JP2005032396A - Thin film magnetic head - Google Patents

Thin film magnetic head Download PDF

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JP2005032396A
JP2005032396A JP2003273574A JP2003273574A JP2005032396A JP 2005032396 A JP2005032396 A JP 2005032396A JP 2003273574 A JP2003273574 A JP 2003273574A JP 2003273574 A JP2003273574 A JP 2003273574A JP 2005032396 A JP2005032396 A JP 2005032396A
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magnetic
layer
thin film
head
flux density
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Tomoko Kutsuzawa
智子 沓澤
Hideyuki Akimoto
秀行 秋元
Shuji Nishida
周治 西田
Ikuya Tagawa
育也 田河
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Fujitsu Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin-film magnetic head, of which the responsiveness to a high frequency recording is improved. <P>SOLUTION: This thin-film magnetic head has 1st and 2nd magnetic pole parts respectively arranged while holding a gap part between them at the trailing and leading sides of a confronted surface with a magnetic recording medium in the relative moving direction to the magnetic recording medium, and also this magnetic head is equipped with a magnetic core wherein a 1st magnetic layer having the 1st magnetic pole part and a 2nd magnetic layer having the 2nd magnetic pole part are magnetically connected each other, and at least a part of a thin-film coil arranged between the 1st and 2nd magnetic layers in the insulated state with respect to the 1st and 2nd magnetic layers, and it has a feature that the 1st magnetic layer to be a magnetic pole of the trailing side consists of a plurality of magnetic layers and also a saturation magnetic flux density of the magnetic layer of an outermost layer among the plurality of magnetic layers is larger than a saturation magnetic flux density of a magnetic layer adjacent to its inside. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、磁気ディスク装置や磁気テープ装置等に用いられる誘導型記録再生薄膜ヘッド、あるいは誘導型記録ヘッドと磁気抵抗効果型再生ヘッド（ＭＲヘッド）の両者を備えた複合型ＭＲヘッドに用いて好適な薄膜磁気ヘッドに関するものである。   The present invention is applied to an inductive recording / reproducing thin film head used in a magnetic disk device, a magnetic tape device or the like, or a combined MR head including both an inductive recording head and a magnetoresistive effect reproducing head (MR head). The present invention relates to a suitable thin film magnetic head.

複合型ＭＲヘッド１０は、磁気抵抗効果素子（ＭＲ）を用いた再生ヘッド（ＭＲヘッド）１２の上に誘導型記録ヘッド１４を積層する構造が一般的である。図１１は複合型ＭＲヘッド１０の平面図、図１２は図１のＡ−Ａ線断面図、図１３ は浮上面（磁気記録媒体に対する対抗面）の形状を示す説明図である。   The composite MR head 10 generally has a structure in which an inductive recording head 14 is laminated on a reproducing head (MR head) 12 using a magnetoresistive effect element (MR). 11 is a plan view of the composite MR head 10, FIG. 12 is a cross-sectional view taken along line AA of FIG. 1, and FIG. 13 is an explanatory view showing the shape of the air bearing surface (the surface facing the magnetic recording medium).

誘導型記録ヘッド１４は、アルミナ層等からなる微小ギャップ部１５を挟んでそれぞれ配置された第１の磁極部１６および第２の磁極部１７を有するとともに、該第１の磁極部１６を有する第１の磁性層（上部磁極ということもある）１８と第２の磁極部１７を有する第２の磁性層（下部磁極ということもある）１９とが連結部２１を介して互いに磁気的に連結された磁気コア２０と、少なくとも一部が第１の磁性層１８および第２の磁性層１９の間に、該第１の磁性層１８および第２の磁性層１９に対して絶縁層２２を介して絶縁された状態で設けられた薄膜コイル２３とを具備する。   The inductive recording head 14 has a first magnetic pole part 16 and a second magnetic pole part 17 that are respectively disposed with a minute gap part 15 made of an alumina layer or the like interposed therebetween, and a first magnetic pole part 16 having the first magnetic pole part 16. One magnetic layer (also referred to as an upper magnetic pole) 18 and a second magnetic layer (also referred to as a lower magnetic pole) 19 having a second magnetic pole portion 17 are magnetically coupled to each other via a coupling portion 21. The first magnetic layer 18 and the second magnetic layer 19 are interposed between the magnetic core 20 and at least part of the first magnetic layer 18 and the second magnetic layer 19 with an insulating layer 22 interposed therebetween. And a thin film coil 23 provided in an insulated state.

符号Ｘで示される面が、磁気記録媒体（図示せず）に対向する対向面（浮上面）であり、この対向面Ｘの、磁気記録媒体に対する相対移動方向を向くリーディング側の磁極部が上記第２の磁極部１７であり、その反対側となるトレーリング側の磁極部が上記第１の磁極部１６である。   The surface indicated by the symbol X is a facing surface (floating surface) facing the magnetic recording medium (not shown), and the leading-side magnetic pole portion of the facing surface X facing the relative movement direction with respect to the magnetic recording medium is the above-described surface. The trailing magnetic pole part which is the second magnetic pole part 17 and is opposite thereto is the first magnetic pole part 16.

再生ヘッド１２は、ＭＲ素子２６等を、下部シールド層２８と多層をなす上部シールド層２７とで挟み込んだ構造をなす。この再生ヘッド１２の上部シールド層２７は記録ヘッド１４の上記第２の磁性層１９と兼用して用いられる。この再生ヘッド１２は、上部シールド層２７が多層をなすなど、複雑な構造をなすが、その詳細は省略する。   The reproducing head 12 has a structure in which the MR element 26 and the like are sandwiched between a lower shield layer 28 and a multilayer upper shield layer 27. The upper shield layer 27 of the reproducing head 12 is used also as the second magnetic layer 19 of the recording head 14. Although the reproducing head 12 has a complicated structure such as a multi-layered upper shield layer 27, details thereof are omitted.

記録ヘッド１４において、薄膜コイル２３に記録電流を流すと第１および第２の磁性層１８，１９が磁化され、ギャップ付近では浮上面の外側（磁気記録媒体側）に磁界が漏れる。この漏れ磁界により媒体が磁化され、情報の記録が行われる。   In the recording head 14, when a recording current is passed through the thin film coil 23, the first and second magnetic layers 18 and 19 are magnetized, and a magnetic field leaks outside the air bearing surface (on the magnetic recording medium side) in the vicinity of the gap. The medium is magnetized by the leakage magnetic field, and information is recorded.

