JP2003212555A - Burner for manufacturing porous preform of optical fiber and method of manufacturing porous preform of optical fiber using the same - Google Patents
Burner for manufacturing porous preform of optical fiber and method of manufacturing porous preform of optical fiber using the sameInfo
- Publication number
- JP2003212555A JP2003212555A JP2002008003A JP2002008003A JP2003212555A JP 2003212555 A JP2003212555 A JP 2003212555A JP 2002008003 A JP2002008003 A JP 2002008003A JP 2002008003 A JP2002008003 A JP 2002008003A JP 2003212555 A JP2003212555 A JP 2003212555A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle group
- gas
- optical fiber
- glass
- combustion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/12—Nozzle or orifice plates
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Gas Burners (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光ファイバ多孔質
母材製造用バーナ装置およびこれを用いた光ファイバ多
孔質母材の製造方法に関し、特に、酸水素炎中でガラス
原料ガスを反応させてガラス微粒子を合成し、これを回
転する出発部材の外周部の径方向に堆積する外付け法に
用いられる光ファイバ多孔質母材製造用バーナ装置およ
びこれを用いた光ファイバ多孔質母材の製造方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a burner device for producing an optical fiber porous preform and a method for producing an optical fiber porous preform using the burner device, and more particularly to reacting a glass raw material gas in an oxyhydrogen flame. Of the optical fiber porous preform used in the external attachment method for synthesizing glass fine particles and depositing them in the radial direction of the outer circumference of the rotating starting member and the optical fiber porous preform using the burner device. It relates to a manufacturing method.
【０００２】[0002]
【従来の技術】光ファイバは、光ファイバ母材を溶融線
引きして製造される。また、光ファイバ母材の製造方法
としては、ＶＡＤ法、ＯＶＤ法、ＭＣＶＤ法、ＰＣＶＤ
法などの方法がある。なかでも、ＯＶＤ（Outside Vapo
r Phase Deposition）法は、四塩化ケイ素（ＳｉＣ
ｌ4）、四塩化ゲルマニウム（ＧｅＣｌ4）などのガラス
原料ガスを、酸素、水素とともに火炎中で加水分解反応
または酸化反応させてガラス微粒子を合成し、その軸回
りに回転するコアとなるガラス材を備えた円柱形の出発
部材の外周部の径方向に、ガラス微粒子（スート）を堆
積させて複数層からなる多孔質層を形成して光ファイバ
多孔質母材とし、これを電気炉中で脱水、焼結しながら
透明ガラス化し、光ファイバ母材を製造する方法であ
る。このような光ファイバ母材を溶融線引きして製造さ
れる光ファイバは、純度、その他の品質に優れたものと
なる。2. Description of the Related Art Optical fibers are manufactured by melting and drawing an optical fiber preform. Further, as a method for manufacturing the optical fiber preform, VAD method, OVD method, MCVD method, PCVD method are used.
There are methods such as law. Among them, OVD (Outside Vapo
r Phase Deposition method is based on silicon tetrachloride (SiC
glass materials such as l 4 ), germanium tetrachloride (GeCl 4 ) and the like, are subjected to a hydrolysis reaction or an oxidation reaction in a flame with oxygen and hydrogen to synthesize glass fine particles, and a glass material serving as a core rotating around its axis. In the radial direction of the outer periphery of the cylindrical starting member provided with, glass fine particles (soot) are deposited to form a porous layer composed of a plurality of layers to form an optical fiber porous preform, which is used in an electric furnace. This is a method of producing an optical fiber preform by forming transparent glass while dehydrating and sintering. An optical fiber manufactured by melting and drawing such an optical fiber preform has excellent purity and other qualities.
【０００３】ＯＶＤ法において用いられるガラス微粒子
を合成するためのバーナは、一般的に、マルチノズルタ
イプのものが用いられており、例えば、図１に示すよう
な構造のガラス合成用バーナが用いられている。この例
のガラス合成用バーナの端面において、その中心にノズ
ル１ａ、１ｂからなる第１のノズル群１が設けられ、こ
の第１のノズル群１の周囲に、第１のノズル群１と中心
軸を同じくして、ノズル２ａ、２ｂからなる第２のノズ
ル群２が設けられている。また、第１のノズル群１と第
２のノズル群２の間で、第１のノズル群１の同心円上に
は、複数個の内径および外径の等しい小口径ノズル３、
３、…が配列された円環状の小口径ノズルの列４ａ、４
ｂからなる小口径ノズル群４が設けられている。また、
ノズル１ａが第１の噴出口１１をなし、ノズル１ａとノ
ズル１ｂの間の部分が第２の噴出口１２をなし、ノズル
１ｂとノズル２ａの間の部分が第３の噴出口１３をな
し、ノズル２ａとノズル２ｂの間の部分が第４の噴出口
１４をなし、小口径ノズルの列４ａが第５の噴出口１５
をなし、小口径ノズルの列４ｂが第６の噴出口１６をな
している。A multi-nozzle type burner is generally used as a burner for synthesizing glass fine particles used in the OVD method. For example, a glass synthesizing burner having a structure as shown in FIG. 1 is used. ing. A first nozzle group 1 including nozzles 1a and 1b is provided at the center of the end face of the glass synthesizing burner of this example, and the first nozzle group 1 and the central axis are provided around the first nozzle group 1. Similarly, a second nozzle group 2 including nozzles 2a and 2b is provided. In addition, between the first nozzle group 1 and the second nozzle group 2, on the concentric circle of the first nozzle group 1, a plurality of small diameter nozzles 3 having the same inner diameter and outer diameter,
Rows 4a and 4 of small-diameter annular nozzles in which 3 ...
A small-diameter nozzle group 4 composed of b is provided. Also,
The nozzle 1a constitutes the first ejection port 11, the portion between the nozzle 1a and the nozzle 1b constitutes the second ejection port 12, and the portion between the nozzle 1b and the nozzle 2a constitutes the third ejection port 13. The portion between the nozzles 2a and 2b forms the fourth ejection port 14, and the row 4a of small diameter nozzles is the fifth ejection port 15.
And the row 4b of small-diameter nozzles constitutes the sixth ejection port 16.
【０００４】ＯＶＤ法において、ガラス微粒子を合成す
るには、一般的に、第１の噴出口１１からは、例えばＳ
ｉＣｌ4などのガラス原料ガス、および酸素または水素
などの添加ガスを供給し、第３の噴出口１３からは水素
などの可燃性ガスを供給し、第５の噴出口１５および第
６の噴出口１６からは酸素などの支燃性ガスを供給す
る。In the OVD method, in order to synthesize fine glass particles, generally, for example, S from the first jet port 11 is used.
A glass raw material gas such as iCl 4 and an additive gas such as oxygen or hydrogen are supplied, a combustible gas such as hydrogen is supplied from the third ejection port 13, a fifth ejection port 15 and a sixth ejection port A combustion-supporting gas such as oxygen is supplied from 16.
【０００５】[0005]
【発明が解決しようとする課題】ところで、近年、高速
通信の需要の増加に伴って、光ファイバの生産量も年々
増加している。そのため、光ファイバの製造コストを低
減するために、光ファイバの製造に供される光ファイバ
母材が大型化する傾向にある。これに伴なって、使用す
るガラス原料ガスの量も増加し、光ファイバ母材の製造
に要する時間が長くなるから、光ファイバ多孔質母材の
製造におけるガラス微粒子の合成反応の効率や、ガラス
微粒子の出発部材への堆積効率を上げることが、非常に
重要な課題となっている。By the way, in recent years, as the demand for high-speed communication has increased, the production amount of optical fibers has been increasing year by year. Therefore, in order to reduce the manufacturing cost of the optical fiber, the optical fiber preform used for manufacturing the optical fiber tends to increase in size. Along with this, the amount of glass raw material gas used also increases, and the time required to manufacture the optical fiber preform becomes long, so the efficiency of the synthesis reaction of the glass particles in the production of the optical fiber porous preform and the glass Increasing the deposition efficiency of fine particles on the starting member has become a very important issue.
