JP2005108989A5

JP2005108989A5 -

Info

Publication number: JP2005108989A5
Application number: JP2003337743A
Authority: JP
Filing date: 2003-09-29
Publication date: 2006-10-19
Anticipated expiration: 2023-09-29

Claims

圧電体セラミックス層と内部電極層とを積層してなる積層体にて形成され、
前記内部電極層は、前記積層体の異なる一側面に交互に導出される第１内部電極層と、前記積層体の積層方向の所定長さ寸法毎に前記積層体の略全断面に渡って形成され、前記積層体の少なくとも一側面に導出された第２内部電極層とからなる、ことを特徴とする積層型圧電素子。 It is formed of a laminate made by laminating a piezoelectric ceramic layer and an internal electrode layer,
The internal electrode layer is formed over substantially the entire cross section of the multilayer body for each predetermined length dimension in the stacking direction of the multilayer body, and first internal electrode layers that are alternately led to different side surfaces of the multilayer body. And a second internal electrode layer led to at least one side surface of the multilayer body.

前記第２内部電極層は複数形成され、互いに隣り合う前記第２内部電極層間には所定数の前記第１内部電極層が存在してなる、ことを特徴とする請求項１に記載の積層型圧電素子。 2. The stacked type according to claim 1, wherein a plurality of the second internal electrode layers are formed, and a predetermined number of the first internal electrode layers exist between the second internal electrode layers adjacent to each other. Piezoelectric element.

前記第２内部電極層の形成間隔が５ｍｍ以下である、ことを特徴とする請求項１または請求項２のいずれかに記載の積層型圧電素子。 The multilayer piezoelectric element according to claim 1, wherein a formation interval of the second internal electrode layers is 5 mm or less.

前記積層体の前記第１内部電極層が露出した各側面において、それぞれ積層方向に隣り合う一対の第２内部電極層毎に、当該側面に露出した各第１内部電極層をまとめて電気的に接続する第１外部電極を備えた、ことを特徴とする請求項１ないし請求項３のいずれかに記載の積層型圧電素子。 In each side surface where the first internal electrode layer of the multilayer body is exposed, the first internal electrode layers exposed on the side surface are collectively integrated for each pair of second internal electrode layers adjacent in the stacking direction. The multilayer piezoelectric element according to any one of claims 1 to 3, further comprising a first external electrode to be connected.

前記第２内部電極層は前記第１外部電極と電気的に接続されていない、請求項４に記載の積層型圧電素子。 The multilayer piezoelectric element according to claim 4, wherein the second internal electrode layer is not electrically connected to the first external electrode.

前記第１外部電極を複数備え、
前記積層体の各側面の第１外部電極どうしを電気的に接続する一対の第２外部電極を備えた、ことを特徴とする請求項４または請求項５のいずれかに記載の積層型圧電素子。 A plurality of the first external electrodes;
6. The multilayer piezoelectric element according to claim 4, further comprising a pair of second external electrodes that electrically connect the first external electrodes on each side surface of the multilayer body. .

圧電体セラミックス層と内部電極層とを積層してなる積層体にて形成され、前記内部電極層が、前記積層体の異なる一側面に交互に導出される第１内部電極層と、前記積層体の積層方向の所定の長さ寸法毎に前記積層体の略全断面に渡って形成され、前記積層体の少なくとも一側面に導出された第２内部電極層とからなる積層型圧電素子を得る工程と、
前記第２内部電極層間に電界を印加して、積層体全体のドメインの向きを略積層方向に配向してなる全体分極を行う工程と、
前記第１内部電極層を介し前記積層体に電界を印加して層間分極を行う工程と、
を含む積層型圧電素子の製造方法。 A first internal electrode layer formed by laminating a piezoelectric ceramic layer and an internal electrode layer, wherein the internal electrode layers are alternately led to different side surfaces of the multilayer body; A step of obtaining a laminated piezoelectric element comprising a second internal electrode layer formed over substantially the entire cross section of the laminated body for each predetermined length dimension in the laminating direction and led out to at least one side surface of the laminated body When,
Applying an electric field between the second internal electrode layers to perform overall polarization by orienting the domains of the entire laminate in a substantially laminating direction;
Applying an electric field to the laminate through the first internal electrode layer to perform interlayer polarization;
A method for manufacturing a laminated piezoelectric element including:

前記第２内部電極層は複数形成され、互いに隣り合う前記第２内部電極層間には所定数の前記第１電極層が存在してなる、ことを特徴とする請求項７に記載の積層型圧電素子の製造方法。 8. The stacked piezoelectric device according to claim 7 , wherein a plurality of the second internal electrode layers are formed, and a predetermined number of the first electrode layers exist between the second internal electrode layers adjacent to each other. Device manufacturing method.

前記積層体の前記第１内部電極層が露出した各側面において、それぞれ積層方向に隣り合う一対の第２内部電極層毎に、当該側面に露出した各第１内部電極層をまとめて電気的に接続する第１外部電極を形成する工程を含む、ことを特徴とする積層型圧電素子の製造方法。 In each side surface where the first internal electrode layer of the multilayer body is exposed, the first internal electrode layers exposed on the side surface are collectively integrated for each pair of second internal electrode layers adjacent in the stacking direction. A method of manufacturing a laminated piezoelectric element, comprising a step of forming a first external electrode to be connected.

前記第１外部電極を形成する工程においては、前記第１外部電極は前記第２内部電極層と電気的に接続しないように形成される、ことを特徴とする請求項９に記載の積層型圧電素子の製造方法。 The multilayer piezoelectric element according to claim 9, wherein in the step of forming the first external electrode, the first external electrode is formed so as not to be electrically connected to the second internal electrode layer. Device manufacturing method.

前記第１外部電極を形成する工程においては複数の前記第１外部電極が形成され、
前記積層体の各側面の第１外部電極どうしを電気的に接続する一対の第２外部電極を形成する工程を含む、ことを特徴とする請求項９または請求項１０のいずれかに記載の積層型圧電素子の製造方法。 In the step of forming the first external electrode, a plurality of the first external electrodes are formed,
11. The laminate according to claim 9, comprising a step of forming a pair of second external electrodes that electrically connect the first external electrodes on each side surface of the laminate. Method for manufacturing a piezoelectric element.