第１の磁性層１８および第２の磁性層１９はギャップ部１５の磁界を最大化し、かつギャップ部１５以外の磁界を最小化するような形状および材料で構成されている。ギャップ部１５以外からの磁界漏洩を小さくするためには例えば特許文献１にあるように第１の磁極１６と第２の磁極１７のコア幅をそろえることが有効である（図１３参照）。さらに、近年の高面記録密度化に伴い、記録トラック幅は縮小し続けている（狭コア幅）。記録トラック幅を決定する記録ヘッドのコア幅を精度よく加工するためには、磁極先端を何らかの方法でトリミングする手法が用いられている。   The first magnetic layer 18 and the second magnetic layer 19 are configured with shapes and materials that maximize the magnetic field of the gap portion 15 and minimize the magnetic field other than the gap portion 15. In order to reduce magnetic field leakage from other than the gap portion 15, it is effective to align the core widths of the first magnetic pole 16 and the second magnetic pole 17 as described in Patent Document 1, for example (see FIG. 13). Furthermore, with the recent increase in surface recording density, the recording track width continues to shrink (narrow core width). In order to accurately process the core width of the recording head that determines the recording track width, a technique of trimming the magnetic pole tip by some method is used.

また、高速転送化に対応するため記録ヘッドには高周波記録時の記録電流に対する磁界応答を早くすることが求められる。例えば特許文献２には、磁極を組成の異なる複数のめっき層で構成した薄膜磁気ヘッドが示されている。この発明によると、ギャップ部から離れる方向（トレーリング方向）にめっき層の電気抵抗率を大きくする、または（かつ）飽和磁束密度を小さくすることで、磁界強度が強く、高周波特性に優れるとしている。
特開平７−２２５９１７号 特開２００１−６７６１５ Further, in order to cope with high-speed transfer, the recording head is required to accelerate the magnetic field response to the recording current during high frequency recording. For example, Patent Document 2 discloses a thin film magnetic head in which a magnetic pole is composed of a plurality of plating layers having different compositions. According to the present invention, by increasing the electrical resistivity of the plating layer in the direction away from the gap (trailing direction) or (and) decreasing the saturation magnetic flux density, the magnetic field strength is strong and the high frequency characteristics are excellent. .
JP-A-7-225917 JP 2001-67615 A

しかしながら、高周波記録に対する応答性のさらなる改善が求められている。   However, further improvement in responsiveness to high frequency recording is required.

本発明者が、記録ヘッドの周波数応答について計算機シミュレーションを用いて詳細に調べたところ、高周波応答を悪くしている原因として次の２点が明らかになった。
１．記録電流が反転する過程で渦電流が発生し、渦電流の作る磁界が記録磁界の変化を妨げるために高周波応答が悪くなる。
２．磁極内の磁束は磁性体表面を通り、第１の磁性層１８において表層（最外層）の磁束が飽和しているために磁界強度が弱くなり、結果的に周波数応答が悪くみえる。 When the present inventor examined the frequency response of the recording head in detail using computer simulation, the following two points became clear as the cause of the poor high frequency response.
1. An eddy current is generated in the process of reversing the recording current, and the magnetic field generated by the eddy current hinders the change of the recording magnetic field, so that the high frequency response is deteriorated.
2. The magnetic flux in the magnetic pole passes through the surface of the magnetic material, and the magnetic flux in the surface layer (outermost layer) is saturated in the first magnetic layer 18, so that the magnetic field strength becomes weak, and as a result, the frequency response seems to be poor.

上記１については、第１の磁性層１８に電気抵抗率の高い磁性材料を用いることで対応可能である。   The above 1 can be dealt with by using a magnetic material having a high electrical resistivity for the first magnetic layer 18.

一方、２については、第１の磁性層１８のギャップ部１５から離れた位置に飽和磁束密度の高い磁性材料を配置することにより磁極の飽和を抑えることができる。   On the other hand, with respect to 2, magnetic pole saturation can be suppressed by disposing a magnetic material having a high saturation magnetic flux density at a position away from the gap portion 15 of the first magnetic layer 18.

すなわち、本発明の第１の目的とするところは、高周波記録に対する応答性を改良した薄膜磁気ヘッドを提供するにある。   That is, a first object of the present invention is to provide a thin film magnetic head having improved responsiveness to high frequency recording.

上記目的を達成するため、本発明に係る薄膜磁気ヘッドは、磁気記録媒体に対する対向面の、磁気記録媒体に対する相対移動方向のトレーリング側およびリーディング側に、ギャップ部を挟んでそれぞれ配置された第１および第２の磁極部を有するとともに、該第１の磁極部を有する第１の磁性層と前記第２の磁極部を有する第２の磁性層とが互いに磁気的に連結された磁気コアと、少なくとも一部が前記第１および第２の磁性層の間に、該第１および第２の磁性層に対して絶縁された状態で設けられた薄膜コイルとを具備する薄膜磁気ヘッドにおいて、トレーリング側磁極となる前記第１の磁性層が複数の磁性層からなり、該複数の磁性層のうち最外層の磁性層の飽和磁束密度がその内側に隣接する磁性層の飽和磁束密度よりも大きいことを特徴とする。   In order to achieve the above object, a thin film magnetic head according to the present invention is arranged with a gap portion on the trailing side and the leading side in the relative movement direction with respect to the magnetic recording medium on the surface facing the magnetic recording medium, respectively. A magnetic core having first and second magnetic pole portions, and a first magnetic layer having the first magnetic pole portion and a second magnetic layer having the second magnetic pole portion magnetically coupled to each other; A thin film magnetic head comprising a thin film coil provided at least partially between the first and second magnetic layers and insulated from the first and second magnetic layers. The first magnetic layer serving as the ring-side magnetic pole is composed of a plurality of magnetic layers, and the saturation magnetic flux density of the outermost magnetic layer of the plurality of magnetic layers is larger than the saturation magnetic flux density of the magnetic layer adjacent to the inside thereof. thing And it features.

ところで、電気抵抗率の高い磁性材料は飽和磁束密度が高い傾向にあり、第１の磁性層にこの飽和磁束密度の高い磁性材料を用いると、ギャップ部以外に漏洩する磁界強度が強く、磁気記録媒体上に記録される隣接トラックの磁気記録情報を消去してしまう現象が生じやすい。   By the way, a magnetic material having a high electric resistivity tends to have a high saturation magnetic flux density. When this magnetic material having a high saturation magnetic flux density is used for the first magnetic layer, the magnetic field strength leaked to other than the gap portion is high, and magnetic recording is performed. The phenomenon that the magnetic recording information of the adjacent track recorded on the medium is erased easily occurs.

