JP2003134733A5 - - Google Patents
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- JP2003134733A5 JP2003134733A5 JP2001318218A JP2001318218A JP2003134733A5 JP 2003134733 A5 JP2003134733 A5 JP 2003134733A5 JP 2001318218 A JP2001318218 A JP 2001318218A JP 2001318218 A JP2001318218 A JP 2001318218A JP 2003134733 A5 JP2003134733 A5 JP 2003134733A5
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- motor
- electromagnet
- magnetic bearing
- magnetic
- rotating body
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Description
【0011】
【課題を解決するための手段】
このような従来技術における問題点を解決するために、本発明の第1の態様は、回転体を回転駆動するモータと上記回転体を回転自在に支持する複数の能動型ラジアル磁気軸受とを備えた磁気軸受モータであって、上記能動型ラジアル磁気軸受は、固定側に設けられた電磁石と、上記回転体の回転軸に取付けられた磁性材料からなる電磁石ターゲットとを備え、少なくとも1つの能動型ラジアル磁気軸受の上記電磁石ターゲットを上記電磁石に対して軸方向にずらして配置して第1の軸力を生じさせ、他の能動型ラジアル磁気軸受の上記電磁石ターゲットを上記電磁石に対して、上記少なくとも1つの能動型ラジアル軸受の電磁石ターゲットをずらした方向とは反対の方向にずらして配置して、上記第1の軸力とは反対方向の軸力を生じさせることを特徴としている。[0011]
[Means for Solving the Problems]
In order to solve such problems in the prior art, a first aspect of the present invention comprises a motor for rotationally driving a rotor and a plurality of active radial magnetic bearings for rotatably supporting the rotor. A magnetic bearing motor , wherein the active radial magnetic bearing comprises an electromagnet provided on the fixed side and an electromagnet target made of a magnetic material attached to the rotation shaft of the rotating body, at least one active type The electromagnet target of the radial magnetic bearing is disposed axially offset with respect to the electromagnet to generate a first axial force, and the electromagnet target of the other active radial magnetic bearing is applied to the electromagnet with respect to the electromagnet. The electromagnet target of one active radial bearing is disposed in a direction opposite to the direction in which the electromagnet target is offset to produce an axial force in the direction opposite to the first axial force. It is characterized in that.
【0013】
本発明の第2の態様は、回転体を回転駆動するモータと前記回転体を回転自在に支持する複数の能動型ラジアル磁気軸受とを備えた磁気軸受モータであって、上記能動型ラジアル磁気軸受は、固定側に設けられた電磁石と、上記回転体の回転軸に取付けられた電磁石ターゲットとを備え、2つ以上の能動型ラジアル磁気軸受の上記電磁石ターゲットを上記電磁石に対して軸方向に沿って同一の方向にずらして配置して第1の軸力を生じさせ、上記第1の軸力とは反対方向の軸力を生じさせるアクチュエータを設けたことを特徴としている。[0013]
A second aspect of the present invention, there is provided a magnetic bearing motor that includes a plurality of active radial magnetic bearings for rotatably supporting the motor and the rotating body for rotating the rotary member, the active radial magnetic bearings Is provided with an electromagnet provided on the fixed side and an electromagnet target attached to the rotation shaft of the rotating body, and the electromagnet target of two or more active radial magnetic bearings extends in the axial direction with respect to the electromagnet An actuator is provided which is disposed in the same direction to generate a first axial force and to generate an axial force in a direction opposite to the first axial force.
【0015】
本発明の第3の態様は、回転体を回転駆動するモータと前記回転体を回転自在に支持する複数の能動型ラジアル磁気軸受とを備えた磁気軸受モータであって、上記モータは、固定側に設けられたモータステータと、上記回転体の回転軸に取付けられたモータロータとを備え、上記モータのモータロータを上記モータステータに対して軸方向にずらして配置して第1の軸力を生じさせ、上記第1の軸力とは反対方向の軸力を生じさせるアクチュエータを設けたことを特徴としている。[0015]
A third aspect of the present invention, there is provided a magnetic bearing motor that includes a plurality of active radial magnetic bearings for rotatably supporting the motor and the rotating body for rotating the rotary member, the motor is stationary And a motor rotor attached to the rotation shaft of the rotating body, the motor rotor of the motor being axially offset from the motor stator to generate a first axial force. An actuator is provided which generates an axial force in a direction opposite to the first axial force.
