JP2003100224A - Magnetron device - Google Patents
Magnetron deviceInfo
- Publication number
- JP2003100224A JP2003100224A JP2001285458A JP2001285458A JP2003100224A JP 2003100224 A JP2003100224 A JP 2003100224A JP 2001285458 A JP2001285458 A JP 2001285458A JP 2001285458 A JP2001285458 A JP 2001285458A JP 2003100224 A JP2003100224 A JP 2003100224A
- Authority
- JP
- Japan
- Prior art keywords
- anode cylinder
- anode
- pair
- cooling
- magnetron device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Microwave Tubes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、液体冷却方式のマ
グネトロン装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid cooling type magnetron device.
【０００２】[0002]
【従来の技術】近年、工業用マイクロ波加熱機器に用い
られる液体冷却方式のマグネトロン装置は小型高出力が
要求されている。以下に従来の液体冷却方式のマグネト
ロン装置について説明する。2. Description of the Related Art In recent years, liquid cooling type magnetron devices used in industrial microwave heating equipment have been required to have a small size and high output. A conventional liquid cooling type magnetron device will be described below.
【０００３】図４は、例えば特開平４−２８４３３４号
公報で開示されている従来の液体冷却方式のマグネトロ
ン装置の断面図である。図４（ａ）において、陰極部１
はマグネトロン装置の中心部に配設されている。陽極円
筒２とこの陽極円筒の中心軸から内周面に向かって放射
状に配設された複数のベイン３とで陽極部４が構成され
ている。陽極部４の管軸方向両端部に略同一形状ですり
鉢状の一対の磁極５と、これらの磁極５の両外側に一対
の環状永久磁石６が略同軸的に配置され、強磁性体金属
から成る一対の枠状継鉄７によって磁気回路が形成され
ている。陽極部４の外周には、液体冷却用の冷却ブロッ
ク８が配設され、ネジ等（図示せず）で締結されてい
る。図４（ｂ）に示すように、冷却ブロック８には冷却
液の注入口８ａと排出口８ｂとが設けられ、冷却ブロッ
ク８内の流通路９を冷却液が流れるようになっている。FIG. 4 is a sectional view of a conventional liquid cooling type magnetron device disclosed in, for example, Japanese Patent Laid-Open No. 4-284334. In FIG. 4A, the cathode part 1
Is disposed at the center of the magnetron device. The anode cylinder 4 and a plurality of vanes 3 radially arranged from the central axis of the anode cylinder toward the inner peripheral surface constitute an anode portion 4. A pair of mortar-shaped magnetic poles 5 having substantially the same shape and a pair of annular permanent magnets 6 on both outer sides of the magnetic poles 5 are coaxially arranged on both ends of the anode portion 4 in the tube axis direction. A magnetic circuit is formed by the pair of frame-shaped yokes 7. A cooling block 8 for cooling the liquid is arranged on the outer periphery of the anode portion 4 and is fastened with a screw or the like (not shown). As shown in FIG. 4B, the cooling block 8 is provided with an inlet 8 a and an outlet 8 b for the cooling liquid, and the cooling liquid flows through the flow passage 9 in the cooling block 8.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら上記従来
の構成では、冷却ブロック８を別途製作し、マグネトロ
ンの陽極円筒の外面に嵌合させてネジ締め固定させる構
成のため、装置が大型になるばかりでなく、マグネトロ
ン装置の陽極部外壁に面接触させるため密着精度が高く
ないと部分的に隙間ができて陽極部からの熱伝導が悪く
なるといったような課題を有していた。However, in the above-mentioned conventional structure, the cooling block 8 is separately manufactured, and the cooling block 8 is fitted on the outer surface of the anode cylinder of the magnetron and fixed by screwing. Therefore, the apparatus is not only large in size. However, since the surface contact is made with the outer wall of the anode part of the magnetron device, if the adhesion accuracy is not high, there is a problem that a gap is partially formed and heat conduction from the anode part deteriorates.
【０００５】本発明は上記従来の課題を解決するもの
で、冷却効率が高く、しかも製作が容易な小型の液体冷
却方式のマグネトロン装置を提供することを目的とす
る。The present invention solves the above-mentioned conventional problems, and an object thereof is to provide a small-sized liquid cooling type magnetron device which has a high cooling efficiency and is easy to manufacture.
