JP2003278072A - Method for producing abrasive cloth - Google Patents
Method for producing abrasive clothInfo
- Publication number
- JP2003278072A JP2003278072A JP2002073789A JP2002073789A JP2003278072A JP 2003278072 A JP2003278072 A JP 2003278072A JP 2002073789 A JP2002073789 A JP 2002073789A JP 2002073789 A JP2002073789 A JP 2002073789A JP 2003278072 A JP2003278072 A JP 2003278072A
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- fibers
- density
- sea
- polishing cloth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatment Of Fiber Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
- Nonwoven Fabrics (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、記録ディスク等に
用いるアルミニウム合金基板等を超高精度の仕上げで研
磨する際に用いられる研磨布の製造方法に関するもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a polishing cloth used for polishing an aluminum alloy substrate or the like used for a recording disk or the like with an ultrahigh precision finish.
【０００２】[0002]
【従来の技術】研磨布は、記録ディスク、集積回路基
板、液晶ディスプレイ用基材などの研磨分野で広く利用
され、最近各分野でミクロで複雑な基材を高精度で安定
して研磨することが可能な研磨布が要求されている。そ
の中で記録ディスク等の磁気記録媒体としては、アルミ
ニウム合金基板が使用されており、従来より記録ディス
クと磁気ヘッドとの密着を防止する手段として、記録デ
ィスクの基板表面に微細な条痕を形成するテクスチャー
加工という表面処理が行われている。従来、テクスチャ
ー加工の方法としては、遊離砥粒のスラリーを研磨布表
面に付着させて研削を行うスラリー研削等が用いられて
いる。近年、記憶メディアの高容量化に伴い、記録ディ
スクの高記録密度化が加速度的に進んでおり、テクスチ
ャー研磨後の基板表面粗さ（Ｒａ、Ｒｖ）を極めて小さ
くすること及び基板凹凸密度（ｌｉｎｅ ｄｅｎｓｉｔ
ｙ）を高くすることが要求され、その要求に対応しうる
研磨布が求められている。2. Description of the Related Art Abrasive cloths are widely used in the field of polishing recording disks, integrated circuit boards, substrates for liquid crystal displays, etc., and have recently been able to stably and precisely polish micro and complex substrates in various fields. There is a demand for a polishing cloth that can be used. Among them, an aluminum alloy substrate has been used as a magnetic recording medium such as a recording disk, and conventionally, fine streaks are formed on the surface of the recording disk substrate as a means for preventing close contact between the recording disk and the magnetic head. Surface treatment called texture processing is performed. Conventionally, as a method of texturing, slurry grinding or the like has been used in which a slurry of loose abrasive grains is attached to the surface of a polishing cloth for grinding. 2. Description of the Related Art In recent years, with the increase in capacity of storage media, the recording density of recording disks has been increasing at an accelerating rate, and the substrate surface roughness (Ra, Rv) after texture polishing has been made extremely small, and the substrate unevenness density (line). densit
It is required to increase y), and a polishing cloth that can meet the demand is required.
【０００３】記録ディスク等に用いるアルミニウム基板
等を超高精度の仕上げで研磨するテクスチャー加工に用
いられる研磨布としては、従来より、極細繊維よりなる
織物、発泡ポリウレタンシート等が用いられてきた。し
かし、テクスチャー加工において、高記録密度化に対応
できる基板表面粗さ、基板凹凸密度を得ることができな
かった。近年、研磨布として、緻密な毛羽を有する、極
細繊維不織布と高分子弾性体とからなる立毛人工皮革が
用いられてきているが、かかる精度の高いテクスチャー
加工を行うことは極めて難しい状態にあり、記録ディス
クの高記録密度化を達成し得なかった。Conventionally, as a polishing cloth used for texture processing for polishing an aluminum substrate or the like used for a recording disk or the like with an ultrahigh precision finish, a woven fabric made of ultrafine fibers, a foamed polyurethane sheet, etc. have been used. However, in the texture processing, it was not possible to obtain a substrate surface roughness and a substrate unevenness density that can cope with the high recording density. In recent years, as a polishing cloth, a napped artificial leather having a fine fluff, consisting of an ultrafine fiber nonwoven fabric and a polymer elastic body has been used, but it is extremely difficult to perform such highly accurate texture processing, Higher recording density of the recording disk could not be achieved.
【０００４】[0004]
【発明が解決しようとする課題】従来の研磨布は、研磨
材であるスラリー中の砥粒の保持性に劣り、研磨布表面
繊維密度が低く、表面繊維配向の均一性に劣る状態であ
ることにより、研磨砥粒を均一且つ微細に分散させるこ
とができなかったため、被研磨物である記録ディスクの
基板表面粗さが大きく、基板凹凸密度も小さい状態であ
り、記録ディスクの高記録容量化のための高記録密度化
に対応できなかった。The conventional polishing cloth is inferior in the retention of abrasive grains in the slurry as the abrasive material, the surface fiber density of the polishing cloth is low, and the uniformity of the surface fiber orientation is inferior. As a result, it was not possible to disperse the abrasive grains uniformly and finely, so that the substrate surface roughness of the recording disk, which is the object to be polished, was large, and the substrate uneven density was also small. Therefore, it was not possible to cope with the high recording density.
【０００５】本発明は、かかる従来の研磨布の問題に鑑
み、研磨砥粒の保持性、均一微分散性及び被研磨物への
フィット性に優れ、記録ディスクの高記録容量化に対応
しうる超高精度の仕上げで研磨することができる研磨布
の製造方法を提供するものである。In view of the problems of the conventional polishing cloth, the present invention is excellent in retention of abrasive grains, uniform fine dispersibility, and fitability to an object to be polished, and can cope with high recording capacity of a recording disk. The present invention provides a method for manufacturing a polishing cloth that can be polished with an ultra-high precision finish.
【０００６】[0006]
【課題を解決するための手段】本発明は、上述の課題に
鑑み鋭意研究した結果、次の手段を採用するものであ
る。The present invention adopts the following means as a result of intensive studies in view of the above problems.
