JP2005043306A - Oscillating gyro sensor - Google Patents

Oscillating gyro sensor Download PDF

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JP2005043306A
JP2005043306A JP2003279937A JP2003279937A JP2005043306A JP 2005043306 A JP2005043306 A JP 2005043306A JP 2003279937 A JP2003279937 A JP 2003279937A JP 2003279937 A JP2003279937 A JP 2003279937A JP 2005043306 A JP2005043306 A JP 2005043306A
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support
gyro sensor
vibration gyro
piezoelectric vibrator
crystal
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JP2005043306A5 (en
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Kenji Sato
健二 佐藤
Atsushi Ono
淳 小野
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Toyo Communication Equipment Co Ltd
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Toyo Communication Equipment Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a precise horizontal tuning fork type oscillating gyro sensor that has excellent resistance to vibration impact and can cope with miniaturization. <P>SOLUTION: The oscillating gyro sensor comprises a doublet-tuning fork-shaped quartz resonator 1, a support 2 made of quartz, a base 3 having a plurality of lead terminals 4, and a metal lid 5 having a recess that is open downward. The quartz resonator 1 is placed nearly at the center on the mounting surface of the base 3 and the upper surface of the support 2 is joined to the lower surface end of first and second support fixing sections 21, 23 by using an adhesive. In this case, the support 2 is fixed to a position corresponding to the first and second support fixing sections 21, 23 of the quartz resonator 1 via the adhesive. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、コリオリ力を利用した圧電振動子をパッケージングする場合に発生する種々の不具合を解決した振動ジャイロセンサに関するものである。   The present invention relates to a vibration gyro sensor that solves various problems that occur when packaging a piezoelectric vibrator using Coriolis force.

物体の回転を検出するセンサとして、コリオリ力を応用した音さ型振動ジャイロセンサが広く使われている。特に水平横置き型と呼ばれる音さ型振動ジャイロセンサは薄型化及び小型化しやすいため、カメラの手振防止用やカーナビゲーションシステム用等、その応用範囲は広い。
近年、車両の走行制御用途向けに水平横置きタイプの音さ型振動ジャイロセンサが研究されるようになってきた。車両の走行制御はまさに車両全体の安全性を左右する生命線であり、この用途向けの振動ジャイロセンサには、特に耐振動衝撃性能に優れ高精度のものが要求される。 As a sensor for detecting the rotation of an object, a sound type vibration gyro sensor using Coriolis force is widely used. In particular, a sound-type vibration gyro sensor called a horizontal horizontal type is easy to be thinned and miniaturized, and thus has a wide range of applications such as camera shake prevention and car navigation systems.
In recent years, horizontal and horizontal sound-type vibration gyro sensors have been researched for vehicle travel control applications. Vehicle travel control is a lifeline that determines the safety of the entire vehicle, and a vibration gyro sensor for this application is particularly required to have excellent vibration resistance and high accuracy.

