JP2003217777A - Electric connection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To minimize the electric contact resistance of a device with a contactor having a simple structure. <P>SOLUTION: This electric connection device comprises a deformation part having a curved outer surface, a plurality of contacts having a needle tip part continued to one end of the deformed part and a needle rear part continued to the other end of the deformation part, a plurality of bar-like members having an end part brought into contact with the tip of the needle tip part, and an assembling means for assembling the contacts and the bar-like members to a board. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【発明の属する技術分野】本発明は、配線基板のような
基板の導電性部と、集積回路のような被検査体の電極部
とを電気的に接続する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for electrically connecting a conductive portion of a substrate such as a wiring substrate and an electrode portion of a device under test such as an integrated circuit.

【０００２】[0002]

【従来の技術】集積回路の通電試験は、一般に、配線基
板の配線パターンのような導電性部と、集積回路のリー
ド電極、パッド電極、バンプ電極、突起電極等の電極部
とを電気的に接続する装置を用いて行われる。2. Description of the Related Art Generally, an electric current test of an integrated circuit is performed by electrically conducting a conductive part such as a wiring pattern of a wiring board and an electrode part such as a lead electrode, a pad electrode, a bump electrode, a protruding electrode of the integrated circuit. This is done using the connecting device.

【０００３】この種の電気的接続装置の１つとして、弧
状、Ｊ字状、Ｓ又はＺ字状、Ｉ字状をした複数の接触子
を用いるものがある（例えば、特開平１０−１７７８８
６号公報、特開平１１−３１５６６号公報、特開平１１
−１６２６０５号公報）。As one of the electrical connection devices of this type, there is one using a plurality of arc-shaped, J-shaped, S or Z-shaped, and I-shaped contacts (for example, Japanese Patent Laid-Open No. 10-17788).
6, JP-A-11-31566, JP-A-11-31566
-162605).

【０００４】これらの電気的接続装置は、いずれも、合
成樹脂で製造された板状のハウジングにこれの厚さ方向
に貫通する複数のスロットを少なくとも一列に形成し、
このハウジングを配線基板の一方の面側に組み付け、配
線基板の導電性部と集積回路の電極部とを電気的に接続
する複数の接触子をハウジングのスロットに配置し、弾
性体をハウジング内に配置している。In all of these electrical connection devices, a plurality of slots penetrating in the thickness direction of a plate-shaped housing made of synthetic resin are formed in at least one row,
This housing is assembled on one surface side of the wiring board, and a plurality of contacts for electrically connecting the conductive portion of the wiring board and the electrode portion of the integrated circuit are arranged in the slots of the housing, and the elastic body is placed inside the housing. It is arranged.

【０００５】上記の電気的接続装置において、集積回路
の電極部が接触子に押圧されると、接触子が、弾性体を
弾性変形させると共に、配線基板の導電性部に押圧され
る。これにより、配線基板の導電性部と集積回路の電極
部とが電気的に接続されるから、その状態で集積回路の
通電試験が行われる。In the above electrical connection device, when the electrode portion of the integrated circuit is pressed against the contact, the contact elastically deforms the elastic body and also presses against the conductive portion of the wiring board. As a result, the conductive portion of the wiring board and the electrode portion of the integrated circuit are electrically connected, so that the energization test of the integrated circuit is performed in this state.

【０００６】接触子が電極部に押圧される際、接触子
は、電極部に対してわずかに回転し、それにより導電性
部及び電極部に対して良好な電気的接続状態にされる。
また、接触子自体の構造が簡単であるから、他のタイプ
の接触子を用いる装置に比べ、廉価になる。When the contact piece is pressed against the electrode part, the contact piece rotates slightly with respect to the electrode part, thereby making a good electrical connection with the conductive part and the electrode part.
Further, since the structure of the contactor itself is simple, the cost is lower than that of an apparatus using another type of contactor.

【０００７】しかし、上記のような電気的接続装置は、
平坦な電極部への接触には好適であるが、半球状のバン
プ電極への接触用やハンドラ用としてはあまり用いられ
ていない。However, the electrical connecting device as described above is
Although it is suitable for contacting a flat electrode portion, it is not often used for contacting a hemispherical bump electrode or for a handler.

【０００８】このため、電極部がバンプ電極を備えた集
積回路やハンドラ等に用いられる電気的接続装置におい
ては、ポゴピンのように基板に垂直の方向へ移動可能の
接触子を用いたものが多く利用されている。For this reason, in many electrical connection devices used in integrated circuits, handlers, etc., where the electrode portion is provided with bump electrodes, a contact that is movable in the direction perpendicular to the substrate, such as a pogo pin, is often used. It's being used.

【０００９】[0009]

【解決しようとする課題】しかし、ポゴピンタイプの接
触子では、コイルばねを間にして２つのピンを組み合わ
せ、一方のピンを導電性部に接触させ、他方のピンを電
極部に接触させることにより、導電性部と電極部とを電
気的に接続するから、接触子内の２箇所に電気的接触部
が存在することになる。[Problems to be Solved] However, in a pogo pin type contactor, two pins are combined with a coil spring in between, one of the pins is brought into contact with the conductive portion, and the other pin is brought into contact with the electrode portion. Since the conductive portion and the electrode portion are electrically connected, there are two electrical contact portions in the contactor.

【００１０】そのような接触子を用いた電気的接続装置
では、装置、特に接触子の電気的な接触抵抗が大きく、
したがって高周波試験に不向きであり、良好な試験結果
を得ることができない。また、接触子自体の構造が複雑
であるから、高価な接触子を多数必要とし、それだけコ
スト高になる。In the electrical connection device using such a contact, the electrical contact resistance of the device, especially the contact, is large,
Therefore, it is not suitable for a high frequency test and a good test result cannot be obtained. Further, since the structure of the contactor itself is complicated, a large number of expensive contacts are required, and the cost becomes higher accordingly.

【００１１】本発明の目的は、簡単な構造の接触子で、
装置の電気的接触抵抗を小さくすることにある。An object of the present invention is a contactor having a simple structure,
The purpose is to reduce the electrical contact resistance of the device.

【００１２】[0012]

【解決手段、作用、効果】本発明に係る電気的接続装置
は、湾曲された外面を有する変形部、該変形部の一端に
続く針先部及び前記変形部の他端に続く針後部を備える
複数の接触子と、前記針先部の先端に接触された端部を
有する複数の棒状部材と、前記接触子及び前記棒状部材
を基板に組み付ける組み付け手段とを含む。An electrical connection device according to the present invention comprises a deformed portion having a curved outer surface, a needle tip portion connected to one end of the deformed portion, and a needle rear portion connected to the other end of the deformed portion. It includes a plurality of contacts, a plurality of rod-shaped members having an end portion in contact with the tip of the needle tip portion, and an assembly means for assembling the contacts and the rod-shaped member to a substrate.

【００１３】電気的接続装置は、接触子が基板の導電性
部と対向するように、組み付け手段により基板に組み付
けられる。この状態において、集積回路のような被検査
体が電気的接続装置に配置され、その状態で被検査体の
電極部と棒状部材の針先部側と反対側の他端部とが相対
的に押圧される。The electrical connecting device is assembled to the substrate by the assembling means so that the contact faces the conductive portion of the substrate. In this state, the device under test such as an integrated circuit is arranged in the electrical connection device, and in this state, the electrode part of the device under test and the other end of the rod-shaped member on the side opposite to the needle tip side are relatively positioned. Pressed.

【００１４】電極部と棒状部材とが相対的に押圧される
と、接触子が、棒状部材により基板の導電性部に押圧さ
れると共に、電極部に対してわずかに回転する。これに
より、電極部と棒状部材、棒状部材と接触子、及び、接
触子と導電性部が強く押圧され、それらが良好な電気的
接続状態にされる。When the electrode portion and the rod-shaped member are pressed relative to each other, the contactor is pressed against the conductive portion of the substrate by the rod-shaped member and is slightly rotated with respect to the electrode portion. As a result, the electrode portion and the rod-shaped member, the rod-shaped member and the contactor, and the contactor and the conductive portion are strongly pressed, and they are brought into a good electrical connection state.