【０００７】すなわち、平均繊度０．００１〜０．０３
ｄｔｅｘに極細化可能なポリアミドを島成分とする海島
型複合短繊維を用いて以下の順序の工程（１）〜（３）
を少なくとも行うことを特徴とする研磨布の製造方法で
ある。
（１）該海島型複合短繊維からなる不織布ウエブの繊維
密度が０．３ｇ／ｃｍ3以上となるような圧縮状態で、
１０００〜３５００Ｐ／ｃｍ2 の針密度でニードルパン
チングを行い、該パンチング後の不織布シートの繊維密
度が０．２ｇ／ｃｍ3 以上とする工程。
（２）該不織布シートに極細化処理を行い、該極細化処
理の前または後に高分子弾性体を極細短繊維重量に対し
２０重量％以上８０重量％以下で付与する工程。
（３）該極細短繊維不織布の少なくとも片面に対しバッ
フィング処理を施し、シート表面全面積に対する極細短
繊維占有面積比率を５０％以上とする工程。That is, the average fineness is 0.001 to 0.03.
Steps (1) to (3) in the following order using a sea-island type composite short fiber whose island component is a polyamide that can be ultrafine in dtex
Is carried out at least. (1) In a compressed state such that the fiber density of the nonwoven fabric web composed of the sea-island type composite short fibers is 0.3 g / cm 3 or more,
Needle punching is performed at a needle density of 1000 to 3500 P / cm 2 , and the fiber density of the nonwoven fabric sheet after the punching is 0.2 g / cm 3 or more. (2) A step of subjecting the non-woven fabric sheet to an ultrafine treatment and applying a polymer elastic body in an amount of 20% by weight or more and 80% by weight or less based on the weight of the ultrafine short fibers before or after the ultrafine treatment. (3) A step of subjecting at least one surface of the ultrafine short fiber nonwoven fabric to a buffing treatment to make the ratio of the area occupied by the ultrafine short fibers to the total surface area of the sheet 50% or more.
【０００８】[0008]
【発明の実施の形態】本発明の研磨布の製造方法につい
て、具体的には、海島型口金を用いて、ポリアミドを島
成分とする複合紡糸、延伸、捲縮、カットを経て得る原
綿を用いて、カード、クロスラッパー工程にてシート幅
方向に繊維を配列させた積層ウエブを形成し、不織布ウ
エブの繊維密度が０．３ｇ／ｃｍ3 以上となるような圧
縮状態でパンチングを行う。BEST MODE FOR CARRYING OUT THE INVENTION In the method for producing an abrasive cloth of the present invention, specifically, a sea-island type spinneret is used, and a composite yarn containing polyamide as an island component is used, and raw cotton obtained through drawing, crimping and cutting is used. Then, a laminated web in which fibers are arranged in the sheet width direction is formed in a card and cross-wrapper process, and punching is performed in a compressed state such that the fiber density of the nonwoven web is 0.3 g / cm 3 or more.
【０００９】該パンチング条件は、好ましくは針のバー
ブの向きが不織布ウエブ幅方向に対し垂直方向に向くよ
うにして行うのが良く、かつパンチ本数は１０００〜３
５００Ｐ／ｃｍ2 の針密度でパンチングを行うことが重
要である。該パンチング後の不織布シートの繊維密度が
０．２ｇ／ｃｍ3 以上とするものである。The punching condition is preferably such that the barb of the needle is oriented in the direction perpendicular to the width direction of the nonwoven web, and the number of punches is 1000 to 3.
It is important to punch at a needle density of 500 P / cm 2 . The fiber density of the nonwoven fabric sheet after punching is 0.2 g / cm 3 or more.
【００１０】更に、その後、該不織布シートに極細化処
理を行い、該極細化処理の前または後に高分子弾性体を
極細短繊維重量に対し２０重量％以上８０重量％以下で
付与をする。After that, the non-woven fabric sheet is subjected to ultrafine treatment, and before or after the ultrafine treatment, the polymeric elastic body is applied in an amount of 20% by weight or more and 80% by weight or less based on the weight of the ultrafine short fibers.
【００１１】さらに、該高分子弾性体を実質的に凝固、
固化させた後、該極細短繊維不織布の少なくとも片面に
対し、シート表面全面積に対する極細短繊維占有面積比
率を５０％以上となるようにバッフィング処理を施すこ
とにより、表面繊維密度が高く、かつ表面繊維配向の均
一性に優れる研磨布を得ることができるのである。Further, the elastic polymer is substantially solidified,
After solidifying, at least one surface of the ultrafine short fiber nonwoven fabric is subjected to buffing treatment so that the area ratio of the ultrafine short fibers to the total sheet surface area is 50% or more, so that the surface fiber density is high and the surface is high. It is possible to obtain a polishing cloth having excellent uniformity of fiber orientation.
【００１２】本発明の製造方法にかかる研磨布により、
被研磨物である記録ディスク用基板の表面粗さが極めて
小さく、かつ基板凹凸密度が極めて高い精度の優れたテ
クスチャー加工面を生産性よく提供することができるも
のである。With the polishing cloth according to the manufacturing method of the present invention,
It is possible to provide, with good productivity, a highly textured surface having a very small surface roughness of a substrate for a recording disk, which is an object to be polished, and an extremely high substrate irregularity density.
【００１３】本発明における極細短繊維成分は、ポリア
ミドであることが特に重要である。その理由は、スラリ
ー液とのなじみが特に良好であり、スラリー液中の研磨
砥粒の保持性、分散性に優れ、被研磨物に傷をつけるこ
となく研磨することができるとともに、柔軟性に優れる
ことにより、被研磨物との接触抵抗が低く微細研磨に適
した素材として、抜群の機能を有するものである。かか
るポリアミド極細短繊維不織布としては、たとえば島成
分にポリアミドを配してなる海島型複合繊維から構成さ
れるものである。すなわち、かかるポリアミドとして
は、例えば、ナイロン６、ナイロン６６、ナイロン１
２、共重合ナイロンなどが使用される。It is particularly important that the ultrafine short fiber component in the present invention is polyamide. The reason is that the compatibility with the slurry liquid is particularly good, the retention of the polishing abrasive grains in the slurry liquid, the dispersibility is excellent, and it is possible to polish without damaging the object to be polished, and the flexibility. By being excellent, it has a low contact resistance with the object to be polished and has an outstanding function as a material suitable for fine polishing. The polyamide ultra-fine short fiber nonwoven fabric is composed of, for example, sea-island type composite fibers obtained by arranging polyamide in the island component. That is, examples of such a polyamide include nylon 6, nylon 66, and nylon 1.
