JP2003270608A - Inspection device for liquid crystal display panel - Google Patents
Inspection device for liquid crystal display panelInfo
- Publication number
- JP2003270608A JP2003270608A JP2002073119A JP2002073119A JP2003270608A JP 2003270608 A JP2003270608 A JP 2003270608A JP 2002073119 A JP2002073119 A JP 2002073119A JP 2002073119 A JP2002073119 A JP 2002073119A JP 2003270608 A JP2003270608 A JP 2003270608A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- crystal display
- display panel
- light
- inspection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/22—Antistatic materials or arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/69—Arrangements or methods for testing or calibrating a device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、小型の液晶表示パ
ネルの製造において目視検査を行う際に、検査する液晶
表示パネルを拡大して表示することで、省スペースで見
易く、効率よく検査することのできる液晶表示パネル検
査装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides a space-saving, easy-to-see and efficient inspection by enlarging and displaying a liquid crystal display panel to be inspected when performing a visual inspection in the manufacture of a small liquid crystal display panel. A liquid crystal display panel inspection device capable of performing
【０００２】[0002]
【従来の技術】小型化、高画素化が進むビューレコーダ
ー（ビデオカメラ）のビューファインダー、データプロ
ジェクター、ヘッドマウントディスプレイ、また携帯端
末等に用いられる液晶表示パネルの生産工程において、
不良の検査を行うために使用する点灯検査は次の方式が
ある。2. Description of the Related Art In the production process of viewfinders of video recorders (video cameras), data projectors, head mounted displays, and liquid crystal display panels used for portable terminals, etc.
There are the following methods for lighting inspection used to perform defect inspection.
【０００３】（１）拡大レンズによる検査方法は、大型
レンズを両眼でのぞいて、液晶表示パネルの不良を見つ
け、内容を確認する。または、液晶表示パネルを搭載す
る商品のレンズ（ビデオカメラの覗くところ）を単眼で
覗いて、液晶表示パネルの不良を見つけ、内容を確認す
る。(1) In the inspection method using a magnifying lens, a large-sized lens is looked through with both eyes to find a defect in the liquid crystal display panel and the contents are confirmed. Alternatively, look through the lens of the product equipped with the liquid crystal display panel (where you look into the video camera) with a single eye to find defects in the liquid crystal display panel and check the contents.
【０００４】（２）投射による検査方法は、液晶表示パ
ネルを搭載する商品またはそれに近い装置を用い、暗室
で２７倍程度に投影拡大して、液晶表示パネルの不良を
見つけ、内容を確認する。(2) In the inspection method using projection, a product equipped with a liquid crystal display panel or a device close to it is used, and the projection is magnified about 27 times in a dark room to find a defect in the liquid crystal display panel and confirm the contents.
【０００５】（３）ＣＣＤを使った自動検査は、液晶表
示パネルをＣＣＤカメラで画像を取り込み、画像処理を
行うことで液晶表示パネルの不良を見つけ、内容を確認
する。(3) In an automatic inspection using a CCD, a liquid crystal display panel is captured by a CCD camera, and an image is processed to find a defect in the liquid crystal display panel and confirm the contents.
【０００６】[0006]
【発明が解決しようとする課題】前記の従来の検査方法
のうち、拡大レンズによる検査方法では、検査者の目の
負担が大きい。また、熟練までの時間必要として、検査
の見落としを増加させる。Among the conventional inspection methods described above, the inspection method using a magnifying lens places a heavy burden on the inspector's eyes. In addition, it takes time to become skilled and increases the oversight of inspection.
【０００７】また、投影による検査方法では、投影でき
るだけのスペースと暗室を必要とし、コストがかかる。In addition, the inspection method by projection requires a space and a dark room for projection, which is costly.
【０００８】また、ＣＣＤを使った自動検査方法では、
装置自体のコストがかかる。また、現在の画像処理の技
術では、検査に要するタクトタイムが長く、高画素に対
応することは難しい。Further, in the automatic inspection method using CCD,
The cost of the device itself is high. Further, with the current image processing technology, the takt time required for inspection is long, and it is difficult to deal with high pixels.
【０００９】そこで、本発明は、液晶表示パネルの目視
検査において、省スペースで見やすく効率よく検査がで
きる液晶表示パネル検査装置を提供するものである。Therefore, the present invention provides a liquid crystal display panel inspecting apparatus capable of performing a visual inspection of a liquid crystal display panel in a space-saving, easy-to-see and efficient manner.
