JP2005012192A - Ultrasonic motor using laminated piezoelectric element, electronic apparatus therewith, and manufacturing method thereof - Google Patents

Ultrasonic motor using laminated piezoelectric element, electronic apparatus therewith, and manufacturing method thereof Download PDF

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JP2005012192A
JP2005012192A JP2004150302A JP2004150302A JP2005012192A JP 2005012192 A JP2005012192 A JP 2005012192A JP 2004150302 A JP2004150302 A JP 2004150302A JP 2004150302 A JP2004150302 A JP 2004150302A JP 2005012192 A JP2005012192 A JP 2005012192A
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electrodes
laminated piezoelectric
piezoelectric element
electrode
ultrasonic motor
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JP4628017B2 (en
JP2005012192A5 (en
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Akihiro Iino
朗弘 飯野
Seiji Watanabe
聖士 渡辺
Hironobu Ito
浩信 伊藤
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Seiko Instruments Inc
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Seiko Instruments Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor which is driven by a low voltage, produced with a small size, and has a high output at a low cost by using laminated piezoelectric elements, and also to provide electric apparatuses therewith and a manufacturing method thereof. <P>SOLUTION: This manufacturing method of laminated piezoelectric elements comprises the processes of: laminating an identical piezoelectric sheet 9 having a plurality of an electrode group that consists of different electrodes 10, 11, 12, and 13 in such a manner that each is made to be relatively shifted to one another to in-plane direction on the surface; cutting the laminated piezoelectric sheets 9 so as to include the electrode group; and mounting external electrodes 17a, 17b, 17c, 17d, 17e, 17f, 17g, and 17h to short-circuit respective internal electrodes of the laminated piezoelectric sheets 9 on the cut planes. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、積層圧電素子を用いた超音波モータ並びにそれを用いた電子機器及びステージ、その製造方法に関する。   The present invention relates to an ultrasonic motor using laminated piezoelectric elements, an electronic device and a stage using the same, and a method for manufacturing the same.

弾性体の共振モードを利用した超音波モータは制御性に優れ、近年特に精密位置決め用アクチュエータとしても注目されている。特に、各種ステージ用のアクチュエータとしてはリニヤ型の超音波モータが要求される場合が多く、多くのタイプが提案され研究されている。その中でも、矩形板の縦（伸縮）振動と屈曲振動の合成振動を利用した超音波モータは様々なものが研究されている（例えば、特許文献１参照。）。   An ultrasonic motor using the resonance mode of an elastic body has excellent controllability, and has recently attracted attention as a precision positioning actuator in recent years. In particular, linear actuators are often required as actuators for various stages, and many types have been proposed and studied. Among them, various ultrasonic motors using a combined vibration of a longitudinal (extension / contraction) vibration and a bending vibration of a rectangular plate have been studied (for example, see Patent Document 1).

これらの中でも、例えば特許文献１に示す様に、矩形状の圧電素子単板を厚み方向に分極処理すると共に４分割された電極を設け、対角と成る電極を組とし、一組の電極に駆動信号を印加することで圧電素子からなる振動体に縦振動と屈曲振動を励振し、これと接する移動体を駆動する原理のものは様々な用途に実用化も進められている。
特許２９８０５４１号公報（第７−８頁、第１図） Among these, as shown in Patent Document 1, for example, a rectangular piezoelectric element single plate is polarized in the thickness direction, and four divided electrodes are provided. The diagonal electrodes are combined into a set of electrodes. The principle of driving a moving body in contact with a vibrating body composed of a piezoelectric element by applying a driving signal to drive longitudinal vibration and bending vibration has been put into practical use for various purposes.
Japanese Patent No. 2980541 (pages 7-8, FIG. 1)

しかしながら従来の構造では振動体の駆動に極めて高い電圧を必要とし、大きな昇圧回路を必要とする為、駆動回路の大型化、複雑化を招き駆動回路の価格も高価なものになってしまった。そしてこの場合、小型な機器、特にバッテリーで駆動される用途への適用は難しかった。   However, the conventional structure requires a very high voltage for driving the vibrating body, and requires a large booster circuit, which increases the size and complexity of the drive circuit and makes the drive circuit expensive. In this case, it is difficult to apply to a small device, particularly a battery-driven application.

また、振動体の構造としては圧電素子の厚みが薄いと十分な出力が得られないと共に、機械的強度も低く破損につながる恐れもあった。逆に厚みを厚くすると分極電圧が極めて高く、製造プロセスが複雑になる等の問題があった。そして、本構成では圧電素子の圧電横効果を用いているために大きな出力が得られなかった。   Further, as the structure of the vibrating body, if the thickness of the piezoelectric element is thin, sufficient output cannot be obtained, and mechanical strength is low, which may lead to damage. On the other hand, when the thickness is increased, the polarization voltage is extremely high, and the manufacturing process becomes complicated. In this configuration, since the piezoelectric lateral effect of the piezoelectric element is used, a large output cannot be obtained.

そこで、本発明の第１の態様は、複数の異なる電極からなる電極群を複数有する同一の圧電シートを面内方向に位置をずらして積層する工程と、前記積層された圧電シートを前記電極群が含まれる様に切断する工程と、前記切断面において前記各圧電シートの界面に設けられた内部電極を短絡する外部電極を設ける工程を有する積層圧電素子の製造方法にある。   In view of this, the first aspect of the present invention includes a step of laminating the same piezoelectric sheet having a plurality of electrode groups composed of a plurality of different electrodes while shifting the position in the in-plane direction, and the laminated piezoelectric sheet as the electrode group. And a step of providing an external electrode for short-circuiting the internal electrode provided at the interface of each piezoelectric sheet on the cut surface.

本発明の第２の態様は、複数の圧電シートを積層して構成される積層圧電素子または前記積層圧電素子に設けられた接触部材と接する移動体を駆動する超音波モータであって、前記積層圧電素子は、電気的に短絡された複数の電極が設けられる少なくとも一つの圧電シートを有する超音波モータにある。   According to a second aspect of the present invention, there is provided an ultrasonic motor for driving a laminated piezoelectric element formed by laminating a plurality of piezoelectric sheets or a moving body in contact with a contact member provided on the laminated piezoelectric element. The piezoelectric element is in an ultrasonic motor having at least one piezoelectric sheet provided with a plurality of electrically shorted electrodes.

本発明の第３の態様は、第２の態様において、前記電気的に短絡された複数の電極を共通電極とし、他の電極のうち幾つかを第一の電極群とし、残りを第二の電極群とし、前記共通電極と前記第一の電極群もしくは前記第二の電極群の何れか一方に駆動信号を加えることで前記移動体を駆動することを特徴とする超音波モータにある。   According to a third aspect of the present invention, in the second aspect, the plurality of electrically shorted electrodes are common electrodes, some of the other electrodes are first electrode groups, and the rest are second electrodes. In the ultrasonic motor, the movable body is driven by applying a drive signal to the common electrode and either the first electrode group or the second electrode group.