2. Copolymer nylon is used.
【００１４】かかる複合繊維の溶解除去あるいは物理
的、化学的作用により剥離、分割される海成分を構成す
るポリマーとしては、上記のポリアミド類、ポリエステ
ル類、ポリエチレン、ポリスチレン、共重合ポリスチレ
ン、ポリプロピレンなどのポリオレフィン類を使用する
ことができる。これらの中から極細短繊維の断面形成
性、紡糸性、延伸性などを考慮して、海成分と島成分と
を選択して組み合わせればよいが、特にニードルパンチ
したときの繊維の高絡合化による研磨布表面繊維の高密
度化を満足させる上から、海成分としては、ポリスチレ
ン、共重合ポリスチレンが好ましく使用される。Examples of the polymer that constitutes the sea component that is separated and divided by dissolution and removal of the conjugate fiber or physical and chemical actions include the above-mentioned polyamides, polyesters, polyethylene, polystyrene, copolymerized polystyrene and polypropylene. Polyolefins can be used. Of these, the sea component and the island component may be selected and combined in consideration of the cross-sectional formability, spinnability, drawability, etc. of the ultrafine short fibers, but especially the high entanglement of the fibers when needle-punched. Polystyrene and copolymerized polystyrene are preferably used as the sea component from the viewpoint of satisfying the densification of the surface fibers of the polishing cloth by the polymerization.
【００１５】本発明において、該複合繊維を短繊維化
し、カード・クロスラッパーを用いてシート幅方向に配
列させた積層ウエブを形成せしめた後、パンチングをす
るに際しては、針のバーブの向きが不織布ウエブ幅方向
に対し垂直方向になるようにしてニードルパンチ処理を
行うことが好ましい。ウエブを形成するという点におい
ては、ランダムウエブなどを用いることも考えられる
が、繊維配向の均一性に劣り好ましくない。またメルト
ブロー、スパンボンドなど紡糸から直接形成する長繊維
不織布でもよいように考えられるが、とりわけ研磨布に
おいては、極細繊維相互の絡合及び表面繊維の緻密性
が、短繊維不織布よりも著しく劣り、かつ、表面繊維密
度の粗密ムラが大きくなりすぎるので、極細長繊維不織
布は研磨布としては使用することはできない。ニードル
パンチの際の針のバーブ方向については、ランダム、４
５゜斜め向き等も考えられるが、シート幅方向に配列さ
れる複合繊維を高効率にて絡合させ、研磨布表面繊維の
緻密性を得るためには、シート幅方向に対し垂直つまり
９０゜に向けることが最適なのである。ただし、もし、
垂直にするのが難しいような場合には、該垂直方向か
ら、±３０度程度の角度範囲内、更に好ましくは±１５
度程度の角度範囲内でずれてバーブを用いるようにして
もある程度の効果が得られるので望ましいものである。In the present invention, when the composite fiber is made into a short fiber and a laminated web arranged in the sheet width direction is formed by using a card cloth wrapper, when punching, the direction of the barb of the needle is a non-woven fabric. It is preferable to perform the needle punching treatment so that it is perpendicular to the web width direction. In terms of forming a web, it is possible to use a random web or the like, but this is not preferable because the uniformity of fiber orientation is poor. It is also considered that long-fiber non-woven fabric formed directly from spinning such as melt blown and spun bond may be used, but especially in abrasive cloth, the entanglement of ultrafine fibers and the denseness of surface fibers are significantly inferior to short-fiber non-woven fabric, Moreover, since the unevenness of the surface fiber density becomes too large, the ultrafine long fiber nonwoven fabric cannot be used as a polishing cloth. The needle barb direction during needle punching is random, 4
Although 5 ° diagonal orientation is also possible, in order to entangle the composite fibers arranged in the sheet width direction with high efficiency and to obtain the denseness of the surface fiber of the polishing cloth, the direction perpendicular to the sheet width direction, that is, 90 ° It is best to turn to. However, if
When it is difficult to make it vertical, within an angle range of about ± 30 degrees from the vertical direction, more preferably ± 15
Even if the barbs are used while deviating within an angle range of about degrees, some effects can be obtained, which is desirable.
【００１６】バーブのスロートデプスとしては３０〜１
５０μｍが好ましく、５０〜１００μｍがより好まし
い。The barb throat depth is 30 to 1
50 μm is preferable, and 50 to 100 μm is more preferable.
【００１７】本発明において、ニードルパンチ処理の針
本数としては、繊維の高絡合化による繊維の高密度化
（緻密な立毛面形成）の観点から、１０００〜３５００
本／ｃｍ2 であることが特に重要である。１０００本／
ｃｍ2 未満では、研磨布表面繊維の緻密性に劣り、３５
００本／ｃｍ2 を越えると、加工性の悪化を招くととも
に、繊維損傷が大きくなるため好ましくない。針のバー
ブの方向をシート幅方向に対し垂直にすることにより、
上記範囲の針本数にて効率よく繊維絡合が進み、タテ配
向繊維の高密度化を達成しうるのである。In the present invention, the number of needles in the needle punching treatment is from 1,000 to 3,500 from the viewpoint of densification of fibers by forming highly entangled fibers (formation of a dense raised surface).
It is particularly important that the number is books / cm 2 . 1000 /
If it is less than cm 2 , the fineness of the surface fibers of the polishing cloth is poor,
When it exceeds 00 fibers / cm 2 , workability is deteriorated and fiber damage is increased, which is not preferable. By making the needle barb direction perpendicular to the sheet width direction,
With the number of needles in the above range, the fiber entanglement can proceed efficiently and a high density of the vertically oriented fibers can be achieved.
【００１８】本発明において、ニードルパンチング後の
不織布シートの繊維密度は、０．２ｇ／ｃｍ3 以上であ
ることが特に重要であり、０．２ｇ／ｃｍ3 未満の場
合、不織布シート中のタテ配向繊維の緻密性に劣るもの
であり、表面繊維密度の緻密化を図れず好ましくない。In the present invention, it is especially important that the fiber density of the non-woven fabric sheet after needle punching is 0.2 g / cm 3 or more. If it is less than 0.2 g / cm 3 , the vertical orientation in the non-woven fabric sheet is high. It is inferior in the denseness of the fiber and is not preferable because the surface fiber density cannot be densified.
