JP2002341942A - XYtheta TABLE - Google Patents
XYtheta TABLEInfo
- Publication number
- JP2002341942A JP2002341942A JP2001150692A JP2001150692A JP2002341942A JP 2002341942 A JP2002341942 A JP 2002341942A JP 2001150692 A JP2001150692 A JP 2001150692A JP 2001150692 A JP2001150692 A JP 2001150692A JP 2002341942 A JP2002341942 A JP 2002341942A
- Authority
- JP
- Japan
- Prior art keywords
- linear
- plane
- xyθ table
- movable
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、加工装置、組立
装置、検査装置等でワークの位置決めに用いられるＸＹ
θテーブルに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an XY device used for positioning a work in a processing device, an assembling device, an inspection device, or the like.
This relates to the θ table.
【０００２】[0002]
【従来の技術】加工装置、組立装置、検査装置等でワー
クの位置決めに用いられるＸＹθテーブルは、例えば図
６に示すように、ＸＹ直交座標系で表現されるＸＹ平面
内に配置された可動盤５１を、スラスト転がり軸受５２
を介して固定盤５３の上に支持し、固定盤５３側に、第
１の駆動手段としてのＹ方向に伸縮する２つの電動リニ
アアクチュエータ５４と、第２の駆動手段としてのＸ方
向に伸縮する１つの電動リニアアクチュエータ５５とを
取り付け、可動盤５１側に、各リニアアクチュエータ５
４、５５と連結される３つの直動案内手段としてのリニ
アガイド５６、５７を取り付けたものである。2. Description of the Related Art An XYθ table used for positioning a work in a processing device, an assembling device, an inspection device or the like is, for example, a movable plate arranged in an XY plane expressed by an XY orthogonal coordinate system as shown in FIG. 51, a thrust rolling bearing 52
, Two electric linear actuators 54 extending and contracting in the Y direction as first driving means, and extending and contracting in the X direction as second driving means, on the fixed plate 53 side. One electric linear actuator 55 is attached, and each linear actuator 5
Linear guides 56 and 57 are attached as three linear guides connected to the linear guides 4 and 55.
【０００３】前記２組のリニアアクチュエータ５４とリ
ニアガイド５６、および１組のリニアアクチュエータ５
５とリニアガイド５７とは、それぞれピン結合により回
動自在に連結されており、各リニアアクチュエータ５
４、５５を伸縮させることにより、可動盤５１をＸＹ平
面内で、平行移動のみでなく回転移動もさせることがで
きる。The two sets of linear actuators 54 and linear guides 56 and one set of linear actuators 5
5 and the linear guide 57 are rotatably connected to each other by pin connection.
By expanding and contracting 4, 55, the movable platen 51 can be not only moved in parallel but also rotated in the XY plane.
【０００４】前記各リニアアクチュエータ５４と連結さ
れた２つのリニアガイド５６は互いに平行な方向に向け
られ、リニアアクチュエータ５５と連結されたリニアガ
イド５７は、各リニアガイド５６と直交する方向に向け
られている。これは、第１の駆動手段であるリニアアク
チュエータ５４のＹ方向の伸縮量と、第２の駆動手段で
あるリニアアクチュエータ５５のＸ方向の伸縮量とを、
それぞれ可動盤５１のＹ方向とＸ方向への各移動量に対
応させ、これらの各方向への平行移動量を調節しやすく
するためである。[0004] The two linear guides 56 connected to the linear actuators 54 are directed in parallel to each other, and the linear guides 57 connected to the linear actuators 55 are directed in a direction orthogonal to the linear guides 56. I have. This is because the amount of expansion and contraction of the linear actuator 54 as the first driving means in the Y direction and the amount of expansion and contraction of the linear actuator 55 as the second driving means in the X direction are expressed by:
This is because the movable board 51 is made to correspond to each movement amount in the Y direction and the X direction, and the parallel movement amount in each of these directions is easily adjusted.
【０００５】[0005]
【発明が解決しようとする課題】上述した従来のＸＹθ
テーブルは、第１の駆動手段と連結された直動案内手段
としての２つのリニアガイドが互いに平行な方向に向け
られ、第２の駆動手段と連結された１つのリニアガイド
が、これらの平行なリニアガイドと直交する方向に向け
られているので、各駆動手段による可動盤の移動方向に
よっては、駆動手段の駆動力が駆動手段と直動案内手段
の各連結部のうちの１つに集中することがある。例え
ば、殆ど第２の駆動手段だけで可動盤を移動させる場合
は、第２の駆動手段と直動案内手段との１つの連結部の
みに駆動力が作用する。The above-described conventional XYθ
In the table, two linear guides as linear motion guide means connected to the first drive means are oriented in directions parallel to each other, and one linear guide connected to the second drive means is connected to these parallel guides. Since it is oriented in a direction orthogonal to the linear guide, the driving force of the driving means concentrates on one of the connecting portions of the driving means and the linear motion guide means depending on the moving direction of the movable plate by each driving means. Sometimes. For example, when the movable plate is moved almost only by the second driving means, the driving force acts on only one connecting portion between the second driving means and the linear guide means.
