JP2003295037A - Adjusting and fixing mechanism device for precision machine - Google Patents
Adjusting and fixing mechanism device for precision machineInfo
- Publication number
- JP2003295037A JP2003295037A JP2002099097A JP2002099097A JP2003295037A JP 2003295037 A JP2003295037 A JP 2003295037A JP 2002099097 A JP2002099097 A JP 2002099097A JP 2002099097 A JP2002099097 A JP 2002099097A JP 2003295037 A JP2003295037 A JP 2003295037A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- bearing
- fixing
- adjusting
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Telescopes (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、精密機器、例え
ば、宇宙用の光学望遠鏡に搭載される副鏡ユニット等の
精密機器の調整固定機構装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an adjusting and fixing mechanism device for precision equipment, for example, precision equipment such as a secondary mirror unit mounted on an optical telescope for space use.
【０００２】[0002]
【従来の技術】図５は従来のＸ軸方向，Ｙ軸方向，Ｚ軸
方向，Ｘ軸まわりθｘ，Ｙ軸まわりθｙの５自由度調整
固定機構装置の概念を表す図である。５自由度調整固定
機構装置は、正三角形の頂点の位置に３組の調整固定機
構１ａ，１ｂ，１ｃが副鏡ユニット（移動テーブル）２
に取り付けられている。図６は図５の調整固定機構１ａ
の拡大図で、図７のＢ―Ｂ方向から見た断面図である。
図７はこの調整固定機構を図６のＡ―Ａ方向よりみた断
面図である。３ａ，３ｂはＸ軸調整固定ボルト、４ａ，
４ｂはＹ軸調整固定ボルト、５はＺ軸調整固定ボルトで
ある。６は位置固定用ロックナットで、Ｘ軸調整固定ボ
ルト３ａ，３ｂで副鏡ユニット２のＸ軸方向位置を調整
後、位置固定用ロック６をボルト位置決め金具７に締め
付けて、副鏡ユニット２のＸ軸方向位置を固定する。同
様にして、Ｙ軸調整固定ボルト４ａ，４ｂで副鏡ユニッ
ト２のＹ軸方向位置を調整後、位置固定用ロック６をボ
ルト位置決め金具７に締め付けて、位置固定用ロックナ
ット６で副鏡ユニット２のＹ軸方向位置を固定する。2. Description of the Related Art FIG. 5 is a view showing the concept of a conventional 5-degree-of-freedom adjusting and fixing mechanism device having X-axis direction, Y-axis direction, Z-axis direction, θx around the X-axis, and θy around the Y-axis. In the 5-degree-of-freedom adjusting / fixing mechanism device, three sets of adjusting / fixing mechanisms 1a, 1b, 1c are provided at the positions of the vertices of an equilateral triangle, and the secondary mirror unit (moving table) 2
Is attached to. FIG. 6 shows the adjusting and fixing mechanism 1a of FIG.
8 is an enlarged view of FIG. 8 and is a cross-sectional view as seen from the direction BB of FIG. 7.
FIG. 7 is a cross-sectional view of this adjusting and fixing mechanism as seen from the direction AA of FIG. 3a and 3b are X-axis adjustment fixing bolts, 4a,
4b is a Y-axis adjustment fixing bolt, and 5 is a Z-axis adjustment fixing bolt. A position fixing lock nut 6 adjusts the position of the sub-mirror unit 2 in the X-axis direction with the X-axis adjusting and fixing bolts 3a and 3b, and then the position fixing lock 6 is fastened to the bolt positioning metal fitting 7 so that the sub-mirror unit 2 is fixed. Fix the X-axis position. Similarly, after adjusting the position of the secondary mirror unit 2 in the Y-axis direction with the Y-axis adjustment fixing bolts 4a and 4b, the position fixing lock 6 is tightened to the bolt positioning metal fitting 7, and the position fixing lock nut 6 is used to fix the auxiliary mirror unit. Fix the position of 2 in the Y-axis direction.
【０００３】ボルト位置決め金具７は、Ｘ軸調整固定ボ
ルト３ａ，３ｂ、Ｙ軸調整固定ボルト４ａ，４ｂ、Ｚ軸
調整固定ボルト５に対して共用される１体の金具であ
る。８は固定側フランジである。９は位置固定用ロック
ナットで、Ｚ軸調整固定ボルト５で副鏡ユニット２のＺ
軸方向位置を調整後、位置固定用ロックナット９を固定
側フランジ８に締め付けて、副鏡ユニット２のＺ軸方向
位置を固定する。１０は副鏡ユニット２を固定側フラン
ジ８側へ引く引きバネである。The bolt positioning metal fitting 7 is a metal fitting commonly used for the X-axis adjustment fixing bolts 3a and 3b, the Y-axis adjustment fixing bolts 4a and 4b, and the Z-axis adjustment fixing bolt 5. Reference numeral 8 is a fixed side flange. 9 is a position fixing lock nut, and the Z-axis adjustment fixing bolt 5 is used to adjust the Z of the secondary mirror unit 2.
After adjusting the axial position, the position fixing lock nut 9 is tightened to the fixed side flange 8 to fix the Z-axis position of the secondary mirror unit 2. Reference numeral 10 is a pulling spring that pulls the secondary mirror unit 2 toward the fixed-side flange 8 side.
【０００４】次に動作について説明する。副鏡ユニット
２に取り付けられた調整固定機構１ａ，１ｂ，１ｃは、
３組のＸ軸調整固定ボルト３ａ，３ｂを同時に押し引き
することにより、副鏡ユニット２をＸ軸方向に位置調整
することができる。同様に、３組のＹ軸調整固定ボルト
４ａ，４ｂを同時に押し引きすることにより、副鏡ユニ
ット２をＹ軸方向に位置調整することができる。さら
に、３組のＺ軸調整固定ボルト５を押し引きすることに
より、副鏡ユニット２をＺ軸方向に位置調整することが
できる。３組のＺ軸方向高さをそれぞれ独立に調整する
ことにより、Ｘ軸まわりθｘ，Ｙ軸まわりθｙの位置調
整をすることができる。Ｘ軸方向，Ｙ軸方向，Ｚ軸方
向，Ｘ軸まわりθｘ，Ｙ軸まわりθｙの位置調整を行っ
た後、位置固定用ロックナット６をボルト位置決め金具
７に、位置固定用ロックナット９を固定側フランジ８に
それぞれ締め付けることにより位置の固定を行うことが
できる。以上のようにすることにより、Ｘ軸方向，Ｙ軸
方向，Ｚ軸方向，Ｘ軸まわりθｘ，Ｙ軸まわりθｙの５
自由度を調整固定することができる。Next, the operation will be described. The adjusting and fixing mechanisms 1a, 1b, 1c attached to the secondary mirror unit 2 are
By simultaneously pushing and pulling the three sets of X-axis adjustment fixing bolts 3a and 3b, the position of the secondary mirror unit 2 can be adjusted in the X-axis direction. Similarly, the position of the secondary mirror unit 2 can be adjusted in the Y-axis direction by simultaneously pushing and pulling the three sets of Y-axis adjusting fixing bolts 4a and 4b. Further, by pushing and pulling the three sets of Z-axis adjustment fixing bolts 5, the position of the secondary mirror unit 2 can be adjusted in the Z-axis direction. By independently adjusting the heights of the three sets in the Z-axis direction, it is possible to adjust the position around the X axis θx and around the Y axis θy. After adjusting the X-axis direction, Y-axis direction, Z-axis direction, X-axis rotation θx, and Y-axis rotation θy, fix the position-fixing lock nut 6 to the bolt positioning fitting 7 and the position-fixing lock nut 9. The position can be fixed by tightening the side flanges 8 respectively. By doing the above, 5 of X-axis direction, Y-axis direction, Z-axis direction, X-axis rotation θx, and Y-axis rotation θy are obtained.
The degree of freedom can be adjusted and fixed.
