JP2005156428A - Method and apparatus for deciding quality of capacitor - Google Patents
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Abstract
Description
本発明はコンデンサの良否判定方法および良否判定装置、特にコンデンサの良否を短時間で判定する方法および装置に関する。 The present invention relates to a capacitor quality determination method and quality determination apparatus, and more particularly to a method and apparatus for determining a capacitor quality in a short time.
一般に、コンデンサの良否を判定するため、測定用の直流電圧をコンデンサに印加し、十分に充電された後のコンデンサの漏れ電流(充電電流)を測定することにより、コンデンサの絶縁抵抗(IR)を測定する方法が知られている。当然ながら、良品は漏れ電流が少ない(絶縁抵抗が大きい)。 In general, in order to determine the quality of a capacitor, the insulation resistance (IR) of the capacitor is determined by applying a DC voltage for measurement to the capacitor and measuring the leakage current (charging current) of the capacitor after it is fully charged. Methods for measuring are known. Of course, good products have low leakage current (high insulation resistance).
従来、この種の充電電流測定方法としては、JIS C 5101で規定された測定方式が知られている。この方式は、コンデンサに十分に充電された状態の電流値を測定する必要があるため、長い測定時間が必要である。例えば、電子機器に広く使用されている積層セラミックコンデンサの充電時間は、60±5秒を要する。特に、市場の拡大傾向にある大容量コンデンサでは、この充電時間が一層長くなる傾向にある。しかし、電子機器のコストダウン、信頼性向上の要求に伴い、コンデンサなどの電子部品もその生産能力向上と品質向上とが求められている。そのため、従来の測定方法では、測定時間の短縮が大きな課題となっていた。 Conventionally, a measurement method defined in JIS C 5101 is known as this type of charging current measurement method. This method requires a long measurement time because it is necessary to measure the current value when the capacitor is sufficiently charged. For example, the charging time of a multilayer ceramic capacitor widely used in electronic equipment requires 60 ± 5 seconds. In particular, the charging time tends to be longer in a large-capacitance capacitor that is on the market expansion trend. However, along with demands for cost reduction and reliability improvement of electronic devices, electronic parts such as capacitors are also required to improve production capacity and quality. Therefore, in the conventional measuring method, shortening the measuring time has been a big problem.
そこで、コンデンサに電圧印加を開始した直後の短い時間内において、コンデンサの誘電分極成分の充電領域の電流値を測定し、その電流値を用いて充電終了時の電流値を予測し、その予測電流値を用いてコンデンサの良否を判定する方法が提案されている(特許文献1)。
この方法を用いれば、十分な充電状態に達する前の状態で最終的な充電結果を算出することができるので、前記従来の測定方法で必要な充電時間よりも短い時間で良否判定を行うことができるという利点がある。しかし、この方法は、高価な測定装置を必要とするとともに、予測計算式の多数のパラメータを求める必要があるため、必ずしも簡便な良否判定方法とは言えない。
Therefore, within a short period of time immediately after the start of voltage application to the capacitor, the current value in the charging region of the dielectric polarization component of the capacitor is measured, and the current value at the end of charging is predicted using the current value. A method of determining the quality of a capacitor using a value has been proposed (Patent Document 1).
If this method is used, the final charging result can be calculated in a state before reaching a sufficient charging state, so that the pass / fail judgment can be performed in a shorter time than the charging time required in the conventional measurement method. There is an advantage that you can. However, since this method requires an expensive measuring device and needs to obtain a large number of parameters of the prediction calculation formula, it is not necessarily a simple pass / fail judgment method.