【００１９】本発明のパンチングにおいて、不織布ウエ
ブの繊維密度が０．３ｇ／ｃｍ3 以上となるような圧縮
状態でニードルパンチを行うことが特に重要である。
０．４ｇ／ｃｍ3 以上の圧縮状態とするのがより好まし
い。該圧縮状態を得るための具体的な装置としては、パ
ンチングゾーンの入口、または出口あるいはその両方
に、不織布シートの上下からニップする圧縮ロールが好
ましく使用される。ニードルパンチを行う際に、不織布
ウエブ中の厚み方向へ配向した繊維を該圧縮ロールにて
積極的につぶすことにより、不織布ウエブの長手方向の
配向性をより均一に揃えることができるのである。In punching of the present invention, it is particularly important to perform needle punching in a compressed state such that the fiber density of the nonwoven web is 0.3 g / cm 3 or more.
It is more preferable that the compressed state is 0.4 g / cm 3 or more. As a specific device for obtaining the compressed state, a compression roll that nips the nonwoven fabric sheet from above and below at the entrance and / or the exit of the punching zone is preferably used. When the needle punching is performed, the fibers oriented in the thickness direction in the nonwoven web are positively crushed by the compression rolls, whereby the orientation of the nonwoven web in the longitudinal direction can be made more uniform.
【００２０】ニードルパンチング処理前の該不織布ウエ
ブの密度は、デリベリ圧縮による繊維配向の均一化を図
るためには、０．３ｇ／ｃｍ3 未満が好ましく、さらに
好ましくは０．２ｇ／ｃｍ3 以下、特に好ましくは０．
１ｇ／ｃｍ3 以下のフェルトまたはノンパンチングウエ
ブが使用される。The density of the nonwoven web before the needle punching treatment is preferably less than 0.3 g / cm 3 , more preferably 0.2 g / cm 3 or less, in order to make the fiber orientation uniform by the delivery compression. Particularly preferably 0.
Felts or non-punching webs up to 1 g / cm 3 are used.
【００２１】本発明では、上記の複合繊維を溶解除去あ
るいは物理的、化学的作用により剥離、分割した後の極
細短繊維の平均繊度は０．００１〜０．０３ｄｔｅｘで
あることが特に重要である。０．００１ｄｔｅｘ未満で
ある場合、繊維強度及び剛性が低く、スラリー中の遊離
砥粒の保持性、分散性に劣るため、遊離砥粒が凝集し、
スクラッチを発生しやすいとともに、研磨時の表面抵抗
が小さくなりすぎるため、研磨の際に基板表面を均一に
馴らす作用を引き起こし、基板凹凸密度の低下につなが
ることにより好ましくない。０．０３ｄｔｅｘを越える
と、研磨布表面での立毛の緻密性に劣るとともに、接触
抵抗が大きくなりすぎるため、基板表面粗さが大きくな
ることにより好ましくない。In the present invention, it is particularly important that the average fineness of the ultrafine short fibers after the above-mentioned composite fiber is dissolved and removed or peeled and divided by a physical or chemical action is 0.001 to 0.03 dtex. . If it is less than 0.001 dtex, the fiber strength and rigidity are low, and the retention and dispersibility of the loose abrasive grains in the slurry are poor, so the free abrasive grains aggregate,
Since scratches are likely to occur and the surface resistance during polishing becomes too small, it causes an effect of uniformly accommodating the substrate surface during polishing, which leads to a reduction in the unevenness density of the substrate, which is not preferable. When it exceeds 0.03 dtex, the denseness of the naps on the surface of the polishing cloth is inferior and the contact resistance becomes too large, so that the substrate surface roughness becomes large, which is not preferable.
【００２２】極細繊維を得る紡糸方法としては、チップ
ブレンド、ポリマーブレンド等の混合紡糸を用いれば、
０．０３ｄｔｅｘ以下の極細短繊維は容易に得られる
が、複合紡糸により得られる極細短繊維に比べ、部分的
に極細短繊維が束状となる状態になりやすく、繊維の均
一分散性に劣るため、表面繊維密度の粗密ムラが大き
く、研磨後の基板凹凸密度が小さくなり、高記録密度化
を達成し得ない。一方、海島型口金を用いた複合紡糸で
は、得られる極細繊維の繊度バラツキ、繊維間距離バラ
ツキが小さいために、人工皮革を形成した際の表面繊維
の均一分散性に優れ、研磨後の基板凹凸密度を高くする
ことができる。複合単繊維中の島数は５０〜５００が好
ましい。５００を越えると口金構造が複雑となり、口金
加工性、紡糸性が著しく低くなる場合があるため、一般
に工業的に好ましくは５００までである。また５０未満
である場合、生産性が低くなるとともに、表面繊維の緻
密性に劣る場合があるため好ましくない。As a spinning method for obtaining ultrafine fibers, mixed spinning such as chip blending and polymer blending can be used.
Ultrafine short fibers of 0.03 dtex or less can be easily obtained, but as compared with the ultrafine short fibers obtained by the composite spinning, the ultrafine short fibers are likely to be partially in a bundle state and the uniform dispersibility of the fibers is poor. However, the unevenness of the surface fiber density is large and the substrate uneven density after polishing becomes small, so that it is not possible to achieve a high recording density. On the other hand, in the composite spinning using the sea-island type spinneret, since the fineness variation of the obtained ultrafine fibers and the variation of the distance between the fibers are small, the uniform dispersion of the surface fibers when the artificial leather is formed is excellent, and the substrate unevenness after polishing is uneven. The density can be increased. The number of islands in the composite single fiber is preferably 50 to 500. If it exceeds 500, the spinneret structure becomes complicated, and the spinnerability and spinnability of the spinner may be remarkably lowered. Therefore, it is generally industrially preferably up to 500. Further, if it is less than 50, the productivity is lowered and the denseness of the surface fibers may be deteriorated, which is not preferable.
