also on the distance d2 to the measured object 4. Here, since the distance d2 is found to be d1-dos from the first measurement, the oscillation frequency f2 measured using the temperature dependence and distance dependence of the oscillation frequency f measured in advance. And the temperature T can be determined from the distance d1-dos.

上記実験の場合の距離ｄ１（距離ｄ２）の確定および温度Ｔの確定の具体例を以下に説明する。まず、前記実験結果から距離ｄが１４．５〜１８．５ｍｍの範囲では発振周波数ｆの温度依存性はほとんど見られない。この範囲のデータから、たとえば１６．５ｍｍを基準位置とした変位Δｄを発振周波数ｆ１から求める実験式を導ける。実験式のモデル関数として１次関数を採用すれば、その傾きおよび切片は、距離ｄが１４．５〜１８．５ｍｍの範囲のデータをカーブフィッティングすることにより求めることができる。その結果、上記実験の場合の実験式は数１のようになる。
（数１） Δｄ＝２９１．９８−０．００５０９×ｆ１−１６．５ Specific examples of the determination of the distance d1 (distance d2) and the determination of the temperature T in the case of the above experiment will be described below. First, from the experimental results, the temperature dependence of the oscillation frequency f is hardly seen when the distance d is in the range of 14.5 to 18.5 mm. From this range of data, an empirical formula for obtaining the displacement Δd with the reference position of 16.5 mm, for example, from the oscillation frequency f1 can be derived. If a linear function is adopted as the model function of the empirical formula, the slope and intercept can be obtained by curve fitting data having a distance d in the range of 14.5 to 18.5 mm. As a result, the empirical formula in the case of the above experiment is as follows.
(Equation 1) Δd = 291.98−0.00509 × f1−16.5

次に、発振周波数ｆに温度依存性のある範囲（ｄが４〜１０ｍｍ）のデータを用いて、温度Ｔを求める実験式を導く。前記ｄｏｓが９．５ｍｍの場合、発振周波数ｆ２測定時の距離ｄ２は、基準位置で７ｍｍとなる。よって、距離ｄ２＝４ｍｍであればΔｄ＝−３ｍｍであり、ｄ２＝５のときΔｄ＝−２、ｄ２＝６のときΔｄ＝−１、ｄ２＝７のときΔｄ＝０、ｄ２＝８のときΔｄ＝１、ｄ２＝９のときΔｄ＝２、ｄ２＝１０のときΔｄ＝３である。各距離ｄ２のときの実験データを、温度Ｔを発振周波数ｆ２の１次関数で近似すると、数２〜数８のようになる。
（数２） Ｔ＝−０．００５１５×ｆ２＋４０７．１２ （ｄ２＝４）
（数３） Ｔ＝−０．００７０６×ｆ２＋５２０．０７ （ｄ２＝５）
（数４） Ｔ＝−０．００７６０８×ｆ２＋５４３．５６ （ｄ２＝６）
（数５） Ｔ＝−０．０１１０５６×ｆ２＋７５０．０２ （ｄ２＝７）
（数６） Ｔ＝−０．０１２１×ｆ２＋７９５．６９４ （ｄ２＝８）
（数７） Ｔ＝−０．０２１３５×ｆ２＋１３４７ （ｄ２＝９）
（数８） Ｔ＝−０．０４４７４×ｆ２＋２７２１．９ （ｄ２＝１０） Next, an empirical formula for obtaining the temperature T is derived using data in a range where the oscillation frequency f is temperature-dependent (d is 4 to 10 mm). When the dos is 9.5 mm, the distance d2 when measuring the oscillation frequency f2 is 7 mm at the reference position. Therefore, when the distance d2 = 4 mm, Δd = −3 mm, when d2 = 5, when Δd = −2, when d2 = 6, when Δd = −1, when d2 = 7, when Δd = 0, and when d2 = 8 When Δd = 1 and d2 = 9, Δd = 2, and when d2 = 10, Δd = 3. When the experimental data at each distance d2 is approximated by a linear function of the oscillation frequency f2 with respect to the temperature T, Equations 2 to 8 are obtained.
(Equation 2) T = −0.00515 × f2 + 407.12 (d2 = 4)
(Equation 3) T = −0.00706 × f2 + 520.07 (d2 = 5)
(Equation 4) T = −0.007608 × f2 + 543.56 (d2 = 6)
(Equation 5) T = −0.011056 × f2 + 750.02 (d2 = 7)
(Equation 6) T = −0.0121 × f2 + 795.694 (d2 = 8)
(Equation 7) T = −0.02135 × f2 + 1347 (d2 = 9)
(Equation 8) T = −0.04474 × f2 + 2721.9 (d2 = 10)

ここで、温度Ｔを数９のように表せば、
（数９） Ｔ＝−ａ×ｆ２＋ｂ
変数ａおよび変数ｂはΔｄの関数となる。変数ａおよび変数ｂのモデル関数として、数１０および数１１を採用し、
（数１０） ａ＝ａ１×ｅｘｐ（ａ２×Δｄ）
（数１１） ｂ＝ｂ１×ｅｘｐ（ｂ２×Δｄ）
数２〜数８の各傾きおよび切片のデータを用いてカーブフィッティングを行えば、ａ１＝０．０１２、ａ２＝０．３２８３、ｂ１＝８２１．１９、ｂ２＝０．２８５２を計算することができる。なお、ｅｘｐは自然対数である。 Here, if the temperature T is expressed as in Equation 9,
(Equation 9) T = −a × f2 + b
Variables a and b are functions of Δd. Equations 10 and 11 are adopted as model functions of the variables a and b,
(Equation 10) a = a1 × exp (a2 × Δd)
(Equation 11) b = b1 × exp (b2 × Δd)
If curve fitting is performed using the slope and intercept data of Equations 2 to 8, a1 = 0.012, a2 = 0.3283, b1 = 821.19, and b2 = 0.2852 can be calculated. . In addition, exp is a natural logarithm.