特許文献2には、被測定コンデンサにDC電圧およびAC電圧を重畳印加してリップル電流を流し、その時のコンデンサの電気特性を測定することで、潜在的な不良品まで選別できる良否判別方法が開示されている。
しかし、この良否判別方法は、コンデンサの電気的特性を含むパラメータをできるだけ多く測定し、利用することにより、良否判定の精度と処理効率の向上を図るものである。そのため、コンデンサの絶縁抵抗(IR)そのものを測定するのであれば、従来と同様の長時間を必要とする。つまり、絶縁抵抗を基準にしてコンデンサの良否を短時間で判別するという目的を達成するものではない。
However, this pass / fail discrimination method measures and uses as many parameters including the electrical characteristics of the capacitor as possible to improve pass / fail judgment accuracy and processing efficiency. Therefore, if the insulation resistance (IR) of the capacitor itself is measured, it takes a long time as in the conventional case. That is, it does not achieve the purpose of determining the quality of a capacitor in a short time based on the insulation resistance.
そこで、本発明の目的は、短時間でかつ正確にコンデンサの良否を判定できるコンデンサの良否判定方法および良否判定装置を提供することにある。 SUMMARY OF THE INVENTION An object of the present invention is to provide a capacitor quality determination method and quality determination device that can accurately determine the quality of a capacitor in a short time.
前記目的を達成するため、請求項1に係る発明は、被測定コンデンサと同種のコンデンサに対して、DC電圧およびAC電圧を重畳印加したときのAC信号によって測定される電気特性とIR値との相関に基づき、良否選別基準となるIR値に対応した電気特性を閾値として設定するステップと、被測定コンデンサに対してDC電圧およびAC電圧を重畳印加するステップと、前記DC電圧およびAC電圧を重畳印加した状態で、AC信号によって被測定コンデンサの電気特性を測定するステップと、前記測定された電気特性を前記閾値と比較することによって、被測定コンデンサの良否を判定するステップと、を備えることを特徴とするコンデンサの良否判定方法を提供する。
In order to achieve the above-mentioned object, the invention according to
請求項4に係る発明は、被測定コンデンサにDC電圧を印加するためのDC電源と、被測定コンデンサに前記DC電圧と重畳してAC電圧を印加するためのAC電源と、AC信号によって被測定コンデンサの電気特性を測定する特性測定手段と、被測定コンデンサと同種のコンデンサに対して、DC電圧およびAC電圧を重畳印加したときのAC信号によって測定される電気特性とIR値との相関に基づき、良否選別基準となるIR値に対応した電気特性を閾値として記憶する記憶手段と、前記閾値と前記特性測定手段により測定された被測定コンデンサの電気特性の実測値とを比較し、被測定コンデンサの良否を判定する良否判定手段と、を備えることを特徴とするコンデンサの良否判定装置を提供する。 According to a fourth aspect of the present invention, there is provided a DC power source for applying a DC voltage to a capacitor to be measured, an AC power source for applying an AC voltage superimposed on the DC voltage to the capacitor to be measured, and a device to be measured by an AC signal. Based on the characteristic measurement means for measuring the electrical characteristics of the capacitor and the correlation between the electrical characteristics measured by the AC signal and the IR value when a DC voltage and an AC voltage are superimposed on the capacitor of the same type as the capacitor to be measured Storage means for storing an electrical characteristic corresponding to an IR value as a pass / fail selection criterion as a threshold value, and comparing the threshold value with an actual measurement value of the measured capacitor electrical characteristic measured by the characteristic measurement means; And a pass / fail judgment device for judging pass / fail of the capacitor.
