JP2004096952A

JP2004096952A - Compound voice coil type linear motor

Info

Publication number: JP2004096952A
Application number: JP2002257916A
Authority: JP
Inventors: Mitsuhiro Koga; 古賀　光浩; Mutsumi Matsumoto; 松元　　睦
Original assignee: Yaskawa Electric Corp
Current assignee: Yaskawa Electric Corp
Priority date: 2002-09-03
Filing date: 2002-09-03
Publication date: 2004-03-25
Anticipated expiration: 2022-09-03
Also published as: JP3778284B2

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compound voice coil type linear motor reduced in size and weight with high responsiveness. <P>SOLUTION: A voice coil type linear motor is set as a basic unit, wherein a squarish-eight shape closed magnetic circuit is constituted of an inner yoke 12 arranged between a pair of parallel outer yokes 11 in parallel with the outer yokes, and side yokes 13 arranged at both ends of the outer yokes 11 and the inner yoke 12; a magnetic field is formed by arranging permanent magnets 15a with their polarities inverted inside the outer yokes 11; and an armature in which coils 18a are arranged at a bobbin 17 is axially movably arranged between the permanent magnets 15a at intervals. The compound voice coil type linear motor is obtained by piling the two basic linear motors. At this time, the polarities of the permanent magnets of the voice coil type linear motors and polarities of the coils are made completely reverse to each other, and the outer yokes 11 at lapping parts of the voice coil type linear motors are omitted. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は、ボイスコイル形リニアモータに関し、特に小形、軽量化、高応答の複合ボイスコイル形リニアモータに関する。
【０００２】
【従来の技術】
従来、この種のボイスコイル形リニアモータとしては本出願人によってなされた先行発明がある（例えば、特許文献１参照。）。
【０００３】
【特許文献１】
特開平８―２１４５３０号公報（図１）
【０００４】
これは長手方向の中心軸に平行させた磁性体で構成した一対の外ヨーク間に平行させて設けた内ヨークと、前記外ヨークと前記内ヨークの両端部に設けた側ヨークとで日の字形に形成した閉鎖磁気回路と、前記外ヨークの内側に、外ヨークと内ヨークの対向する面に対向するものどうしの極性を逆にした永久磁石を設けて界磁を構成し、前記永久磁石間に、空隙を介し、非磁性体よりなるボビンにコイルを設けた電機子を、軸方向に移動自在に設け、前記外ヨークに設けた永久磁石を、隣どうしの極性を逆にした同じ幅の複数の永久磁石とし、前記内ヨークに設けた永久磁石を、隣どうしの極性を逆にした同じ幅の複数の永久磁石とし、前記永久磁石と永久磁石の対向するものどうしは異極性となるよう配置し、前記コイルを前記永久磁石のピッチと等しいピッチに分割したものである。
【０００５】
以下、本発明の基礎となるこの先行発明（特開平８―２１４５３０号）について図８〜図１０に基づいて簡単に説明する。
図８は、先行発明に係るボイスコイル形リニアモータの断面図であり、長手方向の中心軸に平行して設けた平板状の強磁性体よりなる一対の外ヨーク１１Ｕ、１１Ｄの内側には、同じ幅の永久磁石１５ａ１、１５ａ２、１５ａ３、１５ａ４を、対面するものは同極性に、隣のものは異磁極性に着磁し、軸方向に所定ピッチで配置してある。外ヨーク１１Ｕ、１１Ｄの両側面には、平板状の強磁性体よりなる一対の側ヨーク１３Ｒ、１３Ｌを対面させて固定してある。
側ヨーク１３Ｒ、１３Ｌの中央部には、矩形状の内ヨーク１２を嵌め込む溝１４Ｒ、１４Ｌを設けてあり、この溝１４Ｒ、１４Ｌに内ヨーク１２の各端部を嵌め込み外ヨーク１１Ｕ、１１Ｄの中心軸に内ヨーク１２を固定する。
内ヨーク１２の上下面には、永久磁石１５ｂ１、１５ｂ２、１５ｂ３、１５ｂ４を、それぞれ永久磁石１５ａ１、１５ａ２、１５ａ３、１５ａ４に対面するものは異極性に着磁し、空隙を介して各１５ａ１、１５ａ２、１５ａ３、１５ａ４に対面させて軸方向に配置してある。
このようにして外ヨーク１１Ｕ、１１Ｄと、側ヨーク１３Ｒ、１３Ｌと、内ヨーク１２とで日の字形のヨークを形成し、その内側に、永久磁石１５ａ１〜１５ａ４、１５ｂ１〜１５ｂ４を配置し、界磁１０を構成する。
対応する各永久磁石１５ａ１〜１５ａ４と１５ｂ１〜１５ｂ４間の空隙内には、電機子２０を、内外面が各永久磁石と空隙をもたせて、軸方向に移動自在に配置する。
【０００６】
電機子２０はボビン１７とコイル１８（１８ａ１、１８ａ２）とフランジ２７とから成り、ボビン１７は図９に示すように、非磁性体よりなる管状をしており、管状の軸方向に垂直な面で切った断面が口形形状をしており、その管状の軸方向の中央部に中仕切りを設け、ここに互いの巻き方向を逆にしたコイル１８ａ１、１８ａ２が軸方向に巻回されており、そのピッチは永久磁石１５ａ１、１５ａ２のピツチと等しくなっている。
ボビン１７の片側もしくは両側の側面には、軸方向端部に軸方向と直角方向に折り曲げたフランジ２７を設けたＬ字形のスラスト板１９を固定してある。
【０００７】
図１０は、図９の電機子２０の組立状況を示す斜視図で、界磁１０と空隙を介し電機子２０が軸方向に移動し、推力の取り出しはフランジ２７にワークを連結して行うようにしてある。
このように構成することにより、対面する永久磁石１５ａから１５ｂの作る磁束は集中化されるとともに、図８に点線で示すように、
（１）　外ヨーク１１および内ヨーク１２の中央部と永久磁石１５ａ、１５ｂを流れるφ１　と、
（２）　外ヨーク１１Ｕおよび内ヨーク１２の一方端（図で左端）と側ヨーク１３Ｌと永久磁石１５ａ１、１５ｂ１を流れるφ２Ｌと、
（３）　外ヨーク１１Ｕおよび内ヨーク１２の他方端側ヨーク１３と永久磁石１５ａ２、１５ｂ２を流れるφ２Ｒと、
の３磁路となり、ヨーク１１Ｕ、１２を流れる磁束は均一化される。
【０００８】
【発明が解決しようとする課題】