以上の計算から、前記実験の場合の温度Ｔは、発振周波数ｆ１の測定結果および数１から求めたΔｄを数１０および数１１に代入し、数１０および数１１で求めたａおよびｂと発振周波数ｆ２の測定結果から数９を用いて計算することができる。このようにして求めた温度Ｔは、コイルから被測定体までの距離ｄが不確定な場合であっても、距離ｄを補正したものであり、正確な温度として測定されたものとなる。   From the above calculation, the temperature T in the case of the experiment is obtained by substituting Δd obtained from the measurement result of the oscillation frequency f1 and Equation 1 into Equations 10 and 11, and a and b obtained by Equations 10 and 11 and oscillation. It can be calculated using Equation 9 from the measurement result of the frequency f2. The temperature T thus obtained is a value obtained by correcting the distance d and measured as an accurate temperature even when the distance d from the coil to the measured object is uncertain.

次に、本実施の形態の温度測定装置の具体的な構成を説明する。図２は、本発明の一実施の形態である温度測定装置の構成の一例を示したブロック図である。本実施の形態の温度測定装置は、コイル１０ａ、コイル１０ｂ、コイル支持部材１１、オシレータ２０ａ、オシレータ２０ｂ、制御部３０、温度表示部４０を有する。コイル１０ａ、コイル１０ｂおよびコイル支持部材１１は、たとえば床板１２、金属箔１３および温水配管１４を含む床暖房システムの上部に配置する。   Next, a specific configuration of the temperature measuring apparatus according to the present embodiment will be described. FIG. 2 is a block diagram showing an example of the configuration of the temperature measuring apparatus according to one embodiment of the present invention. The temperature measurement device according to the present embodiment includes a coil 10a, a coil 10b, a coil support member 11, an oscillator 20a, an oscillator 20b, a control unit 30, and a temperature display unit 40. The coil 10a, the coil 10b, and the coil support member 11 are arrange | positioned at the upper part of the floor heating system containing the floor board 12, the metal foil 13, and the hot water piping 14, for example.

コイル１０ａおよびコイル１０ｂは、前記したコイル１と同様のコイルである。ここでは、コイルを例示するが、電気的に誘導性を示す素子であるならコイルに限定されることはない。たとえば、負性容量性を示す半導体素子等をコイル１０ａあるいはコイル１０ｂの代わりに用いても良い。   The coil 10a and the coil 10b are the same coils as the coil 1 described above. Here, although a coil is illustrated, it is not limited to a coil if it is an element which shows an electrically inductive property. For example, a semiconductor element or the like exhibiting negative capacitance may be used instead of the coil 10a or the coil 10b.

コイル支持部材１１は、コイル１０ａおよびコイル１０ｂを距離Ｌのオフセットをもって非測定体近傍に配置するための構造部材である。コイル支持部材１１の透磁率に特に制限はないが、常磁性体であることが好ましい。コイル支持部材１１には、図示するように、コイル１０ａおよびコイル１０ｂに距離Ｌのオフセットを設けるための段差を有し、段差上下の各平坦面にコイル１０ａおよびコイル１０ｂを配置し、コイル１０ａおよびコイル１０ｂ間に距離Ｌのオフセットを設けるようにしている。オフセット距離Ｌとしてはたとえば９．５ｍｍを例示する。   The coil support member 11 is a structural member for arranging the coil 10a and the coil 10b in the vicinity of the non-measurement body with an offset of the distance L. Although there is no restriction | limiting in particular in the magnetic permeability of the coil support member 11, It is preferable that it is a paramagnetic body. As shown in the figure, the coil support member 11 has a step for providing an offset of a distance L to the coil 10a and the coil 10b, and the coil 10a and the coil 10b are arranged on each flat surface above and below the step. An offset of a distance L is provided between the coils 10b. An example of the offset distance L is 9.5 mm.

オシレータ２０ａおよびオシレータ２０ｂは各々コイル１０ａおよびコイル１０ｂに接続され、その内部に有するコンデンサ２１ａおよびコンデンサ２１ｂとコイル１０ａおよびコイル１０ｂとで構成される共振回路の共振周波数で発振する発振回路である。オシレータ２０ａおよびオシレータ２０ｂの発振周波数はコイル１０ａおよびコイル１０ｂのインダクタンスの変化に応じて変化する。オシレータ２０ａおよびオシレータ２０ｂはＮＯＴ回路２２ａおよびＮＯＴ回路２２ｂで励振され、ＮＯＴ回路２３ａおよびＮＯＴ回路２３ｂによって各々その発振がパルス電圧として出力される。出力されたパルス電圧は後に説明するパルスカウンタによってカウントされ、所定時間（たとえば１秒）内のカウント数によって発振周波数が求められる。なお、ここではコイル１０ａおよびコンデンサ２１ａ（あるいはコイル１０ｂおよびコンデンサ２１ｂ）で共振回路を構成する例を示しているが、付加的に抵抗素子、容量素子、誘導素子等の回路素子を追加することは任意である。これら付加的な回路素子によって共振周波数を調整できる。あるいは共振のＱ値を調整し、共振を安定化することができる。   The oscillator 20a and the oscillator 20b are oscillation circuits that are connected to the coil 10a and the coil 10b, respectively, and oscillate at a resonance frequency of a resonance circuit including the capacitors 21a and 21b, the coils 10a, and the coils 10b. The oscillation frequencies of the oscillator 20a and the oscillator 20b change according to changes in inductance of the coils 10a and 10b. The oscillator 20a and the oscillator 20b are excited by a NOT circuit 22a and a NOT circuit 22b, and oscillations are output as pulse voltages by the NOT circuit 23a and the NOT circuit 23b, respectively. The output pulse voltage is counted by a pulse counter which will be described later, and the oscillation frequency is obtained by the count number within a predetermined time (for example, 1 second). Here, an example is shown in which the resonance circuit is configured by the coil 10a and the capacitor 21a (or the coil 10b and the capacitor 21b). However, additional circuit elements such as a resistance element, a capacitance element, and an induction element may be added. Is optional. The resonance frequency can be adjusted by these additional circuit elements. Alternatively, the resonance Q value can be adjusted to stabilize the resonance.