コンデンサの特性測定の中には、AC信号を印加して測定するインピーダンス測定がある。本発明者は、このインピーダンス測定時にDC電圧をバイアス印加すると、AC信号によって測定される電気特性、即ち直列抵抗、静電容量、誘電損失などの各値と、十分に充電された後の絶縁抵抗(IR)との間に相関関係があることを見いだした。例えばIR値が小さくなると、直列抵抗の値は大きくなる。
そこで、被測定コンデンサと同種のコンデンサに対して、DC電圧およびAC電圧を重畳印加したときのAC信号によって測定される電気特性とIR値との相関に基づき、良否選別基準となるIR値に対応した電気特性の値を求めておき、この値を閾値として設定する。そして、被測定コンデンサにDC電圧およびAC電圧を重畳印加したときのAC信号によって測定される前記電気特性の実測値と閾値とを比較することによって、被測定コンデンサのIR値が良否選別基準となるIR値に比べて大きいかどうかを推定することができる。
IR値の測定では、コンデンサ内部の誘電分極成分の時定数が大きいため、数秒〜数十秒という充電時間が必要であるが、直列抵抗Rs’の測定では、信号周波数にもよるが、数十ミリ秒〜数百ミリ秒程度の時間で測定を行うことができる。そのため、コンデンサの良否判定に要する時間を従来に比べて大幅に短縮できる。
Among capacitor characteristic measurements, there is impedance measurement in which an AC signal is applied for measurement. When the present inventors apply a DC voltage bias at the time of impedance measurement, the electrical characteristics measured by the AC signal, that is, each value such as series resistance, capacitance, dielectric loss, and insulation resistance after being fully charged. We found that there is a correlation with (IR). For example, as the IR value decreases, the series resistance value increases.
Therefore, based on the correlation between the electrical characteristics measured by the AC signal when the DC voltage and AC voltage are superimposed on the capacitor of the same type as the capacitor to be measured, and the IR value, it corresponds to the IR value that is a pass / fail selection criterion The value of the electrical characteristic obtained is obtained and this value is set as a threshold value. Then, by comparing the measured value of the electrical characteristic measured by the AC signal when the DC voltage and the AC voltage are superimposed and applied to the capacitor to be measured with a threshold value, the IR value of the capacitor to be measured becomes a pass / fail selection criterion. It can be estimated whether it is larger than the IR value.
In the measurement of the IR value, since the time constant of the dielectric polarization component inside the capacitor is large, a charging time of several seconds to several tens of seconds is necessary. However, in the measurement of the series resistance Rs ′, depending on the signal frequency, several tens of seconds are required. Measurement can be performed in a time of about milliseconds to several hundred milliseconds. Therefore, the time required for determining the quality of the capacitor can be greatly shortened compared to the conventional case.
閾値の設定方法としては、種々の方法が考えられる。例えば、異なるIR値を持つ複数のコンデンサを準備し、これらコンデンサに対してDC電圧およびAC電圧を重畳印加したときのAC信号による電気特性を実測し、その実測値を基準にして閾値を設定してもよいし、良否選別基準となるIR値を予め決定し、このIR値から相関する電気特性値を計算で求め、この計算値に対して所定のばらつきを危険率として考慮することで、閾値を設定してもよい。 Various methods are conceivable as the threshold setting method. For example, prepare multiple capacitors with different IR values, measure the electrical characteristics of the AC signal when DC voltage and AC voltage are superimposed on these capacitors, and set the threshold based on the measured values. Alternatively, an IR value serving as a pass / fail selection criterion may be determined in advance, a correlating electrical characteristic value may be calculated from the IR value, and a predetermined variation with respect to the calculated value may be considered as a risk factor. May be set.
次に、本発明の測定原理を式を用いて説明する。
図1の(a)はコンデンサの等価回路モデルであり、静電容量Csと直列抵抗Rsとの直列回路に、絶縁抵抗IRを並列接続したものである。
一方、図1の(b)はインピーダンス測定器内で電気特性の測定および出力に当たって仮定されたコンデンサの回路モデルであり、容量Cs’と直列抵抗Rs’との直列回路で構成される。ここで、コンデンサのIR値は十分大きいものとされ、等価回路の仮定に当たっては無視される。
しかしながら、実際には無視できないIR値を有し、図1(a)に近いコンデンサの電気特性を、図1(b)で仮定するインピーダンス測定器で測定すると、直列抵抗Rs’、容量Cs’、誘電損失DF’は次式で表すことができる。
Rs/IR≪1であるから、(1)式は次のように変形できる。
DCバイアス電圧を高くする方が、容量Csを低くできるので望ましいが、DC電圧を高くし過ぎると、コンデンサ自体を破壊する恐れが生じる。したがって、請求項3のように、バイアス印加されるDC電圧と積層セラミックコンデンサの誘電体厚みとの比を電界強度E(V/μm)とすると、Eが10≦E≦80の範囲内にあるようにDCバイアス電圧を設定することが好ましい。その際、DCバイアス電圧は誘電体厚みに応じて適宜設定される。
(5)式から明らかなように、AC信号の周波数f(ω)を小さくすれば、それだけ(5)式の第1項が相対的に大きくなるので、IR値の良否をRs’値に反映させることができる。実験によると、周波数fが10kHz以上では、Rs’値とIR値との相関関係が悪化するのに対し、1kHz以下であれば、良好な相関関係が得られた。したがって、AC信号の周波数fを1kHz以下にすれば、IR値の良否をRs’値で判定できる。
Next, the measurement principle of the present invention will be described using equations.