【０００５】[0005]
【発明が解決しようとする課題】上述した従来の調整固
定機構装置は、以上のように構成されているので、手動
にて位置固定する際に、位置固定用ロックナット６，９
を軸まわりに回転させるので、Ｘ軸調整固定ボルト３
ａ，３ｂ，Ｙ軸調整固定ボルト４ａ，４ｂ，Ｚ軸調整固
定ボルト５が、それぞれＸ軸方向，Ｙ軸方向，Ｚ軸方向
にずれることがあった。位置決め調整精度が１／１０ｍ
ｍ程度のときには従来の手法でも精度的に問題はない
が、調整精度が数μｍの精度であると、位置固定用ロッ
クナット６，９の軸まわり回転によるズレ量が問題にな
る。Since the above-mentioned conventional adjusting and fixing mechanism device is constructed as described above, when manually fixing the position, the position fixing lock nuts 6, 9 are used.
Since it rotates around the axis, the X-axis adjustment fixing bolt 3
The a, 3b, Y-axis adjusting and fixing bolts 4a, 4b, and the Z-axis adjusting and fixing bolt 5 may be displaced in the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively. Positioning adjustment accuracy is 1/10 m
When the distance is about m, the conventional method has no problem in accuracy, but when the adjustment accuracy is several μm, the amount of deviation due to the rotation of the position fixing lock nuts 6 and 9 about the axis becomes a problem.
【０００６】この発明は上記のような問題点を解消する
ためになされたもので、移動テーブル（副鏡ユニット）
のＸ軸方向，Ｙ軸方向の２自由度、または、Ｘ軸方向，
Ｙ軸方向，Ｚ軸方向，Ｘ軸まわりθｘ，Ｙ軸まわりθｙ
の５自由度を調整できると共に、調整後のずれが少な
く、かつ、振動に対してずれの少ない調整固定機構装置
を得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and is a moving table (secondary mirror unit).
2 degrees of freedom in the X-axis and Y-axis directions, or in the X-axis direction,
Y-axis direction, Z-axis direction, X-axis rotation θx, Y-axis rotation θy
It is an object of the present invention to provide an adjusting and fixing mechanism device capable of adjusting the five degrees of freedom of No. 1 and having less deviation after adjustment and less deviation with respect to vibration.
【０００７】[0007]
【課題を解決するための手段】この発明に係わる精密機
器の調整固定機構装置は、固定側基台に第１軸受状ホル
ダーを介してＹ軸がＹ軸方向移動可能に支承され、かつ
移動用テーブルを第２軸受状ホルダーを介してＸ軸にＸ
軸方向移動可能に支承し、互いに直交するＸ軸とＹ軸を
有する十字形ピンを備える調整固定機構で、上記固定側
基台に対して上記移動用テーブルを支承する精密機器の
調整固定機構装置であって、上記固定側基台に対する上
記移動用テーブルのＸ軸とＹ軸の移動位置を調整し、上
記第１軸受状ホルダーをＸ軸に第１ホルダー固定用スト
ッパでＸ軸に直角方向に押圧し、上記第１軸受状ホルダ
ーから第１ずれ防止ピンねじをＸ軸にＸ軸に直角方向に
押圧すると共に、上記第２軸受状ホルダーをＹ軸に第２
ホルダー固定用ストッパでＹ軸に直角方向に押圧し、上
記第２軸受状ホルダーから第２ずれ防止ピンねじをＹ軸
にＹ軸に直角方向に押圧して、Ｘ軸とＹ軸の移動位置を
固定保持するようにしたものである。According to the adjusting and fixing mechanism device for precision equipment according to the present invention, the Y-axis is movably supported on the fixed-side base through the first bearing-like holder, and is used for moving. X-axis on the table via the second bearing-like holder
Adjusting and fixing mechanism device for precision equipment, which is movably supported in the axial direction and has a cross-shaped pin having an X axis and a Y axis which are orthogonal to each other, and supports the moving table on the fixed base. The moving positions of the moving table in the X-axis and the Y-axis with respect to the fixed base are adjusted, and the first bearing-shaped holder is attached to the X-axis in the direction perpendicular to the X-axis by the first holder fixing stopper. The first bearing-like holder is pressed against the X-axis in the direction perpendicular to the X-axis, and the second bearing-like holder is moved toward the Y-axis to the second axis.
The holder fixing stopper presses in the direction perpendicular to the Y-axis, and the second shift prevention pin screw is pressed from the second bearing-shaped holder in the direction perpendicular to the Y-axis to move the X-axis and Y-axis moving positions. It is designed to be fixedly held.
【０００８】また、この発明に係わる精密機器の調整固
定機構装置は、互いに直交するＸ軸，Ｙ軸とＺ軸を想定
し、固定側基台からＺ軸方向に進退するＺ軸調整ボルト
で支持され、第１軸受状ホルダーを介してＹ軸がＹ軸方
向移動及びＹ軸まわり回転可能に支承され、かつ移動用
テーブルを第２軸受状ホルダーを介してＸ軸にＸ軸方向
移動及びＸ軸まわり回転可能に支承し、Ｘ軸とＹ軸を有
する十字形ピンを備える調整固定機構の少なくとも３組
で、上記固定側基台に対して上記移動用テーブルを支承
する精密機器の調整固定機構装置であって、上記固定側
基台に対する上記移動用テーブルのＸ軸，Ｙ軸とＺ軸の
移動位置を調整し、上記Ｚ軸調整ボルトを移動位置にロ
ックナットで締め付け、上記第１軸受状ホルダーをＸ軸
に第１ホルダー固定用ストッパでＸ軸に直角方向に押圧
し、上記第１軸受状ホルダーから第１ずれ防止ピンねじ
をＸ軸にＸ軸に直角方向に押圧すると共に、上記第２軸
受状ホルダーをＹ軸に第２ホルダー固定用ストッパでＹ
軸に直角方向に押圧し、上記第２軸受状ホルダーから第
２ずれ防止ピンをＹ軸にＹ軸に直角方向に押圧して、Ｘ
軸，Ｙ軸とＺ軸の移動位置を固定保持するようにしたも
のである。Further, the adjusting and fixing mechanism device for precision equipment according to the present invention is assumed to have the X-axis, the Y-axis and the Z-axis which are orthogonal to each other, and is supported by the Z-axis adjusting bolt moving forward and backward from the fixed side base in the Z-axis direction. The Y-axis is movably supported by the first bearing-shaped holder so as to be movable in the Y-axis direction and rotatable about the Y-axis, and the moving table is moved to the X-axis in the X-axis direction and the X-axis via the second bearing-shaped holder. Adjusting and fixing mechanism device for precision equipment that supports the moving table with respect to the fixed base by at least three sets of adjusting and fixing mechanisms that are rotatably supported around and have a cross-shaped pin having an X axis and a Y axis. The X-axis, Y-axis, and Z-axis moving positions of the moving table with respect to the fixed-side base are adjusted, and the Z-axis adjusting bolt is tightened to the moving position with a lock nut. The first holder is fixed on the X-axis. Is pressed in the direction perpendicular to the X-axis by the stopper for pressing the first displacement prevention pin screw from the first bearing-shaped holder in the direction perpendicular to the X-axis in the X-axis and the second bearing-shaped holder is pressed in the Y-axis. 2 Y for the holder fixing stopper
X-axis is pressed in the direction perpendicular to the axis, and the second deviation prevention pin is pressed from the second bearing-shaped holder in the direction perpendicular to the Y-axis in the direction perpendicular to the Y-axis.
The moving positions of the axes, Y-axis and Z-axis are fixedly held.
【０００９】また、上記Ｚ軸調整ボルトは差動ねじであ
り、円筒状大径ボルトとその貫通孔にねじ込まれた小径
ボルトで構成されて、上記大径ボルトの外周面のねじピ
ッチと上記大径ボルトの貫通孔のねじピッチが異なって
いるものである。The Z-axis adjusting bolt is a differential screw, and is composed of a cylindrical large-diameter bolt and a small-diameter bolt screwed into a through hole thereof, and has a screw pitch on the outer peripheral surface of the large-diameter bolt and the large-diameter bolt. The thread pitch of the through holes of the diameter bolts is different.