本発明の第４の態様は、第２の態様において、前記電気的に短絡された複数の電極を共通電極とし、他の電極のうち幾つかを第一の電極群とし、残りを第二の電極群とし、前記共通電極と前記第一の電極群に加える駆動信号と前記共通電極と前記第二の電極群の間に加える駆動信号の位相を変えて前記移動体を駆動することを特徴とする超音波モータにある。   According to a fourth aspect of the present invention, in the second aspect, the plurality of electrically shorted electrodes are common electrodes, some of the other electrodes are first electrode groups, and the rest are second electrodes. The movable body is driven by changing a phase of a drive signal applied to the common electrode and the first electrode group and a drive signal applied between the common electrode and the second electrode group. There is an ultrasonic motor.

本発明の第５の態様は、第２から４のいずれかの態様の超音波モータを備えた電子機器にある。   According to a fifth aspect of the present invention, there is provided an electronic apparatus including the ultrasonic motor according to any one of the second to fourth aspects.

本発明の第６の態様は、第２から４のいずれかの態様の超音波モータを備えたステージにある。   A sixth aspect of the present invention is a stage including the ultrasonic motor according to any one of the second to fourth aspects.

本発明によれば、複数の異なる電極からなる電極群を複数有する圧電シートを面内方向に位置をずらして積層する工程と、積層された圧電シートを電極群が含まれる様に切断する工程と、切断面において圧電シートの中で面内方向に対して同一位置にある圧電シートの電極を短絡する外部電極を設ける工程を有することにより、単一の圧電シートを用意し積層時の工夫のみで複雑な電極、即ち複数の電極を有する積層圧電素子が作製できる為、プロセスが簡単であると共に大幅な工数の低減が出来、製造コストを大幅に下げることが出来ると共に小型な積層圧電素子も作製可能となる。   According to the present invention, a step of laminating a piezoelectric sheet having a plurality of electrode groups composed of a plurality of different electrodes while shifting the position in the in-plane direction, and a step of cutting the laminated piezoelectric sheet so that the electrode group is included. By providing an external electrode that short-circuits the electrodes of the piezoelectric sheet at the same position in the in-plane direction of the piezoelectric sheet on the cut surface, a single piezoelectric sheet is prepared and only the device at the time of lamination is used. Since it is possible to manufacture a complex piezoelectric element, that is, a multilayer piezoelectric element having a plurality of electrodes, the process is simple, the man-hours can be greatly reduced, the manufacturing cost can be greatly reduced, and a small multilayer piezoelectric element can also be manufactured. It becomes.

さらに、積層された圧電シートの内、少なくとも一つの圧電シートに設けられた電極を電気的に短絡して使用することにより、ＧＮＤとなる電極を確保できる為、複雑な電極、即ち複数の電極を有する積層圧電素子によるアクチュエータが実現できる。   Furthermore, since the electrodes provided on at least one piezoelectric sheet among the laminated piezoelectric sheets are electrically short-circuited and used so that a GND electrode can be secured, a complex electrode, that is, a plurality of electrodes can be formed. An actuator using a laminated piezoelectric element can be realized.

また、この積層圧電素子もしくは積層圧電素子に設けられた接触部材と接する移動体を駆動することで超音波モータが実現できる。   In addition, an ultrasonic motor can be realized by driving the laminated piezoelectric element or a moving body in contact with a contact member provided on the laminated piezoelectric element.

さらに、電気的に短絡された電極を共通電極とし、他の電極のうち幾つかを第一の電極群とし、残りを第二の電極群とし、共通電極と第一の電極群もしくは第二の電極群の何れか一方に駆動信号を加えることにより、積層圧電素子に発生する二つの振動の位相を逆転できる為、移動体の移動方向を変えられる。   Furthermore, the electrically shorted electrode is a common electrode, some of the other electrodes are a first electrode group, the rest are a second electrode group, and the common electrode and the first electrode group or the second electrode group By applying a drive signal to one of the electrode groups, the phase of the two vibrations generated in the laminated piezoelectric element can be reversed, so that the moving direction of the moving body can be changed.

また、電気的に短絡された電極を共通電極とし、他の電極のうち幾つかを第一の電極群とし、残りを第二の電極群とし、共通電極と第一の電極群に加える駆動信号と共通電極と第二の電極群の間に加える駆動信号の位相を変えることにより、積層圧電素子に発生する二つの振動の位相を逆転できる為、移動体の移動方向を変えられる。   In addition, an electrically shorted electrode is used as a common electrode, some of the other electrodes are used as a first electrode group, and the rest are used as a second electrode group. The drive signal is applied to the common electrode and the first electrode group. By changing the phase of the drive signal applied between the common electrode and the second electrode group, the phase of the two vibrations generated in the laminated piezoelectric element can be reversed, so that the moving direction of the moving body can be changed.

また、これらの積層圧電素子を用いたアクチュエータもしくは超音波モータを備えた電子機器またはステージは、その小型・薄型化、低消費電力化が可能となる。   In addition, an electronic device or stage equipped with an actuator or an ultrasonic motor using these laminated piezoelectric elements can be reduced in size, thickness, and power consumption.

以上のように、本発明によれば、簡単な製造プロセスで作製可能な積層圧電素子を振動体として用いるため低電圧で駆動でき、小型で高出力が得られると共に安価な超音波モータが実現できる。特に積層素子全体を一体的に焼結して作製することにより製品個々の特性ばらつきが小さく、信頼性が高く、内部損失が小さくて効率の高い超音波モータが得られる。そしてこれを用いた電子機器またはステージの小型、薄型化並びに低消費電力化が実現できる。   As described above, according to the present invention, since a laminated piezoelectric element that can be manufactured by a simple manufacturing process is used as a vibrating body, it can be driven at a low voltage, and a small and high output and an inexpensive ultrasonic motor can be realized. . In particular, by integrally sintering the entire laminated element, it is possible to obtain an ultrasonic motor with small product characteristic variations, high reliability, low internal loss, and high efficiency. And the electronic device or stage using this can be reduced in size, thickness and power consumption.

本発明の実施の形態を図面を基に説明する。   Embodiments of the present invention will be described with reference to the drawings.

図１は本発明の積層圧電素子１を振動体として用いたリニヤ型超音波モータの構成例を示したものである。矩形状の積層圧電素子1には突起２ａ，２ｂ並びに凹部を有する支持部材３が設けられている。加圧部材４の軸部４ａは段部を有し、案内板５の案内穴５ａで、軸方向にのみ移動可能に案内されている。突起２ａ，２ｂの下には案内部材８ａ，８ｂに案内された移動体７が設けられ、支持部材３の凹部に係合する加圧部材４を加圧手段６で加圧することにより突起２ａ，２ｂと移動体7は接している。   FIG. 1 shows a configuration example of a linear ultrasonic motor using the laminated piezoelectric element 1 of the present invention as a vibrating body. The rectangular laminated piezoelectric element 1 is provided with a support member 3 having protrusions 2a and 2b and a recess. The shaft portion 4a of the pressure member 4 has a stepped portion and is guided by the guide hole 5a of the guide plate 5 so as to be movable only in the axial direction. A moving body 7 guided by the guide members 8a and 8b is provided under the protrusions 2a and 2b, and the pressing member 4 that engages the concave portion of the support member 3 is pressed by the pressing means 6 so that the protrusions 2a and 2b. 2b and the moving body 7 are in contact.