FIG. 1A shows an equivalent circuit model of a capacitor, in which an insulation resistance IR is connected in parallel to a series circuit of a capacitance Cs and a series resistance Rs.
On the other hand, FIG. 1B shows a circuit model of a capacitor assumed for measurement and output of electrical characteristics in the impedance measuring instrument, and is composed of a series circuit of a capacitance Cs ′ and a series resistance Rs ′. Here, the IR value of the capacitor is assumed to be sufficiently large and is ignored when assuming the equivalent circuit.
However, when the electrical characteristics of a capacitor having an IR value that cannot be ignored in practice and that is close to that shown in FIG. The dielectric loss DF ′ can be expressed by the following equation.
Since Rs / IR << 1, equation (1) can be modified as follows.
Although it is desirable to increase the DC bias voltage because the capacitance Cs can be reduced, if the DC voltage is too high, the capacitor itself may be destroyed. Therefore, when the ratio of the DC voltage to which the bias is applied and the dielectric thickness of the multilayer ceramic capacitor is the electric field strength E (V / μm) as in claim 3, E is in the range of 10 ≦ E ≦ 80. Thus, it is preferable to set the DC bias voltage. At that time, the DC bias voltage is appropriately set according to the dielectric thickness.
As apparent from the equation (5), if the frequency f (ω) of the AC signal is decreased, the first term of the equation (5) is relatively increased, so that the quality of the IR value is reflected in the Rs ′ value. Can be made. According to experiments, when the frequency f is 10 kHz or more, the correlation between the Rs ′ value and the IR value is deteriorated, whereas when the frequency f is 1 kHz or less, a good correlation is obtained. Therefore, if the frequency f of the AC signal is 1 kHz or less, the quality of the IR value can be determined by the Rs ′ value.
請求項2のように、DC電圧およびAC電圧を重畳印加した状態で、AC信号によって測定されるコンデンサの電気特性としては、直列抵抗Rs’のほかに、誘電損失DF’や容量Cs’でもよい。
DF’は前記(1)〜(3)式により、次式で表すことができる。
DF’=ωCs’Rs’ …(6)
この場合も、Rs’はコンデンサの良否によって大きく変化するので、DF’によってコンデンサの良否を判定することが可能である。
なお、容量Cs’の場合は、IR値との相関関係があまり高くないので、IRの良否が幾分正確に反映し難いという懸念を有するものの、有効である。
As in the second aspect, in addition to the series resistance Rs ′, the dielectric loss DF ′ and the capacitance Cs ′ may be used as the electrical characteristics of the capacitor measured by the AC signal in a state where the DC voltage and the AC voltage are superimposed and applied. .
DF ′ can be expressed by the following equation according to the equations (1) to (3).
DF ′ = ωCs′Rs ′ (6)
Also in this case, since Rs ′ varies greatly depending on the quality of the capacitor, it is possible to determine the quality of the capacitor based on DF ′.
In the case of the capacitance Cs ′, since the correlation with the IR value is not so high, there is a concern that it is difficult to accurately reflect the quality of the IR, but it is effective.
