JP2003060249A - Laminated piezoelectric ceramic - Google Patents
Laminated piezoelectric ceramicInfo
- Publication number
- JP2003060249A JP2003060249A JP2001240366A JP2001240366A JP2003060249A JP 2003060249 A JP2003060249 A JP 2003060249A JP 2001240366 A JP2001240366 A JP 2001240366A JP 2001240366 A JP2001240366 A JP 2001240366A JP 2003060249 A JP2003060249 A JP 2003060249A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric ceramic
- external
- external electrode
- laminated piezoelectric
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、加圧により電圧を
生じさせたり、電圧を加えて変位又は力を生じさせる積
層型圧電セラミックの構造に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a laminated piezoelectric ceramic which generates a voltage by pressurization or applies a voltage to generate a displacement or a force.
【０００２】[0002]
【従来の技術】まず、図４を参照して、従来の積層型圧
電セラミックについて概説する。積層型圧電セラミック
からの外部接続端子３の接続は、おのおのの外部電極２
上の１点から半田９により接続する技術が用いられてい
た。2. Description of the Related Art First, a conventional laminated piezoelectric ceramic will be outlined with reference to FIG. The connection of the external connection terminals 3 from the laminated piezoelectric ceramic is performed for each external electrode 2
The technique of connecting with the solder 9 from the above one point was used.
【０００３】[0003]
【発明が解決しようとする課題】図６を参照して概説す
る。従来は、積層型圧電セラミックの外部電極２上に半
田９により外部接続端子３の接続を行っていたため、積
層型圧電セラミックの電圧印加による変位に追従でき
ず、半田９の界面より圧電セラミック層６および外部電
極２に割れを生じさせ、外部接続端子３と外部電極２間
に電気的断線が発生する欠点がある。An overview will be given with reference to FIG. Conventionally, since the external connection terminal 3 is connected to the external electrode 2 of the laminated piezoelectric ceramic by the solder 9, the displacement of the laminated piezoelectric ceramic due to the voltage application cannot be followed, and the piezoelectric ceramic layer 6 is formed from the interface of the solder 9. Also, there is a drawback that the external electrode 2 is cracked and an electrical disconnection occurs between the external connection terminal 3 and the external electrode 2.
【０００４】また図８のように、内部電極膜５の一部を
形成しないことにより、内部電極膜５を対向電極とする
構造の場合、電圧印加による変位により、対向する内部
電極膜５の一部が形成されていない部分８と、対向する
内部電極膜５が形成されている部分に変位の違いが生
じ、その付近より内部電極膜５面と平行な方向に亀裂１
０が生じ、更に亀裂１０が外部電極２まで達して外部電
極２が断線し、変位量が低下してしまう欠点がある。Further, as shown in FIG. 8, in the structure where the internal electrode film 5 is not formed so that the internal electrode film 5 serves as a counter electrode, one of the internal electrode films 5 facing each other is displaced by a voltage application. A difference in displacement occurs between the portion 8 where the portion is not formed and the portion where the internal electrode film 5 which faces is displaced, and a crack 1 occurs in the direction parallel to the surface of the internal electrode film 5 from the vicinity thereof.
0 occurs, and further, the crack 10 reaches the external electrode 2 and the external electrode 2 is broken, and the displacement amount is reduced.
【０００５】したがって、本発明の課題は積層型圧電セ
ラミックの変位による接続部材９の界面から、圧電セラ
ミック層６および外部電極２に亀裂１０を生じさせ変位
量が低下してしまう事を防止する事である。Therefore, an object of the present invention is to prevent the amount of displacement from being reduced by causing cracks 10 in the piezoelectric ceramic layer 6 and the external electrode 2 from the interface of the connecting member 9 due to displacement of the laminated piezoelectric ceramic. Is.
【０００６】また、積層型圧電セラミック内に変位量の
差が生じることにより、圧電セラミック層６および外部
電極２に割れを生じさせ変位量が低下してしまう事を防
止する事である。Further, it is intended to prevent the displacement amount from being lowered due to a crack in the piezoelectric ceramic layer 6 and the external electrode 2 caused by the difference in the displacement amount in the laminated piezoelectric ceramic.
