JP2003109724A - PLATE HEATER MADE OF MoSi2 AND ITS MANUFACTURING METHOD - Google Patents
PLATE HEATER MADE OF MoSi2 AND ITS MANUFACTURING METHODInfo
- Publication number
- JP2003109724A JP2003109724A JP2001304950A JP2001304950A JP2003109724A JP 2003109724 A JP2003109724 A JP 2003109724A JP 2001304950 A JP2001304950 A JP 2001304950A JP 2001304950 A JP2001304950 A JP 2001304950A JP 2003109724 A JP2003109724 A JP 2003109724A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- heater
- mosi
- shaped
- width direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/018—Heaters using heating elements comprising mosi2
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、ヒーターの集積性
が高く高温化及び温度制御が容易であり、また加熱時の
変形（あばれ）やショート等の故障が少なく、さらに低
コストで製造できるＭｏＳｉ２製板状ヒーター及びその
製造方法に関する。なお、本明細書で使用するＭｏＳｉ
２製板状ヒーターは、純ＭｏＳｉ２乃至ＭｏＳｉ２に絶
縁性酸化物等を含有させて電気抵抗を増加させたＭｏＳ
ｉ２主成分とするヒーターを含む。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention provides a MoSi which has a high degree of integration of heaters, facilitates high temperature and temperature control, has few defects such as deformation (flaking) and shorts during heating, and can be manufactured at low cost. (2) A plate-shaped heater and a manufacturing method thereof. Note that MoSi used in this specification
The plate-shaped heater made of 2 is MoS in which pure MoSi 2 or MoSi 2 contains an insulating oxide or the like to increase electric resistance.
A heater containing i 2 as a main component is included.
【０００２】[0002]
【従来の技術】二珪化モリブデン（ＭｏＳｉ２）を主成
分とするヒーターは、優れた耐酸化特性を有するため、
特に大気又は酸化性雰囲気下で使用する超高温ヒーター
として１９５０〜１９６０年頃から市販され、現在まで
幅広い用途で使用されている。このヒーターは主成分と
して、ＭｏＳｉ２を７０ｗｔ％以上含有している。従
来、ガラス工業やセラミックス焼成等の多くの分野で使
用されているヒーターは発熱部（なお、通常「発熱部」
は、通電時に主として発熱するヒーターの径が細い部分
（端子部以外）を意味する。）が１つのＵ字形を成す形
状（２シャンク型）をしており、炉の天井や側壁から宙
吊りに取付けられ、その炉の最高使用温度は１７００〜
１８５０°Ｃに達する。 2. Description of the Related Art Since a heater containing molybdenum disilicide (MoSi 2 ) as a main component has excellent oxidation resistance,
In particular, it has been commercially available since 1950 to 1960 as an ultra-high temperature heater used in the air or an oxidizing atmosphere, and has been used in a wide range of applications up to the present. This heater contains 70 wt% or more of MoSi 2 as a main component. Conventionally, the heater used in many fields such as the glass industry and ceramics firing has a heating part (normally, a "heating part").
Means a portion (other than the terminal portion) having a small diameter of the heater which mainly generates heat when energized. ) Has a single U-shape (two-shank type), and is mounted suspended from the ceiling or side wall of the furnace, and the maximum operating temperature of the furnace is 1700 to 1700.
Reached 1850 ° C.
【０００３】最近、半導体デバイスの微細化及びデバイ
ス製造時間の短縮化と省エネルギー化に伴い、従来金属
発熱体が使用されていたＣＶＤ装置や拡散炉等の半導体
製造装置にＭｏＳｉ２を主成分とするヒーターが利用さ
れるようになってきた。ＭｏＳｉ２を主成分とするヒー
ターは優れた耐熱特性を有し、金属発熱体の約１０倍の
表面負荷が可能であり、また急速加熱昇温することがで
きる大きな特長を有する。一般に、半導体製造装置に使
用される熱処理炉は炉内の温度分布を厳密に制御するな
ど、非常に高精度な温度特性が要求される。Recently, with the miniaturization of semiconductor devices, the shortening of device manufacturing time, and the saving of energy, semiconductor devices such as CVD devices and diffusion furnaces, which have conventionally used metal heating elements, have MoSi 2 as a main component. Heaters have come to be used. The heater containing MoSi 2 as a main component has excellent heat resistance characteristics, has a surface load that is about 10 times that of a metal heating element, and has a great feature that it can be rapidly heated and heated. Generally, a heat treatment furnace used for a semiconductor manufacturing apparatus is required to have extremely high-precision temperature characteristics such as strictly controlling the temperature distribution in the furnace.