請求項1に係る発明によれば、DC電圧とAC電圧とを重畳印加した状態で、AC信号により測定される電気特性によってコンデンサの良否を判定するようにしたので、従来のIR測定では数秒〜数十秒という長時間を必要としていたのに対し、数十ミリ秒〜数百ミリ秒程度の短時間で測定を行うことができ、コンデンサの良否判定の大幅な時間短縮を実現できる。
また、DC電圧とAC電圧を重畳印加し、AC信号による電気特性を測定するだけであるから、既存のインピーダンス測定用機器を使用すればよく、コスト上昇を抑制できる。
According to the first aspect of the present invention, since the quality of the capacitor is determined based on the electrical characteristics measured by the AC signal in a state where the DC voltage and the AC voltage are applied in a superimposed manner, the conventional IR measurement takes several seconds to While a long time of several tens of seconds was required, measurement can be performed in a short time of about several tens of milliseconds to several hundreds of milliseconds, and a significant reduction in time for determining whether or not a capacitor is good can be realized.
Moreover, since DC voltage and AC voltage are superimposed and applied and only the electrical characteristics by the AC signal are measured, an existing impedance measuring device may be used, and cost increase can be suppressed.
以下に、本発明の実施の形態を、実施例を参照して説明する。 Embodiments of the present invention will be described below with reference to examples.
図2は本発明にかかる良否判定装置の一例の回路図である。
この良否判定装置は、AC電源1とトランス2の入力側コイル2aとで構成される交流回路CIR1と、DC電源3とトランス2の出力側コイル2bと被測定コンデンサDUTと直流阻止用コンデンサ4と交流検出用電流計5とで構成される直流回路CIR2とで構成されている。被測定コンデンサDUTの両端には、直流阻止用コンデンサ6,7を介して交流検出用電圧計8が接続されている。
FIG. 2 is a circuit diagram of an example of the quality determination device according to the present invention.
This pass / fail judgment device includes an AC circuit CIR1 composed of an
交流検出用電流計5および交流検出用電圧計8は良否選別装置9に接続されている。良否選別装置9には、良否判定基準となる閾値を記憶するメモリ9aと、前記閾値と電流計5および電圧計8により測定された被測定コンデンサDUTの実測値から所定の電気特性(Rs’,Cs’,DF’など)を計算し、この電気特性と閾値とを比較し、被測定コンデンサDUTの良否を判定する良否判定手段9bとが設けられている。
The
前記のように被測定コンデンサDUTには、DC電源3からDC電圧と、AC電源1からトランス2を介してAC電圧が重畳して印加される。つまり、DC電圧をバイアス印加した状態で、AC信号によって被測定コンデンサDUTの電気特性を測定する。
前記回路により検出した電圧Vと電流Iとにより、被測定コンデンサDUTのインピーダンスZを以下の式で計算する。
Based on the voltage V and current I detected by the circuit, the impedance Z of the measured capacitor DUT is calculated by the following equation.
図3は、本発明にかかるコンデンサの良否判定方法の一例を示すフローチャートである。以下、このフローに則り、良否判定方法について説明する。
まず、IR値が既知で、被測定コンデンサと同種のコンデンサを複数個準備し、これらコンデンサにDC電圧とAC電圧を重畳印加した状態で(ステップS1)、AC信号によってコンデンサの電気特性(Rs’,Cs’,DF’など)を測定する(ステップS2)。この測定した電気特性とIR値との相関に基づき、良否選別基準となるIR値に対応した電気特性を閾値を設定し(ステップS3)、この閾値をメモリに記憶する(ステップS4)。
次に、被測定コンデンサDUTについて、上記コンデンサと同様に、DC電圧とAC電圧を重畳印加し(ステップS5)、AC信号によって被測定コンデンサDUTの電気特性(Rs’,Cs’,DF’など)を測定する(ステップS6)。この測定した電気特性をメモリに記憶されている閾値と比較し(ステップS7)、良否を判別する(ステップS8)。以後、新たな被測定コンデンサDUTについてステップS5〜S8の操作を繰り返す。
FIG. 3 is a flowchart showing an example of a capacitor quality determination method according to the present invention. Hereinafter, the quality determination method will be described according to this flow.
