JP2003315302A - Biosensor and manufacturing method therefor - Google Patents
Biosensor and manufacturing method thereforInfo
- Publication number
- JP2003315302A JP2003315302A JP2002121713A JP2002121713A JP2003315302A JP 2003315302 A JP2003315302 A JP 2003315302A JP 2002121713 A JP2002121713 A JP 2002121713A JP 2002121713 A JP2002121713 A JP 2002121713A JP 2003315302 A JP2003315302 A JP 2003315302A
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- JP
- Japan
- Prior art keywords
- electrode
- film
- biosensor
- manufacturing
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば血液中のグ
ルコース等の液体試料中の特定成分を迅速、容易に且つ
正確に定量できるバイオセンサの構造とその製造方法及
びこの製造方法を用い作製した製品に関する。TECHNICAL FIELD The present invention relates to a structure of a biosensor capable of quantifying a specific component in a liquid sample such as glucose in blood rapidly, easily and accurately, a method for producing the biosensor, and a method for producing the biosensor. Regarding the product.
【０００２】[0002]
【従来の技術】バイオセンサの代表的なものとして、電
極に生理活性物質を固定しておき、バイアスを与えた状
態で電極から取り出される電気信号に基づいて測定対象
物質の存在量を検知するもの、例えばＰｔで対照電極及
び作用電極を形成し固定化酵素膜と対象物質との反応に
より生成される過酸化水素を透過膜を通して電極表面に
導き、この量に対応した電気信号を取り出して測定対象
物質の存在量を検知するものが提案されている。2. Description of the Related Art A typical biosensor is one in which a physiologically active substance is fixed to an electrode and the amount of the substance to be measured is detected based on an electric signal taken out from the electrode in a biased state. , For example, a control electrode and a working electrode are formed of Pt, hydrogen peroxide generated by the reaction between the immobilized enzyme membrane and the target substance is guided to the electrode surface through the permeable membrane, and an electric signal corresponding to this amount is taken out to be measured. A device that detects the abundance of a substance has been proposed.
【０００３】このようなバイオセンサを再現性良く量産
化するために、大型絶縁基板上に作用極及び対照極をフ
ォトリソグラフイーにより形成し、酵素膜や透過膜とい
った有機膜材料を塗布し反応層を形成する方法が考えら
れている。In order to mass-produce such a biosensor with good reproducibility, a working electrode and a control electrode are formed on a large insulating substrate by photolithography, and an organic film material such as an enzyme film or a permeable film is applied to form a reaction layer. A method of forming the is considered.
【０００４】従来技術でのバイオセンサの製造方法につ
いて、その一例を図１６、図１７及び図１８を用いて説
明する。図１８の工程図は、図１６の斜視図、図１７の
断面図に示すバイオセンサの製造方法である。An example of a conventional biosensor manufacturing method will be described with reference to FIGS. 16, 17 and 18. The process drawing of FIG. 18 is a method for manufacturing the biosensor shown in the perspective view of FIG. 16 and the sectional view of FIG.
【０００５】先ず、図１８の（Ａ）〔以下「図１８」省
略〕の如く、 Ｓｉ等の絶縁基板（１）を用意し、Ｔｉ
膜とＰｔ膜（５ｅ）を一連の着膜により積層し（Ｂ）、
熱処理を施した後、作用極（２ａ）の電極部（２１）、
リード部（２２）及び電極パッド部（２３）と対照極
（２ｂ）の電極パッド（２３’）をイオンミリングによ
り形成し（Ｃ）、フォトリソグラフイーにより対照極の
電極部（２１）及びリード部（２２）を形成しておき、
Ｔｉ膜とＡｇ膜（５ｆ）を一連の着膜により積層し
（Ｄ）、リフトオフによりパターンを形成し（Ｅ）、作
用極と対照極の電極部、 リード部及び電極パッド部の
露出不要部に絶縁層（４）を形成後（Ｆ）、作用極と対
照極の電極部上に反応層（３）を形成（Ｇ）して作製し
たものである。First, an insulating substrate (1) such as Si is prepared as shown in FIG.
A film and a Pt film (5e) are laminated by a series of deposition films (B),
After heat treatment, the electrode part (21) of the working electrode (2a),
The lead part (22) and the electrode pad part (23) and the electrode pad (23 ') of the reference electrode (2b) are formed by ion milling (C), and the electrode part (21) of the reference electrode and the lead part are formed by photolithography. (22) is formed,
A Ti film and an Ag film (5f) are laminated by a series of deposition films (D), and a pattern is formed by lift-off (E), and the exposed portions of the working electrode and the control electrode, the lead part and the electrode pad part are not exposed. After the insulating layer (4) is formed (F), the reaction layer (3) is formed (G) on the electrode portions of the working electrode and the control electrode, which is prepared.
