JP2002326230A - Method and apparatus for manufacturing mold, and mold and molding - Google Patents
Method and apparatus for manufacturing mold, and mold and moldingInfo
- Publication number
- JP2002326230A JP2002326230A JP2001136087A JP2001136087A JP2002326230A JP 2002326230 A JP2002326230 A JP 2002326230A JP 2001136087 A JP2001136087 A JP 2001136087A JP 2001136087 A JP2001136087 A JP 2001136087A JP 2002326230 A JP2002326230 A JP 2002326230A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- indenter
- base material
- manufacturing
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、光学素材（光学素
子材料）、例えば、マイクロレンズアレイを高精度に金
型成形するための金型製造方法、金型製造装置，金型及
び成形品に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mold manufacturing method, a mold manufacturing apparatus, a mold and a molded product for molding an optical material (optical element material), for example, a microlens array with high precision. .
【０００２】[0002]
【従来の技術】近年、マイクロレンズアレイを用いた固
体書き込みユニットが増えている。この方式では従来の
LDラスタ書き込みユニットより高速化、小型化というメ
リットが挙げられている。この複数の軸対称球面あるい
は非球面を有するマイクロレンズアレイの加工を行うた
めにプレス塑性加工法が利用されているものが知られて
いる。プレス塑性加工法では、金型母材に圧子を一定の
荷重で押圧し、一定の間隔で多数の圧痕を形成させるの
で短時間で金型を作製することができるメリットがあ
る。しかし、プレス塑性法は加工対象物に塑性変形を与
え，所望な形状を得る手段である。体積不変の原理に基
づき形成された形状に相当する塑性変形量は必ず別の場
所に移動しなければならない。例えば、球状凹部の場
合、ほとんどその凹部の周りに***部が生じる。つま
り、球状凹部を形成するために塑性変形量がその周りに
逃げる。この***部はレンズ面の形状精度を劣化させる
と同時にアレイ形状のため、圧痕同士の干渉も生じてし
てしまうという大きな問題点をもたらしている。従っ
て、このような問題点を抱える金型で高精度なマイクロ
レンズアレイを製造するのは困難である。2. Description of the Related Art In recent years, solid-state writing units using a microlens array have been increasing. In this method, the conventional
The advantages of higher speed and smaller size than the LD raster writing unit are mentioned. It is known that a press plastic working method is used to process a microlens array having a plurality of axisymmetric spherical surfaces or aspherical surfaces. The press plastic working method has an advantage that a mold can be manufactured in a short time because an indenter is pressed against a mold base material with a fixed load to form a large number of indentations at fixed intervals. However, the press plasticity method is a means for giving a plastic deformation to an object to be processed and obtaining a desired shape. The amount of plastic deformation corresponding to the shape formed based on the principle of volume invariance must be moved to another place. For example, in the case of a spherical concave portion, a bump is formed almost around the concave portion. That is, the amount of plastic deformation escapes to form a spherical concave portion. The raised portions degrade the accuracy of the shape of the lens surface, and at the same time, bring about a serious problem that interference between indentations occurs due to the array shape. Therefore, it is difficult to manufacture a highly accurate microlens array using a mold having such a problem.
【０００３】[0003]
【発明が解決しようとする課題】また、公知技術とし
て、例えば、特開平１１−２７７５４３号公報が挙げら
れる。この「マイクロレンズアレイ成形用金型の作成方
法」は、図（６）（ａ）に示すように曲率半径の小さい
第１の圧子を用いて、金型の表面に押圧を行い球状凹部
を形成させるという第１工程と、この押し込み加工によ
る球状凹部の周りに形成された***部１０をＣＭＰ（化
学的機械的研磨）により研磨して取り除く第２工程と
（図６（ｂ）に示す）、そして最後に曲率半径の大きい
第２の圧子を用いて先ほど第１工程で押圧した球状凹部
の上に押し込み最終的なくぼみ形状を形成する第３の工
程との３つの工程でこの問題を解決しようとしている。
しかし、このような製造方法では工程数が多く、そして
一番問題となりうる点はＣＭＰの第２工程である。球状
凹部の周りの***部１０を狙って研磨して取り除く時に
必ずしもその部分だけが除去されることを保証できな
い。特にマイクロレンズの場合、くぼみの深さは何十μ
ｍ，何百μｍのオーダーであり、研磨除去量の制御は難
しく、***部１０と共にせっかく形成した凹部も除去さ
れる可能性が高い。従って、このマイクロレンズアレイ
金型の作製法の実用化は困難である。As a known technique, for example, JP-A-11-277543 is cited. In this “method for producing a microlens array molding die”, a spherical concave portion is formed by pressing the surface of the die using a first indenter having a small radius of curvature as shown in FIGS. And a second step of polishing and removing the raised portion 10 formed around the spherical concave portion by the indentation process by CMP (chemical mechanical polishing) (shown in FIG. 6B). Finally, the second indenter having a large radius of curvature is used to solve this problem in three steps: a third step in which the second indenter is pressed onto the spherical recess pressed in the first step to form a final recessed shape. And
However, in such a manufacturing method, the number of steps is large, and the most problematic point is the second step of CMP. When polishing and removing the raised portion 10 around the spherical concave portion, it is not always guaranteed that only that portion is removed. Especially in the case of a micro lens, the depth of the depression is tens of microns.
m, which is on the order of hundreds of μm, and it is difficult to control the amount of polishing removal, and it is highly possible that the recesses formed together with the protrusions 10 are also removed. Therefore, it is difficult to put this microlens array mold into practical use.
【０００４】本発明は、以上の事情に鑑みて発明された
ものであり、押圧時に***部が発生せず***部の研磨除
去が不要となると共に高精度の金型の製作が可能にな
り、光学素子を高精度に、かつ多数個比較的簡単な工程
でマイクロレンズアレイなどが製造できる金型製造方法
とその装置、金型及び成形品を提供することを目的とす
る。The present invention has been made in view of the above circumstances, and no raised portion is generated at the time of pressing, so that the raised portion is not required to be polished and removed, and a highly accurate mold can be manufactured. It is an object of the present invention to provide a mold manufacturing method, a device, a mold, and a molded product capable of manufacturing a microlens array or the like with high precision and a large number of optical elements by relatively simple steps.