上記のボイスコイル形リニアモータをさらに高推力にするには、上記のボイスコイル形リニアモータを基本単位として基本単位リニアモータ必要個数用いればよいことになる。
図１１は図８のボイスコイル形リニアモータを基本単位として基本単位リニアモータを２個用いた例の断面図である。
ところが、このように基本単位リニアモータ２個を単に並べた場合、推力は２倍となるものの、体積、重量も当然２倍となり、大形化し、重量も２倍重くなってしまうという課題があった。
本発明はこれらの課題を解決するもので、基本単位リニアモータを複数個用いても、磁気回路に改良を加えることにより、小形、軽量化、高応答となるような複合ボイスコイル形リニアモータを提供することを目的とする。
【０００９】
【課題を解決するための手段】
上記問題を解決するために、請求項１記載の複合ボイスコイル形リニアモータの発明は、長手方向の中心軸に平行させた磁性体で構成した一対の外ヨーク間に平行させて設けた内ヨークと、前記外ヨークと前記内ヨークの両端部に設けた側ヨークとで日の字形に形成した閉鎖磁気回路と、前記外ヨークの内側に、外ヨークと内ヨークの対向する面に対向するものどうしの極性を逆にした永久磁石を設けて界磁を構成し、前記永久磁石間に、空隙を介し、非磁性体かつ絶縁体よりなるボビンにコイルを設けた電機子を、軸方向に移動自在に設け、前記外ヨークに設けた永久磁石を隣どうしの極性を逆にした同じ幅の複数の第１永久磁石とし、前記内ヨークに設けた永久磁石を隣どうしの極性を逆にした同じ幅の複数の第２永久磁石とし、前記第１永久磁石と第２永久磁石の対向するものどうしは異極性のなるよう配置し、前記コイルを前記第１永久磁石のピッチと等しいピッチに分割し、隣どうしの巻方向を逆にした直列あるいは並列のコイルとしたボイスコイル形リニアモータを基本単位とし、該基本単位のボイスコイル形リニアモータを２個積み重ねて成る複合ボイスコイル形リニアモータであって、第２のボイスコイル形リニアモータの永久磁石およびコイルの極性を第１のボイスコイル形リニアモータの永久磁石およびコイルの極性と全く逆とし、かつ第１と第２のボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする。
請求項２記載の発明は、請求項１記載の前記基本単位のボイスコイル形リニアモータを３個以上積み重ねて成る複合ボイスコイル形リニアモータであって、互いに隣接するボイスコイル形リニアモータの永久磁石およびコイルの極性を全く逆とし、かつ互いに隣接するボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする。
【００１０】
請求項３記載の複合ボイスコイル形リニアモータの発明は、長手方向の中心軸に平行させた磁性体で構成した一対の外ヨーク間に平行させて設けた内ヨークと、前記外ヨークと前記内ヨークの両端部に設けた側ヨークとで日の字形に形成した閉鎖磁気回路と、前記外ヨークの内側に、外ヨークと内ヨークの対向する面に対向するものどうしの極性を逆にした永久磁石を設けて界磁を構成し、前記永久磁石間に、空隙を介し、非磁性体かつ絶縁体よりなるボビンにコイルを設けた電機子を、軸方向に移動自在に設けたボイスコイル形リニアモータを基本単位とし、該基本単位のボイスコイル形リニアモータを２個積み重ねて成る複合ボイスコイル形リニアモータであって、第２のボイスコイル形リニアモータの永久磁石およびコイルの極性を第１のボイスコイル形リニアモータの永久磁石およびコイルの極性と全く逆とし、かつ第１と第２のボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする。
請求項４記載の発明は、請求項３記載の前記基本単位のボイスコイル形リニアモータを３個以上積み重ねて成る複合ボイスコイル形リニアモータであって、互いに隣接するボイスコイル形リニアモータの永久磁石およびコイルの極性を全く逆とし、かつ互いに隣接するボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする。
以上の構成によれば、各基本単位のボイスコイル形リニアモータどうしの重なり部の外ヨークを省いたことにより、小形化、軽量化、軽量化が得られる。
請求項５記載の発明は、請求項３又は４記載の複合ボイスコイル形リニアモータにおいて、前記内ヨークの中央部を分割して空隙を設けたことを特徴とする。
請求項６記載の発明は、請求項３又は４記載の複合ボイスコイル形リニアモータにおいて、前記内ヨークの中央部を非磁性体としたことを特徴とする。
以上の構成によれば、内ヨークの中央部を分割して空隙又は非磁性体としたことにより、前記に加え、電機子磁束を低減できるため、磁気飽和による推力の低下を防止でき、電源容量の節約、時定数小による応答性の向上が得られる。
【００１１】
請求項７記載の発明は、請求項１〜６のいずれか１項記載の複合ボイスコイル形リニアモータにおいて、前記内ヨーク側に設置した永久磁石と前記コイルの空隙に、非磁性体且つ導電体の金属管が前記永久磁石を囲むように配置して成ることを特徴とする。
以上の構成によれば、非磁性体且つ導電体の金属管が電流変化による誘起起電力を発生するようになるので、前記に加え、高速応答が得られる。
【００１２】
【発明の実施の形態】
以下、本発明の実施の形態について図面に基づいて詳細に説明する。
ところで、前述の図１１の上側半分の磁気回路を磁気回路Ａとし、図１１の下側半分の永久磁石の極性と電流の向きを磁気回路Ａと全く逆とした磁気回路Ｂとした場合を考えると図１２のようになり、Ｂの推力の向きは、永久磁石の極性と電流の向きが逆であるため、磁気回路Ａと同じであり、特性は図１１と同一となることに出願人は気がついた。
そこで、図１２において、磁気回路Ａの下側の外ヨーク１１Ｄ及び磁気回路Ｂの上側の外ヨーク１１ＢＵの接する部分には磁気回路Ａの永久磁石による界磁磁束（例えばΦ３）と磁気回路Ｂの永久磁石による界磁磁束（例えばΦ４）があるが、それぞれの磁束の向きは逆となるため打消し合い、磁気回路Ａと磁気回路Ｂが全く対称であるとすると、磁気回路Ａ及び磁気回路Ｂの接する外ヨークの磁束は零となる。もともと、ヨークは界磁磁束の磁路の役目をはたしているが、磁束が零であるため磁気回路Ａ及び磁気回路Ｂの接する外ヨーク１１は不要となる。
この点に着目して、磁気回路Ａ及び磁気回路Ｂの接する外ヨーク１１Ｄと１１ＢＵとを省略したものが本発明の実施の形態１である。
【００１３】
［発明の実施の形態１］
まず、発明の実施の形態１について説明する。
図１は本発明の実施の形態１に係るボイスコイル形リニアモータの断面図である。図において、１０は界磁、１１は外ヨーク、１２は内ヨーク、１３Ｒ、１３Ｌは側ヨーク、１４は溝、１５ａ、１５ｂは永久磁石、１７はボビン、１８ａはコイルである。
磁束について、例えば側ヨーク１３Ｒを通る磁束Φ１，Φ２、Φ３の流れを見ると、図１２に見られる磁束の流れのような２個縦に重ねた日の字形ではなくて、図１に示すように目の字形となる。
中央部の永久磁石１５ａ３および１５ａ４は、それぞれ磁気回路Ａと磁気回路Ｂの永久磁石を一体としたことになり、厚さは２倍となっているが、外ヨークの厚み分が小型化に寄与することとなる。しかも図１１と等価の特性を得られることになる。
以上のように、図１の本発明の実施の形態１に係るボイスコイル形リニアモータは図１１に比べ磁気回路Ａ及び磁気回路Ｂの接する外ヨークがない分だけ小形化していることがわかる。また、重量の重いヨークが省略できるため、軽量化され、応答のはやいボイスコイル形リニアモータが提供できる。
【００１４】
［発明の実施の形態２］
次に、発明の実施の形態２について説明する。
図２は本発明の実施の形態２に係るボイスコイル形リニアモータの断面図である。図において、図１と同じ符号のものはそれとおなじものを指しているので、説明は省略する。発明の実施の形態２に係るボイスコイル形リニアモータは、発明の実施の形態１の考えを延長したもので、磁気回路を３段以上とした場合である。例えば３段の場合は実施の形態１に示した磁気回路を磁気回路Ａ，磁気回路Ｂ，磁気回路Ａとすればよい。