【０００６】[0006]
【発明が解決しようとする課題】上記の様に、対照極の
電極部と電極パッドをリード部で繋ぐ形状では構造的に
不安定なだけではなく、主に作用極の形成のための着膜
と対照極の形成のための着膜と着膜工程が二度になるた
め、１回目に着膜した膜と２回目に着膜した膜との間の
密着性が悪くなることと、電極パッドとリード部の繋ぎ
目の構造、そして、工程及び製造方法に改善の余地があ
った。As described above, the shape in which the electrode portion of the reference electrode and the electrode pad are connected by the lead portion is not only structurally unstable, but is mainly a film-forming film for forming the working electrode. Since the film forming process and the film forming process for forming the control electrode are performed twice, the adhesion between the first film formed and the second film formed becomes poor, and the electrode pad There is room for improvement in the structure of the joint between the lead and the lead, and the process and manufacturing method.
【０００７】[0007]
【課題を解決するための手段】そこで、本発明のバイオ
センサは、作用極及び対照極の電極系における電極、リ
ード及び電極パッドを一体的な形状に形成し、構造的簡
略化を行った。Therefore, in the biosensor of the present invention, the electrodes, leads and electrode pads in the electrode system of the working electrode and the control electrode are formed in an integral shape to simplify the structure.
【０００８】次に、本発明のバイオセンサの製造方法
は、一連の着膜により積層された膜から作用極及び対照
極の電極系における電極、リード及び電極パッドを一体
的な形状に形成する製造方法とした。Next, the biosensor manufacturing method of the present invention is a manufacturing method in which electrodes, leads, and electrode pads in an electrode system of a working electrode and a control electrode are integrally formed from a film laminated by a series of deposition films. It was a method.
【０００９】また本発明は、一連の着膜により積層した
膜から作用極及び対照極の電極系における電極、リード
及び電極パッドを形成し、工程の簡略化を行った。Further, according to the present invention, electrodes, leads and electrode pads in the working electrode and control electrode systems are formed from films laminated by a series of deposition films to simplify the process.
【００１０】本発明における、Ｔｉ、Ｎｉ、Ｃｒ及びＴ
ａからなる群から選ばれた一種以上の金属を含む膜とし
ては、これらの金属単体又は合金からなる膜、これらの
金属の酸化物又は窒化物からなる膜、また、これらの金
属に微量成分として他の金属が含まれた膜であっても良
い。In the present invention, Ti, Ni, Cr and T
As the film containing one or more metals selected from the group consisting of a, a film made of these metal simple substances or alloys, a film made of oxides or nitrides of these metals, or as a trace component in these metals It may be a film containing another metal.
【００１１】[0011]
【作用】図１の斜視図、図２の断面図に示す本発明のバ
イオセンサは、絶縁基板（１）上に電極系と絶縁層
（４）及び反応層（３）を有している。電極系は、電極
部（２１）、リード部（２２）及び電極パッド部（２
３）からなる作用極（２ａ）及び対照極（２ｂ）と絶縁
層から構成されている。作用極及び対照極は、電極、リ
ード及び電極パッドが一体的な形状に形成され、従来の
製造方法のように図１７のＣ−Ｃ’断面図にあるような
作用極のリード部と電極パッドとの段差ができることも
なく、図２のＣ−Ｃ’断面図のようになり構造的簡略化
がなされている。また、作用極及び対照極の膜構成は、
一連の着膜により積層されたものであり、その結果、従
来の製造方法においては着膜工程を２回行っていたが１
回で済むことになった。そして、一連の着膜により積層
することにより膜の密着性が良くなることから、Ｐｔ膜
とＡｇ膜の問のＴｉ膜を省くことができ、工程の省略と
材料の削減に繋がった。また絶縁層は、電極部、 リー
ド部及び電極パッド部の露出不要部を覆う構造をなして
いる。酵素等の生体関連物質を含む反応層は、電極部上
に設けられている。The biosensor of the present invention shown in the perspective view of FIG. 1 and the sectional view of FIG. 2 has an electrode system, an insulating layer (4) and a reaction layer (3) on an insulating substrate (1). The electrode system includes an electrode part (21), a lead part (22) and an electrode pad part (2).
3) is composed of a working electrode (2a) and a control electrode (2b) and an insulating layer. The working electrode and the control electrode are formed such that the electrode, the lead and the electrode pad are integrally formed, and the lead portion and the electrode pad of the working electrode as shown in the CC ′ sectional view of FIG. There is no step between and, and the structure is simplified as shown in the sectional view taken along the line CC ′ of FIG. 2. In addition, the membrane composition of the working electrode and the control electrode is
They are laminated by a series of film deposition, and as a result, the film deposition process was performed twice in the conventional manufacturing method.