【００１５】本発明によれば、接触子自体の構造が簡単
であるから、他のタイプの接触子を用いる装置に比べ、
廉価になる。また、装置内の電気的接触部が接触子と棒
状部材との間の１箇所にすぎないから、接触子の電気的
な接触抵抗が小さく、高周波試験に用いて好適であり、
良好な試験結果を得ることができる。According to the present invention, since the structure of the contact itself is simple, as compared with an apparatus using another type of contact,
It will be cheaper. Further, since the electrical contact portion in the device is only one place between the contact and the rod-shaped member, the electrical contact resistance of the contact is small, which is suitable for use in high frequency tests,
Good test results can be obtained.

【００１６】前記組み付け手段は、板状部を備えるハウ
ジングであって前記基板に組み付けられるハウジング
と、該ハウジングに配置された弾性変形可能の１以上の
針押えとを含み、前記接触子は前記針押えにより前記ハ
ウジングに配置されており、前記棒状部材はそれらの軸
線方向へ移動可能に前記ハウジングに装着されていても
よい。そのようにすれば、接触子は針押えによりハウジ
ングに安定に組み付けられる。The assembling means includes a housing having a plate-like portion and assembled to the substrate, and one or more elastically deformable needle retainers arranged in the housing, and the contactor is the needle. The rod-shaped member may be arranged in the housing by a retainer, and the rod-shaped member may be mounted in the housing so as to be movable in the axial direction thereof. By doing so, the contactor can be stably assembled to the housing by the needle presser.

【００１７】１つの実施例において、前記針押えは前記
板状部から間隔おいて前記ハウジングに配置された弾性
板と、前記弾性板の前記板状部と反対側に配置された電
気的絶縁板を含み、各接触子の針先部は前記弾性板を貫
通して前記板状部の側に突出しており、各接触子の針後
部は前記電気的絶縁板内に位置されており、前記棒状部
材はそれらの長手方向へ移動可能に前記板状部を厚さ方
向に貫通していてもよい。そのようにすれば、弾性板及
び電気的絶縁板に対する接触子の位置及び姿勢が弾性板
及び電気的絶縁板により安定化される。In one embodiment, the needle retainer has an elastic plate disposed in the housing at a distance from the plate-shaped portion, and an electrically insulating plate disposed on the opposite side of the elastic plate from the plate-shaped portion. The needle tip portion of each contact element penetrates the elastic plate and projects toward the plate-like portion side, and the needle rear portion of each contact element is located in the electrically insulating plate and has the rod shape. The members may penetrate the plate-shaped portions in the thickness direction so as to be movable in the longitudinal direction thereof. By doing so, the position and orientation of the contact with respect to the elastic plate and the electrically insulating plate are stabilized by the elastic plate and the electrically insulating plate.

【００１８】前記弾性板は前記接触子の針先部が貫通す
る第１の穴を有しており、前記電気的絶縁板は、前記接
触子の針後部が収容された第２の穴を有していてもよ
い。そのようにすれば、弾性板及び電気的絶縁板に対す
る接触子の位置及び姿勢がより安定化される。The elastic plate has a first hole through which the needle tip portion of the contactor passes, and the electrically insulating plate has a second hole in which the needle rear portion of the contactor is accommodated. You may have. By doing so, the position and orientation of the contact with respect to the elastic plate and the electrically insulating plate are more stabilized.

【００１９】前記ハウジングは、前記接触子、前記弾性
板及び前記電気的絶縁板が配置された第１の部材と、前
記棒状部材が配置された第２の部材とを含むことができ
る。そのようにすれば、基板の導電性部から接触子の先
端までの寸法が同じであっても、長さ寸法が異なる棒状
部材を用いることにより、基板の導電性部から被検査体
の電極部までの寸法が異なる電気的接続装置とすること
ができる。したがって、接触子、弾性板、電気的絶縁板
及び第１の部材を、基板の導電性部から被検査体の電極
部までの寸法が異なる電気的接続装置で共通するよう
に、規格化することができる。The housing may include a first member on which the contact, the elastic plate and the electrical insulating plate are arranged, and a second member on which the rod-shaped member is arranged. By doing so, even if the dimension from the conductive portion of the substrate to the tip of the contact is the same, by using rod-shaped members with different length dimensions, the conductive portion of the substrate to the electrode portion of the device under test can be used. Can be different electrical connection devices. Therefore, the contacts, the elastic plate, the electrically insulating plate, and the first member are standardized so that they are common to the electrical connection devices having different sizes from the conductive portion of the substrate to the electrode portion of the device under test. You can

【００２０】他の実施例において、前記針押えは前記接
触子の配列方向へ伸びる弾性変形可能の棒状部を含み、
前記ハウジングは、前記接触子の針先部が受け入れられ
た複数のスロットと、該スロットに連通されかつ前記針
押えが配置された１以上の凹所と、前記棒状部材が貫通
する貫通穴とを有している。これにより、ハウジングに
対する接触子の位置及び姿勢がスロット及び針押えによ
り安定化される。In another embodiment, the needle retainer includes an elastically deformable rod-shaped portion extending in the arrangement direction of the contacts.
The housing has a plurality of slots in which the needle tips of the contacts are received, one or more recesses communicating with the slots and in which the needle retainers are arranged, and a through hole through which the rod-shaped member penetrates. Have As a result, the position and posture of the contact with respect to the housing are stabilized by the slot and the needle presser.

【００２１】他の実施例において、前記接触子は前記ハ
ウジングに一方向に間隔をおいて配置されており、前記
凹所は前記一方向に伸びており、前記針押えは前記凹所
の長手方向へ伸びる弾性変形可能の棒状部を含む。In another embodiment, the contacts are spaced apart from each other in the housing in one direction, the recess extends in the one direction, and the needle retainer extends in the longitudinal direction of the recess. An elastically deformable rod-shaped portion that extends to is included.

【００２２】他の実施例においても、前記ハウジング
は、前記スロット及び前記凹所を有する第１の部材と、
該第１の部材に重ねられた第２の部材であって前記貫通
穴を有する第２の部材とを含むことができる。そのよう
にすれば、基板の導電性部から接触子の先端部までの寸
法が同じであっても、長さ寸法が異なる棒状部材を用い
ることにより、基板の導電性部から被検査体の電極部ま
での寸法が異なる電気的接続装置とすることができる。
したがって、接触子、針押え及び第１の部材を、基板の
導電性部から被検査体の電極部までの寸法が異なる電気
的接続装置で共通するように、規格化することができ
る。In another embodiment, the housing includes a first member having the slot and the recess,
It may include a second member that is superposed on the first member and that has the through hole. By doing so, even if the dimension from the conductive portion of the substrate to the tip of the contact is the same, by using rod-shaped members having different length dimensions, the electrode from the conductive portion of the substrate to the electrode of the device under test is used. The electrical connection device may have different dimensions up to the part.
Therefore, the contactor, the needle retainer, and the first member can be standardized so as to be common to electrical connection devices having different sizes from the conductive portion of the substrate to the electrode portion of the device under test.

【００２３】前記第１及び第２の部材は、複数の位置決
めピンにより、基板と平行な面内における第１及び第２
の部材の相対的移動を防止されていてもよい。そのよう
にすれば、接触子と棒状部材との相対的位置関係が安定
に維持される。The first and second members are provided with a plurality of positioning pins so that the first and second members are in a plane parallel to the substrate.
The relative movement of the members may be prevented. By doing so, the relative positional relationship between the contactor and the rod-shaped member is stably maintained.

【００２４】[0024]

【発明の実施の形態】図１〜図３を参照するに、電気的
接続装置１０は、平板状被検査体１２の通電検査すなわ
ち通電試験に用いるソケットとして基板１４と共に用い
られる。1 to 3, an electrical connection device 10 is used together with a board 14 as a socket used for an electric current inspection, that is, an electric current test of a flat plate-shaped object to be inspected 12.