制御部３０は、本実施の形態の温度測定装置を制御する。制御部３０には、ＣＰＵ（中央演算処理装置）３１、パルスカウンタ３２、パルスカウンタ３３、ＲＡＭ（ランダムアクセスメモリ）３４、ＲＯＭ（リードオンリーメモリ）３５、表示制御回路３６を含む。ＣＰＵ３１は汎用的な演算処理装置であり、所定のプログラムに従って処理を実行できる。パルスカウンタ３２およびパルスカウンタ３３はＣＰＵ３１によって制御され、各々オシレータ２０ａおよびオシレータ２０ｂから出力されるパルスを計数する。ＲＡＭ３４はデータの一時記憶装置である。ＲＯＭ３５からロードしたプログラムやデータを保持し、また、プログラムの実行に利用するワークエリアを確保する。ＲＯＭ３５は、本装置で用いるプログラムやデータを記録する。なお、ＲＯＭ３５に代えてハードディスクドライブ等他のメモリ装置を利用することも可能である。表示制御回路３６は、温度表示部４０を制御する。   The control unit 30 controls the temperature measuring device according to the present embodiment. The control unit 30 includes a CPU (Central Processing Unit) 31, a pulse counter 32, a pulse counter 33, a RAM (Random Access Memory) 34, a ROM (Read Only Memory) 35, and a display control circuit 36. The CPU 31 is a general-purpose arithmetic processing device and can execute processing according to a predetermined program. The pulse counter 32 and the pulse counter 33 are controlled by the CPU 31, and count the pulses output from the oscillator 20a and the oscillator 20b, respectively. The RAM 34 is a temporary data storage device. The program and data loaded from the ROM 35 are held, and a work area used for executing the program is secured. The ROM 35 records programs and data used in this apparatus. It should be noted that another memory device such as a hard disk drive may be used in place of the ROM 35. The display control circuit 36 controls the temperature display unit 40.

温度表示部４０は、制御部３０で計算した温度Ｔを表示する。表示はデジタル式、アナログ式の何れであっても良く、計算結果を表示できるものであれば任意の表示装置を適用できる。たとえば液晶表示装置を例示できる。   The temperature display unit 40 displays the temperature T calculated by the control unit 30. The display may be either a digital type or an analog type, and any display device can be applied as long as the calculation result can be displayed. For example, a liquid crystal display device can be illustrated.

なお、本例では、床暖房システムでの温度測定を例示しているがこれに限られないことは勿論である。被測定体が渦電流を発生しうる導電体、半導体である限り本発明の温度測定を適用できることは勿論である。なお、床暖房システムにおける金属箔１３が被測定体であることは言うまでも無いが、金属箔１３のように熱容量の小さい材料を用いることによって、実質的に温水配管１４の温度を測定する温度測定システムとして本発明を把握することができることも言うまでも無い。   In addition, in this example, although the temperature measurement in a floor heating system is illustrated, of course, it is not restricted to this. Of course, the temperature measurement of the present invention can be applied as long as the object to be measured is a conductor or semiconductor capable of generating eddy current. In addition, it cannot be overemphasized that the metal foil 13 in a floor heating system is a to-be-measured object, but the temperature which measures the temperature of the hot water piping 14 substantially by using a material with small heat capacity like the metal foil 13 is used. It goes without saying that the present invention can be understood as a measurement system.

図３は、本実施の形態の温度測定装置の制御方法の一例を説明したフローチャートである。なお、以下に説明する処理は、その手順をコンピュータプログラムによって実現することが可能であり、このプログラムは前記したＲＯＭ３５に記録される。本明細書においてプログラムもＲＯＭ３５その他の記憶装置に記録される限り本発明の装置の一部を構成するものとする。また、以下の説明ではコンピュータプログラムによって下記処理を実行する例を説明するが、シーケンス制御、ハードウェアによる自動制御等他の制御手段によって同様の処理が実現できることは勿論である。   FIG. 3 is a flowchart illustrating an example of a control method for the temperature measuring apparatus according to the present embodiment. The procedure described below can be realized by a computer program, and the program is recorded in the ROM 35 described above. In this specification, as long as the program is recorded in the ROM 35 or other storage device, the program constitutes a part of the device of the present invention. In the following description, an example in which the following processing is executed by a computer program will be described, but it is needless to say that similar processing can be realized by other control means such as sequence control and automatic control by hardware.

測定が開始されると、まず、第２発振回路（コイル１０ｂおよびコンデンサ２１ｂ）の発振周波数ｆ１の測定を行う（ステップ５１）。発振周波数ｆ１の測定は、たとえばパルスカウンタ３２で１秒間にカウントされるパルス数を計数することにより行える。   When the measurement is started, first, the oscillation frequency f1 of the second oscillation circuit (the coil 10b and the capacitor 21b) is measured (step 51). The oscillation frequency f1 can be measured, for example, by counting the number of pulses counted per second by the pulse counter 32.

