JP2002340753A - Gas-sampling probe - Google Patents
Gas-sampling probeInfo
- Publication number
- JP2002340753A JP2002340753A JP2001149293A JP2001149293A JP2002340753A JP 2002340753 A JP2002340753 A JP 2002340753A JP 2001149293 A JP2001149293 A JP 2001149293A JP 2001149293 A JP2001149293 A JP 2001149293A JP 2002340753 A JP2002340753 A JP 2002340753A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tube
- probe
- sampling probe
- sampling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、高速ガス流から被
検ガスをガス検出手段に採取するガスサンプリングプロ
ーブに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas sampling probe for sampling a test gas from a high-speed gas stream to gas detection means.
【０００２】[0002]
【従来の技術】半導体製造用ガスのように大気に放出さ
れた場合、環境への影響が大きいガスの貯蔵に際して
は、図３に示したようにボンベ等の容器Ａを、排気ダク
トＢが設けられた閉空間Ｃに収容し、常時大流量で換気
が行われ、また排気ダクトＢの近傍にガスサンプリング
プローブＤを配置し、チューブＥによりガス検出手段Ｆ
に接続して容器Ａや配管Ｇ等からのガスの漏洩を逸早く
検出するように設備されている。2. Description of the Related Art As shown in FIG. 3, an exhaust duct B is provided for a container A such as a cylinder as shown in FIG. A gas sampling probe D is arranged near the exhaust duct B, and the gas detecting means F is provided by a tube E.
Is installed so as to quickly detect gas leakage from the container A, the pipe G, or the like.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、ガス検
出手段は、その特性上、加圧流体に晒されると検出感度
等の特性が大きく変化するため、最大でも毎分数リット
ル程度でしかサンプリングすることができず、ガス塊と
なってダクトを流れる被検ガスを短時間で確実にガス検
出手段Ｆに導くことが困難となる。このような問題を解
消するため、先端がテーパ状に拡開したロート状のガス
採取口をサンプリングチューブの先端に接続することも
考えられるが、流体抵抗体として作用して排気を阻害す
るばかりでなく、上述したようにサンプリング時の流速
が極めて低いため、ガス採取口に淀みが生じ、確実に検
出できる保証がない。本発明はこのような問題に鑑みて
なされたものであって、その目的とするところは、高速
で流れる流体中から目的のガスを確実にガス検出手段に
導くことができるガスサンプリングプローブを提供する
ことである。However, the gas detection means, due to its characteristics, greatly changes characteristics such as detection sensitivity when exposed to a pressurized fluid. Therefore, sampling can be performed only at a rate of several liters per minute at the maximum. Therefore, it is difficult to reliably guide the test gas flowing through the duct as a gas mass to the gas detecting means F in a short time. In order to solve such a problem, it is conceivable to connect a funnel-shaped gas sampling port whose tip is expanded in a tapered shape to the tip of the sampling tube, but it only acts as a fluid resistor and hinders exhaust. In addition, as described above, since the flow rate at the time of sampling is extremely low, stagnation occurs in the gas sampling port, and there is no guarantee that the gas can be detected reliably. The present invention has been made in view of such a problem, and an object of the present invention is to provide a gas sampling probe capable of reliably guiding a target gas from a fluid flowing at high speed to gas detection means. That is.
【０００４】[0004]
【課題を解決するための手段】このような問題を解消す
るために本発明においては、一端がガス吸引手段に接続
され、他端が封止されたガス非吸着性材料からなる管体
に、その長手方向に所定の間隔で前記管体の内径よりも
細い複数の貫通孔を穿設して構成されている。In order to solve such a problem, according to the present invention, a tube made of a gas non-adsorbing material having one end connected to gas suction means and the other end sealed is provided. A plurality of through holes smaller than the inner diameter of the tube are formed at predetermined intervals in the longitudinal direction.
【０００５】[0005]
【作用】管体に作用する負圧を、長手方向に分散して形
成された各貫通孔に作用させて管体が延びる領域の被検
ガスを吸引する。The negative pressure acting on the tube is applied to each through-hole formed in the longitudinal direction so as to suck the test gas in the region where the tube extends.
【０００６】[0006]
【発明の実施の態様】そこで以下に本発明の詳細を図示
した実施例に基づいて説明する。図１は、本発明のガス
サンプリングプローブの一実施例を示すものであって、
好ましくは、被検出ガスの吸着が極めて少ない材料、例
えばポリフッ化エチレン（または、ポリテトラフルオロ
エチレン）を管体１の一端１ａを栓体２で封止するとと
もに、周囲に貫通孔２を複数穿設して構成されている。
このような管体１は、ガスサンプリングチューブとして
多用されているポリフッ化エチレン性のチューブを加工
するのが望ましい。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a first embodiment of the present invention. FIG. 1 shows an embodiment of the gas sampling probe of the present invention,
Preferably, one end 1a of the tube 1 is sealed with a stopper 2 and a plurality of through-holes 2 are formed in the periphery of a material that absorbs a gas to be detected extremely little, for example, polyfluoroethylene (or polytetrafluoroethylene). It is configured to be installed.