【００２５】被検査体１２は、図示の例では、集積回路
チップのような半導体デバイスであり、長方形の板の形
を有する本体部１６の一方の面（図示の例では、下面）
に複数の電極部１８を有している。各電極１８は、図示
の例では、半球状のバンプ電極であるが、他の形状の突
起電極であってもよいし、平板状の電極であってもよ
い。The object 12 to be inspected is a semiconductor device such as an integrated circuit chip in the illustrated example, and one surface of the main body 16 having the shape of a rectangular plate (the lower surface in the illustrated example).
Has a plurality of electrode portions 18. Although each electrode 18 is a hemispherical bump electrode in the illustrated example, it may be a protruding electrode having another shape, or may be a flat electrode.

【００２６】図示の例では、電極部１８は、一方向に間
隔をおいて整列された複数列の電極群に分けられてい
る。各電極群の電極１８は、隣りの電極群の電極部１８
に対し配列方向に２分の１ピッチずらされている。しか
し、電極１８は他の状態に配列されていてもよい。In the illustrated example, the electrode portion 18 is divided into a plurality of rows of electrode groups aligned at intervals in one direction. The electrodes 18 of each electrode group correspond to the electrode portions 18 of the adjacent electrode group.
On the other hand, they are shifted by a half pitch in the arrangement direction. However, the electrodes 18 may be arranged in other states.

【００２７】基板１４は、配線パターンを電気絶縁性の
材料から形成された板部材２０に印刷配線技術のような
適宜な手法により形成した配線基板であり、また配線パ
ターンの少なくとも一部を一方の面（図示の例では、上
面）露出させて被検査体１２の電極部１８に個々に対応
された導電性部２２としている。The board 14 is a wiring board in which a wiring pattern is formed on a plate member 20 formed of an electrically insulating material by an appropriate method such as a printed wiring technique, and at least a part of the wiring pattern is formed on one side. The surface (the upper surface in the illustrated example) is exposed to form a conductive portion 22 that individually corresponds to the electrode portion 18 of the device under test 12.

【００２８】電気的接続装置１０は、接触子ユニットと
して作用する第１の組立体２４と、接続ユニットとして
作用する第２の組立体２６と、枠状のガイド２８とを、
第２の組立体２６が第１の組立体２４及びガイド２８の
間に位置するように、重ね合わせてハウジング３０を構
成している。The electrical connecting apparatus 10 includes a first assembly 24 that acts as a contact unit, a second assembly 26 that acts as a connecting unit, and a frame-shaped guide 28.
The housing 30 is superposed so that the second assembly 26 is located between the first assembly 24 and the guide 28.

【００２９】第１の組立体２４は、合成樹脂のような電
気絶縁材料製の板状の枠部材３２と、枠部材３２に配置
されたシリコーンゴムのような弾性板３４と、弾性板３
４の下側に配置された電気的絶縁板３６と、被検査体１
２の電極部１８及び基板１４の導電性部２２の組に個々
に対応された複数の接触子３８とを含む。The first assembly 24 includes a plate-shaped frame member 32 made of an electrically insulating material such as synthetic resin, an elastic plate 34 such as silicone rubber disposed on the frame member 32, and an elastic plate 3.
4 and the electrical insulating plate 36 arranged below
A plurality of contacts 38 individually associated with the set of two electrode portions 18 and the conductive portions 22 of the substrate 14.

【００３０】枠部材３２は、基板１４側に開放する凹所
４０を有していると共に、接触子３８に個々に対応され
た複数の貫通穴４２を有している。凹所４０は、弾性板
３４及び絶縁板３６を重ねて基板１４と平行する状態に
配置することができるように、下向きの段部を形成して
いる。貫通穴４２は、凹所４０に連通されている。The frame member 32 has a recess 40 that is open to the substrate 14 side, and also has a plurality of through holes 42 that correspond individually to the contacts 38. The recess 40 forms a downward step so that the elastic plate 34 and the insulating plate 36 can be stacked and arranged in parallel with the substrate 14. The through hole 42 communicates with the recess 40.

【００３１】貫通穴４２を接触子３８毎に対応させる代
わりに、複数の接触子３８に対応する貫通穴としてもよ
いし、全ての接触子３８に対応する貫通穴としてもよ
い。Instead of associating the through hole 42 with each contact 38, it may be a through hole corresponding to a plurality of contacts 38 or may be a through hole corresponding to all the contacts 38.

【００３２】弾性板３４は、シリコーンゴムのように三
次元的に弾性変形可能のゴム材で製造されており、また
接触子３８が個々に貫通する複数の穴４４を有してい
る。各穴４４は、被検査体１２の電極部１８に対応され
ている。各穴４４の下部は、上部より大きい座ぐり部４
６とされている。The elastic plate 34 is made of a three-dimensionally elastically deformable rubber material such as silicone rubber, and has a plurality of holes 44 through which the contacts 38 individually pass. Each hole 44 corresponds to the electrode portion 18 of the device under test 12. The lower portion of each hole 44 is larger than the upper portion in the spot facing portion 4.
It is supposed to be 6.

【００３３】絶縁板３６は、ポリイミドのような合成樹
脂材から製造されており、また複数の長穴４８を有して
いる。各長穴４８は、絶縁板３６を厚さ方向に貫通して
弾性板３４の穴４４に連通しており、また同じ方向に伸
びている。絶縁板３６は、シート状、フィルム状、板状
等、ある程度の厚さ、剛性、ばね性等を有することが好
ましい。The insulating plate 36 is made of a synthetic resin material such as polyimide and has a plurality of elongated holes 48. Each elongated hole 48 penetrates the insulating plate 36 in the thickness direction to communicate with the hole 44 of the elastic plate 34, and also extends in the same direction. The insulating plate 36 preferably has a certain thickness, rigidity, spring property, etc., such as a sheet shape, a film shape, and a plate shape.

【００３４】各接触子３８は、湾曲された外面を有する
変形部５０と、変形部５０の一端（図示の例では、上
端）に続く針先部５２と、変形部５０の他端（図示の例
では、下端）に続く針後部５４とを有しており、また矩
形の断面形状を有している。各接触子３８は、導電性材
料により、長方形、正方形又は円形の横断面形状に形成
されている。変形部５０の外面は、針後部５４の外面に
続く弧状の湾曲面とされている。Each contact 38 has a deformable portion 50 having a curved outer surface, a needle tip portion 52 following one end (upper end in the illustrated example) of the deformable portion 50, and the other end (illustrated in the drawing). In the example, it has a needle rear part 54 following the lower end) and has a rectangular cross-sectional shape. Each contact 38 is formed of a conductive material in a rectangular, square, or circular cross-sectional shape. The outer surface of the deformable portion 50 is an arcuate curved surface that follows the outer surface of the needle back portion 54.

【００３５】各接触子３８の針先（先端）は、針後部５
４が伸びる方向に湾曲された弧面とされている。弾性板
３４の各穴４４の横断面は接触子３８の針先部５２の横
断面より小さく、これにより各接触子３８は弾性板３４
に維持されている。接触子３８は、針後部５４が変形部
５０から一方側へ伸びる第１の接触子群と、針後部５４
が変形部５０から他方側へ伸びる第２の接触子群とに分
けられている。The needle tip (tip) of each contact 38 has a needle rear portion 5.
4 is an arc surface curved in the extending direction. The cross section of each hole 44 of the elastic plate 34 is smaller than the cross section of the needle tip portion 52 of the contact 38, so that each contact 38 is made elastic.
Has been maintained. The contact 38 includes a first contact group in which the needle rear portion 54 extends from the deformable portion 50 to one side, and the needle rear portion 54.
Is divided into a second contact group extending from the deformable portion 50 to the other side.

【００３６】第２の組立体２６は、被検査体１２の電極
部１８及び接触子３８の組に個々に対応された複数の貫
通穴を有する板状部材５６と、各貫通穴に上下動可能に
配置された棒状部材５８とを含む。板状部材５６は、合
成樹脂のような電気絶縁材料から製造されている。各棒
状部材５８は、リン青銅のような導電性材料によりロッ
ド状に形成されており、また板状部材５６の上下に突出
されている。The second assembly 26 has a plate-like member 56 having a plurality of through holes individually corresponding to the set of the electrode portion 18 and the contactor 38 of the device under test 12, and is vertically movable in each through hole. And a rod-shaped member 58 disposed in the. The plate member 56 is manufactured from an electrically insulating material such as synthetic resin. Each rod-shaped member 58 is formed in a rod-like shape from a conductive material such as phosphor bronze, and protrudes above and below the plate-shaped member 56.