It will be done in a single time. Then, since the film adhesion is improved by stacking a series of deposition films, it is possible to omit the Ti film between the Pt film and the Ag film, which leads to omission of steps and reduction of materials. Further, the insulating layer has a structure that covers the exposed portions of the electrode portion, the lead portion and the electrode pad portion. The reaction layer containing a biological substance such as an enzyme is provided on the electrode portion.
【００１２】[0012]
【発明の実施形態】以下、本発明を以下の実施例を用い
て説明する。BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described below with reference to the following examples.
【００１３】[0013]
【実施例１】本発明のバイオセンサ及びその製造方法つ
いて、一実施例を図１、図２及び図３を用いて説明す
る。図１の斜視図、図２の断面図に示す本発明のバイオ
センサは、作用極（２ａ）及び対照極（２ｂ）の電極部
（２１）、リード部（２２）及び電極パッド部（２３）
が一体的な形状に形成され、その膜構成は、一連の着膜
により積層されたことを特徴とし、絶縁層（４）は、電
極部、リード部及び電極パッド部の露出不要部を覆う構
造を成し、酵素等の生体関連物質を含む反応層（３）
は、電極部上に設けられている。Example 1 An example of the biosensor of the present invention and a method for manufacturing the same will be described with reference to FIGS. 1, 2 and 3. The biosensor of the present invention shown in the perspective view of FIG. 1 and the sectional view of FIG. 2 has an electrode part (21), a lead part (22) and an electrode pad part (23) of a working electrode (2a) and a control electrode (2b).
Is formed in an integral shape, and its film structure is laminated by a series of depositions. The insulating layer (4) covers the electrode portion, the lead portion and the electrode pad portion which are not exposed. And a reaction layer containing a biological substance such as an enzyme (3)
Are provided on the electrode portion.
【００１４】次に、本発明のバイオセンサの製造方法つ
いて、図３の工程図を参照しながら説明する。先ず、図
３の（Ａ）〔以下「図３」は省略〕の如く、Ｓｉ等の絶
縁基板（１）を用意し、Ｔｉ膜、Ｐｔ膜及びＡｇ膜を一
連の着膜により積層（５ａ）し（Ｂ）、作用極（２ａ）
及び対照極（２ｂ）の電極部（２１）、リード部（２
２）及び電極パッド部（２３）を一体的な形状にイオン
ミリングによって形成し（ｃ）、対照極（２ｂ）の電極
部（２１）及びリード部（２２）をフォトリソグラフイ
ーにより保護してその他の電極系のＡｇ膜をエッチング
することにより、作用極及び対照極を形成し（Ｄ）、作
用極及び対照極の電極部、リード部及び電極パッド部の
露出不要部に絶縁層（４）を形成後（Ｅ）、作用極と対
照極の電極部上に反応層（３）を形成（Ｆ）して製造し
たものである。Next, a method for manufacturing the biosensor of the present invention will be described with reference to the process chart of FIG. First, as shown in FIG. 3A (hereinafter, “FIG. 3” is omitted), an insulating substrate (1) such as Si is prepared, and a Ti film, a Pt film, and an Ag film are laminated by a series of deposition films (5a). (B), working electrode (2a)
And the electrode portion (21) of the control electrode (2b) and the lead portion (2
2) and the electrode pad part (23) are integrally formed by ion milling (c), and the electrode part (21) and the lead part (22) of the control electrode (2b) are protected by photolithography. The working electrode and the control electrode are formed by etching the Ag film of the electrode system of (D), and the insulating layer (4) is provided on the electrode portion of the working electrode and the control electrode, the lead portion and the electrode pad portion which are not exposed. After the formation (E), the reaction layer (3) is formed (F) on the electrode portions of the working electrode and the control electrode to manufacture.
【００１５】[0015]
【実施例２】本発明のバイオセンサ及びその製造方法つ
いて、一実施例を図４、図５及び図６を用いて説明す
る。図４の斜視図、図５の断面図に示す本発明のバイオ
センサは、作用極（２ａ）及び対照極（２ｂ）の電極部
（２１）、リード部（２２）及び電極パッド部（２３）
が一体的な形状に形成され、その膜構成は、一連の着膜
により積層されることを特徴とし、絶縁層（４）は、電
極部、リード部及び電極パッド部の露出不要部を覆う構
造を成し、酵素等の生体関連物質を含む反応層（３）
は、電極部上に設けられている。Example 2 An example of the biosensor of the present invention and a method for manufacturing the same will be described with reference to FIGS. 4, 5 and 6. The biosensor of the present invention shown in the perspective view of FIG. 4 and the sectional view of FIG. 5 has an electrode part (21), a lead part (22) and an electrode pad part (23) of a working electrode (2a) and a control electrode (2b).