【０００６】このように、１つの連結部に駆動力が集中
すると、可動盤に大きなモーメント荷重が発生するの
で、可動盤の円滑な移動が妨げられたり、意図しない回
転移動が生じたりして、位置決め精度が低下する問題が
ある。As described above, when the driving force is concentrated on one connecting portion, a large moment load is generated on the movable platen, so that the movable platen is prevented from moving smoothly and unintended rotational movement occurs. There is a problem that positioning accuracy is reduced.
【０００７】また、ＸＹθテーブルは、可動盤が広い面
積で固定盤に支持されているので、縦方向（垂直方向）
では高い剛性を有するが、横方向（水平方向）の剛性は
あまり高くない。この横方向の剛性向上は以前から求め
られているものであるが、従来のＸＹθテーブルは、横
方向の剛性を高くすると直動案内手段の円滑な案内が妨
げられ、位置決め精度が低下するので、横方向の剛性を
高めることができないという問題もある。In the XYθ table, since the movable platen is supported by the fixed platen with a large area, the XYθ table can be moved in the vertical direction (vertical direction).
Has high rigidity, but the lateral (horizontal) rigidity is not very high. The improvement of the lateral rigidity has been demanded for a long time. However, in the conventional XYθ table, if the rigidity in the lateral direction is increased, smooth guiding of the linear motion guide means is hindered, and the positioning accuracy is reduced. There is also a problem that the lateral rigidity cannot be increased.
【０００８】そこで、この発明の課題は、ＸＹθテーブ
ルの駆動手段と直動案内手段との各連結部に、駆動手段
の駆動力をバランスよく作用させることである。An object of the present invention is to make the driving force of the driving means act on each connecting portion of the driving means of the XYθ table and the linear guide means in a well-balanced manner.
【０００９】[0009]
【課題を解決するための手段】上記の課題を解決するた
めに、この発明は、ＸＹ直交座標系で表現されるＸＹ平
面内に配置された可動盤を、スラスト軸受を介して固定
盤の上に支持し、前記固定盤側に、ＸＹ平面と平行なＸ
Ｙ平面群内で互いに同じ方向に伸縮する少なくとも２つ
の第１の駆動手段と、同じくＸＹ平面群内で第１の駆動
手段と直交方向に伸縮する少なくとも１つの第２の駆動
手段とを取り付け、前記可動盤側に、前記各駆動手段と
それぞれ連結され、ＸＹ平面群内で直線案内可能な係合
部を有する直動案内手段を取り付け、前記可動盤をＸＹ
平面内で回動可能に前記固定盤に連結して、可動盤をＸ
方向、Ｙ方向およびＸＹ平面内の回転方向であるθ方向
に移動可能としたＸＹθテーブルにおいて、前記少なく
とも２つの第１の駆動手段と連結される各直動案内手段
の直線案内方向間に傾斜角を持たせた構成を採用したも
のである。In order to solve the above-mentioned problems, the present invention relates to a method in which a movable plate arranged in an XY plane expressed by an XY rectangular coordinate system is mounted on a fixed plate via a thrust bearing. And an X parallel to the XY plane on the fixed platen side.
At least two first driving units that expand and contract in the same direction in the Y plane group, and at least one second driving unit that expands and contracts in the orthogonal direction to the first driving unit in the XY plane group are attached, The movable platen is provided with linear motion guide means connected to each of the driving means and having an engagement portion capable of linearly guiding within the XY plane group.
The movable plate is connected to the fixed plate so as to be rotatable in a plane,
In the XYθ table movable in the direction, the Y direction, and the θ direction which is a rotation direction in the XY plane, the inclination angle between the linear guide directions of the respective linear guide means connected to the at least two first drive means. Is adopted.