ところで、積層圧電素子１は縦振動と屈曲振動を励振する。例えば図２に積層圧電素子１の長手方向に対する振動振幅の様子を示したものであり、図２（ａ）は縦振動の様子を図２（ｂ）は屈曲振動の様子を示したものである。縦振動、屈曲振動共に積層圧電素子１の中央部が振動の節となり、この位置に支持部材３が設けられている。また屈曲振動の腹の位置に突起２ａ，２ｂが設けられている。この縦振動と屈曲振動を同時に励振することにより突起２ａ，２ｂは積層振動子１の長手方向の変位と、これと直交する幅方向の変位からなる楕円運動を行い移動体７を駆動する。ところで、二つの振動モードはその次数に制限を与えられるものではなく、他のモードを用いても構わない。また、移動体７を固定し、振動体自体を駆動させても構わない。
（実施の形態１）
次に、具体的に本発明の実施の形態１にかかわる積層圧電素子１５の構成並びに製造方法の例を図を基に説明する。図３（ａ）に示した圧電材料から成る圧電シート９には個々の積層圧電素子１５の内部電極となる電極１０，１１，１２，１３を一組の電極群とし、この電極群が複数印刷等によって設けられている。電極１０,１１，１２，１３は略矩形形状をしており、矩形形状の積層圧電素子１を長手方向及びこれと直交する幅方向に二分した四つの領域に配されている。 By the way, the laminated piezoelectric element 1 excites longitudinal vibration and bending vibration. For example, FIG. 2 shows a state of vibration amplitude with respect to the longitudinal direction of the laminated piezoelectric element 1, FIG. 2 (a) shows a state of longitudinal vibration, and FIG. 2 (b) shows a state of bending vibration. . The central portion of the laminated piezoelectric element 1 serves as a vibration node for both longitudinal vibration and bending vibration, and the support member 3 is provided at this position. Protrusions 2a and 2b are provided at the antinodes of bending vibration. By simultaneously exciting the longitudinal vibration and the bending vibration, the protrusions 2a and 2b drive the moving body 7 by performing an elliptical motion consisting of a displacement in the longitudinal direction of the laminated vibrator 1 and a displacement in the width direction perpendicular thereto. By the way, the two vibration modes are not limited in their orders, and other modes may be used. Further, the moving body 7 may be fixed and the vibrating body itself may be driven.
(Embodiment 1)
Next, a configuration of the laminated piezoelectric element 15 and an example of a manufacturing method according to the first embodiment of the present invention will be specifically described based on the drawings. In the piezoelectric sheet 9 made of the piezoelectric material shown in FIG. 3A, the electrodes 10, 11, 12, 13 serving as the internal electrodes of the individual laminated piezoelectric elements 15 form a set of electrode groups, and a plurality of these electrode groups are printed. Etc. are provided. The electrodes 10, 11, 12, and 13 have a substantially rectangular shape, and are arranged in four regions obtained by dividing the rectangular laminated piezoelectric element 1 into two in the longitudinal direction and the width direction perpendicular thereto.

図３（ａ）では、個々の積層圧電素子１５に分割された際に、切断面に電極の一部が現れるように、電極１０，１１，１２，１３は、それぞれ電極の一部が張り出している形状となっている。   In FIG. 3 (a), when divided into individual laminated piezoelectric elements 15, each of the electrodes 10, 11, 12, and 13 is such that a part of the electrode protrudes so that a part of the electrode appears on the cut surface. It has a shape.

この圧電シート９を複数枚重ねた後で電極を有さない圧電素子を最後に重ねて積層し、仮燒結してバインダーを飛ばした後、個々の積層圧電素子１５にダイシング等によって分割され本焼成される。もちろん、本焼成後に個々の積層圧電素子１５に分割しても良い。   After a plurality of piezoelectric sheets 9 are stacked, piezoelectric elements having no electrodes are stacked one after the other, temporarily sintered and the binder is blown off, and then divided into individual stacked piezoelectric elements 15 by dicing or the like and subjected to main firing. Is done. Of course, it may be divided into individual laminated piezoelectric elements 15 after the main firing.

ところで、圧電シート９を積層する際に、図３（ｂ）に示すように、面内方向にΔ１だけ交互にずらしながら積層した後に、二点鎖線１４の部分を切断する。この切断面の一つを図４（ａ）に示したが電極１０、１１，１２，１３の張り出し部１０ａ'，１１ａ'，１２ａ'，１３ａ'及び１０ｂ'，１１ｂ'，１２ｂ'，１３ｂ'が切断面に現れる。   By the way, when the piezoelectric sheets 9 are laminated, as shown in FIG. 3B, after being laminated while being alternately shifted by Δ1 in the in-plane direction, the portion of the two-dot chain line 14 is cut. One of the cut surfaces is shown in FIG. 4 (a). Overhang portions 10a ', 11a', 12a ', 13a' and 10b ', 11b', 12b ', 13b' of the electrodes 10, 11, 12, 13 are shown. Appears on the cut surface.

圧電シートをずらす際には、このように張り出し部１０ａ'と１０ｂ'とがそれぞれ重ならないように、両者間に間隔を持たせるようにする。またこの様に交互にΔｌずつ、ずらして積層された圧電シート９の電極１０ａ，１１ａ，１２ａ，１３ａ及び１０ｂ，１１ｂ，１２ｂ，１３ｂで挟まれた領域が切断された個々の積層圧電素子１５の駆動に寄与する。図４（ｂ）に示されるように、積層圧電素子１５を上から見た場合、この駆動に寄与する領域は斜線部１６で表される。つまり、斜線部１６で表された領域が、全ての圧電シートの電極が重なっている領域である。   When the piezoelectric sheet is displaced, the overhanging portions 10a ′ and 10b ′ are spaced from each other so as not to overlap each other. Further, the individual laminated piezoelectric elements 15 in which the regions sandwiched between the electrodes 10a, 11a, 12a, 13a and 10b, 11b, 12b, 13b of the piezoelectric sheets 9 alternately laminated by Δl are cut. Contributes to driving. As shown in FIG. 4B, when the laminated piezoelectric element 15 is viewed from above, a region contributing to this driving is represented by a hatched portion 16. That is, the region represented by the hatched portion 16 is a region where the electrodes of all the piezoelectric sheets overlap.

図５（ａ），図５（ｂ）は積層圧電素子１５の側面に設けた外部電極を示したものである。電極１０ａ，１１ａ，１２ａ，１３ａ及び１０ｂ，１１ｂ，１２ｂ，１３ｂの張り出し部１０ａ'，１１ａ'，１２ａ'，１３ａ'及び１０ｂ'，１１ｂ'，１２ｂ'，１３ｂ'は積層圧電素子１５の側面でそれぞれ外部電極１７ｂ，１７ｄ，１７ｆ，１７ｈ，１７ａ，１７ｃ，１７ｅ，１７ｇで短絡される。   FIG. 5A and FIG. 5B show external electrodes provided on the side surface of the laminated piezoelectric element 15. The overhanging portions 10a ′, 11a ′, 12a ′, 13a ′ and 10b ′, 11b ′, 12b ′, 13b ′ of the electrodes 10a, 11a, 12a, 13a and 10b, 11b, 12b, 13b are side surfaces of the laminated piezoelectric element 15. Short-circuited by the external electrodes 17b, 17d, 17f, 17h, 17a, 17c, 17e, and 17g, respectively.

ここで外部電極１７ａ，１７ｃ，１７ｅ，１７ｇをGNDとして外部電極１７ｂ，１７ｄ，１７ｆ，１７ｈに高電圧を加えることで積層方向に分極処理がなされる。   Here, the external electrodes 17a, 17c, 17e, and 17g are set to GND, and a high voltage is applied to the external electrodes 17b, 17d, 17f, and 17h, thereby performing polarization processing in the stacking direction.