次に、補正距離Δｄの計算を行う（ステップ５２）。Δｄの計算は前記した数１を用いて行える。   Next, the correction distance Δd is calculated (step 52). The calculation of Δd can be performed using Equation 1 described above.

次に、第１発振回路（コイル１０ａおよびコンデンサ２１ａ）の発振周波数ｆ２の測定を行う（ステップ５３）。発振周波数ｆ２の測定は、たとえばパルスカウンタ３３で１秒間にカウントされるパルス数を計数することにより行える。   Next, the oscillation frequency f2 of the first oscillation circuit (the coil 10a and the capacitor 21a) is measured (step 53). The oscillation frequency f2 can be measured, for example, by counting the number of pulses counted per second by the pulse counter 33.

次に、温度Ｔの計算を行う（ステップ５４）。温度Ｔの計算は、先に計算したΔｄと前記した数９〜数１１を用いて行える。   Next, the temperature T is calculated (step 54). The temperature T can be calculated using the previously calculated Δd and the equations 9 to 11.

最後に、計算した温度Ｔを表示する（ステップ５５）。このような制御方法によって、距離ｄが不確定な場合であっても、距離ｄを補正し、正確な温度測定を行える。   Finally, the calculated temperature T is displayed (step 55). By such a control method, even when the distance d is indefinite, the distance d is corrected and accurate temperature measurement can be performed.

以上、本発明を具体的に説明したが、本発明は前記実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることは言うまでもない。たとえば、前記例では、被測定体までの距離を予め定めたオフセット距離Ｌだけ異ならせた２つのコイルを用いて温度測定を行う例を説明したが、距離を異ならせる代わりに、コイルに加える周波数（発振周波数）を異ならせることによって、同様の温度測定を行うことも可能である。図４（ａ）は、被測定体の温度を２０℃から４０℃に変化させた場合の発振周波数の変化の値を距離を横軸として示したグラフであり、点線は発振周波数をほぼ１１３ｋＨｚに、実線は発振周波数をほぼ２５ｋＨｚにした場合を示したものである。図示するように、発振周波数をほぼ２５ｋＨｚにした場合には、発振周波数の温度依存性はほとんどなく、一方、発振周波数をほぼ１１３ｋＨｚにした場合には、発振周波数の温度依存性は大きく現れる。この結果を利用すれば、たとえば発振周波数の異なる２つの共振回路を前記例と同様に（ただし２つのコイルにオフセット距離は設ける必要はない）用意し、あるいは、第１回目と第２回目の測定ごとに発振周波数を異ならせることにより、前記同様の温度測定を行うことが可能である。   Although the present invention has been specifically described above, it is needless to say that the present invention is not limited to the above-described embodiment and can be variously modified without departing from the gist thereof. For example, in the above-described example, the example in which the temperature measurement is performed using two coils whose distances to the measurement object are different from each other by a predetermined offset distance L is described, but the frequency applied to the coils instead of different distances. It is also possible to perform the same temperature measurement by changing the (oscillation frequency). FIG. 4A is a graph showing the value of the change in oscillation frequency when the temperature of the object to be measured is changed from 20 ° C. to 40 ° C. with the distance as the horizontal axis, and the dotted line shows the oscillation frequency at about 113 kHz. The solid line shows the case where the oscillation frequency is approximately 25 kHz. As shown in the figure, when the oscillation frequency is about 25 kHz, there is almost no temperature dependence of the oscillation frequency, whereas when the oscillation frequency is about 113 kHz, the temperature dependence of the oscillation frequency appears greatly. If this result is used, for example, two resonance circuits having different oscillation frequencies are prepared in the same manner as in the above example (however, it is not necessary to provide an offset distance between the two coils), or the first and second measurements are performed. By varying the oscillation frequency for each, it is possible to perform the same temperature measurement as described above.

あるいは、コイルの巻き数を異ならせることによって、同様の温度測定を行うことも可能である。図４（ｂ）は、被測定体の温度を２０℃から４０℃に変化させた場合の発振周波数の変化の値を距離を横軸として示したグラフであり、点線はコイルの巻き数を２００巻きとし、実線はコイルの巻き数を１００巻きとした場合を示したものである。図示するように、巻き数が１００巻きの場合であって距離が５ｍｍ以上の領域では、発振周波数の温度依存性はほとんどない。一方、巻き数を２００巻きにした場合には、発振周波数の温度依存性は大きく現れる。この結果を利用すれば、たとえば巻き数の異なる２つのコイルを用意して２つの共振回路を構成し、前記例と同様に温度測定を行うことが可能である。   Alternatively, the same temperature measurement can be performed by changing the number of turns of the coil. FIG. 4B is a graph showing the value of the change in the oscillation frequency when the temperature of the measured object is changed from 20 ° C. to 40 ° C. with the distance as the horizontal axis, and the dotted line indicates the number of turns of the coil of 200. The solid line shows the case where the number of turns of the coil is 100. As shown in the figure, there is almost no temperature dependence of the oscillation frequency when the number of turns is 100 and the distance is 5 mm or more. On the other hand, when the number of turns is 200, the temperature dependence of the oscillation frequency appears greatly. If this result is utilized, it is possible to prepare two coils with different numbers of windings to form two resonance circuits and perform temperature measurement in the same manner as in the above example.