さらに、４段の場合は磁気回路Ａ，磁気回路Ｂ，磁気回路Ａ，磁気回路Ｂとすればよいし、以下同様に段数を増すことができる。
図２では磁気回路を磁気回路Ａ，磁気回路Ｂ，磁気回路Ａとした場合の例を示す。
このように、発明の実施の形態２に係る図２のボイスコイル形リニアモータは、図１のそれと同様、小型化・軽量化となる効果が得られる。
【００１５】
［発明の実施の形態３］
次に、発明の実施の形態３について説明する。
図３は本発明の実施の形態３に係るボイスコイル形リニアモータの断面図である。図において、図１と同じ符号のものはそれとおなじものを指しているので、説明は省略する。発明の実施の形態３に係るボイスコイル形リニアモータは、図１の左右片側のみの構成としたものである。すなわち、長手方向の中心軸に平行させた磁性体で構成した上下一対の外ヨーク１１間に平行させて設けた２個の内ヨーク１２と、前記外ヨーク１１と前記内ヨーク１２の両端部に設けた側ヨーク１３とで目の字形に形成した閉鎖磁気回路と、前記外ヨーク１１の内側に、各外ヨーク１１と各内ヨーク１２の対向する面に対向するものどうしの極性を逆にした永久磁石を設けて界磁１０を構成し、前記永久磁石間に、空隙を介し、非磁性体かつ絶縁体よりなるボビン１７にコイルを設けた電機子２０を、軸方向に移動自在に設けたボイスコイル形リニアモータを構成している。
このように、ボイスコイル形リニアモータＣの永久磁石、コイルの極性を全く逆としたボイスコイル形リニアモータＤを磁気的に合成することにより、ボイスコイル形リニアモータＣとＤの重なり部の外ヨークを省き、目の字形閉鎖磁気回路の構成としたもので、発明の実施の形態３に係るボイスコイル形リニアモータは、図１のそれと同様、小型化・軽量化・高応答化できる効果が得られる。
【００１６】
［発明の実施の形態４］
次に、発明の実施の形態４について説明する。
図４は本発明の実施の形態４に係るボイスコイル形リニアモータの断面図である。図において、図１と同じ符号のものはそれとおなじものを指しているので、説明は省略する。発明の実施の形態４に係るボイスコイル形リニアモータは、実施の形態３の考えを延長し、磁気回路を３段以上とした場合である。
例えば３段の場合は実施の形態３にしめした磁気回路をＣ、Ｄ、Ｃとすればよい。
４段の場合はＣ、Ｄ、Ｃ、Ｄとすればよいし、以下同様に段数を増すことができる。
図４は磁気回路をＣ、Ｄ、Ｃとした場合を示している。
このように、発明の実施の形態４に係る図４のボイスコイル形リニアモータは、
実施の形態１、３と同様な効果が得られる。
【００１７】
［発明の実施の形態５］
次に、発明の実施の形態５について説明する。
図５は本発明の実施の形態５に係るボイスコイル形リニアモータの断面図である。図において、図１と同じ符号のものはそれとおなじものを指しているので、説明は省略する。発明の実施の形態５に係るボイスコイル形リニアモータは、図３におけるボイスコイル形リニアモータにおいて、内ヨーク１２の中央部を分割して空隙１９を設けたものである。
このような構成のものにおいて、コイルに図５に示す向きに電流を通電させると、破線で示すような電機子磁束が発生し、磁路の飽和による推力低下やコイルインダクタンスに起因する無効電力の増加や応答性の悪化が生じるものの、空隙１９はこれらの電機子磁束を遮るため、推力低下の防止や力率向上による電源容量の節約、電気的時定数小による応答性の向上に効果がある。
なお、界磁磁束は内ヨーク１２の中央部ではわずかしかなく、空隙１９と略平行であるため、空隙１９による界磁磁束への影響はほとんど無視できる。
以上、発明の実施の形態５について図３の例で説明したが、発明の実施の形態５はこれに限定されるものではなく、図４の場合においても同様に実施できる。
このように、発明の実施の形態５によれば、小型化・軽量化の他に、電源容量の節約、電気的時定数小による応答性の向上に効果がある。
【００１８】
［発明の実施の形態６］
次に、発明の実施の形態６について説明する。
図６は本発明の実施の形態６に係るボイスコイル形リニアモータの断面図である。図において、図１と同じ符号のものはそれとおなじものを指しているので、説明は省略する。発明の実施の形態６に係るボイスコイル形リニアモータは、図５の空隙１９を非磁性体２０に置き換えたものである。非磁性体は空隙と同様に電機子磁束を遮るため、図５と同じ効果、すなわち、小型化・軽量化の他に、電源容量の節約、電気的時定数小による応答性の向上に効果がある。
なお、図４の内ヨーク１２の中央部を分割して非磁性体２０を設けても同様である。
【００１９】
［発明の実施の形態７］
次に、発明の実施の形態７について説明する。
図７は本発明の実施の形態６に係るボイスコイル形リニアモータの断面図である。図において、図１と同じ符号のものはそれとおなじものを指しているので、説明は省略する。発明の実施の形態７に係るボイスコイル形リニアモータは、図１〜図６のボイスコイル形リニアモータにおいて、前記内ヨーク１２側に設置した永久磁石１５ｂと前記コイルの空隙に、非磁性体且つ導電体の金属管２１が前記永久磁石１５ｂを囲むように配置したものである。
図７はその代表として図１に適用した場合を示しているが、図２〜図６の場合も同様である。
図７において、内ヨーク１２の上側に永久磁石１５ｂ１、１５ｂ２、内ヨーク１２の下側に永久磁石１５ｂ３、１５ｂ４されており、それを取り囲むように非磁性体且つ導電体の金属管２１が配置され、さらにこの金属管２１と空隙を介してリニアモータの可動子側のボビン１７とコイル１８ａが配置されている。
このような構成にすることにより、金属管２１は、コイルに流れる電流が変化したとき誘起起電力が発生するので、電機子磁束を低減する作用があり、その結果、高速応答化に有効となる。
【００２０】
【発明の効果】
以上述べたように、本発明の実施の形態１〜４によれば、基本単位のボイスコイル形リニアモータを複数個積み重ねて成る複合ボイスコイル形リニアモータの場合に、互いに隣接するボイスコイル形リニアモータの永久磁石およびコイルの極性を全く逆とすることで、互いに隣接するボイスコイル形リニアモータの重なり部の外ヨークを省くようにできるので、小形化、軽量化、軽量化による高応答化の効果がある。
そして、実施の形態５および６によれば、内ヨークの中央部を分割して空隙にするか中央部を非磁性体としたので、前記実施の形態１〜４の持つ効果に加え、電機子磁束を低減できるため、磁気飽和による推力の低下を防止でき、電源容量の節約、時定数小による応答性の向上の効果がある。
さらに、実施の形態７によれば、内ヨーク側に設置した永久磁石と前記コイルの空隙に、非磁性体且つ導電体の金属管を前記永久磁石を囲むように配置したので、前記実施の形態１〜６の持つ効果に加え、高速応答の効果がある。
【図面の簡単な説明】
【図１】本発明の第１の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図２】本発明の第２の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図３】本発明の第３の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図４】本発明の第４の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図５】本発明の第５の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図６】本発明の第６の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図７】本発明の第７の実施の形態に係るボイスコイル形リニアモータの断面図である。
【図８】本発明の基礎となる先行発明に係るボイスコイル形リニアモータの断面図である。