【００１０】すなわち、少なくとも２つの第１の駆動手
段と連結される各直動案内手段の直線案内方向間に傾斜
角を持たせることにより、第１または第２の駆動手段の
みを駆動する場合であっても、この傾斜角を持たせた各
直動案内手段の一方の連結部には常に駆動力が作用する
ようにし、駆動力を供給する駆動手段と連結された連結
部と併せて、少なくとも２つの連結部にバランスよく駆
動力が作用するようにした。That is, by providing an inclination angle between the linear guide directions of the respective linear guide units connected to at least two first drive units, only the first or second drive unit is driven. Even if there is, the driving force is always applied to one connecting portion of each linear motion guiding means having this inclination angle, and at least the connecting portion connected to the driving means for supplying the driving force is at least The driving force acts on the two connecting portions in a well-balanced manner.
【００１１】前記駆動手段と直動案内手段との各連結部
を、前記ＸＹ平面内の可動盤の外側に設けることによ
り、ＸＹθテーブルの高さ寸法をコンパクトに設計する
ことができる。By providing each connecting portion between the driving means and the linear motion guide means outside the movable plate in the XY plane, the height of the XYθ table can be designed to be compact.
【００１２】前記少なくとも１つずつの第１および第２
の駆動手段と連結される各直動案内手段の直線案内方向
を、互いに直交する方向に向けることにより、これらの
直線案内方向を直交方向に向けられた各直動案内手段と
それぞれ連結される第１および第２の駆動手段の各伸縮
量を、直交する２つの方向への可動盤の各移動量と対応
させ、可動盤の各方向への平行移動量を調節しやすくす
ることができる。The first and second at least one of each
By directing the linear guide directions of the respective linear motion guide means connected to the drive means in directions orthogonal to each other, these linear guide directions are respectively connected to the respective linear motion guide means oriented in the orthogonal directions. The amount of expansion and contraction of the first and second driving means can be made to correspond to the amount of movement of the movable plate in two orthogonal directions, and the amount of parallel movement of the movable plate in each direction can be easily adjusted.
【００１３】前記直線案内方向が互いに直交する方向に
向く各直動案内手段を、一体に回動可能に前記可動盤と
連結することにより、回動可能な連結部を減らして部品
点数を少なくすることができる。[0013] By connecting the respective linear guides, in which the linear guide directions are perpendicular to each other, to the movable plate so as to be integrally rotatable, a rotatable connecting portion is reduced, and the number of parts is reduced. be able to.
【００１４】前記少なくとも２つの第１の駆動手段を、
前記可動盤の中心に対して互いに反対側に取り付け、こ
れらの各駆動手段と連結される前記各直動案内手段の直
線案内方向間の傾斜角を、前記可動盤の中心に対して対
称に形成することにより、これらの対称な傾斜角を有す
る２つの直動案内手段と連結される第１の駆動手段の各
伸縮量を、直交する２つの方向への可動盤の各移動量と
簡単な関係で対応させることができ、可動盤の平行移動
量を調節しやすくすることができる。[0014] The at least two first driving means include:
Attached on opposite sides of the center of the movable plate, the inclination angles between the linear guide directions of the linear guide units connected to the respective drive means are formed symmetrically with respect to the center of the movable plate. By doing so, the amount of expansion and contraction of the first drive means connected to the two linear motion guide means having these symmetrical inclination angles can be simply related to the amount of movement of the movable platen in two orthogonal directions. And the amount of parallel movement of the movable platen can be easily adjusted.
【００１５】前記少なくとも１つの直動案内手段を、直
線案内可能な一対の平行な係合部を有するものとするこ
とにより、１つの連結部に対する直動案内手段の係合部
を２箇所に設け、これらの係合部に作用する駆動手段の
駆動力を低減することができる。The at least one linear motion guide means has a pair of parallel engaging portions capable of linearly guiding, so that two linear motion guide engaging portions are provided for one connecting portion. Thus, the driving force of the driving means acting on these engaging portions can be reduced.
【００１６】前記固定盤の上下両面に転動面を設け、前
記可動盤にこれらの各転動面とそれぞれ対向する転動面
を設け、これらの対向する固定盤と可動盤の各転動面間
にそれぞれスラスト転がり軸受を介在させることによ
り、ＸＹθテーブルの剛性を縦横両方向で高めることが
できる。Rolling surfaces are provided on both upper and lower surfaces of the fixed plate, and rolling surfaces opposed to the respective rolling surfaces are respectively provided on the movable plate, and the rolling surfaces of the fixed plate and the movable plate opposed to each other are provided. By interposing thrust rolling bearings between them, the rigidity of the XYθ table can be increased in both the vertical and horizontal directions.