【００１０】[0010]
【課題を解決するための手段】本発明の液晶表示パネル
検査装置は、液晶表示パネルを保持する液晶表示パネル
保持部材および液晶表示パネル保持部材に保持された液
晶表示パネルを駆動する液晶表示パネル駆動装置を備え
た液晶表示パネル保持手段と、液晶表示パネル保持部材
に保持された液晶表示パネルに光を照射し、光の照射に
より得られた液晶表示パネルの画像をミラーで反射させ
てスクリーンに投影する光学手段とを備えたことを特徴
とする。A liquid crystal display panel inspection apparatus according to the present invention includes a liquid crystal display panel holding member for holding a liquid crystal display panel and a liquid crystal display panel drive for driving a liquid crystal display panel held by the liquid crystal display panel holding member. The liquid crystal display panel holding means equipped with the device and the liquid crystal display panel held by the liquid crystal display panel holding member are irradiated with light, and the image of the liquid crystal display panel obtained by the irradiation of light is reflected by a mirror and projected on the screen. And an optical unit for performing the operation.
【００１１】本発明の液晶表示パネル検査装置は、光源
と、光源の光を平行光にするコンデンサレンズと、コン
デンサレンズからの光を集光する集光レンズと、集光レ
ンズからの光により得られた液晶表示パネルの画像を拡
大するレンズユニットと、レンズユニットで拡大された
画像を反射させるミラーと、ミラーで反射された画像を
投影するスクリーンと、集光レンズとレンズユニットの
間に配置された、液晶表示パネルを保持する液晶表示パ
ネル保持部材と、液晶表示装置を駆動する液晶表示パネ
ル駆動装置で構成することができる。The liquid crystal display panel inspection apparatus of the present invention is obtained by a light source, a condenser lens for collimating the light of the light source, a condenser lens for condensing the light from the condenser lens, and light from the condenser lens. The lens unit that magnifies the image on the LCD panel, the mirror that reflects the image magnified by the lens unit, the screen that projects the image reflected by the mirror, and the condensing lens are arranged between the lens unit. The liquid crystal display panel holding member that holds the liquid crystal display panel and the liquid crystal display panel driving device that drives the liquid crystal display device can be used.
【００１２】[0012]
【発明の実施の形態】図１は、本発明の液晶表示パネル
検査装置の概略図である。FIG. 1 is a schematic diagram of a liquid crystal display panel inspection apparatus of the present invention.
【００１３】液晶表示パネル検査装置は、ハウジング１
内に、検査する液晶表示パネルを保持する液晶表示パネ
ル保持手段と、液晶表示パネルに光を透過させて投影す
る光学手段とで構成される。The liquid crystal display panel inspection apparatus includes a housing 1
A liquid crystal display panel holding means for holding a liquid crystal display panel to be inspected therein and an optical means for transmitting and projecting light on the liquid crystal display panel.
【００１４】液晶表示パネル保持手段は、集光レンズ１
０とレンズユニット１２との間には検査の対象となる液
晶表示パネル２を保持する液晶表示パネル保持部材４
と、液晶表示パネル保持部材４に保持された液晶表示パ
ネル２に電気を供給して駆動させる液晶表示パネル駆動
装置５とを備えている。液晶表示パネル２は、液晶表示
パネル全面に光が当たるように位置決めされる。The liquid crystal display panel holding means comprises a condenser lens 1.
0 and the lens unit 12, a liquid crystal display panel holding member 4 for holding the liquid crystal display panel 2 to be inspected.
And a liquid crystal display panel drive device 5 for supplying and driving electricity to the liquid crystal display panel 2 held by the liquid crystal display panel holding member 4. The liquid crystal display panel 2 is positioned so that the entire surface of the liquid crystal display panel is exposed to light.
【００１５】光学手段の光源６には、メタルハライドラ
ンプ、キセノンランプ、高圧水銀ランプなどが使用され
る。光源６の光は反射板７で反射される。光源６とし
て、特にメタルハライドランプなどは、色温度が高くて
白色に近い光が得られるので、液晶表示パネル２の色を
検査するのに適し、また、明るさが明るく液晶表示パネ
ル２に用いられている光源に近い状態で検査することが
可能となる。A metal halide lamp, a xenon lamp, a high pressure mercury lamp or the like is used as the light source 6 of the optical means. The light from the light source 6 is reflected by the reflector 7. As the light source 6, particularly a metal halide lamp or the like is suitable for inspecting the color of the liquid crystal display panel 2 because it has a high color temperature and obtains light close to white. It becomes possible to inspect in a state close to the existing light source.