Are formed in an integral shape, and the film structure is formed by laminating a series of deposition films. The insulating layer (4) covers the electrode portion, the lead portion and the electrode pad portion which are not exposed. And a reaction layer containing a biological substance such as an enzyme (3)
Are provided on the electrode portion.
【００１６】次に、本発明のバイオセンサの製造方法つ
いて、図６の工程図を参照しながら説明する。先ず、図
６の（Ａ）〔以下「図６」は省略〕の如く、Ｓｉ等の絶
縁基板（１）を用意し、Ｃｒ膜、Ａｕ膜、Ｃｒ膜及びＰ
ｔ膜を一連の着膜により積層（５ｂ）し（Ｂ）、作用極
（２ａ）及び対照極（２ｂ）の電極部（２１）、リード
部（２２）及び電極パッド部（２３）を一体的な形状に
イオンミリングにより形成し（ｃ）、対照極（２ｂ）の
電極部（２１）及びリード部（２２）をフォトリソグラ
フイーにより保護してその他の電極系のＰｔ膜とＣｒ膜
の一部をイオンミリングによりエッチングし、さらに、
Ｃｒ膜をエッチングすることにより作用極及び対照極を
形成し（Ｄ）、作用極及び対照極の電極部、リード部及
び電極パッド部の露出不要部に絶縁層（４）を形成後
（Ｅ）、作用極と対照極の電極部上に反応層（３）を形
成（Ｆ）して製造したものである。Next, a method for manufacturing the biosensor of the present invention will be described with reference to the process chart of FIG. First, as shown in FIG. 6A (hereinafter, “FIG. 6” is omitted), an insulating substrate (1) such as Si is prepared, and a Cr film, an Au film, a Cr film, and a P film are formed.
The t film is laminated (5b) by a series of film depositions (B), and the electrode part (21), the lead part (22) and the electrode pad part (23) of the working electrode (2a) and the control electrode (2b) are integrated. (C) of the electrode (21) and the lead (22) of the reference electrode (2b) are protected by photolithography to form a Pt film and a part of the Cr film of the other electrode system. Is etched by ion milling, and
A working electrode and a control electrode are formed by etching the Cr film (D), and an insulating layer (4) is formed on the electrode portions of the working electrode and the control electrode, lead portions and electrode pad portions which are not exposed (E). The reaction layer (3) is formed (F) on the electrode portions of the working electrode and the control electrode.
【００１７】[0017]
【実施例３】本発明の２電極式バイオセンサ及びその製
造方法ついて、一実施例を図７〜図９、図１３及び図１
４を用いて説明する。図７の斜視図、図８の断面図に示
す本発明のバイオセンサは、作用極（２ａ）及び対照極
（２ｂ）の電極部（２１）、リード部（２２）及び電極
パッド部（２３）が一体的な形状に形成され、その膜構
成は、一連の着膜により積層されたことを特徴とし、絶
縁層（４）は、電極部、リード部及び電極パッド部の露
出不要部を覆う構造を成し、酵素等の生体関連物質を含
む反応層（３）は、電極部上に設けられている。[Embodiment 3] One embodiment of the two-electrode biosensor of the present invention and its manufacturing method is shown in FIGS. 7 to 9, FIG. 13 and FIG.
4 will be described. The biosensor of the present invention shown in the perspective view of FIG. 7 and the sectional view of FIG. 8 has an electrode part (21), a lead part (22) and an electrode pad part (23) of a working electrode (2a) and a control electrode (2b). Is formed in an integral shape, and its film structure is laminated by a series of depositions. The insulating layer (4) covers the electrode portion, the lead portion and the electrode pad portion which are not exposed. And a reaction layer (3) containing a biological substance such as an enzyme is provided on the electrode part.
【００１８】そして、図１３のカートリッジケース分解
断面図、図１４のカートリッジケース外観図に示すよう
に、カートリッジケースに浸水防止を施し、封止した２
電極式バイオセンサである。Then, as shown in the exploded cross-sectional view of the cartridge case of FIG. 13 and the external view of the cartridge case of FIG.
It is an electrode type biosensor.