【０００５】[0005]
【課題を解決するための手段】本発明は、以上の目的を
達成するために、請求項１に記載の金型製造方法は、金
型母材の表面に圧子を押圧し転写される光学素材の輪郭
に見合う圧痕部を形成してなる金型の製造方法であっ
て、前記圧子の先端形状を前記光学素材の輪郭とほぼ一
致する形状に形成し、前記金型母材を温度Ｔ1に一定に
保持した状態で前記圧子を押圧することを特徴とする。
金型母材を温度Ｔ1に保温した状態で圧子による押圧を
行なうことにより、常温で押圧する場合の不均一変形が
なくなり、***部の発生も減少する。これにより、高精
度の圧痕ができ、光学素子の輪郭に見合った高精密な金
型を製造することができる。According to the present invention, in order to achieve the above object, an optical material transferred by pressing an indenter onto a surface of a mold base material is provided by a method for manufacturing a mold according to claim 1. A method for manufacturing a mold, comprising forming an indented portion corresponding to the contour of (a), wherein the tip shape of the indenter is formed to a shape substantially matching the contour of the optical material, and the mold base material is heated to a temperature T 1 . The indenter is pressed while being held constant.
By performing pressing by indenter while kept the mold base material to a temperature T 1, there is no non-uniform deformation of the case for pressing at room temperature, also decreases the occurrence of the raised portion. As a result, high-precision indentations are formed, and a high-precision mold that matches the contour of the optical element can be manufactured.
【０００６】また、請求項２に記載の金型製造方法は、
金型母材の表面に圧子を押圧し転写される光学素材の輪
郭に見合う圧痕部を形成してなる金型の製造方法であっ
て、前記圧子の先端形状を前記光学素材の輪郭とほぼ一
致する形状に形成し、前記金型母材を温度Ｔ1に一定に
保持した状態で前記圧子を押圧すると共に、押圧後に温
度Ｔ1よりも高い温度Ｔ2で焼鈍することを特徴とする。
焼鈍工程を入れることにより、金型の硬度を所望の高硬
度にすることができ、耐久性のある高精度金型を製造す
ることができる。[0006] The method of manufacturing a mold according to claim 2 is characterized in that:
A method of manufacturing a mold comprising pressing an indenter on the surface of a mold base material and forming an indented portion corresponding to the contour of the optical material to be transferred, wherein the tip shape of the indenter substantially matches the contour of the optical material. The indenter is pressed in a state where the mold base material is maintained at a constant temperature T 1 , and annealing is performed at a temperature T 2 higher than the temperature T 1 after the pressing.
By including the annealing step, the hardness of the mold can be set to a desired high hardness, and a durable high-precision mold can be manufactured.
【０００７】また、請求項３に記載の金型製造方法は、
前記光学素材がマイクロレンズアレイであることを特徴
とする。光学素材としてはマイクロレンズアレイが光学
部品としては広く使用され、該部品は高精度部品であ
り、この金型製造方法によってマイクロレンズアレイを
高精度に製造することができる。[0007] The method of manufacturing a mold according to claim 3 is characterized in that:
The optical material is a microlens array. As an optical material, a microlens array is widely used as an optical component. The component is a high-precision component, and the microlens array can be manufactured with high precision by this mold manufacturing method.
【０００８】また、本発明の請求項４に記載の金型製造
方法は、前記圧痕部が、単一の前記金型母材に多数個形
成されることを特徴とする。単一の金型母材に多数個の
圧痕部が形成されるため、多量の光学素材を効率的に作
ることが容易にできる。In a fourth aspect of the present invention, in the method of manufacturing a mold, a large number of the indentations are formed on a single mold base material. Since a large number of indentations are formed in a single mold base material, it is easy to efficiently produce a large amount of optical materials.
【０００９】また、本発明の請求項５に記載の金型製造
方法は、前記金型母材は、前記圧痕部の形成される表面
にアモルファス合金層を形成することを特徴とする。金
型の表面にアルモルファス合金層を作ることによりより
高精度で高硬度の金型を得ることができ、耐久性の向上
も図れる。In a fifth aspect of the present invention, the method of manufacturing a mold is characterized in that the mold base material forms an amorphous alloy layer on a surface on which the impression is formed. By forming an aluminum alloy layer on the surface of the mold, a mold with higher precision and higher hardness can be obtained, and the durability can be improved.
【００１０】また、本発明の請求項６に記載の金型製造
方法は、前記温度Ｔ1が、前記アモルファス合金層のガ
ラス転移温度Ｔｇと結晶化温度Ｔｘとの間（Ｔｇ＜Ｔ1
＜Ｔｘ）にあることを特徴とする。ガラス転移温度Ｔｇ
以上にあるとアモルファス金型は過冷却液体状態とな
り、軟化が生じ変形し易くなる。このため、圧子の押圧
により***部が生じ難くなる。また、温度Ｔ1が結晶化
温度Ｔｘ以上になると結晶化し押圧し難くなる。従っ
て、Ｔｇ＜Ｔ1＜Ｔｘの範囲にＴ1を保持することにより
***部のない高精度の圧痕部を効果的に形成することが
できる。According to a sixth aspect of the present invention, in the metal mold manufacturing method, the temperature T 1 is between the glass transition temperature Tg and the crystallization temperature Tx of the amorphous alloy layer (Tg <T 1).
<Tx). Glass transition temperature Tg
With the above, the amorphous mold is in a supercooled liquid state, and is softened and easily deformed. For this reason, a raised portion is less likely to be generated by the pressing of the indenter. Further, the temperature T 1 is less likely to push crystallized to become higher than the crystallization temperature Tx. Therefore, it is possible to effectively form the indentations of no ridges precision by holding the T 1 in the range of Tg <T 1 <Tx.
【００１１】また、請求項７に記載の金型製造方法は、
前記圧子による金型母材の温度Ｔ1による押圧工程と温
度Ｔ2での焼鈍工程とは真空あるいは不活性ガス雰囲気
の中で行われることを特徴とする。押圧工程や焼鈍工程
を真空又は不活性ガス雰囲気内で行なうことにより圧子
や金型の酸化などの化学反応が防止され、マイクロレン
ズアレイの形状をより高精度に製作でき、かつ圧子や金
型の耐久性の向上が図れる。[0011] The method of manufacturing a mold according to claim 7 is characterized in that:
The step of pressing the mold base material with the indenter at the temperature T 1 and the step of annealing at the temperature T 2 are performed in a vacuum or an inert gas atmosphere. By performing the pressing step and the annealing step in a vacuum or inert gas atmosphere, chemical reactions such as oxidation of the indenter and the mold are prevented, the shape of the microlens array can be manufactured with higher precision, and the indenter and the mold The durability can be improved.