【００１０】[0010]
【発明の実施の形態】実施の形態１．図１はこの発明の
実施の形態１である精密機器の調整固定機構装置、この
例では、副鏡5自由度調整固定機構装置を示し、（ａ）
は正面図、（ｂ）はその側面図である。図1において、
１１は宇宙用光学望遠鏡の副鏡を取り付けるための副鏡
ユニット（移動側テーブル）で、外形が１２角形状で、
中央が三つ葉のクローバ状に切り取られた骨組みで形成
されている。１２はこの副鏡ユニット１１を光学望遠鏡
に取り付けるための固定側フランジ（固定側基台）で、
外形が１２角形状で、中央が切り取られた外枠で形成さ
れている。１３ａ，１３ｂ，１３ｃは正三角形の頂点の
位置に配置された３組の調整固定機構で、固定側フラン
ジ１２の基板と副鏡ユニット１１の基板間に配置されて
いる。この３組の調整固定機構で５自由度調整固定機構
の主要部を構成する。１４ａ，１４ｂは副鏡ユニット１
１をＸ軸方向に移動させるためのアクチュエータ（図示
せず）用あて面である。１５ａ，１５ｂ，１６ａ，１６
ｂは副鏡ユニット１１をＹ軸方向に移動させるためのア
クチュエータ（図示せず）用のあて面である。１７は副
鏡の設置部である。BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1. FIG. 1 shows an adjusting and fixing mechanism device for precision equipment according to a first embodiment of the present invention, in this example, a secondary mirror 5 degrees of freedom adjusting and fixing mechanism device.
Is a front view and (b) is a side view thereof. In Figure 1,
Reference numeral 11 denotes a secondary mirror unit (moving side table) for mounting a secondary mirror of the space optical telescope, which has a dodecagonal outer shape,
The center is formed by a three-leaf clover-shaped frame. 12 is a fixed-side flange (fixed-side base) for attaching the secondary mirror unit 11 to the optical telescope,
The outer shape is a dodecagonal shape and is formed by an outer frame with the center cut off. Reference numerals 13a, 13b and 13c denote three sets of adjusting and fixing mechanisms arranged at the positions of the vertices of an equilateral triangle, which are arranged between the base plate of the fixed side flange 12 and the base plate of the secondary mirror unit 11. These three sets of adjusting and fixing mechanisms constitute the main part of the 5-DOF adjusting and fixing mechanism. 14a and 14b are secondary mirror units 1
1 is a contact surface for an actuator (not shown) for moving 1 in the X-axis direction. 15a, 15b, 16a, 16
Reference numeral b is a contact surface for an actuator (not shown) for moving the secondary mirror unit 11 in the Y-axis direction. Reference numeral 17 is a sub-mirror installation section.
【００１１】図２は図１の調整固定機構１３ｂの拡大正
面図である。図３は図２のＣ―Ｃ断面図であり、図４は
図２のＤ―Ｄ断面図である。図３，図４に示すように、
調整固定機構１３ｂは、固定側フランジ１２の基板と副
鏡ユニット１１の基板間に配置されている。図２，図３
と図４において、２１は副鏡ユニット１１の据付孔２２
に調整固定機構１３ｂを取り付けるためのドーナツ状フ
ランジで、ボルト２３で四方から副鏡ユニット１１に固
定されている。２４は十字形状に円柱を組み合わせて固
定した十字形ピンで、Ｘ軸とＹ軸を構成する。FIG. 2 is an enlarged front view of the adjusting and fixing mechanism 13b shown in FIG. 3 is a sectional view taken along line CC of FIG. 2, and FIG. 4 is a sectional view taken along line DD of FIG. As shown in FIGS. 3 and 4,
The adjusting and fixing mechanism 13b is arranged between the base plate of the fixed side flange 12 and the base plate of the secondary mirror unit 11. 2 and 3
4 and 21, reference numeral 21 denotes an installation hole 22 of the secondary mirror unit 11.
It is a donut-shaped flange for attaching the adjusting and fixing mechanism 13b to the sub-mirror unit 11 from four sides with bolts 23. Reference numeral 24 is a cross-shaped pin that is fixed by combining a cylinder in a cross shape, and constitutes the X axis and the Y axis.
【００１２】２５ａ，２５ｂは一端部がドーナツ状フラ
ンジ２１にボルト２６で取り付けられ、ばね材で形成さ
れ、半割された軸受状ホルダーで、他端部が十字形ピン
２４のＸ軸に支承され、十字形ピン２４のＸ軸の移動方
向をＸ軸方向に拘束する。２７は半割軸受状ホルダー２
５ａ，２５ｂを（上下の軸受を引き寄せて）十字形ピン
２４のＸ軸に、Ｘ軸に直角方向に挟圧して固定保持する
ホルダー固定用ボルト（ホルダー固定用ストッパ）で、
十字形ピン２４のＸ軸を軸受状ホルダー２５ａ，２５ｂ
に固定し、十字形ピン２４のＸ軸方向の移動を阻止す
る。２８は軸受状ホルダー２５ａ，２５ｂに設けられ先
端が半球状のずれ防止ピンねじで、十字形ピン２４のＸ
軸のＸ軸方向の位置調整後、十字形ピン２４のＸ軸を軸
受状ホルダー２５ａ，２５ｂに固定後、十字形ピン２４
のＸ軸が軸受状ホルダー２５ａ，２５ｂからずれないよ
うにＸ軸と直角方向にねじ込まれＸ軸を押し圧する。ず
れ防止ピンねじ２８が十字形ピン２４のＸ軸に当たる円
柱Ｘ軸の面は、平ら面１８になるように加工している。25a and 25b are bearing holders, each of which has one end attached to a donut-shaped flange 21 with a bolt 26, is made of a spring material, and is divided in half, and the other end is supported by the X-axis of a cross pin 24. , The X-axis moving direction of the cross pin 24 is restricted to the X-axis direction. 27 is a half bearing bearing holder 2
5a, 25b (holding the upper and lower bearings) on the X axis of the cross pin 24 with a holder fixing bolt (holder fixing stopper) that clamps and holds in a direction perpendicular to the X axis,
The X-axis of the cross pin 24 is attached to the bearing holders 25a and 25b.
To prevent the cross pin 24 from moving in the X-axis direction. Reference numeral 28 denotes a deviation prevention pin screw provided on the bearing-shaped holders 25a and 25b and having a hemispherical tip, which is used for the X-shaped cross pin 24.
After adjusting the position of the shaft in the X-axis direction, after fixing the X-axis of the cross pin 24 to the bearing-shaped holders 25a and 25b, the cross pin 24
The X-axis is screwed in a direction perpendicular to the X-axis so as not to shift from the bearing-shaped holders 25a and 25b, and the X-axis is pressed. The surface of the cylinder X axis on which the misalignment prevention pin screw 28 contacts the X axis of the cross pin 24 is processed to be the flat surface 18.
【００１３】２９ａ，２９ｂは十字形ピン２４のＹ軸を
支承し、半割された軸受状ホルダーで、十字形ピン２４
のＹ軸の移動方向をＹ軸方向に拘束する。軸受状ホルダ
ー２９ａ，２９ｂは下部で結合され一体となっている。
３０は半割軸受状ホルダー２９ａ，２９ｂを十字形ピン
２４のＹ軸に、Ｙ軸に直角方向に挟圧して固定保持する
ホルダー固定用ボルト（ホルダー固定用ストッパ）で、
十字形ピン２４のＹ軸を軸受状ホルダー２９ａ，２９ｂ
に固定し、十字形ピン２４のＹ軸方向の移動を阻止す
る。３１は軸受状ホルダー２９ａ，２９ｂに設けられ先
端が半球状のずれ防止ピンねじで、十字形ピン２４のＹ
軸のＹ軸方向の位置調整後、十字形ピン２４のＹ軸を軸
受状ホルダー２９ａ，２９ｂに固定後、十字形ピン２４
のＹ軸が軸受状ホルダー２９ａ，２９ｂからずれないよ
うにＹ軸と直角方向にねじ込まれＹ軸を押し圧する。ず
れ防止ピンねじ３１が十字形ピン２４のＹ軸に当たる円
柱Ｙ軸の面は、平ら面１９になるように加工している。
３２はドーナツ状フランジ２１を副鏡ユニット１１に固
定するボルトである。Reference numerals 29a and 29b denote bearing holders that support the Y axis of the cross pin 24 and are halved.