【０００７】[0007]
【課題を解決するための手段】本発明によれば、積層型
圧電セラミックの外部電極２と外部接続端子３を導電性
の緩衝部材４で接続することにより、積層型圧電セラミ
ックが変位した場合に、導電性の緩衝部材４が変位を吸
収するため、接続界面から外部電極２および圧電セラミ
ック層６に発生する亀裂１０を低減した積層型圧電セラ
ミックが得られる。According to the present invention, when the external electrode 2 of the laminated piezoelectric ceramic and the external connection terminal 3 are connected by the conductive buffer member 4, the laminated piezoelectric ceramic is displaced. Since the conductive buffer member 4 absorbs the displacement, a laminated piezoelectric ceramic in which cracks 10 generated in the external electrode 2 and the piezoelectric ceramic layer 6 from the connection interface are reduced can be obtained.
【０００８】また、本発明によれば、導電性の緩衝部材
４による外部接続端子３の接続が、外部電極２と接続さ
れているすべての内部電極５層上の、少なくとも積層方
向と平行する外部電極２の一部と接続されている事によ
り、圧電セラミック層６の亀裂により外部電極２に亀裂
１０が発生した場合であっても、亀裂１０によって分断
された外部電極２が、導電性の緩衝部材４を介して外部
接続端子３に接続されているため、外部電極２の電気的
断線は発生せず、変位量の低下をなくすことのできる積
層型圧電セラミックが得られる。Further, according to the present invention, the connection of the external connection terminal 3 by the conductive buffer member 4 is such that the external electrodes 2 on all the internal electrode 5 layers connected to the external electrodes 2 are at least parallel to the stacking direction. Even if the external electrode 2 is cracked by the crack of the piezoelectric ceramic layer 6 because it is connected to a part of the electrode 2, the external electrode 2 divided by the crack 10 has a conductive buffer. Since the external electrode 2 is connected to the external connection terminal 3 via the member 4, an electrical disconnection of the external electrode 2 does not occur, and a laminated piezoelectric ceramic capable of eliminating a decrease in displacement can be obtained.
【０００９】[0009]
【作用】本発明によれば、積層型圧電セラミックの外部
電極２と外部接続端子３との接続を導電性の緩衝部材４
で構成したことにより、積層型圧電セラミックの変位に
導電性の弾性部材４が追従できるため、外部電極２およ
び圧電セラミック層６に生ずる亀裂１０を抑制し、外部
電極２と外部接続端子３の断線を低減させた積層型圧電
セラミックが得られる。According to the present invention, the connection between the external electrode 2 of the laminated piezoelectric ceramic and the external connection terminal 3 is made of a conductive buffer member 4.
With this configuration, the conductive elastic member 4 can follow the displacement of the laminated piezoelectric ceramic, so that the crack 10 generated in the external electrode 2 and the piezoelectric ceramic layer 6 is suppressed, and the disconnection between the external electrode 2 and the external connection terminal 3 is suppressed. It is possible to obtain a laminated piezoelectric ceramic in which
【００１０】また、導電性の緩衝部材４による外部接続
端子３の接続が、外部電極２と接続されているすべての
内部電極５層上の、少なくとも積層方向と平行する外部
電極２の一部と接続されている事により、外部電極２に
亀裂１０が生じた場合であっても、電気的に断線する事
のない積層型圧電セラミックが得られる。Further, the connection of the external connection terminals 3 by the conductive buffer member 4 is carried out on all the internal electrode 5 layers connected to the external electrodes 2 and at least a part of the external electrodes 2 parallel to the stacking direction. Due to the connection, even if the external electrode 2 is cracked 10, a laminated piezoelectric ceramic that is not electrically disconnected can be obtained.
【００１１】[0011]
【実施の形態】以下に発明の実施の形態を、図面を参照
して更に説明する。Embodiments of the present invention will be further described below with reference to the drawings.
【００１２】図４は、従来技術の積層型圧電セラミック
の断面を示す図であり、圧電セラミックシートにＡｇ／
Ｐｄ系の内部電極層５を形成後、印刷した圧電セラミッ
クシートと、内部電極を印刷していない圧電セラミック
シートを目的積層構造となるように積層し、熱プレスに
より一体化し、その後、焼成を行っている。さらに、焼
成処理を行った焼成体は、機械加工による外形形状加工
により外形形状が断面１０ｍｍ×１０ｍｍ、積層方向長
さ２０ｍｍとなるように加工し、また内部電極層５が一
層おきに対向電極となるように絶縁層７を形成し、その
後、外部電極２を積層方向長さ１９．６ｍｍ、幅４ｍｍ
に銀電極にて形成を行っている。さらに、外部接続端子
３はリード線とし、外部電極２との接続は半田９により
行っている。FIG. 4 is a view showing a cross section of a conventional laminated piezoelectric ceramic, in which the piezoelectric ceramic sheet is made of Ag / Ag.