【００２３】かかる極細短繊維を製造する方法として
は、該複合繊維の少なくとも１成分のポリマーを除去す
るか、または相互に剥離することによって極細短繊維を
製造することができる。特に該複合繊維の少なくとも１
成分のポリマーを除去する場合、その方法は溶剤で抽出
する方法、熱分解させる方法など種々あるが、好ましく
は溶剤で抽出する方法である。As a method for producing such ultrafine short fibers, the ultrafine short fibers can be produced by removing at least one component polymer of the composite fiber or by peeling them from each other. In particular at least one of said composite fibers
When removing the component polymer, there are various methods such as a solvent extraction method and a thermal decomposition method, but a solvent extraction method is preferable.
【００２４】本発明において、該不織布シートの極細化
処理の前または後に高分子弾性体を付与させることが重
要である。該高分子弾性体は、表面凹凸や振動吸収のた
めのクッション、繊維形態保持などの役割を有し、該ポ
リアミド極細短繊維不織布と一体化させることにより、
被研磨物へのフィット性および被研磨物へのキズの抑制
効果に優れるものである。In the present invention, it is important to add a polymeric elastic body before or after the ultrathinning treatment of the nonwoven fabric sheet. The polymer elastic body has a role of cushioning for surface unevenness and vibration absorption, fiber shape retention, etc., and by being integrated with the polyamide ultrafine short fiber nonwoven fabric,
It is excellent in the fit property to the object to be polished and the effect of suppressing scratches to the object to be polished.
【００２５】かかる高分子弾性体としては、ポリウレタ
ン、アクリロニトリル、ブタジエンラバー、天然ゴム、
ポリ塩化ビニルなどを使用することができる。中でも、
ポリウレタンが本発明プロセスにおける加工性やクッシ
ョン性の上から好ましい。研磨時のクッション性および
フィット性は、研磨精度の上で重要であり、極細短繊維
と高分子弾性体の割合や空隙率（見掛け密度でわかる）
によって制御でき、高分子弾性体の含有量としては、極
細短繊維重量に対し２０重量％〜８０重量％であること
が特に重要である。含有量によって研磨布の表面状態、
空隙率、クッション性、硬度、強度などを調節すること
ができるが、２０重量％未満である場合、クッション性
に劣り、傷を発生しやすくなるため好ましくない。８０
重量％を越えると、加工性及び生産性に劣るとともに、
表面上に高分子弾性体が露出しやすく、砥粒の凝集によ
る傷を引き起こしやすいとともに、表面繊維の緻密性に
劣ることとなり、研磨加工基板の表面凹凸密度が小さく
なり、高記録密度化に対応し得ないため好ましくない。
かかる高分子弾性体の付与方法としては、該高分子弾性
体を塗布あるいは含浸後凝固させる方法、あるいはエマ
ルジョン、ラテックス状で塗布あるいは含浸して乾燥、
固着させる方法など種々の方法を採用することができ
る。As the polymer elastic material, polyurethane, acrylonitrile, butadiene rubber, natural rubber,
Polyvinyl chloride or the like can be used. Above all,
Polyurethane is preferable from the viewpoint of workability and cushioning property in the process of the present invention. Cushioning and fitting at the time of polishing are important for polishing accuracy, and the ratio of ultrafine short fibers and polymer elastic body and porosity (known by apparent density)
It is particularly important that the content of the elastic polymer is 20 to 80% by weight based on the weight of the ultrafine short fibers. The surface condition of the polishing cloth depends on the content,
The porosity, cushioning property, hardness, strength and the like can be adjusted, but if it is less than 20% by weight, the cushioning property is poor and scratches are likely to occur, which is not preferable. 80
When it exceeds the weight%, workability and productivity are poor, and
The elastic polymer is easily exposed on the surface and easily causes scratches due to agglomeration of abrasive grains, and the denseness of the surface fibers is inferior. It is not preferable because it cannot be done.
As the method for applying the polymer elastic material, a method of coating or impregnating the polymer elastic material and then solidifying it, or applying or impregnating it in the form of an emulsion or latex and drying it,
Various methods such as a method of fixing can be adopted.
【００２６】本発明において、ポリアミド極細短繊維不
織布の少なくとも片面に対し、シート表面全面積に対す
る極細繊維占有面積比率が５０％以上となるように、バ
ッフィング処理することが特に重要である。In the present invention, it is particularly important to perform buffing treatment on at least one surface of the polyamide ultra-fine short fiber nonwoven fabric so that the ratio of the area occupied by the ultra-fine fibers to the entire surface area of the sheet is 50% or more.
【００２７】すなわち、不織布表面上に露出する高分子
弾性体を除去し、かつ表面繊維の配向性をより均一にす
るためにもバッフィング処理は重要であり、高分子弾性
体付与後、サンドペーパー等を使用して、表面を起毛処
理することにより均一で緻密な立毛を形成することがで
きるのである。極細繊維占有面積比率が５０％未満の場
合、つまりサンドペーパー等による研削減量が小さい場
合には、研磨布表面上に高分子弾性体が露出している状
態になりやすく、表面繊維密度が低いため、研磨加工基
板の表面凹凸密度が小さくなり、高記録密度化に対応し
得ない場合があるため好ましくなく、また、高分子弾性
体が露出している箇所に、研磨砥粒の凝集が起こり、の
発生につながりやすい傾向にあるため好ましくないもの
である。That is, the buffing treatment is important in order to remove the polymeric elastic material exposed on the surface of the nonwoven fabric and to make the orientation of the surface fibers more uniform. After applying the polymeric elastic material, sandpaper or the like is used. It is possible to form uniform and dense naps by raising the surface of the nap. When the ratio of the area occupied by ultrafine fibers is less than 50%, that is, when the reduction amount of sandpaper or the like is small, the polymer elastic body is likely to be exposed on the surface of the polishing cloth, and the surface fiber density is low. The surface irregularity density of the polished substrate becomes small, which is not preferable because it may not be possible to cope with high recording density, and aggregation of polishing abrasive grains occurs at a portion where the polymer elastic body is exposed, It is not preferable because it tends to occur.
