JP2004158471A5 - - Google Patents

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Publication number
JP2004158471A5
JP2004158471A5 JP2004062722A JP2004062722A JP2004158471A5 JP 2004158471 A5 JP2004158471 A5 JP 2004158471A5 JP 2004062722 A JP2004062722 A JP 2004062722A JP 2004062722 A JP2004062722 A JP 2004062722A JP 2004158471 A5 JP2004158471 A5 JP 2004158471A5
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Japan
Prior art keywords
master
forming
emitter
metal layer
manufacturing
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JP2004062722A
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Japanese (ja)
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JP3971393B2 (en
JP2004158471A (en
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Priority to JP2004062722A priority Critical patent/JP3971393B2/en
Priority claimed from JP2004062722A external-priority patent/JP3971393B2/en
Publication of JP2004158471A publication Critical patent/JP2004158471A/en
Publication of JP2004158471A5 publication Critical patent/JP2004158471A5/ja
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Publication of JP3971393B2 publication Critical patent/JP3971393B2/en
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Claims (5)

母材を切削することにより主面にエミッタ形状が設けられた第1の原盤を形成する工程と、
前記第1の原盤のエミッタ形状が設けられた主面上に第1の金属層を形成する工程と、
前記第1の原盤から前記第1の金属層を剥離する工程で前記第1の原盤のエミッタ形状が転写された凹部形状の第2の原盤を形成する工程と、
前記第2の原盤の凹部が設けられた主面上に第2の金属層を形成する工程と、
前記第2の原盤から前記第2の金属層を剥離する工程で前記第2の原盤の凹部形状が転写された凸部形状のエミッタ電極を形成する工程とを備えることを特徴とする電界放出素子の製造方法。
Forming a first master having an emitter shape on a main surface by cutting a base material;
Forming a first metal layer on a main surface provided with the emitter shape of the first master,
Forming a recess-shaped second master in which the emitter shape of the first master is transferred in the step of peeling the first metal layer from the first master;
Forming a second metal layer on a main surface provided with a recess of the second master,
And a step of forming a convex emitter electrode to which the concave shape of the second master is transferred in the step of peeling the second metal layer from the second master. Manufacturing method.
前記第1の原盤を形成する工程は刃先角の違う複数の工具を用いて行なうことを特徴とする請求項1記載の電界放出素子の製造方法。2. The method of manufacturing a field emission device according to claim 1, wherein the step of forming the first master is performed using a plurality of tools having different edge angles. 前記第1の原盤を形成する工程においてエミッタ形状は、少なくとも複数の線分又は弧が組み合わされた稜線を有し、且つ頂角が30°以上70°以下となるように切削されることを特徴とする請求項1又は2記載の電界放出素子の製造方法。 In the step of forming the first master, the emitter shape has a ridge line formed by combining at least a plurality of line segments or arcs, and is cut so that the apex angle is not less than 30 ° and not more than 70 °. A method for manufacturing a field emission device according to claim 1 or 2 . 請求項1乃至請求項3の少なくともいずれか1つの製法により形成されたことを特徴とする電界放出素子。A field emission device formed by the manufacturing method according to claim 1. 請求項4によって形成された電界放出素子の前記エミッタ電極から電子を放出させるゲート電極を有する陰極装置と、
少なくとも、前記陰極装置から放出された電子を引き付けるための陽電極及び前記電子が衝突することによって発光する発光体膜が設けられた透光性基板を有する陽極装置とを備えていることを特微とする平面ディスプレイ装置。
A cathode device having a gate electrode for emitting electrons from the emitter electrode of the field emission device formed according to claim 4;
At least a positive electrode for attracting electrons emitted from the cathode device, and an anode device having a translucent substrate provided with a light emitting film that emits light when the electrons collide. A flat display device.
JP2004062722A 1999-03-19 2004-03-05 Field emission device manufacturing method, field emission device, and flat display device Expired - Fee Related JP3971393B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004062722A JP3971393B2 (en) 1999-03-19 2004-03-05 Field emission device manufacturing method, field emission device, and flat display device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7661599 1999-03-19
JP2004062722A JP3971393B2 (en) 1999-03-19 2004-03-05 Field emission device manufacturing method, field emission device, and flat display device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000078918A Division JP3540705B2 (en) 1999-03-19 2000-03-21 Method of manufacturing field emission device, field emission device and flat display device

Publications (3)

Publication Number Publication Date
JP2004158471A JP2004158471A (en) 2004-06-03
JP2004158471A5 true JP2004158471A5 (en) 2007-04-19
JP3971393B2 JP3971393B2 (en) 2007-09-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004062722A Expired - Fee Related JP3971393B2 (en) 1999-03-19 2004-03-05 Field emission device manufacturing method, field emission device, and flat display device

Country Status (1)

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JP (1) JP3971393B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4916221B2 (en) * 2006-06-01 2012-04-11 スタンレー電気株式会社 Method for manufacturing cold cathode and method for manufacturing apparatus equipped with cold cathode
JP6173490B2 (en) * 2014-01-28 2017-08-02 株式会社牧野フライス製作所 Cutting method and tool path generation device

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