【０００６】光ファイバ母材が大型化すると、光ファイ
バ多孔質母材の製造において、ガラス微粒子を出発部材
の外周部に堆積する初期段階から終了段階までに、ガラ
ス微粒子を堆積中の光ファイバ多孔質母材の外径が大き
く変化していく。光ファイバ多孔質母材が細いときと、
太いときでは、ガラス微粒子を堆積するのに最適な、ガ
ラス合成用バーナの発する火炎の条件が異なる。したが
って、ガラス微粒子の堆積中には、光ファイバ多孔質母
材の外径に応じて流量を変更することが好ましい。When the optical fiber preform becomes large, in the production of the optical fiber porous preform, from the initial stage of depositing the glass fine particles on the outer peripheral portion of the starting member to the final stage, the optical fiber porous medium in which the glass fine particles are being deposited is deposited. The outer diameter of the base material changes greatly. When the optical fiber porous base material is thin,
When it is thick, the conditions of the flame emitted by the glass synthesizing burner, which are optimal for depositing glass particles, are different. Therefore, it is preferable to change the flow rate according to the outer diameter of the optical fiber porous preform during the deposition of the glass particles.
【０００７】ところが、従来のマルチノズルタイプのガ
ラス合成用バーナにあっては、図４に示すように、第５
の噴出口１５および第６の噴出口１６に支燃性ガスを導
入するための支燃性ガス流入口２５が１箇所だけ設けら
れていた。したがって、第５の噴出口１５および第６の
噴出口１６を構成する複数の小口径ノズル３、３、…そ
れぞれから噴出される支燃性ガスの流量は、第５の噴出
口１５および第６の噴出口１６から噴出される支燃性ガ
スの全流量によって制御されていた。すなわち、支燃性
ガス流入口２５から流入した支燃性ガスの全流量を制御
することにより、第５の噴出口１５および第６の噴出口
１６から噴出される全ての支燃性ガスの流量を制御して
いた。However, in the conventional multi-nozzle type glass synthesizing burner, as shown in FIG.
The combustion-supporting gas inflow port 25 for introducing the combustion-supporting gas was provided at only one location at the ejection port 15 and the sixth ejection port 16. Therefore, the flow rate of the combustion-supporting gas ejected from each of the plurality of small diameter nozzles 3, 3, ... Which constitute the fifth ejection port 15 and the sixth ejection port 16 is the same as that of the fifth ejection port 15 and the sixth ejection port 15. It was controlled by the total flow rate of the combustion-supporting gas ejected from the ejection port 16 of. That is, by controlling the total flow rate of the combustion-supporting gas flowing from the combustion-supporting gas inlet 25, the flow rate of all the combustion-supporting gas ejected from the fifth ejection port 15 and the sixth ejection port 16 is controlled. Was in control.
【０００８】小口径ノズルの列を２列以上に配列した場
合、図１に示したガラス合成用バーナのように、例え
ば、小口径ノズル群４全体の支燃性ガスの流量を制御し
ても、内側に配列された小口径ノズルの列４ａと、外側
に配列された小口径ノズルの列４ｂとでは、小口径ノズ
ル３、３、…内部と支燃性ガスとの抵抗が異なる。した
がって、支燃性ガスの流量の制御条件によっては、小口
径ノズルの列４ａと小口径ノズルの列４ｂでは、支燃性
ガスが同じように流れないという問題があった。また、
内側に配列された小口径ノズルの列４ａと、外側に配列
された小口径ノズルの列４ｂとでは、これらの先端で発
する火炎の強さや、ガラス原料ガスと支燃性ガスとの反
応の状態が異なる。したがって、出発部材またはガラス
微粒子を堆積中の光ファイバ多孔質母材の外径に応じ
て、各小口径ノズルの列には最適な支燃性ガスの流量が
ある。When the rows of the small diameter nozzles are arranged in two or more rows, even if the flow rate of the combustion-supporting gas of the entire small diameter nozzle group 4 is controlled as in the glass synthesizing burner shown in FIG. In the row 4a of small diameter nozzles arranged inside and the row 4b of small diameter nozzles arranged outside, the resistances of the small diameter nozzles 3, 3, ... Inside and the combustion-supporting gas are different. Therefore, depending on the control conditions of the flow rate of the combustion-supporting gas, there is a problem that the combustion-supporting gas does not flow equally in the row 4a of small diameter nozzles and the row 4b of small diameter nozzles. Also,
In the row 4a of small diameter nozzles arranged inside and the row 4b of small diameter nozzles arranged outside, the intensity of the flame emitted at these tips and the state of the reaction between the glass raw material gas and the combustion supporting gas Is different. Therefore, depending on the outer diameter of the optical fiber porous preform on which the starting material or glass particles are being deposited, there is an optimum flow rate of the combustion-supporting gas in each row of small-diameter nozzles.
【０００９】本発明は、前記事情に鑑みてなされたもの
で、光ファイバ多孔質母材の製造において、ガラス微粒
子の合成反応の効率およびガラス微粒子の堆積効率を向
上する光ファイバ多孔質母材製造用バーナ装置およびこ
れを用いた光ファイバ多孔質母材の製造方法を提供する
ことを課題とする。The present invention has been made in view of the above circumstances, and in the production of an optical fiber porous preform, the production of an optical fiber porous preform that improves the efficiency of the synthesis reaction of glass fine particles and the deposition efficiency of glass fine particles. An object of the present invention is to provide a burner device for use and a method for manufacturing an optical fiber porous preform using the burner device.
【００１０】[0010]
【課題を解決するための手段】前記課題は、中心軸を同
じくして配列された１列または複数列のノズルからなる
第１のノズル群と、該第１のノズル群の周囲に、該第１
のノズル群と中心軸を同じくして配列された１列または
複数列のノズルからなる第２のノズル群と、前記第１の
ノズル群と前記第２のノズル群の間に、前記第１のノズ
ル群の同心円上に、複数個の内径および外径の等しい小
口径ノズルが配列されてなる１列または複数列の小口径
ノズル群とを備えたガラス合成用バーナと、該ガラス合
成用バーナにガラス原料ガス、添加ガス、支燃性ガス、
可燃性ガスおよび不活性ガスを導入するガス供給源と、
これらのガスの流量または流速を制御するガス制御部と
を備えた光ファイバ多孔質母材製造用バーナ装置であっ
て、前記ガラス合成用バーナの後端部には、前記小口径
ノズル群の各列毎に、それぞれ独立したガス流入口が設
けられた光ファイバ多孔質母材製造用バーナ装置によっ
て解決できる。Means for Solving the Problems The above-mentioned problems are as follows: a first nozzle group consisting of one row or a plurality of rows of nozzles arranged with the same central axis, and the first nozzle group around the first nozzle group. 1
Between the first nozzle group and the second nozzle group, and a second nozzle group composed of one row or a plurality of rows of nozzles arranged with the same central axis as that of the first nozzle group. A glass synthesizing burner having a single row or a plurality of rows of small diameter nozzle groups in which a plurality of small diameter nozzles having the same inner diameter and outer diameter are arranged on a concentric circle of the nozzle group, and the glass synthesizing burner. Glass material gas, additive gas, combustion-supporting gas,
A gas supply source for introducing a flammable gas and an inert gas,
A burner device for producing an optical fiber porous preform, comprising a gas control unit for controlling the flow rate or flow velocity of these gases, wherein each of the small diameter nozzle groups is provided at the rear end of the glass synthesizing burner. This can be solved by a burner device for manufacturing an optical fiber porous preform provided with an independent gas inlet for each row.