また、前記例では、２つの発振回路を用意する例を説明したが、１つの共振回路で温度測定を行うことも可能である。図５は、本実施の形態の温度測定装置の他の例を示したブロック図である。この変更例では、図２同様のコイル１０、オシレータ２０、パルスカウンタ３２を有するが、各々１組であればよく、その代わりにエレベータ６１と、制御部３０にエレベータドライバ６２を有する。エレベータ６１は、エレベータドライバ６２によって制御され、コイル１０をオフセット距離Ｌだけ上下に移動させる機能を持つ。このような構成を持つ変更例の温度測定装置では、図６に示すような制御が行える。すなわち、まず、エレベータを上にセットし（ステップ７１）、コイル１０が温度非依存領域に位置するようにする。次に１回目の周波数測定を行い（ステップ７２）、Δｄの計算を行う（ステップ７３）。次に、エレベータを下にセットし（ステップ７４）、コイル１０が温度依存領域に位置するようにする。次に、２回目の周波数測定を行い（ステップ７５）、温度Ｔの計算（ステップ７６）および温度Ｔの表示（ステップ７７）を行う。   Moreover, although the example which prepares two oscillation circuits was demonstrated in the said example, it is also possible to measure temperature with one resonance circuit. FIG. 5 is a block diagram showing another example of the temperature measuring apparatus of the present embodiment. In this modified example, the coil 10, the oscillator 20, and the pulse counter 32, which are the same as those in FIG. 2, are provided, but only one set each is required. Instead, the elevator 61 and the control unit 30 include the elevator driver 62. The elevator 61 is controlled by the elevator driver 62 and has a function of moving the coil 10 up and down by an offset distance L. In the temperature measuring device of the modified example having such a configuration, the control as shown in FIG. 6 can be performed. That is, first, the elevator is set up (step 71) so that the coil 10 is positioned in the temperature-independent region. Next, the first frequency measurement is performed (step 72), and Δd is calculated (step 73). Next, the elevator is set down (step 74) so that the coil 10 is positioned in the temperature dependent region. Next, the second frequency measurement is performed (step 75), the temperature T is calculated (step 76), and the temperature T is displayed (step 77).

また、１つの共振回路で測定を行う場合、周波数を変化させることによっても同様に正確な温度測定を行える。図７は、本実施の形態の温度測定装置のさらに他の例を示したブロック図である。この変更例では、図５同様のコイル１０、パルスカウンタ３２を有するが、オシレータ８０に付加的なコンデンサ８１およびコンデンサ８１に接続されるスイッチ８２を、制御部３０にスイッチ８２を制御するスイッチドライバ８３を有する。スイッチ８２がＯＮの場合共振回路にコンデンサ８１が接続され、ＯＦＦの場合コンデンサ８１は共振回路から分離される。この結果、スイッチ８２のＯＮあるいはＯＦＦによって共振回路の発振周波数が大きく変化する。このような構成を持つ変更例の温度測定装置では、図８に示すような制御が行える。すなわち、まず、スイッチ８２をＯＮにセットし（ステップ９１）、発振周波数を低くするようにセットする。次に１回目の周波数測定を行い（ステップ９２）、Δｄの計算を行う（ステップ９３）。次に、スイッチ８２をＯＦＦにセットし（ステップ９４）、発振周波数を高くセットする。次に、２回目の周波数測定を行い（ステップ９５）、温度Ｔの計算（ステップ９６）および温度Ｔの表示（ステップ９７）を行う。   When measurement is performed with one resonance circuit, accurate temperature measurement can be performed similarly by changing the frequency. FIG. 7 is a block diagram showing still another example of the temperature measuring apparatus according to the present embodiment. In this modified example, the coil 10 and the pulse counter 32 are the same as those in FIG. 5, but an additional capacitor 81 and a switch 82 connected to the capacitor 81 are provided in the oscillator 80, and a switch driver 83 that controls the switch 82 in the control unit 30. Have When the switch 82 is ON, the capacitor 81 is connected to the resonance circuit. When the switch 82 is OFF, the capacitor 81 is separated from the resonance circuit. As a result, the oscillation frequency of the resonance circuit changes greatly depending on whether the switch 82 is turned on or off. In the temperature measuring device of the modified example having such a configuration, control as shown in FIG. 8 can be performed. That is, first, the switch 82 is set to ON (step 91) and set to lower the oscillation frequency. Next, the first frequency measurement is performed (step 92), and Δd is calculated (step 93). Next, the switch 82 is set to OFF (step 94), and the oscillation frequency is set high. Next, the second frequency measurement is performed (step 95), the temperature T is calculated (step 96), and the temperature T is displayed (step 97).

また、前記例では、コイルのインダクタンスの変化をオシレータの周波数変化によって検知したが、コイルのインダクタンスを直接計測することによって検知することも可能である。   In the above example, the change in the inductance of the coil is detected by the change in the frequency of the oscillator. However, it can also be detected by directly measuring the inductance of the coil.