【図９】図８の電機子部分の斜視図である。
【図１０】図９の電機子の組立状況を示す斜視図である。
【図１１】図８の基本単位リニアモータ２個を並設した例を示す断面図である。
【図１２】図１１の磁気回路を変更した場合を示す断面図である。
【符号の説明】
１０　　界磁
１１　　外ヨーク
１２　　内ヨーク
１３　　側ヨーク
１４　　溝
１５ａ，１５ｂ　永久磁石
１７　ボビン
１８ａ　コイル
１９　空隙
２０　非磁性体
２１　金属管[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a voice coil linear motor, and more particularly, to a compact, lightweight, high-response composite voice coil linear motor.
[0002]
[Prior art]
Conventionally, there has been a prior invention made by the present applicant as this type of voice coil type linear motor (for example, see Patent Document 1).
[0003]
[Patent Document 1]
JP-A-8-214530 (FIG. 1)
[0004]
This is achieved by using an inner yoke provided in parallel between a pair of outer yokes made of a magnetic material parallel to the central axis in the longitudinal direction, and side yokes provided at both ends of the outer yoke and the inner yoke. A closed magnetic circuit formed in the shape of a letter, and a permanent magnet in which the polarities of opposing surfaces of the outer yoke and the inner yoke are oppositely provided on the inner side of the outer yoke to form a field, An armature in which a coil is provided on a bobbin made of a non-magnetic material with an air gap therebetween, and an armature movably provided in the axial direction, and a permanent magnet provided in the outer yoke is the same width in which the polarities of adjacent magnets are reversed. And the permanent magnets provided on the inner yoke are a plurality of permanent magnets having the same width but with opposite polarities, and the opposing permanent magnets and the permanent magnets have different polarities. And the coil is connected to the permanent magnet. It is obtained by dividing the pitch equal pitch.
[0005]
Hereinafter, this prior invention (Japanese Patent Laid-Open No. 8-214530), which is the basis of the present invention, will be briefly described with reference to FIGS.
FIG. 8 is a cross-sectional view of the voice coil type linear motor according to the prior art, in which a pair of outer yokes 11U and 11D made of a flat ferromagnetic material provided in parallel with the central axis in the longitudinal direction include: The permanent magnets 15a1, 15a2, 15a3, 15a4 having the same width are magnetized to have the same polarity for the facing magnets and different magnetic polarities for the neighboring magnets, and are arranged at a predetermined pitch in the axial direction. A pair of side yokes 13R and 13L made of a flat ferromagnetic material are fixed to both sides of the outer yokes 11U and 11D so as to face each other.
At the center of the side yokes 13R and 13L, there are provided grooves 14R and 14L into which the rectangular inner yokes 12 are fitted. The ends of the inner yokes 12 are fitted into the grooves 14R and 14L by fitting the ends of the outer yokes 11U and 11D. The inner yoke 12 is fixed to the central axis.
On the upper and lower surfaces of the inner yoke 12, permanent magnets 15b1, 15b2, 15b3, 15b4, and those facing the permanent magnets 15a1, 15a2, 15a3, 15a4 are magnetized to different polarities, and the respective magnets 15a1, 15a2 , 15a3 and 15a4 are arranged in the axial direction.
Thus, the outer yokes 11U and 11D, the side yokes 13R and 13L, and the inner yoke 12 form a sun-shaped yoke, and permanent magnets 15a1 to 15a4 and 15b1 to 15b4 are arranged inside the yokes. The magnet 10 is constituted.