従来の水平横置き型の音さ型振動ジャイロセンサには、例えば特開平１１−２８１３７２号公報で開示されたようなものがあり、図３はその構成を示す分解斜視図であって、図４は従来の振動ジャイロセンサに係わる圧電振動子の平面図である。
図３に示すように従来の振動ジャイロセンサは、圧電振動子１００と、該圧電振動子１００を収容するための凹部１１１を上面に備えるセラミックパッケージ１１０と、前記凹部１１１の開口を閉止するための金属蓋１２０と、を備えている。圧電振動子１００は、 図４に示すように、その重心Ｇ（本図中の一点鎖点の交点）を中心として４回対称の正方形をしている基部１００Ａと該基部１００Ａの対向する一方端辺のそれぞれに突設するＴ字状の駆動振動系１０１Ａ、１０１Ｂと対向する他方端辺のそれぞれに突設する短冊状の検出振動系１０２Ａ、１０２Ｂとから成り、駆動振動系１０１Ａと１０１Ｂとは重心Ｇを中心として２回対称であり、検出振動系１０２Ａと１０２Ｂとは重心Ｇを中心として２回対称である。
前記凹部１１１の内底面の略中央に突設する支持具１１２と前記重心Ｇに穿設する貫通孔１１３とを嵌合し接着剤（不図示）によって機械的に接続し（一点支持）、圧電振動子１００とセラミックパッケージ１１０とをワイヤーボンディング（不図示）で電気的に接続した上で凹部１１１の開口を前記金属蓋１２０によって気密封止する構造となっている。
特開平１１−２８１３７２号公報 A conventional horizontal horizontal sound type vibration gyro sensor is disclosed in, for example, Japanese Patent Laid-Open No. 11-281372, and FIG. 3 is an exploded perspective view showing the configuration thereof. These are the top views of the piezoelectric vibrator concerning the conventional vibration gyro sensor.
As shown in FIG. 3, the conventional vibration gyro sensor includes a piezoelectric vibrator 100, a ceramic package 110 having a concave portion 111 for accommodating the piezoelectric vibrator 100 on the upper surface, and an opening for the concave portion 111. And a metal lid 120. As shown in FIG. 4, the piezoelectric vibrator 100 has a base 100 </ b> A having a four-fold symmetrical square centered on the center of gravity G (intersection of a one-dot chain point in the figure) and one end of the base 100 </ b> A facing each other. The drive vibration systems 101A and 101B are composed of T-shaped drive vibration systems 101A and 101B protruding from the sides and strip-shaped detection vibration systems 102A and 102B protruding from the other opposite sides. The center of gravity G is a two-fold symmetry, and the detection vibration systems 102A and 102B are two-fold symmetric about the center of gravity G.
A support tool 112 projecting substantially at the center of the inner bottom surface of the recess 111 and a through-hole 113 drilled in the center of gravity G are fitted and mechanically connected by an adhesive (not shown) (supported at one point), and piezoelectric. The vibrator 100 and the ceramic package 110 are electrically connected by wire bonding (not shown), and the opening of the recess 111 is hermetically sealed by the metal lid 120.
JP-A-11-281372

しかしながら、従来の水平横置き型の音さ型振動ジャイロセンサは一点支持構造であり取付部分の面積も狭い。このため、外部から振動や衝撃が加わるとセンサ（前記圧電振動子１００）の支持部分に振動や衝撃が集中しやすいため、車両走行時のように長時間に渡り多大な振動と衝撃が加わる厳しい環境条件下においては、破損する虞も高い。また、センサ全体を小型化するとさらに支持部分に衝撃が集中しやすくなるという問題点を抱えている。さらに、前記支持部分に熱膨張率差による応力歪みが加わり、これが圧電振動子１００にも影響し、圧電振動子１００の安定性（エージング特性等）を損ねる虞がある。   However, a conventional horizontal horizontal sound type vibration gyro sensor has a one-point support structure and a small mounting area. For this reason, when vibration or impact is applied from the outside, the vibration or impact tends to concentrate on the support portion of the sensor (piezoelectric vibrator 100). There is a high risk of breakage under environmental conditions. Further, when the entire sensor is downsized, there is a problem that the impact is more easily concentrated on the support portion. Furthermore, stress strain due to a difference in thermal expansion coefficient is applied to the support portion, which also affects the piezoelectric vibrator 100 and may impair the stability (such as aging characteristics) of the piezoelectric vibrator 100.

即ち解決しようとする問題点は、耐振動衝撃性に優れ、かつ高精度で小型化にも対応可能な水平横置き型の音さ型振動ジャイロセンサを提供することができない点である。   That is, the problem to be solved is that it is not possible to provide a horizontal horizontal sound type vibration gyro sensor that is excellent in vibration shock resistance, is highly accurate, and can cope with downsizing.

上記課題を解決するために本発明に係わる請求項１記載の発明は、双音さ形状の圧電振動子を用いる振動ジャイロセンサにおいて、水平横置きに配置した前記圧電振動子と該圧電振動子と同一材料からなる支持体とを備えていることを特徴とする。   In order to solve the above-mentioned problems, according to a first aspect of the present invention, there is provided a vibration gyro sensor using a piezoelectric vibrator having a twin tone shape, wherein the piezoelectric vibrator disposed horizontally and horizontally, the piezoelectric vibrator, And a support made of the same material.