【００１２】また、請求項８に記載の金型製造方法は、
前記圧子による金型母材の押圧工程又は前記押圧工程と
焼鈍工程が終了した後、前記圧痕部の形状と前記光学素
材の目標形状との差異を検出した後、前記圧子をその差
異分に見合う分だけ修正した後、前記押圧工程や焼鈍工
程を繰返し行なうことを特徴とする。アモルファス合金
の場合、結晶材と異なり構造的にランダムであり、通
常、加熱により構造緩和が生じ、全体的に縮む特性があ
る。このため、圧子による押圧が終了した後に、その圧
痕部の形状を測定し、これを目的の形状に合致させる修
正工程が必要になる。これにより、より高精度の成形品
を作成し得る金型の製造が可能になる。[0012] The method for manufacturing a mold according to claim 8 is characterized in that:
After the pressing step of the mold base material by the indenter or the pressing step and the annealing step are completed, after detecting the difference between the shape of the indented portion and the target shape of the optical material, the indenter is matched to the difference. It is characterized in that the pressing step and the annealing step are repeatedly performed after the correction by the amount. In the case of an amorphous alloy, unlike a crystalline material, it is structurally random, and generally has a property of causing structural relaxation by heating and shrinking as a whole. For this reason, after the pressing by the indenter is completed, it is necessary to perform a correction step of measuring the shape of the indented portion and making it match the desired shape. Accordingly, it is possible to manufacture a mold capable of producing a molded product with higher precision.
【００１３】また、請求項９に記載の金型製造装置は、
前記の各金型製造方法によって金型を製作するための装
置であり、この装置により夫々の特性に対応した高精度
の金型を製作することができる。[0013] Further, according to a ninth aspect of the present invention, there is provided a mold manufacturing apparatus.
This is an apparatus for manufacturing a mold by each of the above-described mold manufacturing methods. With this apparatus, a highly accurate mold corresponding to each characteristic can be manufactured.
【００１４】また、本発明の請求項１０に記載の金型製
造装置は、前記金型母材を搭載し位置決め制御するＮＣ
テーブルと、前記金型母材を加温し保温し焼鈍するため
の熱処理装置と、金型母材の表面に光学素材の輪郭形状
に見合う圧痕部を形成するための圧子と、この圧子の荷
重印加装置とを備えるものからなることを特徴とする。
以上の構成により、所望の金型を安定、かつ効率的に製
作することができる。According to a tenth aspect of the present invention, there is provided a die manufacturing apparatus for mounting and controlling the positioning of the die base material.
A table, a heat treatment apparatus for heating, keeping and annealing the mold base material, an indenter for forming an indentation on the surface of the mold base material corresponding to the contour shape of the optical material, and a load of the indenter And an application device.
With the above configuration, a desired mold can be manufactured stably and efficiently.
【００１５】また、本発明の請求項１１に記載の金型製
造装置は、金型母材を真空又は不活性ガス雰囲気内に収
納するための環境保持手段が付設されることを特徴とす
る。焼鈍手段を付設するため、高精度で耐久性のある金
型を製作することができる。The mold manufacturing apparatus according to the present invention is characterized in that an environment holding means for accommodating the mold base material in a vacuum or an inert gas atmosphere is additionally provided. Since the annealing means is provided, a highly accurate and durable mold can be manufactured.
【００１６】また、本発明の請求項１２に記載の金型製
造装置は、前記圧子の先端転写面が、セラミックス，超
硬合金，サーメットのいずれかの材料から形成され鏡面
仕上げされることを特徴とする。圧子を前記材料から形
成することにより圧子が高強度になり、その寿命の向上
が図れる。According to a twelfth aspect of the present invention, the die transfer surface of the indenter is formed of any one of ceramics, cemented carbide, and cermet, and is mirror-finished. And By forming the indenter from the above-mentioned material, the indenter has a high strength and its life can be improved.
【００１７】また、本発明の請求項１３に記載の金型
は、請求項１乃至８のいずれかに記載の金型製造方法ま
たは、請求項９乃至１２のいずれかに記載の金型製造装
置によって製造されることを特徴とする。以上に説明し
た金型製造方法や金型製造装置により作製されるもので
あり、高精度，高寿命の金型が得られる。According to a thirteenth aspect of the present invention, there is provided a die manufacturing method according to any one of the first to eighth aspects, or a die manufacturing apparatus according to the ninth to twelfth aspects. It is characterized by being manufactured by. The mold is manufactured by the mold manufacturing method and the mold manufacturing apparatus described above, and a mold with high accuracy and long life can be obtained.
【００１８】また、本発明の請求項１４に記載の成形品
は、請求項１３の金型によって製造されることを特徴と
する。以上に説明した金型により成形品は製造されるた
め、高精度の成形品を効率的に作ることができる。According to a fourteenth aspect of the present invention, there is provided a molded article manufactured by the mold according to the thirteenth aspect. Since a molded article is manufactured by the above-described mold, a highly accurate molded article can be efficiently produced.
【００１９】また、本発明の請求項１５に記載の成形品
は、前記成形品がマイクロレンズアレイであることを特
徴とする。以上により、高精度のマイクロレンズアレイ
を効率的に作ることができる。The molded article according to claim 15 of the present invention is characterized in that the molded article is a microlens array. As described above, a highly accurate microlens array can be efficiently produced.
【００２０】[0020]
【発明の実施の形態】以下、本発明のマイクロレンズア
レイ金型製造方法と製造装置と金型及び成形品を図面を
参照して詳述する。以下に説明する実施の形態は本発明
の１つの実施の形態における金型製造方法を説明するも
のであり、その他の各種の条件による金型製造方法につ
いては本実施の形態による説明で理解可能なため重複記
載を省略する。また、本実施の形態では金型母材２は温
度Ｔ1に加温，保温された状態で押圧されるが、これは
図５に示すように常温による押圧では圧痕部９のまわり
の***部１０が生ずるためである。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a method and apparatus for manufacturing a microlens array die according to the present invention, a die and a molded product will be described in detail with reference to the drawings. The embodiment described below describes a mold manufacturing method according to one embodiment of the present invention, and a mold manufacturing method based on other various conditions can be understood from the description of the present embodiment. Therefore, duplicate description is omitted. Further, in the present embodiment, the mold base material 2 is pressed while being heated and kept at the temperature T 1 , but as shown in FIG. This is because 10 occurs.