そこで、本発明の第２の目的は、高周波記録に対する応答性を改良するとともに、ギャップ部以外からの磁界の漏洩を少なくし、隣接トラックの磁気情報を消去してしまわない薄膜磁気ヘッドを提供する。   Therefore, a second object of the present invention is to provide a thin film magnetic head that improves the response to high frequency recording, reduces the leakage of magnetic field from other than the gap, and does not erase the magnetic information of the adjacent track. .

上記目的を達成するため、本発明に係る薄膜磁気ヘッドは、磁気記録媒体に対する対向面の、磁気記録媒体に対する相対移動方向のトレーリング側およびリーディング側に、ギャップ部を挟んでそれぞれ配置された第１および第２の磁極部を有するとともに、該第１の磁極部を有する第１の磁性層と前記第２の磁極部を有する第２の磁性層とが互いに磁気的に連結された磁気コアと、少なくとも一部が前記第１および第２の磁性層の間に、該第１および第２の磁性層に対して絶縁された状態で設けられた薄膜コイルとを具備する薄膜磁気ヘッドにおいて、前記第１の磁性層の前記磁気記録媒体に対して対向する対向面（浮上面）側であって、トレーリングエッジを含み該トレーリングエッジから前記ギャップ部には至らないまでの範囲の特定部位の磁性材料の飽和磁束密度が前記第１の磁性層の他の部位の飽和磁束密度よりも低いことを特徴とする。   In order to achieve the above object, a thin film magnetic head according to the present invention is arranged with a gap portion on the trailing side and the leading side in the relative movement direction with respect to the magnetic recording medium on the surface facing the magnetic recording medium, respectively. A magnetic core having first and second magnetic pole portions, and a first magnetic layer having the first magnetic pole portion and a second magnetic layer having the second magnetic pole portion magnetically coupled to each other; A thin film magnetic head comprising: a thin film coil provided at least partially between the first and second magnetic layers and insulated from the first and second magnetic layers; Identification of the first magnetic layer on the side facing the magnetic recording medium (floating surface) and including a trailing edge and not reaching the gap portion from the trailing edge Saturation magnetic flux density of the position of the magnetic material is equal to or lower than the saturation magnetic flux density of the other portions of said first magnetic layer.

このように、浮上面側の特定部位の飽和磁束密度を他の部位よりも低くすることによって、記録磁界を低下させずに、容易に、かつ効果的に、ギャップ部近傍以外からの漏れ磁界を抑制でき、隣接トラックの磁気情報を消去してしまわない薄膜磁気ヘッドを提供できる。特に、高記録密度化のために、磁気記録媒体のトラック密度が高密度化し、これに伴って磁気ヘッド側の浮上面付近の磁極部の幅（コア幅）が狭くなり、漏れ磁界によりイレーズが生じやすい狭コア幅の磁気ヘッドにおいて効果的である。   In this way, by reducing the saturation magnetic flux density of a specific part on the air bearing surface side from other parts, it is possible to easily and effectively reduce the leakage magnetic field from the vicinity of the gap without reducing the recording magnetic field. It is possible to provide a thin film magnetic head that can be suppressed and that does not erase magnetic information on adjacent tracks. In particular, in order to increase the recording density, the track density of the magnetic recording medium is increased, and accordingly, the width (core width) of the magnetic pole portion near the air bearing surface on the magnetic head side is reduced, and erasure is caused by the leakage magnetic field. This is effective in a magnetic head having a narrow core width that is likely to occur.

以上のように、本発明によれば、高周波記録に対する応答性を改良した薄膜磁気ヘッドを提供できる。   As described above, according to the present invention, it is possible to provide a thin film magnetic head with improved response to high frequency recording.

また、本発明によれば、高周波記録に対する応答性を改良するとともに、ギャップ部以外からの磁界の漏洩を少なくし、隣接トラックの磁気情報を消去してしまわない薄膜磁気ヘッドを提供できる。 Further, according to the present invention, it is possible to provide a thin film magnetic head that improves the response to high frequency recording, reduces the leakage of magnetic field from other than the gap, and does not erase the magnetic information of the adjacent track.

以下本発明の好適な実施例を添付図面に基づいて詳細に説明する。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

図１に複合型ＭＲヘッド３０のうちの誘導型記録ヘッド３２の部位を示す。本発明は、この記録ヘッド３２の部位の改良に係わるものであるので、記録ヘッド３２の部位のみを図示し、再生ヘッド（ＭＲヘッド）の部位の図示は省略する。なお、複合型でなく、誘導型記録再生ヘッドとしてそのまま用いることもできる。   FIG. 1 shows a portion of the inductive recording head 32 in the composite MR head 30. Since the present invention relates to the improvement of the part of the recording head 32, only the part of the recording head 32 is shown, and the part of the reproducing head (MR head) is not shown. It should be noted that the inductive recording / reproducing head can be used as it is instead of the composite type.

また、図１１〜図１３に示す従来のものと同一の部材は同一の符号をもって示し、その説明を省略する。   Also, the same members as those shown in FIGS. 11 to 13 are denoted by the same reference numerals, and the description thereof is omitted.

図１から明らかなように、本発明は、第１の磁性層（上部磁極）３６の膜構造の改良に係るものである。   As apparent from FIG. 1, the present invention relates to an improvement in the film structure of the first magnetic layer (upper magnetic pole) 36.

第１の磁性層３６は、ギャップ部１５側から、第１の層３８、第２の層４０、第３の層４２、第４の層４４の４層に形成されている。第１の層３８のみスパッタリングで形成され、第２〜第４の層は電解めっきによって形成されている。   The first magnetic layer 36 is formed in four layers of the first layer 38, the second layer 40, the third layer 42, and the fourth layer 44 from the gap 15 side. Only the first layer 38 is formed by sputtering, and the second to fourth layers are formed by electrolytic plating.