Claims (7)
前記能動型ラジアル磁気軸受は、固定側に設けられた電磁石と、前記回転体の回転軸に取付けられた磁性材料からなる電磁石ターゲットとを備え、
少なくとも1つの能動型ラジアル磁気軸受の前記電磁石ターゲットを前記電磁石に対して軸方向にずらして配置して第1の軸力を生じさせ、
他の能動型ラジアル磁気軸受の前記電磁石ターゲットを前記電磁石に対して、前記少なくとも1つの能動型ラジアル軸受の電磁石ターゲットをずらした方向とは反対の方向にずらして配置して、前記第1の軸力とは反対方向の軸力を生じさせることを特徴とする磁気軸受モータ。 A magnetic bearing motor that includes a plurality of active radial magnetic bearings for rotatably supporting the motor and the rotating body for rotating the rotary member,
The active radial magnetic bearing includes an electromagnet provided on a fixed side, and an electromagnet target made of a magnetic material attached to a rotation shaft of the rotating body,
Placing the electromagnet target of at least one active radial magnetic bearing axially offset relative to the electromagnet to produce a first axial force;
The electromagnet target of another active radial magnetic bearing is offset from the electromagnet in a direction opposite to the offset direction of the electromagnet target of the at least one active radial bearing, and the first shaft is arranged. Magnetic bearing motor characterized in that it generates an axial force in the opposite direction to the force.
前記能動型ラジアル磁気軸受は、固定側に設けられた電磁石と、前記回転体の回転軸に取付けられた電磁石ターゲットとを備え、
2つ以上の能動型ラジアル磁気軸受の前記電磁石ターゲットを前記電磁石に対して軸方向に沿って同一の方向にずらして配置して第1の軸力を生じさせ、
前記第1の軸力とは反対方向の軸力を生じさせるアクチュエータを設けたことを特徴とする磁気軸受モータ。 A magnetic bearing motor that includes a plurality of active radial magnetic bearings for rotatably supporting the motor and the rotating body for rotating the rotary member,
The active radial magnetic bearing includes an electromagnet provided on a fixed side, and an electromagnet target attached to a rotation shaft of the rotating body,
The electromagnet targets of two or more active radial magnetic bearings are arranged offset in the same direction along the axial direction with respect to the electromagnet to generate a first axial force.
A magnetic bearing motor comprising: an actuator generating an axial force in a direction opposite to the first axial force.
前記モータは、固定側に設けられたモータステータと、前記回転体の回転軸に取付けられたモータロータとを備え、
前記モータのモータロータを前記モータステータに対して軸方向にずらして配置して第1の軸力を生じさせ、
前記第1の軸力とは反対方向の軸力を生じさせるアクチュエータを設けたことを特徴とする磁気軸受モータ。 A magnetic bearing motor that includes a plurality of active radial magnetic bearings for rotatably supporting the motor and the rotating body for rotating the rotary member,
The motor includes a motor stator provided on a fixed side, and a motor rotor attached to a rotation shaft of the rotating body.
Placing a motor rotor of the motor axially offset relative to the motor stator to produce a first axial force;
A magnetic bearing motor comprising: an actuator generating an axial force in a direction opposite to the first axial force.
前記レーザ容器内に配置され、レーザ光の発振を可能とする放電を得るための一対の主放電電極と、
請求項1乃至5のいずれか一項に記載の磁気軸受モータとを備え、
前記磁気軸受モータの前記回転体を循環ファンとして用いて前記一対の主放電電極間に高速のレーザガス流を作り出すことを特徴とするエキシマレーザ装置。A laser container for sealing a laser gas;
A pair of main discharge electrodes disposed in the laser vessel for obtaining a discharge enabling oscillation of laser light;
A magnetic bearing motor according to any one of claims 1 to 5, comprising:
An excimer laser device characterized in that a high-speed laser gas flow is created between the pair of main discharge electrodes using the rotating body of the magnetic bearing motor as a circulation fan.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001318218A JP2003134733A (en) | 2001-10-16 | 2001-10-16 | Electromagnetic bearing motor and excimer laser apparatus using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001318218A JP2003134733A (en) | 2001-10-16 | 2001-10-16 | Electromagnetic bearing motor and excimer laser apparatus using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2003134733A JP2003134733A (en) | 2003-05-09 |
JP2003134733A5 true JP2003134733A5 (en) | 2004-12-02 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001318218A Pending JP2003134733A (en) | 2001-10-16 | 2001-10-16 | Electromagnetic bearing motor and excimer laser apparatus using the same |
Country Status (1)
Country | Link |
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JP (1) | JP2003134733A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102016004714A1 (en) * | 2016-04-19 | 2017-10-19 | Saurer Germany Gmbh & Co. Kg | Spinning rotor shaft, bearing assembly for the active magnetic bearing of such Spinnrotorschafts and spinning rotor drive means |
-
2001
- 2001-10-16 JP JP2001318218A patent/JP2003134733A/en active Pending
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