The armature 20 is disposed in the gap between the corresponding permanent magnets 15a1 to 15a4 and 15b1 to 15b4 movably in the axial direction with the gap between the inner and outer surfaces of the armature.
[0006]
The armature 20 includes a bobbin 17, a coil 18 (18a1, 18a2), and a flange 27. As shown in FIG. 9, the bobbin 17 has a tubular shape made of a non-magnetic material and has a tubular surface perpendicular to the axial direction. The cross section cut in the shape of a mouth has a mouth shape, a tubular partition is provided in the center part of the tubular axial direction, and coils 18a1 and 18a2 whose winding directions are opposite to each other are wound in the axial direction, The pitch is equal to the pitch of the permanent magnets 15a1 and 15a2.
On one or both side surfaces of the bobbin 17, an L-shaped thrust plate 19 having a flange 27 bent at a right angle to the axial direction at an axial end is fixed.
[0007]
FIG. 10 is a perspective view showing an assembling state of the armature 20 of FIG. 9. The armature 20 moves in the axial direction through the field 10 and the gap, and the thrust is taken out by connecting the work to the flange 27. It is.
With this configuration, the magnetic fluxes generated by the facing permanent magnets 15a to 15b are concentrated, and as shown by a dotted line in FIG.
(1) φ1 flowing through the central portions of the outer yoke 11 and the inner yoke 12 and the permanent magnets 15a and 15b;
(2) φ2L flowing through one end (left end in the figure) of the outer yoke 11U and the inner yoke 12, the side yoke 13L, and the permanent magnets 15a1 and 15b1;
(3) φ2R flowing through the other ends of the outer yoke 11U and the inner yoke 12 and the permanent magnets 15a2 and 15b2,
And the magnetic fluxes flowing through the yokes 11U and 12 are made uniform.
[0008]
[Problems to be solved by the invention]
In order to further increase the thrust of the voice coil linear motor, the required number of basic unit linear motors may be used with the voice coil linear motor as a basic unit.
FIG. 11 is a sectional view of an example in which the voice coil type linear motor of FIG. 8 is used as a basic unit and two basic unit linear motors are used.
However, when two basic unit linear motors are simply arranged in this way, the thrust is doubled, but the volume and weight are naturally doubled, the size is increased, and the weight is doubled. Was.
The present invention solves these problems. Even if a plurality of basic unit linear motors are used, by improving the magnetic circuit, a composite voice coil type linear motor having a small size, light weight, and high response can be obtained. The purpose is to provide.
[0009]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, an invention of a composite voice coil type linear motor according to claim 1 provides an inner yoke provided in parallel between a pair of outer yokes made of a magnetic material parallel to a central axis in a longitudinal direction. And a closed magnetic circuit formed in the shape of a sun by the outer yoke and side yokes provided at both ends of the inner yoke, and facing the opposing surfaces of the outer yoke and the inner yoke inside the outer yoke. An armature having a coil formed on a bobbin made of a non-magnetic material and an insulator is moved in the axial direction by providing permanent magnets having opposite polarities to form a field, and providing a coil between the permanent magnets through a gap between the permanent magnets. Arranged freely, the permanent magnets provided on the outer yoke are a plurality of first permanent magnets of the same width with opposite polarities, and the permanent magnets provided on the inner yoke are the same with opposite polarities. A plurality of second permanent magnets having a width; Opposite permanent magnets and second permanent magnets are arranged so as to have different polarities, the coil is divided into pitches equal to the pitch of the first permanent magnets, and serial or parallel in which the winding directions of adjacent magnets are reversed. A composite voice coil linear motor comprising a voice coil linear motor as a basic unit and two voice coil linear motors of the basic unit stacked, wherein a permanent magnet of a second voice coil linear motor is provided. And the polarity of the coil is completely opposite to the polarity of the permanent magnet and the coil of the first voice coil type linear motor, and the outer yoke of the overlapping portion of the first and second voice coil type linear motors is omitted. I do.
According to a second aspect of the present invention, there is provided a composite voice coil type linear motor in which three or more voice coil type linear motors of the basic unit are stacked, wherein permanent magnets of the voice coil type linear motors adjacent to each other are provided. In addition, the polarities of the coils are completely reversed, and the outer yoke at the overlapping portion of the voice coil linear motors adjacent to each other is omitted.
[0010]
According to a third aspect of the present invention, there is provided a composite voice coil type linear motor comprising: an inner yoke provided in parallel between a pair of outer yokes made of a magnetic material parallel to a central axis in a longitudinal direction; A closed magnetic circuit formed in the shape of a sun with side yokes provided at both ends of the yoke, and a permanent magnet in which the polarities of the opposing surfaces of the outer yoke and the inner yoke are reversed inside the outer yoke. A voice coil type linear in which an armature provided with a coil on a bobbin made of a non-magnetic material and an insulator is provided movably in the axial direction through a gap between the permanent magnets by providing a magnet and providing a field. A composite voice coil type linear motor in which a motor is used as a basic unit and two voice coil type linear motors of the basic unit are stacked, wherein the polarity of the permanent magnet and the coil of the second voice coil type linear motor is set to the second. Of the polarity of the voice coil type linear motor of the permanent magnet and the coil exactly the opposite, and is characterized in that omitted outer yoke of the first and overlapping portion of the second voice coil type linear motor.
According to a fourth aspect of the present invention, there is provided a composite voice coil type linear motor in which three or more voice coil type linear motors of the basic unit are stacked, wherein permanent magnets of the voice coil type linear motors adjacent to each other are provided. In addition, the polarities of the coils are completely reversed, and the outer yoke at the overlapping portion of the voice coil linear motors adjacent to each other is omitted.
According to the above configuration, the outer yoke in the overlapping portion between the voice coil type linear motors of the respective basic units is omitted, so that the size, weight, and weight can be reduced.
According to a fifth aspect of the present invention, in the composite voice coil type linear motor according to the third or fourth aspect, a gap is provided by dividing a central portion of the inner yoke.
According to a sixth aspect of the present invention, in the composite voice coil type linear motor of the third or fourth aspect, a central portion of the inner yoke is made of a non-magnetic material.
According to the above configuration, by dividing the central portion of the inner yoke into a gap or a non-magnetic material, in addition to the above, the armature magnetic flux can be reduced, so that a decrease in thrust due to magnetic saturation can be prevented, and the power supply capacity can be reduced. Savings and improved responsiveness due to small time constants.
