JP2003004572A - Assembling method of quadrupole section of partial pressure vacuum gauge - Google Patents
Assembling method of quadrupole section of partial pressure vacuum gaugeInfo
- Publication number
- JP2003004572A JP2003004572A JP2001234191A JP2001234191A JP2003004572A JP 2003004572 A JP2003004572 A JP 2003004572A JP 2001234191 A JP2001234191 A JP 2001234191A JP 2001234191 A JP2001234191 A JP 2001234191A JP 2003004572 A JP2003004572 A JP 2003004572A
- Authority
- JP
- Japan
- Prior art keywords
- partial pressure
- jig
- vacuum gauge
- quadrupole
- pressure vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は真空中の分圧ならびに全
圧を測定するセンサー四重極部の組立に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to assembly of a sensor quadrupole unit for measuring partial pressure and total pressure in a vacuum.
【０００２】[0002]
【従来の組立方法】従来より分圧真空計の心臓部である
四重極センサー部は各電極及び固定部を絶縁するととも
に高精度が要求され、図４に示される４本ロッド電極
内側の真円度、電極間の間隔、電極の平行度を高精度に
組み立てなければならない。このため従来は、図４に示
されるように精度よく切削加工された支持体の内側に
接地させた絶縁板を挟み、ネジにより電極ロッドを
固定する組立方法が採られている。2. Description of the Related Art Conventionally, a quadrupole sensor, which is the heart of a partial pressure vacuum gauge, insulates each electrode and a fixed part and requires high precision. As shown in FIG. The circularity, the distance between the electrodes, and the parallelism of the electrodes must be accurately assembled. For this reason, conventionally, as shown in FIG. 4, an assembling method has been adopted in which a grounded insulating plate is sandwiched inside a support body that is precisely cut, and an electrode rod is fixed by a screw.
【０００３】[0003]
【発明が解決しようとする課題】従来の方法では３／１
０００ｍｍ単位での精度を出すためには、、の各
部品を高精度に製作することはもちろん必要となるがこ
れら部品を組合せることにより組立後の製品誤差が重複
拡大する可能性がある。この調整方法として上下支持
体と電極ロッド間に挟む絶縁板の板厚を数種類準備
し、寸法の要求精度に合わせ絶縁板上下８枚の板厚
を選定しながら固定組立なければならない。この方法で
は１枚の絶縁板を変更すると電極ロッド４本間及び
それらの上下の平行度に変化が生じ、寸法を出すため
には数回の調整が必要になる場合も発生する。また、基
準となる各部品も高精度に製作しなければならず高価に
なることは避けられない。In the conventional method, 3/1 is used.
In order to obtain the accuracy in the unit of 000 mm, it is of course necessary to manufacture each of the parts with high accuracy, but by combining these parts, there is a possibility that the product error after assembly may be duplicated and expanded. As this adjustment method, it is necessary to prepare several kinds of insulating plate thicknesses sandwiched between the upper and lower supports and the electrode rods, and fix and assemble them while selecting the upper and lower insulating plate thicknesses in accordance with the required accuracy of dimensions. In this method, when one insulating plate is changed, the parallelism between the four electrode rods and in the vertical direction thereof changes, which may require adjustment several times to obtain the dimensions. In addition, each standard component must be manufactured with high precision, and inevitably becomes expensive.
【０００４】[0004]
【課題を解決するための手段】本発明の四重極組立方法
は、第１に高精度な組立治具を使用し、最初に電極ロ
ッド４本間の寸法精度上に配置して固定、しかる後、絶
縁体を介して支持体へ組み立てることを、第２に本来の
目的である電極精度を保ちつつ他の部品精度を緩和して
低価格化に繋げることを特徴とする。According to the quadrupole assembling method of the present invention, firstly, a highly accurate assembling jig is used, and firstly, it is arranged and fixed on the dimensional accuracy between the four electrode rods, and thereafter, it is fixed. Secondly, assembling on a support through an insulator is secondly characterized in that the precision of other parts is relaxed while maintaining the precision of electrodes, which is the original purpose, leading to cost reduction.