ところで、電極を有さない圧電シート９'は無くても良いが、この様に最上面に電極を有さない圧電シート９'を積層することで、最上面、最下面の圧電素子は駆動力を生じない為、振動のバランスがとれ、不要振動が発生しにくい。また、ここで積層圧電素子１５は金属等の弾性体と接合して振動体を構成しても構わない。   By the way, the piezoelectric sheet 9 ′ having no electrode may be omitted, but the piezoelectric elements on the uppermost surface and the lowermost surface can be driven by driving the piezoelectric sheet 9 ′ having no electrode on the uppermost surface. Therefore, vibration is balanced and unnecessary vibration is less likely to occur. Here, the laminated piezoelectric element 15 may be bonded to an elastic body such as a metal to constitute a vibrating body.

本積層圧電素子１５の駆動方法であるが、例えば次の二通りがある。外部電極１７ａ，１７ｃ，１７ｅ，１７ｇと外部電極１７ｂ，１７ｈの間に、もしくは外部電極１７ａ，１７ｃ，１７ｅ，１７ｇと外部電極１７ｄ，１７ｆの間に駆動信号を印加することで積層圧電素子9の面内の向かい合う辺の中心を結ぶ線で分けられる四つの領域の対角にある二つの領域が伸縮することで積層圧電素子１５に縦振動と屈曲振動が励振される。駆動信号を印加する領域を切り替えることで縦振動と屈曲信号の位相が逆転し、移動体7の移動方向も変化する。別の方法としては外部電極１７ａ，１７ｃ，１７ｅ，１７ｇをGNDとして外部電極１７ｂ，１７ｈと外部電極１７ｄ，１７ｆの間に位相の異なる駆動信号、例えば９０度もしくは−９０度異なる信号を印加することで積層圧電素子９に縦振動と屈曲振動が励振される。位相を逆転させることで縦振動と屈曲信号の位相が逆転し、移動体７の移動方向も逆となる。   The method for driving the laminated piezoelectric element 15 includes the following two methods, for example. By applying a drive signal between the external electrodes 17a, 17c, 17e and 17g and the external electrodes 17b and 17h, or between the external electrodes 17a, 17c, 17e and 17g and the external electrodes 17d and 17f, Longitudinal and flexural vibrations are excited in the laminated piezoelectric element 15 by expanding and contracting two regions at the diagonal of the four regions divided by a line connecting the centers of opposite sides in the plane. By switching the region to which the drive signal is applied, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also changed. As another method, the external electrodes 17a, 17c, 17e, and 17g are set to GND, and drive signals having different phases, for example, signals different by 90 degrees or -90 degrees are applied between the external electrodes 17b and 17h and the external electrodes 17d and 17f. Thus, longitudinal vibration and bending vibration are excited in the laminated piezoelectric element 9. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also reversed.

ところで、本実施の形態に示した様に、積層圧電素子1は複数の電極を有する圧電シートを積層した後、積層方向に分割する工程を経て作られることで、個々の超音波モータの特性バラツキを極めて小さくすることが可能となる。以下にその理由を説明する。   By the way, as shown in the present embodiment, the laminated piezoelectric element 1 is formed through a process of laminating a piezoelectric sheet having a plurality of electrodes and then dividing it in the laminating direction, so that the characteristic variations of individual ultrasonic motors vary. Can be made extremely small. The reason will be described below.

図１５は積層圧電素子の長手方向の長さを２０ｍｍとし、幅を変えた場合の縦振動と屈曲振動の固有周波数の変化を示したグラフである。縦振動の固有周波数と屈曲振動の固有周波数が一致するように積層圧電素子の寸法は決定される。   FIG. 15 is a graph showing changes in the natural frequency of longitudinal vibration and bending vibration when the longitudinal length of the laminated piezoelectric element is 20 mm and the width is changed. The dimensions of the laminated piezoelectric element are determined so that the natural frequency of the longitudinal vibration and the natural frequency of the bending vibration coincide.

グラフ中には積層圧電素子の厚みを種々変えた場合についても示してあるが縦振動、屈曲振動のいずれの場合も厚み方向の寸法変化に対する固有周波数の変化は極めて小さいことが分る。ところが幅方向の寸法の変化に対しては特に屈曲振動の固有周波数の変化が大きいことが分っている。従って、製造時には長手方向及び幅方向の寸法のばらつきを極めて小さくする必要があることが理解できる。ところが、圧電素子は焼成によって寸法が変化し、また変化の度合いも製造ロット等で変化してしまう。   Although the graph also shows the case where the thickness of the laminated piezoelectric element is variously changed, it can be seen that the change in the natural frequency with respect to the dimensional change in the thickness direction is extremely small in both cases of longitudinal vibration and bending vibration. However, it has been found that the change in the natural frequency of the bending vibration is particularly large with respect to the change in the dimension in the width direction. Therefore, it can be understood that variations in dimensions in the longitudinal direction and the width direction need to be extremely reduced during manufacturing. However, the dimensions of the piezoelectric element change due to firing, and the degree of change also changes depending on the production lot.

ところが本実施の形態の様に幅方向、長手方向に分割する工程を入れることで厚み方向の寸法のばらつきに対して幅方向、長手方向の寸法のばらつきはきわめて小さく抑えることが可能となる。本焼成後に分割すれば焼成による寸法の変化の影響はなくなるし、本焼成前に分割する場合であっても例えば同一ロット内の素子の焼成による収縮率を確認し、それを考慮した寸法に分割した後で本焼成しても幅方向、長手方向には良い寸法制度を出すことが可能となるからである。   However, by adding a process of dividing in the width direction and the longitudinal direction as in the present embodiment, it is possible to suppress the variation in the dimension in the width direction and the longitudinal direction with respect to the variation in the dimension in the thickness direction. If it is divided after the main firing, the influence of the dimensional change due to the firing will be eliminated. This is because it is possible to provide a good dimensional system in the width direction and the longitudinal direction even after the main firing.

この様に積層圧電素子の縦振動、屈曲振動を利用した超音波モータであれば電極の形状、駆動方法によらず本製造方法は有効となる。また内部電極の短絡は積層圧電素子の側面での短絡によるものではなくスルーホール等を用いたものでも良い。
（実施の形態２）
次に、実施の形態１の変形例を図９，図１０，図１１を基に示す。 As described above, the present manufacturing method is effective regardless of the shape of the electrode and the driving method if the ultrasonic motor uses the longitudinal vibration and the bending vibration of the laminated piezoelectric element. Further, the short-circuiting of the internal electrodes is not caused by a short-circuit on the side surface of the laminated piezoelectric element, but may be one using a through hole.
(Embodiment 2)
Next, a modification of the first embodiment will be shown based on FIGS.