【００１６】光源６の光は、コンデンサーレンズ８で平
行光にされる。コンデンサーレンズ８からの平行光は、
赤外線フィルター９により赤外線をカットし、紫外線カ
ットフィルター９ａで紫外線をカットして、液晶表示パ
ネル２に対する熱影響をなくす。The light from the light source 6 is collimated by the condenser lens 8. The parallel light from the condenser lens 8 is
Infrared rays are cut by the infrared ray filter 9 and ultraviolet rays are cut by the ultraviolet ray cut filter 9a to eliminate the influence of heat on the liquid crystal display panel 2.
【００１７】赤外線、および紫外線をカットされた光
は、集光レンズ１０によりレンズユニット１２に偏光フ
ィルター１１を経て集光レンズ１０とレンズユニット１
２との間に液晶表示パネル保持部材４に保持された液晶
表示パネル２に焦点を合わせて集光させ、レンズユニッ
ト１２により液晶表示パネル２の画像を拡大する。焦点
の調整はレンズユニット１２を移動させて行う。The light from which the infrared rays and the ultraviolet rays have been cut is passed through a condenser lens 10 to a lens unit 12 through a polarizing filter 11 and then to the condenser lens 10 and the lens unit 1.
Then, the liquid crystal display panel 2 held by the liquid crystal display panel holding member 4 is focused and focused, and the lens unit 12 enlarges the image of the liquid crystal display panel 2. The focus is adjusted by moving the lens unit 12.
【００１８】レンズユニット１２を出た液晶表示パネル
２の画像は、偏光フィルター１３を経てミラー１４ａ，
１４ｂで反射され、透明のガラスに反射防止のシートや
スクリーン専用のシートを貼ったスクリーン１５に投影
され映し出される。スクリーン１５には、例えば、１５
倍程度に拡大した液晶表示パネル全体の映像を投影して
両眼で目視することができる。スクリーン１５は、投影
画像を見やすくするため、例えば４５度に傾斜させても
よい。The image of the liquid crystal display panel 2 which has come out of the lens unit 12 passes through the polarization filter 13 and the mirror 14a,
The light is reflected by 14b and projected and projected on a screen 15 in which an antireflection sheet or a screen-dedicated sheet is attached to a transparent glass. The screen 15 has, for example, 15
It is possible to project an image of the entire liquid crystal display panel magnified by a factor of 2 and view it with both eyes. The screen 15 may be tilted at, for example, 45 degrees to make the projected image easier to see.
【００１９】また、図２に示すように、スクリーン１５
に拡大レンズ１６、例えば２倍レンズを搭載すれば、ス
クリーン１５では小さくて検査しにくい映像をさらに拡
大して検査することができる。Further, as shown in FIG.
If a magnifying lens 16, for example, a 2 × lens is mounted on the screen 15, it is possible to further magnify and inspect an image that is small and difficult to inspect on the screen 15.
【００２０】さらに、スクリーン１５にＮＤフィルター
を搭載し、その透過率で疑わしい部分の不良か良の判定
基準とすることもできる。Further, it is possible to mount an ND filter on the screen 15 and use the ND filter as a criterion for judging whether the portion suspicious by the transmittance is defective or good.
【００２１】スクリーンに搭載する拡大レンズ１６とＮ
Ｄフィルターは、例えば、製図用ドラフターの定規部と
同じ構造で支持して、スクリーン１５と拡大レンズ１
６、ＮＤフィルターの間隔を一定に保って任意の箇所に
位置させることができる。Magnifying lens 16 and N mounted on the screen
The D filter is supported by, for example, the same structure as the ruler section of the drafting drafter, and the screen 15 and the magnifying lens 1 are supported.
6. It is possible to position the ND filter at an arbitrary position while keeping the interval constant.
【００２２】なお、液晶表示パネル２が静電気の影響を
受けないようにするため、静電気の発生を防ぐイオナイ
ザ１８を配置してもよい。In order to prevent the liquid crystal display panel 2 from being affected by static electricity, an ionizer 18 for preventing static electricity may be arranged.