[0011]
According to a seventh aspect of the present invention, in the composite voice coil type linear motor according to any one of the first to sixth aspects, a gap between the permanent magnet and the coil installed on the inner yoke side includes a non-magnetic material and a conductor. Is characterized by being arranged so as to surround said permanent magnet.
According to the above configuration, the nonmagnetic and conductive metal tube generates an induced electromotive force due to a change in current, so that a high-speed response can be obtained in addition to the above.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
By the way, it is assumed that the upper half magnetic circuit in FIG. 11 is a magnetic circuit A, and the lower permanent magnet in the lower half in FIG. As shown in FIG. 12, the direction of the thrust of B is the same as that of the magnetic circuit A because the polarity of the permanent magnet and the direction of the current are opposite, and the characteristics are the same as those of FIG. noticed.
Therefore, in FIG. 12, a field magnetic flux (for example, Φ3) by the permanent magnet of the magnetic circuit A and a magnetic flux of the magnetic circuit B Although there is a field magnetic flux (for example, Φ4) generated by the permanent magnets, the directions of the magnetic fluxes are opposite to each other and cancel each other out. Assuming that the magnetic circuit A and the magnetic circuit B are completely symmetric, the magnetic circuit A and the magnetic circuit B The magnetic flux of the outer yoke in contact with is zero. Originally, the yoke functions as a magnetic path of the field magnetic flux, but since the magnetic flux is zero, the outer yoke 11 in contact with the magnetic circuit A and the magnetic circuit B is not required.
Focusing on this point, Embodiment 1 of the present invention omits the outer yokes 11D and 11BU where the magnetic circuit A and the magnetic circuit B are in contact.
[0013]
[First Embodiment of the Invention]
First, Embodiment 1 of the invention will be described.
FIG. 1 is a sectional view of a voice coil type linear motor according to Embodiment 1 of the present invention. In the figure, 10 is a field, 11 is an outer yoke, 12 is an inner yoke, 13R and 13L are side yokes, 14 is a groove, 15a and 15b are permanent magnets, 17 is a bobbin, and 18a is a coil.
Regarding the magnetic flux, for example, looking at the flow of the magnetic fluxes Φ1, Φ2, and Φ3 passing through the side yoke 13R, as shown in FIG. It becomes the shape of an eye.
The permanent magnets 15a3 and 15a4 at the center are formed by integrating the permanent magnets of the magnetic circuit A and the magnetic circuit B respectively, and the thickness is doubled, but the thickness of the outer yoke contributes to miniaturization. Will be done. Moreover, characteristics equivalent to those in FIG. 11 can be obtained.
As described above, it can be seen that the voice coil linear motor according to Embodiment 1 of the present invention in FIG. 1 is smaller than that in FIG. 11 because there is no outer yoke in contact with the magnetic circuit A and the magnetic circuit B. Further, since a heavy yoke can be omitted, a voice coil type linear motor which is reduced in weight and has a quick response can be provided.
[0014]
[Embodiment 2]
Next, a second embodiment of the invention will be described.
FIG. 2 is a sectional view of a voice coil type linear motor according to Embodiment 2 of the present invention. In the figure, the same reference numerals as those in FIG. 1 indicate the same ones, and the description is omitted. The voice coil type linear motor according to the second embodiment of the present invention is an extension of the concept of the first embodiment of the present invention, in which the magnetic circuit has three or more stages. For example, in the case of three stages, the magnetic circuit shown in Embodiment 1 may be a magnetic circuit A, a magnetic circuit B, and a magnetic circuit A.
Furthermore, in the case of four stages, the magnetic circuit A, the magnetic circuit B, the magnetic circuit A, and the magnetic circuit B may be used, and the number of stages can be similarly increased.
FIG. 2 shows an example in which the magnetic circuit is a magnetic circuit A, a magnetic circuit B, and a magnetic circuit A.
As described above, the voice coil linear motor of FIG. 2 according to the second embodiment of the present invention has the effect of reducing the size and weight as in the case of FIG.
[0015]
Third Embodiment of the Invention
Next, a third embodiment of the invention will be described.
FIG. 3 is a sectional view of a voice coil type linear motor according to Embodiment 3 of the present invention. In the figure, the same reference numerals as those in FIG. 1 indicate the same ones, and the description is omitted. The voice coil type linear motor according to Embodiment 3 of the present invention has only one of the left and right sides in FIG. That is, two inner yokes 12 provided in parallel between a pair of upper and lower outer yokes 11 made of a magnetic material parallel to the central axis in the longitudinal direction, and both ends of the outer yoke 11 and the inner yoke 12 The closed magnetic circuit formed in the shape of an eye with the provided side yoke 13, and the polarity of the inside of the outer yoke 11, which opposes the facing surfaces of the outer yokes 11 and the inner yokes 12, are reversed. A field magnet 10 is provided by providing permanent magnets, and an armature 20 having a coil provided on a bobbin 17 made of a non-magnetic and insulating material is provided between the permanent magnets via a gap so as to be movable in the axial direction. It constitutes a voice coil type linear motor.
In this way, by combining the permanent magnet of the voice coil type linear motor C and the voice coil type linear motor D in which the polarity of the coil is completely reversed, the voice coil type linear motor C and the outside of the overlapping portion of the D are magnetically combined. The yoke is omitted, and the configuration is a closed-eye magnetic circuit. The voice coil linear motor according to the third embodiment of the present invention has the effect of reducing the size, weight, and response as in FIG. can get.
[0016]
[Embodiment 4]
Next, a fourth embodiment of the invention will be described.
FIG. 4 is a sectional view of a voice coil type linear motor according to Embodiment 4 of the present invention. In the figure, the same reference numerals as those in FIG. 1 indicate the same ones, and the description is omitted. The voice coil linear motor according to the fourth embodiment of the present invention is a case where the concept of the third embodiment is extended and the magnetic circuit has three or more stages.
For example, in the case of three stages, the magnetic circuits described in the third embodiment may be C, D, and C.
In the case of four stages, C, D, C, and D may be used, and the number of stages can be similarly increased.
FIG. 4 shows a case where the magnetic circuits are C, D, and C.
Thus, the voice coil linear motor of FIG. 4 according to Embodiment 4 of the present invention
The same effects as in the first and third embodiments can be obtained.
[0017]
[Embodiment 5]
Next, a fifth embodiment of the invention will be described.