実施の形態１に示したものと、基本的な構成、製造方法は共通であるので相違点のみを述べ共通点の説明を省略する。図９に圧電シート９の積層の様子を示した。大きな違いは切断部であり二点鎖線２２の部分を切断する。この切断面の一つを図１０（ａ）に示したが電極１０，１１，１２，１３の張り出し部１０ａ'，１１ａ'，１２ａ'，１３ａ'及び１０ｂ'，１１ｂ'，１２ｂ'，１３ｂ'並びに各電極の長手方向の端部が切断面に現れる。またこの様に積層、切断された圧電シート９の電極１０ａ，１１ａ，１２ａ，１３ａと１０ｂ，１１ｂ，１２ｂ，１３ｂで挟まれ、かつ切断時に残された領域が個々の積層圧電素子２３の駆動に寄与する。図１０（ｂ）に示されるように、積層圧電素子２３を上から見た場合、この駆動に寄与する領域は斜線部２４で表される。   Since the basic configuration and the manufacturing method are the same as those shown in the first embodiment, only the differences are described, and the description of the common points is omitted. FIG. 9 shows how the piezoelectric sheets 9 are stacked. A big difference is a cutting part, and the part of the two-dot chain line 22 is cut. One of the cut surfaces is shown in FIG. 10 (a). Overhang portions 10a ', 11a', 12a ', 13a' and 10b ', 11b', 12b ', 13b' of the electrodes 10, 11, 12, 13 are shown. And the edge part of the longitudinal direction of each electrode appears in a cut surface. Further, the region sandwiched between the electrodes 10a, 11a, 12a, 13a and 10b, 11b, 12b, 13b of the piezoelectric sheet 9 laminated and cut in this way and left at the time of cutting is used for driving the individual laminated piezoelectric elements 23. Contribute. As shown in FIG. 10B, when the laminated piezoelectric element 23 is viewed from above, a region contributing to this drive is represented by a hatched portion 24.

図１１（ａ），図１１（ｂ），図１１（ｃ），図１１（ｄ）は、積層圧電素子２３の側面に設けた外部電極を示したものである。図１１（ａ），図１１（ｂ）は、積層圧電素子２３の長手方向の端部側面に設けた外部電極を示している。電極１０ａ，１３ａの張り出し部１０ａ'，１３ａ'及び電極１１ａ，１２ａの長手方向の端部は、図１１（ａ），図１１（ｂ），図１１（ｃ），図１１（ｄ）に示した様に、積層圧電素子２３の側面でそれぞれ外部電極２５ｅ，２５ｇ，２５ｃ，２５ｄで短絡される。また電極１０ｂ，１３ｂの長手方向の端部及び電極１１ｂ，１２ｂの張り出し部１１ｂ'，１２ｂ'は積層圧電素子２３の側面でそれぞれ外部電極２５ａ，２５ｂ，２５ｆ，２５ｈで短絡される。   11 (a), 11 (b), 11 (c), and 11 (d) show external electrodes provided on the side surface of the laminated piezoelectric element 23. FIG. FIG. 11A and FIG. 11B show external electrodes provided on the side surfaces of the laminated piezoelectric element 23 in the longitudinal direction. The overhanging portions 10a 'and 13a' of the electrodes 10a and 13a and the ends in the longitudinal direction of the electrodes 11a and 12a are shown in FIGS. 11 (a), 11 (b), 11 (c), and 11 (d). As described above, the side surfaces of the laminated piezoelectric element 23 are short-circuited by the external electrodes 25e, 25g, 25c, and 25d, respectively. The longitudinal ends of the electrodes 10b and 13b and the overhanging portions 11b ′ and 12b ′ of the electrodes 11b and 12b are short-circuited by the external electrodes 25a, 25b, 25f, and 25h on the side surfaces of the laminated piezoelectric element 23, respectively.

ここで外部電極２５ａ，２５ｂ，２５ｆ，２５ｈをＧＮＤとして外部電極２５ｅ，２５ｇ，２５ｃ，２５ｄに高電圧を加えることで、積層方向に分極処理がなされる。   Here, the external electrodes 25a, 25b, 25f, and 25h are set to GND, and a high voltage is applied to the external electrodes 25e, 25g, 25c, and 25d, so that the polarization process is performed in the stacking direction.

本積層圧電素子２３の駆動方法であるが、例えば次の二通りがある。外部電極２５ａ，２５ｈと外部電極２５ｅ，２５ｄの間に、もしくは外部電極２５ｂ，２５ｆと外部電極２５ｇ，２５ｃの間に駆動信号を印加することで積層圧電素子２３の面内の向かい合う辺の中心を結ぶ線で分けられる四つの領域の対角にある二つの領域が伸縮することで積層圧電素子２３に縦振動と屈曲振動が励振される。駆動信号を印加する領域を切り替えることで縦振動と屈曲信号の位相が逆転し、移動体7の移動方向も変化する。別の方法としては、外部電極２５ａ，２５ｈ，２５ｂ，２５ｆをＧＮＤとして外部電極２５ｅ，２５ｄと外部電極２５ｇ，２５ｃの間に位相の異なる駆動信号、例えば９０度もしくは−９０度異なる信号を印加することで積層圧電素子２３に縦振動と屈曲振動が励振される。位相を逆転させることで縦振動と屈曲信号の位相が逆転し、移動体7の移動方向も逆となる。   The method for driving the laminated piezoelectric element 23 includes, for example, the following two methods. By applying a drive signal between the external electrodes 25a and 25h and the external electrodes 25e and 25d, or between the external electrodes 25b and 25f and the external electrodes 25g and 25c, the center of the opposite sides in the plane of the laminated piezoelectric element 23 is obtained. Longitudinal and flexural vibrations are excited in the laminated piezoelectric element 23 by expanding and contracting two regions at the diagonals of the four regions divided by the connecting lines. By switching the region to which the drive signal is applied, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also changed. As another method, the external electrodes 25a, 25h, 25b, and 25f are set to GND, and drive signals having different phases, for example, signals that differ by 90 degrees or −90 degrees are applied between the external electrodes 25e and 25d and the external electrodes 25g and 25c. Thus, longitudinal vibration and bending vibration are excited in the laminated piezoelectric element 23. By reversing the phase, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also reversed.

ここでは、電極１０ａ，１１ａ，１２ａ，１３ａ，１０ｂ，１１ｂ，１２ｂ，１３ｂを短絡するそれぞれの外部電極の位置を大きく離すことによって製造時に電極の位置ずれが生じた際にも分極時や駆動時の高電圧印加に対してこれら外部電極間で絶縁が保たれ、高い信頼性が得られる。
（実施の形態３）
次に、実施の形態３を図６，図７，図８を基に説明する。 Here, even when the position of each external electrode that short-circuits the electrodes 10a, 11a, 12a, 13a, 10b, 11b, 12b, and 13b is greatly separated, the positional deviation of the electrodes occurs during manufacturing, and also during polarization and driving Insulation is maintained between these external electrodes against high voltage application, and high reliability is obtained.
(Embodiment 3)
Next, the third embodiment will be described with reference to FIG. 6, FIG. 7, and FIG.