【００２８】本発明において、上記のシート表面全面積
に対する極細短繊維占有面積比率は、次の方法を用いて
測定し得られるものである。倍率３００倍にて電子顕微
鏡より画像処理装置を用いて取り込んだ表面画像データ
に平均化（イコライズ）処理を施した後、閾値１００に
て２階調化処理を施し、２値化画像を作製する。得られ
た２値化画像全面積に対する白色部の面積比率を極細短
繊維占有面積比率として測定をして得られるものであ
る。In the present invention, the ratio of the area occupied by the ultrafine short fibers to the total surface area of the sheet is measured by the following method. The surface image data captured from the electron microscope using an image processing apparatus at a magnification of 300 times is subjected to averaging (equalizing) processing, and then subjected to two-gradation processing at a threshold value of 100 to produce a binary image. . It is obtained by measuring the area ratio of the white part with respect to the total area of the obtained binarized image as an ultrafine short fiber occupied area ratio.
【００２９】本発明方法に従い、本発明にかかる研磨布
を製造するには、上記で説明した研磨布の研削減量の量
・研削深さを調整して、かつ、適宜にシート表面全面積
に対する極細短繊維占有面積比率を確認しながら研削を
することによって、該極細短繊維占有面積比率が５０％
以上のものを比較的容易に得ることができる。一般的に
は、研削減量を２０〜１００ｇ／ｍ2 程度または研削深
さを０．０５〜０．３ｍｍ程度の範囲内とすることによ
って、該占有面積比率が５０％以上のものを得ることが
できる。In order to produce the polishing cloth according to the present invention according to the method of the present invention, the amount of grinding reduction and the grinding depth of the polishing cloth described above are adjusted, and the ultrafine surface area of the sheet is appropriately adjusted. By observing while observing the short fiber occupation area ratio, the ultrafine short fiber occupation area ratio is 50%.
The above can be obtained relatively easily. Generally, by setting the reduction amount to be about 20 to 100 g / m 2 or the grinding depth to be in the range of about 0.05 to 0.3 mm, it is possible to obtain one having an occupied area ratio of 50% or more. it can.
【００３０】[0030]
【実施例】次に実施例を挙げて、本発明をさらに詳細に
説明する。
実施例１
島成分としてナイロン６と、海成分として共重合ポリス
チレンを用いて、島本数１００本／ホールの海島型口金
を通して、島／海重量比率４０／６０で溶融紡糸して未
延伸糸を得た。該未延伸糸を延伸倍率３．０倍で延伸
し、捲縮を付与してカットし、複合繊度３．８ｄｔｅ
ｘ、島成分繊度０．０１５ｄｔｅｘ、繊維長５１ｍｍの
海島型複合繊維の原綿を形成する。The present invention will be described in more detail with reference to the following examples. Example 1 Nylon 6 as an island component and copolymerized polystyrene as a sea component were passed through a sea-island type spinneret having 100 islands / hole and melt-spun at an island / sea weight ratio of 40/60 to obtain an undrawn yarn. It was The undrawn yarn was drawn at a draw ratio of 3.0 times, crimped and cut to obtain a composite fineness of 3.8 dte.
x, island component fineness of 0.015 dtex, and fiber length of 51 mm to form raw cotton of sea-island type composite fiber.
【００３１】この海島型複合繊維の原綿を用いて、カー
ド、クロスラッパー工程を経て積層ウエブを形成し、つ
いでこの積層ウエブに１００本／ｃｍ2 のニードルパン
チを行った。得られた不織布ウエブの目付は７００ｇ／
ｍ2 で、密度は０．１ｇ／ｃｍ3 であった。Using this raw material of sea-island type composite fiber, a laminated web was formed through a card and a cross-wrapper process, and then the laminated web was needle punched at 100 pieces / cm 2 . The obtained nonwoven web has a basis weight of 700 g /
In m 2 , the density was 0.1 g / cm 3 .
【００３２】次に、シートをロール間クリアランス２ｍ
ｍに設定した圧縮ロールで、密度が０．３５ｇ／ｃｍ3
になるまで圧縮し、この不織布シートの上下から、針の
バーブ方向をシート幅方向に対し垂直にして１５００本
／ｃｍ2 の針本数でニードルパンチし、目付６５０ｇ／
ｍ2 、密度０．２３ｇ／ｃｍ3 の不織布を作製した。こ
の不織布シートを極細繊維化し、次いで、ポリウレタン
を極細短繊維重量に対し３０重量％含浸させ、水中で該
ポリウレタンを凝固した後、このシートを厚み方向に
０．１０ｍｍバッフィング処理を施して厚さ０．５５ｍ
ｍ、目付２００ｇ／ｍ2 、極細短繊維密度０．２８ｇ／
ｃｍ3 の研磨布を得た。Then, the sheet is rolled to a clearance of 2 m.
With a compression roll set to m, the density is 0.35 g / cm 3
And then the needle bar is punched from above and below the nonwoven fabric sheet with the needle barb direction perpendicular to the sheet width direction at a needle count of 1500 needles / cm 2 , and a unit weight of 650 g /
A nonwoven fabric with m 2 and a density of 0.23 g / cm 3 was prepared. This non-woven fabric sheet was made into ultrafine fibers, and then polyurethane was impregnated with 30% by weight based on the weight of the ultrafine short fibers, and the polyurethane was coagulated in water. Then, the sheet was buffed in a thickness direction of 0.10 mm to give a thickness of 0. .55m
m, basis weight 200 g / m 2 , ultrafine short fiber density 0.28 g /
A polishing cloth of cm 3 was obtained.
【００３３】本研磨布は表面繊維がシート長手方向に均
一に配向しており、シート幅方向に占める表面繊維本数
は４５本／１００μｍ、シート表面中の極細繊維占有面
積比率は６０％であった。In this polishing cloth, the surface fibers were uniformly oriented in the longitudinal direction of the sheet, the number of surface fibers occupying in the sheet width direction was 45/100 μm, and the area ratio of ultrafine fibers on the surface of the sheet was 60%. .