For such a tube 1, it is desirable to process a polyfluorinated ethylene tube which is frequently used as a gas sampling tube.
【０００７】具体的には、外径６mm、内径４mmのポリフ
ッ化エチレンからなるチューブを所定の長さ、例えばダ
クトの内径（１００mm）＋接続代（７５mm）＝１７５mm
に切断して管体を形成し、管体１の一端に栓体２を挿入
して封止するとともに、少なくとも接続代を除く領域に
長手方向に略一定のピッチ、たとえば１５mmの間隔で管
体の内径よりも細い複数の貫通孔２を放射状に穿設して
構成されている。Specifically, a tube made of polyfluoroethylene having an outer diameter of 6 mm and an inner diameter of 4 mm is connected to a predetermined length, for example, the inner diameter of the duct (100 mm) + the connection allowance (75 mm) = 175 mm.
And a plug 2 is inserted into one end of the tube 1 to seal it. At least a region except for the connection allowance is provided at a substantially constant pitch in the longitudinal direction, for example, at an interval of 15 mm. Are formed by radially piercing a plurality of through-holes 2 smaller than the inner diameter.
【０００８】貫通孔２は、被検ガスを確実に捕集するた
め、直径０．５mm乃至２．０mmの孔形を有し、略均等の
ピッチ、例えば１５mmで穿設するのが望ましい。すなわ
ち、図２に示したように、貫通孔の直径が０．５mmより
小さい場合には通気抵抗が大きくサンプリングガスの全
体の吸引量が低下し、また２．０mm、より詳細には１．
５mmよりも大きい場合には、貫通孔２に作用する吸引圧
が先端側程急激に低下し、被検ガスを確実に検出手段に
供給することができず、感度が低下する。The through-holes 2 have a diameter of 0.5 mm to 2.0 mm and are preferably formed at a substantially uniform pitch, for example, 15 mm, in order to reliably collect the test gas. That is, as shown in FIG. 2, when the diameter of the through-hole is smaller than 0.5 mm, the ventilation resistance is large and the overall suction amount of the sampling gas is reduced.
If it is larger than 5 mm, the suction pressure acting on the through-hole 2 drops sharply toward the tip, and the test gas cannot be reliably supplied to the detection means, and the sensitivity decreases.
【０００９】この実施例において、プローブを排気ダク
トの気流の流れに直交するように配置し、ガス検出手段
を作動させると、ガス検出手段に内蔵されているポンプ
により発生した負圧がサンプリングチューブを介してプ
ローブに作用する。もとより、プローブの貫通孔２の直
径は、小さいから各貫通孔には強い負圧が作用してプロ
ーブが延びている領域の空気が確実に吸引されてガスセ
ンサに供給される。In this embodiment, when the probe is arranged so as to be orthogonal to the flow of the airflow in the exhaust duct and the gas detecting means is operated, the negative pressure generated by the pump built in the gas detecting means causes the sampling tube to flow. Act on the probe through. Of course, since the diameter of the through hole 2 of the probe is small, a strong negative pressure acts on each through hole, so that air in the region where the probe extends is reliably sucked and supplied to the gas sensor.
【００１０】また、プローブは、ダクトを横切るように
配置されているから、被検出ガスが塊となって流れたと
しても、プローブに形成されている複数の貫通孔のいず
れからか吸引され、確実に検出することができる。ま
た、非ガス吸着性材料でプローブを形成すれば、吸着性
の高いＢＦ3等のガスであっても、サンプリング流路や
プローブに吸着されることなくなり、ガス検出手段に高
い収率で供給することができる。[0010] Further, since the probe is arranged so as to cross the duct, even if the gas to be detected flows as a lump, it is sucked from one of the plurality of through holes formed in the probe to ensure the suction. Can be detected. Further, if the probe is formed of a non-gas-adsorbing material, even a gas such as BF3 having a high adsorptivity will not be adsorbed by the sampling channel or the probe, and can be supplied to the gas detecting means with a high yield. Can be.
【００１１】なお、上述の実施例においては、プローブ
として適した長さの管体に貫通孔を穿設するようにして
いるが、サンプリングチューブの先端を栓体で封止して
チューブの先端近傍に前述の複数の貫通孔を穿設して構
成しても同様の作用を奏し、またプローブとサンプリン
グチューブとを接続するためのカップラーが不要とな
る。In the above-described embodiment, a through-hole is formed in a tube having a length suitable for a probe. The same effect can be obtained even if a plurality of through-holes are formed by drilling the above, and a coupler for connecting the probe and the sampling tube is not required.