The movement direction of the Y-axis is restricted to the Y-axis direction. The bearing-shaped holders 29a and 29b are joined at the lower part and are integrated.
Reference numeral 30 is a holder fixing bolt (holder fixing stopper) for holding the half bearing bearing holders 29a, 29b on the Y axis of the cross pin 24 in a direction perpendicular to the Y axis.
The Y-axis of the cross pin 24 is attached to the bearing holders 29a, 29b.
To prevent the cross pin 24 from moving in the Y-axis direction. Reference numeral 31 is a deviation prevention pin screw provided on the bearing-shaped holders 29a and 29b and having a hemispherical tip, and is a Y-shaped pin of the cross pin 24.
After adjusting the position of the shaft in the Y-axis direction, after fixing the Y-axis of the cross pin 24 to the bearing-shaped holders 29a and 29b, the cross pin 24
The Y-axis is screwed in a direction perpendicular to the Y-axis so as not to be displaced from the bearing-shaped holders 29a and 29b, and the Y-axis is pressed. The surface of the cylindrical Y-axis on which the misalignment prevention pin screw 31 abuts the Y-axis of the cross pin 24 is processed to be a flat surface 19.
Reference numeral 32 is a bolt for fixing the donut-shaped flange 21 to the secondary mirror unit 11.
【００１４】４１は十字形ピン２４を支持し、上端部が
軸受状ホルダー２９ａ，２９ｂの下端部に結合されたＺ
軸調整ボルトで、Ｚ軸方向に進退して十字形ピン２４の
Ｚ軸方向の移動を調整する。４２はワッシャ、４３はＺ
軸調整ボルト４１で十字形ピン２４のＺ軸方向の移動位
置を調整後、その位置を固定するＺ軸調整ボルト固定用
ねじ（固定用ストッパ）で、Ｚ軸方向の移動位置を調整
後、スペーサ４４を介在させて軸受状ホルダー２９ａ，
２９ｂを固定用ねじ４３でスペーサ４４に固定してい
る。４５はＺ軸調整ボルト４１を構成し、固定側フラン
ジ１２の貫通孔４６にねじ込まれ、Ｚ軸方向の差動移動
を実現する差動ねじで、円筒状大径ボルト４７とその内
側の貫通孔にねじ込まれた小径ボルト４８を有し、円筒
状大径ボルト４７の外周面に切ったねじ（疎ねじ）と内
周面に切ったねじ（密ねじ）のピッチを変えている。Reference numeral 41 denotes a Z-shaped pin which supports the cruciform pin 24 and whose upper end is connected to the lower ends of the bearing-shaped holders 29a and 29b.
The axis adjustment bolt adjusts the movement of the cross pin 24 in the Z-axis direction by moving back and forth in the Z-axis direction. 42 is a washer, 43 is a Z
After adjusting the moving position of the cross pin 24 in the Z-axis direction with the shaft adjusting bolt 41, the Z-axis adjusting bolt fixing screw (fixing stopper) for fixing the position is used to adjust the moving position in the Z-axis direction, and then the spacer. Bearing-shaped holder 29a with 44 interposed,
29b is fixed to the spacer 44 with a fixing screw 43. Reference numeral 45 denotes a Z-axis adjusting bolt 41, which is screwed into a through hole 46 of the fixed side flange 12 and realizes a differential movement in the Z-axis direction. The differential screw 45 is a cylindrical large-diameter bolt 47 and a through hole inside thereof. A small-diameter bolt 48 screwed into the cylindrical large-diameter bolt 47 is provided, and the pitch of the screw cut on the outer peripheral surface of the cylindrical large-diameter bolt 47 (dense screw) and the screw cut on the inner peripheral surface (dense screw) are changed.
【００１５】４９は円筒状大径ボルト４７の端部に一体
に形成された円筒状大径ボルト４７のねじ込み用ナット
である。５０は小径ボルト４８の端部に一体に形成され
た小径ボルト４８のねじ込み用（回転阻止用）ナットで
ある。差動ねじ４５で、十字形ピン２４を進退させるに
は、ねじ込み用（回転阻止用）ナット５０の回転を阻止
し、ねじ込み用ナット４９を回転させれば、円筒状大径
ボルト４７の外周面に切ったねじ（疎ねじ）と内周面に
切ったねじ（密ねじ）のピッチの差だけ進退する。５１
は差動ねじ４５の大径ボルト４７を固定側フランジ１２
に位置固定する大径ボルト固定用ロックナット、５２は
小径ボルト４８を差動ねじ４５の大径ボルト４７に対し
位置固定する小径ボルト固定用ロックナットである。Reference numeral 49 denotes a nut for screwing the cylindrical large-diameter bolt 47 integrally formed at the end of the cylindrical large-diameter bolt 47. Reference numeral 50 denotes a nut for screwing (rotation-preventing) the small-diameter bolt 48 integrally formed at the end of the small-diameter bolt 48. In order to move the cross pin 24 forward and backward with the differential screw 45, the rotation of the screwing (rotation preventing) nut 50 is blocked, and the screwing nut 49 is rotated. Moves back and forth by the difference between the pitch of the screw cut in (deep screw) and the screw cut in the inner peripheral surface (dense screw). 51
Is the large diameter bolt 47 of the differential screw 45 and the fixed side flange 12
A large-diameter bolt fixing lock nut 52 for fixing the position is fixed to a small-diameter bolt fixing lock nut 52 for fixing a position of the small-diameter bolt 48 to the large-diameter bolt 47 of the differential screw 45.
【００１６】次に実施の形態１の動作について説明す
る。宇宙用光学望遠鏡の副鏡ユニット１１におけるＸ軸
方向，Ｙ軸方向，Ｚ軸方向，Ｘ軸まわりθｘ，Ｙ軸まわ
りθｙの５自由度を調整する際、固定側フランジ１２に
副鏡ユニット１１を調整固定機構１３ａ，１３ｂ，１３
ｃの3箇所を用いて支持する。副鏡ユニット１１の位置
調整前に、調整固定機構１３ａ，１３ｂ，１３ｃのＸ軸
のホルダー固定用ボルト２７、ずれ防止ピンねじ２８、
及び、Ｙ軸のホルダー固定用ボルト３０、ずれ防止ピン
ねじ３１を、十字形ピン２４が自由にＸ軸方向、Ｙ軸方
向にスライドできるように緩めておく。さらに、大径ボ
ルト固定用ロックナット５１，小径ボルト固定用ロック
ナット５２、Ｚ軸調整ボルト固定用ねじ４３を緩め、ス
ペーサ４４を引抜いておき、Ｚ軸調整ボルト４１を自由
に進退できるようにする。Next, the operation of the first embodiment will be described. When adjusting the five degrees of freedom of the X-axis direction, the Y-axis direction, the Z-axis direction, the X-axis rotation θx, and the Y-axis rotation θy in the secondary mirror unit 11 of the space optical telescope, the secondary mirror unit 11 is attached to the fixed side flange 12. Adjustment fixing mechanism 13a, 13b, 13
Support using 3 points of c. Before adjusting the position of the secondary mirror unit 11, the X-axis holder fixing bolt 27 of the adjustment fixing mechanism 13a, 13b, 13c, the shift prevention pin screw 28,
Further, the Y-axis holder fixing bolt 30 and the displacement prevention pin screw 31 are loosened so that the cross pin 24 can freely slide in the X-axis direction and the Y-axis direction. Further, the large-diameter bolt fixing lock nut 51, the small-diameter bolt fixing lock nut 52, and the Z-axis adjusting bolt fixing screw 43 are loosened, and the spacer 44 is pulled out so that the Z-axis adjusting bolt 41 can freely move back and forth. .