【００３４】この研磨布を用いて、被研磨物であるアル
ミニウム合金基板のテクスチャー加工を行ったところ、
加工性良好で、基板表面粗さＲａ、Ｒｖが極めて小さ
く、且つ基板凹凸密度が大きいものであり、８０ＧＢ／
枚に相当する高記録密度ディスクに対応可能なものであ
った。
比較例１
ニードルパンチを行う際に圧縮した不織布ウエブ密度を
０．２ｇ／ｃｍ3 にする以外は実施例１と同様の方法に
て、厚さ０．５５ｍｍ、目付１８０ｇ／ｍ2 、極細短繊
維密度０．２２ｇ／ｃｍ3 の研磨布を得た。Using this polishing cloth, the aluminum alloy substrate which is the object to be polished was textured,
The workability is good, the substrate surface roughness Ra and Rv are extremely small, and the substrate unevenness density is large.
It was possible to deal with a high recording density disc equivalent to one sheet. Comparative Example 1 A thickness of 0.55 mm, a basis weight of 180 g / m 2 , and ultrafine short fibers were obtained in the same manner as in Example 1 except that the density of the nonwoven web compressed during needle punching was changed to 0.2 g / cm 3. A polishing cloth having a density of 0.22 g / cm 3 was obtained.
【００３５】本研磨布は表面繊維がシート長手方向に不
均一に配向しており、シート幅方向に占める表面繊維本
数は３５本／１００μｍであった。シート表面中の極細
繊維占有面積比率は４７％であった。In the present polishing cloth, the surface fibers were unevenly oriented in the longitudinal direction of the sheet, and the number of surface fibers occupied in the sheet width direction was 35 fibers / 100 μm. The ratio of the area occupied by the ultrafine fibers on the surface of the sheet was 47%.
【００３６】この研磨布を用いて、被研磨物であるアル
ミニウム合金基板のテクスチャー加工を行ったところ、
加工性良好で、基板表面粗さＲａ、Ｒｖも小さかった
が、基板凹凸密度が小さいものであり、ディスク記録密
度は４０ＧＢ／枚であった。
比較例２
針のバーブ方向をランダム配列にする以外は実施例１と
同様の方法にて、ニードルパンチを行い、目付６００ｇ
／ｍ2 、密度０．１９ｇ／ｃｍ3 の不織布を作製した
後、実施例１と同様の方法にて、厚さ０．５５ｍｍ、目
付１７０ｇ／ｍ2、極細短繊維密度０．２０ｇ／ｃｍ3
の研磨布を得た。Using this polishing cloth, the aluminum alloy substrate as the object to be polished was textured,
The workability was good, and the substrate surface roughnesses Ra and Rv were small, but the substrate uneven density was small, and the disk recording density was 40 GB / sheet. Comparative Example 2 Needle punching was performed in the same manner as in Example 1 except that the barb direction of the needles was randomly arranged.
/ M 2 and a density of 0.19 g / cm 3 were produced, and then, in the same manner as in Example 1, the thickness was 0.55 mm, the basis weight was 170 g / m 2 , and the ultrafine short fiber density was 0.20 g / cm 3.
To obtain a polishing cloth.
【００３７】本研磨布は表面繊維がシート長手方向に均
一に配向しており、シート幅方向に占める表面繊維本数
は３０本／１００μｍであり、シート表面中の極細繊維
占有面積比率は４０％であった。In the present polishing cloth, the surface fibers are uniformly oriented in the longitudinal direction of the sheet, the number of surface fibers occupying in the sheet width direction is 30 fibers / 100 μm, and the ultrafine fiber occupying area ratio in the sheet surface is 40%. there were.
【００３８】この研磨布を用いて、被研磨物であるアル
ミニウム合金基板のテクスチャー加工を行ったところ、
加工性良好で、基板表面粗さＲａ、Ｒｖも小さかった
が、基板凹凸密度が小さいものであり、ディスク記録密
度は３０ＧＢ／枚であった。比較例３バッフィング処理
の際の研削厚みを０．０４ｍｍにする以外は実施例１と
同様の方法にて、厚さ０．６１ｍｍ、目付２２０ｇ／ｍ
2 、極細短繊維密度０．２８ｇ／ｃｍ3 の研磨布を得
た。Using this polishing cloth, the aluminum alloy substrate as the object to be polished was textured,
The workability was good and the substrate surface roughnesses Ra and Rv were small, but the substrate uneven density was small, and the disk recording density was 30 GB / sheet. Comparative Example 3 A thickness of 0.61 mm and a basis weight of 220 g / m were performed in the same manner as in Example 1 except that the grinding thickness at the time of buffing treatment was 0.04 mm.
2. A polishing cloth having an ultrafine short fiber density of 0.28 g / cm 3 was obtained.
【００３９】本研磨布は表面繊維がシート長手方向に均
一に配向しているが、ポリウレタンが研磨布表面に露出
しており、シート幅方向に占める表面繊維本数は３０本
／１００μｍであり、シート表面中の極細繊維占有面積
比率は４０％であった。In this polishing cloth, the surface fibers are uniformly oriented in the longitudinal direction of the sheet, but the polyurethane is exposed on the surface of the polishing cloth, and the number of surface fibers in the sheet width direction is 30 fibers / 100 μm. The ratio of the area occupied by the ultrafine fibers on the surface was 40%.
【００４０】この研磨布を用いて、被研磨物であるアル
ミニウム合金基板のテクスチャー加工を行ったところ、
傷が発生し、加工性不良であり、基板表面粗さＲａ、Ｒ
ｖ、基板凹凸密度について評価不可であった。Using this polishing cloth, the aluminum alloy substrate as the object to be polished was textured,
Scratches are generated and workability is poor. Substrate surface roughness Ra, R
v, the substrate uneven density could not be evaluated.