【０００６】[0006]
【課題を解決するための手段】この課題を解決するため
に本発明のマグネトロン装置は、陰極部と、陽極円筒と
この陽極円筒の中心軸から内周面に向かって放射状に配
設された複数のベインとよりなる陽極部と、陽極部の管
軸方向両端部に設けられた一対の磁極と、これらの磁極
の両端に配設された一対の環状永久磁石と、一対の環状
永久磁石間を連結して磁気回路を形成する強磁性体から
なる一対の枠状継鉄とを具備し、陽極円筒に液体冷却注
入用透孔を一体に形成すると共に、陽極円筒の両端側に
液体冷却注入用透孔に一対のリング状封止体を配設させ
た構成を有している。In order to solve this problem, the magnetron device of the present invention comprises a cathode portion, an anode cylinder, and a plurality of radially arranged radially extending from the central axis of the anode cylinder toward the inner peripheral surface. A vane of a vane, a pair of magnetic poles provided at both ends of the anode in the tube axial direction, a pair of annular permanent magnets arranged at both ends of these magnetic poles, and between the pair of annular permanent magnets. A pair of frame-shaped yokes made of ferromagnetic material that are connected to each other to form a magnetic circuit, and a through hole for liquid cooling injection is integrally formed in the anode cylinder, and liquid cooling injection is provided on both end sides of the anode cylinder. It has a configuration in which a pair of ring-shaped sealing bodies are arranged in the through holes.
【０００７】この構成により、陽極部が直接冷却媒体で
冷却されるため冷却効率が高くなる。With this structure, the anode portion is directly cooled by the cooling medium, so that the cooling efficiency is increased.
【０００８】また、前記液体冷却注入用透孔がマグネト
ロンの中心軸方向と平行な複数の透孔で構成されてい
る。Further, the liquid cooling injection through holes are constituted by a plurality of through holes parallel to the central axis direction of the magnetron.
【０００９】また、前記リング状封止体が中空又は溝加
工されている。したがって液体冷却注入用透孔を一体に
形成された陽極円筒およびリング状封止体は押し出し加
工で容易に製作することができるといったような作用を
有する。The ring-shaped sealing body is hollow or grooved. Therefore, the anode cylinder and the ring-shaped sealing body, which are integrally formed with the liquid cooling injection hole, have the function of being easily manufactured by extrusion.
【００１０】[0010]
【発明の実施の形態】以下本発明の一実施の形態につい
て、図面を参照しながら説明する。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings.
【００１１】図１は本発明のマグネトロン装置の断面
図、図２及び図３は本発明によるマグネトロン装置の要
部断面斜視図を示し、従来例と同一構成要素には同一符
号が付してあり、構成要件の説明は省略する。FIG. 1 is a sectional view of a magnetron device according to the present invention, and FIGS. 2 and 3 are sectional perspective views of essential parts of the magnetron device according to the present invention. The same components as those in the conventional example are designated by the same reference numerals. The description of the constituent requirements is omitted.
【００１２】図１において、陽極部を構成する陽極円筒
１０は、その両端部に段差部１１が形成されている。例
えば、陽極円筒１０の外径Ｄ１に対して両端部の外径を
Ｄ２としたとき、Ｄ１＞Ｄ２となるように形成されてい
る。また、両端部の外径Ｄ２の高さＨ１は、陽極円筒１
０の全高Ｈの１／４を超えない寸法に形成されている。
図２に示すように、陽極円筒１０の両端部の外径Ｄ２の
肉厚部分、即ち（Ｄ１−Ｄ２）／２の肉厚部１２には
（Ｄ１−Ｄ２）／２よりも小さい幅の開口寸法Ｔ１で形
成された複数本の透孔１３が陽極円筒１０の中心軸と平
行な方向に略等間隔に穿設されている。この透孔は断面
形状が円形でも楕円形或いは矩形であっても良い。ま
た、図１及び図３（ａ）、（ｂ）に示されるように、外
径が陽極円筒１０の外径Ｄ１と略同一寸法に内径が陽極
円筒１０外径Ｄ２と略同一寸法に高さが陽極円筒１０の
両端部外径Ｄ２の高さＨ１と略同一寸法にそれぞれ形成
されたリング状をなす一対の封止体１４が陽極円筒１０
の両端部の段差部１１にそれぞれ配設されている。そし
て、封止体１４の両端面のうち一方の端面１５が肉厚部
１２に接触する側に透孔１３と略同一寸法の幅寸法Ｔ２
を備えた溝１６が透孔１３に対向するように円周状に連
続または部分的に形成されている。封止体１４の側面に
は、冷却液の流入・流出孔（図示せず）が穿設されてい
る。このように形成された陽極円筒１０の透孔１３に、
陽極部の発熱を冷却させるための冷却液（図示せず）が
注入されている。In FIG. 1, the anode cylinder 10 constituting the anode portion has stepped portions 11 formed at both ends thereof. For example, when the outer diameter of both ends of the anode cylinder 10 is D2 with respect to the outer diameter D1, D1> D2. Further, the height H1 of the outer diameter D2 at both ends is equal to that of the anode cylinder 1
It is formed in a size not exceeding 1/4 of the total height H of 0.