【００１７】[0017]
【発明の実施の形態】以下、図１乃至図５に基づき、こ
の発明の実施形態を説明する。図１および図２は第１の
実施形態を示す。このＸＹθテーブルは、図１に示すよ
うに、ＸＹ直交座標系で表現される水平なＸＹ平面内に
配置された可動盤１を、スラスト転がり軸受２を介して
固定盤３の上に支持し、固定盤３側に、第１の駆動手段
としてのＹ方向に伸縮する２つの電動リニアアクチュエ
ータ４ａ、４ｂと、第２の駆動手段としてのＸ方向に伸
縮する１つの電動リニアアクチュエータ５とを取り付
け、可動盤１側に、水平面内での直動案内手段である３
つのリニアガイド６ａ、６ｂ、７を取り付けたものであ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 1 and 2 show a first embodiment. As shown in FIG. 1, the XYθ table supports a movable platen 1 arranged in a horizontal XY plane expressed by an XY orthogonal coordinate system on a fixed platen 3 via a thrust rolling bearing 2, On the fixed board 3 side, two electric linear actuators 4a and 4b which expand and contract in the Y direction as first driving means and one electric linear actuator 5 which expands and contracts in the X direction as second driving means are attached. On the movable platen 1 side, a linear motion guide means 3 in a horizontal plane
The two linear guides 6a, 6b, 7 are attached.
【００１８】前記各リニアアクチュエータ４ａ、４ｂ、
５は、それぞれブラケット８で固定盤３の側面に取り付
けられ、各リニアガイド６ａ、６ｂ、７は、それぞれ可
動盤１の外側に張り出すベース金具９に取り付けられて
おり、各リニアアクチュエータ４ａ、４ｂ、５と各リニ
アガイド６ａ、６ｂ、７とは、それぞれ可動盤１の外側
で連結されている。Each of the linear actuators 4a, 4b,
Numerals 5 are respectively attached to the side surfaces of the fixed board 3 by brackets 8, and the respective linear guides 6a, 6b, 7 are respectively attached to base fittings 9 projecting outside the movable board 1, and the respective linear actuators 4a, 4b , 5 and the respective linear guides 6a, 6b, 7 are connected outside the movable platen 1 respectively.
【００１９】前記各リニアガイド６ａ、６ｂ、７は、互
いにスライド自在に係合する案内部１０とスライド部１
１とから成り、各スライド部１１がピン結合により各リ
ニアアクチュエータ４ａ、４ｂ、５と回動自在に連結さ
れている。したがって、各リニアアクチュエータ４ａ、
４ｂ、５を伸縮させることにより、可動盤１をＸ方向、
Ｙ方向およびθ方向へ移動させることができる。Each of the linear guides 6a, 6b, 7 has a guide portion 10 and a slide portion 1 which are slidably engaged with each other.
1, and each slide portion 11 is rotatably connected to each of the linear actuators 4a, 4b, 5 by pin connection. Therefore, each linear actuator 4a,
By moving the movable plate 1 in the X direction,
It can be moved in the Y direction and the θ direction.
【００２０】前記１つずつの第１および第２の駆動手段
としてのリニアアクチュエータ４ａ、５と連結された２
つのリニアガイド６ａ、７の案内方向は、互いに直交す
る方向に向けられている。したがって、Ｙ方向に伸縮す
るリニアアクチュエータ４ａの伸縮量と、Ｘ方向に伸縮
するリニアアクチュエータ５の伸縮量とは、それぞれ可
動盤１のＹ方向とＸ方向への所望の移動量と容易に対応
させることができる。Each of the two linear actuators 4a and 5 connected to the linear actuators 4a and 5 as the first and second driving means, respectively.
The guide directions of the two linear guides 6a and 7 are directed in directions orthogonal to each other. Therefore, the amount of expansion and contraction of the linear actuator 4a that expands and contracts in the Y direction and the amount of expansion and contraction of the linear actuator 5 that expands and contracts in the X direction easily correspond to the desired amounts of movement of the movable platen 1 in the Y and X directions, respectively. be able to.
【００２１】また、もう１つの第１の駆動手段であるリ
ニアアクチュエータ４ｂと連結されたリニアガイド６ｂ
の案内方向は、リニアガイド６ａと４５°傾斜する方向
に向けられている。したがって、リニアアクチュエータ
４ａまたは５のみを駆動する場合は、少なくともこれら
の駆動力を供給する駆動手段の連結部と、この４５°傾
斜するリニアガイド６ｂとリニアアクチュエータ４ｂと
の連結部とには必ず駆動力が作用し、リニアアクチュエ
ータ４ｂのみを駆動する場合は、少なくともこのリニア
アクチュエータ４ｂの連結部と、リニアガイド６ｂと相
対的に４５°傾斜するリニアガイド６ａとリニアアクチ
ュエータ４ａとの連結部とに必ず駆動力が作用する。Further, a linear guide 6b connected to a linear actuator 4b as another first driving means.