First, a plurality of capacitors having the same IR value and the same type as the capacitor to be measured are prepared, and a DC voltage and an AC voltage are superimposed and applied to these capacitors (step S1). , Cs ′, DF ′, etc.) are measured (step S2). Based on the correlation between the measured electrical property and the IR value, a threshold value is set for the electrical property corresponding to the IR value that is the pass / fail selection criterion (step S3), and this threshold value is stored in the memory (step S4).
Next, the DC voltage and the AC voltage are superimposed and applied to the measured capacitor DUT in the same manner as the above capacitor (step S5), and the electrical characteristics (Rs ′, Cs ′, DF ′, etc.) of the measured capacitor DUT are determined by the AC signal. Is measured (step S6). The measured electrical characteristics are compared with a threshold value stored in the memory (step S7), and pass / fail is determined (step S8). Thereafter, the operations of steps S5 to S8 are repeated for the new measured capacitor DUT.
次に、本発明における良否判定方法の効果を確かめるため、下記3種類の試料A〜Cについて、充電状態の絶縁抵抗IRと、DCバイアス電圧(40V)を印加しAC電源の信号周波数を変化させたときの直列抵抗Rs’との相関係数(R2 値)を図4に示す。
A:B特性10nF
B:B特性100nF
C:B特性1μF
ここで、B特性とは容量温度特性コードであり、−25〜85℃の温度範囲で容量変化率が±10%以内をいう。
Next, in order to confirm the effect of the pass / fail judgment method according to the present invention, for the following three types of samples A to C, an insulation resistance IR in a charged state and a DC bias voltage (40 V) are applied to change the signal frequency of the AC power source. The correlation coefficient (R 2 value) with the series resistance Rs ′ is shown in FIG.
A: B characteristic 10 nF
B: B characteristic 100 nF
C: B characteristic 1μF
Here, the B characteristic is a capacity-temperature characteristic code, which means that the capacity change rate is within ± 10% in the temperature range of −25 to 85 ° C.
図4から明らかなように、A〜Cの試料(1μF以下のコンデンサ)では、信号周波数が100Hz〜1kHzで相関係数が0.7以上あり、高い相関関係があることがわかる。したがって、1μF以下のコンデンサに100Hz〜1kHzの周波数のAC信号を印加した場合に、直列抵抗Rs’と絶縁抵抗IRとの相関関係が高いことがわかる。
なお、100Hz以下であっても高い相関関係があると考えられ、この周波数領域での選別を行った場合も有効ではあるが、周波数が低くなると測定時間が長くなり、短時間でかつ正確にコンデンサの良否を判定するためには、100Hz〜1kHzでの選別が望ましい。
As can be seen from FIG. 4, the samples A to C (capacitors of 1 μF or less) have a high correlation with a signal frequency of 100 Hz to 1 kHz and a correlation coefficient of 0.7 or more. Therefore, it can be seen that when an AC signal having a frequency of 100 Hz to 1 kHz is applied to a capacitor of 1 μF or less, the correlation between the series resistance Rs ′ and the insulation resistance IR is high.
Although it is considered that there is a high correlation even when the frequency is 100 Hz or less, it is effective to perform selection in this frequency region. However, when the frequency is low, the measurement time becomes long, and the capacitor is accurately and quickly. In order to determine pass / fail, it is desirable to select at 100 Hz to 1 kHz.
図5は、試料C(1μFのコンデンサ)を用いて、充電状態におけるIR値と、AC電源の信号周波数を一定(1kHz)にしDCバイアス電圧を変化させたときの直列抵抗Rs’,静電容量Cs’,誘電損失DF’を累乗近似した値との相関係数(R2 値)を求めたものである。
図から明らかなように、Rs’およびDF’においてはDCバイアス電圧を20V以上とすれば、相関係数が0.8以上となり、高い相関関係があることがわかる。一方、Cs’については、DCバイアス電圧を高くすればそれだけ相関係数が高くなるが、40Vでも相関係数が0.6以下であり、Rs’およびDF’に比べると低い相関関係しか得られない。その理由は、DCバイアス電圧によって静電容量が低くなるためである。
FIG. 5 shows the series resistance Rs ′ and capacitance when the sample C (1 μF capacitor) is used and the DC value is changed while keeping the IR value in the charged state and the signal frequency of the AC power supply constant (1 kHz). A correlation coefficient (R 2 value) with a value obtained by power approximation of Cs ′ and dielectric loss DF ′ is obtained.