各層の構造は次の通りである。なお、次の構造は一例であって、これに限定されない。
第１層３８： FeCo ｔ＝0.15μｍ、Ｂｓ＝2.4Ｔ、ρ＝１５μΩｃｍ
第２層４０： CoNiFe ｔ＝0.55μｍ、Ｂｓ＝2.2Ｔ、ρ＝１５μΩｃｍ
第３層４２： Ni80Fe20 ｔ＝0.8μｍ、Ｂｓ＝1.0Ｔ、ρ＝２０μΩｃｍ
第３層４４： Ni50Fe50 ｔ＝2.0μｍ、Ｂｓ＝1.4Ｔ、ρ＝４０μΩｃｍ
なお、ｔは厚さを示す。 The structure of each layer is as follows. In addition, the following structure is an example and is not limited to this.
First layer 38: FeCo t = 0.15 μm, Bs = 2.4 T, ρ = 15 μΩcm
Second layer 40: CoNiFe t = 0.55 μm, Bs = 2.2 T, ρ = 15 μΩcm
Third layer 42: Ni80Fe20 t = 0.8 μm, Bs = 1.0 T, ρ = 20 μΩcm
Third layer 44: Ni50Fe50 t = 2.0 μm, Bs = 1.4 T, ρ = 40 μΩcm
In addition, t shows thickness.

ここに示した第１の磁性層３６の構造は、その最外層（第４層４４）に、隣接する第３層４２よりも飽和磁束密度（Ｂｓ）および電気抵抗率（ρ）が共に高い磁性材料（ＨｉＢｓ材料）を用いている。
各層の膜厚は膜成長速度、成膜時間により任意に制御可能である。 The structure of the first magnetic layer 36 shown here is such that the outermost layer (fourth layer 44) has a higher saturation magnetic flux density (Bs) and electric resistivity (ρ) than the adjacent third layer 42. Material (HiBs material) is used.
The film thickness of each layer can be arbitrarily controlled by the film growth rate and the film formation time.

また、数百ｎｍオーダーの狭コア幅（図１３参照）を精度よく形成するため、磁極先端にイオンミル加工（トリム加工）を施す。このとき、浮上面（磁気記録媒体への対向面）近くの最外層（第４層４４）の磁性材料も磁極先端部において同じに削り取られる。トリム量はイオンミル加工の加工時間により任意に設定できる。最外層４４の磁性材料の膜厚とトリム量を制御することにより、最外層４４の磁性材料の、磁気記録媒体に対する対向面に露出する膜厚を制御することができる。   Further, in order to accurately form a narrow core width of several hundred nm order (see FIG. 13), ion mill processing (trim processing) is applied to the tip of the magnetic pole. At this time, the magnetic material of the outermost layer (fourth layer 44) near the air bearing surface (the surface facing the magnetic recording medium) is also scraped off at the magnetic pole tip. The trim amount can be arbitrarily set according to the processing time of the ion mill processing. By controlling the film thickness and trim amount of the magnetic material of the outermost layer 44, the film thickness of the magnetic material of the outermost layer 44 exposed on the surface facing the magnetic recording medium can be controlled.

図２は、最外層４４の膜厚を変化させ、トリム量を一定（2.0μｍ）としたときの定常電流状態（ＤＣ）および高周波記録時（４００ＭＨｚ）のギャップ内部の平均磁界強度を示す。例えば、最外層４４の膜厚を2.5μｍとすれば、磁極先端部において2.0μｍだけトリミングされるから、最外層４４の磁性層は浮上面において0.5μｍの厚さだけ露出する。最外層４４の膜厚を2.0μｍとすると、最外層４４の浮上面における露出厚さはゼロとなる。最外層４４の膜厚が1.5μｍとすると、磁極先端部において最外層４４は全部削り取られ、さらに第３層４２も0.5μｍ削り取られることになる。   FIG. 2 shows the average magnetic field strength inside the gap in the steady current state (DC) and high frequency recording (400 MHz) when the thickness of the outermost layer 44 is changed and the trim amount is constant (2.0 μm). For example, if the thickness of the outermost layer 44 is 2.5 μm, trimming is performed by 2.0 μm at the magnetic pole tip, so that the magnetic layer of the outermost layer 44 is exposed by a thickness of 0.5 μm on the air bearing surface. When the thickness of the outermost layer 44 is 2.0 μm, the exposed thickness of the outermost layer 44 on the air bearing surface becomes zero. If the film thickness of the outermost layer 44 is 1.5 μm, the outermost layer 44 is entirely scraped off at the magnetic pole tip, and the third layer 42 is also scraped off by 0.5 μm.

図２からわかるように、ＤＣ磁界強度は、最外層４４の磁性材料の膜厚によらず（すなわち、最外層４４の浮上面への露出の有無にかかわりなく）ほぼ一定である。一方、図２に明白なように、高周波記録時の磁界強度は、最外層４４を形成しないとき（最外層４４の膜厚がゼロ、すなわち従来タイプのもの）に比較して、最外層４４を0.5μｍ以上形成することで約32,000Ａ／ｍ程度大きくなり、高周波記録特性が向上する。なお、最外層４４の膜厚を0.5μｍよりも大きく、例えば2.5μｍ程度に厚付けしても高周波記録時の磁界強度はそれ程大きくはならない。このように、第１の磁性層３６における最外層４４の膜厚は、0.5μｍ以上形成すると好適である。   As can be seen from FIG. 2, the DC magnetic field strength is substantially constant regardless of the thickness of the magnetic material of the outermost layer 44 (that is, regardless of whether or not the outermost layer 44 is exposed to the air bearing surface). On the other hand, as clearly shown in FIG. 2, the magnetic field strength at the time of high-frequency recording is such that the outermost layer 44 is not as thick as the outermost layer 44 is formed (the film thickness of the outermost layer 44 is zero, that is, the conventional type). By forming 0.5 μm or more, it increases by about 32,000 A / m and the high frequency recording characteristics are improved. Even if the outermost layer 44 is thicker than 0.5 μm, for example, about 2.5 μm, the magnetic field strength at the time of high-frequency recording does not increase that much. Thus, the outermost layer 44 in the first magnetic layer 36 is preferably formed to a thickness of 0.5 μm or more.

図３は、スキュー角度を１３度としたときの、隣接トラックにおける磁界強度の、最外層４４の膜厚に対する変化を示す。隣接トラックにおける漏洩磁界はその強度によっては既に磁気記録媒体上に記録された磁気記録情報を消去したり、弱めたり、乱したりするため小さい方がよい。図３から明らかなように、最外層４４のＨｉＢｓ材の膜厚が2.2μｍ（浮上面への露出厚さ0.2μｍ）を越えると漏洩磁界の強度が極端に強くなる。最外層４４の膜厚とトリム量との関係により、最外層４４の磁性層の浮上面への露出厚さが大きくなると隣接トラックへの漏洩磁界が大きくなるのであり、図３から、浮上面（磁気記録媒体との対向面）における最外層４４の露出厚さは、0.2μｍ以下で、最適には露出厚さがゼロとするのが好ましい。   FIG. 3 shows the change of the magnetic field strength in the adjacent track with respect to the film thickness of the outermost layer 44 when the skew angle is 13 degrees. The leakage magnetic field in the adjacent track is preferably small because the magnetic recording information already recorded on the magnetic recording medium is erased, weakened, or disturbed depending on its strength. As apparent from FIG. 3, when the thickness of the HiBs material of the outermost layer 44 exceeds 2.2 μm (thickness exposed to the air bearing surface 0.2 μm), the strength of the leakage magnetic field becomes extremely strong. Due to the relationship between the film thickness of the outermost layer 44 and the trim amount, the leakage magnetic field to the adjacent track increases as the exposed thickness of the magnetic layer of the outermost layer 44 on the air bearing surface increases. The exposed thickness of the outermost layer 44 on the surface facing the magnetic recording medium is preferably 0.2 μm or less, and optimally, the exposed thickness is preferably zero.