Is directed in a direction inclined by 45 ° with respect to the linear guide 6a. Therefore, when only the linear actuator 4a or 5 is driven, at least the connecting portion of the driving means for supplying these driving forces and the connecting portion between the linear guide 6b inclined at 45 ° and the linear actuator 4b must be driven. When a force acts to drive only the linear actuator 4b, at least the connecting portion of the linear actuator 4b and the connecting portion between the linear guide 6a and the linear actuator 4a inclined at 45 ° relative to the linear guide 6b must be provided. Driving force acts.
【００２２】図２（ａ）、（ｂ）に示すように、前記固
定盤３の中央部には貫通孔１２が設けられ、可動盤１の
下面側には、固定盤３の下面をスラスト転がり軸受１３
を介して挟持する挟持板１４が、貫通孔１２に通された
連結部材１５で連結されている。固定盤３の上下面と可
動盤１の下面および挟持板１４の上面には、それぞれ各
スラスト転がり軸受２、１３用の転動面が設けられてい
る。したがって、このＸＹθテーブルは、可動盤１が固
定盤３を上下から挟持しながら移動するので、高い剛性
を縦横両方向で確保することができる。なお、可動盤１
の移動範囲は、固定盤３の貫通孔１２と連結部材１５の
間の間隔で設定される。As shown in FIGS. 2 (a) and 2 (b), a through hole 12 is provided in the center of the fixed platen 3, and the lower surface of the movable platen 1 is provided with a lower surface of the fixed platen 3 by thrust rolling. Bearing 13
The holding plate 14 to be held via the connecting member 15 is connected by a connecting member 15 passed through the through hole 12. Rolling surfaces for the thrust rolling bearings 2 and 13 are provided on the upper and lower surfaces of the fixed platen 3, the lower surface of the movable platen 1, and the upper surface of the holding plate 14, respectively. Therefore, in the XYθ table, since the movable platen 1 moves while holding the fixed platen 3 from above and below, high rigidity can be secured in both the vertical and horizontal directions. In addition, movable plate 1
Is set by an interval between the through-hole 12 of the fixed platen 3 and the connecting member 15.
【００２３】図３は第２の実施形態を示す。このＸＹθ
テーブルは、互いに直交する方向に伸縮する第１の駆動
手段の１つであるリニアアクチュエータ４ａと、第２の
駆動手段であるリニアアクチュエータ５とが、固定盤３
の同一コーナ部に向けられ、これらの各リニアアクチュ
エータ４ａ、５と連結された２つのリニアガイド６ａ、
７の案内方向が、互いに直交する方向に向けられて、Ｌ
字状のベース金具９ａに一体に取り付けられている。FIG. 3 shows a second embodiment. This XYθ
The table includes a linear actuator 4a, which is one of first driving means, which expands and contracts in a direction orthogonal to each other, and a linear actuator 5, which is a second driving means, and is provided with a fixed platen 3.
, Two linear guides 6a connected to these linear actuators 4a, 5
7 are directed in directions orthogonal to each other, and L
It is integrally attached to the letter-shaped base metal fitting 9a.
【００２４】また、この可動盤１には、前記ベース金具
９ａが位置する固定盤３のコーナ部に向けて張り出すア
ーム部材１６が設けられて、可動盤１はこのアーム部材
１６によりベース金具９ａにピン結合で回動自在に連結
され、各リニアガイド６ａ、７のスライド部１１は、ピ
ン結合によらず、それぞれ直接各リニアアクチュエータ
４ａ、５と連結されている。したがって、この実施形態
では、第１の実施形態よりもピン結合の連結部が１箇所
少なくなっている。その他の部分は第１の実施形態と同
じであるので、図１と同じ符号で表示した。The movable platen 1 is provided with an arm member 16 projecting toward a corner of the fixed platen 3 where the base metal member 9a is located. The slide portions 11 of the linear guides 6a, 7 are directly connected to the respective linear actuators 4a, 5 independently of the pin connection. Therefore, in this embodiment, the number of connecting portions of the pin connection is one less than in the first embodiment. The other parts are the same as in the first embodiment, and are therefore denoted by the same reference numerals as in FIG.