【００１９】次に、本発明のバイオセンサの製造方法つ
いて、図９の工程図を参照しながら説明する。先ず、図
９の（Ａ）〔以下「図９」は省略〕の如く、Ｓｉ等の絶
縁基板（１）を用意し、フォトリソグラフイーにより作
用極（２ａ）及び対照極（２ｂ）の電極部（２１）、リ
ード部（２２）及び電極パッド部（２３）を一体的な形
状に形成しておき、Ｔａ２Ｎ膜、Ｐｔ膜及びＡｇ膜を一
連の着膜により積層（５ｃ）し（Ｂ）、リフトオフによ
りパターンを形成し（ｃ）、対照極（２ｂ）の電極部
（２１）及びリード部（２２）をフォトリソグラフイー
により保護してその他の電極系のＡｇ膜をエッチングす
ることにより、作用極及び対照極を形成し（Ｄ）、作用
極及び対照極の電極部、リード部及び電極パッド部の露
出不要部に絶縁層（４）を形成後（Ｅ）、作用極と対照
極の電極部上に反応層（３）を形成（Ｆ）して製造した
ものである。Next, a method for manufacturing the biosensor of the present invention will be described with reference to the process chart of FIG. First, as shown in FIG. 9A ([FIG. 9] is omitted hereinafter), an insulating substrate (1) such as Si is prepared, and the electrode portions of the working electrode (2a) and the control electrode (2b) are prepared by photolithography. (21), the lead part (22) and the electrode pad part (23) are integrally formed, and a Ta 2 N film, a Pt film and an Ag film are laminated (5c) by a series of deposition films (B). ), A pattern is formed by lift-off (c), the electrode part (21) and the lead part (22) of the control electrode (2b) are protected by photolithography, and the Ag film of the other electrode system is etched, After forming a working electrode and a control electrode (D), and after forming an insulating layer (4) on the unexposed portions of the electrode part, the lead part and the electrode pad part of the working electrode and the control electrode (E), the working electrode and the control electrode It is manufactured by forming (F) a reaction layer (3) on the electrode part. .
【００２０】次に、図１３に示すようにカートリッジケ
ース下部（７）に固定し、各電極パッド部をバネ式のコ
ンタクトプローブ（８）で押さえる。カートリッジケー
ス上部（６）には浸水防止のためにＯリング（９）を取
り付け、このＯリングで電極まわりを押さえ、カートリ
ッジケース上下を接着、封止して図１４に示す２電極式
バイオセンサが完成した。Next, as shown in FIG. 13, the cartridge is fixed to the lower part (7) of the cartridge case, and each electrode pad part is pressed by the spring type contact probe (8). An O-ring (9) is attached to the upper part (6) of the cartridge case to prevent water from entering, and the O-ring is pressed around the electrodes, and the upper and lower parts of the cartridge case are adhered and sealed to obtain the two-electrode biosensor shown in FIG. completed.
【００２１】[0021]
【実施例４】本発明の３電極式バイオセンサ及びその製
造方法ついて、一実施例を図１０〜図１２、図１３及び
図１５を用いて説明する。図１０の斜視図、図１１の断
面図に示す本発明のバイオセンサは、作用極（２ａ）、
対照極（２ｂ）及び参照極（２ｃ）の電極部（２１）、
リード部（２２）及び電極パッド部（２３）が一体的な
形状に形成され、その膜構成は、一連の着膜により積層
されたことを特徴とし、絶縁層（４）は、電極部、リー
ド部及び電極パッド部の露出不要部を覆う構造を成し、
酵素等の生体関連物質を含む反応層（３）は、電極部上
に設けられている。[Embodiment 4] A three-electrode type biosensor of the present invention and a method for manufacturing the same will be described with reference to FIGS. 10 to 12, 13 and 15. The biosensor of the present invention shown in the perspective view of FIG. 10 and the sectional view of FIG. 11 has a working electrode (2a),
The electrode parts (21) of the control electrode (2b) and the reference electrode (2c),
The lead part (22) and the electrode pad part (23) are formed in an integral shape, and the film structure thereof is characterized by being laminated by a series of depositions. The insulating layer (4) is composed of an electrode part and a lead. Part and the structure that covers the unexposed part of the electrode pad part,
The reaction layer (3) containing a biological substance such as an enzyme is provided on the electrode part.
【００２２】そして、図１３のカートリッジケース分解
断面図、図１５のカートリッジケース外観図に示すよう
に、カートリッジケースに浸水防止を施し、封止した３
電極式バイオセンサである。Then, as shown in the exploded cross-sectional view of the cartridge case of FIG. 13 and the external view of the cartridge case of FIG.
It is an electrode type biosensor.