本発明に係わる請求項２記載の発明は、請求項１において、前記支持体が前記圧電振動子の両端に備えていることを特徴とする。   According to a second aspect of the present invention related to the present invention, in the first aspect, the support is provided at both ends of the piezoelectric vibrator.

本発明に係わる請求項３記載の発明は、請求項２において、前記圧電振動子と前記支持体とは個別の部材であってこれらを接合していることを特徴とする。   According to a third aspect of the present invention related to the present invention, in the second aspect, the piezoelectric vibrator and the support are separate members and are joined to each other.

本発明に係わる請求項４記載の発明は、請求項２又は３において、前記圧電振動子及び前記支持体の素材として水晶を用いたことを特徴とする。   A fourth aspect of the present invention according to the present invention is characterized in that in the second or third aspect, quartz is used as a material for the piezoelectric vibrator and the support.

本発明に係わる請求項５記載の発明は、請求項４において、前記水晶がその主面の法線方向が結晶軸のＺ軸となるようにカットしたものであることを特徴とする。   A fifth aspect of the present invention according to the present invention is characterized in that, in the fourth aspect, the crystal is cut so that the normal direction of the principal surface thereof is the Z axis of the crystal axis.

本発明の振動ジャイロセンサは、耐振動衝撃性に優れ、かつ高精度で小型化にも対応可能な振動ジャイロセンサ、特に水平横置き型の双音さ型振動ジャイロセンサを提供することができるという利点がある。   The vibration gyro sensor of the present invention is capable of providing a vibration gyro sensor that is excellent in vibration shock resistance, highly accurate, and can be miniaturized, in particular, a horizontal horizontal type double-tone vibration gyro sensor. There are advantages.

以下、図示した本発明の実施の形態に基づいて、本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail based on illustrated embodiments of the present invention.

図１（ａ）は本発明の第１の実施形態としての水平横置き型の双音さ型振動ジャイロセンサ（以下「振動ジャイロセンサ」と示す。）の金属蓋を省略した状態の上面図、図１（ｂ）はそのＡ−Ａ縦断面図であって、図２は第１の実施形態に係わる水晶振動子の平面図である。
第１の実施形態としての振動ジャイロセンサは、双音さ形状の水晶振動子１と、水晶からなる支持体２と、複数のリード端子４を備えるベース３と、下方に開口する凹部を備える金属蓋５と、を備えている。図２に示すように前記水晶振動子１は、基板主面の法線方向が結晶Ｚ軸方向となるようにカットしたＺ板水晶薄片をウェットエッチング加工によって双音さ形状に形成し、その表面に蒸着やスパッタリングにより所定の電極を形成したものであって、一対の短冊状のアーム部１１ａ及び１１ｂと該アーム部１１ａ及び１１ｂの表面に形成した駆動電極１２ａ及び１２ｂとを有する駆動部１３と、前記駆動部１３の両端を支持すると共に前記駆動電極１２ａ及び１２ｂに接続するリード電極１３ａを備える第１及び第２の双音さ支持部１４及び１５と、第１の検出電極１６ａ及び１６ｂを有し前記第１の双音さ支持部１４を介して前記アーム部１１ａ及び１１ｂの振動を検出する第１の検出部１７と、第２の検出電極１８ａ及び１８ｂを有し前記第２の双音さ支持部１５を介して前記アーム部１１ａ及び１１ｂの振動を検出する第２の検出部１９と、前記第１の検出部１７の一端を支持すると共に前記第１の検出電極１６ａ及び１６ｂに接続する一対の引き出し電極２０ａ及び２０ｂを有する第１の支持固定部２１と、前記第２の検出部１９の一端を支持すると共に前記第２の検出電極１８ａ及び１８ｂに接続する一対の引き出し電極２２ａ及び２２ｂとを有する第２の支持固定部２３と、を備えている。なお、図２において図示した駆動電極と第１及び第２の検出電極と引き出し電極の電極パターンとリード電極の電極パターンとは裏面にも同様な電極パターンが形成され、側面のパターンを介して接続されている。
前記支持体２は、基板主面の法線方向が結晶Ｚ軸方向となるようにカットしたＺ板水晶片をウェットエッチング加工によって各支持固定部が備える前記支持スペースに略一致するように形成したものである。 FIG. 1A is a top view of a horizontal transverse type dual sound type vibration gyro sensor (hereinafter referred to as a “vibration gyro sensor”) as a first embodiment of the present invention in a state where a metal lid is omitted. FIG. 1B is a longitudinal sectional view taken along the line AA, and FIG. 2 is a plan view of the crystal resonator according to the first embodiment.
The vibration gyro sensor as the first embodiment is a metal having a twin-tone crystal resonator 1, a support 2 made of crystal, a base 3 having a plurality of lead terminals 4, and a recess opening downward. And a lid 5. As shown in FIG. 2, the quartz crystal resonator 1 is formed by forming a Z-plate crystal flake cut so that the normal direction of the main surface of the substrate is in the crystal Z-axis direction into a double-tone shape by wet etching. A predetermined electrode is formed by vapor deposition or sputtering, and has a pair of strip-shaped arm portions 11a and 11b, and a drive portion 13 having drive electrodes 12a and 12b formed on the surfaces of the arm portions 11a and 11b; The first and second sympathetic support portions 14 and 15 including the lead electrode 13a that supports both ends of the drive unit 13 and is connected to the drive electrodes 12a and 12b, and the first detection electrodes 16a and 16b are provided. A first detector 17 for detecting vibrations of the arms 11a and 11b via the first bisonality support 14 and a second detection electrode 18a and 18b; A second detection unit 19 that detects vibrations of the arms 11a and 11b via a second harmonic support unit 15 and one end of the first detection unit 17 and the first detection electrode are supported. A first support fixing part 21 having a pair of lead electrodes 20a and 20b connected to 16a and 16b, and a pair supporting one end of the second detection part 19 and connecting to the second detection electrodes 18a and 18b. And a second support fixing portion 23 having lead-out electrodes 22a and 22b. Note that the drive electrode, the first and second detection electrodes, the electrode pattern of the lead electrode, and the electrode pattern of the lead electrode shown in FIG. Has been.
The support body 2 is formed by wet etching to form a Z-plate crystal piece cut so that the normal direction of the substrate main surface is the crystal Z-axis direction so as to substantially match the support space included in each support fixing portion. Is.