【００１７】次に副鏡ユニット１１の位置調整について
述べる。副鏡ユニット１１のＺ軸方向の位置は各調整固
定機構１３ａ，１３ｂ，１３ｃのＺ軸調整ボルト４１に
取り付けられている差動ねじ４５を工具を使用して手動
で回転させることによりＺ軸方向の位置決めを行う。こ
のとき、ねじ込み用（回転阻止用）ナット５０の回転を
阻止し、ねじ込み用ナット４９を回転させれば、円筒状
大径ボルト４７の外周面に切ったねじ（疎ねじ）と内周
面に切ったねじ（密ねじ）のピッチの差だけ進退する。
ピッチの差だけ進退するようにしているので、微調整が
容易になる。３組の調整固定機構１３ａ，１３ｂ，１３
ｃのＺ軸位置を独立に調整することにより、Ｘ軸まわり
θｘ，Ｙ軸まわりθｙの位置を決めることができる。Next, the position adjustment of the secondary mirror unit 11 will be described. The position of the secondary mirror unit 11 in the Z-axis direction is set in the Z-axis direction by manually rotating the differential screw 45 attached to the Z-axis adjusting bolt 41 of each adjusting and fixing mechanism 13a, 13b, 13c using a tool. Position. At this time, if the rotation of the screw-in (rotation-preventing) nut 50 is stopped and the screw-in nut 49 is rotated, the screw (dense screw) cut on the outer peripheral surface of the cylindrical large-diameter bolt 47 and the inner peripheral surface are formed. Moves back and forth by the difference in pitch of the cut screw (fine screw).
Fine adjustment is easy because the pitch difference is set back and forth. Three sets of adjusting and fixing mechanisms 13a, 13b, 13
By independently adjusting the Z-axis position of c, the position of θx around the X axis and θy around the Y axis can be determined.
【００１８】Ｘ軸方向の位置決めは、副鏡ユニット１１
のＸ軸駆動アクチュエータ用あて面１４ａ，１４ｂを利
用し、アクチュエータで副鏡ユニット１１をＸ軸方向に
駆動する。Ｙ軸方向の位置決めは、副鏡ユニット１１の
Ｙ軸駆動アクチュエータ用あて面１５ａ，１５ｂ，１６
ａ，１６ｂを利用してアクチュエータで副鏡ユニット１
１をＹ軸方向に駆動する。調整固定機構１３ａ，１３
ｂ，１３ｃの十字形ピン２４は、Ｘ軸方向には軸受状ホ
ルダー２５ａ，２５ｂにより、Ｘ軸方向移動およびＸ軸
まわり回転が可能なように拘束されている。又、Ｙ軸方
向には軸受状ホルダー２９ａ，２９ｂにより、Ｙ軸方向
移動およびＹ軸まわり回転が可能なように拘束されてい
る。これらにより、十字形ピン２４は、ＸＹ平面内のス
ライド移動及び軸まわり回転が可能なように拘束され
る。３箇所の調製固定機構１３ａ，１３ｂ，１３ｃそれ
ぞれのＸ軸方向，Ｙ軸方向，Ｚ軸方向，Ｘ軸まわりθ
ｘ，Ｙ軸まわりθｙの自由度により、副鏡ユニット１１
のＸ軸方向，Ｙ軸方向，Ｚ軸方向，Ｘ軸まわりθｘ，Ｙ
軸まわりθｙの５自由度の調整が可能となる。The positioning in the X-axis direction is performed by the secondary mirror unit 11
Using the X-axis drive actuator contact surfaces 14a and 14b, the actuator drives the secondary mirror unit 11 in the X-axis direction. Positioning in the Y-axis direction is performed by using the contact surfaces 15a, 15b, 16 for the Y-axis drive actuator of the secondary mirror unit 11.
Secondary mirror unit 1 with actuator using a and 16b
1 is driven in the Y-axis direction. Adjustment fixing mechanism 13a, 13
The cross-shaped pins 24 of b and 13c are constrained in the X-axis direction by bearing-shaped holders 25a and 25b so as to be movable in the X-axis direction and rotatable about the X-axis. Further, bearing holders 29a, 29b are constrained in the Y-axis direction so that they can be moved in the Y-axis direction and rotated about the Y-axis. By these, the cross pin 24 is constrained so that it can be slid in the XY plane and rotated about the axis. The X-axis direction, Y-axis direction, Z-axis direction, and X-axis rotation θ of each of the three preparation fixing mechanisms 13a, 13b, 13c
The secondary mirror unit 11 has a degree of freedom of θy around the x and Y axes.
X-axis direction, Y-axis direction, Z-axis direction, X-axis rotation θx, Y
It is possible to adjust 5 degrees of freedom around the axis θy.
【００１９】次に位置調整後の固定保持について述べ
る。副鏡ユニット１１のＺ軸方向の位置、Ｘ軸まわりθ
ｘ，Ｙ軸まわりθｙの位置をを決めた後、大径ボルト固
定用ロックナット５１と小径ボルト固定用ロックナット
５２を用いて差動ねじ４５のＺ軸方向位置を固定保持
し、スペーサ４４を介在させて軸受状ホルダー２９ａ，
２９ｂを固定用ねじ４３でスペーサ４４に固定し、両方
で、Ｚ軸調整ボルト４１のＺ軸方向位置を固定保持す
る。副鏡ユニット１１のＸ軸，Ｙ軸位置調整後、軸受状
ホルダー２５ａ，２５ｂをホルダー固定用ボルト２７で
Ｘ軸に挟圧することにより、副鏡ユニット１１のＸ軸方
向及びＸ軸まわり回転を固定保持する。又、軸受状ホル
ダー２９ａ，２９ｂをホルダー固定用ボルト３０でＹ軸
に押圧することにより、副鏡ユニット１１のＹ軸方向及
びＹ軸まわり回転を固定保持する。さらにＸ軸固定用ず
れ防止ピンねじ２８、Ｙ軸固定用ずれ防止ピンねじ３１
を締め付けることで、十字形ピン２４のＸ軸及びＹ軸の
位置固定を確実にする。このときＸ軸の軸受状ホルダー
２５ａ，２５ｂ，ずれ防止ピンねじ２８、及び、Ｙ軸の
軸受状ホルダー２９ａ，２９ｂ，ずれ防止ピンねじ３１
を各軸と直角方向に押圧するため、軸方向の移動は生じ
ない。Next, fixed holding after the position adjustment will be described. Position of the secondary mirror unit 11 in the Z-axis direction, around the X-axis θ
After determining the position of θy around the x and Y axes, the lock nut 51 for fixing the large diameter bolt and the lock nut 52 for fixing the small diameter bolt are used to fix and hold the position of the differential screw 45 in the Z axis direction, and the spacer 44 is fixed. Bearing-like holder 29a,
29b is fixed to the spacer 44 with a fixing screw 43, and the position of the Z-axis adjusting bolt 41 in the Z-axis direction is fixed and held by both. After the X-axis and Y-axis positions of the secondary mirror unit 11 are adjusted, the bearing-shaped holders 25a and 25b are clamped on the X-axis by the holder fixing bolts 27 to fix the rotation of the secondary mirror unit 11 around the X-axis and around the X-axis. Hold. Further, the bearing-shaped holders 29a and 29b are pressed against the Y-axis by the holder fixing bolts 30 to fix and hold the rotation of the auxiliary mirror unit 11 in the Y-axis direction and around the Y-axis. Further, the X-axis fixing deviation prevention pin screw 28 and the Y-axis fixing deviation prevention pin screw 31
By tightening, the X-axis and Y-axis positions of the cross pin 24 are securely fixed. At this time, the X-axis bearing-shaped holders 25a and 25b, the deviation prevention pin screw 28, and the Y-axis bearing-shaped holders 29a and 29b and the deviation prevention pin screw 31.
Is pressed in a direction perpendicular to each axis, so that no axial movement occurs.