【０００４】ＭｏＳｉ２を主成分とするヒーターは、通
常図９に示すように、棒状のヒーター素材をＵ字形に曲
げ、その発熱部の両端に端子部を溶接したＵ字形ヒータ
ーが使用されている。図９においてＵ字形ヒーター３１
は発熱部３２、溶接部３３、グリップ（端子）部３４、
電極部３５からなる。しかし、この端子部は発熱部に比
べて温度低下が大きいので、上記のような精密な温度制
御が必要となる炉では、図１０に示すように、端子部を
減らすために同様に棒状のヒーター素材を曲げたＵ字形
の発熱部を多数連接した形状（マルチシャンク）のヒー
ターが提案されている。このような多数連接したヒータ
ーの形状は、炉の内外を貫通する端子部の数が減るので
該端子部から放熱する熱損失を減少させることができ、
炉の温度の均一化に一定の効果があると考えられてい
る。最近はヒーターの集積性を高め、かつ熱のコントロ
ールを正確にできるヒーターが求められている。ところ
が棒状のヒーター素材を曲げたヒーター又は溶接したヒ
ーターは加熱時の変形（あばれ）が生じ易く、曲げ部を
密にした場合はショート等の事故が発生するという問題
があった。したがって、集積性を高めた高精度のヒータ
ーを製造することは事実上難しいという問題があった。As a heater mainly composed of MoSi 2, as shown in FIG. 9, a U-shaped heater in which a rod-shaped heater material is bent into a U-shape and terminals are welded to both ends of the heat-generating portion is used. . In FIG. 9, a U-shaped heater 31
Is a heat generating part 32, a welding part 33, a grip (terminal) part 34,
It consists of the electrode part 35. However, since this terminal portion has a larger temperature drop than the heat generating portion, in a furnace that requires precise temperature control as described above, a rod-shaped heater is also used to reduce the terminal portion as shown in FIG. A heater having a shape (multi-shank) in which a large number of U-shaped heat generating portions formed by bending a material are connected to each other has been proposed. Such a shape of the heaters connected in series reduces the number of terminal portions penetrating the inside and outside of the furnace, so that heat loss radiated from the terminal portions can be reduced.
It is considered to have a certain effect on the homogenization of the furnace temperature. Recently, there has been a demand for a heater that can improve the integration of the heater and accurately control the heat. However, a heater formed by bending a rod-shaped heater material or a welded heater is apt to be deformed (flaking) during heating, and there is a problem that an accident such as a short circuit occurs when the bent portion is made dense. Therefore, there is a problem in that it is practically difficult to manufacture a highly accurate heater with high integration.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、ＭｏＳｉ２
製ヒーターを加熱装置の底壁、上壁、側壁等に密に設置
できるようにし、ショート等の事故がなく、精度良く加
熱できるＭｏＳｉ２製ヒーター及びその製造方法を提供
する。The present invention is based on MoSi 2
Provided are a heater made of MoSi 2 and a method for manufacturing the same, which enables a heater to be densely installed on a bottom wall, an upper wall, a side wall, and the like of a heating device without causing an accident such as a short circuit.
【０００６】[0006]
【課題を解決するための手段】上記の課題を解決するた
めに、本発明者らは鋭意研究の結果、ＭｏＳｉ２製ヒー
ターを板状にすることにより、集積度を高め、ショート
等の事故がなく、正確に温度コントロールすることがで
きるとの知見を得た。本発明はこの知見に基づき、
１．継ぎ目のない屈曲部を有するＭｏＳｉ２製板状ヒー
ターであって、各屈曲部は板状ヒーターの板幅方向に屈
曲していることを特徴とするＭｏＳｉ２製板状ヒーター
２．屈曲部は円弧状又は角形状であることを特徴とする
上記１記載のＭｏＳｉ２製板状ヒーター
３．継ぎ目のないＵ字形の連続波形を有するＭｏＳｉ２
製板状ヒーターであって、Ｕ字形の各波形は板状ヒータ
ーの板幅方向に湾曲していることを特徴とするＭｏＳｉ
２製板状ヒーター
４．板幅対厚さの比（板幅／厚さ）が２以上であること
を特徴とする上記１〜３のそれぞれに記載のＭｏＳｉ２
製板状ヒーター
５．板状ヒーターの端子部を発熱部よりも幅広にして給
電することを特徴とする上記１〜４のそれぞれに記載の
ＭｏＳｉ２製板状ヒーター
６．板状ヒーターの端子部の厚さを発熱部よりも肉厚と
して給電すること特徴とする上記１〜５のそれぞれに記
載のＭｏＳｉ２製板状ヒーター
７．板状ヒーターの発熱部を水冷機能付の金属電極によ
り直接チャックして給電することを特徴とする上記１〜
４のそれぞれに記載のＭｏＳｉ２製板状ヒーターを提供
する。In order to solve the above problems, the inventors of the present invention have earnestly studied, and as a result, by forming a MoSi 2 heater into a plate shape, the degree of integration is increased and an accident such as a short circuit occurs. Therefore, it was found that the temperature can be controlled accurately. The present invention is based on this finding. A MoSi 2 made plate-like heater having no bent portion seamless, each bend plate MoSi 2 made plate-like heater 2, characterized in that the heater is bent in the plate width direction. 2. The MoSi 2 plate-shaped heater according to 1 above, wherein the bent portion has an arc shape or a square shape. MoSi 2 with seamless U-shaped continuous waveform
MoSi, which is a plate-shaped heater, wherein each U-shaped waveform is curved in the plate width direction of the plate-shaped heater.
2. Plate heater 4. MoSi 2 according to each of the above 1 to 3, wherein the ratio of plate width to thickness (plate width / thickness) is 2 or more.
Plate-shaped heater 5. 5. The plate heater made of MoSi 2 according to each of the above 1 to 4, wherein the terminal portion of the plate heater is made wider than the heating portion to supply power. 7. The plate heater made of MoSi 2 according to each of the above 1 to 5, wherein power is supplied so that the terminal portion of the plate heater is thicker than the heating portion. 1 to 3, characterized in that the heating portion of the plate heater is directly chucked with a metal electrode having a water cooling function to supply power.
The plate heater made of MoSi 2 described in each of 4 is provided.