【００１１】また、前記課題は、中心軸を同じくして配
列された１列または複数列のノズルからなる第１のノズ
ル群と、該第１のノズル群の周囲に、該第１のノズル群
と中心軸を同じくして配列された１列または複数列のノ
ズルからなる第２のノズル群と、前記第１のノズル群と
前記第２のノズル群の間に、前記第１のノズル群の同心
円上に、複数個の内径および外径の等しい小口径ノズル
が配列されてなる１列または複数列の小口径ノズル群と
を備えたガラス合成用バーナと、該ガラス合成用バーナ
の後端部に設けられた複数のガス流入口と、前記ガラス
合成用バーナにガラス原料ガス、添加ガス、支燃性ガ
ス、可燃性ガスおよび不活性ガスを導入するガス供給源
と、これらのガスの流量または流速を制御するガス制御
部とを備えた光ファイバ多孔質母材製造用バーナ装置を
用いて、ガラス原料ガスを火炎中で加水分解反応または
酸化反応させてガラス微粒子を合成し、該ガラス微粒子
を回転する出発部材の外周部の径方向に堆積して光ファ
イバ多孔質母材を得る光ファイバ多孔質母材の製造方法
において、前記小口径ノズル群の各列毎に、前記複数の
ガス流入口からそれぞれ独立にガスを流入する光ファイ
バ多孔質母材の製造方法によって解決できる。前記小口
径ノズル群から同一の支燃性ガスを噴出し、かつ前記小
口径ノズル群の列の少なくとも１列から噴出する支燃性
ガスの流量と、前記小口径ノズル群の他の列から噴出す
る支燃性ガスの流量とは、他のガスの流量などの条件に
もよるが、異なるようにすると、なお好ましい。前記小
口径ノズル群から同一の支燃性ガスを噴出し、かつ前記
小口径ノズル群の列の少なくとも２列から噴出するそれ
ぞれの支燃性ガスの流量の比率を、ガラス微粒子を出発
部材の外周部に堆積する初期段階と終了段階の間に１回
以上変化させると、さらに好ましい。上記光ファイバ多
孔質母材の製造方法において、ガラス微粒子を出発部材
の外周部に堆積する初期段階において、前記小口径ノズ
ル群の内側の列から噴出する支燃性ガスの流量を、前記
小口径ノズル群の外側の列から噴出する支燃性ガスの流
速よりも多くし、ガラス微粒子を出発部材の外周部に堆
積する終了段階において、前記小口径ノズル群の内側の
列から噴出する支燃性ガスの流速を、前記小口径ノズル
群の外側の列から噴出する支燃性ガスの流速よりも少な
くすることが好ましい。Further, the above-mentioned problem is that a first nozzle group consisting of one or more rows of nozzles arranged with the same central axis and the first nozzle group around the first nozzle group. And a second nozzle group consisting of one or more rows of nozzles arranged with the same central axis, and between the first nozzle group and the second nozzle group, the first nozzle group A glass synthesizing burner having one or more rows of small caliber nozzle groups in which a plurality of small caliber nozzles having the same inner diameter and outer diameter are arranged on a concentric circle, and a rear end portion of the glass synthesizing burner. A plurality of gas inlets provided in, a gas source for introducing a glass raw material gas, an additive gas, a combustion-supporting gas, a combustible gas and an inert gas into the glass synthesis burner, and the flow rate of these gases or An optical fiber equipped with a gas control unit for controlling the flow velocity. (B) Using a burner device for producing a porous base material, glass raw material gas is hydrolyzed or oxidized in a flame to synthesize glass fine particles, and the glass fine particles are deposited in a radial direction on the outer peripheral portion of a rotating starting member. In the method for producing an optical fiber porous base material to obtain an optical fiber porous base material, in each row of the small-diameter nozzle group, an optical fiber porous body for independently introducing gas from the plurality of gas inlets It can be solved by the manufacturing method of the base material. The same combustion-supporting gas is ejected from the small diameter nozzle group, and the flow rate of the combustion-supporting gas ejected from at least one row of the small diameter nozzle group and the ejection from another row of the small diameter nozzle group. The flow rate of the combustion-supporting gas depends on conditions such as the flow rates of other gases, but it is more preferable to make them different. The same combustion-supporting gas is ejected from the small diameter nozzle group, and the flow rate ratio of the respective combustion-supporting gas ejected from at least two rows of the small diameter nozzle group is defined by the glass fine particles on the outer periphery of the starting member. It is more preferable to change it once or more between the initial stage and the final stage of depositing on the part. In the method for producing the optical fiber porous preform, in the initial stage of depositing glass particles on the outer peripheral portion of the starting member, the flow rate of the combustion-supporting gas ejected from the inner row of the small diameter nozzle group is set to the small diameter. The flow velocity of the combustion-supporting gas ejected from the row outside the nozzle group is made higher than the flow velocity of the combustion-supporting gas, and at the end stage of depositing the glass particles on the outer peripheral portion of the starting member, the combustion-supporting gas ejected from the row inside the small-diameter nozzle group. It is preferable that the gas flow velocity is set lower than the flow velocity of the combustion-supporting gas ejected from the row outside the small diameter nozzle group.
【００１２】[0012]
【発明の実施の形態】以下、本発明を詳しく説明する。
図１は、光ファイバ多孔質母材の製造に用いられるガラ
ス合成用バーナの一例を示す概略構成図である。本発明
の光ファイバ多孔質母材製造用バーナ装置は、この例の
ガラス合成用バーナと、このガラス合成用バーナにガラ
ス原料ガス、酸素、水素、不活性ガスを導入するガス供
給源（図示略）と、これらのガスの流量または流速を制
御するガス制御部（図示略）とから概略構成されてい
る。BEST MODE FOR CARRYING OUT THE INVENTION The present invention is described in detail below.
FIG. 1 is a schematic configuration diagram showing an example of a glass synthesizing burner used for manufacturing an optical fiber porous preform. The burner apparatus for producing an optical fiber porous preform of the present invention includes a glass synthesizing burner of this example, and a gas supply source for introducing a glass raw material gas, oxygen, hydrogen, and an inert gas into the glass synthesizing burner (not shown). ) And a gas control unit (not shown) that controls the flow rate or flow velocity of these gases.
【００１３】ガス供給源は、ＳｉＣｌ4などのガラス原
料ガス、酸素、水素、不活性ガスなどが充填されたガス
ボンベ（図示略）などからなり、ガラス合成用バーナの
後端部に、ガス供給管路（図示略）を介して接続されて
いる。また、ガス制御部は、電磁バルブ、流量制御装置
などからなり、上述のガス供給管路の中途に設けられて
おり、この流量制御装置により、ガスの流量または流速
を制御するものであるThe gas supply source is composed of a gas cylinder (not shown) filled with glass raw material gas such as SiCl 4 , oxygen, hydrogen, and an inert gas. The gas supply pipe is provided at the rear end of the glass synthesizing burner. It is connected via a path (not shown). Further, the gas control unit is composed of an electromagnetic valve, a flow rate control device, etc., and is provided in the middle of the above-mentioned gas supply line, and the flow rate control device controls the flow rate or flow velocity of the gas.