【００２１】まず、図２により、本発明のマイクロレン
ズアレイ金型を製作するための金型製造装置１の概要構
造を説明する。ＮＣテーブル５上には金型母材２を加温
し一定温度Ｔ1に保温したり焼鈍温度のＴ2に金型母材２
を加熱保持するための熱処理装置３が設けられている。
なお、熱処理装置の内、焼鈍装置は別体のものでもよ
い。また、金型母材２のまわりにはこれを囲んでその周
囲を真空又は不活性ガス雰囲気に保持するための環境保
持手段６が配設される。また、金型母材２の真上には圧
子４が配置され、圧子は荷重印加装置７により押圧され
る。また、金型母材２にはその温度を測定するための温
度計８が設けられている。First, the schematic structure of a mold manufacturing apparatus 1 for manufacturing a microlens array mold according to the present invention will be described with reference to FIG. NC Table 5 on the mold base material 2 warmed constant temperature T 1 of the mold base material 2 to T 2 of the insulation or annealing temperature
Is provided with a heat treatment apparatus 3 for heating and maintaining the heat treatment.
Note that, of the heat treatment devices, the annealing device may be a separate device. Further, an environment holding means 6 is provided around the mold base material 2 to surround the mold base material 2 and hold the surroundings in a vacuum or an inert gas atmosphere. Further, an indenter 4 is disposed right above the mold base material 2, and the indenter is pressed by the load applying device 7. The mold base material 2 is provided with a thermometer 8 for measuring the temperature.
【００２２】以上の金型製造装置１により圧子４を荷重
印加装置７により金型母材２の表面に押圧することによ
り、金型母材２の表面には図３に示すような圧痕部９が
形成される。この圧痕部９の形状が光学素材等の成形品
の目標輪郭形状に合致する。The indenter 4 is pressed against the surface of the mold base material 2 by the load applying device 7 by the mold manufacturing apparatus 1 described above, so that the indentation portion 9 shown in FIG. Is formed. The shape of the indented portion 9 matches the target contour shape of a molded product such as an optical material.
【００２３】次に、図１のフローチャートにより本発明
の一実施の形態に係る金型製造方法を説明する。まず、
金型母材２の表面にアモルファス合金層を形成する（ス
テップ１００）。次に、金型母材２を熱処理装置３によ
り加温し温度Ｔ1の状態に保持する（ステップ１０
１）。なお、Ｔ1はＴｇ＜Ｔ1＜Ｔｘの値とする。ここで
Ｔｇはガラス転移温度であり、Ｔｘは結晶化温度であ
る。次に、ＮＣテーブル５により金型母材２を所定位置
に位置決めする（ステップ１０２）。次に、金型母材２
を環境保持手段６により囲み、真空又は不活性ガス雰囲
気中に金型母材２を置く（ステップ１０３）。Next, a mold manufacturing method according to an embodiment of the present invention will be described with reference to the flowchart of FIG. First,
An amorphous alloy layer is formed on the surface of the mold base material 2 (step 100). Next, the mold base material 2 is heated by the heat treatment device 3 and maintained at the temperature T 1 (step 10).
1). Incidentally, T 1 is the value of Tg <T 1 <Tx. Here, Tg is a glass transition temperature, and Tx is a crystallization temperature. Next, the mold base material 2 is positioned at a predetermined position by the NC table 5 (step 102). Next, mold base material 2
Is surrounded by the environment holding means 6, and the mold base material 2 is placed in a vacuum or inert gas atmosphere (step 103).
【００２４】次に、荷重印加装置７により圧子４を押圧
し、金型母材２の表面を押圧し（ステップ１０４）、圧
痕部９を形成する（ステップ１０５）。次に、引き続き
次の圧痕部９を形成する必要があるか否かを判断し（ス
テップ１０６）、必要の場合（ｙｅｓの場合）は次工程
のステップ１０７のＮＣテーブル移動に進む。また、否
の場合（ｎｏの場合）は圧痕部９の形成が完了したとし
てステップ１０９に進む。ステップ１０７でＮＣテーブ
ル５を移動し、金型母材２が次の加工位置に位置決めさ
れたか否かが判断される（ステップ１０８）。位置決め
された場合（ｙｅｓの場合）は次の圧痕部９の加工が進
められ、圧痕部形成完了の工程に進む（ステップ１０
９）。また、否の場合（ｎｏの場合）はステップ１０７
に戻り、繰返し行う。Next, the indenter 4 is pressed by the load applying device 7 to press the surface of the mold base material 2 (step 104), and the impression 9 is formed (step 105). Next, it is determined whether or not the next indentation portion 9 needs to be formed (step 106), and if necessary (in the case of yes), the process proceeds to the NC table movement of step 107 in the next process. If not (in the case of no), it is determined that the formation of the indentation portion 9 has been completed, and the process proceeds to step 109. In step 107, the NC table 5 is moved, and it is determined whether or not the mold base material 2 has been positioned at the next processing position (step 108). When the positioning is performed (in the case of yes), the processing of the next indented portion 9 is advanced, and the process proceeds to the step of completing the indented portion formation (Step 10)
9). If no (if no), step 107
Return to and repeat.
【００２５】圧痕部９の形成が完了したら、熱処理装置
３により金型母材２の焼鈍を温度Ｔ 2＞Ｔ1により行う
（ステップ１１０）。圧痕部９の形成は以上の工程で原
則的には終了するが、諸条件により圧痕部９の形状が光
学素子の目標の形状と合わない場合が生ずる。そこで圧
痕部９の形状が正しいか否かが判断される（ステップ１
１１）。正しい場合（ｙｅｓの場合）は金型製造は完了
する（ステップ１１２）。また、否の場合（ｎｏの場
合）は圧子４の先端部形状が修正され（ステップ１１
３）、ステップ１０４に戻る。When the formation of the indented portion 9 is completed, the heat treatment device
3, the annealing of the mold base material 2 is performed at the temperature T. Two> T1Do by
(Step 110). The formation of the indented portion 9 is based on the above steps.
Although the process is normally terminated, the shape of the indentation 9 may be
In some cases, the shape does not match the target shape of the element. So the pressure
It is determined whether the shape of the scar 9 is correct (step 1).
11). If correct (yes), mold production is complete
(Step 112). If no (no
In the case of (in case), the tip shape of the indenter 4 is corrected (step 11).
3) Return to step 104.