上記のように、最外層４４の飽和磁束密度（Ｂｓ）および電気抵抗率（ρ）が共にその内側の隣接する磁性層（第３の層４２）よりも大きい場合に効果が最大化されるが、計算機シミュレーションによると、最外層４４の磁性材料の飽和磁束密度をその内側の第３の層４２よりも大きくするだけである程度の効果のあることが確認された。なお、電気抵抗率を大きくした場合には、記録電流が反転する過程での渦電流の発生を抑止し、それにより高周波応答特性を向上させる。   As described above, the effect is maximized when the saturation magnetic flux density (Bs) and the electrical resistivity (ρ) of the outermost layer 44 are both larger than the adjacent magnetic layer (the third layer 42) inside. According to the computer simulation, it was confirmed that there is a certain effect only by making the saturation magnetic flux density of the magnetic material of the outermost layer 44 larger than that of the third layer 42 inside. When the electrical resistivity is increased, the generation of eddy currents in the process of reversing the recording current is suppressed, thereby improving the high frequency response characteristics.

上記実施例では、第１の磁性層３６の磁極先端部をトリミングして、高い飽和磁束密度の最外層４４を浮上面に露出させないか、あるいは露出量（厚さ）を少なくなるようにした。   In the above embodiment, the magnetic pole tip of the first magnetic layer 36 is trimmed so that the outermost layer 44 having a high saturation magnetic flux density is not exposed on the air bearing surface or the exposure amount (thickness) is reduced.

図４に示す実施例では、上記磁極先端部をトリミングせず、第１の磁性層３６の磁気記録媒体に対して対向する対向面（浮上面Ｘ）側であって、トレーリングエッジを含み該トレーリングエッジからギャップ部１５には至らないまでの範囲の特定部位Ｙの磁性材料の飽和磁束密度が最外層４４の磁性層の飽和磁束密度よりも低くなるようにした。このように、浮上面側の特定部位Ｙの飽和磁束密度を低くすることにより、浮上面のトレーリング側における漏洩磁界が小さくなり、イレーズの発生を防止できる。一方最外層４４自体の飽和磁束密度は大きいから、記録磁界の強さは低下しないという利点がある。   In the embodiment shown in FIG. 4, the magnetic pole tip is not trimmed, and the first magnetic layer 36 is on the opposite surface (floating surface X) side facing the magnetic recording medium and includes a trailing edge. The saturation magnetic flux density of the magnetic material in the specific portion Y in the range from the trailing edge to the gap portion 15 was made lower than the saturation magnetic flux density of the magnetic layer of the outermost layer 44. Thus, by reducing the saturation magnetic flux density of the specific part Y on the air bearing surface side, the leakage magnetic field on the trailing side of the air bearing surface is reduced, and the occurrence of erasure can be prevented. On the other hand, since the saturation magnetic flux density of the outermost layer 44 itself is large, there is an advantage that the strength of the recording magnetic field does not decrease.

上記特定部位Ｙの飽和磁束密度を低くするには、特定部位Ｙに、ＮｉやＭｏ等の金属イオンを注入すればよい。イオン照射量等の条件やイオンの種類を変えることにより、イオンが注入される深さや、飽和磁束密度の大きさを変えることができる。さらに、浮上面Ｘにおいてイオンを注入する範囲も自由に変えることができ、浮上面Ｘにおける磁極の形状や膜厚に応じたチューニングが容易に行える。イオン注入の工程は浮上面加工後であればどの時点で適用してもよいため、プロセスの自由度が大きい。   In order to reduce the saturation magnetic flux density of the specific part Y, metal ions such as Ni and Mo may be implanted into the specific part Y. By changing the conditions such as the ion irradiation amount and the type of ions, the depth at which ions are implanted and the saturation magnetic flux density can be changed. Further, the ion implantation range on the air bearing surface X can be freely changed, and tuning according to the shape and film thickness of the magnetic pole on the air bearing surface X can be easily performed. Since the ion implantation process may be applied at any time after the air bearing surface is processed, the degree of freedom of the process is large.

ところで、Ｂｓ（飽和磁束密度）を低下させる範囲が浮上面Ｘからみて深すぎると、トレーリング側全体を低Ｂｓ化するのと近い状態になり、記録磁界の低下を招くおそれがある。したがって、Ｂｓを低下させる範囲は、浮上面Ｘからみた深さが深くとも３００ｎｍ、できれば２００ｎｍ程度とすることが望ましい。   By the way, if the range in which Bs (saturation magnetic flux density) is reduced is too deep when viewed from the air bearing surface X, the entire trailing side becomes close to lowering Bs, which may cause a decrease in recording magnetic field. Therefore, it is desirable that the range in which Bs is lowered is 300 nm at most when viewed from the air bearing surface X, preferably about 200 nm.

図５は、第１の磁性層３６をすべて単一の高Ｂｓ磁性材料で形成した後、浮上面からイオン注入を行い、トレーリングエッジ付近の特定部位Ｙのみを低Ｂｓ化した実施例である。磁極の大部分を高Ｂｓ膜とすることができ、ギャップ磁界（記録磁界）を増大させることができる上に、低Ｂｓ材料を使う必要がないため、プロセスを簡略することができ、コストダウンをすることができる。   FIG. 5 shows an embodiment in which after the first magnetic layer 36 is formed of a single high Bs magnetic material, ions are implanted from the air bearing surface, and only a specific portion Y near the trailing edge is reduced in Bs. . Since most of the magnetic poles can be made of a high Bs film, the gap magnetic field (recording magnetic field) can be increased, and since it is not necessary to use a low Bs material, the process can be simplified and the cost can be reduced. can do.