【００１４】この例のガラス合成用バーナは、外径４０
〜６０ｍｍ程度の円筒形で、一般的には、石英ガラスで
形成されている。この例のガラス合成用バーナを構成す
る第１のノズル群１のノズル１ａの内径は２．５〜６ｍ
ｍ程度、ノズル１ｂの内径は４〜１０ｍｍ程度となって
いる。また、第２のノズル群２のノズル２ａの内径は２
５〜４５ｍｍ程度、ノズル２ｂの内径は３５〜５５ｍｍ
程度となっている。また、小口径ノズル３の内径は１〜
２ｍｍ程度となっており、小口径ノズルの列４ａの直径
は１０〜３０ｍｍ程度、小口径ノズルの列４ｂの直径は
１５〜４０ｍｍ程度となっている。The burner for glass synthesis of this example has an outer diameter of 40.
It has a cylindrical shape of about 60 mm and is generally made of quartz glass. The inner diameter of the nozzle 1a of the first nozzle group 1 constituting the burner for glass synthesis of this example is 2.5 to 6 m.
m, and the inner diameter of the nozzle 1b is about 4 to 10 mm. Further, the inner diameter of the nozzle 2a of the second nozzle group 2 is 2
5 to 45 mm, the inner diameter of the nozzle 2b is 35 to 55 mm
It has become a degree. Further, the inner diameter of the small diameter nozzle 3 is 1 to
The diameter of the row 4a of small diameter nozzles is about 10 to 30 mm, and the diameter of the row 4b of small diameter nozzles is about 15 to 40 mm.
【００１５】また、本発明の光ファイバ多孔質母材製造
用バーナ装置に備えられるガラス合成用バーナは、図２
に示すように、その後端部に、複数のガス流入口が設け
られている。符号２１は第１の噴出口１１に原料ガス
と、酸素または水素の添加ガスとを導入する原料ガス流
入口を示し、符号２２は第２の噴出口１２にアルゴンな
どの不活性ガスを導入する不活性ガス流入口を示し、符
号２３は第３の噴出口１３に可燃性ガスを導入する可燃
性ガス流入口を示し、符号２４は第４の噴出口１４に支
燃性ガスを導入する第１の支燃性ガス流入口を示し、符
号２５ａは第５の噴出口１５に支燃性ガスを導入する第
２の支燃性ガス流入口を示し、符号２５ｂは第６の噴出
口１６に支燃性ガスを導入する第３の支燃性ガス流入口
を示している。このように、第５の噴出口１５、第６の
噴出口１６に、それぞれ独立に第２の支燃性ガス流入口
２５ａ、第３の支燃性ガス流入口２５ｂを設けることに
より、第５の噴出口１５、第６の噴出口１６から噴出さ
れる支燃性ガスの流量および流速をそれぞれ独立に制御
できるようになっている。The burner for glass synthesis provided in the burner device for producing an optical fiber porous preform of the present invention is shown in FIG.
As shown in, a plurality of gas inlets are provided at the rear end. Reference numeral 21 denotes a raw material gas inlet for introducing the raw material gas and oxygen or hydrogen added gas into the first jet outlet 11, and reference numeral 22 introduces an inert gas such as argon into the second jet outlet 12. An inert gas inlet is shown, a reference numeral 23 is a combustible gas inlet for introducing a combustible gas into the third jet outlet 13, and a reference numeral 24 is for introducing a combustion supporting gas into the fourth jet outlet 14. 1, reference numeral 25a indicates a second combustion-supporting gas inlet for introducing the combustion-supporting gas into the fifth ejection port 15, and reference numeral 25b indicates a sixth ejection port 16. The 3rd combustion-supporting-gas inlet which introduces combustion-supporting gas is shown. In this way, the fifth jet outlet 15 and the sixth jet outlet 16 are independently provided with the second combustion-supporting gas inlet 25a and the third combustion-supporting gas inlet 25b, respectively. The flow rate and the flow velocity of the combustion-supporting gas ejected from the ejection port 15 and the sixth ejection port 16 can be independently controlled.
【００１６】なお、図２には、本発明の光ファイバ多孔
質母材の製造装置に備えられるガラス合成用バーナの一
例を示したが、本発明の光ファイバ多孔質母材の製造装
置に備えられるガラス合成用バーナは、これに限定され
るものではない。本発明の光ファイバ多孔質母材の製造
装置に備えられるガラス合成用バーナは、図２に示した
ガラス合成用バーナと類似の構造を有するものであれば
よい。すなわち、１列または複数列に配列されてなる小
口径ノズル群の各列毎に、それぞれ独立した支燃性ガス
流入口が設けられていればよい。Although FIG. 2 shows an example of the glass synthesizing burner provided in the optical fiber porous preform manufacturing apparatus of the present invention, it is provided in the optical fiber porous preform manufacturing apparatus of the present invention. The burner for synthesizing glass is not limited to this. The glass synthesizing burner provided in the optical fiber porous preform manufacturing apparatus of the present invention may have a structure similar to that of the glass synthesizing burner shown in FIG. That is, it suffices that an independent combustion-supporting gas inflow port is provided for each row of the small diameter nozzle group arranged in one row or a plurality of rows.
【００１７】以下、本発明の光ファイバ多孔質母材の製
造方法について説明する。本発明の光ファイバ多孔質母
材の製造方法では、例えば、その軸回りに回転するコア
となるガラス材を備えた円柱形の出発部材の表面に、図
１および図２に示したガラス合成用バーナの第１の噴出
口１１からＳｉＣｌ4などのガラス原料ガス、および酸
素または水素などの添加ガスを供給し、第３の噴出口１
３から水素などの添加ガスを供給し、第５の噴出口１５
および第６の噴出口１６から酸素などの支燃性ガスを供
給して、ガラス合成用バーナの酸水素炎中における加水
分解反応により、ガラス微粒子を合成し、このガラス微
粒子を、出発部材の表面に半焼結状態で半径方向に堆積
し、光ファイバ多孔質母材を得る。このとき、第５の噴
出口１５、第６の噴出口１６にはそれぞれ独立に、第２
の支燃性ガス流入口２５ａまたは第３の支燃性ガス流入
口２５ｂから支燃性ガスが導入される。すなわち、第５
の噴出口１５には第２の支燃性ガス流入口２５ａから支
燃性ガスが導入され、第６の噴出口１６には第３の支燃
性ガス流入口２５ｂから支燃性ガスが導入される。ま
た、第５の噴出口１５、第６の噴出口１６に導入される
支燃性ガスの流量および流速をそれぞれ独立に制御す
る。これにより、ガラス微粒子を堆積するターゲットと
なる出発部材またはガラス微粒子を堆積中の光ファイバ
多孔質母材の外径に応じて、第５の噴出口１５および第
６の噴出口１６に最適な支燃性ガスの流量および流速を
設定することができる。The method for producing the optical fiber porous preform of the present invention will be described below. In the method for producing an optical fiber porous preform of the present invention, for example, the glass synthesizing glass shown in FIGS. 1 and 2 is formed on the surface of a cylindrical starting member provided with a glass material serving as a core rotating about its axis. A glass raw material gas such as SiCl 4 and an additive gas such as oxygen or hydrogen are supplied from the first ejection port 11 of the burner, and the third ejection port 1
An additional gas such as hydrogen is supplied from 3 and the fifth jet port 15
And, a combustion-supporting gas such as oxygen is supplied from the sixth jet port 16 to synthesize glass fine particles by a hydrolysis reaction in an oxyhydrogen flame of a burner for synthesizing glass, and the glass fine particles are attached to the surface of the starting member. Is deposited in the semi-sintered state in the radial direction to obtain an optical fiber porous preform. At this time, the second jet port 15 and the sixth jet port 16 are independently provided with the second
The combustion-supporting gas is introduced from the combustion-supporting gas inlet 25a or the third combustion-supporting gas inlet 25b. That is, the fifth
The combustion-supporting gas is introduced from the second combustion-supporting gas inlet 25a into the jet outlet 15 of the No. 3 and the combustion-supporting gas is introduced from the third combustion-supporting gas inlet 25b into the sixth jet 16 To be done. Further, the flow rate and the flow velocity of the combustion-supporting gas introduced into the fifth ejection port 15 and the sixth ejection port 16 are independently controlled. This makes it possible to optimally support the fifth ejection port 15 and the sixth ejection port 16 depending on the outer diameter of the optical fiber porous base material in which the starting member or the glass particles on which the glass particles are deposited are deposited. The flow rate and flow rate of the flammable gas can be set.