【００２０】実施の形態１の５自由度調整固定機構装置
は、上記のように構成したので、Ｘ軸方向，Ｙ軸方向，
Ｚ軸方向，Ｘ軸まわりθｘ，Ｙ軸まわりθｙの５自由度
を調整することが可能であり、特にＸ軸、Ｙ軸の位置調
整後の固定の際には、十字形ピン２４を固定保持する軸
受状ホルダー及びずれ防止ピンねじを軸に直角方向に押
圧するため、位置ずれを起こすことなく数μｍの精度で
位置固定が可能であり、特に振動に対して、位置ずれを
ほとんどなくすることができる。Since the 5-degree-of-freedom adjusting and fixing mechanism device according to the first embodiment is constructed as described above, the X-axis direction, the Y-axis direction,
It is possible to adjust five degrees of freedom in the Z-axis direction, θx around the X-axis, and θy around the Y-axis, and especially when fixing after adjusting the positions of the X-axis and the Y-axis, the cross pin 24 is fixed and held. Since the bearing-shaped holder and the anti-misalignment pin screw are pressed in the direction perpendicular to the shaft, it is possible to fix the position with an accuracy of several μm without causing misalignment. You can
【００２１】また、Ｘ軸駆動、Ｙ軸駆動アクチュエータ
には、ステッピングモータ等を用いてもよく、その際に
は副鏡ユニットの位置および移動量を正確に知ることが
できる。実施の形態１では、３組の調整固定機構１３
ａ，１３ｂ，１３ｃで５自由度調整固定機構の主要部を
構成したが、少なくとも３個以上、例えば４組の調整固
定機構を、固定側フランジの基板と副鏡ユニットの基板
間に配置させて、５自由度調整固定機構の主要部を構成
しもよい。なお、十字形ピン２４はＺ軸に直交する二軸
（Ｘ軸，Ｙ軸）回りに回転できる機構ということで、ジ
ンバルピンと呼ぶことができる。Further, a stepping motor or the like may be used for the X-axis drive and Y-axis drive actuators, in which case the position and movement amount of the secondary mirror unit can be accurately known. In the first embodiment, three sets of adjusting and fixing mechanisms 13 are provided.
Although the main part of the 5 degree-of-freedom adjusting and fixing mechanism is composed of a, 13b, and 13c, at least 3 or more, for example, 4 sets of adjusting and fixing mechanisms are arranged between the fixed side flange substrate and the sub-mirror unit substrate. The main part of the 5-degree-of-freedom adjusting and fixing mechanism may be configured. The cross pin 24 can be called a gimbal pin because it is a mechanism that can rotate about two axes (X axis, Y axis) orthogonal to the Z axis.
【００２２】実施の形態２．実施の形態１では、３組の
調整固定機構１３ａ，１３ｂ，１３ｃで５自由度調整固
定機構の主要部を構成したが、Ｚ軸調整ボルトを使用し
ないで、固定式とし、十字形ピン２４のＸ軸とＹ軸方向
に移動可能とし、移動調整後に固定保持を行い、これら
を実施の形態１と同様にすれば、移動用テーブルのＸ
軸、Ｙ軸の２自由度調整固定機構装置を実現できる。こ
の場合も、Ｘ軸、Ｙ軸の位置調整後の固定の際には、十
字形ピン２４を固定保持する軸受状ホルダー及びずれ防
止ピンねじを軸に直角方向に押圧するため、位置ずれを
起こすことなく数μｍの精度で位置固定が可能であり、
特に振動に対して、位置ずれをほとんどなくすことがで
きる。Embodiment 2. In the first embodiment, three sets of adjusting and fixing mechanisms 13a, 13b, and 13c constitute the main part of the five-degree-of-freedom adjusting and fixing mechanism, but the Z-axis adjusting bolt is not used, and the fixing type is adopted. If the movable table can be moved in the X-axis and Y-axis directions and fixed and held after the movement adjustment, and these are the same as those in the first embodiment, the X-axis of the moving table can be changed.
It is possible to realize a two-degree-of-freedom adjustment fixing mechanism device for the axis and the Y axis. Also in this case, when the X-axis and the Y-axis are fixed after the position adjustment, the bearing-shaped holder for fixing and holding the cross pin 24 and the deviation prevention pin screw are pressed in the direction perpendicular to the axis, so that the position deviation occurs. It is possible to fix the position with an accuracy of several μm without
In particular, it is possible to almost eliminate the positional deviation with respect to vibration.
【００２３】移動用テーブルのＸ軸、Ｙ軸の２自由度調
整固定機構装置は、Ｚ軸固定式の３組の調整固定機構１
３ａ，１３ｂ，１３ｃを用いて実現しているが、Ｚ軸固
定式の１個の調整固定機構を用い、他はローラなどの支
えで実現してもよい。The X-axis and Y-axis two-degree-of-freedom adjusting and fixing mechanism device of the moving table comprises three sets of adjusting and fixing mechanisms 1 of the Z-axis fixing type.
Although it is realized by using 3a, 13b, 13c, one adjustment fixing mechanism of Z axis fixing type may be used and the other may be realized by a support such as a roller.
【００２４】[0024]
【発明の効果】この発明の精密機器の調整固定機構装置
は、固定側基台に第１軸受状ホルダーを介してＹ軸がＹ
軸方向移動可能に支承され、かつ移動用テーブルを第２
軸受状ホルダーを介してＸ軸にＸ軸方向移動可能に支承
し、互いに直交するＸ軸とＹ軸を有する十字形ピンを備
える調整固定機構で、上記固定側基台に対して上記移動
用テーブルを支承する精密機器の調整固定機構装置であ
って、上記固定側基台に対する上記移動用テーブルのＸ
軸とＹ軸の移動位置を調整し、上記第１軸受状ホルダー
をＸ軸に第１ホルダー固定用ストッパでＸ軸に直角方向
に押圧し、上記第１軸受状ホルダーから第１ずれ防止ピ
ンねじをＸ軸にＸ軸に直角方向に押圧すると共に、上記
第２軸受状ホルダーをＹ軸に第２ホルダー固定用ストッ
パでＹ軸に直角方向に押圧し、上記第２軸受状ホルダー
から第２ずれ防止ピンねじをＹ軸にＹ軸に直角方向に押
圧して、Ｘ軸とＹ軸の移動位置を固定保持するようにし
たので、確実に位置ずれを精密に防止して精度よく固定
保持することができ、振動に対して位置ずれを防止する
ことができる。According to the adjusting and fixing mechanism device for precision equipment of the present invention, the Y-axis is Y-axis via the first bearing-like holder on the fixed base.
It is movably supported in the axial direction and has a second moving table.
An adjusting and fixing mechanism, which is supported by a bearing-shaped holder so as to be movable in the X-axis direction in the X-axis direction and includes a cross-shaped pin having an X-axis and a Y-axis orthogonal to each other, and the moving table with respect to the fixed-side base. Is an adjustment and fixing mechanism device for precision equipment that supports the X-axis of the moving table with respect to the fixed-side base.
Adjust the moving position of the shaft and the Y-axis, press the first bearing-shaped holder on the X-axis in the direction perpendicular to the X-axis with the first holder fixing stopper, and then from the first bearing-shaped holder to the first displacement prevention pin screw. Is pressed to the X-axis in the direction perpendicular to the X-axis, and the second bearing-shaped holder is pressed to the Y-axis in the direction perpendicular to the Y-axis by the second holder fixing stopper, so as to be displaced from the second bearing-shaped holder by the second displacement. Since the prevention pin screw is pressed in the direction perpendicular to the Y-axis to the Y-axis and the movement position of the X-axis and the Y-axis is fixed and held, it is possible to prevent the positional deviation precisely and hold it accurately. It is possible to prevent the displacement from occurring due to vibration.