After forming the Pd-based internal electrode layer 5, the printed piezoelectric ceramic sheet and the piezoelectric ceramic sheet on which the internal electrodes are not printed are laminated so as to have a desired laminated structure, integrated by hot pressing, and then fired. ing. Further, the fired body that has been subjected to the firing treatment is machined to have an outer shape of 10 mm × 10 mm in cross section and a length of 20 mm in the stacking direction by the outer shape processing by machining, and the inner electrode layers 5 are arranged as opposite electrodes every other layer. The insulating layer 7 is formed so that the external electrode 2 is laminated in the stacking direction with a length of 19.6 mm and a width of 4 mm.
It is formed with a silver electrode. Further, the external connection terminal 3 is a lead wire, and the connection with the external electrode 2 is made by the solder 9.
【００１３】また、図１は本発明による実施の形態の斜
視図であり、図２は図１の断面を示す図である。図４の
積層型圧電セラミックと外部電極２形成までは同様の製
造方法により製造されており、その後、外部接続端子３
の接続には、銀を重量比率で７０％含有したシリコーン
４により行われている。FIG. 1 is a perspective view of an embodiment according to the present invention, and FIG. 2 is a view showing a cross section of FIG. The laminated piezoelectric ceramic shown in FIG. 4 and the external electrode 2 are formed by the same manufacturing method, and then the external connection terminal 3 is formed.
The connection is made with silicone 4 containing 70% by weight of silver.
【００１４】図１および図４の積層型圧電セラミックを
電圧印加０Ｖから２００Ｖの１００Ｈｚ、ｓｉｎ波にて
１０億回駆動し、その後の状況について調査を行った。
また、試験数量はおのおの２０ヶとした。The laminated piezoelectric ceramics shown in FIGS. 1 and 4 were driven 1 billion times at 100 Hz sin wave from 0 V to 200 V for voltage application, and the situation after that was investigated.
The test quantity was set to 20 each.
【００１５】 [0015]
【００１６】図６は図４に示す従来の積層型セラミック
の１０億回駆動後の外部電極２と外部接続端子３の接続
部９での断線状況を示す図であり、断線は接続部材であ
る半田９界面より外部電極２および圧電セラミック層６
に亀裂１０を生じさせ発生している。また、この亀裂１
０は図４の従来の積層型圧電セラミックの変位量低下品
すべてに確認された。また、本発明による図１の積層型
圧電セラミックでは亀裂１０は確認されなかった。FIG. 6 is a diagram showing a disconnection state at the connection portion 9 between the external electrode 2 and the external connection terminal 3 after driving the conventional multilayer ceramic shown in FIG. 4 1 billion times, and the disconnection is a connection member. External electrode 2 and piezoelectric ceramic layer 6 from the interface of solder 9
A crack 10 is generated in the crack. Also, this crack 1
0 was confirmed in all the displacement-reduced products of the conventional multilayer piezoelectric ceramic shown in FIG. No crack 10 was observed in the laminated piezoelectric ceramic of FIG. 1 according to the present invention.
【００１７】表１の結果および図６から、図１の本発明
での接続部のみ導電性の緩衝部材４とすることにより、
接続部での断線の発生を防止する事が確認された。From the results of Table 1 and FIG. 6, by using only the connecting portion of the present invention of FIG. 1 as the conductive buffer member 4,
It was confirmed that the occurrence of wire breakage at the connection part was prevented.
【００１８】図５は別の従来技術の積層型圧電セラミッ
クを示す図であり、図４の積層型圧電セラミックの製造
方法と比較し、内部電極５の形成を絶縁層７を形成しな
くても、内部電極５が一層おきに対向電極となるよう
に、一部を印刷しない内部電極構造とし、更に絶縁層７
を形成しない事を除き同様の製造方法にて製造されてい
る。FIG. 5 is a view showing another prior art laminated piezoelectric ceramic, which is different from the laminated piezoelectric ceramic manufacturing method of FIG. 4 in that the internal electrodes 5 are formed without forming the insulating layer 7. , An internal electrode structure in which a part of the internal electrodes 5 is not printed so that the internal electrodes 5 are opposite electrodes every other layer.
