JP2003194736A - Detecting method for defect of glass - Google Patents
Detecting method for defect of glassInfo
- Publication number
- JP2003194736A JP2003194736A JP2001393662A JP2001393662A JP2003194736A JP 2003194736 A JP2003194736 A JP 2003194736A JP 2001393662 A JP2001393662 A JP 2001393662A JP 2001393662 A JP2001393662 A JP 2001393662A JP 2003194736 A JP2003194736 A JP 2003194736A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- fabry
- defect
- perot resonator
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Liquid Crystal (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ガラスの欠陥を検
出する方法に関する。本発明は特に好ましくは、ガラス
が液晶ディスプレイ用ガラス等のカバーガラスである、
ガラスの欠陥を検出する方法に関する。FIELD OF THE INVENTION The present invention relates to a method for detecting defects in glass. The present invention particularly preferably, the glass is a cover glass such as glass for liquid crystal display,
It relates to a method for detecting defects in glass.
【０００２】[0002]
【従来の技術】液晶ディスプレイ用ガラス等のカバーガ
ラスは均一性が要求されるが、カバーガラスを均一にす
るのは容易なことではなく、十分に効果的な手段は見当
たらない。また、ガラスに欠陥があると、欠陥により光
が散乱され、透過強度が小さくなったり、不均一になっ
たりする。2. Description of the Related Art A cover glass such as a glass for a liquid crystal display is required to have uniformity, but it is not easy to make the cover glass uniform, and a sufficiently effective means cannot be found. Further, if the glass has a defect, light is scattered by the defect, and the transmitted intensity becomes small or non-uniform.
【０００３】[0003]
【発明が解決しようとする課題】本発明者は、カバーガ
ラスの欠陥を正確に捉え、カバーガラスの欠陥検査がで
きればと考え、鋭意研究に努めた。そこで本発明の課題
は、カバーガラスの欠陥を正確に捉え、カバーガラスの
欠陥検査を可能にすることである。DISCLOSURE OF THE INVENTION The inventors of the present invention have eagerly conducted research in the hope that the defects of the cover glass can be accurately detected and the defect inspection of the cover glass can be performed. Therefore, an object of the present invention is to accurately detect defects in the cover glass and enable defect inspection of the cover glass.
【０００４】[0004]
【課題を解決するための手段】本発明は、ファブリペロ
ー共振器のミラー間にガラスを挿入してガラスの欠陥を
捉え、それをガラスの欠陥検査に利用するものである。
ガラスの欠陥の存在によりレーザ光の吸収または散乱が
増幅され、ファブリペロー共振器を透過するレーザ光強
度が変化するので、その透過光強度の変化により、欠陥
を発見するのである。According to the present invention, glass is inserted between the mirrors of a Fabry-Perot resonator to detect glass defects, and the defects are used for glass defect inspection.
Absorption or scattering of laser light is amplified due to the presence of glass defects, and the intensity of laser light transmitted through the Fabry-Perot resonator changes. Therefore, the defect is found by the change in transmitted light intensity.
【０００５】[0005]
【発明の実施の形態】ファブリペロー共振器が入射光に
対して共振条件を満たす場合には、入射光の透過率は最
高となる。しかし、共振条件を満たす場合でも、共振器
内に散乱または吸収体が存在すると、この透過率が著し
く減少する。このファブリペロー共振器の特徴を利用す
れば、散乱または吸収率の変化が少ない物質のコントラ
ストの差を増幅させることができる。ファブリペロー共
振器としては、共焦点ファブリペロー共振器が特に好ま
しい。BEST MODE FOR CARRYING OUT THE INVENTION When a Fabry-Perot resonator satisfies a resonance condition for incident light, the transmittance of incident light becomes maximum. However, even if the resonance condition is satisfied, if the scattering or the absorber is present in the resonator, the transmittance is significantly reduced. By utilizing the characteristics of this Fabry-Perot resonator, it is possible to amplify the difference in the contrast of the substance whose scattering or absorptance changes little. A confocal Fabry-Perot resonator is particularly preferable as the Fabry-Perot resonator.