【００２５】このＸＹθテーブルも、第１の実施形態の
ものと同様に、リニアアクチュエータ４ａまたは５のみ
を駆動する場合は、これらの駆動力を供給する駆動手段
の連結部と、リニアガイド６ｂとリニアアクチュエータ
４ｂとの連結部とには必ず駆動力が作用し、リニアアク
チュエータ４ｂのみを駆動する場合は、このリニアアク
チュエータ４ｂの連結部と、リニアガイド６ａとリニア
アクチュエータ４ａとの連結部とに必ず駆動力が作用す
る。As in the first embodiment, when only the linear actuators 4a or 5 are driven, the XYθ table also includes a connecting portion of driving means for supplying these driving forces, a linear guide 6b and a linear guide 6b. A driving force always acts on the connecting portion with the actuator 4b. When only the linear actuator 4b is driven, the driving force is always applied to the connecting portion of the linear actuator 4b and the connecting portion of the linear guide 6a and the linear actuator 4a. Force acts.
【００２６】図４および図５は第３の実施形態を示す。
このＸＹθテーブルは、Ｙ方向に伸縮する第１の駆動手
段である２つのリニアアクチュエータ４ａ、４ｂと、可
動盤１の左右両側でそれぞれ連結された各リニアガイド
６ａ、６ｂの案内方向の向きが、可動盤１のＹ方向の中
心線に関して互いに対称で逆向きに傾斜している。Ｘ方
向に伸縮する第２の駆動手段であるリニアアクチュエー
タ５と連結されたリニアガイド７の案内方向はＹ方向に
向けられている。FIGS. 4 and 5 show a third embodiment.
In the XYθ table, two linear actuators 4a and 4b, which are first driving units that expand and contract in the Y direction, and guide directions of the linear guides 6a and 6b connected to the left and right sides of the movable platen 1, respectively, are as follows. The movable platen 1 is symmetrical with respect to the center line in the Y direction of the movable plate 1 and is inclined in the opposite direction. The guide direction of the linear guide 7 connected to the linear actuator 5, which is the second drive means that expands and contracts in the X direction, is directed in the Y direction.
【００２７】前記各リニアガイド６ａ、６ｂ、７は、そ
れぞれ２つのベース金具９ｂ、９ｃに取り付けられた一
対の平行な案内部１０を有し、そのスライド部１１は、
この平行な各案内部１０と２箇所でスライド自在に係合
し、それぞれ各リニアアクチュエータ４ａ、４ｂ、５と
回動自在にピン結合されている。これらの結合部は、コ
ンパクトな設計とするために、各係合部と上下２層とな
るようにスライド部１１の下面側に設けられている。Each of the linear guides 6a, 6b, 7 has a pair of parallel guides 10 attached to two base fittings 9b, 9c, respectively.
Each of the parallel guide portions 10 is slidably engaged at two places, and is rotatably pin-coupled to each of the linear actuators 4a, 4b, 5 respectively. These connecting portions are provided on the lower surface side of the slide portion 11 so as to be in two layers with the engaging portions in order to make a compact design.
【００２８】したがって、この実施形態では、各リニア
ガイド６ａ、６ｂ、７の係合部に作用する駆動力が低減
され、かつ、係合部での遊びも少なくすることができ
る。その他の部分は第１の実施形態と同じであるので、
図１および図２と同じ符号で表示した。Therefore, in this embodiment, the driving force acting on the engaging portions of the respective linear guides 6a, 6b, 7 can be reduced, and the play at the engaging portions can be reduced. Other parts are the same as the first embodiment,
1 and 2 are denoted by the same reference numerals.
【００２９】上述した各実施形態では、可動盤が固定盤
の上下面を挟持する形式のものとし、２つの第１の駆動
手段と１つの第２の駆動手段で可動盤を移動させるよう
にしたが、本発明に係るＸＹθテーブルは、可動盤を固
定盤の上面のみで支持する形式とすることもでき、各駆
動手段の個数をさらに増加させることもできる。駆動手
段としての電動リニアアクチュエータは、ステッピング
モータ、サーボモータ、リニヤモータ等を用いて駆動さ
れる。In each of the embodiments described above, the movable platen is of a type in which the upper and lower surfaces of the fixed platen are sandwiched, and the movable platen is moved by two first drive means and one second drive means. However, the XYθ table according to the present invention can be of a type in which the movable plate is supported only by the upper surface of the fixed plate, and the number of each driving means can be further increased. The electric linear actuator as a driving unit is driven using a stepping motor, a servo motor, a linear motor, or the like.