As is apparent from the figure, in Rs ′ and DF ′, when the DC bias voltage is 20 V or more, the correlation coefficient is 0.8 or more, and it can be seen that there is a high correlation. On the other hand, for Cs ′, the correlation coefficient increases as the DC bias voltage is increased. However, the correlation coefficient is 0.6 or less even at 40 V, and only a low correlation is obtained compared to Rs ′ and DF ′. Absent. This is because the capacitance is lowered by the DC bias voltage.
図6は、試料C(1μFのコンデンサ)を用いて、充電状態におけるIR値と、DCバイアス電圧を印加した状態でのAC信号によるRs’値との関係をプロットしたものである。なお、DCバイアス電圧を40V、AC電源の信号周波数を1kHzとし、試料数は29個とした。
試料Cの場合、IR値の選別閾値は1GΩであり、1GΩより大きなIR値を持つコンデンサは良品と呼ぶことができる。これをRs’値で選別する場合には、例えば閾値を40Ωに設定することで、IR不良品をDCバイアス印加時のRs’値で選別できる。
FIG. 6 plots the relationship between the IR value in a charged state and the Rs ′ value by an AC signal in a state where a DC bias voltage is applied using the sample C (1 μF capacitor). The DC bias voltage was 40 V, the AC power supply signal frequency was 1 kHz, and the number of samples was 29.
In the case of sample C, the IR value selection threshold is 1 GΩ, and a capacitor having an IR value larger than 1 GΩ can be called a non-defective product. When this is sorted by the Rs ′ value, for example, by setting the threshold value to 40Ω, an IR defective product can be sorted by the Rs ′ value when the DC bias is applied.
図7は、試料C(1μFのコンデンサ)を用いて、充電状態におけるIR値と、DCバイアス電圧を印加した状態でのAC信号によるDF’値との関係をプロットしたものである。なお、この場合もDCバイアス電圧を40V、AC電源の信号周波数を1kHzとし、試料数は29個とした。
試料Cでは、IR値の選別閾値は前記のように1GΩであるが、DF’値の選別閾値を0.025と設定することで、IR不良品をDCバイアス印加時のDF’値で選別できる。
FIG. 7 is a plot of the relationship between the IR value in a charged state and the DF ′ value by an AC signal in a state where a DC bias voltage is applied using Sample C (1 μF capacitor). In this case, the DC bias voltage was 40 V, the AC power source signal frequency was 1 kHz, and the number of samples was 29.
In the sample C, the IR value selection threshold is 1 GΩ as described above, but by setting the DF ′ value selection threshold to 0.025, IR defective products can be selected based on the DF ′ value when the DC bias is applied. .
図8は、試料C(1μFのコンデンサ)を用いて、充電状態におけるIR値と、DCバイアス電圧を印加した状態でのAC信号によるCs’値との関係をプロットしたものである。なお、この場合も図6,図7と同様にDCバイアス電圧を40V、AC電源の信号周波数を1kHzとし、試料数は29個とした。
図8から明らかなように、試料Cの場合、Cs’の選別閾値を48nFに設定することで、選別できる。なお、Cs’の場合、IR不良品もCs’=48nF付近に存在するため、他の特性であるRs’やDF’を用いた選別に比べて、幾分選別精度が劣るという懸念を有する。
FIG. 8 plots the relationship between the IR value in the charged state and the Cs ′ value by the AC signal in the state where the DC bias voltage is applied using the sample C (1 μF capacitor). In this case, the DC bias voltage was 40 V, the signal frequency of the AC power source was 1 kHz, and the number of samples was 29, as in FIGS.