FIG. 5 is a sectional view of a voice coil type linear motor according to Embodiment 5 of the present invention. In the figure, the same reference numerals as those in FIG. 1 indicate the same ones, and the description is omitted. The voice coil type linear motor according to the fifth embodiment of the present invention is the voice coil type linear motor shown in FIG. 3 in which a gap 19 is provided by dividing the center of the inner yoke 12.
In such a configuration, when a current is applied to the coil in the direction shown in FIG. 5, an armature magnetic flux as shown by a broken line is generated, and thrust reduction due to saturation of the magnetic path and reactive power due to the coil inductance are reduced. Although the air gap 19 blocks these armature magnetic fluxes, the gap 19 blocks the armature magnetic flux, but is effective in preventing a reduction in thrust, saving power supply capacity by improving the power factor, and improving response due to a small electric time constant. .
Since the field magnetic flux is very small at the center of the inner yoke 12 and is substantially parallel to the air gap 19, the influence of the air gap 19 on the field magnetic flux can be almost ignored.
As described above, the fifth embodiment of the present invention has been described with reference to the example of FIG. 3, but the fifth embodiment of the present invention is not limited to this and can be similarly implemented in the case of FIG.
As described above, according to the fifth embodiment of the present invention, in addition to the reduction in size and weight, there is an effect in saving power supply capacity and improving responsiveness due to a small electrical time constant.
[0018]
[Embodiment 6]
Next, a sixth embodiment of the invention will be described.
FIG. 6 is a sectional view of a voice coil type linear motor according to Embodiment 6 of the present invention. In the figure, the same reference numerals as those in FIG. 1 indicate the same ones, and the description is omitted. The voice coil type linear motor according to Embodiment 6 of the present invention is obtained by replacing the gap 19 in FIG. Since the non-magnetic material blocks the armature magnetic flux similarly to the air gap, it has the same effect as that of FIG. 5, that is, in addition to the reduction in size and weight, the effect of reducing power supply capacity and improving responsiveness by reducing the electrical time constant. is there.
The same applies when the non-magnetic body 20 is provided by dividing the center of the inner yoke 12 in FIG.
[0019]
[Embodiment 7]
Next, a seventh embodiment of the invention will be described.
FIG. 7 is a sectional view of a voice coil linear motor according to Embodiment 6 of the present invention. In the figure, the same reference numerals as those in FIG. 1 indicate the same ones, and the description is omitted. The voice coil linear motor according to Embodiment 7 of the present invention is the same as the voice coil linear motor of FIGS. 1 to 6, except that the gap between the permanent magnet 15 b installed on the inner yoke 12 side and the coil has a nonmagnetic material. The conductive metal tube 21 is disposed so as to surround the permanent magnet 15b.
FIG. 7 shows a case where the method is applied to FIG. 1 as a representative, but the same applies to the cases of FIGS.
In FIG. 7, permanent magnets 15b1 and 15b2 are provided above the inner yoke 12, and permanent magnets 15b3 and 15b4 are provided below the inner yoke 12, and a non-magnetic and conductive metal tube 21 is arranged so as to surround them. Further, a bobbin 17 and a coil 18a on the mover side of the linear motor are arranged via the metal tube 21 and a gap.
With such a configuration, the induced induced electromotive force is generated when the current flowing through the coil changes, so that the metal tube 21 has an effect of reducing the armature magnetic flux, and as a result, is effective for high-speed response. .
[0020]
【The invention's effect】
As described above, according to the first to fourth embodiments of the present invention, in the case of a composite voice coil type linear motor in which a plurality of basic units of voice coil type linear motors are stacked, the voice coil type linear motors adjacent to each other are combined. By completely reversing the polarity of the permanent magnet and coil of the motor, the outer yoke of the overlapping part of the voice coil linear motor adjacent to each other can be omitted, so that high response can be achieved by miniaturization, weight reduction, and weight reduction. effective.
According to the fifth and sixth embodiments, the central portion of the inner yoke is divided into a gap or a non-magnetic material is used at the central portion. Therefore, in addition to the effects of the first to fourth embodiments, the armature Since the magnetic flux can be reduced, a reduction in thrust due to magnetic saturation can be prevented, and there is an effect of saving power supply capacity and improving responsiveness due to a small time constant.
Further, according to the seventh embodiment, a metal tube made of a non-magnetic material and a conductive material is arranged in the gap between the permanent magnet provided on the inner yoke side and the coil so as to surround the permanent magnet. In addition to the effects of 1 to 6, there is an effect of high-speed response.
[Brief description of the drawings]
FIG. 1 is a sectional view of a voice coil type linear motor according to a first embodiment of the present invention.
FIG. 2 is a sectional view of a voice coil type linear motor according to a second embodiment of the present invention.
FIG. 3 is a sectional view of a voice coil type linear motor according to a third embodiment of the present invention.
FIG. 4 is a sectional view of a voice coil type linear motor according to a fourth embodiment of the present invention.
FIG. 5 is a sectional view of a voice coil type linear motor according to a fifth embodiment of the present invention.
FIG. 6 is a sectional view of a voice coil type linear motor according to a sixth embodiment of the present invention.
FIG. 7 is a sectional view of a voice coil type linear motor according to a seventh embodiment of the present invention.
FIG. 8 is a cross-sectional view of a voice coil type linear motor according to a prior invention on which the present invention is based.
FIG. 9 is a perspective view of the armature part of FIG. 8;
FIG. 10 is a perspective view showing an assembly state of the armature shown in FIG. 9;
11 is a sectional view showing an example in which two basic unit linear motors of FIG. 8 are juxtaposed.