【０００６】原理は下記のとおりである。ファブリペロ
ー共振器のミラー間にカバーガラスを挿入すると、カバ
ーガラスの欠陥の存在に対応して共振器の光学距離が変
化し、共振周波数も変化する。しかしながら、共振器長
をＰＺＴでフリースペクトルレンジ（ＦＳＲ）だけ掃引
すると、共振器長は必ず共振条件を満たすことができ
る。このとき、スペクトルの強度変化を捉えることによ
って、ガラスの欠陥の存在を検出することができる。The principle is as follows. When a cover glass is inserted between the mirrors of a Fabry-Perot resonator, the optical distance of the resonator changes in response to the presence of defects in the cover glass, and the resonance frequency also changes. However, if the resonator length is swept by PZT only by the free spectral range (FSR), the resonator length can always satisfy the resonance condition. At this time, the presence of glass defects can be detected by capturing the intensity change of the spectrum.
【０００７】本発明によると、ガラスの欠陥の存在を検
出できる。すなわち本発明によると、透明、半透明を問
わず、ガラスの中の泡、ガラスの表面のゴミやホコリ、
ガラスの表面の傷といった、ガラスの欠陥の存在を検出
できる。According to the present invention, the presence of glass defects can be detected. That is, according to the present invention, whether transparent or translucent, bubbles in the glass, dust or dust on the surface of the glass,
The presence of glass defects, such as scratches on the glass surface, can be detected.
【０００８】ファブリペロー共振器が共振条件のときに
レーザ光を入射すると、レーザ光はファブリペロー共振
器内で反射を繰り返して透過する。共振器内に損失がな
ければ理想的に透過率は１００％である。ファブリペロ
ー共振器としてフィネス３００を用いると、光が約３０
０回反射を繰り返すと考えてよいこととなる。ガラスの
欠陥部分の損失は、ガラスの平均的な損失よりも大であ
るが、ガラスにレーザ光を１回だけ入射しても、レーザ
光の損失から泡の存在を知ることは困難である。しか
し、ファブリペロー共振器内で損失が増幅されることか
ら、泡の存在による透過率のコントラストが増幅され
る。これによって、ガラスの欠陥の存在、この場合ガラ
スの泡の存在、を確実に検出することができる。When laser light is incident when the Fabry-Perot resonator is in a resonance condition, the laser light is repeatedly reflected and transmitted in the Fabry-Perot resonator. If there is no loss in the resonator, the transmittance is ideally 100%. When Finesse 300 is used as a Fabry-Perot resonator, light is about 30
It can be considered that the reflection is repeated 0 times. The loss of the defective portion of the glass is larger than the average loss of the glass, but even if the laser light is incident on the glass only once, it is difficult to know the existence of bubbles from the loss of the laser light. However, since the loss is amplified in the Fabry-Perot resonator, the transmission contrast due to the presence of bubbles is amplified. This makes it possible to reliably detect the presence of glass defects, in this case the presence of glass bubbles.
【０００９】さらに本発明によると、スキャン画像を重
ねることで、洗浄等によって容易に取り除けるガラスの
表面のホコリと、洗浄等によっても取り除けないガラス
の中の泡とを識別、検出し、ガラスの本質的な欠陥の存
在を検出することが可能になる。Further, according to the present invention, by overlapping the scan images, the dust on the surface of the glass which can be easily removed by washing or the like and the bubbles in the glass which cannot be removed by washing or the like are identified and detected, and the essence of glass It becomes possible to detect the presence of a specific defect.
【００１０】実験例
波長７８０ｎｍ、線幅３００ｋＨｚで発振する半導体レ
ーザを使用する。また、レーザ光の高次モードを落して
共振器との干渉度を上げるために、シングルモードファ
イバーを空間フィルターとして用いる。さらに、ファブ
リペロー共振器とモードマッチングするように波面を合
わせる。これはファブリペロー共振器内に励起する他の
横モードを抑え、基本モードの透過率を落さないためで
ある。ファブリペロー共振器に用いるミラーの反射率
は、９７．１％である。ミラーの間隔は、間に物体を入
れる都合上、１０ｍｍに設定した。Experimental Example A semiconductor laser oscillating at a wavelength of 780 nm and a line width of 300 kHz is used. In addition, a single mode fiber is used as a spatial filter in order to drop higher order modes of laser light and increase the degree of interference with the resonator. Furthermore, the wavefront is matched so as to be mode-matched with the Fabry-Perot resonator. This is because other transverse modes excited in the Fabry-Perot resonator are suppressed and the transmittance of the fundamental mode is not reduced. The reflectivity of the mirror used for the Fabry-Perot resonator is 97.1%. The distance between the mirrors was set to 10 mm in order to put an object in between.