前記ベース３の取り付け面（上面）の略中央に前記水晶振動子１を載置すると共に、前記第１及び第２の支持固定部２１及び２３に対応する位置に接着材（不図示）を介して固定された前記支持体２の上面と第１及び第２の支持固定部２１及び２３の下面とを接着材（不図示）を用いて接合している（二点支持）。このような接合方法を採用することで、振動ジャイロセンサの小型化、即ち水晶振動子１（支持固定部）及び支持体２の小型化に伴って接合部分が小面積化しても十分な耐衝撃性を有すると共に、支持体２を水晶で作製することで前記接合部分に熱膨張率差による応力歪みが加わることが無く、水晶振動子１の安定性（エージング特性等）を損ねることが無い。ただし、前記接着材が軟質であって前記応力歪みを緩和することが可能であれば、水晶振動子１と支持体２との結晶軸方向が互いに異なるものであっても構わない。   The quartz crystal unit 1 is placed at substantially the center of the mounting surface (upper surface) of the base 3, and an adhesive (not shown) is provided at a position corresponding to the first and second support fixing portions 21 and 23. The upper surface of the support body 2 fixed in this manner and the lower surfaces of the first and second support fixing portions 21 and 23 are joined using an adhesive (not shown) (two-point support). By adopting such a joining method, even if the joint portion is reduced in area due to downsizing of the vibration gyro sensor, that is, downsizing of the crystal unit 1 (support fixing part) and the support 2, sufficient impact resistance is achieved. In addition, since the support 2 is made of quartz, stress distortion due to a difference in coefficient of thermal expansion is not applied to the joint portion, and stability (aging characteristics, etc.) of the crystal unit 1 is not impaired. However, the crystal axis directions of the crystal unit 1 and the support 2 may be different from each other as long as the adhesive is soft and can relieve the stress strain.