図６、図７はそれぞれ別の構成の薄膜磁気ヘッド３０に適用した実施例である。イオン注入はどの段階でも行えるので、ウエハプロセスに関係なく適用でき、どんな構成のヘッドに対しても適用できる。   FIGS. 6 and 7 show an embodiment applied to a thin film magnetic head 30 having a different configuration. Since ion implantation can be performed at any stage, it can be applied regardless of the wafer process, and can be applied to a head having any configuration.

図８は、第１の磁性層３６として、ギャップ部１５側に高Ｂｓ磁性材料層４６を形成し、トレーリング側にＢｓ1.0Ｔ程度の低Ｂｓ磁性材料層４７を形成した従来タイプの薄膜磁気ヘッド３０に適用した例を示す。そして、やはり浮上面Ｘからイオン注入を行い、トレーリングエッジ付近の特定部位Ｙのみをさらに低Ｂｓ化している。図９に、図８の実施例のものにおいて、特定部位ＹのＢｓ値を変化させた場合のトレーリング側の漏れ磁界の変化を示す。なお、特定部位のＢｓ値を1.0Ｔに設定した場合の漏れ磁界の強さを１として、これに対する相対値で示している。同様に図１０には記録磁界の変化を示した。図９、図１０から明らかなように、低Ｂｓ磁性材料層４７全体のＢｓ値を小さくしていくと、記録磁界も低下してしまうが、特定部位ＹのみのＢｓ値を低下させていっても記録磁界の低下は起こらない。一方、トレーリング側の漏れ磁界は低下させることができる。   FIG. 8 shows a conventional type thin film magnetic material in which a high Bs magnetic material layer 46 is formed on the gap portion 15 side and a low Bs magnetic material layer 47 of about Bs 1.0 T is formed on the trailing side as the first magnetic layer 36. An example applied to the head 30 is shown. Also, ion implantation is performed from the air bearing surface X, and only the specific portion Y near the trailing edge is further reduced in Bs. FIG. 9 shows changes in the leakage magnetic field on the trailing side when the Bs value of the specific portion Y is changed in the embodiment of FIG. In addition, the intensity of the leakage magnetic field when the Bs value of the specific part is set to 1.0T is set to 1, and the relative value is shown. Similarly, FIG. 10 shows changes in the recording magnetic field. As is clear from FIGS. 9 and 10, when the Bs value of the entire low Bs magnetic material layer 47 is decreased, the recording magnetic field is also decreased, but the Bs value of only the specific portion Y is decreased. However, the recording magnetic field does not decrease. On the other hand, the leakage magnetic field on the trailing side can be reduced.

なお、上記薄膜磁気ヘッドを搭載して磁気記録装置（図示せず）を構成できる。   A magnetic recording apparatus (not shown) can be configured by mounting the thin film magnetic head.