【００３７】第２の組立体２６は、各棒状部材５８の截
頭円錐形の下端面が対応する接触子３８の針先部５２の
先端面に接触するように、板状部材５６を枠部材３２の
上に重ねられている。In the second assembly 26, the plate-shaped member 56 is a frame member so that the lower end surface of the truncated cone of each rod-shaped member 58 contacts the tip end surface of the needle tip portion 52 of the corresponding contact 38. Overlaid on 32.

【００３８】ガイド２８は、合成樹脂のような適宜な材
料により矩形の短い筒の形に形成されている。ガイド２
８の開口６０は、被検査体１２を棒状部材５８に案内す
る傾斜部と、傾斜部の下方にあって接続装置１０に対す
る被検査体１２の位置を規制する規制部とを有してい
る。The guide 28 is formed of a suitable material such as synthetic resin in the shape of a rectangular short tube. Guide 2
The opening 60 of 8 has an inclined portion that guides the inspection object 12 to the rod-shaped member 58, and a restriction portion that is below the inclination portion and that restricts the position of the inspection object 12 with respect to the connection device 10.

【００３９】電気的接続装置１０は、例えば以下のよう
に組み立てることができる。The electrical connecting device 10 can be assembled, for example, as follows.

【００４０】先ず、弾性板３４と絶縁板３６とが重ね合
わされて、接着される。しかし、弾性板３４と絶縁板３
６とを接着しなくてもよい。First, the elastic plate 34 and the insulating plate 36 are superposed and bonded. However, the elastic plate 34 and the insulating plate 3
6 and 6 may not be adhered.

【００４１】次いで、針先部５２が弾性板３４の穴４４
を貫通しかつ針後部５４が絶縁板３６の長穴４８内に位
置する状態に、各接触子３８が弾性板３４及び絶縁板３
６に組み付けられる。このため、弾性板３４及び絶縁板
３６は、接触子３８をハウジング３０に装着する針押え
として作用する。Next, the needle tip 52 is attached to the hole 44 of the elastic plate 34.
Each contact 38 passes through the elastic plate 34 and the insulating plate 3 in a state where the needle rear portion 54 is located in the elongated hole 48 of the insulating plate 36.
Assembled to 6. Therefore, the elastic plate 34 and the insulating plate 36 act as a needle retainer for mounting the contact 38 on the housing 30.

【００４２】次いで、弾性板３４が絶縁板３６の上とな
る状態に、弾性板３４及び絶縁板３６が枠部材３２の凹
所４０に配置されると共に、棒状部材５８を板所部材５
６の貫通穴に通した第２の組立体２６が第１の組立体２
４の上に重ねられ、さらにガイド２８が第２の組立体２
６の上に重ねられる。Next, the elastic plate 34 and the insulating plate 36 are arranged in the recess 40 of the frame member 32 with the elastic plate 34 on the insulating plate 36, and the rod-shaped member 58 is attached to the plate member 5.
The second assembly 26 passed through the through hole 6 is the first assembly 2
4 and further includes a guide 28 for the second assembly 2
Stacked on top of 6.

【００４３】上記状態において、第１及び第２の組立体
２２及び２６並びにガイド２８がこれらを貫通する複数
のねじ部材６２により、基板１４に組み付けられる。基
板１４と第１及び第２の組立体２４及び２６との相対的
位置は、基板１４、枠部材３２、弾性板３４及び絶縁板
３６を貫通して第２の組立体２６の板状部材５６に挿入
された複数の位置決めピン６４により、維持される。ガ
イド２８と第２の組立体２６との相対的位置は、板状部
材５６とガイド２８とに挿入された複数の位置決めピン
６６により、維持される。In the above state, the first and second assemblies 22 and 26 and the guide 28 are assembled to the substrate 14 by the plurality of screw members 62 penetrating them. The relative positions of the substrate 14 and the first and second assemblies 24 and 26 penetrate the substrate 14, the frame member 32, the elastic plate 34, and the insulating plate 36, and the plate member 56 of the second assembly 26. Maintained by a plurality of locating pins 64 inserted in the. The relative position between the guide 28 and the second assembly 26 is maintained by a plurality of positioning pins 66 inserted in the plate member 56 and the guide 28.

【００４４】通電試験時、被検査体１２がその電極部１
８を下方とした状態で、ガイド２８の開口６０に上方か
ら配置される。これにより、被検査体１２の電極部１８
が棒状部材５８の上端面に接触され、棒状部材５８の下
面が接触子３８の針先に接触される。この際、被検査体
１２は、ガイド２８の傾斜部により案内されて、規制部
に達するから、被検査体１２の電極部１８と棒状部材５
８の先端面とを容易にかつ確実に接触させることができ
る。During the energization test, the device under test 12 has its electrode portion 1
It is arranged in the opening 60 of the guide 28 from above with 8 facing downward. As a result, the electrode portion 18 of the device under test 12
Is in contact with the upper end surface of the rod member 58, and the lower surface of the rod member 58 is in contact with the needle tip of the contact 38. At this time, the inspection object 12 is guided by the inclined portion of the guide 28 and reaches the regulation portion. Therefore, the electrode portion 18 and the rod-shaped member 5 of the inspection object 12 are guided.
It is possible to easily and surely make contact with the tip end surface of No. 8.

【００４５】上記状態で、電気的接続装置１０と被検査
体１２とが相対的に接近されて、棒状部材５８の上端面
と被検査体１２の電極部１８とが相対的に押圧される。
これにより、棒状部材５８の下面が接触子３８の針先に
押圧され、接触子３８が基板１４の導電性部２２に押圧
される。In the above state, the electrical connection device 10 and the device under test 12 are brought relatively close to each other, and the upper end surface of the rod member 58 and the electrode portion 18 of the device under test 12 are relatively pressed.
As a result, the lower surface of the rod-shaped member 58 is pressed against the needle tip of the contact 38, and the contact 38 is pressed against the conductive portion 22 of the substrate 14.

【００４６】上記の結果、電極部１８と棒状部材５８、
棒状部材５８と接触子３８、及び、接触子３８と導電性
部２２が強く押圧され、それらが良好な電気的接続状態
にされる。被検査体１２の電極１８と基板１４の導電性
部２２とが接触子３８及び棒状部材５８により電気的に
接続される。As a result of the above, the electrode portion 18 and the rod-shaped member 58,
The rod-shaped member 58 and the contact 38, and the contact 38 and the conductive portion 22 are strongly pressed to bring them into a good electrical connection state. The electrode 18 of the device under test 12 and the conductive portion 22 of the substrate 14 are electrically connected by the contact 38 and the rod-shaped member 58.

【００４７】上記状態で、被検査体１２の通電試験が行
われる。通電試験時に電流が流れる接触子３８の有効範
囲は、針先から基板１４の導電性部２２への接触箇所ま
での領域である。In the above-mentioned state, the current-carrying test of the device under test 12 is performed. The effective range of the contact 38 through which the current flows during the energization test is the region from the tip of the needle to the contact point with the conductive portion 22 of the substrate 14.

【００４８】棒状部材５８の先端面と被検査体１２の電
極部１８とが相対的に押圧されると、接触子３８は、絶
縁板３６の長穴４８を形成している壁面に後端を当接さ
れて後退を阻止された状態で、図３（Ｂ）に二点鎖線で
示す状態から実線で示す状態に角度的に回転移動する。
このため、接触子３８は基板１４の導電性部２２と被検
査体１２の電極部１８とに確実に接触する。When the front end surface of the rod-shaped member 58 and the electrode portion 18 of the device under test 12 are pressed relative to each other, the contactor 38 has its rear end on the wall surface of the insulating plate 36 forming the elongated hole 48. In the state in which the contact is made and the retreat is blocked, the state shown in FIG.
Therefore, the contact 38 surely contacts the conductive portion 22 of the substrate 14 and the electrode portion 18 of the device under test 12.