【００２６】次に、本実施の形態の実施例を説明する。 （実施例１）まず，金型の表面にアモルファス合金層を
付着する加工を行う合金の成分や付着方法はさまざまで
あるが、通常Ｎｉ−Ｐ無電解めっきはよく使われてい
る。ここで、表面にＮｉ−Ｐアモルファス合金層を有す
る金型での実施例を説明する。Ｎｉ−Ｐアモルファス層
は普通めっきされた後に、より高い硬さを求められるた
め、高温で熱処理が行われる。ここでは、Ｎｉ−Ｐアモ
ルファス合金層がめっきされた後に、熱処理を行わずそ
のまま研磨加工を実施して鏡面に仕上げる。そして図２
で示している金型製造装置１にセットする。金型をＴ1
の温度に保温しながら、圧子４を金型表面のＮｉ−Ｐア
モルファス合金層に押し付け、圧子４の先端形状を転写
する。アモルファス合金の場合、常温において極端な不
均一変形を起こすが、結晶化温度近くまで昇温すると均
一変形に変遷する。特に温度がガラス転移温度Ｔｇ以上
を超えると、アモルファス合金が過冷却液体状態とな
り、軟化が生じ、変形がよりしやすくなる。ガラス転移
温度Ｔｇはアモルファス合金の成分によるものである
が、Ｎｉ−Ｐアモルファス合金もＰの含有量により大き
く左右される。通常、このＴｇを求めるには、ＤＳＣと
呼ばれる示差走査熱量分析測定で測定できる。図４はア
モルファス合金のＤＳＣ曲線を模式的に表しているもの
である。また、アモルファス合金成分によって、Ｔｇと
Ｔｘがはっきりしない場合もあるが、結晶化開始温度Ｔ
ｘより１０℃ぐらい低い温度に昇温すれば、同じくアモ
ルファス合金の軟化が見られる。今回用いたＮｉ−Ｐア
モルファス合金層の結晶化温度Ｔｘは３８０℃であるた
め、Ｔ1を３７０℃に設定した。そして、図５で示して
いる常温のときと比べ、球状凹部の周りに***部１０が
生じなかった。次に、Ｔ1温度ですべてのレンズ面の押
圧加工を行った後に、更に金型をＴ2で焼鈍して、金型
を所望な硬さに達成させる。Ｎｉ−Ｐアモルファス合金
の場合、最大の硬さを得るための加熱温度はＰの含有量
に依存するが，通常は結晶化温度の付近で熱処理を行
う。今回は３７５℃で熱処理を行った後、Ｎｉ−Ｐアモ
ルファス合金層の硬さがＨｖ９００に達した。このよう
に、***部１０のない高精度なマイクロレンズアレイ金
型を作製することができた。Next, an example of this embodiment will be described. (Embodiment 1) First, Ni-P electroless plating is often used, although there are various alloy components and methods for performing processing for attaching an amorphous alloy layer to the surface of a mold. Here, an embodiment using a mold having a Ni-P amorphous alloy layer on the surface will be described. Since the Ni—P amorphous layer is usually required to have higher hardness after being plated, heat treatment is performed at a high temperature. Here, after the Ni-P amorphous alloy layer is plated, polishing is performed without heat treatment to finish the mirror surface. And FIG.
Is set in the mold manufacturing apparatus 1 indicated by. T 1 mold
The indenter 4 is pressed against the Ni-P amorphous alloy layer on the surface of the mold while the temperature is kept at the temperature described above, and the tip shape of the indenter 4 is transferred. In the case of an amorphous alloy, extreme non-uniform deformation occurs at room temperature, but changes to uniform deformation when the temperature is raised to near the crystallization temperature. In particular, when the temperature exceeds the glass transition temperature Tg or more, the amorphous alloy is in a supercooled liquid state, is softened, and is more easily deformed. Although the glass transition temperature Tg depends on the components of the amorphous alloy, the Ni-P amorphous alloy also largely depends on the P content. Usually, this Tg can be determined by differential scanning calorimetry called DSC. FIG. 4 schematically shows a DSC curve of the amorphous alloy. In some cases, Tg and Tx are not clear depending on the amorphous alloy component.
When the temperature is raised to about 10 ° C. lower than x, the amorphous alloy is also softened. Since the crystallization temperature Tx of the Ni—P amorphous alloy layer used this time was 380 ° C., T 1 was set to 370 ° C. Then, no raised portion 10 was formed around the spherical concave portion as compared with the case of the room temperature shown in FIG. Next, after all the lens surfaces are pressed at the temperature T 1 , the mold is further annealed at T 2 to achieve the desired hardness of the mold. In the case of a Ni-P amorphous alloy, the heating temperature for obtaining the maximum hardness depends on the P content, but usually, the heat treatment is performed near the crystallization temperature. In this case, after performing the heat treatment at 375 ° C., the hardness of the Ni—P amorphous alloy layer reached Hv900. As described above, a high-precision microlens array mold having no raised portion 10 could be manufactured.
【００２７】次に、実施例２を説明する。 （実施例２）前記のように、金型はＴ2で焼鈍された後
に、マイクロレンズアレイの形状が変化してしまうこと
がある。アモルファス合金の場合、結晶材と違って、構
造的にランダムであり、内部に沢山の空孔やボイドが存
在するので、通常加熱すると構造緩和が起こり、より安
定な結晶状態に近づけようとするため、全体的に縮む特
性がある。従って、まず、前記実施例１で記載している
手順の通りに、ダミーの金型にレンズアレイを作製す
る。そして、得たレンズ面形状を測定し、所望な形状と
の差を求めた。このデータのもとに、圧子の先端形状に
修正を行い、そして最後に修正した圧子４を用いて、本
番の金型にレンズアレイの作製を行う。このように、熱
処理によるマイクロレンズアレイ形状のずれは、圧子先
端形状の修正により補正され、より高精度なマイクロレ
ンズアレイ金型を作製することができる。Next, a second embodiment will be described. (Example 2) As described above, the mold after being annealed at T 2, which may be the shape of the microlens array changes. In the case of an amorphous alloy, unlike a crystalline material, it is structurally random and has many vacancies and voids inside, so when heated, structural relaxation usually occurs, in order to approach a more stable crystalline state , Has the property of shrinking as a whole. Therefore, first, a lens array is manufactured in a dummy mold according to the procedure described in the first embodiment. Then, the obtained lens surface shape was measured, and the difference from the desired shape was obtained. Based on this data, the shape of the tip of the indenter is corrected, and a lens array is manufactured in a real mold using the indenter 4 finally corrected. As described above, the deviation of the shape of the microlens array due to the heat treatment is corrected by correcting the tip shape of the indenter, so that a more accurate microlens array mold can be manufactured.
【００２８】以上の説明において、圧子４の先端部の形
状を図示のものとしたが、勿論、これに限定するもので
はなく、光学素子の輪郭形状に対応して適宜設定され
る。また、金型母材２の表面を覆う合金層もアモルファ
スに限定するものではない。In the above description, the shape of the tip portion of the indenter 4 is shown in the figure, but is not limited to this, and is appropriately set in accordance with the contour shape of the optical element. Further, the alloy layer covering the surface of the mold base material 2 is not limited to amorphous.