【００４１】[0041]
【発明の効果】本発明の製造方法によれば、表面繊維密
度が高く、表面繊維配向の均一性に優れているので、記
録ディスクの高記録密度化に対応しうる超高精度の仕上
げでテクスチャー加工面を仕上げることができる。According to the production method of the present invention, since the surface fiber density is high and the surface fiber orientation is excellent in uniformity, it is possible to finish the texture with an ultra-high precision that can cope with the high recording density of the recording disk. The processed surface can be finished.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） // Ｂ２４Ｂ 21/00 Ｂ２４Ｂ 21/00 Ｚ Ｆターム(参考） 3B154 AA08 AA09 AB06 AB07 AB22 BA25 BB58 DA10 3C058 AA05 CB01 4L033 AA08 AB07 AC15 CA15 CA68 4L047 AA14 AA18 AA21 AA23 AA27 AB02 AB08 BA03 CC16 DA00 5D112 AA02 BA06 GA09 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) // B24B 21/00 B24B 21/00 ZF term (reference) 3B154 AA08 AA09 AB06 AB07 AB22 BA25 BB58 DA10 3C058 AA05 CB01 4L033 AA08 AB07 AC15 CA15 CA68 4L047 AA14 AA18 AA21 AA23 AA27 AB02 AB08 BA03 CC16 DA00 5D112 AA02 BA06 GA09
Claims (6)
極細化可能なポリアミドを島成分とする海島型複合短繊
維を用いて以下の順序の工程（１）〜（３）を少なくと
も行うことを特徴とする研磨布の製造方法。 （１）該海島型複合短繊維からなる不織布ウエブの繊維
密度が０．３ｇ／ｃｍ3以上となるような圧縮状態で、
１０００〜３５００Ｐ／ｃｍ2 の針密度でニードルパン
チングを行い、該パンチング後の不織布シートの繊維密
度が０．２ｇ／ｃｍ3 以上とする工程。 （２）該不織布シートに極細化処理を行い、該極細化処
理の前または後に高分子弾性体を極細短繊維重量に対し
２０重量％以上８０重量％以下で付与する工程。 （３）該極細短繊維不織布の少なくとも片面に対しバッ
フィング処理を施し、シート表面全面積に対する極細短
繊維占有面積比率を５０％以上とする工程。1. A sea-island type composite short fiber having a finely divided polyamide having an average fineness of 0.001 to 0.03 dtex as an island component is used to perform at least steps (1) to (3) in the following order. A method of manufacturing a polishing cloth characterized by the above. (1) In a compressed state such that the fiber density of the nonwoven fabric web composed of the sea-island type composite short fibers is 0.3 g / cm 3 or more,
Needle punching is performed at a needle density of 1000 to 3500 P / cm 2 , and the fiber density of the nonwoven fabric sheet after the punching is 0.2 g / cm 3 or more. (2) A step of subjecting the non-woven fabric sheet to an ultrafine treatment and applying a polymer elastic body in an amount of 20% by weight or more and 80% by weight or less based on the weight of the ultrafine short fibers before or after the ultrafine treatment. (3) A step of subjecting at least one surface of the ultrafine short fiber nonwoven fabric to a buffing treatment to make the ratio of the area occupied by the ultrafine short fibers to the total surface area of the sheet 50% or more.
工程を経て繊維をシート幅方向に配列させた積層ウエブ
を形成した後、針のバーブの方向が不織布ウエブ幅方向
に対し垂直の向きにして行われることを特徴とする請求
項１記載の研磨布の製造方法。2. The punching is carried out by forming a laminated web in which fibers are arranged in the sheet width direction through a card and cross-lapper process, and then the direction of the barb of the needle is perpendicular to the nonwoven web width direction. The method for manufacturing a polishing cloth according to claim 1, wherein:
有する海島型口金を用いた複合紡糸により得られる請求
項１または２に記載の研磨布の製造方法。3. The method for producing a polishing cloth according to claim 1, wherein the sea-island type composite staple fiber is obtained by composite spinning using a sea-island type spinneret having 50 to 500 islands.
が、０．３ｇ／ｃｍ 3 未満の繊維密度を有するものであ
る請求項１〜３のいずれかに記載の研磨布の製造方法。4. A non-woven web before needle punching treatment.
But 0.3 g / cm 3Having a fiber density of less than
The method for producing a polishing cloth according to any one of claims 1 to 3.
レンまたは共重合ポリスチレンである請求項１〜４のい
ずれかに記載の研磨布の製造方法。5. The method for producing a polishing cloth according to claim 1, wherein the sea component in the sea-island type composite short fibers is polystyrene or copolymerized polystyrene.
項１〜５のいずれかに記載の研磨布の製造方法。6. The method for producing a polishing cloth according to claim 1, wherein the elastic polymer is polyurethane.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073789A JP4254115B2 (en) | 2002-03-18 | 2002-03-18 | Manufacturing method of polishing cloth |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073789A JP4254115B2 (en) | 2002-03-18 | 2002-03-18 | Manufacturing method of polishing cloth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003278072A true JP2003278072A (en) | 2003-10-02 |
| JP4254115B2 JP4254115B2 (en) | 2009-04-15 |
Family
ID=29227693
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002073789A Expired - Fee Related JP4254115B2 (en) | 2002-03-18 | 2002-03-18 | Manufacturing method of polishing cloth |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006045757A (en) * | 2004-07-05 | 2006-02-16 | Toray Ind Inc | Abrasive cloth and method for producing the same |
| WO2007040103A1 (en) * | 2005-10-05 | 2007-04-12 | Toray Industries, Inc. | Abrasive cloth and process for production thereof |
| JP2008208503A (en) * | 2007-02-28 | 2008-09-11 | Toray Ind Inc | Sheet-like article |
| JP2011058108A (en) * | 2009-09-08 | 2011-03-24 | Kuraray Co Ltd | Base material of artificial leather, and method of producing the same |
| CN110546319A (en) * | 2017-04-28 | 2019-12-06 | 3M创新有限公司 | Large denier nonwoven web |
-
2002
- 2002-03-18 JP JP2002073789A patent/JP4254115B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006045757A (en) * | 2004-07-05 | 2006-02-16 | Toray Ind Inc | Abrasive cloth and method for producing the same |
| WO2007040103A1 (en) * | 2005-10-05 | 2007-04-12 | Toray Industries, Inc. | Abrasive cloth and process for production thereof |
| JP2008208503A (en) * | 2007-02-28 | 2008-09-11 | Toray Ind Inc | Sheet-like article |
| JP2011058108A (en) * | 2009-09-08 | 2011-03-24 | Kuraray Co Ltd | Base material of artificial leather, and method of producing the same |
| CN110546319A (en) * | 2017-04-28 | 2019-12-06 | 3M创新有限公司 | Large denier nonwoven web |
| US11794307B2 (en) | 2017-04-28 | 2023-10-24 | 3M Innovative Properties Company | Large denier nonwoven fiber webs |
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| Publication number | Publication date |
|---|---|
| JP4254115B2 (en) | 2009-04-15 |
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