【００４９】また、棒状部材５８の先端面と被検査体１
２の電極部１８とが相対的に押圧されると、接触子３８
が弾性板３４を弾性変形させつつ変位するから、電極部
１８と棒状部材５８、棒状部材５８と接触子３８、及
び、接触子３８と導電性部２２との接触圧が大きくな
り、それらはより確実に接触する。Further, the tip surface of the rod-shaped member 58 and the object to be inspected 1
When the second electrode portion 18 is pressed relatively, the contact 38
Since the elastic plate 34 is displaced while elastically deforming, the contact pressure between the electrode portion 18 and the rod-shaped member 58, the rod-shaped member 58 and the contactor 38, and the contactor 38 and the conductive portion 22 increases, and they are more Make sure contact.

【００５０】針後部５４の延在方向に湾曲する弧面とさ
れた針先は、棒状部材５８の先端面と被検査体１２の電
極部１８とが相対的に押圧されたとき、棒状部材５８の
下面に対して滑って、棒状部材５８の下面の酸化膜を擦
り取る。The needle tip, which is an arc surface curved in the extending direction of the needle rear portion 54, is pressed when the tip end surface of the rod-shaped member 58 and the electrode portion 18 of the device under test 12 are pressed relative to each other. The lower surface of the rod-shaped member 58 is slid and the oxide film on the lower surface is scraped off.

【００５１】棒状部材５８の先端面と被検査体１２の電
極部１８とが相対的に押圧されたときに接触子３８に作
用する力は、針後部５４が互いに反対方向へ伸びる第１
及び第２の接触子群とで逆方向となることにより、相殺
される。When the tip end surface of the rod-shaped member 58 and the electrode portion 18 of the device under test 12 are pressed relative to each other, the force acting on the contact 38 is the first force at which the needle rear portions 54 extend in opposite directions.
And the second contactor group are in opposite directions, which cancel each other out.

【００５２】弾性板３４及び絶縁板３６は、上記のよう
に重ねられていることが好ましい。そのようにすれば、
弾性板３４と絶縁板３６とが離されている場合に比べ、
電気的接続装置１０、特に第１の組立体２４の厚さ寸法
をより小さくすることができる。しかし、弾性板３４及
び絶縁板３６は、必ずしも重ねられていなくてもよい。The elastic plate 34 and the insulating plate 36 are preferably laminated as described above. That way,
Compared with the case where the elastic plate 34 and the insulating plate 36 are separated,
The thickness dimension of the electrical connection device 10, in particular the first assembly 24, can be made smaller. However, the elastic plate 34 and the insulating plate 36 do not necessarily have to be overlapped.

【００５３】電気的接続装置１０によれば、接触子３８
自体の構造が簡単であるから、他のタイプの接触子を用
いる装置に比べ、廉価になる。According to the electrical connection device 10, the contact 38
Because of its simple structure, it is less expensive than a device using other types of contacts.

【００５４】電気的接続装置１０によれば、また、装置
１０内の電気的接触部が接触子３８と棒状部材５８との
間の１箇所にすぎないから、装置１０内の電気的な接触
抵抗が小さく、高周波試験に用いて好適であり、良好な
試験結果を得ることができる。According to the electrical connection device 10, since the electrical contact portion in the device 10 is only one place between the contact 38 and the rod member 58, the electrical contact resistance in the device 10 is increased. Is small and suitable for high frequency tests, and good test results can be obtained.

【００５５】電気的接続装置１０によれば、さらに、ハ
ウジング３０が第１及び第２の組立体２４及び２６に分
割されているから、基板１４の導電性部２２から接触子
３８の先端までの寸法が同じであっても、長さ寸法が異
なる棒状部材５８を用いることにより、基板１４の導電
性部２２から被検査体１２の電極部１８までの寸法が異
なる電気的接続装置とすることができる。したがって、
枠部材３２、弾性板３４、絶縁板３６及び接触子３８
を、基板１４の導電性部２２から被検査体１２の電極部
１８までの寸法が異なる電気的接続装置で共通するよう
に、規格化することができる。According to the electrical connection device 10, the housing 30 is further divided into the first and second assemblies 24 and 26, so that from the conductive portion 22 of the substrate 14 to the tip of the contact 38. Even if the dimensions are the same, by using the rod-shaped members 58 having different lengths, an electrical connection device having different dimensions from the conductive portion 22 of the substrate 14 to the electrode portion 18 of the device under test 12 can be obtained. it can. Therefore,
Frame member 32, elastic plate 34, insulating plate 36, and contact 38
Can be standardized so as to be common to electrical connection devices having different dimensions from the conductive portion 22 of the substrate 14 to the electrode portion 18 of the device under test 12.

【００５６】電気的接続装置１０においては、接触子３
８の針先部５２が弾性板３４の穴４４を貫通し、針後部
５４が絶縁板３６の長穴４８内に位置するから、弾性板
３４及び絶縁板３６に対する接触子３８の位置及び姿勢
が安定する。また、弾性板３４及び絶縁板３６が従来の
ハウジングの機能を果たすから、従来の装置に比べ、電
気的接続装置１０の厚さ寸法が小さくなり、接触子３８
の有効長さ寸法が小さくなり、より高周波試験に適す
る。In the electrical connection device 10, the contact 3
Since the needle tip portion 52 of No. 8 penetrates the hole 44 of the elastic plate 34 and the needle rear portion 54 is located in the elongated hole 48 of the insulating plate 36, the position and posture of the contact 38 with respect to the elastic plate 34 and the insulating plate 36 are Stabilize. Further, since the elastic plate 34 and the insulating plate 36 perform the function of the conventional housing, the thickness dimension of the electrical connecting device 10 becomes smaller than that of the conventional device, and the contact 38 is formed.
Since the effective length dimension of is smaller, it is more suitable for high frequency testing.

【００５７】本発明は、本体部１６の一方の面に複数の
電極部１８を有する被検査体のみならず、パッケージ又
はモールドされた集積回路のように本体部から並列的に
突出するリード電極のような複数の電極部を有する被検
査体の通電試験に用いる電気的接続装置にも適用するこ
とができる。The present invention is applicable not only to a device having a plurality of electrode portions 18 on one surface of the main body portion 16 but also to lead electrodes protruding in parallel from the main body portion such as a packaged or molded integrated circuit. It can also be applied to an electrical connection device used for an electric current test of a device under test having a plurality of electrode portions.

【００５８】図４及び図５を参照するに、電気的接続装
置７０は、パッケージ又はモールドされた被検査体７２
の通電試験に用いられる。被検査体７２は、本体部７４
の幅方向両辺から突出する複数の電極部７６を有する。
電極部７６は、幅方向の辺毎に対応された複数の電極部
群に分けられており、また電極部群毎に並列的に配置さ
れている。Referring to FIGS. 4 and 5, the electrical connecting device 70 includes a packaged or molded DUT 72.
It is used for the current test. The device under test 72 has a main body 74.
Has a plurality of electrode portions 76 protruding from both sides in the width direction.
The electrode part 76 is divided into a plurality of electrode part groups corresponding to each side in the width direction, and is also arranged in parallel for each electrode part group.

【００５９】電気的接続装置７０は、基板１４と板状の
デバイスキャリア７８との間に配置されている。デバイ
スキャリア７８は、被検査体７２を電気的接続装置７０
に搬送するものであり、電気的接続装置１０におけるガ
イド２８の開口８０と同様の開口８０を有していると共
に、被検査体７２の本体部７４を受ける受け部８２を開
口８０内に有している。The electrical connection device 70 is arranged between the substrate 14 and the plate-shaped device carrier 78. The device carrier 78 connects the device under test 72 to the electrical connection device 70.
In addition to having an opening 80 similar to the opening 80 of the guide 28 in the electrical connection device 10, a receiving portion 82 for receiving the main body portion 74 of the device under test 72 is provided in the opening 80. ing.