【００２９】[0029]
【発明の効果】１）本発明の請求項１の金型製造方法に
よれば、常温より高い一定の温度Ｔ1により金型母材は
保温された状態で押圧されるため***部が発生せず、ま
た、高精度の圧痕部を有する金型を形成することができ
る。 ２）本発明の請求項２の金型製造方法によれば、焼鈍工
程を設けることにより高硬度の金型ができ、耐久性の向
上が図れる。 ３）本発明の請求項３の金型製造方法によれば、光学素
材として広く使用されるマイクロレンズアレイを製作し
得る高精度金型を製造することができる。 ４）本発明の請求項４の金型製造方法によれば、単一の
金型母材に多数個の圧痕部が形成され、多数個の光学素
材を同時に製造でき、効率化が図れる。 ５）本発明の請求項５の金型製造方法によれば、金型母
材の表面にアモルファス合金層が形成されるため、高精
度で高硬度の金型ができ、耐久性の向上が図れる。 ６）本発明の請求項６の金型製造方法によれば、温度Ｔ
1をＴｇ＜Ｔ1＜Ｔｘの範囲にすることにより***部のな
い高精度の圧痕部を効率的に形成することができる。 ７）本発明の請求項７の金型製造方法によれば、真空や
不活性ガス雰囲気の中で金型が製作されるため、高精度
の金型ができ、かつその耐久性の向上も図れる。 ８）本発明の請求項８の金型製造方法によれば、第１の
押圧工程によって形成された圧痕部が目標の輪郭形状に
形成されない場合において圧子の修正ができ、再度の押
圧工程により高精度の目標通りの輪郭の圧痕部を形成す
ることができる。 ９）本発明の請求項９の金型製造装置によれば、前記請
求項１乃至８いずれかの要件を満足する構成要素から形
成され、高精度の金型を製造することができる。 １０）本発明の請求項１０の金型製造装置によれば、所
望の精度の金型を安全、かつ効率的に製作することがで
きる。 １１）本発明の請求項１１の金型製造装置によれば、焼
鈍手段を付設するため高硬度で耐久性のある金型を安全
製作することができる。 １２）本発明の請求項１２の金型製造装置は、圧子の材
料が特定されることにより耐久性の向上が図れる。 １３）本発明の請求項１３の金型によれば、高精密の成
形品を高効率に製作することができる。 １４）本発明の請求項１４の成形品によれば、この成形
品は高精度に、かつ高効率に製作される。 １５）本発明の請求項１５の成形品によれば、高精度の
マイクロレンズアレイが成形される。According to the production process of the mold tool according to claim 1, according to the present invention 1) The present invention, ridges since the mold base material is pressed in a state of being kept warm by temperatures T 1 higher constant than normal temperature not occur In addition, it is possible to form a mold having a high-precision impression. 2) According to the mold manufacturing method of the second aspect of the present invention, a mold having high hardness can be obtained by providing an annealing step, and the durability can be improved. 3) According to the mold manufacturing method of the third aspect of the present invention, a high-precision mold capable of manufacturing a microlens array widely used as an optical material can be manufactured. 4) According to the mold manufacturing method of the fourth aspect of the present invention, a large number of indentations are formed on a single mold base material, so that a large number of optical materials can be manufactured at the same time, and efficiency can be improved. 5) According to the mold manufacturing method of the fifth aspect of the present invention, since the amorphous alloy layer is formed on the surface of the mold base material, a mold having high precision and high hardness can be formed, and the durability can be improved. . 6) According to the mold manufacturing method of claim 6 of the present invention, the temperature T
By setting 1 to be in the range of Tg <T 1 <Tx, it is possible to efficiently form a high-precision indented portion without a raised portion. 7) According to the mold manufacturing method of the present invention, since the mold is manufactured in a vacuum or an inert gas atmosphere, a highly accurate mold can be formed and the durability thereof can be improved. . 8) According to the mold manufacturing method of claim 8 of the present invention, the indenter can be corrected in the case where the indented portion formed in the first pressing step is not formed in the target contour shape, and the height is increased by the second pressing step. It is possible to form the indented portion having the contour as the target of the accuracy. 9) According to the mold manufacturing apparatus of claim 9 of the present invention, it is possible to manufacture a high-precision mold formed of components satisfying the requirements of any one of claims 1 to 8. 10) According to the mold manufacturing apparatus of claim 10 of the present invention, a mold having a desired accuracy can be manufactured safely and efficiently. 11) According to the mold manufacturing apparatus of the eleventh aspect of the present invention, since the annealing means is provided, a mold having high hardness and durability can be manufactured safely. 12) In the mold manufacturing apparatus according to the twelfth aspect of the present invention, durability is improved by specifying the material of the indenter. 13) According to the mold of the thirteenth aspect of the present invention, a highly precise molded product can be manufactured with high efficiency. 14) According to the molded article of the present invention, the molded article is manufactured with high accuracy and high efficiency. 15) According to the molded product of claim 15 of the present invention, a high-precision microlens array is molded.
【図１】本発明の金型製造方法の一実施の形態を説明す
るためのフローチャート。FIG. 1 is a flowchart illustrating an embodiment of a mold manufacturing method according to the present invention.
【図２】本発明の金型製造装置の１つの実施の形態を示
す構成図。FIG. 2 is a configuration diagram showing one embodiment of a mold manufacturing apparatus according to the present invention.
【図３】本発明における***部の生じない圧子による圧
痕部の形成の状態を示す断面図。FIG. 3 is a cross-sectional view showing a state in which an indented portion is formed by an indenter having no raised portion in the present invention.
【図４】アモルファス合金のＤＳＣ曲線を示す模式図。FIG. 4 is a schematic view showing a DSC curve of an amorphous alloy.
【図５】常温における圧子による圧痕部の形成状態を示
し、***部の発生を示す断面図。FIG. 5 is a cross-sectional view showing a state in which an indentation is formed by an indenter at room temperature and showing the occurrence of a bulge.
【図６】従来の圧子による圧痕部の形成状態を示す断面
図（ａ）と、生じた***部をＣＭＰ研磨により除去した
金型母材を示す断面図（ｂ）。FIG. 6A is a cross-sectional view showing a state in which an indented portion is formed by a conventional indenter, and FIG. 6B is a cross-sectional view showing a mold base material in which a raised portion has been removed by CMP polishing.