（ａ）は、本発明者らが行った実験の系を示す概略図であり、（ｂ）は、実験の結果を示すグラフである。(A) is the schematic which shows the system of the experiment which the present inventors conducted, (b) is a graph which shows the result of an experiment. 本発明の一実施の形態である温度測定装置の構成の一例を示したブロック図である。It is the block diagram which showed an example of the structure of the temperature measurement apparatus which is one embodiment of this invention. 本発明の一実施の形態である温度測定装置の制御方法の一例を示したフローチャートである。It is the flowchart which showed an example of the control method of the temperature measuring device which is one embodiment of this invention. 被測定体の温度を２０℃から４０℃に変化させた場合の発振周波数の変化の値を距離を横軸として示したグラフであり、（ａ）は発振周波数を異ならせた場合の、（ｂ）はコイルの巻き数を異ならせた場合のグラフである。It is the graph which showed the value of the change of the oscillation frequency when changing the temperature of a to-be-measured object from 20 degreeC to 40 degreeC by making distance into a horizontal axis, (a) is (b) when changing an oscillation frequency. ) Is a graph when the number of turns of the coil is varied. 本発明の一実施の形態である温度測定装置の他の例を示したブロック図である。It is the block diagram which showed the other example of the temperature measuring device which is one embodiment of this invention. 本発明の一実施の形態である温度測定装置の制御方法の他の例を示したフローチャートである。It is the flowchart which showed the other example of the control method of the temperature measurement apparatus which is one embodiment of this invention. 本発明の一実施の形態である温度測定装置のさらに他の例を示したブロック図である。It is the block diagram which showed the further another example of the temperature measurement apparatus which is one embodiment of this invention. 本発明の一実施の形態である温度測定装置の制御方法のさらに他の例を示したフローチャートである。It is the flowchart which showed the further another example of the control method of the temperature measuring device which is one embodiment of this invention.

符号の説明Explanation of symbols

１…コイル、２…オシレータ、３…配管、４…被測定体、１０…コイル、１０ａ…コイル、１０ｂ…コイル、１１…コイル支持部材、１２…床板、１３…金属箔、１４…温水配管、２０…オシレータ、２０ａ…オシレータ、２０ｂ…オシレータ、２１ａ…コンデンサ、２１ｂ…コンデンサ、２２…ＮＯＴ回路、２２ａ…ＮＯＴ回路、２２ｂ…ＮＯＴ回路、２３…ＮＯＴ回路、２３ａ…ＮＯＴ回路、２３ｂ…ＮＯＴ回路、３０…制御部、３１…ＣＰＵ、３２…パルスカウンタ、３３…パルスカウンタ、３４…ＲＡＭ、３５…ＲＯＭ、３６…表示制御回路、４０…温度表示部、６１…エレベータ、６２…エレベータドライバ、８０…オシレータ、８１…コンデンサ、８２…スイッチ、８３…スイッチドライバ。   DESCRIPTION OF SYMBOLS 1 ... Coil, 2 ... Oscillator, 3 ... Piping, 4 ... Measured object, 10 ... Coil, 10a ... Coil, 10b ... Coil, 11 ... Coil supporting member, 12 ... Floor board, 13 ... Metal foil, 14 ... Hot water piping, DESCRIPTION OF SYMBOLS 20 ... Oscillator, 20a ... Oscillator, 20b ... Oscillator, 21a ... Capacitor, 21b ... Capacitor, 22 ... NOT circuit, 22a ... NOT circuit, 22b ... NOT circuit, 23 ... NOT circuit, 23a ... NOT circuit, 23b ... NOT circuit, DESCRIPTION OF SYMBOLS 30 ... Control part, 31 ... CPU, 32 ... Pulse counter, 33 ... Pulse counter, 34 ... RAM, 35 ... ROM, 36 ... Display control circuit, 40 ... Temperature display part, 61 ... Elevator, 62 ... Elevator driver, 80 ... Oscillator, 81 ... capacitor, 82 ... switch, 83 ... switch driver.

Claims (13)