（付記１）
磁気記録媒体に対する対向面の、磁気記録媒体に対する相対移動方向のトレーリング側およびリーディング側に、ギャップ部を挟んでそれぞれ配置された第１および第２の磁極部を有するとともに、該第１の磁極部を有する第１の磁性層と前記第２の磁極部を有する第２の磁性層とが互いに磁気的に連結された磁気コアと、少なくとも一部が前記第１および第２の磁性層の間に、該第１および第２の磁性層に対して絶縁された状態で設けられた薄膜コイルとを具備する薄膜磁気ヘッドにおいて、
トレーリング側磁極となる前記第１の磁性層が複数の磁性層からなり、該複数の磁性層のうち最外層の磁性層の飽和磁束密度がその内側に隣接する磁性層の飽和磁束密度よりも大きいことを特徴とする薄膜磁気ヘッド。
（付記２）
付記１記載の薄膜磁気ヘッドにおいて、前記第１の磁性層の、前記最外層よりも内側の磁性層がさらに複数の磁性層からなり、該内側の複数の磁性層が内層側から外層側に向けて順次飽和磁束密度が低くなる材料で形成されていることを特徴とする薄膜磁気ヘッド。
（付記３）
付記１または２記載の薄膜磁気ヘッドにおいて、前記第１の磁性層の前記磁気記録媒体に対して対向する対向面側であって、トレーリングエッジを含み該トレーリングエッジから前記ギャップ部には至らないまでの範囲の特定部位の磁性材料の飽和磁束密度が前記最外層の磁性層の飽和磁束密度よりも低いことを特徴とする薄膜磁気ヘッド。
（付記４）
付記３記載の薄膜磁気ヘッドにおいて、前記特定部位の前記対向面からの深さが３００ｎｍ以下であることを特徴とする薄膜磁気ヘッド。
（付記５）
付記３または４記載の薄膜磁気ヘッドにおいて、前記特定部位に金属イオンが注入されることによって、該特定部位の飽和磁束密度が他の部位の飽和磁束密度よりも低く形成されていることを特徴とする薄膜磁気ヘッド。
（付記６）
付記１〜５いずれか１項記載の薄膜磁気ヘッドにおいて、前記最外層の磁性層の膜厚が０．５μｍ以上であることを特徴とする薄膜磁気ヘッド。
（付記７）
付記１〜６いずれか１項記載の薄膜磁気ヘッドにおいて、前記最外層の磁性層の、前記磁気記録媒体に対する対向面に露出する膜厚が０．２μｍ以下であることを特徴とする薄膜磁気ヘッド。
（付記８）
付記１〜６いずれか１項記載の薄膜磁気ヘッドにおいて、前記最外層の磁性層が、前記磁気記録媒体に対する対向面に露出しないことを特徴とする薄膜磁気ヘッド。
（付記９）
付記１〜８いずれか１項記載の薄膜磁気ヘッドにおいて、前記最外層の磁性層の電気抵抗率がその内側に隣接する磁性層の電気抵抗率よりも大きいことを特徴とする薄膜磁気ヘッド。
（付記１０）
磁気記録媒体に対する対向面の、磁気記録媒体に対する相対移動方向のトレーリング側およびリーディング側に、ギャップ部を挟んでそれぞれ配置された第１および第２の磁極部を有するとともに、該第１の磁極部を有する第１の磁性層と前記第２の磁極部を有する第２の磁性層とが互いに磁気的に連結された磁気コアと、少なくとも一部が前記第１および第２の磁性層の間に、該第１および第２の磁性層に対して絶縁された状態で設けられた薄膜コイルとを具備する薄膜磁気ヘッドにおいて、
前記第１の磁性層の前記磁気記録媒体に対して対向する対向面側であって、トレーリングエッジを含み該トレーリングエッジから前記ギャップ層には至らないまでの範囲の特定部位の磁性材料の飽和磁束密度が前記第１の磁性層の他の部位の飽和磁束密度よりも低いことを特徴とする薄膜磁気ヘッド。
（付記１１）
付記１０記載の薄膜磁気ヘッドにおいて、前記特定部位の前記対向面からの深さが３００ｎｍ以下であることを特徴とする薄膜磁気ヘッド。
（付記１２）
付記１０または１１記載の薄膜磁気ヘッドにおいて、前記特定部位に金属イオンが注入されることによって、該特定部位の飽和磁束密度が他の部位の飽和磁束密度よりも低く形成されていることを特徴とする薄膜磁気ヘッド。
（付記１３）
付記１〜１２いずれか１項記載の薄膜磁気ヘッドを搭載してなる磁気記憶装置。 (Appendix 1)
The first magnetic pole has first and second magnetic pole portions disposed on the trailing side and the leading side in the relative movement direction with respect to the magnetic recording medium, with the gap portion interposed therebetween, on the surface facing the magnetic recording medium, respectively. A magnetic core in which a first magnetic layer having a portion and a second magnetic layer having a second magnetic pole portion are magnetically coupled to each other, and at least a portion between the first and second magnetic layers A thin film magnetic head comprising: a thin film coil provided in a state of being insulated from the first and second magnetic layers;
The first magnetic layer serving as a trailing-side magnetic pole is composed of a plurality of magnetic layers, and the saturation magnetic flux density of the outermost magnetic layer of the plurality of magnetic layers is higher than the saturation magnetic flux density of the magnetic layer adjacent to the inside thereof. A thin film magnetic head that is large.
(Appendix 2)
The thin film magnetic head according to appendix 1, wherein an inner magnetic layer of the first magnetic layer further than the outermost layer further includes a plurality of magnetic layers, and the plurality of inner magnetic layers are directed from the inner layer side toward the outer layer side. A thin film magnetic head, characterized in that it is formed of a material that gradually decreases in saturation magnetic flux density.
(Appendix 3)
The thin film magnetic head according to appendix 1 or 2, wherein the first magnetic layer is on a side facing the magnetic recording medium and includes a trailing edge and reaches the gap portion from the trailing edge. A thin film magnetic head characterized in that a saturation magnetic flux density of a magnetic material in a specific region in a range up to no is lower than a saturation magnetic flux density of the outermost magnetic layer.
(Appendix 4)
The thin film magnetic head according to appendix 3, wherein the depth of the specific portion from the facing surface is 300 nm or less.
(Appendix 5)
The thin film magnetic head according to appendix 3 or 4, wherein metal ions are implanted into the specific part so that a saturation magnetic flux density of the specific part is lower than a saturation magnetic flux density of another part. Thin film magnetic head.
(Appendix 6)
The thin film magnetic head according to any one of appendices 1 to 5, wherein the outermost magnetic layer has a thickness of 0.5 μm or more.
(Appendix 7)
7. The thin film magnetic head according to any one of claims 1 to 6, wherein a thickness of the outermost magnetic layer exposed to a surface facing the magnetic recording medium is 0.2 μm or less. .
(Appendix 8)
The thin film magnetic head according to any one of appendices 1 to 6, wherein the outermost magnetic layer is not exposed on a surface facing the magnetic recording medium.
(Appendix 9)
9. The thin film magnetic head according to any one of claims 1 to 8, wherein an electrical resistivity of the outermost magnetic layer is larger than an electrical resistivity of a magnetic layer adjacent to the innermost magnetic layer.
(Appendix 10)
The first magnetic pole has first and second magnetic pole portions disposed on the trailing side and the leading side in the relative movement direction with respect to the magnetic recording medium, with the gap portion interposed therebetween, on the surface facing the magnetic recording medium, respectively. A magnetic core in which a first magnetic layer having a portion and a second magnetic layer having a second magnetic pole portion are magnetically coupled to each other, and at least a portion between the first and second magnetic layers A thin film magnetic head comprising: a thin film coil provided in a state of being insulated from the first and second magnetic layers;
The magnetic material of a specific part on the opposite surface side of the first magnetic layer facing the magnetic recording medium and including a trailing edge and not reaching the gap layer from the trailing edge. A thin film magnetic head, characterized in that a saturation magnetic flux density is lower than a saturation magnetic flux density in other portions of the first magnetic layer.
(Appendix 11)
The thin film magnetic head according to claim 10, wherein a depth of the specific portion from the facing surface is 300 nm or less.
(Appendix 12)
The thin film magnetic head according to appendix 10 or 11, characterized in that the saturation magnetic flux density of the specific part is formed lower than the saturation magnetic flux density of the other part by implanting metal ions into the specific part. Thin film magnetic head.
(Appendix 13)
A magnetic storage device comprising the thin film magnetic head according to any one of appendices 1 to 12.

第１の磁性層の最外層に飽和磁束密度の高い磁性層を形成した磁気ヘッドの断面図、Sectional drawing of the magnetic head which formed the magnetic layer with a high saturation magnetic flux density in the outermost layer of the 1st magnetic layer, 図１に示す磁気ヘッドの最外層の磁性層の厚さとギャップ部の平均磁界強度との関係を示すグラフ、1 is a graph showing the relationship between the thickness of the outermost magnetic layer of the magnetic head shown in FIG. 同磁気ヘッドの最外層の厚さと隣接トラックへの漏洩磁界強度との関係を示すグラフ、A graph showing the relationship between the thickness of the outermost layer of the magnetic head and the leakage magnetic field strength to the adjacent track, 図１に示す磁気ヘッドの特定部位にイオン注入して飽和磁束密度を低下させた磁気ヘッドの断面図、1 is a cross-sectional view of a magnetic head in which a saturation magnetic flux density is lowered by ion implantation into a specific portion of the magnetic head shown in FIG. それぞれ構造の異なる磁気ヘッドの特定部位にイオン注入して飽和磁束密度を低下させた磁気ヘッドの断面図、A cross-sectional view of a magnetic head in which saturation magnetic flux density is lowered by ion implantation into specific parts of magnetic heads having different structures, それぞれ構造の異なる磁気ヘッドの特定部位にイオン注入して飽和磁束密度を低下させた磁気ヘッドの断面図、A cross-sectional view of a magnetic head in which saturation magnetic flux density is lowered by ion implantation into specific parts of magnetic heads having different structures, それぞれ構造の異なる磁気ヘッドの特定部位にイオン注入して飽和磁束密度を低下させた磁気ヘッドの断面図、A cross-sectional view of a magnetic head in which saturation magnetic flux density is lowered by ion implantation into specific parts of magnetic heads having different structures, それぞれ構造の異なる磁気ヘッドの特定部位にイオン注入して飽和磁束密度を低下させた磁気ヘッドの断面図、A cross-sectional view of a magnetic head in which saturation magnetic flux density is lowered by ion implantation into specific parts of magnetic heads having different structures, 図８に示す磁気ヘッドのトレーリング側の飽和磁束密度とトレーリング側の漏れ磁界の相対的大きさを示すグラフ、The graph which shows the relative magnitude | size of the saturation magnetic flux density on the trailing side of the magnetic head shown in FIG. 8, and the leakage magnetic field on the trailing side, 同磁気ヘッドのトレーリング側の飽和磁束密度に対する記録磁界の相対的大きさを示すグラフ、A graph showing the relative magnitude of the recording magnetic field with respect to the saturation magnetic flux density on the trailing side of the magnetic head, 従来の複合型ＭＲヘッドの平面図、Plan view of a conventional composite MR head, 図１１のＡ−Ａ線断面図、AA line sectional view of FIG. 図１３は図１１の磁気ヘッドの浮上面の形状を示す説明図。13 is an explanatory view showing the shape of the air bearing surface of the magnetic head of FIG.