【０００７】本発明は、また
８．継ぎ目のない屈曲部を有するＭｏＳｉ２製板状ヒー
ターの製造方法であって、ヒーターの原料となるＭｏＳ
ｉ２粉をバインダーと混合し、この混合物を型に嵌め込
んで各屈曲部が板状ヒーターの板幅方向に屈曲する形状
に成型した後、この成型体を脱脂、一次焼結及び通電加
熱焼結することを特徴とする屈曲部が板状ヒーターの板
幅方向に屈曲したＭｏＳｉ２製板状ヒーターの製造方
法。
９．継ぎ目のないＵ字形の連続波形を有するＭｏＳｉ２
製板状ヒーターの製造方法であって、ヒーターの原料と
なるＭｏＳｉ２粉をバインダーと混合し、この混合物を
型に嵌め込んでＵ字形の各波形が板状ヒーターの板幅方
向に湾曲する形状に成型した後、この成型体を脱脂、一
次焼結及び通電加熱焼結することを特徴とするＵ字形の
各波形が板状ヒーターの板幅方向に湾曲したＭｏＳｉ２
製板状ヒーターの製造方法。を提供する。The present invention also relates to 8. A method for manufacturing a plate heater made of MoSi 2 having a seamless bent portion, wherein MoS used as a raw material for the heater.
i 2 powder is mixed with a binder, and the mixture is fitted into a mold to mold each bent portion into a shape bent in the plate width direction of the plate heater, and then the molded body is degreased, primary sintered, and electrically heated and baked. A method for manufacturing a plate heater made of MoSi 2 , wherein the bent portion is bent in the plate width direction of the plate heater. 9. MoSi 2 with seamless U-shaped continuous waveform
A method for manufacturing a plate-shaped heater, in which MoSi 2 powder, which is a raw material for the heater, is mixed with a binder, and the mixture is fitted into a mold so that each U-shaped waveform is curved in the plate width direction of the plate-shaped heater. After being molded into a compact, the compact is subjected to degreasing, primary sintering, and electric heating sintering, and each U-shaped corrugated MoSi 2 is curved in the plate width direction of the plate heater.
Manufacturing method of plate heater. I will provide a.
【０００８】[0008]
【発明の実施の形態】本発明のＭｏＳｉ２製板状ヒータ
ーを製造する際には、まずヒーターの原料となるＭｏＳ
ｉ２粉をバインダーと混合し、この混合物を例えば混練
後棒状にし、型に嵌め込んで板状にプレス成型する。前
記バインダーには熱可塑性樹脂を含有させて使用するこ
とが望ましい。バインダーに熱可塑性樹脂を含有させた
場合、特に成型後の強度（グリーン強度）が上がり、成
型精度を向上させたり、薄板の成型も可能となる。この
場合、棒状の混合物は塑造物であり、型の板状の窪みに
一致する容量又は若干多めに装填するだけで良い。プレ
ス成型した後の余剰のＭｏＳｉ２混合物は除去する。こ
こで重要な点は、各屈曲部は板状ヒーターの板幅方向に
屈曲する形状に成型することである。BEST MODE FOR CARRYING OUT THE INVENTION In manufacturing the MoSi 2 plate heater of the present invention, first, MoS as a raw material of the heater is used.
The i 2 powder is mixed with a binder, and the mixture is kneaded, for example, into a rod shape, fitted into a mold, and press-molded into a plate shape. It is desirable to use a thermoplastic resin contained in the binder. When a thermoplastic resin is contained in the binder, the strength (green strength) after molding is particularly increased, the molding accuracy is improved, and the thin plate can be molded. In this case, the rod-shaped mixture is a plastic product, and it suffices to load it in a volume corresponding to the plate-shaped recess of the mold or slightly larger amount. Excess MoSi 2 mixture after press molding is removed. An important point here is that each bent portion is formed into a shape that is bent in the plate width direction of the plate heater.
【０００９】成型方法として、いくつかの方法を挙げる
ことができる。その１として、ＭｏＳｉ２粉とバインダ
ーの混合粉末を型に充填して加熱プレス成型する方法、
その２として、ＭｏＳｉ２粉とバインダーの混合粉末を
混練して粘土状にし、これによって得られた混合物を型
に充填しプレス成型する方法、その３として、ＭｏＳｉ
２粉とバインダーの混合粉末を混練して、押出し成形し
た棒材を型に嵌め込み、プレス成型する方法等がある。
但し、熱可塑性のバインダーを使用する場合は、混練か
ら成型するまで、材料と型の温度を適宜調整する必要が
ある。本発明においては、いずれの方法を採用してもよ
く、成型する形状に応じて適宜選択して使用することが
できる。いずれの場合においても、基材内部に気泡等の
欠陥が残らないように充填し、成型することが望まし
い。次に、この成型体を脱脂、一次焼結及び通電加熱焼
結して屈曲部が板状ヒーターの板幅方向に屈曲したＭｏ
Ｓｉ２製板状ヒーターを作製する。As the molding method, several methods can be mentioned. As the first, a method of filling a mold with a mixed powder of MoSi 2 powder and a binder and performing hot press molding,
The second method is to knead a mixed powder of MoSi 2 powder and a binder to form a clay, and fill the mixture thus obtained in a mold and press-mold. As the third method, MoSi
There is a method of kneading a mixed powder of two powders and a binder, fitting an extruded bar into a mold, and press-molding.
However, when a thermoplastic binder is used, it is necessary to appropriately adjust the temperature of the material and the mold from kneading to molding. In the present invention, any method may be adopted and can be appropriately selected and used according to the shape to be molded. In any case, it is desirable to fill and mold the base material so that defects such as bubbles do not remain inside. Next, this molded body was subjected to degreasing, primary sintering, and electric heating sintering to obtain Mo having a bent portion bent in the plate width direction of the plate heater.