実施の形態１と基本的な電極構成、製造方法は共通であるので、相違点のみを述べ共通点の説明を省略する。違いは積層方法と切断部である。実施の形態１，２においては、二枚の圧電素子シートを交互に位置をずらしながら積層したが、本実施の形態においては、図６に圧電シートに積層の様子を示すように、それぞれΔ１だけ位置をずらした三枚の圧電シートの組を積層していくことを特徴とする。そして切断部は二点鎖線１８の部分とする。この切断面の一つを図７（ａ）に示すが、電極１０，１１，１２，１３の張り出し部１０ａ'，１１ａ'，１２ａ'，１３ａ'及び１０ｂ'，１１ｂ'，１２ｂ'，１３ｂ'が切断面に現れる。   Since the basic electrode configuration and the manufacturing method are the same as those of the first embodiment, only the differences are described and the description of the common points is omitted. The difference is the lamination method and the cutting part. In the first and second embodiments, the two piezoelectric element sheets are stacked while the positions are alternately shifted. However, in the present embodiment, as shown in FIG. A group of three piezoelectric sheets whose positions are shifted is stacked. The cut portion is a portion indicated by a two-dot chain line 18. One of the cut surfaces is shown in FIG. 7 (a). The protruding portions 10a ', 11a', 12a ', 13a' and 10b ', 11b', 12b ', 13b' of the electrodes 10, 11, 12, 13 are shown. Appears on the cut surface.

また、この様に積層された圧電シート９の電極１０ａ，１１ａ，１２ａ，１３ａと１０ｂ，１１ｂ，１２ｂ，１３ｂもしくは電極１０ｂ，１１ｂ，１２ｂ，１３ｂと１０ｃ，１１ｃ，１２ｃ，１３ｃで挟まれた領域が個々の積層圧電素子１９の駆動に寄与し、図７（ｂ），図７（ｃ）に示す様に、積層圧電素子１９を上から見た場合、この駆動に寄与する領域はそれぞれ斜線部２０ａ、２０ｂで表される。図８（ａ），図８（ｂ）は積層圧電素子１９の側面に設けた外部電極を示したものである。電極１０ａ，１１ａ，１２ａ，１３ａの張り出し部１０ａ'，１１ａ'，１２ａ'，１３ａ'は積層圧電素子２３の側面で電極２１ｃ，２１ｆ，２１ｉ，２１ｌにより、電極１０ｂ，１１ｂ，１２ｂ，１３ｂの張り出し部１０ｂ'，１１ｂ'，１２ｂ'，１３ｂ'は積層圧電素子２３の側面で外部電極２１ｂ，２１ｅ，２１ｈ，２１ｋにより、また電極１０ｃ，１１ｃ，１２ｃ，１３ｃの張り出し部１０ｃ'，１１ｃ'，１２ｃ'，１３ｃ'は積層圧電素子２３の側面でそれぞれ外部電極２１ａ，２１ｄ，２１ｇ，２１ｊで短絡される。   Further, the region between the electrodes 10a, 11a, 12a, 13a and 10b, 11b, 12b, 13b or the electrodes 10b, 11b, 12b, 13b and 10c, 11c, 12c, 13c of the piezoelectric sheet 9 laminated in this way. Contributes to driving of each laminated piezoelectric element 19, and when the laminated piezoelectric element 19 is viewed from above, as shown in FIGS. 20a and 20b. FIG. 8A and FIG. 8B show external electrodes provided on the side surface of the laminated piezoelectric element 19. The overhanging portions 10a ′, 11a ′, 12a ′, and 13a ′ of the electrodes 10a, 11a, 12a, and 13a are overhanging the electrodes 10b, 11b, 12b, and 13b by the electrodes 21c, 21f, 21i, and 21l on the side surfaces of the laminated piezoelectric element 23. The portions 10b ′, 11b ′, 12b ′, and 13b ′ are formed on the side surfaces of the multilayer piezoelectric element 23 by the external electrodes 21b, 21e, 21h, and 21k, and the overhang portions 10c ′, 11c ′, and 12c of the electrodes 10c, 11c, 12c, and 13c. 'And 13c' are short-circuited on the side surfaces of the laminated piezoelectric element 23 by external electrodes 21a, 21d, 21g, and 21j, respectively.

ここで、外部電極２１ｂ，２１ｅ，２１ｈ，２１ｋをＧＮＤとして外部電極２１ｃ，２１ｆ，２１ｉ，２１ｌ，２１ａ，２１ｊに正方向の高電圧を、外部電極２１ｄ，２１ｇに負方向の高電圧を加えることにより分極処理を行う。この場合の駆動方法としては外部電極２１ｂ，２１ｅ，２１ｋ，２１ｈをＧＮＤとして外部電極２１ｃ，２１ｆ，２１ｌ，２１ｉに第一の駆動信号を印加することにより縦振動を励振する。また外部電極２１ａ，２１ｄ，２１ｊ，２１ｇに第二の駆動信号を印加することにより屈曲振動が励振され、二つの振動の合成変位により移動体7を駆動する。第一の駆動信号と第二の駆動信号の位相を変えることにより縦振動と屈曲信号の位相が反転し、移動体7の移動方向も変わる。また分極方向に付いても任意であり、分極方向に応じて駆動信号の位相を逆転すれば同じ振動が励振される。
（実施の形態４）
次に、実施の形態４を図１２，図１３を基に説明する。 Here, the external electrodes 21b, 21e, 21h, and 21k are set to GND, and a high voltage in the positive direction is applied to the external electrodes 21c, 21f, 21i, 21l, 21a, and 21j, and a high voltage in the negative direction is applied to the external electrodes 21d and 21g. The polarization process is performed by As a driving method in this case, longitudinal vibration is excited by applying a first drive signal to the external electrodes 21c, 21f, 21l, 21i with the external electrodes 21b, 21e, 21k, 21h as GND. Further, by applying a second drive signal to the external electrodes 21a, 21d, 21j, and 21g, bending vibration is excited, and the movable body 7 is driven by the combined displacement of the two vibrations. By changing the phases of the first drive signal and the second drive signal, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also changed. The polarization direction is arbitrary, and the same vibration is excited if the phase of the drive signal is reversed according to the polarization direction.
(Embodiment 4)
Next, a fourth embodiment will be described with reference to FIGS.

実施の形態１と基本的な製造方法は共通であるので、相違点のみを述べ共通点の説明を省略する。違いは電極パターンと積層方法である。簡単に説明すると、二枚の圧電素子シートを交互に圧電シートの面内方向（ｘ、ｙ両方向）に位置をずらしながら積層し、個々の積層圧電素子３１の内部の電極は図１２（ａ）と図１２（ｂ）の場合になるようにする。この様に積層することで積層圧電素子３１の全ての側面に外部電極を設けることが出来るため、複雑な内部電極を短絡することが可能となる。   Since the basic manufacturing method is the same as that of the first embodiment, only the differences are described and the description of the common points is omitted. The difference is the electrode pattern and the lamination method. Briefly, two piezoelectric element sheets are laminated while alternately shifting the position in the in-plane direction (both x and y directions) of the piezoelectric sheet, and the electrodes inside each laminated piezoelectric element 31 are shown in FIG. As shown in FIG. 12B. By laminating in this way, external electrodes can be provided on all the side surfaces of the laminated piezoelectric element 31, so that complicated internal electrodes can be short-circuited.