As shown in FIG. 2, an opening having a width smaller than (D1-D2) / 2 is formed in a thick portion having an outer diameter D2 at both ends of the anode cylinder 10, that is, a thick portion 12 having (D1-D2) / 2. A plurality of through holes 13 formed with the dimension T1 are provided at substantially equal intervals in a direction parallel to the central axis of the anode cylinder 10. The through hole may have a circular cross section, an elliptical cross section, or a rectangular cross section. Further, as shown in FIGS. 1 and 3A and 3B, the outer diameter is approximately the same as the outer diameter D1 of the anode cylinder 10 and the inner diameter is approximately the same as the outer diameter D2 of the anode cylinder 10. Is a pair of ring-shaped sealing bodies 14 each having substantially the same size as the height H1 of the outer diameter D2 at both ends of the anode cylinder 10.
Are provided at the stepped portions 11 at both ends of the. Then, the width dimension T2, which is substantially the same as the through hole 13, on the side where one end surface 15 of both end surfaces of the sealing body 14 contacts the thick portion 12.
A groove 16 provided with is formed continuously or partially in a circumferential shape so as to face the through hole 13. The side surface of the sealing body 14 is provided with inflow / outflow holes (not shown) for the cooling liquid. In the through hole 13 of the anode cylinder 10 thus formed,
A cooling liquid (not shown) for cooling the heat generation of the anode part is injected.
【００１３】陽極円筒１０は、素材に例えば無酸素銅が
用いられ、複数本の透孔１３と共に押し出し加工で製作
される。本実施形態では、直径７０〜１３０ｍｍ、長さ
３６０ｍｍの無酸素銅材を低周波誘導加熱炉で約８００
℃まで加熱し、５００ｔの押し出し圧力で流出成形した
後、所定寸法に切断加工することで所望の製品を得るこ
とができた。The anode cylinder 10 is made of, for example, oxygen-free copper as a material and is manufactured by extrusion together with a plurality of through holes 13. In the present embodiment, an oxygen-free copper material having a diameter of 70 to 130 mm and a length of 360 mm is used in a low frequency induction heating furnace for about 800.
It was possible to obtain a desired product by heating to 0 ° C., performing extrusion molding at an extrusion pressure of 500 t, and then cutting to a predetermined size.
【００１４】したがって本発明による陽極円筒は、押し
出し加工で極めて容易に製作することができ、陽極円筒
自身に冷却液が直接注入されることで冷却ブロックや冷
却パイプを陽極円筒に付加することよりも冷却効率が非
常に高くなる。Therefore, the anode cylinder according to the present invention can be manufactured extremely easily by extrusion, and rather than adding a cooling block or a cooling pipe to the anode cylinder by directly injecting the cooling liquid into the anode cylinder itself. Cooling efficiency is very high.
【００１５】[0015]
【発明の効果】以上詳述したように本発明は、陽極円筒
自体にマグネトロンの中心軸と平行な方向に複数本の透
孔が穿設され、この透孔に冷却液が注入される構成にし
たことにより、陽極円筒が直接冷却液で冷却されるため
冷却効率が非常に高くなるばかりでなく部品を削除させ
ることができたので、装置の小型軽量化が可能となっ
た。また、陽極円筒は引き抜き加工で容易に製作するこ
とができるといったような効果が得られる。As described in detail above, the present invention has a structure in which a plurality of through holes are formed in the anode cylinder itself in a direction parallel to the central axis of the magnetron, and the cooling liquid is injected into the through holes. As a result, since the anode cylinder is directly cooled by the cooling liquid, not only the cooling efficiency becomes very high but also parts can be deleted, so that the device can be made smaller and lighter. Further, the effect that the anode cylinder can be easily manufactured by drawing is obtained.
【図１】本発明のマグネトロン装置の断面図FIG. 1 is a sectional view of a magnetron device of the present invention.
【図２】本発明のマグネトロン装置の要部断面斜視図FIG. 2 is a cross-sectional perspective view of essential parts of the magnetron device of the present invention.
【図３】本発明のマグネトロン装置の要部断面斜視図FIG. 3 is a cross-sectional perspective view of essential parts of the magnetron device of the present invention.