It is manufactured by the same manufacturing method except that no is formed.
【００１９】また、図３は本発明による別の実施の形態
を示す図であり、図５の積層型圧電セラミックと外部電
極２形成までは同様の製造方法により製造されており、
外部接続端子３の形状および接続位置が異なっている。
本実施の形態では、外部接続端子３は長さ３０ｍｍ，幅
４ｍｍ，厚み０．２ｍｍの銅板を使用している。また接
続は、銀を重量比率で７０％含有したシリコーン４を外
部電極２上全面に塗布し、更にその上に外部接続端子３
が位置する様に位置決め後、室温にて硬化し接続した。FIG. 3 is a diagram showing another embodiment according to the present invention, in which the laminated piezoelectric ceramic shown in FIG. 5 and the external electrode 2 are formed by the same manufacturing method.
The shape and connection position of the external connection terminal 3 are different.
In the present embodiment, the external connection terminal 3 uses a copper plate having a length of 30 mm, a width of 4 mm and a thickness of 0.2 mm. For connection, silicone 4 containing 70% by weight of silver is applied to the entire surface of the external electrode 2, and the external connection terminal 3 is further applied thereon.
Was positioned so that it was positioned, and then cured and connected at room temperature.
【００２０】図３および図５の積層型圧電セラミックを
電圧印加０Ｖから２００Ｖの１００Ｈｚｓｉｎ波にて１
０億回駆動し、その後の状況について調査を行った。ま
た、試験数量はおのおの２０ヶとした。The laminated piezoelectric ceramics shown in FIGS. 3 and 5 are applied with a 100 Hz sin wave of 0 V to 200 V for voltage application.
It was driven 0 billion times, and the situation after that was investigated. The test quantity was set to 20 each.
【００２１】 [0021]
【００２２】図８は図５に示す従来の積層型セラミック
の１０億回駆動後の外部電極２および圧電セラミック層
６の亀裂状況を示す図であり、また、図７は図３に示す
本発明での積層型圧電セラミックの１０億回駆動後の外
部電極２および圧電セラミック層６の亀裂１０状況を示
す図である。また、試験を行った積層型圧電セラミック
すべてに、図８および図７の亀裂１０が確認された。FIG. 8 is a view showing a cracked state of the external electrode 2 and the piezoelectric ceramic layer 6 of the conventional laminated ceramic shown in FIG. 5 after being driven 1 billion times, and FIG. 7 is a view showing the present invention shown in FIG. FIG. 10 is a diagram showing a situation 10 of cracks in the external electrode 2 and the piezoelectric ceramic layer 6 after driving the multilayer piezoelectric ceramic 1 billion times in FIG. Further, cracks 10 shown in FIGS. 8 and 7 were confirmed in all the laminated piezoelectric ceramics tested.
【００２３】表２の結果および図７、図８より、図３に
よる本発明での、導電性の緩衝部材４により外部接続端
子３の接続がされ、外部電極２と接続されているすべて
の内部電極５層の、少なくとも積層方向と平行する外部
電極２の一部と接続されている構造とすることにより、
圧電セラミック層６および外部電極２に亀裂１０が生じ
た場合でも導電性の緩衝部材４を介し、外部接続端子３
に接続されるため変位量の低下防止が可能であることが
確認できた。From the results of Table 2 and FIG. 7 and FIG. 8, all the insides of the present invention according to FIG. 3 where the external connection terminals 3 are connected by the conductive buffer member 4 and the external electrodes 2 are connected. By having a structure in which at least a part of the external electrode 2 parallel to the stacking direction of the five electrode layers is connected,
Even when a crack 10 is formed in the piezoelectric ceramic layer 6 and the external electrode 2, the external connection terminal 3 is connected through the conductive buffer member 4.
It was confirmed that it is possible to prevent the decrease of the displacement amount because it is connected to.