A plate heater made of Si 2 is produced.
【００１０】この屈曲部が板状ヒーターの板幅方向に屈
曲していることが重要であり、構造的にヒーターとして
の使用時に板の幅方向への変形は殆ど生じないという特
徴を有する。したがって、板状ヒーターの間隔を小さく
することができ、集積度を著しく高めることができる。
板状ヒーターの板幅対厚さの比（板幅／厚さ）は２以
上、好ましくは４以上であることが望ましい。この比が
大きい程、同じ厚みの板状ヒーターでは変形防止の効果
がある。このように集積度を高めたＭｏＳｉ２製板状ヒ
ーターは、加熱装置等の底壁、上壁、側壁等に密に設置
することができる。しかも、板幅方向への変形が殆どな
いのでショート等の事故がなく、ヒーターの集積度が高
いために、炉内温度分布の均一性をより効果的に高める
ことができる。It is important that the bent portion is bent in the plate width direction of the plate-shaped heater, and structurally, the plate is hardly deformed in the width direction when used as a heater. Therefore, the distance between the plate heaters can be reduced, and the degree of integration can be significantly increased.
It is desirable that the ratio of the plate width to the thickness of the plate heater (plate width / thickness) is 2 or more, preferably 4 or more. The larger this ratio, the more effective the plate heater having the same thickness is in preventing deformation. The MoSi 2 plate-shaped heater having such a high degree of integration can be densely installed on the bottom wall, the top wall, the side wall, etc. of the heating device or the like. Moreover, since there is almost no deformation in the plate width direction, there are no accidents such as a short circuit, and since the degree of integration of the heaters is high, the uniformity of the temperature distribution in the furnace can be improved more effectively.
【００１１】さらに、棒材と同じ電流密度でも、板状ヒ
ーターは熱処理する製品方向の発熱部の表面積が大きく
なるので、加熱効率を上げることができ、製品の均熱性
をより高めることができるという特長を有する。本発明
の板状ヒーターが連続波形を有する場合は、必ずしもＵ
字形ばかりでなく、底の浅いＵ字形、Ｖ字形あるいはサ
インカーブ状の波形にも形成でき、さらに波高を変える
こともできる。これらは単に屈曲の程度や長さを変える
ものであり、本発明のＵ字形の連続波形は、これらの波
形の全て包含するものである。板状ヒーターの断面形状
は必ずしも矩形（角が直角）である必要はなく、例えば
板状ヒーターの隅角部に丸みを付け（Ｒを付け）、成型
後に型から分離（離型）し易い形状にすることができ
る。また、板状ヒーターの断面の全体形状を、楕円形
状、半円形状、トラック形状等にしても良い。本発明の
板状ヒーターの断面形状に特に制限はなく、上記の形状
等、いずれも使用することができる。Further, even if the current density is the same as that of the bar material, the plate heater has a large surface area of the heat generating portion in the direction of the product to be heat treated, so that the heating efficiency can be improved and the uniform heat distribution of the product can be further improved. Has features. When the plate heater of the present invention has a continuous waveform, it is not always U.
Not only the letter shape but also a shallow U-shape, V-shape or sine curve shape can be formed, and the wave height can be changed. These simply change the degree and length of bending, and the U-shaped continuous waveform of the present invention includes all of these waveforms. The cross-sectional shape of the plate heater does not necessarily have to be rectangular (corner is right angle), and for example, the corner of the plate heater is rounded (R is attached) and easily separated (released) from the mold after molding. Can be The overall shape of the cross section of the plate heater may be elliptical, semicircular, track-shaped, or the like. The sectional shape of the plate heater of the present invention is not particularly limited, and any of the above shapes and the like can be used.
【００１２】本発明の板状ヒーターを使用する場合、重
要なのは給電方法、特に端子部の構造である。板状ヒー
ターの発熱部に対して、給電する端子部の温度を十分に
下げる必要がある。このため本発明は、板状ヒーターの
端子部を発熱部よりも幅広にして給電するか、又は板状
ヒーターの端子部の厚さを発熱部よりも肉厚として給電
する。これによって、端子部の断面積を増加させ抵抗を
下げることによって、端子部の加熱を抑制する。また、
上記に替えて、板状ヒーターの発熱部を水冷機能付の金
属電極により直接チャックして給電することもできる。
本発明においては、これらの給電方法をヒーターによる
加熱条件に応じて任意に選択し、実施できる。さらに、
板状ヒーターの端子部又は端子部近傍の発熱部を断熱性
及び絶縁性を有する材料で固定することが望ましい。こ
れによって、端子等の接触による事故を効果的に防止す
ることができる。When the plate heater of the present invention is used, what is important is the power supply method, particularly the structure of the terminal portion. It is necessary to sufficiently lower the temperature of the terminal portion for supplying power to the heat generating portion of the plate heater. Therefore, according to the present invention, power is supplied by making the terminal portion of the plate heater wider than the heat generating portion or by making the terminal portion of the plate heater thicker than the heat generating portion. This increases the cross-sectional area of the terminal portion and lowers the resistance, thereby suppressing heating of the terminal portion. Also,
Instead of the above, the heating portion of the plate heater may be directly chucked by a metal electrode having a water cooling function to supply power.