【００２５】この発明の精密機器の調整固定機構装置
は、互いに直交するＸ軸，Ｙ軸とＺ軸を想定し、固定側
基台からＺ軸方向に進退するＺ軸調整ボルトで支持さ
れ、第１軸受状ホルダーを介してＹ軸がＹ軸方向移動及
びＹ軸まわり回転可能に支承され、かつ移動用テーブル
を第２軸受状ホルダーを介してＸ軸にＸ軸方向移動及び
Ｘ軸まわり回転可能に支承し、Ｘ軸とＹ軸を有する十字
形ピンを備える調整固定機構の少なくとも３組で、上記
固定側基台に対して上記移動用テーブルを支承する精密
機器の調整固定機構装置であって、上記固定側基台に対
する上記移動用テーブルのＸ軸，Ｙ軸とＺ軸の移動位置
を調整し、上記Ｚ軸調整ボルトを移動位置にロックナッ
トで締め付け、上記第１軸受状ホルダーをＸ軸に第１ホ
ルダー固定用ストッパでＸ軸に直角方向に押圧し、上記
第１軸受状ホルダーから第１ずれ防止ピンねじをＸ軸に
Ｘ軸に直角方向に押圧すると共に、上記第２軸受状ホル
ダーをＹ軸に第２ホルダー固定用ストッパでＹ軸に直角
方向に押圧し、上記第２軸受状ホルダーから第２ずれ防
止ピンをＹ軸にＹ軸に直角方向に押圧して、Ｘ軸，Ｙ軸
とＺ軸の移動位置を固定保持するようにしたので、Ｘ軸
方向，Ｙ軸方向，Ｚ軸方向，Ｘ軸まわり，Ｙ軸まわりの
５自由度を調整することができ、確実に位置ずれを精密
に防止して精度よく固定保持することができ、振動に対
して位置ずれを防止することができる。The adjusting / fixing mechanism device for precision equipment of the present invention is assumed to have the X-axis, Y-axis and Z-axis orthogonal to each other, and is supported by a Z-axis adjusting bolt which moves forward and backward from the fixed base in the Z-axis direction. The Y-axis is rotatably supported in the Y-axis direction and rotatable about the Y-axis through one bearing-shaped holder, and the moving table is movable in the X-axis direction and rotated around the X-axis in the X-axis through the second bearing-shaped holder. An adjusting and fixing mechanism device for precision equipment, which supports at least three sets of adjusting and fixing mechanisms, which are supported on the fixed side base and are supported by at least three sets of cross-shaped pins having X-axis and Y-axis. Adjusting the X-axis, Y-axis, and Z-axis moving positions of the moving table with respect to the fixed-side base, tightening the Z-axis adjusting bolts to the moving positions with a lock nut, and fixing the first bearing-shaped holder to the X-axis. 1st holder fixing stopper Pressing in the direction perpendicular to the X axis, pressing the first displacement prevention pin screw from the first bearing-shaped holder in the direction perpendicular to the X axis in the X axis, and fixing the second bearing-shaped holder in the second holder in the Y axis. Stopper for pressing in the direction perpendicular to the Y-axis, and pressing the second displacement prevention pin from the second bearing-shaped holder in the direction perpendicular to the Y-axis to the Y-axis to move the X-axis, Y-axis and Z-axis moving positions. Since it is fixedly held, it is possible to adjust the 5 degrees of freedom in the X-axis direction, Y-axis direction, Z-axis direction, around the X-axis, and around the Y-axis. It can be fixedly held, and the displacement can be prevented against vibration.
【００２６】また、Ｚ軸調整ボルトは差動ねじであり、
円筒状大径ボルトとその貫通孔にねじ込まれた小径ボル
トで構成されて、上記大径ボルトの外周面のねじピッチ
と上記大径ボルトの貫通孔のねじピッチが異なっている
ので、Ｚ軸調整を微調整できる。The Z-axis adjusting bolt is a differential screw,
It is composed of a cylindrical large-diameter bolt and a small-diameter bolt screwed into the through hole, and the thread pitch of the outer peripheral surface of the large-diameter bolt is different from the thread pitch of the through-hole of the large-diameter bolt. Can be fine-tuned.
【図１】 この発明の実施の形態１である精密機器の調
整固定機構装置を示し、（ａ）は正面図、（ｂ）はその
側面図である。1A and 1B show an adjusting and fixing mechanism device for precision equipment according to Embodiment 1 of the present invention, FIG. 1A being a front view and FIG. 1B being a side view thereof.
【図２】 図１の調整固定機構の拡大正面図である。FIG. 2 is an enlarged front view of the adjusting and fixing mechanism of FIG.
【図３】 図２のＣ―Ｃ断面図である。3 is a sectional view taken along line CC of FIG.
【図４】 図２のＤ―Ｄ断面図である。FIG. 4 is a sectional view taken along line DD of FIG.
【図５】 従来の５自由度調整固定機構装置の概念を表
す図である。FIG. 5 is a diagram showing a concept of a conventional 5-DOF adjustment fixing mechanism device.
【図６】 図５の調整固定機構の拡大図で、図７のＢ―
Ｂ方向から見た断面図である。6 is an enlarged view of the adjusting and fixing mechanism of FIG.
It is sectional drawing seen from the B direction.
【図７】 調整固定機構を図６のＡ―Ａ方向よりみた断
面図である。7 is a cross-sectional view of the adjusting and fixing mechanism as seen from the direction AA of FIG.
１ａ，１ｂ，１ｃ 調整固定機構 ２ 副鏡ユニッ
ト（移動テーブル）
３ａ，３ｂ Ｘ軸調整固定ボルト ４ａ，４ｂ Ｙ
軸調整固定ボルト
５ Ｚ軸調整固定ボルト ６ 位置固定用
ロックナット
７ ボルト位置決め金具 ８ 固定側フラ
ンジ
９ 位置固定用ロックナット １０ 引きバネ
１１ 副鏡ユニット（移動側テーブル）
１２ 固定側フランジ（固定側基台）
１３ａ，１３ｂ，１３ｃ 調整固定機構
１４ａ，１４ｂ アクチュエータ用あて面
１５ａ，１５ｂ，１６ａ，１６ｂ アクチュエータ用の
あて面
１７ 副鏡の設置部 １８ 平ら面
１９ 平ら面 ２１ ドーナツ
状フランジ
２２ 据付孔 ２３ ボルト
２４ 十字形ピン ２５ａ，２５ｂ
軸受状ホルダー
２６ ボルト
２７ ホルダー固定用ボルト（ホルダー固定用ストッ
パ）
２８ ずれ防止ピンねじ ２９ａ，２９ｂ
軸受状ホルダー
３０ ホルダー固定用ボルト（ホルダー固定用ストッ
パ）
３１ ずれ防止ピンねじ ３２ ボルト
４１ Ｚ軸調整ボルト ４２ ワッシャ
４３ Ｚ軸調整ボルト固定用ねじ（固定用ストッパ）
４４ スペーサ ４５ 差動ねじ
４６ 貫通孔 ４７ 大径ボル
ト
４８ 小径ボルト ４９ ねじ込み
用ナット
５０ ねじ込み用（回転阻止用）ナット
５１ 大径ボルト固定用ロックナット ５２ 小径ボル
ト固定用ロックナット1a, 1b, 1c Adjustment fixing mechanism 2 Secondary mirror unit (moving table) 3a, 3b X-axis adjustment fixing bolts 4a, 4b Y
Axis adjustment fixing bolt 5 Z axis adjustment fixing bolt 6 Position fixing lock nut 7 Bolt positioning metal fitting 8 Fixed side flange 9 Position fixing lock nut 10 Pulling spring 11 Secondary mirror unit (moving side table) 12 Fixed side flange (fixed side base) 13a, 13b, 13c Adjusting and fixing mechanism 14a, 14b Actuator contact surface 15a, 15b, 16a, 16b Actuator contact surface 17 Secondary mirror installation portion 18 Flat surface 19 Flat surface 21 Donut-shaped flange 22 Installation hole 23 Bolt 24 Cross-shaped pins 25a, 25b
Bearing-shaped holder 26 Bolt 27 Holder fixing bolt (holder fixing stopper) 28 Displacement prevention pin screw 29a, 29b
Bearing-shaped holder 30 Holder fixing bolt (holder fixing stopper) 31 Displacement prevention pin screw 32 Bolt 41 Z-axis adjusting bolt 42 Washer 43 Z-axis adjusting bolt fixing screw (fixing stopper) 44 Spacer 45 Differential screw 46 Through hole 47 Large Diameter Bolt 48 Small Diameter Bolt 49 Screwing Nut 50 Screwing (Rotation Prevention) Nut 51 Large Diameter Bolt Fixing Lock Nut 52 Small Diameter Bolt Fixing Lock Nut
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2H039 AA01 AB41 2H043 AB07 AB09 AB19 AD02 AD21 AE08 CA03 ─────────────────────────────────────────────────── ─── Continued front page F-term (reference) 2H039 AA01 AB41 2H043 AB07 AB09 AB19 AD02 AD21 AE08 CA03
Claims (3)
てＹ軸がＹ軸方向移動可能に支承され、かつ移動用テー
ブルを第２軸受状ホルダーを介してＸ軸にＸ軸方向移動
可能に支承し、互いに直交するＸ軸とＹ軸を有する十字
形ピンを備える調整固定機構で、上記固定側基台に対し
て上記移動用テーブルを支承する精密機器の調整固定機
構装置であって、 上記固定側基台に対する上記移動用テーブルのＸ軸とＹ
軸の移動位置を調整し、上記第１軸受状ホルダーをＸ軸
に第１ホルダー固定用ストッパでＸ軸に直角方向に押圧
し、上記第１軸受状ホルダーから第１ずれ防止ピンねじ
をＸ軸にＸ軸に直角方向に押圧すると共に、上記第２軸
受状ホルダーをＹ軸に第２ホルダー固定用ストッパでＹ
軸に直角方向に押圧し、上記第２軸受状ホルダーから第
２ずれ防止ピンねじをＹ軸にＹ軸に直角方向に押圧し
て、Ｘ軸とＹ軸の移動位置を固定保持するようにしたこ
とを特徴とする精密機器の調整固定機構装置。1. A Y-axis is movably supported on a fixed base via a first bearing-like holder, and a moving table is moved to an X-axis in the X-axis direction via a second bearing-like holder. An adjusting and fixing mechanism device for a precision instrument that supports a movable table with respect to the fixed side base by a fixing and fixing mechanism that includes a cross-shaped pin that supports the movable base and that is orthogonal to each other. , X-axis and Y of the moving table with respect to the fixed base
The moving position of the shaft is adjusted, the first bearing-shaped holder is pressed against the X-axis in the direction perpendicular to the X-axis by the first holder fixing stopper, and the first shift prevention pin screw is pushed from the first bearing-shaped holder to the X-axis. And press the second bearing-shaped holder on the Y-axis with the second holder fixing stopper.