【００１１】ガラスの欠陥の存在検出
ファブリペロー共振器のミラー間にガラスを挿入する。
このときＰＺＴの振り幅をＦＳＲに合わせ、オシロスコ
ープの画面に常にスペクトルが１つだけ立つように検出
時間を設定する。Presence Detection of Glass Defects Glass is inserted between the mirrors of a Fabry-Perot resonator.
At this time, the swing width of the PZT is adjusted to the FSR, and the detection time is set so that only one spectrum will always stand on the screen of the oscilloscope.
【００１２】ガラスを自動微動台にマウントし、ガラス
をスキャンした時の透過光強度を測定する。得られたデ
ータはデジタルオシロスコープにセーブし、コンピュー
タで解析する。ガラスを洗剤で洗い、よく水で流す。表
面に着いた水滴は炭酸ガスで丁寧に吹き飛ばす。ガラス
を微動台にマウントし、再びガラスの同じ部分をスキャ
ンする。さらに、ガラスを同じ方法で洗浄し同じ部分を
スキャンする。ガラスのスキャンは、３回繰り返し、各
々についてスキャンによる各部の透過強度を表すスキャ
ン画像を得る。The glass is mounted on an automatic fine movement table, and the transmitted light intensity when the glass is scanned is measured. The obtained data is saved in a digital oscilloscope and analyzed by a computer. Wash the glass with detergent and rinse well with water. Water drops on the surface are carefully blown off with carbon dioxide. Mount the glass on the tremor and scan the same piece of glass again. Further, the glass is cleaned in the same manner and the same part is scanned. The scan of the glass is repeated three times, and a scan image showing the transmission intensity of each part by the scan is obtained for each.
【００１３】ガラスの１回目〜３回目のスキャンによる
各部の透過強度を表すスキャン画像をコンピュータ上で
重ねる。Scanned images showing the transmission intensities of the respective parts by the first to third scanning of the glass are overlaid on the computer.
【００１４】図１は、ガラスの１回目のスキャンによる
各部の透過強度を表すスキャン画像、図２は、ガラスの
２回目のスキャンによる各部の透過強度を表すスキャン
画像、図３は、ガラスの３回目のスキャンによる各部の
透過強度を表すスキャン画像である。図４は、ガラスの
１回目〜３回目のスキャンによる各部の透過強度を表す
スキャン画像を重ねたものである。FIG. 1 is a scan image showing the transmission intensity of each part by the first scan of glass, FIG. 2 is a scan image showing the transmission intensity of each part by the second scan of glass, and FIG. It is a scan image showing the transmission intensity of each part by the second scan. FIG. 4 is a superposition of scan images showing the transmission intensities of the respective portions in the first to third scans of the glass.
【００１５】図１〜図３のスキャン画像において、それ
ぞれ、泡もしくはホコリがあると思われる場所が他の部
分より暗くなっている。１枚だけのスキャン画像では、
ホコリと泡との区別はつきにくい。In the scan images of FIGS. 1 to 3, the places where bubbles or dust are supposed to be present are darker than the other portions. With only one scan image,
It is difficult to distinguish dust from bubbles.
【００１６】図４のスキャン画像において、３枚のスキ
ャン画像を重ねることにより、泡ははっきりと現れ、逆
にホコリの部分はぼやける。In the scan image of FIG. 4, by superimposing the three scan images, bubbles clearly appear, and conversely, the dust portion is blurred.
【図１】ガラスの１回目のスキャンによる各部の透過強
度を表すスキャン画像である。FIG. 1 is a scan image showing the transmission intensity of each part in a first scan of glass.
【図２】ガラスの２回目のスキャンによる各部の透過強
度を表すスキャン画像である。FIG. 2 is a scan image showing the transmission intensity of each part by the second scan of glass.
【図３】ガラスの３回目のスキャンによる各部の透過強
度を表すスキャン画像である。FIG. 3 is a scan image showing the transmission intensity of each part by the third scan of glass.