As is apparent from FIG. 8, in the case of the sample C, the selection can be made by setting the selection threshold of Cs ′ to 48 nF. In the case of Cs ′, since an IR defective product is also present in the vicinity of Cs ′ = 48 nF, there is a concern that the sorting accuracy is somewhat inferior compared to sorting using other characteristics Rs ′ and DF ′.
図6〜図8では、Rs’、DF’およびCs’の閾値を実測データから求めたが、前述の(4)式または(5)式からRs’の閾値を計算で求めてもよいし、(6)式からDF’の閾値を計算で求めてもよい。 6 to 8, the threshold values of Rs ′, DF ′, and Cs ′ are obtained from the actual measurement data. However, the threshold value of Rs ′ may be obtained by calculation from the above equation (4) or (5), The threshold value of DF ′ may be calculated from the equation (6).
図2では、本発明にかかる良否判別方法を実施するための測定回路の一例を示したが、これに限定されるものではない。
例えば、特許文献2の図1〜図3に示される回路を用いてDCバイアス印加時におけるAC信号による電気特性を測定してもよい。
Although FIG. 2 shows an example of a measurement circuit for carrying out the quality determination method according to the present invention, it is not limited to this.
For example, electrical characteristics due to an AC signal when a DC bias is applied may be measured using the circuits shown in FIGS.
1 AC電源
2 トランス
3 DC電源
5 交流検出用電流計
8 交流検出用電圧計
9 良否選別装置
DUT 被測定コンデンサ
1
Claims (6)
被測定コンデンサに対してDC電圧およびAC電圧を重畳印加するステップと、
前記DC電圧およびAC電圧を重畳印加した状態で、AC信号によって被測定コンデンサの電気特性を測定するステップと、
前記測定された電気特性を前記閾値と比較することによって、被測定コンデンサの良否を判定するステップと、を備えることを特徴とするコンデンサの良否判定方法。 Based on the correlation between the electrical characteristics measured by the AC signal when the DC voltage and the AC voltage are superimposed on the capacitor of the same type as the capacitor to be measured, and the IR value, the electrical power corresponding to the IR value serving as the pass / fail selection criterion Setting the characteristic as a threshold;
Applying a DC voltage and an AC voltage to the capacitor to be measured in a superimposed manner;
Measuring the electrical characteristics of the capacitor to be measured by an AC signal in a state where the DC voltage and the AC voltage are superimposed and applied;
Determining the quality of the capacitor to be measured by comparing the measured electrical characteristics with the threshold value.
被測定コンデンサに前記DC電圧と重畳してAC電圧を印加するためのAC電源と、
AC信号によって被測定コンデンサの電気特性を測定する特性測定手段と、
被測定コンデンサと同種のコンデンサに対して、DC電圧およびAC電圧を重畳印加したときのAC信号によって測定される電気特性とIR値との相関に基づき、良否選別基準となるIR値に対応した電気特性を閾値として記憶する記憶手段と、
前記閾値と前記特性測定手段により測定された被測定コンデンサの電気特性の実測値とを比較し、被測定コンデンサの良否を判定する良否判定手段と、を備えることを特徴とするコンデンサの良否判定装置。 A DC power supply for applying a DC voltage to the capacitor to be measured;
An AC power supply for applying an AC voltage superimposed on the DC voltage to the capacitor to be measured;
Characteristic measuring means for measuring the electric characteristics of the capacitor to be measured by an AC signal;
Based on the correlation between the electrical characteristics measured by the AC signal when the DC voltage and the AC voltage are superimposed on the capacitor of the same type as the capacitor to be measured, and the IR value, the electrical power corresponding to the IR value serving as the pass / fail selection criterion Storage means for storing the characteristic as a threshold;
A pass / fail judgment device for a capacitor, comprising: a pass / fail judgment unit that compares the threshold value with an actual measurement value of an electrical characteristic of the measured capacitor measured by the characteristic measuring unit, and judges pass / fail of the measured capacitor. .
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