【０００５】[0005]
【作用】本発明において高精度な組立治具を用いて電
極ロッドを固定組み立てる方法として第１の特徴を備え
る場合は、上下対称に、要求される寸法位置に４本の凸
部ガイドピンを備え、垂直に可動する組立治具を製作す
る。電極ロッドの両端の同真円上に凹部ガイド穴を設
け、組立治具凸部ガイドピンに挿入固定する。これによ
り電極ロッド４本は要求寸法位置に配置される。配置
された電極ロッドは組立治具に固定したまま、絶縁体
をネジにより固定したのち支持体と絶縁体をネジにより
取り付け組み立てる。これにより組立治具の寸法精度に
より電極位置が維持される。第１の特徴に加えて第２の
特徴として主電極ロッド以外の絶縁、固定に使用され
る、部品の面精度以外の寸法精度は大幅に緩和され
る。第１の特徴により組立治具の精度により電極ロッ
ド間の精度は決定されることになり、調整作業、作業の
習熟度は不要になるとともに短時間での組立が可能にな
る。In the present invention, when the first feature is provided as the method for fixing and assembling the electrode rod by using the highly accurate assembling jig, the four convex guide pins are provided at the required dimensional positions symmetrically in the vertical direction. , Manufacture a vertically movable assembly jig. A concave guide hole is provided on the same circle at both ends of the electrode rod, and is inserted and fixed in the convex jig guide pin of the assembly jig. As a result, the four electrode rods are arranged at the required size positions. While the fixed electrode rod is fixed to the assembly jig, the insulator is fixed with screws, and then the support and the insulator are attached with screws to assemble. Thereby, the electrode position is maintained by the dimensional accuracy of the assembly jig. In addition to the first characteristic, as the second characteristic, the dimensional accuracy other than the surface accuracy of the parts used for insulation and fixing other than the main electrode rod is greatly relaxed. According to the first feature, the accuracy between the electrode rods is determined by the accuracy of the assembly jig, and the adjustment work and the proficiency level of the work are unnecessary, and the assembly can be performed in a short time.
【０００６】[0006]
【実施例】本発明の第１の実施例について図１をもちい
て説明する。四重極のセンサー部は▲１０▼電極ロッド
４本によって構成されこの相互間の寸法精度が重要にな
ります。そのため図１▲１０▼に示される用にロッド上
下両端の外径と同真円上に凹ガイド穴を設けます。対し
て図３▲１６▼に示される組立治具凸ガイドピンを必要
とされる寸法上に精度よく配置致します。このガイドピ
ンを図２▲１２▼及び▲１３▼の組立治具上下の対称位
置に取り付け、▲１４▼シャフトにより上下に可動させ
ます。このガイドピンに４本の電極ロッドガイド穴を合
わせ挿入してセットします。これにより４本の電極ロッ
ドは指定寸法位置に配置されることになり、組立治具に
固定されます。電極ロッドはこの組立治具に装着された
状態で絶縁体をネジにより各電極ロッド間を固定
し、絶縁体と支持体を▲１１▼ネジにより固定しま
す。これにより組立治具ガイドピンの精度上に電極ロッ
ドが組立てられ、シャフトを可動させて組立治具より取
り外します。DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIG. The sensor part of the quadrupole is composed of four electrode rods (10), and the dimensional accuracy between them is important. Therefore, as shown in Fig. 1 (10), make concave guide holes on the same circle as the outer diameters of the upper and lower ends of the rod. On the other hand, the assembly jig convex guide pins shown in Fig. 3 (16) will be accurately placed on the required dimensions. Attach this guide pin to the upper and lower symmetrical positions of the assembly jig shown in Fig. 2 (12) and (13), and move it up and down with the shaft (14). Align and insert the four electrode rod guide holes into this guide pin. As a result, the four electrode rods will be placed at the specified dimension and fixed to the assembly jig. With the electrode rod mounted in this assembly jig, fix the insulator between the electrode rods with screws, and fix the insulator and the support with ▲ 11 ▼ screws. As a result, the electrode rod is assembled with the precision of the assembly jig guide pin, and the shaft is moved and removed from the assembly jig.
【実施例】本発明の第２の実施例について図１及び図４
を用いて説明します。従来図４に示されるように電極ロ
ッド間の要求寸法を出すためには電極ロッドの精度は当
然ですが支持体の内側、絶縁板の板厚の寸法が基準に
なります。それら部品の接点の寸法誤差により誤差の重
複現象が発生します。このため絶縁板支持体電極
ロッドの寸法精度を３／１０００ｍｍ単位での製作が必
要になります。これに対し、本発明第１の方法による組
立方法にすると組立治具の精度が基準となり、図１に示
されるように主部品である▲１０▼電極ロッド以外の
支持体絶縁体の寸法精度はそれぞれ部品の接地面の粗
さ以外の寸法精度は３／１００ｍｍ単位となり緩和され
ることになります。これによりこれら部品の購入価格が
大幅に低減することが可能になる。[Embodiment] FIG. 1 and FIG. 4 regarding a second embodiment of the present invention.