【図４】従来の液体冷却方式のマグネトロン装置の断面
図FIG. 4 is a sectional view of a conventional liquid cooling type magnetron device.
１ 陰極部 ２ 陽極円筒 ３ ベイン ４ 陽極部 ５ 磁極 ６ 環状永久磁石 ７ 枠状継鉄 １０ 陽極円筒 １１ 段差部 １２ 肉厚部 １３ 透孔 １４ 封止体 １５ 端面 １６ 溝 Ｄ１ 陽極円筒の外径 Ｄ２ 両端部の外径 Ｈ 陽極円筒の全高 Ｈ１ 両端部の高さ Ｔ１ 透孔の開口寸法 Ｔ２ 溝幅寸法 1 Cathode part 2 anode cylinder 3 bain 4 Anode section 5 magnetic poles 6 annular permanent magnet 7 Frame-shaped yoke 10 Anode cylinder 11 Step 12 thick part 13 through holes 14 Sealed body 15 End face 16 grooves D1 Anode cylinder outer diameter D2 outer diameter of both ends H Total height of anode cylinder H1 height of both ends T1 Through hole opening size T2 groove width dimension
Claims (3)
心軸から内周面に向かって放射状に配設された複数のベ
インとよりなる陽極部と、前記陽極部の管軸方向両端部
に設けられた一対の磁極と、これらの磁極の両端に配設
された一対の環状永久磁石と、前記一対の環状永久磁石
間を連結して磁気回路を形成する強磁性体からなる一対
の枠状継鉄とを具備し、前記陽極円筒に液体冷却注入用
透孔を一体に形成すると共に、前記陽極円筒の両端側に
前記液体冷却注入用透孔に一対のリング状封止体を配設
させたことを特徴とするマグネトロン装置。1. An anode part comprising a cathode part, an anode cylinder, and a plurality of vanes radially arranged from the central axis of the anode cylinder toward the inner peripheral surface, and both ends of the anode part in the tube axis direction. A pair of magnetic poles provided on the magnetic poles, a pair of annular permanent magnets arranged at both ends of the magnetic poles, and a pair of frames made of a ferromagnetic material that connects the pair of annular permanent magnets to form a magnetic circuit. And a pair of ring-shaped sealing bodies are provided in the liquid cooling injection through holes on both ends of the anode cylinder while integrally forming a liquid cooling injection through hole in the anode cylinder. Magnetron device characterized by
の中心軸方向と平行な複数の透孔であることを特徴とす
る請求項１記載のマグネトロン装置。2. The magnetron device according to claim 1, wherein the liquid cooling injection through holes are a plurality of through holes parallel to the central axis direction of the magnetron.
れていることを特徴とする請求項１記載のマグネトロン
装置。3. The magnetron device according to claim 1, wherein the ring-shaped sealing body is hollow or grooved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001285458A JP2003100224A (en) | 2001-09-19 | 2001-09-19 | Magnetron device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001285458A JP2003100224A (en) | 2001-09-19 | 2001-09-19 | Magnetron device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003100224A true JP2003100224A (en) | 2003-04-04 |
Family
ID=19108606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001285458A Pending JP2003100224A (en) | 2001-09-19 | 2001-09-19 | Magnetron device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003100224A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100451231B1 (en) * | 2002-02-08 | 2004-10-02 | 엘지전자 주식회사 | Cooling apparatus for magnetron and plasma lighting apparatus with that |
| EP2871664A1 (en) * | 2013-11-07 | 2015-05-13 | Panasonic Intellectual Property Management Co., Ltd. | Magnetron |
| CN111430203A (en) * | 2020-04-20 | 2020-07-17 | 中国工程物理研究院应用电子学研究所 | Integrated refrigeration relativistic magnetron |
-
2001
- 2001-09-19 JP JP2001285458A patent/JP2003100224A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100451231B1 (en) * | 2002-02-08 | 2004-10-02 | 엘지전자 주식회사 | Cooling apparatus for magnetron and plasma lighting apparatus with that |
| EP2871664A1 (en) * | 2013-11-07 | 2015-05-13 | Panasonic Intellectual Property Management Co., Ltd. | Magnetron |
| CN104637756A (en) * | 2013-11-07 | 2015-05-20 | 松下知识产权经营株式会社 | Magnetron |
| US9208984B2 (en) | 2013-11-07 | 2015-12-08 | Panasonic Intellectual Property Management Co., Ltd. | Magnetron |
| CN111430203A (en) * | 2020-04-20 | 2020-07-17 | 中国工程物理研究院应用电子学研究所 | Integrated refrigeration relativistic magnetron |
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