JP2004115137A5 - - Google Patents
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- JP2004115137A5 JP2004115137A5 JP2002276558A JP2002276558A JP2004115137A5 JP 2004115137 A5 JP2004115137 A5 JP 2004115137A5 JP 2002276558 A JP2002276558 A JP 2002276558A JP 2002276558 A JP2002276558 A JP 2002276558A JP 2004115137 A5 JP2004115137 A5 JP 2004115137A5
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- lateral direction
- support member
- frame
- conveying apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【0005】
【課題を解決するための手段】
上記目的を達成するため、本発明の薄板搬送装置は、フレームと、略均等な上下に貫通する空隙を形成する基板等の薄板支持部とからなるカセットに対して、薄板を1枚ずつ搬入出する薄板搬送装置において、カセット内に支持された薄板の下に挿入し、該薄板を持ち上げて横方向に移動可能に支持する複数の支持部材と、該支持部材により支持された薄板を横方向に移動させる横移動装置とを備えたことを特徴とする。
[0005]
[Means for Solving the Problems]
In order to achieve the above object, according to the thin plate transport apparatus of the present invention, a thin plate is carried in and out one sheet at a time to a cassette comprising a frame and a thin plate supporting portion such as a substrate forming a substantially evenly penetrating air gap. A plurality of support members which are inserted under the thin plate supported in the cassette and lift the thin plate so as to be movably supported in the lateral direction, and the thin plate supported by the support member in the lateral direction And a lateral movement device for moving.
この薄板搬送装置は、フレームと、略均等な上下に貫通する空隙を形成する基板等の薄板支持部とからなるカセットに対して、薄板を1枚ずつ搬入出する薄板搬送装置において、カセット内に支持された薄板の下に挿入し、該薄板を持ち上げて横方向に移動可能に支持する複数の支持部材と、該支持部材により支持された薄板を横方向に移動させる横移動装置とを備えることから、フレームと支持部材における薄板の支点を多数設けられるとともに、薄板を持ち上げることなく横方向に移動させながら移載することができ、これにより、極めて薄く大きく加工した基板のような薄板でも撓みを生じさせることなく容易に搬送すること可能となる。
また、この薄板搬送装置は、従来のようなフォーク状のフィンガーは使用しないことから、ロボットが不要となるとともに、出し入れの途中で生じる旋回動作もなくなり、設置面積を大幅に減少させて工場面積を大幅に低減させるなど、工場の建設費も大幅に低減することができる。
さらに、薄板の撓みをなくすことができるため、挿入ピッチを小さくして、カセットの高さを1/2〜1/3に低くすることができ、これにより、カセットのストッカ容量を飛躍的に増大させ、ストッカのコスト大幅な低減や設置面積の大幅な低減を図ることができる。
This thin plate transport device is a thin plate transport device for carrying in and out thin plates one by one to a cassette comprising a frame and a thin plate supporting portion such as a substrate forming a substantially evenly penetrating air gap. And a plurality of support members which are inserted under the supported thin plate and lift the thin plate so as to be movably supported in the lateral direction, and a transverse movement device for laterally moving the thin plate supported by the support member. Therefore, while providing a large number of thin film fulcrums in the frame and the support member, the thin film can be transferred while being moved in the lateral direction without raising the thin film. It can be easily transported without causing it.
In addition, since this thin-plate transfer device does not use a conventional fork-like finger, the robot is not necessary, and the turning operation occurring in the middle of taking in and out is also eliminated, the installation area is greatly reduced and the factory area is reduced. The construction cost of the factory can be reduced significantly, for example, by greatly reducing it.
Furthermore, since the deflection of the thin plate can be eliminated, the insertion pitch can be reduced and the height of the cassette can be reduced to 1/2 to 1/3, thereby dramatically increasing the stocker capacity of the cassette The cost of the stocker can be significantly reduced and the installation area can be significantly reduced.
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002276558A JP4216029B2 (en) | 2002-09-24 | 2002-09-24 | Thin plate conveyor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002276558A JP4216029B2 (en) | 2002-09-24 | 2002-09-24 | Thin plate conveyor |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004115137A JP2004115137A (en) | 2004-04-15 |
JP2004115137A5 true JP2004115137A5 (en) | 2005-05-19 |
JP4216029B2 JP4216029B2 (en) | 2009-01-28 |
Family
ID=32272394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002276558A Expired - Fee Related JP4216029B2 (en) | 2002-09-24 | 2002-09-24 | Thin plate conveyor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4216029B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005090211A1 (en) * | 2004-03-18 | 2005-09-29 | Daiichi Institution Industry Co. Ltd. | Transfer device with alignment function |
KR200487579Y1 (en) * | 2017-06-21 | 2018-11-28 | 이이원 | Cassette for carrying glass substrate |
JP7342840B2 (en) * | 2020-11-05 | 2023-09-12 | トヨタ自動車株式会社 | Conveyance method and conveyance device for thin plate materials |
-
2002
- 2002-09-24 JP JP2002276558A patent/JP4216029B2/en not_active Expired - Fee Related
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