１ 金型製造装置 ２ 金型母材 ３ 熱処理装置 ４ 圧子 ５ ＮＣテーブル ６ 環境保持手段 ７ 荷重印加装置 ８ 温度計 ９ 圧痕部 １０ ***部 DESCRIPTION OF SYMBOLS 1 Die manufacturing apparatus 2 Die base material 3 Heat treatment apparatus 4 Indenter 5 NC table 6 Environment holding means 7 Load application device 8 Thermometer 9 Indentation part 10 Ridge part
フロントページの続き Ｆターム(参考） 4F202 AH74 CA09 CB01 CD22 CK18 CN01 CN22 Continuation of the front page F term (reference) 4F202 AH74 CA09 CB01 CD22 CK18 CN01 CN22
Claims (15)
る光学素材の輪郭に見合う圧痕部を形成してなる金型の
製造方法であって、前記圧子の先端形状を前記光学素材
の輪郭とほぼ一致する形状に形成し、前記金型母材を温
度Ｔ1に一定に保持した状態で前記圧子を押圧すること
を特徴とする金型製造方法。1. A method for manufacturing a mold, comprising: pressing an indenter on the surface of a mold base material to form an indented portion corresponding to the contour of the optical material to be transferred, wherein the tip shape of the indenter is changed to the optical material. contour and is formed in a substantially matching shape, mold manufacturing method characterized by pressing the indenter while holding constant the mold base material to a temperature T 1 of the.
る光学素材の輪郭に見合う圧痕部を形成してなる金型の
製造方法であって、前記圧子の先端形状を前記光学素材
の輪郭とほぼ一致する形状に形成し、前記金型母材を温
度Ｔ1に一定に保持した状態で前記圧子を押圧すると共
に、押圧後に温度Ｔ1よりも高い温度Ｔ2で焼鈍すること
を特徴とする金型製造方法。2. A method for manufacturing a mold, comprising: forming an indented portion corresponding to the contour of an optical material to be transferred by pressing an indenter onto a surface of a mold base material, wherein the tip of the indenter is shaped into the optical material. contour and is formed in substantially the same shape, while pushing the indenter while holding constant the mold base material temperatures T 1, to annealing at a high temperature T 2 than temperature T 1 of the post-press Characteristic mold manufacturing method.
あることを特徴とする請求項１又は２に記載の金型製造
方法。3. The method according to claim 1, wherein the optical material is a microlens array.
数個形成されることを特徴とする請求項１又は２に記載
の金型製造方法。4. The mold manufacturing method according to claim 1, wherein a large number of the impression portions are formed on a single mold base material.
る表面にアモルファス合金層を形成することを特徴とす
る請求項１乃至４のいずれかに記載の金型製造方法。5. The method according to claim 1, wherein the mold base material forms an amorphous alloy layer on a surface on which the indented portion is formed.
層のガラス転移温度Ｔｇと結晶化温度Ｔｘとの間（Ｔｇ
＜Ｔ1＜Ｔｘ）にあることを特徴とする請求項５に記載
の金型製造方法。6. The temperature T 1 is between a glass transition temperature Tg and a crystallization temperature Tx of the amorphous alloy layer (Tg).
<Mold manufacturing method according to claim 5, characterized in that T 1 in <Tx).
る押圧工程と温度Ｔ2での焼鈍工程とは真空あるいは不
活性ガス雰囲気の中で行われることを特徴とする請求項
１乃至６のいずれかに記載の金型製造方法。7. The method according to claim 1, wherein the step of pressing the mold base material by the indenter at a temperature T 1 and the step of annealing at a temperature T 2 are performed in a vacuum or an inert gas atmosphere. The mold production method according to any one of the above.
前記押圧工程と焼鈍工程が終了した後、前記圧痕部の形
状と前記光学素材の目標形状との差異を検出した後、前
記圧子をその差異分に見合う分だけ修正した後、前記押
圧工程や焼鈍工程を繰返し行なうことを特徴とする請求
項１又は２に記載の金型製造方法。8. After the pressing step of the mold base material by the indenter or the pressing step and the annealing step are completed, and after detecting a difference between the shape of the indented portion and the target shape of the optical material, the indenter is removed. The method according to claim 1, wherein the pressing step and the annealing step are repeatedly performed after correcting the difference by an amount corresponding to the difference.
製造方法によって金型を製造することを特徴とする金型
製造装置。9. A die manufacturing apparatus for manufacturing a die by the die manufacturing method according to claim 1. Description:
Ｃテーブルと、前記金型母材を加温し保温し焼鈍するた
めの熱処理装置と、金型母材の表面に光学素材の輪郭形
状に見合う圧痕部を形成するための圧子と、この圧子の
荷重印加装置とを備えるものからなることを特徴とする
請求項９に記載の金型製造装置。10. N for mounting and controlling the positioning of a mold base material
A C table, a heat treatment apparatus for heating, keeping and annealing the mold base material, an indenter for forming an indented portion corresponding to the contour shape of the optical material on the surface of the mold base material, and an indenter for the indenter. The mold manufacturing apparatus according to claim 9, further comprising a load application device.
囲気内に収納するための環境保持手段が付設されること
を特徴とする請求項９又は１０に記載の金型製造装置。11. The mold manufacturing apparatus according to claim 9, further comprising an environment holding means for storing the mold base material in a vacuum or an inert gas atmosphere.
ス，超硬合金，サーメットのいずれかの材料から形成さ
れ鏡面仕上げされることを特徴とする請求項９乃至１１
のいずれかに記載の金型製造装置。12. The indenter tip transfer surface is formed of any one of ceramics, cemented carbide, and cermet, and is mirror-finished.
The mold manufacturing apparatus according to any one of the above.
型製造方法または、請求項９乃至１２のいずれかに記載
の金型製造装置によって製造されることを特徴とする金
型。13. A mold manufactured by the mold manufacturing method according to any one of claims 1 to 8 or the mold manufacturing apparatus according to any one of claims 9 to 12.
ことを特徴とする成形品。14. A molded article produced by the mold according to claim 13.