【００２３】また、液晶表示パネル検査装置にキャスタ
ー１９を取り付けて移動自在とすることにより、検査場
所が特定されることなく、検査場所の自由度が増す。Further, by attaching the casters 19 to the liquid crystal display panel inspection device so as to be movable, the inspection place is not specified and the degree of freedom of the inspection place is increased.
【００２４】図２は、スクリーン１５に投影された画像
を示す図であり、光らない画素２０、光りっぱなしの画
素２１が拡大されてスクリーン１５に投影される。FIG. 2 is a diagram showing an image projected on the screen 15, in which the pixels 20 which do not illuminate and the pixels 21 which remain lit are enlarged and projected on the screen 15.
【００２５】また、拡大レンズ１６により、さらに拡大
して光らない画素２０を目視することが可能となる。Further, the magnifying lens 16 makes it possible to further magnify and see the pixels 20 which do not shine.
【００２６】[0026]
【発明の効果】本発明は、液晶表示パネルをメタルハラ
イドランプなどの光源を使って、投影拡大し、ミラーを
使って装置内で反射することで、省スペースが可能とな
った。また、反射した投影画像をスクリーンに映し出
し、液晶表示パネル全体として不良を両眼で確認するこ
とが可能であり、目の負担を和らげることができる。According to the present invention, space can be saved by projecting and enlarging a liquid crystal display panel using a light source such as a metal halide lamp and reflecting the light in the device using a mirror. In addition, the reflected projection image can be displayed on the screen, and a defect in the liquid crystal display panel as a whole can be confirmed with both eyes, and the burden on the eyes can be reduced.
【図１】本発明の液晶表示パネル検査装置の概略図であ
る。FIG. 1 is a schematic diagram of a liquid crystal display panel inspection apparatus of the present invention.
【図２】本発明の液晶表示パネル検査装置のスクリーン
に投影された画像を示す図である。FIG. 2 is a diagram showing an image projected on a screen of the liquid crystal display panel inspection device of the present invention.
１：ハウジング ２：液晶表示パネル ４：液晶表示パ
ネル保持部材 ５：液晶表示パネル駆動装置 ６：光源
７：反射板 ８：コンデンサーレンズ ９：赤外線フ
ィルター ９ａ：紫外線カットフィルター １０：集光
レンズ １１：偏光フィルター １２：レンズユニット
１３：偏光フィルター １４：ミラー
１５：スクリーン １６：拡大レンズ １７：ＮＤフィ
ルター １８：イオナイザ １９：キャスター ２０：
光らない画素 ２１：光りっぱなしの画素1: Housing 2: Liquid crystal display panel 4: Liquid crystal display panel holding member 5: Liquid crystal display panel drive device 6: Light source 7: Reflector 8: Condenser lens 9: Infrared filter 9a: Ultraviolet ray cut filter 10: Condenser lens 11: Polarized light Filter 12: Lens unit 13: Polarization filter 14: Mirror 15: Screen 16: Magnifying lens 17: ND filter 18: Ionizer 19: Caster 20:
Pixels that do not shine 21: Pixels that keep shining
Claims (6)
ル保持部材および液晶表示パネル保持部材に保持された
液晶表示パネルを駆動する液晶表示パネル駆動装置を備
えた液晶表示パネル保持手段と、 液晶表示パネル保持部材に保持された液晶表示パネルに
光を照射し、光の照射により得られた液晶表示パネルの
画像をミラーで反射させてスクリーンに投影する光学手
段とを備えたことを特徴とする液晶表示パネル検査装
置。1. A liquid crystal display panel holding means comprising a liquid crystal display panel holding member for holding the liquid crystal display panel and a liquid crystal display panel driving device for driving the liquid crystal display panel held by the liquid crystal display panel holding member, and a liquid crystal display panel. A liquid crystal display, comprising: an optical unit that irradiates a liquid crystal display panel held by a holding member with light, and reflects an image of the liquid crystal display panel obtained by the light irradiation by a mirror to project the image on a screen. Panel inspection device.