【００３０】[0030]
【発明の効果】以上のように、この発明のＸＹθテーブ
ルは、少なくとも２つの第１の駆動手段と連結される各
直動案内手段の直線案内方向間に傾斜角を持たせ、第１
または第２の駆動手段のみを駆動する場合であっても、
この傾斜角を持たせた各直動案内手段の一方の連結部に
は常に駆動力が作用するようにし、駆動力を供給する駆
動手段と連結された連結部と併せて、少なくとも２つの
連結部にバランスよく駆動力を作用するようにしたの
で、可動盤に大きなモーメント荷重が発生することがな
く、可動盤を円滑に移動させて精度よく位置決めするこ
とができるとともに、ＸＹθテーブルの横方向の剛性を
支障なく高めることができる。As described above, the XYθ table of the present invention has an inclination angle between the linear guide directions of the respective linear motion guide means connected to at least two first drive means.
Alternatively, even when only the second driving unit is driven,
A driving force is always applied to one connecting portion of each linear motion guide means having this inclination angle, and at least two connecting portions are connected together with the connecting portion connected to the driving means for supplying the driving force. As a result, a large moment load is not generated on the movable platen, the movable platen can be moved smoothly and positioned accurately, and the lateral rigidity of the XYθ table can be adjusted. Can be increased without hindrance.
【図１】第１の実施形態のＸＹθテーブルを示す一部切
欠き平面図FIG. 1 is a partially cutaway plan view showing an XYθ table according to a first embodiment.
【図２】ａは図１のＸ方向の側面図、ｂは図１のＹ方向
の縦断面図2A is a side view in the X direction of FIG. 1, and FIG. 2B is a longitudinal sectional view in the Y direction of FIG.
【図３】第２の実施形態のＸＹθテーブルを示す平面図FIG. 3 is a plan view showing an XYθ table according to a second embodiment;
【図４】第３の実施形態のＸＹθテーブルを示す平面図FIG. 4 is a plan view showing an XYθ table according to a third embodiment;
【図５】図４の背面図FIG. 5 is a rear view of FIG. 4;
【図６】従来のＸＹθテーブルを示す一部切欠き平面図FIG. 6 is a partially cutaway plan view showing a conventional XYθ table.
１ 可動盤 ２ スラスト転がり軸受 ３ 固定盤 ４ａ、４ｂ、５ リニアアクチュエータ ６ａ、６ｂ、７ リニアガイド ８ ブラケット ９、９ａ、９ｂ、９ｃ ベース金具 １０ 案内部 １１ スライド部 １２ 貫通孔 １３ スラスト転がり軸受 １４ 挟持板 １５ 連結部材 １６ アーム部材 DESCRIPTION OF SYMBOLS 1 Movable board 2 Thrust rolling bearing 3 Fixed board 4a, 4b, 5 Linear actuator 6a, 6b, 7 Linear guide 8 Bracket 9, 9a, 9b, 9c Base metal fitting 10 Guide part 11 Slide part 12 Through hole 13 Thrust rolling bearing 14 Nipping Plate 15 Connecting member 16 Arm member
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 2F078 CA03 CA08 CB12 CC02 3C048 BB01 BC02 CC04 DD06 DD12 EE00 EE07 5H303 AA01 AA04 BB02 BB08 BB12 CC02 DD04 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F078 CA03 CA08 CB12 CC02 3C048 BB01 BC02 CC04 DD06 DD12 EE00 EE07 5H303 AA01 AA04 BB02 BB08 BB12 CC02 DD04
Claims (7)
に配置された可動盤を、スラスト軸受を介して固定盤の
上に支持し、前記固定盤側に、ＸＹ平面と平行なＸＹ平
面群内で互いに同じ方向に伸縮する少なくとも２つの第
１の駆動手段と、同じくＸＹ平面群内で第１の駆動手段
と直交方向に伸縮する少なくとも１つの第２の駆動手段
とを取り付け、前記可動盤側に、前記各駆動手段とそれ
ぞれ連結され、ＸＹ平面群内で直線案内可能な係合部を
有する直動案内手段を取り付け、前記可動盤をＸＹ平面
内で回動可能に前記固定盤に連結して、可動盤をＸ方
向、Ｙ方向およびＸＹ平面内の回転方向であるθ方向に
移動可能としたＸＹθテーブルにおいて、前記少なくと
も２つの第１の駆動手段と連結される各直動案内手段の
直線案内方向間に傾斜角を持たせたことを特徴とするＸ
Ｙθテーブル。1. A movable plate arranged in an XY plane expressed by an XY orthogonal coordinate system is supported on a fixed plate via a thrust bearing, and an XY plane parallel to the XY plane is provided on the fixed plate side. At least two first driving units that expand and contract in the same direction within the group and at least one second driving unit that expands and contracts in a direction orthogonal to the first driving unit in the XY plane group are attached to the movable unit. On the board side, a linear motion guide means, which is connected to each of the driving means and has an engaging portion capable of linearly guiding in the XY plane group, is attached, and the movable board is rotatable in the XY plane on the fixed board. An XYθ table connected to the movable plate in such a manner that the movable plate can be moved in the X direction, the Y direction, and the θ direction, which is a rotation direction in the XY plane, wherein each linear motion guide means connected to the at least two first driving means; Inclined between straight guide directions X, wherein which gave
Yθ table.