以下電極の構成について説明する。積層圧電素子３１の幅方向中央部には長手方向全体に渡って電極２８が設けられ、その両側には長手方向に二分された領域に計四つの電極２６，２７，２９，３０が設けられている。電極２６及び３０には張り出し部２６ａ'，２６ｂ'，３０ａ'が設けられている。圧電シートの状態では張り出し部２６ｂ'は図１２（ｂ）に示した様に長いが、図１２（ａ）の電極を構成する際には、張り出し部２６ａ'は、切断によってその一部が除去される。この図１２（ａ）、（ｂ）の状態の電極が交互になるように積層された積層圧電素子３１とする。図１３（ａ），図１３（ｂ），図１３（ｃ），図１３（ｄ）は、積層圧電素子２３の側面に設けた外部電極を示したものである。図１３（ａ），図１３（ｂ）は、積層圧電素子３１の長手方向の端部側面に設けた外部電極を示している。そして、図１３（ａ），図１３（ｂ），図１３（ｃ），図１３（ｄ）に示した外部電極によって、積層圧電素子３１の側面で短絡される。具体的には、電極２６ａ，２７ａ，２８ａ，２９ａ，３０ａ，２６ｂ，２７ｂ，２８ｂ，２９ｂ，３０ｂはそれぞれ外部電極３２ｇ，３２ｈ，３２ｂ，３２ｃ，３２ｆ，３２ａ，３２ｄ，３２ｅ，３２ｉ，３２ｊによって短絡される。   The configuration of the electrode will be described below. An electrode 28 is provided in the central portion in the width direction of the laminated piezoelectric element 31 over the entire length direction, and a total of four electrodes 26, 27, 29, and 30 are provided on both sides thereof in a region divided in the length direction. Yes. The electrodes 26 and 30 are provided with overhang portions 26a ′, 26b ′, and 30a ′. In the state of the piezoelectric sheet, the protruding portion 26b ′ is long as shown in FIG. 12B, but when forming the electrode of FIG. 12A, the protruding portion 26a ′ is partially removed by cutting. Is done. The laminated piezoelectric element 31 is formed such that the electrodes in the states of FIGS. 12A and 12B are alternately arranged. 13 (a), 13 (b), 13 (c), and 13 (d) show external electrodes provided on the side surface of the laminated piezoelectric element 23. FIG. FIGS. 13A and 13B show the external electrodes provided on the side surfaces of the laminated piezoelectric element 31 in the longitudinal direction. And it short-circuits by the side surface of the laminated piezoelectric element 31 by the external electrode shown to Fig.13 (a), FIG.13 (b), FIG.13 (c), FIG.13 (d). Specifically, the electrodes 26a, 27a, 28a, 29a, 30a, 26b, 27b, 28b, 29b, and 30b are short-circuited by the external electrodes 32g, 32h, 32b, 32c, 32f, 32a, 32d, 32e, 32i, and 32j, respectively. Is done.

ここで、外部電極３２ａ，３２ｄ，３２ｅ，３２ｉ，３２ｊをＧＮＤとして外部電極３２ｇ，３２ｆ，３２ｂに正方向の高電圧を、外部電極３２ｈ，３２ｃに負方向の高電圧を加えることにより分極処理を行う。この場合の駆動方法としては外部電極３２ａ，３２ｄ，３２ｅ，３２ｉ，３２ｊをＧＮＤとして外部電極３２ｂに第一の駆動信号を印加することにより縦振動を励振する。また外部電極３２ｇ，３２ｆ，３２ｈ，３２ｃに第二の駆動信号を印加することにより屈曲振動が励振され、二つの振動の合成変位により移動体7を駆動する。第一の駆動信号と第二の駆動信号の位相を変えることにより縦振動と屈曲信号の位相が反転し、移動体7の移動方向も変わる。また分極方向に付いても任意であり、分極方向に応じて駆動信号の位相を逆転すれば同じ振動が励振される。
（実施の形態５）
本発明の超音波モータを用いて電子機器を構成した例を図１４を基に説明する。 Here, the external electrodes 32a, 32d, 32e, 32i, and 32j are set to GND, and a high voltage in the positive direction is applied to the external electrodes 32g, 32f, and 32b, and a high voltage in the negative direction is applied to the external electrodes 32h and 32c. Do. As a driving method in this case, longitudinal vibration is excited by applying a first drive signal to the external electrode 32b with the external electrodes 32a, 32d, 32e, 32i, and 32j as GND. Further, by applying a second drive signal to the external electrodes 32g, 32f, 32h, and 32c, bending vibration is excited, and the movable body 7 is driven by the combined displacement of the two vibrations. By changing the phases of the first drive signal and the second drive signal, the phases of the longitudinal vibration and the bending signal are reversed, and the moving direction of the moving body 7 is also changed. The polarization direction is arbitrary, and the same vibration is excited if the phase of the drive signal is reversed according to the polarization direction.
(Embodiment 5)
An example in which an electronic apparatus is configured using the ultrasonic motor of the present invention will be described with reference to FIG.

図１４は本発明の駆動回路により駆動される超音波モータ１００を電子機器の駆動源に適用したブロック図を示したものであり、積層圧電素子１，９，１５，１９，２３，３１と積層圧電素子１，９，１５，１９，２３，３１に接合された摩擦部材2により摩擦駆動される移動体７と移動体７と一体に動作する伝達機構３２と、伝達機構３２の動作に基づいて動作する出力機構３３からなる。ここでは移動体を回転体とし、移動体を回転動作させる例について説明する。   FIG. 14 is a block diagram in which an ultrasonic motor 100 driven by a drive circuit of the present invention is applied to a drive source of an electronic device, and includes laminated piezoelectric elements 1, 9, 15, 19, 23, and 31. Based on the moving body 7 frictionally driven by the friction member 2 joined to the piezoelectric elements 1, 9, 15, 19, 23, 31, the transmission mechanism 32 operating integrally with the moving body 7, and the operation of the transmission mechanism 32. The output mechanism 33 operates. Here, an example in which the moving body is a rotating body and the moving body is rotated will be described.

ここで、伝達機構３２は例えば歯車列、摩擦車等の伝達車を用いる。出力機構３３としては、プリンタにおいては紙送り機構、カメラにおいてはシャッタ駆動機構、レンズ駆動機構、フィルム巻き上げ機構等を、また電子機器や計測器においては指針等を、ロボットにおいてはアーム機構、工作機械においては歯具送り機構や加工部材送り機構等を用いる。   Here, the transmission mechanism 32 uses a transmission wheel such as a gear train and a friction wheel, for example. The output mechanism 33 includes a paper feed mechanism in a printer, a shutter drive mechanism, a lens drive mechanism, a film winding mechanism in a camera, a pointer in an electronic device and a measuring instrument, an arm mechanism in a robot, and a machine tool. In this case, a tooth tool feeding mechanism, a processing member feeding mechanism, or the like is used.

尚、本実施の形態における電子機器としては電子時計、計測器、カメラ、プリンタ、印刷機、ロボット、工作機、ゲーム機、光情報機器、医療機器、移動装置等を実現できる。さらに移動体７に出力軸を設け、出力軸からのトルクを伝達するための動力伝達機構を有する構成とすれば、超音波モータ駆動装置を実現できる。そして、超音波モータ駆動装置としてステージを構成すると、通常の電磁モータを用いたステージに比較して、機構が簡単かつ小型であるとともに、磁化を避ける環境下でも使用できる超音波モータを利用したステージを提供することができる。   Note that an electronic timepiece, a measuring instrument, a camera, a printer, a printing machine, a robot, a machine tool, a game machine, an optical information device, a medical device, a moving device, and the like can be realized as the electronic device in this embodiment. Furthermore, if the moving body 7 is provided with an output shaft and has a power transmission mechanism for transmitting torque from the output shaft, an ultrasonic motor driving device can be realized. If the stage is configured as an ultrasonic motor driving device, the mechanism is simpler and smaller than a stage using an ordinary electromagnetic motor, and the stage uses an ultrasonic motor that can be used even in an environment avoiding magnetization. Can be provided.