前記ベース３の取り付け面に突出した前記リード端子４と該リード端子４に対応する前記引き出し電極及び前記リード電極をワイヤボンディング（不図示）により接続する。   The lead terminal 4 protruding from the mounting surface of the base 3 is connected to the lead electrode and the lead electrode corresponding to the lead terminal 4 by wire bonding (not shown).

前記駆動部１３と前記第１及び第２の検出部１７、１９との共振周波数との差、即ち離調周波数を所望値まで周波数離調した後、前記水晶振動子１を前記金属蓋５により気密封止する。なお、前記水晶振動子１と共にオフセット調整回路やゲイン調整回路等を構成するワンチップＩＣを、例えば前記ベース３の取り付け面に配設することも可能である。   The difference between the resonance frequency of the drive unit 13 and the first and second detection units 17 and 19, that is, the detuning frequency is detuned to a desired value, and then the crystal unit 1 is moved by the metal lid 5. Seal hermetically. Note that a one-chip IC that constitutes an offset adjustment circuit, a gain adjustment circuit, and the like together with the crystal resonator 1 can be disposed, for example, on the mounting surface of the base 3.

本発明の第２の実施形態としての振動ジャイロセンサが第１の実施形態と異なる点は、前記第１及び第２の支持固定部の下面（前記ベースの取り付け面に対向する面。）に前記支持体を一体形成した点にある。
第２の実施形態に係わる水晶振動子は、その素材になるＺ板水晶片の一方主面の支持体となる部位を除きウェットエッチング加工によって所望の厚みに形成すると共に双音さ形状に形成し、その表面に蒸着やスパッタリングにより所定の電極を形成したものである。このような構造にすることで、（第２の実施形態に係わる）水晶振動子の実装作業が簡素化されるという効果を有する。 The vibration gyro sensor according to the second embodiment of the present invention is different from the first embodiment in that the lower surface of the first and second support fixing portions (the surface facing the mounting surface of the base). The support body is integrally formed.
The quartz crystal resonator according to the second embodiment is formed to have a desired thickness and a double-tone shape by wet etching except for a portion to be a support on one main surface of a Z-plate crystal piece as a material. A predetermined electrode is formed on the surface by vapor deposition or sputtering. With such a structure, there is an effect that the mounting operation of the crystal resonator (according to the second embodiment) is simplified.

また本発明は、水晶振動素子のみに限定するものではなくランガサイト、四方酸リチウム、タンタル酸リチウム、ニオブ酸リチウム等のその他の圧電材料からなる振動子に適用できることは云うまでもない。   Needless to say, the present invention is not limited to the crystal resonator element, and can be applied to a vibrator made of other piezoelectric materials such as langasite, lithium tetragonal acid, lithium tantalate, and lithium niobate.

本発明に係る振動ジャイロセンサの構造を示した概略構成図である。 （ａ）金属蓋を省略した状態の上面図。 （ｂ）Ａ−Ａ縦断面図。It is the schematic block diagram which showed the structure of the vibration gyro sensor which concerns on this invention. (A) The top view of the state which abbreviate | omitted the metal cover. (B) AA longitudinal cross-sectional view. 本発明に係る水晶振動子の平面図である。1 is a plan view of a crystal resonator according to the present invention. 従来の振動ジャイロセンサの構造を示した分解斜視図である。It is the disassembled perspective view which showed the structure of the conventional vibration gyro sensor. 従来の水晶振動子の平面図である。It is a top view of the conventional crystal oscillator.