ンサレンズと、コンデンサレンズからの光を集光する集
光レンズと、集光レンズからの光により得られた液晶表
示パネルの画像を拡大するレンズユニットと、レンズユ
ニットで拡大された画像を反射させるミラーと、ミラー
で反射された画像を投影するスクリーンと、集光レンズ
とレンズユニットの間に配置された、液晶表示パネルを
保持する液晶表示パネル保持部材と、液晶表示装置を駆
動する液晶表示パネル駆動装置とを備えたことを特徴と
する請求項１記載の液晶表示パネル検査装置。2. A light source, a condenser lens that collimates the light of the light source, a condenser lens that condenses the light from the condenser lens, and an image of a liquid crystal display panel obtained by the light from the condenser lens. A lens unit for enlarging, a mirror for reflecting an image magnified by the lens unit, a screen for projecting an image reflected by the mirror, and a liquid crystal display panel arranged between the condenser lens and the lens unit. The liquid crystal display panel inspection device according to claim 1, further comprising a liquid crystal display panel holding member and a liquid crystal display panel driving device that drives the liquid crystal display device.
外線フィルターを設けたことを特徴とする請求項１また
は２に記載の液晶表示パネル検査装置。3. The liquid crystal display panel inspection device according to claim 1, further comprising an infrared filter provided between the condenser lens and the condenser lens.
に設けたことを特徴とする請求項１〜４のいずれか１項
に記載の液晶表示パネル検査装置。4. The liquid crystal display panel inspection device according to claim 1, wherein a magnifying lens is movably provided on the screen.
自在に設けたことを特徴とする請求項１〜４のいずれか
１項に記載の液晶表示パネル検査装置。5. The liquid crystal display panel inspection device according to claim 1, wherein an ND filter is movably provided on the screen.
とを特徴とする請求項１〜５のいずれか１項に記載の液
晶表示パネル検査装置。6. The liquid crystal display panel inspection device according to claim 1, further comprising an ionizer for removing static electricity.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073119A JP2003270608A (en) | 2002-03-15 | 2002-03-15 | Inspection device for liquid crystal display panel |
| KR1020020031691A KR20030074049A (en) | 2002-03-15 | 2002-06-05 | liquid crystal display panel test apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073119A JP2003270608A (en) | 2002-03-15 | 2002-03-15 | Inspection device for liquid crystal display panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003270608A true JP2003270608A (en) | 2003-09-25 |
Family
ID=29202934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002073119A Pending JP2003270608A (en) | 2002-03-15 | 2002-03-15 | Inspection device for liquid crystal display panel |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2003270608A (en) |
| KR (1) | KR20030074049A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007107973A (en) * | 2005-10-12 | 2007-04-26 | Micronics Japan Co Ltd | Inspection device |
| US8906705B2 (en) | 2005-12-27 | 2014-12-09 | Fujitsu Semiconductor Limited | Semiconductor device with pads of enhanced moisture blocking ability |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100773035B1 (en) * | 2006-06-29 | 2007-11-02 | 주식회사 매크론 | Optical transformation unit and optical test apparatus having it |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0458131A (en) * | 1990-06-27 | 1992-02-25 | Sharp Corp | Inspecting device for liquid crystal display panel |
| JPH04248435A (en) * | 1991-02-01 | 1992-09-03 | Sharp Corp | Apparatus for inspecting liquid crystal display |
| JPH08166779A (en) * | 1994-10-11 | 1996-06-25 | Sony Corp | Defect inspection apparatus and defect inspection method |
| JPH1039268A (en) * | 1996-07-18 | 1998-02-13 | Sharp Corp | Inspecting method and inspecting device for liquid crystal display panel for projection |
| JP3520752B2 (en) * | 1997-12-16 | 2004-04-19 | セイコーエプソン株式会社 | Liquid crystal panel inspection device, liquid crystal panel inspection method, and projection display device |
| JP3501661B2 (en) * | 1998-10-12 | 2004-03-02 | シャープ株式会社 | Inspection method and inspection device for liquid crystal display panel |
| JP2001255526A (en) * | 2000-03-13 | 2001-09-21 | Seiko Epson Corp | Inspection apparatus for liquid crystal panel and method of inspecting for liquid crystal panel |
-
2002
- 2002-03-15 JP JP2002073119A patent/JP2003270608A/en active Pending
- 2002-06-05 KR KR1020020031691A patent/KR20030074049A/en not_active Application Discontinuation
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007107973A (en) * | 2005-10-12 | 2007-04-26 | Micronics Japan Co Ltd | Inspection device |
| KR100780312B1 (en) * | 2005-10-12 | 2007-11-29 | 가부시키가이샤 니혼 마이크로닉스 | Inspection Apparatus |
| US8906705B2 (en) | 2005-12-27 | 2014-12-09 | Fujitsu Semiconductor Limited | Semiconductor device with pads of enhanced moisture blocking ability |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030074049A (en) | 2003-09-19 |
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