導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置であって、
第１誘導素子を含み、その発振周波数が前記被測定体の温度および前記被測定体から前記第１誘導素子までの距離に依存して変化する第１発振回路と、
第２誘導素子を含み、その発振周波数が前記被測定体から前記第２誘導素子までの距離に依存して変化し、かつ、その発振周波数への前記被測定体の温度依存性が前記第１発振回路における発振周波数への前記被測定体の温度依存性よりも小さい第２発振回路と、
前記第１発振回路および第２発振回路の各発振周波数を測定する周波数測定手段と、
補正用データを記憶する記憶手段と、
前記第２発振回路の発振周波数と前記補正用データとから前記第１誘導素子と前記被測定体との間の推定距離を算出し、前記第１発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出する演算処理手段と、
を有する温度測定装置。 A temperature measuring device that measures the temperature of a conductive or semiconductive object to be measured in a non-contact manner,
A first oscillation circuit including a first inductive element, the oscillation frequency of which varies depending on the temperature of the measured object and the distance from the measured object to the first inductive element;
A second inductive element, the oscillation frequency of which varies depending on the distance from the measured object to the second inductive element, and the temperature dependence of the measured object on the oscillation frequency is the first inductive element; A second oscillation circuit smaller than the temperature dependence of the device under test to the oscillation frequency in the oscillation circuit;
Frequency measuring means for measuring each oscillation frequency of the first oscillation circuit and the second oscillation circuit;
Storage means for storing correction data;
An estimated distance between the first inductive element and the measured object is calculated from the oscillation frequency of the second oscillation circuit and the correction data, and the oscillation frequency of the first oscillation circuit and the estimated distance are used to calculate the estimated distance. Arithmetic processing means for calculating the temperature of the measurement object;
A temperature measuring device. 前記第２誘導素子と前記被測定体との距離を、前記第１誘導素子と前記被測定体との距離に比較して長くすることにより、前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする請求項１記載の温度測定装置。 The measured object to the oscillation frequency in the second oscillating circuit is obtained by making the distance between the second inductive element and the measured object longer than the distance between the first inductive element and the measured object. The temperature measuring device according to claim 1, wherein the temperature dependency of the body is made smaller than the temperature dependency of the measured object to the oscillation frequency in the first oscillation circuit. 前記第２発振回路の発振周波数を前記第１発振回路の発振周波数より低くすることにより、前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする請求項１記載の温度測定装置。 By making the oscillation frequency of the second oscillation circuit lower than the oscillation frequency of the first oscillation circuit, the temperature dependence of the device under test to the oscillation frequency in the second oscillation circuit is oscillated in the first oscillation circuit. The temperature measuring device according to claim 1, wherein the temperature measuring device is smaller than the temperature dependence of the object to be measured on the frequency. 前記第１誘導素子および第２誘導素子をコイルで構成し、前記第２誘導素子の巻き数を前記第１誘導素子の巻き数より小さくすることにより、前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする請求項１記載の温度測定装置。 The first inductive element and the second inductive element are configured by coils, and the number of turns of the second inductive element is made smaller than the number of turns of the first inductive element, whereby the oscillation frequency in the second oscillation circuit is increased. The temperature measuring device according to claim 1, wherein the temperature dependency of the measurement object is made smaller than the temperature dependency of the measurement object to the oscillation frequency in the first oscillation circuit. 導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置であって、
誘導素子を含む発振回路と、
前記発振回路の発振周波数を測定する周波数測定手段と、
前記被測定体と前記誘導素子との間の距離を第１距離もしくは前記第１距離より長い第２距離に切替える手段と、
補正用データを記憶する記憶手段と、
前記被測定体と前記誘導素子との間の距離が前記第２距離にあるときの前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出し、前記被測定体と前記誘導素子との間の距離が前記第１距離にあるときの前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出する演算処理手段と、
を有する温度測定装置。 A temperature measuring device that measures the temperature of a conductive or semiconductive object to be measured in a non-contact manner,
An oscillation circuit including an inductive element;
Frequency measuring means for measuring the oscillation frequency of the oscillation circuit;
Means for switching a distance between the measured object and the inductive element to a first distance or a second distance longer than the first distance;
Storage means for storing correction data;
An estimated distance between the inductive element and the measured object is determined from the oscillation frequency of the oscillation circuit and the correction data when the distance between the measured object and the inductive element is the second distance. An arithmetic processing means for calculating and calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance when the distance between the measured object and the inductive element is the first distance; ,
A temperature measuring device. 導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置であって、
誘導素子を含む発振回路と、
前記発振回路の発振周波数を測定する周波数測定手段と、
前記発振回路の発振周波数を第１周波数域もしくは前記第１周波数域より低い第２周波数域に切替える手段と、
補正用データを記憶する記憶手段と、
前記発振回路の発振周波数が前記第２周波数域にあるときの前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出し、前記発振回路の発振周波数が前記第１周波数域にあるときの前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出する演算処理手段と、
を有する温度測定装置。 A temperature measuring device that measures the temperature of a conductive or semiconductive object to be measured in a non-contact manner,
An oscillation circuit including an inductive element;
Frequency measuring means for measuring the oscillation frequency of the oscillation circuit;
Means for switching the oscillation frequency of the oscillation circuit to a first frequency range or a second frequency range lower than the first frequency range;
Storage means for storing correction data;
An estimated distance between the inductive element and the measured object is calculated from the oscillation frequency of the oscillation circuit and the correction data when the oscillation frequency of the oscillation circuit is in the second frequency range, and the oscillation circuit Arithmetic processing means for calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance when the oscillation frequency is in the first frequency range;
A temperature measuring device. 前記被測定体を金属箔で構成し、かつ、渦電流を生成しない気体、液体または固体の対象物を前記金属箔に接触させることによって、前記対象物の温度を測定できる、前記金属箔および請求項１〜６に記載の温度測定装置からなる温度測定システム。 The metal foil, wherein the object to be measured is made of a metal foil, and the temperature of the object can be measured by bringing a gas, liquid, or solid object that does not generate eddy current into contact with the metal foil. Item 7. A temperature measurement system including the temperature measurement device according to any one of items 1 to 6. 第１誘導素子を含み、その発振周波数が前記被測定体の温度および前記被測定体から前記第１誘導素子までの距離に依存して変化する第１発振回路と、
第２誘導素子を含み、その発振周波数が前記被測定体から前記第２誘導素子までの距離に依存して変化し、かつ、その発振周波数への前記被測定体の温度依存性が前記第１発振回路における発振周波数への前記被測定体の温度依存性よりも小さい第２発振回路と、
前記第１発振回路および第２発振回路の各発振周波数を測定する周波数測定手段と、
補正用データを記憶する記憶手段と、
を有する導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置の制御方法であって、
前記第２発振回路の発振周波数と前記補正用データとから前記第２誘導素子と前記被測定体との間の距離を算出するステップと、
前記第２誘導素子と前記被測定体との間の距離から前記第１誘導素子と前記被測定体との間の推定距離を算出するステップと、