あることを特徴とする請求項１４に記載の成形品。15. The molded article according to claim 14, wherein the molded article is a micro lens array.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001136087A JP2002326230A (en) | 2001-05-07 | 2001-05-07 | Method and apparatus for manufacturing mold, and mold and molding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001136087A JP2002326230A (en) | 2001-05-07 | 2001-05-07 | Method and apparatus for manufacturing mold, and mold and molding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002326230A true JP2002326230A (en) | 2002-11-12 |
Family
ID=18983443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001136087A Pending JP2002326230A (en) | 2001-05-07 | 2001-05-07 | Method and apparatus for manufacturing mold, and mold and molding |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002326230A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005097450A1 (en) * | 2004-03-31 | 2005-10-20 | Konica Minolta Opto, Inc. | Process for producing metal mold for optical device forming |
| JP2008213348A (en) * | 2007-03-06 | 2008-09-18 | Ricoh Co Ltd | Method and device for producing fine shaped form, and die and optical element |
| JP2008542026A (en) * | 2005-05-04 | 2008-11-27 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | High force indentation machine with high accuracy |
| JP2011031406A (en) * | 2009-07-30 | 2011-02-17 | Hoya Corp | Optical element molding mold having nonreflective dust-proof structure, method for producing optical element molding mold having nonreflective dust-proof structure, optical element having nonreflective dust-proof structure, imaging device, and lens exchange-type digital camera |
| WO2018074734A1 (en) * | 2016-10-18 | 2018-04-26 | 엠피닉스 주식회사 | Method for manufacturing metal housing insert lens by using carbon-dioxide laser |
| JP2022042348A (en) * | 2020-09-02 | 2022-03-14 | 多賀電気株式会社 | Mold, intermediate mold, and mold manufacturing method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63262213A (en) * | 1987-04-21 | 1988-10-28 | Kobe Steel Ltd | Mirror surface mold for molding plastic |
| JPH05309427A (en) * | 1991-05-31 | 1993-11-22 | Takeshi Masumoto | Method for molding amorphous alloy material |
| JPH09277149A (en) * | 1996-04-15 | 1997-10-28 | Olympus Optical Co Ltd | Lens attaching tray and manufacture thereof |
| JPH09278456A (en) * | 1996-04-01 | 1997-10-28 | Olympus Optical Co Ltd | Forming die for optical element and its production as well as method for forming optical element |
| JPH11142609A (en) * | 1997-11-14 | 1999-05-28 | Nikon Corp | Production of diffusion plate and diffusion plate as well as production of microlens array and microlens array |
| JPH11248907A (en) * | 1998-03-02 | 1999-09-17 | Nikon Corp | Metal mold for molding microoptical element |
| JP2002326232A (en) * | 2001-02-28 | 2002-11-12 | Konica Corp | Mold for molding optical surface, optical element, lens and master mold |
-
2001
- 2001-05-07 JP JP2001136087A patent/JP2002326230A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63262213A (en) * | 1987-04-21 | 1988-10-28 | Kobe Steel Ltd | Mirror surface mold for molding plastic |
| JPH05309427A (en) * | 1991-05-31 | 1993-11-22 | Takeshi Masumoto | Method for molding amorphous alloy material |
| JPH09278456A (en) * | 1996-04-01 | 1997-10-28 | Olympus Optical Co Ltd | Forming die for optical element and its production as well as method for forming optical element |
| JPH09277149A (en) * | 1996-04-15 | 1997-10-28 | Olympus Optical Co Ltd | Lens attaching tray and manufacture thereof |
| JPH11142609A (en) * | 1997-11-14 | 1999-05-28 | Nikon Corp | Production of diffusion plate and diffusion plate as well as production of microlens array and microlens array |
| JPH11248907A (en) * | 1998-03-02 | 1999-09-17 | Nikon Corp | Metal mold for molding microoptical element |
| JP2002326232A (en) * | 2001-02-28 | 2002-11-12 | Konica Corp | Mold for molding optical surface, optical element, lens and master mold |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005097450A1 (en) * | 2004-03-31 | 2005-10-20 | Konica Minolta Opto, Inc. | Process for producing metal mold for optical device forming |
| JPWO2005097450A1 (en) * | 2004-03-31 | 2008-02-28 | コニカミノルタオプト株式会社 | Manufacturing method of mold for molding optical element |
| JP4525677B2 (en) * | 2004-03-31 | 2010-08-18 | コニカミノルタオプト株式会社 | Manufacturing method of mold for molding optical element |
| KR101139071B1 (en) * | 2004-03-31 | 2012-04-30 | 코니카 미놀타 옵토 인코포레이티드 | Manufacturing method of die for optical element molding |
| JP2008542026A (en) * | 2005-05-04 | 2008-11-27 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | High force indentation machine with high accuracy |
| JP2008213348A (en) * | 2007-03-06 | 2008-09-18 | Ricoh Co Ltd | Method and device for producing fine shaped form, and die and optical element |
| JP2011031406A (en) * | 2009-07-30 | 2011-02-17 | Hoya Corp | Optical element molding mold having nonreflective dust-proof structure, method for producing optical element molding mold having nonreflective dust-proof structure, optical element having nonreflective dust-proof structure, imaging device, and lens exchange-type digital camera |
| WO2018074734A1 (en) * | 2016-10-18 | 2018-04-26 | 엠피닉스 주식회사 | Method for manufacturing metal housing insert lens by using carbon-dioxide laser |
| JP2022042348A (en) * | 2020-09-02 | 2022-03-14 | 多賀電気株式会社 | Mold, intermediate mold, and mold manufacturing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3565784B2 (en) | Glass substrate molding die and glass substrate manufacturing method | |
| JP2006504609A5 (en) | ||
| JP2002326230A (en) | Method and apparatus for manufacturing mold, and mold and molding | |
| JP2577055B2 (en) | Glass mold | |
| CN1966433B (en) | Method of manufacturing lens | |
| US20040184164A1 (en) | Holder-mounted optical element | |
| JP2004287319A (en) | Method for manufacturing optical element with holder | |
| JPH0692658A (en) | Mold for molding optical element and method for molding optical element | |
| JP2000247653A (en) | Metal mold for forming optical element and optical element | |
| JP2001114523A (en) | Mold for forming optical element, method for producing mold for forming optical element and method for using mold for forming optical element | |
| JP3875306B2 (en) | Method for manufacturing mold for molding optical element and method for molding optical element | |
| JP2005162547A (en) | Optical element shaping die, optical element manufacturing apparatus and method for manufacturing optical element | |
| JP2001270724A (en) | Optical lens and metal mold for forming the same | |
| JPH0547488B2 (en) | ||
| JP3155395B2 (en) | Method and apparatus for molding optical glass element | |
| JP2785683B2 (en) | Optical lens molding machine | |
| JP2512406B2 (en) | Aspherical molded lens | |
| JPH04317427A (en) | Spherical formed lens | |
| JPS6379727A (en) | Method for forming optical element | |
| JPH0712940B2 (en) | Glass lens molding method | |
| JP3799676B2 (en) | Press forming method | |
| JP3217153B2 (en) | Optical material molding die, optical material molding method using the same, and optical material obtained thereby | |
| JPH10167738A (en) | Mold for optical glass element and forming thereof | |
| JPH08133767A (en) | Optical element forming method | |
| JPH09295817A (en) | Molding of optical element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060327 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20060330 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20080229 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20081007 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20081202 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100302 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100428 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110412 |