In the present invention, these power supply methods can be arbitrarily selected and implemented according to the heating conditions by the heater. further,
It is desirable to fix the terminal portion of the plate heater or the heat generating portion near the terminal portion with a material having a heat insulating property and an insulating property. As a result, it is possible to effectively prevent accidents due to contact with terminals and the like.
【００１３】[0013]
【実施例】次に、本発明の平板状ＭｏＳｉ２製板状ヒー
ターの具体例を図面に沿って説明する。なお、以下の実
施例は、発明が容易に理解できるように、好適な例を示
すことが目的であり、これらの実施例に制限されるもの
ではない。すなわち、本発明の技術思想に基づく変形又
は他の例は当然本発明に包含されるものである。EXAMPLES Next, specific examples of the plate-shaped MoSi 2 plate heater of the present invention will be described with reference to the drawings. It should be noted that the following examples are intended to show preferred examples so that the invention can be easily understood, and are not limited to these examples. That is, modifications and other examples based on the technical idea of the present invention are naturally included in the present invention.
【００１４】（実施例１）図１に、左右対称にＳ字形を
連接し、全体として一つの円の中にほぼ均等に納まるよ
うにした形状のＭｏＳｉ２製板状ヒーターの例を示す。
このヒーター１の発熱部２の板幅は１０ｍｍ、板厚１．
８ｍｍ、Ｓ字形の間隔は６ｍｍとした。ヒーター１の発
熱部２の両端は、図の下方向に平行に延びており、この
先端に端子部３を取付ける。端子部３は温度を下げる必
要があるので、図１のように発熱部２との接合部から次
第に幅を広げ、例えば幅２０ｍｍの幅広の端子部３とす
ることができる。端子部３の幅は発熱部２の幅の２倍と
なっている。但し、この場合、発熱部２と端子部３の厚
さは同一である。この両方の端子部３、３を、図２に示
すようにアルミナ等の耐熱性及び絶縁性を有する材料４
で固定し、通電性を向上させるために、その先端にアル
ミニウム溶射５を施すことができる。これをさらに図３
に示すように、ケーブル７に接続するホルダー６でチャ
ックし通電できる構造とすることができる。(Embodiment 1) FIG. 1 shows an example of a MoSi 2 plate heater in which S-shapes are connected symmetrically to each other so that they are substantially evenly accommodated in one circle as a whole.
The plate width of the heat generating part 2 of the heater 1 is 10 mm, and the plate thickness is 1.
The distance between the S-shaped portions was 8 mm and the distance between the S-shaped portions was 6 mm. Both ends of the heat generating portion 2 of the heater 1 extend parallel to the lower direction of the figure, and the terminal portion 3 is attached to the tip thereof. Since it is necessary to lower the temperature of the terminal portion 3, it is possible to gradually widen the width from the joint portion with the heat generating portion 2 as shown in FIG. 1 to form the wide terminal portion 3 having a width of 20 mm, for example. The width of the terminal portion 3 is twice the width of the heat generating portion 2. However, in this case, the heating portion 2 and the terminal portion 3 have the same thickness. As shown in FIG. 2, the both terminal portions 3 and 3 are made of a material 4 having heat resistance and insulation such as alumina.
The aluminum spraying 5 can be applied to the tip of the aluminum alloy to fix it and improve the electrical conductivity. This is further illustrated in FIG.
As shown in FIG. 5, the holder 6 connected to the cable 7 can be chucked and energized.
【００１５】（実施例２）図４に、左右対称にほぼ半円
毎に屈曲を反転させ、全体として一つの円の中にほぼ均
等に納まるようにした形状のＭｏＳｉ２製板状ヒーター
の例を示す。このヒーター１１の発熱部１２の板幅は５
ｍｍ、板厚１．５ｍｍ、間隔は６ｍｍとした。ヒーター
１１の発熱部１２の両端は、図の下方向に平行に延びて
おり、この先端に端子部１３を取付ける。端子部１３は
温度を下げる必要があるので、図５のように発熱部１２
の両側に、例えば同一の幅５ｍｍ、板厚１．５ｍｍの板
を重ね合せて端子部１３とすることができる。端子部１
３の厚さは発熱部１２の厚さの３倍となっている。但
し、この場合、発熱部１２と端子部１３の幅は同一であ
る。この両方の端子部１３、１３を、図６に示すように
アルミナ等の耐熱性及び絶縁性を有する材料１４、１４
で固定する。実施例１と同様に、通電性を向上させるた
めにその先端にアルミニウム溶射１５を施すことができ
る。図７は耐熱性及び絶縁性を有する材料１４で固定し
た端子部１３、１３の断面を示す。これをさらに、例え
ば前記図３と同様に、ケーブルに接続するホルダーでチ
ャックし通電できる構造とする。(Embodiment 2) FIG. 4 shows an example of a plate heater made of MoSi 2 having a shape in which the bending is symmetrically reversed in every semicircle so that it is substantially evenly accommodated in one circle as a whole. Indicates. The plate width of the heat generating portion 12 of the heater 11 is 5
mm, the plate thickness was 1.5 mm, and the interval was 6 mm. Both ends of the heat generating portion 12 of the heater 11 extend in parallel in the downward direction of the drawing, and the terminal portion 13 is attached to the tip thereof. Since it is necessary to lower the temperature of the terminal portion 13, as shown in FIG.
A plate having the same width of 5 mm and a plate thickness of 1.5 mm can be stacked on both sides to form the terminal portion 13. Terminal part 1
The thickness of 3 is three times the thickness of the heat generating portion 12. However, in this case, the heating portion 12 and the terminal portion 13 have the same width. As shown in FIG. 6, the both terminals 13 and 13 are made of a material 14 and 14 having heat resistance and insulation such as alumina.