【００６０】電気的接続装置７０は、接触子ユニットと
して作用する第１の組立体８４と、接続ユニットとして
作用する第２の組立体８６とを、第２の組立体８６が第
１の組立体８６の上に位置するように、重ね合わせてハ
ウジング８８を構成している。The electrical connecting device 70 includes a first assembly 84 which acts as a contact unit, a second assembly 86 which acts as a connecting unit, and a second assembly 86 which is the first assembly. The housing 88 is superposed so as to be located above 86.

【００６１】第１の組立体８４は、合成樹脂のような電
気絶縁材料製の板状の枠部材９０と、棒状をした一対の
弾性部材９２と、弾性部材９２により枠部材９０に装着
された複数の接触子９４とを含む。The first assembly 84 is attached to the frame member 90 by a plate-shaped frame member 90 made of an electrically insulating material such as synthetic resin, a pair of rod-shaped elastic members 92, and elastic members 92. And a plurality of contacts 94.

【００６２】枠部材９０は、基板１４側に開放する開口
すなわち第１の凹所９６と、弾性部材９２が配置された
第２の凹所９８と、第１及び第２の凹所９６及び９８に
連通された複数のスロット１００とを被検査体７２の電
極群毎に備える。The frame member 90 has an opening that is open to the substrate 14 side, that is, a first recess 96, a second recess 98 in which the elastic member 92 is arranged, and first and second recesses 96 and 98. And a plurality of slots 100 that communicate with each other for each electrode group of the device under test 72.

【００６３】第１及び第２の凹所９６及び９８は、被検
査体７２の対応する電極群の配列方向に伸びている。ス
ロット１００は、枠部材９０を厚さ方向に貫通してお
り、また第１及び第２の凹所９６及び９８の長手方向に
間隔をおいて被検査体７２の幅方向へ伸びている。The first and second recesses 96 and 98 extend in the arrangement direction of the corresponding electrode group of the device under test 72. The slot 100 penetrates the frame member 90 in the thickness direction, and extends in the width direction of the device under test 72 at intervals in the longitudinal direction of the first and second recesses 96 and 98.

【００６４】弾性部材９２は、シリコーンゴムのような
電気絶縁材料により円柱状に形成されており、また第２
の凹所９８に配置されている。The elastic member 92 is formed of an electrically insulating material such as silicone rubber into a cylindrical shape, and has a second shape.
Of the recess 98.

【００６５】各接触子９４は、接触子３８と同様に、湾
曲された外面を有する変形部１０２と、変形部１０２の
一端に続く針先部１０４と、変形部１０２の他端に続く
針後部１０６とを有しており、また導電性材料により長
方形の横断面形状に形成されている。変形部１０２の外
面は、針後部１０６の外面に続く弧状の湾曲面とされて
いる。Like each of the contacts 38, each of the contacts 94 has a deformed portion 102 having a curved outer surface, a needle tip portion 104 connected to one end of the deformed portion 102, and a needle rear portion connected to the other end of the deformed portion 102. 106, and is formed of a conductive material in a rectangular cross-sectional shape. The outer surface of the deformable portion 102 is an arcuate curved surface that follows the outer surface of the needle back portion 106.

【００６６】各接触子９４は、針先部１０４がスロット
１００を貫通して先端を枠部材９０の上方に突出され、
変形部１０２の一部が第１及び第２の凹所９６及び９８
に受け入れられ、針後部１０６が第２の凹所９８に受け
入れられ、針後部１０６の後端面が第２の凹所９８の内
側面に接触された状態に弾性部材９２により枠部材９０
に配置されている。In each contactor 94, the needle tip portion 104 penetrates through the slot 100 and the tip thereof is projected above the frame member 90.
A part of the deformed portion 102 has first and second recesses 96 and 98.
The needle rear portion 106 is received in the second recess 98, and the rear end surface of the needle rear portion 106 is in contact with the inner surface of the second recess 98, the elastic member 92 causes the frame member 90 to contact.
It is located in.

【００６７】各接触子９４は、接続装置７０に組み立て
られた状態において、変形部１０２が導電性部２２に接
触可能となるように、弾性部材９２を介して枠部材９０
に装着されており、また第２の凹所９８の内側面により
後退を防止されている。Each of the contacts 94 has a frame member 90 through an elastic member 92 so that the deformable portion 102 can come into contact with the conductive portion 22 when assembled in the connection device 70.
And is prevented from retreating by the inner surface of the second recess 98.

【００６８】第２の組立体８６は、被検査体７２の電極
部７６及び接触子９４の組に個々に対応された複数の貫
通穴を有する板状部材１０８と、各貫通穴に上下動可能
に配置されたロッド状の棒状部材１１０とを含む。板状
部材１０８は、合成樹脂のような電気絶縁材料から製造
されている。各棒状部材１１０は、リン青銅のような導
電性材料によりロッド状に形成されており、また板状部
材１０８の上下に突出されている。The second assembly 86 has a plate-like member 108 having a plurality of through holes individually corresponding to the set of the electrode portion 76 and the contactor 94 of the object 72 to be inspected, and is vertically movable in each through hole. And a rod-shaped rod-shaped member 110 disposed in The plate member 108 is manufactured from an electrically insulating material such as synthetic resin. Each rod-shaped member 110 is formed in a rod-like shape from a conductive material such as phosphor bronze, and protrudes above and below the plate-shaped member 108.

【００６９】第２の組立体８６は、各棒状部材１１０の
下端面が対応する接触子９４の針先部１０４の先端面に
接触するように、板状部材１０８を枠部材９０の上に重
ねられている。In the second assembly 86, the plate member 108 is superposed on the frame member 90 so that the lower end surface of each rod member 110 contacts the tip end surface of the needle tip portion 104 of the corresponding contact 94. Has been.

【００７０】電気的接続装置７０は、例えば以下のよう
に組み立てることができる。The electrical connecting device 70 can be assembled, for example, as follows.

【００７１】電気的接続装置７０の組立時、先ず第１の
組立体８４の枠部材９０の上下を図５に示す状態と逆に
した状態で、弾性部材９２が第１の凹所９８に配置され
る。When assembling the electrical connecting device 70, the elastic member 92 is first placed in the first recess 98 with the frame member 90 of the first assembly 84 being turned upside down from the state shown in FIG. To be done.

【００７２】次いで、上記状態において、各接触子９４
の針先部１０４がスロット１００に通され、弾性部材９
２が接触子９４と枠部材９０との間となるように、接触
子９４が枠部材９０に配置され、枠部材９０と基板１４
とが組み合わされる。基板１４と枠部材９０との相対的
位置は基板１４を貫通して枠部材９０に挿入された複数
の位置決めピン１１２により維持される。Next, in the above state, each contactor 94
The needle tip portion 104 of the elastic member 9 is passed through the slot 100.
The contactor 94 is arranged on the frame member 90 so that the contact point 2 is between the contactor 94 and the frame member 90.
And are combined. The relative positions of the board 14 and the frame member 90 are maintained by a plurality of positioning pins 112 that penetrate the board 14 and are inserted into the frame member 90.

【００７３】次いで、上下関係を元の状態に戻した後、
棒状部材１１０を配置した板状部材１０８が枠部材９０
の上に重ねられ、基板１４、枠部材９０及び板状部材１
０８が板状部材１０８及び枠部材９０を貫通して基板１
４に螺合された複数のねじ部材１１４により組み付けら
れる。枠部材９０及び板状部材１０８の相対的位置は、
板状部材１０８を貫通して枠部材９０に挿入された複数
の位置決めピン１１６により維持される。Then, after returning the hierarchical relationship to the original state,
The plate member 108 on which the rod member 110 is arranged is the frame member 90.
On which the substrate 14, the frame member 90 and the plate-shaped member 1 are stacked.
08 penetrates the plate-shaped member 108 and the frame member 90, and the substrate 1
4 is assembled by a plurality of screw members 114 screwed together. The relative positions of the frame member 90 and the plate member 108 are
It is maintained by a plurality of positioning pins 116 that penetrate the plate member 108 and are inserted into the frame member 90.

