JP2002367553A5 - - Google Patents
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- Publication number
- JP2002367553A5 JP2002367553A5 JP2001176474A JP2001176474A JP2002367553A5 JP 2002367553 A5 JP2002367553 A5 JP 2002367553A5 JP 2001176474 A JP2001176474 A JP 2001176474A JP 2001176474 A JP2001176474 A JP 2001176474A JP 2002367553 A5 JP2002367553 A5 JP 2002367553A5
- Authority
- JP
- Japan
- Prior art keywords
- moving table
- guide surface
- pad
- horizontal
- pads
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (6)
該パッドのうちの2つ、すなわちパッドAとパッドBが、該移動テーブルの移動方向に対し平行に位置するように配列され、該パッドの残りのひとつ、すなわちパッドCに近接した位置に該ベースに固定された垂直滑り案内面を設け、該移動テーブルが、該移動テーブルに備えた別の2つのパッド、すなわちパッドDおよびパッドEにより該垂直滑り案内面に滑り接触することを特徴とする試料ステージ。A sample stage comprising a base and a moving table, wherein the moving table is in sliding contact with a horizontal surface on the base by means of three pads provided on the moving table;
Two of the pads, that is, pad A and pad B are arranged so as to be parallel to the moving direction of the moving table, and the base is located in the vicinity of the other one of the pads, that is, pad C. A sample having a vertical sliding guide surface fixed to the moving table, wherein the moving table is in sliding contact with the vertical sliding guide surface by another two pads provided on the moving table, that is, pad D and pad E. stage.
(1)該移動テーブルに固定された2つのパッドAおよびBにより該水平滑り案内面Bと滑り接触し、
(2)該移動テーブルに固定された1つのパッドCにより該水平滑り案内面Aと滑り接触し、
(3)該移動テーブルに固定された2つのパッドDおよびEにより該垂直滑り案内面と滑り接触する、ことを特徴とする試料ステージ。A base and a moving table are provided, and two horizontal slide guide surfaces, that is, a horizontal slide guide surface A and a horizontal slide guide surface B are provided on the base, and a vertical slide guide surface is provided at a position close to the horizontal slide guide surface A. In the sample stage provided, the moving table is:
(1) The two sliding pads A and B fixed to the moving table are in sliding contact with the horizontal sliding guide surface B,
(2) A sliding contact with the horizontal sliding guide surface A by one pad C fixed to the moving table,
(3) A sample stage characterized by slidingly contacting the vertical sliding guide surface by two pads D and E fixed to the moving table.
前記移動テーブルは、前記垂直案内面に対して滑り接触するための2つのパッドと、該垂直案内面に近接した方の水平案内面に対して滑り接触するための1つのパッドと、前記垂直案内面に近接しない方の水平案内面に対して滑り接触するための2つのパッドとを備えたことを特徴とする試料ステージ。A base having two horizontal guide surfaces arranged in parallel to each other, and a vertical sliding guide surface provided close to one of the horizontal guide surfaces A and B, and a movement arranged on the base With a table,
The moving table includes two pads for sliding contact with the vertical guide surface, one pad for sliding contact with a horizontal guide surface closer to the vertical guide surface, and the vertical guide A sample stage comprising two pads for sliding contact with a horizontal guide surface that is not close to the surface.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001176474A JP3928373B2 (en) | 2001-06-12 | 2001-06-12 | Sample stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001176474A JP3928373B2 (en) | 2001-06-12 | 2001-06-12 | Sample stage |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002367553A JP2002367553A (en) | 2002-12-20 |
JP2002367553A5 true JP2002367553A5 (en) | 2005-03-03 |
JP3928373B2 JP3928373B2 (en) | 2007-06-13 |
Family
ID=19017453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001176474A Expired - Fee Related JP3928373B2 (en) | 2001-06-12 | 2001-06-12 | Sample stage |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3928373B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5429960B2 (en) * | 2008-12-02 | 2014-02-26 | 株式会社アイエイアイ | Electric actuator and electric actuator assembly method |
KR102022471B1 (en) * | 2014-09-19 | 2019-09-18 | 한화정밀기계 주식회사 | Apparatus for inspection of substrate |
NL2013783B1 (en) * | 2014-11-12 | 2016-10-07 | Phenom-World Holding B V | Sample stage. |
CN109899388B (en) * | 2019-03-04 | 2021-05-18 | 余斯婷 | Sliding rail for pre-embedded greening for indoor design |
-
2001
- 2001-06-12 JP JP2001176474A patent/JP3928373B2/en not_active Expired - Fee Related
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