It is pressed in the direction perpendicular to the shaft, and the second displacement prevention pin screw is pressed from the second bearing-shaped holder in the direction perpendicular to the Y axis in the direction perpendicular to the Y axis so that the moving positions of the X axis and the Y axis are fixed and held. An adjusting and fixing mechanism device for precision equipment.
し、固定側基台からＺ軸方向に進退するＺ軸調整ボルト
で支持され、第１軸受状ホルダーを介してＹ軸がＹ軸方
向移動及びＹ軸まわり回転可能に支承され、かつ移動用
テーブルを第２軸受状ホルダーを介してＸ軸にＸ軸方向
移動及びＸ軸まわり回転可能に支承し、Ｘ軸とＹ軸を有
する十字形ピンを備える調整固定機構の少なくとも３組
で、上記固定側基台に対して上記移動用テーブルを支承
する精密機器の調整固定機構装置であって、上記固定側
基台に対する上記移動用テーブルのＸ軸，Ｙ軸とＺ軸の
移動位置を調整し、上記Ｚ軸調整ボルトを移動位置にロ
ックナットで締め付け、上記第１軸受状ホルダーをＸ軸
に第１ホルダー固定用ストッパでＸ軸に直角方向に押圧
し、上記第１軸受状ホルダーから第１ずれ防止ピンねじ
をＸ軸にＸ軸に直角方向に押圧すると共に、上記第２軸
受状ホルダーをＹ軸に第２ホルダー固定用ストッパでＹ
軸に直角方向に押圧し、上記第２軸受状ホルダーから第
２ずれ防止ピンをＹ軸にＹ軸に直角方向に押圧して、Ｘ
軸，Ｙ軸とＺ軸の移動位置を固定保持するようにしたこ
とを特徴とする精密機器の調整固定機構装置。2. An X-axis, a Y-axis, and a Z-axis which are orthogonal to each other are assumed, and the Y-axis is supported by a Z-axis adjusting bolt that advances and retreats in the Z-axis direction from a fixed base, and the Y-axis is interposed via a first bearing-shaped holder. It is movably supported in the Y-axis direction and rotatable about the Y-axis, and the moving table is rotatably supported on the X-axis through the second bearing-shaped holder so as to be movable in the X-axis direction and rotatable about the X-axis. An adjusting and fixing mechanism device for precision equipment that supports the moving table with respect to the fixed-side base by at least three sets of adjusting and fixing mechanisms having cross-shaped pins, Adjust the X-axis, Y-axis and Z-axis movement positions of the table, tighten the Z-axis adjustment bolt to the movement position with a lock nut, and fix the first bearing-shaped holder to the X-axis with the first holder fixing stopper to the X-axis. Is pressed in a direction perpendicular to The first displacement prevention pin screw is pressed from the holder to the X-axis in the direction perpendicular to the X-axis, and the second bearing-shaped holder is moved to the Y-axis by the second holder fixing stopper.
X-axis is pressed in the direction perpendicular to the axis, and the second deviation prevention pin is pressed from the second bearing-shaped holder in the direction perpendicular to the Y-axis in the direction perpendicular to the Y-axis.
An adjusting and fixing mechanism device for precision equipment, characterized in that the moving positions of the axes, Y-axis and Z-axis are fixedly held.
円筒状大径ボルトとその貫通孔にねじ込まれた小径ボル
トで構成されて、上記大径ボルトの外周面のねじピッチ
と上記大径ボルトの貫通孔のねじピッチが異なっている
請求項２記載の精密機器の調整固定機構装置。3. The Z-axis adjusting bolt is a differential screw,
3. A cylindrical large-diameter bolt and a small-diameter bolt screwed into the through hole of the large-diameter bolt, wherein the thread pitch of the outer peripheral surface of the large-diameter bolt is different from the thread pitch of the through-hole of the large-diameter bolt. Adjustment and fixing mechanism device for precision equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002099097A JP3923837B2 (en) | 2002-04-01 | 2002-04-01 | Adjusting and fixing mechanism device for precision equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002099097A JP3923837B2 (en) | 2002-04-01 | 2002-04-01 | Adjusting and fixing mechanism device for precision equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003295037A true JP2003295037A (en) | 2003-10-15 |
| JP3923837B2 JP3923837B2 (en) | 2007-06-06 |
Family
ID=29240760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002099097A Expired - Fee Related JP3923837B2 (en) | 2002-04-01 | 2002-04-01 | Adjusting and fixing mechanism device for precision equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3923837B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101371861B1 (en) * | 2012-08-23 | 2014-03-12 | 순천대학교 산학협력단 | Position adjustable roll shaft holder |
| RU193445U1 (en) * | 2019-05-27 | 2019-10-29 | Федеральное государственное унитарное предприятие "Государственный научно-исследовательский институт авиационных систем" (ФГУП "ГосНИИАС") | Device for installation and alignment of products on a dynamic stand |
| CN111421497A (en) * | 2020-04-26 | 2020-07-17 | 上海联谊光纤激光器械有限公司 | Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity |
-
2002
- 2002-04-01 JP JP2002099097A patent/JP3923837B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101371861B1 (en) * | 2012-08-23 | 2014-03-12 | 순천대학교 산학협력단 | Position adjustable roll shaft holder |
| RU193445U1 (en) * | 2019-05-27 | 2019-10-29 | Федеральное государственное унитарное предприятие "Государственный научно-исследовательский институт авиационных систем" (ФГУП "ГосНИИАС") | Device for installation and alignment of products on a dynamic stand |
| CN111421497A (en) * | 2020-04-26 | 2020-07-17 | 上海联谊光纤激光器械有限公司 | Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3923837B2 (en) | 2007-06-06 |
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