【００７４】上記のように電気的接続装置７０に組み立
てられた状態において、接触子９４は、弾性部材９２に
より枠部材９０に保持される。このため、弾性部材９２
は接触子９４を枠部材９０に配置する針押えとして作用
する。The contactor 94 is held by the frame member 90 by the elastic member 92 in the state where it is assembled to the electrical connecting device 70 as described above. Therefore, the elastic member 92
Acts as a needle retainer for disposing the contactor 94 on the frame member 90.

【００７５】通電試験時、被検査体７２がその電極部７
６を下方とした状態で、デバイスキャリア７８により、
電気的接続装置７０の上方に搬送されて、電気的接続装
置７０の上に載せられる。被検査体７２の電極部７６が
棒状部材１１０の上端面に接触され、棒状部材１１０の
下面が接触子９４の針先に接触される。During the energization test, the object 72 to be inspected has its electrode portion 7
With the device 6 facing downward, the device carrier 78
It is conveyed above the electrical connection device 70 and placed on the electrical connection device 70. The electrode portion 76 of the device under test 72 contacts the upper end surface of the rod-shaped member 110, and the lower surface of the rod-shaped member 110 contacts the needle tip of the contactor 94.

【００７６】上記状態で、電気的接続装置７０と被検査
体７２とが相対的に接近されて、棒状部材１１０の上端
面と被検査体７２の電極部７６とが相対的に押圧され
る。これにより、棒状部材１１０の下面と接触子９４の
針先に押圧され、接触子９４が基板１４の導電性部２２
に押圧される。In the above state, the electrical connection device 70 and the device under test 72 are brought relatively close to each other, and the upper end surface of the rod member 110 and the electrode portion 76 of the device under test 72 are relatively pressed. As a result, the lower surface of the rod-shaped member 110 and the needle tip of the contactor 94 are pressed, and the contactor 94 is attached to the conductive portion 22 of the substrate 14.
Is pressed by.

【００７７】上記の結果、電極部７６と棒状部材１１
０、棒状部材１１０と接触子９４、及び、接触子９４と
導電性部２２とが強く押圧され、それらが良好な電気的
接続状態にされる。被検査体７２の電極部７６と基板１
４の導電性部２２とが接触子９４及び棒状部材１１０に
より電気的に接続される。As a result of the above, the electrode portion 76 and the rod-shaped member 11
0, the rod-shaped member 110 and the contactor 94, and the contactor 94 and the conductive portion 22 are strongly pressed, and they are brought into a good electrical connection state. The electrode part 76 of the device under test 72 and the substrate 1
4 and the conductive portion 22 are electrically connected by the contactor 94 and the rod-shaped member 110.

【００７８】上記状態で、被検査体７２の通電試験が行
われる。通電試験時に電流が流れる接触子９４の有効範
囲は、針先から基板１４の導電性部２２への接触箇所ま
での領域である。In the above-mentioned state, the electricity test of the object 72 to be inspected is performed. The effective range of the contact 94 through which the current flows during the energization test is the region from the needle tip to the contact point with the conductive portion 22 of the substrate 14.

【００７９】棒状部材１１０の先端面と被検査体７２の
電極部７６とが相対的に押圧されると、接触子９４は、
枠部材９０の第２の凹所９８を形成している内壁面に後
端を当接されて後退を阻止された状態で、わずかに角度
的に回転移動する。このため、接触子９４は基板１４の
導電性部２２と被検査体７２の電極部７６とに確実に接
触する。When the tip end surface of the rod-shaped member 110 and the electrode portion 76 of the device under test 72 are pressed relative to each other, the contactor 94 is
With the rear end abutted against the inner wall surface forming the second recess 98 of the frame member 90 to prevent retreat, the frame member 90 rotationally moves slightly. Therefore, the contactor 94 surely contacts the conductive portion 22 of the substrate 14 and the electrode portion 76 of the device under test 72.

【００８０】また、棒状部材１１０の先端面と被検査体
７２の電極部７６とが相対的に押圧されると、接触子９
４が弾性部材９２を弾性変形させつつ変位するから、電
極部７６と棒状部材１１０、棒状部材１１０と接触子９
４、及び、接触子９４と導電性部２２との接触圧が大き
くなり、それらはより確実に接触する。When the tip surface of the rod-shaped member 110 and the electrode portion 76 of the device under test 72 are pressed relative to each other, the contact 9
Since 4 is displaced while elastically deforming the elastic member 92, the electrode portion 76 and the rod member 110, and the rod member 110 and the contact 9
4, and the contact pressure between the contactor 94 and the conductive portion 22 increases, and they contact each other more reliably.

【００８１】針後部１０６の延在方向に湾曲する弧面と
された針先は、棒状部材１１０の先端面と被検査体７２
の電極部７６とが相対的に押圧されたとき、棒状部材１
１０の下面に対して滑って、棒状部材１１０の下面の酸
化膜を擦り取る。The needle tip, which is an arc surface curved in the extending direction of the needle rear portion 106, has a tip end surface of the rod-shaped member 110 and the object 72 to be inspected.
When the electrode portion 76 of the
The oxide film on the lower surface of the rod-shaped member 110 is scraped off by sliding on the lower surface of 10.

【００８２】電気的接続装置７０によっても、電気的接
続装置１０と同様の作用効果を得ることができる。The electrical connecting device 70 can also obtain the same effects as those of the electrical connecting device 10.

【００８３】棒状部材５８，１１０の被検査体１２，７
２側の端面は、平坦面であってもよいし、図６に示すよ
うに、截頭円錐形の凹面（Ａ）、円柱状の凹面（Ｂ）、
截頭円錐形の凸面（Ｃ）、傾斜面（Ｄ）等、適宜な形状
とすることができる。Inspected bodies 12, 7 of the rod-shaped members 58, 110
The end surface on the second side may be a flat surface, or as shown in FIG. 6, a truncated conical concave surface (A), a cylindrical concave surface (B),
The shape may be an appropriate shape such as a truncated cone-shaped convex surface (C) or an inclined surface (D).

【００８４】上記実施例は、いずれも、ハウジングを２
つの部材に分割しているが、そのようにハウジングを分
割しなくてもよい。In each of the above embodiments, the housing is
Although divided into one member, the housing need not be so divided.

【００８５】本発明は、上記実施例以外の形状を有する
接触子を用いる電気的接続装置にも適用することができ
るし、また液晶表示パネルのような他の平板状被検査体
の通電試験用の電気的接続装置にも適用することがで
き、さらに上下の側を上記した実施例と逆にした状態で
用いる電気的接続装置にも適用することができる。The present invention can be applied to an electrical connecting device using a contactor having a shape other than the above-mentioned embodiments, and for conducting a current test of another flat plate-like inspected object such as a liquid crystal display panel. The present invention can also be applied to the electrical connection device described above, and can also be applied to the electrical connection device used in a state in which the upper and lower sides are reversed from the above-described embodiment.

【００８６】本発明は、上記実施例に限定されず、その
趣旨を逸脱しない限り、種々変更することができる。The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the spirit of the invention.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明に係る電気的接続装置の一実施例を示す
平面図である。FIG. 1 is a plan view showing an embodiment of an electrical connection device according to the present invention.

【図２】図１における２−２線に沿って得た断面図であ
る。FIG. 2 is a sectional view taken along line 2-2 in FIG.

【図３】図１に示す電気的接続装置の動作を説明するた
めに一部の拡大断面図であって、（Ａ）は電極部と棒状
部材とを相対的に押圧する前の状態を示し、（Ｂ）は押
圧した状態を示す。FIG. 3 is a partial enlarged cross-sectional view for explaining the operation of the electrical connection device shown in FIG. 1, in which (A) shows a state before the electrode portion and the rod-shaped member are relatively pressed. , (B) show the pressed state.

【図４】本発明に係る電気的接続装置の他実施例におけ
る第１の組立体を示す平面図である。FIG. 4 is a plan view showing a first assembly of another embodiment of the electrical connecting device according to the present invention.