【００２３】次に、本発明のバイオセンサの製造方法つ
いて、図１２の工程図を参照しながら説明する。先ず、
図１２の（Ａ）〔以下「図１２」は省略〕の如く、Ｓｉ
等の絶縁基板（１）を用意し、ＮｉＣｒ膜、Ａｕ膜及び
Ａｇ膜を一連の着膜により積層（５ｄ）し（Ｂ）、作用
極（２ａ）、対照極（２ｂ）及び参照極（２ｃ）の電極
部（２１）、リード部（２２）及び電極パッド部（２
３）を一体的な形状にエッチングし（ｃ）、参照極（２
ｃ）の電極部（２１）及びリード部（２２）をフォトリ
ソグラフイーにより保護してその他の電極系のＡｇ膜を
エッチングすることにより、作用極、対照極及び参照極
を形成し（Ｄ）、作用極、対照極及び参照極の電極部、
リード部及び電極パッド部の露出不要部に絶縁層（４）
を形成後（Ｅ）、作用極、対照極及び参照極の電極部上
に反応層（３）を形成（Ｆ）して製造したものである。Next, a method for manufacturing the biosensor of the present invention will be described with reference to the process chart of FIG. First,
As shown in FIG. 12A ([FIG. 12] is omitted below), Si
An insulating substrate (1) such as the above is prepared, and a NiCr film, an Au film and an Ag film are laminated (5d) by a series of deposition films (B), a working electrode (2a), a control electrode (2b) and a reference electrode (2c). ) Electrode part (21), lead part (22) and electrode pad part (2)
3) is etched into an integral shape (c), and the reference electrode (2
The electrode part (21) and the lead part (22) of c) are protected by photolithography and the Ag film of the other electrode system is etched to form a working electrode, a control electrode and a reference electrode (D), Working electrode, control electrode and reference electrode,
Insulation layer (4) on the exposed parts of the lead and electrode pads
After the formation of (E), the reaction layer (3) is formed (F) on the electrode portions of the working electrode, the control electrode and the reference electrode, and the electrode is manufactured.
【００２４】次に、図１３に示すようにカートリッジケ
ース下部（７）に固定し、各電極パッド部をバネ式のコ
ンタクトプローブ（８）で押さえる。カートリッジケー
ス上部（６）には浸水防止のためにＯリング（９）を取
り付け、このＯリングで電極まわりを押さえ、カートリ
ッジケース上下を接着、封止して図１５に示す３電極式
バイオセンサが完成した。Next, as shown in FIG. 13, the cartridge is fixed to the lower part (7) of the cartridge case, and each electrode pad part is pressed by a spring type contact probe (8). An O-ring (9) is attached to the upper part (6) of the cartridge case to prevent water from entering, and the O-ring is pressed around the electrodes to adhere and seal the upper and lower parts of the cartridge case to obtain the three-electrode biosensor shown in FIG. completed.
【００２５】以上実施例にそって本発明を説明してきた
が、本発明はこれらに制限されるものではない。例え
ば、電極部の膜の構成、一連の着膜による積層回数及び
一体的な形状に形成する製造方法等の種々の変更、組み
合わせが可能であることは自明である。Although the present invention has been described with reference to the embodiments, the present invention is not limited to these. For example, it is obvious that various changes and combinations of the structure of the film of the electrode portion, the number of laminations by a series of film depositions, the manufacturing method for forming an integral shape, and the like are possible.
【００２６】[0026]
【発明の効果】以上説明したように本発明によれば、バ
イオセンサの電極形成において一連の着膜により積層す
ることができ、電極系を一体的な形状に形成することに
より工程を省略することができ、そして膜の安定性が良
いバイオセンサができる。また、本発明の製造方法によ
れば、一工程の全部又は一部が省略され材料の削減にも
なり、廃棄物の削減及び生産性の向上がなされバイオセ
ンサを容易に製造することができる。As described above, according to the present invention, a series of films can be laminated in forming electrodes of a biosensor, and the steps can be omitted by forming the electrode system into an integral shape. And a biosensor with good membrane stability can be obtained. Further, according to the manufacturing method of the present invention, all or part of one step is omitted, the material is reduced, the waste is reduced and the productivity is improved, and the biosensor can be easily manufactured.
【図１】本発明の実施例１の範囲に於けるバイオセンサ
の斜視図であるFIG. 1 is a perspective view of a biosensor according to a first embodiment of the present invention.
【図２】図１の本発明のバイオセンサの断面図であるFIG. 2 is a cross-sectional view of the biosensor of the present invention in FIG.
【図３】図１の本発明のバイオセンサの製造工程図であ
るFIG. 3 is a manufacturing process diagram of the biosensor of the present invention in FIG. 1.
【図４】本発明の実施例２の範囲に於けるバイオセンサ
の斜視図であるFIG. 4 is a perspective view of a biosensor in the range of Example 2 of the present invention.
【図５】図４の本発明のバイオセンサの断面図である5 is a cross-sectional view of the biosensor of the present invention in FIG.
【図６】図４の本発明のバイオセンサの製造工程図であ
るFIG. 6 is a manufacturing process diagram of the biosensor of the present invention in FIG. 4;
【図７】本発明の実施例３の範囲に於けるバイオセンサ
の斜視図であるFIG. 7 is a perspective view of a biosensor in the range of Example 3 of the present invention.
【図８】図７の本発明のバイオセンサの断面図である8 is a cross-sectional view of the biosensor of the present invention in FIG.
【図９】図７の本発明のバイオセンサの製造工程図であ
るFIG. 9 is a manufacturing process diagram of the biosensor of the present invention in FIG. 7.