Fix with. Similar to the first embodiment, aluminum spray coating 15 can be applied to the tip of the aluminum alloy to improve conductivity. FIG. 7 shows a cross section of the terminal portions 13, 13 fixed with a material 14 having heat resistance and insulation. As in the case of FIG. 3, for example, this is made to have a structure in which a holder connected to a cable can be chucked to conduct electricity.
【００１６】（実施例３）図８に、左右対称に白鳥が向
い合ったような形状の、全体として一つの円の中にほぼ
均等に納まるようにした形状のＭｏＳｉ２製板状ヒータ
ーの例を示す。このヒーター２１の発熱部２２の板幅は
２０ｍｍ、板厚２．４ｍｍ、板の間隔は１０ｍｍとし
た。ヒーター２１の発熱部２２の両端は、図の中央から
紙の裏面側に平行に突出している。この先端を水冷機能
付の金属電極２３で直接チャックし通電できる構造とす
る。符号２４はヒーター２１の支持台を、符号２５は水
冷管を、符号２６は給電ケーブルを示す。(Embodiment 3) FIG. 8 shows an example of a MoSi 2 plate heater having a shape such that the swans are symmetrically opposed to each other, and the shape of which is such that they are substantially evenly accommodated in one circle as a whole. Indicates. The heat generating portion 22 of the heater 21 has a plate width of 20 mm, a plate thickness of 2.4 mm, and a plate interval of 10 mm. Both ends of the heat generating portion 22 of the heater 21 project in parallel from the center of the drawing to the back side of the paper. The tip of this is directly chucked by the metal electrode 23 with a water cooling function so that the current can be applied. Reference numeral 24 indicates a support of the heater 21, reference numeral 25 indicates a water cooling pipe, and reference numeral 26 indicates a power supply cable.
【００１７】[0017]
【発明の効果】本発明のＭｏＳｉ２製板状ヒーターは、
加熱装置等の底壁、上壁、側壁等に密に設置することが
でき、ヒーターとしての使用時に変形がなく、幅方向の
短絡等による電気的ショート等の事故が防止でき、これ
によって炉の均熱性を高めることができ、温度コントロ
ールが容易になるという優れた効果を有する。The plate heater made of MoSi 2 of the present invention is
It can be installed densely on the bottom wall, top wall, side wall, etc. of the heating device, etc., it does not deform when used as a heater and it can prevent accidents such as electrical short circuit due to short circuit in the width direction. It has an excellent effect that the soaking property can be enhanced and the temperature can be easily controlled.
【図１】左右対称にＳ字形を連接し、全体として一つの
円の中にほぼ均等に納まるようにした実施例１に示すＭ
ｏＳｉ２製板状ヒーターの説明図である。FIG. 1 shows the M shown in the first embodiment in which S-shapes are connected symmetrically so that they are substantially evenly accommodated in one circle as a whole.
oSi is an explanatory view of a two-made plate-like heater.
【図２】端子部をアルミナ等の耐熱性及び絶縁性を有す
る材料で固定した構造を示す斜視図である。FIG. 2 is a perspective view showing a structure in which a terminal portion is fixed with a material having heat resistance and insulation such as alumina.
【図３】端子部をケーブルに接続するホルダーでチャッ
クした構造の断面説明図である。FIG. 3 is a cross-sectional explanatory diagram of a structure in which a terminal portion is chucked by a holder that is connected to a cable.
【図４】左右対称にほぼ半円毎に屈曲を反転させ、全体
として一つの円の中にほぼ均等に納まるようにした実施
例２に示すＭｏＳｉ２製板状ヒーターの説明図である。FIG. 4 is an explanatory diagram of a MoSi 2 plate-shaped heater according to a second embodiment, in which the bending is symmetrically inverted about every semi-circle so that it is substantially evenly accommodated in one circle as a whole.
【図５】発熱部の両側に、同一の幅の板を重ね合せた端
子部の斜視図である。FIG. 5 is a perspective view of a terminal portion in which plates having the same width are superposed on both sides of the heat generating portion.
【図６】両方の端子部をアルミナ等の耐熱性及び絶縁性
を有する材料で固定した構造の説明図である。FIG. 6 is an explanatory diagram of a structure in which both terminal portions are fixed with a material having heat resistance and insulation such as alumina.
【図７】耐熱性及び絶縁性を有する材料で固定した端子
部の断面を示す図である。FIG. 7 is a view showing a cross section of a terminal portion fixed with a material having heat resistance and insulation.
【図８】左右対称に白鳥が向い合ったような形状を有
し、全体として一つの円の中にほぼ均等に納まるように
した実施例３のＭｏＳｉ２製板状ヒーターの説明図であ
る。FIG. 8 is an explanatory diagram of a MoSi 2 plate-shaped heater of Example 3 which has a shape such that swans face each other symmetrically, and is substantially evenly accommodated in one circle as a whole.
【図９】Ｕ字形発熱部の両側に端子を溶接した従来のＵ
字形ヒーターの説明図である。FIG. 9: Conventional U in which terminals are welded to both sides of the U-shaped heat generating part
It is explanatory drawing of a character-shaped heater.
【図１０】従来のＵ字形ヒーター部材を連接して、炉の
内部に弧状ヒーターを取付ける場合の様子を示す説明図
である。FIG. 10 is an explanatory diagram showing a state in which a conventional U-shaped heater member is connected and an arc-shaped heater is mounted inside the furnace.