【図５】図４における５−５線に沿って得た断面図であ
る。5 is a sectional view taken along line 5-5 in FIG.

【図６】棒状部材の上端部の形状の実施例を示す図であ
る。FIG. 6 is a diagram showing an example of the shape of the upper end portion of a rod-shaped member.

【符号の説明】[Explanation of symbols]

１０，７０ 電気的接続装置 １２，７２ 被検査体 １４ 基板 １８，７６ 被検査体の電極部 ２２ 基板の導電性部 ２４，８４ 第１の組立体（第１の部材） ２６，８６ 第２の組立体（第２の部材） ２８ ガイド ３０，８８ ハウジング ３２，９０ 枠部材 ３４ 弾性板（針押え） ３６ 電気的絶縁板（針押え） ３８，９４ 接触子 ４０，９６，９８ 凹所 ４２ 貫通穴 ４４ 穴 ４８ 長穴 ５０，１０２ 接触子の変形部 ５２，１０４ 接触子の針先部 ５４，１０６ 接触子の針後部 ５６，１０８ 板状部材 ５８，１１０ 棒状部材 ６２，１１４ ねじ部材 ６４，６６ 位置決めピン ７８ デバイスキャリア ９２ 弾性部材（針押え） ９６，９８ 第１及び第２の凹所 １００ スロット １１２，１１６ 位置決めピン 10,70 Electrical connection device 12,72 Inspection object 14 board 18,76 Electrode part of DUT 22 Conductive part of substrate 24,84 1st assembly (1st member) 26,86 2nd assembly (2nd member) 28 Guide 30,88 housing 32,90 Frame member 34 Elastic plate (needle retainer) 36 Electrically insulating board (needle retainer) 38,94 Contact 40,96,98 recess 42 through hole 44 holes 48 slot 50,102 Deformation part of contactor 52,104 Needle part of contact 54,106 Needle rear part of contactor 56,108 plate-shaped member 58,110 Rod-shaped member 62,114 screw members 64, 66 Positioning pin 78 Device carrier 92 Elastic member (needle retainer) 96, 98 First and second recesses 100 slots 112,116 Positioning pin

───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2G003 AA07 AG01 AG08 AG12 AG16 AG20 AH05 2G011 AA02 AA09 AA15 AB01 AB04 AB06 AB07 AB08 AC14 AC33 AE01 AF02 2G132 AA00 AD15 AF02 AF07 AJ07 AL03 5E024 CA18 CB05    ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2G003 AA07 AG01 AG08 AG12 AG16                       AG20 AH05                 2G011 AA02 AA09 AA15 AB01 AB04                       AB06 AB07 AB08 AC14 AC33                       AE01 AF02                 2G132 AA00 AD15 AF02 AF07 AJ07                       AL03                 5E024 CA18 CB05

Claims (9)

【特許請求の範囲】[Claims] 【請求項１】 基板の一方の面に形成された導電性部と
被検査体の電極部とを電気的に接続する装置であって、 湾曲された外面を有する変形部、該変形部の一端に続く
針先部及び前記変形部の他端に続く針後部を備える複数
の接触子と、 前記針先部の先端に接触された端部を有する複数の棒状
部材と、 前記接触子及び前記棒状部材を前記基板に組み付ける組
み付け手段とを含む、電気的接続装置。1. A device for electrically connecting a conductive part formed on one surface of a substrate and an electrode part of a device under test, the deforming part having a curved outer surface, and one end of the deforming part. A plurality of contact elements having a needle tip portion continuing to the other end of the deformable portion and a plurality of rod-shaped members having an end portion in contact with the tip of the needle tip portion; And an assembling means for assembling a member to the substrate. 【請求項２】 前記組み付け手段は、板状部を備えるハ
ウジングであって前記基板に組み付けられるハウジング
と、該ハウジングに配置された弾性変形可能の１以上の
針押えとを含み、前記接触子は前記針押えにより前記ハ
ウジングに装着されており、前記棒状部材はそれらの軸
線方向へ移動可能に前記ハウジングに配置されている、
請求項１に記載の電気的接続装置。2. The assembly means includes a housing having a plate-shaped portion and assembled to the substrate, and one or more elastically deformable needle retainers arranged in the housing. Mounted on the housing by the needle retainer, and the rod-shaped member is arranged on the housing so as to be movable in the axial direction thereof.
The electrical connection device according to claim 1. 【請求項３】 前記針押えは前記板状部から間隔おいて
前記ハウジングに配置された弾性板と、前記弾性板の前
記板状部と反対側に配置された電気的絶縁板とを含み、
各接触子の針先部は前記弾性板を貫通して前記板状部の
側に突出しており、各接触子の針後部は前記電気的絶縁
板内に位置されており、前記棒状部材はそれらの長手方
向へ移動可能に前記板状部を厚さ方向に貫通している、
請求項２に記載の電気的接続装置。3. The needle retainer includes an elastic plate arranged in the housing at a distance from the plate-like portion, and an electrical insulating plate arranged on the opposite side of the elastic plate from the plate-like portion,
The needle tip portion of each contact penetrates the elastic plate and projects toward the plate-shaped portion, the needle rear portion of each contact is located in the electrical insulating plate, and the rod-shaped member Movably in the longitudinal direction of the plate-shaped portion through the thickness direction,
The electrical connection device according to claim 2. 【請求項４】 前記弾性板は前記接触子の針先部が貫通
する第１の穴を有しており、前記電気的絶縁板は、前記
接触子の針後部が収容された第２の穴を有している、請
求項３に記載の電気的接続装置。4. The elastic plate has a first hole through which a needle tip portion of the contactor penetrates, and the electrically insulating plate has a second hole in which a needle rear portion of the contactor is accommodated. The electrical connection device according to claim 3, comprising: 【請求項５】 前記ハウジングは、前記接触子、前記弾
性板及び前記電気的絶縁板が配置された第１の部材と、
前記棒状部材が配置された第２の部材とを含む、請求項
２から４のいずれか１項に記載の電気的接続装置。5. The housing includes a first member on which the contactor, the elastic plate, and the electrical insulating plate are arranged,
The electrical connection device according to claim 2, further comprising a second member on which the rod-shaped member is arranged. 【請求項６】 前記針押えは前記接触子の配列方向へ伸
びる弾性変形可能の棒状部を含み、前記ハウジングは、
前記接触子の針先部が受け入れられた複数のスロット
と、該スロットに連通されかつ前記針押えが配置された
１以上の凹所と、前記棒状部材が貫通する貫通穴とを有
している、請求項２に記載の電気的接続装置。6. The needle retainer includes an elastically deformable rod-shaped portion extending in the arrangement direction of the contacts, and the housing is
It has a plurality of slots in which the needle tips of the contacts are received, one or more recesses communicating with the slots and in which the needle retainers are arranged, and a through hole through which the rod-shaped member penetrates. The electrical connection device according to claim 2. 【請求項７】 前記接触子は前記ハウジングに一方向に
間隔をおいて配置されており、前記凹所は前記一方向に
伸びており、前記針押えは前記凹所の長手方向へ伸びる
弾性変形可能の棒状部を含む、請求項６に記載の電気的
接続装置。7. The contacts are arranged in the housing at intervals in one direction, the recess extends in the one direction, and the needle retainer extends elastically in the longitudinal direction of the recess. 7. Electrical connection device according to claim 6, comprising a possible rod. 【請求項８】 前記ハウジングは、前記スロット及び前
記凹所を有する第１の部材と、該第１の部材に重ねられ
た第２の部材であって前記貫通穴を有する第２の部材と
を含む、請求項６又は７に記載の補助装置。8. The housing includes a first member having the slot and the recess, and a second member stacked on the first member and having the through hole. An auxiliary device according to claim 6 or 7, comprising. 【請求項９】 前記第１及び第２の部材は、複数の位置
決めピンにより、基板と平行な面内における第１及び第
２の部材の相対的移動を防止されている、請求項５又は
８に記載の電気的接続装置。9. The first and second members are prevented from relative movement of the first and second members in a plane parallel to the substrate by a plurality of positioning pins. The electrical connection device according to.