前記第１発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出するステップと、
を有する温度測定装置の制御方法。 A first oscillation circuit including a first inductive element, the oscillation frequency of which varies depending on the temperature of the measured object and the distance from the measured object to the first inductive element;
A second inductive element, the oscillation frequency of which varies depending on the distance from the measured object to the second inductive element, and the temperature dependence of the measured object on the oscillation frequency is the first inductive element; A second oscillation circuit smaller than the temperature dependence of the device under test to the oscillation frequency in the oscillation circuit;
Frequency measuring means for measuring each oscillation frequency of the first oscillation circuit and the second oscillation circuit;
Storage means for storing correction data;
A method for controlling a temperature measuring device that measures the temperature of a conductive or semiconductive object to be measured without contact,
Calculating a distance between the second inductive element and the measured object from the oscillation frequency of the second oscillation circuit and the correction data;
Calculating an estimated distance between the first inductive element and the measured object from a distance between the second inductive element and the measured object;
Calculating the temperature of the measurement object from the oscillation frequency of the first oscillation circuit and the estimated distance;
A method for controlling a temperature measuring device having 前記第２誘導素子と前記被測定体との距離を、前記第１誘導素子と前記被測定体との距離に比較して大きくすることにより、前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする請求項８記載の温度測定装置の制御方法。 By increasing the distance between the second inductive element and the object to be measured compared to the distance between the first inductive element and the object to be measured, the object to be measured to the oscillation frequency in the second oscillation circuit 9. The method of controlling a temperature measuring device according to claim 8, wherein the temperature dependency of the body is made smaller than the temperature dependency of the measured object to the oscillation frequency in the first oscillation circuit. 前記第２発振回路の発振周波数を前記第１発振回路の発振周波数より低くすることにより、前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする請求項８記載の温度測定装置の制御方法。 By making the oscillation frequency of the second oscillation circuit lower than the oscillation frequency of the first oscillation circuit, the temperature dependence of the device under test to the oscillation frequency in the second oscillation circuit is oscillated in the first oscillation circuit. The method for controlling a temperature measuring device according to claim 8, wherein the temperature measuring device is made smaller than the temperature dependence of the object to be measured. 前記第１誘導素子および第２誘導素子をコイルで構成し、前記第２誘導素子の巻き数を前記第１誘導素子の巻き数より小さくすることにより、前記第２発振回路における発振周波数への前記被測定体の温度依存性を前記前記第１発振回路における発振周波数への前記被測定体の温度依存性より小さくする請求項８記載の温度測定装置の制御方法。 The first inductive element and the second inductive element are configured by coils, and the number of turns of the second inductive element is made smaller than the number of turns of the first inductive element, whereby the oscillation frequency in the second oscillation circuit is increased. 9. The method of controlling a temperature measuring device according to claim 8, wherein the temperature dependency of the device under test is made smaller than the temperature dependency of the device under test to the oscillation frequency in the first oscillation circuit. 誘導素子を含む発振回路と、
前記発振回路の発振周波数を測定する周波数測定手段と、
前記被測定体と前記誘導素子との間の距離を第１距離もしくは前記第１距離より長い第２距離に切替える手段と、
補正用データを記憶する記憶手段と、
を有する導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置の制御方法であって、
前記被測定体と前記誘導素子との間の距離を前記第２距離にし、前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出するステップと、
前記被測定体と前記誘導素子との間の距離を、前記第２距離から前記第１距離に切替えるステップと、
前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出するステップと、
を有する温度測定装置の制御方法。 An oscillation circuit including an inductive element;
Frequency measuring means for measuring the oscillation frequency of the oscillation circuit;
Means for switching a distance between the measured object and the inductive element to a first distance or a second distance longer than the first distance;
Storage means for storing correction data;
A method for controlling a temperature measuring device that measures the temperature of a conductive or semiconductive object to be measured without contact,
The distance between the measured object and the inductive element is set to the second distance, and an estimated distance between the inductive element and the measured object is calculated from the oscillation frequency of the oscillation circuit and the correction data. Steps,
Switching the distance between the measured object and the inductive element from the second distance to the first distance;
Calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance;
A method for controlling a temperature measuring device having 誘導素子を含む発振回路と、
前記発振回路の発振周波数を測定する周波数測定手段と、
前記発振回路の発振周波数を第１周波数域もしくは前記第１周波数域より低い第２周波数域に切替える手段と、
補正用データを記憶する記憶手段と、
を有する導電性または半導電性の被測定体の温度を非接触で測定する温度測定装置の制御方法であって、
前記発振回路の発振周波数を前記第２周波数域にし、前記発振回路の発振周波数と前記補正用データとから前記誘導素子と前記被測定体との間の推定距離を算出するステップと、
前記発振回路の発振周波数を、前記第２周波数域から前記第１周波数域に切替えるステップと、
前記発振回路の発振周波数と前記推定距離とから前記被測定体の温度を算出するステップと、
を有する温度測定装置の制御方法。 An oscillation circuit including an inductive element;
Frequency measuring means for measuring the oscillation frequency of the oscillation circuit;
Means for switching the oscillation frequency of the oscillation circuit to a first frequency range or a second frequency range lower than the first frequency range;
Storage means for storing correction data;
A method for controlling a temperature measuring device that measures the temperature of a conductive or semiconductive object to be measured without contact,
Setting the oscillation frequency of the oscillation circuit to the second frequency range, and calculating an estimated distance between the inductive element and the measured object from the oscillation frequency of the oscillation circuit and the correction data;
Switching the oscillation frequency of the oscillation circuit from the second frequency range to the first frequency range;
Calculating the temperature of the measured object from the oscillation frequency of the oscillation circuit and the estimated distance;
A method for controlling a temperature measuring device having
JP2004017059A 2004-01-26 2004-01-26 Temperature-measuring device, its control method, and temperature-measuring system Pending JP2005207992A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013141153A1 (en) * 2012-03-23 2013-09-26 株式会社村田製作所 Wireless thermometer
JP2015129521A (en) * 2007-12-27 2015-07-16 エドワーズ株式会社 vacuum pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015129521A (en) * 2007-12-27 2015-07-16 エドワーズ株式会社 vacuum pump
WO2013141153A1 (en) * 2012-03-23 2013-09-26 株式会社村田製作所 Wireless thermometer
JP5618026B2 (en) * 2012-03-23 2014-11-05 株式会社村田製作所 Wireless thermometer
JPWO2013141153A1 (en) * 2012-03-23 2015-08-03 株式会社村田製作所 Wireless thermometer
US9909928B2 (en) 2012-03-23 2018-03-06 Murata Manufacturing Co., Ltd. Wireless thermometer on a film-like substrate using quartz vibrator

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