【００１８】また、本発明の光ファイバ多孔質母材の製
造方法にあっては、第５の噴出口１５および第６の噴出
口１６から噴出される支燃性ガスの組成を同一とし、第
５の噴出口１５から噴出される支燃性ガスの流量をＶ
１、第６の噴出口１６から噴出される支燃性ガスの流量
をＶ２とすると、Ｖ１≠Ｖ２であるとなお好ましい場合
が多く、また、支燃性ガスの流量Ｖ１と流量Ｖ２の比率
を、ガラス微粒子を出発部材の外周部に堆積する初期段
階と終了段階の間に１回以上変化させると、さらに好ま
しい。すなわち、ガラス微粒子を出発部材の外周部に堆
積する初期段階においては、第５の噴出口１５から噴出
される支燃性ガスの流量Ｖ１を、第６の噴出口１６から
噴出される支燃性ガスの流量Ｖ２よりも多くし、ガラス
微粒子を堆積する終了段階においては、第５の噴出口１
５から噴出される支燃性ガスの流量Ｖ１を、第６の噴出
口１６から噴出される支燃性ガスの流量Ｖ２よりも少な
くすることが好ましい。Further, in the method for producing an optical fiber porous preform of the present invention, the composition of the combustion-supporting gas ejected from the fifth ejection port 15 and the sixth ejection port 16 is the same, 5 is the flow rate of the combustion-supporting gas ejected from the ejection port 15 of V
1. If V2 is the flow rate of the combustion-supporting gas ejected from the sixth ejection port 16, V1 ≠ V2 is often more preferable, and the ratio of the flow rate V1 of the combustion-supporting gas to the flow rate V2 is It is more preferable to change the glass fine particles once or more between the initial stage and the end stage of depositing the glass fine particles on the outer peripheral portion of the starting member. That is, in the initial stage of depositing the glass particles on the outer peripheral portion of the starting member, the flow rate V1 of the combustion-supporting gas ejected from the fifth ejection port 15 is changed to the combustion-supporting gas ejected from the sixth ejection port 16. The flow rate of the gas is made higher than V2, and at the end stage of depositing glass particles, the fifth jet port 1
It is preferable that the flow rate V1 of the combustion-supporting gas ejected from No. 5 is smaller than the flow rate V2 of the combustion-supporting gas ejected from the sixth ejection port 16.
【００１９】ガラス微粒子を堆積する初期段階では、ガ
ラス微粒子が堆積されるターゲットとなる出発部材が細
いため、ガラス合成用バーナの発する火炎が出発部材に
あたる面積が小さい。したがって、ガラス合成用バーナ
の中心部近傍に設けられた第５の噴出口１５から噴出さ
れる支燃性ガスの流量Ｖ１を、第６の噴出口１６から噴
出される支燃性ガスの流量Ｖ２よりも多くして、ガラス
原料ガスをガラス合成用バーナの中心部近傍に集中させ
ることが好ましい。これにより、ガラス微粒子の慣性力
が大きくなるため、ガラス微粒子の堆積速度を上げるこ
とができる。また、ガラス微粒子を堆積する終了段階で
は、ターゲットとなるガラス微粒子を堆積中の光ファイ
バ多孔質母材が太くなるため、ガラス合成用バーナの発
する火炎が光ファイバ多孔質母材にあたる面積が大きく
なる。したがって、第５の噴出口１５から噴出される支
燃性ガスの流量Ｖ１を、第６の噴出口１６から噴出され
る支燃性ガスの流量Ｖ２よりも少なくし、火炎を大きく
することでサーモフォレシス効果により、堆積するガラ
ス微粒子の割合を増やすことが好ましい。このようにす
れば、効果的にガラス微粒子の堆積を行うことができ
る。At the initial stage of depositing the glass particles, the starting member serving as a target on which the glass particles are deposited is thin, so that the flame emitted by the glass synthesizing burner has a small area of contact with the starting member. Therefore, the flow rate V1 of the combustion-supporting gas ejected from the fifth ejection port 15 provided near the center of the glass synthesizing burner is set to the flow rate V2 of the combustion-supporting gas ejected from the sixth ejection port 16. It is preferable to concentrate the glass raw material gas in the vicinity of the central portion of the glass synthesizing burner by increasing the amount. As a result, the inertial force of the glass particles is increased, so that the deposition rate of the glass particles can be increased. In addition, at the end stage of depositing glass particles, the optical fiber porous base material on which the target glass particles are being deposited becomes thicker, so that the flame emitted by the glass synthesis burner becomes larger in the area of the optical fiber porous base material. . Therefore, the flow rate V1 of the combustion-supporting gas ejected from the fifth ejection port 15 is made smaller than the flow rate V2 of the combustion-supporting gas ejected from the sixth ejection port 16, and the flame is increased to increase the thermostat. It is preferable to increase the ratio of glass particles to be deposited due to the foresis effect. In this way, glass particles can be effectively deposited.
【００２０】このように、本発明の光ファイバ多孔質母
材の製造方法によれば、出発部材の表面にガラス微粒子
を堆積する際に、堆積速度を上げることができるから、
製造効率が良くなる。また、出発部材またはガラス微粒
子を堆積中の光ファイバ多孔質母材の外径に応じて、小
口径ノズル群の各列から噴出される支燃性ガスの流量お
よび流速を最適な状態に設定することができる。したが
って、ガラス微粒子の合成反応の効率を向上することが
できるから、結果として、ガラス微粒子の堆積効率を向
上することができる。As described above, according to the method for producing the optical fiber porous preform of the present invention, the deposition rate can be increased when the glass particles are deposited on the surface of the starting member.
Manufacturing efficiency is improved. Further, the flow rate and the flow velocity of the combustion-supporting gas ejected from each row of the small-diameter nozzle group are set to an optimum state according to the outer diameter of the optical fiber porous preform on which the starting member or glass particles are being deposited. be able to. Therefore, the efficiency of the synthesis reaction of the glass particles can be improved, and as a result, the deposition efficiency of the glass particles can be improved.
【００２１】ここで、ガラス微粒子の堆積効率とは、使
用したガラス原料ガスが全て化学反応によってガラス微
粒子に変化したと仮定したときのガラス微粒子の総量に
対する、出発部材の表面に堆積されたガラス微粒子の総
量の割合で定義するものである。また、堆積速度とは、
単位時間当りに出発部材の表面に堆積されたガラス微粒
子の重量で表されるものである。Here, the deposition efficiency of the glass fine particles means the glass fine particles deposited on the surface of the starting member with respect to the total amount of the glass fine particles when it is assumed that all the glass raw material gases used are changed into the glass fine particles by the chemical reaction. It is defined by the ratio of the total amount of. What is the deposition rate?
It is represented by the weight of the glass particles deposited on the surface of the starting member per unit time.