符号の説明Explanation of symbols

１５ ギャップ部
３０ ＭＲヘッド
３２ 記録ヘッド
３６ 第１の磁性層（上部磁極）
３８ 第１の層
４０ 第２の層
４２ 第３の層
４４ 第４の層
４６、４７ 磁性材料層 15 Gap 30 MR head 32 Recording head 36 First magnetic layer (upper magnetic pole)
38 1st layer 40 2nd layer 42 3rd layer 44 4th layer 46, 47 Magnetic material layer

Claims (4)

磁気記録媒体に対する対向面の、磁気記録媒体に対する相対移動方向のトレーリング側およびリーディング側に、ギャップ部を挟んでそれぞれ配置された第１および第２の磁極部を有するとともに、該第１の磁極部を有する第１の磁性層と前記第２の磁極部を有する第２の磁性層とが互いに磁気的に連結された磁気コアと、少なくとも一部が前記第１および第２の磁性層の間に、該第１および第２の磁性層に対して絶縁された状態で設けられた薄膜コイルとを具備する薄膜磁気ヘッドにおいて、
トレーリング側磁極となる前記第１の磁性層が複数の磁性層からなり、該複数の磁性層のうち最外層の磁性層の飽和磁束密度がその内側に隣接する磁性層の飽和磁束密度よりも大きいことを特徴とする薄膜磁気ヘッド。 The first magnetic pole has first and second magnetic pole portions disposed on the trailing side and the leading side in the relative movement direction with respect to the magnetic recording medium, with the gap portion interposed therebetween, on the surface facing the magnetic recording medium, respectively. A magnetic core in which a first magnetic layer having a portion and a second magnetic layer having a second magnetic pole portion are magnetically coupled to each other, and at least a portion between the first and second magnetic layers A thin film magnetic head comprising: a thin film coil provided in a state of being insulated from the first and second magnetic layers;
The first magnetic layer serving as a trailing-side magnetic pole is composed of a plurality of magnetic layers, and the saturation magnetic flux density of the outermost magnetic layer of the plurality of magnetic layers is higher than the saturation magnetic flux density of the magnetic layer adjacent to the inside thereof. A thin film magnetic head that is large. 請求項１記載の薄膜磁気ヘッドにおいて、前記第１の磁性層の、前記最外層よりも内側の磁性層がさらに複数の磁性層からなり、該内側の複数の磁性層が内層側から外層側に向けて順次飽和磁束密度が低くなる材料で形成されていることを特徴とする薄膜磁気ヘッド。   2. The thin film magnetic head according to claim 1, wherein a magnetic layer inside the outermost layer of the first magnetic layer further includes a plurality of magnetic layers, and the plurality of magnetic layers inside the first magnetic layer extends from the inner layer side to the outer layer side. A thin film magnetic head, characterized in that it is formed of a material that gradually decreases in saturation magnetic flux density. 磁気記録媒体に対する対向面の、磁気記録媒体に対する相対移動方向のトレーリング側およびリーディング側に、ギャップ部を挟んでそれぞれ配置された第１および第２の磁極部を有するとともに、該第１の磁極部を有する第１の磁性層と前記第２の磁極部を有する第２の磁性層とが互いに磁気的に連結された磁気コアと、少なくとも一部が前記第１および第２の磁性層の間に、該第１および第２の磁性層に対して絶縁された状態で設けられた薄膜コイルとを具備する薄膜磁気ヘッドにおいて、
前記第１の磁性層の前記磁気記録媒体に対して対向する対向面側であって、トレーリングエッジを含み該トレーリングエッジから前記ギャップ層には至らないまでの範囲の特定部位の磁性材料の飽和磁束密度が前記第１の磁性層の他の部位の飽和磁束密度よりも低いことを特徴とする薄膜磁気ヘッド。 The first magnetic pole has first and second magnetic pole portions disposed on the trailing side and the leading side in the relative movement direction with respect to the magnetic recording medium, with the gap portion interposed therebetween, on the surface facing the magnetic recording medium, respectively. A magnetic core in which a first magnetic layer having a portion and a second magnetic layer having a second magnetic pole portion are magnetically coupled to each other, and at least a portion between the first and second magnetic layers A thin film magnetic head comprising: a thin film coil provided in a state of being insulated from the first and second magnetic layers;
The magnetic material of a specific part on the opposite surface side of the first magnetic layer facing the magnetic recording medium and including a trailing edge and not reaching the gap layer from the trailing edge. A thin film magnetic head, characterized in that a saturation magnetic flux density is lower than a saturation magnetic flux density in other portions of the first magnetic layer. 請求項１〜３いずれか１項記載の薄膜磁気ヘッドを搭載してなる磁気記憶装置。   A magnetic storage device comprising the thin film magnetic head according to claim 1.
JP2003273574A 2003-07-11 2003-07-11 Thin film magnetic head Pending JP2005032396A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7505226B2 (en) * 2004-05-28 2009-03-17 Hitachi Global Storage Technologies Netherlands Bv Method and apparatus for providing a pole tip structure having a shape for preventing over saturation of the pole tip structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7505226B2 (en) * 2004-05-28 2009-03-17 Hitachi Global Storage Technologies Netherlands Bv Method and apparatus for providing a pole tip structure having a shape for preventing over saturation of the pole tip structure

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