【図１０】本発明の実施例４の範囲に於けるバイオセン
サの斜視図であるFIG. 10 is a perspective view of a biosensor in the range of Example 4 of the present invention.
【図１１】図１０の本発明のバイオセンサの断面図であ
る11 is a cross-sectional view of the biosensor of the present invention in FIG.
【図１２】図１０の本発明のバイオセンサの製造工程図
である12 is a manufacturing process diagram of the biosensor of the present invention in FIG.
【図１３】本発明の実施例３の範囲に於けるバイオセン
サのカートリッジケース分解断面図であるFIG. 13 is an exploded cross-sectional view of a cartridge case of a biosensor according to a third embodiment of the present invention.
【図１４】本発明の実施例３の範囲に於けるバイオセン
サのカートリッジケース外観図であるFIG. 14 is an external view of a cartridge case of the biosensor in the range of Example 3 of the present invention.
【図１５】本発明の実施例４の範囲に於けるバイオセン
サのカートリッジケース外観図であるFIG. 15 is an external view of a cartridge case of the biosensor in the range of Example 4 of the present invention.
【図１６】従来のバイオセンサの一例を示す斜視図であ
るFIG. 16 is a perspective view showing an example of a conventional biosensor.
【図１７】図１６の従来のバイオセンサの断面図である17 is a cross-sectional view of the conventional biosensor of FIG.
【図１８】図１６の従来のバイオセンサの製造工程図で
あるFIG. 18 is a manufacturing process diagram of the conventional biosensor of FIG. 16.
１ 絶縁基板 ２ａ 作用極 ２ｂ 対照極 ２ｃ 参照極 ２１ 電極部 ２２ リード部 ２３ 電極パッド部 ２３’ 電極パッド ３ 反応層 ４ 絶縁層 ５１ａ Ｔｉ膜 ５１ｂ Ｃｒ膜 ５１ｃ Ｔａ２Ｎ膜 ５１ｄ ＮｉＣｒ膜 ５２ａ Ｐｔ膜 ５２ｂ Ａｕ膜 ５３ａ Ａｇ膜 ５３ｂ Ｐｔ膜 ５ａ Ｔｉ＋Ｐｔ＋Ａｇ膜 ５ｂ Ｃｒ＋Ａｕ＋Ｃｒ＋Ｐｔ膜 ５ｃ Ｔａ２Ｎ＋Ｐｔ＋Ａｇ膜 ５ｄ ＮｉＣｒ＋Ａｕ＋Ａｇ膜 ５ｅ Ｔｉ＋Ｐｔ膜 ５ｆ Ｔｉ＋Ａｇ膜 ６ カートリッジ下部 ７ カートリッジ上部 ８ コンタクトプローブ ９ Ｏリング1 Insulating Substrate 2a Working Electrode 2b Control Electrode 2c Reference Electrode 21 Electrode Part 22 Lead Part 23 Electrode Pad Part 23 'Electrode Pad 3 Reaction Layer 4 Insulating Layer 51a Ti Film 51b Cr Film 51c Ta 2 N Film 51d NiCr Film 52a Pt Film 52b Au film 53a Ag film 53b Pt film 5a Ti + Pt + Ag film 5b Cr + Au + Cr + Pt film 5c Ta 2 N + Pt + Ag film 5d NiCr + Au + Ag film 5e Ti + Pt film 5f Ti + Ag film 6 Cartridge lower part 7 Cartridge upper part 8 Contact probe 9 O-ring
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｇ０１Ｎ 27/30 Ｇ０１Ｎ 27/30 Ｂ 27/327 ３５３Ｚ ３５３Ｐ ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) G01N 27/30 G01N 27/30 B 27/327 353Z 353P
Claims (6)
バイオセンサにおいて、電極、リード及び電極パッドを
一体的な形状に形成し、更に、電極部上に反応層を形成
することを特徴とするバイオセンサ。1. A biosensor having an electrode system and a reaction layer on an insulating substrate, wherein an electrode, a lead and an electrode pad are integrally formed, and a reaction layer is further formed on the electrode portion. And biosensor.
バイオセンサにおいて、絶縁基板上にＴｉ、Ｎｉ、Ｃｒ
及びＴａからなる群から選ばれた一種以上の金属を含む
膜、Ｐｔ膜又はＡｕ膜及びＡｇ膜又はＰｔ膜を一連の着
膜により３層に積層することを特徴とする請求項１のバ
イオセンサ。2. A biosensor having an electrode system and a reaction layer on an insulating substrate, wherein Ti, Ni, Cr are provided on the insulating substrate.
And a film containing one or more metals selected from the group consisting of Ta and Ta, a Pt film or an Au film, and an Ag film or a Pt film, which are laminated in three layers by a series of deposition films. .