【００２２】以下、図１および図２を用いて具体的な実
施例を示し、本発明の効果を明らかにする。
（実施例）図１および図２に示したガラス合成用バーナ
を備えた光ファイバ多孔質母材製造用バーナ装置を用意
した。次いで、外径３０ｍｍ、長さ１２００ｍｍの石英
系ガラスからなる円柱形の出発部材を用意した。次い
で、この出発部材の両端部を把持具で把持し、出発部材
を水平に配置した。次いで、この出発部材を、その中心
軸を中心にして回転させながら、上記のガラス合成用バ
ーナを用いてガラス微粒子を合成し、ガラス合成用バー
ナを出発部材の長手方向と平行に移動させながら、ガラ
ス微粒子を回転する出発部材の半径方向に堆積して、円
柱形の光ファイバ多孔質母材を得た。このとき、出発部
材の回転速度を３０ｒｐｍとした。また、第1の噴出口
１１からはガラス原料ガスのＳｉＣｌ4を５ｌ／分と酸
素を２ｌ／分噴出し、第２の噴出口１２からはアルゴン
を１ｌ／分噴出し、第３の噴出口１３からは水素を噴出
し、第５の噴出口１５および第６の噴出口１６からは酸
素を合計３０ｌ／分噴出し、第４の噴出口１４からは酸
素を２０ｌ／分噴出した。また、第３の噴出口１３から
噴出される水素の流量を、ガラス微粒子を堆積中の光フ
ァイバ多孔質母材表面の温度が、堆積の初期段階から終
了段階まで略一定となるように調整した。さらに、第５
の噴出口１５から噴出される酸素の流量と、第６の噴出
口１６から噴出される酸素の流量をそれぞれ独立に設定
し、ガラス微粒子を堆積中、光ファイバ多孔質母材の外
径が大きくなるにしたがい、それぞれの噴出口から噴出
される酸素の流量を表１のように変化させた。光ファイ
バ多孔質母材の外径の変化に伴なって、ガラス微粒子の
堆積効率を調べた。結果を図３に示す。Specific examples will be shown below with reference to FIGS. 1 and 2 to clarify the effects of the present invention. (Example) A burner apparatus for producing an optical fiber porous preform having the glass synthesizing burner shown in FIGS. 1 and 2 was prepared. Next, a cylindrical starting member made of silica glass having an outer diameter of 30 mm and a length of 1200 mm was prepared. Then, both ends of this starting member were gripped by gripping tools, and the starting member was arranged horizontally. Then, while rotating the starting member around its central axis, glass fine particles are synthesized using the above-mentioned glass synthesizing burner, while moving the glass synthesizing burner in parallel with the longitudinal direction of the starting member, Glass fine particles were deposited in the radial direction of the rotating starting member to obtain a cylindrical optical fiber porous preform. At this time, the rotation speed of the starting member was set to 30 rpm. Further, 5 l / min of glass raw material gas SiCl 4 and 2 l / min of oxygen are ejected from the first ejection port 11, 1 l / min of argon is ejected from the second ejection port 12, and the third ejection port is ejected. Hydrogen was ejected from No. 13, oxygen was ejected from the fifth ejection port 15 and sixth ejection port 16 in a total amount of 30 l / min, and oxygen was ejected from the fourth ejection port 14 at 20 l / min. Further, the flow rate of hydrogen ejected from the third ejection port 13 was adjusted so that the temperature of the surface of the optical fiber porous preform during the deposition of glass particles was substantially constant from the initial stage to the final stage of deposition. . Furthermore, the fifth
The flow rate of oxygen ejected from the ejection port 15 and the flow rate of oxygen ejected from the sixth ejection port 16 are set independently to increase the outer diameter of the optical fiber porous base material during the deposition of glass particles. Accordingly, the flow rate of oxygen ejected from each ejection port was changed as shown in Table 1. The deposition efficiency of the glass particles was investigated with the change of the outer diameter of the optical fiber porous preform. The results are shown in Fig. 3.
【００２３】[0023]
【表１】 [Table 1]
【００２４】（比較例）図１および図４に示したガラス
合成用バーナを備えた光ファイバ多孔質母材製造用バー
ナ装置を用意した。次いで、この出発部材の両端部を把
持具で把持し、出発部材を水平に配置した。次いで、こ
の出発部材を、その中心軸を中心にして回転させなが
ら、上記のガラス合成用バーナを用いてガラス微粒子を
合成し、ガラス合成用バーナを出発部材の長手方向と平
行に移動させながら、ガラス微粒子を回転する出発部材
の半径方向に堆積して、円柱形の光ファイバ多孔質母材
を得た。このとき、出発部材の回転速度を３０ｒｐｍと
した。また、第1の噴出口１１からはガラス原料ガスの
ＳｉＣｌ4を５ｌ／分と酸素を２ｌ／分噴出し、第２の
噴出口１２からはアルゴンを１ｌ／分噴出し、第３の噴
出口１３からは水素を噴出し、第５の噴出口１５および
第６の噴出口１６からは酸素を合計３０ｌ／分噴出し、
第４の噴出口１４からは酸素を２０ｌ／分噴出した。ま
た、第３の噴出口１３から噴出される水素の流量を、ガ
ラス微粒子を堆積中の光ファイバ多孔質母材表面の温度
が、堆積の初期段階から終了段階まで略一定となるよう
に調整した。さらに、第５の噴出口１５から噴出される
酸素の流量と、第６の噴出口１６から噴出される酸素の
流量の比率を、ガラス微粒子を堆積中一定とした。光フ
ァイバ多孔質母材の外径の変化に伴なって、ガラス微粒
子の堆積効率を調べた。結果を図３に示す。(Comparative Example) A burner device for producing an optical fiber porous preform having the glass synthesizing burner shown in FIGS. 1 and 4 was prepared. Then, both ends of this starting member were gripped by gripping tools, and the starting member was arranged horizontally. Then, while rotating the starting member around its central axis, glass fine particles are synthesized using the above-mentioned glass synthesizing burner, while moving the glass synthesizing burner in parallel with the longitudinal direction of the starting member, Glass fine particles were deposited in the radial direction of the rotating starting member to obtain a cylindrical optical fiber porous preform. At this time, the rotation speed of the starting member was set to 30 rpm. Further, 5 l / min of glass raw material gas SiCl 4 and 2 l / min of oxygen are ejected from the first ejection port 11, 1 l / min of argon is ejected from the second ejection port 12, and the third ejection port is ejected. Hydrogen is ejected from 13 and oxygen is ejected from the fifth ejection port 15 and the sixth ejection port 16 in a total amount of 30 l / min.
20 l / min of oxygen was ejected from the fourth ejection port 14. Further, the flow rate of hydrogen ejected from the third ejection port 13 was adjusted so that the temperature of the surface of the optical fiber porous preform during the deposition of glass particles was substantially constant from the initial stage to the final stage of deposition. . Further, the ratio of the flow rate of oxygen ejected from the fifth ejection port 15 to the flow rate of oxygen ejected from the sixth ejection port 16 was kept constant during the deposition of the glass particles. The deposition efficiency of the glass particles was investigated with the change of the outer diameter of the optical fiber porous preform. The results are shown in Fig. 3.
【００２５】図３の結果から、実施例で示したように、
第５の噴出口１５から噴出される酸素の流量と、第６の
噴出口１６から噴出される酸素の流量との比率を、光フ
ァイバ多孔質母材の外径の変化に伴なって変化させるこ
とにより、ガラス微粒子の堆積効率を上昇させることが
できることが確認された。From the result of FIG. 3, as shown in the embodiment,
The ratio of the flow rate of oxygen ejected from the fifth ejection port 15 to the flow rate of oxygen ejected from the sixth ejection port 16 is changed in accordance with the change in the outer diameter of the optical fiber porous preform. It was thus confirmed that the deposition efficiency of glass particles can be increased.