【００１２】[0012]
【発明の効果】以上、説明したように本発明によれば、
一端がガス吸引手段に接続され、他端が封止されたガス
非吸着性材料からなる管体に、その長手方向に所定の間
隔で前記管体の内径よりも細い複数の貫通孔を穿設して
構成されているので、管体に作用する負圧を、長手方向
に分散した形成された各貫通孔に作用させて管体が延び
る領域の被検ガスを吸引し、高速流のエアに存在する被
検ガス塊から被検ガスを確実にサンプリングすることが
できる。As described above, according to the present invention,
A plurality of through-holes smaller than the inner diameter of the tubular body are formed at predetermined intervals in the longitudinal direction of the tubular body made of a gas non-adsorbent material, one end of which is connected to the gas suction means and the other end of which is sealed. As a result, the negative pressure acting on the pipe is applied to the through holes formed in the longitudinal direction to suck the test gas in the region where the pipe extends, and the high-speed air is generated. The test gas can be reliably sampled from the existing test gas mass.
【図１】本発明のガスサンプリングプローブの一実施例
を示す図である。FIG. 1 is a view showing one embodiment of a gas sampling probe of the present invention.
【図２】同上プローブの貫通孔と検出感度との関係を示
す線図である。FIG. 2 is a diagram showing a relationship between a through hole of the probe and detection sensitivity.
【図３】ガス貯蔵設備の一例を示す図である。FIG. 3 is a diagram illustrating an example of a gas storage facility.
１ 管体 ２ 貫通孔 1 tube 2 through hole
───────────────────────────────────────────────────── フロントページの続き (72)発明者 中村 幸男 東京都板橋区小豆沢２丁目７番６号 理研 計器株式会社内 (72)発明者 小林 長生 東京都板橋区小豆沢２丁目７番６号 理研 計器株式会社内 Ｆターム(参考） 2G052 AA02 AC27 AC28 AD02 AD22 AD42 BA03 BA14 CA04 CA12 GA21 JA09 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yukio Nakamura 2-7-6 Shozuzawa, Itabashi-ku, Tokyo RIKEN Keiki Co., Ltd. (72) Inventor Chosei Kobayashi 2-7-6 Shozuzawa, Itabashi-ku, Tokyo RIKEN Keiki F term in reference (reference) 2G052 AA02 AC27 AC28 AD02 AD22 AD42 BA03 BA14 CA04 CA12 GA21 JA09
Claims (2)
封止されたガス非吸着性材料からなる管体に、その長手
方向に所定の間隔で前記管体の内径よりも細い複数の貫
通孔を穿設してなるガスサンプリングプローブ。1. A pipe made of a gas non-adsorptive material, one end of which is connected to a gas suction means and the other end of which is sealed. Gas sampling probe with a through hole.
レンのチューブにより構成され、貫通孔の直径が０．５
mm乃至１．５mmである請求項１に記載のサンプリングプ
ローブ。2. The pipe body is made of a polyfluoroethylene tube having an inner diameter of 4 mm, and the diameter of the through hole is 0.5 mm.
2. The sampling probe according to claim 1, wherein the diameter of the sampling probe is from 1.5 mm to 1.5 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001149293A JP2002340753A (en) | 2001-05-18 | 2001-05-18 | Gas-sampling probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001149293A JP2002340753A (en) | 2001-05-18 | 2001-05-18 | Gas-sampling probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002340753A true JP2002340753A (en) | 2002-11-27 |
Family
ID=18994487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001149293A Pending JP2002340753A (en) | 2001-05-18 | 2001-05-18 | Gas-sampling probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002340753A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162322A (en) * | 2004-12-03 | 2006-06-22 | Riken Keiki Co Ltd | Gas collection tube |
| JP2009180739A (en) * | 2005-10-24 | 2009-08-13 | Camfil Farr Inc | Method and apparatus for v-bank filter bed scanning |
| JP2012093156A (en) * | 2010-10-26 | 2012-05-17 | Chugoku Electric Power Co Inc:The | Exhaust gas collection device and ammonia collection method using the same |
| CN107966331A (en) * | 2017-10-23 | 2018-04-27 | 中国科学院东北地理与农业生态研究所 | The harvester and method that field test soil-plant system organic pollution soil-gas exchanges |
-
2001
- 2001-05-18 JP JP2001149293A patent/JP2002340753A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162322A (en) * | 2004-12-03 | 2006-06-22 | Riken Keiki Co Ltd | Gas collection tube |
| JP4638209B2 (en) * | 2004-12-03 | 2011-02-23 | 理研計器株式会社 | Gas collection tube |
| JP2009180739A (en) * | 2005-10-24 | 2009-08-13 | Camfil Farr Inc | Method and apparatus for v-bank filter bed scanning |
| JP4608003B2 (en) * | 2005-10-24 | 2011-01-05 | カムフィル ファー，インコーポレーテッド | Method and apparatus for V-bank filter bed scanning |
| JP2012093156A (en) * | 2010-10-26 | 2012-05-17 | Chugoku Electric Power Co Inc:The | Exhaust gas collection device and ammonia collection method using the same |
| CN107966331A (en) * | 2017-10-23 | 2018-04-27 | 中国科学院东北地理与农业生态研究所 | The harvester and method that field test soil-plant system organic pollution soil-gas exchanges |
| CN107966331B (en) * | 2017-10-23 | 2020-08-14 | 中国科学院东北地理与农业生态研究所 | Collection system for testing soil-plant system organic pollutant soil-gas exchange |
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