【図４】ガラスの１回目〜３回目のスキャンによる各部
の透過強度を表すスキャン画像を重ねたものである。FIG. 4 is a superimposition of scan images showing the transmission intensities of respective portions in the first to third scans of glass.
Claims (4)
して透過光強度を検出し、透過光強度の変化からガラス
の欠陥の存在を読み取ることを特徴とする、ガラスの欠
陥を検出する方法。1. A method for detecting glass defects, which comprises inserting glass into a Fabry-Perot resonator to detect transmitted light intensity, and reading the presence of glass defects from changes in transmitted light intensity.
カバーガラスであることを特徴とする請求項１に記載の
方法。2. The method according to claim 1, wherein the glass is a cover glass such as glass for liquid crystal displays.
表面のホコリとガラスの中の泡とを識別、検出し、ガラ
スの本質的な欠陥の存在を検出することを特徴とする請
求項１又は２に記載の方法。3. The overlapped scan image is used to identify and detect dust on the surface of the glass and bubbles in the glass to detect the presence of an essential defect in the glass. The method described in 2.
ペロー共振器であることを特徴とする請求項１〜３のい
ずれか１項に記載の方法。4. The method according to claim 1, wherein the Fabry-Perot resonator is a confocal Fabry-Perot resonator.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001393662A JP2003194736A (en) | 2001-12-26 | 2001-12-26 | Detecting method for defect of glass |
| PCT/JP2002/013033 WO2003056315A1 (en) | 2001-12-26 | 2002-12-12 | Method of detecting defect of glass |
| AU2002367198A AU2002367198A1 (en) | 2001-12-26 | 2002-12-12 | Method of detecting defect of glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001393662A JP2003194736A (en) | 2001-12-26 | 2001-12-26 | Detecting method for defect of glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003194736A true JP2003194736A (en) | 2003-07-09 |
Family
ID=19188793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001393662A Pending JP2003194736A (en) | 2001-12-26 | 2001-12-26 | Detecting method for defect of glass |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2003194736A (en) |
| AU (1) | AU2002367198A1 (en) |
| WO (1) | WO2003056315A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105717137A (en) * | 2016-01-27 | 2016-06-29 | 中国建筑材料科学研究总院 | Silica-glass micro-defect detecting method |
| JP2019095670A (en) * | 2017-11-24 | 2019-06-20 | 浜松ホトニクス株式会社 | Method for removing foreign matter and manufacturing method of light detecting device |
| CN110658210A (en) * | 2019-10-09 | 2020-01-07 | 湖南工学院 | Impurity detection method for mirror glass |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58193404A (en) * | 1982-05-07 | 1983-11-11 | Furukawa Electric Co Ltd:The | Method for measuring fiber length by fiber fabry perot interferometer |
| JP2698314B2 (en) * | 1994-03-31 | 1998-01-19 | 日本無線株式会社 | Optical gas analyzer |
| JP2001311697A (en) * | 2000-04-28 | 2001-11-09 | Advantest Corp | Method and apparatus for measurement of surface state |
-
2001
- 2001-12-26 JP JP2001393662A patent/JP2003194736A/en active Pending
-
2002
- 2002-12-12 WO PCT/JP2002/013033 patent/WO2003056315A1/en active Application Filing
- 2002-12-12 AU AU2002367198A patent/AU2002367198A1/en not_active Abandoned
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105717137A (en) * | 2016-01-27 | 2016-06-29 | 中国建筑材料科学研究总院 | Silica-glass micro-defect detecting method |
| JP2019095670A (en) * | 2017-11-24 | 2019-06-20 | 浜松ホトニクス株式会社 | Method for removing foreign matter and manufacturing method of light detecting device |
| US11294170B2 (en) | 2017-11-24 | 2022-04-05 | Hamamatsu Photonics K.K. | Method for removing foreign matter and method for manufacturing optical detection device |
| TWI817960B (en) * | 2017-11-24 | 2023-10-11 | 日商濱松赫德尼古斯股份有限公司 | Foreign matter removal method and method of manufacturing light detection device |
| CN110658210A (en) * | 2019-10-09 | 2020-01-07 | 湖南工学院 | Impurity detection method for mirror glass |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003056315A1 (en) | 2003-07-10 |
| AU2002367198A1 (en) | 2003-07-15 |
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