I will explain using. In order to obtain the required dimension between electrode rods as shown in Fig. 4, the precision of the electrode rods is of course the standard, but the dimension of the thickness of the insulating plate inside the support is the standard. Due to the dimensional error of the contacts of those parts, an error duplication phenomenon occurs. Therefore, it is necessary to manufacture the dimensional accuracy of the insulating plate support electrode rod in units of 3/1000 mm. On the other hand, when the assembling method according to the first method of the present invention is used, the accuracy of the assembling jig is used as a reference, and as shown in FIG. 1, the dimensional accuracy of the support insulator other than the main component (10) electrode rod is The dimensional accuracy other than the roughness of the grounding surface of each part will be eased in units of 3/100 mm. This makes it possible to significantly reduce the purchase price of these parts.
【図１】は本発明の第１の実施例を示す四重極センサー
部組立図である。FIG. 1 is an assembly drawing of a quadrupole sensor unit showing a first embodiment of the present invention.
【図２】は本発明の第１の実施例に示す組立治具の構成
図である。FIG. 2 is a configuration diagram of an assembly jig according to a first embodiment of the present invention.
【図３】は本発明の第１の実施例に示す組立治具ガイド
ピン部の拡大図である。FIG. 3 is an enlarged view of an assembly jig guide pin portion according to the first embodiment of the present invention.
【図４】は従来の四重極センサー部組立図である。FIG. 4 is an assembly diagram of a conventional quadrupole sensor unit.
１はセラミック絶縁板、２は上部支持体、３は電極ロッ
ド、４は下部支持体、５は固定ネジ、６は電極寸法、７
は支持体、８はセラミック絶縁体、９は電極ロッド固定
ネジ、１０は電極ロッド、１１は絶縁体固定ネジ、１２
は治具上部取付部、１３は下部治具取付部、１４はシャ
フト、１５はガイドピンブロック、１６はガイドピン1 is a ceramic insulating plate, 2 is an upper support, 3 is an electrode rod, 4 is a lower support, 5 is a fixing screw, 6 is an electrode size, 7
Is a support, 8 is a ceramic insulator, 9 is an electrode rod fixing screw, 10 is an electrode rod, 11 is an insulator fixing screw, 12
Is a jig upper mounting portion, 13 is a lower jig mounting portion, 14 is a shaft, 15 is a guide pin block, 16 is a guide pin
Claims (2)
り分離し、分圧ならびに全圧を測定する分圧真空計にお
いて、そのセンサー部である四重極部を精度よく容易に
組み立てることを特徴とする組立方法。1. A partial pressure vacuum gauge for separating a gas in a vacuum according to its mass number (m / z) to measure a partial pressure and a total pressure, so that a quadrupole part which is a sensor part thereof can be accurately and easily formed. An assembling method characterized by assembling.
用することを特徴とする組立治工具。2. A jig for assembly, which is used for assembling the quadrupole with high accuracy.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001234191A JP2003004572A (en) | 2001-06-18 | 2001-06-18 | Assembling method of quadrupole section of partial pressure vacuum gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001234191A JP2003004572A (en) | 2001-06-18 | 2001-06-18 | Assembling method of quadrupole section of partial pressure vacuum gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003004572A true JP2003004572A (en) | 2003-01-08 |
Family
ID=19065848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001234191A Pending JP2003004572A (en) | 2001-06-18 | 2001-06-18 | Assembling method of quadrupole section of partial pressure vacuum gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003004572A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam device using it |
| US8492713B2 (en) | 2011-07-14 | 2013-07-23 | Bruker Daltonics, Inc. | Multipole assembly and method for its fabrication |
| CN115799040A (en) * | 2023-02-10 | 2023-03-14 | 四川玛科思生物科技有限公司 | Quadrupole rod assembly, mass spectrometer and quadrupole rod assembly assembling device |
-
2001
- 2001-06-18 JP JP2001234191A patent/JP2003004572A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006185637A (en) * | 2004-12-24 | 2006-07-13 | Kyocera Corp | Electrostatic deflector and electron beam device using it |
| JP4614760B2 (en) * | 2004-12-24 | 2011-01-19 | 京セラ株式会社 | Electrostatic deflector and electron beam apparatus using the same |
| US8492713B2 (en) | 2011-07-14 | 2013-07-23 | Bruker Daltonics, Inc. | Multipole assembly and method for its fabrication |
| GB2492892B (en) * | 2011-07-14 | 2018-06-06 | Bruker Daltonics Inc | Multipole rod assembly and method for its fabrication |
| CN115799040A (en) * | 2023-02-10 | 2023-03-14 | 四川玛科思生物科技有限公司 | Quadrupole rod assembly, mass spectrometer and quadrupole rod assembly assembling device |
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