【００２４】[0024]
【発明の効果】本発明によれば、外部電極２と電気的に
接続される外部接続端子３を導電性の緩衝部材４により
接続したことにより、積層型圧電セラミックの変位に接
続部材９が追従できずに、接続部材９の界面より圧電セ
ラミック層６および外部電極２に亀裂１０が生じ、外部
電極２が断線することのない積層型圧電セラミックの提
供が可能となった。According to the present invention, since the external connection terminal 3 electrically connected to the external electrode 2 is connected by the conductive buffer member 4, the connection member 9 follows the displacement of the laminated piezoelectric ceramic. Without this, a crack 10 is generated in the piezoelectric ceramic layer 6 and the external electrode 2 from the interface of the connecting member 9, and it is possible to provide a laminated piezoelectric ceramic in which the external electrode 2 is not broken.
【００２５】また、本発明によれば、導電性の緩衝部材
４により外部接続端子３が接続され、さらに外部電極２
と接続されているすべての内部電極層の、少なくとも積
層方向と平行する外部電極２の一部と接続されている構
造とすることにより、圧電セラミック層６および外部電
極２に亀裂１０が生じても、導電性の緩衝部材４を介し
外部接続端子３に接続されるため、変位量の低下を防ぐ
ことができる積層型圧電セラミックの提供が可能となっ
た。Further, according to the present invention, the external connection terminal 3 is connected by the conductive buffer member 4, and the external electrode 2 is further connected.
Even if a crack 10 is generated in the piezoelectric ceramic layer 6 and the external electrode 2 by adopting a structure in which all the internal electrode layers connected to the external electrode 2 are connected to at least a part of the external electrodes 2 parallel to the stacking direction. Since it is connected to the external connection terminal 3 via the conductive cushioning member 4, it is possible to provide a laminated piezoelectric ceramic capable of preventing a decrease in displacement amount.
【００２６】また、導電性の弾性部材４がシリコーンま
たはエポキシ樹脂中に粒状または線状の導電材料を混入
した材料であることにより、積層型圧電セラミックの変
位に安定的に追従できる積層型圧電セラミックの提供が
可能となった。Further, since the conductive elastic member 4 is a material in which a granular or linear conductive material is mixed in silicone or epoxy resin, it is possible to stably follow the displacement of the multilayer piezoelectric ceramic. Can be provided.
【図１】本発明での積層型圧電セラミックを示す図であ
る。FIG. 1 is a diagram showing a laminated piezoelectric ceramic according to the present invention.
【図２】本発明での別の積層型圧電セラミックを示す図
であり、図１の断面を示す図である。FIG. 2 is a view showing another laminated piezoelectric ceramic according to the present invention, and is a view showing a cross section of FIG. 1.
【図３】本発明での別の形態の積層型圧電セラミックを
示す断面図である。FIG. 3 is a sectional view showing another embodiment of a laminated piezoelectric ceramic according to the present invention.
【図４】従来の積層型圧電セラミックを示す断面図であ
る。FIG. 4 is a cross-sectional view showing a conventional laminated piezoelectric ceramic.
【図５】図４とは異なる、従来の積層型圧電セラミック
を示す断面図である。FIG. 5 is a cross-sectional view showing a conventional laminated piezoelectric ceramic different from FIG.
【図６】図４に示す従来の積層型圧電セラミックを駆動
試験した後の断面を示す図である。FIG. 6 is a view showing a cross section after the drive test of the conventional laminated piezoelectric ceramic shown in FIG.
【図７】図３に示す本発明での積層型圧電セラミックを
駆動試験した後の断面を示す図である。FIG. 7 is a diagram showing a cross section of the laminated piezoelectric ceramic according to the present invention shown in FIG. 3 after a drive test.
【図８】図５に示す従来の積層型圧電セラミックを駆動
試験した後の断面を示す図である。FIG. 8 is a diagram showing a cross section of the conventional multilayer piezoelectric ceramic shown in FIG. 5 after a drive test.
１ 積層型圧電セラミック ２ 外部電極 ３ 外部接続端子 ４ 導電性の緩衝部材 ５ 内部電極 ６ 圧電セラミック層 ７ 絶縁層 ８ 内部電極の一部が形成されていない部分 ９ 従来の接続部材 １０ 駆動後の亀裂 1 Multilayer piezoelectric ceramic 2 external electrodes 3 External connection terminal 4 Conductive cushioning material 5 internal electrodes 6 Piezoelectric ceramic layer 7 Insulation layer 8 Part where internal electrodes are not partially formed 9 Conventional connection members 10 Cracks after driving
フロントページの続き (72)発明者 小椋 成実 兵庫県宍粟郡山崎町須賀沢231番地 トー キンセラミクス株式会社内Continued front page (72) Inventor Narumi Ogura 231 Sugazawa, Yamazaki-cho, Shiawasu-gun, Hyogo Prefecture Kinceramics Co., Ltd.