バイオセンサの製造方法において、電極、リード及び電
極パッドを一体的な形状に形成し、更に、電極部上に反
応層を形成することを特徴とするバイオセンサの製造方
法。3. A method for manufacturing a biosensor having an electrode system and a reaction layer on an insulating substrate, wherein an electrode, a lead and an electrode pad are integrally formed, and a reaction layer is further formed on the electrode portion. A method for manufacturing a biosensor, comprising:
バイオセンサにおいて、絶縁基板上にＴｉ、Ｎｉ、Ｃｒ
及びＴａからなる群から選ばれた一種以上の金属を含む
膜、Ｐｔ膜又はＡｕ膜及びＡｇ膜又はＰｔ膜を一連の着
膜により３層に積層することを特徴とする請求項１のバ
イオセンサの製造方法。4. A biosensor having an electrode system and a reaction layer on an insulating substrate, wherein Ti, Ni, Cr are provided on the insulating substrate.
And a film containing one or more metals selected from the group consisting of Ta and Ta, a Pt film or an Au film, and an Ag film or a Pt film, which are laminated in three layers by a series of deposition films. Manufacturing method.
た２電極式バイオセンサ。5. A two-electrode type biosensor manufactured by the manufacturing method according to claim 3.
た３電極式バイオセンサ。6. A three-electrode biosensor manufactured by the manufacturing method according to claim 3 or 4.
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|---|---|---|---|
| JP2002121713A JP2003315302A (en) | 2002-04-24 | 2002-04-24 | Biosensor and manufacturing method therefor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002121713A JP2003315302A (en) | 2002-04-24 | 2002-04-24 | Biosensor and manufacturing method therefor |
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| Publication Number | Publication Date |
|---|---|
| JP2003315302A true JP2003315302A (en) | 2003-11-06 |
| JP2003315302A5 JP2003315302A5 (en) | 2005-08-04 |
Family
ID=29537533
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|---|---|---|---|
| JP2002121713A Pending JP2003315302A (en) | 2002-04-24 | 2002-04-24 | Biosensor and manufacturing method therefor |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6359363A (en) * | 1986-08-29 | 1988-03-15 | Koito Mfg Co Ltd | Nozzle for head lamp cleaner |
| JP2015049182A (en) * | 2013-09-03 | 2015-03-16 | 大日本印刷株式会社 | Electrode original sheet for biosensor, biosensor electrode, and biosensor |
| CN106680335A (en) * | 2015-11-11 | 2017-05-17 | 琦芯科技股份有限公司 | Method for manufacturing electrochemical sensing test piece |
| CN109689881A (en) * | 2016-09-16 | 2019-04-26 | 伊士曼化工公司 | The biological sensor electrode prepared by physical vapour deposition (PVD) |
| US11630075B2 (en) | 2016-09-16 | 2023-04-18 | Eastman Chemical Company | Biosensor electrodes prepared by physical vapor deposition |
| US11835481B2 (en) | 2016-06-15 | 2023-12-05 | Eastman Chemical Company | Physical vapor deposited biosensor components |
| US11881549B2 (en) | 2017-06-22 | 2024-01-23 | Eastman Chemical Company | Physical vapor deposited electrode for electrochemical sensors |
-
2002
- 2002-04-24 JP JP2002121713A patent/JP2003315302A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6359363A (en) * | 1986-08-29 | 1988-03-15 | Koito Mfg Co Ltd | Nozzle for head lamp cleaner |
| JP2015049182A (en) * | 2013-09-03 | 2015-03-16 | 大日本印刷株式会社 | Electrode original sheet for biosensor, biosensor electrode, and biosensor |
| CN106680335A (en) * | 2015-11-11 | 2017-05-17 | 琦芯科技股份有限公司 | Method for manufacturing electrochemical sensing test piece |
| JP2017090429A (en) * | 2015-11-11 | 2017-05-25 | ▲き▼芯科技股▲ふん▼有限公司 | Method for manufacturing electrochemical sensing test piece |
| US11835481B2 (en) | 2016-06-15 | 2023-12-05 | Eastman Chemical Company | Physical vapor deposited biosensor components |
| CN109689881A (en) * | 2016-09-16 | 2019-04-26 | 伊士曼化工公司 | The biological sensor electrode prepared by physical vapour deposition (PVD) |
| US11624723B2 (en) | 2016-09-16 | 2023-04-11 | Eastman Chemical Company | Biosensor electrodes prepared by physical vapor deposition |
| US11630075B2 (en) | 2016-09-16 | 2023-04-18 | Eastman Chemical Company | Biosensor electrodes prepared by physical vapor deposition |
| US11881549B2 (en) | 2017-06-22 | 2024-01-23 | Eastman Chemical Company | Physical vapor deposited electrode for electrochemical sensors |
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