結部を、前記ＸＹ平面内の可動盤の外側に設けた請求項
１に記載のＸＹθテーブル。2. The XYθ table according to claim 1, wherein a connecting portion between each of the drive means and each of the linear motion guide means is provided outside the movable plate in the XY plane.
２の駆動手段と連結される各直動案内手段の直線案内方
向を、互いに直交する方向に向けた請求項１または２に
記載のＸＹθテーブル。3. The XYθ according to claim 1, wherein the linear guide directions of the respective linear guide units connected to the at least one first and second drive units are oriented in directions orthogonal to each other. table.
に向く各直動案内手段を、一体に回動可能に前記可動盤
と連結した請求項３に記載のＸＹθテーブル。4. The XYθ table according to claim 3, wherein each of the linear motion guide means whose linear guide directions are orthogonal to each other is connected to the movable plate so as to be integrally rotatable.
を、前記可動盤の中心に対して互いに反対側に取り付
け、これらの各駆動手段と連結される前記各直動案内手
段の直線案内方向間の傾斜角を、前記可動盤の中心に対
して対称に形成した請求項１または２に記載のＸＹθテ
ーブル。5. The at least two first drive means are mounted on opposite sides of the center of the movable platen, and are located between the linear guide directions of the linear motion guide means connected to the respective drive means. 3. The XYθ table according to claim 1, wherein an inclination angle of the XYθ table is formed symmetrically with respect to a center of the movable platen.
直線案内可能な一対の平行な係合部を有するものとした
請求項１乃至５のいずれかに記載のＸＹθテーブル。6. The at least one linear motion guide means,
The XYθ table according to any one of claims 1 to 5, wherein the XYθ table has a pair of parallel engaging portions capable of linear guidance.
前記可動盤にこれらの各転動面とそれぞれ対向する転動
面を設け、これらの対向する固定盤と可動盤の各転動面
間にそれぞれスラスト転がり軸受を介在させた請求項１
乃至６のいずれかに記載のＸＹθテーブル。7. A rolling surface is provided on both upper and lower surfaces of the fixed board,
2. The movable platen is provided with rolling surfaces opposed to these rolling surfaces, respectively, and a thrust rolling bearing is interposed between each of the opposed rolling surfaces of the fixed platen and the movable platen.
7. The XYθ table according to any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001150692A JP3803263B2 (en) | 2001-05-21 | 2001-05-21 | XYθ table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001150692A JP3803263B2 (en) | 2001-05-21 | 2001-05-21 | XYθ table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002341942A true JP2002341942A (en) | 2002-11-29 |
| JP3803263B2 JP3803263B2 (en) | 2006-08-02 |
Family
ID=18995671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001150692A Expired - Lifetime JP3803263B2 (en) | 2001-05-21 | 2001-05-21 | XYθ table |
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| Country | Link |
|---|---|
| JP (1) | JP3803263B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7504794B2 (en) | 2006-11-29 | 2009-03-17 | Chiba Precision Co., Ltd. | Planar motor |
| CN110370031A (en) * | 2018-04-12 | 2019-10-25 | 广州中国科学院先进技术研究所 | A kind of centrosymmetric UVW platform |
-
2001
- 2001-05-21 JP JP2001150692A patent/JP3803263B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7504794B2 (en) | 2006-11-29 | 2009-03-17 | Chiba Precision Co., Ltd. | Planar motor |
| CN110370031A (en) * | 2018-04-12 | 2019-10-25 | 广州中国科学院先进技术研究所 | A kind of centrosymmetric UVW platform |
| CN110370031B (en) * | 2018-04-12 | 2024-05-07 | 广州中国科学院先进技术研究所 | Centrosymmetric UVW platform |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3803263B2 (en) | 2006-08-02 |
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