Claims (3)
層が２層以上となるよう積層した積層体と、この積層体
の側面に内部電極が１層おきに対向電極となるように絶
縁体層を形成または内部電極の一部を形成せずに圧電セ
ラミックの一部を絶縁体層とし、その上に外部電極を形
成した積層型圧電セラミックにおいて、前記外部電極と
電気的に接続される外部接続端子を導電性の緩衝部材に
より接続したことを特徴とする積層型圧電セラミック。1. A laminated body in which three or more piezoelectric ceramic layers and two or more internal electrode layers are laminated, and an insulator in which every other internal electrode is a counter electrode on a side surface of the laminated body. In a laminated piezoelectric ceramic in which a part of the piezoelectric ceramic is formed as an insulator layer without forming a layer or a part of the internal electrode, and an external electrode is formed thereon, an external electrode electrically connected to the external electrode. A laminated piezoelectric ceramic in which the connection terminals are connected by a conductive buffer member.
おいて、導電性の緩衝部材により外部接続端子が、少な
くとも積層方向と平行する前記外部電極と接続されてい
る事を特徴とする積層型圧電セラミック。2. The multilayer piezoelectric ceramic according to claim 1, wherein an external connection terminal is connected to at least the external electrode parallel to the stacking direction by a conductive buffer member. .
電セラミックにおいて、導電性の緩衝部材がシリコーン
またはエポキシ樹脂中に粒状または線状の導電材料を混
入した材料であることを特徴とする積層型圧電セラミッ
ク。3. The laminated piezoelectric ceramic according to claim 1 or 2, wherein the conductive buffer member is a material in which a granular or linear conductive material is mixed in silicone or epoxy resin. Multilayer piezoelectric ceramic.
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| JP2001240366A JP2003060249A (en) | 2001-08-08 | 2001-08-08 | Laminated piezoelectric ceramic |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001240366A JP2003060249A (en) | 2001-08-08 | 2001-08-08 | Laminated piezoelectric ceramic |
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| Publication Number | Publication Date |
|---|---|
| JP2003060249A true JP2003060249A (en) | 2003-02-28 |
Family
ID=19070989
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001240366A Pending JP2003060249A (en) | 2001-08-08 | 2001-08-08 | Laminated piezoelectric ceramic |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008095432A1 (en) * | 2007-02-01 | 2008-08-14 | Kunshan Pant Piezoelectric Tech Co., Ltd | Multilayer piezoelectric actuator for micro-displacement |
| WO2013114768A1 (en) * | 2012-01-30 | 2013-08-08 | 京セラ株式会社 | Laminated piezoelectric element, injection device provided with same, and fuel injection system |
| DE102005051066B4 (en) * | 2004-10-28 | 2013-10-17 | Tdk Corp. | Piezoelectric device with multiple layers |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05218519A (en) * | 1992-02-03 | 1993-08-27 | Nec Corp | Electrostrictive effect element |
| JP2002202024A (en) * | 2000-06-06 | 2002-07-19 | Denso Corp | Piezoelectric element for injector |
-
2001
- 2001-08-08 JP JP2001240366A patent/JP2003060249A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05218519A (en) * | 1992-02-03 | 1993-08-27 | Nec Corp | Electrostrictive effect element |
| JP2002202024A (en) * | 2000-06-06 | 2002-07-19 | Denso Corp | Piezoelectric element for injector |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005051066B4 (en) * | 2004-10-28 | 2013-10-17 | Tdk Corp. | Piezoelectric device with multiple layers |
| WO2008095432A1 (en) * | 2007-02-01 | 2008-08-14 | Kunshan Pant Piezoelectric Tech Co., Ltd | Multilayer piezoelectric actuator for micro-displacement |
| WO2013114768A1 (en) * | 2012-01-30 | 2013-08-08 | 京セラ株式会社 | Laminated piezoelectric element, injection device provided with same, and fuel injection system |
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