本発明にかかわるリニヤ型超音波モータの構成例を示す図である。It is a figure which shows the structural example of the linear type | mold ultrasonic motor concerning this invention. 本発明にかかわる積層圧電素子の振動モードを示す図である。It is a figure which shows the vibration mode of the laminated piezoelectric element concerning this invention. 本発明にかかわる積層圧電素子の製造方法を示す図である。It is a figure which shows the manufacturing method of the laminated piezoelectric element concerning this invention. 本発明の実施の形態１にかかわる積層圧電素子の構成を示す図である。It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 1 of this invention. 本発明の実施の形態１にかかわる積層圧電素子の外部電極の構成を示す図である。It is a figure which shows the structure of the external electrode of the laminated piezoelectric element concerning Embodiment 1 of this invention. 本発明の実施の形態３にかかわる積層圧電素子の製造方法を示す図である。It is a figure which shows the manufacturing method of the laminated piezoelectric element concerning Embodiment 3 of this invention. 本発明の実施の形態３にかかわる積層圧電素子の構成を示す図である。It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 3 of this invention. 本発明の実施の形態３にかかわる積層圧電素子の外部電極の構成を示す図である。It is a figure which shows the structure of the external electrode of the laminated piezoelectric element concerning Embodiment 3 of this invention. 本発明の実施の形態２にかかわる積層圧電素子の製造方法を示す図である。It is a figure which shows the manufacturing method of the laminated piezoelectric element concerning Embodiment 2 of this invention. 本発明の実施の形態２にかかわる積層圧電素子の構成を示す図である。It is a figure which shows the structure of the laminated piezoelectric element concerning Embodiment 2 of this invention. 本発明の実施の形態２にかかわる積層圧電素子の外部電極の構成を示す図である。It is a figure which shows the structure of the external electrode of the laminated piezoelectric element concerning Embodiment 2 of this invention. 本発明の実施の形態４にかかわる積層圧電素子の内部電極の構成を示す図である。It is a figure which shows the structure of the internal electrode of the laminated piezoelectric element concerning Embodiment 4 of this invention. 本発明の実施の形態４にかかわる積層圧電素子の外部電極の構成を示す図である。It is a figure which shows the structure of the external electrode of the laminated piezoelectric element concerning Embodiment 4 of this invention. 本発明にかかわる超音波モータを用いた電子機器を示したブロック図である。It is the block diagram which showed the electronic device using the ultrasonic motor concerning this invention. 本発明の積層圧電素子の幅方向及び厚み方向の長さを変えた場合の縦振動、屈曲振動の固有周波数の変化を示した図である。It is the figure which showed the change of the natural frequency of a longitudinal vibration and a bending vibration at the time of changing the length of the width direction of the multilayer piezoelectric element of this invention, and the thickness direction.

符号の説明Explanation of symbols

１、９、１５、１９、２３、３１ 積層圧電素子
２ 摩擦部材
３ 支持部材
４ 加圧部材
６ 加圧手段
７ 移動体
１０、１２、１３、２６、３１ 内部電極
１７、２１、２５、３２ 外部電極 1, 9, 15, 19, 23, 31 Multilayer piezoelectric element 2 Friction member 3 Support member 4 Pressurizing member 6 Pressurizing means 7 Moving body 10, 12, 13, 26, 31 Internal electrodes 17, 21, 25, 32 External electrode

Claims (7)

複数の異なる電極からなる電極群を複数有する同一の圧電シートを面内方向に位置をずらして積層する工程と、
前記積層された圧電シートを前記電極群が含まれる様に切断する工程と、
前記切断面において前記各圧電シートの界面に設けられた内部電極を短絡する外部電極を設ける工程を有する積層圧電素子の製造方法。 Laminating the same piezoelectric sheet having a plurality of electrode groups composed of a plurality of different electrodes while shifting the position in the in-plane direction;
Cutting the laminated piezoelectric sheet so as to include the electrode group;
A method for manufacturing a laminated piezoelectric element, comprising a step of providing an external electrode for short-circuiting an internal electrode provided at an interface of each piezoelectric sheet on the cut surface. 複数の同一の圧電シートを積層して構成される積層圧電素子または前記積層圧電素子に設けられた接触部材と接する移動体を駆動する超音波モータであって、
前記積層圧電素子の中で、少なくとも一つの層にある複数の電極が短絡されていることを特徴とする積層圧電素子もしくは超音波モータ。 An ultrasonic motor for driving a laminated piezoelectric element configured by laminating a plurality of identical piezoelectric sheets or a moving body in contact with a contact member provided in the laminated piezoelectric element,
A laminated piezoelectric element or an ultrasonic motor, wherein a plurality of electrodes in at least one of the laminated piezoelectric elements are short-circuited. 前記電気的に短絡された複数の電極を共通電極とし、他の電極のうち幾つかを第一の電極群とし、残りを第二の電極群とし、前記共通電極と前記第一の電極群もしくは前記第二の電極群の何れか一方に駆動信号を加えることで前記移動体を駆動することを特徴とする請求項２記載の超音波モータ。   The plurality of electrically shorted electrodes as a common electrode, some of the other electrodes as a first electrode group, the rest as a second electrode group, the common electrode and the first electrode group or The ultrasonic motor according to claim 2, wherein the movable body is driven by applying a drive signal to any one of the second electrode groups. 前記電気的に短絡された複数の電極を共通電極とし、他の電極のうち幾つかを第一の電極群とし、残りを第二の電極群とし、前記共通電極と前記第一の電極群に加える駆動信号と前記共通電極と前記第二の電極群の間に加える駆動信号の位相を変えて前記移動体を駆動することを特徴とする請求項２記載の超音波モータ。   The plurality of electrically shorted electrodes are common electrodes, some of the other electrodes are first electrode groups, the rest are second electrode groups, and the common electrodes and the first electrode groups The ultrasonic motor according to claim 2, wherein the movable body is driven by changing a phase of a drive signal to be applied and a phase of the drive signal applied between the common electrode and the second electrode group. 請求項２から４のいずれか一項に記載の超音波モータを備え
た電子機器。 The electronic device provided with the ultrasonic motor as described in any one of Claim 2 to 4. 請求項２から４のいずれか一項に記載の超音波モータを備え
たステージ。 The stage provided with the ultrasonic motor as described in any one of Claim 2 to 4. 電極を有する圧電素子が厚み方向に複数積層されて構成された積層圧電素子の長手方向の縦振動と幅方向の屈曲振動を利用した超音波モータの製造方法であって、
前記積層圧電素子は複数の電極を有する圧電シートを積層した後で前記積層方向に分割する工程を経たものであることを特徴とする超音波モータの製造方法。 A method of manufacturing an ultrasonic motor using longitudinal vibration in a longitudinal direction and bending vibration in a width direction of a laminated piezoelectric element formed by laminating a plurality of piezoelectric elements having electrodes in a thickness direction,
The method for manufacturing an ultrasonic motor, wherein the laminated piezoelectric element is obtained by laminating a piezoelectric sheet having a plurality of electrodes and then dividing the laminated sheet in the laminating direction.
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