１、１１、２１ ヒーター ２、１２、２２ 発熱部 ３、１３ 端子部 ４、１４ 耐熱性及び絶縁性を有する材料 ５、１５ アルミニウム溶射 ６ ホルダー ７、２６ 給電ケーブル ２３ 水冷機能付の金属電極 ２４ ヒーターの支持台 ２５ 水冷管 1, 11, 21 heater 2,12,22 Heat generating part 3, 13 Terminal part 4, 14 Material with heat resistance and insulation 5,15 Aluminum spraying 6 holder 7,26 power supply cable 23 Metal electrode with water cooling function 24 Heater support 25 water cooling tube
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3K034 AA04 AA16 HA03 HA10 JA10 3K092 PP20 QA05 QB11 QB45 QC21 RF03 RF11 VV34 ─────────────────────────────────────────────────── ─── Continued front page F term (reference) 3K034 AA04 AA16 HA03 HA10 JA10 3K092 PP20 QA05 QB11 QB45 QC21 RF03 RF11 VV34
Claims (9)
製板状ヒーターであって、各屈曲部は板状ヒーターの板
幅方向に屈曲していることを特徴とするＭｏＳｉ２製板
状ヒーター。1. A MoSi 2 having a seamless bend.
Form-plate-shaped heaters, MoSi 2 made plate-like heater which each bent portion is characterized by being bent in the plate width direction of the plate-like heater.
特徴とする請求項１記載のＭｏＳｉ２製板状ヒーター。 2. The plate heater made of MoSi 2 according to claim 1, wherein the bent portion has an arc shape or a square shape.
ＭｏＳｉ２製板状ヒーターであって、Ｕ字形の各波形は
板状ヒーターの板幅方向に湾曲していることを特徴とす
るＭｏＳｉ２製板状ヒーター。3. A MoSi 2 made plate-like heater having a continuous waveform of a seamless U-shaped, each waveform of the U-shaped, characterized in that curved in the plate width direction of the plate-shaped heater MoSi 2 Plate-shaped heater.
であることを特徴とする請求項１〜３のそれぞれに記載
のＭｏＳｉ２製板状ヒーター。4. The plate-shaped heater made of MoSi 2 according to each of claims 1 to 3, wherein the ratio of plate width to thickness (plate width / thickness) is 2 or more.
広にして給電することを特徴とする請求項１〜４のそれ
ぞれに記載のＭｏＳｉ２製板状ヒーター。5. The MoSi 2 plate heater according to each of claims 1 to 4, wherein the terminal portion of the plate heater is made wider than the heating portion to supply power.
りも肉厚として給電すること特徴とする請求項１〜５の
それぞれに記載のＭｏＳｉ２製板状ヒーター。6. The MoSi 2 plate heater according to each of claims 1 to 5, wherein the plate heater is fed with a thickness of a terminal portion thicker than that of the heat generating portion.
属電極により直接チャックして給電することを特徴とす
る請求項１〜４のそれぞれに記載のＭｏＳｉ ２製板状ヒ
ーター。7. The heat generating portion of the plate heater is made of gold with a water cooling function.
Characterized by direct chucking with a metal electrode for power supply
MoSi according to each of claims 1 to 4. TwoPlate-shaped
Data.
製板状ヒーターの製造方法であって、ヒーターの原料と
なるＭｏＳｉ２粉をバインダーと混合し、この混合物を
型に嵌め込んで各屈曲部が板状ヒーターの板幅方向に屈
曲する形状に成型した後、この成型体を脱脂、一次焼結
及び通電加熱焼結することを特徴とする屈曲部が板状ヒ
ーターの板幅方向に屈曲したＭｏＳｉ２製板状ヒーター
の製造方法。8. MoSi 2 having a seamless bend.
A method for manufacturing a plate-shaped heater, wherein MoSi 2 powder, which is a raw material for the heater, is mixed with a binder, the mixture is fitted into a mold, and each bent portion is bent into a plate width direction of the plate heater. After that, the molded body is degreased, primary-sintered, and electrically heated and sintered. A method for manufacturing a MoSi 2 plate-shaped heater having a bent portion bent in the plate width direction of the plate-shaped heater.