FIG. 12 is a sectional view showing a case where the magnetic circuit of FIG. 11 is changed.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Field magnet 11 Outer yoke 12 Inner yoke 13 Side yoke 14 Groove 15a, 15b Permanent magnet 17 Bobbin 18a Coil 19 Air gap 20 Nonmagnetic material 21 Metal tube

Claims

長手方向の中心軸に平行させた磁性体で構成した一対の外ヨーク間に平行させて設けた内ヨークと、前記外ヨークと前記内ヨークの両端部に設けた側ヨークとで日の字形に形成した閉鎖磁気回路と、前記外ヨークの内側に、外ヨークと内ヨークの対向する面に対向するものどうしの極性を逆にした永久磁石を設けて界磁を構成し、前記永久磁石間に、空隙を介し、非磁性体かつ絶縁体よりなるボビンにコイルを設けた電機子を、軸方向に移動自在に設け、前記外ヨークに設けた永久磁石を隣どうしの極性を逆にした同じ幅の複数の第１永久磁石とし、前記内ヨークに設けた永久磁石を隣どうしの極性を逆にした同じ幅の複数の第２永久磁石とし、前記第１永久磁石と第２永久磁石の対向するものどうしは異極性のなるよう配置し、前記コイルを前記第１永久磁石のピッチと等しいピッチに分割し、隣どうしの巻方向を逆にした直列あるいは並列のコイルとしたボイスコイル形リニアモータを基本単位とし、該基本単位のボイスコイル形リニアモータを２個積み重ねて成る複合ボイスコイル形リニアモータであって、第２のボイスコイル形リニアモータの永久磁石およびコイルの極性を第１のボイスコイル形リニアモータの永久磁石およびコイルの極性と全く逆とし、かつ第１と第２のボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする複合ボイスコイル形リニアモータ。An inner yoke provided in parallel between a pair of outer yokes made of a magnetic material parallel to the central axis in the longitudinal direction, and a side yoke provided at both ends of the outer yoke and the inner yoke into a sun shape. The formed closed magnetic circuit, inside the outer yoke, providing a permanent magnet with the polarity of the opposing surfaces of the outer yoke and the inner yoke opposite to each other to form a field, between the permanent magnets An armature provided with a coil on a bobbin made of a non-magnetic material and an insulator via an air gap, provided movably in the axial direction, and a permanent magnet provided on the outer yoke having the same width in which the polarities of adjacent magnets are reversed. A plurality of first permanent magnets, and the permanent magnets provided on the inner yoke are a plurality of second permanent magnets of the same width with opposite polarities, and the first permanent magnets and the second permanent magnets are opposed to each other. Things are arranged so that they have different polarities, and the coil The basic unit is a voice coil type linear motor which is divided into pitches equal to the pitch of the first permanent magnet and is a series or parallel coil in which the winding directions of the adjacent permanent magnets are reversed. A composite voice coil linear motor comprising two stacked voice coils, wherein the polarity of the permanent magnet and coil of the second voice coil linear motor is completely opposite to the polarity of the permanent magnet and coil of the first voice coil linear motor. A composite voice coil type linear motor, wherein an outer yoke at an overlapping portion between the first and second voice coil type linear motors is omitted.

請求項１記載の前記基本単位のボイスコイル形リニアモータを３個以上積み重ねて成る複合ボイスコイル形リニアモータであって、互いに隣接するボイスコイル形リニアモータの永久磁石およびコイルの極性を全く逆とし、かつ互いに隣接するボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする複合ボイスコイル形リニアモータ。2. A composite voice coil type linear motor comprising three or more voice coil type linear motors of said basic unit stacked, wherein the polarity of the permanent magnets and coils of the adjacent voice coil type linear motors are completely reversed. A composite voice coil type linear motor characterized in that an outer yoke at an overlapping portion of the voice coil type linear motors adjacent to each other is omitted.

長手方向の中心軸に平行させた磁性体で構成した一対の外ヨーク間に平行させて設けた内ヨークと、前記外ヨークと前記内ヨークの両端部に設けた側ヨークとで日の字形に形成した閉鎖磁気回路と、前記外ヨークの内側に、外ヨークと内ヨークの対向する面に対向するものどうしの極性を逆にした永久磁石を設けて界磁を構成し、前記永久磁石間に、空隙を介し、非磁性体かつ絶縁体よりなるボビンにコイルを設けた電機子を、軸方向に移動自在に設けたボイスコイル形リニアモータを基本単位とし、該基本単位のボイスコイル形リニアモータを２個積み重ねて成る複合ボイスコイル形リニアモータであって、第２のボイスコイル形リニアモータの永久磁石およびコイルの極性を第１のボイスコイル形リニアモータの永久磁石およびコイルの極性と全く逆とし、かつ第１と第２のボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする複合ボイスコイル形リニアモータ。An inner yoke provided in parallel between a pair of outer yokes made of a magnetic material parallel to the central axis in the longitudinal direction, and a side yoke provided at both ends of the outer yoke and the inner yoke into a sun shape. The formed closed magnetic circuit, inside the outer yoke, providing a permanent magnet with the polarity of the opposing surfaces of the outer yoke and the inner yoke opposite to each other to form a field, between the permanent magnets A voice coil type linear motor, in which an armature provided with a coil on a bobbin made of a non-magnetic material and an insulator through an air gap is provided as a basic unit so as to be movable in the axial direction, and the voice coil type linear motor as the basic unit , A permanent magnet and a coil of the first voice coil type linear motor having the same polarity as the permanent magnet and the coil of the first voice coil type linear motor. Quite the contrary and gender, and the first composite voice coil type linear motor, characterized in that omitting an outer yoke of the overlapping portion of the second voice coil type linear motor.

請求項３記載の前記基本単位のボイスコイル形リニアモータを３個以上積み重ねて成る複合ボイスコイル形リニアモータであって、互いに隣接するボイスコイル形リニアモータの永久磁石およびコイルの極性を全く逆とし、かつ互いに隣接するボイスコイル形リニアモータの重なり部の外ヨークを省いたことを特徴とする複合ボイスコイル形リニアモータ。4. A composite voice coil type linear motor comprising three or more voice coil type linear motors of said basic unit stacked, wherein the permanent magnets and coils of adjacent voice coil type linear motors have completely opposite polarities. A composite voice coil type linear motor characterized in that an outer yoke at an overlapping portion of the voice coil type linear motors adjacent to each other is omitted.

前記内ヨークの中央部を分割して空隙を設けたことを特徴とする請求項３又は４記載の複合ボイスコイル形リニアモータ。5. The composite voice coil type linear motor according to claim 3, wherein a gap is provided by dividing a central portion of said inner yoke.

前記内ヨークの中央部を非磁性体としたことを特徴とする請求項３又は４記載の複合ボイスコイル形リニアモータ。5. The composite voice coil type linear motor according to claim 3, wherein a central portion of said inner yoke is made of a non-magnetic material.

前記内ヨーク側に設置した永久磁石と前記コイルの空隙に、非磁性体且つ導電体の金属管が前記永久磁石を囲むように配置して成ることを特徴とする請求項１〜６のいずれか１項記載の複合ボイスコイル形リニアモータ。7. A non-magnetic and conductive metal tube is arranged in a space between the permanent magnet and the coil provided on the inner yoke side so as to surround the permanent magnet. 2. The composite voice coil type linear motor according to claim 1.