【００２６】[0026]
【発明の効果】以上説明したように、本発明の光ファイ
バ多孔質母材製造用バーナ装置によれば、酸素などの支
燃性ガスを噴出する小口径ノズル群の各列毎に、それぞ
れ独立に支燃性ガスの流量を制御することができる。し
たがって、光ファイバ多孔質母材の製造において、ガラ
ス微粒子の堆積効率を向上することができる。また、本
発明の光ファイバ多孔質母材の製造方法によれば、出発
部材またはガラス微粒子を堆積中の光ファイバ多孔質母
材の外径に応じて、小口径ノズル群の各列から噴出され
る支燃性ガスの流量および流速を最適な状態に設定する
ことができるから、ガラス微粒子の合成反応の効率を向
上することができるため、結果として、ガラス微粒子の
堆積効率を向上することができる。As described above, according to the burner apparatus for producing an optical fiber porous preform of the present invention, each row of small diameter nozzle groups for ejecting a combustion-supporting gas such as oxygen is independent. It is possible to control the flow rate of the combustion-supporting gas. Therefore, the deposition efficiency of the glass particles can be improved in the production of the optical fiber porous preform. Further, according to the method for producing an optical fiber porous preform of the present invention, the starting member or glass fine particles are jetted from each row of the small diameter nozzle group according to the outer diameter of the optical fiber porous preform being deposited. Since the flow rate and the flow velocity of the combustion-supporting gas can be set to an optimum state, the efficiency of the synthesis reaction of the glass particles can be improved, and as a result, the deposition efficiency of the glass particles can be improved. .
【図１】 光ファイバ多孔質母材の製造に用いられるガ
ラス合成用バーナの一例を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an example of a glass synthesizing burner used for manufacturing an optical fiber porous preform.
【図２】 本発明の光ファイバ多孔質母材の製造装置に
備えられるガラス合成用バーナの一例を示す断面図であ
る。FIG. 2 is a cross-sectional view showing an example of a glass synthesizing burner provided in the optical fiber porous preform manufacturing apparatus of the present invention.
【図３】 光ファイバ多孔質母材の外径の変化と、ガラ
ス微粒子の堆積効率との関係を示すグラフである。FIG. 3 is a graph showing the relationship between the change in the outer diameter of the optical fiber porous preform and the deposition efficiency of glass particles.
【図４】 従来の光ファイバ多孔質母材の製造装置に備
えられるガラス合成用バーナの一例を示す断面図であ
る。FIG. 4 is a cross-sectional view showing an example of a glass synthesizing burner provided in a conventional optical fiber porous preform manufacturing apparatus.
１・・・第１のノズル群、１ａ，１ｂ，２ａ，２ｂ・・・ノズ
ル、２・・・第２のノズル群、３・・・小口径ノズル、４・・・
小口径ノズル群、４ａ，４ｂ・・・小口径ノズルの列、１
１・・・第１の噴出口、１２・・・第２の噴出口、１３・・・第
３の噴出口、１４・・・第４の噴出口、１５・・・第５の噴出
口、１６・・・第６の噴出口、２１・・・原料ガス流入口、２
２・・・不活性ガス流入口、２３・・・可燃性ガス流入口、２
４・・・第１の支燃性ガス流入口、２５・・・支燃性ガス流入
口、２５ａ・・・第２の支燃性ガス流入口、２５ｂ・・・第３
の支燃性ガス流入口1 ... 1st nozzle group, 1a, 1b, 2a, 2b ... nozzle, 2 ... 2nd nozzle group, 3 ... small diameter nozzle, 4 ...
Small diameter nozzle group, 4a, 4b ... Row of small diameter nozzles, 1
1 ... 1st jet outlet, 12 ... 2nd jet outlet, 13 ... 3rd jet outlet, 14 ... 4th jet outlet, 15 ... 5th jet outlet, 16 ... Sixth jet outlet, 21 ... Raw material gas inlet, 2
2 ... Inert gas inlet, 23 ... Combustible gas inlet, 2
4 ... 1st combustion-supporting gas inlet, 25 ... combustion-supporting gas inlet, 25a ... 2nd combustion-supporting gas inlet, 25b ... 3rd
Inflammable gas inlet
フロントページの続き (72)発明者 堀越 雅博 千葉県佐倉市六崎1440番地 株式会社フジ クラ佐倉事業所内 Ｆターム(参考） 3K017 CB02 CD03 CH02 4G014 AH16 Continued front page (72) Inventor Masahiro Horikoshi Fuji Co., Ltd. 1440 Rokuzaki, Sakura City, Chiba Prefecture Kura Sakura Office F-term (reference) 3K017 CB02 CD03 CH02 4G014 AH16
Claims (5)
は複数列のノズルからなる第１のノズル群と、該第１の
ノズル群の周囲に、該第１のノズル群と中心軸を同じく
して配列された１列または複数列のノズルからなる第２
のノズル群と、前記第１のノズル群と前記第２のノズル
群の間に、前記第１のノズル群の同心円上に、複数個の
内径および外径の等しい小口径ノズルが配列されてなる
１列または複数列の小口径ノズル群とを備えたガラス合
成用バーナと、該ガラス合成用バーナにガラス原料ガ
ス、添加ガス、支燃性ガス、可燃性ガスおよび不活性ガ
スを導入するガス供給源と、これらのガスの流量または
流速を制御するガス制御部とを備えた光ファイバ多孔質
母材製造用バーナ装置であって、 前記ガラス合成用バーナの後端部には、前記小口径ノズ
ル群の各列毎に、それぞれ独立したガス流入口が設けら
れたことを特徴とする光ファイバ多孔質母材製造用バー
ナ装置。1. A first nozzle group composed of one row or a plurality of rows of nozzles arranged with the same central axis, and the first nozzle group and the central axis around the first nozzle group. A second one consisting of one or more rows of nozzles arranged in the same way
Nozzle group, and between the first nozzle group and the second nozzle group, a plurality of small diameter nozzles having the same inner diameter and outer diameter are arranged on a concentric circle of the first nozzle group. A glass synthesizing burner having one or more rows of small diameter nozzle groups, and a gas supply for introducing a glass raw material gas, an additive gas, a combustion supporting gas, a flammable gas and an inert gas into the glass synthesizing burner. A burner device for producing an optical fiber porous preform, comprising a gas source and a gas control unit for controlling the flow rate or flow velocity of these gases, wherein the small diameter nozzle is provided at the rear end of the glass synthesizing burner. A burner device for manufacturing an optical fiber porous preform, wherein an independent gas inlet is provided for each row of the group.