ＭｏＳｉ２製板状ヒーターの製造方法であって、ヒータ
ーの原料となるＭｏＳｉ２粉をバインダーと混合し、こ
の混合物を型に嵌め込んでＵ字形の各波形が板状ヒータ
ーの板幅方向に湾曲する形状に成型した後、この成型体
を脱脂、一次焼結及び通電加熱焼結することを特徴とす
るＵ字形の各波形が板状ヒーターの板幅方向に湾曲した
ＭｏＳｉ２製板状ヒーターの製造方法。9. A method for manufacturing a plate heater made of MoSi 2 having a seamless U-shaped continuous waveform, wherein MoSi 2 powder, which is a raw material of the heater, is mixed with a binder, and the mixture is fitted into a mold. Each U-shaped corrugation is characterized in that after each U-shaped corrugation is molded into a shape that curves in the plate width direction of the plate-shaped heater, this molded body is degreased, primary sintered and electrically heated and sintered. A method for manufacturing a MoSi 2 plate-shaped heater that is curved in the plate width direction of the heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001304950A JP3947661B2 (en) | 2001-10-01 | 2001-10-01 | MoSi2 plate heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001304950A JP3947661B2 (en) | 2001-10-01 | 2001-10-01 | MoSi2 plate heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003109724A true JP2003109724A (en) | 2003-04-11 |
| JP3947661B2 JP3947661B2 (en) | 2007-07-25 |
Family
ID=19124807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001304950A Expired - Fee Related JP3947661B2 (en) | 2001-10-01 | 2001-10-01 | MoSi2 plate heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3947661B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010216665A (en) * | 2009-03-13 | 2010-09-30 | Honda Motor Co Ltd | Preform heating device |
| JP2017134968A (en) * | 2016-01-27 | 2017-08-03 | Ｊｘ金属株式会社 | ELECTRICAL HEATING ELEMENT COMPOSED OF MoSi2 AND METHOD OF MANUFACTURING ELECTRICAL HEATING ELEMENT |
| CN108601116A (en) * | 2018-06-12 | 2018-09-28 | 广东省新材料研究所 | A kind of MoSi2 bases electro-thermal coatings heating roller and preparation method thereof |
| JP2022501008A (en) * | 2018-09-21 | 2022-01-06 | 深▲ゼン▼麦克韋尓科技有限公司Shenzhen Smoore Technology Limited | Heating type smoking equipment and its heating unit |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5586916B2 (en) * | 2009-10-20 | 2014-09-10 | Ｊｘ日鉱日石金属株式会社 | MoSi2 heating element and method of manufacturing the same |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6251183A (en) * | 1985-08-28 | 1987-03-05 | 株式会社デンソー | Manufacture of ceramic heater |
| JPS62208586A (en) * | 1986-03-08 | 1987-09-12 | 東京エレクトロン相模株式会社 | Heater |
| JPS63307682A (en) * | 1987-06-09 | 1988-12-15 | Tokai Kounetsu Kogyo Kk | Far infrared ray heater |
| JPH03208861A (en) * | 1990-01-12 | 1991-09-12 | Sumitomo Electric Ind Ltd | Superconducting material molding and production thereof |
| JPH07296951A (en) * | 1994-04-27 | 1995-11-10 | Nippon Kouatsu Electric Co | Ceramic heater |
| JPH09137945A (en) * | 1995-09-12 | 1997-05-27 | Ngk Spark Plug Co Ltd | Ceramic heater, ceramic glow plug and manufacture thereof |
| JPH10324571A (en) * | 1997-05-23 | 1998-12-08 | Riken Corp | Molybdenum disilicide ceramic heat generating body and its production |
| JP2000164324A (en) * | 1998-11-24 | 2000-06-16 | Sakaguchi Dennetsu Kk | Water cooled electrode |
| JP2000340349A (en) * | 1999-05-28 | 2000-12-08 | Kyocera Corp | Ceramic heater |
| JP2001071368A (en) * | 1999-09-08 | 2001-03-21 | Nippon Shokubai Co Ltd | Production of artificial slate and artificial slate |
-
2001
- 2001-10-01 JP JP2001304950A patent/JP3947661B2/en not_active Expired - Fee Related
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6251183A (en) * | 1985-08-28 | 1987-03-05 | 株式会社デンソー | Manufacture of ceramic heater |
| JPS62208586A (en) * | 1986-03-08 | 1987-09-12 | 東京エレクトロン相模株式会社 | Heater |
| JPS63307682A (en) * | 1987-06-09 | 1988-12-15 | Tokai Kounetsu Kogyo Kk | Far infrared ray heater |
| JPH03208861A (en) * | 1990-01-12 | 1991-09-12 | Sumitomo Electric Ind Ltd | Superconducting material molding and production thereof |
| JPH07296951A (en) * | 1994-04-27 | 1995-11-10 | Nippon Kouatsu Electric Co | Ceramic heater |
| JPH09137945A (en) * | 1995-09-12 | 1997-05-27 | Ngk Spark Plug Co Ltd | Ceramic heater, ceramic glow plug and manufacture thereof |
| JPH10324571A (en) * | 1997-05-23 | 1998-12-08 | Riken Corp | Molybdenum disilicide ceramic heat generating body and its production |
| JP2000164324A (en) * | 1998-11-24 | 2000-06-16 | Sakaguchi Dennetsu Kk | Water cooled electrode |
| JP2000340349A (en) * | 1999-05-28 | 2000-12-08 | Kyocera Corp | Ceramic heater |
| JP2001071368A (en) * | 1999-09-08 | 2001-03-21 | Nippon Shokubai Co Ltd | Production of artificial slate and artificial slate |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010216665A (en) * | 2009-03-13 | 2010-09-30 | Honda Motor Co Ltd | Preform heating device |
| JP2017134968A (en) * | 2016-01-27 | 2017-08-03 | Ｊｘ金属株式会社 | ELECTRICAL HEATING ELEMENT COMPOSED OF MoSi2 AND METHOD OF MANUFACTURING ELECTRICAL HEATING ELEMENT |
| CN108601116A (en) * | 2018-06-12 | 2018-09-28 | 广东省新材料研究所 | A kind of MoSi2 bases electro-thermal coatings heating roller and preparation method thereof |
| CN108601116B (en) * | 2018-06-12 | 2020-12-18 | 广东省新材料研究所 | MoSi 2-based electrothermal coating heating roller and preparation method thereof |
| JP2022501008A (en) * | 2018-09-21 | 2022-01-06 | 深▲ゼン▼麦克韋尓科技有限公司Shenzhen Smoore Technology Limited | Heating type smoking equipment and its heating unit |
| JP7263405B2 (en) | 2018-09-21 | 2023-04-24 | 深▲せん▼麦克韋爾科技有限公司 | Heated smoking article and its heating unit |
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