符号の説明Explanation of symbols

１・・水晶振動子
２・・支持体
３・・ベース
４・・リード端子
５・・金属蓋
１１ａ、１１ｂ・・アーム部
１２ａ、１２ｂ・・駆動電極
１３・・駆動部
１３ａ・・リード電極
１４・・第１の双音さ支持部
１５・・第２の双音さ支持部
１６ａ、１６ｂ・・第１の検出電極
１７・・第１の検出部
１８ａ、１８ｂ・・第２の検出電極
１９・・第２の検出部
２０ａ、２０ｂ・・引き出し電極
２１・・第１の支持固定部２１
２２ａ、２２ｂ・・引き出し電極
２３・・第２の支持固定部
１００・・圧電振動子
１００Ａ・・基部
１０１Ａ、１０１Ｂ・・駆動振動系
１０２Ａ、１０２Ｂ・・検出振動系
１１０・・セラミックパッケージ
１１１・・凹部
１１２・・支持具
１１３・・貫通孔
１２０・・金属蓋
Ｇ・・重心
DESCRIPTION OF SYMBOLS 1 ... Crystal oscillator 2. Support body 3. Base 4 ... Lead terminal 5 ... Metal lid 11a, 11b ... Arm part 12a, 12b ... Drive electrode 13 ... Drive part 13a ... Lead electrode 14 ··· First harmonic support 15 ··· Second harmonic support 16a, 16b · · First detection electrode 17 · · First detection portion 18a and 18b · · · Second detection electrode 19 .. second detection part 20a, 20b .. extraction electrode 21 .. first support fixing part 21
22a, 22b... Extraction electrode 23.. 2nd support fixing part 100.. Piezoelectric vibrator 100A ... Base 101A, 101B ... Drive vibration system 102A, 102B ... Detection vibration system 110 ... Ceramic package 111 ... Recessed part 112 ・ ・ Support 113 ・ ・ Through hole 120 ・ ・ Metal lid G ・ ・ Center of gravity

Claims (5)

双音さ形状の圧電振動子を用いる振動ジャイロセンサにおいて、
水平横置きに配置した前記圧電振動子と該圧電振動子と同一材料からなる支持体とを備えていることを特徴とする振動ジャイロセンサ。 In a vibration gyro sensor using a twin-tone shape piezoelectric vibrator,
A vibration gyro sensor comprising the piezoelectric vibrator arranged horizontally and a support made of the same material as the piezoelectric vibrator. 前記支持体が前記圧電振動子の両端下部に備えていることを特徴とする請求項１に記載の振動ジャイロセンサ。 The vibration gyro sensor according to claim 1, wherein the support is provided at both lower portions of the piezoelectric vibrator. 前記圧電振動子と前記支持体とは個別の部材であってこれらを接合していることを特徴とする請求項２に記載の振動ジャイロセンサ。 The vibration gyro sensor according to claim 2, wherein the piezoelectric vibrator and the support are separate members and are joined to each other. 前記圧電振動子及び前記支持体の素材として水晶を用いたことを特徴とする請求項２又は３に記載の振動ジャイロセンサ。 4. The vibration gyro sensor according to claim 2, wherein quartz is used as a material for the piezoelectric vibrator and the support. 前記水晶がその主面の法線方向が結晶軸のＺ軸となるようにカットしたものであることを特徴とする請求項４に記載の振動ジャイロセンサ。
5. The vibration gyro sensor according to claim 4, wherein the crystal is cut so that a normal direction of a main surface thereof is a Z axis of a crystal axis.
JP2003279937A 2003-07-25 2003-07-25 Oscillating gyro sensor Withdrawn JP2005043306A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006038788A (en) * 2004-07-30 2006-02-09 Epson Toyocom Corp Twin tuning fork type oscillating gyrosensor
JP5655863B2 (en) * 2010-12-15 2015-01-21 株式会社村田製作所 Vibrating gyro
JP2016176763A (en) * 2015-03-19 2016-10-06 京セラクリスタルデバイス株式会社 Angular velocity sensor
CN113790715A (en) * 2021-11-16 2021-12-14 北京晨晶电子有限公司 Surface-mounted quartz tuning fork gyroscope and processing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006038788A (en) * 2004-07-30 2006-02-09 Epson Toyocom Corp Twin tuning fork type oscillating gyrosensor
JP4569209B2 (en) * 2004-07-30 2010-10-27 エプソントヨコム株式会社 Twin sound type vibration gyro sensor and manufacturing method thereof
JP5655863B2 (en) * 2010-12-15 2015-01-21 株式会社村田製作所 Vibrating gyro
JP2016176763A (en) * 2015-03-19 2016-10-06 京セラクリスタルデバイス株式会社 Angular velocity sensor
CN113790715A (en) * 2021-11-16 2021-12-14 北京晨晶电子有限公司 Surface-mounted quartz tuning fork gyroscope and processing method thereof

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