は複数列のノズルからなる第１のノズル群と、該第１の
ノズル群の周囲に、該第１のノズル群と中心軸を同じく
して配列された１列または複数列のノズルからなる第２
のノズル群と、前記第１のノズル群と前記第２のノズル
群の間に、前記第１のノズル群の同心円上に、複数個の
内径および外径の等しい小口径ノズルが配列されてなる
１列または複数列の小口径ノズル群とを備えたガラス合
成用バーナと、該ガラス合成用バーナの後端部に設けら
れた複数のガス流入口と、前記ガラス合成用バーナにガ
ラス原料ガス、添加ガス、支燃性ガス、可燃性ガスおよ
び不活性ガスを導入するガス供給源と、これらのガスの
流量または流速を制御するガス制御部とを備えた光ファ
イバ多孔質母材製造用バーナ装置を用いて、ガラス原料
ガスを火炎中で加水分解反応または酸化反応させてガラ
ス微粒子を合成し、該ガラス微粒子を回転する出発部材
の外周部の径方向に堆積して光ファイバ多孔質母材を得
る光ファイバ多孔質母材の製造方法において、 前記小口径ノズル群の各列毎に、前記複数のガス流入口
からそれぞれ独立にガスを導入することを特徴とする光
ファイバ多孔質母材の製造方法。2. A first nozzle group consisting of nozzles of one row or a plurality of rows arranged with the same central axis, and the first nozzle group and the central axis around the first nozzle group. A second one consisting of one or more rows of nozzles arranged in the same way
Nozzle group, and between the first nozzle group and the second nozzle group, a plurality of small diameter nozzles having the same inner diameter and outer diameter are arranged on a concentric circle of the first nozzle group. A glass synthesizing burner provided with one row or a plurality of rows of small diameter nozzle groups, a plurality of gas inlets provided at the rear end of the glass synthesizing burner, and a glass raw material gas for the glass synthesizing burner, Burner device for producing optical fiber porous preform, which includes a gas supply source for introducing an additive gas, a combustion-supporting gas, a flammable gas, and an inert gas, and a gas control unit for controlling a flow rate or a flow velocity of these gases By using, the glass raw material gas is subjected to a hydrolysis reaction or an oxidation reaction in a flame to synthesize glass fine particles, and the glass fine particles are deposited in the radial direction of the outer peripheral portion of the rotating starting member to form an optical fiber porous preform. Optical fiber perforated The method of manufacturing a preform, wherein for each column of the small-diameter nozzle group, the method of manufacturing an optical fiber porous preform, which comprises introducing a gas independently from said plurality of gas inlet.
スを噴出し、かつ前記小口径ノズル群の列の少なくとも
１列から噴出する支燃性ガスの流量と、前記小口径ノズ
ル群の他の列から噴出する支燃性ガスの流量とを異なる
ようにすることを特徴とする請求項２記載の光ファイバ
多孔質母材の製造方法。3. The flow rate of the combustion-supporting gas ejected from at least one of the rows of the small-diameter nozzle group and the same combustion-supporting gas ejected from the small-diameter nozzle group, The method for producing an optical fiber porous preform according to claim 2, wherein the flow rate of the combustion-supporting gas ejected from another row is made different.
スを噴出し、かつ前記小口径ノズル群の列の少なくとも
２列から噴出するそれぞれの支燃性ガスの流量の比率
を、ガラス微粒子を出発部材の外周部に堆積する初期段
階と終了段階の間に１回以上変化させることを特徴とす
る請求項２または３記載の光ファイバ多孔質母材の製造
方法。4. A glass microparticle is defined as a ratio of the flow rates of the respective combustion-supporting gases ejected from at least two rows of the small-calibration nozzle group and the same combustion-supporting gas ejected from the small-diameter nozzle group. The method for producing an optical fiber porous preform according to claim 2 or 3, characterized in that it is changed once or more between an initial stage and an end stage in which is deposited on the outer peripheral portion of the starting member.
製造方法において、ガラス微粒子を出発部材の外周部に
堆積する初期段階において、前記小口径ノズル群の内側
の列から噴出する支燃性ガスの流量を、前記小口径ノズ
ル群の外側の列から噴出する支燃性ガスの流量よりも多
くし、 ガラス微粒子を出発部材の外周部に堆積する終了段階に
おいて、前記小口径ノズル群の内側の列から噴出する支
燃性ガスの流量を、前記小口径ノズル群の外側の列から
噴出する支燃性ガスの流量よりも少なくすることを特徴
とする光ファイバ多孔質母材の製造方法。5. The method for producing an optical fiber porous preform according to claim 4, wherein at the initial stage of depositing glass particles on the outer peripheral portion of the starting member, the combustion-supporting gas ejected from the inner row of the small diameter nozzle group. The flow rate of the functional gas is set to be larger than the flow rate of the combustion-supporting gas ejected from the outer row of the small diameter nozzle group, and at the end stage of depositing glass fine particles on the outer peripheral portion of the starting member, the small diameter nozzle group A method for producing an optical fiber porous preform, characterized in that the flow rate of the combustion-supporting gas ejected from the inner row is smaller than the flow rate of the combustion-supporting gas ejected from the outer row of the small diameter nozzle group. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002008003A JP3953820B2 (en) | 2002-01-16 | 2002-01-16 | Method for manufacturing optical fiber porous preform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002008003A JP3953820B2 (en) | 2002-01-16 | 2002-01-16 | Method for manufacturing optical fiber porous preform |
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| Publication Number | Publication Date |
|---|---|
| JP2003212555A true JP2003212555A (en) | 2003-07-30 |
| JP3953820B2 JP3953820B2 (en) | 2007-08-08 |
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ID=27646379
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|---|---|---|---|
| JP2002008003A Expired - Fee Related JP3953820B2 (en) | 2002-01-16 | 2002-01-16 | Method for manufacturing optical fiber porous preform |
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Cited By (5)
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| EP2096087A2 (en) | 2008-02-27 | 2009-09-02 | Shin-Etsu Chemical Co., Ltd. | Burner for fabricating optical fiber preform |
| WO2009107392A1 (en) | 2008-02-27 | 2009-09-03 | 信越化学工業株式会社 | Burner for manufacturing porous glass base material |
| EP2128100A1 (en) | 2008-05-13 | 2009-12-02 | Shinetsu Chemical Co., Ltd. | Porous Glass Base Material Manufacturing Method and Gas Flow Rate Control Apparatus |
| EP2380856A2 (en) | 2010-04-23 | 2011-10-26 | Shin-Etsu Chemical Co., Ltd. | Burner for producing porous glass preform |
| EP2583952A1 (en) | 2011-10-18 | 2013-04-24 | Shin-Etsu Chemical Co., Ltd. | Method and burner for producing a porous glass preform |
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| JPH09100133A (en) * | 1995-10-04 | 1997-04-15 | Furukawa Electric Co Ltd:The | Production of porous glass preform for optical fiber |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2096087A2 (en) | 2008-02-27 | 2009-09-02 | Shin-Etsu Chemical Co., Ltd. | Burner for fabricating optical fiber preform |
| WO2009107392A1 (en) | 2008-02-27 | 2009-09-03 | 信越化学工業株式会社 | Burner for manufacturing porous glass base material |
| US8079233B2 (en) | 2008-02-27 | 2011-12-20 | Shin-Etsu Chemical Co., Ltd. | Burner for manufacturing porous glass base material |
| US8517721B2 (en) | 2008-02-27 | 2013-08-27 | Shin-Etsu Chemical Co., Ltd. | Burner for fabricating optical fiber preform |
| EP2128100A1 (en) | 2008-05-13 | 2009-12-02 | Shinetsu Chemical Co., Ltd. | Porous Glass Base Material Manufacturing Method and Gas Flow Rate Control Apparatus |
| US8919152B2 (en) | 2008-05-13 | 2014-12-30 | Shin-Etsu Chemical Co., Ltd. | Porous glass base material manufacturing method and gas flow rate control apparatus |
| EP2380856A2 (en) | 2010-04-23 | 2011-10-26 | Shin-Etsu Chemical Co., Ltd. | Burner for producing porous glass preform |
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| EP2583952A1 (en) | 2011-10-18 | 2013-04-24 | Shin-Etsu Chemical Co., Ltd. | Method and burner for producing a porous glass preform |
| US9032761B2 (en) | 2011-10-18 | 2015-05-19 | Shin-Etsu Chemical Co., Ltd. | Porous glass matrix producing burner and porous glass matrix producing method |
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| Publication number | Publication date |
|---|---|
| JP3953820B2 (en) | 2007-08-08 |
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